Agilent 4155C Semiconductor
Parameter Analyzer
Agilent 4156C Precision Semiconductor
Parameter Analyzer
Technical Data
Introduction
Basic Functions
Agilent 4155C and 4156C functions:
Set measurement and/or stress
conditions
Control measurement and/or stress
execution
Perform arithmetic calculations
Display measured and calculated
results on the LCD display
Perform graphical analysis
Store and recall measurement setups,
and measurement and graphical display
data
Dump to printers or plotters for hard-
copy output
Perform measurement and analysis
with the built-in instrument
BASIC
Self test, Auto calibration
Configuration
4155C
4xMPSMU
2xVMU
2x
VSU
41501B
GNDU
(Optional)
4156C
4xHRSMU
2xVMU
2x
VSU
2xPGU(Option)
HPSMU(Option) or
2xMPSMU (Option)
SMU: Source Monitor Unit
Display resolution: 6 digits at each current range
(0.01fA display resolution at 10pA range)
HRSMU: High Resolution SMU
(1fA/2µV to 100mA/100V)
MPSMU: Medium Power SMU
(
10fA/2µV to 100mA/100V)
HPSMU:High Power SMU
(
10fA/2µV to 100mA/200V)
VMU: Voltage Monitor Unit
(
0.2µV resolution in differential mode)
VSU: Voltage Source Unit
PGU: Pulse Generator Unit (1 channel)
GNDU: Ground Unit
*1
*1: Minimum number of installable MPSMU
*2: Accuracy not guaranteed. Minimum guaranteed
*1
resolution is 1fA at 10pA range
*2
Hardware
Specification Condition
The “supplemental” information and
“typical” entries in the following specifications are not warranted, but provide
useful information about the functions
and performance of the instruments.
The measurement and output accuracy
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal under the following
conditions:
1. 23°C ± 5°C (double between 5°C to
18°C, and 28°C to 40°C if not noted
otherwise)
2. After 40 minutes warm-up
3. Ambient temperature change less
than ± 1°C after auto calibration
execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU,
HPSMU, and GNDU)
7. Calibration period: 1 year
Agilent 4156C Precision Semiconductor Parameter Analyzer
HRSMU (High Resolution SMU) Specifications
Voltage Range, Resolution, and Accuracy (HRSMU)
Voltage
Range
± 20V
± 40V
± 100V
*1: 100mA (Vout 20V), 50mA (20V<Vout≤40V)
*2: 100mA (Vout 20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)
Set.
Reso.
1mV
5mV
Set.
Accuracy
±(0.025%+6mV)2mV
Meas.
Reso.
Current Range, Resolution, and Accuracy (HRSMU)
Current
Range
±1µA
±10µA
±100µA
±1mA
*1: The accuracy is applicable when offset
cancellation has been performed.
*2: The offset current specification is
multiplied by one of the following factors
depending upon the ambient temperature
and humidity (RH = Relative Humidity):
*3: 100V (Iout 20mA)
40V (20mA<Iout≤50mA)
20V (50mA<Iout≤100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.04%)
plus offset value (200nA+1nA×Vout) for the
1mA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout or Vout/100.
Set.
Reso.
10fA±10pA
10fA±100pA
100fA±1nA
±(0.5%+0.7pA+1fA×Vout)
1pA±10nA
10pA±100nA
100pA
1nA
10nA
100nA
±(0.5%+4pA+10fA×Vout)
±(0.12%+40pA+100fA×Vout)
±(0.12%+400pA+1pA×Vout)
±(0.07%+4nA+10pA×Vout)
±(0.07%+40nA+100pA×Vout)
±(0.06%+400nA+1nA×Vout)
±(0.06%+4µA+10nA×Vout)1µA±10mA
±(0.12%+40µA+100nA×Vout)10µA±100mΑ
5 - 60Temperature
Set.
Accuracy
RHHumidity %
60 - 80
×2×25°C to 18°C
×2×118°C to 28°C
×5×228°C to 40°C
*1*2
*1*2
Meas.
Reso.
1fA±(4%+400fA)
±(4%+20fA+1fA×Vout/100)
1fA±(4%+400fA)
*2
±(4%+40fA+10fA×Vout/100)
10fA
10fA
100fA
1pA
10pA
100pA
1nA
10nA
100nA
±(0.5%+0.4pA+1fA×Vout)
±(0.1%+20pA+100fA×Vout)
±(0.1%+200pA+1pA×Vout)
±(0.05%+2nA+10pA×Vout)
±(0.05%+20nA+100pA×Vout)
±(0.04%+200nA+1nA×Vout)
±(0.04%+2µA+10nA×Vout)
±(0.1%+20µA+100nA×Vout)
Output terminal/connection:
Dual triaxial connectors, Kelvin
(remote sensing)
HRSMU Measurement and
Output Range
Meas.
Accuracy
±(0.01%+200µV)2µV±(0.02%+400µV)100µV± 2V
±(0.01%+1mV)20µV±(0.02%+3mV)
±(0.015%+2mV)40µV
±(0.02%+5mV)100µV±(0.03%+15mV)
Meas.
Accuracy
±(0.5%+2pA+10fA×Vout)
-100
Max.
Current
100mA
100mA
*1
*2
*1*2
*1*2
*2
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to ±100V
Current: ±100fA to ±100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HRSMU Supplemental Informa-
tion :
Maximum allowable cable resistance
Max.
when using Kelvin connection (Force,
V
Sense): 10Ω
100V
Typical voltage source output
100V
resistance (Force line/non-Kelvin
100V
connection): 0.2Ω
100V
Voltage measurement input resistance/
100V
current source output resistance:
100V
100V
100V
100V
100V
*3
100
-20-40 20 4
-20
-50
-100
15
≥10
Ω (10pA range)
Current compliance setting accuracy for
opposite polarity:
10pA to 10nA range: V/I setting
accuracy ± 12% of range
100nA to 100mA range: V/I setting
accuracy ± 2.5% of range
Current (mA)
50
20
0
100
Voltage (V)
2
VSU (Voltage Source Unit)
Specifications
VSU Output Range:
Meas.
Voltage
Range
Reso.
1mV
±20V
*1: Specification is applicable under no load
current.
Max. Output Current: 100mA
±(0.05% of setting+10mV)
VSU Supplemental Information:
Output resistance: 0.2Ω
Maximum load capacitance: 10µF
Maximum slew rate: 0.2V/µs
Current limit: 120mA (typical)
Output Noise: 1mV rms (typical)
Meas.
Accuracy
(Voltage Monitor
VMU
Specifications
VMU Measurement Range,
Resolution, and Accuracy:
Voltage
*1
Range
VMU Differential Mode Range
Resolution, and Accuracy:
Diff V
Range
Max. Common Mode Voltage: ± 20V
Note: Vi is the input voltage of VMU2 in
volts.
Meas.
Reso.
Meas.
Reso.
±(0.02%+200µV)2µV±2V
±(0.02%+1mV)20µV±20V
Meas.
Accuracy
±(0.03% + 10µV+0.3µV×Vi)µV±0.2V 0.2
±(0.02%+100µV+3 µ V × Vi)2µV±2V
Unit)
Meas.
Accuracy
For example, accuracy specifications are
given as ±% of set/measured value (0.02%)
plus offset value (1mV+13µV×Vi) for the 2V
range. The differential mode offset value
consists of a fixed part determined by the
measurement range and a proportional part
that is multiplied by Vi.
VMU Supplemental Information:
Input Impedance: ≥1GΩ
Input leakage current (@0V): ≤ 500pA
(Typical)
Measurement noise: 0.01% of range
(p-p) (Typical)
Differential mode measurement noise:
0.005% of range (p-p) (Typical)
Agilent 4155C Semiconductor Parameter Analyzer
MPSMU
(Medium Power SMU) Specifications
Voltage Range, Resolution, and Accuracy (MPSMU)
Voltage
Range
± 20V
± 40V
± 100V
*1: 100mA (Vout 20V), 50mA (20V<Vout≤40V)
*2: 100mA (Vout 20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)
Set.
Reso.
1mV
2mV
5mV
Set.
Accuracy
Meas.
Reso.
±(0.02%+700µV+0.3×Iout) 2µV±(0.03%+900µV+0.3×Iout)100µV± 2V
±(0.02%+2mV+0.3×Iout)20µV±(0.03%+4mV+0.3×Iout)
±(0.02%+3mV+0.3×Iout)40µV±(0.03%+7mV)+0.3×Iout)
±(0.03%+5mV+0.3×Iout)100µV±(0.04%+15mV)+0.3×Iout)
Meas.
Accuracy
Current Range, Resolution, and Accuracy (MPSMU)
Current
Range
±1µA
±10µA
±100µA
±1mA
*1: 100V (Iout 20mA), 40V (20mA<Iout≤50mA), 20V (50mA<Iout≤100mA)
Set.
Reso.
100fA±1nA
1pA±10nA
10pA±100nA
100pA
1nA
10nA
100nA
±(0.5%+3pA+2fA×Vout)
±(0.5%+7pA+20fA×Vout)
±(0.12%+50pA+200fA×Vout)
±(0.12%+400pA+2pA×Vout)
±(0.12%+5nA+20pA×Vout)
±(0.12%+40nA+200pA×Vout)
±(0.12%+500nA+2nA×Vout)
±(0.12%+4µA+20nA×Vout)1µA±10mA
±(0.12%+50µA+200nA×Vout)10µA±100mΑ
Set.
Accuracy
Meas.
Reso.
10fA
10fA
100fA
1pA
10pA
100pA
1nA
10nA
100nA
±(0.5%+5pA+20fA×Vout)
±(0.1%+30pA+200fA×Vout)
±(0.1%+200pA+2pA×Vout)
±(0.1%+3nA+20pA×Vout)
±(0.1%+20nA+200pA×Vout)
±(0.1%+300nA+2nA×Vout)
±(0.1%+2µA+20nA×Vout)
±(0.1%+30µA+200nA×Vout)
Meas.
Accuracy
±(0.5%+3pA+2fA×Vout)
Max.
Current
100mA
100mA
*1
*2
Max.
V
100V
100V
100V
100V
100V
100V
100V
100V
*1
Output terminal/connection:
Single triaxial connector, non-Kelvin
(no remote sensing)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to ±100V
Current: ±1pA to ±100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
MPSMU Supplemental Information:
Typical voltage source output
resistance: 0.3Ω
Voltage measurement input resistance/
current source output resistance:
≥10
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy ± 12% of range
100nA to 100mA range: V/I setting
accuracy ± 2.5% of range
13
Ω (1nA range)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.1%)
plus offset value (30pA+200fA×Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
VSU Specifications
Same as 4156C VSU.
VMU
Specifications
Same as 4156C VMU.
MPSMU Measurem ent and
Output Range
-100
Current (mA)
100
50
20
-20-40 20 40
-20
-50
-100
100
Voltage (V)
3
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