Agilent 4155B Data Sheet

Semiconductor Measurement Instruments

• High-resolution/accuracy and wide range. I: 1 fA
to 1 A (20 fA offset accuracy), V: 1µV to 200 V

• Fully-automated I-V sweep measurements with
dc or pulse mode, expandable up to 6 SMUs

• Synchronized stress/measure function,
two high-voltage pulse generator units (±40 V)

• Time-domain measurement: 60µs–variable
intervals, up to 10,001 points

• Easy to use: knob-sweep similar to curve tracer,
automatic analysis functions

• Automation: built-in HP Instrument BASIC,
trigger I/O capability

HP 4155B

Whether you are looking for a low-cost bench-top instrument or an
automated test system, HP can meet your semiconductor test needs
with its Just-Enough-Test line of semiconductor measurement instru­ments. This instrument family provides versatile coverage of applica­tion needs in process development, device characterization, process
monitoring, reliability testing, failure analysis, and incoming inspection.
The low leakage switching matrix, various useful accessories, and Win­dows-based interactive characterization software allow the instruments
to be configured flexibly from a one-box solution to an integrated, auto­mated system.

Semiconductor Parameter Analyzer

Setup and Measurement

HP 4155B/56B can perform staircase and pulse sweep measurement,
and sampling (time-domain) measurement using many measurement
units, including units in the HP 41501B, without changing connections.
Moreover you can easily perform stress-measure cycling test for relia­bility evaluation such as hot carrier injection and flash EEPROM test.

Setup and measurement are made by setting up pages and filling
in the blanks from front-panel keys, keyboard, or GPIB (SCPI com­mands). You can also instantly measure and find setup conditions by
using knob sweep capability, which is similar to curve tracer operation.

519

HP 4155B
HP 4156B

HP 4155B Semiconductor Parameter Analyzer 1
HP 4156B Precision Semiconductor
Parameter Analyzer

The HP 4155B and HP 4156B are the next generation in precision semi­conductor parameter analyzers. You get the best digital sweep parameter
analyzer plus a reliability tester, powerful failure-analysis tool, and auto­mated incoming inspection station, all rolled into a single instrument.

This new family was explicitly designed to provide unprecedented
accuracy and functionality for evaluating your sub-micron geometry
devices. With one flexible instrument, you can improve your semi-con­ductor quality starting from material evaluation and device characteri­zation all the way through final packaged part inspection and field
failure analysis.

Choose the Right Solution

The HP 4155B/56B offer four built-in source/monitor units (SMUs), two
voltage source units (VSUs), and two voltage monitor units (VMUs). The
HP 4155B is best suited for basic semiconductor applications with its non­kelvin connections, 10 fA/1 µV resolution, and 100 mA/100 V measure­ment range. For critical low-level characterization, the HP 4156B extends
current resolution to 1 fA and accuracy to 20 fA. The HP 4156B utilizes
full-kelvin remote sensing on each SMU.

At any time, you can add the HP 41501B SMU and Pulse Generator
Expander, which is supplied with a 0 V/1.6 A Ground Unit. The expander
accepts two 100 mA/100 V SMUs or one 1 A/200 V SMU, and two spe­cially-synchronized 40 V/200 mA/1 µs pulse generators.

Display and Analysis

The measurement and analysis results are displayed on the color LCD,
and you can superimpose stored graphics from four graphic memories
for comparison. A number of powerful graphical analysis tools make it
easy to analyze and extract many parameters such as hFE and Vth.

Once you find the parameter extraction conditions, you can auto-

matically get the parameter by using the automatic analysis function.

Output and Storage

Setup, measurement, and analysis data can be output via GPIB, parallel
or network interface 10 Base-T LAN to a color plotter and printer. You
can also save the data onto a disk via network or 3.5-inch disk in MS­DOS or LIF format. Graphic (HP-GL, PCL or TIF) output file allows you
to transfer graphics to desktop publishing software.

Repeating and Automating Tests

The HP Instrument BASIC controller built into the HP 4155B/56B can
construct an automatic measurement system using external instru­ments without a controller. HP 4155B/56B can be synchronized with
external instruments by the versatile trigger I/O functions.

HP Semiconductor Measurement Instruments for Applications

16

Internet URL www.hp.com/go/tmc00 Product & Order Info See page 607