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hp
41501b
HP
4155B
Semiconductor Parameter Analyzer
HP
4156B
Precision Semiconductor Parameter Analyzer
Technical Data
Specifications
-
July 1997
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Page 1
Introduction
SMU: Source Monitor Unit
HRSMU: High Resolution SMU
(1fA/2
V to 100mA/100V)
MPSMU: Medium Power SMU
(10fA/2
V to 100mA/100V)
HPSMU: High Power SMU
(10fA/2
V to 1A/200V)
VMU: Voltage Monitor Unit
VSU: Voltage Source Unit
PGU: Pulse Generator Unit (1 channel)
GNDU: Ground Unit
*1: Minimum number of installable MPSMU
or PGU is two.
ì
Perform measurement and analysis
with the built
-
in HPInstrument
BASIC
ì
Self test, Auto calibration
Configuration
4xMPSMU
2xVMU
2xVSU
HP
4155B
4xHRSMU
2xVMU
2xVSU
HP
4156B
HP
41501B
(Optional)
GNDU
2xPGU(Option)
*1
HPSMU(Option) or
2xMPSMU (Option)
Basic Functions
The HP4155B and
HP
4156B functions:
ì
Set measurement and/or stress
conditions
ì
Control measurement and/or stress
execution
ì
Perform arithmetic calculations
ì
Display measured and calculated
results on the LCD display
ì
Perform graphical analysis
ì
Store and recall measurement setups,
and measurement and graphical display
data
ì
Dump to printers or plotters for hard
-
copy output
Hardware
3. Ambient temperature change less
than 1C after auto calibration
execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU,
HPSMU, and GNDU)
7. Calibration period: 1 year
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal under the following
conditions:
1. 23C 5
C (double between 5
C to 18C, and 28
C to 40
C if not noted
otherwise)
2. After 40 minutes warm
-
up
Specification Condition
The
supplemental
information and
typical
entries in the following specifi
-
cations are not warranted, but provide
useful information about the functions
and performance of the instruments.
The measurement and output accuracy
HP
4156B Precision Semiconductor Parameter Analyzer
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to
100V
HRSMU (High Resolution SMU) Specifications
Voltage Range, Resolution, and Accuracy (HRSMU)
100mA
1mV)VmV)
1mV
20V
100mA
V)VV)V2V
Max.
Current
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Voltage
Range
2
*1
Page 2
Current:
100fA to
100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HRSMU Supplemental Informa
-
tion:
Maximum allowable cable resistance
when using Kelvin connection (Force,
Sense): 10
Typical voltage source output
resistance (Force line/non
-
Kelvin
connection): 0.2
Voltage measurement input resistance/
current source output resistance:
1015(
10pA range)
Current compliance setting accuracy for
opposite polarity:
10pA to 10nA range: V/I setting
accuracy
12% of range
*2
5mV)VmV)
5mV
100V
*1
2mV)V±(0.025%+6mV)
2mV
40V
*1: 100mA (Vout
[
20V), 50mA (20V
Vout
40V)
*2: 100mA (Vout
20V), 50mA (20V
Vout
40V), 20mA (40V
Vout
100V)
Current Range, Resolution, and Accuracy (HRSMU)
A+100nA
Vout)
100nA
A+100nA
Vout)Am
100V
A+10nA
Vout)
10nA
A+10nA
Vout)A±
0mA
100V
nA+1nA
Vout)
1nA±(
0.06%+400nA+1nA
Vout)
100nA
±mA100V
nA+100pA
Vout)
100pA
±(0.07%+40nA+100pA
Vout)
10nA±A
100V
nA+10pA
Vout)
10pA±(
0.07%+4nA+10pA
Vout)
1nA±A
100V
pA+1pA
Vout)
1pA±(
0.12%+400pA+1pA
Vout)
100pA
±A100V
pA+100fA
Vout)
100fA±(
0.12%+40pA+100fA
Vout)
10pA±100nA
100V
pA+10fA
Vout)
10fA±(
0.5%+4pA+10fA
Vout)
1pA±10nA
100V
pA+1fA
Vout)*210fA±(
0.5%+0.7pA+1fA
Vout)*2100fA±1nA
100V
fA+10fA
Vout/100)
*1*2
1fA±(
4%+400fA)
*1*2
10fA±100pA
100V
fA+1fA
Vout/100)
*1*2
1fA±(
4%+400fA)
*1*2
10fA±10pA
Max.VMeas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Current
Range
100nA to 100mA range: V/I setting
accuracy
2.5% of range
Output terminal/connection:
Dual triaxial connectors, Kelvin
(remote sensing)
*1: The accuracy is applicable when offset
cancellation has been performed.
*2: The offset current specification is
multiplied by one of the following factors
Current (mA)
Voltage (V)
HRSMU Measurement and
Output Range
depending upon the ambient temperature
and humidity (RH = Relative Humidity):
28
C to 40
C18C to 28
C5C to 18
C
60 -805 -60Temperature
RH
Humidity %
*3: 100V (Iout
20mA)
40V (20mA
Iout
50mA)
20V (50mA
Iout
100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as
of set/measured value (0.04%)
plus offset value (200nA+1nA
Vout) for the
1mA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout or Vout/100.
For example, accuracy specifications are
given as
of set/measured value (0.02%)
plus offset value (1mV+13
V
Vi) for the 2V
range. The differential mode offset value
consists of a fixed part determined by the
measurement range and a proportional part
that is multiplied by Vi
.
VMU Supplemental Information:
Input Impedance:
1G
VMU (Voltage Monitor
Unit) Specifications
VMU Measurement Range,
Resolution, and Accuracy:
(
0.02%+1mV)
20V20V(0.02%+200
V)2V
2V
Meas.
Accuracy
Meas.
Reso.
Voltage
Range
VMU Differential Mode Range
VSU (Voltage Source Unit)
Specifications
VSU Output Range:
(
0.05% of setting+10mV)
1mV
20V
Meas.
Accuracy
Meas.
Reso.
Voltage
Range
*1: Specification is applicable under no load
current.
Max. Output Current: 100mA
3
[
*3
100
[
-100
50
20
-20-40 20 40
-20
-50
-100
100
Page 3
*1
Input leakage current (@0V):
500pA
(Typical)
Measurement noise: 0.01% of range
(p-p) (Typical)
Differential mode measurement noise:
0.005% of range (p
-
p) (Typical)
VMU Differential Mode Range
Resolution, and Accuracy:
(
0.02%+1mV+13
V
Vi)2V2V(
0.03%+100
V+1.3VVi)1V
0.2V
Meas.
Accuracy
Meas.
Reso.
Diff V
Range
Max. Common Mode Voltage:
20V
Note: Vi is the input voltage of VMU2 in
volts.
VSU Supplemental Information:
Output resistance: 0.2
Maximum load capacitance:
F
Maximum slew rate: 0.2V/
s
Current limit: 120mA (typical)
Output Noise: 1mV rms (typical)
HP
4155B Semiconductor Parameter Analyzer
Output terminal/connection:
Single triaxial connector, non
-
Kelvin
(no remote sensing)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to
100V
Current:
1pA to
100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
MPSMU Supplemental Informa
-
tion:
Typical voltage source output
resistance: 0.3
Voltage measurement input resistance/
current source output resistance:
1013(
1nA range)
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy
12% of range
MPSMU (Medium Power SMU) Specifications
Voltage Range, Resolution, and Accuracy (MPSMU)
*2
mV+0.3
Iout)VmV)+0.3
Iout)
5mV
100V*1mV+0.3
Iout)V±(0.03%+7mV)+0.3
Iout)
2mV
40V
100mA
mV+0.3
Iout)VmV+0.3
Iout)
1mV
20V
100mA
V+0.3
Iout)VV+0.3
Iout)V2V
Max.
Current
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Voltage
Range
*1: 100mA (Vout
[
20V), 50mA (20V
Vout
40V)
*2: 100mA (Vout
[
20V), 50mA (20V
Vout
40V), 20mA (40V
Vout
100V)
Current Range, Resolution, and Accuracy (MPSMU)
A+200nA
Vout)
100nA
A+200nA
Vout)Am
100V
A+20nA
Vout)
10nA
A+20nA
Vout)A±
0mA
100V
nA+2nA
Vout)
1nA±(
0.12%+500nA+2nA
Vout)
100nA
±mA100V
nA+200pA
Vout)
100pA
±(0.12%+40nA+200pA
Vout)
10nA±A
100V
nA+20pA
Vout)
10pA±(
0.12%+5nA+20pA
Vout)
1nA±A
100V
pA+2pA
Vout)
1pA±(
0.12%+400pA+2pA
Vout)
100pA
±A100V
pA+200fA
Vout)
100fA±(
0.12%+50pA+200fA
Vout)
10pA±100nA
100V
pA+20fA
Vout)
10fA±(
0.5%+7pA+20fA
Vout)
1pA±10nA
100V
pA+2fA
Vout)
10fA±(
0.5%+3pA+2fA
Vout)
100fA±1nA
Max.VMeas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Current
Range
*1: 100V (Iout
[
20mA), 40V (20mA
Iout
50mA), 20V (50mA
Iout
100mA)
100nA to 100mA range: V/I setting
accuracy
2.5% of range
Current (mA)
Voltage (V)
MPSMU Measurement and
Output Range
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as
of set/measured value (0.1%)
plus offset value (30pA+200fA
Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
VSU Specifications
Same as
HP
4156B VSU.
VMU Specifications
Same as
HP
4156B VMU.
4
*1
100
50
-100
20
-20-40 20 40
-20
-50
-100
100
Page 4
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