Keithley 4200-SCS User Manual
User Manual
4200-900-01 Rev. K / February 2017
*P4200-900-01K*
4200-900-01K
www.tek.com/keithley
Model 4200-SCS
Semiconductor Characterization System
Model 4200-SCS
Semiconductor Characterization System
User’s Manual
KTE Interactive Version 9.1SP2
©2000-2017, Keithley Instruments
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in
part, without the prior written approval of Keithley Instruments. is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments. Other brand names are trademarks or registered trademarks of their respective
holders.
Document Number:
4200-900-01 Rev. K / February 2017
Safety Precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although some
instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may
be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.
They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or
replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service
personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement
Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient
over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise
marked or described in the user documentation.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak,
or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power
disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.
are
The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of the
!
equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information,
and as shown on the instrument or test fixture panels, or switching card.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid
interlock.
If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of danger. The user should refer to the operating instructions located in the user
documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means caution, risk of danger. Use standard safety precautions to avoid personal contact with these
voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the
warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer, test leads,
and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if
the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they
are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to ma
accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments
office for information.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the
board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.
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Model 4200-SCS User’s Manual Table of Contents
Table of Contents
Section Topic Page
1 Getting Started............................................................................................ 1-1
Installation and system connections ............................................................... 1-3
Unpacking the Model 4200-SCS .............................................................. 1-3
Shipment contents.................................................................................... 1-3
Environmental considerations................................................................... 1-4
Powering up the 4200-SCS ...................................................................... 1-5
System connections.................................................................................. 1-6
Model 4200-SCS Hardware Overview .......................................................... 1-10
DC source-measure unit (SMU) ............................................................. 1-10
DC preamp ............................................................................................. 1-14
Multi-frequency capacitance / voltage unit (CVU) ......................................... 1-16
Model 4210-CVU card ............................................................................ 1-16
Force-measure timing............................................................................. 1-20
Pulse cards ................................................................................................... 1-20
About the pulse cards............................................................................. 1-21
Firmware upgrade for the 4200-PG2...................................................... 1-22
Standard pulse........................................................................................ 1-22
Segment ARB waveform ........................................................................ 1-23
Remote bias tee (RBT) and 3-port power divider ................................... 1-26
SCP2 (Oscilloscope)............................................................................... 1-28
Ground unit (GNDU) ............................................................................... 1-32
Basic circuit configurations ..................................................................... 1-32
Ground unit terminals and connectors.................................................... 1-34
Connecting DUTs .......................................................................................... 1-36
Test fixtures............................................................................................. 1-36
Probers ................................................................................................... 1-37
Advanced connections............................................................................ 1-37
How to run a basic test.................................................................................. 1-38
Boot the system and log in ..................................................................... 1-38
Open KITE.............................................................................................. 1-38
Locate and run the vds-id test module.................................................... 1-40
Test definition.......................................................................................... 1-41
Run vds-id test........................................................................................ 1-42
View and save the sheet data................................................................. 1-42
View and save the graph data ................................................................1-43
Firmware upgrade ......................................................................................... 1-45
Accessing the release notes ......................................................................... 1-46
2 Model 4200-SCS Software Environment .............................................. 2-1
Understanding KITE ........................................................................................ 2-3
KITE project structure ..................................................................................... 2-3
KITE interface........................................................................................... 2-3
Project navigator....................................................................................... 2-5
Project defined.......................................................................................... 2-7
Project components.................................................................................. 2-7
ITMs versus UTMs .......................................................................................... 2-8
Defining an ITM ........................................................................................ 2-9
Defining a UTM....................................................................................... 2-10
Using the UTM GUI view ........................................................................ 2-11
How to create your own ITMs ....................................................................... 2-13
Understanding the ITM definition tab...................................................... 2-13
Understanding the ITM forcing functions................................................ 2-13
Understanding dual sweep ..................................................................... 2-15
Understanding pulse mode ..................................................................... 2-16
How to use the definition tab to configure ITM parameters .................... 2-17
Basic test execution ...................................................................................... 2-21
4200-900-01 Rev. K / February 2017 i
Table of Contents Model 4200-SCS User’s Manual
Project navigator check boxes................................................................2-21
Executing an individual test .................................................................... 2-23
How to display and manage test results ....................................................... 2-24
Data file management............................................................................. 2-24
How to manage numeric test results in Sheet tab .................................. 2-32
How to manage graphical test results in the Graph tab.......................... 2-38
KITE library management ............................................................................. 2-45
Submitting devices, ITMs, and UTMs to libraries ................................... 2-45
Submitting tests to a library .................................................................... 2-48
3 Common Device Characterization Tests.............................................. 3-1
How to perform an I-V test on my device ........................................................ 3-4
Default project overview ........................................................................... 3-4
How to perform a C-V test on my device ...................................................... 3-13
KITE ITM configuration........................................................................... 3-13
Definition tab........................................................................................... 3-13
Forcing functions and measure options.................................................. 3-16
Selecting the forcing function ................................................................. 3-16
CVU ITM examples ................................................................................ 3-21
CVU Voltage Sweep ............................................................................... 3-22
CVU Voltage List Sweep......................................................................... 3-23
CVU Frequency Sweep (bias) ................................................................3-24
CVU Frequency Sweep (step)................................................................3-26
How to perform a Pulsed I-V test on my device............................................ 3-27
Introduction (PIV-A and PIV-Q)............................................................... 3-27
Pulse IV for CMOS: 4200-PIV-A............................................................. 3-29
4200-PIV-A test connections .................................................................. 3-30
Using the PulseIV-Complete project for the first time ............................. 3-38
Pulse IV UTM descriptions ..................................................................... 3-49
cal_pulseiv.............................................................................................. 3-50
vdsid_pulseiv .......................................................................................... 3-51
VdId_Pulse_DC_Family_pulseiv ............................................................ 3-53
vgsid_pulseiv .......................................................................................... 3-57
VgId_DC_Pulse_pulseiv......................................................................... 3-59
scopeshot_cal_pulseiv ........................................................................... 3-63
scopeshot_pulseiv .................................................................................. 3-64
vdsid_pulseiv_demo ............................................................................... 3-66
vgsid_pulseiv_demo ............................................................................... 3-66
scopeshot_pulseiv_demo ....................................................................... 3-66
How to perform a Quiescent-point Pulsed I-V test (PIV-Q) on my device..... 3-66
Q-Point Pulse IV – Model 4200-PIV-Q ................................................... 3-66
What is the PIV-Q package..................................................................... 3-67
How to perform reliability (stress-measure) tests on my device.................... 3-68
Connecting devices for stress / measure cycling.................................... 3-68
Overview of the cycling-related tabs....................................................... 3-69
Configuring subsite cycling
Configuring device stress properties ...................................................... 3-74
How to perform AC stress for wafer level reliability (WLR) ........................... 3-78
Segment Stress / Measure Mode ........................................................... 3-85
Segment ARB stressing ......................................................................... 3-86
Segment Stress / Measure Mode configuration...................................... 3-87
Executing subsite cycling ....................................................................... 3-91
Subsite cycling data sheets .................................................................... 3-91
Subsite cycling graphs............................................................................ 3-96
Configuration sequence for subsite cycling ............................................ 3-98
How to perform a flash memory test on my device..................................... 3-100
Introduction........................................................................................... 3-100
Theory of operation .............................................................................. 3-100
Flash connections................................................................................. 3-115
Direct connection to single DUT ........................................................... 3-120
Direct connection to array DUT for disturb testing................................ 3-121
Switch matrix connection to array DUT ................................................ 3-122
Memory projects ................................................................................... 3-124
NVM_examples .................................................................................... 3-126
Flash-NAND tests ................................................................................. 3-126
..................................................................... 3-69
ii 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Table of Contents
Flash-NOR tests ................................................................................... 3-130
Flash-switch tests ................................................................................. 3-130
Running any Flash Project for the first time.......................................... 3-133
Running the Flash-NAND, Flash-NOR or Flash-Switch Project ........... 3-133
Running the Program or Erase UTM .................................................... 3-134
Running the Fast-Program-Erase UTM................................................ 3-136
Running the SetupDC UTM .................................................................. 3-137
Running the Vt-MaxGm ITM ................................................................. 3-137
Running the ConPin-Pulse or ConPin-DC UTM (Switch projects only) 3-138
FlashEndurance-NAND tests................................................................3-139
Running a FlashEndurance or FlashDisturb project ............................. 3-146
Running endurance or disturb looping.................................................. 3-148
FlashDisturb tests ................................................................................. 3-149
Explanation of flash UTM parameters .................................................. 3-151
Error codes ........................................................................................... 3-153
Troubleshooting.................................................................................... 3-154
How to perform Charge Pumping................................................................3-155
How to perform a Charge Trapping test...................................................... 3-156
Slow single pulse charge trapping high K gate stack ........................... 3-156
Charge trapping procedure................................................................... 3-157
4 How to Control Other Instruments with the Model 4200-SCS......... 4-1
How to control external equipment.................................................................. 4-2
Controlling external equipment overview.................................................. 4-2
Keithley Configuration Utility (KCON) ............................................................. 4-5
How to control a switch matrix ........................................................................ 4-7
KCON setup.............................................................................................. 4-9
Open KITE and the ivswitch project........................................................ 4-11
Running test sequences ......................................................................... 4-12
The connect test ..................................................................................... 4-14
How to control a probe station ...................................................................... 4-15
Prober control overview.......................................................................... 4-16
Test system connections......................................................................... 4-18
KCON setup............................................................................................ 4-19
Probe station configuration ..................................................................... 4-21
Open the probesubsites project.............................................................. 4-21
Open the project plan window ................................................................4-22
Test descriptions..................................................................................... 4-22
Running the test sequence ..................................................................... 4-25
Test data ................................................................................................. 4-26
Running individual plans or tests ............................................................ 4-27
How to control an external pulse generator .................................................. 4-27
Test system connections......................................................................... 4-28
KCON setup............................................................................................ 4-28
Open the ivpgswitch project.................................................................... 4-31
Description of tests ................................................................................. 4-32
First id-vg test ......................................................................................... 4-32
pgu-trigger test........................................................................................ 4-34
Compare the test results......................................................................... 4-35
How to control an external CV analyzer........................................................ 4-37
Connections............................................................................................ 4-38
KCON setup............................................................................................ 4-38
Create a new project............................................................................... 4-39
Add a subsite plan .................................................................................. 4-40
Add a device plan ................................................................................... 4-41
Add a UTM.............................................................................................. 4-42
Modifying the cvsweep UTM................................................................... 4-43
Executing the test ................................................................................... 4-43
What if my equipment is not listed in KCON ................................................. 4-44
5 How to Generate Basic Pulses ............................................................... 5-1
KPulse: Getting started............................................................................. 5-2
Triggering .................................................................................................. 5-3
Standard pulse waveforms ....................................................................... 5-4
Segment ARB waveforms......................................................................... 5-6
4200-900-01 Rev. K / February 2017 iii
Table of Contents Model 4200-SCS User’s Manual
Custom file arb waveforms (full-arb)......................................................... 5-8
Index .............................................................................................................................. I-1
iv 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
Section 1
Getting Started
In this section:
Topic Page
Installation and system connections . . . . . . . . . . . . . . . . 1-3
Unpacking the Model 4200-SCS . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Inspection for damage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Shipment contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Repacking for shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Environmental considerations . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Shipping and storage environment . . . . . . . . . . . . . . . . . . . .1-4
Operating environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Powering up the 4200-SCS . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Line power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Line power connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Line frequency setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Warm-up period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
System connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
Connecting the keyboard and mouse . . . . . . . . . . . . . . . . . . .1-7
Connecting GPIB instruments . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Connecting a probe station . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
Connecting a printer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Connecting a LAN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Model 4200-SCS Hardware Overview . . . . . . . . . . . . . . . . 1-11
DC source-measure unit (SMU) . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Models 4200-SMU and 4210-SMU overview . . . . . . . . . . . . . .1-13
Basic characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Basic SMU circuit configuration . . . . . . . . . . . . . . . . . . . . . . .1-14
SMU terminals and connectors . . . . . . . . . . . . . . . . . . . . . . . .1-16
SMU with Model 4200-PA overview . . . . . . . . . . . . . . . . . . . . .1-17
Basic characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
Basic SMU/preamp circuit configuration . . . . . . . . . . . . . . . .1-18
DC preamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-19
PreAmp terminals and connectors . . . . . . . . . . . . . . . . . . . . .1-19
FORCE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-20
SENSE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-21
PreAmp CONTROL connector . . . . . . . . . . . . . . . . . . . . . . . . .1-21
Multi-frequency capacitance / voltage unit (CVU) . . . . . . . 1-21
Model 4210-CVU card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-21
Measurement overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-21
Measurement functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-22
Test signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-23
DC bias function and sweep characteristics . . . . . . . . . . . . .1-23
Force-measure timing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-24
Bias function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-24
Sweep function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-25
Pulse cards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
About the pulse cards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-26
Firmware upgrade for the Model 4200-PG2 . . . . . . . . . . . . . . . .1-27
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-1
Section 1: Getting Started Model 4200-SCS User’s Manual
Standard pulse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
Segment ARB waveform . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
Full arb . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29
Pulse card settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
Remote bias tee (RBT) and 3-port power divider . . . . . . . . . . 1-30
RBT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
3-port power divider . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31
Using an RBT and power divider . . . . . . . . . . . . . . . . . . . . . . 1-31
SCP2 (Oscilloscope) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-32
Digital storage oscilloscope card . . . . . . . . . . . . . . . . . . . . . 1-32
Scope card settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33
Ground unit (GNDU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-36
Basic characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-36
Basic circuit configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-37
Ground unit connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-37
Ground unit DUT connections . . . . . . . . . . . . . . . . . . . . . . . . 1-38
Ground unit terminals and connectors . . . . . . . . . . . . . . . . . . 1-39
FORCE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-39
SENSE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-39
COMMON terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-40
Chassis ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-40
Connecting DUTs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-40
Test fixtures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-40
Testing with less than ±20 V . . . . . . . . . . . . . . . . . . . . . . . . . . 1-41
Testing with more than ±20 V . . . . . . . . . . . . . . . . . . . . . . . . . 1-41
Probers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-42
Advanced connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-42
How to run a basic test . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-42
Boot the system and log in . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-42
Open KITE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-43
Locate and run the vds-id test module . . . . . . . . . . . . . . . . . . . 1-44
Test definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-45
Run vds-id test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-46
View and save the sheet data . . . . . . . . . . . . . . . . . . . . . . . . . . 1-46
View and save the graph data . . . . . . . . . . . . . . . . . . . . . . . . . . 1-47
Firmware upgrade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-49
Accessing the release notes . . . . . . . . . . . . . . . . . . . . . . . . 1-50
1-2 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
Section 1
Getting Started
Installation and system connections
Unpacking the Model 4200-SCS
Inspection for damage
After unpacking the Keithley Instruments Model 4200 Semiconductor Characterization System
(SCS), carefully inspect the unit for any shipping damage. Report any damage to the shipping
agent, because such damage is not covered by the warranty.
Shipment contents
The following items are included with the 4200-SCS:
• 4200-SCS with any ordered source-measure units (SMUs) factory-installed.
• Ordered 4200-PA modules factory-installed.
• Ordered 4220-PGU pulse generator cards factory-installed.
• Ordered 4225-PMU pulse/measure cards factory-installed.
• Ordered 4225-RPM remote pulse (and switch) modules.
• Ordered pulse application packages.
• Cables, connectors, adapters and other accessories that are supplied with the pulse
generator, scope, and pulse application packages.
• Line cord.
• Miniature triaxial cables, two per 4200-SMU or 4210-SMU, 2 m (6 ft). These are not
included when the SMU is ordered with with a 4200-PA.
• Triaxial cables, two per 4200-PA, 2 m (6 ft).
• Interlock cable.
• Keyboard with integrated pointing device.
• System software and manuals on CD-ROM.
•Microsoft
• Ordered 4200-Compiler factory-installed.
®
Windows®.
Manuals
All 4200 manuals are provided on a CD-ROM and are preinstalled on the hard drive. Because the
manuals are provided in PDF format, they can be printed from any computer that is connected to a
printer by using Adobe
®
Reader®.
Repacking for shipment
Should it become necessary to return the 4200-SCS for repair, carefully pack the entire unit in its
original packing carton or the equivalent, and follow these instructions:
• Call Keithley Instruments’ repair department at 1-800-935-5595 for a Return Material
Authorization (RMA) number.
• Let the repair department know the warranty status of the 4200-SCS.
• Write ATTENTION REPAIR DEPARTMENT and the RMA number on the shipping label.
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-3
Section 1: Getting Started Model 4200-SCS User’s Manual
Environmental considerations
Shipping and storage environment
To avoid possible damage or deterioration, the 4200-SCS should be shipped and stored within the
following environmental limits:
• Temperature: -10 °C to +60 °C
• Relative humidity: 5 % to 90 %, non-condensing
Operating environment
Temperature and humidity
The 4200-SCS should be operated within the following environmental limits:
• Temperature: +15 °C to +40 °C
• Relative humidity: 5 % to 80 %, non-condensing
NOTE SMU and preamp accuracy specifications are based on operation at 23 °C ±5 °C and
between 5 % and 60 % relative humidity. See the product specifications for additional
temperature and humidity derating factors outside these ranges.
Proper ventilation
To avoid overheating, the 4200-SCS should be operated in an area with proper ventilation. Allow
at least eight inches of clearance at the back of the mainframe to assure sufficient airflow.
CAUTION To prevent damaging temperatures and other harmful environmental
conditions that could degrade specified performance, follow these
precautions:
• Keep the venting holes and fan free of dust, dirt, and contaminants, so that
the unit’s ability to dissipate heat is not impaired.
• Keep the fan vents and cooling vents from becoming blocked.
• Do not position any devices that force air (heated or unheated) adjacent to
the unit into cooling vents. This additional airflow could compromise
accuracy performance.
• When rack mounting the unit, make sure there is adequate airflow around
the sides, bottom, and back to ensure proper cooling.
• Rack mounting high-power dissipation equipment adjacent to the Model
4200-SCS could cause excessive heating to occur.
• To ensure proper cooling in rack situations with convection cooling only,
place the hottest equipment (the, power supply) at the top of the rack.
Precision equipment, such as the 4200-SCS, should be placed as low as
possible in the rack where temperatures are the coolest.
• Add spacer panels below the unit will help ensure adequate airflow.
1-4 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
CAUTION A large system (for example, multiple SMUs, multiple pulse generators,
and a scope) draws more power than a small system, causing the internal
power supply to generate more heat. Because of this, it is imperative that
systems of any size have proper ventilation. Even a small system with
inadequate ventilation can be damaged by excess heat.
Cleanliness
To avoid internal dirt buildup that could degrade performance and affect longevity, the
4200-SCS should be operated in a clean, dust-free environment.
Powering up the 4200-SCS
The following information covers power requirements for the 4200-SCS power connections,
power-up characteristics, and warm-up requirements.
Line power
The 4200-SCS operates from a line voltage in the range of 100 V to 240 V at a frequency of 50 Hz
or 60 Hz. Line voltage is automatically sensed, but line frequency is not (For more information see
the Reference Manual, Line frequency setting, page 2-16. Check to ensure the operating voltage
in your area is compatible.
CAUTION Operating the instrument on an incorrect line voltage may cause damage,
possibly voiding the warranty.
NOTE To avoid possible problems caused by electrical transients or line voltage
fluctuations, the 4200-SCS should be operated from a dedicated power source.
Line power connection
To connect the unit to line power and turn it on:
1. Before plugging in the power cord, make sure the front panel power switch is in the off
position.
2. Connect the female end of the supplied power cord to the AC receptacle on the rear panel
(see Figure 1-1).
WARNING The large diameter line cord (supplied) must be used to power the 4200-SCS.
Do not use a different line cord. Using a different line cord may result in
personal injury or death due to electric shock.
3. Connect the other end of the supplied line cord to a grounded AC line power receptacle.
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-5
Section 1: Getting Started Model 4200-SCS User’s Manual
Power
Receptacle
Line
Fuses
(2)
WARNING The power cord supplied with the unit contains a separate grou nd for use with
grounded outlets. When proper connections are made, the in strument chassis
is connected to power line ground through the ground wire in the power c ord.
Failure to use a grounded outlet may result in personal injury or death due to
electric shock.
Figure 1-1
Line power receptacle and line fuses location
Line frequency setting
The 4200-SCS can be operated either from 50 Hz or 60 Hz power line sources, but it does not
automatically sense the power line frequency when it is powered up. You can change the line
frequency setting using the KCON utility. See the Reference Manual, Keithley CONfiguration Utility
(KCON), page 7-1 for details.
NOTE Operating the 4200-SCS with the wrong line frequency setting may result in noisy
readings because the line frequency setting affects SMU line freque ncy noise
rejection.
Warm-up period
The 4200-SCS can be used immediately after being turned on. However, the unit should be
allowed to warm up for at least 30 minutes to achieve rated measurement accuracy.
System connections
Connecting the keyboard and mouse
The keyboard is connected to the 4200-SCS with a USB, and can be plugged into any of the four
USB ports (two in front and two in back; see Figure 1-3). The keyboard is shown in
Figure 1-2. To ensure proper operation, make sure the keyboard is connected to one of the four
USB ports prior to power up. Figure 1-3 shows the keyboard connections to the rear panel of the
4200-SCS.
1-6 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
Figure 1-2
Model 4200-SCS keyboard
To use an optional mouse, connect a USB mouse into any of the four 4200-SCS USB ports.
Figure 1-3
Keyboard connections
Connecting GPIB instruments
The 4200-SCS can control one or more external instruments by way of the IEEE-488 General
Purpose Instrument Bus (GPIB). Instruments typically used in a test system with the 4200-SCS
include a switch matrix and a C-V meter. Figure 1-4 shows how to connect GPIB instruments to
the 4200-SCS.
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-7
Section 1: Getting Started Model 4200-SCS User’s Manual
GPIB Connector
GPIB Instrument GPIB Instrument
7007
GPIB Cable
7007 GPIB Cable
Model 4200-SCS
INSTRUMENT
CONNECTIONS
SMU ONLY
SMU AND GNDU
GNDU
COM 1
LPT 1
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
SENSE LO
GUARD
SENSE LO
COMMON
COMMON
FORCE
SENSE
GUARD
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
4200
TM
INTLK
IN
OUT
KEITHLEY
Channel 2
Channel 1
Trigger
Out
Channel 1
Channel 2
Ext
Trg
Ext
Clk
PG2
SCP2HR
Trigger
In
CVU
HCUR
LPOT
HPOT
LCUR
KEITHLEY
INSTRUMENTS
SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT
1
4200
KEITHLEY
4200
KEITHLEY
4210
KEITHLEY
4210
KEITHLEY
KEITHLEY
KEITHLEY
4205
4200
4200
KEITHLEY
28775 AURORA RD.
CLEVELAND, OH 44139
MADE IN
USA
Probe Station
Shielded Serial Cable
RS-232 Connector
RS-232 Connector
INSTRUMENT
CONNECTIONS
SMU ONLY
SMU AND GNDU
GNDU
COM 1
LPT 1
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
SENSE LO
GUARD
SENSE LO
COMMON
COMMON
FORCE
SENSE
GUARD
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
4200
TM
INTLK
IN
OUT
KEITHLEY
Channel 2
Channel 1
Trigger
Out
Channel 1
Channel 2
Ext
Trg
Ext
Clk
PG2
SCP2HR
Trigger
In
CVU
HCUR
LPOT
HPOT
LCUR
KEITHLEY
INSTRUMENTS
SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT
1
4200
KEITHLEY
4200
KEITHLEY
4210
KEITHLEY
4210
KEITHLEY
KEITHLEY
KEITHLEY
4205
4200
4200
KEITHLEY
28775 AURORA RD.
CLEVELAND, OH 44139
MADE IN
USA
Model 4200-SCS
Figure 1-4
GPIB instrument connections
Connecting a probe station
A probe station can be controlled through the RS-232 interface connected to the 4200-SCS, as
shown in Figure 1-5.
Figure 1-5
Probe station connections
1-8 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
LAN Junction
Box or Hub
CAT 5 UTP Cable
LAN Connectors
Model 4200-SCS
INSTRUMENT
CONNECTIONS
SMU ONLY
SMU AND GNDU
GNDU
COM 1
LPT 1
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
SENSE LO
GUARD
SENSE LO
COMMON
COMMON
FORCE
SENSE
GUARD
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
4200
TM
INTLK
IN
OUT
KEITHLEY
Channel 2
Channel 1
Trigger
Out
Channel 1
Channel 2
Ext
Trg
Ext
Clk
PG2
SCP2HR
Trigger
In
CVU
HCUR
LPOT
HPOT
LCUR
KEITHLEY
INSTRUMENTS
SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT
1
4200
KEITHLEY
4200
KEITHLEY
4210
KEITHLEY
4210
KEITHLEY
KEITHLEY
KEITHLEY
4205
4200
4200
KEITHLEY
28775 AURORA RD.
CLEVELAND, OH 44139
MADE IN
USA
Connecting a printer
As shown in Figure 1-6, you can connect a printer to one of the v2.0 USB connectors.
Figure 1-6
Printer connections
Connecting a LAN
The two LAN connectors on the 4200-SCS are standard RJ-45 connectors intended for use with
unshielded twisted pair (UTP) cable. For best results, use only CAT 5 UTP cables equipped with
RJ-45 connectors to connect your LANs, as shown in Figure 1-7. If IP addresses are statically
assigned, a different IP address will be needed for each of the two LAN ports.
Figure 1-7
LAN connections
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-9
Section 1: Getting Started Model 4200-SCS User’s Manual
Model 4200-SCS Hardware Overview
DC source-measure unit (SMU)
This section provides detailed information about several 4200-SCS hardware components, and is
arranged as follows:
• Models 4200-SMU and 4210-SMU overview: Discusses 4200-SMU and 4210-SMU basic
source and measure characteristics, basic circuit configurations, operating boundaries, and
connectors.
• SMU with Model 4200-PA overview: Describes how the 4200-PA extends 4200-SMU and
4210-SMU dynamic range, and covers source and measure characteristics, basic circuit
configurations, operating boundaries, connectors, and mounting methods.
• Ground unit (GNDU): Provides basic information about using the ground unit, including
basic characteristics and connectors.
Models 4200-SMU and 4210-SMU overview
The following paragraphs discuss the basic characteristics of the 4200-SMU and 4210-SMU.
Basic SMU circuit configuration
The basic SMU circuit configuration is shown in Figure 1-8. The SMU operates as a voltage or
current source (depending on source function) in series with an I-Meter, and connected in parallel
with a V-Meter. The voltage limit (V-limit) and current limit (I-limit) circuits limit the voltage or
current to the programmed compliance value. In this local sensing example, the SMU FORCE
terminal is connected to device-under test (DUT) HI, while the DUT LO is connected to COMMON.
See the Reference Manual, Connections and Configuration, page 4-1, and Reference Manual,
Source-Measure Concepts, page 5-1, for details.
1-10 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
FORCE
SENSE
COMMON
V-Source I-Source
4200-SMU or 4210-SMU
4200-SMU or 4210-SMU
I-Measure
VI
Source
Control
I-Limit
(Compliance)
V-Limit
(Compliance)
GUARD
100kΩ
100kΩ
Auto Sense
Resistors
SENSE
FORCE
Ground Unit
50kΩ
COMMONCHASSIS
32V
max
Removable
Ground Link
A
DUT
V-MEASURE
V
SENSE LO
GUARD
SENSE
LO
Figure 1-8
Basic SMU source-measure configuration
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-11
Section 1: Getting Started Model 4200-SCS User’s Manual
INSTRUMENT
CONNECTIONS
SMU ONLY
SMU AND GNDU
SENSE LO
GUARD
SENSE LO
COMMON
COMMON
FORCE
SENSE
GUARD
4210
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
KEITHLEY
PreAmp
Control
Connector
SENSE LO
Force
and
Sense
Connectors
SMU terminals and connectors
The locations and configuration of the 4200-SMU and 4210-SMU terminals are shown in Figure
1-9. Basic information about these terminals is summarized below. Refer to the Reference Manual,
Connections and Configuration, page 4-1, for additional information regarding SMU signal
connections.
WARNING Asserting the interlock will allow the SMU and preamp terminals to become
hazardous, exposing the user to possible electrical shock that could result in
personal injury or death. SMU and preamp terminals should be considered
hazardous even if the outputs are prog rammed to be low v oltage. Pre cautions
must be taken to prevent a shock hazard by surrounding the test device and
any unprotected leads (wiring) with double insulation for 250 V, Category I.
CAUTION The maximum allowed voltage between COMMON and chassis ground is
±32 V DC.
Figure 1-9
Models 4200-SMU and 4210-SMU connectors
FORCE terminal
The FORCE terminal is a miniature triaxial connector used to apply the SMU FORCE signal to the
DUT when a preamp is not being used.
1-12 Return to Section Topics 4200-900-01 Rev. K / February 2017
• The center pin is FORCE
• The inner shield is GUARD
• The outer shield is circuit COMMON
Model 4200-SCS User’s Manual Section 1: Getting Started
SENSE terminal
The SENSE terminal is a miniature triaxial connector used to apply the SMU SENSE signal to the
DUT in a remote sense application when the preamp is not being used.
• The center pin is SENSE
• The inner shield is GUARD
• The outer shield is circuit COMMON
Nominal internal auto-sense resistance appears between SENSE and FORCE.
NOTE The SENSE terminal does not need to be connected to the DUT for the SMU to
operate correctly. Remote sensing is automatic. If SENSE is connected to the DUT,
errors due to voltage drops in the FORCE path between the SMU and the DUT will be
eliminated; and, the SMU will sense locally.
SENSE LO terminal
The SENSE LO terminal is a miniature triaxial connector used to apply the SMU SENSE LO signal
to the DUT in a full-Kelvin remote sense application.
• The center pin is SENSE LO
• The inner shield is SENSE GUARD
• The outer shield is circuit COMMON
Nominal internal auto-sense resistance appears between SENSE LO GUARD and COMMON.
NOTE The remote sense capability of the ground unit should be used instead of the SENSE
LO of a SMU. If you need to use the SENSE LO terminal of a SMU, the SENSE LO
terminals of all SMUs being used in that 4200-SCS should be connected to the DUT.
PA CNTRL connector
The PA CNTRL (preamp control) terminal is a 15-pin D connector that provides both power and
signal connections to the 4200-PA remote preamp. The preamp can either be mounted and
connected directly to the SMU, or it can be connected to the SMU using a cable (4200-RPC-X)
when mounted remotely. Refer to SMU with Model 4200-PA overview for more information about
the preamp.
SMU with Model 4200-PA overview
Basic SMU/preamp circuit configuration is shown in Figure 1-10. This configuration is similar to the
SMU configuration discussed earlier, exception the preamp, which adds low-current
source-measure capabilities.
NOTE The preamp FORCE terminal is connected to DUT HI, while DUT LO is connected to
COMMON.
See the Reference Manual, Basic source-measure connections, page 4-3, and Reference Manual,
Source-Measure Concepts, page 5-1, for more source-measure details.
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-13
Section 1: Getting Started Model 4200-SCS User’s Manual
4200-SMU
or
4210-SMU
FORCE
SENSE
SENSE
GUARD
GUARD
DUT
FORCE
PreAmp
Control
PreAmplifier
SENSE LO
SENSE
FORCE
Ground
Unit
4200-PA
Figure 1-10
Basic SMU/preamp source-measure configuration
DC preamp
PreAmp terminals and connectors
The locations and configuration of the 4200-PA terminals are shown in Figure 1-11. Basic
information about these terminals is summarized below. For additional information about making
preamp signal connections, refer to the Reference Manual, Basic source-measure connections,
page 4-3.
WARNING The preamp terminals can carry expo sed hazardous vo ltages that c ould result
in personal injury or death if the safety interlock is asserted. See the
Reference Manual, Control and data connections, page 4-20, for additional
information about safety interlock connections.
1-14 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
4200-PA-1 REMOTE P
SENSE
FORCE
P
A
RE
MP
CONT
ROL
PreAmp
Control
Connector
Mounting
Foot
COMMON
FORCESENSE
GUARD
250V
PEAK
42V
PEAK
250V
PEAK
250V
PEAK
40V
PEAK
40V
PEAK
WARNING: NO INTERNAL OPERATOR SERVICEABLE
PARTS SERVICE BY QUALIFIED
PERSONNEL ONLY.
PREAMP
CONTROL
CAT I
A
RE
MP
!
MADE IN
U.S.A.
CAUTION The maximum allowed voltages between the preamp signals are:
• COMMON to chassis ground: 32 V peak
• GUARD to COMMON: 250 V peak
• SENSE or FORCE to GUARD: 40 V peak
FORCE terminal
The FORCE terminal is a standard triaxial connector used to apply the preamp FORCE signal to
the DUT.
• The center pin is FORCE
• The inner shield is GUARD
• The outer shield is circuit COMMON
Figure 1-11
Model 4200-PA connectors
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-15
Section 1: Getting Started Model 4200-SCS User’s Manual
SENSE terminal
The SENSE terminal is a standard triaxial connector used to apply the preamp SENSE signal to
the DUT in a remote sense application.
• The center pin is SENSE
• The inner shield is GUARD
• The outer shield is circuit COMMON
Nominal internal auto-sense resistance appears between SENSE and FORCE.
NOTE The SENSE terminal does not need to be connected to the DUT for the preamp to
operate correctly. Remote sensing is automatic. If SENSE is connected to the DUT,
errors due to voltage drops in the FORCE path between the preamp and the DUT will
be eliminated; and, the preamp will sense locally.
PreAmp CONTROL connector
The preamp CONTROL connector connects to the SMU PA CNTRL connector and provides both
power and signal connections from the 4200-SMU or 4210-SMU to the 4200-PA preamp.
Multi-frequency capacitance / voltage unit (CVU)
The Model 4210-CVU1 is a multi-frequency (1 kHz to 10 MHz) impedance measurement card that
is installed in the 4200-SCS mainframe. The AC test signal (10 mV RMS to 100 mV RMS) can be
DC voltage biased from -30 V to +30 V.
The CVU measures impedance by sourcing an AC voltage across the device under test (DUT),
and then measures the resulting AC current and phase difference. The capacitance and
conductance are derived parameters from the measured impedance and phase.
Model 4210-CVU card
Measurement overview
AC impedance measurement (Z
AC test voltage across the device and measuring the resulting AC current.
The AC current is measured as shown in Figure 1-12. The 4210-CVU uses an auto balance bridge
(ABB) technique to achieve accurate impedance measurements. The purpose of the ABB is to
create a virtual ground at the DUT to minimize measurement error. Every CVU measurement is
taken with ABB active. The ABB will always attempt to lock the low side of the DUT to virtual
ground.
If the ABB fails to lock:
• The measurement is made but may be out of specification.
• The returned data is flagged and colored yellow in the data sheet.
• The graph displays an ABB Not Locked message.
) of the device under test (DUT) is performed by sourcing an
DUT
1. In February 2009, the 4210-CVU replaced the 4200-CVU. The 4210-CVU is identical to the 4200-CVU except that
it extends the frequency range to 1 kHz (1 kHz to 9 kHz in 1 kHz increments).
1-16 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
AC
Test
Signal
DC
Bias
4200-CVU
HCUR
Measure
AC Current
HPOT
Measure
AC Voltage
V
LPOT
A
LCUR
DUT
ABB Loop
I
DUT
Red SMA
Cable (1 of 4)*
Shields of the cables must
be connected together near
the DUT.
*
C
DUT
I
DUT
2πfV
AC
--------------------=
C
DUT
= Capacitance of the DUT (f)
f = Test frequency (Hz)
V
AC
= Measured AC voltage (V)
Most common causes of ABB not locked are:
• Mismatched physical cable lengths
• Mismatched physical cable lengths versus the programmed cable length in Keithley
Interactive Test Environment (KITE)
• Improperly torqued SMA cables
• Sub-optimal I-range setting
• Too much parasitic load on the low side of DUT
Figure 1-12
Measurement circuit (simplified)
The capacitive impedance (and conductance) are calculated based on the measured AC
impedance and phase.
The capacitance is calculated from the capacitive impedance and the test frequency using the
following formula:
Measurement functions
The 4210-CVU can measure the following parameters:
• Z, Theta Impedance and Phase Angle
• R + jX Resistance and Reactance
• Cp-Gp Parallel Capacitance and Conductance
• Cs-Rs Series Capacitance and Conductance
• Cp-D Parallel Capacitance and Dissipation Factor
• Cs-D Series Capacitance and Dissipation Factor
Figure 1-13 shows the vector diagram and fundamental equations for impedance.
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-17
Section 1: Getting Started Model 4200-SCS User’s Manual
ZR2X
2
+=
ZRjX+=
θ arc
X
R
----
tan=
RZθcos=
XZθsin=
Y
1
Z
---= GjB+()=
Z = Impedance
θ = Phase Angle
R = Resistance
X = Reactance
Y = Admittance
G = Conductance
X
R
q
Z
HCUR
HPOT
LPOT
LCUR
4200-CVU
Cs
Rs
Series RC Configuration
HCUR
HPOT
LPOT
LCUR
Cp
Rp
Parallel RC Configuration
DUT
DUT
4200-CVU
Figure 1-13
Vector diagram for impedance (Z)
The simplified model of a DUT is a resistor and a capacitor. As shown in Figure 1-14, the
4210-CVU can measure the DUT as a series configuration of the resistor-capacitor (RC), or as a
parallel RC configuration.
Figure 1-14
Measure models (simplified)
Test signal
The test signal can be set for the following frequencies:
• 1 kHz through 10 kHz in 1 kHz increments
• 10 kHz through 100 kHz in 10 kHz increments
• 100 kHz through 1 MHz in 100 kHz increments
• 1 MHz through 10 MHz in 1 MHz increments
The AC signal output level can be set from 10 mV RMS to 100 mV RMS (1 mV resolution). The
output impedance is 100 Ω (typical).
There are three current measurement ranges available to measure current: 1 µA, 30 µA or 1 mA.
With auto range selected, range selection will be performed automatically.
DC bias function and sweep characteristics
The AC test signal can be biased with a static DC level (-30 V to +30 V), or a voltage sweep (up or
down).
1-18 Return to Section Topics 4200-900-01 Rev. K / February 2017
Model 4200-SCS User’s Manual Section 1: Getting Started
0V
Bias
Run Test
Meas
#1
Meas
#2
Meas
#15
Frequency = 1MHz
AC Voltage = 15mVRMS
#Samples = 15
-4.80V
Stop
Meas
#1
0V
Frequency = 1MHz
AC Voltage = 30mVRMS
Start
Step
200mV
Run Test
-4.60V
-5.00V
+5.00V
Step
200mV
Meas
#2
Meas
#3
Meas
#51
0V
100kHz
(Start)
1MHz
(Stop)
200kHz
AC Voltage = 30mVRMS
Bias
Meas
#10
Run Test
Meas
#1
Meas
#2
You can also perform a frequency sweep (up or down):
• DC bias waveform: The DC bias is set to 0V, but can be set to any valid DC bias level (you
specify the number of measurements to perform). (see Figure 1-15)
• DC voltage sweep: You specify the start voltage, stop voltage and step voltage. The number
of data (measurement) points is calculated by the 4210-CVU. (see
Figure 1-16)
• Frequency sweep: You specify the start frequency and the stop frequency; the number of
data (measurement) points is calculated by the 4210-CVU. (see Figure
1-17)
• Voltage list sweep: You specify the voltage levels for the sweep (not shown)
• Step frequency sweep: Includes voltage stepping. A voltage sweep is performed for every
frequency point (not shown)
NOTE Refer to the Forcing functions and meas ure options, p age 3-16 for details on the bias
and sweep forcing functions.
Figure 1-15
DC bias waveform (example)
Figure 1-16
DC voltage sweep (example)
Figure 1-17
Frequency sweep (example)
4200-900-01 Rev. K / February 2017 Return to Section Topics 1-19
Section 1: Getting Started Model 4200-SCS User’s Manual
HT
0V
1V
Meas
Meas
Bias
HT = Hold Time
SD = Built-In System Delay
Int = Programmed Interval
Meas = Measure Time
Run
Test
5V
PreSoak
Int
SD
Int
SD
Force-measure timing
Bias function
Timing for the force-measure process for a bias function is shown in Figure 1-18.
When the test is started, the following timing sequence takes place:
1. The DC source outputs the presoak voltage for the hold time period.
2. The DC source goes to the DC bias voltage.
3. After the built-in system delay and time Interval periods, the Model 4210-CVU performs a
measurement. The AC test signal is applied just before the start of the measurement. AC
drive is turned off after the measurement is completed.
4. Step 3 is repeated for every measurement.
Figure 1-18
Force-measure timing
Sweep function
Force-measure timing for a sweep function is similar to the timing for a bias function (shown in
Figure 1-18), with the following differences:
• The hold time is repeated at the beginning each subsequent sweep step.
• A programmed delay is used in place of the interval.
Pulse cards
The Keithley Instruments pulse cards are two-channel, high speed, voltage pulse generator cards
that provide the following types of output:
There are two pulse generator instrument cards available for 4200-SCS:
• 4220-PGU Pulse Generator Unit
• 4225-PMU Ultra-Fast IV Module.
Both cards offer:
• Two output channels
• Standard (2-level) pulse
•Segment ARB
• Full Arb
Each output channels has two output ranges:
• 10 V (into high impedance, 5 V into 50 Ω)
• 40 V (into high impedance, 20 V into 50 Ω)
1-20 Return to Section Topics 4200-900-01 Rev. K / February 2017
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