Keithley 4200A-SCS User Manual

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Model 4200A-SCS Parameter Analyzer

User’s Manual

4200A-900-01 Rev. A / September 2016

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*P4200A-900-01A*

4200A-900-01A

A Greater Measure of Confidence

Model 4200A-SCS

Parameter Analyzer

User's Manual

Cleveland, Ohio, U.S.A.

Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,

without the prior written approval of Keithley Instruments is strictly prohibited.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments. Other brand names are trademarks or registered trademarks of their respective

holders.

Actuate

Document number: 4200A-SCS-900-01 Rev. A / September 2016

Safety precaut ions

The following safety precautions should be observed before using this product and any associat ed inst rum enta t ion . Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the user documentation for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired. The types of product users are:

Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service personnel may perform installation and service procedures.

Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to mains. These instruments will be marked as category II or higher.

Unless explicitly allowed in the specification s, opera ting man ual, and inst rum ent labe ls, do not connect any instrument to mains. Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test

fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, ins ulated surface capable of withstanding the voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard. Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)

connections. If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use

of a lid interlock.

If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.

The

symbol on an instrument means caution, risk of danger. The user must refer to the operating instructions located in the

user documentation in all cases where the symbol is mark ed on the instr u ment .

The

symbol on an instrument means caution, risk of electric shock. Use standard safety precautions to avoid personal

contact with these voltages.

The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.

The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly disposed of according to federal, state, and local law s.

The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains h az ards that coul d dama ge the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans. Before performing any maintenance, disconnect the line cord and all test cables. To maintain protection from electric shock and fire, replacement components in mains circuits — including the power

transformer, test leads, and input jacks — must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F) ; and pollution degree 1 or 2.

To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Safety precaution revision as of March 2016.

Introduction ............................................................................................................... 1-1

Welcome .............................................................................................................................. 1-1

Introduction to this manual ................................................................................................... 1-1

Extended warranty ............................................................................................................... 1-1

Contact information .............................................................................................................. 1-2

USB flash drive contents ...................................................................................................... 1-2

Organization of manual sections .......................................................................................... 1-2

Application examples ........................................................................................................... 1-3

General ratings ..................................................................................................................... 1-3

Getting started .......................................................................................................... 2-1

Front panel overview ............................................................................................................ 2-1

Touch screen basics ................................................................................................................. 2-3

Connect a keyboard and mouse ............................................................................................... 2-3

Rear panel overview ............................................................................................................ 2-5

Connect an external monitor ..................................................................................................... 2-6

Installation ............................................................................................................................ 2-6

Locating the system .................................................................................................................. 2-7

Basic system connections ......................................................................................................... 2-8

SMU connections .................................................................................................................... 2-11

Powering the 4200A-SCS ....................................................................................................... 2-16

Create a new project and test .................................................................................. 3-1

Introduction .......................................................................................................................... 3-1

Equipment required .............................................................................................................. 3-1

Device connections .............................................................................................................. 3-2

Connection schematic ............................................................................................................... 3-2

Connect the 4200A-SCS to the DUT ......................................................................................... 3-3

Set up the measurements in Clarius .................................................................................... 3-3

Select and rename a new project .............................................................................................. 3-3

Add a device ............................................................................................................................. 3-5

Select a custom test .................................................................................................................. 3-6

Configure the test ...................................................................................................................... 3-6

Execute the test ........................................................................................................................ 3-8

View and analyze the test results .............................................................................................. 3-8

Use the RPM to switch the SMU, CVU, and PMU .................................................... 4-1

Introduction .......................................................................................................................... 4-1

Update the RPM configuration in KCon ............................................................................... 4-1

Equipment required .............................................................................................................. 4-2

Device connections .............................................................................................................. 4-2

Table of contents

User's Manual

Model 4200A-SCS Parameter Analyz er

Connection schematic ............................................................................................................... 4-3

Connect the 4200A-SCS to the DUT ......................................................................................... 4-4

Set up the measurements in Clarius .................................................................................... 4-4

Create a new project ................................................................................................................. 4-5

Add a device ............................................................................................................................. 4-6

Search for and select existing tests in the Test Library ............................................................. 4-7

Configure the test ...................................................................................................................... 4-8

Run the test ............................................................................................................................. 4-16

Analyze the results .................................................................................................................. 4-17

Configure and use a Series 700 Switching System ................................................ 5-1

Introduction .......................................................................................................................... 5-1

Equipment required .............................................................................................................. 5-2

Device connections .............................................................................................................. 5-2

Connect the 7072 to the DUT.................................................................................................... 5-3

Connect the 4200A-SCS to the 7072 ........................................................................................ 5-4

Update the switch configuration in KCon ............................................................................. 5-6

Set up the measurements in Clarius .................................................................................. 5-10

Make I-V measurements on a solar cell ................................................................... 6-1

Introduction .......................................................................................................................... 6-1

Equipment required .............................................................................................................. 6-1

Device connections .............................................................................................................. 6-2

Device connection schematic .................................................................................................... 6-2

Connect the 4200A-SCS to the DUT ......................................................................................... 6-3

Setting up measurements in the Clarius software ............................................................... 6-4

Create a new project ................................................................................................................. 6-4

Search for and select a test....................................................................................................... 6-5

Configure the test ...................................................................................................................... 6-5

Execute the test ........................................................................................................................ 6-7

Analyze the test results ............................................................................................................. 6-8

Additional tests .......................................................................................................................... 6-9

Make C-V measurements on a MOSCAP ................................................................. 7-1

Introduction .......................................................................................................................... 7-1

Equipment required .............................................................................................................. 7-1

Device connections .............................................................................................................. 7-1

Connect the 4200A-SCS to the DUT ......................................................................................... 7-2

Set up the measurements in Clarius .................................................................................... 7-3

Search for and select a project .................................................................................................. 7-3

Configure the test ...................................................................................................................... 7-4

Perform offset compensation .................................................................................................... 7-8

Run the test ............................................................................................................................. 7-11

View and analyze the test results ............................................................................................ 7-12

Use the 4200A-CVIV Multi-Switch ............................................................................ 8-1

Introduction .......................................................................................................................... 8-1

Model 4200A

of contents

-SCS Parameter Analyzer User's Manual Table

Equipment required .............................................................................................................. 8-1

Device connections .............................................................................................................. 8-2

Connection schematic ............................................................................................................... 8-3

Set up the measurements in Clarius .................................................................................... 8-4

Create and rename a project for I-V and C-V measurements with compensation ..................... 8-4

Add an action to perform CVU compensation ........................................................................... 8-5

Configure the action .................................................................................................................. 8-5

Add a device ............................................................................................................................. 8-7

Add an action for switching the SMUs to the device ................................................................. 8-8

Configure the action .................................................................................................................. 8-8

Add a test for making I-V measurements .................................................................................. 8-9

Add an action for switching the CVU to the output terminals of the 4200A-CVIV .................... 8-10

Configure the action ................................................................................................................ 8-11

Add a test for making C-V measurements .............................................................................. 8-12

Run the project and review the results .................................................................................... 8-15

PMU for pulsed I-V measurements on a MOSFET .................................................. 9-1

Introduction .......................................................................................................................... 9-1

Equipment required .............................................................................................................. 9-1

Device connections .............................................................................................................. 9-2

Connection schematic ............................................................................................................... 9-3

Set up the measurements in Clarius .................................................................................... 9-4

Create a new project ................................................................................................................. 9-4

Search for and select an existing test ....................................................................................... 9-5

Configure the test ...................................................................................................................... 9-6

Run the test and analyze the results ......................................................................................... 9-8

Next steps ............................................................................................................... 10-1

Additional informat ion ......................................................................................................... 10-1

Index ............................................................................................................................. 1

General ratings ......................................................................... 1-3

Welcome

Section 1

Introduction

In this section:

Welcome .................................................................................. 1-1

Introduction to this manual ....................................................... 1-1

Extended warranty ................................................................... 1-1

Contact information .................................................................. 1-2

USB flash drive contents .......................................................... 1-2

Organization of manual sections .............................................. 1-2

Application examples ............................................................... 1-3

Thank you for choosing a Keithley Instruments product. The Model 4200A-SCS Parameter Analyzer performs laboratory-grade DC, I-V, C-V, and pulse device characterization, real-time plotting, and analysis with high precision and subfemtoamp resolution. The 4200A-SCS offers the most advanced capabilities available in a fully-integrated characterization system, including a complete, embedded computer with Microsoft Windows accelerates and simplifies the process of taking data, so users can begin analyzing their results sooner. Additional features enable stress-measure capabilities suitable for a variety of reliability tests.

Introduction to this manual

This manual provides detailed applications to help you achieve success with your Keithley Instruments 4200A-SCS. In addition, information is provided about the basics of the front panel to familiarize you with the instrument. Finally, included is an overview of each application, followed by instructions to complete the application.

More information about the commands that are used in these applications is available. Refer to the Model 4200A-SCS Refer en ce Man ua l, available from the Learning Center on your 4200A-SCS desktop.

Extended warranty

Additional years of warranty coverage are available on many products. These valuable contracts protect you from unbudgeted service expenses and provide additional years of protection at a fraction of the price of a repair. Extended warranties are available on new and existing products. Contact your local Keithley Instruments office, sales partner, or distributor for details.

operating system and mass storage. Its touchscreen interface

Section

User's Manual

1: Introduction Model 4200A-SCS Parameter Analyz er

Contact information

If you have any questions after you revie w the information in this documentation, please co ntac t your local Keithley Instruments office, sales partner, or distributor. You can also call the corporate headquarters of Keithley Instruments (toll-free inside the U.S. and Canada only) at 1-800-935-5595, or from outside the U.S. at +1-440-248-0400. For worldwide contact numbers, visit the

Instruments website (http://www.tek.com/keithley).

USB flash drive contents

Each 4200A-SCS instrument is shipped with a USB flash drive that includes the software and the product information documents.

The 4200A-SCS Product Information USB drive contains:

• Quick Start Guide: Provides unpacking instructions, describes basic connections, reviews basic

operation information, and provides a quick test procedure to ensure the instrument is operational.

• User's Manual: Provides application examples that you can use as a starting point to create your

own applications.

• Reference Manual: Includes advanced operation topics, maintenance information,

troubleshooting procedures, and in-depth descriptions of programming commands.

• Accessories information: Documentation for accessories that are available for the 4200A-SCS.

Keithley

For the latest drivers and additional support information, see the Keithley Instruments website (http://www.tek.com/keithley).

Organization of manual sections

This manual is organized into the following sections:

• Introduction (on page 1-1): Provides an overview of the 4200A-SCS and this manual.

• Getting started (on page 2-3): Provides high-level guidance on how to install, connect, and power

up the 4200A-SCS.

• Application examples (on page 3-1): Provides detailed examples of how to use the 4200A-S CS in

some typical situations.

• Next steps (on page 10-1): Provides information about additional resources that can help you use

the 4200A-SCS.

This manual is also available from the Learning Center, which you can access from your 4200A-SCS desktop.

The PDF version of this manual contains bookmarks for each section. The manual sections are also listed in the Table of Contents at the beginning of this manual.

For more information about bookmarks, see Adobe

Acrobat® or Reader® help.

1-2 4200A-SCS-900-01 Rev A. / September 2016

Model 4200A

Introduction

Supply voltage range

100 V

RMS

to 240 V

RMS

, 50 Hz or 60 Hz

Current rating

1000 VA

Input and output connections

See Front panel overview (on page 2-1) and Rear panel overview (on page 2-4).

Pollution degree: 1 or 2

-SCS Parameter Analyzer User's Manual Section 1:

Application examples

This manual provides application examples that show you how to perform tests from the front panel and over a remote interface. The applications include:

• Create a new project and test (on page 3-1)

• Use the RPM to switch the SMU, CVU, and PMU (on page 4-1)

• Configure and use a Series 700 Switching System (on page 5-1)

• Make I-V measurements on a solar cell (on page 6-1)

• Make C-V measurements on a MOSCAP (on page 7-1)

• Use the 4200A-CVIV Multi-Switch (on page 8-1)

• PMU for pulsed I-V measurements on a MOSFET (on page 9-1)

The default settings used for the devices, tests, and projects in Clarius are generally sufficient to produce usable data when executin g a test. However, you may have additional settings you want to apply when you configure your measurements.

General ratings

The 4200A-SCS instrument's general ratings and connections are listed in the following table.

Category Specification

Environmental conditions For indoor use only

Temperature range: Operating: 10 °C to 40 °C (50 °F to 104 °F) Storage: − 15 °C to 60 °C (5 °F to 140 °F)

Humidity range: Operating: 5 % to 80 % RH, non-condensing Storage: 5 % to 90 % RH, non-condensing

Altitude Operating: 0 to 2000 m (0 to 6252 ft) Storage: 0 to 4600 m (0 to 150925 ft)

4200A-SCS-900-01 Rev A. / September 2016 1-3

Installation ................................................................................ 2-6

In this section:

Front panel overview ................................................................ 2-1

Rear panel overview ................................................................ 2-4

Front panel overview

Most of your controls and interfaces are on the front panel of the 4200A-SCS Parameter Analyzer. The next figure shows the front panel of the 4200A-SCS. The components are summarized following the figure.

Section 2

Getting started

Section

User's Manual

standard.

Hard drive indicator

Illuminates when the hard drive is being accessed.

Power switch

Turns the main system power on or off.

Headphone connector

Provides a 1/8" stereo output connection. Interlock indicator

Illuminates when the 12 VDC interlock circuit is closed.

Operate indicator

Illuminates when any internal cards are energized.

2: Getting started Model 4200A-SCS Parameter Analyz er

Figure 1: 4200A-SCS front panel

Display A 1920 p x 1080 p resolution, touch-screen display.

Two v3.0 USB ports Allows you to connect to peripherals such as flash drives, pointing devices,

Two v2.0 USB ports Allows you to connect to peripherals such as flash drives, pointing devices,

scanners, and external hard drives that are compatible with the USB v3.0 standard.

scanners, and external hard drives that are compatible with the USB v2.0

4 5 6

7 8

4200A-SCS-ND has no display and requires an external monitor.

2-2 4200A-SCS-900-01 Rev A. / September 2016

Model 4200A

Getting started

-SCS Parameter Analyzer User's Manual Section 2:

Touch screen basics

You can operate the 4200A-SCS using the touch screen. You can use your fingers, clean room gloves, or a stylus.

To select and move on the screen:

• To scroll, swipe up or down on the screen.

• To select an item, touch it on the screen.

• To double-click an item, touch it twice.

• To right-click an item, touch and hold, then release to see the options.

To enter information, you can use the on-screen keyboard. Swipe from the left side of the display to open the keyboard.

The touch screen uses standard Microsoft actions, refer to the Microsoft help information, available from the on-screen keyboard window menu option Tool > Help Topics.

You can also adjust the touch settings using the Pen and Touch options in the Windows Control Panel.

Windows® touch actions. For additional information on the

Connect a keyboard and mous e

Connect the keyboard to the 4200A-SC S with a USB cable. You can plug it into any of the eight USB ports. The keyboard is shown in the next figure. To ensure proper operation, be sure that the keyboard is connected before power-up.

Figure 2: 4200A-SCS keyboard

If you want to use an optional mouse, connect a USB mouse to any of the 4200A-SCS USB ports.

4200A-SCS-900-01 Rev A. / September 2016 2-3

Section

User's Manual

2: Getting started Model 4200A-SCS Parameter Analyz er

Figure 3: Keyboard connections

2-4 4200A-SCS-900-01 Rev A. / September 2016

Model 4200A

Getting started

HDMI port connection.

Serial port

Connects to an RS-232 periph er al.

External monitor port

15-pin video connector.

IEEE-488 connector

Connects to peripherals with a GPIB interface.

Grounding screw

Connects to protective earth (safety ground)

Power receptacle and line fuses

Connects to line power through supplied line cord. Two line fuses protect the instrument.

with the USB v3.0 standard.

Microphone and speaker connectors

Provides microphone, left speaker, and right speaker connections. Two LAN connectors

Two gigabit LAN connectors interface the unit to ethernet local networks.

-SCS Parameter Analyzer User's Manual Section 2:

Rear panel overview

The following figure shows the rear panel of the 4200A-SCS. The connectors and components are summarized following the figure.

Figure 4: 4200A-SCS rear panel

Fan Provides system cooling.

DP port Provides a standard DisplayPort connection.

2 3

4 5

Ground unit Provides system-level SENSE, FORCE, and COMMON connections.

7 8 9

Four v3.0 USB

connectors

Provides a standard High Definition Multimedia Inter f ac e (H DMI®)

Allows you to connect to peripherals such as keyboards, pointing devices, printers, flash drives, external hard driv es, and pr int ers that are compatible

4200A-SCS-900-01 Rev A. / September 2016 2-5

Section

User's Manual

connector

Nine instrument slots

Support the factory-installed SMU, CVU, and PMU/PGU cards.

2: Getting started Model 4200A-SCS Parameter Analyz er

12 VDC interlock

Connect an external monitor

You can connect an external monitor to the 4200A-SCS. For best results, use a 1920x1080p HD monitor to maintain the correct resolution when using the Clarius application.

Installation

This section contains information about handling and installing the 4200A-SCS:

• Locating the system: Describes how to select the best operating environment location for your

4200A-SCS.

• Basic system connections: Explains how to connect the grounding cable, LAN cable, GPIB-

compatible instruments, and the safety interlock to the 4200A-SCS.

• SMU connections: Describes the easiest method to make SMU connections to the device under

test (DUT).

• Powering the 4200A-SCS: Describes line power requirements for the 4200A-SCS, and shows

how to connect the power line cord.

Connects the instrument to a test fixture or prober interlock circuit.

When you start one of the Clarius+ software tools for the first time, you are required to respond affirmatively to an on-screen license agreement before proceeding further. If you do not respond, your system will not function until you reinstall the software.

The condensed installation information in this section is intended to get your 4200A-SCS set up and ready to turn on as quickly as possible. Detailed information on connections is provided in the Model 4200A-SCS Reference Manual.

2-6 4200A-SCS-900-01 Rev A. / September 2016

Model 4200A

Getting started

-SCS Parameter Analyzer User's Manual Section 2:

Locating the system

Locate the 4200A-SCS so that it will operate within the following ambient temperature and humidity limits:

• Temperature: +10 °C to +40 °C

• Relative humidity: 5 % to 80 %, non-condensing

SMU and preamplifier accuracy specifications are based on operation at 23 °C ±5 °C and between 5 % and 60 % relative humidity. See the 4200A-SCS datasheet at the Keithley Instruments website (http://www.tek.com/keithley) for derating factors outside these ranges.

To avoid overheating, operate the instrument only in an area with proper ventilation.A llo w at least eight inches of clearance at the back of the mainframe to assure sufficient airflow and comply with the following guidelines:

Operate the instrument in a clean, dust-free environment. Keep the fan vents and cooling vents from becoming blocked (sides and rear of the instrument). Do not position any devices adjacent to the instrument that force air (heated or unheated) into cooling vents. This additional airflow could compromise accuracy performance. When rack-mounting the instrument, ensure adequate airflow around the sides, bottom, and back. Do not rack-mount high power dissipation equipment adjacent to the 4200A-SCS. To ensure proper cooling in rack environments with only convection cooling, place the hottest equipment (for example, power supply) at the top of the rack. Place precision equipment, such as the 4200A-SCS, as low as possible in the rack, where temperatures are the coolest. Adding spacer panels below the instrument helps to ensure adequate airflow.

4200A-SCS-900-01 Rev A. / September 2016 2-7

Section

User's Manual

2: Getting started Model 4200A-SCS Parameter Analyz er

Basic system connections

This section provides basic system connections to get your 4200A-SCS set up and running. More detailed connection information is in the "Connections and configuration" section of the Model 4200A- SCS Reference Manual.

Connecting to protective earth

The 4200A-SCS must be connected to protective earth (safety ground) using the supplied green-yellow ground cable.

Connect one lugged end of the supplied grounding cable to the protective earth (safety ground) screw on the rear of your 4200A-SCS. See the next figure.

Figure 5: Grounding cable connected to the rear of the 4200A-SCS

2-8 4200A-SCS-900-01 Rev A. / September 2016

Model 4200A

Getting started

-SCS Parameter Analyzer User's Manual Section 2:

Connecting a LAN cable

The two LAN connectors on the 4200A-SCS are standard RJ-45 connectors intended for use with unshielded twisted pair (UTP) cable. For best results, use only CAT 5 UTP cables equipped with RJ-45 connectors to connect your LANs, as shown in the following figure.

If IP addresses are statically assigned, you need to assign a different IP address to each LAN port.

Figure 6: LAN connections

4200A-SCS-900-01 Rev A. / September 2016 2-9

Section

User's Manual

2: Getting started Model 4200A-SCS Parameter Analyz er

Connecting GPIB instruments

You can use the 4200A-SCS to control one or more external instruments using the IEEE-488 general purpose instrument bus (GPIB). An example of typical instruments used in a test system with the 4200A-SCS are a switching system and an external C-V meter.

The following figure shows how to connect GPIB instruments to the 4200A-SCS.

Figure 7: 4200A-SCS GPIB instrument connections

Connecting the interlock

The next graphic shows the location of the interlock connector on the rear panel of the 4200A-SCS.

To connect the interlock:

1. Connect one end of the supplied 236-ILC-3 interlock cable to the interlock connector on the rear

2-10 4200A-SCS-900-01 Rev A. / September 2016

panel of the 4200A-SCS rear panel (see the next figure).

Model 4200A

Getting started

2-16

-SCS Parameter Analyzer User's Manual Section 2:

Figure 8: Interlock connector on the rear panel of the 4200A-SCS

2. Connect the other end of the interlock cable to a compatible test fixture, such as the Keithley Instruments LR:8028.

For more information, see the "Configuring the safety interlock" topic in the 4200A-SCS Reference Manual.

SMU connections

The following topics explain how to connect the source-measure units (SMUs) to the device under test (DUT).

Do not touch test cables or connectors when powering up the 4200A-SCS. Hazardous voltage may be output momentarily, posing a safety hazard that could result in personal injury or death.

Do not turn on the 4200A-SCS until you have reviewed the safe power-up procedure in

Powering the 4200A-SCS (on page

Do not connect the DUT to the 4200A-SCS before powering it up, because the hazardous voltage that may be output momentarily at power-up could damage the DUT.

If your 4200A-SCS includes preamplifiers, all tests should be performed using the preamplifiers, as the installed SMUs were optimized at the factory to use them.

4200A-SCS-900-01 Rev A. / September 2016 2-11

Section

User's Manual

2: Getting started Model 4200A-SCS Parameter Analyz er

Triaxial cables

Triaxial cables are supplied to make connections to the DUT (device under test). With preamplifiers installed, use the l ow-noise triaxial cables, which are terminated with 3-slot triaxial connectors on both ends. One end of the cable connects to the preamplifier and the other end connects to the DUT test fixture or probe station.

Figure 9: Triaxial cable 4200-TRX-X

If your system does not have preamplifiers installed, use the cables that have a miniature triaxial connector on one end and a standard 3-slot triaxial connector on the other end. The cable end that is terminated with the miniature connector connects directly to the SMU, and the other end connects to the test fixture or probe station.

Figure 10: Triaxial cable 4200-MTRX-X

With preamplifiers installed, NEVER make connections directly to any of the miniature triaxial connectors on the SMU modules. This may result in damage to the SMU or DUT or may produce corrupt data.

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Basic connections

The simplest method to connect SMUs to the device under test (DUT) is to use one SMU for each terminal of the device. When setting up a test, the FORCE terminal (center conductor) of the SMU is used to apply voltage or current to the device. The FORCE terminal or ground unit can also be used to connect the device terminal to the COMMON circuit.

Complete details on connections (including SENSE terminal connections) are provided in the "Connections and configuration" section of the Model 4200A-SCS Reference Manual.

The next figure shows SMU connections to 2-terminal, 3-terminal, and 4-terminal devices. Notice that only the FORCE HI terminal of the SMUs is connected to the device terminals. FORCE HI is the center conductor of the triaxial cable.

Connecting the SMU or ground unit SENSE terminal without the FORCE terminal may damage the instrument and give erroneous results.

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Figure 11: SMU (with preamplifiers) connections to DUT

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Mounting preamplifiers in a probe station

You can mount the preamplifiers remotely on a probe station using an optional mounting kit. Follow the steps below to mount and connect a remote preamplifier on a probe station. Details are provided in the documentation provided with the mounting kit.

Three remote preamplifier mounting options are available:

• 4200-MAG-BASE: A magnetic base for mounting a preamplifier onto a probe station platen.

• 4200-VAC-BASE: A vacuum base for mounting a preamplifier onto a probe station platen.

• 4200-TMB: A triaxial mounting bracket option for mounting a preamplifier onto a probe station or

onto the triaxial mounting panel of a test fixture.

Each preamplifier is matched to the SMU it is connected to. When you disconnect the preamplifiers to mount them to a probe station, make sure to reconnect each one to its matching SMU.

To mount a preamplifier onto a probe station:

1. Turn off the system power for the 4200A-SCS from the front panel.

2. Disconnect the preamplifiers from the rear panel of the 4200A-SCS. They are secured to the rear panel by a mounting bracket.

3. Mount the preamplifier at the remote location using the appropriate mounting kit.

4. Connect the control cable between the preamplifier control connector on the preamplifier and the PA CNTRL connector on the SMU.

5. Make sure that the connecting cable is secure at both ends.

For additional preamplifier details, see the Model 4200A-SCS Reference Manual.

Figure 12: Installing a preamplifier on the probe station

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Powering the 4200A-SCS

Operating the instrument on an incorrect line voltage may cause damage, possibly voiding the warranty.

The power cord supplied with the 4200A-SCS contains a separate protective earth (safety ground) wire for use with grounded outlets. When proper connections are made, the instrument chassis is connected to power-line ground through the ground wire in the power cord. In the event of a failure, not using a properly grounded protective earth and grounded outlet may result in personal injury or death due to electric shock.

Do not replace detachable mains supply cords with inadequately rated cords. Failure to use properly rated cords may result in personal injury or death due to electric shock.

The 4200A-SCS operates from a line voltage in the range of 100 VAC to 240 VAC, at a frequency of 50 Hz or 60 Hz. Line voltage is automatically sensed, but line frequency is not.

To connect and power the unit:

1. Check to be sure that the operating voltage in your area is compatible.

2. Connect the female end of the supplied power cord to the AC receptacle on the rear panel. See the Rear panel overview (on page 2-4

) for details.

Figure 13: Line power receptacle

3. Connect the other end of the supplied line cord to a grounded AC line power receptacle.

4. Turn the power ON using the front-panel power switch.

Although the instrument does not sense power line frequency at power-up, Keithley ships your 4200A-SCS with line frequency settings that match the line frequency that was specified on the order — either for 50 Hz or 60 Hz. However, if necessary, you can change the line frequency setting using the KCon utility. Refer to the Keithley Configuration Utility (KCon) section in the Model 4200A-SCS Reference Manual.

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Operating the 4200A-SCS with the wrong line frequency setting may result in noisy readings because the line frequency setting affects SMU line frequency noise rejection.

5. Allow the instrument to warm up for at least 30 minutes to achieve rated measurement accuracy.

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Set up the measurements in C lariu s ........................................ 3-3

In this section:

Introduction .............................................................................. 3-1

Equipment required .................................................................. 3-1

Device connections .................................................................. 3-2

Introduction

This section provides an example of how to create a new blank project and configure a new blank test. You will create a test to be performed on a MOSFET, but the procedure is general and can be applied to different devices and applications.

Section 3

Create a new project and test

The default settings used for the devices, tests, and projects in Clarius are generally sufficient to produce usable data when executing a test. However, you may have additional settings you want to apply when you configure your measurements.

Equipment required

• One 4200A-SCS, with the following instruments:

• Two 4200-SMUs or 4210-SMUs

• Two 4200-PAs

• Three 4200-TRX-2 or 4200-MTRX-2 triaxial cables (supplied with SMU)

• One shielded, three-terminal test fixture with triaxial inputs (such as the 8101-PIV)

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3: Create a new project and test Model 4200A-SCS Parameter Analyz er

Device connections

Using the supplied cables, connect the output terminals of the instruments directly to the MOSFET terminals in the shielded test fixture. The triaxial terminals on the shielded test fixture allow you to connect to the device and maintain a completely shielded and guarded test setup.

Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors. It is good practice to disconnect DUTs from the instrument before powering up the instrument. Safe installation requires proper shields, barriers, and grounding to prevent contact with test lead and conductors.

Connection schemati c

The hardware connections from the output of the instruments in the 4200A-SCS chassis to the test fixture that contains the MOSFET are shown in the following figure. All of the connections are 2-wire, and only the Force terminal of each SMU is used. The SMUs and GNDU are each connected to a different terminal of the 3-terminal MOSFET.

Figure 14: Connections from the 4200A-SCS to a MOSFET

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-SCS Parameter Analyzer User's Manual Section 3:

Connect the 4200A-SCS to the DUT

The hardware connections from the output of the instruments in the 4200A-SCS chassis to the test fixture that contains the MOSFET are shown in the next figure.

Figure 15: Rear panel connections from the 4200A-SCS to a MOSFET

Set up the measurements in Clarius

This section describes how to set up the 4200A-SCS to generate a Vds-Id family of curves for a 3terminal n-type MOSFET. This general procedure can also be used to create tests for other devices and other applications.

For this example, you will use the Clarius application to:

• Select and rename new project

• Add a device

• Select a custom test

• Configure the test

• Execute the test

• View and analyze the test results

Select and rename a new project

To select and rename a new project:

1. Choose Select.

Figure 16: Select highli g hted

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2. In the Library, select Projects.

3. Select and then Create a New Project.

Figure 17: Select a New Project from the Project Library

4. Select Yes when prompted to replace the existing project.

5. Assign a title to the project by selecting Rename above the project tree.

6. Enter a project name into the text box, then select Enter. MOSFET_TEST has been chosen for this example.

Figure 18: Toolbar with Rename function

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w project and test

-SCS Parameter Analyzer User's Manual Section 3: Create a ne

Add a device

To add a device:

1. Select Devices.

2. From the Filters pane, select the 3 checkbox under the Terminals heading and transistor under the Device Type option from the Filters pane.

Figure 19: Searching for a device u sing Filters

3. Select the MOSFET, n-type, 3 terminal (3terminal-n-fet) device, then select Add to copy it to the project tree.

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Select a custom test

To select a custom test:

1. Select Tests.

2. Select Custom Test, then select Add to create a new 3-terminal, n-type MOSFET test in the project tree.

Figure 20: Custom Test option

3. Select Rename from the toolbar. Enter a test name in the text box, then select Enter. vds-id was chosen for this example.

Figure 21: MOSFET_TEST project tree with one device and one test

Configure the test

To configure the test:

1. Select Configure.

Figure 22: Configure highlighte d

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2. In the project tree, select vds-id. Because this test is custom, you must assign functions to all terminals connected to the MOSFET before you can run the test.

Figure 23: All MOSFET terminals unassigned in a blank test

3. Set the Gate terminal connection to SMU2 and set the Operation Mode to Voltage Step.

4. Change gate the Start, Stop, Step, and Compliance settings to match the next figure or to the gate settings appropriate for your device.

Figure 24: SMU2 steps from 2 to 5 volts, connected to MOSFET Gate terminal

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5. Set the Drain terminal connection to SMU1 and set the Operation Mode to Voltage Linear Sweep.

6. Change the Start, Stop, Step, and Compliance settings to match the next figure.

Figure 25: SMU1 sweeps from 0 to 5 volts, connected to MOSFET Drain terminal

7. Set the Operation Mode of the Source terminal to GNDU.

Execute the test

Select Run to execute the test.

Figure 26: Run

View and analyze the test results

While the test is running, you can view the data in the Analyze pane. Because you created a new test, the axes of the results graph are not assigned. You must assign axes to the graph to view graphical results.

To view and analyze the test results:

1. Select Analyze. The Analyze screen appears as a blank spreadsheet and a blank graph with unassigned axes.

Figure 27: Analyze highlighted

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2. Select Graph Settings..., then Define Graph.

3. Select Define Graph.

4. In the Graph Definition screen, assign X to DrainV and Y1 to DrainI.

Figure 28: Define the graph

5. Select OK to apply the settings.

6. When you run the test, the sheet populates with the measured data and the graph displays the Vds-Id family of curves.

Figure 29: Analyze Pane showing test results

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Set up the measurements in Clarius ........................................ 4-4

In this section:

Introduction .............................................................................. 4-1

Update the RPM configuration in KCon ................................... 4-1

Equipment required .................................................................. 4-2

Device connections .................................................................. 4-2