Keithley 2600a series Reference Manual

www.keithley.com

Series 2600A System SourceMeter

®

Reference Manual

2600AS-901-01 Rev. B / September 2008

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrant s this product to be free from defect s in materia l and workmanship fo r a per iod of
one (1) year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables,
software, rechargeable batteries, diskettes, and documentation.

During the warranty period, Keithley Instruments will, at its option, either repair or replace any product that proves
to be defective.

To exercise this warranty, write or call your local Keithley Instruments representative, or contact
Keithley Instruments headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions.
Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product
returned, transportation prepaid. Repaired or replaced products are warranted for the balan ce of the original
warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley Instruments’ express
written consent, or misuse of any product or part. This warranty also does not apply to fuses, software,
non-rechargeable batteries, damage from batter y leakage, or problems arising from normal wear or failure to follow
instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES
PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY
DIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE
OF ITS INSTRUMENTS AND SOFTWARE, EVEN IF KEITHLEY INSTRUMENTS, INC. HAS BEEN ADVISED IN
ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT
ARE NOT LIMITED TO: COST OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF
INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

A G R E A T E R M E A S U R E O F C O N F I D E N C E

Keithley Instruments, Inc.

Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139

440-248-0400 • Fax: [phone] • 1-888-KEITHLEY (1-888-534-8453) • www.keithley.com

3/07

Series 2600A

System SourceMeter® Instruments

Reference Manual

©2008, Keithley Instruments, Inc.

All rights reserved.

Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part without the prior written

approval of Keithley Instruments, Inc. is strictly prohibited.

TSP, TSP-Link, and TSP-Net are trademarks of Keithley Instruments, Inc.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc.

Other brand names are trademarks or registered trademarks of their respective holders

Cleveland, Ohio, U.S.A.

Document number:

2600AS-901-01 Rev. B / September 2008

The following safety precautions should be observed before using this product an d any associated instrumentation. Although some
instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may
be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is

operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.

They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or

replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.

Safety Precautions

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service

personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are rate d Measurement Category I and Measurement

Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient
over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise
marked or described in the user documentation.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak,
or 60V DC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

11/07

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power

!

disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test.

AL W AYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of the
equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information,
and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid

interlock.
If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.
The symbol on an instrument indicates that the user should refer to the operating instructions located in the user documentation.
The symbol on an instrument shows that it can source or measure 1000V or more, including the combined effect of normal and

common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the
warranty.

Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
T o maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer, test leads,

and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if
the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they
are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain
accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments
office for information.

To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(for example, a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions.
If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Table of Contents

Section T opic Page

1 Getting Started....................................................................................... 1-1

Introduction................................................................................................. 1-2

Capabilities and features...................................................................... 1-2

Organization of manual sections.......................................................... 1-3

General information.................................................................................... 1-3

Warranty information............................................................................ 1-3

Contact information.............................................................................. 1-3

Unpacking and inspection.................................................................... 1-3

Options and accessories...................................................................... 1-4

User’s and Reference manuals............................................................ 1-5

Front and rear panel familiarization............................................................ 1-6

Front panel summaries......................................................................... 1-6

Rear panel summaries......................................................................... 1-9

Cooling vents............................................................................................ 1-13

Power-up .................................................................................................. 1-14

Line power connection....................................................................... 1-14

Power-up sequence........................................................................... 1-15

Beeper................................................................................................ 1-15

Display modes.......................................................................................... 1-16

Editing controls......................................................................................... 1-17

Source and compliance editing.......................................................... 1-17

Menu navigation................................................................................. 1-18

Menu types......................................................................................... 1-19

Interface configuration.............................................................................. 1-21

USB storage overview.............................................................................. 1-21

Connecting the USB flash drive ......................................................... 1-21

Using the file system................................................................................. 1-22

File system navigation........................................................................ 1-22

Error and status messages....................................................................... 1-22

2 DUT Test Connections.......................................................................... 2-1

Input/output connectors.............................................................................. 2-2

Input/output LO and chassis ground........................................................... 2-4

Sensing methods........................................................................................ 2-6

2-wire local sensing.............................................................................. 2-6

4-wire remote sensing.......................................................................... 2-8

Sense mode selection.......................................................................... 2-9

Contact check connections......................................................................... 2-9

Multiple SMU connections........................................................................ 2-10

Guarding and shielding............................................................................. 2-12

Guarding ............................................................................................ 2-13

Noise shield........................................................................................ 2-14

Safety shield....................................................................................... 2-16

Using shielding and guarding together............................................... 2-18

Test fixture ................................................................................................ 2-20

Floating an SMU....................................................................................... 2-20

Output-off states....................................................................................... 2-23

Selecting the output-off st ate.............................................................. 2-23

Table of Contents Series 2600A System SourceMeter® Instruments Reference Manual

Section T opic Page

3 Basic Operation...................................................................................... 3-1

Overview..................................................................................................... 3-2

Operation overview ..................................................................................... 3-2

Source-measure capabilities ................................................................ 3-2

Compliance limit ................................................................................... 3-3

Setting the compliance limit.................................................................. 3-4

Basic circuit configurations................................................................... 3-5

Operation considerations............................................................................ 3-5

Warm-up............................................................................................... 3-5

Auto zero .............................................................................................. 3-6

NPLC caching....................................................................................... 3-7

Basic source-measure procedure............................................................... 3-7

Front panel source-measure procedure ............................................... 3-7

Remote source-measure procedure..................................................... 3-9

Triggering in local mode............................................................................ 3-10

Configuring trigger attributes in local mode............................................... 3-11

Measure only............................................................................................. 3-12

Sink operation and interface ..................................................................... 3-13

Ohms measurements................................................................................ 3-13

Ohms calculations .............................................................................. 3-13

Ohms ranging..................................................................................... 3-13

Basic ohms measurement procedure................................................. 3-13

Ohms sensing..................................................................................... 3-14

Sense selection .................................................................................. 3-15

Remote ohms programming............................................................... 3-16

Power measurements ............................................................................... 3-17

Power calculations.............................................................................. 3-17

Basic power measurement procedure................................................ 3-17

Remote power programming.............................................................. 3-17

Contact check measurements................................................................... 3-18

Overview............................................................................................. 3-18

Contact check commands.................................................................. 3-19

Contact check programming example................................................ 3-20

User setup ................................................................................................. 3-20

Saving user setups............................................................................. 3-20

Recalling a saved setup ..................................................................... 3-21

To select power-on setup.................................................................... 3-21

Saving user setups from a command interface.................................. 3-21

4 Source-Measure Concepts.................................................................. 4-1

Overview..................................................................................................... 4-2

Compliance limit.......................................................................................... 4-2

Maximum compliance........................................................................... 4-2

Compliance principles .......................................................................... 4-2

Overheating protection................................................................................ 4-3

Power equations to avoid overheating ................................................. 4-3

Operating boundaries.................................................................................. 4-6

Source or sink....................................................................................... 4-6

Continuous power operating boundar ies.............................................. 4-6

I-Source operating boundaries............................................................. 4-7

V-Source operating boundaries.......................................................... 4-11

Source I measure I, source V measure V........................................... 4-15

Basic circuit configurations........................................................................ 4-15

Source I .............................................................................................. 4-15

Source V............................................................................................. 4-16

Measure only (V or I).......................................................................... 4-16

Contact check..................................................................................... 4-17

Guard........................................................................................................ 4-18

Guard overview .................................................................................. 4-18

Guard connections ............................................................................. 4-19

ii 2600AS-901-01 Rev. B / September 2008

Series 2600A System SourceMeter® Instruments Reference Manual Table of Contents

Section T opic Page

Settling time considerations ...................................................................... 4-20

Measurement settling time considerations......................................... 4-20

Reduction in gain-bandwidth .............................................................. 4-22

5 High-Capacitance Mode........................................................................ 5-1

Overview..................................................................................................... 5-2

Understanding high-capacitance mode....................................................... 5-2

Understanding source settling times..................................................... 5-2

Adjusting the voltage source................................................................. 5-3

Enabling high-capacitance mode................................................................ 5-4

Front panel............................................................................................ 5-4

Command interface .............................................................................. 5-5

6 Range, Digits, Speed, Rel, and Filters .............................................. 6-1

Overview..................................................................................................... 6-2

Range.......................................................................................................... 6-2

Available ranges................................................................................... 6-2

Maximum source values and readings................................................. 6-3

Ranging limitations ............................................................................... 6-3

Manual ranging..................................................................................... 6-3

Auto ranging ......................................................................................... 6-3

Low range limits.................................................................................... 6-3

Range considerations........................................................................... 6-4

Range programming............................................................................. 6-4

Digits........................................................................................................... 6-6

Setting display resolution...................................................................... 6-6

Remote digits programming.................................................................. 6-6

Speed.......................................................................................................... 6-6

Setting speed........................................................................................ 6-7

Remote speed programming................................................................ 6-7

Rel............................................................................................................... 6-8

Front panel rel....................................................................................... 6-8

Remote rel programming...................................................................... 6-9

Filters .......................................................................................................... 6-9

Filter types............................................................................................ 6-9

Front panel filter control...................................................................... 6-10

Remote filter programming................................................................. 6-12

7 Reading Buffers...................................................................................... 7-1

Reading buffer overview ............................................................................. 7-2

Working with reading buffers in the local state............................................ 7-2

Reading buffer options.......................................................................... 7-2

Configuring reading buffers.................................................................. 7-3

Appending or overwriting existing reading buffers................................ 7-3

Storage operation ................................................................................. 7-4

Saving reading buffers.......................................................................... 7-4

Recalling readings................................................................................ 7-5

Working with reading buffers in the remote state........................................ 7-5

Reading buffer commands.................................................................... 7-7

Buffer status.......................................................................................... 7-9

Dynamic reading buffers..................................................................... 7-10

Buffer examples.................................................................................. 7-10

8 Digital I/O.................................................................................................. 8-1

Digital I/O port............................................................................................. 8-2

Port configuration.................................................................................. 8-2

Digital I/O configuration ........................................................................ 8-3

Controlling digital I/O lines.................................................................... 8-4

Output enable (Models 2601A/2602A)........................................................ 8-5

Overview............................................................................................... 8-5

Operation.............................................................................................. 8-6

Front panel control of output enable..................................................... 8-6

Remote control of output enable........................................................... 8-7

2600AS-901-01 Rev. B / September 2008 iii

Table of Contents Series 2600A System SourceMeter® Instruments Reference Manual

Section T opic Page

Interlock (Models 2612A/2612A/2635A/2636A).......................................... 8-7

Overview............................................................................................... 8-7

Operation.............................................................................................. 8-7

TSP-Link synchronization lines................................................................... 8-8

Connecting to TSP-Link........................................................................ 8-8

Using TSP-Link synchronization lines for digital I/O............................. 8-8

Remote TSP-Link synchronization line commands.............................. 8-9

9 Sweep Operation.................................................................................... 9-1

Overview..................................................................................................... 9-2

Section overview .................................................................................. 9-2

Sweep overview ................................................................................... 9-2

Sweep characteristics................................................................................. 9-3

Linear staircase sweeps....................................................................... 9-3

Logarithmic staircase sweeps............................................................... 9-5

List sweeps........................................................................................... 9-8

Pulse mode sweeps.............................................................................. 9-9

Configuring and running sweeps............................................................... 9-10

Configuring other sweep attributes..................................................... 9-10

Configuring measurements during a sweep....................................... 9-11

Source and measurement delays....................................................... 9-11

Initiating and running sweeps............................................................. 9-11

Aborting a sweep................................................................................ 9-11

Sweeping using factory scripts.................................................................. 9-12

Front panel.......................................................................................... 9-12

Sweep programming examples.......................................................... 9-12

List sweep example............................................................................ 9-13

10 Triggering............................................................................................... 10-1

Remote triggering overview ...................................................................... 10-3

Using the remote trigger model................................................................. 10-4

Configuring source and measure actions........................................... 10-6

Enabling pulse mode sweeps (end pulse action)............................... 10-6

SMU event detectors................................................................................. 10-6

Clearing SMU event detectors............................................................ 10-7

Using the TRIG key to trigger a sweep............................................... 10-7

Using trigger events to start actions on trigger objects ............................. 10-8

Action overruns................................................................................... 10-9

Digital I/O Port and TSP-Link synchronization lines................................. 10-9

Common attributes............................................................................. 10-9

Trigger configuration on hardware lines ........................................... 10-10

Action overruns on hardware lines................................................... 10-11

Timers ..................................................................................................... 10-11

Timer attributes................................................................................. 10-11

Triggering a timer.............................................................................. 10-12

Using timers to perform pulse mode sweeps.................................... 10-13

Timer action overruns....................................................................... 10-17

Event blenders........................................................................................ 10-17

Event blender modes........................................................................ 10-17

Assigning input trigger events........................................................... 10-18

Action overruns................................................................................. 10-18

LAN triggering overview.......................................................................... 10-18

Understanding hardware value and pseudo line state...................... 10-18

Understanding LXI trigger event designations.................................. 10-19

Generating LXI trigger packets......................................................... 10-19

Logging LAN trigger events in the event log........................................... 10-20

Accessing the event log from the command interface...................... 10-22

Command interface triggering................................................................. 10-22

Manual triggering .................................................................................... 10-23

Interactive triggering................................................................................ 10-23

Detecting trigger events using the wait() function............................. 10-23

iv 2600AS-901-01 Rev. B / September 2008

Series 2600A System SourceMeter® Instruments Reference Manual Table of Contents

Section T opic Page

Using the assert() function to generate trigger events...................... 10-24

Using the release() function of the hardware lines........................... 10-24

Using the set() function to bypass SMU event detectors.................. 10-24

Event detector overruns.................................................................... 10-25

Examples using interactive triggering............................................... 10-25

Hardware trigger modes for digital I/O and TSP-Link synchronization lines 10-27

Falling edge trigger mode................................................................. 10-27

Rising edge master trigger mode...................................................... 10-29

Rising edge acceptor trigger mode................................................... 10-30

Either edge trigger mode.................................................................. 10-31

Understanding synchronous triggering modes........................................ 10-32

Synchronous master trigger mode (SynchronousM)........................ 10-32

Synchronous acceptor trigger mode (SynchronousA)...................... 10-34

Synchronous trigger mode................................................................ 10-35

11 Display Operations.............................................................................. 11-1

Display functions and attributes................................................................ 11-2

Display features ........................................................................................ 11-2

Display screen.................................................................................... 11-2

Measurement functions...................................................................... 11-3

Display resolution ............................................................................... 11-3

Display messages..................................................................................... 11-4

Clearing the display............................................................................ 11-4

Cursor position.................................................................................... 11-4

Displaying text messages................................................................... 11-5

Input prompting ......................................................................................... 11-7

Menu................................................................................................... 11-7

Parameter value prompting ................................................................ 11-8

Indicators................................................................................................... 11-9

LOCAL lockout........................................................................................ 11-10

Load test menu ....................................................................................... 11-10

Loading and saving a user script...................................................... 11-11

Adding USER TESTS menu entries................................................. 11-11

Deleting USER TESTS menu entries............................................... 11-12

Running a test from the front panel .................................................. 11-12

Key-press codes ..................................................................................... 11-12

Sending key codes........................................................................... 11-12

Capturing key-press codes............................................................... 11-13

12 TSP Fundamentals and Script Management................................. 12-1

Introduction ............................................................................................... 12-2

Test Script Processor (TSP) ............................................................... 12-2

Run-time environment ........................................................................ 12-2

Queries............................................................................................... 12-3

Scripts ................................................................................................. 12-3

Naming scripts.................................................................................... 12-3

Renaming Scripts ............................................................................... 12-4

Functions............................................................................................ 12-4

Scripts that create functions ............................................................... 12-4

Programming overview ............................................................................. 12-5

What is a chunk?................................................................................ 12-5

What is a script?................................................................................. 12-5

Run-time environment ........................................................................ 12-6

Nonvolatile memory............................................................................ 12-6

TSP script types.................................................................................. 12-7

Programming model for scripts........................................................... 12-7

User scripts............................................................................................... 12-8

Creating a user script.......................................................................... 12-8

Script examples .................................................................................. 12-9

Saving a user script.......................................................................... 12-11

Loading scripts from the USB flash drive.......................................... 12-13

Running a user script........................................................................ 12-14

2600AS-901-01 Rev. B / September 2008 v

Table of Contents Series 2600A System SourceMeter® Instruments Reference Manual

Section T opic Page

Modifying a user script...................................................................... 12-15

Script management .......................................................................... 12-16

Memory considerations for the run- tim e en vir on m en t ...................... 12-18

13 Test Script Builder (TSB).................................................................... 13-1

Installing the Test Script Builder software ................................................. 13-2

System connections.................................................................................. 13-2

Using Test Script Builder........................................................................... 13-2

Project Navigator................................................................................ 13-2

Script Editor........................................................................................ 13-2

Programming Interaction.................................................................... 13-2

Starting Test Script Builder.................................................................. 13-3

Opening communications................................................................... 13-4

Creating and modifying a script.......................................................... 13-6

Script launch configuration ............................................................... 13-10

Launching a script ............................................................................ 13-14

Running a TSP file............................................................................ 13-15

Retrieving scripts from the Series 2600A......................................... 13-15

Instrument console ........................................................................... 13-16

File management tasks..................................................................... 13-22

Displaying custom messages........................................................... 13-25

14 System Expansion (TSP-Link).......................................................... 14-1

Overview................................................................................................... 14-2

Master and slaves .............................................................................. 14-2

System configurations........................................................................ 14-2

Connections.............................................................................................. 14-2

Initialization ............................................................................................... 14-3

Assigning node numbers.................................................................... 14-3

Resetting the TSP-Link ....................................................................... 14-3

Using the expanded system...................................................................... 14-4

Accessing nodes ................................................................................ 14-4

System behavior................................................................................. 14-5

Triggering with TSP-Link .................................................................... 14-5

TSP advanced features............................................................................. 14-5

Using groups to manage nodes on the TSP-Link network................. 14-7

Running parallel test scripts................................................................ 14-8

Using the data queue for real-time communication.......................... 14-10

Copying test scripts across the TSP-Link network........................... 14-10

Removing stale values from the reading buffer................................ 14-10

15 Communications Interfaces.............................................................. 15-1

Overview................................................................................................... 15-2

Selecting an interface................................................................................ 15-2

Output queue ............................................................................................ 15-2

GPIB operation.......................................................................................... 15-3

GPIB standards .................................................................................. 15-3

GPIB connections............................................................................... 15-3

Primary address ................................................................................. 15-4

Terminator........................................................................................... 15-5

General bus commands............................................................................ 15-5

REN (remote enable).......................................................................... 15-6

IFC (interface clear)............................................................................ 15-6

LLO (local lockout).............................................................................. 15-6

GTL (go to local)................................................................................. 15-6

DCL (device clear).............................................................................. 15-6

SDC (selective device clear)............................................................... 15-6

GET (group execute trigger)............................................................... 15-6

SPE, SPD (serial polling).................................................................... 15-7

Front panel GPIB operation ...................................................................... 15-7

Error and status messages................................................................. 15-7

GPIB status indicators........................................................................ 15-7

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Section T opic Page

LOCAL key ......................................................................................... 15-8

RS-232 interface operation....................................................................... 15-8

Setting RS-232 interface parameters................................................. 15-8

Sending and receiving data................................................................ 15-9

Terminator........................................................................................... 15-9

Baud rate............................................................................................ 15-9

Data bits and parity............................................................................. 15-9

Flow control (signal handshaking)...................................................... 15-9

RS-232 connections ......................................................................... 15-10

Error messages ................................................................................ 15-11

Ethernet communications........................................................................ 15-11

Ethernet cable connection................................................................ 15-11

Using the LAN with remote operations............................................. 15-12

16 LAN Concepts and Settings.............................................................. 16-1

Overview................................................................................................... 16-2

Establishing a point-to-point connection ................................................... 16-2

LAN troubleshooting suggestions....................................................... 16-7

Connecting to the LAN.............................................................................. 16-8

Setting the method.............................................................................. 16-8

Assigning the Method......................................................................... 16-9

Setting the IP address ........................................................................ 16-9

Setting the subnet mask..................................................................... 16-9

Understanding the domain name system........................................... 16-9

Verify menu overview........................................................................ 16-10

Understanding LAN speeds.................................................................... 16-10

Configuring the LAN speed............................................................... 16-10

Duplex mode........................................................................................... 16-11

Configuring the duplex mode............................................................ 16-11

Configuring the network settings............................................................. 16-11

CONFIG/FAULT................................................................................ 16-11

Viewing LAN status messages................................................................ 16-11

Viewing the network settings................................................................... 16-12

Confirming the active speed and duplex negotiation........................ 16-12

Confirming port numbers.................................................................. 16-12

Selecting a remote command interface................................................... 16-13

Configuring a telnet connection............................................................... 16-13

17 Web Interface and TSB Embedded.................................................. 17-1

Working with the web interface................................................................. 17-2

Web browser requirements................................................................. 17-2

Accessing the web interface.............................................................. 17-2

Configuring IP addressing.................................................................. 17-3

Password management ............................................................................ 17-6

Password overview............................................................................. 17-6

Accessing the virtual front panel......................................................... 17-7

Device identification indicator............................................................. 17-8

Working with TSB Embedded................................................................... 17-9

Using the Instrument Control Library (ICL)......................................... 17-9

18 TSP-NetTM............................................................................................. 18-1

Overview................................................................................................... 18-2

TSP-Net capabilities.................................................................................. 18-2

Using TSP-Net with any Ethernet-enabled device.................................... 18-2

Example script.................................................................................... 18-3

Using TSP-Net vs. TSP-Link for communication with TSP-enabled devices 18-3

19 Remote Commands............................................................................. 19-1

Test Script Language (TSL) ...................................................................... 19-3

Introduction......................................................................................... 19-3

Reserved words.................................................................................. 19-3

2600AS-901-01 Rev. B / September 2008 vii

Table of Contents Series 2600A System SourceMeter® Instruments Reference Manual

Section T opic Page

Variables and types ............................................................................ 19-3

Operators............................................................................................ 19-4

Functions............................................................................................ 19-4

Tables/arrays ...................................................................................... 19-5

Precedence ........................................................................................ 19-6

Logical operators................................................................................ 19-6

Concatenation .................................................................................... 19-7

Branching ........................................................................................... 19-7

Loop control........................................................................................ 19-8

Command programming notes.................................................................. 19-9

Conventions........................................................................................ 19-9

Functions and attributes................................................................... 19-10

TSP-Link nodes................................................................................ 19-12

Logical instruments........................................................................... 19-12

Reading buffers ................................................................................ 19-13

Time and date values....................................................................... 19-14

Remote versus local state ................................................................ 19-14

Standard libraries.................................................................................... 19-15

String library functions...................................................................... 19-16

Math library functions ....................................................................... 19-17

File I/O..................................................................................................... 19-18

Instrument Control Library....................................................................... 19-19

beeper .............................................................................................. 19-23

bit...................................................................................................... 19-23

data queue........................................................................................ 19-29

delay................................................................................................. 19-31

digio.................................................................................................. 19-31

display .............................................................................................. 19-38

errorqueue........................................................................................ 19-54

event log........................................................................................... 19-56

exit.................................................................................................... 19-58

file I/O ............................................................................................... 19-58

format ............................................................................................... 19-61

file system......................................................................................... 19-62

gpib................................................................................................... 19-65

io....................................................................................................... 19-65

LAN................................................................................................... 19-69

localnode .......................................................................................... 19-85

makegetter and makesetter.............................................................. 19-93

meminfo............................................................................................ 19-94

opc.................................................................................................... 19-94

printbuffer and printnumber.............................................................. 19-95

reset.................................................................................................. 19-96

script................................................................................................. 19-97

serial................................................................................................. 19-98

setup............................................................................................... 19-101

smuX .............................................................................................. 19-103

Status .................................................................................................... 19-150

Status register sets......................................................................... 19-150

Status byte and SRQ...................................................................... 19-150

timer................................................................................................ 19-204

trigger ............................................................................................. 19-205

tsplink.............................................................................................. 19-212

tspnet.............................................................................................. 19-221

userstring........................................................................................ 19-234

waitcomplete................................................................................... 19-236

Standard libraries.................................................................................. 19-236

String library functions.................................................................... 19-237

Math library functions ..................................................................... 19-237

Factory scripts....................................................................................... 19-238

Introduction..................................................................................... 19-238

Running a factory script.................................................................. 19-239

viii 2600AS-901-01 Rev. B / September 2008

Series 2600A System SourceMeter® Instruments Reference Manual Table of Contents

Section T opic Page

Modifying a factory script................................................................ 19-239

Factory script information...................................................................... 19-240

KISweep ......................................................................................... 19-240

KIPulse ........................................................................................... 19-248

KIHighC .......................................................................................... 19-271

KIParlib........................................................................................... 19-273

KISavebuffer................................................................................... 19-274

20 Calibration.............................................................................................. 20-1

Introduction ............................................................................................... 20-2

Environmental conditions.......................................................................... 20-2

Temperature and relative humidity...................................................... 20-2

Warm-up period.................................................................................. 20-2

Line power.......................................................................................... 20-2

Calibration considerations......................................................................... 20-2

Calibration cycle ................................................................................. 20-3

Recommended calibration equipment................................................ 20-3

Calibration errors................................................................................ 20-5

Calibration................................................................................................. 20-5

Calibration steps................................................................................. 20-5

Calibration commands........................................................................ 20-8

Calibration procedure......................................................................... 20-9

21 Routine Maintenance .......................................................................... 21-1

Introduction ............................................................................................... 21-2

Line fuse replacement............................................................................... 21-2

Front panel tests........................................................................................ 21-3

Keys test............................................................................................. 21-3

Display Patterns test........................................................................... 21-3

Upgrading the firmware............................................................................. 21-4

Using TSB for flash firmware upgrade................................................ 21-4

22 Performance Verification.................................................................... 22-1

Introduction ............................................................................................... 22-2

Verification test requirements.................................................................... 22-2

Environmental conditions.................................................................... 22-2

Warm-up period.................................................................................. 22-2

Line power.......................................................................................... 22-3

Recommended test equipment........................................................... 22-3

Verification limits................................................................................. 22-3

Restoring factory defaults ......................................................................... 22-4

Performing the verification test procedures............................................... 22-5

Test summary ..................................................................................... 22-5

Test considerations............................................................................. 22-5

Setting the source range and output value......................................... 22-5

Setting the measurement range......................................................... 22-6

Output voltage accuracy ........................................................................... 22-6

Voltage measurement accuracy................................................................ 22-8

Output current accuracy............................................................................ 22-9

Series 2600A output current accuracy 100nA and higher.................. 22-9

Model 2635A/2636A output current accuracy 1nA to 100nA ranges 22-11

Current measurement accuracy.............................................................. 22-14

Series 2600A current measurement accuracy 100nA and higher.... 22-14

Model 2635A/2636A current measurement accuracy

100pA to 100nA ranges.................................................................... 22-15

2600AS-901-01 Rev. B / September 2008 ix

Table of Contents Series 2600A System SourceMeter® Instruments Reference Manual

Appendix Topic Page

A Error and Status Messages ................................................................ A-1

Introduction ................................................................................................ A-2

Error summary ........................................................................................... A-2

Error effects on scripts............................................................................... A-2

Reading errors ........................................................................................... A-2

B Common Commands ........................................................................... B-1

Common commands.................................................................................. B-2

Command summary............................................................................ B-2

Script command equivalents................................................................ B-2

Command reference............................................................................ B-3

C Status Model........................................................................................... C-1

Overview.................................................................................................... C-2

Status byte and SRQ........................................................................... C-2

Status register sets.............................................................................. C-2

Queues................................................................................................ C-2

Status function summary ................................................................... C-11

Clearing registers and queues................................................................. C-12

Programming and reading registers......................................................... C-12

Programming enable and transition registers.................................... C-12

Reading registers .............................................................................. C-13

Status byte and service request (SRQ).................................................... C-13

Statu s byte register............................................................................ C-13

Service request enable register......................................................... C-15

Serial polling and SRQ ...................................................................... C-15

SPE, SPD (serial polling)................................................................... C-15

Status byte and service request commands...................................... C-15

Enable and transition registers.......................................................... C-16

Controlling node and SRQ enable registers...................................... C-16

Status register sets................................................................................... C-17

System Summary Event Registers.................................................... C-17

Standard Event Register.................................................................... C-18

Operation Event Registers ................................................................ C-19

Measurement Event Registers .......................................................... C-21

Register programming example......................................................... C-22

Queues..................................................................................................... C-22

Output queue..................................................................................... C-22

Error queue........................................................................................ C-22

TSP-Link system status ........................................................................... C-23

Status model configuration example.................................................. C-23

D Display Character Codes .................................................................... D-1

Display character codes............................................................................. D-2

Display character dot patterns............................................................. D-5

Index....................................................................................................Index-1

x 2600AS-901-01 Rev. B / September 2008

List of Figures

Section Figure Title Page

1 Figure 1-1 Front panel (see definitions below figure)............................... 1-6

1 Figure 1-2 Models 2601A/2611A and 2602A/2612A rear panels ............. 1-9

1 Figure 1-3 Models 2635A/2636A rear panels ........................................ 1-11

1 Figure 1-4 Display modes....................................................................... 1-16

1 Figure 1-5 USB port................................................................................ 1-22

2 Figure 2-1 2602A/2612A input/output connectors.................................... 2-3

2 Figure 2-2 Model 2636A input/output connectors..................................... 2-3

2 Figure 2-3 Model 2602A/2612A input/output LO and chassis

ground terminals ..................................................................... 2-4

2 Figure 2-4 Model 2636A input/output and chassis ground....................... 2-5

2 Figure 2-5 Model 2602A/2612A Low-Noise Chassis Ground

Banana Jack and Chassis Screw............................................ 2-5

2 Figure 2-6 Model 2636A........................................................................... 2-6

2 Figure 2-7 Model 2602A/2612A two-wire connections (local sensing)..... 2-7

2 Figure 2-8 Model 2636A two-wire connections (local sensing,

non-floating)............................................................................ 2-7

2 Figure 2-9 Model 2636A two-wire connections (local sensing, floating)... 2-7
2 Figure 2-10 Model 2602A/2612A four-wire connections (remote sensing). 2-8

2 Figure 2-11 Model 2636A four-wire connections (remote sensing)............ 2-8

2 Figure 2-12 Contact check connections ................................................... 2-10

2 Figure 2-13 Model 2602A/2612A two SMUs connected to a

3-terminal device (local sensing)........................................... 2-10

2 Figure 2-14 Model 2636A, two SMUs connected to a 3-terminal

device (local sensing, floating).............................................. 2-11

2 Figure 2-15 Three SMUs connected to a 3-terminal device.................... 2-11

2 Figure 2-16 Model 2636A, three SMUs connected to a 3-terminal

device (local sensing, non-floating)....................................... 2-12

2 Figure 2-17 Models 2602A and 2612A high-impedance guarding ........... 2-13

2 Figure 2-18 Model 2636A high-impedance guarding (floating)................. 2-13

2 Figure 2-19 Model 2636A High-impedance guarding (non-floating)......... 2-14

2 Figure 2-20 Models 2602A and 2612A noise shield................................. 2-14

2 Figure 2-21 Model 2636A noise shield (non-floating)............................... 2-15

2 Figure 2-22 Model 2636A noise shield (non-floating) .............................. 2-15

2 Figure 2-23 Model 2636A noise shield (floating) ..................................... 2-16

2 Figure 2-24 Safety shield for hazardous voltage using two

2601A/2602A channels (>42V)............................................. 2-17

2 Figure 2-25 Model 2601A/2602A-1 connections for test circuit

shown in Figure 2-24............................................................. 2-17

2 Figure 2-26 Safety shield for Models 2611A/2612A/2635A/2636A

hazardous voltage (200V maximum)..................................... 2-17

2 Figure 2-27 Model 2601A/2602A-1 connections for test circuit

shown in Figure 2-26............................................................. 2-18

2 Figure 2-28 Model 2636A connections for test circuit shown in

Figure 2-26............................................................................ 2-18

List of Figures Series 2600A System SourceMeter® Instruments Reference Manual

Section Figure Title Page

2 Figure 2-29 Model 2601A/2602A-1 connections for noise shield,

safety shield, and guarding.................................................... 2-19

2 Figure 2-30 Model 2636A connections for noise shield, safety shield,

and guarding.......................................................................... 2-19

2 Figure 2-31 Floating the Series 2600A ..................................................... 2-21

2 Figure 2-32 Model 2601A/2602A-1 SMU connections.............................. 2-22

2 Figure 2-33 Model 2636A SMU connections for the floating configuration

shown in Figure 2-31............................................................. 2-22

3 Figure 3-1 Fundamental source measure configuration........................... 3-5

3 Figure 3-2 Local triggering...................................................................... 3-11

3 Figure 3-3 2-wire resistance sensing...................................................... 3-15

3 Figure 3-4 4-wire resistance sensing...................................................... 3-15

3 Figure 3-5 Contact check measurements............................................... 3-19

4 Figure 4-1 Model 2601A/2602A continuous power operating

boundaries............................................................................... 4-7

4 Figure 4-2 Model 2611A/2612A/2635A/2636A continuous power

operating boundaries............................................................... 4-7

4 Figure 4-3 Model 2601A/2602A I-Source boundaries............................... 4-8

4 Figure 4-4 Model 2611A/2612A/2635A/2636A I-Source boundaries........ 4-9

4 Figure 4-5 I-Source operating examples................................................. 4-10

4 Figure 4-6 Model 2601A/2602A V-Source boundaries............................ 4-11

4 Figure 4-7 Model 2611A/2612A/2635A/2636A V-Source boundaries..... 4-12

4 Figure 4-8 V-Source operating examples................................................ 4-14

4 Figure 4-9 Source I configuration............................................................ 4-15

4 Figure 4-10 Source V configuration .......................................................... 4-16

4 Figure 4-11 Measure only configurations.................................................. 4-17

4 Figure 4-12 Contact check circuit configuration........................................ 4-18

4 Figure 4-13 Comparison of unguarded and guarded measurements....... 4-20

5 Figure 5-1 Enabling high-capacitance mode............................................. 5-6

6 Figure 6-1 Moving average and repeating filters..................................... 6-11

6 Figure 6-2 Median Filter.......................................................................... 6-12

8 Figure 8-1 Digital I/O port.......................................................................... 8-2

8 Figure 8-2 Digital I/O port configuration.................................................... 8-3

8 Figure 8-3 Using Model 2601A/2602A output enable............................... 8-6

8 Figure 8-4 Using Model 2611A/2612A/2635A/2636A interlock................. 8-8

9 Figure 9-1 Sweep types............................................................................ 9-3

9 Figure 9-2 Linear staircase sweep............................................................ 9-4

9 Figure 9-3 Increasing logarithmic sweep .................................................. 9-5

9 Figure 9-4 Decreasing logarithmic sweep................................................. 9-6

9 Figure 9-5 Logarithmic staircase sweep (1V to 10V, five steps) ............... 9-7

9 Figure 9-6 List sweep example................................................................. 9-9

9 Figure 9-7 Pulse rise and fall times........................................................... 9-9

10 Figure 10-1 Triggering overview ............................................................... 10-3

10 Figure 10-2 Remote trigger model ............................................................ 10-5

10 Figure 10-3 Front panel TRIG key triggering ............................................ 10-8

10 Figure 10-4 Using trigger events to start actions ...................................... 10-9

10 Figure 10-5 External instrument triggering.............................................. 10-11

10 Figure 10-6 Using a timer for an SDM cycle........................................... 10-13

10 Figure 10-7 Single pulse triggering......................................................... 10-14

10 Figure 10-8 Pulse train............................................................................ 10-15

10 Figure 10-9 Pulse train triggering............................................................ 10-17

10 Figure 10-10 Event log.............................................................................. 10-20

10 Figure 10-11 Falling edge input trigger .................................................... 10-27

10 Figure 10-12 Falling edge output trigger .................................................. 10-28

xvi 2600AS-901-01 Rev. B / September 2008

Series 2600A System SourceMeter® Instruments Reference Manual List of Figures

Section Figure Title Page

10 Figure 10-13 RisingM output trigger.......................................................... 10-29

10 Figure 10-14 RisingA input trigger ............................................................ 10-30

10 Figure 10-15 RisingA output trigger.......................................................... 10-30

10 Figure 10-16 Either Edge input trigger...................................................... 10-31

10 Figure 10-17 Either edge output trigger.................................................... 10-31

10 Figure 10-18 SynchronousM input trigger................................................. 10-32

10 Figure 10-19 SynchronousM output trigger............................................... 10-33

10 Figure 10-20 SynchronousA input trigger ................................................. 10-34

10 Figure 10-21 SynchronousA output trigger............................................... 10-34

10 Figure 10-22 Synchronous input trigger.................................................... 10-35

10 Figure 10-23 Synchronous output trigger.................................................. 10-35

11 Figure 11-1 Row/column format for display messaging............................ 11-5

12 Figure 12-1 Script example....................................................................... 12-6

12 Figure 12-2 Programming model for scripts.............................................. 12-7

12 Figure 12-3 Saving a script..................................................................... 12-12

12 Figure 12-4 Overwriting an existing file on the USB drive....................... 12-12

12 Figure 12-5 Subdirectories...................................................................... 12-13

13 Figure 13-1 Test Script Builder (example)................................................. 13-3

13 Figure 13-2 Opening and closing communications................................... 13-5

13 Figure 13-3 Creating and modifying a script using the Test Script Builder 13-6

13 Figure 13-4 Creating a project folder ........................................................ 13-7

13 Figure 13-5 Saving a script in Test Script Builder ..................................... 13-8

13 Figure 13-6 Creating a new script file ....................................................... 13-9

13 Figure 13-7 Renaming a project folder and/or script file......................... 13-10

13 Figure 13-8 Changing a launch configuration......................................... 13-11

13 Figure 13-9 Opening the Run dialog box (launch configuration)............. 13-12

13 Figure 13-10 Run dialog box (Script Attributes tab).................................. 13-14

13 Figure 13-11 Relaunching a script from the Test Script Builder toolbar.... 13-14

13 Figure 13-12 Re-launching a script from the Test Script Builder toolbar... 13-15

13 Figure 13-13 Importing a script from memory of the Series 2600A .......... 13-16

13 Figure 13-14 Instrument Console icons.................................................... 13-17

13 Figure 13-15 Programming interaction tabs: Problems, Tasks,

and Command Help............................................................. 13-20

13 Figure 13-16 Programming interaction tabs: Language Help,

Bookmarks, Browser View................................................... 13-21

13 Figure 13-17 Workspace Launcher and Select Workspace Directory....... 13-23

13 Figure 13-18 Importing a project from another workspace folder ............. 13-24

13 Figure 13-19 Deleting a project................................................................. 13-25

14 Figure 14-1 TSP-Link connections............................................................ 14-2

14 Figure 14-2 Multiple TSP-Link networks ................................................... 14-6

14 Figure 14-3 Single TSP-Link network with groups ................................... 14-7

15 Figure 15-1 IEEE-488 connector............................................................... 15-3

15 Figure 15-2 IEEE-488 connections ........................................................... 15-3

15 Figure 15-3 IEEE-488, RS-232, and LAN connection............................... 15-4

15 Figure 15-4 RS-232 interface connector................................................. 15-10

15 Figure 15-5 Ethernet connection............................................................. 15-12

16 Figure 16-1 Computer configuration using the command prompt............. 16-3

16 Figure 16-2 Internet protocol (TCP/IP) properties dialog box ................... 16-5

16 Figure 16-3 LAN connection ..................................................................... 16-7

16 Figure 16-4 LAN CONFIG/FAUL T........................................................... 16-12

16 Figure 16-5 Connection description........................................................ 16-14

16 Figure 16-6 Connect To dialog box ......................................................... 16-14

16 Figure 16-7 ASCII Setup window............................................................ 16-15

2600AS-901-01 Rev. B / September 2008 xvii

List of Figures Series 2600A System SourceMeter® Instruments Reference Manual

Section Figure Title Page

17 Figure 17-1 LXI Welcome page ................................................................ 17-3

17 Figure 17-2 IP configuration page............................................................. 17-4

17 Figure 17-3 Password administration page............................................... 17-4

17 Figure 17-4 Modify IP configuration page................................................. 17-5

17 Figure 17-5 Virtual front panel................................................................... 17-8

17 Figure 17-6 ID Illuminated......................................................................... 17-8

17 Figure 17-7 LAN status indicator............................................................... 17-8

20 Figure 20-1 Connections for voltage calibration...................................... 20-10

20 Figure 20-2 Connections for current calibration (100nA to 1A ranges)... 20-14

20 Figure 20-3 Connections for current calibration...................................... 20-18

20 Figure 20-4 Connections for contact check 0W calibration..................... 20-20

20 Figure 20-5 Connections for contact check 50W calibration................... 20-21

21 Figure 21-1 Line fuse replacement ........................................................... 21-2

21 Figure 21-2 Pulse sweep example............................................................ 21-4

21 Figure 21-3 Pulse sweep example............................................................ 21-5

22 Figure 22-1 Connections for voltage verification....................................... 22-7

22 Figure 22-2 Current verification connections (2602A/2612A(3A);

2636A(1.5A)) ....................................................................... 22-12

22 Figure 22-3 Connection ranges (2601A/2602A (3A);

2611A/2612A/2635A/2636A (1.5A)) .................................... 22-13

Appendix Figure Title Page

C Figure C-1 Status model overview............................................................ C-3

C Figure C-2 Status model (system summary and standard event

registers)................................................................................. C-4

C Figure C-3 Status model (operation event registers)................................ C-5

C Figure C-4 Status model (operation event registers)................................ C-6

C Figure C-5 Status model (operation event registers)................................ C-7

C Figure C-6 Status model (operation event registers)................................ C-8

C Figure C-7 Status model (questionable event registers)........................... C-9

C Figure C-8 Status model (measurement event registers)....................... C-10

C Figure C-9 16-bit status register............................................................. C-13

C Figure C-10 Status byte and service request (SRQ) ................................ C-14

C Figure C-11 Standard event register......................................................... C-19

C Figure C-12 TSP-Link status model configuration example..................... C-25

xviii 2600AS-901-01 Rev. B / September 2008

List of Tables

Section Table Title Page

1 Table 1-1 Connectors and triax cable conductors................................. 1-12

1 Table 1-2 Triax connector on ground module........................................ 1-13

1 Table 1-3 Main menu ............................................................................ 1-19

1 Table 1-4 Configuration menus............................................................. 1-20

2 Table 2-1 Selecting the sense mode from the front panel....................... 2-9

2 Table 2-2 Commands to select sense mode........................................... 2-9

2 Table 2-3 Commands to select the output-off state............................... 2-24

3 Table 3-1 Source-measure capabilities................................................... 3-3

3 Table 3-2 Maximum compliance values.................................................. 3-4

3 Table 3-3 Compliance commands........................................................... 3-5

3 Table 3-4 Auto zero settings ................................................................... 3-6

3 Table 3-5 Auto zero command and options ............................................ 3-7

3 Table 3-6 Basic source-measure commands.......................................... 3-9

3 Table 3-7 Basic contact check commands............. ....... ... ... ... .... ... ... ... .. 3-19

4 Table 4-1 Maximum compliance limits .................................................... 4-2

4 Table 4-2 Model 2601A/2602A Maximum Duty Cycle

equation constants.................................................................. 4-5

4 Table 4-3 Model 2611A/2612A/2635A/2636A Maximum Duty Cycle

equation constants.................................................................. 4-5

4 Table 4-4 Current Measure Settling Time1, 2 ....................................... 4-21

4 Table 4-5 Current source gain-bandwidth............................................. 4-22

5 Table 5-1 Models 2601A and 2602A source settling times..................... 5-3

5 Table 5-2 Models 2611A/2612A and 2635A/2636A source

settling times ........................................................................... 5-3

5 Table 5-3 Current measure and source settling times............................. 5-3

6 Table 6-1 Source and measurement ranges........................................... 6-2

6 Table 6-2 Range commands................................................................... 6-5

6 Table 6-3 Digits commands..................................................................... 6-6

6 Table 6-4 Speed command..................................................................... 6-7

6 Table 6-5 Rel commands ........................................................................ 6-9

6 Table 6-6 Filter commands.................................................................... 6-12

7 Table 7-1 SMU buffer example................................................................ 7-6

7 Table 7-2 Reading buffer commands...................................................... 7-7

7 Table 7-3 Buffer storage control attributes.............................................. 7-8

7 Table 7-4 Buffer read-only attributes....................................................... 7-8

7 Table 7-5 Buffer control programming examples .................................... 7-8

7 Table 7-6 Buffer read-only attribute programming examples.................. 7-8

7 Table 7-7 Recall attributes ...................................................................... 7-9

7 Table 7-8 Buffer status bits...................................................................... 7-9

8 Table 8-1 Digital bit weight...................................................................... 8-4

8 Table 8-2 Remote digital I/O commands................................................. 8-5

8 Table 8-3 Digital I/O bit weight. ............................................................... 8-9

8 Table 8-4 Remote synchronization line commands................................. 8-9

9 Table 9-1 Logarithmic sweep points........................................................ 9-8

List of Tables Series 2600A System SourceMeter® Instruments Reference Manual

Section Table Title Page

9 Table 9-2 Sweep example parameters.................................................. 9-12

10 Table 10-1 Event IDs............................................................................... 10-4

10 Table 10-2 Event detectors ..................................................................... 10-7

10 Table 10-3 Hardware trigger mode summary........................................ 10-10

10 Table 10-4 Action overruns ................................................................... 10-18

10 Table 10-5 LXI trigger edge detection................................................... 10-19

10 Table 10-6 LAN trigger modes .............................................................. 10-19

10 Table 10-7 Event log descriptions......................................................... 10-21

11 Table 11-1 Cross referencing functions/attributes to section topics........ 11-2

11 Table 11-2 Bit identification for indicators................................. ... .... ... ... 11-10

11 Table 11-3 Key codes to send for display.sendkey............................... 11-13

11 Table 11-4 Key code values returned for display.getlastkey ................. 11-14

12 Table 12-1 Example script to sweep V and measure I............................ 12-9

12 Table 12-2 Example script using a function............................................. 12-9

14 Table 14-1 TSP-Link reset commands.................................................... 14-4

14 Table 14-2 TSP-Link network group functions ....................................... 14-7

15 Table 15-1 General bus commands........................................................ 15-5

15 Table 15-2 RS-232 interface commands................................................. 15-8

15 Table 15-3 RS-232 connector pinout..................................................... 15-10

15 Table 15-4 PC serial port pinout............................................................ 15-11

15 Table 15-5 LAN functions...................................................................... 15-12

16 Table 16-1 CONFIG/fault messages..................................................... 16-11

16 Table 16-2 Port number......................................................................... 16-12

17 Table 17-1 Web Browser Requirements.................................................. 17-2

19 Table 19-1 Base library functions.......................................................... 19-16

19 Table 19-2 Base library functions........................................................ 19-236

19 Table 19-3 KISweep TSP test script: SweepILinMeasureV................. 19-240

19 Table 19-4 KISweep TSP test script: SweepVLinMeasureI................. 19-241

19 Table 19-5 KISweep TSP test script: SweepILogMeasureV............... 19-243

19 Table 19-6 KISweep TSP test script: SweepVLogMeasureI............... 19-245

19 Table 19-7 KISweep TSP test script: SweepIListMeasureV................ 19-246

19 Table 19-8 KISweep TSP test script: SweepVListMeasureI................ 19-247

19 Table 19-9 Required true conditions for “Initiate” function execution .. 19-248

19 Table 19-10 KISweep TSP test script: PulseIMeasureV ....................... 19-249

19 Table 19-11 KISweep TSP test script: PulseVMeasureI ...... ... ... ... .... ... . 19-250

19 Table 19-12 KIPulse TSP test script: ConfigPulseIMeasureV............... 19-251

19 Table 19-13 KIPulse TSP test script: ConfigPulseVMeasureI............... 19-253

19 Table 19-14 KIPulse TSP test script: ConfigPulseIMeasureVSweepLin 19-255
19 Table 19-15 KIPulse TSP test script: ConfigPulseVMeasureISweepLin 19-257
19 Table 19-16 KIPulse TSP test script: ConfigPulseIMeasureVSweepLog 19-259
19 Table 19-17 KIPulse TSP test script: ConfigPulseVMeasureISweepLog 19-261

19 Table 19-18 KIPulse TSP test script: QueryPulseConfig....................... 19-264

19 Table 19-19 KIPulse TSP test script: InitiatePulseTest.......................... 19-267

19 Table 19-20 KIPulse TSP test script: InitiatePulseTestDual .................. 19-268

19 Table 19-21 KIHighC TSP test script: i_leakage_measure()................. 19-271

19 Table 19-22 KIHighC TSP test script: i_leakage_threshold()................ 19-272

19 Table 19-23 KIParlib TSP test script: gm_vsweep().............................. 19-273

19 Table 19-24 KIParlib TSP test script: gm_isweep()............................... 19-274

19 Table 19-25 KISavebuffer TSP test script: savebuffer()........................ 19-274

20 Table 20-1 Recommended calibration equipment................................... 20-4

20 Table 20-2 Model 2601A/2602A calibration steps....... .... ... ... ... ... .... ... ... .. 20-5

20 Table 20-3 Model 2611A/2612A calibration steps ................................... 20-6

20 Table 20-4 Model 2635A/2636A calibration steps....... .... ... ... ... ... .... ... ... .. 20-7

xxiv 2600AS-901-01 Rev. B / September 2008

Series 2600A System SourceMeter® Instruments Reference Manual List of Tables

20 Table 20-4 Model 2635A/2636A calibration steps....... .... ... ... ... ... .... ... ... .. 20-7

20 Table 20-5 Calibration commands........................................................... 20-8

20 Table 20-6 Settings of Model 2635A/2636A Characterization

of Voltage Source................................................................ 20-19

21 Table 21-1 Line fuse................................................................................ 21-3

22 Table 22-1 Recommended verification equipment.................................. 22-3

22 Table 22-2 Model 2601A/2602A output voltage accuracy limits.............. 22-8

22 Table 22-3 Model 2611A/2612A/2635A/2636A output voltage

accuracy limits........ ... ... ... .... ... ... ............................................ 22-8

22 Table 22-4 Model 2601A/2602A voltage measurement accuracy limits.. 22-9
22 Table 22-5 Model 2611A/2612A/2635A/2636A voltage measurement

accuracy limits........ ... ... ... .... ... ... ............................................ 22-9

22 Table 22-6 Model 2601A/2602A output current accuracy limits............ 22-10

22 Table 22-7 Model 2611A/2612A output current accuracy limits ............ 22-10

22 Table 22-8 Model 2635A/2636A output current accuracy limits............ 22-14

22 Table 22-9 Model 2635A/2636A Characterization of Voltage

Source settings.................................................................... 22-15

22 Table 22-10 Model 2601A/2602A current measurement accuracy limits 22-15
22 Table 22-11 Model 2611A/2612A current measurement accuracy limits 22-16
22 Table 22-12 Model 2635A/2636A current measurement accuracy limits 22-16

Appendix T able Title Page

A Table A-1 Error queue commands........................................................... A-2

A Table A-2 Error summary......................................................................... A-3

B Table B-1 Common commands ............................................................... B-2

B Table B-2 Script command equivalents ................................................... B-2

C Table C-1 Status function summary....................................................... C-11

C Table C-2 Commands to reset registers and clear queues .. ... ... .... ... ... . C-12

C Table C-3 Status Byte and Service Request Enable Register

commands............................................................................ C-16

C Table C-4 Standard event commands................................................... C-19

C Table C-5 Error queue commands........................................................ C-23

D Table D-1 Display character codes (decimal 0-143)............................... D-2

D Table D-2 Display character codes (decimal 144-255)........................... D-4

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List of Tables Series 2600A System SourceMeter® Instruments Reference Manual

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xxvi 2600AS-901-01 Rev. B / September 2008

In this section:

Topic Page

Introduction....................................................................................... 1-2

General information.......................................................................... 1-3

Front and rear panel familiarization ................................................ 1-6

Section 1

Getting Started

Capabilities and features.............................................................. 1-2

Organization of manual sections .................................................. 1-3

Warranty information .................................................................... 1-3

Contact information....................................................................... 1-3

Unpacking and inspection............................................................. 1-3

Options and accessories .............................................................. 1-4

User’s and Reference manuals...................................................... 1-5

Front panel summaries................................................................. 1-6

Rear panel summaries.................................................................. 1-9

Cooling vents.................................................................................... 1-13

Power-up............................................................................................ 1-14

Line power connection.................................................................. 1-14

Power-up sequence...................................................................... 1-15

Beeper.......................................................................................... 1-15

Display modes................................................................................... 1-16

Editing controls................................................................................. 1-17

Source and compliance editing .................................................... 1-17

Menu navigation ........................................................................... 1-18

Menu types................................................................................... 1-19

Interface configuration..................................................................... 1-21

USB storage overview...................................................................... 1-21

Connecting the USB flash drive.................................................... 1-21

Using the file system ........................................................................ 1-22

File system navigation.................................................................. 1-22

Error and status messages............................................................... 1-22

Section 1: Getting Started Series 2600A System SourceMeter® Instruments Reference Manual

Introduction

The Keithley Instruments Series 2600A System SourceMeter® instruments offer electronic
component and semiconductor device manufacturers a scalable, high throughput, highly cost­effective solution for precision DC, pulse, and low frequency AC source-measure testing.

Capabilities and features

• Models 2601A/2602A System SourceMeter instruments:
– Source ±DC voltage from 1 μV to 40.4 V
– Source ±DC current from 1p A to 3.03 A
– Source ±pulse current up to 10 A
– Measure ± pulse current up to 10 A
– Measure ±DC voltage from 1 μV to 40.8 V
– Measure ±DC current from 1 pA to 3.06 A

• Models 2611A/2612A System SourceMeter instruments:
– Source ±DC voltage from 1 μV to 202 V
– Source ±DC current from 1p A to 1.515 A
– Source ±pulse current up to 10 A
– Measure ± pulse current up to 10 A
– Measure ±DC voltage from 1 μV to 204 V
– Measure ±DC current from 1 pA to 1.53 A

• Models 2635A/2636A System SourceMeter instruments:

– Source +/- DC voltage from 1 μV to 20 2V
– Source +/- DC current from 20 fA to 1.515 A
– Source ±pulse current up to 10 A
– Measure ± pulse current up to 10 A
– Measure +/- DC voltage from 1 μV to 204 V
– Measure +/- DC current from 1 fA to 1.53 A

• Resistance and power measurement functions.

• LXI Class C.

• High Capacitance mode for load impedance up to 50 μf.

• Contact check function.

• Two independent source-measure channels (Models 2602A, 2612A, and 2636A only).

• Four-quadrant sink or source operation.

• Embedded Test Script Processor (TSP™) accessible from any host interface; responds to

high-speed test scripts comprised of instrument control commands.

• Linear, logarithmic, and custom sweeping and pulsing.

• Internally stores five user setup options.

• Two dedicated reading buffers per SMU that can each store and recall over 140,000

measurements. Additional dynamic reading buffers can be created.

• Filtering to reduce reading noise.

• Supports IEEE-488 (GPIB), RS-232, and Ethernet.

• TSP-Link: Allows TSP-enabled instruments to trigger and communicate with each other.

• Digital I/O port: Allows the Series 2600A to control other devices.

• Trigger model su pport s robust trigge ring an d synchron ization sch emes at hard ware speeds.

• Advanced TSP features enable parallel script execution across the TSP-Link network.

• USB flash drive access for saving data buffers, test scripts, and user setups.

1-2 Return to Section Topics 2600AS-901-01 Rev. B / September 2008

Series 2600A System SourceMeter® Instruments Reference Manual Section 1: Getting Started

• Web-based characterization tool that provides easy access to data gathering, sweeping,

and pulsing features.

Organization of manual sections

The manual sections in the PDF version of this manual can be viewed by clickin g the “Bookmarks”
tab on the left side of this window. This tab also provides direct links to the various sections and
section topics.

The manual sections are also listed in the Table of Contents located at the beginning of this
manual.

General information

Warranty information

Warranty information is located at the front of this manual. Should your Series 2600A require
warranty service, contact the Keithley Instruments representative or authorized repair facility in
your area for further information. When returning the instrument for re pair , be sur e to complete and
return the service form at the back of this manual to provide the repair facility with the relevant
information.

Contact information

If you have any questions, please contact your local Keithley Instruments representative or call
one of our Application Engineers at 1-888-KEITHLEY (1-888-534-8453) , U.S. and Canada only.
You can also contact us through our website at www.keithley.com.

Unpacking and inspection

Inspection for damage

The Series 2600A was carefully inspected electrically and mechanically before shipment. After
unpacking all items from the shipping carton, check for any obvio us signs of physical dam age that
may have occurred during transit (there may be a protective film over the display lens, which can
be removed). Report any damage to the shipping agent immediately. Save the original packing
carton for possible future shipment. Before removing the Series 2600A from the bag, observe the
following handling precautions.

Handling precautions

• Always grasp the Series 2600A by the covers or by the handle.

• After removing the Series 2600A from its anti-static bag, inspect it for any obvious signs of

physical damage. Report any such damage to the shipping agent immediately.

• When the Series 2600A is not installed and connected, keep the unit in its anti-static bag

and store it in the original packing carton.

Package content

The following items are included with every Series 2600A order:

• Model 2601A, 2602A, 2611A, 2612A, 2635A, or 2636A SourceMeter instrument with line

cord

• Two RJ-45 crossover cables

2600AS-901-01 Rev. B / September 2008 Return to Section Topics 1-3

Section 1: Getting Started Series 2600A System SourceMeter® Instruments Reference Manual

• Certificate of calibration

• Quick Start Guide

• CD-ROMs that contain:

• PDFs of the User’s and Reference Manuals

• Test Script Builder script de ve lo pm ent so ftware

• Accessories as ordered

The following items are included with Models 2601A, 2602A, 2611A, and 2612A only:

• 2600-KIT Screw terminal connector kit (two with Models 2602A and 2612A and one with

Models 2601A and 2611A)

The following items are included with Models 2635A and 2636A only:

• 2600-IAC interlock connector

• CS-1423-3 inverted mini plug

• 2636-002 wire cutting

• 2600-ALG-2 low noise triax cable with alligator clips, UL approved for up to 42 V , 2m (6.6 f t)

(two with Model 2636A and one with Model 2635A)

• Quick Start Guide

Options and accessories

GPIB cables, interfaces, and adaptors (connects Series 2600A to the GPIB bus)

Models 7006-1 and 7006-2: Single-shielded GPIB cables. Terminated with one straight

connector (non-stacking) and one feed-through connector. Model 7006-1 is 1m long; Model
7006-2 is 2m long.

KPCI-488LP: IEEE-488 interface/controller for the PCI Bus.
KPXI-488: IEEE-488 interface board for the PXI Bus.
KUSB-488A: USB-to-GPIB interface adapter.
Models 7007-05, 7007-1, 7007-2, and 7007-4 : Doub le-shielded premium GPIB cables. Each

end is terminated with a feed-through metal housing for longest life and best performance.
Model 7007-05 is 0.5m long; 7007-1 is 1m long; Model 7007-2 is 2m long; Model 7007-4 is 4m
long.

Model 7010: Shielded GPIB-to-GPIB bus adapter. Provides additional clearance between the
rear panel and GPIB cable connector. Allows easier access to cables and other connectors.

RS-232 cable (connects Series 2600A to the RS-232)

Model 7009-5 shielded RS-232 cable: This straight-through cable connects the RS-232 of

the Series 2600A to the RS-232 interface of your PC. This cable is 5 ft long and uses shielded
cable and connectors to reduce electromagnetic interference (EMI).

1-4 Return to Section Topics 2600AS-901-01 Rev. B / September 2008