Fuji Electric ZKJ-3 Service Manual

ZKJ-3

	INZ-TN3ZKJ-C

( ZKJ)

( ) ···················································1

·························································1

·······································1

······································································1

(AC250V/3.15A)·····················································2

(	) ·································1
(	)················································2
(	)·······················1
(	) ··························1

( )··························································1

			2006
			2006-07

i

		(	)

2

ii

D

iii

iv

	...............................................................................................................................	i
		................................................................................................................ ii
1.	.....................................................................................................................	1
2.		................................................................................................... 2
	2.1	............................................................................................................ 2
	2.2	.......................................................................................................................... 3
3.		................................................................................................................. 4
	3.1	.................................................................................................................................. 4
	3.2	.................................................................................................................................. 5
	3.2.1	....................................................................................................... 5
	3.2.2	............................................................................................ 6
	3.3	.................................................................................................................................. 7
	3.4 .......................................................................................................................................	10
	3.4.1	............................................................................................................ 10
	3.4.2	............................................................................................................ 10
	3.4.3	......................................................................................................... 10
	3.4.4	................................................................................................................ 10
	3.4.5	................................................................................................. 11
	3.4.6	..................................................................................................... 11
	3.5	................................................................................................................................ 12
	3.5.1	................................................................................................................... 12
	3.5.2	..................................................................................................... 12
4.	...................................................................................................................	21
	4.1	................................................................................................................................ 21
	4.2	..................................................................................................................... 21
5.		......................................................................................... 22
	5.1	.......................................................................................................... 22
	5.2	.......................................................................................................... 23
	5.3	..................................................................................................................... 24
	5.4	................................................................................................................................ 27
6.		........................................................................................................... 28
	6.1	................................................................................................................................ 28
	6.1.1	................................................................................................. 28
	6.1.2	............................................................................................................ 29
	6.2	................................................................................................................................ 30
	6.2.1	......................................................................................................... 30
	6.2.2	.......................................................................................... 32
	6.2.3	................................................................................................. 34

v

	6.2.4		.........................................................................................	36
	6.3	................................................................................................................................		38
	6.3.1	............................................................................................................		38
	6.3.2	................................................................................................................		40
	6.4	.....................................................................................................................		41
	6.4.1	...................................................................................................................		41
	6.4.2		.......................................................................................	44
	6.5	..............................................................................................................		47
	6.5.1	............................................................................................................		47
	6.5.2		...............................................................................	49
	6.6	........................................................................................................................		52
	6.7	............................................................................................................................		54
	6.8	................................................................................................................................		60
	6.9 .......................................................................................................................................			65
	6.9.1	...................................................................................................................		65
	6.9.2	................................................................................................................		66
7.	...................................................................................................................			67
	7.1	................................................................................................................................		67
	7.2	.................................................................................................................		67
	7.3	.................................................................................................................		68
	7.3.1	(	)........................................................................................	68
	7.3.2	(	)........................................................................................	70
	7.3.3	(	) .............................................................................	72
	7.3.4	..............................................................................................		73
8.		............................................................................................................... 75
9.	...................................................................................................................			77
	9.1	................................................................................................................................		77
	9.2	................................................................................................................................		80
	9.3	...................................................................................................................................		82

vi

1.

		NO SO2	CO2 CO	CH4
	O2	5	( O2	4	)
							[
(	)	]			(	)[ ]	[
]	(	)	[				]
[					]	[
	]

1

2.

2.1

POWER

1

2

( )

2-1

	(
	1	2
	2
	)

2

2.2

(TN1~TN5)

(φ4.5 6 )

TN1

TN2

TN3

TN4

TN5

(CN2)

(CN1)

(CN3)

(1m)

				2-2
	φ4.5			6
(TN1_TN5)
	M3.5
						(INZ-TN513327-C)
				( )

3

3.

3.1

		AC100V	AC240V
		AC85V	AC264V
		50Hz/60Hz
		250VA

		EN60320 1	3
	-5ºC 45ºC
	90%RH

4

3.2
3.2.1
		2
							(	mm)
19
		177	M6	101.6(EIA)	100(JIS)	(	)
19
		429
		483	450
			465
						(		)
1
	19
		305A-24/Accuride
2	19	(				)
	9.3
		-5_45ºC

5

3.2.2

)

( mm)

φ4.5(6 )	M4	(6 )
		150	150
164	154		142
316			302

()

6

3.3

Rc1/4( NPT1/4)

4mm

1

2

( )

0.5L/min±0.2L/min

N2

1L/min

7

2

2(IR Unit2)

1 (IR Unit1)

O2

O2

OUTLET INLET

OUTLET INLET

1 (IR Unit1)

2 (IR Unit2)

2

2

		1	2
	NO,SO2,CO2,CO,CH4
	1
	NO/SO2,CO2/CO	NO/SO2
	2	CO2/CO
	NO/CO	NO	CO
	2
	NO/SO2/CO	NO/SO2	CO
	3
	NO/SO2/CO2/CO	NO/SO2	CO2/CO
	4
		O2	2

8

1

0.5L/min

1 2(1)

NO2/NO

0.5L/min

0.5L/min

NONOXNO2/NO

1 2(2)

NO2/NO

0.5L/min

NONOXNO2/NO

9

ZKJ

ZKJ

1 (IR Unit1)

2 (IR Unit2)

ZKJ

1 (IR Unit1)

2 (IR Unit2)

3.4

3.4.1

		0.3µm
	0ºC
	SO3	SO3
	CL2	F2 HCL
	0_50ºC

3.4.2

0.5L/min±0.2L/min

(3.4.6 )

3.4.3

				( 1		)
		O2		O2		O2
		N2		N2
O2	90%			90%		90%
O2				90%		1_2%O2
				(21%)

3.4.4

N2 1L/min

10

3.4.5

3.4.6

φ10φ8

˚ 15

5

ZKJ

2

				CO,CO2
				(02)
				NO2/NO
				NO,SO2
ZERO NO	SO2	CO2	CO	O2

							O2
	Air	NO	SO2	CO2	CO	O2	(ZFK7)
		/N2	/N2	/N2	/N2	/N2

			40 m
					O2
						(	(ZKJ)	O2
							)
				NO2/NO			NOX	NO2
	PTFE						NO

11

3.5

3.5.1

< >

		2
	(	)
3.5.2

( )

(1m)

12

(1)	(A0)	1 _	2 _
	DC4 20mA	DC0 1V(	)

DC4 20mA 550

		DC0	1V	100k
					$)
								N
(2)	O2			2 _
						(		ZFK7 )
					DC0	1V(	1M	)
					O2		DC0_1V
		O2
		O2			O2
				(		ZFK7)
(3)		(DI)	2 _		3 _
					(on)	(off)

(4)

(DO)

_

4

5

AC250V/2A

(on) (off)

O2

13

(5)

Ch5 (Ch5_OUT)

Ch4 (Ch4_OUT)

Ch3 (Ch3_OUT)

Ch2 (Ch2_OUT)

Ch1 (Ch1_OUT)

(R_HOLD)

(RESET)

(R_CAL)

		1
<TN1>
1		11
2		12
3		13
4		14
5		15
6		16
7		17
8		18
9		19
10		20
(M3.5		)
		3
<TN3>
1		11
2		12
3		13
4		14
5		15
6		16
7		17
8		18
9		19
10		20
(M3.5		)
		5

<TN5>

	1		11
	2		12
3
	3		13
(ALM_3)
	4		14
	5		15
2
	6		16
(ALM_2)
	7		17
	8		18
1
	9		19
(ALM_1)
	10		20
	(M3.5		)

Ch10 (Ch10_OUT)

Ch9 (Ch9_OUT)

Ch8 (Ch8_OUT)

Ch7 (Ch7_OUT)

Ch6 (Ch6_OUT)

Ch5

(RNG_ID Ch5)

Ch4

(RNG_ID Ch4)

Ch3

(RNG_ID Ch3)

Ch2

(RNG_ID Ch2)

Ch1

(RNG_ID Ch1)

6 (ALM_6)

5

(ALM_5)

4

(ALM_4)

2

							<TN2>
(O2	) 1						1		11						Ch5
							2		12
															(R_RNG_Ch5)
	Ch12						3		13						Ch4
							4		14
	(Ch12_OUT)														(R_RNG_Ch4)
	Ch11						5		15						Ch3
							6		16
	(Ch11_OUT)														(R_RNG_Ch3)
							7		17						Ch2
							8		18
															(R_RNG_Ch2)
							9		19						Ch1
							10		20
															(R_RNG_Ch1)
							(M3.5		)
	1						O2
									4
							<TN4>
							1		11
	(PEAK_ALM)						2		12
							3		13
							4		14
	(ACAL/MNT)
	ON/OFF						5		15
							6		16
	(PUMP)
							7		17
	(CAL_ALM)						8		18
							9		19
	(FAULT)						10		20
							(M3.5		)

		<CN3>
	(	)
	1	6	Ch3
	2
		7	Ch4
	3
		8	Ch5
Ch1	4
		9		DC5V
	5
Ch2

<D-sub 9P>

<CN2>

(D-Sub9pin)

1

6

2

7

3

8

4

9

5

14

(6)

							1								1<TN1>
															(	)
					<TN1>
Ch5					1		11						Ch10	1 2	Ch5
(Ch5_OUT)
					2		12						(Ch10_OUT)
														3 4	Ch4
Ch4					3		13						Ch9
(Ch4_OUT)					4		14						(Ch9_OUT)	5 6	Ch3
Ch3					5		15						Ch8	7 8	Ch2
(Ch3_OUT)					6		16						(Ch8_OUT)	9 10	Ch1
Ch2					7		17						Ch7
														11 12	Ch10
(Ch2_OUT)					8		18						(Ch7_OUT)
														13 14	Ch9
Ch1					9		19						Ch6
(Ch1_OUT)					10		20						(Ch6_OUT)	15 16	Ch8
					(M3.5		)
														17 18	Ch7
														19 20	Ch6

								2
						<TN2>										2<TN2>
(O2	) 1					1		11				Ch5		1 2		O2
						2		12					(R_RNG_Ch5)
	Ch12					3		13				Ch4
						4		14
	(Ch12_OUT)												(R_RNG_Ch4)			O2
	Ch11					5		15				Ch3
														3	4	Ch12
						6		16					(R_RNG_Ch3)
	(Ch11_OUT)
														5	6	Ch11
						7		17				Ch2
						8		18					(R_RNG_Ch2)	7	10
						9		19				Ch1
						10		20					(R_RNG_Ch1)	11 12		Ch5
						(M3.5		)
														13 14		Ch4
														15 16		Ch3
														17 18		Ch2
														19 20		Ch1

(Open)

(Short)6.7

15

3

				<TN3>
				1		11				Ch5
				2		12
										(RNG_ID Ch5)
				3		13				Ch4
				4		14
										(RNG_ID Ch4)
				5		15				Ch3
				6		16
(R_HOLD)										(RNG_ID Ch3)
				7		17				Ch2
				8		18
(RESET)										(RNG_ID Ch2)
				9		19				Ch1
				10		20
(R_CAL)										(RNG_ID Ch1)
				(M3.5		)

	3<TN3>
1 4	(
	)

56

(Open) (Short)

6.7

78

(Short)(1.5)O2

(Open)

6.7

910

(Short)1.5 (open)

ON/OFF

6.4

1112 Ch5

1314 Ch4

1516 Ch3

1718 Ch2

1920 Ch1

16

						4
				<TN4>
				1		11
(PEAK_ALM)				2		12
				3		13
(ACAL/MNT)				4		14
ON/OFF				5		15
				6		16
(PUMP)
				7		17
(CAL_ALM)				8		18
				9		19
(FAULT)				10		20
				(M3.5		)

			5
	<TN5>
	1		11
	2		12
3				6
	3		13
				(ALM_6)
(ALM_3)
	4		14
	5		15	5
2
	6		16
(ALM_2)				(ALM_5)
	7		17
	8		18
1
	9		19	4
(ALM_1)
	10		20	(ALM_4)
	(M3.5		)

4<TN4> 12

					6.6
3	4
5	6			ON/OFF
					ON/OFF
7	8
9	10
11	20
			(		)
		5<TN5>
2	3	4		3
					2	3		3	4
						2	3
			3	4
5	6	7		2
					5	6		6	7
						5	6
			6	7
8	9	10		1
					8	9		9	10
							8	9
				9	10
12	13		14	6
							12	13
				13	14
							12	13
				13	14

15 16 175

1516 1617 1516 1617

18 19 204

1819 1920 1819 1920

6.3

17

<CN3>

		<CN3>
		1	6 Ch3
		2
			7 Ch4
		3
			8 Ch5
	Ch1	4
			9	DC5V
	Ch2	5
		(Dsub 9P)
		CN3
	(	5V/50mA)
		ON
		ON	OFF
		OFF
			ON/OFF (	)
	6.4
	9	ON/OFF		(DC5V/max0.5A)

<>

5V	9	a

1

SV1 3

SV2 4

SV3

5

SV4

CN3

SV1~SV4

<>

3.4.6

SV1

SV2

SV3

SV4

Ch1 Ch2

(D-sub 9 1.5m)

18

(7)

(

6.9

)

on

ONOFF

off on

off on

off

Ch15

off

(ON)

					CH2
ON OFF

Ch1

Ch2

(

ON )

19

	( 6.4.1				)
				Ch1	Ch3	Ch5
				Ch2		Ch4
ON OFF

350S

Ch1

		Ch1
Ch2		350S

Ch3

Ch4

Ch5

(ON)

20

4.

4.1

(1)

4.2

(1)

	ON
	1~2
	4
	4

)

@ @ @ @

@ @ @ @

6.

6.9

21

5.

5.1

MODE		ZERO
MODE	ESC	ZERO
	ENT	SPAN
		SPAN

5-1

MODE
	(	)
			ZERO
	(	)
			SPAN
	(	)

22