Fluke molbox RFM Data sheet

molbox RFM
Reference Flow Monitor
Technical Data
Features
Compact presentation
Covers the flow range of 1 sccm to
100 slm with molbloc-L, and up to 5000 slm with molbloc-S
Select from 20 different gases with
molbloc-L and 10 with molbloc-S
of ± 0.5 % of reading with 100:1 rangeability
Internal valving for on-board purge,
leak test and tare support
Includes advanced measurement
functions such as totalize, average, hi/lo and deviation
Complete front panel control and
RS232 and IEEE-488 remote communications
Measures mass and volume flow with
user setable reference pressure and temperature conditions
molbox RFM is a support unit for making mass flow mea­surements using molbloc-L laminar and molbloc-S sonic flow elements.
molbloc flow elements are connected to molbox RFM with two pressure connections and one data line. molbox RFM reads calibration data off the molbloc EEPROM and measures molbloc upstream and downstream pressure with its built-in high accuracy Reference Pressure Transducers (RPTs). An ohmic measurement system reads the resistance of the molbloc platinum resistance ther­mometers from which molbloc temperature is calculated. Using
the molbloc calibration data, pressures, temperature and gas properties stored in molbox RFM memory, the flow rate of the gas flowing through the molbloc is calculated. For molbloc-L flow elements, a microrange option is available to increase flow measurement resolution and accuracy under 10 % FS of the flow range.
molbox RFM and molbloc flow elements are useful in a variety of measurement, test and cali­bration applications in which highly accurate measurement of low gas flows where maximum accuracy is the most notable specification is needed. molbox RFM is specifically designed for
applications in which a highly compact presentation, great rangeability and reduced cost are the primary considerations. A second model, molbox1, is available for applications in which lowest possible uncer­tainty is the top priority.
To configure your mass flow calibration system, see the pages that follow to select the molbloc and pressure depen­dent calibrations to best cover your flow ranges and pressure conditions. molstic mounting systems and COMPASS® for molbox calibration software are available to complete the system (see molstic and COMPASS product brochures).
Flow measurement specications
molbox RFM measures the flow through molbloc flow elements. The flow range, usable operating pressure, and differential pressure for molbloc-L, or the flow range and absolute pressure range for molbloc-S, depend on the molbloc element used and the calibration options. For molbloc-L ranges up to 3E4, the resolution and accuracy under 10 % FS are improved by the microrange option. For the 1E5-L molbloc, the microrange option is necessary to achieve the specification.
molbox RFM
molbloc-L (ranges 1E1-L thru 3E4-L) molbloc-S (all ranges)
Measurement update rate
Range 0 to molbloc full scale depending on gas and molbloc pressure
Resolution 0.01 % FS ± 0.01 % of reading
Linearity ± 0.23 % of reading from 10 % to 100 % FS,
Repeatability ± 0.1% of reading from 10 % to 100 % FS,
1
Precision
Predicted stability (one year)
Measurement uncertainty
3
1 second 1 second
dependent calibration type (see molbloc-L tables)
± 0.023 % FS under 10 % FS
± 0.01% FS under 10 % FS
± 0.25 % of reading from 10 % to 100 % FS, ± 0.025 % FS under 10 % FS
2
± 0.15 % of reading from 10 % to 100 % FS, ± 0.015 % FS under 10 % FS
± 0.5 % of reading from 10 % to 100 % FS, ± 0.05 % FS under 10 % FS
The flow related to 20 kPa to 200 kPa absolute (3 psia to 30 psia) or 50 kPa to 500 kPa absolute (7 psia to 70 psia) upstream (see molbloc-S table)
± 0.25 % of reading
± 0.1 % of reading
± 0.3 % of reading
± 0.2 % of reading
± 0.5 % of reading from 50 kPa to 500 kPa, ± 0.5 % of the flow @ 50 kPa from 20 kPa to 50 kPa
molbox RFM with Microrange option
molbloc-L (ranges 1E1-L thru 3E4-L) molbloc-L (ranges 1E5 only)
Measurement update rate
Range 0 to molbloc full scale depending on gas and molbloc pressure
Resolution 0.01 % FS, 0.001 % FS under 10 % FS 0.01 % FS
Linearity ± 0.23 % of reading from 1 % to 100 % FS,
Repeatability ± 0.1 % of reading from 1 % to 100 % FS,
1
Precision
Predicted stability (one year)
Measurement uncertainty
1
Precision: Combined linearity, hysteresis, repeatabil ity.
2
Predicted S tabi lity: Max imum change in zero and span over one year for typical molbox R FM
and molbloc used under typical condit ions. A s sta bility ca n only be predicted, stabilit y for a specific mol box RFM should be es tabl ished from experience.
3
Measu rement Uncertainty: Ma ximum dev iation of the mol box R FM flow i ndic ation f rom the
true value of t he flow through the mol bloc including precision, sta bil ity and DHI calibration standard u ncer tainty. Meas urement uncerta inty specificat ions for molblocs are valid only for gases with which the molbloc has been ca librated. All molbloc s are c ali brated for N2. Cali brations with other gases are optiona l. DHI calibrat ion capabil ity is not mai ntai ned at all times for all ga ses on a ll molbloc des ignations . Check for avai labilit y before ordering.
3
1 second 1 second
dependent calibration type (see molbloc-L tables)
± 0.0023 % FS under 1 % FS
± 0.001 % FS under 1 % FS
± 0.25 % of reading from 1 % to 100 % FS, ± 0.0025 % FS under 1% FS
2
± 0.15 % of reading from 1 % to 100 % FS, ± 0.0015 % FS under 1 % FS
± 0.5 % of reading from 1 % to 100 % FS, ± 0.005 % FS under 1 % FS
molbloc-S (all ranges)
Specifications are the same as a molbox RFM without Microrange. The Microrange trans­ducer is disabled whenever the molbox RFM is connected to a molbloc-S.
0 to molbloc full scale depending on gas and molbloc pressure dependent calibration type (see molbloc-L tables)
± 0.25 % of reading from 5 % to 100 % FS, ± 0.0125 % FS under 5 % FS
± 0.2 % of reading from 5 % to 100 % FS, ± 0.01 % FS under 5% FS
± 0.32 % of reading from 5 % to 100 % FS, ± 0.016 % FS under 5 % FS
± 0.2 % of reading from 5 % to 100 % FS, ± 0.01 % FS under 5 % FS
± 0.5 % of reading from 5 % to 100 % FS, ± 0.025 % FS under 5 % FS
2 Fluke Corporation molbox RFM™ Reference flow monitor
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