Fluke molbox1+S Operation And Maintenance Manual

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molbox1+™/molbox1+S

molbloc

Terminal

(Ver. 6.00 and Higher)

Operation and Maintenance Manual

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 Warning

High pressure liquids an d gases a re pot ential ly haz ardous. En erg y stored in th ese liquids and gases can be released unexpectedly and with extreme force. High pressure systems sh ould b e assemb led and op erated only by p ersonnel w ho hav e

Information in this document is subject to change without not ice. No part of t his document may be reproduced or transm itt ed in any form or by any means, electronic or mechanic al, for any purpos e, wit hout t he express written perm iss ion of Fl uke Corporation, DH

Instruments Division 4765 East Beautiful Lane Phoenix AZ 85044-5318 USA.

DH Instruments makes sincere efforts to ensure accuracy and quality of its’ publ ished materials; however, no warranty, expressed

or implied, is provided. DH Instruments disclaims any responsibility or liability for any direct or indirect damages resulti ng from the use of the information in this manual or products described in it. Menti on of any product does not constitut e an endorsement by DH Instruments of that product. This manual was originally composed in English and was subsequently translated into other languages. The fidelity of the translation cannot be guaranteed. In case of conflict between the English version and other language versions, the English version predominates.

been instructed in proper safety practices.

DH Instruments, DH, DHI, molbox1, molbox1+, molbloc, molbloc-L, molbloc-S, molstic, COMPASS, CalTool are trademarks,

registered and otherwise, of Fluke Corporation, DH Instruments Division. VCR is a registered trademark of the Swagelok Company.

Viton is a registered trademarks of DuPont deNemours Company. Windows is a registered trademark of Microsoft Corporation.

Document No. 3540962 100226 Printed in the USA.

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Table of Contents

Table of Contents ................................................................... I

Tables .................................................................................. V

Figures ................................................................................ VI

About This Manual ............................................................... VII

1. Introduction ..................................................................... 1

1.1 Product Overview ................................................................................................................................... 1

1.1.1 molbloc Flow Elements ........................................................................................................................... 2

1.1.1.1 molbloc-L Flow Element ......................................................................................................................... 2

1.1.1.2 molbloc-S Flow Element ......................................................................................................................... 3

1.2 Specifications ......................................................................................................................................... 3

1.2.1 General Specifications ............................................................................................................................. 3

1.2.2 Reference Pressure Transducer (RPT) Specifications .......................................................................... 4

1.2.3 Temperature Measurement Specifications ............................................................................................. 4

1.2.4 MFC Control Function (Optional) Specifications ................................................................................... 5

1.2.5 Flow Measurement Specifications .......................................................................................................... 5

1.2.5.1 molbloc-L ............................................................................................................................................... 5

1.2.5.2 molbloc-S ............................................................................................................................................... 9

1.2.6 Front and Rear Panels ........................................................................................................................... 24

1.2.6.1 Front Panel .......................................................................................................................................... 24

1.2.6.2 Rear Panel ........................................................................................................................................... 24

2. Installation ..................................................................... 25

2.1 Unpacking and Inspection ................................................................................................................... 25

2.1.1 Removing From Packaging ................................................................................................................... 25

2.1.2 Inspecting Contents ............................................................................................................................... 25

2.2 Site Requirements ................................................................................................................................ 25

2.3 Initial Setup ........................................................................................................................................... 26

2.3.1 Preparing for Operation ......................................................................................................................... 26

2.3.2 Power Connection .................................................................................................................................. 26

2.3.3 molbox1+ to molbloc Connections ....................................................................................................... 27

2.3.4 Gas Supply and Flowpath Connections ............................................................................................... 27

2.3.5 Vacuum Supply (molbloc-S only) .......................................................................................................... 28

2.3.6 Communications Connections .............................................................................................................. 28

2.3.7 MFC Control Option Connection ........................................................................................................... 29

2.4 Power UP and Verification ................................................................................................................... 29

2.4.1 Powe r UP ................................................................................................................................................ 29

2.4.2 Check Proper Pressure Measurement Operation................................................................................. 29

2.4.3 Check Proper Temperature Measurement Operation .......................................................................... 29

2.4.4 Check the MFC Control Function (Optional) ........................................................................................ 30

2.4.5 Leak Check ............................................................................................................................................. 30

2.4.6 Check/Set Security Level ....................................................................................................................... 30

2.5 Additional Precautions to Take Before Making Flow Measurements .............................................. 30

2.6 Short Term Storage .............................................................................................................................. 31

3. Operation ....................................................................... 33

3.1 General Operating Principles .............................................................................................................. 33

3.1.1 molbloc Channel A & Channel B ........................................................................................................... 33

3.1.2 molbloc-L and molbloc-S Operation ..................................................................................................... 33

3.1.3 Flow Ready/Not Ready Indication ......................................................................................................... 34

3.1.3.1 molbloc-L Operation ............................................................................................................................. 34

3.1.3.2 molbloc-S Operation............................................................................................................................. 34

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

3.1.4 Reference Pressure Transducer (RPT) Overpressure ......................................................................... 35

3.1.5 molbloc-S BPR Limits ............................................................................................................................ 35

3.2 Main Run Screen .................................................................................................................................. 36

3.2.1 molbloc-L Operation .............................................................................................................................. 37

3.2.2 molbloc-S Operation .............................................................................................................................. 38

3.3 Manual Operation ................................................................................................................................. 39

3.3.1 Keypad Layout and Protocol ................................................................................................................. 39

3.3.2 Direct Function Keys Summary ............................................................................................................ 40

3.4 Direct Function Keys............................................................................................................................ 41

3.4.1 [K] ............................................................................................................................................................ 41

3.4.2 [GAS]....................................................................................................................................................... 42

3.4.2.1 molbloc-L Operation ............................................................................................................................. 43

3.4.2.2 molbloc-S Operation............................................................................................................................. 44

3.4.3 [UNIT] ...................................................................................................................................................... 46

3.4.3.1 Mass Flow vs. Volume Flow ................................................................................................................. 47

3.4.3.2 Volumetrically Based Mass Flow Units ................................................................................................. 48

3.4.3.3 Volumetrically Based Mass Flow Units at Various Reference Temperatures (UXXX) ........................... 49

3.4.3.4 Volume Flow Units (vlm)....................................................................................................................... 49

3.4.3.5 Customizing FLOW Units Available Under The UNIT Function ............................................................. 50

3.4.4 [TARE] ..................................................................................................................................................... 51

3.4.4.1 <1Tare> ............................................................................................................................................... 52

3.4.4.2 <2Purge> ............................................................................................................................................. 56

3.4.4.3 <3Leak Check> .................................................................................................................................... 57

3.4.4.4 <4AutoZ> ............................................................................................................................................. 64

3.4.4.5 <5BPR> (molbloc-S Operation Only) .................................................................................................... 69

3.4.5 [P&T] (Pressure and Temperature) ....................................................................................................... 70

3.4.5.1 molbloc-L Operation ............................................................................................................................. 71

3.4.5.2 MOLBLOC-S operation ........................................................................................................................ 71

3.4.6 [DISPLAY] ............................................................................................................................................... 72

3.4.6.1 <1Rate> ............................................................................................................................................... 73

3.4.6.2 <2Avg> (Average) ................................................................................................................................ 74

3.4.6.3 <3 Hi/Lo> ............................................................................................................................................. 74

3.4.6.4 <4Total> (Totalizer) .............................................................................................................................. 75

3.4.6.5 <5Unit> ................................................................................................................................................ 77

3.4.6.6 <6Deviation> ........................................................................................................................................ 78

3.4.6.7 <7Freeze> ............................................................................................................................................ 80

3.4.6.8 <8Clean> ............................................................................................................................................. 80

3.4.7 [A/B] ........................................................................................................................................................ 81

3.4.8 [MFC](Optional) ...................................................................................................................................... 81

3.4.8.1 MFC Run Screens ................................................................................................................................ 82

3.4.8.2 MFC Profiles ........................................................................................................................................ 83

3.4.8.3 Units of Measure When Using the MFC Control Option ........................................................................ 83

3.4.9 [RES] ....................................................................................................................................................... 84

3.5 [SETUP] ................................................................................................................................................. 84

3.5.1 <1molbloc> ............................................................................................................................................. 85

3.5.1.1 molbloc-L and molbloc-S Size and Range Designations ....................................................................... 86

3.5.2 <2stab> ................................................................................................................................................... 87

3.5.3 <3ADJ> ................................................................................................................................................... 87

3.5.4 <4A_B> ................................................................................................................................................... 88

3.5.4.1 General Operation (Aspects Common to Both A_B Modes) ................................................................. 89

3.5.4.2 A+B mode ............................................................................................................................................ 90

3.5.4.3 A/B Mode ............................................................................................................................................. 90

3.5.5 <5MFC> ................................................................................................................................................... 91

3.5.6 <6REG> ................................................................................................................................................... 92

3.5.7 <7FLOWU> .............................................................................................................................................. 93

3.5.8 <8PRESU> .............................................................................................................................................. 93

3.5.9 <9TEMPU> .............................................................................................................................................. 94

3.6 [SPECIAL] ............................................................................................................................................. 95

3.6.1 <1reset> .................................................................................................................................................. 95

3.6.1.1 <1sets> ................................................................................................................................................ 96

3.6.1.2 <2units> ............................................................................................................................................... 96

3.6.1.3 <3MFC> ............................................................................................................................................... 97

3.6.1.4 <4cal> .................................................................................................................................................. 97

3.6.1.5 <5all> ................................................................................................................................................... 97

3.6.2 <2level> ................................................................................................................................................... 98

3.6.2.1 Security Levels ..................................................................................................................................... 98

3.6.3 <3UL> .....................................................................................................................................................101

3.6.3.1 Upper Limit Alarm and Sequence ........................................................................................................102

3.6.4 <4cal>.....................................................................................................................................................102

3.6.5 <5Prefs> .................................................................................................................................................102

3.6.5.1 <1ScrSVR> .........................................................................................................................................103

3.6.5.2 <3ID> ..................................................................................................................................................103

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TABLE OF CONTENTS

3.6.5.3 <3Time> ..............................................................................................................................................104

3.6.6 <6REMOTE> ..........................................................................................................................................104

3.6.6.1 COM1 and COM2 ...............................................................................................................................105

3.6.6.2 IEEE-488.............................................................................................................................................105

3.6.6.3 RS232 Self-Test ..................................................................................................................................105

3.6.7 <7Drivers> .............................................................................................................................................106

3.6.8 <8Head> .................................................................................................................................................106

3.6.9 <9BPR> ..................................................................................................................................................107

4. Remote Operation ......................................................... 111

4.1 Overview ............................................................................................................................................. 111

4.2 Interfacing ........................................................................................................................................... 111

4.2.1 RS232 Interface .....................................................................................................................................111

4.2.1.1 COM1 .................................................................................................................................................112

4.2.1.2 COM2 .................................................................................................................................................112

4.2.2 IEEE-488 (GPIB) .....................................................................................................................................113

4.3 Commands .......................................................................................................................................... 113

4.3.1 Command Syntax ..................................................................................................................................113

4.3.2 Command Summary .............................................................................................................................113

4.3.3 Error Messages .....................................................................................................................................115

4.3.4 Command Descriptions ........................................................................................................................116

4.3.4.1 IEEE Std. 488.2 Common and Status Commands ...............................................................................116

4.3.4.2 molbox1+ commands ..........................................................................................................................118

4.4 Statu s System ..................................................................................................................................... 138

4.4.1 Status Reporting System ......................................................................................................................138

4.4.1.1 Status Byte Register............................................................................................................................138

4.4.1.2 Standard Event Register .....................................................................................................................140

5. Maintenance, Adjustments and Calibration ...................... 141

5.1 Product Overview ............................................................................................................................... 141

5.2 Calibration Of Reference Pressure Transducers (RPTS) .................................................................... 142

5.2.1 Principle .................................................................................................................................................142

5.2.1.1 PA and PM Coefficients ......................................................................................................................142

5.2.2 Equipme nt Require d .............................................................................................................................143

5.2.3 Set-Up and Preparation ........................................................................................................................143

5.2.4 Viewing and Editing RPT Readings and Calibration Information .......................................................144

5.2.4.1 Viewing RPT outputs ...........................................................................................................................144

5.2.4.2 Viewing and Editing RPT PA, PM and Calibration Date ...........................................................................145

5.2.5 RPT Calibration/Adjustment Procedure Without Using CalTool for RPTs Software.........................146

5.3 MFC Control Function Adjustment ................................................................................................... 148

5.4 OHMIC Measurement [Temperature] System Verification .............................................................. 149

5.4.1 OHMIC Measurement System Calibration/Adjustment Procedure .....................................................151

5.5 molbloc Flow Adjustment .................................................................................................................. 152

5.5.1 molbloc Adjustment Procedure Without Using CalTool for molbloc Software .................................153

5.6 Reloading Embedded Software Into molbox1+ Flash Memory ...................................................... 154

5.7 Reloading molbloc EEPROM File ...................................................................................................... 154

5.8 OVERHAUL ......................................................................................................................................... 154

6. Troubleshooting............................................................ 157

6.1 Overview ............................................................................................................................................. 157

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

7. Appendix ...................................................................... 163

7.1 Conversion of Numerical Values ...................................................................................................... 163

7.1.1 Pressure ................................................................................................................................................163

7.1.2 Temperature ..........................................................................................................................................163

7.1.3 Flow .......................................................................................................................................................164

7.2 Valve Drivers ....................................................................................................................................... 166

7.3 MFC Control Function ........................................................................................................................ 168

7.3.1 MFC Connector .....................................................................................................................................168

7.3.1.1 Detailed Signal Descriptions ................................................................................................................168

7.3.1.2 Popular Configurations ........................................................................................................................169

7.4 Warranty Statement ........................................................................................................................... 171

8. Glossary ...................................................................... 173

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Tables

Table 1. molbloc-L Pressure Dependent Calibration Types ........................................................................ 7

Table 2. molbloc-L Ranges with Low Pressure and Downstream Calibrations ........................................... 7

Table 3: molbloc-L Ranges with High Pressure Calibrations ...................................................................... 8

Table 4: molbloc-S Calibration Types ......................................................................................................... 11

Table 5: N2. molbloc-S Flow in Nitrogen at Various molbloc Upstream Pressures ................................... 13

Table 6: Ar. molbloc-S Flow in Argon at Various molbloc Upstream Pressures ........................................ 13

Table 7: He. molbloc-S Flow in Helium at Various molbloc Upstream Pressures ..................................... 14

Table 8: SF6. molbloc-S Flow in Sulfur Hexafluoride at Various molbloc Upstream Pressures ............... 14

Table 9: Xe. molbloc-S Flow in Xenon at Various molbloc Upstream Pressures ...................................... 15

Table 10: C4H10. molbloc-S Flow in Butane at Various molbloc Upstream Pressures ............................ 15

Table 11: C2H6. molbloc-S Flow in Ethane at Various molbloc Upstream Pressures .............................. 16

Table 12: C2H4. molbloc-S Flow in Ethylene at Various molbloc Upstream Pressures ........................... 16

Table 13: H2. molbloc-S Flow in Hydrogen at Various molbloc Upstream Pressures .............................. 17

Table 14: CH4. molbloc-S Flow in Methane at Various molbloc Upstream Pressures.............................. 17

Table 15: C3H8. molbloc-S Flow in Propane at Various molbloc Upstream Pressures ............................ 18

Table 16: CF4. molbloc-S Flow in Carbon Tetrafluoride at Various molbloc Upstream Pressures ........... 18

Table 17: C2F6. molbloc-S Flow in Hexafluoroethene at Various molbloc Upstream Pressures ............. 19

Table 18: CHF3. molbloc-S Flow in Trifluoromethane at Various molbloc Upstream Pressures .............. 19

Table 19: Air. molbloc-S Flow in Air at Various molbloc Upstream Pressures .......................................... 20

Table 20: CO2. molbloc-S Flow in Carbon Dioxide at Various molbloc Upstream Pressures .................. 20

Table 21: CO. molbloc-S Flow in Carbon Monoxide at Various molbloc Upstream Pressures ................. 21

Table 22: N2O. molbloc-S Flow in Nitrous Oxide at Various molbloc Upstream Pressures ..................... 21

Table 23: C4F8. molbloc-S Flow in Octafluorocyclobutane1 at Various molbloc Upstream Pressures .... 22

Table 24: O2. molbloc-S Flow in Oxygen at Various molbloc Upstream Pressures .................................. 22

Table 25: molbox1+ Parts List .................................................................................................................... 25

Table 26: Minimum molbloc-S Critical Flow (slm) in Nitrogen at Various molbloc-S

Downstream Pressures ........................................................................................................... 36

Table 27: Summary of molbox1+ Direct Function Key Operations ............................................................ 40

Table 28. Available molbloc-L Gases ........................................................................................................ 43

Table 29. Available Flow Units ................................................................................................................... 50

Table 30. Flow Units and Corresponding Total Mass or Volume Units ..................................................... 77

Table 31. molbloc-L Si ze and Nominal Range Designations ..................................................................... 86

Table 32. molbloc-S Size and Pressure to Flow Conversion Ratio (KF) .................................................... 86

Table 33. Pressure Units of Measure Available ......................................................................................... 94

Table 34. Security Levels - Functions NOT Executed Per Function/Level ................................................ 99

Table 35. COM1 and COM2 Available Settings....................................................................................... 105

Table 36. COM1 DB-9F Pin Designation ................................................................................................. 112

Table 37. COM2 DB-9M Pin Designation ................................................................................................ 112

Table 38. Command Summary ................................................................................................................ 113

Table 39. Error Messages ........................................................................................................................ 115

Table 40. Status Byte Register ................................................................................................................ 138

Table 41. Standard Event Register .......................................................................................................... 140

Table 42. Troubleshooting Checklist ........................................................................................................ 157

Table 43. Pressure Unit Conversions ...................................................................................................... 163

Table 44. Temperature Unit Conversion .................................................................................................. 163

Table 45. Conversions from kg/s to sccm at 0 °C for Various Gases ...................................................... 164

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Table 46. Conversions from sccm at 0 °C to Other Volumetrically Based Flow Units............................. 164

Table 47. Conversions from Volumetrically Based Flow Units at 0 °C to

Corresponding Units at Another Temperature (uxxx)............................................................ 165

Table 48. Conversions from kg/s to mole/s for Various Gases ................................................................ 165

Table 49. Conversion from mole/s to pccm ............................................................................................. 165

Table 50. Conversion from sccm at 0 °C to Volume Flow Units at

Another Pressure and Temperature ...................................................................................... 166

Table 51. Driver/Max Current Per Output ................................................................................................ 166

Table 52. External Drivers........................................................................................................................ 167

Table 53. Interface Cable Building Instructions ....................................................................................... 168

Table 54. Common MFC Connector Pin Out ........................................................................................... 170

Table 55. Brooks MFC Connector Pin Out .............................................................................................. 170

Table 56. DHI Author i zed Serv ice Pr ovid er s ........................................................................................... 171

Figures

Figure 1. molbox1+ Front Panel ................................................................................................................. 24

Figure 2. Rear Panel .................................................................................................................................. 24

Figure 3. molbox1+ Internal Pneumatic Schematic - CHANN EL A ACTIVE, molbloc-L OPERATION ..... 33

Figure 4. Keypad Layout ............................................................................................................................ 39

Figure 5. molbox1+ Internal Pneumatic Schematic – ................................................................................ 52

Figure 6. molbox1+ Internal Pneumatic Schematic –

TARING CHANNEL A, molbloc-S OPERATION ..................................................................... 55

Figure 7. molbox1+ Internal Pneumatic Schematic – PURGING CHANNEL A ........................................ 56

Figure 8. molbox1+ Internal Pneumatic Schematic - LEAK CHECK molbox CHANNEL A ....................... 59

Figure 9. molbox1+ Internal Pneumatic Schematic - SYSTEM LEAK CHECK -

CHECKING OFFSET AND STABILITY ................................................................................... 60

Figure 10. molbox1+ Internal Pneum atic Schem atic - SYSTEM LEAK CHECK ON CHANNEL A -

CHECKING OFFSET AND STABILITY ................................................................................... 63

Figure 11. molbox1+ Internal Pneum atic Schem atic – molbloc-S OPERATION,

CHANNEL A, BPR ON .......................................................................................................... 108

Figure 12. molbox1+ Internal Pneum atic Schem atic – molbloc-S OPERATION,

CHANNEL A, BPR OFF ........................................................................................................ 108

Figure 13. Status Byte Register ............................................................................................................... 139

Figure 14. molbox1+ Internal Pneum atic Schem atic - ............................................................................. 145

Figure 15. Cable Driver Ports .................................................................................................................. 167

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About This Manual

This manual pr ovides the user with the information necessar y to operate a molbox1+ and a molbox1 +S molbloc terminal with molbloc mass flow elements to make mass flow measurements. Unless stated otherwise, references to molbox1+ also include molbox1+S. It a lso includes a great d eal of additional information provided to he lp you optimize use of a molbloc/ molbox1+ system and take full advantage of its many features and functions.

Before using the manual, take a moment to familiarize yourself with the Table of Contents structure. All first tim e molbox1+ users should rea d Sect ion 1. S ection 3.1 pr ovides a com prehensi ve desc ription of general molbox1+ operating principles. Section 4. is for remote operation from an external computer. Section 5 provides m aintenance and calibratio n information. Section 6 is a quick troub leshooting guide. Use this section to troubleshoot unexpected molbox1+ behavior based on the symptoms of that behavior.

Cross references are used extensively to direct you towards additional information on a topic. Cross references ar e generally in parentheses an d give the reference’s sect ion number. For example: (see Section 11).

Certain words and expressions have specific meaning as they pertain to molbox1+. The Glossary Section is useful as a quic k reference for exac t definition of specific words and expressions as they are used in this manual.

Note

For those of you who “don’t read manuals”, go directly to section 2.3, initial setup, to set up your molbox1+. Then go to section 2.4, power up and verification. This will get you running quickly with minimal risk of causing damage to yourself or your molbox1+. Then… when you have questions or start to wonder about all the great features you might be missing, get into the manual!

Manual Conventions

 Caution

“Caution” is used in throughout the manual to identify conditions or actions that could cause harm to the molbox1+ or to the devices that are connected to the molbox1+.

 Warning

“Warning” is used in throughout the manual to identify actions that could pose a hazard to the user of the molbox1+.

“Note” is used throughout the manual to identify operating and applications advice and additional explanations.

[ ] Indicates direct function keys (e.g., [RANGE]). < > Indicates molbox1+ screen displays (e.g., <1yes>).

Note

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Notes

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1. Introduction

1.1 Product Overview

molbox1+ a nd m olbox1+S are support units for making gas f low m easurem ents using m olbloc m ass f low elements. Although the molbox1+ and the molbox1+S are separate products their functions and operation are virtua lly identical. The ke y difference is that molbox1+ S is designed f or higher flo ws and it only supports molbloc-S mass f low elements. A molbox1+ sup ports bot h molbloc -L and m olbloc-S. Each product reads calibration data from a molbloc EEPROM and measures molbloc upstream and downstream pressur e using built-in high precision Referenc e Pressure Transducers (RPTs). There are several RPT range specific m odels in the molbox1+ product line: molbox1+ A350K, molbox1+ A700K, molbox1+S A1.4M and molbox1+ S A2M .

An ohmic measurement s ystem reads the resistance of the molbloc platinum resistance thermometers from which the molbloc temperature is calculated. Using the molbloc calibration data, measured pressures and temper ature and gas prop erties s tored in m emory, the flo w rate of the gas f lowing throug h the molbloc is calculated.

Internal molbox1+ valves support on-board PRESSURE TRANSDUCER TARING, molbloc-S BPR MODES, LEAK TESTING and SELF PROTECT ION functions as we ll as a GAS PURGE r outine. The m olbox1+S does not support PRESSURE TRANSDUCER TARING as it does not support m olbloc -L oper ation a nd does not include a bypass valve to conn ect the up strea m and downs tream RPTs.

molbox1+ provides a local user interf ace via a front panel key pad and displa y and includes advanced on-board functions. Remote communication capability is supported with RS232 and IEEE-488 interfaces.

molbox1+ is equippe d to handle molblocs on two s ep ar ate cha nnels. This allows easy switching between two different molblocs as well as certain special dual channel functions. Internal valving switches the molbox1+ pressure transducers from one molbloc to the other as needed.

molbox1+ is intended f or a pplicati ons i n which minimizing meas urem ent uncer taint y is the m os t important requirement and/or integrated control of mass flow controllers (MFCs) is needed. A second model, molbox RFM, is available for applications where a compact presentation and lower cost are the most dominant requirements.

molbox1+ replaces the Fluke/DHI molbox1 product line. molbox1+ introduces several product improvements over molbox1 including:

• Support for Q-RPT pressure sensor technology to improve linearity and precision on pressure

measurements.

• Improved gas property uncertainty using data from NIST Reference Fluid Thermodynamic and

Transport Properties Database (REFPROP).

• Support of expanded molbloc modelization and polynomial linearization data structure and

calculations. This new molbloc data structure allows greatly improved flow measurement performance across the supported operat ing pressure and flow /Reynolds number ranges. This new model makes the Premium calibration option and resulting specifications possible.

• Support for “named” molbloc calibrations – allowing storage of multiple pressure-dependent

calibrations in each gas o n a molbloc. Also pr ovides for s tated operating lim its of pressure, f low and Reynolds number to be stored on the molbloc so the molbox1+ can alert the user of operating conditions that are outside of the calibrated parameters, avoiding out of tolerance measurements.

• Simplified internal pneumatic design.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

For easy identification, ne w molbox1+ terminals are produced with serial num bers of 2000 and higher. Older molbox1 term inals may be eligible for upgrade to m olbox1+ hardware, softwar e and specifications by Fluke/DHI.

1.1.1 molbloc Flow Elements

Two different types of molblocs may be used with molbox1+; molbloc-L (laminar) and

molbloc-S (sonic). m olbox1+ supports operation with new or upgraded molblocs that have

the updated data str ucture to tak e advant age of m olbox1+ version 6. 00 or later features, a nd

also supports operation with older molblocs that do not have a version 6.00 data format.

Premium calibrations and a ssociated specif ications ar e only an option for m olblocs that have

the version 6.00 format.

1.1.1.1 molbloc-L Flow Element

molbloc-L is the original molbloc laminar flow element. molbloc-L covers the lower portion of the molbloc/molbox1+ system flow range. The key molbloc-L measurement is the differential pressure across the element, which is roughly proportional to the mass flow rate through it. molbloc-L elem ents are calibrated to be used at an absolute pressure which remains nearly constant, while the differential pressure varies with flow rate. Different operating pressure options and their effect on molbloc flow range are described in Section 1.2.5.1.1.

In addition to the new data structure and modelization methods that became available for molblocs with the introduction of m olbox1+, all molbloc-L elem ents of range 1E1-L to 3E4-L produced or upgrad ed af ter the rele ase of m olbox1+ are equipped standard with an upstream ¼” VCR flange, or f lowpath conn ectio n, that has an integrated sint ered m etal filter. T his filter is intende d to be a l ast defens e against particulate contamination of the molbloc-L internal flowpath which can affect molbloc-L measurements. Every effort should still be made to supply clean dry gas to the molbloc to ensure its measurement performance and long-term stability. molblocs that have the integrated upstrea m filter are recognizable by the visible filter element as shown below.

Figure 1: molbloc-L Upstream End Flange with Integrated Filter

New molbloc-L elements produced with molbox1+ calibration data structure, premium calibration options, and integrate d filter hardware can be identified b y having a serial number of 6000 or higher. Most older molbloc-L elements are eligible for upgrade to this hardware/v er sion 6.0 0 format by Fluke/DHI.

Page 13

1. INTRODUCTION

Pressure Connections

Quick connectors equivalent to Swagelok® QM Series (M2-B200)

Ω

Stability of 100 and 110 Ω reference resistors

1.1.1.2 molbloc-S Flow Element

molbloc-S elements use critical (sonic) flow venturi nozzle technology to measure flows which overlap with th e ranges of molbloc-L an d cover the hig her end of the molbloc/molbox1+ system flow range. T he mass flow rate through a molbloc-S element is roughly propor tional to the upstr eam absolute pres sure when the f low is “choked”, so the m olbloc-S operating pressure can vary widely as the mass flow rate is changed throug hout t h e f lo w range. T he li mits of molbloc-S operatin g pressure and flow ranges are defined by the molbloc-S calibration type, described in Section 1.2.5.2.2.

New calibration data structure and premium calibration options for molbloc-S were also introduce d along with molbox1+. m olbloc-S elements produced with this support will h av e s eri al number of 4000 or h igh er. O ld er molbloc-S elem ents are eligible for upgrade to version 6.00 format by Fluke/DHI.

1.2 Specifications

1.2.1 General Specifications

Power Requirements

Fuse

Operating Temperature Range

Storage Temperature Range

Vibration

Weight

Dimensions

Microprocessor

Communication Ports

Reference Pressure

Transducers(RPTs)

Pressure Limits molbox1+ A350K

85 to 264 VAC, 50 to 60 Hz, 22 VA max. consumption 1A/250V, slow blow, 5x20mm, NSN: 5920008930491 15 to 35 °C

- 20 to 70 °C Meets MIL-T-28800D

6.8 kg (15 lb) max. 32 cm W x 12 cm H x 30 cm D

(12.6 in. x 4.7 in. x 11.8 in.) approx. Motorola 68302, 16 MHz RS232 (COM1), RS232 (COM2), IEEE-488 molbox1+ A350K 2 x 300 kPa (44 psia) calibrated range

oscillating quartz crystal molbox1+ A700K 2 x 600 kPa (87 psia) calibrated range

oscillating quartz crystal molbox1+S A1.4M 1 x 1200 kPa (174 psia) calibrated range

oscillating quartz crystal, 1 x 300 psi silicon based molbox1+S A2M 1 x 2000 kPa (290 psia) calibrated range

oscillating quartz crystal, 1 x 300 psi silicon based

Maximum working pressure 300 kPa absolute (36 psia) Maximum pressure without damage 350 kPa absolute (50 psia)

molbox1+ A700K

Maximum working pressure 600 kPa absolute (87 psia) Maximum pressure without damage 700 kPa absolute (115 psia)

molbox1+S A1.4M Maximum working pressure 1200kPa absolute (203 psia) Maximum pressure without damage 1500 kPa absolute (218 psia)

molbox1+S A2M Maximum working pressure 2000 kPa absolute (290 psia) Maximum pressure without damage 2200 kPa absolute (320 psia)

Ohmic Measurement System

Resolution 0.004 Ω Accuracy ± 0.04 Ω Accuracy of 100 and 110

reference resistors ± 0.01 %

± 0.005 % per 3 yrs

Page 14

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Gases Supported molbloc-L and molbloc-S

Nitrogen (N2), dry Air, humid Air (molbloc-S only) , Argon (Ar), Butane (Butn), Carbon Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2), Carbon Tetrafluoride (CF4), Octofluorocyclobutane (C4F8), Ethane (C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6), Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Xenon (Xe)

Flow Ranges

Valve Driver Option

CE Conformance

See Section 1.2.5. (8) 12 V outputs.

Each output can sink,500 mA at 12 V, max. 1 A total (see Section 7.2). Available. Must be specified.

1.2.2 Reference Pressure Transducer (RPT) Specifications

Type

Calibrated Range A350K 20 to 300 kPa absolute (2.9 to 44 psia)

Resolution A350K 0.4 Pa (0.00005 psi)

Accuracy A350K

Oscillating quartz crystal with mechanical bellows

A700K 20 to 600 kPa absolute (2.9 to 87 psia) A1.4M 100 to 1200 kPa absolute (14.5 to 174 psia) A2M 100 to 2000 kPa absolute (14.5 to 290 psia)

A700K 0.7 Pa (0.0001 psi) A1.4M 1.4 Pa (0.0002 psi) A2M 2 Pa (0.0003 psi)

Absolute pressure whichever is greater)

Differential ± (4.2 Pa (0.0006 psi) or 0.026 % ΔP, whichever is greater)

A700K Absolute pressure

whichever is greater) Differential ± (8.4 Pa (0.0012 psi) or 0.032 % ΔP,

whichever is greater) A1.4M Absolute pressure

whichever is greater) A2M Absolute pressure

whichever is greater)

With regular use of Autozero. Add 0.005 % of Q-RPT span for one

year without use of AutoZero,

± (0. 01 % of reading or 0.003 % Q-RPT span,

± (0.01 % of reading or 0.003 % Q-RPT span,

1.2.3 Temperature Measurement Specifications

Specifications are f or molbloc m ounted Platin um Resistanc e Thermom eters (PRT) c ombined

with molbox1+ resistance measurement system and temperature calculation.

The molbox1+ internal resistance measurement system is automatically calibrated using

reference 100 and 110 Ω (± 0.01 %) resistors (see Section 5.4).

Range

Accuracy

Resolution

0 to 40 °C ± 0.05 °C

0.01 °C

Page 15

1. INTRODUCTION

Voltage Accuracy

± 0.1 % FS

Voltage Resolution

0.1 mVDC

Current Range

4.01 to 20 mA

Current Accuracy

Current Resolution

Voltage Range

0 to 5.000 VDC

Min/Max Measurable Voltage

- 0.25/6.00 VDC

Voltage Accuracy

Voltage Resolution

1 mVDC

Current Range

4 to 20 mA

Current Accuracy

Current Resolution

Range

Accuracy

± 0.25 % FS

Resolution

Measurement Update

1 second

Range

Resolution

0.0015 % FS

Linearity

Repeatability

± 0.05 % of reading from 10 to 100 % FS,

Precision1

Stability

1.2.4 MFC Control Function (Optiona l) Specifications

Analog Output

Voltage Range

Analog Input

Valve Test Point

0 to 6.000 VDC

± 0.1 % FS

0.4 µA

± 0.1 % FS

0.4 µA

+ 2 to + 15 VDC (in reference to - 15 VDC)

2.5 mVDC

1.2.5 Flow Measurement Specifications

molbox1+ meas ures the f lo w t hrou gh molbloc flow elements. There are two di f ferent types of

molblocs, molbloc-L (laminar) (see Section 1.1.1.1) and molbloc-S (sonic) (see Section

1.1.1.2). Flow measurement specifications, calibration types, ranges and dimensions are

detailed separately for each molbloc type in section 1 .2.5.1 and 1.2.5.2. For both molbloc-L

and molbloc-S elements, there are separate performance specifications given for the

premium and standard calibr ation types that are offered. All f low measurem ent uncertainties

are valid only for measurents in a gas for which the molbloc is calibrated, and within the

range of pressures for which the calibration is specified.

1.2.5.1 molbloc-L

The flow range, useable operating pressure and absolute and differential pressure associated with molbloc -L operation depend on the molbloc used and its pressure-dependent calibration options (see Section1.2.5.1.3).

1.2.5.1.1 Standard molbloc-L Calibrations

Rate

0 to molbloc full scale depending on gas and molbloc pressure dependent calibration type (see Section 1.2.5.1.3)

(1 year)

± 0.05 % of reading from 10 to 100 % FS, ± 0.005 % FS under 10 % FS

± 0.005 % FS under 10 % FS ± 0.07 % of reading from 10 to 100 % FS,

± 0.007 % FS under 10 % FS ± 0.09 % of reading from 10 to 100 % FS,

± 0.009 % FS under 10 % FS

Page 16

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Measurement

± 0.2 % of reading from 10 to 100 % FS,

(N2 and any molbox1+

Uncertainty

supported gas for which

the molbloc in use is

calibrated)

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox1+ and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox1+ should be established from experience.

3 Measurement uncertainty (accuracy): Maximum deviation of the molbox1+ flow indication from the true value of

the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

± 0.02 % FS under 10 % FS

1E5 molbloc

± 0.5% of reading from 25 to 100 % FS, ± 0.125 % FS under 25 % FS

1.2.5.1.2 Premium molbloc-L Calibrations

Measurement Update

1 second

Rate

Range

0 to molbloc full scale depending on gas and molbloc pressure dependent calibration type (see Section 1.2.5.1.2)

Resolution

Linearity

0.0015 % FS

± 0.05 % of reading from 10 to 100 % FS, ± 0.005 % FS under 10 % FS

Repeatability

± 0.05 % of reading from 10 to 100 % FS, ± 0.005 % FS under 10 % FS

Precision

± 0.07 % of reading from 10 to 100 % FS, ± 0.007 % FS under 10 % FS

(1 year)

± 0.03 % of reading from 10 to 100 % FS, ± 0.003 % FS under 10 % FS

± 0.125 % of reading from 10 to 100 % FS,

± 0.0125 % FS under 10 % FS

1E5 molbloc-L Premium cal i brat i on not avail abl e

Stability

Measurement

Uncertainty

(N2 and any molbox1+

supported gas for which

the molbloc in use is

calibrated)

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox1+ and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox1+ should be established from experience.

3 Measurement uncertainty (accuracy): Maximum deviation of the molbox1+ flow indication from the true value of

the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

1.2.5.1.3 molbloc-L Pressure Dependent Calibration Types

Different pressure dependent c alibration options for molbloc-L elements determine the range of operating pressures over which a molbloc can be used within its mass flow measurement specifications. The calibration option also affects the molbloc flow range and the differential pressure associated with the flow range.

Measurement uncertainty (accuracy) specifications fo r molbloc-L are valid only for gases with which the molbloc has been calibrated. All molbloc-L elements are calibrated for N2. Calibratio ns with other gases ar e optional. DHI calibration capability is not maintained at all times for all gases on all m olbloc designations . Check for availability before ordering calibrations.

The molbloc-L pressure dependent calibration types are summarized in Table 1.

Note

See your molbloc’s Calibration Report to determine the calibration type of the molbloc y o u ar e using.

Page 17

1. INTRODUCTION

PRESSURE AT MAX. FLOW

MOLBLOC

MOLBLOCS

105 kPa (12 to15 psia).

CARBONS

Table 1. molbloc-L Pressure Dependent Calibration Types

CAL IBRATION TYPE

(CALIBRATION NAME)

OPERATING PRESSURE

NOMINAL DIFFERENTIAL

1E5

ALL OTHER

Nitrogen Argon Ar Helium He Sulfur Hexafluoride

INERT

Xenon XE

Butane

Ethane

Ethylene

Hydrogen

FLAMMABLE

Methane

Propane

Carbon Tetrafluoride

Hexafluorethene

Trifluoromethane

FLUORO-

Air Air Carbon Dioxi de

Carbon Monoxide CO Nitrous Oxide

OTHER

Octafluorocyclobutane1

Oxygen

GASES

Low pressure (LOP)

High pressure (HIP)

Downstream (DOWN)

200 to 325 kPa absolute (29 to 48 psia) upstream of molbloc

325 to 525 kPa absolute (48 to 76 psia) upstream of molbloc

Atmospheric pressure downstream of molbloc. 85 to

5 kPa

(.725 psi)

Not available 50 kPa

12.5 kPa

80 kPa (12 psi)

(1.8 psi)

Note

Differential pressur e values are nominal and may v ary by up to 15 % with the actual molbloc used.

1.2.5.1.4 molbloc-L Ranges with Low Pressure and Downstream Calibrations

Table 2. molbloc-L Ranges with Low Pressure and Downstream Calibrations

molbloc-L SIZE AND FULL SCALE FLOW (sccm @ 0 ºC)

SIZE

1E1

5E1

10 50 100 200 500 1,000 5,000 10,000 30,000 100,000

10 50 100 200 500 1,000 5,000 10,000 30,000 80,000 10 50 100 200 500 1,000 5,000 10,000 30,000 100,000 10 50 100 200 500 1,000

10 40 80 150 400 800

4H1

2H6

2H4

3H8

2F6

CHF

4F8

20 100

20 100 200 400 1,000 2,000

16 80 160 320 800 1 600

20 100 200 400 1,000 2,000 10,000 20,000 60,000 200,000 16 80 160 320 800 1 600 8,000 16,000

20 100 200 400 1,000 2,000

10 50 100 200 500 1,000

10 50 100 200 500 1,000 5,000 10,000 30,000 100,000 10 50 100 200 500 1,000 5,000 10,000

10 50 100 200 500 1,000 5,000 10,000 30,000 80,000

See Table 3 for footnotes.

1E2

130

60 9 65

SIZE

2E2

270

130

SIZE

5E2

670 140

330

SIZE

1E3

2,300

1,100

175

SIZE

5E3

2,000

500

3,500

500

2,200 1,400

6,000 1,000

7,000 1,000

3,000 1,000

4,000

600

2,000

600

4,000

600

1,050

840

SIZE

1E4

6,000 1,000

8,000

7,000 3,000

18,000

2,000

16,000

10,000

2,000

10,000

6,000 1,200

10,000

3,400 1,700

50 kPa

(7.5 psi)

SIZE

3E4

6,000 4,000

11,000

3,000

---

18,000

6,000

20,000

5,000

40,000

5,000

10,000

7,000

12,000

3,000 6,000

4,000

12,000

4,000

20,000

4,000

20,000

4,000

--- ---

SIZE

1E5

---

30,000 20,000

---

60,000 50,000

70,000 40,000

120,000

40,000

---

36,000 25,000

---

38,000 30,000

60,000 30,000

Page 18

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

CARBONS

1.2.5.1.5 molbloc-L Ranges with High Pressure Calibrations

Table 3: molbloc-L Ranges with High Pressure Calibrations

GASES

Nitrogen Argon Ar

Helium He

INERT

Sulfur Hexafluoride

Xenon XE

Butane Ethane

Ethylene

Hydrogen Methane

FLAMMABLE

Propane

Carbon Tetrafluoride

Hexafluorethene

FLUORO-

Trifluoromethane

Air Air

Carbon Dioxi de

Carbon Monoxide CO

Nitrous Oxide

OTHER

Octafluorocyclobutane2 Oxygen

4H10

2H6

2H4

3H8

2F6

CHF

4F8

SIZE

1E1

5E1

20 100 200 400 1,000 2,000 10,000 20,000

20 100 200 400 1,000 2,000 10,000 17,000

20 100 200 400 1,000 2,000 10,000 20,000 65,000 N/A 25

20 100 150 350 650 1,700

N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A

40 200

40 200 350 700 2,000 4,000

40 200 400 900 2,000 4,500 22,000 45,000 130,000 N/A 35 175 350 700 1,700 3,500

20 100 200 400 1,000 2,000

25 125

20 100 200 400 1,000 2,000 10,000 20,000

25 125 250 500 1,250 2,500

20 100 200 400 1,000 2,000 10,000 20,000 40,000

25 125 250 500 1,250 2,500

N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A

20 100 200 400 1,000 2,000 10,000 20,000

molbloc-L SIZE AND FULL SCALE FLOW (sccm @ 0 ºC)

SIZE

100

SIZE

1E2

120

350

2E2

250

700 100

SIZE

5E2

600 150

1,800

200

SIZE

1E3

2,000

300

4,000

SIZE

13,000

200

100

200

120

240

400 100

250

450

1,000

250

600 150

1,200

150

3,500

500

2,000

300

2,500

11,000

5E3

2,000 1,400

3,350

950

6,000 2 300

7,000 2,000

2,000 3,500

2,600 3,700

1,200 1,800

1,500 4,000

1,500

6,600 1,400

1,500

SIZE

1E4

6,200 2,800

11,000

1,900

20,000

4,500

22,000

4,000

33,000

11,000

5,400

12,000

2,400 6,000

3,000

12,000

3,000

20,000

2,500

20,000

3,000

SIZE

3E4

40,000

7,500

35,000

6,000

11,000

5,700

20,000 13,000

22,000 12,700

42,000 12,000

12,000

7,300

12,000

8,800

40,000

7,200

20,000

8,800

7,500

20,000

9,000

40,000

6,500

SIZE

1E5

N/A

A bold value indicates that the maximum flow is limited by the maximum Reynolds number value of 1 200 which is reached before the normal differential pressure range is reached. In that case, the second value gives the minimum flow for which measurement uncertainty (accuracy) is equal to the nominal uncertainty specification. Divide the second value by 10 when using molbox RFM microrange option.

Where there is no value in the field (–), this indicates that the maximum Reynolds number is reached before the differential pressure reaches 5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful.

Due to low vapor pressure, only downstream calibration type is available.

The operating pressure range is greater than the vapor pressure value for this gas.

Page 19

1. INTRODUCTION

1.2.5.1.6 molbloc-L Dimensions

molbloc-L SIZES [mm(in.)]

5E3 AND LOWER A B C D E F G

58.50 (2.303)

16.00 (0.630)

32.00 (1.260) SQ

68.84 (2.750)

19.06 (0.750)

124.00 (4.881) 1/4 in. VCR M

A B C D E F G

5E3 AND LOWER

58.50 (2.303)

16.00 (0.630)

32.00 (1.260) SQ

68.84 (2.750)

19.06 (0.750)

124.00 (4.881) 1/4 in. VCR M

1.2.5.2 molbloc-S

The flow range and operating pressure associated with molbloc-S operation depend on the molbloc and molbox used and the the m olbloc calibration option selected (see Section 1.2.5.2.3)

1.2.5.2.1 Standard molbloc-S Calibrations

Measurement Update Rate

Range

Resolution

Linearity

Repeatability

Precision

1 second Depends on molbloc-S pressure dependent calibration type

(see Section 1.2.5.2.2)

0.0015 % of FS

± 0.05 % of reading ± 0.05 % of reading

± 0.06 % of reading

Page 20

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

(1 year)

0.2 % of 200 kPa flow from 50 to 200 kPa

0.2 % of 50 kPa flow from 20 to 50 kPa

0.125 % of 200 kPa flow from 50 to 200 kPa

Predicted Stability

Measurement Uncertainty

With SP molbloc-S

calibration

± 0.05 % of reading

A350K ± 0.2 % of reading from 50 to 200 kPa A700K ± 0.2 % of reading from 50 to 500 kPa S A1.4M ± 0.2 % of reading from 100 to 500 kPa

± 0.2 % of 100 kPa flow from 50 to 100 kPa

S A2M ± 0.2 % of reading from 200 to 500 kPa

Measurement Uncertainty

With LP molbloc-S calibration

A350K ± 0.2 % of reading from 20 to 200 kPa A700K ± 0.2 % of reading from 50 to 200 kPa

Measurement Uncertainty

With HP molbloc-S

calibration

[1] Precision: Combined linearity, hysteresis, repeatability. [2] Stability: Maximum change in zero and span over specified time period for typical molbox1+ and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox1+ should be established from experience.

[3] Measurement uncertainty (accuracy): Maximum deviation of the molbox1+ flow indication from the true value of

the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

A700K ± 0.2 % of reading from 200 to 500 kPa S A1.4M ± 0.2 % of reading from 200 kPa to 1.2 MPa S A2M ± 0.2 % of reading from 200 kPa to 2 MPa

1.2.5.2.2 Premium molbloc-S Calibrations

Measurement Update

Range

Resolution

Linearity

Repeatability

Precision

Predicted Stability

(1 year)

Measurement

Uncertainty

With SP molbloc-S

calibration

Measurement

Uncertainty

With LP molbloc-S

calibration

Measurement

Uncertainty

With HP molbloc-S

calibration

[1] Precision: Combined linearity, hysteresis, repeatability. [2] Stability: Maximum change in zero and span over specified time period for typical molbox1+ and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox1+ should be established from experience.

[3] Measurement uncertainty (accuracy): Maximum deviation of the molbox1+ flow indication from the true value of

the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

1 second

Rate

Depends on molbloc-S pressure dependent calibration type (see Section 1.2.5.2.2)

0.0015 % of FS

± 0.05 % of reading ± 0.05 % of reading

± 0.06 % of reading

± 0.03 % of reading

A350K ± 0.125 % of reading from 50 to 200 kPa

A700K ± 0.125 % of reading from 50 to 500 kPa S A1.4M ± 0.125 % of reading from 100 to 500 kPa

± 0.125 % of 100 kPa flow from 50 to 100 kPa

S A2M ± 0.125 % of reading from 200 to 500 kPa

A350K ± 0.125 % of reading from 20 to 200 kPa

A700K ± 0.125 % of reading from 50 to 200 kPa

± 0.125 % of 50 kPa flow from 20 to 50 kPa

A700K ± 0.125 % of reading from 200 to 500 kPa

S A1.4M ± 0.125 % of reading from 200 kPa to 1.2 MPa S A2M ± 0.125 % of reading from 200 kPa to 2 MPa

Page 21

1. INTRODUCTION

1.2.5.2.3 molbloc-S Pressure Dependent Calibration Types

Note

See your molbloc’s Calibration Report to determine the calibration type of the molbloc y o u are u sing .

Measurement uncertain ty ( accurac y) spec ificati ons f or molbl ocs ar e valid o nl y for gases with which the molbloc has been calibrated. All molbloc-S elements are calibrated in one standard gas, either air or N2, and may be calibrated in other gases. Calibrations with other gases are optional. The l ist of gases which can be measured by molbloc-S is the same as molbloc-L. DHI calibrat ion capability is not maintained at all tim es for all gases on all molb loc desi gnations . Check for availability before or dering cal ibra tions.

molbloc-S calibrations are performed over flow ranges corresponding to one of three pressure ranges, summarized in Table 15.

Table 4: molbloc-S Calibration Types

CAL IBRATION TYPE

(CALIBRAT ION NAME)

Low pressure (LP)

Standard pressure (SP)

High pressure (HP)

OPERATING PRESSURE

20 to 200 kPa absolute (3 to 30 psia) upstream of molbloc

50 to 500 kPa absolute (7 to 70 psia) upstream of molbloc

200 to 2000 kPa absolute (29 to 290 psia)

upstream of molbloc

Note

molbloc-S flow measurements are valid only when the ratio of pressure downstream to the pressure upstream of the nozzle is low enough to assure a critical (choked) flow (see Section 3.1.5).

Page 22

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

1.2.5.2.4 molbloc-S Ranges

molbloc-S flow ranges are def ined by the m olbloc’s Press ure to Flow Conver sion Ratio, K molbloc-S, the downstream pressure and the acceptable back pressure ratio (see Section 3.1.5). K relationship betwee n mass flow in nitrogen and the absolute ups tream pressure delivered to the molbloc-S. molbloc-S sizes are defined by the nom inal K molbloc-S nozzle, using scientific notation, for example a 1E3 molbloc-S has a K of 1,000 sccm/kPa. To differentiate from molbloc-L size designations, this molbloc size is designated 1E3-S.

The molbox1+ press ur e r a nge, the molb l oc -S cal ibra ti on type (s ee Sec t ion 1. 2.5. 2.2) and the back pres sure ratio (BPR) requirements lim it the pressures, and flows, over which a molbloc-S can be used within known measurement uncertainty limits. In practice, the us able range of a molbloc -S in a given application also may depend on the available gas supply pressure, th e presence and flow capacity of a vacuum pump downstream or the allowable back pressure on an upstream DUT.

The mass flow range of a molbloc-S element is dependent on the properties of the gas used, so the range of a molbloc-S is dif ferent for each supported gas. The flow ranges for each molbloc-S size at various typical operating pressures are summarized separate ly for each mo lbloc-S supported gas in the Tables below. For the com mon applicat ion of using a molb loc-S with i ts do wnstre am pr essur e at or near atmosph eric pressure , it is helpful to know what m inimum flow can be meas ured before viol ating back pressure ratio requirements (see Section 3.1.5). In the tables below, this minimum flow value is given in the “Mini mum withou t vacuu m” column.

, the gas used, th e absolute pr essure t hat can be delivered ups tream of

is expressed in units of sccm/kPa and defines the

of the

DHI calibra tion capability may not be ava ilable for some of the gases listed, or may be limited to less than the m aximum flow rate listed. Check for availabilit y before ordering calibrations.

The following notes apply to the range tables below:

Ratio = Inverse square root density ratio of the current gas to Nitrogen KF = Pressure to Flow Conversion Ratio, sccm/kPa To estimate a flow in a given gas at a gi v en pres s ure: F lo w(slm) = KF * Pressure

in kPa absolute / 1000 * Gas Ratio

Page 23

1. INTRODUCTION

Nitrogen Ratio = 1

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 5: N2. molbloc-S Flow in Nitrogen at Various molbloc Upstream Pressures

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

10 0.2 0.5 1 2.0 2 5 20 0.4 1 2 3.5 4 10

50 1 2.5 5 7.7 10 25 100 2 5 10 15 20 50 200 4 10 20 28 40 100 500 10 25 50 67 100 250

1,000 20 50 100 129 200 500 2,000 40 100 200 248 400 1,000 5,000 100 250 500 596 1,000 2500

10,000 200 500 1,000 1,173 2,000 5,000

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

will generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Table 6: Ar. molbloc-S Flow in Argon at Various molbloc Upstream Pressures

700 kPa

1,400 3,500 7,000

1.2 MPa

7 14 35 70

140 350 700

12,000 20,000

2 MPa

12 20 24 40

60 100 120 200 240 400 600 1,000

1,200 2,000 2,400 4,000 6,000 10,000

Argon Ratio = 0.837 Ar

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10,000 167.4 418.6 837.2 996.2 1,674.4 4,186.0 5,860.4 10,046.4 16,744.0

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

10 0.2 0.4 0.8 1.7 1.7 4.2 5.9 10.0 16.7 20 0.3 0.8 1.7 3.0 3.3 8.4 11.7 20.1 33.5

50 0.8 2.1 4.2 6.5 8.4 20.9 29.3 50.2 83.7 100 1.7 4.2 8.4 12.9 16.7 41.9 58.6 100.5 167.4 200 3.3 8.4 16.7 23.3 33.5 83.7 117.2 200.9 334.9 500 8.4 20.9 41.9 57.1 83.7 209.3 293.0 502.3 837.2

1,000 16.7 41.9 83.7 107.8 167.4 418.6 586.0 1,004.6 1,674.4 2,000 33.5 83.7 167.4 207.6 334.9 837.2 1,172.1 2,009.3 3,348.8 5,000 83.7 209.3 418.6 498.2 837.2 2,093.0 2,930.2 5,023.2 8,372.0

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Page 24

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 7: He. molbloc-S Flow in Helium at Various molbloc Upstream Pressures

Helium Ratio = 2.647 He

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

100 5.3 13.2 26.5 51.4 52.9 132.3 185.3 317.6 529.4 200 10.6 26.5 52.9 91.5 105.9 264.7 370.6 635.2 1,058.7 500 26.5 66.2 132.3 199.4 264.7 661.7 926.4 1,588.1 2,646.8

1000 52.9 132.3 264.7 398.7 529.4 1,323.4 1,852.8 3,176.2 5,293.6 2000 105.9 264.7 529.4 695.1 1,058.7 2,646.8 3,705.5 6,352.3 10,587.2 5000 264.7 661.7 1,323.4 1,737.8 2,646.8 6,617.0 9,263.8 15,880.9 26,468.1

10,000 529.4 1,323.4 2,646.8 3,281.0 5,293.6 13,234.0 18,527.7 31,761.7 52,936.2

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

10 0.5 1.3 2.6 9.4 5.3 13.2 18.5 31.8 52.9

20 1.1 2.6 5.3 13.1 10.6 26.5 37.1 63.5 105.9

50 2.6 6.6 13.2 25.7 26.5 66.2 92.6 158.8 264.7

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Table 8: SF6. molbloc-S Flow in Sulfur Hexafluoride at Various molbloc Upstream Pressures

Sulfur Hexafluoride Ratio = 0.435 SF6

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 8.7 21.7 43.5 53.8 87.0 217.4 304.3 n/a 2,000 17.4 43.5 87.0 100.0 173.9 434.8 608.7 n/a 5,000 43.5 108.7 217.4 249.9 434.8 1,086.9 1,521.7 n/a

10,000 87.0 217.4 434.8 499.7 869.5 2,173.8 3,043.4 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

10 0.1 0.2 0.4 0.8 0.9 2.2 3.0 n/a

20 0.2 0.4 0.9 1.4 1.7 4.3 6.1 n/a

50 0.4 1.1 2.2 3.1 4.3 10.9 15.2 n/a 100 0.9 2.2 4.3 5.9 8.7 21.7 30.4 n/a 200 1.7 4.3 8.7 11.4 17.4 43.5 60.9 n/a 500 4.3 10.9 21.7 26.9 43.5 108.7 152.2 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Page 25

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 9: Xe. molbloc-S Flow in Xenon at Various molbloc Upstream Pressures

Xenon Ratio = 0.460 Xe

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 7.3 18.2 36.4 59.3 72.8 182.0 322.3 n/a 2,000 14.6 36.4 72.8 109.6 145.6 364.0 644.6 n/a 5,000 36.4 91.0 182.0 267.2 364.0 910.0 1,611.5 n/a

10,000 72.8 182.0 364.0 529.2 728.0 1,819.9 3,223.1 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

10 0.1 0.2 0.4 0.8 0.7 1.8 3.2 n/a

20 0.1 0.4 0.7 1.4 1.5 3.6 6.4 n/a

50 0.4 0.9 1.8 3.6 3.6 9.1 16.1 n/a 100 0.7 1.8 3.6 6.5 7.3 18.2 32.2 n/a 200 1.5 3.6 7.3 12.9 14.6 36.4 64.5 n/a 500 3.6 9.1 18.2 29.7 36.4 91.0 161.2 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

will generally be higher; the flow values for a given molbloc and upstream pressure are approximatel y 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Butane Ratio = 0.680 C4H10

1E1-S

2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 13.6 34.0 68.0 84.4 136.0 n/a 2,000 27.2 68.0 136.0 157.0 272.0 n/a 5,000 68.0 170.0 340.0 392.4 679.9 n/a

10,000 136.0 340.0 679.9 784.9 1,359.8 n/a

Table 10: C4H10. molbloc-S Flow in Butane at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.1 0.3 0.7 1.0 1.4 n/a

20 0.3 0.7 1.4 1.9 2.7 n/a

50 0.7 1.7 3.4 4.8 6.8 n/a 100 1.4 3.4 6.8 9.0 13.6 n/a 200 2.7 6.8 13.6 18.0 27.2 n/a 500 6.8 17.0 34.0 42.2 68.0 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

[4]

n/a

n/a n/a n/a n/a n/a n/a n/a n/a n/a

1.2 MPa

[4]

n/a

n/a n/a n/a n/a n/a n/a n/a n/a n/a

2 MPa

[4]

n/a

n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Page 26

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 11: C2H6. molbloc-S Flow in Ethane at Various molbloc Upstream Pressures

Ethane Ratio = 0.960 C2H6

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 19.2 48.0 96.0 118.7 192.1 480.2 672.3 n/a 2,000 38.4 96.0 192.1 228.6 384.2 960.4 1,344.6 n/a 5,000 96.0 240.1 480.2 551.9 960.4 2,401.0 3,361.4 n/a

10,000 192.1 480.2 960.4 1,103.8 1,920.8 4,802.0 6,722.8 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

10 0.2 0.5 1.0 1.5 1.9 4.8 6.7 n/a

20 0.4 1.0 1.9 3.0 3.8 9.6 13.4 n/a

50 1.0 2.4 4.8 6.7 9.6 24.0 33.6 n/a 100 1.9 4.8 9.6 13.4 19.2 48.0 67.2 n/a 200 3.8 9.6 19.2 25.2 38.4 96.0 134.5 n/a 500 9.6 24.0 48.0 61.9 96.0 240.1 336.1 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures du e to the gas vap or pr essure.

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Ethylene Ratio = 0.996 C2H4

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 19.9 49.8 99.6 128.2 199.2 497.9 697.0 n/a 2,000 39.8 99.6 199.2 237.0 398.3 995.8 1394.1 n/a 5,000 99.6 248.9 497.9 572.2 995.8 2,489.5 3485.2 n/a

10,000 199.2 497.9 995.8 1,144.4 1,991.6 4,978.9 6970.5 n/a

Table 12: C2H4. molbloc-S Flow in Ethylene at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.2 0.5 1.0 1.7 2.0 5.0 7.0 n/a

20 0.4 1.0 2.0 3.1 4.0 10.0 13.9 n/a

50 1.0 2.5 5.0 7.5 10.0 24.9 34.9 n/a 100 2.0 5.0 10.0 13.9 19.9 49.8 69.7 n/a 200 4.0 10.0 19.9 27.7 39.8 99.6 139.4 n/a 500 10.0 24.9 49.8 64.2 99.6 248.9 348.5 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Page 27

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 13: H2. molbloc-S Flow in Hydrogen at Various molbloc Upstream Pressures

Hydrogen Ratio = 3.730 H2

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10,000 746.0 1,864.9 3,729.8 4,623.4 7,459.6 18,649.0 26,108.6 44,757.5 74,595.9

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.7 1.9 3.7 8.3 7.5 18.6

20 1.5 3.7 7.5 14.5 14.9 37.3

50 3.7 9.3 18.6 36.2 37.3 93.2 100 7.5 18.6 37.3 62.5 74.6 186.5 200 14.9 37.3 74.6 114.5 149.2 373.0 500 37.3 93.2 186.5 280.9 373.0 932.4

1,000 74.6 186.5 373.0 508.7 746.0 1,864.9

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

26.1 44.8 74.6

52.2 89.5 149.2

130.5 223.8 373.0

261.1 447.6 746.0

522.2 895.2 1,491.9 1,305.4 2,237.9 3,729.8 2,610.9 4,475.8 7,459.6

2,000 149.2 373.0 746.0 979.6 1,491.9 3,729.8 5,221.7 8,951.5 14,919.2 5,000 373.0 932.4 1,864.9 2,311.7 3,729.8 9,324.5

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pr es su re to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

13,054.3 22,378.8 37,297.9

Methane Ratio = 1.320 CH4

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 26.4 66.0 132.0 170.0 264.0 660.1 924.1 1,584.2 2,640.3 2,000 52.8 132.0 264.0 327.3 528.1 1,320.2 1,848.2 3,168.4 5,280.6 5,000 132.0 330.0 660.1 785.5 1,320.2 3,300.4 4,620.5 7,920.9 13,201.5

10,000 264.0 660.1 1,320.2 1,517.2 2,640.3 6,600.8 9,241.1 15,841.8 26,403.0

Table 14: CH4. molbloc-S Flow in Methane at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.3 0.7 1.3 2.6 2.6 6.6 9.2 15.8 26.4 20 0.5 1.3 2.6 4.4 5.3 13.2 18.5 31.7 52.8

50 1.3 3.3 6.6 10.2 13.2 33.0 46.2 79.2 132.0 100 2.6 6.6 13.2 20.1 26.4 66.0 92.4 158.4 264.0 200 5.3 13.2 26.4 36.7 52.8 132.0 184.8 316.8 528.1 500 13.2 33.0 66.0 88.2 132.0 330.0 462.1 792.1 1,320.2

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

Page 28

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 15: C3H8. molbloc-S Flow in Propane at Variou s mol b loc Upstream Pressures

Propane Ratio = 0.789 C3H8

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 15.8 39.4 78.9 97.5 157.7 394.4 552.1 n/a 2,000 31.5 78.9 157.7 181.4 315.5 788.7 1,104.2 n/a 5,000 78.9 197.2 394.4 453.2 788.7 1,971.8 2,760.5 n/a

10,000 157.7 394.4 788.7 906.5 1,577.4 3,943.6 5,521.0 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

10 0.2 0.4 0.8 1.3 1.6 3.9 5.5 n/a

20 0.3 0.8 1.6 2.3 3.2 7.9 11.0 n/a

50 0.8 2.0 3.9 5.5 7.9 19.7 27.6 n/a 100 1.6 3.9 7.9 10.5 15.8 39.4 55.2 n/a 200 3.2 7.9 15.8 20.8 31.5 78.9 110.4 n/a 500 7.9 19.7 39.4 48.8 78.9 197.2 276.1 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Table 16: CF4. molbloc-S Flow in Carbon Tetrafluoride at Various molbloc Upstream Pressures

Carbon Tetraf lu or ide Ratio = 0.563 CF4

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 11.3 28.1 56.3 69.9 112.6 281.4 394.0 n/a 2,000 22.5 56.3 112.6 134.1 225.1 562.9 788.0 n/a 5,000 56.3 140.7 281.4 323.4 562.9 1,407.2 1,970.0 n/a

10,000 112.6 281.4 562.9 646.9 1,125.7 2,814.3 3,940.1 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

10 0.1 0.3 0.6 0.9 1.1 2.8 3.9 n/a

20 0.2 0.6 1.1 1.8 2.3 5.6 7.9 n/a

50 0.6 1.4 2.8 4.1 5.6 14.1 19.7 n/a 100 1.1 2.8 5.6 7.9 11.3 28.1 39.4 n/a 200 2.3 5.6 11.3 15.7 22.5 56.3 78.8 n/a 500 5.6 14.1 28.1 36.3 56.3 140.7 197.0 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Page 29

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 17: C2F6. molbloc-S Flow in Hexafluoroethene at Various molbloc Upstream Pressures

Hexafluoroethene Ratio = 0.447 C2F6

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 8.9 22.4 44.7 55.3 89.5 223.7 313.1 n/a 2,000 17.9 44.7 89.5 102.9 178.9 447.3 626.3 n/a 5,000 44.7 111.8 223.7 257.1 447.3 1,118.3 1,565.7 n/a

10,000 89.5 223.7 447.3 514.1 894.7 2,236.7 3,131.3 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

10 0.1 0.2 0.4 0.8 0.9 2.2 3.1 n/a

20 0.2 0.4 0.9 1.3 1.8 4.5 6.3 n/a

50 0.4 1.1 2.2 3.2 4.5 11.2 15.7 n/a 100 0.9 2.2 4.5 5.9 8.9 22.4 31.3 n/a 200 1.8 4.5 8.9 11.8 17.9 44.7 62.6 n/a 500 4.5 11.2 22.4 27.6 44.7 111.8 156.6 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Table 18: CHF3. molbloc-S Flow in Trifluoromethane at Various molbloc Upstream Pressures

Trifluoromethane Ratio = 0.629 CHF3

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 12.6 31.5 62.9 77.9 125.9 314.7 440.6 n/a 2,000 25.2 62.9 125.9 149.9 251.8 629.4 881.1 n/a 5,000 62.9 157.3 314.7 361.7 629.4 1,573.4 2202.8 n/a

10,000 125.9 314.7 629.4 723.3 1,258.8 3,146.9 4405.6 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

10 0.1 0.3 0.6 1.0 1.3 3.1 4.4 n/a

20 0.3 0.6 1.3 2.0 2.5 6.3 8.8 n/a

50 0.6 1.6 3.1 4.4 6.3 15.7 22.0 n/a 100 1.3 3.1 6.3 8.8 12.6 31.5 44.1 n/a 200 2.5 6.3 12.6 17.2 25.2 62.9 88.1 n/a 500 6.3 15.7 31.5 40.6 62.9 157.3 220.3 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Page 30

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 19: Air. molbloc-S Flow in Air at Various molbloc Upstream Pressures

Air Ratio = 0.983 Air

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10,000 196.7 491.7 983.5 1,170.3 1,967.0 4,917.4 6.884.4 11,801.8 19,669.7

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

10 0.2 0.5 1.0 2.0 2.0 4.9 6.9 11.8 19.7

20 0.4 1.0 2.0 3.4 3.9 9.8 13.8 23.6 39.3

50 1.0 2.5 4.9 7.6 9.8 24.6 34.4 59.0 98.3 100 2.0 4.9 9.8 15.2 19.7 49.2 68.8 118.0 196.7 200 3.9 9.8 19.7 27.4 39.3 98.3 137.7 236.0 393.4 500 9.8 24.6 49.2 67.1 98.3 245.9 344.2 590.1 983.5

1,000 19.7 49.2 98.3 126.7 196.7 491.7 688.4 1,180.2 1,967.0 2,000 39.3 98.3 196.7 243.9 393.4 983.5 1.376.9 2,360.4 3,933.9 5,000 98.3 245.9 491.7 585.2 983.5 2,458.7 3.442.2 5,900.9 9,834.8

[1] Flow values in table are valid only when critical flow is establishe d. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Carbon Dioxi de Ratio = 0.795 CO2

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 15.9 39.8 79.5 102.4 159.1 397.7 556.7 n/a 2,000 31.8 79.5 159.1 189.3 318.1 795.3 1,113.4 n/a 5,000 79.5 198.8 397.7 473.2 795.3 1,988.3 2,783.6 n/a

10,000 159.1 397.7 795.3 914.1 1,590.6 3,976.6 5,567.2 n/a

Table 20: CO2. molbloc-S Flow in Carbon Dioxide at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.2 0.4 0.8 1.4 1.6 4.0 5.6 n/a

20 0.3 0.8 1.6 2.5 3.2 8.0 11.1 n/a

50 0.8 2.0 4.0 6.2 8.0 19.9 27.8 n/a 100 1.6 4.0 8.0 11.1 15.9 39.8 55.7 n/a 200 3.2 8.0 15.9 22.1 31.8 79.5 111.3 n/a 500 8.0 19.9 39.8 51.2 79.5 198.8 278.4 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pr es su re to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Page 31

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 21: CO. molbloc-S Flow in Carbon Monoxide at Various molbloc Upstream Pressures

Carbon Monoxide Ratio = 1.000 CO

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 20.0 50.0 100.0 128.7 200.0 500.0 700.0 1,200.0 1,999.9 2,000 40.0 100.0 200.0 247.9 400.0 1,000.0 1,399.9 2,399.9 3,999.9 5,000 100.0 250.0 500.0 595.0 1,000.0 2,499.9 3,499.9 5,999.8 9,999.6

10,000 200.0 500.0 1,000.0 1,190.0 1,999.9 4,999.8 6,999.7 11,999.6 19,999.3

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

10 0.2 0.5 1.0 2.0 2.0 5.0 7.0 12.0 20.0

20 0.4 1.0 2.0 3.5 4.0 10.0 14.0 24.0 40.0

50 1.0 2.5 5.0 7.7 10.0 25.0 35.0 60.0 100.0 100 2.0 5.0 10.0 15.4 20.0 50.0 70.0 120.0 200.0 200 4.0 10.0 20.0 27.8 40.0 100.0 140.0 240.0 400.0 500 10.0 25.0 50.0 68.3 100.0 250.0 350.0 600.0 1,000.0

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

will generally be higher; the flow values for a given molbloc and upstream pressure are approximatel y 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Nitrous Oxide Ratio = 0.795 N20

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 15.9 39.8 79.5 102.4 159.0 397.6 556.6 n/a 2,000 31.8 79.5 159.0 189.3 318.0 795.1 1,113.2 n/a 5,000 79.5 198.8 397.6 473.1 795.1 1,987.8 2,782.9 n/a

10,000 159.0 397.6 795.1 913.7 1,590.2 3,975.6 5,565.8 n/a

Table 22: N2O. molbloc-S Flow in Nitrous Oxide at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.2 0.4 0.8 1.4 1.6 4.0 5.6 n/a

20 0.3 0.8 1.6 2.5 3.2 8.0 11.1 n/a

50 0.8 2.0 4.0 6.2 8.0 19.9 27.8 n/a 100 1.6 4.0 8.0 11.1 15.9 39.8 55.7 n/a 200 3.2 8.0 15.9 22.1 31.8 79.5 111.3 n/a 500 8.0 19.9 39.8 51.2 79.5 198.8 278.3 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

[4]

2 MPa

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Page 32

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 23: C4F8. molbloc-S Flow in Octafluorocyclobutane1 at Various molbloc Upstream Pressures

Octafluorocyclobutane1 Ratio = 0.367 C4F8

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

1,000 7.3 18.3 36.7 43.8 73.3 n/a 2,000 14.7 36.7 73.3 84.3 146.7 n/a 5,000 36.7 91.7 183.3 210.7 366.7 n/a

10,000 73.3 183.3 366.7 421.4 733.3 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.1 0.2 0.4 0.6 0.7 n/a

20 0.1 0.4 0.7 1.1 1.5 n/a

50 0.4 0.9 1.8 2.4 3.7 n/a 100 0.7 1.8 3.7 4.8 7.3 n/a 200 1.5 3.7 7.3 9.2 14.7 n/a 500 3.7 9.2 18.3 22.7 36.7 n/a

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

1.2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

2 MPa

[4]

n/a n/a n/a n/a n/a n/a n/a n/a n/a n/a

[4]

Oxygen Ratio = 0.935 O2

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10,000 187.1 467.7 935.4 1,113.1 1,870.8 4,677.1 6,547.9 11,225.0 18,708.3

Table 24: O2. molbloc-S Flow in Oxygen at Various molblo c U pstrea m Pre ssur es

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

10 0.2 0.5 0.9 1.9 1.9 4.7 6.5 11.2 18.7

20 0.4 0.9 1.9 3.4 3.7 9.4 13.1 22.5 37.4

50 0.9 2.3 4.7 7.3 9.4 23.4 32.7 56.1 93.5 100 1.9 4.7 9.4 14.4 18.7 46.8 65.5 112.3 187.1 200 3.7 9.4 18.7 26.4 37.4 93.5 131.0 224.5 374.2 500 9.4 23.4 46.8 63.8 93.5 233.9 327.4 561.3 935.4

1,000 18.7 46.8 93.5 120.4 187.1 467.7 654.8 1,122.5 1,870.8 2,000 37.4 93.5 187.1 231.9 374.2 935.4 1,309.6 2,245.0 3,741.7 5,000 93.5 233.9 467.7 556.6 935.4 2,338.5 3,274.0 5,612.5 9,354.2

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

will generally be higher; the flow values for a given molbloc and upstream pressure are ap pro x im ately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

Page 33

1. INTRODUCTION

1E2-S

2E2-S THRU

1.2.5.2.5 molbloc-S Dimensions

molbloc-S SIZE [mm(in.)]

AND LOWER

48.0 (1.89) SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 80.0 (3.15) SQ 80.0 (3.15) SQ

24.0 (0.94) 24.0 (0.94) 24.0 (0.94) 40.0 (1.57) 40.0 (1.57)

48.0 (1.89) SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 80.0 (3.15) SQ 80.0 (3.15) SQ

80.0 (3.15) 80.0 (3.15) 80.0 (3.15) 176.0 (6.93) 176.0 (6.93)

28.0 (1.10) 28.0 (1.10) 28.0 (1.10) 44.0 (1.73) 44.0 (1.73)

167.5 (6.59) 171.0 (6.73) 175.0 (6.89) [1] 299.7 (11.80) [1] 331.0 (13.03) [1]

KF16 FLANGE KF16 FLANGE KF16 FLANGE KF40 FLANGE KF40 FLANGE

100.0 (3.94) 84.0 (3.31) 84.0 (3.31) 154.0 (6.06) 154.0 (6.06)

128.0 (5.04) 128.0 (5.35) 128.0 (5.35) 236.0 (9.29) 236.0 (9.29)

73.0 (2.87) 73.0 (2.87) 73.0 (2.87) 106.0 (4.17) 106.0 (4.17)

167.5 (6.59) 171.0 (6.73) 171.0 (6.73) 290.0 (11.4 2) 290.0 (11.42)

¼” VCR Male[2] ½” VCR M[2] ½” VCR M[2] KF25 FLANGE[2] KF25 FLANGE[2]

1E3-S

2E3-S 5E3-S 1E4-S

[1] On some molbloc-S elements, the venturi

nozzle extends beyond the molbloc downstream flange, making the overall length dimension, F, longer than the fitting to fitting length dimension, K. The nozzle overhang may interfere with some molbloc-S downstream connections or the connection of a blank off cap for leak testing, so a 40 mm diameter ISO-KF nipple is supplied with 5E3-S and 1E4-S molblocs.

[2] Default connector type is listed. Additional

upstream connector options may be available. Contact your DHI Sales Representative for details.

Page 34

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

1.2.6 Front and Rear Panels

1.2.6.1 Front Panel

The front panel assembly provides a 2 x 20 vacuum fluorescent display, a membrane keypad for local user interface and other LED indicators.

 2x20 Display  Multi-Function Keypad

Figure 1. molbox1+ Front Panel

 Channel Indicator  Remote Operation Indicator

1.2.6.2 Rear Panel

The rear panel assembly provides pressure and electrical connections for two molbloc mass flow elements, communications interfaces and the power connection module.

 Connection for External DMM (Option)  External Drivers Connection (Option)  MFC Switchbox Connection  RS485 Connection (not used)  Host Communications (IEEE-488)  MFC Analog Control Connection  Remote Communication for External Device (RS232)

 Host Communications (RS232)  On/Off Sw i tch  Fuse  molbloc Electrical Connection (Channel B)  molbloc Pressure Connections (Channel B)  molbloc Pressure Connections (Channel A)  molbloc Electrical Connection (Channel A)

Figure 2. Rear Panel

Page 35

2. Installation

2.1 Unpacking and Inspection

2.1.1 Removing From Packaging

molbox1+ is delivered, along with its standard accessories, in a corrugated container with foam end caps to hold it in place.

Remove the molbox1+ and its accessories from the shipping container and remove each element from its protective plastic bag.

2.1.2 Inspecting Contents

Check that all items are present and have NO visible damage. A molbox1+ includes:

ACCESSORIES INCLUDING:

1 Operation and Maintenance Manual 3540962 1 Power Cord (7.5 ft.) 3133781

4 molbox to molbloc pressure connecting tubes 3069560 2 molbox to molbloc electrical/data connection cables 3068683

2 Straight through quick connector stems 3068652* 1 Rubber Feet Cap Set (4) 3125347 1 MFC Cable and Connections Kit (if MFC Option

1 External 12 V Drivers Connector 3069839 1 General Accessories Disk (white)

* Equivalent to Swagelok P/N SS-QM2-S-200

Table 25: molbox1+ Parts List

DESCRIPTION PAR T #

molbox1+ mass flow terminal 3499975

molbox1+S mass flow terminal 3499975

Report of Calibration 3152121

included)

(Important: Includes system support software and

documentation.)

or 3153005-CE

or 3072220-CE

3114778

or 3114784-CE

3139043

2.2 Site Requirements

Install the molbox1+on any stable surface at a convenient height. The front feet are extendible so that the unit can be inclined for eas ier vie wing. F our rub ber f eet caps ar e prov ided in the acces sories and can be installed if desired. These prevent the unit from slipping on smooth surfaces.

Page 36

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

The molbox1+ can also be mounted in a standard 19 in. rack mount using the optional rack mount kit (P/N 3069903). For additional information, contact your DHI Representative.

When installing the molbox1+, consideration should be given to where the molbloc flow measuring element and associated hardware will be located. molbox1+ may be placed on a shelf or cart at a different height than the molbloc, but the distance between the molbloc and molbox is limited by the length of the cable and pneumatic lines connecting them. If you will locate the molbox at a different height than the m olbloc, the sm all errors that wou ld be assoc iated with th e difference in pr essure can b e removed using the molbox1+ head correction (see Section 3.6.8).

If the molbloc/molbox system is being used to calibrate other devices (DUTs), the molbloc may need to be connected upstream or downstream of the DUT to operate within the pressure limits of the molbloc’s calibration type (see Se ctions 1.2.5.1.3, 1.2.5.2.3) and to accommodate the pressure requirements of the DUT. See the molbloc’s Calibration Report to determine the calibration type of the molbloc you are using.

If the molbloc is connected upstream of the DUT, it is important to supply the molbloc with a stable regulated gas sourc e. The volume pr esent between t he molbloc and the device to be cali brated should be minimized, particularly for low flows.

In some cases, m olbloc-S is used with a vacuum source downstream to r educe the pressure at which critical fl ow is reached. Cons ider the placemen t of the vacuum pum p and connections. G enerally, a larg e vacuum pump is needed that should be isolated from the work area due to noise and oil vapor considerations. If the vacuum pump and/or vacuum kit was purchased from DHI, see the instruction sheets and/or manuals that are included with the hardware.

Optional molstics are offered for mounting molblocs. They provide a convenient means of addressing supply regu lation, filterin g and interconnec tion issues with h igh quality, conf igured hardwar e. For additional information, contact your DHI Representative.

 Caution

If a DUT is located upstream of the molbloc and is contaminated, contaminates may flow from the DUT to the molbloc and alter the molbloc calibration. If the DUT must be connected upst ream of the molbloc, be sure it is clean before flowing and consider installing a filter between the D UT and the molbloc.

2.3 Initial Setup

2.3.1 Preparing for Operation

To prepare molbox1+ for check out and operation:

 Remove the plastic caps from the molbox1+ rear panel pressure connections.  Remove the protective plastic sheet from the front panel display.  Familiarize yourself briefly with the front and rear panels (see Section 1.2.6).  Follow the steps described in Sections 2.3.2 to 2.3.7.

2.3.2 Power Connection

Connect the power cable s upplied to molbox1+ an d to a power sourc e. Power requirem ents are 85 to 264 VAC, 50 to 60 Hz, 22 VA max. consumption.

Page 37

2. INSTALLATION

2.3.3 molbox1+ to molbloc Connec t ions

There are two molbloc connection channels on molbox1+. Each has two pressure connections (upstream and downstream) and one electrical/data connection. Select a channel to use or connect a separate molbloc to each channel.

For the pressure con nections, use the molbox1+ to molbloc pr essure tubes (P/N 3069560) supplied with the molbox1+. Following the color c oding on the pressure lines, connect th e upstream (HI) molbox1+ re ar panel quick connector to the ups tream port of the molbloc and the downstream (LO) quick connector to the downstream port. To connect the quick connectors, first pull back the knurled sleeve on the quick connector body, then insert the quick connector stem and push firmly on the quick connectors until the y click into place to assure that the connection is properly completed.

For the electrical/data conn ection , use t he m olbox to m olbloc elec trical/ data c onnect ion cab le (P/N 3068683). Con nec t th e c able t o the molbloc and then to molbox1+ rear panel c onnec tor labeled molbloc.

 Caution

Avoid making or breaking molbl oc electrical connections to the molbox1+ while the molbox power is ON. Damage to the molbloc EEP ROM may resul t.

2.3.4 Gas Supply and Flowpath Conne c t ions

Connect a gas supply to the molbloc. Gas supply requirements are:

• T he gas supply mus t be clean and dry (espec ially free f rom oil and part iculates) to avoid contaminating the molbloc.

• For c orrect meas urements, the gas must be of the sam e species as that selected b y the molbox1+ GAS function (see Section 3.4.2). Gas purity affects the measurement uncertainty of flow measurements as molbox1+ uses the thermodynamic properties of the flowing gas in its flow calculatio ns. Generally, gases with purit y of 99.9 % or better are used for molbloc measurem ents. Except when usi ng ambient air with molbloc -S, the test gas should be free of any humidity (dewpoint less than – 40 °C).

• If the m olbloc is connect ed upstream of the DUT, the s upply pressure m ust be regulated and stable within the limits of the molbloc-L pressure dependent calibration type (see Section 1.2.5.1.2.1) or molbloc-S cal ibra tio n t ype (s ee s ec tion 1.2. 5.2. 2). If the molb loc is connected downstream of the DUT, use regulators and valves to make sure that the pressure that is delive red to the molbloc will be within th e limit s of the molbloc calibration type.

• Care should also be taken to make sure that the pressure and flow supplied to the molbloc are always low enough to avoid over pressuring the molbox1+ RPTs(see Sections 1.2.2, 3.1.4). If a DUT upstream of the molbloc is operated at high press ure, a pressure reducing regulat or should be connected between the DUT and the m olbloc to ensure that even momentary high pressure spikes do not reach the molbox RPTs.

 Caution

• The gas supp lied to the molbloc should be clean and dry. Contam ination

of the molbloc flow passage with liquids, particulates or any other matter will alter the molbloc calibration and can lead to out of tolerance flow measurements.

• NEVER connect a pressure source to the molbloc that is greater than the

overpressure limit of your molbox1+. molbox1+ A350K overpressure limit is 300kPa absolute/200 kPa gauge (44 psig/29 psig). molbox1+ A700K overpressure limit is 650 kPa absolute/550 kPa gauge (95 psia/80 psig). Overpress ure can d amage the molbox1+ intern al RPTs (see S ection 1. 2.2,

3.1.4).

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

If you are using a DHI molstic: Install the molbloc into the molstic and connect a gas

supply following th e molstic instruc tion sheet or m anual. The f low through the m olbloc must be in the direction of the arrow engraved on the molbloc.

If you are NOT using a DHI molstic: Connect a gas supply to the molbloc acc ording to the molbloc instruction sheet and the pressure limits of the molbloc calibration type. A valve should be installed betw een the press ure suppl y and the m olbloc to allo w flow to the m olbloc to be interrupted. The flow through the molbloc must be in the direction of the arrow engraved on the molbloc.

Adaptor kits are a vailable from DHI to m ake connections f rom the molbloc or m olstic fittings to other common c onnector types. Ask you DHI Sales Repr esentative about your specific adaptor requirements.

 Caution

Operating at pressures other than those of the molbloc-L pressure dependent calibration typ e (see Section 1.2.5.1.2) or molbloc-S calibration type may result in out of tolerance flow measurements. Refer to the molbloc Calibration Report to determine its calibration type.

2.3.5 Vacuum Supply (molbloc-S only)

In some cases m olbloc-S is operated with a vacuum downstre am of the molbloc to reduce the back pressure so that critical flow can be reached at a lower upstream pressure (see Section 3.1.5).

There is no lower limit to the pressure that may safely be applied to molbox1+ RPTs. If you are using DHI supplied downstream vacuum connect kit and vacuum pump:

Install the kit and pump following the supplied instruction sheet or m anual. Carefully follow the pump manufacturer’s recommendations for pump operation.

If you are NOT using DHI supplied downstrea m vacuum connect kit and vacuum pump: Carefully evaluate vacu um pump specifications to be sur e that the vacuum source available has the pumping speed necessary to safely handle the planned flows and to maintain low enough pressure at planned flow rates.

Be sure to provide facilities to avoid flowing into the pum p when the pump is not ON as this will cause pressure to build up on the pump and may dam age it. Norm ally, a shut-off valve should be included between the pump and the molbloc-S.

It is preferable to install a check valve with very low cracking press ure between the molbloc and the vacuum shut-off valve.

 Caution

Operating at pressures other than tho se of the molbloc-S calib ration type may result i n out of tolera nce flow measu rements (see Section 1.2.5. 2.2). Refer to the m ol blo c Ca li bra t ion Rep ort to d eter m in e its ca li bra ti on ty pe .

2.3.6 Communications Connections

If molbox1+ is being interfaced to a com puter, connect an RS 232 cable to molbox1+ COM1 or an IEEE-488 cab le (cables not supplied) to the molbox1+ IEEE-488 interf ace. Configure the interface (see Section 3.6.6).

Page 39

2. INSTALLATION

2.3.7 MFC Control Option Connecti on

If the molbox1+ is equippe d with the MFC c ontrol option, a c able and connec tion kit will ha ve been supplied with t he molbox1+ acc essor ies. C onf igure th e cab le c orrectl y us ing the p inout information provided in Section 7.3 and information from the MFC manufacturer.

2.4 Power UP and Verification

2.4.1 Power UP

Actuate the power s witch on the molbox1+ r ear panel. Observe the front panel d isplay as molbox1+ initializes, error checks, calibrates its internal ohmic measurement system and goes to the main run screen (see Section 3.2). The top left side of the main run screen should display a flo w value near zero or <BPR HI >. If <NO BLOC> is displayed, molbox1+ has not been able to identif y a molbloc connection and loa d molbloc inform ation. Verify that a valid molbloc is pro per ly connected (see Secti on 2.3.3) and press [SETUP], <1molbloc> to load the molbloc (see Section 3.5.1). If molbox1+ is still unable to identif y a molbloc, the molbloc may require reloading of EEPROM information or molbox1+ may require repair.

If the molbox1+ fails to reach the main run screen: Service may be required. Rec ord the sequence of operations and displays observed and contact a DHI Authorized Service Provider (see Section 7.4).

2.4.2 Check Proper Pressure Measurement Operation

Check that the molbox pressure measurements are operating properly. Proceed as follows:

 Connect the molbloc to the molbox1+ (see Secti on 2.3.3).  Shut off the gas supply to the molbloc and open both molbloc ends to atmospheric

(ambient) pressure.

 Press [P&T] and observe the display of the pressure measured by the upstream and

downstream absolute RPTs (see Section 3.4.5). Observe the upstream and downstream pressures. These should indicate cur rent atmospheric pressure and be in agreement within ± 0.02% of the nominal full scale calibrated range listed in section

1.2.2. If the two readings disagree b y more than this, one or both RPTs may be out of calibration and service may be required.

 Press [ESCAPE] to return to the main run screen.

Note

The pressure measurements indicated in the [P&T] screen are corrected for TARE and AUTOZERO values. If the pressure readings disagree more than the values indicated above refer to the manual sections regarding these f unc tio ns be fore cons i der in g ca lib ra ti on or ser vi ce .

2.4.3 Check Proper Temperature Measurement Operation

Check that the molbox1+ temperature measurement is operating properly. Proceed as follows:

 Connect a molbloc to the molbox1+ (see Section 2.3.3).  From the molbox1+ main run sc reen, press [P&T] twice to arrive at t he temper ature display

screen. Observe the temperature readings of the two molbloc PRTs (see Section 3.4.5). If the molbloc has been in a stable temperature environment for 30 to 60 m inutes, the temperature indicatio ns should be roughly ambient te mperature and the two indications should agree withi n ± 0.2 °C. If the two r eadings disagr ee by more than ± 0.2 °C, there may be a problem with t he molbloc or the molbox1+ TEMPERAT URE MEASUREM ENT function and service may be required.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

2.4.4 Check the MFC Control Function (Optional )

Using the front panel k eypad, display select MFC profile #1 f or a voltage MFC or #2 for a current MFC (see Sect ion 3.4.8). Usin g [ENTER] to s elect MFC se tpoints a nd obser ving the MFC display screens, chec k that the MFC control ope ration is normal. If operation does not appear to be correct, check the MFC cable configuration and connection. Check the recommendations in Section 2.5 and the Troubleshooting Guide in Section 6 prior to contacting a DHI Authorized Service Provider (Section 7.4).

2.4.5 Leak Check

It is recommended that a ne w molbox1+ be leak check ed at s tar t-up to as s ure t hat no interna l leaks developed during shipping and handling. See Section 3.4.4.3 to run the molbox1+ on-board INTERNAL LEAK CHECKING function.

2.4.6 Check/Set Security Level

molbox1+ has a security system based on user levels. By default, the securi ty system is s et to “low”, which includes certain access restrictions, and there is no password required to change the securit y lev el. See S ection 3.6.2 f or inf or m ation on th e secur ity le vel s ystem . As part of the molbox1+ startup, set your desired security level and a password.

 Caution

molbox1+ is delivered with the security level set to “low” to avoid inadvertent altering of critical internal settings but with access to changing security levels unrestricted. It is recommended that at least the low security level be maintained at all times and password protection be implemented if control over setting of security levels is desired.

2.5 Additional Precautions to Take Before Makin g Flow Measurements

Before using the molbox1+ to make meaningful flow measurements, consider the following:

• The pressure measuring RPTs must be tared at the operating line pressure (see Section 3.4.4.1).

• Operating pressure and flow range should be within the limits of the molbloc calibration type and

molbloc size for the flowing gas (see Section 1.2.5).

• Be sure that the gas pressure connected to the molbloc is not great enough to overpressure the

molbox1+ internal RPT s.

• The gas type selected should be the gas flowing through the molbloc (see Section 3.4.2).

• For flow measurement uncertainty within molbox1+ specifications, the gas type should be a gas with

which the m olbloc has been calibr ated (s ee molb loc Cal ibratio n Repor t) or pr ess [SETUP], <1molbloc>, [ENTER] to see if the gas is included in the molbloc calibration gas list (see Section 3.5.1).

• Be sure the flo w unit of m easure you are using is correct. The d efault f low units of s ccm and s lm for

any molbox1+ are referenc ed to 0°C and 101.325k Pa per SEMI E12-96. Man y diff erent types of f low units of meas ure are commonly used and have simil ar names. Before selecting a unit of measure, familiarize yourself with Section 3.4.3 and its subsections thoroughly.

• Do not su pply a gas or connect a DUT upstr eam of the molbloc that ma y contaminate the molbloc.

The filter assembly inside a molbloc-L is designed to work with a clean gas supply with limited contaminants. T his f ilter a ss em bl y should b e c ons idered a last line of defens e a gai nst c ontamination and additional filtration should always be considered.

• Troubleshooting: For information on typically encountered start-up and operational issues, see Section 6.

Page 41

2. INSTALLATION

2.6 Short Term Storage

The following is recommended for short term storage of molbox1+:

• Vent the molbox1+ pressure ports.

• Turn off the power.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Notes

Page 43

3. Operation

3.1 General Operating Principles

3.1.1 molbloc Channel A & Channel B

molbox1+ sup ports two m olbloc inp ut channels . The main pur pose of this c apabili ty is to switc h conveniently between t wo molblocs without making and break ing connections, for example, to switch between two ranges. It also allows two molblocs to be used simultaneously (see Section 3.5.4).

The active molbox1+ channel is indicated by the lit LED under the display. The active channel can be change d by pres sing t he [A/B] direc t func tion k ey (see Sec tion 3.4.7). When a molbloc channel is activated, molbox1+ operates internal valves to connect the molbloc pressure ports for that c hannel to the molbox1+ pressure transducer s. The temperature of the molbloc connec ted to t he act ive cha nnel is m easured an d th e flo w calibr ation dat a f or the molbloc most recently activated on that channel is used for calculating flow.

Channel A High Isolation: Open

Channel A Low Isolation: Open

Channel B High Isolation: Closed

Channel B Low Isolation: Closed

Bypass: Closed, molbox1+-S does not use this valve or connection.

Figure 3. molbox1+ Internal Pneumatic Schematic - CHANNEL A ACTIVE, molbloc-L OPERATION

User-selected s e tti ngs s uch as g as, u nits , K f ac tor, etc . a re al l com m on b etwe en channels A and B. When one of these settings is changed while channel A is active, that setting will also be made for channel B, even if different molbloc types are connected to the two channels. The only setting that is not common to both molbloc channels is the tare value (See Section 3.4.4).

3.1.2 molbloc-L and molbloc-S Operation

molbox1+ operates s omewhat differently dep ending on whether a molbl oc-L or molbloc-S is connected to the active molbox1+ channel. m obloc-L and molbloc -S operation use dif ferent displays and flow calculations and some menu items are present for only one type of molbloc.

Most molbox1+ s ett in gs, s uc h as gas, uni ts , K f ac tor , e tc ., are c om mon to both molbloc-L and molbloc-S operation. C hanges made to these settings while operating one type of molbloc will still be in eff ect when th e other t ype of m olbloc is connec ted. T he onl y setting that exists for both molbloc types, but is stored independently for each type, is the tare value. See section 3.4.4.1 for details on the tare function.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Several of the molbox1+ sc reen displa ys and functions described in this section are different for molbloc-L and m olbloc-S operation. Where the dif ferences are major, the description of these functions is divided into two parts.

3.1.3 Flow Ready/Not Read y Indicati on

The character to the left of the measured flow on the MAIN run screen provides a flow Ready/Not Ready indicatio n. This indication is inte nded to provide the us er with a clear and objective indication of when a stable flow has been achieved.

Ready <*> is indicated when the current stability (rate of change) of flow is less than the stability limit. The us er can set t he stability lim it (see Section 3.5 .2). The Read y/Not Ready indication is often used when comparing the molbox1+ and a test device to help deter mine when steady state flow conditions are present so that a valid comparison reading can be made.

In addition to the co nditions listed in s ections 3.1.3.1 and 3.1.3.2 molblocs that have named calibration support will flash the flow display and indicate a Not Ready condition when the measured flow exc eeds the c alibrated f low ran ge by 5% or the m easured upstream pressure exceeds the calibrate d pressure range b y 10 kPa above the maxim um pressure or 10 kPa below the minimum pressure. The downsream pressure is used when a molbloc-L downstream calibration is active.

3.1.3.1 molbloc-L Operation

In molbloc-L operation, t he Ready/N ot Ready indication also he lps guard against using molblocs above th eir va lid rang e by monitoring the Reynolds number of the flow. If the Reynolds num ber of the cur rent flow excee ds 1 300, the Ready (<*>) indicator flashes. The current Reynolds number value can be viewed using [P&T] (see Section 3.4.5). If molblocs are used within the pressure and flow range limits for the flowing gas and the pressure dependent calibration type (see Section 1.2.5), a Re ynolds number of 1 200 will never be exc eeded (1 300 is used as the warning limit to allow for individual molbloc differences).

Ready/Not Ready character indications are:

<*> Flow Ready (stable). <*> (Flashing): Reynolds number > 1 300.

↓> Flow Not Ready ( uns t ab le and decr eas ing) .

< <

↑> Flow Not Ready (unstable and increasing).

Flow Not Ready, flow flashes (pressure exceeds calibrated

pressure range by 10kPa)

<F> Flow Not Ready, flow flashes (flow exceeds calibrated max flow b y 5 %)

3.1.3.2 molbloc-S Operation

In molbloc-S operati on, the Ready/ Not Ready indicatio n is also used t o warn the user when the BPR (back pressure ratio) is too high to ensure critical flow (see Section 3.1.5). When the BPR is beyond the choking limit, molbloc-S flow measurements may not be valid and the Ready indicator becomes . The Ready/Not Ready indicators based on flow stability are also used in molbloc-S operation, but the indicator takes priority over other indicators.

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3. OPERATION

Ready/Not Ready character indications are:

<*> Flow Ready (stable). <

↓> Flow Not Ready ( uns t ab le and decr eas ing) .

↑> Flow Not Ready (unstable and increasing). Flow Not Ready (BPR high / sub-critical flow) [Alternate] Flow Not Ready, flow flashes (pressure exceeds calibrated

pressure range by 10kPa)

<F> Flow Not Ready, flow flashes (flow exceeds calibrated max flow b y 5 %)

3.1.4 Reference Pressure Transducer (RPT) Overpressure

molbox1+ has two absolute RPTs, one measures molbloc upstream pressure, the other measures molbloc downstream pressure and may provide a second measurement of m olbloc upstream pressure in molbloc -S operation. In normal operation, they are not used at pressures greater than the following maximum working pressures:

molbox1+ A350K: 300 kPa absolute (44 psia) molbox1+ A700K: 600 kPa absolute (87 psia) molbox1+S A1.4M: 1400 kPa absolute (203 psia) molbox1+S A2M: 2000 kPa absolute (290 psia)

Exposing the molbox1+ RPTs to pressures greater than the m aximum operating pressure may dam age them . molbox1+ has a syste m of warnings and alarm s to protect itself from overpressure (see Section 3.6.3.1).

3.1.5 molbloc-S BPR Limits

To make flo w measurem ents wit hin pred ictabl e measur ement unc erta inty limi ts with a molbloc -S flow element, critica l (sonic) flow conditions m ust be present. Critical flow ex ists when the gas velocity reaches the local speed of sound at the throat of the molbloc-S Venturi nozzle.

molbox1+ uses the back pressure ratio, or BPR (the ratio of the molbloc-S downstream absolute pr essure to the ups tream absolute pres sure) to determin e whether the flo w is critical. For Venturi nozzles in gener al, the BPR mus t remain below a certain va lue for critical flo w to exist. Commonly accepted practice f or critical flo w orifice use s uggests that this limiting BPR value, or “chok ing ratio”, is approximate ly 0.5. That is, the absolu te pressure downstre am of the nozzle must be less than one half of the absolute pressure upstream of the nozzle. Empirical study of the Vent uri nozzles used in molbloc-S shows that the actual chok ing ratio, or maximum BPR for critical flow, varies between about 0.4 and 0.9 as a function of the Reynolds number (Re) over which the molblocs are u sed. molbox1+ cont inually calculates Re during flow measur ement and can m onitor the BPR to ensure t hat it does not exceed the choking ratio at the current Re conditions. molbox1+ uses a conservative BPR limit to indicate to the user when the BPR approaches the choking ratio, to ensure that flow measurements are only made under “safe” critical flow conditions. molbox1+ includes features to measure BPR, automatically alert the operator when the BPR is too high and prevent measurements when flow is not critical (see Sections 3.1.3.1, 3.4.4.5, 3.6.9).

Maintaining a sufficiently low BPR must be considered by molbloc-S users when selecting molbloc-S sizes and hardware setups to use for flow measurements. For example, if a molbloc-S will be us ed with atmos pheric pressur e downs tream , then the m olbloc c an onl y be used over a range of upstr eam pres sures starting at t he max imum pressur e for its calibrat ion type down to a minim um pressure value at which the BPR becomes equal to th e BPR limit calculated by molbox1+. S ince mass flow through m olbloc-S is proportion al to the upstream absolute pressure, the f low range for the molbloc in this applicati on is defined by the BPR

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

limit also. To max im ize the r ange of a molbloc-S element, a vacu um pump can be connected downstream to reduce the downstream pressure while flowing. When the downstream pressure is kept suf ficiently low, the upstream pres sure, and thus the mass f low rate, can be adjusted all the way down to the minimum value for the molbloc’s pressure dependent calibration type without being limited by the BPR value.

Depending on the p lac ement of the molbloc-S in relation to the D UT and other hardw are, and the availabilit y and capac it y of a vac uum pum p that m ay be used, the m olbloc -S d ownstr eam pressure will var y in different applications. C alculating Re for dif ferent molbloc-S sizes and flow rates, and estimating the choking ratio (maximum BPR limit) as a function of Re is somewhat complex, s o Table 17 is offered as an exam ple of the minimum flow that can be achieved with each molbloc-S size in nitroge n, witho ut ex ceeding molbox1+ BPR l imits, when the molbloc-S downstr eam pressure is known: In actual operation, molbox1+ calcula tes the Re and BPR ratio and can automatically provide an indication of whether the BPR is adequate for measurem ents to be m ade. For an es timate of the min imum critical f low at various do wnstream pressures in gases other than N2, conta ct y our DHI Representative.

Table 26: Minimum molbloc-S Critical Flow (slm) in Nitrogen at Various molbloc-S Downstream Pressures

N2 MINIMUM molbloc-S CRITICAL FLOW [SLM @ 0°C] WITH MOLBLOC DOWNSTREAM PRESSURE OF:

molbloc-S

DESIGNATOR

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

≤ 5 kPa (0.7

psia)

0.2

0.4

10 20

40 100 200

10 kPa (1.5

psia)

[2]

0.4 0.9 1.1 1.8 2.0 2.2 2.4 2.8 3.5 4.2

[2]

0.7 1.6 1.8 3.2 3.5 3.7 4.2 5.6 7.0 7.6

[2]

1.7 3.4 4.7 7.7 8.4 9.4 11 14 17 20

[2]

3.4 5.9 8.4 15 16 18 21 27 33 38

[2]

5.9 9.8 16 28 31 34 40 51 63 74

[2]

12 20 37 67 72 80 95 122 149 179

[2]

100

[2]

200

25 kPa (3.5

psia)

[2]

39 69 129 139 154 184 239 294 349

[2]

73 131 248 268 298 358 468 578 687

[2]

173 317 596 646 746 871 1 145 1 420 1 694

[2]

347 615 1 173 1 273 1 442 1 741 2 240 2 789 3 338

kPa

psia)

100 kPa (15

psia)

110 kPa

(16

psia)

125

kPa

(18

psia)

150 kPa

(22

psia)

200 kPa

(30

psia)

250 kPa

(36

psia)

[1]

300 kPa

(44

psia)

[1] When volumetrically based mass flow units with reference temperatures other than 0 °C are used, flow values will

generally be higher; for example, the flow values for a given molbloc and upstream pressure are approximately 7 % higher when expressed in slm @ 20 °C. Flow values at a given pressure may vary by up to 2 % due to flowpath machining tolerances.

[2] Limited by 20 kPa minimum calibration pressure rather than back pressure ratio

3.2 Main Run Screen

The molbox1+ MAIN r un screen is its home displa y that is reached on power up an d from which other functions and menus are accessed. It is the top level of all menu structures.

The MAIN run screen is displayed in normal operation. It indicates the current measured flow as well as a variety of additional information, if desired.

The MAIN run sc reen display applies t o the molbloc on the active molbloc chann el indicated by the re d LED below the molbox1+ display (A or B). T he appearance of the MAIN run scr een diff ers depending on whether the active molbloc is a molbloc-L or a molbloc-S.

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3. OPERATION

↑

↓

*FLOWWWW unitk GGGG D DISPLAY MODE DATA MFC1R

∑

3.2.1 molbloc-L Operation

Some item s in the molbloc-L MAIN run screen may change or flash at times, to indicate that certain limit s a re e x ceede d, a s de scr ibed in t he te xt a ccompanying the follow ing s cree n d i splay :

1. <*> Ready/Not Ready indication; <*> when Ready (flashes if Reynolds number of the flow exceeds 1 300), < (increasing) or < rate evolution when Not Ready (see Sectio n 3.1.3).

2. <FLOWWWW>: Numerical value and sign of the flow measured by molbox1+. Result of last flow averaging cycle if in AVERAGE displa y (see Section 3.4.6.2). Flas hes if Reynolds number of the flow exceeds 1,300. Flashing also occurs when a named calibrat ion is acti ve an d the flow exceeds the calibrated range by 5%, or t he m eas ur ed u ps tream p ress ur e e xceeds t he calibrated pressure range by 10 kPa above the maximum pressure or 10 kPa below the minimum pressure. The downsream pressure is used when a m olbloc-L downstream calibration is active. The fiel d displays “PMODEL” when the pressure exceeds the molbox internal pres sure model for the active calibration gas.

3. <UNIT> Current flow unit of measure (see Section 3.4.3). Flashes if BPR is higher than the choking limit.

4. <K>: Indication whether a gas conversion factor or ADJ flow adjustment is applied to the displayed flow measurement. Possible indications include:

<K>: Indicates that a gas correction factor (K factor) is currently being applied to the measured flow (see

Section 3.4.1). <K> if a factor is being applied, blank if no factor is being applied.

<A>: Indicates that a flow adjustment adder and/ or m ultiplier) is c urrently being applied t o the m easured flow

using the ADJ function (see Section 3.5.3). <A> if ADJ is being applied, blank if no ADJ is being applied. Alternating When both ADJ and a K fact or are appl i ed, t he i ndication alternates between <k> and <A> at each screen update.

5. <GGGG>: Indic ates the current molbox gas selection (see Section 3.4.2). This should be the gas that is flowing through the molbloc. The field will alternate with the named calibration name when a named calibration is active and more than one calibration is available for the selected gas.

6. <D>: Indication of what is being displayed on the bottom line of the display as set by the DISPLAY function (see Section 3.4.6). Possible indications include:

<R>: Current DISPLAY mode is RATE (see Section 3.4.6.1); or if <n avg> is in the bottom right hand corner

of the display, current DISPLAY mode is “average” and this is the instantaneous reading AVERAGE screen (see Section 3.4.6.2).

> (decreasing) indicat ing direction of flow

> Current DISPLAY mode is AVERAGE (see Section 3.4.6.2).

< <H> Current DISPLAY mode is HI/LO (see Section 3.4.6.3). <

> Current DISPLAY mode is TOTAL (see Section 3.4.6.4). <=> Current DI SP LAY m ode is UNIT (see Section 3.4.6.5). <D> Current DISPLAY mode is DEVIATION (see Section 3.4.6.6). <F> Current DISPLAY mode is FREEZE (see Section 3.4.6.7). Blank, No character Current DISPLAY mode is CLEAN (see Section 3.4.6.8).

7. <DISPLAY MODE DATA>: Information displayed depends on current display mode (see Section 3.4.6).

8. <MFC1R>: If the molbox1+ has the MFC control option, MFC profile and MFC switchbox channel number are displayed when MFC function is on. Foll owed by R if MFC is in reg ulation mode. This display is overridden by < DI S PL AY M O DE D AT A> if the space is needed to display < DI SP L AY M O DE D AT A> ( Av er ag e , H i/ Lo , Total, Unit, Deviation).

• The M AIN run screen may be slightly different when MFC control is in use

or an A_B f unc ti on i s i n use (se e Sections 3.4.8, 3.4.7).

• When a number is too large to show in the allocated display space,

molbox1+ displays <********>.

Note

Page 48

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

↓

measured upstream pressure exceeds the calibrated

*FLOWWWW unitk GGGG D DISPLAY MODE DATA MFC1R

• molbox1+ h as a SCREEN S AVER function that causes the display to dim if

NO key is pressed for 10 minutes. Pressing a key restores full powe r to the displa y. The screen save r activation tim e can be changed or s creen saving can be completely suppressed (see Section 3.6.5.1).

3.2.2 molbloc-S Operation

As with molb loc-L th ere are lim its on som e of the conditi ons that m ay exist if the u ser expects to make accurate flow measurements with molbloc-S. The key condition that can be m onitored is the back pressure ratio, or BPR , which determines whether critical flow through the molbloc is achieved (see Section 3.1.5).

When the BPR is in a “safe” region for critical flow measurements, the appearance of the MAIN run screen is identical to the MAIN run screen in molbloc-L operation (see Section

3.1.3.1). When the molbox1+ BPR limit is exc eede d, t her e ar e t wo pos sib le MAI N r un s cr een indicators. A flashing flo w value and unit indicate that the BPR limit has been ex ceeded. In this condition, the flow ma y not be critica l and flow m easurements should not be relied on to meet specifications. W hen the BPR limit is exc eeded by a large margin, th e flow is almost certainly not critical and t he calculated value may be non-sensical, so the f low value is not shown and is replaced b y <BPR HI>. In this state, the BPR value rep laces the display field on the second line of the molbox1+ terminal.

Note

When molbloc-S is in the BPR OFF mode (see Section 3.6.9), BPR is not monitored and invalid flow values may be displayed in the molbloc-S MAIN run screen with no indication that a the BPR value is high.

1. <*> Ready/Not Ready indication; <*> when Ready <↑> (increasing) or < rate evolution when Not Ready; when BPR is higher than choking limit. (see Section 3.1.5).

2. <FLOWWWW>: Numerical value and sign of the flow measured by molbox1+. Result of last flow averaging cycle if in AVERAGE display (see Section 3.4.6.2). Flashes if BPR is higher than the choking limit. If BPR exceeds the choking limi t by a large margin, <BPR HI> replac es the flow value. The flow will f lash when a nam ed calibrat ion is active and the flow exceeds the calibrated range by 5% or the

pressure range by 10 kPa above the maximum pressure or 10 kPa below the minimum pressure. The field displays “PMODEL” when the pressure exceeds the molbox internal pressure model for the active calibration gas.

3. <UNIT> Current flow unit of measure (see Section 3.4.3). Flashes if BPR is higher than the choking limit.

4. <K>: Indic ation whether a gas conversion factor or ADJ flow adjustment is applied t o the displayed flow measurement. Possible indications include:

<K>: Indicates that a gas correction factor (K factor) is currently being applied to the measured flow (see

Section 3.4.1). <K> if a factor is being applied, blank if no factor is being applied.

<A>: Indicates that a flow adjustment adder and/ or m ultiplier) is c urrently being applied t o the m easured flow

using the ADJ function (see Section 3.5.3). <A> if ADJ is being applied, blank if no ADJ is being applied. Alternating When both ADJ and a K fact or are appl i ed, the i ndic at i on alt ernat es between <k> and <A> at each screen update.

5. <GGGG>: Indic ates the current molbox gas selection (see Section 3.4.2). This should be the gas that is flowing through the molbloc. <AirW> indicates that air is selected and a humidity correction is being applied (see Section 3.4.2.2). The f ield will alternate with the nam ed calibration name when a nam ed calibration is active and more than one calibration is available for the selected gas.

6. <D>: Same as molbloc-L (see Section 3.1.3.1).

7. <D ISPLAY MOD E DATA>: Information displayed depends on current display mode (see Section 3.4.6).

8. <MFC1R>: Same as molbloc-L (see Section 3.1.3.1).

> (decreasing) indicat ing direction of flow

Page 49

3. OPERATION

Note

• The M AIN run screen may be slightly different when MFC control is in use

or an A_B f unc ti on i s i n use (see Sections 3.4.8, 3.4.7).

• When a number is too large to show in the allocated display space,

molbox1+ displays <********>.

• molbox1+ has a SCREEN SAVER function that causes the display to dim if

NO key is pre ssed for 10 minut es. Pressing a ke y restores fu ll power to the displa y. The screen save r activation tim e can be changed or s creen saving can be completely suppressed (see Section 3.6.5.1).

3.3 Manual Operation

molbox1+ is des igned to offer the optim um balance between sim ple, intuitive operation and the availabilit y of a w ide var iet y of f unc tions w ith a high level of op er ator discretion. The loc a l operator interface is thr ough the front panel’s 2 x 20 charac ter alpha-numeric display and a 4 x 4 multi-function keypad. Remote operation by RS232 or IEEE-488 interface is also available (see Section 4).

3.3.1 Keypad Layout and Protocol

molbox1+ has a 4 x 4 keypad for local operat or access to direct functions, function m enus and for data entry.

 The Editing and Execution keys are for

execution, suspending execution, backing up in menus and editing entries.

 The Menu/Data keys provide access to function

menus from the MAIN run screen. The menu name is on the bottom half of the key. The SETUP menu is for more frequently used functions. The SPECIAL menu is for less frequently used and internal functions. These keys enter numerical values when editing.

 The Function/Data keys allow very commonly

used functions to be accessed directly from the MAIN run screen by a single keystroke. The name of the function is on the bottom half of the key (see Section 3.3.2). These keys enter numerical values when editing.

Figure 4. Keypad Layout

Pressing the [ENTER] key generally causes execution or forward movement in the menu tree. Pressing the [ESCAPE] key generall y allo ws movement back in th e menu tree and/or causes

execution to cease or suspend without changes being implemented. Pressing [ESCAPE] repeatedly eventua lly returns to the M AIN run screen. Fr om the MAIN run scr een, pressing [ESCAPE] allows momentary viewing of the molbox1+ identification screen.

Pressing the [+/-] key changes a numerical sign when editing. It also toggles through multiple screens when available.

Pressing the [

←] and [→] keys allows rever se and forward cursor movem ent when editing

data entry. These keys are also used to scroll through choices. Menu selections can be made by pressing the number of the selection direc t ly or by pressing [

→] to place the cursor on the number of the desired selection and pressing [ENTER].

and [

←]

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Note

Some screens go beyond the tw o lines provided by the display. This is indicated by a flashing arrow in the second line of the display. Press [

→] to move the cursor to access the lines that are NOT visible or

and [ directly enter the number of the hidden menu choice if you know it.

3.3.2 Direct Function Ke ys Summary

Local operation of molbox1+ is through the front panel 4 x 4 pressure sensitive keypad. To minimize t h e use of mul ti-la yere d m enu str uc tur es , the keypad numeric al ke ys also pr ov ide dir ect access to the most com monly used fu nctions. The function accessed is labeled on th e bottom half of the each key. Direct function keys are active whenever molbox1+ is in its MAIN run screen. Table 27 summarizes the operation of the direct function keys. See corresponding manual sections for full detail on each direct function.

Note

It may be useful to keep a copy of Error! Reference source not found., Summary of molbox1+ Direct Function Key Operations, near the molbox1+, especially when first becoming acquainted with its operation.

Table 27: Summary of molbox1+ Direct Function Key Operations

←]

Direct Function Keys Are Active From The Main Run Screen

See Corresponding Manual Sections For Full Detai l

Menu of commonly used setup features including MFC profiles, stability setting and

Menu of less frequently used internal functions and settings including preferences, resets,

remote interfaces, BPR (back pressure ratio) when using molbloc-S.

Turn on the MFC control option, select MFC profile to use and MFC switchbox channel.

Set the resolution with which the measured flow and other values are displayed.

Run the TARE, LEAK CHECK, PURGE and AutoZ functions. The option to TARE is not

Display the current pressure measurements (first press).

Display the current molbloc temperature measurements (second press).

Define the DISPLAY function for the second line of the molbox1+ display. Choices include

rate, average, hi/lo, totalize, 2

secondary unit changes.

Select active molbloc channel.

available in a molbox1+S.

unit, deviation, freeze, clean.

Set/change a DUT gas correction factor (K factor).

Set flow measurement gas. This is also the key used to access and select named gas

calibrations on a molbloc.

Set flow measurement unit. Choice of units can be customized.

Page 51

3. OPERATION

K Factor? 1on 2off

is selected, no conversion factor will

K Factor:

1.00000

3.4 Direct Function Keys

3.4.1 [K]

 PURPOSE

To cause the fl o w v al ue c al c ul ate d by molbox1+ to be multiplie d by a factor, K. G enerally used to apply a test device’s gas correc tion factor us ed when a test de vice is cali brated w ith a gas other than its normal gas.

 PRINCIPLE

Frequently, when testing or calibrating a flow meas uring device, it is not possible to f low the gas with which that device will normally be operated (the process gas). This may be because the process gas is tox ic or corrosive or sim ply because it is not avai lable. When t he process gas c annot be us ed for c alibration, it is c omm on to use a diff erent gas for testing or calibrating (the calib ration gas). In this case, a fac tor represent ing the re lationship b etween the calibration gas and the process gas for the test device may be applied so that the

calibration gas simulates the process gas. The calibration gas that simulates the process gas is often called a surrogate gas for the process gas.

The relationship between a test device’s process gas and calibration gas is frequently called a K factor or gas conversion fac tor. The fac tor’s value depen ds on specif ic properties of the test device and determining the value is the responsibility of the device manufacturer.

For example, Silane (SiH4 ) is a frequently used gas in semiconductor processing. SiH4 is highly toxic and requires extensive handling precautions so it is not practical for use in calibration and testin g. A m ajor manuf actur er of Mass Flo w Control lers ( MFCs) rec omm ends that MFCs that are t o be used with Silane be tested with Sulfur Hexafluoride (SF6), a nontoxic, non-flammable gas, using a conversion factor of 0.970. In other words:

SF6 flow x 0.970 = equivalent SiH4 flow for the MFC

The K function in molbox1+ allows a gas conversion factor to be entered by which flow values measured by molbox1+ will be multiplied. In this exam ple, 0.970 would be entered as K so that the values indicated by molbox1+ when SF6 is flowing through the m olbloc simulate the flow of SiH4 for that manufacturer's MFC.

When the K function is active, molbox1+ performs all of its flow calculations normally but multiplies the current flow value by the value of the K factor prior to displaying it.

The gas selected on molbox1+ which is d isplayed in the upp er right corner of the molbox1+ display should always be the gas that is actually flowing through the molbloc.

Note

K factors or gas conversion factors are based on the properties of the device being tested. Thei r avai labilit y and validi ty ar e the re spons ibil ity of that device's manufacturer. molbox/molbloc does not use factors or conversion coefficients b etween gases. Flow is calculated from molbloc characteristics and specific gas properties for each gas supported by molbox1+. The gas selected on molbox1+ (see Section 3.4.2) which is displayed in the upper right corner of the molbox1+ displ ay shou ld always be the gas that is actually flowing through the molbloc.

 OPERATION

To enable a gas conversio n factor press [K] from an y run screen. The display is:

If <2off> be applied. If <1on> is selected, the next screen is:

Page 52

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

The value of the gas convers ion factor can be edited as des ired. Pressing [ENTER] returns to the MAIN run screen with the entered K factor active. The letter <K> is always

appended to the flow unit indication in the run screens when the K function is ON (e.g., sccmK). A K factor value of 1 is handled as if the K function were OFF.

 Caution

When the K function is ON, as indicated by a <K> following the current flow unit in the first line of the MAIN run screen, the current molbox1+ flow indication is:

(flow as calculated by molbox1+ for the selected gas) x (the current K factor)

Thus, the flow indicated is actually in error (biased) by the reciprocal of the K factor .

3.4.2 [GAS]

 PURPOSE

To specify the gas that is currently flowing through the m olbloc so that molbox1+ uses the correct gas properties in its flow calculations.

 PRINCIPLE

molbox1+ calculates the flow through a molbloc from:

• molbloc geometric characteristics

• gas pressures

• gas temperature

• specific characteristics of the flowing gas

The gas characteristics include:

• gas density under standard conditions

• change in gas density with pressure and temperature

• gas viscosity under standard conditions (when needed)

• changes in gas viscosity with pressure and temperature

Proprietary algorithm s are used to calculate gas density and viscosity (when needed) under the actual flowing pressure and temperature conditions from density and viscosity under standard conditions.

The characteristics of molbox1+ suppor ted gases and corres ponding algori thms are stored in molbox1+ m emory. To correctly calculate the f low of a gas, the correct inform ation for that gas must be used. T he molbox1+ GAS func tion allows the us er to s pecif y the f lowing gas so that molbox1+ will use the correct gas information in calculating the flow through the molbloc.

Selection of a g as using the GA S f u nction also s e l ect s the molbloc (geometric) calibr at i on d a ta to be used for flo w calcu lation. If a calibrat ion has been stor ed in th e molbloc for the s elected g as, the molbloc c alibration data for that gas are used. If a gas is selecte d that the molbloc is not calibrate d for, t he m olb ox 1+ wi ll use t he coeff icie nts of the default gas, normally N2 for m olbloc -L and Air for molbloc-S. In the case that there are multiple N2 or Air calibrations on the molbloc, the coefficien ts for t he cal ibrati on ind icated as DEFA ULT on th e cal ibratio n repor t are used. W hen a calibratio n has not been perf ormed on the molb loc in the gas selec ted using the GA S function, flow measurements have NO associated uncertainty or tolerance.

The operation of the GAS function, is different for molb loc-L and molbloc-S due to the support of humid air measurements with molbloc-S. They are described sepa rately below .

Page 53

3. OPERATION

<9C4F8> Octofluorocyclobutane

1inert 2flammable 3toxic 4other

is a list of gases under each category. For

, the

If multiple

If the selected gas is not specifically calibrated indicating that the default calibration for the

1N2 2He 3Ar

3.4.2.1 molbloc-L Operation

The molbox1+ gases available for use with molbloc-L at the time of this manual printing are listed in Table 19.

Table 28. Available molbloc-L Gases

<1inert> <2flammable> <3toxic> <4other>

<1N2> Nitrogen <2He> Helium <3Ar> Argon

<1H2> Hydrogen <2O2> Oxygen <3CH4> Methane <4C2H4> Ethylene <5C3H8> Propane <6C2H6> Ethane <7Butn> Butane

• <Butn> is used to identify Butane in molbox1+ because the

chemical symbol for Butane (C4H10) has more than the 4 characters used by molbox1+ to abbreviate gas identifications.

• Mixtures of known gases in known concentrations can be

measured by calculation and use of the ADJ function (see Section 3.5.3).

<1CO> Carbon Monoxide <1Air> Air

<2C2F6> Hexafluoroethane <3N2O> Nitrous Oxide <4CF4> Carbon Tetrafluoride <5SF6> Sulfur Hexafluoride <6CHF3> Fluoroform <7C02> Carbon Dioxide <8Xe> Xenon

Note

 OPERATION (molbloc-L Operation)

To specify the gas flowing through molbloc-L, press [GAS]. The display is:

The gases a vailable ar e grouped in categor ies to facilitate finding a specific gas and as a reminder to the user wh en se lectin g a gas t hat may require special precautions in use. There

example, the <1inert> selection display s: A secondary menu displays when a specifically

calibrated gas i s se lec t ed. T h e m enu includes: the name of the gas, calibration name calibrated flow range, the calibration type (PREM for prem ium or ST D for standard) and the supported pressure range. calibrations are available for the selected gas arrow keys “<>” display after the pressure. Use the left right arrow keys to select the other calibrations.

on the molbloc a secondary menu displays molbloc will be used to derive the flow of the

selected gas. Press enter to proceed.

He, HI 5.0 slm STD 50-550 kPa <>

No Air cal, N2 coef used [ENTER]

Select the desired gas. Pres sing [ENTER] returns to the last run screen with the selected gas active. The selec ted gas is al ways displa yed in the upper r ight hand corner of the MAIN run screen.

Page 54

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

 



 



⋅−

 



 



⋅

⋅=

100

62188.

gamb

1327760

9.14509

0528.53

0649289.0

−=

where

Note

The gas selected on the molbox1+ should always be the gas that is flowing through the molbloc. molbloc/molbox does not use K factors or gas con version factors between gases. When calibrating or testing a device with a surrogate gas, molbox1+ should be set to the surrogate gas. The K factor or gas

conversion factor, if used, defines the relationship between the surrogate gas and the process g as for the device being tested,

not for molbox1+ ( see Section 3.4.1, PRINCIPLE). The K factor is supplied by the manufacturer of the device being tested.

3.4.2.2 molbloc-S Operation

In addition to dry air, molbox1+ supports measurement of ambient (humid) air flow with molbloc-S. W hen Air is selected as the m olbloc-S test gas, the user is prompted to enter a value of the humidity ratio (also known as the absolute humidity or water ratio) of the ambient air. The humidity ratio, W , is defined as the ratio of water m ass to gas mass in the flowing air. It is different from the relative hum idity value, wh ich is usual ly expressed as a percentage . Typical valu es of W are between zero and 0.06. molbox1+ does not accept an entry for W greater than 0.1.

Typically, humidity measuring instruments report relative humidity, which is dependent on the ambient pressure and temperature. Users who do not hav e the W value available can use DHI’s free Unit of Measure Converter software utility or COMPASS for molbox or COMPASS for Flow calibration software to calculate W from measured pressure, temperature, and relative humidity. Visit www.dhinstruments.com, or see your DHI sales repres entative for a copy of the Unit of Measure Converter software utility. Air relative humidity, pressure and temperature are con verted to the humidit y ratio, W, following Dalton ’s Rule and thermodynamic principals using water saturation properties:

is the water saturation pressure, which can be calculated as:

ambambambg

CTCTCTCP

+++=

If dry air will be meas ured, then the user should enter a W value of zero when prompted. Zero is the default W value.

When a non-zero W value is entered, m olbox applies a correctio n to its air flow measurement for the change in air density due to h umidity. If a correc tion for W is being applied to air flow measurements, a <W> is placed to the right of the <Air> gas indication in the MAIN run screen.

Page 55

3. OPERATION

)( dWcWbWaratioq

+++=

131924.0

158514.0

336872.0

0000.1

−=

where

1inert 2flammable 3toxic 4other

1Air 2N2O 3SF6 4CO2

Humidity ratio: 0:1

The humid air correction applied to the molbloc measured flow is (f rom ASME FEDSM98-5309):

Note

If an incorrect value of W is entered (for example, using any non-zero W value while flowing dry air), an error will be introduced into the air flow measurement. W, humidity ratio, is different from relative humidity.

 OPERATION (molbloc-S Operation)

To specify the gas flowing through molbloc-S, press [GAS]. The display is:

The gases available are grouped in categories to facilitate finding a specific gas and as a reminder to the user when selecting a gas that may require special precautions in use. There is a list of gases under each category. For example, the <4other> selection displays:

A secondary menu displays when a specifically calibrated gas is selected. The menu includes: the name of the gas, calibration name, the calibrated flow range, the calibration type (PREM for premium or STD for standard) and the supported pressure range. If multiple calibrations are available for the selected gas arrow keys “<>” display after the pressure. Use the left right arrow keys to select the other calibrations.

If the selected gas is not specifically calibrated on the molbloc a secondary menu displays indicating that the default calibration for the molbloc will be used to derive the flow of the selected gas. Press enter to proceed.

N2 , HI 5.0 slm STD 50-550 kPa <>

No N2 cal, Air coef used [ENTER]

Select the desired gas. If <1Air> is selected, the display is:

Leave the value at zero wh en dry air is be ing flowed. Enter the appr opriate nonzero value (see section immediately above) if humid air is being flowed.

Pressing [ENTER] returns to the last run screen with the selected gas active. The selected gas is always displayed in the upper r ight hand corner of the M AIN run screen.

Page 56

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

1sccm 2slm 3uccm 4pccm 5mg/s 6vlm

Note

The gas selected on the molbox1+ should always be the gas that is flowing through the molbloc. molbloc/molbox does not use K factors or gas co nversion factors between gases. When calibrating or testing a device with a surrogate gas, molbox1+ should be set to the surrogate gas. The K factor or gas

conversion factor, if used, defines the relationship between the surrogate gas and the process gas for the device being tested,

not for molbox1+ (see Section 3.4.1, PRINCIPLE) . The K factor is supplied by the manufacturer of the device being tested.

3.4.3 [UNIT]

 PURPOSE

To specify the flow unit of measure in which molbox1+ displays measured flow values.

 PRINCIPLE

molbox1+ calculates the mass f low of various gases in kilograms/second [k g/s]. molbox1+ also supports conversions to a variety of other flow units of measure. The UNIT function allows the flow unit of measure in whi ch molbox1+ displays measured flow to be selected. These include units of mas s flow, including volumetric ally based m ass flow units ( i.e., sccm ) as well as units of volume flow (i.e . , c cm) . See Table 29 for a complete listi ng of the unit c onversi ons available. molbox1+ can also display the measured flow in two different units of measure simultaneously (see Section 3.4.6.5).

 OPERATION

If the molbox1+ is equipped with the optional MFC control function (see Section 3.4.8), the unit of measure for the molbox1+ flow display may be defined by the currently selected MFC profile. In that case, the [UNIT] function key is used to select the MFC outp ut display unit (se e Section 3.4.8.3).

• If an MF C profile other than profile #1 or #2 is active, the unit of m easure is the unit of measure selected in the MFC profile. If the MFC control function is not pres ent, or is turned OFF, or MFC profile #1 or #2 is selected, t he [UNIT] function k ey allows direct selection of molbox1+ flow display units as described below.

• From the main run screen, pres s [UNIT]:

The display is:

Select the d esired un it. For all units exc ept <uxxx> or <vlm>, operatio n then retur ns to th e run screen wit h the flo w unit of m easure cha nged to th e selecte d unit. W hen user u nits (i.e., uxxx) are selected, the ref erence temperature must be sp ecified before the unit is ac tivated (see Section 3.4.3.3). When “vlm” (volume) units are selected, a menu of volume units is accessed. The des ired v ol ume unit must be selecte d and then the temperature and pressur e of the flowing gas must be specified (see Section 3.4.3.4).

Note

• If the MFC Control option is active and the M FC profile selected is NOT #1

or #2 (see Section 3.4.8), the molbox1+ flow unit is automatically the unit specified in the current MFC profile (see Section 3.4.8 and 3.5.5) and the UNIT function controls the unit used for displays of MFC set and measur e values.

• See Section 7.1.3 for specific molbox1+ flow unit conversion calculations.

• molbox1+ supports many more flow unit s of measure than the six d efault

units of the UNIT function. The six units av ailable u nder the UNIT functio n can be customiz ed to include any molbox1+ supported units in any order (see Section 3. 5. 8).

Page 57

3. OPERATION

 Caution

Many different types of flow units are commonly used including a wide variety of mass flow units as well as volume flow units. Please read Sections 3.4.3.1 through 3.4.3.4 for additional infor mation on the various unit definitions and how they are handled by molbox1+ before making unit of measure selections.

3.4.3.1 Mass Flow vs. Volume Flow

Note

COMPASS for molbox software users: conversions to volume (sometimes called actual) flow units are handled in COMPASS. When using COMPASS, the molbox always operates in mass flow units.

molbox1+ measures mass flow (quantity of material per quantity of time). molbox1+ always calculates flow in terms of kg/second [kg/s ]. It also supports conversions of kg/second to a variety of other flow units. These include other mass flow units such as g/s and mole/s as well as volumetrically based mass flow units (i.e., s ccm and slm) (see Sec tion 3.4.3.2). In stead y st ate f low, mass

flow is the same at different points in the flow system independent of gas pressure and temperature. Therefore, the m eas urem ent of mass flow m ade by

the molbloc/molbox represents th e mass f low at the sam e time at other points in a steady state flow system.

molbox1+ can also make conversions to volume flow under specific pressure and temperature condi tions by dividing the mass flow b y the density of the gas under the specific pressure and temperature conditions (see Section 3.4.3.4).

Note

Volume flow is sometimes referred to as actual flow.

Volume flow is dependent on the actual temperature and pressure of the flowing gas at the point where volume flow is to be measured. Generally,

this point is not at the molbloc, it is at another point in the flow system (e.g., at the DUT). At another point in the flow system, it is quite likely that the gas pressure and temperature are differ ent from the gas pressure and t emperature at the m olbloc. Then, even in steady state flow conditions, the volume flow at the molbloc and the volume flow at another point in the system are likely to be different. Therefore, to accurately predict volume flow at another point in the system,

molbox1+ must calculate volume flow based on the gas pressure and temperature at that other point, not at the molbloc. For this reason,

molbox1+ requires that ga s pressure and temperature c onditions at the DUT be specified for volume flow measurements.

Estimating the flowing gas pressure and temperature at the point at which volume flow is to be measured may be difficult.

The relevant gas pressure when measuring volume flow is the gas’s absolute pressure. In cases in which the volume flow measurement is open to atmospheric (ambient) pressure, the volume flow pressure is atmospheric pressure. In other cases, there may be ways to estimate the pressure at the volume flow meas urement point but it probably should be measured.

For temperature, if the volum e flow measurem ent point is ver y near the m olbloc, one possibility is to use th e molbloc temperature measurem ent. By design, the molbloc causes the tem perature of the gas th at f lows t hrough the m olbloc t o tak e on the molbloc temperature . Theref ore, the tem per ature of the gas as it ex its the

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

molbloc is t he same as t he molbloc tem perature. If the volume fl ow measurem ent point is not immediately downstream of the molbloc, the best estimate of gas temperature is probabl y ambient tem peratur e or the tem peratur e of the device or bath used to stabilize gas temperature if one is present.

 Caution

Because volume flow (sometimes called actual flow) is dependent on gas pressure and temperature at the flow measurement point, gas pressure and temperature must be specified by the user when selecting volume flow units on molbox1+. The measurement uncertainty (accuracy) in the volume flow measurement is highly dependent on the measurement uncertainty in the pressure and temperature specified. Typically, temperature errors have an effect on flow of about 0.35 %/°C and pressure errors have an effect on flow of about 1%/kPa (6.8%/psi) if the DUT is used near atmospheric pressure.

3.4.3.2 Volumetrically Based Mass Flow Units

molbox1+ supports a number of volumetrically based mass flow units of measure. Volumetrically based mass flow units should not be confused with volume or actual flow units (see Section 3.4.3. 4). Volumetrically based m ass flow units define mass in terms of the quantity of gas that occupies a volume under standard conditions of pressure and temperature. Since there is no universally accepted definition of standard conditions, molbox1+ supports the three most common variances.

• Standard units (sxxx): The “s” prefix indicates standard. Volumetrically based mass flow units preceded with the letter “s” (i.e., sccm, slm, scfh) define standard conditions as pressure of 101.325 kPa absolute (14.6959 psia) and temperature of 0 °C (32 °F) and take into account the true compressibility of the flowed gas.

• User units (uxxx): The u prefix indicates user. This option is designed to provide support for volumetrically based mass flow units with a reference temperature other than 0 °C (see Section 3.4.3.3). Volumetrically based mass flow units preceded with th e letter “u” (i.e., uccm , ulm) define standard conditions as pressure of 101.325 kPa (14.6959 psia) with the user specifying the refer ence temperature. User units take int o account the true compressibility of the flowed gas.

• Perfect units (pxxx): The “p” prefix indicates perfect. This option is designed to provide support for volumetrically based mass flow units that assume ideal gas com pressibility for all gases. Volum etrically based mass flow units preceded with the letter “p” (i.e., pccm, plm) assume a gas compressibility factor of 1 for all gases and define standard conditions as pressure of 101.325 kPa (14.6959 psia) and temperature of 0 °C (32 °F).

Note

• Volumetrically based mass flow units at reference

temperatures other than 0 user units (se e Sec ti on 3.4.3.3).

°C (32 °F) can be defined using

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3. OPERATION

unit is selected, the reference

Temperature ref? 0ºC

Current volume flow temperature. Indicates

P:100.325 kPa T:20.1ºC Edit P&T? 1No 2Yes

the molbloc temperature or a user

mperature will

automatically be taken as the molbloc

Gas temperature: 1molbloc 2user

• In early 1996, SEMI (a semiconductor industry interest

group) adopted standard E12-96 which spec ifi es t hat perfect units be used for volumetrically based mass flow units. T o comply with the SEMI standard, pccm should be used rather than sccm. To purchase a copy of the relevant SEMI standard, contact SEMI at telephone 415.964.5111 or email semihq@semi.org.

3.4.3.3 Volumetrically Based Mass Flow Units at Various

Reference Temperatures (UXXX)

Units star ting with t he l etter “u” ( user units ) are volum etri cally bas ed mass flow units (see Section 3.4.3.2) for which a reference temperature other than 0 °C is desired.

When a user temperature desired m ust be specified. After a user unit is selected, the display is:

Enter the reference tem perature desired for the volum etrically based mass flow unit select e d. The temper at ur e u n it can be chang e d b etween °C and °F by pressing

[SETUP] and selec ting <9tempU> (s ee Section 3.5.9). T he temperature selected applies to all the user units.

Note

Volumetrically based mass flow units, includi ng user units (uxxx) and perfect units (pxxx), are discussed further in Section 3.4.3.2.

3.4.3.4 Volume Flow Units (vlm)

Note

See Section 3.4.3.1 before using volume flow units. Volume flow is sometimes referred to as actual flow.

To measure flow in volume flow units (sometimes referred to as actual flow units), press [UNIT], <vlm> under the UNIT func tion. If <vlm> is not availab le, see Section 3.4.3.5. T his s elect ion ac c ess es the menu of volume units avail ab le. Select the desired volume flow unit:

1. Current volume flow pressure.

2. <bloc> if the current setting i s to use the molbloc temperature.

To retain the current volume flow pressure and temperature , select <1no> and operation returns to the MAIN run screen with the selected volume flow unit active. To change the volume flow pressure and/or temperature select <2yes>.

The next screen gives the choice of having the volume flow gas temperature be either

specified temperat ure. If <2user> is selected, a screen to enter the temperature is presented before continuing. If <1molbloc> is selected, the volume flow te

temperature.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

pressure in the current pressure unit of

and gas

Volume unit gas pres

101.325 kPa

To customize the UNIT function,

Set up user unit #1

corresponds to the first of the six

available selections under the UNIT function.

Flow unit type: 1std 2user 3perfect 4vlm

The next screen is to edit the volume flow measure. Pressing [ENTER] accepts the

edited value as the volume flow pressure and returns to the MAIN run screen with the selected volume flow unit temperature and pressure active.

Note

The temperature and pressure un its of measure used to specify volume flow conditions can be changed using [SETUP], <8presU> for pressure (see Section 3.5.8) and [SETUP], <9tempU> for temperature (see Section 3.5.9).

 Caution

Because volume flow is dependent on gas pressure and temperature at the flow measurement point, gas pressure and temperature must be specified by the user when selecting volume flow units. The measurement uncertainty in the volume flow measurement is highly dependent on the measurement uncertainty in the pressure and temperature specified (see Section 3.4.3.1).

3.4.3.5 Customizing FLOW Units Available Under The UNIT

The UNIT func t io n provides a ch oice of six diff er en t f lo w un i ts of measure. The uni ts that are available by default are the six indicated in Section 3.4.3. However, molbox1+ supports many other units. T hese other units can be m ade available for selection by customizing the UNIT function.

press [SETUP] and select <7flowU>. The display is:

<#1> Enter the number of the selection that you

would like to change. The display becomes:

Select the flow unit t ype of the desir ed flow unit (see Table 29). Then selec t the desired unit.

Function

Table 29. Available Flow Units

<1std> <2user> <3perfect> <4vlm>

<1mol/s>

<2kg/s>

<3mg/s>

<4slm>

<5sccm>

<6scfm>

<7scfh>

<8slh>

<9sm3h>

<1ulm>

<2uccm>

<3ucfm>

<4ucfh>

<5um3h>

<1plm>

<2pccm>

<3pcfm>

<4pcfh>

<5plh>

<6pm3h>

<1ccm>

<2lm>

<3lh>

<4m3h>

<6cfm>

<7cfh>

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3. OPERATION

the following for principles and

1tare 2purge

5BPR

Note

The <4vlm> unit selection embeds the selection “vlm” into the UNIT function rather than a specific volume unit. The “vlm” selection provides access to all the volume flow units. In summary the unit types are:

<1std> (standard): mass flow units for which “standard” conditions are temperature of 0 °C, standard atmosphere and using the true compressibility fa ctor of the gas.

<2user>: mass flow units for which “standard” conditions are a user settable temperature, standard atmosphere and using the true compressibility factor of the gas.

<3perfect>: mass flow units for which “standard” conditions are temperature of 0 °C, standard atmos p h ere and assuming a compressibility factor of 1 for all gases.

<4vlm>: volume flow

units.

See Sections 3.4.3.1 to 3.4.3.4 for additional information on flow unit types.

3.4.4 [TARE]

 PURPOSE [TARE] accesses five functions.

• TARE function: To zero the molbox1+ differential pressure readings in molbloc-L operation or verify the two RPTs by comparing them against each other in molbloc-S mode (see Section 3.4.4.1).

• PURGE function: To purge the molbloc connecting lines and molbox1+ internal volume of a first gas with a second gas by flowin g t he s ec o nd gas t hr oug h th e molbox1+ (see Section

3.4.4.2).

• LEAK CHECK function: To check the molbox1+ internal pneumatic c ircuit and/or the external test circuit to which molbox1+ is connected, for leaks (see Section 3.4.4.3).

• AUTOZ function: To periodically offset the molbox1+ RPTs relative to a reference pressure value in order to com pens ate for possible changes in the RPT zero be tween f ull recalibrations (see Section 3.4.4 .4) .

• BPR function (present only in molbloc-S operation): To measure and display the molbloc-S back pressure ratio (BPR) while operating in a BPR mode which does not continuously read and display BPR (see Section 3.4.4.5).

 OPERATION

Pressing [TARE] accesses a display with the choice of four functions (five functi ons in molbloc-S operation). S elect the desired function. See operation:

3leak check 4AutoZ ↓

Some screens (e.g., the Tare menu) may go beyond the two line s provide d by the display. This is indicated b y a flashing arrow in the s econd line of the displa y. Pre ss the [ lines that are NOT visible or directly enter the number of the hidd en menu choice if you know it.

Note

←] and [→] keys to move t he cu rsor to acce ss the

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

3.4.4.1 <1Tare>

The purpose and operation of the tare function is different for molbloc-L and molbloc-S operation. I t is described separately for the t wo modes below. The molbox1+S does not support the ability to tare as it does not support laminar molblocs.

3.4.4.1.1 molbloc-L Operation

 PURPOSE

To zero the molbox1+ at the molbloc operating pr essure. Zeros the differential reading between the two reference pressure transducers.

 PRINCIPLE

The molbox1+ TARE function can be considered the equivalent of the zeroing function performed on many instruments prior to making measurements.

molbox1+ c alculates the flow through a m olbloc-L from the differential pressur e across the molbloc. The di fferentia l pressure acr oss the m olbloc is m easured by taking the difference in the abs olute pressure measured by the molbox1+’s two internal RPTs. One RPT is connected to the upstream molbloc pressure port and the other to the downstream molbloc pressure port.

If a common pressur e is applied to both RPT s the differential pressure indicated should be zero. If a differential pr essure value is observed, the value indicated represents an offset in the differential measurement which will appear as an offset or “zero error” on the flow through m olbloc-L calculated b y the molbox1+. The TARE func tion allows the differ ential indication betw een the two RPTs to be zeroed at the molbloc operatin g press ure to elim inate the zero error in differ ential pressure measurement.

When the TARE function is activated, molbox1+’s internal valves operate to pneumatically connect together the two absolute transducers at the molbloc operating pressure (s ee Figure 5). The user c an select whether this pressure is the upstream or do wnstream molbloc pressure s o that the tare ca n be made at the pressure that will be held stable durin g operation ( generally by a regu lator or because it is open to atmosphere). Activating the tare causes molbox1+ to record the current differ ential as the tare value. The tare value is then used to correct all subsequent RPT readings. The tare value is the differ ence between the two transducer reading s (hi - lo). After taring, the ups tream R PT is correc ted by (- tare value/2) and the downstream RPT is corrected by (+ tare value/2).

1. Channel A High Isolation: Open

2. Channel A Low Isolation: Closed

3. Channel B High Isolation: Closed

4. Channel B Low Isolation: Closed

5. Bypass: Open

Figure 5. molbox1+ Internal Pneumatic Schematic –

TARING CHANNEL A, UPSTREAM molbloc-L OPERATION

Page 63

3. OPERATION

Select tare pressure: 1upstream 2dnstream

202.347 kPaa 202.311 T 36 Pa 0.06 sccm

OldT: 44Pa NewT: 36Pa

 OPERATION

Note

• At a minimum, the TARE function should be executed

whenever the operating pressure of the molbloc is changed significantly, at the beginning of each test or any time a significant zero error is observed. For best results, it is possible to tare before every reading since taring can be executed while flowing. Best results will be obtained if the TARE function is executed with a stable flow through the molbloc.

• If the molbox1+ is in A+B or A/B mode, the channel for which

to tare must be specified before taring.

To access the TARE function press [TARE], <1tare>.

The display is:

Selecting <1upstream> will tare the molbox1+ RPTs at the molbloc’s upstream pressur e (see Figure 5). Select ing <2dnstream> will tare the RPT s at the molbloc’s downstream pressure (Low isolation valve open, High isolation valve closed). Select the position where the pressure will remain the most constant during molbloc operation.

The next display is:

1. The current pressure read by the upstream (left) and downstream (right) RPTs without taking into account the current t are value. These are untared readings in the current pressure units.

2. <T>, flashing, t o indicate that thi s is a TARE display showing the tare between the two absolute RPTs.

3. The difference between the untared upstream and downstream absolute pressure readings (ups tream – downstream). This different ial value is always in Pascal [Pa].

4. The flow corresponding to the current untared differential pressure in the current flow units.

This displa y allo ws the c urre nt untared abs olut e press ures and th e resu ltin g untared differenti al pressure from th e difference of the t wo absolute RPTs to b e observed. The flow value repres ents t he cur rent untared zer o err or in ter m s of f low. It does not necessarily represent t he current zero error on f low measurement s as a tare value other than zero is probably already active.

Press [ENTER] when ready. molbox1+ makes measurements to determine a new tare value. The next display is:

1. The tare value currently in use [Pa].

2. The new tare value, res ulti ng from this executi on of the TARE function [Pa].

Press [ENTER] to activate the new tare and return to the MAIN run screen. Press [ESCAPE] to return to the [TARE] display without activa ting the new tare,

leaving the old tare active.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Note

The tare screen shows the upstream and downstream RPT readings WITHOUT the current tare applied. The [P&T] screen shows the RPT readings WITH the tare applied (see Section 3.4.5).

Limits and Errors

Excessively large tare values can diag nos e molbox1+ RPT malfunction, the need to recalibra te or possible poor execution of the TA RE function. To pr otect against improper taring and t o alert to possible RPT malfunction, molbox1+ c hecks the tare value before it is activated and displays warn ings when appropriate . In the most extreme case, molbox1+ will not allow the tare value to be act i v at e d. The l im it s checked and their consequences are as follows:

RPT coherence test: When attempting to activate a new tare, molbox1+ checks the coherence between the two transducers and alerts the operator to excessive disagreements. The test has two levels.

• If the new tare is 200 Pa < tare < 3,000 Pa, a caution message is dis played. Pressing [ENTER] overrides the caution and activates the new tare. Pressing [ESCAPE] returns to the TARE screen.

• If the new tare is > 3,000 Pa, the new tare cannot be activated. Pressing [ENTER] or [ESCAPE] returns to the tare screen and retains the old tare. It is likely that molbox1+ needs service or a grossly incorrect adjustment has been made to one or both of the RPTs.

Note

If a caution message appears or a tare cannot be activated during the taring process, repeat the taring process. If the caution persists, the calibration of the RPT(s) should be verified (see Section 5.2). If the tare still cannot be activated, the RPT(s) should be re cal ibra te d a nd molbox1+ may require o ther service.

3.4.4.1.2 molbloc-S operation

 PURPOSE

To check the molbox1+ RPT abs olute pres sure r eadings by com paring them at a common molbloc-S upstream abs olute pressure. Note that the taring function is not supported by molbox1+S.

 PRINCIPAL

When measuring the flow t hrough molbloc-S, the critical press ure measured by molbox1+ is the m olbloc upstream pres sure. The downstream pres sure is only monitored to be sure that cr it ic al f l o w conditio ns exist (see Sec t i o n 3. 1 . 5) . To reduce the uncertainty on the upstream pressure measurement, molbox1+ employs internal valving to dir ec t th e ups tr eam pressure to both R PT s , and th e av erage of the two readings is used as the m easured molbloc upst ream pressure. T o take advantage of this RPT averaging, the molbox1+ must be in either BPR O FF or Auto BPR mode (see Section 3.6.9).

molbox1+ dynamically tares the two RPT readings when they are connected together, so the user can v iew the “live” a verage press ure that is calc ulated and to allow smooth pr essure and flow meas urements duri ng valve transitio ns in the Auto BPR mode (see Section 3.6.9). RPT taring in molbloc-S operation occurs automatic ally when needed and does not need to be initiated or performed by the user.

The molbloc-S TAR E functi on is avai lable to all ow the us er to conve nientl y verify that the two RPT m easurements agree within an acceptable tolerance when a common pressure is ap plied to them. When the T ARE function is select ed, the

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3. OPERATION

201.032 KpA ^201.013 T 19.3Pa OK

molbox1+ internal valves operate to connect both Q-RPTs the active channel UPSTREAM pressure por t (see Figure 6). The RPT readings and the differ ence between the two R PT read ings (tare value) is displ ayed f or evalua tion b y the user. A message is also displayed in to indicate to the user whether the tare value is acceptable, or indicates a need for pressure verification or calibration of the RPTs. There is no need for the customer to save a new tare value in molbloc-S opera tion.

As in molbloc -L oper ation, the m olbl oc-S tare val ue is t he d iff erence bet ween th e two transducer readings (hi - lo). In BPR modes where the tare value is dynamically calculated and applied, the upstream RPT is corrected by (- tare value/2) and the downstream RPT is corrected by (+ tare value/2).

1. Channel A High Isolation: Open

2. Channel A Low Isolation: Closed

3. Channel B High Isolation: Closed

4. Channel B Low Isolation: Closed

5. Bypass: Open

Figure 6. molbox1+ Internal Pneumatic Schematic –

TARING CHANNEL A, molbloc-S OPERATION

 OPERATION

To access the TARE function press [TARE], <1tare>. The display is:

1. The current pressure read by the upstream (left) and downstream (right) RPTs without taking into account the current tare value. These are untared readings in the current pressure units.

2. <T>, to indicate that this is a TARE display showing the tare between the two absolute RPTs.

3. The difference between the untared upstream and downstream absolute pressure readings (ups tream – downstream). This different ial value is always in Pascal [Pa].

4. Tare message

For molbox1+ A350K:

<OK> If tare is less than 50 Pa,

<CHECK> if tare is between 50 and 200 Pa <NEED CAL> if tare is greater than 200 Pa

For molbox1+ A700K: <OK> If tare is less than 120 Pa,

<CHECK> if tare is between 120 and,500 Pa <NEED CAL> if tare is greater than,500 kPa

Note

The tare screen shows the upstream and downstream RPT readings WITHOUT the current tare applied. The [P&T] screen shows the RPT readings WITH the tare applied (see Section 3.4.5).

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

3.4.4.2 <2Purge>

 PURPOSE

To purge the lines between the molbloc and the molbox1+ and the internal molbox1+ volum es of one gas with another gas b y setting up a molbox1+ valving configuration in which gas flows through the molbox1+. Note that the purge function is not supported by molbox1+S.

 PRINCIPAL

molbox1+ su pports t he measur ement of flow of a variet y of gases. To c alculat e the flow, the therm od ynam ic c harac t er ist ics of th e g as must be known. These are stored in molbox1+ memory. For the f lo w t o b e calculated correctl y, t he g as f lo wi n g t hrough the molbloc m ust be the gas th at is selected o n the molbox1+ (see Section 3.4.2). When switc h in g f r om the meas ur ement of one g as t o a nother, the o ld g as r emaining in the circ uit and th e new gas being flowe d may mix f or some tim e so that the gas flowing through the molbloc is not purely the new gas. Erroneous measurements may result. For this reason, it is important to purge the lines upstream and downstream of the molbloc wh en changing gas es. It is also impor tant to purge the molbox1+ its elf whic h, sinc e there is nor mally no flo w through it, m ay trap and ho ld the old gas.

The PURGE f unction is des igned to facilitate purging the molbox1+. It sets up the molbox1+ internal va lving so that fl ow can pass thr ough the molbox1+ (see Figure

7). In this configuration, the lines between the molbloc and molbox1+ and the molbox1+ internal volume can be purged by simply flowing the new gas in the normal flowing configuration. The flow resistance through the molbloc creates a differenti al pressure which causes flow throug h the molbox1+ to occur, purging the molbox1+ with the new gas.

1. Channel A High Isolation: Open

2. Channel A Low Isolation: Open

3. Channel B High Isolation: Closed

4. Channel B Low Isolation: Closed

5. Bypass: Open

Figure 7. molbox1+

Internal Pneumatic Schematic – PURGING CHANNEL A

 OPERATION

Note

For best results, the PURGE function should be executed whenever the species of the gas flowing through the molbloc is changed. Prior to activating the PURGE funct ion, set fl o w through the molbloc to the highest rate that is practical. Then, with the gas flowing, activate the PURGE function. Very small volumes of gas remain trapped (deadended) in the molbox1+ in the PURGE configuration. Therefore, it may be desirable to execute the PURGE function more than once to clear these volumes by the pressure changes caused by PURGE execution.

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3. OPERATION

Set purge time: 15 sec

202.347 kPaa 202.311 PURGING 15 sec

To access the PURGE f unction press [TARE], <2purge>. The display is:

The purge time can be edited. Pressing [ENTER] causes molbox1+ to set its int ernal valving to the purge configuration (see Figure 7) and go to the PURGE display:

1. The current pressure read by the upstream (left ) and downstream (right) RPTs in the current pres sure unit of measure.

2. <PURGING> to indicate that this is a PURGE display.

3. Countdown of purge tim e remaini ng in seconds.

molbox1+ rem ains in the p ur ge cond iti on unt i l the pur ge t im e c ountdo wn e laps es . It then automatically retur ns to normal operation. W hen the countdown elapses operation returns to the run screen from which PURGE was accessed.

To interrupt the PURGE function, press [ESCAPE].

Note

The appropriate purge time setting is dependent on the flow rate and the volumes upstream and downstream of the molbloc. Typically, 15 to 30 seconds is adequate. The time needed increases as flow rates go down and volumes go up.

 Caution

When using the PURGE function, remember that the molbox1+ absolute RPTs are exposed to the pressure. Do not apply pressure greater than,500 kPa (80 psi).

Note

If the molbox1+ is in A+B or A/B mode, the PURGE function executes for the specified purge time for channel A and then repeats the purge sequence for channel B.

3.4.4.3 <3Leak Check>

 PURPOSE

To access the molbox LEAK CHECK and SYSTEM LEAK CHECK functions which use molbox1+’s pressure and flow measurement capabilities to check molbox1+ and/or the system to which it is connected for leaks.

 PRINCIPAL

molbox1+ is used bot h as a tool to ac curatel y m easure unk no wn flo w values and as a calibration sta ndard to calibr ate other dev ices by com parison. Leak s within the molbox1+ pneumatic c irc uit c an cau se er rone ous f low m eas urem ents. Leak s in the external flow circuit can cause the flow through the molbloc to be different from the flow at another point in the system so that, even with an accurate measurement and stea dy state flow, the molbox1+ indication is not an accurate indication of flow at the other point in the system.

To obtain valid measurement results, it is important that leaks in molbox1+ and/or the external flow system be identified and eliminated to the extent possible. molbox1+ uses its precision on-board pressure and flow measurement capabilities to help identify leaks with INTERNAL and EXTERNAL LEAK TESTING functions.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

347.458 kPaa 307.455 DP 40.003 <ENTER>

Vent molbloc ports <ENTER>

 OPERATION

Press [TARE] and select <3lea k check> to access the LEAK CHEC K functions. Then select <1molbox> or <2system>.

<1molbox> is designed to leak check the internal molbox1+ pneumatic circuit. <2system> is designed to leak check the system to which the molbloc/m olbox

is connected.

Note

If the molbox1+ is in A+B or A/B mode, the molbloc channel (A or B) to leak check must be specified prior to running the leak check.

Leak Check molbox  PURPOSE

To check the internal molbox1+ pneumatic circuit for leaks.

 PRINCIPAL

It is normally not necessary to run the MOLBOX LEAK CHECK procedure frequently. It is intended for troublesh ooting purposes when there appears to be a leak or other molbox1+ m easurement problem whose so urce c annot be i dentified b y the SYSTEM LEAK CHECK or other troubleshooting means. It is recommended to run the MOLBOX LEAK CHECK after it has been shipped or if it is suspected that the molbox has been exposed to a large shock or liquid or particulate contamination.

 OPERATION

Press [TARE] and select <3leak check>, <1molbox>. The next display is:

1. The pressure read by the upstream transducer (left), the downstream transducer (right) and the press ure unit of measure (middle).

2. Indicator that the figure that follows is differential pressure.

3. Differential pressure across the molbloc in current pressure unit of measure.

4. Prompt f or the action to take when ready.

The molbox1+ internal valving is in its normal measuring configuration (see Figure 3). This display is intended to assist the operator in setting the leak check pressure.

Apply the maximum differential pressure across the molbloc that is normally encountered during flow measurement while working at your typical absolute working pressure. Neither pressure should be less than atmosphere. Use the <DP> indication on the molbox1+ display to set the absolute and differ entia l pressur e.

Once the pressure setting is correct, press [ENTER]. The molbox1+ actuates its internal valves to isolate itself from the molbloc and trap the upstream and downstream pressures on its RPTs (see Figure 8). The display is:

Assure that both molbox1+ rear pan el pressure connections are vente d. Since the pressure quick connections on the molbox1+ and the quick-connectors on the molbox1+ pressure connection tubes seal when disconnected, they cannot be vented by simply disconnecting them. The easiest way to assure that the connections are vented is to maintain the normal connections to the molbloc, shut off the molbloc gas s ource and open one or both ends of the molbloc so it can vent to at mospheric pressure. A nother alternative is to install the non-sealing quick connectors (P/N 3068652) provided in the molbox accessories (see Section

2.1.2) into the molbox1+ quick connectors.

Page 69

3. OPERATION

347.466 kPaa 35.459

1.03579:1 WAIT: 60

molbox passed the leak check

1. Channel A High Isolation: Closed

2. Channel A Low Isolation: Closed

3. Channel B High Isolation: Closed

4. Channel B Low Isolation: Closed

5. Bypass: Closed

Figure 8. molbox1+

Internal Pneumatic Schematic - LEAK CHECK molbox CHANNEL A

Once the molbox1+ pressure connections are vented, press [ENTER].

1. The press ure read by the upstream RPT (left), the downstream RPT (right) and the pressure unit of measure (middle).

2. The ratio of the upstream RPT reading to the downstream RPT reading.

3. Leak check count down in seconds.

molbox1+ counts down for 60 seconds while monitoring the ratio of the two pressures and then determines whether an internal leak was present. A significant leak in a pres sure isol ation valve or a bypas s valve b etween th e t wo channels will cause the ratio between the two pressures to vary.

The molbox1+ LEAK CHECK function should end with the prompt:

If any other prompt appears, repeat the process. If the leak check fails consistently, note the failure message and contact a DHI Authorized Service Provider (see Section 7.4).

Leak Check System  PURPOSE

To leak check the external system that is connected to the molbox1+.

 PRINCIPAL

It is recommended to ru n the SYSTEM L EAK CHECK whene ver critical ph ysical connections in the s ystem attached to th e molbloc are brok en and reconnecte d. Critical connections ar e ones that are bet ween the molbloc an d the DUT, which, if they were to leak, would c ause the flow through the molbloc and the DUT to differ. Whenever a ne w DUT is connected t o the s ystem, it is a goo d idea to r un the SYSTEM LEAK CHECK.

The SYSTEM LEAK CHECK m onitors changes in pressure in a closed system defined by the user to help deter mine whether a leak exists in the s ystem. One of the ways a leak is detected is b y monitori ng pres sure dec a y in the pres suri zed closed system. W hen the tes t vol ume is large, significant leak s m ay exist with out being detected because the pressure decay caused by the leak is reduced.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

347.589 kPaa 347.580 <ENTER> when ready

Therefore, the SYSTEM LEA K CHECK is most eff ective when the volum e of the closed system is minimized.

During molbloc-L operation, the SYSTEM LEAK CHECK also measures flow through the molbloc t o hel p deter min e wheth er a leak is p rese nt ups tream or do wnstre am of the molbloc . Since molbloc -S is not capable of calculating meaningful flow values with the ver y smal l differ entia l press ure pres ent dur ing this test, t he SYST EM LEA K CHECK opera tes differentl y for molbloc-L an d molbloc-S op eration, as described i n the  OPERATION sections immediately below.

Note

The SYSTEM LEAK CHECK function uses molbox1+’s high precision pressure and flow measurement capabilities to help determine whether a leak exists in the system to which the molbloc is connected. This feature is to assist the operator in flow measurement and calibration. The system to which the molbloc is connected is the responsibility of the user. Failures in the system leak check do not normally indicate defects in the molbox1+ or molbloc itself. The molbox1+ leak check is used to identify molbox1+ failures.

 OPERATION – molbloc-L Operation To access the system leak check press [TARE] and select <3leak check>,

<2system>. The display is:

1. The pressure read by the upstream RPT (left),

the downstream RPT (right) and the pressure unit of measure (middle).

This display is intende d to assist the oper ator in settin g the leak check pressure. molbox1+ has actuated int ernal valves to conn ect the ups tream and do wnstream RPTs together, so they are both measuring an equal system pressure. (see Figure 9).

1. Channel A High Isolation: Open

2. Channel A Low Isolation: Open

3. Channel B High Isolation: Closed

4. Channel B Low Isolation: Closed

5. Bypass: Open

Close an isolation val ve downstream or plug the exhaust of the flow system that is being tested (downstream of the molbloc anxxxxd the DUT if the molbloc/molbox is being used to test another device).

Using the molbox1+ displ ay to read the pressure, set the pres sure to the normal operating pressure.

Figure 9. molbox1+ Internal Pneumatic Schematic

- SYSTEM LEAK CHECK - CHECKING OFFSET AND STABILITY

Page 71

3. OPERATION

347.587 kPaa 347.583 WAIT: 30

Leak is too large to continue

Temp change was too great to find leaks

Offset excessive check tare

check has been successfully completed,

347.587 kPaa 347.583

0.000 sccm [ENT]

Note

For systems with mass flow controllers (MFCs): Keep in mind that the valves in most MFCs are not intended to

provide a complete gas shutoff and so they may not be suitable to close off the test system. If an MFC is downstream of the molbloc and its downstream port is open to atmosphere, it is best to close the system by connecting a cap to the MFC outlet fitting or by connecting a shutoff valve downstream. If the MFC valve is closed (most MFCs hav e normally closed valves) when the operating pressure is applied from the upstream side, most of the gas will be stopped by the MFC valve and will not immediately fill the volume between the MFC valve and the downstream cap or valve. If this happens, the gas may leak by the MFC valve to fill this volume during the test and cause a pressure decay and an apparent system leak. The solution is to send a setpoint signal to the MFC to open the MFC valve while pressurizing the system. Then close the MFC valve (remov e the setpoint signal) after the system is pressurized to avoid heating of the test gas by the energized valve.

Next, close an isola tion valve upstream of the molbloc so the gas suppl y is no longer open t o the system being c hecked. Once the pr ess ur e has stabilized, press [ENTER]. The display is:

The molbox1+ is checking:

• For pressure and temperature stability before running the system leak test

• That the disagreement between the two RPTs is not excessive

After 30 seconds, if the stability check is not passed, molbox1+ displays:

• If the pressure was not stable:

• If the molbloc temperature change was

too great:

• If the offset between the RPTs was too great:

If any o f the above three prompts occurs, check the external system for leaks and run the molbox1+ leak check before proceedi ng. If the tare was excessive, tare the molbox1+ RPTs before running the leak check again (see Section 3.4.4.1).

Once the 30 second pressure stability/offset molbox1+ displays:

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

347.592 kPaa 47.583

0.101 sccm 30

possible system upstream leak

possible system downstream leak

System passed system leak check

Leak check: 1run 2view

When [ENTER] is pressed, molbox1+’s valves actuate to set u p the system leak check configuration which is identical to the normal operating configuration (see Figure 3). The display becomes:

1. Pressure read by the upstream RPT (left), the downstream RPT (right) and the pressure unit of measure (middle).

2. Current measured flow.

3. T i me remaining in the leak check in seconds.

molbox1+ measures pressure and flow for a 40 second countdown. After the countdown has elapsed, molbox1+ displays its conclusion from the measurements. The display will be either:

Upstream and downstream refer to the possible location of the leak relative to the position of the molbl oc and the normal flow direction in the system. If you are unable to locate a leak in the flow path components, check or replace the upstream an d downstream molbloc to molbox pressure tubes and their con nectors and retry the test. They are a critical part of the pneumatic system and if a significant leak is present in these tubes, it will cause an error in flow measurement.

 OPERATION – molbloc-S Operation

In molbloc-S operat ion, S YST EM LEA K CHEC K is a one-part test which tes ts f or pressure decay in the closed system.

To access the system leak check press [TARE] and select <3leak check>, <2system>.

The display is:

If <2view> is selected the test res ults screen (see below) is displayed with the results from the most recent leak test.

To run the leak test, select <1run>. molbox1+ actuates internal valves to connect the upstream and downstream

RPTs together, so they are both measuring an equal system pressure. (see Figure 10).

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3. OPERATION

ENTER to start 60 s leak check

1. Channel A High Isolation: Open

2. Channel A Low Isolation: Open

3. Channel B High Isolation: Closed

4. Channel B Low Isolation: Closed

5. Bypass: Open

Figure 10. molbox1+ Internal Pneumatic Schematic

- SYSTEM LEAK CHECK ON CHANNEL A - CHECKING OFFSET AND STABILITY

Close an isolation val ve downstream or plug the exhaust of the flow system that is being tested (downstrea m of the molbloc and th e DUT if the m olbloc/m olbox is being used to test another device).

Open an isolation valve up stream of the m olbloc to all o w the work ing pr ess ure to pressurize the system.

Note

For systems with mass flow controllers (MFCs) Keep in mind that the valves in most MFCs are not intended to

provide a complete gas shutoff and so they may not be suitable to close off the test system. If an MFC is downstream of the molbloc and its downstream port is open to atmosphere, it is best to close the system by connecting a cap to the MFC outlet fitting or by connecting a shutoff valve downstream. If the MFC valve is closed (most MFCs hav e normally closed valv es) when the operating pressure is applied from the upstream side, most of the gas will be stopped by the MFC valve and will not immediately fill the volume between the MFC valve and the downstream cap or valve. If this happens, the gas may leak by the MFC valve to fill this volume during the test and cause a pressure decay and an apparent system leak. The solution is to send a setpoint signal to the MFC to open the MFC valve while pressurizing the system. Then clo se the MFC va lve (remov e the setpoint sig nal) after the s ystem is pressurized to avoid heating of the test gas by the energized valve.

Next, close the isolation v alve upstream of the molbloc so the gas suppl y is no longer open to the system being checked. Once the pressure has had time to stabilize, press [ENTER].

The next display is:

Press [ENTER] to begin the test

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

199.167 kPa a leak testing 60s

Average rate of pressure change, per second,

∆P –0.0720 kPa Rate –0.0012 kPa/s

The next display is:

1. The average pressure from the two molbox1+ RPTs.

2. Current absolute pressure measurement in active pressure unit of measure.

3. SYSTEM LEAK CHECK count down in seconds.

Press [ESCAPE] to abort the leak test. Pressing [ENTER] whi le t h e tes t is in pro gr ess r estar ts the tes t a nd res et the leak

test timer. When the test is complete, a test results screen is displayed:

1. The tot al change in average pressure over the test interval.

2. The currently selected pressure unit of measure.

3. during the test.

Since flow systems using molbloc-S may use widely varying flow rates and tubing sizes, and t est volumes may be quite large, it is difficult to predict what size pressure rate of change is accepta ble to avoid significant f low errors. Your best guide may be t o run the SYST EM LEAK CHEC K often with your hardware, find a typical rate of change which represents a sound setup, and attempt to match that rate each t ime. In any cas e, you should b e able to achieve a rate of change smaller than 0.01 % / second of the absolute line pressure.

If you observe a rel atively large leak rate and are unable to locate a leak in the flowpath components, check or replace the upstream and downstream molbloc to molbox pressure tubes and their connectors and retry the test. They are a critical part of the pneumat ic system and if a significa nt leak is present in these tubes, it will cause an error in flow measurement.

3.4.4.4 <4AutoZ>

 PURPOSE

To offset the molbox1+ reference pressure transducers (RPTs) relative to a reference value in order to compensate for possible changes in RPT zero between full recalibrations.

 Caution

• To assure operation within measurement uncertainty

specifications (see Section 1.2.2), it is recommended that AutoZ be run (the value of P molbox1+ has been exposed to temperature changes exceeding ± 15 ºC (36 ºF).

• Improper use of the AutoZ function can cause out of

tolerance pressure measurements. AutoZ should be used only by qualified personnel for the purpose of rezeroing the molbox1+ r eference pressu re transducer abso lute pressure measurement function.

updated) whenever

offset

Page 75

3. OPERATION

 PRINCIPAL AutoZ Purpose and Principle

The main component of the c hange o ver time of the molbox1+ RPTs is change in zero or offset, independent of span. Offsetting or “rezeroing” molbox1+ RPTs relative to a reference between recalibrations allows measurement uncertainty specifications to be maintained with less f r eque nt f ul l c ali brations. The molbox1+ AutoZero function (AutoZ) provides full on-board support for the rezeroing process to simplify its application by the user.

The AutoZero function uses three values:

1. P

: The absolute pressure value indicated by the AutoZ reference, the

std,0

device that is acting as the reference relative to which to offset the RPT.

The press ure at which Aut oZ is perform ed is normally atm ospheric pressure

and the P

value can be suppli ed a) by manual entry, or b) automaticall y

std,0

from a DHI RPMx Reference Pressure Monitor.

2. P

: The absolute pressur e reading of the R PT, with no AutoZ of fset, at the

u,0

time AutoZ is performed.

3. P

offset

std,0

offset

: The difference between the absolute pressure reading of the RPT

offset

with no AutoZ offset (P

) and the indication of the AutoZ reference (P

u,0

offset

= P

u,0

- P

std,0

represents the change in zero of the RPT relative to the AutoZ standard ). T he AutoZ function manag es the determination, storage and app lication of for both molbox1+ RPTs in absolute mode. The AutoZ handles bo th molbox1+

RPTs simultaneously as they are of the same range and always used together. The source of P

must be an absolute pressure, nominally atmospheric

std,0

pressure, with uncert ainty significantly better than that of the RPT that is being AutoZeroed (see Section 1.2.2). This can be accomplished with a variety of digital barometers or with a piston gauge able to set absolute pressure.

When the RPTs are used with AutoZ ON, absolute pressure is calculated as:

= P

abs

When RPTs are used with AutoZ OFF, P When the RPT is cal ibrated, P

is set to zero. P

offset

u,0

offset

- P

regular intervals using the AutoZ function. The most recent value of P

offset

is ignored.

offset

is then redeterm ined at

offset

applied to the RPT reading to correct for change in zero over time.

Recommendations for the Use of the AutoZ Function

The AutoZ function provid es a powerful and easy to use tool for improving th e stability over tim e of molbox1+ RPT s and m axim izing the r ecali bration inter val b y compensat ing for chan ge in zero betwee n full recalibr ations. The follo wing simple recommendations will help assure that you use this feature to best advantage.

• Always leave AutoZ ON when operating if the AutoZ routi ne has been run regularly using a valid atmospheric reference.

• Run AutoZ to update P

only when a reference whose measurement

offset

uncertainty is known to be significantly better than that of the molbox1+ RPTs is available. Though it may not be practical and generally is not necessary, the best pos sible reference with which to run AutoZ i n absolute measurement mode is a gas operat ed piston gau ge (s uch as a DHI PG7601) applying an absolute pres sure near atmospheric pressure to the molbox1+ test port. The best day to day reference is a pr operly calibrated DHI RPM4 with a BA100K RPT interfaced directly as an externa l dev ice to the molbox1+ COM2 port.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

1off 2view 3edit 4run ON

Poff:18.7 Pa UP1 Poff:-3.5 Pa DN2

• Allow the molbox1+ to stabilize at atmospheric pressure and ambient temperature for 10 to 15 minutes before running AutoZ.

Note

If AutoZ is on, the AutoZ value will be applied while running the calibration of molbox RPTs and an AutoZ indication is included in the run calibration screen (See Section 5.2.4.1).

 OPERATION

To access the molbox1+ AutoZ function press [TARE], <4AutoZ>. The display is:

1. Acti ve RPT designator.

2. Indic ation of whether AutoZ is currently ON or OFF for this RPT and measurement mode.

• Select <1off> (or <1on>) to change the AutoZ status.

• Select <2view> to view the current values of P

for the two RPTs.

offset

Note

should be zero when the molbox1+ is new or has just

offset

been calibrated.

• Select <3edit> to edit the values of P

offset

Note

The value of P

• Select <4run> to run the AutoZ routine whic h d etermines and activates P values by measurement of P

is always displayed and entered in Pascal (Pa).

offset

(see Section 3.4.4.4.2).

std,0

offset

3.4.4.4.1 Edit AutoZ

 Caution

The edit AutoZ function should be used with great caution as entering inappropriate values and turning ON AutoZ may result in out of tolerance measurements. In normal operation, the value of the AutoZ offset, P run AutoZ function (see Section 3.4.4.4.2). Before editing P see Section 3.4..4.4, PRINCIPLE.

To edit the current P

values, press [TARE], <4AutoZ>, <3edit>. The display is:

offset

, should be changed using the

offset

1. Edit field for the value of P Hi) RPT.

2. Edit field for the value of P (2, Lo) RPT.

Edit the P Press [ESC] to abandon changes.

value(s) as desired an d press [ENT] to activate the ne w value(s).

offset

The value of P

of the upstream (1,

offset

of the downstream

offset

Note

is always displayed and entered in Pascal (Pa).

offset

Page 77

3. OPERATION

AutoZ by: 1Entry 2COM2

3.4.4.4.2 Run AutoZ

Run AutoZ is the function by which the current RPT reading is compared to a reference, P The value of P possible change in zero over time (see Section 3.4.4.4, PRINCIPLE).

, at atmospheric pressure to determine a new value of P

std,0

is then used by AutoZ to autom atically correct the R PT for

offset

There are 3 program lim its on the entr y of P

in p lace to reduce the p ossibility

std,0

of erroneous entries f rom either method, lim its given in k Pa absolute but directl y convertible to the cur rent u nit of measur e:

1) The entry must be within the limits of 70-110kPa absolute;

2) If the entry is => 0.01% of nominal full scale from the current reading of either RPT, the molbox1+ will warn that the value is high for the specific transducer(s) but accept the entry;

3) If the entry is => 0.02% of nominal full scale from the current reading of either RPT, the molbox1+ will warn that the value is too high for the specific transducer(s) and reject the entry;

In the case of 3), th e pressu re calibr ation of the m olbox 1+ RPT’s or the accur acy or calibration of the pressure reference used to obtain P

should be d oubl e -checked.

std,0

While an entry within the lim its of 1) or 2) is acceptable, if running A utoZ results in a value of Poffset that is greater than ± 0.00 5 % FS of the span of the RPT that is being AutoZeroed, the RPT and/or th e reference us ed as the source of Pstd,0 may be out of tolerance or the AutoZ process may have been faulty. Before activating a new Poff set greater than ± 0.005 % FS of the active RPT, check to be sure that both the RPT and the reference were in good working order, properly vented to st able atm ospheric pressure, at the sam e height, and rea ding in the same pressure units when AutoZ was run. A good laboratory practice would be to keep a log of the resulting AutoZ P

values for the two

offset

transducers over time to look for trends. To access run AutoZ, press [TARE], <4AutoZ>, <4run>. The display is:

1. Selection of source of P which to AutoZ.

Selecting <1Entry> allows the value of P Selecting <2COM> allows the value of P

reference from

std,0

to be entered fro m the front pa nel key pad.

std,0

to be rea d automatical ly from a DHI

std,0

RPMx connected to molbox1+’s COM2 communications port. When AutoZ is run, the molbox1+ intern al valves are actuated to connect both

molbox1+ RPTs to the channel A, Hi port on the molbox1+ rear panel (see Figure 14 in Section 5.2.4.1). B e s ure the c ha nne l A, H i p ort is f ull y open t o atmosphere when running AutoZ. Note that the molbox1+ quick connec tors and molbox1+ to molbloc pressure lines are self sealing and therefore DO NOT open to atmosphere unless a quick connector stem is inserted. Use a quick connector stem (DHI P/N 3068652, equivalent to Swagelok SS-QM2-S-200) supplied with the molbox1+ accessories to open the port to atmosphere.

Note

• Allow the molbox1+ to stabilize at atmospheric pressure

and ambient temperature for 10 to 15 minutes before running AutoZ.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Real time reading (without head correction) of

out head correction) of

96.7715U 96.7778D Pstd,0:96.7752 kPa

Old: 0.0 Pa 0.0 New: 3.7 Pa 2.6

• If running AutoZ results in a value of P

that is greater

offset

than ± 0.005 % FS of the span of the RPT that is being AutoZeroed, the RPT and/or the reference used as the source of Pstd,0 may be out of tolerance or the AutoZ process may have been faulty. Before activating a new

greater than ± 0.005 % FS of the active RPT, check to

offset

be sure that both the RPT and the reference were in good working order, properly vented to stable atmospheric pressure, at the same height, and reading in the same pressure units when AutoZ was run.

• When the run AutoZ selection is made, if a HEAD

correction is currentl y active (see Section 3.6.8) the head correction is momentarily disabled while running AutoZ to avoid “zeroing out” the head value.

• The value of P

is always displayed and entered in

offset

Pascal (Pa).

Run AutoZ by Entry

AutoZ by entry allows the valu e of P

(s ee Section 3.4.4.4, PRINCI PLE) to be

std,0

entered directly from the molbox1+ front panel. This provides a simple way of AutoZeroing relative to an independent reference device such as a house barometer that does not interface directly with molbox1+.

To access run AutoZ by entry press [TARE], <4AutoZ>, <4run>, <1Entry>. The display is:

1. upstream (1, Hi) RPT in unit of measure on line 2.

2. Real time reading (with downstream (2, Lo) RPT in unit of measure on line

3. Entry field for the value of P pressure unit of measure.

Enter the value of the Auto Z ref erence ( P

. in the current

std,0

) in the same unit of m easure as the

std,0

display and press [ENT]. molbox1+ logs the readings and calculates a new AutoZ offset value. The next display is:

1. Currently active/previous value of P upstream (1, Hi) RPT.

2. Currently active/previous value of P downstream (2, Lo) RPT.

3. New value of P the AutoZ that was just run.

4. New value of P for the AutoZ that was just run.

for the upstream (1, Hi) RPT for

offset

f or the downstream (2, Lo) RPT

offset

Press [ENT] to activate the new values of P of a new AutoZ reference (P

std,0

) value.

for the

offset

for the

offset

or [ESC] to start over with entr y

offset

Note

The value of P entered in the current pressure unit of measure.

Run AutoZ by COM2

is always in Pa scal (Pa) . T he v alue of P

offset

std,0

AutoZ by COM2 allows a DHI RPMx R eference Pressu re monitor connec ted to th e molbox1+ COM2 to act as the AutoZ reference (source of Pstd,0) (see Section 3.4.4.4, PRINCIPLE). The RPMx is read and the new P

To access run AutoZ by COM2 press [TARE], <4AutoZ>, <4run>, <2COM2>.

is calculated automatic all y.

offset

Page 79

3. OPERATION

Real time reading (without head correction) of

96.7715U 96.7778D Pstd,0:96.7752 kPa

Old: 0.0 Pa 0.0 New: 3.7 Pa 2.6

Note

For molbox1+ to communicate with an RPMx connected to its COM2 port, the molbox1+ and the RPMx RS-232 interfaces must be set up properly (see Section 3.6.6.1). If, the molbox1+ is unable to locate an RPM ON COM2 when running AutoZ by COM2, it times out after 6 seconds and displays an error message.

If molbox1+ is able to communicate with an RPMx on its COM2 port, the display is:

1. upstream (1, Hi) RPT in unit of measure on line 2.

2. Real time reading (without head correction) of downstream (2, Lo) RPT in unit of measure on line 2.

3. Real t i me reading of the RPMx connected to molbox1+ COM2 to provide the value of AutoZ P

Observe the pressur e outp uts ver if y that the y are st able. A 10 t o 1 5 m inute wait, after venting, is recomm ended before running AutoZ. W hen ready, press [ENT] to cause AutoZ to run. molbox1+ lo gs both RPT r eadings and calcu lates a new AutoZ offset value. The display is:

1. Current/previous value of P (1, Hi) RPT.

2. Current/previous value of P (2, Lo) RPT.

3. New value of P the AutoZ that was just run.

4. New value of P for the AutoZ that was just run.

for the upstream (1, Hi) RPT for

offset

for the downstream (2, Lo) RPT

offset

for the downstream

offset

Press [ENT] to activate the new values of P

offset

for the upstream

offset

or [ESC] to start over.

3.4.4.5 <5BPR> (molbloc-S Operation Only)

 PURPOSE

To quickly measure the molbloc-S upstream and downstream pressure and calculate and display the BPR (back pressure ratio) when molbox1+ is in a molbloc-S BPR mode which would not oth erwise measure the BPR.

 PRINCIPAL

molbox1+ uses the back pressure ratio, or BPR (the ratio of the molbloc-S downstream absolute pres sure to the upstream absolute pres sure) to determine whether the flow through t h e throat of the molbloc-S V enturi no zzle is cr itica l and flow measurements within predictable uncertainty limits can be made with molbloc-S (see Sect ion 3.1.5). When operating molbox1+ with molbloc-S, the user may select different B PR m onitorin g m odes (s ee Section 3.6.9) . Dep ending on which BPR m ode is selected, the BPR value is not always measured. The BPR function allows the u ser to measure and display BPR directly at an y time regardless of which BPR mode is selected.

Note

The value of P

is always displayed and entered in Pascal (Pa).

offset

Note

The <5BPR> menu selection is only present during molbloc-S operation.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

BPR 0.38

 OPERATION

Select [TARE], <5BPR>. The display is:

1. The current pressure read by the upstream (left) and downstream (right) RPTs without taking i nto account the current tare value. These are untared readings in the current pressure unit of measure.

2. The current BPR (ratio of downstream to upstream absolute pressure).

259.312 kPa ↓99.5769

Press [ENTER] or [ESCAPE] to exit the BPR function and return t o the previous RUN screen and BPR mode.

3.4.5 [P&T] (Pressure and Temperature)

 PURPOSE

To provide continuous display of the pressures measured by molbox1+, the Reynolds number of the flow throu gh the molbloc, the temper ature of the molbloc and other pres sure measurement information depending on whether the molbox1+ is used with molbloc-L or molbloc-S.

 PRINCIPLE

molbox1+ continuously measures pressures and molbloc temperature and uses these measurements to calculate flow.

The pressure at the molbloc upstream and downstream ports is read by two absolute Reference Pressure T ransducers (RPTs ). In m olbloc-L opera tion, the f low is calculated from the differential pressure across the molbloc. The differential pressure is calculated as the difference between the two, tared (see Section 3.4.4.1.1), absolute RPTs (upstream downstream) and is displayed in the molbloc-L mode pressure screen.

In molbloc-S mode, the flow is calculated from the molbloc-S upstream pressure. The upstream pressur e m ay be read by e ither on e or both of the R PT s, depend ing o n which B PR mode is in use (see Sectio n 3.6.9). When the molbox1+ is in a valve sta te called BPR OFF, the molbloc-S downstr eam pressure is not measur ed and both RPTs are used to m easure the molbloc-S upstream pressure. Their readings ar e averaged to reduce the uncer tainty of the molbloc -S upstream pressure m easurement. An indica tor is use d next to the “ downstre am” RPT value to show whether the RPT is currently measuring the molbloc downstream or upstream pressur e. Whenever the m olbloc-S d ownstream pres sure is meas ured, the BPR is calculated and shown in the P&T pr essure screen. W hen both RPTs measure the ups tream pressure (BPR OFF m ode), the indicated pressure for both RPTs is adjusted to equal the average of the two using the dynamic tare and BPR is no longer displayed.

Since the displa ys and operation of the P&T press ure screen are dif ferent for m olbloc-L and molbloc-S, they are des cribed sepa rately in Se ctions 3.4 .5.1 and 3.4.5.2.

For temperat ure measurement, two Platinum Resistance T her mometers (PRT s ) are embedded in each molbloc. These ar e connected to the molbox1+ by the molbox1+ to molbloc cable. The molbox1+ ohmic m easurement system reads the resistance of the PRTs and c alculates molbloc temperature.

molbox1+ continuously calculates the Reynolds number of the flow through the molbloc. The molbox1+’s current pressure and temperatur e readings as well as the Re ynolds num ber

of the current flow can be displayed using the P&T function.

Page 81

3. OPERATION

), the

97.788 kPaa 97.783 DP 0.005 Re 0.02

The temperature measured by the downstream

21.80ºC

21.82ºC 21.78ºC

modes, tare is automatically applied to these

BPR 0.38 Re 11039

The temperature measured by the downstream

resistance thermometer in the

21.80ºC

21.82ºC 21.78ºC

3.4.5.1 molbloc-L Operation

 OPERATION – molbloc-L Operation

Press [P&T] from any run screen. The display is:

1. Pressure read by the upstream RPT (left downstream RPT (right) and the pressure unit of measure (middle).

2. The current differential pressure in the current pressure unit of measure. <DP> indicates the value is differential pressure.

3. Current Reynolds number of the flow through the molbloc.

Pressing [P&T] agai n or the [+/-] k ey toggles between the press ure screen and the temperature screen:

1. The average molbloc t emperature in the current unit of measure (upstream + downstream/2).

2. The t emperature measured by t he upstream molbloc platinum resistance thermometer in the current unit of measure.

3. molbloc platinum resistance thermometer in the current unit of measure.

To leave the P&T function and return to the MAIN run screen, press [ESCAPE].

To change the pressure and/or temperature unit of measure, see Sections 3.5.8 and 3.5.9.

3.4.5.2 MOLBLOC-S operation

 OPERATION – molbloc-S operation

1. The current pressure read by the ups tream (left ) and downstream (right) RPTs and the current pressure unit of measure (middle). In BPR OFF or Auto

readings. In BPR ON mode, tare is never applied.

2. <h> indic ates a head pressure correction is appl ied or no character if no head correction.

3. Arro w to indicate which pressure is bei ng read by the “downstream” RPT. Down a rrow indi cates do wnstream pressure, Up arrow indicates upstream pressure.

4. The current BPR (ratio of downstream to upstream absolute pressure).

5. Current Reynolds number.

Pressing [P&T] agai n or the [+/-] k ey toggles between the press ure screen and the temperature screen:

1. The average molbloc t emperature in the current unit of measure (upstream + downstream/2).

2. The t emperature measured by t he upstream molbloc platinum resistance thermometer in the current unit of measure.

3. molbloc platinum current unit of measure.

To leave the P&T function and return to the MAIN run screen, press [ESCAPE].

Note

259.312 kPah↓99.5769

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Note

To change the pressure and/or temperature unit of measure, see Sections 3.5.8 and 3.5.9.

3.4.6 [DISPLAY]

 PURPOSE

To select, from a variet y of c hoices , th e inf or mation that is displayed on th e s econd line of the molbox1+ display. Averaging is one of the choices.

 PRINCIPLE

molbox1+ supports a variety of ADVANCED FLOW MEASUREMENT functions that are displayed on the second (bottom ) line of the molbox1+ displa y. In summary, the available DISPLAY functions included are:

RATE: Calculates and displays the current rate of change of flow in current flow

units/second (see Sec tion 3.4.6.1). This function is a useful i ndication of the stability of the flow bei ng m eas ured. It is of ten us ed a s an ind icat ion of positive or negative leak rate and as a “ go/no go” criterion for when to take data whe n comparing molbox1+ and a DUT (e.g., in a calibration).

AVERAGE: Calculates the average flo w measurem ent over a use r specified per iod of tim e

and displays the average, the standard deviation about the mean and a countdown in seconds to the nex t a verage ( see S ectio n 3.4.6.2). This function is often used to filter out flow noise in an unstable system or to gather a corresponding sample when comparing molbloc/molbox measurements to another device with a long integration time (e.g., a volumetric f low standard). The magnitude of the no ise is quantified by the standard d eviation about the mean. A second screen allows the instantaneous flow values to be viewed during an averaging cycle.

HI/LO: Records and displays the maximum and m inimum flows m easured s ince HI/LO

reset (see Section 3.4.6.3). This function is us ed to k eep tr ack of the m inimum and maximum f low observed ov er a period of tim e or to monitor whether a f low min/max limit has been exceeded.

TOTAL: Totalizes the mass or volume flowed over a period of time (see Section

3.4.6.4). Used to measure t otal m ass or volum e over a per iod of t im e. Can be useful in calibration or verifying a totalizing flow device, when comparing molbloc/molbox to a gravimetric standard or to add or remove a specific quantity of mass or volume from a system.

UNIT: Displays the measurement of flow through the molbloc simultaneously in a

second flow unit (see Section 3.4.6.5). This function is convenient when working with an unfamiliar flow unit of measure to simultaneously display a familiar unit or any time a real time flow unit conversion is desired.

DEVIATION: Continuously calculates and displays the deviation between the current flow

measured by molbox1+ and a target flow defined by the user (deviation = current flow - tar g et) (s ee S ec tion 3.4.6.6). This f uncti on is useful in monitoring the evolution of flow around and/or away from a desired set point.

FREEZE: Captures and displays the instantaneous flow value measured by molbox1+

when the [ENTER] key is pressed (see Sectio n 3.4. 6.7). This function is useful to record the flow present at the time of an operator observed trigger event.

CLEAN: Bla nk s out the sec ond line of t he displa y (see Section 3.4.6.8) . T his function is

used when a simple display of flow measured by the molbox1+, without additional information, is desired.

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3. OPERATION

1avg 2rate 3hi/lo

7freeze 8clean

* 101.27 sccm N20 R 0.03/sec

 OPERATION

To select a DISPLAY function, press [DISPLAY] from the MAIN run screen.

The display is:

4total 5unit 6dev ↓

The cursor is on the active DI SPLAY function. Selecting a DISPLA Y function returns to the MAIN run screen with the selected function active.

See Section 3.4.6, PRINCIPLE for a summary of DISPLAY functions and Sect ions 3.4.6.1 through 3.4.6.8 for detailed information on each DISPLAY function.

Note

• In molbloc-S operation, at times, the back pressure ratio, BPR, will be

too high for molbox1+ to calculate a meaningful flow value. When this occurs, the top line of the run screen display always reads <BPR HI> and the bottom line shows the label <BPR> and the current measured BPR value. Th is disp la y h as pr io rit y o v er th e appearance of the di sp la y functions described in this section, but the display will return to normal when the BPR returns to a usable level for molbloc-S measurements (see Section 3.1.5).

• The default DISPLAY function is RATE which causes the second line of the

display to show <R> followed by the current rate of change of flow in curren t fl ow u ni t of me as ure per sec ond (see Se cti o n 3.4.6.1).

3.4.6.1 <1Rate>

 PURPOSE

To activate the RATE DISPLAY.

 OPERATION

To activate the RATE DISPLAY press [DISPLAY] and select <1rate>. Selecting <1rate> returns to the MAIN run screen with the RATE DISPLAY active.

With the RATE DISPLAY active, the MAIN run screen is:

1. St andard MAI N run screen top line.

2. Current rate of change of flow in current flow unit of measure per second.

Note

See Section 3.4.6, PRINCI PL E.

Note

• The RATE DISPLAY is different and separate from the

stability setting which is used to s et the stability c riterion on which the Ready/Not Ready indication is based (see Sections 3.1.3, 3.5.2). The RATE DISPLAY only caus es the current rate of change to be displayed and has NO affect on the stability setting or the Ready/Not Ready condition.

• To go to a DISPL AY other than RATE, press [DISPLAY] and

make a new DISPLAY choice.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Averaging Period: 20 s

* 101.99 sccm N20 δ 0.06 18 sec

* 101.59 sccm N20 R 0.0025 18 sec

3.4.6.2 <2Avg> (Average)

 PURPOSE

To activate the AVERAG E DISPLAY and/or adjust the period of time over which averaging occurs.

Note

See Section 3.4.6, PRINCI PL E.

 OPERATION

To access the AVERAGE DISPLAY, press [DISPLAY] and select <2avg>. The display is:

1. Edit f i el d for averaging period i n seconds. Default is

20. Minimum 3, maximum 999.

Edit the averaging time per iod if desired. Pres sing [ENTER] returns to the MAIN run screen with the AVERAGE DISPLAY active.

With the AVERAGE DISPLAY active

1. Average fl ow measured over last completed averaging period.

2. Standard deviation of last completed averaging period.

3. Countdown in sec onds until complet i on of on-going averaging period.

the MAIN run screen is:

The AVERAGE DISPLAY has a second screen that allows the instantaneous flow readings to be viewed wh ile an averaging cycle is running. This scr een is available only if the molbox1+ MFC contr ol option is NO T present or OFF. If the molbox1+ MFC control option is not present or OFF, pressing [+/-] toggles between the MAIN run AVERAGE screen and the instantaneous values AVERAGE screen. If the molbox1+ MFC control option is ON, pressing [+/-] accesses the MFC averaging screens. The MFC averaging screens are the equivalent of the normal MFC screens but the values are averaged for the averaging time. The instantaneous AVERAGE screen is:

1. Instantaneous flow value at molbox1+’s normal integration rate.

2. Countdown in sec onds until completion of ongoing averaging period.

3. Current rate of change of flow in flow unit of measure/second..

3.4.6.3 <3 Hi/Lo>

 PURPOSE

To activate the HI/LO DISPLAY.

Note

See Section 3.4.6, PRI N C I PL E.

Page 85

3. OPERATION

* 101.22 sccm N20 H 101.44 L99.113

Edit field for time over which to totalize (hh:mm:ss).

Totalizing period: 00:10:00

 OPERATION

To activate the HI/LO DISP LAY pres s [DISPLAY] and selec t <3hi/lo>. Selectin g <3hi/lo> resets the HI/LO values and returns to the MAIN run screen with the

HI/LO DISPLAY active. With the HI/LO DISPLAY active, the MAIN run screen is:

1. St andard MAI N run screen top li ne.

2. Highest fl ow observed si nce HI/LO reset.

3. Lowest fl ow observed si nce HI/LO reset.

The HI/LO values change each time a new HI or LO flow value occurs. The HI/LO record can be reset at any time by pressing [ENTER] allowing a HI/LO reset without going back through the DISPLAY menu.

Note

• When DISPLAY is set to HI/LO, the MFC indicator of the

optional MFC function is not included on the second line of the molbox1+ display as the HI/LO DISPLAY occupies the entire second line of the molbox1+ display (see Section

3.4.8).

• The set point of the optional MFC function cannot be

changed in the HI/LO display because [ENTER] is used by the DISPLAY function. MFC set point can onl y be ente red in the RATE , UN IT or CLEAN DISPLA Y fun c tio ns .

• Changing the flow unit of measure, the gas, the K factor or

running a TARE function while in HI/LO resets the HI/LO record.

• To go to a DISPLAY other than HI/LO, press [DISPL AY] and

make a new DISPLAY choice.

3.4.6.4 <4Total> (Totalizer)

 PURPOSE

To activate the TOTALIZER DISPLAY.

 OPERATION

To activate the TOTALIZER DISPLAY, press [DISPLAY] and select <4total>. The display is:

1. Default period is 00:10:00; maximum 99:59:59.

Edit the totalizing period as desired. Pressing [ENTER] returns to the MAIN run screen with the TOTALIZER DISPLAY active.

Note

See Section 3.4.6, PRINCI PL E.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

* 101.45 sccm N20 Σ0.00 scc 00:00:00

With the TOTALIZER DISPLAY active the MAIN run screen is:

1. St andard MAI N run screen top line.

2. Total mass or volume accumulated over elapsed totalizing run time.

3. Units of measure of m ass or volume (deri ved from the current flow uni t) of the totalize d value (see Table 22). The units of measure ar e not sho wn if t he screen s pace is needed to show a large totalized value.

4. Elapsed tota lizing time (hh:mm :ss). Always starts from zero and counts up until totalizing period elapses.

Press [ENTER] to start totali zing. The elapsed tim e counter starts and the t otal mass or volume begins to accumulate. Tota lizing continues un til the set total ize period is complete. W hen the totalizing period is complete, molbox1+ sounds three beeps and displa ys the total izing com plete screen in which the to tal flo w or volume and elapsed totalizing time are frozen with totalizing time NOT flashing.

To start a new tota lizing r un f rom the t ota lizing com pl ete sc reen, pr ess [ENTER]. This clears the previous total, resets to the totalizing timer and starts totalizing.

Note

• When DISPL AY is set to TOTALIZE, the MFC indicator of the

optional MFC function is not included on th e second line of the molbox1+ display as the TOTALIZE DISPLAY occupies the entire second line of the molbox1+ display ( see Section

3.4.8).

• The set point of the optional MFC function cannot be

changed in the TOTALIZE display because [ENTER] is used by the DISPLAY function. MFC set point can only be entered in the RATE, UNIT or CLEAN DISPLAY functions.

• To view a split total and/or to start a new totalizing run with a

new run time, press [ENTER] w hile totalizing (see View ing a Split Total and/or Starting a New Totalizing Run w ith a New Run Time of this section). T o change totalizing run tim e any other time, press [DISPLAY] and select <4total>.

• Certain functions cannot be executed while totalizing. These

functions include change K, change gas, change flow unit of measure, tare. If <Access restricted while totalizing> is displayed when a function key is pressed during totalizing, the function is one that cannot be executed while totalizing. To execute the function, abort the totalizing run or wait until after the run has completed. This feature is to avoid accidentally aborting or corrupting a totalizing run.

• To set a new totalizing time w ithout going back through the

[DISPLAY] menu, press [ENTER] and select <2new> from the TOTALIZER screen. To freeze a split total withou t stopping the totalizing run, press [ENTER] or [ESCAPE] while totalizing (see Viewing a Split Total and/or Starting a New Totalizing Run with a New Run Time below in this section).

Page 87

3. OPERATION

* 101.27 sccm N20 = 0.1013 slm

Table 30. Flow Units and Corresponding Total Mass or Volume Units

3.4.6.5 <5Unit>

FLOW UNIT

mol/s mol

kg/s kg

mg/s mg

slh or slm sl

sccm scc

scfh or scfm scf

Ulm ul

Uccm ucc

ucfm or ucfh ucf

plm or plh pl

pccm pcc

pcfm or pcfh pcf

lm or lh l

ccm cc

m3m or m3h m3

cfm or cfh cf

TOTAL MASS OR

VOLUME UNIT

 PURPOSE

To activate the UNIT DISPLAY.

Note

See Section 3.4.6, PRI N C I PL E.

 OPERATION

To activate the UNIT DISPLA Y, press [DISPLAY] and select <5unit>. The unit of measure that will be used for the second line of the MAIN run screen displa y must then be selected. The unit selection process is identical to that of the [UNIT] function key (see Section 3.4.3). Once the unit has been selected operation returns to the MAIN run screen with the UNIT DISPLAY active.

With the UNIT DISPLAY active the MAIN run screen is:

1. St andard MAI N run screen top line.

2. Flow equivalent of the current measured flow in the alternate flow unit of measure.

3. Alternate flow unit of measure selected in UNIT DISPLAY.

 Caution

The reference temperature setting for the user units (i.e., uccm and ulm) (see Section 3.4.3.3) and the temperature and pressure settings for volume units (see Section 3.4.3.4) apply to the units in the main UNIT selections as well as the UNIT DISPLAY selection. T herefore, it is not possible to simultaneously display user units or volume units with different reference temperatures

Page 88

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Target:

100.00 sccm

* 100.53 sccm N20 D 0.53 % T 100.00

and/or pressures. When you change the temperature or pressure setting for one type of unit, you change it for that type of unit wherever it is used. It is possible to show the difference between volumetrically based mass flow units at 0 °C and another temperature by choosing the “s” version (e.g., sccm) for 0 °C as the main unit and a user unit with a different reference temperature as the UNIT DISPLAY, or vice-versa.

Note

To go to a DISPLAY other than UNIT, press [DISPLAY] and make a new DISPLAY choice.

3.4.6.6 <6Deviation>

 PURPOSE

Note

See Section 3.4.6, PRI N C I PL E.

 OPERATION

To activate the DEVIATION DISPLAY, press [DISPLAY] and select <6dev>. The display is:

1. Edit field to edit the target value from which the deviations is to be measured.

Edit the desired target value. Pr essing [ENTER] retur ns to the MAIN run sc reen with DEVIATION DI SP LA Y a ctive using the entered target value.

With the DEVIATION DISPLAY active the MAIN run screen is:

1. St andard MAI N run screen top line.

2. Target value i n current flow unit of measure.

3. Deviation of current flow from target value in % of reading.

To activate the DEVIATION DISPLAY and/or edit the deviation target.

Note

• Pressing [ENTER] from the MAIN run screen when the

DEVIATION DISPLAY is active goes directly to the target editing screen. This allows the target value to be changed without going through the DISPLAY menu.

• The DEVIATION DISPLAY target value is the value from

which % deviations (D) are measured by the DEVIATION DISPLAY following:

D = (current flow – target) x 100

target

• To go to a DISPLAY other than DEVIATION, press

[DISPLAY] and make a new DISPLAY choice.

Page 89

3. OPERATION

Target:

100.00 sccm

* 100.53 sccm N20 D 0.53 T 100.00

 PURPOSE

Note

See Section 3.4.6, PRI N C I PL E.

 OPERATION

To activate the DEVIATION DISPLAY, press [DISPLAY] and select <6dev>. The display is:

1. Edit field to edit the target value from which the deviations is to be measured.

Edit the desired target value. Pr essing [ENTER] retur ns to the MAIN run sc reen with DEVIATION DISPLAY active using the entered target value.

With the DEVIATION DISPLAY active the MAIN run screen is:

1. St andard MAI N run screen top line.

2. Target value i n current flow unit of measure.

3. Deviation of current flow from target value in current flow unit of measure.

To activate the DEVIATION DISPLAY and/or edit the deviation target.

Note

• When DISPLAY is set to DEVIATION, the MFC indicator of the

optional MFC function is not included on the second line of the molbox1+ disp lay as the D EVIATION DISPLAY occupies the entire second line of the molbox1+ display ( see Section

3.4.8).

• The set point of the optional MFC function cannot be

changed in the DEVIATION display because [ENTER] is used by the DISPLAY function. MFC set point can only be entered in the RA TE, UNI T or C LEA N DISPLAY functions.

• Pressing [ENTER] from the MAIN run screen when the

DEVIATION DISPLAY is active goes directly to the target editing scr een. This allows the t arget value to be ch anged without going through the DISPLAY menu.

• The DEVIATION DISPLAY target value is the value from

which deviations (D) are measured by the DEVIATION DISPLAY following:

D = current flow - target

• If the flow unit is cha nged while the DEVIATION DIS PLAY is

active, the t arget va lu e rem ain s at th e sa me nu m eri cal v alue . It is not converted to the new unit.

• To go to a DISPL AY other than DEV I ATION, press [D IS PL AY]

and make a new DISPLAY choice.

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

* 101.75 sccm N20 F 99.24

* 101.45 sccm N2O

3.4.6.7 <7Freeze>

 PURPOSE

To activate the FREEZE DISPLAY.

Note

See Section 3.4.6, PRI N C I PL E.

 OPERATION

To activate the FREEZE DISPLAY press [DISPLAY] and select <7freeze>. Selecting <7freeze> returns to the MAIN run screen with the FREEZE DISPLAY active.

With the FREEZE DISPLAY active, the MAIN run screen is:

1. St andard MAI N run screen top line.

2. Flow measured in the current flow units when [ENTER] was pressed (displays 0.00 by default when FREEZE DISPLAY is first activated).

Pressing [ENTER] causes the current flow measured by the active molbox1+ range to be captured and displayed.

Note

• If the flow measurement unit is changed while the FREEZE

DISPLAY is active, the FREEZE valu e defaul ts back to z ero.

• The set point of the optional MFC function cannot be

changed in th e FREEZE display because [ENTER] is us ed b y the DISPLAY function. MFC set point can only b e en te red in the RATE , UN IT or CLEAN DISPLA Y fun c tio ns .

• To go to a DISPLAY other than FREEZE, press [DISPLAY]

and make a new DISPLAY choice.

3.4.6.8 <8Clean>

 PURPOSE

To activate the CLEAN DISPLAY.

Note

See Section 3.4.6, PRI N C I PL E.

 OPERATION

To activate the CLEAN DISPLAY press [DISPLAY] and select <8clean>. Selecting <8clean> returns to the MAIN run screen with the CLEAN DISPLAY active.

With the CLEAN DISPLAY active, the MAIN run screen is:

1. St andard MAI N run screen top line.

2. “Clean” second line.

Page 91

3. OPERATION

Note

• The M FC indicator is not included in the MAIN run screen in

the CLEAN DISPLAY function (see Section 3.4.8).

• To go to a DISPLAY other than CLEAN, press [DISPLAY] and

make a new DISPLAY choice.

3.4.7 [A/B]

 PURPOSE To switch the active molbloc channel between channel A and channel B.

 PRINCIPLE

See Section 3.1.1

 OPERATION

Pressing the [A/B] k ey changes t he active molb loc channel. T he currently activ e channel is indicated by the lit RED LED below the molbox1+ f ront panel disp lay. When the A/B function is operated, molbox1+ actuates internal valves to change the molbloc channel that is connected to the molbox1+’s internal pressure transducers. Pressing the [A/B] key also aborts any A_B mode that may be active (see Section 3.5.4).

Note

When channels are changed using the A/B function, the molbloc is not initialized b y the molbox1+. When the molbloc connected to a channel is changed, use <1molbloc> in the SETUP menu (see Section 3.5.1) to reinitializ e. This will cause th e molbox1+ to read and sto re the molbloc EEPROM information and assure that the newly connected molbloc is properly identified and used.

Channels, Functions and Settings

In general, molbox1+ functions and sett ings are channel specific. They are set and stored individually for each c hannel so that changing s ettings for one c hannel does not change t he setting for the other.

The only functions and settings that are NOT channel specific are: Functions: [MFC], [DISPLAY] Setup Menu: <3adj> Special Menu: <9BPR>

3.4.8 [MFC](Optional)

 PURPOSE

To turn the analog MFC control function ON and OFF and to select an MFC profile to be used when the MFC function is ON.

The MFC control function is an option al feature of molbox1+ that allows setting and reading an external MFC with analog voltage or current signals. If the molbox1+ does not include the MFC control function, [MFC] has no function.

Note

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

is first pressed the screen prompts

SELECT MFC CHANNEL (0 DISABLES): 0

SELECT PROFILE #3

* 101.001 sccm N2 S1.020 M1.03 V

 OPERATION

When [MFC] the operator:

The MFC channel refers to the channel of the optional MFC switchbox that can be purchased as an accessory to molbox1+ to allow the MFC control function to be switched between up to five MFCs. Entering [0] disables the MFC control func tion. Entering [1], [2], [3], [4] or [5] enables the MFC function and selects the c orresponding channel on the MFC switchbox. If an MFC switchbox is not being used, select channel #1 when activating the MFC function.

The operator is then prompted:

The number refer s to the MFC profile num ber (see Sections 3.4.8.2, 3.5.5). Edit the pr ofile number to the desired pr ofile. When the prof ile number is entered, a summary of the profile is displayed. When [ENTER] is pres sed again, the display returns to the MAI N run screen and the MFC function is ac tive using the prof ile selected. <MFC> or <MFM> (depending on the device type of the selected profile) and the active channel num ber may be displayed in the bottom right hand c orner of the M AIN run screen depending on t he current dis play mode (see Section 3.4.6).

When the MFC functi on is ON, press ing [ENTER] f rom the MAIN run screen or an MFC r un screen allows entry and execution of the MFC set point command. When the DISPLAY MODE is AVERAGE, HI/LO, TOTAL, DEVIATION or FREEZE, [ENTER] is used for the DISPLAY MODE (see Section 3.4.6). MFC set point commands cannot be entered in t hese DISPLAY MODES. MFC set points can only be entered in the RATE, UNIT and CLEAN DISPLAY MODES.

Note

• To [ENTER] M FC set point, the DISPLAY MODE must be RATE, UNIT or

CLEAN. In other DISPLAY MODES, [ENTER] is used by the DISPLAY MODE.

• Pressing the [

] arrow key any time the MFC control function is active causes an instant display of the current MFC profile summary allowing a quick check of the characteristics of the currently active MFC profile. Pressi ng [E SCA P E] re tur ns fr om MF C pr of il e scr ee n to the las t ru n scr ee n.

3.4.8.1 MFC Run Screens

When the MFC function is ON, the MAIN run sc reen i s unc hanged but <MFC> or <MFM> and the active MF C channel number ar e shown i n the bottom right han d

corner of th e molbox1+ d isplay (in RATE , U N IT and FREEZE D I S PL A Y modes only, see Section 3.4.6). T wo or three, depending on the MFC profile in use, special MFC run screens can be acc essed by pressing the [+/-] key. When the [+/-] key is pressed from the first MAIN run screen, the first MFC run screen is displayed:

1. Ready/not ready indi cation.

2. Flow value and flow unit of the flow through the active molbloc as read by the molbox1+.

3. The gas that is currently being flowed through the active molbloc.

4. MFC set point set by the molbox1+.

5. MFC output measured by the molbox1+.

6. Unit of measure of MFC setpoint and output (V, mA, % FS or blank if flow units).

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3. OPERATION

MFC molbox1

MFC F.S.

−

 



 



•100

* 101.001 sccm N2 E 0.85% F.S.

+ 15.11 V -15.15V S1.020 V 11.29V

Pressing [+/-] from the first MFC r un screen caus es the second MFC run sc reen to be displayed (this s creen is not present when MFC profile #1 or #2 is being used, see Section 3.4.8.2, 3.5.5):

1. Ready/not ready indi cation.

2. Flow value and f l ow unit of the flow through the active molbloc as calculated by the molbox1+.

3. The gas that is currently being flowed through the active molbloc.

4. The MFC measurement error in % calculate as

Pressing [+/-] from the sec ond MFC run sc reen ca use s the thir d MFC ru n scr een to be displayed (this is the second screen if MFC prof ile #1 or #2 is in use, see Section 3.4.8.2, 3.5.5).

1. Pos iti ve MFC supply voltage.

2. Negative MFC suppl y voltage.

3. Current MFC valve voltage.

4. Current MFC set point.

Summary

Pressing [+/-] toggles the run screens from the MAIN run screen through the MFC run screens and back to the MAIN run screen.

3.4.8.2 MFC Profiles

MFC profiles are used by molbox1+ to configur e the MFC f unction . MFC pr ofile s define the analog signal range of the MFC and the relationship between the analog signal range and the flow range of the MFC. This information allows molbox1+ to op erate with the correct signal for the cur rent MFC and to convert the MFC analog signals to the corresponding flow or % FS values when desired.

MFC profiles are created and edited in [SETUP], <5MFC> ( see Sec ti on 3.5. 5) .

3.4.8.3 Units of Measure When Using the MFC Control Option

When the MFC function is activ e, the molbox1+ flow units of measure are alwa ys the units of measure specified in the active MFC profile.

When the MFC function is active, unless the prof ile is #1 or #2, the flow unit of measure in which the f low throug h the molbloc is displa yed is determ ined by the flow unit of m easure in the MFC profile. T he [UNIT] function k ey is for select ion of the unit of measure of the MF C setpoint an d output. T he choices avai lable are V or mA (depending on the active MFC profile's analog range), % FS or flow. The % FS selection causes MFC s etpoint and output to b e displayed in % FS of the MFC which molbox1+ calculates usi ng t he d ef init ion of analog range and flow range contained in the MF C prof ile. The f low unit s election c aus es MFC s etpoin t and output to be displayed in the flow units of the MFC calculated using the definition of analog range, flow range and flow units contained in the MFC profile.

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Note

MFC profiles #1 and #2 are default profiles for working with the MFC function directly in analog units without an MFC flow range or units. Profile #1 is 0 to 5 V, profile #2 is 4 to 20 mA. When t he MFC function is active with profile #1 or #2 selected, the MFC units of measure are always V (profile #1) or mA (profile #2). The UNIT function selects the molbox1+ flow measurement unit.

3.4.9 [RES]

 PURPOSE

To set the resolutio n of molbox1+’s d isplay of the flow through the molbl oc and other flow display and entry values.

 PRINCIPLE

The resolution with which the flow measured by molbox1+ is displayed can be adjusted. This feature can be used to reduce the resolut ion when lower precision m easurements are b eing made and additional digits might confuse or distract the operator.

The resolut ion sett ing det ermines t he num ber of dig its with which flo w is displ ayed. The desir ed resolution is c alculated based o n t he nominal full scale r ang e of th e molbloc in the current gas and flow unit of measure and then rounded to the furthest digit to the right (i.e., resolution of 0.001 % on a 100 sccm molbloc is 0.001 sccm).

Note

The default molbox1+ display resolution setting is 0.001 % of molbloc FS. The RES setting does not affect the resolution of flow information transmitted remotely. Remote information always has maximum resolution of 0.0001 % of molbloc FS.

 OPERATION

To access the resolution function press [RES]. Press the [

changes the resolution by a factor of 10. Once the desired resolution is displayed, press [ENTER] to set the selected resolution and return to the main run screen.

←] to decrease the resolution and [→] to increase the resolution. Each press

Note

The resolution setting affects the display of the measured flow as well as other indications and settings (i.e., quantities shown by the [DISPLAY] functions).

3.5 [SETUP]

 PURPOSE

The [SETUP] key accesses a menu of commonly used molbox1+ functions and features that do NOT have direct function keys. These functions include:

<1molbloc> To initialize a molbloc when it is connected to molbox1+ and/or to identify the molblocs

currently connected to molbox1+ (see Section 3.5.1).

<2stab> To change the stability limit that serves as the criterion for the flow Ready/Not Ready

indication (see Sections 3.5.2 and 3.1.3).

<3adj> To set an adder and multiplier to adjust molbox1+ flow readings (see Sec tion 3.5.3).

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3. OPERATION

from the MAIN run

1molbloc 2stab 3adj

7flow 8presU 9tempU

<4A_B> To set molbox1+ flow m easurement modes that use the combination of two molbloc s on

channels A and B to measure flow (see Section 3.5.4).

<5MFC> To create, stor e and edit th e MFC prof iles used b y the optio nal MFC f unction (see Sections

3.5.5 and 3.4.8).

<6reg> To turn regulation mode of the optional MF C f unc tion O N and O FF and to set t he regulat io n

period for the regulation mode (see Section 3.5.6).

<7flowU> To customize the flow unit choices available under [UNIT] (see Sections 3.5.7 and 3.4.3). <8presU> To select/change the unit of measure in which molbox1+ displays pressure values

(see Section 3.5.8).

<9tempU> To select/change the unit of measure in which molbox1+ displays temperature values

(see Section 3.5.9).

 OPERATION

To access the SETUP menu, press [SETUP] screen. The display is:

See Sections 3.5.1 to 3.5.9 for detailed information on each SETUP function.

Note

Some screens (e.g., the SETUP menu) go beyond the two lines provided by the display. This is indicated by a flashing arrow in the second line of the display. Press the [

←] and [→] keys to move the cursor to access the lines that are NOT

visible or directly enter the number of the hidden menu choice if you know it.

3.5.1 <1molbloc>

 PURPOSE

To initialize a molbloc when it is connected to molbox1+ and/or to identify the molbloc(s) currently connected to molbox1+. To determine the gases with which a molbloc has been calibrated.

 PRINCIPLE

molbox1+ uses m olbloc specific calibration inform ation contained in the molbloc's EEPROM to determine wheth er it should op erate in m olbloc-L or molbloc-S m ode and in i ts calculation of flow through the molbloc. For the molbox1+ to correctly calculate the flow through the molbloc, the molbox1+ mus t use infor mati on on the c urr entl y acti ve m olbloc . m olbl oc EE PRO M information is read and stored by molbox1+ in the molbox1+ power up sequence when molbox1+ is turned on by selecting [SETUP], <1molbloc>.

4A-B 5MFC 6mode ↓

The <1molbloc> function should be used each time there is a change in the molbloc connected to a channel to assure that molbox1+ uses the correct molbloc information on subsequent measurements. The <1molbloc> function can also be used to display identifying information on the m olblocs currently connec ted to the molbox1+ c hannels and to determ ine the gases with which the molbloc has been calibrated.

 OPERATION

To access the m olbloc function press [SETUP],and <1molbloc>. The f unction activates for both channels without additional prompts or entries.

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To view the gases with which the molbloc is calibrated, press [ENTER] in the molbloc identification scr een to view the m olbloc’s gas list. After viewing, pr ess [ESCAPE] to re turn to the current run screen.

3.5.1.1 molbloc-L and molbloc-S Size and Range Designations

Until mid-1999, molbloc-L elements (molbloc-S was not available at the time) were always identified by “Range”. The molbloc-L “Range” is the molbloc’s nominal full scale flow in Nitrogen (N2) at an operating pressure of 250 kPa. Actual molbloc ranges cha nge with the molbloc pressure dependent calibr ation type and gas (see S ection 1.2.5.1.2). Since m id-1999, in addition to nominal range, molbloc-L elements have been de sig nat ed by size with a sizing code (see Table 31).

On molbloc EEPROMs , the molbloc is still identified by its nom inal range rather than by its size. The identification of the molbloc displayed by [SETUP], <1molbloc> identifies molbloc-L by both its nominal range and sizing code. molbloc-L size and range designation correspondence are given in Table 31.

Table 31. molbloc-L Size and Nominal Range Designations

molbloc

“NOMINAL

RANGE”

DESIGNATION

10 sccm 1E1

50 sccm 5E1 100 sccm 1E2 200 sccm 2E2 500 sccm 5E2

1 slm 1E3

5 slm 5E3 10 slm 1E4 30 slm 3E4

100 slm 1E5

molbloc-S elements are also identified by size designations, each of which relate to a specific m olbloc-S K

value. molb loc-S flow ranges depend on calibration type and

the pressure l imitations of the applicat ion and molbox used. For inform ation on the possible molbloc-S flow ranges with various operating pressures, see Section

1.2.5.2.2). molbloc-S size and K

value correspon denc e are give n in Table 32.

molbloc-L SIZE

DESIGNATION

Table 32. molbloc-S Size and Pressure to Flow Conversion Ratio (KF)

(sccm/kPa)

10 1E1-S 20 2E1-S

50 5E1-S 100 1E2-S 200 2E2-S 500 5E2-S

1,000 1E3-S 2,000 2E3-S

5000 5E3-S

10000 1E4-S

molbloc-S SIZE

DESIGNATION

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3. OPERATION

Flow stability test:

0.1 sccm/s

3.5.2 <2stab>

 PURPOSE

To change the stability limit that serves as the criterion for the flow Ready/Not Ready indication (see Section 3.1.3).

 PRINCIPLE

molbox1+ continuousl y monitors the rate of change of flow through the molbloc to whic h it is connected and compares this rate to the stability limit to make a Ready/Not Ready determination (see Section 3.1.3). The STABILITY function allows the stability limit to be adjusted by the user t o incr ease or dec reas e the s tab il it y requ ired for a Ready (<*>) condition to occur.

Note

• The default stability limit is + 0.1 sccm/second (or equivalent in another

flow unit). The stability limit value is automatically converted when the flow unit of measure is changed.

• The stability limit is separate and different from the RATE DISPLAY

function (see Section 3.4.6.1) which allows the current rate of change of flow to be displayed.

 OPERATION

To adjust the stability limit press [SETUP] and select <2stab>. The display is:

1. Entry f ield for sett ing the desired s tability lim it in the current flow unit of measure. Recalls the default stability limit or t he last st ability limit set.

Edit the stability lim it setting as des ired. Press ing [ENTER] activates the st ability lim it for the range and returns to the current run screen.

Note

• The stability limit value is automatically converted when flow units of

measure are changed.

• The [RES] setting aff ects the resolution of the stability limit value. If the

stability limit display does not have enough resolution to set the desired value, use [RES] to adjust the resolution (see Section 3.4.9).

3.5.3 <3ADJ>

 PURPOSE

To apply adder (FA) and multiplier (FM) coefficients to the flow measured by the molbox1+.

PRINCIPLE

The ADJ function gives the user the capability to adjust mass flow readings made by the molbox1+. This is accomplished by setting an adder and a multiplier.

The adder (FA) and multiplier (FM) adjust the d ispl ayed va lue of the f low throug h the m olbloc as calculated by the molbox RFM following:

If a K factor is active (see Section 3.4.1), the adder and multiplier are applied to the calculated flow before the K factor is applied.

corrected flow = (calculated flow * FM) + FA

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MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

molecular weight of the mix

molecular weight of the gas selected on the molbox

Adder: 0 sccm Mult: 1.00000

molecular weig ht of the mix

molecular weig ht of the gas selecton on the molbox

28.215

28.016

1.0071

Using the Flow ADJ Function with molbloc-L to Handle a Gas Mixture

The flow ADJ function can be us ed to adjust flow readings to measure a gas mixture if the molecular weight and relative content of each component gas is known. Note that this method does not take into account the true visc os ity, compressibility or c rit ic al f low co efficient factor of the gas m ixture. The thermodynam ic properties of only the highest c oncentration gas are used. Therefore, the unc ertainty in the measured f low is increased and the m ethod is best when the highest concentration gas is greater than 90% of the mixture.

To use this feature, set the molbox1+ [GAS] (see Section 3.4.2) to the hig hest concentration gas, then adjust the flow multiplier by:

For example, to adjust a gas mix that is 95 % Nitrogen (N

) and 5 % Oxygen (O2):

 Calculate the molecular weight of the mix.

molecular weight = 28.016

molecular weight = 31.999

Mix molecular weight = (28.016 x 0.95) + (31.999 x 0.05) = 28.215

 Select N

, the highest concentration gas, as the molbox1+ gas.

 Calculate:  Set flow multiplier in ADJ function to 1.0071.  OPERATION

To access the ADJ function press [SETUP] and select <3adj>. The display is:

Edit the values as des ired. Pressing [ENTER] returns you to the M AIN run screen with the edited adder and multiplier values applied.

 Caution

• The adder is expressed in current flow units and is NOT automatically

converted when flow units are changed. Adder values must be entered in the current flow units. The multiplier is dimensionless.

• The flow adder and multiplier of the ADJ function, if different from 0 and 1,

alter the flow readings made by the molbox1+. The ADJ function is always "ON" with no indication on the run screen of the current adder and multiplier values and will be applied to the flow value of any attached molbloc. When using adders and multipliers, great caution should be taken to en sur e that the y are ente red an d ch ang ed co rrect ly an d th at th ey are 0 and 1 if no adder or multiplier effect is desired.

3.5.4 <4A_B>

 PURPOSE

To turn ON and OFF speci al molbox1+ operating m odes that use molbox1+ channels A and B together.

 PRINCIPLE

There are two A_B m odes. In both of these modes molbox automatic ally switches between the molblocs on its two channels and uses readings from both. The two A_B modes are:

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3. OPERATION

• Additive mode (A+B) (see Section 3.5.4.2).

The additive mode sum s the f low on cha nnels A a nd B . It is des igned f or us ing two m olblocs in parallel to measure flows greater than the maximum flow range of a single molbloc.

• Ratiometric mode (A/B) (see Section 3.5.4.3).

The ratiometric m ode deter mines the ratio of the flow through two molblocs. This can provide a convenient, s ystem contr olled, m ethod for c omparin g molblocs to deter mine t he coher ence between different ranges.

3.5.4.1 General Operation (Aspects Common to Both A_B Modes)

To access A_B modes, press [SETUP], <4A_B> and select the desired m ode (<1A+B>, <2A/B>). Once the mode is s elected, molbox1+ ret urns to the MAIN run screen with the s elected m ode active. An indication of the active A_B mode will be in the lower right of the MAIN run screen when space is available. To cancel operation of an A_B mode, press the [A/B] function key (see Section

3.4.7) and operation returns to normal single channel mode.

When operating in an A_B mode, channel A is the dominant channel so the channel specific functions applied (gas, flow unit, stability test, K factor, etc.) will be those currentl y selected for channe l A. Tare and leak check still apply to each channel individually. Purge automatically purges channel A and then channel B (see Section 3.4.4).

When in an A_B mode, the channel indicator LED switches between channels showing the channel that is currently active. The P&T function displays (see Section 3.4.5) also switch as molbox1+ switches from channel to channel to display values for the currently active channel.

In an A_B mode, molbox1+ reads on one c hannel u ntil either a Ready reading is obtained or for up to 10 seconds, whichever comes firs t. If the last two single channel readings were Ready, the A+B or A/B result is displayed as Ready. If one or both of the last two single cha nnel readings was Not Ready, the A+ B or A/B result is displayed as Not Ready (see Sec tion 3.1.3).

Note

• It is helpful to set the molbox1+ st abilit y setting as low as is

practical in any A_B mode to allow for flow stab ilization on each chann el. T o chan ge t he mo lbo x stab il it y sett ing , sel ect [SETUP], <2stab> (see Section 3.5.2).

• In A_B mode operati on, molbox1+ may sta y on one chann el

up to 10 seconds waiting for a Ready reading. The first valid reading after entering A_B mode may require 20 seconds and subsequent readings up to 10 seconds.

• It is not possible to operate A_B modes when the active BPR

mode is Auto due to internal valving conflicts. molbox1+ will deny acce ss to the A_B mo des if the curr ent BPR mode i s Auto and will not allow the user to select Auto mode when an A_B mode is active (see Section 3.6.9).

• A+B and A_B mode are supported only when molblocs of

the same type are used. For example molbloc-S and molbloc-S. The option is not availabl e for a molboc-S and molbloc-L combinati on

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* 45.0775 slm N2 R 0.002/s A+B

3.5.4.2 A+B mode

 PURPOSE

To operate two molblocs simultaneously on molbox1+ channels A and B and obtain a flow rate which is the sum of the flow through the two molblocs.

 PRINCIPLE

In A+B mode molbox1+ makes measurements on one channel and then the other channel. The f low rate dis played is the sum of the two m ost rec ent channel readings, updated each time a channel reading is complete. This allows two molblocs to be used togeth er in parallel to m easure flo ws greater than the ra nge of a single molbloc.

 SET UP

Best results with A+B m ode are obtained when th e two molblocs are mounted in parallel, symmetr ically. A comm on regulator should b e used with as litt le tubing, fittings, etc., as possible between the point where flow is split upstream of the two molblocs and rejoined downstream. Standard hardware setups (molstics) for A+B operation are available from DHI.

 OPERATION

To activate A+B mode, pre ss [SETUP], select <4A_B> and then select <1A+B>. molbox1+ returns to the MAIN r un scr een in A+B m ode. The MAIN run sc reen in A+B mode is:

1. Ready/Not Ready indication.

2. Sum of channel A and channel B's two m ost recent flow rate readings and the unit of flow.

3. The gas that is being flowed.

4. Rate of c hange of flow for the A+B resul ts in units of flow per second.

5. Indication that A+B mode is active (if space is available).

The MFC run screens ( if the molbox1+ has the option al MFC control f eature) are unchanged except that the top line indications are A+B flow.

3.5.4.3 A/B Mode

 PURPOSE

To operate two molblocs simultaneously on molbox1+ channels A and B and display the ratio of their flow rates.

 PRINCIPLE

In A/B mode, molbox1+ makes measurements on one channel and then the other channel. The individual flow rate meas ured by each channel is d isplayed as it is read and information on the ratio and disagreement between the two channels is also calculated and displayed.

This function is intended to provide a convenient, system controlled, means of comparing two m olblocs, for example to chec k the coherence of m easurements made by different molblocs.

 SET UP

When using A/B mode to c ompare two molblocs, the two molblocs are connected in series. The volume bet ween the two should be minimi zed and the upstream pressure regulation sho ul d be as stabl e as pos sib le t o f ac ilitat e the est ablishment of the stea dy sta te f low co ndit ion t hat m ust ex ist f or a valid c om paris on to be ma de. When selecting the hardware setup for running an A/B mode comparison, it is

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