Fluke MOLBOX1 PLUS V 6.00 User Manual

molbox1+™/molbox1+S

molbloc

Terminal

(Ver. 6.00 and Higher)

Operation and Maintenance Manual

 Warning

High pressure liquids an d gases a re pot ential ly haz ardous. En erg y stored in th ese liquids and gases can be released unexpectedly and with extreme force. High pressure systems sh ould b e assemb led and op erated only by p ersonnel w ho hav e

Information in this document is subject to change without not ice. No part of t his document may be reproduced or transm itt ed in any form or by any means, electronic or mechanic al, for any purpos e, wit hout t he express written perm iss ion of Fl uke Corporation, DH

Instruments Division 4765 East Beautiful Lane Phoenix AZ 85044-5318 USA.

DH Instruments makes sincere efforts to ensure accuracy and quality of its’ publ ished materials; however, no warranty, expressed

or implied, is provided. DH Instruments disclaims any responsibility or liability for any direct or indirect damages resulti ng from the use of the information in this manual or products described in it. Menti on of any product does not constitut e an endorsement by DH Instruments of that product. This manual was originally composed in English and was subsequently translated into other languages. The fidelity of the translation cannot be guaranteed. In case of conflict between the English version and other language versions, the English version predominates.

been instructed in proper safety practices.

DH Instruments, DH, DHI, molbox1, molbox1+, molbloc, molbloc-L, molbloc-S, molstic, COMPASS, CalTool are trademarks,

registered and otherwise, of Fluke Corporation, DH Instruments Division. VCR is a registered trademark of the Swagelok Company.

Viton is a registered trademarks of DuPont deNemours Company. Windows is a registered trademark of Microsoft Corporation.

Document No. 3540962 100226 Printed in the USA.

Table of Contents ................................................................... I

Tables .................................................................................. V

Figures ................................................................................ VI

About This Manual ............................................................... VII

1. Introduction ..................................................................... 1

1.1 Product Overview ................................................................................................................................... 1

1.1.1 molbloc Flow Elements ........................................................................................................................... 2

1.1.1.1 molbloc-L Flow Element ......................................................................................................................... 2

1.1.1.2 molbloc-S Flow Element ......................................................................................................................... 3

1.2 Specifications ......................................................................................................................................... 3

1.2.1 General Specifications ............................................................................................................................. 3

1.2.2 Reference Pressure Transducer (RPT) Specifications .......................................................................... 4

1.2.3 Temperature Measurement Specifications ............................................................................................. 4

1.2.4 MFC Control Function (Optional) Specifications ................................................................................... 5

1.2.5 Flow Measurement Specifications .......................................................................................................... 5

1.2.5.1 molbloc-L ............................................................................................................................................... 5

1.2.5.2 molbloc-S ............................................................................................................................................... 9

1.2.6 Front and Rear Panels ........................................................................................................................... 24

1.2.6.1 Front Panel .......................................................................................................................................... 24

1.2.6.2 Rear Panel ........................................................................................................................................... 24

2. Installation ..................................................................... 25

2.1 Unpacking and Inspection ................................................................................................................... 25

2.1.1 Removing From Packaging ................................................................................................................... 25

2.1.2 Inspecting Contents ............................................................................................................................... 25

2.2 Site Requirements ................................................................................................................................ 25

2.3 Initial Setup ........................................................................................................................................... 26

2.3.1 Preparing for Operation ......................................................................................................................... 26

2.3.2 Power Connection .................................................................................................................................. 26

2.3.3 molbox1+ to molbloc Connections ....................................................................................................... 27

2.3.4 Gas Supply and Flowpath Connections ............................................................................................... 27

2.3.5 Vacuum Supply (molbloc-S only) .......................................................................................................... 28

2.3.6 Communications Connections .............................................................................................................. 28

2.3.7 MFC Control Option Connection ........................................................................................................... 29

2.4 Power UP and Verification ................................................................................................................... 29

2.4.1 Powe r UP ................................................................................................................................................ 29

2.4.2 Check Proper Pressure Measurement Operation................................................................................. 29

2.4.3 Check Proper Temperature Measurement Operation .......................................................................... 29

2.4.4 Check the MFC Control Function (Optional) ........................................................................................ 30

2.4.5 Leak Check ............................................................................................................................................. 30

2.4.6 Check/Set Security Level ....................................................................................................................... 30

2.5 Additional Precautions to Take Before Making Flow Measurements .............................................. 30

2.6 Short Term Storage .............................................................................................................................. 31

3. Operation ....................................................................... 33

3.1 General Operating Principles .............................................................................................................. 33

3.1.1 molbloc Channel A & Channel B ........................................................................................................... 33

3.1.2 molbloc-L and molbloc-S Operation ..................................................................................................... 33

3.1.3 Flow Ready/Not Ready Indication ......................................................................................................... 34

3.1.3.1 molbloc-L Operation ............................................................................................................................. 34

3.1.3.2 molbloc-S Operation............................................................................................................................. 34

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

3.1.4 Reference Pressure Transducer (RPT) Overpressure ......................................................................... 35

3.1.5 molbloc-S BPR Limits ............................................................................................................................ 35

3.2 Main Run Screen .................................................................................................................................. 36

3.2.1 molbloc-L Operation .............................................................................................................................. 37

3.2.2 molbloc-S Operation .............................................................................................................................. 38

3.3 Manual Operation ................................................................................................................................. 39

3.3.1 Keypad Layout and Protocol ................................................................................................................. 39

3.3.2 Direct Function Keys Summary ............................................................................................................ 40

3.4 Direct Function Keys............................................................................................................................ 41

3.4.1 [K] ............................................................................................................................................................ 41

3.4.2 [GAS]....................................................................................................................................................... 42

3.4.2.1 molbloc-L Operation ............................................................................................................................. 43

3.4.2.2 molbloc-S Operation............................................................................................................................. 44

3.4.3 [UNIT] ...................................................................................................................................................... 46

3.4.3.1 Mass Flow vs. Volume Flow ................................................................................................................. 47

3.4.3.2 Volumetrically Based Mass Flow Units ................................................................................................. 48

3.4.3.3 Volumetrically Based Mass Flow Units at Various Reference Temperatures (UXXX) ........................... 49

3.4.3.4 Volume Flow Units (vlm)....................................................................................................................... 49

3.4.3.5 Customizing FLOW Units Available Under The UNIT Function ............................................................. 50

3.4.4 [TARE] ..................................................................................................................................................... 51

3.4.4.1 <1Tare> ............................................................................................................................................... 52

3.4.4.2 <2Purge> ............................................................................................................................................. 56

3.4.4.3 <3Leak Check> .................................................................................................................................... 57

3.4.4.4 <4AutoZ> ............................................................................................................................................. 64

3.4.4.5 <5BPR> (molbloc-S Operation Only) .................................................................................................... 69

3.4.5 [P&T] (Pressure and Temperature) ....................................................................................................... 70

3.4.5.1 molbloc-L Operation ............................................................................................................................. 71

3.4.5.2 MOLBLOC-S operation ........................................................................................................................ 71

3.4.6 [DISPLAY] ............................................................................................................................................... 72

3.4.6.1 <1Rate> ............................................................................................................................................... 73

3.4.6.2 <2Avg> (Average) ................................................................................................................................ 74

3.4.6.3 <3 Hi/Lo> ............................................................................................................................................. 74

3.4.6.4 <4Total> (Totalizer) .............................................................................................................................. 75

3.4.6.5 <5Unit> ................................................................................................................................................ 77

3.4.6.6 <6Deviation> ........................................................................................................................................ 78

3.4.6.7 <7Freeze> ............................................................................................................................................ 80

3.4.6.8 <8Clean> ............................................................................................................................................. 80

3.4.7 [A/B] ........................................................................................................................................................ 81

3.4.8 [MFC](Optional) ...................................................................................................................................... 81

3.4.8.1 MFC Run Screens ................................................................................................................................ 82

3.4.8.2 MFC Profiles ........................................................................................................................................ 83

3.4.8.3 Units of Measure When Using the MFC Control Option ........................................................................ 83

3.4.9 [RES] ....................................................................................................................................................... 84

3.5 [SETUP] ................................................................................................................................................. 84

3.5.1 <1molbloc> ............................................................................................................................................. 85

3.5.1.1 molbloc-L and molbloc-S Size and Range Designations ....................................................................... 86

3.5.2 <2stab> ................................................................................................................................................... 87

3.5.3 <3ADJ> ................................................................................................................................................... 87

3.5.4 <4A_B> ................................................................................................................................................... 88

3.5.4.1 General Operation (Aspects Common to Both A_B Modes) ................................................................. 89

3.5.4.2 A+B mode ............................................................................................................................................ 90

3.5.4.3 A/B Mode ............................................................................................................................................. 90

3.5.5 <5MFC> ................................................................................................................................................... 91

3.5.6 <6REG> ................................................................................................................................................... 92

3.5.7 <7FLOWU> .............................................................................................................................................. 93

3.5.8 <8PRESU> .............................................................................................................................................. 93

3.5.9 <9TEMPU> .............................................................................................................................................. 94

3.6 [SPECIAL] ............................................................................................................................................. 95

3.6.1 <1reset> .................................................................................................................................................. 95

3.6.1.1 <1sets> ................................................................................................................................................ 96

3.6.1.2 <2units> ............................................................................................................................................... 96

3.6.1.3 <3MFC> ............................................................................................................................................... 97

3.6.1.4 <4cal> .................................................................................................................................................. 97

3.6.1.5 <5all> ................................................................................................................................................... 97

3.6.2 <2level> ................................................................................................................................................... 98

3.6.2.1 Security Levels ..................................................................................................................................... 98

3.6.3 <3UL> .....................................................................................................................................................101

3.6.3.1 Upper Limit Alarm and Sequence ........................................................................................................102

3.6.4 <4cal>.....................................................................................................................................................102

3.6.5 <5Prefs> .................................................................................................................................................102

3.6.5.1 <1ScrSVR> .........................................................................................................................................103

3.6.5.2 <3ID> ..................................................................................................................................................103

TABLE OF CONTENTS

3.6.5.3 <3Time> ..............................................................................................................................................104

3.6.6 <6REMOTE> ..........................................................................................................................................104

3.6.6.1 COM1 and COM2 ...............................................................................................................................105

3.6.6.2 IEEE-488.............................................................................................................................................105

3.6.6.3 RS232 Self-Test ..................................................................................................................................105

3.6.7 <7Drivers> .............................................................................................................................................106

3.6.8 <8Head> .................................................................................................................................................106

3.6.9 <9BPR> ..................................................................................................................................................107

4. Remote Operation ......................................................... 111

4.1 Overview ............................................................................................................................................. 111

4.2 Interfacing ........................................................................................................................................... 111

4.2.1 RS232 Interface .....................................................................................................................................111

4.2.1.1 COM1 .................................................................................................................................................112

4.2.1.2 COM2 .................................................................................................................................................112

4.2.2 IEEE-488 (GPIB) .....................................................................................................................................113

4.3 Commands .......................................................................................................................................... 113

4.3.1 Command Syntax ..................................................................................................................................113

4.3.2 Command Summary .............................................................................................................................113

4.3.3 Error Messages .....................................................................................................................................115

4.3.4 Command Descriptions ........................................................................................................................116

4.3.4.1 IEEE Std. 488.2 Common and Status Commands ...............................................................................116

4.3.4.2 molbox1+ commands ..........................................................................................................................118

4.4 Statu s System ..................................................................................................................................... 138

4.4.1 Status Reporting System ......................................................................................................................138

4.4.1.1 Status Byte Register............................................................................................................................138

4.4.1.2 Standard Event Register .....................................................................................................................140

5. Maintenance, Adjustments and Calibration ...................... 141

5.1 Product Overview ............................................................................................................................... 141

5.2 Calibration Of Reference Pressure Transducers (RPTS) .................................................................... 142

5.2.1 Principle .................................................................................................................................................142

5.2.1.1 PA and PM Coefficients ......................................................................................................................142

5.2.2 Equipme nt Require d .............................................................................................................................143

5.2.3 Set-Up and Preparation ........................................................................................................................143

5.2.4 Viewing and Editing RPT Readings and Calibration Information .......................................................144

5.2.4.1 Viewing RPT outputs ...........................................................................................................................144

5.2.4.2 Viewing and Editing RPT PA, PM and Calibration Date ...........................................................................145

5.2.5 RPT Calibration/Adjustment Procedure Without Using CalTool for RPTs Software.........................146

5.3 MFC Control Function Adjustment ................................................................................................... 148

5.4 OHMIC Measurement [Temperature] System Verification .............................................................. 149

5.4.1 OHMIC Measurement System Calibration/Adjustment Procedure .....................................................151

5.5 molbloc Flow Adjustment .................................................................................................................. 152

5.5.1 molbloc Adjustment Procedure Without Using CalTool for molbloc Software .................................153

5.6 Reloading Embedded Software Into molbox1+ Flash Memory ...................................................... 154

5.7 Reloading molbloc EEPROM File ...................................................................................................... 154

5.8 OVERHAUL ......................................................................................................................................... 154

6. Troubleshooting............................................................ 157

6.1 Overview ............................................................................................................................................. 157

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

7. Appendix ...................................................................... 163

7.1 Conversion of Numerical Values ...................................................................................................... 163

7.1.1 Pressure ................................................................................................................................................163

7.1.2 Temperature ..........................................................................................................................................163

7.1.3 Flow .......................................................................................................................................................164

7.2 Valve Drivers ....................................................................................................................................... 166

7.3 MFC Control Function ........................................................................................................................ 168

7.3.1 MFC Connector .....................................................................................................................................168

7.3.1.1 Detailed Signal Descriptions ................................................................................................................168

7.3.1.2 Popular Configurations ........................................................................................................................169

7.4 Warranty Statement ........................................................................................................................... 171

8. Glossary ...................................................................... 173

Tables

Table 1. molbloc-L Pressure Dependent Calibration Types ........................................................................ 7

Table 2. molbloc-L Ranges with Low Pressure and Downstream Calibrations ........................................... 7

Table 3: molbloc-L Ranges with High Pressure Calibrations ...................................................................... 8

Table 4: molbloc-S Calibration Types ......................................................................................................... 11

Table 5: N2. molbloc-S Flow in Nitrogen at Various molbloc Upstream Pressures ................................... 13

Table 6: Ar. molbloc-S Flow in Argon at Various molbloc Upstream Pressures ........................................ 13

Table 7: He. molbloc-S Flow in Helium at Various molbloc Upstream Pressures ..................................... 14

Table 8: SF6. molbloc-S Flow in Sulfur Hexafluoride at Various molbloc Upstream Pressures ............... 14

Table 9: Xe. molbloc-S Flow in Xenon at Various molbloc Upstream Pressures ...................................... 15

Table 10: C4H10. molbloc-S Flow in Butane at Various molbloc Upstream Pressures ............................ 15

Table 11: C2H6. molbloc-S Flow in Ethane at Various molbloc Upstream Pressures .............................. 16

Table 12: C2H4. molbloc-S Flow in Ethylene at Various molbloc Upstream Pressures ........................... 16

Table 13: H2. molbloc-S Flow in Hydrogen at Various molbloc Upstream Pressures .............................. 17

Table 14: CH4. molbloc-S Flow in Methane at Various molbloc Upstream Pressures.............................. 17

Table 15: C3H8. molbloc-S Flow in Propane at Various molbloc Upstream Pressures ............................ 18

Table 16: CF4. molbloc-S Flow in Carbon Tetrafluoride at Various molbloc Upstream Pressures ........... 18

Table 17: C2F6. molbloc-S Flow in Hexafluoroethene at Various molbloc Upstream Pressures ............. 19

Table 18: CHF3. molbloc-S Flow in Trifluoromethane at Various molbloc Upstream Pressures .............. 19

Table 19: Air. molbloc-S Flow in Air at Various molbloc Upstream Pressures .......................................... 20

Table 20: CO2. molbloc-S Flow in Carbon Dioxide at Various molbloc Upstream Pressures .................. 20

Table 21: CO. molbloc-S Flow in Carbon Monoxide at Various molbloc Upstream Pressures ................. 21

Table 22: N2O. molbloc-S Flow in Nitrous Oxide at Various molbloc Upstream Pressures ..................... 21

Table 23: C4F8. molbloc-S Flow in Octafluorocyclobutane1 at Various molbloc Upstream Pressures .... 22

Table 24: O2. molbloc-S Flow in Oxygen at Various molbloc Upstream Pressures .................................. 22

Table 25: molbox1+ Parts List .................................................................................................................... 25

Table 26: Minimum molbloc-S Critical Flow (slm) in Nitrogen at Various molbloc-S

Downstream Pressures ........................................................................................................... 36

Table 27: Summary of molbox1+ Direct Function Key Operations ............................................................ 40

Table 28. Available molbloc-L Gases ........................................................................................................ 43

Table 29. Available Flow Units ................................................................................................................... 50

Table 30. Flow Units and Corresponding Total Mass or Volume Units ..................................................... 77

Table 31. molbloc-L Si ze and Nominal Range Designations ..................................................................... 86

Table 32. molbloc-S Size and Pressure to Flow Conversion Ratio (KF) .................................................... 86

Table 33. Pressure Units of Measure Available ......................................................................................... 94

Table 34. Security Levels - Functions NOT Executed Per Function/Level ................................................ 99

Table 35. COM1 and COM2 Available Settings....................................................................................... 105

Table 36. COM1 DB-9F Pin Designation ................................................................................................. 112

Table 37. COM2 DB-9M Pin Designation ................................................................................................ 112

Table 38. Command Summary ................................................................................................................ 113

Table 39. Error Messages ........................................................................................................................ 115

Table 40. Status Byte Register ................................................................................................................ 138

Table 41. Standard Event Register .......................................................................................................... 140

Table 42. Troubleshooting Checklist ........................................................................................................ 157

Table 43. Pressure Unit Conversions ...................................................................................................... 163

Table 44. Temperature Unit Conversion .................................................................................................. 163

Table 45. Conversions from kg/s to sccm at 0 °C for Various Gases ...................................................... 164

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Table 46. Conversions from sccm at 0 °C to Other Volumetrically Based Flow Units............................. 164

Table 47. Conversions from Volumetrically Based Flow Units at 0 °C to

Corresponding Units at Another Temperature (uxxx)............................................................ 165

Table 48. Conversions from kg/s to mole/s for Various Gases ................................................................ 165

Table 49. Conversion from mole/s to pccm ............................................................................................. 165

Table 50. Conversion from sccm at 0 °C to Volume Flow Units at

Another Pressure and Temperature ...................................................................................... 166

Table 51. Driver/Max Current Per Output ................................................................................................ 166

Table 52. External Drivers........................................................................................................................ 167

Table 53. Interface Cable Building Instructions ....................................................................................... 168

Table 54. Common MFC Connector Pin Out ........................................................................................... 170

Table 55. Brooks MFC Connector Pin Out .............................................................................................. 170

Table 56. DHI Author i zed Serv ice Pr ovid er s ........................................................................................... 171

Figures

Figure 1. molbox1+ Front Panel ................................................................................................................. 24

Figure 2. Rear Panel .................................................................................................................................. 24

Figure 3. molbox1+ Internal Pneumatic Schematic - CHANN EL A ACTIVE, molbloc-L OPERATION ..... 33

Figure 4. Keypad Layout ............................................................................................................................ 39

Figure 5. molbox1+ Internal Pneumatic Schematic – ................................................................................ 52

Figure 6. molbox1+ Internal Pneumatic Schematic –

TARING CHANNEL A, molbloc-S OPERATION ..................................................................... 55

Figure 7. molbox1+ Internal Pneumatic Schematic – PURGING CHANNEL A ........................................ 56

Figure 8. molbox1+ Internal Pneumatic Schematic - LEAK CHECK molbox CHANNEL A ....................... 59

Figure 9. molbox1+ Internal Pneumatic Schematic - SYSTEM LEAK CHECK -

CHECKING OFFSET AND STABILITY ................................................................................... 60

Figure 10. molbox1+ Internal Pneum atic Schem atic - SYSTEM LEAK CHECK ON CHANNEL A -

CHECKING OFFSET AND STABILITY ................................................................................... 63

Figure 11. molbox1+ Internal Pneum atic Schem atic – molbloc-S OPERATION,

CHANNEL A, BPR ON .......................................................................................................... 108

Figure 12. molbox1+ Internal Pneum atic Schem atic – molbloc-S OPERATION,

CHANNEL A, BPR OFF ........................................................................................................ 108

Figure 13. Status Byte Register ............................................................................................................... 139

Figure 14. molbox1+ Internal Pneum atic Schem atic - ............................................................................. 145

Figure 15. Cable Driver Ports .................................................................................................................. 167

About This Manual

This manual pr ovides the user with the information necessar y to operate a molbox1+ and a molbox1 +S molbloc terminal with molbloc mass flow elements to make mass flow measurements. Unless stated otherwise, references to molbox1+ also include molbox1+S. It a lso includes a great d eal of additional information provided to he lp you optimize use of a molbloc/ molbox1+ system and take full advantage of its many features and functions.

Before using the manual, take a moment to familiarize yourself with the Table of Contents structure. All first tim e molbox1+ users should rea d Sect ion 1. S ection 3.1 pr ovides a com prehensi ve desc ription of general molbox1+ operating principles. Section 4. is for remote operation from an external computer. Section 5 provides m aintenance and calibratio n information. Section 6 is a quick troub leshooting guide. Use this section to troubleshoot unexpected molbox1+ behavior based on the symptoms of that behavior.

Cross references are used extensively to direct you towards additional information on a topic. Cross references ar e generally in parentheses an d give the reference’s sect ion number. For example: (see Section 11).

Certain words and expressions have specific meaning as they pertain to molbox1+. The Glossary Section is useful as a quic k reference for exac t definition of specific words and expressions as they are used in this manual.

Note

For those of you who “don’t read manuals”, go directly to section 2.3, initial setup, to set up your molbox1+. Then go to section 2.4, power up and verification. This will get you running quickly with minimal risk of causing damage to yourself or your molbox1+. Then… when you have questions or start to wonder about all the great features you might be missing, get into the manual!

Manual Conventions

 Caution

“Caution” is used in throughout the manual to identify conditions or actions that could cause harm to the molbox1+ or to the devices that are connected to the molbox1+.

 Warning

“Warning” is used in throughout the manual to identify actions that could pose a hazard to the user of the molbox1+.

Note

“Note” is used throughout the manual to identify operating and applications advice

[ ] Indicates direct function keys (e.g., [RANGE]). < > Indicates molbox1+ screen displays (e.g., <1yes>).

and additional explanations.

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Notes

1. Introduction

1.1 Product Overview

molbox1+ a nd m olbox1+S are support units for making gas f low m easurem ents using m olbloc m ass f low elements. Although the molbox1+ and the molbox1+S are separate products their functions and operation are virtua lly identical. The ke y difference is that molbox1+ S is designed f or higher flo ws and it only supports molbloc-S mass f low elements. A molbox1+ sup ports bot h molbloc -L and m olbloc-S. Each product reads calibration data from a molbloc EEPROM and measures molbloc upstream and downstream pressur e using built-in high precision Referenc e Pressure Transducers (RPTs). There are several RPT range specific m odels in the molbox1+ product line: molbox1+ A350K, molbox1+ A700K, molbox1+S A1.4M and molbox1+ S A2M .

An ohmic measurement s ystem reads the resistance of the molbloc platinum resistance thermometers from which the molbloc temperature is calculated. Using the molbloc calibration data, measured pressures and temper ature and gas prop erties s tored in m emory, the flo w rate of the gas f lowing throug h the molbloc is calculated.

Internal molbox1+ valves support on-board PRESSURE TRANSDUCER TARING, molbloc-S BPR MODES, LEAK TESTING and SELF PROTECT ION functions as we ll as a GAS PURGE r outine. The m olbox1+S does not support PRESSURE TRANSDUCER TARING as it does not support m olbloc -L oper ation a nd does not include a bypass valve to conn ect the up strea m and downs tream RPTs.

molbox1+ provides a local user interf ace via a front panel key pad and displa y and includes advanced on-board functions. Remote communication capability is supported with RS232 and IEEE-488 interfaces.

molbox1+ is equippe d to handle molblocs on two s ep ar ate cha nnels. This allows easy switching between two different molblocs as well as certain special dual channel functions. Internal valving switches the molbox1+ pressure transducers from one molbloc to the other as needed.

molbox1+ is intended f or a pplicati ons i n which minimizing meas urem ent uncer taint y is the m os t important requirement and/or integrated control of mass flow controllers (MFCs) is needed. A second model, molbox RFM, is available for applications where a compact presentation and lower cost are the most dominant requirements.

molbox1+ replaces the Fluke/DHI molbox1 product line. molbox1+ introduces several product improvements over molbox1 including:

• Support for Q-RPT pressure sensor technology to improve linearity and precision on pressure

measurements.

• Improved gas property uncertainty using data from NIST Reference Fluid Thermodynamic and

Transport Properties Database (REFPROP).

• Support of expanded molbloc modelization and polynomial linearization data structure and

calculations. This new molbloc data structure allows greatly improved flow measurement performance across the supported operat ing pressure and flow /Reynolds number ranges. This new model makes the Premium calibration option and resulting specifications possible.

• Support for “named” molbloc calibrations – allowing storage of multiple pressure-dependent

calibrations in each gas o n a molbloc. Also pr ovides for s tated operating lim its of pressure, f low and Reynolds number to be stored on the molbloc so the molbox1+ can alert the user of operating conditions that are outside of the calibrated parameters, avoiding out of tolerance measurements.

• Simplified internal pneumatic design.

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

For easy identification, ne w molbox1+ terminals are produced with serial num bers of 2000 and higher. Older molbox1 term inals may be eligible for upgrade to m olbox1+ hardware, softwar e and specifications by Fluke/DHI.

1.1.1 molbloc Flow Elements

Two different types of molblocs may be used with molbox1+; molbloc-L (laminar) and

molbloc-S (sonic). m olbox1+ supports operation with new or upgraded molblocs that have

the updated data str ucture to tak e advant age of m olbox1+ version 6. 00 or later features, a nd

also supports operation with older molblocs that do not have a version 6.00 data format.

Premium calibrations and a ssociated specif ications ar e only an option for m olblocs that have

the version 6.00 format.

1.1.1.1 molbloc-L Flow Element

molbloc-L is the original molbloc laminar flow element. molbloc-L covers the lower portion of the molbloc/molbox1+ system flow range. The key molbloc-L measurement is the differential pressure across the element, which is roughly proportional to the mass flow rate through it. molbloc-L elem ents are calibrated to be used at an absolute pressure which remains nearly constant, while the differential pressure varies with flow rate. Different operating pressure options and their effect on molbloc flow range are described in Section 1.2.5.1.1.

In addition to the new data structure and modelization methods that became available for molblocs with the introduction of m olbox1+, all molbloc-L elem ents of range 1E1-L to 3E4-L produced or upgrad ed af ter the rele ase of m olbox1+ are equipped standard with an upstream ¼” VCR flange, or f lowpath conn ectio n, that has an integrated sint ered m etal filter. T his filter is intende d to be a l ast defens e against particulate contamination of the molbloc-L internal flowpath which can affect molbloc-L measurements. Every effort should still be made to supply clean dry gas to the molbloc to ensure its measurement performance and long-term stability. molblocs that have the integrated upstrea m filter are recognizable by the visible filter element as shown below.

Figure 1: molbloc-L Upstream End Flange with Integrated Filter

New molbloc-L elements produced with molbox1+ calibration data structure, premium calibration options, and integrate d filter hardware can be identified b y having a serial number of 6000 or higher. Most older molbloc-L elements are eligible for upgrade to this hardware/v er sion 6.0 0 format by Fluke/DHI.

1. INTRODUCTION

Pressure Connections

Quick connectors equivalent to Swagelok® QM Series (M2-B200)

Ω

Stability of 100 and 110 Ω reference resistors

1.1.1.2 molbloc-S Flow Element

molbloc-S elements use critical (sonic) flow venturi nozzle technology to measure flows which overlap with th e ranges of molbloc-L an d cover the hig her end of the molbloc/molbox1+ system flow range. T he mass flow rate through a molbloc-S element is roughly propor tional to the upstr eam absolute pres sure when the f low is “choked”, so the m olbloc-S operating pressure can vary widely as the mass flow rate is changed throug hout t h e f lo w range. T he li mits of molbloc-S operatin g pressure and flow ranges are defined by the molbloc-S calibration type, described in Section 1.2.5.2.2.

New calibration data structure and premium calibration options for molbloc-S were also introduce d along with molbox1+. m olbloc-S elements produced with this support will h av e s eri al number of 4000 or h igh er. O ld er molbloc-S elem ents are eligible for upgrade to version 6.00 format by Fluke/DHI.

1.2 Specifications

1.2.1 General Specifications

Power Requirements

Fuse

Operating Temperature Range

Storage Temperature Range

Vibration

Weight

Dimensions

Microprocessor

Communication Ports

Reference Pressure

Transducers(RPTs)

Pressure Limits molbox1+ A350K

85 to 264 VAC, 50 to 60 Hz, 22 VA max. consumption 1A/250V, slow blow, 5x20mm, NSN: 5920008930491 15 to 35 °C

- 20 to 70 °C Meets MIL-T-28800D

6.8 kg (15 lb) max. 32 cm W x 12 cm H x 30 cm D

(12.6 in. x 4.7 in. x 11.8 in.) approx. Motorola 68302, 16 MHz RS232 (COM1), RS232 (COM2), IEEE-488 molbox1+ A350K 2 x 300 kPa (44 psia) calibrated range

oscillating quartz crystal molbox1+ A700K 2 x 600 kPa (87 psia) calibrated range

oscillating quartz crystal molbox1+S A1.4M 1 x 1200 kPa (174 psia) calibrated range

oscillating quartz crystal, 1 x 300 psi silicon based molbox1+S A2M 1 x 2000 kPa (290 psia) calibrated range

oscillating quartz crystal, 1 x 300 psi silicon based

Maximum working pressure 300 kPa absolute (36 psia) Maximum pressure without damage 350 kPa absolute (50 psia)

molbox1+ A700K

Maximum working pressure 600 kPa absolute (87 psia) Maximum pressure without damage 700 kPa absolute (115 psia)

molbox1+S A1.4M Maximum working pressure 1200kPa absolute (203 psia) Maximum pressure without damage 1500 kPa absolute (218 psia)

molbox1+S A2M Maximum working pressure 2000 kPa absolute (290 psia) Maximum pressure without damage 2200 kPa absolute (320 psia)

Ohmic Measurement System

Resolution 0.004 Ω Accuracy ± 0.04 Ω Accuracy of 100 and 110

reference resistors ± 0.01 %

± 0.005 % per 3 yrs

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Gases Supported molbloc-L and molbloc-S

Nitrogen (N2), dry Air, humid Air (molbloc-S only) , Argon (Ar), Butane (Butn), Carbon Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2), Carbon Tetrafluoride (CF4), Octofluorocyclobutane (C4F8), Ethane (C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6), Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Xenon (Xe)

Flow Ranges

Valve Driver Option

CE Conformance

See Section 1.2.5. (8) 12 V outputs.

Each output can sink,500 mA at 12 V, max. 1 A total (see Section 7.2). Available. Must be specified.

1.2.2 Reference Pressure Transducer (RPT) Specifications

Type

Calibrated Range A350K 20 to 300 kPa absolute (2.9 to 44 psia)

Resolution A350K 0.4 Pa (0.00005 psi)

Accuracy A350K

Oscillating quartz crystal with mechanical bellows

A700K 20 to 600 kPa absolute (2.9 to 87 psia) A1.4M 100 to 1200 kPa absolute (14.5 to 174 psia) A2M 100 to 2000 kPa absolute (14.5 to 290 psia)

A700K 0.7 Pa (0.0001 psi) A1.4M 1.4 Pa (0.0002 psi) A2M 2 Pa (0.0003 psi)

Absolute pressure whichever is greater)

Differential ± (4.2 Pa (0.0006 psi) or 0.026 % ΔP, whichever is greater)

A700K Absolute pressure

whichever is greater) Differential ± (8.4 Pa (0.0012 psi) or 0.032 % ΔP,

whichever is greater) A1.4M Absolute pressure

whichever is greater) A2M Absolute pressure

whichever is greater)

With regular use of Autozero. Add 0.005 % of Q-RPT span for one

year without use of AutoZero,

± (0. 01 % of reading or 0.003 % Q-RPT span,

± (0.01 % of reading or 0.003 % Q-RPT span,

1.2.3 Temperature Measurement Specifications

Specifications are f or molbloc m ounted Platin um Resistanc e Thermom eters (PRT) c ombined

with molbox1+ resistance measurement system and temperature calculation.

Range

Accuracy

Resolution

The molbox1+ internal resistance measurement system is automatically calibrated using

reference 100 and 110 Ω (± 0.01 %) resistors (see Section 5.4).

0 to 40 °C ± 0.05 °C

0.01 °C

1. INTRODUCTION

Voltage Accuracy

± 0.1 % FS

Voltage Resolution

0.1 mVDC

Current Range

4.01 to 20 mA

Current Accuracy

Current Resolution

Voltage Range

0 to 5.000 VDC

Min/Max Measurable Voltage

- 0.25/6.00 VDC

Voltage Accuracy

Voltage Resolution

1 mVDC

Current Range

4 to 20 mA

Current Accuracy

Current Resolution

Range

Accuracy

± 0.25 % FS

Resolution

Measurement Update

1 second

Range

Resolution

0.0015 % FS

Linearity

Repeatability

± 0.05 % of reading from 10 to 100 % FS,

Precision1

Stability

1.2.4 MFC Control Function (Optiona l) Specifications

Analog Output

Voltage Range

Analog Input

Valve Test Point

0 to 6.000 VDC

± 0.1 % FS

0.4 µA

± 0.1 % FS

0.4 µA

+ 2 to + 15 VDC (in reference to - 15 VDC)

2.5 mVDC

1.2.5 Flow Measurement Specifications

molbox1+ meas ures the f lo w t hrou gh molbloc flow elements. There are two di f ferent types of

molblocs, molbloc-L (laminar) (see Section 1.1.1.1) and molbloc-S (sonic) (see Section

1.1.1.2). Flow measurement specifications, calibration types, ranges and dimensions are

detailed separately for each molbloc type in section 1 .2.5.1 and 1.2.5.2. For both molbloc-L

and molbloc-S elements, there are separate performance specifications given for the

premium and standard calibr ation types that are offered. All f low measurem ent uncertainties

are valid only for measurents in a gas for which the molbloc is calibrated, and within the

range of pressures for which the calibration is specified.

1.2.5.1 molbloc-L

The flow range, useable operating pressure and absolute and differential pressure associated with molbloc -L operation depend on the molbloc used and its pressure-dependent calibration options (see Section1.2.5.1.3).

1.2.5.1.1 Standard molbloc-L Calibrations

Rate

0 to molbloc full scale depending on gas and molbloc pressure dependent calibration type (see Section 1.2.5.1.3)

(1 year)

± 0.05 % of reading from 10 to 100 % FS, ± 0.005 % FS under 10 % FS

± 0.005 % FS under 10 % FS ± 0.07 % of reading from 10 to 100 % FS,

± 0.007 % FS under 10 % FS ± 0.09 % of reading from 10 to 100 % FS,

± 0.009 % FS under 10 % FS

MOLBOX1+™/MOLBOX1+S, MOLBLOC TERMINAL OPERATION AND MAINTENANCE MANUAL

Measurement

± 0.2 % of reading from 10 to 100 % FS,

(N2 and any molbox1+

Uncertainty

supported gas for which

the molbloc in use is

calibrated)

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox1+ and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox1+ should be established from experience.

3 Measurement uncertainty (accuracy): Maximum deviation of the molbox1+ flow indication from the true value of

the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

± 0.02 % FS under 10 % FS

1E5 molbloc

± 0.5% of reading from 25 to 100 % FS, ± 0.125 % FS under 25 % FS

1.2.5.1.2 Premium molbloc-L Calibrations

Measurement Update

1 second

Rate

Range

0 to molbloc full scale depending on gas and molbloc pressure dependent calibration type (see Section 1.2.5.1.2)

Resolution

Linearity

0.0015 % FS

± 0.05 % of reading from 10 to 100 % FS, ± 0.005 % FS under 10 % FS

Repeatability

± 0.05 % of reading from 10 to 100 % FS, ± 0.005 % FS under 10 % FS

Precision

± 0.07 % of reading from 10 to 100 % FS, ± 0.007 % FS under 10 % FS

(1 year)

± 0.03 % of reading from 10 to 100 % FS, ± 0.003 % FS under 10 % FS

± 0.125 % of reading from 10 to 100 % FS,

± 0.0125 % FS under 10 % FS

1E5 molbloc-L Premium cal i brat i on not avail abl e

Stability

Measurement

Uncertainty

(N2 and any molbox1+

supported gas for which

the molbloc in use is

calibrated)

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox1+ and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox1+ should be established from experience.

3 Measurement uncertainty (accuracy): Maximum deviation of the molbox1+ flow indication from the true value of

the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

1.2.5.1.3 molbloc-L Pressure Dependent Calibration Types

Note

See your molbloc’s Calibration Report to determine the calibration type of the molbloc y o u ar e using.

Different pressure dependent c alibration options for molbloc-L elements determine the range of operating pressures over which a molbloc can be used within its mass flow measurement specifications. The calibration option also affects the molbloc flow range and the differential pressure associated with the flow range.

Measurement uncertainty (accuracy) specifications fo r molbloc-L are valid only for gases with which the molbloc has been calibrated. All molbloc-L elements are calibrated for N2. Calibratio ns with other gases ar e optional. DHI calibration capability is not maintained at all times for all gases on all m olbloc designations .

Check for availability before ordering calibrations. The molbloc-L pressure dependent calibration types are summarized in Table 1.

1. INTRODUCTION

PRESSURE AT MAX. FLOW

MOLBLOC

MOLBLOCS

105 kPa (12 to15 psia).

CARBONS

Table 1. molbloc-L Pressure Dependent Calibration Types

CAL IBRATION TYPE

(CALIBRATION NAME)

OPERATING PRESSURE

NOMINAL DIFFERENTIAL

1E5

ALL OTHER

Nitrogen Argon Ar Helium He Sulfur Hexafluoride

INERT

Xenon XE

Butane

Ethane

Ethylene

Hydrogen

FLAMMABLE

Methane

Propane

Carbon Tetrafluoride

Hexafluorethene

Trifluoromethane

FLUORO-

Air Air Carbon Dioxi de

Carbon Monoxide CO Nitrous Oxide

OTHER

Octafluorocyclobutane1

Oxygen

GASES

Low pressure (LOP)

High pressure (HIP)

Downstream (DOWN)

200 to 325 kPa absolute (29 to 48 psia) upstream of molbloc

325 to 525 kPa absolute (48 to 76 psia) upstream of molbloc

Atmospheric pressure downstream of molbloc. 85 to

5 kPa

(.725 psi)

Not available 50 kPa

12.5 kPa

80 kPa (12 psi)

(1.8 psi)

Note

Differential pressur e values are nominal and may v ary by up to 15 % with the actual molbloc used.

1.2.5.1.4 molbloc-L Ranges with Low Pressure and Downstream Calibrations

Table 2. molbloc-L Ranges with Low Pressure and Downstream Calibrations

molbloc-L SIZE AND FULL SCALE FLOW (sccm @ 0 ºC)

SIZE

1E1

5E1

10 50 100 200 500 1,000 5,000 10,000 30,000 100,000

10 50 100 200 500 1,000 5,000 10,000 30,000 80,000 10 50 100 200 500 1,000 5,000 10,000 30,000 100,000 10 50 100 200 500 1,000

10 40 80 150 400 800

4H1

2H6

2H4

3H8

2F6

CHF

4F8

20 100

20 100 200 400 1,000 2,000

16 80 160 320 800 1 600

20 100 200 400 1,000 2,000 10,000 20,000 60,000 200,000 16 80 160 320 800 1 600 8,000 16,000

20 100 200 400 1,000 2,000

10 50 100 200 500 1,000

10 50 100 200 500 1,000 5,000 10,000 30,000 100,000 10 50 100 200 500 1,000 5,000 10,000

10 50 100 200 500 1,000 5,000 10,000 30,000 80,000

See Table 3 for footnotes.

1E2

130

60 9 65

SIZE

2E2

270

130

SIZE

5E2

670 140

330

SIZE

1E3

2,300

1,100

175

SIZE

5E3

2,000

500

3,500

500

2,200 1,400

6,000 1,000

7,000 1,000

3,000 1,000

4,000

600

2,000

600

4,000

600

1,050

840

SIZE

1E4

6,000 1,000

8,000

7,000 3,000

18,000

2,000

16,000

10,000

2,000

10,000

6,000 1,200

10,000

3,400 1,700

50 kPa

(7.5 psi)

SIZE

3E4

6,000 4,000

11,000

3,000

---

18,000

6,000

20,000

5,000

40,000

5,000

10,000

7,000

12,000

3,000 6,000

4,000

12,000

4,000

20,000

4,000

20,000

4,000

--- ---

SIZE

1E5

---

30,000 20,000

---

60,000 50,000

70,000 40,000

120,000

40,000

---

36,000 25,000

---

38,000 30,000

60,000 30,000

+ 37 hidden pages