Edwards IS16K Instruction Manual

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D059-14-880

Issue D Original

Instruction Manual

Vacuum Interlock Switch IS16K

Description Item Number

V acuum Interlock Switch IS16K D059-14-000

This product has been manufactured under a quality system registered to ISO9001

Declaration of Conformity

We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Vacuum Interlock Switch IS16K D059-14-000

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements and fulfils all the relevant provisions of 2006/95/EC Low Voltage Directive

2004/108/EC Electromagnetic Compatibility (EMC) Directive

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

Mr L. Marini, Technical Manager Date and Place

P200-03-640 Issue B

9 December 2009

D059-14-880 Issue D

Contents

Section Page

1 INTRODUCTION .................................................... ................................ 1

1.1 Scope and definitions ................................................................................................... 1

1.2 Description ................................................................................................................ 1

2 TECHNICAL DATA .................................................................................2

2.1 Operating conditions .................................................................................................... 2

2.2 Performance .............................................................................................................. 2

2.3 Mechanical data .......................................................................................................... 2

2.4 Electrical data ............................................................................................................ 2

2.5 Product item number ................................................................................................... 3

3 INSTALLATION ..................................................................................... 4

3.1 Unpacking and inspection .............................................................................................. 4

3.2 General .................................................................................................................... 4

3.3 Connection to the Vacuum System .................................................................................... 4

3.4 Connection to the Electrical Circuit .................................................................................. 4

4 OPERATION ........................................................................................6

4.1 Adjustment ............................................................................................................... 6

5 MAINTENANCE ..................................................................................... 7

6 STORAGE AND DISPOSAL .........................................................................8

6.1 Storage .................................................................................................................... 8

6.2 Disposal ....................................................................................................................8

Index ........................................................... .....................................9

For return of equipment, complete the HS Forms at the end of this manual.

gea/0049/07/09

D059-14-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

Illustrations

Figure Page

1 Vacuum switch plug connections ...................................................................................... 5

2 Dimensions of VS16K vacuum switch .................................................................................. 7

Tables

Table Page

1 Maximum switch ratings ................................................................................................ 2

INTRODUCTION

D059-14-880 Issue D

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards IS16K Vacuum Interlock Switch. Read this manual before attempting to install and operate the IS16K.

This manual contains essential safety information which supplements the safety features of the IS16K. Safety procedures are highlighted as WARNING and CAUTION instructions. You must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

1.2 General description

The Edwards IS16K Vacuum Interlock Switch is designed for applications where the electrical circuits within the vacuum chamber must be de-energised when the vacuum system is let up to atmosphere.

Typical applications would be the in terlocking of H.T. and R.F. power supplies on va cuum coating systems. The interlocking switch consists o f a positive break microswitch operated by a snap action diaphram to ensure rapid separation of the microswitch cont acts.

The diaphram is enclosed within the vacuum switch housing which is surrounded by atmospheric pressure and is coupled to the vacuum system by a NW16 flange. The absolute switch point pressure will therefore vary by the same amount as the atmospheric pressure.

The set-point is non-adjustable and cannot be tampered with.

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to people.

D059-14-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

TECHNICAL DATA

2 TECHNICAL DATA

2.1 Operating conditions

2.2 Performance

2.3 Mechanical data

2.4 Electrical data

Maximum switch ratings for different loads and voltages:

2.5 Product item number

Temperature range - operating -5°C to 40°C Temperature range - storage -20°C to 70°C Relative humidity (non condensing) 10 to 90% Maximum operating altitude 3000 m Installation category (IEC1010) 2 (IEC664/664A) Pollution category (IEC1010) 2 Enclosure rating IP40

Set-point Within the range 250 to 500 mbar below

atmospheric pressure Maximum switch point differential 100 mbar Leak rate < 1 x 10

-9

mbar litre/sec

-1

Maximum overpressure 1 bar gauge (2 bar absolute)

Weight (unpacked) 0.5 kg Weight (packed) 0.6 kg Vacuum connection NW16 Flange Volume added to vacuum system 7 cm

Materials exposed to vacuum system Stainless steel and Armco 17/7PH

Electrical connection mPm 283 plug Accessory supplied mPm 183 mating electrical socket

Table 1 - Maximum switch ratings

Volts

a.c. 50/60Hz

Resistive Load

Amps

Tungsten Lamp Load

Amps

Inductive Load

Amps

125 10 5.0 10 250 10 5.5 10

Description Item Number

Vacuum Interlock Switch D059-14-000

INSTALLATION

D059-14-880 Issue D

3 INSTALLATION

3.1 Unpacking and inspection

Remove all packing materials and protective covers and check the IS16K for damage. If the IS16K is damaged, notify your supplier and the carrier in writin g within three days; state the It em Number of the IS16K together w ith your order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the IS16K.

3.2 General

The vacuum switch should be mounted as close as possible to the point at which the pressure is to be measured. Use a short branch tube with an internal diameter no less than that of the switch vacuum connection. Long, narrow and angled connections can cause significant errors.

This equipment is not protected from dripping water from above, unless mounted with the vacuum fl ange point ing downwards.

3.3 Connection to the Vacuum System

The vacuum switch may be mounted in any orientation but mounting with the vacuum switch vertical will prevent the possibility of debris falling into the vacuum port and affecting the performance of the switch.

3.4 Connection to the Electrical Circuit

CAUTION

Ensure that the circuit connected to the vacuum switch is suitably fused to prevent the switch contact rating being exceeded. The fuse rating must not exceed 10 amps.

WARNING

Do not allow the internal pressure to be higher than 1 bar gauge (2 bar absolute). If the pressure in your system can be higher than 1 bar gauge, you must fit a suitable pressure relief valve. Overpressure of the switch could cause injury to persons.

WARNING

Ensure that the electrical installation of the Vacuum Switch conforms with your local and national safety requirements. It must be connected to a suitably fused and protected electrical supply and a suitable earth point.

WARNING

If, in your application, failure of this switch could lead to a safety hazard, it is recommended that the switch should be wired in series with another interlocking device, for example chamber lid microswitch, to provide a double level of protection.

D059-14-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

INSTALLATION

Connect the vacuum switch to the equipment using the four pole mPm connector supplied. The contacts on this connector are internally wired as follows:-

Figure 1 - Vacuum switch plug connections

CAUTION

To ensure that the socket cable gland strain relief is effective a cable with a minimum diameter of 6 mm must be used.

Select a three or four core cable of a rating suitable for the power su pply to be switched. One core should be coloured green/yellow for the earth connection.

Thread the cable through the cable gland on the mPm socket cover and connect to the appropriate terminals as shown on the diagram.

Tighten the cable gland and connect the socket to the switch using the sealing gasket and locking screw provided.

Earth connection.

Com Common Lo Contact made when system

pressure is lower than setpoint.

OPERATION

D059-14-880 Issue D

4OPERATION

4.1 Adjustment

The IS16K Vacuum interlock switch is pre-set to operate in the range of 250 to 50 0 mbar below atmosp heric pressure. No user adjustment is available.

Figure 2 - Dimensions of IS16K vacuum switch

D059-14-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

MAINTENANCE

5 MAINTENANCE

To ensure correct operation this vacuum switch should be tested once per year or every 10 000 cycles whichever is sooner.

To test for correct operation proceed as follows:

1. Disconnect the electrical supply from the vacuum switch.

2. Connect an electrical continuity meter between the pin marked 'com' and the pin marked 'Lo'. Refer to Figure 1 for pin connections.

3. With the IS16K at atmosphere verify that the meter reads open circuit.

4. Reduce the pressure to below 500 mbar (as measured on a vacuum gauge) and check that the meter reads short circuit.

5. Raise the pressue to above 500 mbar and check that the meter reads open circuit again.

The outer surfaces of the switch may be cleaned by wiping wi th a dry cloth. Avoid the use of solvents that may a ttack the moulded cover.

This product contains no user serviceable parts.

WARNING

Ensure that maintenance is done by a suitably trained and supervised technician. Obey your local and national safety requirements.

STORAGE AND DISPOSAL

D059-14-880 Issue D

6 STORAGE AND DISPOSAL

6.1 Storage

Store in a cool dry place. Do not exceed the limits specified in Section 2.

6.2 Disposal

Dispose of the IS16K in accordance with any local or national safety requirements. Particular care must be taken if the switch has been used in a hazardous environme nt.

D059-14-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

This page has been intentionally left blank.

Index

D059-14-880 Issue D

Adjustment .................................................5

Connection to the Electrical Circuit ....................3

Connection to the Vacuum System .....................3

Electrical data .............................................2

General .....................................................3

General description .......................................1

INSTALLATION ..............................................3

Introduction ................................................1

MAINTENANCE ..............................................6

Mechanical data ...........................................2

Operating conditions ......................................2

OPERATION .................................................5

Performance ...............................................2

Product item number .....................................2

Scope and definitions .....................................1

STORAGE AND DISPOSAL ..................................7

TECHNICAL DATA ..........................................2

Unpacking and inspection ................................3

Index

D059-14-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Index

This page has been intentionally left blank.

Return of Edwards Equipment - Procedure

Form HS1

INTRODUCTION

Before returning your equipment, you must warn Edwards if substances you used (and produced) in the equipment can be hazardous. This information is fundamental to the safety of our Service Centre employees and will determine the procedures employed to service your equipment.

Complete the Declaration (HS2) and send it to Edwards before you dispatch the equipment. It is important to note that this declaration is for Edwards internal use only,

and has no relationship to local, national or international transportation safety or environmental requirements. As the person offering the equipment for shipment, it is your responsibility to ensure compliance with applicable laws.

GUIDELINES

• Equipment is 'uncontaminated' if it has not been used, or if it has only been used with substances that are not hazardous. Your equipment is 'contaminated' if it has been used with any substances classified as hazardous under EU Directive 67/548/EEC (as amended) or OSHA Occupational Safety (29 CFR 1910).

• If your equipment has been used with radioactive substances, biological or infectious agents, mercury, polychlorinated biphenyls (PCB’s), dioxins or sodium azide, you must decontaminate it before you return it to Edwards. You must send independent proof of decontamination (for example a certificate of analysis) to Edwards with the Declaration (HS2). Phone Edwards for advice.

• If your equipment is contaminated, you must either:

• Remove all traces of contamination (to the satisfaction of laws governing the transportation of dangerous/hazardous substances).

• Or, properly classify the hazard, mark, manifest and ship the equipment in accordance with applicable laws governing the shipment of hazardous materials.

Note: Some contaminated equipment may not be suitable for airfreight. PROCEDURE

1. Contact Edwards and obtain a Return Authorisation Number for your equipment.

2. Complete the Return of Edwards Equipment - Declaration (HS2).

3. If the equipment is contaminated, you must contact your transporter to ensure that you properly classify the hazard, mark, manifest and ship the equipment, in accordance with applicable laws governing the shipment of contaminated/hazardous materials. As the person offering the equipment for shipment, it is your responsibility to ensure compliance with applicable law. Note: Equipment contaminated with some hazardous materials,

such as semiconductor by-products, may not be suitable for airfreight - contact your transporter for advice.

4. Remove all traces of hazardous gases: pass an inert gas through the equipment and any accessories that will be returned to Edwards. Where possible, drain all fluids and lubricants from the equipment and its accessories.

5. Seal up all of the equipment's inlets and outlets (including those where accessories were attached) with blanking flanges or, for uncontaminated product, with heavy gauge tape.

6. Seal equipment in a thick polythene/polyethylene bag or sheet.

7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.

8. E-mail via scan, fax or post a copy of the original with signature of the Declaration (HS2) to Edwards. The Declaration must arrive before the equipment.

9. Give a copy of the Declaration (HS2) to the transporter. You must tell your transporter if the equipment is contaminated.

10. Seal the original Declaration in a suitable envelope: attach the envelope securely to the outside of the equipment package, in a clear weatherproof bag.

WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.

P900-70-000 Issue L

Return of Edwards Equipment – Declaration

Form HS2

You must:

•Know about all of the substances which have been used and produced in the equipment before you complete this Declaration

• Read the Return of Edwards Equipment – Procedure (HS1) before you complete this Declaration

• Contact Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions

• Send this form to Edwards before you return your equipment as per the procedure in HS1

Return Authorisation Number:

Manufacturer's Product Name ________________________ Manufacturer's Part Number _________________________ Manufacturer's Serial Number ________________________

Has the equipment been used, tested or operated? YES

Go to Section 2 NO R Go to Section 4

IF APPLICABLE:

Tool Reference Number _____________________ Process __________________ _____________________ Failure Date _______________________________ Serial Number of

Replacement Equipment ______________________

Are any substances used or produced in the equipment:

•

Radioactive, biological or infectious agents, mercury, poly chlorinated biphenyls (PCBs), dioxins or sodium azide? (if YES, see Note 1) YES

R NO

•

Hazardous to human health and safety? YES

R NO

Note 1: Edwards will not accept delivery of any equipment that is contaminated with radioactive substances, biological/ infectious agents, mercury, PCB’s, dioxins or sodium azide, unless you:

• Decontaminate the equipment

• Provide proof of decontamination

YOU MUST CONTACT EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT

Print your name: _________________________________ Print your job title: ____________________________________ Print your organisation: ____________________________________________________________________________________ Print your address: _____________________________________________________________________________________ _____________________________________________________________________________________________________ Telephone number: ___________________________ Date of equipment delivery: ____________________________________ I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any

information, and I have followed the Return ofEdwards Equipment – Procedure (HS1).

Signed: _____________________________________ Date: ______________

• who did you buy the equipment from? ______________________________

____

•

give the supplier’s invoice number

____________________________

______

If you have a warranty claim:

Substance name

Chemical

Symbol

Precautions required (for example,

use protective gloves, etc.)

Action required after a spill,

leak or exposure

Note: Please print out this form, sign it and return the signed form as hard copy.

SECTION 1: EQUIPMENT

SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT

SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT

SECTION 4: RETURN INFORMATION

SECTION 5: DECLARATION

P900-71-000 Issue M

Reason for return and symptoms of malfunction: ____________________________________________________________ ______________________________________________________________________________________________________

This page has been intentionally left blank.

EUROPE/UNITED KINGDOM

Manor Royal Crawley West Sussex, RH10 9LW Tel: Office +44 (0) 1293 528844 Sales & Service 08459 21 22 23

Fax:

Office +44 (0) 1293 533453 Sales & Service +44 (0) 1293 534149

AMERICAS

One Edwards Park 301 Ballardvale Street Wilmington, MA 01887 Tel +1 978 658 5410 Fax +1 978 658 7969 Toll Free (USA only): Tel 1800 848 9800

CANADA

5860 Chedworth Way Mississauga, Ontario Canada, L5R 0A2 Tel +1 800 387 4076 Fax +1 905 501 1225

BRAZIL

Rua Bernado Wrona 222 02710 São Paulo-SP Brazil Tel +55 11 3952 5000 Fax +55 11 3965 2766

GERMANY

Ammerthalstraße 36 85551 Kirchheim Munich

Tel:

Sales 0 800 000 14 56 Service 0 800 000 14 57

Fax:

Office +49 89 99 19 18 99 Sales & Service +49 89 99 19 18 88

ITALY

Via Carpaccio 35 20090 Trezzano sul Navigilo Milan Office +39 02 48 4471 Sales +39 02 48 447242 Service +39 02 48 447217 Fax +39 02 48 401638

FRANCE

125 Avenue Louis Roche 92238 Gennevillers, Cedex Paris

Tel:

Office +33 1 47 98 24 01 Sales +33 1 41 21 12 45 Service +33 1 41 21 12 45

Fax:

Office +33 1 47 98 44 54 Sales & Service +33 1 41 21 12 38

BELGIUM

Bergensesteenweg 709 B1600 Sint-Pieters-Leeuw Brussels Tel +32 2 363 0030 Fax +32 2 363 0064

INDIA

203 Surya Kiran Building 19 Kasturba Gandhi Marg New Delhi - 110 001 India Tel +91 11 4151 0065 Fax +91 11 4151 0245

ISRAEL

5 Habarzel Blvd Gat 2000 Industrial Zone Qiryat Gat 82000 Tel +972 8 681 0633 Fax +972 8 681 0640

CHINA

23 Fu Te Road(N), Wai Gao Qiao Free Trade Zone Pudong, Shanghai, 200131, China Tel +86 21 5866 9618 Fax +86 21 5866 9993

JAPAN

1078-1, Yoshihashi Yachiyo-shi, Chiba Japan, 276-8523 Tel +81 47 458 8831 Fax +81 47 458 8835

SINGAPORE

42 Loyang Drive Loyang Indusrial Estate Singapore 508962 Tel +65 6546 8408 Fax +65 6546 8407

TAIWAN

No. 434 Chung-Hwa Road Toufen Town, Miaoli County 351 Taiwan Tel +886 37 611422 Fax +886 37 611401

KOREA

Daewoo Engineering Building 5th Floor 9-3 Sunae-dong Bundang-gu, Sungnam City Kyungki-do, Korea Tel +82 31 716 7070 Fax +82 31738 1001

AUSTRALIA

1688 Ipswich Road Rocklea Qld, 4106 Australia Tel +61 4 0199 1193 Fax +61 2 9886 9249

www.edwardsvacuum.com info@edwardsvacuum.com

PLEASE CONTACT ANY OF THE ABOVE FOR DETAILS OF OTHER SALES AND SERVICE CENTERS IN YOUR AREA.

DJD 031007 P800-80-000 Issue M 01A09-010

Produced by Technical Publicity

Edwards IS16K Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual