Edwards iH80, iH600, iH1800, iH1000, iH1800NRV Instruction Manual

...

A590-00-880

Issue D Original

Instruction Manual

iH Dry Pumping Systems

Description Item Number

iH80 A590-00-xxx

iH160 A590-10-xxx

iH160HTX A590-12-xxx

iH600 A590-20-xxx

iH1000 A590-30-xxx

iH1800 A590-40-xxx

iH1800HTX A590-42-xxx

iH1800NRV A590-50-xxx

iH1800NRV HTX A590-52-xxx

Where xxx is as follows:

460 V, 60 Hz, 3 phase 908

200/208 V, 50/60 Hz, 3 phase 945

380/415 V, 50 Hz, 3 phase 946

230 V, 60 Hz, 3 phase 957

This product has been manufactured under a quality system registered to ISO9001

Declaration of Conformity

We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Standard HTX Where xxx is as follows: iH80 A590-00-xxx iH600 A590-20-xxx 908 – 460V, 60Hz, 3-phase iH1000 A590-30-xxx 945 – 200/208V, 50/60Hz, 3-phase iH160 A590-10-xxx A590-12-xxx 946 – 380/415V, 50Hz, 3-phase iH1800 A590-40-xxx A590-42-xxx 957 – 230V, 60Hz, 3-phase iH1800 NRV A590-50-xxx A590-52-xxx

iH interface Module fitting kit A505-35-000 iH enclosure extraction fan (for iH80 and iH600 only) A505-39-000 iH Light Duty exhaust check valve A505-56-000

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

EN 61326-1: 2006 E l ectrical equipment for measurement, control and laboratory

Use. EMC requirements. General requirements. UL61010A: 2002 Safety requirements for electrical equipment for measurement, Control and laboratory use – Part 1: General requirements SEMI S2-93A Environmental Health and Safety Guideline for semiconductor

Manufacturing Equipment. and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive 2004/108/EC Electro magnetic Compatibility (EMC) Directive

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

Sia Abbaszadeh, Chief Technical Officer

Date and Place

P200-00-960 Issue B

9 December 2009

This page has been intentionally left blank.

Contents

A590-00-880 Issue D

Contents

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

1.2 Applications ............................................................................................................... 2

1.3 Description ................................................................................................................ 3

1.3.1 The iH HTX system ....................................................................................................... 3

1.3.2 The iH NRV systems ..................................................................................................... 3

1.4 Priority of control ........................................................................................................ 3

2 Technical data .................................................................................... 7

2.1 General technical data .................................................................................................. 7

2.2 Electrical data ............................................................................................................ 9

2.3 Loading ...................................................................................................................10

2.4 Connections ..............................................................................................................11

2.5 General data ............................................................................................................. 12

3 Installation ....................................................................................... 13

3.1 Locate the dry pumping system ......................................................................................14

3.2 Lubrication ...............................................................................................................15

3.3 Connect the dry pumping system to your vacuum/exhaust system ............................................. 15

3.4 Connect the iH1800HTX exhaust TMS ................................................................................16

3.5 Connect to your factory extraction system (optional) ............................................................16

3.6 Connect the nitrogen supply ..........................................................................................17

3.6.1 Flammable/pyrophoric materials ....................................................................................17

3.6.2 Gas purges ...............................................................................................................18

3.7 Leak-test the system ...................................................................................................18

3.8 Electrical supply ........................................................................................................18

3.8.1 Reconfigure the iH system for your electrical supply (if necessary) ............................................ 19

3.8.2 Reconfigure the iH system for your electrical supply (iH80/600 only) .........................................19

3.8.3 Connect the electrical supply .........................................................................................21

3.9 Connect an additional RF earth (ground) (optional) .............................................................. 23

3.10 Connect to your emergency stop circuit ............................................................................23

3.11 Connect the cooling-water hoses .....................................................................................24

3.12 Accessories ...............................................................................................................24

3.13 Commission the system ................................................................................................25

3.14 Install additional safety equipment ..................................................................................26

4 Operation ........................................................................................ 27

4.1 Start-up ..................................................................................................................27

4.2 Status indicators ........................................................................................................28

4.3 Manual shut-down ...................................................................................................... 28

4.4 Automatic shut-down .................................................................................................. 29

4.5 Unplanned shutdown and alarms ..................................................................................... 29

4.6 Emergency stop .........................................................................................................30

4.7 Restart the pump after an emergency stop or automatic shut-down .......................................... 30

4.8 Single equipment monitor (SEM) ..................................................................................... 30

5 Maintenance ..................................................................................... 31

5.1 Safety and maintenance frequency ..................................................................................31

5.2 Relocate the system for maintenance ............................................................................... 32

5.3 Cleaning the pump ......................................................................................................33

5.4 General maintenance ..................................................................................................33

dcs/8119/08/08

A590-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

5.5 Replace a fuse ........................................................................................................... 34

5.6 Inspect the connections, pipelines, cables and fittings .......................................................... 34

6 Transportation, storage and disposal ........................................................ 35

6.1 Transportation ..........................................................................................................35

6.2 Storage ...................................................................................................................35

6.3 Disposal ................................................................................................................... 35

7 Service, spares and accessories .............................................................. 37

7.1 Introduction .............................................................................................................37

7.2 Service .................................................................................................................... 37

7.3 Ordering accessories ...................................................................................................37

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 iH applications chart .................................................................................................... 2

2 Priority of control ........................................................................................................ 3

3 The controls/connectors on rear of pump ........................................................................... 4

4 The controls/connectors on electrics box ........................................................................... 4

5 Top view of pump ........................................................................................................ 5

6 The front panel controls ................................................................................................ 5

7 Centre of gravity and levelling foot loads ..........................................................................10

8 System arrangement to reduce effective footprint (if required) ............................................... 14

9 Reconfigure the iH system for your electrical supply .............................................................20

10 Reconfigure the pump-motor terminal-boxes (iH80/iH600 only) ................................................21

11 Connect the electrical supply cable to the connector mating-half ............................................. 23

Tables

Table Page

1 Technical data iH80, iH600 and iH1000 .............................................................................. 7

1 Technical data iH160 and iH1800 ..................................................................................... 8

2 Technical data ........................................................................................................... 8

3 Electrical data 200-208 V 50 Hz-230 V 60 Hz ........................................................................ 9

3 Electrical data 380-415 V 50 Hz-460 V 60 Hz ........................................................................ 9

4 Centre of gravity and levelling foot loads (Refer to Figure 7) ................................................... 10

5 iH connector types ......................................................................................................11

6 Technical data .......................................................................................................... 12

7 Safety sensors ...........................................................................................................29

8 Accessories ...............................................................................................................37

Associated publications

Publication title Publication number

Vacuum Pump and Vacuum System Safety P300-20-000 Semiconductor Pumping Application Guide P411-00-090

Introduction

A590-00-880 Issue D

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards iH dry pumping systems. You must use your pumping system as specified in this manual.

Read this manual before you install and operate your pump. Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and/or process.

The units throughout this manual conform to the SI international system of units of measurement.

In accordance with the recommendations of IEC1010, the following warning labels are on the pump:

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to people.

Warning - refer to accompanying documentation. Warning - moving parts present.

Warning - risk of electric shock. Warning - heavy object.

Warning - hot surfaces. RF earth (ground).

Protective earth (ground). Warning - pressurised.

A590-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

The Pressurised and Risk of explosion warnings only appear in this manual.

Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards.

1.2 Applications

If you use the iH system on an application for which it is not suitable (refer to Figure 1), you may invalidate your warranties. If in doubt, contact Edwards who will advise you as to the suitability of the iH system for any particular application.

Figure 1 - iH applications chart

Note: This product is not ATEX compliant, a range of ATEX compliant pumping systems are available, contact

Edwards for details.

Warning - use protective equipment. Warning - Risk of explosion.

Introduction

A590-00-880 Issue D

1.3 Description

1.3.1 The iH HTX system

For enhanced performance on harsh duty processes, especially those prone to condensation of process gases inside the pumping system. This is achieved by:

z Increased dry pump operating temperature

z Increased gas purge capacity

z Increased exhaust diameter and exhaust TMS (Thermal Management System)

z Provision for optional heated exhaust purge.

1.3.2 The iH NRV systems

For Flat Panel Display processes.

1.4 Priority of control

The system can be controlled by a number of modules: the Pump Display Terminal (PDT), from the tool through the IM interface and communications module, iTIM, or from the Single Equipment Monitor (refer to Figure 3). Only one of these can have control of the iH system at any one time. That is, once one of these has control of the iH system, control requests from the others are denied.

The PDT indicates who is in control. LEDs are also provided on the rear panel, front panel or PDT, which illuminate to indicate 'in control'. Please refer to Figure 2.

Figure 2 - Priority of control

1. PDT

2. iM

3. iTIM

4. None in control

Take

Release

A590-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

Figure 3 - The controls/connectors on rear of pump

Figure 4 - The controls/connectors on electrics box

1. Electrical box

2. Exhaust check valve

3. Cooling-water supply connection

4. Seismic bracket (4 off)

5. RF earth (ground) stud M6

6. Cooling-water return connection

7. Levelling feet (4 off)

8. Nitrogen purge port

9. Castor (4 off)

10. Exhaust enclosure

11. Active gauge connection

12. iTIM connection

13. Rear cover

1. Protective earth (ground) stud M5

2. Exhaust gas outlet connection

3. d.c. Electrical supply fuse holder (F10)

4. Emergency stop fuse holder (F9)

5. Tool interface module fuse holder (F8)

6. Rear Power on lamp

7. EMS/Tool interface module connection

8. LON module connection

9. Electrical supply connection

Introduction

A590-00-880 Issue D

Figure 5 - Top view of pump

Figure 6 - The front panel controls

1. Inverter

2. Extraction port

3. Lifting eyebolts (2 off)

4. RF earth (ground) cable

iH160/1000/1800 only.

5. Pumped gas inlet connection

6. Leak-test port (combination)

7. Leak-test port (pump only)

1. EMS button

2. Running LED (green)

3. Power OK LED (green)

4. Pump display terminal connection

5. LON module connection

6. Alarm LED (red)

7. Warning LED (amber)

A590-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

This page has been intentionally left blank.

Technical data

A590-00-880 Issue D

2Technical data

2.1 General technical data

Table 1 - Technical data iH80, iH600 and iH1000

Type Characteristics iH80 iH600 iH1000 Units

General Dimensions (L (to exhaust enclosure)

x W x H (to inverter))

Refer to Web for installation drawings.

776 (909) x

390 x 529

776 (909) x

390 x 839

776 (909) x

390 x 839

(992)

Mass (excluding packaging) 240 415 430 kg

Noise level (ultimate) < 64 < 67 < 69 dB(A)

Vibration level at inlet < 1.8 < 1.8 < 1.8 mm s

-1

Initial force to push the pump 8 16 20 kg

Sustained force to push the pump 5 7 8 kg

Earth leakage <1.1 <1.1 <3 mA

Warm up time to nominal pumping performance

15 15 15 minutes

Minimum warm up time to process gas pumping

444hours

Performance 50 Hz / 60 Hz

Typical peak pumping speed 86 / 103 518 / 600 950 / 1000 m

3 h-1

Ultimate (shaft seal purge only) 3 x 10-2/

1 x 10

-2

2 x 10-3/

7 x 10

-4

2 x 10-3/

1 x 10

-3

mbar

Maximum inlet pressure Atmospheric Atmospheric Atmospheric

Maximum operating time at maximum inlet pressure

Continuous 1 Continuous hour

Water cooling system

Minimum flow rate required 2 4 4 l min

-1

Typical heat removed from the system

2.5 3.2 3.2 kW

Connections Pump inlet flange (bolted) ISO63 ISO100 ISO100

Exhaust gas outlet NW40 NW40 NW40

Extraction port 105 105 105 mm dia

A590-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

Table 1 - Technical data iH160 and iH1800

Type Characteristics iH160 iH1800 Units

General Dimensions (L (to exhaust enclosure)

x W x H (to inverter))

Refer to Web for installation drawings.

776 (909) x 390

x 529 (783)

986 (1059) x 470

x 888 (1094)

Mass (excluding packaging) 244 502 kg

Noise level (ultimate) <64 <69 dB(A)

Vibration level at inlet <1.8 <1.8 mm s

-1

Initial force to push the pump 8 25 kg

Sustained force to push the pump 5 10 kg

Earth leakage < 3.8 < 6.8 mA

Warm up time to nominal pumping performance

15 15 minutes

Minimum warm up time to process gas pumping

44hours

Perfo rmance 50 Hz / 60 Hz

Typical peak pumping speed 165 1800 m

3 h-1

Ultimate (shaft seal purge only) 1x10

-2

1x10

-3

mbar

Maximum inlet pressure Atmospheric Atmospheric

Maximum operating time at maximum inlet pressure

Continuous Continuous hour

Water cooling system

Minimum flow rate required 2 4 l min

-1

Typical heat removed from the system

2.5 3.2 kW

Connections Pump inlet flange (bolted) ISO63 ISO160

Exhaust gas outlet NW40 NW40

Extraction port 105 50 mm dia

Tab l e 2 - Tec h ni cal d ata

Typ e C h a racteris ticsAllHTX onlyUnits

Gas system Nitrogen supply pressure range 1.4 to 6.9 3.8 to 6.9 bar gauge

Stability of supply +/-2.4 +/-2.4 bar gauge

Nitrogen supply quality < 0.01 < 0.01 µm

Nitrogen flow rate 44 76 slm

Gas module pressure range 1 1 bar gauge

Pressure transducer accuracy +/-0.0041 at 0.4 +/-0.0041 at 0.4 bar gauge

+ 30 hidden pages

Edwards iH80, iH600, iH1800, iH1000, iH1800NRV Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual