Edwards EXT400/200/30H Instruction Manual

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Page 1

B756-60-880

Issue D Original

Instruction Manual

EXT400/200/30H Split Flow Compound Turbomolecular Vacuum Pump

Description Item Number

80 Volt EXT400/200/30H Compound Turbomolecular Pump B756-60-000

Page 2

Declaration of Conformity

We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

EXT Compound Turbomolecular pump:

EXT400/200/30H B756-60-000

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN ISO 12100-2: 2003 Safety of Machinery. Basic Concepts, General Principles for + A1: 2009 Design. Technical Principals EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements*

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory

Use. EMC requirements. General requirements.

†

C22.2 61010-1-04: 2004 Control and laboratory use – Part 1: General requirements UL61010-1: 2002 Control and laboratory use – Part 1: General requirements

* The pumps comply with EN61010-1: 2001 when installed in accordance with the instruction manual supplied.

†

Pumps only comply with the Canadian Standards Authority and Underwriters

Laboratory when used with EXDC 80V family of controllers, EXC100E and EXC100L controllers.

and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility (EMC) Directive

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

†

Safety requirements for electrical equipment for measurement,

9 December 2009

B. D. Brewster, Technical Manager, Burgess Hill Products

This product has been manufactured under a quality system registered to ISO9001

Date and Place

P200-01-260 Issue D

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B756-60-880 Issue D

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

2 Technical data ....................................................................................3

2.1 General .................................................................................................................... 3

2.2 Pumping media ........................................................................................................... 3

2.3 Vent gas specification and vent control data ....................................................................... 4

2.4 Materials exposed to gases pumped .................................................................................. 6

3 Installation ............................................... ................................... .......9

3.1 Unpack and inspect ...................................................................................................... 9

3.2 Typical installation .....................................................................................................10

3.3 Connection to the vacuum system ...................................................................................11

3.3.1 Mechanical fixing .......................................................................................................11

3.3.2 Inlet-screens (supplied fitted) ........................................................................................12

3.3.3 Inlet connection and orientation .....................................................................................12

3.3.4 Backing connection .....................................................................................................13

3.4 Vent options, vent valve connection and control ..................................................................14

3.5 Electrical installation ..................................................................................................15

3.5.1 EXDC controllers ........................................................................................................15

3.5.2 EXC controllers ..........................................................................................................15

3.6 Cooling ...................................................................................................................16

3.6.1 Introduction .............................................................................................................16

3.6.2 Forced-air cooling ......................................................................................................16

Contents

4 Operation ........................................................................................ 17

4.1 Start-up ..................................................................................................................17

4.2 Shut-down ................................................................................................................17

4.3 Safety interlocks and control system ................................................................................18

4.3.1 EXDC controllers ........................................................................................................18

4.3.2 EXC controllers ..........................................................................................................18

5 Maintenance ..................................................................................... 19

5.1 Introduction .............................................................................................................19

5.2 Bearing maintenace ....................................................................................................19

5.3 Rotor life .................................................................................................................19

5.4 Cleaning the pump ......................................................................................................20

5.5 Fault finding .............................................................................................................20

6 Storage and disposal . ..... .... ..... ..... ..... .................................................. 23

6.1 Storage ...................................................................................................................23

6.2 Disposal ...................................................................................................................23

7 Service, spares and accessories .............................................................. 25

7.1 Introduction .............................................................................................................25

7.2 Service ....................................................................................................................25

7.3 Spares .....................................................................................................................25

7.3.1 Inlet-screens .............................................................................................................25

7.3.2 Inlet-flange seals ........................................................................................................25

dcs/8108/08/08

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B756-60-880 Issue D

Contents

7.4 Accessories ...............................................................................................................25

7.4.1 Installation ...............................................................................................................25

7.4.2 EXDC drive modules ....................................................................................................26

7.4.3 EXC controllers ..........................................................................................................26

7.4.4 Pump-to-controller cables .............................................................................................26

7.4.5 TAV vent-valve and vent-port adaptor ..............................................................................26

7.4.6 ACX air-cooler ...........................................................................................................27

7.4.7 VRX vent-restrictor .....................................................................................................27

Index ........................................................... ................................... 29

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Dimensions of the EXT400/200/30H split flow pump (units in mm) ............................................. 7

2 EXT400/200/30H split flow system ..................................................................................10

3 Correct installation of inlet-screen ..................................................................................12

4 Mounting attitude of the EXT400/200/30H split flow pump .....................................................13

5 Installation of optional accessories ..................................................................................28

Tables

Table Page

1 General data .............................................................................................................. 3

2 Vent gas and vent control data ........................................................................................ 4

3 Technical data ........................................................................................................... 4

4 List of items supplied ..................................................................................................11

5 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ..............14

6 Fault finding .............................................................................................................20

7 Spares .....................................................................................................................25

8 EXDC drive modules ....................................................................................................26

9 EXC controllers ..........................................................................................................26

10 Pump-to-controller cable ..............................................................................................26

11 TAV vent-valve and vent-port adaptor ..............................................................................26

12 AXC air-cooler ...........................................................................................................27

13 VRX vent-restrictor .....................................................................................................27

Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-60-880 Issue D

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation, maintenance and storage instruction s for the Edwards EXT400/200/30H Split Flow Compound Turbomolecular Vacuum Pump. Please read and follow all instructions in this manual.

The EXT400/200/30H Split Flow Compound Turbomolecular Vacuum Pump is designed for use with an Edwards EXDC Controller. Read this manual and the instruction manual supplied with your controller before you attempt to install or operate the equipment. The controller manual contains details of electrical installation.

Important safety information in this manual is highlighted as WARNING and CAUTION instructions; please obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Introduction

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

In accordance with the recommendations of EN61010, the following warning symbols may appear on the p ump or its accessories:

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

The units used throughout this manual conform to the SI international system of units of measurement. Also throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard

min-1: this is a flow of 1 cm3min-1 at an ambient temperature of 0°C and a pressure of 1 013 mbar (1.013 x 105 Pa).

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Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-60-880 Issue D

CAUTION

WARNING

2Technical data

2.1 General

Table 1 - General data

General items Reference data

Performance Refer to Table 3 Dimensions Refer to Figure 1 Maximum inlet-flange temperature 70°C Maximum magnetic field 3.5 mT Installation category EN61010 part 1, Category 1 Pollution degree CAN/CSA, UL, EN61010 part 1, Category 2 Altitude 2000 m Humidity 10 to 90 % non condensing Electrical supply 80 V Equipment type Fixed equipment, for indoor use only

Technical data

2.2 Pumping media

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.

Do not use the EXT400/200/30H Split Flow pump to pump explosive gas mixtures as the pump is not suitable for this purpose.

If pyrophoric gases are pumped then the customer must supply adequate dilution with an inert gas.

If pumping hazardous gases or vapours, the customer must observe the safety recommendations of the supplier of the gas or vapour.

Do not use the EXT400/200/30H Split Flow pump to pump gases containing more than 20 % oxygen. If you do, the lubricant will polymerise and the pump will fail prematurely.

Note: Concentrations of gases may be modified by the compression of the pump.

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B756-60-880 Issue D

Technical data

The pump is designed to pump the following residual gases normally used in high-vacuum systems:

z Air z Nitrogen z Carbon dioxide z Carbon monoxide z Krypton z Helium z Neon z Argon z Hydrogen z Ethane z Propane z Butane z Methane

You can use the pump to pump oxygen and water vapour, subject to the following conditions:

z Oxygen – The oxygen concentration must be less than 20 % by volume. z Water vapour - You must ensure that vapour does not condense inside the pump.

If you wish to pump a gas not in the list above, co ntact your supplier for advice. If you do not contact your supplier, you may invalidate the warranty on the pump. The pumps are not suitable for pumping aggressive or corrosive gases.

2.3 Vent gas specification and vent control data

Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the subsequent pump-down time. To reduce pump-down times you should vent the pump with dry, clean gases.

Table 2 - Vent gas and vent control data

Vent items Reference data

Vent gas Dry air, nitrogen, argon or other inert gases Maximum dew point at atmospheric pressure -22°C Maximum size of particulate 1 µm Maximum concentration of oil 0.1 parts per million Time for rotational speed to reduce to 50 % ≥15 seconds Purge gas pressure

If you wish to use purge pressures in excess of this value, consult Edwards.

≤ 0.5 bar gauge

Table 3 - Technical data

Parameter EXT400/200/30H Notes

Mass 14.67 kg Main Inlet Port Rectangular 96 x 210 mm Side Inlet Port Rectangular 96 x 60 mm Interstage Inlet Port Rectangular 96 x 20 mm Outlet-flange DN25NW Vent-port 1/8 inch BSP Main Inlet Pumping Speed

N He H

*†‡

302 l s 325 l s 260 l s

-1

Pb < 5 mbar (500 Pa) Pb < 1 mbar (100 Pa) Pb < 0.5 mbar (50 Pa)

Side Inlet Pumping Speed

*†‡

190 l s

-1

Pb < 5 mbar (500 Pa) Pi = 5 x 10-3 mbar (0.5 Pa)

Edwards and the Edwards logo are trademarks of Edwards Limited.

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Table 3 - Technical data (continued)

Parameter EXT400/200/30H Notes

*†‡

200 l s

130 l s

-1

Pb < 1 mbar (100 Pa)

= 5 x 10-3 mbar (0.5 Pa)

Pb < 0.5 mbar (50 Pa) Pi = 5 x 10-3 mbar (0.5 Pa)

Interstage Inlet Pumping Speed

*†‡

28 l s

-1

Pb = 5 mbar (500 Pa) Pi = 5 x 10-1 mbar (50 Pa)

*†‡

28 l s

-1

Pb = 5 mbar (500 Pa) Pi = 5 x 10-1 mbar (50 Pa)

*†‡

24 l s

-1

Pb = 5 mbar (500 Pa)

= 5 x 10-1 mbar (50 Pa)

Compression ratio from the backing port to the main inlet

6.9 x 10 He 5.45 x 10 H

3.34 x 10

6 5

Compression ratio from the side inlet to the main inlet

He 3.6 x 10 H

Maximum backing pressure

3.15 x 10

2.15 x 10

5.33 mbar (533 P a)

He 5.33 mbar (533 Pa) H

Minimum backing pump displace ment 27.5 m3h Maximum continuous inlet pressure - air-cooling at 35 °C

ambient

††‡

Main inlet 4.17 x 10

Side inlet 8.73 x 10

Interstage inlet 1.07 x 10

5.33 mbar (533 P a)

-1

-2

mbar

(4.17 Pa)

-2

mbar

(8.73 Pa)

-1

mbar

(10.7 Pa)

Air-cooling is beneficial to the EXDC controller

80 V variant Pb set to 3.28 mbar

80 V variant

Pb set to 3.28 mbar Operating attitude Refer to Figure 4 Nominal rotational speed 60000 rpm Starting time to 90 % speed

EXDC160 150 sec Cooling method Forced-air Ambient air temperature (forced-air cooling) 0 - 35°C Noise level (at 1 metre) < 45 dBA Recommended controller EXDC160 EXDC160 maximum VA input 250 VA Quiescent power 25 W Recommended backing pump

‡‡

E2M28

B756-60-880 Issue D

Technical data

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B756-60-880 Issue D

Technical data

Pb = backing pressure, Pi = Inlet pressure,

†

Pumping speeds are without inlet-screen. Inlet-screens reduce speed by approximately 10% for main and side inlets and by approximately 4 % at interstage inlet.

‡

With an E2M28 backing pump.

Point at which pump folds back.

††

Above this pressure, rotational speed drops below nominal.

‡‡

The customer must ensure that the exhaust system and relief valves are capable of passing the maximum throughput without causing the maximum pump outlet pressure to be exceeded.

2.4 Materials exposed to gases pumped

The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin and carbon-fibre reinforced epoxy resin.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 11

Figure 1 - Dimensions of the EXT400/200/30H split flow pump (units in mm)

1. 6 slots 8.4 mm by 12 mm deep

B756-60-880 Issue D

Technical data

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Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-60-880 Issue D

WARNING

3 Installation

3.1 Unpack and inspect

The pump weighs approximately 15 kg (33 lbs). Appropriate care should be taken when lifting and moving the pump to avoid injury.

Take care when you unpack the pump to avoid excessive shocks w hich could damage the bearings and reduce the life of the pump. The pump is supplied with the inlet and outlet sealed to p re vent entry of dust and vapour. Do not remove these seals until you are ready to install the pump on your vacuum system.

Cut the plastic fibre banding strip/s with suitable sidecutters/knife, being aware that the strip is under tension and could therefore cause a whipping hazard. Open the cardboard box from the top by firstly removing the tape and then by removing the staples. Once the box lid is open, remove the upper piece of foam. The cardboard can then be lifted away from the pallet by pulling in a vertical direction. The pump can now be lifted vertically from the packaging using appropriate mechanical lifting equipment and the two M8 tapped holes provided in the top of the pump. If the pump is damaged, notify your supplier and the carrier in writing within three days; state the Item Number of the pump together with your order number and your supplier’s invoice number. Retain all packing materials for inspection. Do not use the pump if it is damaged.

Installation

Check that your package contains the items listed in Table 4. If any of these items is missing, notify your supplier in writing within three days.

If the pump is not to be used immediately, store the pump in suitable conditions as described in Section 6.1. It is advised to retain all packing materials for use, should you return it for service.

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B756-60-880 Issue D

CAUTION

1. Vacuum system

2. High vacuum gauge

3. Alternative position for vent valve

4. TMP

5. Backing valve

6. Vacuum gauge

7. Foreline trap

8. Rotary backing pump

9. Mist filter

10.Cooling fan

11.E XDC controller

12.Vent valve

13.Control system

Installation

3.2 Typical installation

Local legislation concerning the impact of the pump on the environment must be followed when installing the pump.

A typical pumping system with an EXT400/200 /30H pump is shown in Figure 2.

Figure 2 - EXT400/200/30H split flow system

The accessories available for the EXT400/200/30H Split Flow pump are detailed in Section 7.4; the accessories are shown in Figure 5.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 15

3.3 Connection to the vacuum system

WARNING

Install the pump in the vacuum system before you connect the controller to the power supply. This will ensure that the pump cannot operate and injure people during installation.

The impeller blades on an EXT400/200/30H are very sharp. Care should be taken when handling the pump not to dislodge or damage the protective inlet screens.

Under no circumstances must a part of the human body be exposed to a vacuum.

Carefully remove the pump from packaging media and connect to vacuum system.

Table 4 - List of items supplied

B756-60-880 Issue D

Installation

Qty Description Check (9)

1 EXT400/200/30H Split Flow Turbomolecular Pump  1 Large inlet-screen (fitted)  1 Medium inlet-screen (fitted)  1 Small inlet-screen (fitted)  1 Large inlet seal (O-ring)  1 Medium inlet seal (O-ring)  1 Small inlet seal (O-ring)  1EXDC160 controller (fitted)

EXDC160 controller only supplied with system variants.

3.3.1 Mechanical fixing

Ensure the EXT400/200/30H Split Flow pump is securely fixed to the vacuum system via its inlet-flange using all available mounting points. If the pump were to seize when not securely mounted, the stored energy of the rotor could cause rapid movement of the pump, which may cause further damage and injury to personnel.



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B756-60-880 Issue D

CAUTION

WARNING

1. Inlet-screen

2. Inlet-flange

Installation

3.3.2 Inlet-screens (supplied fitted)

Removal of inlet-screens will expose the risk of injury from sharp edges.

Do not remove the inlet-screens unless you can be sure that there is no danger that debris can fall into the pump. To remove an inlet-screen carefully extract it from the inlet-flange using a bent wire hook. Once removed, a screen

is not reusable. Spares are available (refer to Section 7).

Figure 3 - Correct installation of inlet-screen

3.3.3 Inlet connection and orientation

Do not store or orientate the pump such that the finned body is above the pump inlets.

The pump can be mounted in any atti tude apart from one where the finned body (with electrical connector) is above the inlets of the pump. Mounting in such a condition may allow oil from the lower lubricated bearing to drain into the pumping mechanism, reducing performance and pump life.

Make sure that the pump's inlets and all components fitted to the pump-inlets are clean and dust-free. If the pump-inlets are not kept clean, the pump-down time may be increased.

Use the O-rings supplied with the pump and use six M8 bolts tightened to a torque of 20 Nm (15 lbf ft) to connect the inlet-flange of the pump to the vacuum system.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 17

Figure 4 - Mounting attitude of the EXT400/200/30H split flow pump

CAUTION

WARNING

1. Inlets

2. Backing port

B756-60-880 Issue D

Installation

3.3.4 Backing connection

The customer must ensure safe ducting of the backing line if oil mist or hazardous substances are present.

The EXT400/200/30H must not be operated, or vented from a positive pressure gas supply, with a restricted/blocked backing line.

Do not use the EXT400/200/30H Split Flow pump with a backing pressure below 5 x 10-4 mbar (5 x 10-2 Pa). Lower backing pressures will increase the evaporation rate of the lubricating oil and so will reduce the life of the bearings.

Use suitable vacuum tubing and connectors to connect the NW25 flange of the backing-port to your backing-pump. If necessary, use flexible pipe or bellows to reduce the transmission of vibration from the backing-pump to the EXT400/200/30H Split Flow pump.

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B756-60-880 Issue D

Installation

We recommend that you use an Edwards E2M28 backing-pump. The minimum size of the backing-pump required is given in Table 3. You may have to use a larger backing-pump if you run the pump at a high inlet pressure. The EXT400/200/30H is also suitable for use with diaphragm backing-pumps although the effect of higher backing pressure on the pump's performance and cooling requirements should be noted (refer to Table 3 and Section 3.6).

3.4 Vent options, vent valve connection and control

To maintain the cleanliness of your vacuum system, we recommend that, whenever you switch the pump off, you vent the pump (or vacuum system) when the speed of the EXT400/2 00/30H Split Flow pump is between full rotational speed and 50 % of full rotational speed.

At and above 50 % of full rotational speed, the rotor spins fast enough to suppress any backstreaming of hydrocarbon oil from your backing pump. Venting may be accomplished by one of the following methods:

z Use a TAV5 or TAV6 solenoid vent-valve accessory (refer to Section 7) in place of the manual vent-valve. z Use a TAV5 or TAV6 solenoid vent-valve connected to a convenient flange on your vacuum system. z Use an alternative valve, with an appropriate restriction, connected to your vacuum system. For further

details contact Edwards.

However, if you manually vent the pump when it is at full rotational speed and the rate of pressure rise is too high, the pump life may be reduced. When using the manual vent valve supplied, we recomme nd that you either limit the vent or only open the vent-valve after the EXT400/2 00/30H Split Flow pump speed has falle n to 50 % of full rotational speed.

Do not vent from the backing line, this may lead to contamination. If you vent into your vacuum system, select a point upstream of the pump, to prevent oil backstreaming from the backing line.

If you use the TAV5 or TAV6 vent-valve you can control it using an EXC controller, or by other methods. Table 5 gives an indication of the approp riate orifice size to be fitted to the vent valve for given vacuum system volumes in order that the vent rate is kept within the limits given in Section 4.

Table 5 - Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve)

V acuum system volume (l) Orifice diameter (mm)

< 20 < 1.0

<10 < 0.7

< 5 < 0.5 < 2 < 0.35

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 19

3.5 Electrical installation

WARNING

The customer must ensure that any electrical circuits are protected from dripping water caused by condensation on cold surfaces.

It is the responsibility of the customer to ensure that the power supply used is correctly rated/protected.

This product requires a separate power supply (not included). The power supply should be adequately protected against a hazardous live condition (for example in case of a short circuit).

Do not remove the EXDC/EXC controller cable from the pump until the pump is completely at rest. This could expose the user to hazardous voltage and potentially damage the EXDC/EXC controller.

B756-60-880 Issue D

Installation

The customer must ensure appropriate routing of cables and pipework to avoid slip/trip hazards.

The EXT400/200/30H Split Flow pump should be electrically bonded to earth using the connection provided (M5 thread located next to the pump electrical connector). Refer to the instruction manual supplied with the controller to complete the electrical installation.

3.5.1 EXDC controllers

The customer must provide an emergency stop circuit to turn off power to the EXDC controller.

An EXDC controller requires connection to a suitably rated power supply. The EXDC Controller is designed to allow a pumping system to operate in a fully automatic system.

3.5.2 EXC controllers

The EXC Controller provides the electrical supply to the EXT400/2 00/30H Split Flow pump through the pump-to-controller cable. Connect and lock the bayonet-connectors at the ends of the cable to the mating connectors on the pump and the EXC Controller (if applicable). If the cable is disconnected at the pump, the EXC Controller output is switched off, making the cable safe. However, if the cable is disconnected from the EXC Controller it should be noted that the other end of the cable is still connected to the pump. Refer to the appropriate warning in Section 3.5 regarding exposure to hazardous voltages whilst the pump is still rotating.

The EXC Controller is designed to allow a pumping system to be configured in a variety of ways, from a basic manually-operated system to a fully automatic system with remote control.

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B756-60-880 Issue D

CAUTION

Installation

3.6 Cooling

3.6.1 Introduction

You must cool the pump by forced-air to prevent damage to the bearing.

You must use forced-air cooling to cool the pump. You must ensure that there is an adequate supply of cooling-air to the pump.

During operation, if the temperature of any surface of the pump is higher than 60°C, the pump is too hot and you must increase the cooling.

3.6.2 Forced-air cooling

An air-cooler accessory is available for the EXT400/2 00/30H pump (refer to Section 7). Fit the air-cooler as described in the instruction manual supplied with it. I f you w ish to us e an alternative fan for air-cooling, ensure that the flow rate is above 70 m3h-1 (40 cfm).

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 21

4 Operation

WARNING

Do not operate the EXT400/200/30H Split Flow pump unless it is connected to your vacuum system. If you do, the pump rotor can cause injury. The pump rotor rotates at very high speeds and the rotating blades might not be visible.

Do not move the pump whilst it is running. The gyroscopic forces generated by this movement can cause excessive use of the back-up bearing and may result in catastrophic failure of the pump.

When power is restored following a power cut, the pump will re-start automatically. The pump must remain connected to the vacuum system to prevent risk of injury.

B756-60-880 Issue D

Operation

After power to the pump has been switched off, either through emergency or as a requirement, the rotor will continue to spin at very high speeds. Until the rotor has stopped it possesses considerable mechanical energy.

4.1 Start-up

Use the procedure below to start up a basic, manually-controlled pumping system with a manual vent-valve and an EXDC version controller. Refer to the EXDC instruction manual.

1. Ensure any vent-valves are closed (including the manual vent-valve on the pump body).

2. Switch on the power to the air cooler.

3. Start the backing-pump.

4. When the vacuum system pressure is approximately 10 mbar or less, switch on the power supply to start the EXT400/200/30H Split Flow pump.

5. The pump will then accelerate to full operating speed. Once nominal operating speed is reached, the normal speed LED on the EXDC Controller will illuminate.

Note: Refer to the controller manual if using the EXC Controller.

4.2 Shut-down

Note: In an emergency only, open the vent-valve quickly to decelerate the pump rotor in the shortest possible

time.

Use the procedure below to shut down a basic, manually-controlled pumping system with a manual vent-valve and an EXDC Controller. Refer to the EXC Controller instruction manual when using an EXC Controller.

1. Close the valve in the backing-line connecting the EXT400/200/30H Split Flow pump to the backing-pump.

2. Switch off the backing-pump.

3. Switch off the power supply to the EXT400/200/30H Split Flow pump.

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B756-60-880 Issue D

Operation

4. When the EXT400/200/30H Split Flow pump rotational speed has fallen below 50 % of full rotational speed, turn the manual vent-valve anti-clockwise to open it. Refer to Section 3.4 for venting procedure.

4.3 Safety interlocks and control system

The pump protection and safety interlock features are listed below. Refer to the instruction manual supplied with the controller for a full description of these features.

4.3.1 EXDC controllers

z The EXDC Controller monitors the temperature of the EXT400/200/30H Split Flow pump and the electrical

power consumption of the pump. If the EXDC Controller detects excessive power consumption or temperature, the rotational speed of the pump motor is reduced until the power and temperature return to normal.

4.3.2 EXC controllers

z The EXC Controller monitors the temperature of the EXT400/200/30H Split Flow pump and the electrical

power consumption of the pump. If the EXC Controller detects excessive power consumption or temperature, the rotational speed of the pump motor is reduced until the power and temperature return to normal.

z If the rotational speed is reduced to 50 % of nominal speed, then power is removed (or after a user defined

time delay) and the FAIL LED on the EXC Controller lights.

z If pump rotational overspeed is detected by the EXC Controller, the pump is stopped immediately and the

FAIL LED on the EXC Controller lights.

If the FAIL LED lights, switch off the backing-pump i mmediately and vent the EXT400/200/30H Sp lit Flow pump. Once the EXT400/200/30H Split Flow pump has stopped, rectify the cause of the failure (refer to Section 5.5), press the EXC Controller Start/Stop button to reset the Fail condition, and restart the EXT400/200/30H Split Flow pump. If the pump is hot, allow sufficient time for it to cool before you restart it.

Note: Any references to LEDs and buttons do not apply to OEM versions of the EXC controller.

Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-60-880 Issue D

WARNING

5Maintenance

The EXT400/200/30H Split Flow pump is not to be serviced by the customer. Pumps requiring servicing should be returned to Edwards or serviced by a qualified Edwards engineer.

Allow the pump-rotor to stop, then disconnect the controller before you remove the pump from your vacuum system for maintenance or fault-finding procedures.

5.1 Introduction

The maintenance operations for the EXT400/200/30H Turbomolecular vacuum pump are described in the following sections. The inlet-screens and inlet-flange seals are available as spares (refer to Section 7). Fit the inlet-screens as shown in Figure 3.

Maintenance

5.2 Bearing maintenace

When supplied, the pump contains sufficient lubricant to supply the bearings for life. No routine maintenance is therefore required between bearing replacements. The bearings are not user-serviceable. The bearings will need to be replaced when they reach the end of their service life. This is typically more than 20,000 hours, but may be less; this depends on the type of pumping duty on which the pump is used.

When the bearings need replacement, we recommend that you exchange your pump for a factory reconditioned replacement. Alternatively, you can send your pump to an Edwards Service Centre to have the bearings replaced.

When you return the EXT400/200/30H Split Flow pump to Edwards Service Centres please use the procedure included at the end of this manual. However, the instruction to drain all fluids does not apply to the lubricant in the EXT400/200/30H Split Flow pump oil-r eservoir.

5.3 Rotor life

The fatigue life of the EXT400/200/30H rotor is typically 40,000 to 50,000 cycles of acceleration from rest to full speed and then back to rest. As a precauti onary measure, Edwards recommends tha t pumps are returned for a major service (rotor replacement) after 20,000 cycles or ten years, whichever occurs first.

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CAUTION

WARNING

Maintenance

5.4 Cleaning the pump

Clean the external surfaces of the EXT pump in a well-ventilated location. When you use cleaning solutions and solvents to clean the pump, observe all precautions specified by the manufacturer. Avoid inhalation of any particulates which may be present in the pump.

Do not attempt to clean any parts of the EXT pump other than external surfaces. Organic solvents may damage internal pump components. Do not use abrasive materials to clean any part of the pump.

If the inside of the EXT pump is contaminated, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. In these circumstances the pump must be returned to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump.

You can use any organic solvent to clean the external surfaces of the EXT pump. Edwards recommend the use of non-CFC solvents such as isopropanol or ethanol. Use a cleaning solution which is suitable for the contaminants on the pump surfaces.

For environmental reasons, keep wastage of cleaning solutions and solvents to a minimum.

5.5 Fault finding

Refer to Table 6 for the possible causes of faults and for the recommended actions to rectify faults. Table 6 is applicable to a basic, manually controlled pumping system with an EXC Controller configured for local (manual) operation.

Note that if you use an EXDC Pump Drive Module to control the EXT400/200/30H Split Flow pump, or if you use an EXC Controller configured for remote operation to control the EXT400/200/30H Split Flow pump, some of the checks and actions in Table 6 may not apply to your system. Refer to the fault finding section of the instruction manual supplied with your EXDC Pump Drive Module or EXC Controller for further fa ult finding information.

Table 6 - Fault finding

Symptom Check Action Pumps driven by EXDC controllers:

The impeller does not rotate after giving start signal

Are the three red phase LEDs on the EXDC Controller lit?

Is the EXDC correctly connected to the EXT pump?

Is the start signal being given across the correct pins of the EXDC logic interface plug?

If not, check that power is supplied to the EXDC. If power is supplied but one or more of the LEDs are not lit, then the EXDC Controller may be faulty - change the EXDC and try to start the pump. If the problem persists then the EXT pump may be faulty . Consult Edwards or your supplier.

If the red LEDs are all lit, check that the EXDC is properly connected to the pump.

Check that the start signal is being given across the correct pins of the EXDC.

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Page 25

Table 6 - Fault finding (continued)

Symptom Check Action

The impeller does not rotate after giving start signal

System operating pressure cannot be reached

The EXT 400/200/30H is very noisy or there is excessive vibration, or there is both

None of the above. If all the above checks are OK but

the impeller still does not rotate, the EXT pump may be faulty - consult Edwards or your supplier.

Are any of the vacuum gauges contaminated?

Is pumping speed insufficient, due to poor conductance between pump and chamber/gauge, or too large a chamber?

Is the backing pressure >5.3 mbar? Check for backing line leaks. If the

Is the high vacuum area of the system contaminated?

Is the EXT pump and/or the EXDC Controller too hot?

Check the system for leaks and contamination.

Is the pump rotational speed the same as the resonant frequency of the attached system?

Is the vibration being transmitted from the rotary pump?

Is the noise irregular and getting progressively worse?

Is the EXT pump making a constant high-pitched noise?

None of the above. Consult Edwards or your supplier.

If so, clean and replace them.

If so, increase the conductance or reduce the volume.

backing pressure is too high, you may need a larger backing pump.

If so, clean the system.

If so, the pump and/or Controller may have gone into thermal limit - increase the cooling to the pump and/or EXDC.

Clean any contaminated areas and repair leaks.

If so, change the resonant frequency of the system.

If so, fit flexible bellows or a vibration isolator in the backing line.

If so, the bearing may be defective. Consult Edwards or your supplier.

If so, the rotor may be out of balance. Consult Edwards or your supplier.

B756-60-880 Issue D

Maintenance

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B756-60-880 Issue D

Maintenance

Table 6 - Fault finding (continued)

Symptom Check Action Pumps driven by EXC controllers

(additional checks):

The impeller does not rotate after giving start signal

The EXC Controller trips into fail (at any speed)

Is the EXC Controller power LED lit? If not, check that the electrical

Is the EXC Controller start/stop LED flashing?

Is the EXC Controller first speed indication lit?

Are the system interlocks correctly connected?

Is the timer set incorrectly? Increase the timer setting (refer to

Is the inlet pressure too high? Is the backing pressure too high?

Is the EXT pump running too hot? Increase the cooling or reduce the

Does the pump rotor rotate freely? If not, the EXT pump bearings may

None of the above. Consult Edwards or your supplier.

supply is on, check that the switch on the rear of the EXC Controller is on, check the fuse at the rear of the EXC Controller. If all of the above are ok then the EXC Controller is faulty. Consult Edwards or your supplier.

If so, check that the correct links are made on the EXC Controller logic interface (refer to the instruction manual supplied with the EXC Controller). Check that any system interlocks are correctly made (refer to the instruction manual supplied with the EXC Controller). Check that the pump to Contro ller lead is connected.

If not, the EXC Controller is faulty. If lit, the EXT pump is faulty. Consult Edwards or your supplier.

Ensure that the system interlocks do not open after the EXT pump has started.

the EXC Controller instruction manual).

If so, check for a gross leak in the system; if the system is leak tight, then reduce the pumping load.

pumping load; check that external heat sources are not excessive.

be damaged. Consult Edwards or your supplier.

Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-60-880 Issue D

WARNING

6 Storage and disposal

6.1 Storage

Use the following procedure to store the pump.

1. Place protective covers over the main inlet, side inlet, interstage inlet, outlet and vent ports.

2. Place the pump in its packing materials. For fastest pump-down when the pump is put back into service, seal the pump inside a plastic bag together with a suitable desiccant.

3. Store the pump in cool, dry conditions, preferably not exposed to atmospheric air until required for use. When required, prepare and install the pump as described in Section 3.

4. Keep the pump upright at all times to prevent the drainage of oil from the bearing reservoir.

5. Avoid long-term storage if possible. When long-term storage is necessary, the pump should be set up and run for at least eight hours every six months.

6.2 Disposal

Storage and disposal

In the unlikely event of a failure of the pump rotor, dust can be generated from the carbon fibre reinforced components. In this event, use appropriate Personal Protective Equipment when handling and disposing of the pump, and ensure that all pump inlets and outlets are capped off before disposal.

Dispose of the EXT400/200/30H Split Flow Turbomolecular Pump and any components and accessories safely in accordance with all local and national safety and environmental requirements.

Particular care must be taken with any components which have been contaminated with dangerous process substances.

Take appropriate action to avoid inhalation of any particulates which may be present in the pump. Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures.

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Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-60-880 Issue D

7 Service, spares and accessories

7.1 Introduction

Edwards products, spares and accessories are available from Edwards compani es in Belgium, Brazil, Canada, France, Germany, Hong Kong, Italy, Japan, Korea, United Kingdom, USA and a worldwide network of distributors. The majority of these employ service engineers who have undergone comprehensive Edwards training courses.

Order spare parts and accessories from your nearest Edwards company o r di st ri buto r. When you order, pleas e state for each part required:

z Model and item number of your equipment. z Serial number (if any). z Item number and description of the part.

7.2 Service

Edwards products are supported by a worldwide network of Edwards Service Centres. Each Service Centre offer s a wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory specifications. Equipment which has been serviced, repaired or rebuilt is returned with a full warranty.

Service, spares and accessories

Your local Service Centre can also provide Edwards engineers to support on-site maintenance, service or repair of your equipment.

For more information about service options, contact your nearest Service Centre or other Edwards company.

7.3 Spares

7.3.1 Inlet-screens

Inlet-screens are fitted to your pump as supplied to prevent damage from the entry of debris into the pump. The Item Number of replacement inlet-screens is given in Table 7.

7.3.2 Inlet-flange seals

The EXT400/200/30H Split Flow pump is suppli ed with inlet seals. The Item Number of replacement seals is given in

Table 7.

Table 7 - Spares

Description Item Number

Inlet-screen spares kit B756-60-813 Inlet O-ring spares kit B756-60-812

7.4 Accessories

7.4.1 Installation

The accessories available for use with the EXT400/200/30H Split Flow turbomolecular vacuum pump are described in the following sections. Figure 5 shows how the accessories are fitted to an EXT400/200/30H Split Flow pump.

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B756-60-880 Issue D

Service, spares and accessories

7.4.2 EXDC drive modules

The Item Number of the EXDC Controller is shown in Table 8.

Table 8 - EXDC drive modules

Drive Module Item Number

EXDC160 80V D396-41-000

7.4.3 EXC controllers

Fit an EXC Controller and pump-to-controller cable as an alternative to an EXDC Controller. Refer to Table 9.

Table 9 - EXC controllers

Controller Voltage Item Number

EXC100E 90 - 264 V a.c. D396-20-000 EXC100L 90 - 264 V a.c. D396-22-000 EXC120 90 - 264 V a.c. D396-16-000 EXC300 90 - 132/180 - 264 V a.c. D396-14-000

7.4.4 Pump-to-controller cables

You must fit a pump-to-controller cable between an EXC Controller and the EXT400/200/30H Split Flow pump. A cable is not supplied with the EXT400/200/30H Pump or the EXC Controller (except EXC100L). Refer to Table 10.

Table 10 - Pump-to-controller cable

Cable Length Item Number

Pump-to-controller 1 m D396-18-010 Pump-to-controller 3 m D396-18-030 Pump-to-controller 5 m D396-18-050

7.4.5 TAV vent-valve and vent-port adaptor

Two solenoid-operated vent-valves are available for system venting. The valves are 24 V d.c., normally-open, and can be driven automatically from the EXC Controller. The solenoid-valve is fitted in place of the manual-valve, or alternatively can be fitted with an adaptor (supplied with th e valve) and be used with any suitable NW10 flanged p ort on your vacuum system. The vent-port adaptor allows the vent-port or the purge-port to be used with any suitable NW10 fitting. Refer to Table 11.

Table 11 - TAV vent-valve and vent-port adaptor

Product Item Number

TAV5 vent-valve B580-66-010 TAV6 vent-valve B580-66-020 NW10-1/8 inch BSP male adaptor B580-66-011

Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-60-880 Issue D

7.4.6 ACX air-cooler

An ACX air-cooler can be fitted to the EXT400/200/30H Split Flow pump. However, please refer to Section 3.6 to check the suitability of air-cooling in a particular application. Refer to Table 12.

Table 12 - AXC air-cooler

Air-cooler Item Number

ACX250H B580-53-160

7.4.7 VRX vent-restrictor

Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT400/200/30H Split Flow pump. Refer to Section 3.4 for information on the selection of the correct VRX vent-restrictor. Refer to Table 13.

Table 13 - VRX vent-restrictor

Vent-restrictor Orifice diameter Item Number

VRX10 0.1 mm B580-66-021 VRX20 0.2 mm B580-66-022 VRX30 0.3 mm B580-66-023 VRX50 0.5 mm B580-66-024 VRX70 0.7 mm B580-66-025

Service, spares and accessories

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B756-60-880 Issue D

1. ACX cooling fan

2. TAV vent-valve

3. EXDC controller

Service, spares and accessories

Figure 5 - Installation of optional accessories

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Page 33

Index

B756-60-880 Issue D

Index

Accessories ............................................... 25

ACX air-cooler ............................................ 27

Backing connection ..................................... 13

Bearing maintenace ..................................... 19

Cautions .....................................................1

Cleaning the pump

Connection to the vacuum system .................... 11

.................................................... 16

Cooling

...................................... 20

Disposal ................................................... 23

Electrical installation ................................... 15

EXC controllers ................................15, 18, 26

EXDC controllers ....................................15, 18

EXDC drive modules

EXT400/200/30H ..........................................1

..................................... 26

Fault finding .............................................. 20

Forced-air cooling .......................................16

Safety interlocks and control system ................ 18

Scope and definitions .....................................1

.................................................... 25

Service

Shut-down ................................................ 17

Spares ..................................................... 25

Start-up

Storage .................................................... 23

Storage and disposal .................................... 23

................................................... 17

TAV vent-valve and vent-port adaptor ............... 26

Technical data

Typical installation ...................................... 10

.............................................3

Unpack and inspect .......................................9

Vent gas specification and vent control data .........4

Vent options, vent valve connection and control

VRX vent-restrictor ..................................... 27

.. 14

Warnings ....................................................1

General .....................................................3

Inlet connection and orientation ...................... 12

Inlet-flange seals

Inlet-screens ............................................. 25

Inlet-screens (supplied fitted) ......................... 12

Installation

........................................ 25

........................................... 9, 25

Maintenance .............................................. 19

Materials exposed to gases pumped

Mechanical fixing ........................................ 11

....................6

Operation ................................................. 17

Pumping media ............................................3

Pump-to-controller cables

............................. 26

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Edwards and the Edwards logo are trademarks of Edwards Limited.