Edwards EXT200/200H, EXT200/200H ICPMS, EXT200/200HI, EXT70/200H, EXT200/200H LCMS Instruction Manual

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Page 1

Instruction Manual

EXT Split Flow Compound Turbomolecular Pumps

B756-01-880

Issue K Original

Description Item Number

24 Volt EXT Compound Turbomolecular Pumps:

EXT200/200H B756-01-991

EXT200/200Hi B756-02-991

EXT70/200H B756-03-991

EXT200/200H B756-24-991

EXT200/200H GCMS (Reversed Body) B756-41-991

EXT200/200H LCMS (Reversed Body) B756-43-991

24 Volt EXT system (comprising Compound Turbomolecular Pump and EXDC160):

EXT200/200H B756-21-991

EXT200/200Hi B756-22-991

EXT70/200H B756-23-991

EXT200/200H ICPMS B756-30-991

EXT200/200H GCMS B756-40-991

EXT200/200H GCMS (Reversed Body) B756-42-991

EXT200/200H LCMS (Reversed Body) B756-44-991

Page 2

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

SPLIT-FLOW EXT Compound Turbomolecular Pump (24 Volts):

 EXT200/200H B756-01-991  EXT200/200H ICPMS B756-30-991 *  EXT200/200Hi B756-02-991  EXT200/200H GCMS B756-40-991 *  EXT70/200H B756-03-991  EXT200/200H GCMS B756-41-991  EXT200/200H B756-21-991 *  EXT200/200H GCMS B756-42-991  EXT200/200Hi B756-22-991 *  EXT200/200H LCMS B756-43-991  EXT70/200H B756-23-991 *  EXT200/200H LCMS B756-44-991  EXT200/200H B756-24-991

to which this declaration relates is in conformity with the following standard(s) or other normative document(s) EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps

EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and EN61326-1: 2006 Electrical equipment for measurement, control and laboratory Use. EMC C22.2 61010-1-04: 2004 Safety requirements for electrical equipment for measurement, Control and UL61010-1, 2nd Edition Safety requirements for electrical equipment for measurement, Control and EN50581: 2012 Technical Documentation for the Assessment of Electrical and Electronic Products

* Including EXDC160 Controller.

‡

Including extended vent port adaptor. 24V Pumps only comply with the Canadian Standard Authority and Underwriters Laboratory when used with EXDC 24V family of controllers.

and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility (EMC) Directive 2011/65/EU** Restriction of Certain Hazardous Substances (RoHS) Directive

** i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

Laboratory Use. General Requirements requirements. General requirements laboratory use – Part 1: General requirements laboratory use – Part 1: General requirements with respect to the Restriction of Hazardous Substances

13.01.2014, Burgess Hill

Peter Meares GV Technical Support Manager

This product has been manufactured under a quality system certified to ISO9001:2008

Date and Place

‡ ‡

P200-00-380 Issue K

Document Template: 02B01010 Attachment 4 Iss. 1

Page 3

Declaration of Incorporation

We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the machine(s)

SPLIT-FLOW EXT Compound Turbomolecular Pump (24 Volts):

EXT200/200Hi B756-05-991 EXT200/200Hi B756-25-991 EXT200/200H B756-26-991

SPLIT-FLOW EXT Compound Turbomolecular Pump(80 Volts): EXT200/200H B756-05-000

EXT200/200Hi B756-25-000 EXT200/200H B756-28-000

to which this declaration relates is intended to be incorporated into other equipment and not to function independently. The machine(s) must not be put into service until the equipment into which it is incorporated has been brought into conformity with the provisions of the Machinery Directive, 2006/42/EC.

The machine(s) is in conformity with the following standard(s) or other normative document(s)

EN ISO 12100-2: 2003 Safety of Machinery. Basic Concepts, General Principles for + A1: 2009 Design. Technical Principals EN1012-2:1997, A1: 2010 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps

The relevant essential requirements of the Machinery Directive 2006/42/EC Annex 1 have been applied and fulfilled so far as practicable for this partly completed machinery. The relevant technical documentation has been compiled in accordance with Annex VII Part B. In response to a reasoned request by the national authorities, Edwards Ltd undertakes to provide relev ant information on the partly completed machinery (via email).

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

22 December 2009

B. D. Brewster, Technical Manager – Burgess Hill Products

This product has been manufactured under a qualit

Date and Place

system registered to ISO9001

P200-00-520 Issue C

Page 4

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Page 5

B756-01-880 Issue K

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

2 Technical data .................................................................................... 3

2.1 General .................................................................................................................... 3

2.2 Pumping media ........................................................................................................... 3

2.3 Vent gas specification and vent control data ....................................................................... 4

2.4 Water cooling ............................................................................................................. 5

2.5 Materials exposed to gases pumped .................................................................................. 9

3 Installation ....................................................................................... 13

3.1 Unpack and inspect .....................................................................................................13

3.2 Typical installation .....................................................................................................13

3.3 Connection to the vacuum system ...................................................................................14

3.3.1 Mechanical fixing .......................................................................................................15

3.3.2 Inlet screens (supplied fitted) or integral mesh centering ring (supplied separate from the pump) ...... 16

3.3.3 Inlet connection and orientation ..................................................................................... 16

3.3.4 Backing connection ..................................................................................................... 17

3.3.5 Interstage connection (Hi pump variants only) .................................................................... 18

3.4 Vent options, vent valve connection and control ..................................................................18

3.5 Electrical installation ..................................................................................................18

3.5.1 EXDC controllers ........................................................................................................19

3.5.2 EXC controllers .......................................................................................................... 19

3.6 Cooling ...................................................................................................................19

3.6.1 Introduction .............................................................................................................19

3.6.2 Forced-air cooling ......................................................................................................20

3.6.3 Water cooling ............................................................................................................ 20

Contents

4 Operation ........................................................................................ 21

4.1 Start-up ..................................................................................................................21

4.2 Shut-down ................................................................................................................21

4.3 Safety interlocks and control system ................................................................................ 22

4.3.1 EXDC controllers ........................................................................................................22

4.3.2 EXC controllers .......................................................................................................... 22

5 Maintenance ..................................................................................... 23

5.1 Introduction .............................................................................................................23

5.2 Bearing maintenance ...................................................................................................23

5.3 Rotor life ................................................................................................................. 23

5.4 Cleaning the pump ......................................................................................................24

5.5 Fault finding ............................................................................................................. 24

6 Storage and disposal ........................................................................... 27

6.1 Storage ...................................................................................................................27

6.2 Disposal ................................................................................................................... 27

7 Service, spares and accessories .............................................................. 29

7.1 Introduction .............................................................................................................29

7.2 Service ....................................................................................................................29

mv/12/13

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B756-01-880 Issue K

Contents

7.3 Spares .....................................................................................................................29

7.3.1 ISX inlet screens .........................................................................................................29

7.3.2 Inlet strainer (interstage pumps only) ...............................................................................30

7.3.3 Inlet flange seals ........................................................................................................30

7.4 Accessories ...............................................................................................................30

7.4.1 Installation ...............................................................................................................30

7.4.2 EXDC drive modules ....................................................................................................30

7.4.3 EXC controllers .......................................................................................................... 30

7.4.4 Pump-to-controller cables .............................................................................................31

7.4.5 EXT water cooling block assembly ...................................................................................31

7.4.6 TAV vent valve and vent port adaptor ...............................................................................31

7.4.7 ACX air cooler ...........................................................................................................31

7.4.8 VRX vent restrictor .....................................................................................................32

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Dimensions of the EXT 200/200H split flow pump system (units in mm) ....................................... 9

2 Dimensions of the EXT 200/200H GCMS split flow pump system (units in mm) ...............................10

3 Dimensions of the EXT 200/200H ICPMS split flow pump system (units in mm) ............................... 11

4 Dimensions of the EXT 200/200H GCMS/LCMS (reversed body) ................................................. 12

5 A typical vacuum system using a turbomolecular pump .......................................................... 14

6 Correct installation of inlet screen ..................................................................................16

7 Mounting attitude range of an EXT split flow pump ...............................................................17

8 Installation of optional accessories .................................................................................. 32

Tables

Table Page

1 General .................................................................................................................... 3

2 Vent gas and vent control data ........................................................................................ 4

3 Water cooling ............................................................................................................. 5

4 Technical data ........................................................................................................... 6

5 List of items supplied .................................................................................................. 15

6 Vent restrictor orifice diameter (with atmospheric pressure at the inlet of the vent valve) .............. 18

7 Fault finding .............................................................................................................25

8 ISX inlet screens .........................................................................................................29

9 Inlet strainer (interstage pumps only) ...............................................................................30

10 Inlet-flange seals ........................................................................................................ 30

11 EXDC drive modules ....................................................................................................30

12 EXC controllers .......................................................................................................... 30

13 Pump-to-controller cable .............................................................................................. 31

14 EXT water cooling block assembly ................................................................................... 31

15 TAV vent valve and vent port adaptor ............................................................................... 31

16 ACX air cooler ...........................................................................................................31

17 VRX vent restrictor .....................................................................................................32

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 7

B756-01-880 Issue K

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation, maintenance and storage instructions for the Edwards EXT70/200H and EXT200/200H Split Flow Compound Molecular Pumps, abbreviated to EXT Split Flow Pump in the remainder of this manual. The pump must be used as specified in this manual. Read this manual before installing and operating the pump.

The EXT Split Flow Pumps are designed for use with an Edwards EXDC or EXC Controller. Read the instruction manual supplied with the controller before attempting to install or operate the equipment. The controller manual contains details of electrical installation.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Introduction

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

The following warning labels are on the pump:

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

Protective Conductor terminal.

The units used throughout this manual conform to the SI international system of units of measurement. Also throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard

min-1: this is a flow of 1cm3min-1 at an ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 105 Pa).

Page 8

B756-01-880 Issue K

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 9

2Technical data

WARNING

2.1 General

Tab l e 1 - Ge n era l

Performance See Ta b le 4

Dimensions See Figure 1, 2, 3 and 4

Maximum inlet flange temperature 70 °C

Maximum magnetic field 3.5 mT Horizontal field

Installation category EN61010 part 1, Category 1

Pollution degree EN61010, Pollution degree 2

Electrical supply 24 V d.c.

Equipment type Fixed equipment, for indoor use only

Ambient operating temperature range 5 ºC to 40 ºC

Ambient operating humidity range 10 to 90% RH (non-condensing)

Maximum operating altitude 2000 m

Ambient storage temperature range -30 ºC to 70 ºC

B756-01-880 Issue K

Technical data

2.2 Pumping media

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.

Do not use Split Flow Pumps to pump explosive gas mixtures as the pumps are not suitable for this purpose.

If pyrophoric gases are pumped then the customer must supply adequate dilution with an inert gas.

It is the customer’s responsibility to leak check the system to ensure process gases cannot escape to the atmosphere and cause a hazard.

Gases pumped from different inlets may combine to cause dangerous mixtures.

Page 10

B756-01-880 Issue K

CAUTION

WARNING

Technical data

If pumping hazardous gases or vapours, the customer must observe the safety recommendations of the supplier of the gas or vapour.

Do not use the EXT70/70/200H to pump gases containing more than 20% oxygen. If gases containing more than 20% oxygen are pumped, the pump lubricant will polymerise and the pump may fail prematurely.

Note: Concentrations of gases may be modified by the compression of the pump.

The pumps are designed to pump the following residual gases normally used in high-vacuum systems:

 Air  Nitrogen  Helium

 Carbon monoxide  Krypton  Hydrogen

 Neon  Argon  Butane

 Ethane  Propa ne

 Methane  Carbon dioxide

The pump can be used to pump oxygen and water vapour, subject to the following conditions:

 Oxygen – The oxygen concentration must be less than 20% by volume.

 Water vapour - Ensure that vapour does not condense inside the pump. Refer to Section 3.6.3.

If there is a requirement to pump a gas not in the list above, contact the supplier for advice. If the supplier is not contacted, the warranty on the pump may be invalidated. The pumps are not suitable for pumping aggressive or corrosive gases.

2.3 Vent gas specification and vent control data

Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the subsequent pump-down time. To reduce pump-down times, vent the pump with dry, clean gases.

Table 2 - Vent gas and vent control data

Vent gas Dry air, nitrogen, argon or other inert gases

Maximum dew point at atmospheric pressure -22 °C

Maximum size of particulate 1

Maximum concentration of oil 0.1 parts per million

Time for rotational speed to reach 50% > 15 sec

Maximum vent gas pressure < 0.5 bar gauge (7 psig, 0.5x10

* If using pressures in excess of this figure, please consult Edwards.

µm

Pa gauge)*

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 11

B756-01-880 Issue K

2.4 Water cooling

The following cooling water specification corresponds to a typical high-quality drinking water specification. Check with the water supply authority if there is any doubt about the quality of the supply.

Tab l e 3 - Wat e r c o o l in g

Technical data

Quality

pH value 6.0 to 8.0

Maximum calcium carbonate concentration 75 parts per million

Maximum chloride concentration 100 parts per million

Minimum oxygen concentration 4 parts per million

Minimum water cooling flow rate (at 15 °C) 15 l hr

Water temperature See Ta bl e 4

Maximum water pressure 5 bar (gauge), 73.5 psig, 6x10

Materials exposed to cooling water Nickel plated brass

Mechanically and optically clean with no deposits or turbidity

-1

Page 12

B756-01-880 Issue K

Technical data

Tab l e 4 - Tec h ni c al d at a

Parameter EXT70/200H

EXT200/200H

and Hi

Mass 9 kg 9 kg (7.5 kg

EXT200/200H

†

) 9 kg 9 kg mass without controller

GCMS

EXT 200/

200H

ICPMS

Notes

Side inlet flange DN100ISO DN100ISO DN100ISO DN100ISO controller

Main inlet flange DN63ISO DN100ISO DN100ISO DN100ISO

Outlet flange DN25NW DN25NW DN25NW DN25NW

Vent port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP

Interstage port

DN25NW DN25NW DN25NW DN25NW

(optional)

Main inlet pumping speed

‡**

110 l s

145 l s

130 l s

-1

177 l s

190 l s

163 l s

-1

- - 153 l s

155 l s

185 l s

175 l s

-1

107 l s

113 l s

102 l s

104 l s

-1

Pb < 5 mbar (500 Pa)

-1

Pb < 1 mbar (100 Pa)

-1

Pb < 0.5 mbar (50 Pa)

-1

Pb < 0.2 mbar (20 Pa)

Side inlet pumping speed

‡**

155 l s

131 l s

79 l s

-1

155 l s

131 l s

79 l s

-1

- - 127 l s

155 l s

179 l s

131 l s

-1

155 l s

187 l s

143 l s

148 l s

-1

Pb < 5 mbar (500 Pa)

-1

Pb < 1 mbar (100 Pa)

-1

Pb < 0.5 mbar (50 Pa)

Interstage pumping speed

‡

-8.75 l s-1N/A N/A Pb = 5 mbar (500 Pa)

-10.4 l s-1N/A N/A Pb = 5 mbar (500 Pa) Pi = 5 x 10-1 mbar (50 Pa)

Compression ratio from the backing port to the main inlet

He 1 x 10

>5 x 10

3.5 x 10

Ar - - >5 x 10

>5 x 10

1 x 10

7††

>5 x 10

1 x 10

-5 x 10

7‡‡

>5 x 10

2.5 x 10

>5 x 10

7††

7‡‡

Compression ratio from the side inlet to the main inlet

He 6 x 10

6 x 10

2 x 10

Ar - - 1.7 x 10

6 x 10

2 x 10

1 x 10

1.5 x 10

3.3 x 10

9 x 10

2.5 x 10

6 x 10

7 x 10

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 13

Tab l e 4 - Tec h n i c a l d a t a ( c on t in u ed )

B756-01-880 Issue K

Technical data

EXT 200/

200H

ICPMS

Notes

Parameter EXT70/200H

Maximum backing pressure

***

12.6 mbar (1260 Pa)

He 7.7 mbar

(770 Pa)

2 mbar

(200 Pa)

EXT200/200H

and Hi

12.6 mbar (1260 Pa)

7.7 mbar (770 Pa)

2 mbar

(200 Pa)

EXT200/200H

GCMS

7.3 mbar (730 Pa)

Ar - - 8 mbar

(800 Pa)

Minimum backing pump

0.6 m

3h-1

0.6 m3h

-1

0.6 m3h

-1

0.6 m3h

-1

displacement

Maximum continuous inlet pressure - watercooling at 35 °C

†††

Main inlet 2.5 x

Side inlet 5 x 10-3 mbar

Maximum continuous inlet pressure - air cooling at 35 °C ambient

†††

Main inlet 3 x 10

Side inlet 9 x 10

-3

(2.5 x

-1

(5 x 10

(3 x 10

(9 x 10

mbar

Pa)

-1

Pa)

-3

mbar

-1

Pa)

-3

mbar

-1

Pa)

(2.5 x

5 x 10

(5 x 10

3 x 10

(3 x 10

9 x 10

(9 x 10

2.5 x

-3

mbar

-1

Pa)

-3

mbar

-1

-3

mbar

-1

-3

mbar

-1

Pa)

-3

5 x 10

mbar

(He: 7.5 x 10

mbar)

1.5 x 10 mbar

(He: 5 x 10

-2

-3

-2

1 x 10

mbar

(Ar: 5 x 10

mbar)

-2

1 x 10

mbar

(Ar: 5 x 10

mbar)

No water cooling on GCMS and ICPMS.

Air cooling is beneficial to the EXDC controller. Nitrogen unless otherwise

stated.

-3

mbar)

Operating attitude Vertical and

upright through to horizontal

±2 °

Nominal rotational

60000 r min

Vertical and

Vertical Vertical

upright

through to

horizontal

±2 °

-1

60000 r min-160000 r min-160000 r min

-1

speed

Standby rotational speed 42000 r min-142000 r min-142000 r min-142000 r min-1EXC controller only

Page 14

B756-01-880 Issue K

Technical data

Tab l e 4 - Tec h n i c a l d a t a ( c on t in u ed )

EXT 200/

200H

ICPMS

Notes

Parameter EXT70/200H

EXT200/200H

and Hi

EXT200/200H

GCMS

Starting time to 90% speed

EXDC160 110 se 110 sec 120 sec 150 sec

EXC100E 190 sec 190 sec

EXC100L 245 sec

EXC120 130 sec 130 sec

EXC300 100 sec 100 sec 120 sec

EXDC80 270 sec 330 sec

Cooling method Forced air/

water

Ambient air temperature

0 - 35 °C 0 - 35 °C 0 - 35 °C 0 - 35 °C

Forced air/

water

(forced-air cooling)

Water temperature

10 - 20 °C 10 - 20 °C - -

(water cooling)

Noise level (at 1 metre) < 50 dB(A) < 50 dB(A) < 50 dB(A) < 50 dB(A)

Recommended

EXDC160 EXDC160 EXDC160 EXDC160

controller

EXDC160 maximum VA

250 VA 250 VA 250 VA 250 VA

input

Quiescent power 25 W 25 W 40 W 40 W

Recommended backing

‡‡‡

pump

The data shown for EXT200/200H GCMS applies to pumps: B75640991, B75641991, B75642991, B75643991

RV3 RV3 RV3 RV3

and B75644991. This is because these pumps have the same internal components and the data is taken without inlet screens fitted.

†

Mass applies to products listed under the Declaration of Incorporation.

‡

Pb = backing pressure,

inlet pressure,

Pumping speeds are without inlet screen or inlet strainer (EXT200/200Hi, GCMS and ICPMS). Inlet screens and inlet strainers reduce speed by approximately 10%.

††

This is a measured value. Theoretical value >109 and >1011 respectively for GCMS and ICPMS.

‡‡

Theoretical values 2 x 109 and 7 x 1011 respectively.

***

Inlet pressure has risen to 10-3 mbar.

†††

Above this pressure, rotational speed drops below nominal.

‡‡‡

A larger backing pump may be required for maximum throughput.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 15

B756-01-880 Issue K

1. TAV5 vent valve

2. 8 slots 8.4 mm wide

3. Side inlet

4. Main inlet

5. EXDC controller

6. Backing port

2.5 Materials exposed to gases pumped

The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin and carbon-fibre-reinforced epoxy resin.

Figure 1 - Dimensions of the EXT 200/200H split flow pump system (units in mm)

Technical data

Page 16

B756-01-880 Issue K

1. 8 slots 8.4 mm wide

2. EXDC controller

3. Backing port

4. TAV5 vent valve

5. Main inlet

6. Side inlet

Technical data

Figure 2 - Dimensions of the EXT 200/200H GCMS split flow pump system (units in mm)

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 17

B756-01-880 Issue K

1. 8 slots 8.4 mm wide

2. Controller connection

3. Backing port

4. Vent port

5. Main inlet

6. Side inlet

Figure 3 - Dimensions of the EXT 200/200H ICPMS split flow pump system (units in mm)

Technical data

Page 18

B756-01-880 Issue K

1. Extended vent port adaptor

2. Backing port

3. EXDC controller

4. 8 slots 8.4 mm wide

5. Main inlet

6. Side inlet

Figure 4 - Dimensions of the EXT 200/200H GCMS/LCMS (reversed body)

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 19

B756-01-880 Issue K

CAUTION

WARNING

3 Installation

3.1 Unpack and inspect

The pump weighs approximately 9 kg (20 lbs). Appropriate care should be taken when lifting and moving the pump to avoid injury.

Take care when unpacking the pump to avoid excessive shocks that could damage the bearings and reduce the life of the pump. The pump is supplied with the inlet and outlet sealed to prevent entry of dust and vapour. Do not remove these seals until the pump is installed on the vacuum system.

Open the top of the packaging by disengaging the cardboard tabs and then opening the lid. Remove the top piece of locating foam and any ancillaries included within the box. Remove the pump from the packaging by lifting the pump vertically from the packaging. If the pump is damaged, notify the supplier and the carrier in writing within three days; state the Item Number of the pump together with the order number and the supplier’s invoice number. Retain all packing materials for inspection. Do not use the pump if it is damaged.

Check that the package contains the items listed in Table 5. If any of these items is missing, notify the supplier in writing within three days.

Installation

If the pump is not to be used immediately, store the pump in suitable conditions as described in Section 6.1.

Do not discard the packing materials; retain them to re-package the pump if it is returned for service.

3.2 Typical installation

Local legislation concerning the impact of the pump on the environment must be followed when installing the pump.

Page 20

B756-01-880 Issue K

WARNING

1. Vacuum system

2. High-vacuum gauge

3. Alternative position for vent valve

4. TMP

5. Backing valve

6. Vacuum gauge

7. Foreline trap

8. Rotary backing pump

9. Mist filter

10. Cooling fan

11. EXDC controller

12. Vent valve

13. Control system

Installation

Figure 5 - A typical vacuum system using a turbomolecular pump

The accessories available for these EXT Split Flow Pumps are detailed in Section 7.4.

3.3 Connection to the vacuum system

Once the pump is removed from the bottom packaging, there is a danger of toppling.

Install the pump in the vacuum system before connecting the controller to the power supply. This will ensure that the pump cannot operate and injure people during installation.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 21

WARNING

The impeller blades on a Split Flow Pump are very sharp. Care should be taken when handling the

WARNING

pump not to dislodge or damage the protective inlet screens.

If integral mesh centering rings are supplied with the pump, it is the customers responsibility to ensure that these are fitted to the pump inlets and to take appropriate care when handling the pump to avoid the impeller blades. To minimise the risk of injury, the plastic transport cover should be retained over the pump inlets until the pump is ready to be installed.

Do not expose any part of the human body to vacuum as it can cause injury.

Care must be taken to avoid foreign objects entering the pump during the installation process.

Carefully remove the pump from packaging media and connect to the vacuum system.

B756-01-880 Issue K

Installation

Qty Description

1 EXT Split Flow Pump

2Inlet screen (fitted)

2 DN100ISO-K Integral mesh centering ring*

2 Inlet seal (trapped O-rings)

1 Inlet strainer (Hi variants only, fitted in the interstage port)

1 EXDC160 Controller (fitted)

1 NW10-1/8 inch BSP male extended vent port adaptor

1 NW10 Centering ring

1 NW10 Clamping ring

1 NW25 Centering ring

1 NW25 Clamping ring

Only supplied with system variants.

3.3.1 Mechanical fixing

Ensure all Split Flow Pumps are securely fixed to the vacuum system via their inlet flange using all available mounting points. If a pump were to seize when not securely mounted, the stored energy of the rotor could cause rapid movement of the pump, which may cause damage to equipment and/ or injury to personnel.

Table 5 - List of items supplied

For variants listed under the Declaration of Incorporation, refer to customer guidelines for mechanical fixing.

Page 22

B756-01-880 Issue K

CAUTION

WARNING

1. Inlet flange

2. Inlet screen

Installation

3.3.2 Inlet screens (supplied fitted) or integral mesh centering ring (supplied separate from the pump)

Removal of inlet screens will expose the risk of injury from sharp edges.

In the unlikely event of a pump fracture, it is possible that the inlet screen may not trap all debris within the pump. Ensure that the system can contain any debris that may escape from the pump.

Remove the inlet screens only if there is no possibility that debris can fall into the pump. If the screens are removed, the pumping speed through each inlet will increase by approximately 10%.

To remove an inlet screen, carefully extract it from the inlet flange using a bent wire hook. To replace a screen which has been removed, install it as shown in Figure 6, with the Edwards logo uppermost. Ensure that the dimples on the rim of the screen engage in the groove in the pump flange. If necessary, gently bend the tabs of the screen outwards to ensure a tight fit.

Figure 6 - Correct installation of inlet screen

3.3.3 Inlet connection and orientation

If integral mesh centering rings are supplied with the pump, appropriate care must be taken when handling the pump

to avoid the exposed impeller blades. The impeller represents a serious rotational hazard if the pump is operational and a manual handling hazard if the pump impeller is stationary.

Integral mesh centering rings have not been designed to enable the inlet screen to be removed. If the inlet screen is removed, it will probably become damaged and non re-usable. If the screen is not required, a plain centering ring (B271-58-171 for DN100ISO-K inlet) can be used instead.

Do not invert the pump.

The pump can be mounted in any attitude range shown in Figure 7, from vertical and upright through to horizontal (±2° ), alth ough i t is mo s t comm only m o unted verti c ally. I f the p ump is m ounte d hori z ontal ly, th e backi ng por t shoul d point vertically downwards (±20°) to reduce the risk of contamination from the backing pump oil.

Make sure that the pump’s main inlet and side inlet and all components fitted to the pump inlets are clean and dustfree. If the pump inlets are not kept clean, the pump-down time may be increased.

The inlet connections of the EXT Split Flow Pump are ISO flanges.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 23

B756-01-880 Issue K

CAUTION

WARNING

Use the Edwards trapped O-ring supplied with the pump and use a minimum of four fixing bolts to connect the inlet flange of the pump to the vacuum system. M8 bolts should be tightened to a torque of 5-6 Nm.

Figure 7 - Mounting attitude range of an EXT split flow pump

Installation

3.3.4 Backing connection

The customer must ensure safe ducting of the backing line if oil mist or hazardous substances are present.

Split Flow Pumps must not be operated, or vented from a positive pressure gas supply, with a restricted/blocked backing line. Use suitable vacuum tubing and connectors to connect the NW25 flange of the backing port to the backing pump. If necessary, use flexible pipe or bellows to reduce the transmission of vibration from the backing pump to the Split Flow Pump.

Use suitable vacuum tubing and connectors to connect the NW flange of the backing port to the backing pump. If necessary, use flexible pipe or bellows to reduce the transmission of vibration from the backing pump to the EXT Split Flow Pump.

Edwards recommends using an Edwards RV Backing Pump. The minimum size of the backing pump required is given in Table 4. A larger backing pump may be required if the pump is run at a high inlet pressure. The EXT70/200H and EXT200/200H Split Flow Pumps are also suitable for use with diaphragm backing pumps although the effect of higher backing pressure on the pump’s performance and cooling requirements should be noted (see Table 1 and

Section 3.6).

Do not use the EXT Split Flow Pump with a backing pressure below 5 x 10-4 mbar (5 x 10-2 Pa). Lower backing pressures will increase the evaporation rate of the lubricating oil and so will reduce the life of the bearings.

Page 24

B756-01-880 Issue K

WARNING

Installation

3.3.5 Interstage connection (Hi pump variants only)

Use suitable vacuum tube and connectors to connect the interstage port to the vacuum system or to the outlet flange of another turbo molecular pump. Leave the inlet strainer in the interstage port, unless there is no possibility that debris can be drawn into the interstage port.

3.4 Vent options, vent valve connection and control

To maintain the cleanliness of the vacuum system whenever the pump is switched off, Edwards recommends venting the pump (or vacuum system) when the speed of the EXT Split Flow Pump is between full rotational speed and 50% of full rotational speed. At and above 50% of full rotational speed, the rotor spins fast enough to suppress any backstreaming of hydrocarbon oil from the backing pump. Venting may be accomplished by one of the following methods.

 U s e a TAV5 or TAV 6 s o lenoi d vent valve accessory (see Section 7) in place of the manual vent valve.

 Use a TAV5 or TAV6 solenoid vent valve connected to a convenient flange on the vacuum system.

 Use an alternate valve, with an appropriate restriction, connected to the vacuum system. For further

details, contact Edwards.

However, if the pump is manually vented when it is at full rotational speed and the rate of pressure rise is too high, the pump life may be reduced. When using the manual vent valve supplied, Edwards recommends either limiting the vent or only opening the vent valve after the EXT Split Flow Pump speed has fallen to 50% of full rotational speed.

Do not vent from the backing line as this may lead to contamination. If venting into the vacuum system, select a point upstream of the pump to prevent oil back-streaming from the backing line.

If using the TAV5 or TAV6 vent valve, it can be controlled using an EXC Controller or other methods. Table 6 gives an indication of the appropriate orifice size to be fitt ed to the v ent v alve for g iven vac uum s yste m vol umes in or der t hat the vent rate is kept within the limits given in Section 2.3.

Table 6 - Vent restrictor orifice diameter (with atmospheric pressure at the inlet of the vent valve)

Vacuum system volume (l) Orifice diameter (mm)

< 20 < 1.0

< 10 < 0.7

< 5 < 0.5

< 2 < 0.35

3.5 Electrical installation

The customer must ensure that any electrical circuits are protected from dripping water caused by condensation on cold surfaces.

It is the responsibility of the customer to ensure that the power supply used is correctly rated/ protected.

This product requires a separate power supply (not included). The power supply should be adequately protected against a hazardous live condition (e.g. in case of a short circuit).

Edwards and the Edwards logo are trademarks of Edwards Limited.

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B756-01-880 Issue K

CAUTION

WARNING

The customer must ensure appropriate routing of cables and pipework to avoid slip/trip hazards.

Do not remove the EXDC Controller/EXC Controller cable from the pump until the pump is completely at rest. To do so could expose personnel to hazardous voltage and potentially damage the EXDC/EXC Controller.

The EXT Split Flow Pump should be electrically bonded to earth using the connection provided. Refer to the instruction manual supplied with the controller to complete the electrical installation.

3.5.1 EXDC controllers

The customer must provide an emergency stop circuit to turn off power to the EXDC controller.

Installation

An EXDC Controller requires connection to a suitably rated power supply. The EXDC Controller is designed to allow a pumping system to operate in a fully automatic system.

3.5.2 EXC controllers

The EXC Controller provides the electrical supply to the Split Flow Pump through the pump-to-controller cable. Connect and lock the bayonet connectors at the ends of the cable to the mating connectors on the pump and the EXC Controller (if applicable). If the cable is disconnected at the pump, the EXC Controller output is switched off, making the cable safe. However, if the cable is disconnected from the EXC Controller it should be noted that the other end of the cable is still connected to the pump. Refer to the appropriate warning in Section 3.5 regarding exposure to hazardous voltages whilst the pump is still rotating.

The EXC Controller is designed to allow a pumping system to be configured in a variety of ways, from a basic manually operated system to a fully automatic system with remote control.

3.6 Cooling

3.6.1 Introduction

The pump must be cooled by forced air or water cooling to prevent damage to the bearing.

If the pump will be located inside an enclosure, ensure that there is adequate ventilation so that the ambient temperature around the pump does not exceed 40 °C.

Use water cooling in addition to forced air cooling in any of the following operating conditions:

 Backing pressure > 10 mbar.

 Backing pressure > 8 mbar (800 Pa) and interstage flow > 30 sccm (0.5 mbar l s

 Backing pressure > 5 mbar (500 Pa) and interstage flow > 80 sccm (1.3 mbar l s

 Ambient temperature > 35 °C.

-1

, 50 Pa l s-1).

-1

, 130 Pa l s-1).

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B756-01-880 Issue K

Installation

In all other operating conditions, forced-air cooling only may be used. If using forced air to cool the pump, ensure that there is an adequate supply of cooling air to the pump.

During operation, if the temperature of any surface of the pump is higher than 45 °C, the pump is too hot and cooling must be increased.

3.6.2 Forced-air cooling

An air cooler accessory is available for the EXT Split Flow Pumps (refer to Section 7). Fit the air cooler as described in the instruction manual supplied with it. If using an alternative fan for air cooling, ensure that the flow rate is above 70 m3h-1 (40 cfm).

3.6.3 Water cooling

A water-cooling block accessory is available for the EXT Split Flow Pumps (refer to Section 7). Fit the water-cooling block as described in the instruction manual supplied with it. The cooling-water supply must comply with the specification given in Section 2.4. Pipes in the water-cooling circuit may become blocked if the cooling water contains too much calcium carbonate or if it contains particulates which are too large. Corrosion of the water-cooling circuit may occur if there is too little calcium carbonate and oxygen in the water. Good quality drinking water is usually suitable for water cooling. If in doubt, check the quality of the cooling-water supply and, if necessary, provide treatment and filtration.

Connect the cooling-water supply to the water cooler on the pump as described below. Either of the two riffled connectors on the water cooler can be used for the water supply or return connections.

1. Push reinforced hose (approximately 6 mm internal diameter) over the ends of the riffled hose connectors on

the water cooler on the pump.

2. Attach the hose with strong hose clips and make sure that they are tightened securely.

When the pump is switched off, turn off the cooling-water supply to prevent condensation of vapours inside the pump. The EXC Controller (EXC120 and EXC300) can operate a solenoid valve for this purpose.

To avoid breaking the cooling-water circuit if the pump is removed for maintenance, unscrew the M4 cap-head fixingscrews and remove the water cooler from the pump. Make sure that there is a layer of thermal contact grease on the water cooler before refitting it to the pump.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 27

4 Operation

WARNING

Do not operate the pump unless it is connected to the vacuum system. The pump rotor rotates at very high speeds and the rotating blades might not be visible. If the pump is not installed correctly, the pump rotor can cause injury.

Do not move the pump whilst it i s running. The gyroscopic forces generated b y this movement can cause excessive use of the back-up bearing and may result in catastrophic failure of the pump.

When power is restored following a power cut, the pump will re-start automatically. The pump must remain connected to the vacuum system to prevent risk of injury.

B756-01-880 Issue K

Operation

After power to the pump has been switched off, either through emergency or as a requirement, the rotor will continue to spin at very high speeds. Until the rotor has stopped, it possesses considerable mechanical energy.

4.1 Start-up

Use the procedure below to start up a basic, manually controlled pumping system with a manual vent valve and an EXDC version controller. Refer to the EXDC Instruction Manual.

1. Ensure the manual vent valve is closed (turn clockwise to close it).

2. Turn on the cooling-water supply (if water cooling is used) and/or switch on the power to the air cooler.

3. Start the backing pump.

4. When the vacuum system pressure is approximately 10 mbar or less, switch on the power supply to start the EXT

Split Flow Pump.

5. The pump will then accelerate to full operating speed. Once nominal operating speed is reached, the normal

speed LED on the EXDC Controller will illuminate.

Note: Refer to the controller manual if using the EXC Controller.

4.2 Shut-down

Note: In an emergency only, open the vent valve quickly to decelerate the pump rotor in the shortest possible

time.

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B756-01-880 Issue K

Operation

Use the procedure below to shut down a basic, manually controlled pumping system with a manual vent valve and an EXDC Controller. Refer to the EXC Controller Instruction Manual when using an EXC Controller.

1. Close the valve in the backing line connecting the EXT Split Flow pump to the backing pump.

2. Switch off the backing pump.

3. Switch off the power supply to the EXT Split Flow Pump.

4. When the EXT Split Flow Pump rotational speed has fallen to 50% of full rotational speed, turn the manual vent

valve anti-clockwise to open it. Ensure that the rate of pressure rise does not exceed the allowed rate of pressure rise, otherwise the pump may be damaged. Refer to Section 3.4.

5. If water cooling is in use, turn off the cooling-water supply and/or turn off the power to the air cooler.

4.3 Safety interlocks and control system

The pump protection and safety interlock features are listed below. Refer to the instruction manual supplied with the controller for a full description of these features.

4.3.1 EXDC controllers

 The EXDC Controller monitors the temperature of the EXT Split Flow Pump and the electrical power

consumption of the pump. If the EXDC Controller detects excessive power consumption or temperature, the rotational speed of the pump motor is reduced until the power and temperature return to normal.

4.3.2 EXC controllers

 The EXC Controller monitors the temperature of the EXT Split Flow Pump and the electrical power

consumption of the pump. If the EXC Controller detects excessive power consumption or temperature, the rotational speed of the pump motor is reduced until the power and temperature return to normal.

 If the rotational speed is reduced to 50% of nominal speed, then power is removed (or after a user-defined

time delay) and the FAIL LED on the EXC Controller lights.

 If pump rotational over-speed is detected by the EXC Controller, the pump is stopped immediately and the

FAIL LED on the EXC Controller lights.

If the FAIL LED lights, switch off the backing pump immediately and vent the EXT Split Flow Pump. Once the EXT Split Flow Pump has stopped, rectify the cause of the failure (refer to Section 5.5), press the EXC Controller Start/Stop button to reset the Fail condition, and restart the EXT Split Flow Pump. If the pump is hot, allow sufficient time for it to cool before restarting it.

Note: Any references to LEDs and buttons do not apply to OEM versions of the EXC Controller i.e. EXC100L or

EXC100.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 29

5Maintenance

WARNING

The EXT Split Flow Pumps are not to be serviced by the customer. Pumps requiring servicing should be returned to Edwards or serviced by a qualified Edwards engineer.

Allow the pump rotor to stop, then disconnect the controller before removing the pump from the vacuum system for maintenance or fault finding procedures.

5.1 Introduction

B756-01-880 Issue K

Maintenance

The maintenance operations for the EXT Split Flow Pumps are described in the following sections. The ISX Inlet Screen, the WCX Water Cooler, the inlet strainer and inlet flange seals are available as spares (refer to Section 7). Fit the ISX Inlet Screen as described in Section 3.3.2. Fit the WCX Water Cooler as described in Section 3.6.3.

5.2 Bearing maintenance

When supplied, the pump contains sufficient lubricant to supply the bearings for life. No routine maintenance is therefore required between bearing replacements. The bearings are not user-serviceable. The bearings will need to be replaced at the recommended minor service interval. This is typically more than 20,000 hours, but may be less, depending on the type of pumping duty on which the pump is used.

When the bearings need replacement, Edwards recommends exchanging the pump for a factory-reconditioned replacement. Alternatively, send the pump to an Edwards Service Centre to have the bearings replaced.

When returning the pump to an Edwards Service Centre, use the procedure included at the end of this manual. Please note that the instruction to drain all fluids does not apply to the lubricant in the pump oil reservoirs.

5.3 Rotor life

The fatigue life of the EXT Split Flow Pump rotor s is typically 40 000 to 50 000 cycle s of acceleration from rest to full speed and then back to rest. As a precautionary measure, Edwards recommends that pumps are returned for a major service (rotor replacement) after 20 000 cycles or ten years, whichever occurs first.

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B756-01-880 Issue K

CAUTION

WARNING

Maintenance

5.4 Cleaning the pump

Clean the external surfaces of the EXT Split Flow pumps in a well-ventilated location. When using cleaning solutions and solvents to clean the pump, observe all precautions specified by the manufacturer. Avoid inhalation of any particulates which may be present in the pump.

Do not attempt to clean any parts of the EXT Split Flow pumps other than the external surfaces. Organic solvents may damage internal pump components. Do not use abrasive materials to clean any part of the pump.

If the inside of the EXT Split Flow pumps is contaminated, it may not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. In these circumstances, the pump must be returned to an Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump.

Use a cleaning solution which is suitable for the contaminants in the pump. Any organic solvent can be used to clean the external surfaces of the pump. Edwards recommends the use of non-CFC solvents, such as isopropanol or ethanol.

For environmental reasons, keep wastage of cleaning solutions and solvents to a minimum.

5.5 Fault finding

Refer to Table 7 for the possible causes of faults and for the recommended actions to rectify faults.Table 7 is applicable to a basic, manually controlled pumping system with an EXC Controller configured for local (manual) operation.

No te that if an E X DC Pum p Driv e Modul e is use d to co n trol t he EXT S plit Fl ow Pum p, or if an EXC C ontro ller c o nfigu r ed for remote operation is used to control the EXT Split Flow Pump, some of the checks and actions in Table 7 may not apply to the system. Refer to the fault finding section of the instruction manual supplied with the EXDC Pump Drive Module or EXC Controller for further fault finding information.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 31

Tab l e 7 - Fa u l t f i nd i ng

Symptom Check Action

The impeller does not rotate. After pressing start - Fail LED not lit.

The EXC Controller trips into Fail - at any speed.

The EXC Controller trips into Fail during the ramp-up and before 50% speed is reached.

Is the EXC Controller power LED lit? If not, check that the electrical

supply is on; check that the switch at the rear of the EXC Controller is on; check the fuse in the rear of the EXC Controller.

If all of the above are OK, then the EXC Controller is faulty. Consult Edwards or the supplier.

Is the EXC Controller Start/Stop LED flashing?

Is the EXC Controller first speed indication LED lit?

Are the system interlocks correctly connected?

Is the inlet pressure too high? Is the backing pressure too high?

Is the EXT Split Flow Pump running too hot?

Does the rotor rotate freely? If not, the EXT Split Flow Pump

Is the timer set incorrectly? Increase the timer setting (refer to

If so, check that the correct links are made on the EXC Controller logic interface (refer to the instruction manual supplied with the EXC Controller).

Check that any system interlocks are correctly made (refer to the instruction manual supplied with the EXC Controller).

Check that the pump-to-controller lead is connected.

If all of the above checks have been completed and the cause of the fault has not been identified, consult Edwards or the supplier.

If not, the EXC Controller is faulty. If lit, then the EXT Split Flow Pump is faulty. Consult Edwards or the supplier.

Ensure that the system interlocks do not open after the EXT Split Flow Pump has started.

If so, reduce the pumping load, or check for a gross leak into the system.

Increase the cooling-water flow or decrease the water temperature or do both. Air cooling may need to be added to water cooling. (Refer to

Section 3 for maximum inlet

pressure and cooling requirements). Check that external heat sources (such as system bakeout heaters) are not excessive.

bearings are damaged. Consult Edwards or the supplier.

the instruction manual supplied with the EXC Controller). If the EXC Controller still trips into Fail, consult Edwards or the supplier.

B756-01-880 Issue K

Maintenance

Page 32

B756-01-880 Issue K

Maintenance

Table 7 - Fault finding (continued)

Symptom Check Action

The EXC Controller trips into Fail after 50% speed has been reached the first two speed LEDs are lit.

The EXC Controller trips into Fail all the speed LEDs are lit.

System operating pressure cannot be reached.

The EXT Split Flow Pump is very noisy or there is excessive vibration or both.

None of the above. - Consult Edwards or the supplier.

Is the pressure too high? If so, reduce the pumping load or

check for a gross leak into the system.

If the high gas load is temporary, configure the EXC Controller to delay the Fail trip on 50% speed and set an appropriate delay time (refer to the instruction manual supplied with the EXC Controller).

Is the EXT Split Flow Pump running too hot?

Does the EXT Split Flow Pump rotor rotate freely?

Are any of the vacuum gauges contaminated?

Is the pumping speed insufficient (due to poor conductance between the pump and the gauge or too large a chamber)?

Is the interstage inlet pressure > 0.2 mbar (20 Pa)?

Is the backing pressure < 12 mbar (1200 Pa)?

Is the high-vacuum area of the system contaminated?

Check the rest of the system for leaks and contamination.

Is the pump rotational speed the same as the resonant frequency of the attached system?

Is the vibration being transmitted from the rotary pump?

Is the noise irregular and getting progressively worse?

Is the EXT Split Flow Pump making a constant high-pitched noise?

Increase the cooling water flow or decrease the water temperature or do both. Air cooling may need to be added to water cooling.

If not, the EXT Split Flow Pump bearings are damaged. Consult Edwards or the supplier.

Consult Edwards or the supplier.

If so, clean or replace them.

Increase the conductance or reduce the volume.

If the interstage inlet pressure is too high, inlet pressure at the turbomolecular inlet is reduced; ensure that the interstage inlet pressure is < 0.2 mbar (20 Pa).

Check for backing line leaks. If the backing pressure is too high, a larger backing pump may be required.

If so, clean the high-vacuum system.

If found, clean the contaminated areas and repair the leaks.

If so, change the natural frequency of the attached system.

If so, fit flexible bellows or a vibration isolator in the backing line.

If so, a bearing is defective. Consult Edwards or the supplier.

If so, the rotor is out of balance. Consult Edwards or the supplier.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 33

B756-01-880 Issue K

WARNING

6 Storage and disposal

6.1 Storage

Use the following procedure to store the pump.

1. Place protective covers over the main inlet, side inlet, outlet, interstage (Hi variants only) and vent ports.

2. Place the pump in its packing materials. For fastest pump-down when the pump is put back into service, seal the

pump inside a plastic bag together with a suitable desiccant.

3. Store the pump in cool, dry conditions until required for use. When required, prepare and install the pump as

described in Section 3.

4. Keep the pump upright at all times to prevent the drainage of oil from the bearing reservoir.

5. Avoid long-term storage if possible. When long-term storage is necessary, the pump should be set up and run for

at least eight hours every six months.

6.2 Disposal

Storage and disposal

In the unlikely event of a failure of the pump rotor, dust can be generated from the carbon fibre reinforced components. In this event, use appropriate Personal Protective Equipment when handling and disposing of the pump, and ensure that all pump inlets and outlets are capped off before disposal.

Dispose of the EXT Split Flow Pump and any components and accessories safely in accordance with all local and national safety and environmental requirements.

Take particular care with components and waste oil which have been contaminated with dangerous process substances.

Take appropriate action to avoid inhalation of any particulates which may be present in the pump. Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials which can decompose to very dangerous substances when heated to high temperatures.

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B756-01-880 Issue K

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 35

B756-01-880 Issue K

7 Service, spares and accessories

7.1 Introduction

Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses.

Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, state for each part required:

 Model and item number of the equipment.

 Serial number.

 Item number and description of the part.

7.2 Service

Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory specifications. Equipment which has been serviced, repaired or rebuilt is returned with a full warranty.

Service, spares and accessories

Local Service Centres also provide Edwards engineers to support on-site maintenance, service or repair of equipment.

For more information about service options, contact the nearest Service Centre or other Edwards company.

7.3 Spares

7.3.1 ISX inlet screens

Inlet screens are fitted to the pump as supplied to prevent damage from the entry of debris into the pump. The Item Numbers of replacement inlet screens are given below. Select the inlet screen according to the pump inlet flange size.

Note: Kits contain 10 screens each.

Table 8 - ISX inlet screens

Flange size Inlet screen Item Number

DN100ISO-K ISX100 B736-00-122

DN100ISO-K ISX100 (coarse) B756-40-813

DN63ISO-K ISX63 B722-00-116

DN100ISO-K ISO100 trapped O-ring integrated

coarse inlet screen

DN100ISO-K ISO100 trapped O-ring with

integrated fine inlet screen

C10523093 B756-30-991

B756-40-820

B756-40-819

Page 36

B756-01-880 Issue K

Service, spares and accessories

7.3.2 Inlet strainer (interstage pumps only)

The EXT70/200Hi and EXT200/200Hi Split Flow Pumps are supplied with inlet strainers for the interstage port. The Item Number of a replacement inlet strainer is given below.

Table 9 - Inlet strainer (interstage pumps only)

Flange size Item Number

NW25ISO-K A223-05-067

7.3.3 Inlet flange seals

EXT Split Flow Pumps are supplied with inlet seals. The Item Numbers of replacement seals are given below.

Table 10 - Inlet-flange seals

Flange size Inlet flange seal Item Number

DN100ISO-K ISO100 trapped O-ring, fluoroelastomer B271-58-171

DN63ISO-K ISO63 trapped O-ring, fluoroelastomer B271-58-170

7.4 Accessories

7.4.1 Installation

The accessories available for use with the EXT Split Flow Pumps are described in the following sections. Figure 2 shows how the accessories are fitted to an EXT Split Flow Pump.

7.4.2 EXDC drive modules

Fit an EXDC Drive Module as an alternative to an EXC Controller and pump-to-controller cable.

Table 11 - EXDC drive modules

Drive Module Item Number

EXDC160 24 V 45 deg D396-46-600

Pump system originally supplied with D396-46-510 (unpackaged)

7.4.3 EXC controllers

The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT70/ 200H, EXT70/200Hi, EXT200/200H or EXT200/200Hi Split Flow Pump. The Item Numbers of the EXC Controllers are given below.

Table 12 - EXC controllers

Controller Voltage Item Number

EXC100E 90 - 264 V a.c. D396-20-000

EXC100L 90 - 264 V a.c. D396-22-000

EXC120 90 - 264 V a.c. D396-16-000

EXC300 90 - 132/180 - 264 V a.c. D396-14-000

Edwards and the Edwards logo are trademarks of Edwards Limited.

Page 37

B756-01-880 Issue K

7.4.4 Pump-to-controller cables

A pump-to-controller cable must be fitted between an EXC Controller and the EXT Split Flow Pump. A cable is not supplied with the EXT Split Flow Pump or the EXC Controller (except EXC100L). The following cables are available:

Table 13 - Pump-to-controller cable

Cable Length Item Number

Pump-to-controller 1 m D396-18-010

Pump-to-controller 3 m D396-18-030

Pump-to-controller 5 m D396-18-050

7.4.5 EXT water cooling block assembly

A water cooler can be fitted to the EXT Split Flow Pump. However please refer to Section 2.4 to check the stability of the cooling-water supply:

Table 14 - EXT water cooling block assembly

Water cooler Item Number

WCX250M B735-01-164

Service, spares and accessories

7.4.6 TAV vent valve and vent port adaptor

Two solenoid-operated vent valves are available for system venting. The valves are 24 V d.c., normally-open, and can be driven automatically from the EXC Controller. The solenoid valve is fitted in place of the manual valve, or alternatively can be fitted with an adaptor (supplied with the valve) and be used with any suitable NW10 flanged port on the vacuum system. The vent port adaptor allows the vent port or the purge port to be used with any suitable NW10 fitting.

Table 15 - TAV vent valve and vent port adaptor

Product Item Number

TAV5 vent valve B580-66-010

TAV6 vent valve B580-66-020

NW10-1/8 inch BSP male adaptor B580-66-011

NW10-1/8 inch BSP male extended vent port adaptor B580-66-028

7.4.7 ACX air cooler

An A C X air coole r c a n be fit t e d to the EXT S p l it Flow P u m p. Howeve r , p lease re f e r to Section 2 to check the suitability of air cooling in a particular application.

Table 16 - ACX air cooler

Air cooler Item Number

ACX250H B580-53-160

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B756-01-880 Issue K

1. ACX cooling fan

2. WCX water cooler

3. TAV vent valve

4. EXDC controller

Service, spares and accessories

7.4.8 VRX vent restrictor

Use a VRX fixed orifice vent restrictor to restrict the flow of vent gas into the EXT Split Flow Pump. Refer to

Section 3.4 for information on the selection of the correct VRX vent restrictor.

Table 17 - VRX vent restrictor

Vent restrictor Orifice diameter Item Number

VRX10 0.1 mm B580-66-021

VRX20 0.2 mm B580-66-022

VRX30 0.3 mm B580-66-023

VRX50 0.5 mm B580-66-024

VRX70 0.7 mm B580-66-025

Figure 8 - Installation of optional accessories

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