Edwards EXT200/200H, EXT200/200H ICPMS, EXT200/200HI, EXT70/200H, EXT200/200H LCMS Instruction Manual

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Instruction Manual

EXT Split Flow Compound Turbomolecular Pumps

B756-01-880

Issue K Original

Description Item Number

24 Volt EXT Compound Turbomolecular Pumps:

EXT200/200H B756-01-991

EXT200/200Hi B756-02-991

EXT70/200H B756-03-991

EXT200/200H B756-24-991

EXT200/200H GCMS (Reversed Body) B756-41-991

EXT200/200H LCMS (Reversed Body) B756-43-991

24 Volt EXT system (comprising Compound Turbomolecular Pump and EXDC160):

EXT200/200H B756-21-991

EXT200/200Hi B756-22-991

EXT70/200H B756-23-991

EXT200/200H ICPMS B756-30-991

EXT200/200H GCMS B756-40-991

EXT200/200H GCMS (Reversed Body) B756-42-991

EXT200/200H LCMS (Reversed Body) B756-44-991

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

SPLIT-FLOW EXT Compound Turbomolecular Pump (24 Volts):

 EXT200/200H B756-01-991  EXT200/200H ICPMS B756-30-991 *  EXT200/200Hi B756-02-991  EXT200/200H GCMS B756-40-991 *  EXT70/200H B756-03-991  EXT200/200H GCMS B756-41-991  EXT200/200H B756-21-991 *  EXT200/200H GCMS B756-42-991  EXT200/200Hi B756-22-991 *  EXT200/200H LCMS B756-43-991  EXT70/200H B756-23-991 *  EXT200/200H LCMS B756-44-991  EXT200/200H B756-24-991

to which this declaration relates is in conformity with the following standard(s) or other normative document(s) EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps

EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and EN61326-1: 2006 Electrical equipment for measurement, control and laboratory Use. EMC C22.2 61010-1-04: 2004 Safety requirements for electrical equipment for measurement, Control and UL61010-1, 2nd Edition Safety requirements for electrical equipment for measurement, Control and EN50581: 2012 Technical Documentation for the Assessment of Electrical and Electronic Products

* Including EXDC160 Controller.

‡

Including extended vent port adaptor. 24V Pumps only comply with the Canadian Standard Authority and Underwriters Laboratory when used with EXDC 24V family of controllers.

and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility (EMC) Directive 2011/65/EU** Restriction of Certain Hazardous Substances (RoHS) Directive

** i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

Laboratory Use. General Requirements requirements. General requirements laboratory use – Part 1: General requirements laboratory use – Part 1: General requirements with respect to the Restriction of Hazardous Substances

13.01.2014, Burgess Hill

Peter Meares GV Technical Support Manager

This product has been manufactured under a quality system certified to ISO9001:2008

Date and Place

‡ ‡

P200-00-380 Issue K

Document Template: 02B01010 Attachment 4 Iss. 1

Declaration of Incorporation

We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the machine(s)

SPLIT-FLOW EXT Compound Turbomolecular Pump (24 Volts):

EXT200/200Hi B756-05-991 EXT200/200Hi B756-25-991 EXT200/200H B756-26-991

SPLIT-FLOW EXT Compound Turbomolecular Pump(80 Volts): EXT200/200H B756-05-000

EXT200/200Hi B756-25-000 EXT200/200H B756-28-000

to which this declaration relates is intended to be incorporated into other equipment and not to function independently. The machine(s) must not be put into service until the equipment into which it is incorporated has been brought into conformity with the provisions of the Machinery Directive, 2006/42/EC.

The machine(s) is in conformity with the following standard(s) or other normative document(s)

EN ISO 12100-2: 2003 Safety of Machinery. Basic Concepts, General Principles for + A1: 2009 Design. Technical Principals EN1012-2:1997, A1: 2010 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps

The relevant essential requirements of the Machinery Directive 2006/42/EC Annex 1 have been applied and fulfilled so far as practicable for this partly completed machinery. The relevant technical documentation has been compiled in accordance with Annex VII Part B. In response to a reasoned request by the national authorities, Edwards Ltd undertakes to provide relev ant information on the partly completed machinery (via email).

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

22 December 2009

B. D. Brewster, Technical Manager – Burgess Hill Products

This product has been manufactured under a qualit

Date and Place

system registered to ISO9001

P200-00-520 Issue C

This page intentionally blank.

B756-01-880 Issue K

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

2 Technical data .................................................................................... 3

2.1 General .................................................................................................................... 3

2.2 Pumping media ........................................................................................................... 3

2.3 Vent gas specification and vent control data ....................................................................... 4

2.4 Water cooling ............................................................................................................. 5

2.5 Materials exposed to gases pumped .................................................................................. 9

3 Installation ....................................................................................... 13

3.1 Unpack and inspect .....................................................................................................13

3.2 Typical installation .....................................................................................................13

3.3 Connection to the vacuum system ...................................................................................14

3.3.1 Mechanical fixing .......................................................................................................15

3.3.2 Inlet screens (supplied fitted) or integral mesh centering ring (supplied separate from the pump) ...... 16

3.3.3 Inlet connection and orientation ..................................................................................... 16

3.3.4 Backing connection ..................................................................................................... 17

3.3.5 Interstage connection (Hi pump variants only) .................................................................... 18

3.4 Vent options, vent valve connection and control ..................................................................18

3.5 Electrical installation ..................................................................................................18

3.5.1 EXDC controllers ........................................................................................................19

3.5.2 EXC controllers .......................................................................................................... 19

3.6 Cooling ...................................................................................................................19

3.6.1 Introduction .............................................................................................................19

3.6.2 Forced-air cooling ......................................................................................................20

3.6.3 Water cooling ............................................................................................................ 20

Contents

4 Operation ........................................................................................ 21

4.1 Start-up ..................................................................................................................21

4.2 Shut-down ................................................................................................................21

4.3 Safety interlocks and control system ................................................................................ 22

4.3.1 EXDC controllers ........................................................................................................22

4.3.2 EXC controllers .......................................................................................................... 22

5 Maintenance ..................................................................................... 23

5.1 Introduction .............................................................................................................23

5.2 Bearing maintenance ...................................................................................................23

5.3 Rotor life ................................................................................................................. 23

5.4 Cleaning the pump ......................................................................................................24

5.5 Fault finding ............................................................................................................. 24

6 Storage and disposal ........................................................................... 27

6.1 Storage ...................................................................................................................27

6.2 Disposal ................................................................................................................... 27

7 Service, spares and accessories .............................................................. 29

7.1 Introduction .............................................................................................................29

7.2 Service ....................................................................................................................29

mv/12/13

B756-01-880 Issue K

Contents

7.3 Spares .....................................................................................................................29

7.3.1 ISX inlet screens .........................................................................................................29

7.3.2 Inlet strainer (interstage pumps only) ...............................................................................30

7.3.3 Inlet flange seals ........................................................................................................30

7.4 Accessories ...............................................................................................................30

7.4.1 Installation ...............................................................................................................30

7.4.2 EXDC drive modules ....................................................................................................30

7.4.3 EXC controllers .......................................................................................................... 30

7.4.4 Pump-to-controller cables .............................................................................................31

7.4.5 EXT water cooling block assembly ...................................................................................31

7.4.6 TAV vent valve and vent port adaptor ...............................................................................31

7.4.7 ACX air cooler ...........................................................................................................31

7.4.8 VRX vent restrictor .....................................................................................................32

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Dimensions of the EXT 200/200H split flow pump system (units in mm) ....................................... 9

2 Dimensions of the EXT 200/200H GCMS split flow pump system (units in mm) ...............................10

3 Dimensions of the EXT 200/200H ICPMS split flow pump system (units in mm) ............................... 11

4 Dimensions of the EXT 200/200H GCMS/LCMS (reversed body) ................................................. 12

5 A typical vacuum system using a turbomolecular pump .......................................................... 14

6 Correct installation of inlet screen ..................................................................................16

7 Mounting attitude range of an EXT split flow pump ...............................................................17

8 Installation of optional accessories .................................................................................. 32

Tables

Table Page

1 General .................................................................................................................... 3

2 Vent gas and vent control data ........................................................................................ 4

3 Water cooling ............................................................................................................. 5

4 Technical data ........................................................................................................... 6

5 List of items supplied .................................................................................................. 15

6 Vent restrictor orifice diameter (with atmospheric pressure at the inlet of the vent valve) .............. 18

7 Fault finding .............................................................................................................25

8 ISX inlet screens .........................................................................................................29

9 Inlet strainer (interstage pumps only) ...............................................................................30

10 Inlet-flange seals ........................................................................................................ 30

11 EXDC drive modules ....................................................................................................30

12 EXC controllers .......................................................................................................... 30

13 Pump-to-controller cable .............................................................................................. 31

14 EXT water cooling block assembly ................................................................................... 31

15 TAV vent valve and vent port adaptor ............................................................................... 31

16 ACX air cooler ...........................................................................................................31

17 VRX vent restrictor .....................................................................................................32

Edwards and the Edwards logo are trademarks of Edwards Limited.

B756-01-880 Issue K

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation, maintenance and storage instructions for the Edwards EXT70/200H and EXT200/200H Split Flow Compound Molecular Pumps, abbreviated to EXT Split Flow Pump in the remainder of this manual. The pump must be used as specified in this manual. Read this manual before installing and operating the pump.

The EXT Split Flow Pumps are designed for use with an Edwards EXDC or EXC Controller. Read the instruction manual supplied with the controller before attempting to install or operate the equipment. The controller manual contains details of electrical installation.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Introduction

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

The following warning labels are on the pump:

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

Protective Conductor terminal.

The units used throughout this manual conform to the SI international system of units of measurement. Also throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard

min-1: this is a flow of 1cm3min-1 at an ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 105 Pa).

B756-01-880 Issue K

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

2Technical data

WARNING

2.1 General

Tab l e 1 - Ge n era l

Performance See Ta b le 4

Dimensions See Figure 1, 2, 3 and 4

Maximum inlet flange temperature 70 °C

Maximum magnetic field 3.5 mT Horizontal field

Installation category EN61010 part 1, Category 1

Pollution degree EN61010, Pollution degree 2

Electrical supply 24 V d.c.

Equipment type Fixed equipment, for indoor use only

Ambient operating temperature range 5 ºC to 40 ºC

Ambient operating humidity range 10 to 90% RH (non-condensing)

Maximum operating altitude 2000 m

Ambient storage temperature range -30 ºC to 70 ºC

B756-01-880 Issue K

Technical data

2.2 Pumping media

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.

Do not use Split Flow Pumps to pump explosive gas mixtures as the pumps are not suitable for this purpose.

If pyrophoric gases are pumped then the customer must supply adequate dilution with an inert gas.

It is the customer’s responsibility to leak check the system to ensure process gases cannot escape to the atmosphere and cause a hazard.

Gases pumped from different inlets may combine to cause dangerous mixtures.

B756-01-880 Issue K

CAUTION

WARNING

Technical data

If pumping hazardous gases or vapours, the customer must observe the safety recommendations of the supplier of the gas or vapour.

Do not use the EXT70/70/200H to pump gases containing more than 20% oxygen. If gases containing more than 20% oxygen are pumped, the pump lubricant will polymerise and the pump may fail prematurely.

Note: Concentrations of gases may be modified by the compression of the pump.

The pumps are designed to pump the following residual gases normally used in high-vacuum systems:

 Air  Nitrogen  Helium

 Carbon monoxide  Krypton  Hydrogen

 Neon  Argon  Butane

 Ethane  Propa ne

 Methane  Carbon dioxide

The pump can be used to pump oxygen and water vapour, subject to the following conditions:

 Oxygen – The oxygen concentration must be less than 20% by volume.

 Water vapour - Ensure that vapour does not condense inside the pump. Refer to Section 3.6.3.

If there is a requirement to pump a gas not in the list above, contact the supplier for advice. If the supplier is not contacted, the warranty on the pump may be invalidated. The pumps are not suitable for pumping aggressive or corrosive gases.

2.3 Vent gas specification and vent control data

Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the subsequent pump-down time. To reduce pump-down times, vent the pump with dry, clean gases.

Table 2 - Vent gas and vent control data

Vent gas Dry air, nitrogen, argon or other inert gases

Maximum dew point at atmospheric pressure -22 °C

Maximum size of particulate 1

Maximum concentration of oil 0.1 parts per million

Time for rotational speed to reach 50% > 15 sec

Maximum vent gas pressure < 0.5 bar gauge (7 psig, 0.5x10

* If using pressures in excess of this figure, please consult Edwards.

µm

Pa gauge)*

Edwards and the Edwards logo are trademarks of Edwards Limited.

B756-01-880 Issue K

2.4 Water cooling

The following cooling water specification corresponds to a typical high-quality drinking water specification. Check with the water supply authority if there is any doubt about the quality of the supply.

Tab l e 3 - Wat e r c o o l in g

Technical data

Quality

pH value 6.0 to 8.0

Maximum calcium carbonate concentration 75 parts per million

Maximum chloride concentration 100 parts per million

Minimum oxygen concentration 4 parts per million

Minimum water cooling flow rate (at 15 °C) 15 l hr

Water temperature See Ta bl e 4

Maximum water pressure 5 bar (gauge), 73.5 psig, 6x10

Materials exposed to cooling water Nickel plated brass

Mechanically and optically clean with no deposits or turbidity

-1

B756-01-880 Issue K

Technical data

Tab l e 4 - Tec h ni c al d at a

Parameter EXT70/200H

EXT200/200H

and Hi

Mass 9 kg 9 kg (7.5 kg

EXT200/200H

†

) 9 kg 9 kg mass without controller

GCMS

EXT 200/

200H

ICPMS

Notes

Side inlet flange DN100ISO DN100ISO DN100ISO DN100ISO controller

Main inlet flange DN63ISO DN100ISO DN100ISO DN100ISO

Outlet flange DN25NW DN25NW DN25NW DN25NW

Vent port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP

Interstage port

DN25NW DN25NW DN25NW DN25NW

(optional)

Main inlet pumping speed

‡**

110 l s

145 l s

130 l s

-1

177 l s

190 l s

163 l s

-1

- - 153 l s

155 l s

185 l s

175 l s

-1

107 l s

113 l s

102 l s

104 l s

-1

Pb < 5 mbar (500 Pa)

-1

Pb < 1 mbar (100 Pa)

-1

Pb < 0.5 mbar (50 Pa)

-1

Pb < 0.2 mbar (20 Pa)

Side inlet pumping speed

‡**

155 l s

131 l s

79 l s

-1

155 l s

131 l s

79 l s

-1

- - 127 l s

155 l s

179 l s

131 l s

-1

155 l s

187 l s

143 l s

148 l s

-1

Pb < 5 mbar (500 Pa)

-1

Pb < 1 mbar (100 Pa)

-1

Pb < 0.5 mbar (50 Pa)

Interstage pumping speed

‡

-8.75 l s-1N/A N/A Pb = 5 mbar (500 Pa)

-10.4 l s-1N/A N/A Pb = 5 mbar (500 Pa) Pi = 5 x 10-1 mbar (50 Pa)

Compression ratio from the backing port to the main inlet

He 1 x 10

>5 x 10

3.5 x 10

Ar - - >5 x 10

>5 x 10

1 x 10

7††

>5 x 10

1 x 10

-5 x 10

7‡‡

>5 x 10

2.5 x 10

>5 x 10

7††

7‡‡

Compression ratio from the side inlet to the main inlet

He 6 x 10

6 x 10

2 x 10

Ar - - 1.7 x 10

6 x 10

2 x 10

1 x 10

1.5 x 10

3.3 x 10

9 x 10

2.5 x 10

6 x 10

7 x 10

Edwards and the Edwards logo are trademarks of Edwards Limited.

+ 26 hidden pages

Edwards EXT200/200H, EXT200/200H ICPMS, EXT200/200HI, EXT70/200H, EXT200/200H LCMS Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Contents

Illustrations

Tables

1Introduction

1.1 Scope and definitions

2Technical data

2.1 General

2.2 Pumping media

2.3 Vent gas specification and vent control data

2.4 Water cooling