Instruction Manual
EXPT Pumping Station
B723-00-880
Issue B Original
Description Item Number
EXPT Pumping Station B723-00-000
B723-00-880 Issue B
Contents
Section Page
1 Introduction ........................................................................................1
1.1 Scope and definitions .................................................................................................... 1
1.2 Description................................................................................................................. 2
1.2.1 Overview...................................................................................................................2
1.2.2 General description of the EXPT pumping station major components ........................................... 2
1.2.3 Electrical protection ..................................................................................................... 2
1.2.4 Accessories ................................................................................................................2
2 Technical data .....................................................................................5
2.1 General..................................................................................................................... 5
2.2 Electrical data ............................................................................................................ 6
2.3 Legislation and standards ............................................................................................... 7
2.4 Operating and storage data............................................................................................. 7
2.5 Fuse ratings................................................................................................................ 7
2.6 Earth stud.................................................................................................................. 8
2.7 Electrical connections ................................................................................................... 8
2.8 Connections ............................................................................................................... 8
Contents
3 Installation ....................................................................................... 11
3.1 Safety......................................................................................................................11
3.2 Unpack and inspect .....................................................................................................11
3.3 Locate the EXPT pumping station.....................................................................................12
3.4 Fill the rotary pump with oil...........................................................................................13
3.5 XDS scroll pump silencer ...............................................................................................13
3.6 Fit accessories (optional)...............................................................................................13
3.7 Connect the EXPT pumping station to your vacuum system ......................................................14
3.8 Connect to your exhaust extraction system.........................................................................14
3.9 Connect the electrical supply .........................................................................................14
3.10 Additional earth bonding...............................................................................................14
3.11 Configure the EXPT pumping station .................................................................................14
3.12 Commission the installation............................................................................................16
3.13 Connecting an active gauge............................................................................................16
3.14 Connecting the logic interface ........................................................................................16
3.15 Connecting the serial interface .......................................................................................17
4 Operation......................................................................................... 19
4.1 Use of the backing pump controls ....................................................................................19
4.2 Start-up ...................................................................................................................19
4.3 Shut-down ................................................................................................................19
5 Maintenance...................................................................................... 21
5.1 Safety......................................................................................................................21
5.2 Maintenance plan........................................................................................................21
5.3 Inspect the hoses, pipelines and connections.......................................................................22
5.4 Trouble-shooting.........................................................................................................22
6 Storage and disposal ......................................... ..... ..... ..... ..... ..... ..... ..... 23
6.1 Storage ....................................................................................................................23
6.2 Disposal ...................................................................................................................23
ITR 21466
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B723-00-880 Issue B
Contents
7 Spares and accessories ......................................................................... 25
7.1 Introduction ..............................................................................................................25
7.2 Spares .....................................................................................................................25
7.3 Accessories ...............................................................................................................25
7.3.1 BX bakeout band.........................................................................................................25
Index............................................................................................... 27
Illustrations
Figure Page
1 Components of the EXPT pumping station (typical system shown)............................................... 3
2 Equipment dimensions (mm) (XDD1 and EXT75DX shown) ......................................................... 9
3 Position the lifting slings/lifting hooks...............................................................................13
4 Turbomolecular pump start delay with XDD1 diaphragm pump..................................................15
Tables
Table Page
1 EXPT1 pumping station mass............................................................................................ 5
2 EXPT2 pumping station mass............................................................................................ 5
3 Electrical data ............................................................................................................ 6
4 Operating and storage data............................................................................................. 7
5 Fuse ratings................................................................................................................ 7
6 Earth stud.................................................................................................................. 8
7 Electrical connections ................................................................................................... 8
8 Connections ............................................................................................................... 8
9 Checklist of components ...............................................................................................11
Supplementary publications
Publication title Publication number
XDD1 115/230 Diaphragm Pump A746-01-885
Turbo Instrument Controller (TIC) D397-10-880
EXT75DX Turbomolecular Pump B722-40-880
XDS Scroll Pump A726-01-880
Low Voltage EXT Compound Molecular Pumps EXT70H / 255H 24 V B722-20-880
EXDC Turbomolecular Pump Drive Modules D396-45-880
RV Rotary Vane Pumps A652-01-880
E2M Rotary Vane Pumps A371-22-880
EXPT Pumping Station Instruction Manual (quick guide) B723-00-860
CD ROM Instruction Manual B723-00-879
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B723-00-880 Issue B
Associated publications
Publication title Publication number
EXT Pump Accessories B580-65-880
Contents
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B723-00-880 Issue B
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B723-00-880 Issue B
CAUTION
WARNING
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards EXPT Pumping Station.
You must use the EXPT Pumping Station as specified in this manual.
Read this manual before you install and operate the EXPT Pumping Station. Important safety information is
highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and
CAUTIONS is defined below.
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
Introduction
A full list of Supplementary Publications is provided at the end of the Contents list of this manual. A number of these
Supplementary Publications will be supplied with your EXPT Pumping Station. The Supplementary Publications
supplied will be the instruction manuals for the components in your EXPT Pumping Station.
The Supplementary Publications you receive also contain WARNING and CAUTION instructions. When you install and
operate the EXPT Pumping Station, you must refer to these Supplementary Publications and obey all of the WARNING
and CAUTION instructions which they contain.
The units used throughout this manual conform to the SI international system of units of measurement.
The following IEC warning labels appear on the product and in the manual.
Warning – refer to accompanying documentation.
Warning – risk of electric shock.
Warning – hot surfaces.
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B723-00-880 Issue B
Introduction
1.2 Description
1.2.1 Overview
The EXPT Pumping Station is a fully automatic pumping system which is suitable for a wide range of applications. The
system is capable of utilising an extensive range of standard Edwards backing pumps, turbomolecular pumps and
controllers from a single compact unit. The open system configuration allows easy maintenance of the main pumping
components.
The function of the controller depends on your system configuration and will control the backing pump and
turbomolecular pump plus optional accessories. For systems with turbo and instrument controllers, up to three active
gauges may be used using the convenient gauge interface incorporated into the system housing. Both controllers are
provided with a large clear graphic display and easy-to-use control interface via a touch sensitive keypad. The system
incorporates an RS232/485 interface for control and data monitoring on a remote PC and a logic interface for
interface with associated system hardware.
Both systems are base mounted and come in two sizes. The EXP T1 base uses rob ust rubber feet as standard, castors
are optional. The EXPT2 base uses castors as standard to allow ease of transportation.
1.2.2 General description of the EXPT pumping station major components
For the general description of the major components used on the EXPT Pumping Station, click on the appropriate
instruction manual reference against each product type.
Diaphragm pump XDD1 (A746-01-885)
Rotary vane pumps E2M0.7 / E2M1.5 (A371-22-880 Section 1.2)
RV3 / RV5 / RV8 / RV12 (A652-01-880 Section 1.2)
Turbomolecular pumps EXT70H / EXT255H 24 V (B722-20-880 Section 1.2)
EXT75DX / EXT255DX (B722-40-880 Section 1.2)
Scroll pumps XDS5 / XDS10 (A726-01-880 Section 1.2)
TIC controller Turbo controller (D397-12-880 Section 1.2)
Turbo instrument controller (D397-22-880 Section 1.2)
1.2.3 Electrical protection
The EXPT Pumping Station has a double-pole thermal circuit breaker which provides short circuit protection. The
backing pump and TIC Controller both have overload protection.
1.2.4 Accessories
A wide range of standard accessories is available for the major components of the EXPT Pumping Station; refer to
Section 7.
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Figure 1 - Components of the EXPT pumping station (typical system shown)
13.Backing line valve
14.Flexible bellows
15.Turbomolecular pump
16.TIC controller
17.Castors (standard on EXP T2
systems)
1. Mains ON/OFF
2. Logic interface
3. Serial communications port
4. Mains input
5. Heater fuse
6. Backing pump fuse
7. TAV vent valve
8. Backing pump
9. Vacuum gauge inputs
10.Backing pump supply
11.Earth stud
12.Heater supply (turbomolecular
pump remote use only)
B723-00-880 Issue B
Introduction
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B723-00-880 Issue B
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B723-00-880 Issue B
2Technical data
Note: The operating, storage conditions and performance of the EXPT Pumping Station depends on the major
components fitted to the EXPT Pumping Station; refer to the technical data in the appropriate
supplementary publications.
2.1 General
Dimensions Refer to Figure 2
Mass Refer to Tables 1 and 2
Electrical data Refer to Table 3
Degree of protection (to IEC34-5: 1981) IP20
Initial force required to push the EXPT pumping station*
(for systems with castors)
* Measured under ideal conditions and will increase on uneven floor surfaces, slopes etc.
Table 1 - EXPT1 pumping station mass
EXT pump TIC controller Backing pump Inlet flange Mass (kg)
XDD1
70H / 75DX TIC (100W)
E2M0.7/1.5
255H / 255DX TIC (200W) XDD1
3.5 kgf max.
NW40 22.9
DN63ISO-K 23
DN63CF 24.9
NW40 26.4
DN63ISO-K 26.5
DN63CF 28.4
DN100 ISO-K 25.5
DN100CF 27.75
Technical data
Table 2 - EXPT2 pumping station mass
EXT pump TIC controller Backing pump Inlet flange Mass (kg)
NW40 38
RV3 / 5
RV8 / 12
70H / 75DX TIC (100W)
XDS5
XDS10
DN63ISO-K 38.1
DN63CF 40
NW40 42.7
DN63ISO-K 42.8
DN63CF 44.7
NW40 39.4
DN63ISO-K 39.5
DN63CF 41.4
NW40 40.9
DN63ISO-K 41
DN63CF 42.9
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B723-00-880 Issue B
Technical data
Table 2 - EXPT2 pumping station mass (continued)
EXT pump TIC controller Backing pump Inlet flange Mass (kg)
RV3 / 5
RV8 / 12
255H / 255DX TIC (200W)
XDS5
XDS10
2.2 Electrical data
Table 3 lists the electrical requirements for the different EXPT Pumping Stations.
Table 3 - Electrical data
DN100 ISO-K 40.6
DN100CF 42.85
DN100 ISO-K 45.3
DN100CF 47.55
DN100 ISO-K 42
DN100CF 44.25
DN100 ISO-K 43.5
DN100CF 45.75
Backing pump
XDD1
E2M0.7
E2M1.5
RV3 / 5
TIC
controller
100W 0.355
200W
100W
200W
100W
200W
100W
200W
Supply voltage
50/60Hz
100 4.67
110-120 4.04
220-240 2.07
100 6.02
220-240 2.57
110-120 4.34 8.14
220-240 2.27 4.07
110-120 5.44 9.24
220-240 2.77 4.57
110-120 5.54 14.44
220-240 2.67 6.77
110-120 6.64 15.54
220-240 3.17 7.27
100 8.15 33.94
220-240 3.67 16.87
100 9.5 43.1
220-240 4.17 17.37
Full load Start *
Current (A)
Maximum power
kW
0.49110-120 5.14
0.365
0.5
0.435
0.57
0.575110-120 7.04 20.875
0.71110-120 8.14 35.04
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Table 3 - Electrical data (continued)
B723-00-880 Issue B
Technical data
Backing pump
RV8/12
XDS5/10
Note: * If the EXPT Pumping Station uses a rotary vane pump, the system may draw up to the start current value
shown in Table 3. You must use a slow blow fuse to prevent unnecessary fuse failures, the start current
could typically last for several seconds and generally occurs when the rotary vane pump oil is cold.
TIC
controller
100W
200W
100W
200W
Supply voltage
50/60Hz
100 10.35 36.44
220-240 5.27 19.27
100 11.7 45.6
220-240 5.77 19.77
100 10.75
220-240 4.87
100 12.1
220-240 5.37
Full load Start *
Current (A)
Maximum power
kW
0.825110-120 10.24 22.375
0.96110-120 11.34 37.54
0.575110-120 9.64
0.71110-120 10.74
2.3 Legislation and standards
The legislation and standards with which the EXPT Pumping Station complies are listed in full on the Declaration of
Conformity shown on the front inside cover of this manual.
2.4 Operating and storage data
Table 4 - Operating and storage data
General items Reference data
Ambient operating temperature range 0 °C to 35 °C
Ambient storage temperature range -30 °C to 70 °C
Maximum ambient operating humidity Max 90% RH non cond at 40 °C
Maximum operating altitude 3000 m max.
2.5 Fuse ratings
Table 5 - Fuse ratings
General items Reference data
BX bakeout band fuse (Heater)
90 to 132 V a.c. electrical supply 1 A, type F 20 mm
180 to 264 V a.c. electrical supply 0.5 A, type F 20 mm
Backing pump
Refer to backing pump documentation 10 A, type T 20 mm (maximum)
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B723-00-880 Issue B
Technical data
2.6 Earth stud
Table 6 - Earth stud
General items Reference data
Earth stud M5
2.7 Electrical connections
Table 7 - Electrical connections
General items Reference data
Electrical supply (refer to Figure 1, item 4)
Inlet plug type CEE/IEC 320 (16A)
Backing pump (refer to Figure 1, item 10)
Outlet socket type CEE/IEC 320
Max power 600 W
Bakeout band (refer to Figure 1, item 12)
Outlet socket type CEE/IEC 320
Max power 150 W
2.8 Connections
Note: The connectors listed in Table 8 offer the same functionality as the connectors on the TIC Controller. Refer
to the TIC instruction manual for full details for these connectors.
Table 8 - Connections
General items Reference data
Active gauge connectors
Connector type FCC/RJ45, 8-way
Power supply 24 V d.c.
Logic interface
Connector type 25-way sub-miniature ‘D’ type socket
Power supply 24 V d.c.
Serial communications
Connector type 9-way sub-miniature ‘D’ type socket
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Figure 2 - Equipment dimensions (mm) (XDD1 and EXT75DX shown)
Position Base or pump description Dimension
A
EXT70H
B
EXT75DX
EXT255H/
EXT255DX
EXPT1 380.0
EXPT2 500.0
ISO63/CF63 415.0
NW40 422.0
ISO63 415.0
NW40 427.0
CF63 434.0
ISO100 450.1
CF100 450.1
B723-00-880 Issue B
Technical data
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B723-00-880 Issue B
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B723-00-880 Issue B
WARNING
3 Installation
3.1 Safety
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.
z When you refer to a manual supplied as a Supplementary Publication, you must obey all of the W ARNING and
CAUTION instructions in the manual.
z A suitably trained and supervised technician must install the EXPT Pumping Station.
z Check that all the required parts are available and of the correct type before you start work.
z Ensure that the installation technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
z Isolate the other components in your system from the electrical supply so that they cannot be operated
accidentally.
Installation
z Do not reuse ‘O’ rings and Co-Seals if they are damaged.
z Dispose of components, grease and oil safely (refer to Section 6).
z Take care to protect sealing-faces from damage.
z Leak-test the system after installation and seal any leaks found.
3.2 Unpack and inspect
Remove the outer cover and all packing materials, remove the protective covers from the inlet and outlet ports,
inspect the system for any damage. If the EXPT Pumping Station is damaged, notify your supplier and the carrier in
writing within three days; state your order number and invoice number. Retain all packing materials for inspection.
Do not use the EXPT Pumping Station if it is damaged. Check that your package contains the items listed in Table 9.
If any item is missing, notify your supplier within three days.
If the EXPT Pumping Station is not to be used immediately, replace the protective covers. Store the EXPT Pumping
Station in suitable conditions as described in Section 6.1.
Table 9 - Checklist of components
Qty Description Check (✓)
1 EXPT Pumping Station
1 Instruction Manual Package
1 Logic Interface Interlock D-Connector
1TMP Flange Inlet Seal
1 Rotary Pump Oil (RV/E2M pumps only)
1 XDS Silencer (optional on systems with XDS pumps)
❏
❏
❏
❏
❏
❏
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B723-00-880 Issue B
CAUTION
CAUTION
CAUTION
WARNING
WARNING
Installation
3.3 Locate the EXPT pumping station
Heavy objects can cause muscle strain or back injury. It is advisable to use suitable lifting
equipment when moving the EXPT Pumping Station.
(Applicable for systems with base castors) For your safety, both front castors must be locked when
the system is in operation. If you do not and the turbomolecular pump seizes, movement of the
system may damage equipment and injure people.
When lifting the EXPT Pumping Station, do not attempt to support the mass of the system from the backing
pump.
When lifting the EXPT Pumping Station, always use slings with sufficient length to prevent damage of the system
components.
Before attempting to lift the EXPT Pumping Station, move the system (on its pallet) close to the operating position.
Ensure that you provide a firm level base before removing the system from its pallet. It is advisable to always use
mechanical lifting equipment when moving the heavier EXPT2 systems. Use slings around the base of the system from
front to back, make sure each sling is routed between the castors or feet and the base guides to prevent slippage.
Alternatively use straps with lifting hooks. Refer to Figure 3 which shows where to locate the slings or lifting hooks.
When locating the EXPT Pumping Station, care should be taken not to restrict the ventilation grid located under
the base of the system. Failing to observe this may result in over heating of the controller and the
turbomolecular pump.
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Figure 3 - Position the lifting slings/lifting hooks
B723-00-880 Issue B
Installation
3.4 Fill the rotary pump with oil
If the EXPT Pumping Station uses a EM or RV series rotary or rotary vane pump you must fill it w ith the correct quantity
of oil (supplied with the equipment) before you operate the equipment, as described in the pump Instruction Manual.
3.5 XDS scroll pump silencer
The silencer is used to reduce exhaust noise during pump down and gas ballast operations. This part may be ordered
and supplied (not fitted) with the system or can be ordered as an optional extra. To fit the silencer, follow the
instructions in manual A505-97-880.
3.6 Fit accessories (optional)
If you wish to fit accessories to the EXPT Pu mping Station, fit them now, before you start to install the EXPT Pum ping
Station into your vacuum system. Install accessories as described in the instruction manuals supplied with the
accessories. Refer to Section 7 for further information on the accessories available and for specific fitting instructions
to fit the accessories to the EXPT Pumping Station.
Note: The use of water coolers and BX bake-out bands on the EXPT Pumping Station is not permitted. If you wish
to fit these accessories, it is advisable to install the turbomolecular pump away from the EXPT Pumping
Station. For further details regarding turbomolecular pump remote mounting please contact Edwards UK.
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B723-00-880 Issue B
WARNING
WARNING
WARNING
Installation
3.7 Connect the EXPT pumping station to your vacuum system
If you install your vacuum system directly onto the EXPT Pumping Station, the centre of gravity of
the mass must be above and within 300 mm of the centre line.
Note: If the vacuum system is to be supported by the EXPT Pumping Station, the mass of the vacuum system must
not be greater than the maximum mass which can be supported by the turbomolecular pump (refer to the
EXT Pump Instruction Manual). Use the co-seal or copper gasket (supplied with the equipment) with a
suitable clamp to secure to the vacuum system. Alternatively you may wish t o use a pipeline to connect the
vacuum system to the inlet of the turbomolecular pump. Refer to the EXT Pump Instruction Manual for
further details.
3.8 Connect to your exhaust extraction system
Note: For further information, refer to the instruction manual which corresponds to the backing pump fitted to
your EXPT Pumping Station.
3.9 Connect the electrical supply
Ensure that the electrical installation of the EXPT Pumping Station conforms with your local and
national safety requirements. It must be connected to a suitably fused and protected electrical
supply and a suitable earth point.
Ensure the mains cord is routed so as not to cause a trip hazard.
Check that your electrical supply is suitable for this equipment. Refer to Table 3 for the electrical requirements for
this equipment. The EXPT Pumping Station is supplied with an electrical cable which includes a moulded
IEC connector fitted at one end, the other end of the cable will be fitted with a moulded plug suitable for connection
to the local electrical supply.
3.10 Additional earth bonding
The electrical supply cable normally provides protective earthing for electrical safety. If this is not the case, or if
additional earth bonding is required, the earth stud located on the base at the rear of the EXPT Pumping Station
should be connected to your vacuum system.
3.11 Configure the EXPT pumping station
As supplied, the TIC Controller has been reconfigured for the TIC Pumping Station to suit most vacuum applications
and will:
When the TIC System ON is selected:
z Switch on both the backing pump and the turbomolecular pump *.
z Close the TAV vent valve.
z Open the backing valve.
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B723-00-880 Issue B
When the TIC System OFF is selected:
z Switch off both the backing pump and the turbomolecular pump.
z Close the backing valve.
EXDC pump controllers:
z Open the TAV vent valve fully after the turbomolecular pump has slowed to 50% of its rotational speed.
DX pump controllers:
z Open the T AV vent valve (controlled venting) from 100–50% rotational speed, and then open fully from 50% of
full rotational speed.
Note: The TAV vent valve and LCPVEK backing valve are optional extras.
Note: The TIC Controller factory settings have been changed to provide a standard operation for the EXPT
Pumping Station, if you replace the TIC Controller you should reconfigure the set up options to suit your
application, refer to the TIC instruction manual for further details.
Note: * If your EXPT Pumping Station uses an XDD1 diaphragm pump, the turbomolecular pump drive will be
delayed for two minutes while the backing pump reduces the pressure to a suitable level, this is typical for
a five litre volume and will prevent the turbomolecular pump from running under high pressure for a
prolonged period. This delay is adjustable (refer to the TIC instruction manual) and is recommended for
system volumes >2 litres, refer to Figure 4 to estimate the turbomolecular start delay if you know your
system volume.
Installation
Figure 4 - Turbomolecular pump start delay with XDD1 diaphragm pump
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B723-00-880 Issue B
CAUTION
CAUTION
CAUTION
WARNING
Installation
3.12 Commission the installation
Do not operate the system with the exhaust pipeline blocked. For example, if your EXPT Pumping
Station uses a rotary vane pump, oil mist may be discharged from the oil mist filter and cause injury
to people.
After you have installed the EXPT Pumping Station, use the following procedure to test the system.
1. Make sure that all the electrical connections are secure.
2. Switch on the electrical supply and your exhaust-extraction system (if available).
3. Turn ON the EXPT Pumping Station using the ON/OFF switch positioned on the rear panel. To start-up the
equipment, refer to the TIC instruction manual. Check that the equipment operates as described in
Section 3.11.
4. Inspect the vacuum, exhaust and pipeline connections and check that there are no leaks. Sea l if any leaks are
found.
5. Wait until the turbomolecular pump has reached full speed, then select OFF on the front panel of the TIC
Controller again; check that both pumps stop.
3.13 Connecting an active gauge
Do not connect Barocel capacitance manometers to the TIC Pumping Station gauge connectors. Doing so will
result in damage to the gauge and will invalidate the warranty.
Up to three compatible active gauges can be fitted to the gauge connectors on the rear inside of the EXPT Pumping
Station housing, refer to Figure 1. Connect the gauges using Edwards active gauge cables to each of the three sockets,
the number indicated above each socket corresponds to the same gauge number shown on the TIC Controller display.
This option is only available if the EXPT Pumping Station uses a TIC turbo and instrument controller.
Note: Only one AIGX gauge can be connected to the TIC Pumping Station gauge connectors at a time.
3.14 Connecting the logic interface
Do not earth the logic interface 0 V lines (pins 7, 10, 12, and 13). If you do, you will provide an earth return
path for any electrical fault in the pump-motor and this could damage your Controller or your control
equipment.
Do not connect voltages greater than 24 V to the logic interface.
The logic interface provides a number of signals that can be used for monitoring the status of your vacuum system,
and for controlling certain aspects of its operation. These signals can be broadly divided into three groups, control
inputs, control outputs and status outputs.
The EXPT Pumping Station is supplied with an interlock D-connector connected into the logic interface a t the rear of
the equipment. If you do not intend to connect the logic interface to your system you must use the interlock
D-connector, failing to do so will disable a number of control outputs which operate the EXPT system.
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B723-00-880 Issue B
Note: The user logic interface on the rear panel offers the same functionality as the logic interface on the TIC
Controller. Refer to the TIC instruction manual for further details of this connector.
3.15 Connecting the serial interface
The TIC has two serial communications protocols built in, RS232 and RS485. RS232 is the simple st interface and can
be used to allow a host PC to control the TIC. RS485 allows a host PC to control a small network of TICs.
Note: The user serial interface on the rear panel offers the same functionality as the serial interface on the TIC
Controller. Refer to the TIC instruction manual for further details of this connector.
Installation
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B723-00-880 Issue B
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B723-00-880 Issue B
4 Operation
4.1 Use of the backing pump controls
If the backing pump has a mode selector and or ga s-ballast control, refer to the ap propriate backing pump instruction
manual to optimise the performance of the pump for your application.
4.2 Start-up
Use the following procedure to start the EXPT Pumping Station. If you wish to reconfigure the operation of the EXPT
Pumping Station to suit an application, refer to the TIC instruction manual.
1. Switch on the electrical supply to the EXPT Pumping Station and your exhaust-extraction system (if available).
2. Turn ON the EXPT Pumping Station using the ON/OFF switch positioned on the rear panel.
3. To operate the equipment components, refer to the TIC instruction manual for full operation.
4.3 Shut-down
Operation
Use the following procedure to shut down the EXPT Pumping Station.
1. Refer to the TIC Controller instruction manual to stop the turbomolecular pump (TMP) and backing pump
operation.
2. Switch off the ON/OFF rocker switch located on the equipment rear panel.
3. Remove the electrical mains supply from the equipment.
© Edwards Limited 2008. All rights reserved. Page 19
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B723-00-880 Issue B
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B723-00-880 Issue B
WARNING
5Maintenance
5.1 Safety
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.
z When you refer to a manual supplied as a Supplementary Publication, you must obey all of the W ARNING and
CAUTION instructions in the manual.
z A suitably trained and supervised technician must maintain the EXPT Pumping Station.
z Allow the pumps to cool to a safe temperature before you start maintenance work.
z Check that all the required parts are available and of the correct type before you start work.
z Ensure that the maintenance technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
Dismantle and clean contaminated components in a fume-cupboard.
Maintenance
z Isolate the EXPT Pumping Station and other components in the system from the electrical supp ly so that they
cannot be operated accidentally.
z Do not reuse ‘O’ rings and Co-Seals if they are damaged.
z Dispose of components, grease and oil safely (refer to Section 6).
z Protect sealing -faces from damage.
z Do not touch or inhale the thermal breakdown products of fluoroelastomer seals. These breakdown products
are very dangerous and may be present if the EXPT Pumping Station has been heated to 260 °C and above.
z Leak-test the system after maintenance and seal any leaks found if you have discon nected any vacuum or
exhaust pipeline connections.
5.2 Maintenance plan
The following documents list the minimum maintenance operations necessary to maintain the EXPT Pumping Station
in normal use.
More frequent maintenance may be necessary if the EXPT Pumping Station has been used to pump corrosive or
abrasive gases and vapours. If necessary, adjust the maintenance plan according to your experience.
EXT pumps
Turbomolecular pumps EXT70H / EXT255H 24 V (B722-20-880)
EXT75DX / EXT255DX (B722-40-880)
Backing pumps
Diaphragm pump XDD1 (A746-01-885)
Rotary vane pumps E2M0.7 / E2M1.5 (A371-22-880)
RV3 / RV5 / RV8 / RV12 (A652-01-880)
Scroll pumps XDS5 / XDS10 (A726-01-880)
© Edwards Limited 2008. All rights reserved. Page 21
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-00-880 Issue B
Maintenance
5.3 Inspect the hoses, pipelines and connections
1. If the turbomolecular pump on your EXPT Pumping Station is water-cooled:
z Inspect all of the cooling-water connections and check that they are secure. Tighten any loose connections.
z Inspect all cooling-water hoses, pipelines and connections and check that they are not corroded or damaged
and that they do not leak. Replace or repair any corroded or damaged component and seal any leaks found.
2. Inspect all of the electrical connections and check that they are secure. Tighten any loose connections.
3. Inspect all of the electrical cables and check that they are not damaged and have not overheated. Replace or
repair any damaged or overheated cable.
4. Inspect all of the vacuum and exhaust connections and check that they are secure. Tighten any loose
connections.
5. Inspect all of the vacuum and exhaust pipelines and check that they are not corroded or damaged and that they
do not leak. Replace or repair any corroded or damaged component and seal any leaks found.
5.4 Trouble-shooting
For trouble-shooting instructions on the EXPT Pumping Station, refer to the following documents:
EXT pumps
Turbomolecular pumps EXT70H / EXT255H 24 V (B722-20-880)
EXT75DX / EXT255DX (B722-40-880)
Backing pumps
Diaphragm pump XDD1 (A746-01-885)
Rotary vane pumps E2M0.7 / E2M1.5 (A371-22-880)
RV3 / RV5 / RV8 / RV12 (A652-01-880)
Scroll pumps XDS5 / XDS10 (A726-01-880)
TIC controller
TIC controller Turbo controller (D397-12-880)
Turbo instrument controller (D397-22-880)
Page 22 © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-00-880 Issue B
6 Storage and disposal
Note: We recommend that you avoid long-term storage of the EXPT Pumping Station. If you will store the EXPT
Pumping Station for several months, refer to the storage instructions in the relevant instruction manual.
6.1 Storage
Use the following procedure to store the EXPT Pumping Station:
1. Shut down the EXPT Pumping Station as described in Section 4.3.
2. Isolate the EXPT Pumping Station from the electrical supply and disconnect it from the vacuum system.
3. Drain the oil from the backing pump (rotary vane pumps only) as described in the instruction manual for the
pump. Refer to the following documents:
Rotary vane pumps E2M0.7 / E2M1.5 (A371-22-880)
RV3 / RV5 / RV8 / RV12 (A652-01-880)
4. Place protective covers over the inlet and outlet-flanges.
5. For the fastest pump-down after the EXPT Pumping Station is re-installed, seal the turbomolecular pump inside
a plastic bag together with a suitable desiccant.
Storage and disposal
6. Store the EXPT Pumping Station in cool, dry conditions until required for use.
6.2 Disposal
Dispose of the EXPT Pumping Station and any components safely in accordance with all local and national safety and
environmental requirements.
Particular care must be taken with components which have been contaminated with dangerous process substances.
© Edwards Limited 2008. All rights reserved. Page 23
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B723-00-880 Issue B
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B723-00-880 Issue B
7 Spares and accessories
7.1 Introduction
Edwards products, spares and accessories are available from Edwards compani es in Belgium, Brazil, Canada, France,
Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, U.S.A and a worldwide network of
distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards
training courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each
part required:
z Model and Item Number of your equipment
z Serial number (if any)
z Item Number and description of the part.
Fit accessories as described in the Supplementary Publications and in the instruction manual supplied with the
accessory.
Spares and accessories
7.2 Spares
The spares available for use with the EXPT Pumping Station (including replacement component parts) are listed in
the instruction manuals supplied as Supplementary Publications.
7.3 Accessories
For accessories on the EXPT Pumping Station, refer to the following documents:
EXT pumps
Turbomolecular pumps EXT70H / EXT255H 24 V (B722-20-880)
EXT75DX / EXT255DX (B722-40-880)
Backing pumps
Diaphragm pump XDD1 (A746-01-885)
Rotary vane pumps E2M0.7 / E2M1.5 (A371-22-880)
RV3 / RV5 / RV8 / RV12 (A652-01-880)
Scroll pumps XDS5 / XDS10 (A726-01-880)
TIC controller
TIC controller Turbo controller (D397-12-880)
Turbo instrument controller (D397-22-880)
7.3.1 BX bakeout band
The BX bakeout band should only be used on turbomolecular pumps intended to be used remotely away from the
EXPT Pumping Station. For further details please contact Edwards UK.
© Edwards Limited 2008. All rights reserved. Page 25
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Index
B723-00-880 Issue B
Index
A
Accessories ............................................2, 25
Additional earth bonding ...............................14
B
BX bakeout band ......................................... 25
C
Checklist of components ............................... 11
Commission the installation
Configure the EXPT pumping station
Connect the electrical supply ......................... 14
Connect the EXPT pumping station to your
vacuum system
Connect to your exhaust extraction system ......... 14
Connecting an active gauge ............................ 16
Connecting the logic interface
Connecting the serial interface ....................... 17
Connections ................................................8
........................................... 14
............................ 16
................. 14
........................ 16
D
Description .................................................2
Disposal ................................................... 23
M
Maintenance .............................................. 21
Maintenance plan ........................................ 21
O
Operating and storage data ..............................7
Operation ................................................. 19
Overview
....................................................2
S
Safety ..................................................... 11
Shut-down ................................................ 19
..................................................... 25
Spares
Start-up
Storage .................................................... 23
................................................... 19
T
Technical data .............................................5
Trouble-shooting ........................................ 22
U
Unpack and inspect ..................................... 11
Use of the backing pump controls .................... 19
E
Earth stud ...................................................8
Electrical connections ....................................8
Electrical data
Electrical protection ......................................2
.............................................6
F
Fill the rotary pump with oil ........................... 13
Fit accessories (optional) ............................... 13
Fuse ratings
.................................................7
G
General description of the EXPT pumping station
major components
.........................................2
I
Inspect the hoses, pipelines and connections ....... 22
Installation ................................................ 11
Introduction
................................................1
L
Legislation and standards ................................7
Locate the EXPT pumping station
..................... 12
X
XDS scroll pump silencer ............................... 13
© Edwards Limited 2008. All rights reserved. Page 27
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B723-00-880 Issue B
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