Edwards EH250FX, EH1200FX, EH2600FX, EH Series, EH500FX Instruction Manual

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Instruction Manual

EH Mechanical Booster Pumps

A301-05-880

Issue A

Original Instructions

For safe area applications

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

EH250 A30105945 A30106946 A30105934 A30106934 EH500 A30205945 A30206946 A30205934 A30206934 EH1200 A30505945 A30506946 A30505934 A30506934 EH2600 A30705945 A30706946 A30705934 A30706934 EH4200 A30905945 A30906946 A30905934 A30906934

EH250FX A30107945 A30108946 A30107934 A30108934 EH500FX A30207945 A30208946 A30207934 A30208934 EH1200FX A30507945 A30508946 A30507934 A30508934 EH2600FX A30707945 A30708946 A30707934 A30708934 EH4200FX A30907945 A30908946 A30907934 A30908934

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2:1996+A1:2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum

Pumps EN60034-1:2010 Rotating electrical machines. Rating and performance EN60034-30-1:2014 Rotating Electrical Machines. Efficiency classes of line operated AC motors (IE code) EN50581:2012 Technical Documentation for the Assessment of Electrical and

Electronic Products with respect to the Restriction of Hazardous

Substances and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2014/35/EU Low Voltage Directive 2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive 2009/125/EC Ecodesign Directive, following the requirements of Regulation (EC) No. 640/2009 (as amended)

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

16.06.2015, Burgess Hill

Mr Peter Meares Senior Technical Support Manager, General Vacuum

This product has been manufactured using the Edwards quality management system

Date and Place

P200-08-780 Issue B

A301-05-880 Issue A

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

1.2 Description ................................................................................................................ 1

1.2.1 Overview ..................................................................................................................1

1.2.2 General construction .................................................................................................... 4

1.2.3 Principle of operation ................................................................................................... 4

1.2.4 Hydrokinetic drive ....................................................................................................... 4

1.3 Chemical & ATEX pumps ................................................................................................ 4

2 Technical Data .................................................................................... 5

2.1 Operating and storage conditions ..................................................................................... 5

2.2 Performance .............................................................................................................. 5

2.3 Recommended primary (backing) pumps ............................................................................ 6

2.4 Mechanical data .......................................................................................................... 6

2.5 Electrical data ............................................................................................................ 7

2.6 Lubrication data ......................................................................................................... 7

2.7 Hydrokinetic drive/gearbox nitrogen supply ........................................................................ 7

2.8 Cooling water data ...................................................................................................... 8

2.9 Noise and vibration data ................................................................................................ 8

2.10 Connections ............................................................................................................... 8

2.11 Materials of construction of components exposed to pumped gases ............................................ 9

2.12 Azide compatibility ...................................................................................................... 9

2.13 Item Numbers ............................................................................................................ 9

Contents

3 Installation ....................................................................................... 15

3.1 Safety ..................................................................................................................... 15

3.2 System requirements ................................................................................................... 15

3.3 Unpack and inspect .....................................................................................................16

3.4 Fill the pump with oil ..................................................................................................17

3.4.1 Hydrokinetic drive/gearbox ........................................................................................... 17

3.4.2 Shaft seal reservoir ..................................................................................................... 17

3.4.3 Gear cover (all EH1200, EH2600 and EH4200 model pumps only) ...............................................18

3.5 Cooling water connections (all EH1200, EH2600 and EH4200 pumps only) ....................................19

3.6 Electrical connections ..................................................................................................19

3.6.1 Electrical supply configuration .......................................................................................19

3.6.2 Motor connections ......................................................................................................19

3.7 Check the direction of pump rotation ...............................................................................20

3.8 Connect the pump inlet and outlet ..................................................................................21

3.9 External evacuation of hydrokinetic drive/gearbox (optional) ..................................................22

4 Operation ........................................................................................ 23

4.1 Operational safety ...................................................................................................... 23

4.2 Start-up procedure .....................................................................................................23

4.2.1 Pre-start checks ......................................................................................................... 23

4.2.2 Start-up ..................................................................................................................23

4.3 Shutdown .................................................................................................................24

5 Maintenance ..................................................................................... 25

5.1 Safety information ......................................................................................................25

5.2 Maintenance plan .......................................................................................................26

gp/0248/10/14

A301-05-880 Issue A

Contents

5.3 Check the oil levels ..................................................................................................... 26

5.4 Inspect the pump connections ........................................................................................ 26

5.5 Change the pump oil ...................................................................................................27

5.6 Lubricate the rear bearing (All EH250FX and EH500FX model pumps only) ...................................28

5.7 Overhaul the pump .....................................................................................................29

6 Storage and Disposal ........................................................................... 31

6.1 Storage ...................................................................................................................31

6.2 Disposal ................................................................................................................... 31

7 Service and Spares .............................................................................. 33

7.1 Introduction .............................................................................................................33

7.2 Service .................................................................................................................... 33

7.3 Spares ..................................................................................................................... 33

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 All EH250FX and EH500FX pump variants ............................................................................ 2

2 All EH1200FX, EH2600 and EH4200 pump variants .................................................................. 3

3 EH250/EH250FX dimensions (mm) ................................................................................... 10

4 EH500/EH500FX dimensions (mm) ................................................................................... 11

5 EH1200/EH1200FX dimensions (mm) ................................................................................. 12

6 EH2600/EH2600FX dimensions (mm) ................................................................................. 13

7 EH4200/EH4200FX dimensions (mm) ................................................................................. 14

8 Sight glasses .............................................................................................................18

9 Flange loading limits ...................................................................................................22

10 Lubricate the rear bearing (EH250FX, EH500 and EH500FX pumps only) ......................................29

Edwards and the Edwards logo are trademarks of Edwards Limited.

A301-05-880 Issue A

Tables

Table Page

1 Operating and storage conditions ..................................................................................... 5

2 Performance data ........................................................................................................ 5

3 Recommended primary (backing) pumps ............................................................................ 6

4 Mechanical data .......................................................................................................... 6

5 Electrical data ............................................................................................................ 7

6 Lubrication data ......................................................................................................... 7

7 Hydrokenetic drive/gearbox purge nitrogen supply data .......................................................... 7

8 Cooling water supply data: EH pumps ................................................................................ 8

9 Noise and vibration data ................................................................................................ 8

10 Connections ............................................................................................................... 8

11 Materials of construction ............................................................................................... 9

12 Item numbers ............................................................................................................. 9

13 Motor cable gland hole sizes .......................................................................................... 20

14 Maintenance plan ....................................................................................................... 25

15 Spare item numbers .................................................................................................... 33

16 EH250FX and EH500FX spare parts ................................................................................... 33

17 EH1200 spare parts .....................................................................................................34

18 EH2600 and EH4200 spare parts ...................................................................................... 34

Contents

Associated publications

Publication title Publication number

Vacuum Pump and Vacuum Systems Safety Manual P400-40-100

A301-05-880 Issue A

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

A301-05-880 Issue A

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for Edwards EH mechanical booster pumps listed below. The pumps must be used as specified in this manual. Read this manual before installing and operating the pumps.

 PFPE pumps:

EH250FX, EH500FX, EH1200FX, EH2600FX and EH4200FX

 Hydrocarbon pumps:

EH250, EH500, EH1200, EH2600 and EH4200

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Introduction

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

The units used throughout this manual conform to the SI international system of units of measurement.

1.2 Description

1.2.1 Overview

The EH pumps are compact and have high pumping speeds. The EH pumps must be used with a suitable backing pump delivering at least 1/10th of volumetric capacity of the booster pump. The EH pumps can operate with a maximum continuous inlet pressure of 1000 mbar. Lower system pressures can be achieved by the use of two or more EH pumps in series.

On all EH pumps, the hydrokinetic drive/gearbox is connected to the pump outlet by a pressure equalisation passageway and forms an integral part of the vacuum system. The connecting passageway has a filter which removes debris and so prevents contamination of the lubricating oil and bearings. For an even cleaner system, evacuate the end cover/gear cover by connecting the evacuation port (Figure 1, item 5 or Figure 2, item 6) to the pump inlet or to an external vacuum pump.

The hydrocarbon EH pumps use hydrocarbon oils, such as Edwards Ultragrade 20. Versions of the EH pumps for use with PFPE (perfluoropolyether) oils are also available for vacuum systems in which enriched oxygen or other reactive or corrosive gases are pumped. The EH pumps must not be used to pump peroxides.

All of the EH2600 and EH4200 model pumps have an after-cooler in the pump outlet, to reduce the exhaust gas and rotor temperature.

The EH pumps are safe to handle non-flammable gases and vapours within the normal operating parameters of the pumps, as defined in this manual.

All EH pumps have ISO inlet flange and outlet flange connections.

A301-05-880 Issue A

1. Terminal box

2. Shaft seal reservoir vented oil filler plug

3. Hydrokinetic drive/gearbox oil filler plug

4. Inlet flange

5. External evacuation point

6. End cover

7. Rotors

8. Stator housing

9. Hydrokinetic drive/gearbox oil drain plug (under the pump)

10. Direction of rotation sight glass

11. Oil level sight glass (hydrokinetic drive/gearbox)

12. Oil level sight glass (shaft seal reservoir)

Introduction

Figure 1 - All EH250FX and EH500FX pump variants

Edwards and the Edwards logo are trademarks of Edwards Limited.

Figure 2 - All EH1200FX, EH2600 and EH4200 pump variants

1. Terminal box

2. Shaft seal reservoir vented oil filler plug

3. Cooling water connection

4. Hydrokinetic drive/gearbox oil filler plug *

5. Inlet flange

6. External evacuation point

7. Gear cover oil filler plug

8. Cooling water connection

9. Oil level sight glass (gear cover)

10. Gear cover oil drain plug (under the pump)

11. Rotors

12. Stator housing

13. Hydrokinetic drive/gearbox oil drain plug (under the pump)

14. Direction of rotation sight glass

†

15. Oil level sight glass (hydrokinetic drive/ gearbox)

16. Oil level sight glass (shaft seal reservoir)

17. Motor fan cover

† EH1200 pumps only.

A. All EH2600 and EH4200 pumps B. All EH1200 pumps

A301-05-880 Issue A

Introduction

A301-05-880 Issue A

Introduction

1.2.2 General construction

The EH pumps are positive displacement Roots vacuum pumps. The pump mechanism is driven by a three-phase electric motor through a hydrokinetic drive (see Section 1.2.4).

All of the motors are air cooled.

The pump shafts and rotors are made of cast SG iron. The internal and external shaft seals are made of polytetrafluoroethylene (PTFE) or fluoroelastomer.

The pump bearings, gears and seals are lubricated by oil fed from reservoirs in the hydrokinetic drive/gearbox. A series of seals stops the oil from reaching the vacuum side of the EH pump. The hydrokinetic drive/gearbox is evacuated. Inspect the oil levels through sight glasses that are fitted to the hydrokinetic drive/gearbox. Oil filler, oil drainage and external evacuation connections are provided on the hydrokinetic drive/gearbox.

The timing gears on all of the EH1200, EH2600 and EH4200 model pumps are lubricated by oil inside the gear cover. An oil filler connection is provided. The oil level can be inspected through a sight glass fitted to the gear cover.

1.2.3 Principle of operation

The EH pump is shown in Figure 1 and 2. The motor shaft drives one of the rotors through the hydrokinetic drive. The 1:1 gears inside the hydrokinetic drive/gearbox drive the second rotor in the opposite direction inside the stator housing. A small, accurately gauged clearance is maintained between the rotors and between each rotor and the stator wall. This clearance allows the EH pump to operate at high speed without mechanical wear and without the need for lubrication inside the swept volume.

1.2.4 Hydrokinetic drive

The hydrokinetic drive consists of a fluid coupling which connects the electric motor shaft to the rotor. This system is configured so that when the gas load is high, the rotational speed of the rotors is reduced. As the gas load decreases, the rotors accelerate to full speed. This allows continuous operation of the EH pump over the vacuum range without the risk of overloading the motor and removes the need for bypass valves and associated pipelines.

The fluid coupling is viscosity sensitive. The two versions of the EH pump (for hydrocarbon and PFPE oils) have fluid coupling drives which are specifically designed for the type of oil used in the pump.

1.3 Chemical & ATEX pumps

This manual does not cover these applications. They are covered in publication number A301-51-880.

Edwards and the Edwards logo are trademarks of Edwards Limited.

2Technical Data

CAUTION

2.1 Operating and storage conditions

Table 1 - Operating and storage conditions

A301-05-880 Issue A

Technical Data

Ambient operating temperature range Ambient storage temperature range Maximum ambient operating humidity

Protection degree (as defined by IEC 529) IP44

Recommended backing pumps See Note above

5 °C to 40 °C

-20 °C to 80 °C 90% RH

2.2 Performance

On each pump the hydrokinetic coupling is configured to account for the oil type (density) and pump rotational speed (50 or 60 Hz). Changes to the oil or rotation speed could result in the pump drawing excess power.

Table 2 - Performance data

Rotational speed:

50 Hz electrical supply 60 Hz electrical supply

Maximum outlet pressure (see Section 1.2.4) 1000 mbar absolute, 1 x 105 Pa

Pressure differential across EH pump (determined by the hydrokinetic drive):

Pump 50 Hz electrical supply 60 Hz electrical supply

EH250/EH250FX 0 to 180 mbar 0 to 1.8 x 10

EH500/EH500FX 0 to 110 mbar 0 to 1.1 x 10

EH1200/EH1200FX 0 to 90 mbar 0 to 0.9 x 10

EH2600FX 0 to 80 mbar 0 to 8 x 103 Pa 0 to 67 mbar 0 to 6.7 x 103 Pa

EH2600 0 to 120 mbar 0 to 1.2 x 10

EH4200FX 0 to 60 mbar 0 to 6 x 10

EH4200 0 to 70 mbar 0 to 7 x 103 Pa 0 to 50 mbar 0 to 5 x 103 Pa

Pa 0 to 150 mbar 0 to 1.5 x 104 Pa

Pa 0 to 90 mbar 0 to 9 x 103 Pa

Pa 0 to 75 mbar

Pa 0 to 67 mbar 0 to 6.7 x 103 Pa

Pa 0 to 50 mbar 0 to 5 x 103 Pa

0 to 2900 r min 0 to 3500 r min

-1

0 to 7.5 x 103 P

A301-05-880 Issue A

Technical Data

2.3 Recommended primary (backing) pumps

Table 3 - Recommended primary (backing) pumps

Primary Pump EH250 EH500 EH1200 EH2600 EH4200

212J 

412J 

E2M40 

E2M80 

E2M175 

E2M275 

ES100 

ES200 

ES300 

ES630 

IDX1000 

IDX1300 

2.4 Mechanical data

Table 4 - Mechanical data

Dimensions See Figure 3 to 7

Mass EH250

EH250FX

EH500 EH500FX

EH1200 EH1200FX

EH2600 EH2600FX

EH4200 EH4200FX

63 kg 63 kg

100 kg 100 kg

151 kg 151 kg

405 kg 405 kg

485 kg 485 kg

Edwards and the Edwards logo are trademarks of Edwards Limited.

+ 28 hidden pages

Edwards EH250FX, EH1200FX, EH2600FX, EH Series, EH500FX Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Contents

Illustrations

Tables

Associated publications

1Introduction

1.1 Scope and definitions

1.2 Description

1.2.1 Overview

1.2.2 General construction

1.2.3 Principle of operation

1.2.4 Hydrokinetic drive

1.3 Chemical & ATEX pumps

2Technical Data

2.1 Operating and storage conditions

2.2 Performance

2.3 Recommended primary (backing) pumps

2.4 Mechanical data