Edwards EH500, EH500IND, EH250, EH1200, EH1200IND Instruction Manual

...

Download

A301-51-880

Issue T Original

Instruction Manual

EH Mechanical Booster Pumps

Description Item Number

EH250 2.2kW Safe Area Pumps A301-51-945, A301-52-946

EH250 1.5kW Safe Area Pumps A301-51-935, A301-53-935, A301-52-936, A301-54-936

EH500 1.5kW Safe Area Pumps A302-73-935, A302-74-936

EH500IND 2.2kW Safe Area Pumps A302-71-945, A302-72-946

EH1200 3kW Safe Area Pumps A305-92-935, A305-93-936

EH1200IND 3kW Safe Area Pumps A305-90-935, A305-91-936

EH1200C 3 kW Flame Proof Pump A305-56-982

EH1200 T3/T160/T4 3kW Flame Proof Pump A305-57-900

EH2600 7.5kW Safe Area Pumps A307-51-935, A307-53-935, A307-52-936, A307-54-936

EH2600IND 11kW Safe Area Pumps A307-75-946, A307-76-982

EH2600C 11kW Flame Proof Pump A307-56-982

EH2600 T160/T4 11kW Flame Proof Pump A307-79-900

EH2600T3 11kW Flame Proof Pump A307-41-935

EH4200 7.5kW Safe Area Pumps A309-51-935, A309-53-935, A309-52-936

EH4200IND 11kW Safe Area Pumps A309-75-946, A309-76-982

EH4200C 11kW Flame Proof Pump A309-56-982

EH4200 T160/T4 11kW Flame Proof Pump A309-79-900

EH4200T3 11kW Flame Proof Pump A309-41-935

Contents

A301-51-880 Issue T

Contents

Section Page

1 Introduction ..................... .................................................. ................1

1.1 Scope and definitions ..................................... .............................................................. 1

1.2 Description ...................................... .................................................................... ...... 1

1.2.1 Overview ................................................................. ................................................. 1

1.2.2 General construction ........... ................................................................... ...................... 5

1.2.3 Principle of operation ....... ...................................................................... ...................... 5

1.2.4 Hydrokinetic drive . .................................................................... .................................. 5

1.3 Chemical and ATEX compliant EH pumps ............... ............................................................. 5

1.3.1 Flameproof motors ........................................ .............................................................. 5

1.3.2 ATEX directive (94/9/EC): Europe only ............. ................................................................. 6

1.3.3 Temperature classification ......... ...................................................................... .............. 6

1.3.4 Hydrokinetic drive/gearbox purge .......................................... .......................................... 7

1.3.5 After-cooler ...................................... ...................................................................... ...7

1.3.6 Normal operation .............................................................. .......................................... 7

1.3.7 Abnormal operation ................................................ ..................................................... 8

1.3.8 Electrostatic charges ............... ................................................................... .................. 8

2 Technical Data .............................. .................................................. ....9

2.1 Operating and storage conditions ...................................................... ............................... 9

2.2 Critical backing pressure .............................. ................................................................. 9

2.3 Performance .............. ...................................................................... .........................12

2.4 Mechanical data ............................. .................................................................. ..........12

2.5 Electrical data ........................................... ................................................................ 13

2.6 Lubrication data ........................................ ................................................................ 14

2.7 Hydrokinetic drive/gearbox nitrogen supply (EH1200C , EH1200 T3/T160/T4X, EH2600C, EH2600 T3X, EH2600 T160/T4X, EH4200C, EH4200 T3X, EH4200 T160/T 4X only) 14

2.8 Cooling-water data ........................................................ .............................................1 4

2.9 Noise and vibration data ........................... .................................................................... 15

2.10 Connections ............................... ..................................................................... ..........15

2.11 Materials of construction of components exposed to p umped gases ........................................... 16

2.12 Item Numbers .......................................... ................................................................. 16

3 Installation .................. .................................................. ................... 25

3.1 Safety ............................. ................................................................... .....................25

3.2 System requirements ................... ...................................................................... ..........25

3.3 Unpack and inspect ......................... ................................................................... .........26

3.4 Fill the pump with oil .................................................. ................................................2 7

3.4.1 Hydrokinetic drive/gearbox ... ................................................................... .....................27

3.4.2 Shaft-seal reservoir ...................... ...................................................................... .........27

3.4.3 Gear-cover (all EH1200, EH2600 and EH4200 model pum ps only) .............................................. .28

3.5 Cooling-water connections (all EH1200, EH2600 and EH4200 m odel pumps only) ......................... ...29

3.6 Electrical connections ................................. ................................................................. 29

3.6.1 Electrical supply configuration ...................................... ................................................. 29

3.6.2 Motor connections ..................................................... ................................................. 30

3.6.3 Connect the motor thermistors (chemical and ATEX compliant EH pumps only) .............................31

3.7 Check the direction of pump rotation .......................................................... .....................38

3.8 Connect the hydrokinetic drive/gearbox purge nitrogen supply (chemical and ATEX compliant EH pumps only) 39

3.9 Connect the pump-inlet and outlet ........................................................ ..........................40

3.10 External evacuation of hydrokinetic drive/gearbox (opt ional) ..................... .............................41

APT 11/07

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Contents

4 Operation ................................... ................................................. .... 43

4.1 Operational safety ........... ..................................................................... ......................43

4.2 Start-up procedure ......................................... ............................................................ 43

4.2.1 Pre-start checks .......................... ..................................................................... ..........43

4.2.2 Start-up ................................... ...................................................................... .........44

4.3 Shut-down ........................................ ................................................................... .....44

5 Maintenance .............................................. ....................................... 45

5.1 Safety information ....................... ..................................................................... ..........45

5.2 Maintenance plan ........ ...................................................................... .........................46

5.3 Check the oil-levels .................................... ................................................................ 46

5.4 Inspect the pump connections . ..................................................................... ..................46

5.5 Change the pump oil ............................................... .................................................... 47

5.6 Lubricate the rear-bearing (All EH250 and EH500 model p umps only) ....... ..................................4 8

5.7 Overhaul the pump ......................................................... ............................................49

6 Storage and Disposal ................. .................................................. ........ 51

6.1 Storage ............................................................... .................................................... 51

6.2 Disposal .................................................. ................................................................. 51

7 Service and Spares .............. .................................................. .............. 53

7.1 Introduction ................................... .................................................................... ......53

7.2 Service ........................................ ...................................................................... ......53

7.3 Spares ................................................. .................................................................... 53

Illustrations

Figure Page

1 All EH250 and EH500 pump variants ......... ............................................................... ..........3

2 All EH1200, EH2600 and EH4200 pump va riants ...................................................... ............... 4

3 EH250/EH250IND dimensions (mm) * .. ..................................................................... ..........17

4 EH500/EH500IND dimensions (mm) * .. ..................................................................... ..........18

5 EH1200/EH1200IND dimensions (mm) .................................................................. .............19

6 EH1200C/EH1200 T3/T160/T4 dimensions ( mm) ................................................ ..................20

7 EH2600/EH2600IND dimensions (mm) ................................................................. ..............21

8 EH2600C/EH2600 T3/EH2600 T160/T4 dimen sions (mm) ........................................... ..............22

9 EH4200/EH4200IND dimensions (mm) ................................................................. ..............23

10 EH4200C/EH4200 T3/EH4200 T160/T4 dimensions (mm) ..... .................................................... 24

11 Sight glasses ..................................................... ........................................................ 28

12 Example control circuit . .......................................................................... .....................32

13 Electrical supply configuration A ................................................................... ..................34

14 Electrical supply configuration B ............................................................... ......................34

15 Electrical supply configuration C . .................................................................. ..................35

16 Electrical supply configuration D .. ..................................................................... ..............35

17 Electrical supply configuration E ....................................................... ..............................36

18 Electrical supply configuration F ....................................................... ..............................36

19 Electrical supply configuration G ................. ................................................................... .37

20 Electrical supply configuration H ............. ................................................................... .....37

21 Electrical supply configuration I ............. ................................................................... ......38

22 Flange loading limits ................................................... ................................................ 42

23 Lubricate the rear bearing (EH250, EH500 and EH500IND pum ps only) ........................................ 49

Contents

A301-51-880 Issue T

Tables

Table Page

1 Operating and storage conditions ........................ ............................................................. 9

2 Temperature classifications ................................................................. ........................... 9

3 Pressure ratio figures . ........................................................................ .........................10

4 DPS dry pump and EH mechanical bo oster pump combinations for T3 ......................................... 10

5 DPS dry pump and EH mechanical b ooster pump combinations for T160 ...................................... 10

6 CPH dry pump and EH mechanical bo oster pump combinations for T160 ............. .........................11

7 CPH dry pump and EH mechanical bo oster pump combinations for T3 .................. ......................11

8 Performance data ............ ..................................................................... ......................12

9 Mechanical data .. ...................................................................... .................................12

10 Electrical data ........................................... ................................................................ 13

11 Lubrication data ........................................ ................................................................ 14

12 Hydrokenetic drive/gearbox purge nitrogen supply data ......................................................... 14

13 Cooling water supply data: EH pumps in non-ATEX sy stems ............ ......................................... 14

14 Cooling-water supply data: EH pumps in ATEX systems .......................................................... 15

15 Noise and vibration data ........................... .................................................................... 15

16 Connections ............................... ..................................................................... ..........15

17 Materials of construction ................................................. .............................................1 6

18 Item numbers .................................... .................................................................. ......16

19 Motor cable-gland hole sizes . .................................................................... .....................31

20 Electrical supply connection configurations ................................................... .....................33

21 Maintenance plan ....... ................................................................... .............................45

22 Spare item numbers ...................................................................... ..............................53

23 EH250 and EH500 spare parts ............................................................... ..........................53

24 EH1200 spare parts ......................................................... ............................................5 4

25 EH2600 and EH4200 spare parts .............................................. ........................................54

Associated publications

Publication title Publication number

Vacuum pump and vacuum system safety - chemical and in dustrial vacuum systems P400-40-100 ATEX Instruction Manual P600-60-200

This page has been intentionally left blank.

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

A301-51-880 Issue T

1 Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the following Ed wards EH mechanical booster pumps:

z Safe area EH mechanical booster pumps:

EH250, EH250IND EH500, EH500IND, EH1200, EH1200IND, EH2600, EH2600IND, EH4200 and EH4200IND

z Chemical EH mechanical booster pumps:

EH1200C, EH2600C, EH4200C

ATEX compliant EH mechanical booster pumps: EH1200T3/T160/T4X, EH2600T160/T4X, EH42000T3X, EH4 200T160/T4X

Where appropriate, the titles EH mechanical booster pump, safe area EH mechanical booster pump, ATEX compliant EH mechanical booster pumps and chemical EH mechanical booster pump are abbreviated to EH pump, safe area EH pump, ATEX compliant EH pump and chemical EH pump r espectively in the remainder of this manual.

You must use your EH pump as specified in this manual.

Read this manual before you install and operate your EH pump. Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

The units used throughout this manual conform to the SI international system of units of measurement.

1.2 Description

1.2.1 Ove rview

The EH pumps are compact and have high pumping speeds. You must use the EH pump with a suitable backing pump. The EH pumps can operate with a maximum continuous inlet pressure of 1000 mBar. You can achieve lower system pressures by the use of two or more EH pumps in series.

On all EH pumps, the hydrokinetic drive/gearbox is conne cted to the pump outlet by a pressure equalisation passageway, and forms an integral part of the vacuum system. The connecting passageway has a filter which removes debris and so prevents contamination of the lubricating oi l and bearings. For an even cleaner system, you can evacuate the end-cover/gear cover by connection of the evacuation port (

Figure 1, item 5 or Figure2, item 6) to the

pump-inlet or to an external vacuum pump.

The hydrocarbon safe area, ATEX compliant and chemical EH pumps use hydrocarbon oils, such as Edwards Ultragrade

20. Versions of the safe area EH pumps for use with PFP E (perfluoropolyether) oils are also available for vacuum

systems in which oxygen or other reactive or corrosive gases are pumped. The EH pumps must not be used to pump peroxides.

WARNING

Warnings are given where failure to observe the inst ruction could result in injury or death to people.

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

All of the EH2600 and EH4200 model pumps have an after-cooler in the pump-outlet, to reduc e the exhaust gas and rotor temperature.

The safe area EH pumps are safe to handle non-flammable gases and vapours within the normal operating parameters of the pumps, as defined in this manual.

The chemical, and ATEX compliant EH pumps, when used with suitable backing pumps, are designed to pump flammable gases within the T (temperature) classificatio n defined in the pump description (see

Section 1.3.3).

Note: All 60 Hz booster pumps are given a T3 temperature rating.

In order to comply with temperature classification requirements, a chemical, and ATEX compliant EH pump must be connected to a backing pump that provides a backing pressure lower than the critical backing pressure and the pressure ratio of the combination is lower than the max imum stated in

Table 3 or be used in a pumping system

recommended by Edwards: refer to

Section 1.3.3 and 2.2.

All of the EH pumps have ISO inlet-flange and outlet-fla nge connections.

Introduction

A301-51-880 Issue T

Figure 1 - All EH250 and EH500 pump variants

1. Terminal-box

2. Shaft-seal reservoir vented oil filler-plu g

3. Hydrokinetic drive/gearbox oil filler-pl ug

4. Inlet-flange

5. External evacuation point

6. End-cover

7. Rotors

8. Stator housing

9. Hydrokinetic drive/gearbox oil drain-plu g (under the pump)

10.Direction of rotatio n sight-glass

11.Oil-level sight-glas s (hydrokinetic drive/gearbox)

12.Oil-level sight-glas s (shaft-seal reservoir)

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

Figure 2 - All EH1200, EH2600 and EH4200 pump variants

1. Terminal-box

2. Shaft-seal reservoir vented oil filler-plu g

3. Cooling-water connection

4. Hydrokinetic drive/gearbox oil filler-p lug *

5. Inlet-flange

6. External evacuation point

7. Gear-cover oil filler-plug

8. Cooling-water connection

9. Oil-level sight-glass (gear-cover)

10.Gear-cover oil dr ain-plug (under the pump)

11.Rotors

12.Stator housing

13.Hydrokinetic drive/ge arbox oil drain-plug (under the pump)

14.Direction of rotation sight-glass

†

15.Oil-level sight-glass (hydrokinetic drive/ gearbox)

16.Oil-level sight-glass (shaft-seal reservoir)

17.Motor fan cover

† EH1200 pumps only.

* Safe area EH pumps only. On the chemical,

and ATEX compliant EH pumps, this is a combined hydrokinetic drive/gearbox oil filler-plug and purge connector.

A. All EH2600 and EH4200 pumps B. All EH1200 pumps

Introduction

A301-51-880 Issue T

1.2.2 Gen eral construction

The EH pumps are positive displacement Roots vacuum pumps. The pump mechanism is driven by a three-phase electric motor through a hydrokinetic drive (see

Section 1.2.4).

The safe area EH pumps are all fitted with safe area mo tors. The chemical, and ATEX compliant EH pumps are all fitted with flameproof motors (see

Section 1.3.1). All of the motors are air-cooled.

The pump shafts and rotors are made of cast SG iron. Th e internal and external shaft-seals are made of polytetrafluoroethylene (PTFE) or fluoro-elastomer.

The pump-bearings, gears and seals are lubricated by o il fed from reservoirs in the hydrokinetic drive/gearbo x. A series of seals stops the oil from reaching the vacuum sid e of the EH pump. The hydrokinetic drive/gearbox is evacuated. You can inspect the oil-levels through sight- glasses which are fitted to the hydrokinetic drive/gear box. Oil-filler, oil-drainage and external evacuation connecti ons are provided on the hydrokinetic drive/gearbox.

The timing gears on all of the EH1200, EH2600 and EH4200 model pumps are lubricated by oil inside the gear-cover. An oil-filler connection is provided and you can inspect t he oil-level through a sight-glass fitted to the gear-cove r.

1.2.3 Pr inciple of operation

The EH pump is shown in Figure1 and 2. The motor-shaft drives one of the rotors through the hydrokinetic drive. The 1:1 gears inside the hydrokinetic drive/gearbox drive th e second rotor in the opposite direction inside the stator housing. A small, accurately gauged, clearance is maintain ed between the rotors and between each rotor and the stator wall. This clearance allows the EH pump to ope rate at high speed without mechanical wear and without th e need for lubrication inside the swept volume.

1.2.4 Hy drokinetic drive

The hydrokinetic drive consists of a fluid-coupling which connects the electric-motor shaft to the rotor. This system is configured so that when the gas-load is high, the rota tional speed of the rotors is reduced. As the gas-load decreases, the rotors accelerate to full speed. This allow s continuous operation of the EH pump over the vacuu m range without the risk of overloading the motor and r emoves the need for bypass-valves and associated pipel ines.

The fluid-coupling is viscosity sensitive. The two versions of the EH pump (for hydrocarbon and PFPE oils) have fluidcoupling drives which are specifically designed for the t ype of oil used in the pump.

1.3 Chemical and ATEX compliant EH pumps

1.3.1 Fla meproof motors

All of the EH1200C, EH1200 T3/T160/T4X, EH2600C, EH 2600T3X, EH2600 T160/T4X, EH4200C, EH4200 T3X and EH4200 T160/T4X:

z Pumps suitable for 50 Hz operation are fitted with a flameproof motor approved to EEx d, Gas Group IIA, IIB,

Temperature Class T4.

z Pumps suitable for 60 Hz operation are fitted with a flameproof motor approved to CSA, Div ision 1 area, Gas

Class I Group C & D, and Dust Class II Group F & G, Temperature Class T3C.

z If you want to operate your pump in a IIC external environm ent you have to fit a IIC motor to your EH

mechanical booster.

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

1.3.2 ATEX directiv e (94/9/EC): Europe only

ATEX compliant EH pumps with an internal T3X or T160 /T4X temperature classification (see Section 1.3 .3) may be used in an ATEX-compliant vacuum system only if the pumps are configured and used in accordance with the requirements of this manual. For ATEX compliant syste ms using an EH booster pump in combination with a DPS dry pump also the requirements of the ATEX instruction manual (see 'Associated publications' at the end of the Contents list) must be met.

Note: An 'X' suffix to the EH booster ATEX classification indicates that there are special conditions for safe use of

the booster. For EH mechanical boosters that have not been sold as part of a Edwards approved ATEX system please give special attention to

Section 2.2 and Table 2 and 3.

ATEX compliant systems supplied by Edwards will be certified in accordance with the ATEX directive, and will be identified by an ATEX system rating label.

If you want to fit an ATEX compliant EH pump with a T3X or T160/T4X temperature classification into your own ATEX compliant vacuum system, you must install and operate the EH pump in accordance with the requirements of th is instruction manual. Please pay special attention to

Section 1.3.3 about the temperature classification of y our EH

pump,

Section 1.3.4 about the hydrokinetic gearbox purge , Section 1.3.6 about the requirements of construction al

safety,

Section 1.3.7 abnormal use, Section 2.2 about the crit ical backing pressure and the pressure ratio between

your EH mechanical booster pump and your backing pump and

Section 2.8 about the minimum cooling water flo w.

You must also carry out your own Safety Risk Assessment as part of your system certification in order to ensure that your system is safe. If necessary, contact Edwards for ce rtification advice.

ATEX compliant EH pumps with an internal T3X or T160/T4X temperature classification are suitable for operation in ATEX compliant systems rated as follows:

The notations used in these ratings are as follows:

Refer to

Section 2 of this manual for the necessary EH pump operating conditions, and, if your booster is part of a

Edwards vacuum system, to the ATEX Instruction manual a nd to your system instruction manual for specific details of the system.

Note: If the system rating has an "X" suffix, this indicates that there are special conditions for the safe use of your

system: refer to the ATEX Instruction Manual and to your system manual for details.

1.3.3 Temperature classi fication

The temperature classifications applied to the chemical and ATEX compliant EH pumps relate to the auto-ignition temperature of flammable materials that can be pumpe d:

z The EH1200, EH2600, EH4200, ATEX compliant and chemical EH pumps that have a T3 classification are

suitable for pumping flammable materials that have an auto-ignition temperature greater than 200

II 2 G c IIB T3

II 2 G c IIB T160/T4

specifies that the ATEX compliant EH pump can be used in a potentially e xplosive atmosphere.

Equipment group II

Equipment category 2 (gas)

constructional safety

IIB

Suitable to pump gas group IIB

T3/T160/T4

Gas auto-ignition temperature: see Section 1.3.3.

Introduction

A301-51-880 Issue T

z The EH1200, EH2600 and EH4200 ATEX compliant EH pumps that have a T 160 temperature classification are

suitable for pumping flammable materials that have an auto-ignition temperature greater than 160

z The EH1200, EH2600 and EH4200 ATEX compliant pumps that have a T4 classi fication are suitable for

pumping flammable materials that have an auto-ignitio n temperature greater than 135

Refer to

Section 2 of this manual for the necessary EH pump oper ating conditions, to the ATEX Instruction Manual,

and to your system manual for specific details of the sys tem in which the EH pump is fitted.

1.3.4 Hy drokinetic drive/gearbox purge

A pipeline connector is provided on the oil filler of the hydrokinetic drive/gearbox of all of the chemical and ATEX compliant EH pumps. You can connect a suitable purge gas supply to this connector, to provide for purge of the hydrokinetic drive with nitrogen at positive pressure. T his will purge the shaft-seals, and prevent the entry of corrosive or toxic vapours into the hydrokinetic drive an d gear-cover.

A fixed restrictor in the connector ensures that the cor rect amount of nitrogen is allowed to flow into the hydrokinetic drive/gearbox.

1.3.5 After -cooler

On the EH2600C, EH2600T3X, EH2600T160/T4X, EH4200C, EH4200T3X, EH4200T160/T4X chemical and ATEX compliant EH pumps, the nickel-plated after-cooler is resistant to corrosive vapours which may condense on it during pump operation (depending on the application).

1.3.6 No rmal operation

The ATEX compliant EH pumps rely on the pump’s constructional safety for the safe pumping of flammable materials. In normal operation, as defined by this manual, the ATEX compliant EH pumps are safe for the pumping of flammable materials where there is no risk that the build-up of p rocess deposits could reduce the operating clearances of th e pump mechanism, and so cause a potential ignition haz ard.

Where there is no such risk, the ATEX compliant EH pumps can be used to pump flammable materials from gas group IIA, IIB and IIC within the normal parameter defined in th is manual.

WARNING

When using the EH ATEX compliant booster in either a Edwards ATEX compliant system or in your own certified ATEX vacuum pumping system you must ensure that the gearbox purge is connected to your booster and the Nitrogen supply is guarantee d. Please refer to

Section 2.7 for operating

conditions.

WARNING

The ATEX compliant EH pumps rely on the principle of constructional safety to pump flammable gases and vapours safely. Process deposits (which could form due to condensation of process vapours) do not normally occur in booster pumps. However, to conform with constructional safety requirements, it is your responsibility to ensure th at process deposits do not occur in the ATEX compliant EH pump (see below).

WARNING

The ATEX compliant EH pumps rely on the principle of constructional safety to pump flammable gases and vapours safely. You must protect the ATEX compliant EH pump from the ingress of particles that could cause an ignition of flammable gas or vapour in the pump. If particles could enter the ATEX compliant EH pump during system commissioning, you must fit a suitable inlet filter or screen, which you should then remove before p rocess operation (refer to

Section 3.9).

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

1.3.7 Ab normal operation

Pumping gases with temperatures greater than the system temperature classification (see Section 1.3.3) .

z Pumping hydrocarbon oxides.

z Pumping pyrophoric gases.

z Pumping gases that tend to self-decompose, or that ar e chemically unstable.

z Pumping peroxides or oxygen enriched atmospheres wi th ATEX certified pumps. For non-ATEX applications

PFPE versions of the pumps can be offered for oxyge n enriched atmospheres and peroxides.

z Use of the chemical and ATEX compliant EH pump with materials which have auto-ignition temperatures

below the defined temperature rating of the chemical EH pump.

z Pumping of, or use of the ATEX compliant EH pump in the presence of, explos ive dust atmospheres.

z Use of the ATEX compliant EH pump in ambient conditions other than th ose specified in Section 2.1.

1.3.8 El ectrostatic charges

Pure gas doesn't create electrostatic charges. There is a danger of electrostatic charges when the gas pumped contains droplets or particles.

Always ensure that the pump is earthed so there is no dang er of igniting flammable gases due to electrostatic discharges.

WARNING

Misuse of the chemical and ATEX compliant EH pu mp as described below is strictly prohibited:

Technical Data

A301-51-880 Issue T

2 Technical Data

2.1 Operating and storage conditions

Notes:

1. For operation between -20 ºC and 5 ºC, w e recommend that the EH pump is operated continuou sly except when shut-down is necessary for maintenance purposes. Note also the cooling-water requirements given in

Section 2.8.

2. Because of the flexibility of the hydrokineti c drives, there is a wide range of backing pumps which are suitable for use with the EH Mechanical Booster pumps. However, note the restrictions for chemical and ATEX compliant EH pump critical backing pressure g iven in

Section 2.2. If necessary, contact Edwards

for advice.

2.2 Critical backing pressure

If this critical backing pressure is exceeded, the pump rot ors have to do additional compressive work against the backing pressure, which can cause the rotor temperature to exceed the temperature classification limits, as there is no flow of cooling gas through the pump. The critical ba cking pressure at zero flow is equivalent to the ultimat e pressure of the backing pump, when an isolation valve upstream of the ATEX compliant EH pump is closed.

The critical backing pressure at zero flow for your EH booster pump depends on the temperature classification (please refer to

Section 1.3.3 Temperature Classification) of the m echanical booster pump. The following critical backing

pressures apply for different temperature classifications for standalone boosters whic h haven’t been sold as part of an approved Edwards ATEX system:

If you want to use the EH booster outside the critical back ing pressure specified above, please contact Edwards for advice.

Table 1 - Operating and storage conditions

Ambient operating temperature range Ambient storage temperature range Maximum ambient operating humidity

-20 to 40 ºC

-20 to 80 ºC 90% RH

Protection degree (as defined by IEC 529) IP44

Recommended backing pumps See Note above

WARNING

For ATEX compliant EH pumps, which have been sold to you on their own and not as part of an approved Edwards ATEX system (which are fitted with flameproof motors), the outlet pressure of the ATEX compliant EH pump must not exceed the critical backing pressure at zero flow, as specified below. If this critical pressure is exceeded, internal temperatures in the ATEX compliant EH pump may exceed the temperature classification (refer to

Section 1.3.3) and render it invalid.

This can result in an internal ignition of the pumped gases/vapours.

If you fit an isolation valve between the ATEX compliant EH pump and the backing pump, you must interlock the operation of the valve with the operat ion of the ATEX compliant EH pump, so that closure of the valve results in shut-down of the ATE X compliant EH pump.

Table 2 - Temperature classifications

Temperature Classification Critical backing pressure [mbar]

T3 40

T160 30

T4 20

A301-51-880 Issue T

Page 10 © Edwards Limited 2007. All rights reserve d.

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Technical Data

In addition, the pressure ratio between the EH mechanical booster pump and the backing pump has to be kept within certain limits to ensure that the temperature limits are not exceeded.

The following general pressure ratio figures apply in rela tion to the temperature class of your vacuum pumping system:

If you want to use your booster outside these limits, pl ease contact Edwards for advice.

The following tables show possible combinations of Edwards EH mechanical booster pump with Edwards DPS Chemical Dry pump.These systems are Edwards approved ATEX sy stems.

Please note that the following tables refer to 50 Hz ope ration only.

For Edwards EH mechanical booster/ DPS dry pump com binations depending on temperature class of the system:

✔ Do not require extra protectio n * Consult Edwar ds for advice

Table 3 - Pressure ratio figures

Pressure ratio at duty point Temperature class of vacuum system

3:1 T 3

2.5: 1 T1 60

2:1 T 4

Table 4 - DPS dry pump and EH mechanical booster pump combi nations for T3

Booster Pump

Dry Pump

DPS 80 DPS 160 DPS 250 DPS400

EH250 T3 ✔ ✔ ✔ ✔

EH500 T3 ✔ ✔ ✔ ✔

EH1200 T3 ✔ ✔ ✔ ✔

EH2600 T3 * * ✔ ✔

EH4200 T3 * * * ✔

Table 5 - DPS dry pump and EH mechanical booster pump combination s for T160

Booster Pump

Dry Pump

DPS 80 DPS 160 DPS 250 DPS400

EH250 T160 ✔ ✔ ✔ ✔

EH500 T160 ✔ ✔ ✔ ✔

EH1200 T160 ✔ ✔ ✔ ✔

EH 2600 T160 * * ✔ ✔

EH 4200 T160 * * * ✔

Technical Data

A301-51-880 Issue T

For EH mechanical booster/CPH dry pump combination depending on the temperature class of the system:

✔ Do not require extra protectio n * Consult Edwar ds for advice

Table 6 - CPH dry pump and EH mechanical booster pump combination s for T160

Booster Pump

Dry Pump

CPH 250 CPH 400

50 Hz 60 Hz 50 Hz 60 Hz

EH1200 T160 ✔ * ✔ *

EH2600 T160 ✔ * ✔ *

EH4200 T160 * * ✔ *

Table 7 - CPH dry pump and EH mechanical booster pump combination s for T3

Booster Pump

Dry Pump

CPH 250 CPH 400

50 Hz 60 Hz 50 Hz 60 Hz

EH1200 T3 ✔ ✔ ✔ ✔

EH2600 T3 ✔ ✔ ✔ ✔

EH4200 T3 * * ✔ ✔

A301-51-880 Issue T

Page 12 © Edwards Limited 2007. All rights reserve d.

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Technical Data

2.3 Performance

2.4 Mechanical data

Table 8 - Performance data

Rotational speed:

50 Hz electrical supply 60 Hz electrical supply

0 to 2900 r min

-1

0 to 3500 r min

-1

Maximum outlet pressure (see Section 1.2.4) 1000 mbar absolute, 1 x 105 Pa

Pressure differential across EH pump (determined by the hydr okinetic drive):

Pump 5 0 Hz electrical supply 60 Hz electrical supply

EH250/EH250IND 0 to 180 mbar 0 to 1.8 x 10

Pa 0 to 150 mbar 0 to 1.5 x 104 Pa

EH500/EH500IND 0 to 110 mbar 0 to 1.1 x 10

Pa 0 to 90 mbar 0 to 9 x 103 Pa

EH1200/EH1200IND 0 to 90 mbar 0 to 0.9 x 10

Pa 0 to 75 mbar

0 to 7.5 x 103 P

EH1200C - - 0 to 75 mbar

0 to 7.5 x 103 P

EH1200 T3/T160/T4X 0 to 76 mbar 0 to 7.6 x 10

Pa - -

EH2600 0 to 80 mbar 0 to 8 x 10

Pa 0 to 67 mbar 0 to 6.7 x 103 Pa

EH2600IND 0 to 120 mbar 0 to 1.2 x 10

Pa 0 to 67 mbar 0 to 6.7 x 103 Pa

EH2600C - - 0 to 67 mbar 0 to 6.7 x 10

EH2600 T3X 0 to 114 mbar 0 to 1.14 x 10

Pa - -

EH2600 T160/T4X 0 to 75 mbar 0 to 7.5 x 10

Pa - -

EH4200 0 to 60 mbar 0 to 6 x 10

Pa 0 to 50 mbar 0 to 5 x 103 Pa

EH4200IND 0 to 70 mbar 0 to 7 x 10

Pa 0 to 50 mbar 0 to 5 x 103 Pa

EH4200C - - 0 to 50 mbar 0 to 5 x 10

EH4200 T3X 0 to 64 mbar 0 to 6.4 x 10

Pa - -

EH4200 T160/T4X 0 to 52 mbar 0 to 5.2 x 10

Pa - -

Table 9 - Mechanical data

Dimensions See Figure 3 to 10

Mass: EH250

EH250IND EH500 EH500IND

61 kg 66 kg 69 kg 74 kg

EH1200 EH1200IND EH1200C EH1200 T3/T160/T4X

149 kg 149 kg 170 kg 170 kg

EH2600 EH2600IND EH2600C EH2600 T3X EH2600 T160/T4X

308 kg 345 kg 415 kg 415 kg 415 kg

EH4200IND EH4200C EH4200 T3X EH4200 T160/T4X

380 kg 425 kg 495 kg 495 kg

Technical Data

A301-51-880 Issue T

2.5 Electrical data

Note:

The motors of EH250, EH500 and EH500IND pumps are supplied configured for ‘low voltage’ operation (230V

and lower), the motors of all other pumps are supplied configured for ‘hig h voltage’ operation (380 V and

higher): refer to

Section 3.6.

Table 10 - Electrical data

Electrical supply voltage Number of phases Voltage tolerance:

50 Hz electrical supply 60 Hz electrical supply

Full load current ratings

220/240/380/415 V, 50 Hz or 208/230/460 V, 60 Hz 3

± 10%

-2.5%, +5% See below and refer to motor rating plate

Pump(s)

220 V 50 Hz

240 V 50 Hz

380 V 50 Hz

415 V 50 Hz

208 V 60 Hz

230 V 60 Hz

460 V 60 Hz

EH250 EH500

Full load (A) Rating (kW)

6.3

1.5

5.8

1.5

3.7

1.5

3.4

1.5

6.1

1.5

5.5

1.5

2.8

1.5

EH250IND EH500IND

Full load (A) Rating (kW)

7.8

2.2

7.4

2.2

4.5

2.2

4.3

2.2

9.7

2.2

8.8

2.2

4.4

2.2

EH1200 EH1200IND

Full load (A) Rating (kW)

11.1

3.0

10.2

3.0

6.4

3.0

5.9

3.0

11.9

3.0

10.7

3.0

5.4

3.0

EH1200C Full load (A)

Rating (kW)------------

5.0

3.0

EH1200 T3/T160/ T4X

Full load (A) Rating (kW)

10.4

3.0

9.9

3.0

6.0

3.0

5.7

3.0------

EH2600 Full load (A)

Rating (kW)

19.8

7.5

18.2

7.5

11.5

7.5

10.5

7.5

20.9

7.5

18.9

7.5

9.5

7.5

EH2600IND Full load (A)

Rating (kW)

21.5

11.0

20.7

11.0

34.8

11.0

17.4

11.0

EH2600C Full load (A)

Rating (kW)----------

36.3

11.0

18.1

11.0

EH2600 T3X EH2600 T160/T4X

Full load (A) Rating (kW)

20.8

11.0

19.5

11.0

EH4200 Full load (A)

Rating (kW)

19.8

7.5

18.2

17.5

11.5

7.5

10.5

7.5

20.9

7.5

18.9

7.5

9.5

7.5

EH4200IND Full load (A)

Rating (kW)----

21.5

11.0

20.7

11.0--

34.8

11.0

17.4

11.0

EH4200C Full load (A)

Rating (kW)

36.3

11.0

18.1

11.0

EH4200 T3X EH4200 T160/T4X

Full load (A) Rating (kW)----

20.8

11.0

19.5

11.0------

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Technical Data

2.6 Lubrication data

Note:

Edwards Material Safety Data Sheets for the oils an d grease specified below are available on request.

2.7 Hydrokinetic drive/gearbox nitrogen supply (EH1200C, EH1200

T3/T160/T4X, EH2600C, EH2600 T3X, EH2600 T160/T4X, EH4200C, EH4200 T3X, EH4200 T160/T4X only)

2.8 Cooling-water data

Notes:

1. If any EH1200, EH2600 or EH4200 model pump is used in an ATEX system, the EH pump must be operated with cooling-water. This is safety critical, and your system must incorporate a flow-switch (connected to the cooling-water outlet) which monitors the flow rate of the cooling-water through the EH pump; the flow-switch must be connected to your control system, which must be configured to shut down the EH pump when the cooling-water flow through th e EH pump is too low (see

Table 14 for the minimum

cooling-water flow rates). Refer to the ATEX instru ction manual for further details.

2. If any EH1200 model pump is not part of an ATEX system, you can operate the EH pump cont inuously without cooling-water if the inlet pressure is kept below 5 mbar (5x 10

Pa) and the pumpdown time is

no longer than 10 minutes.

Table 11 - Lubrication data

Recommended oil type

Hydrocarbon pumps PFPE pumps

Ultragrade 20 Fomblin YVAC 16/6

Recommended grease type

For use with all EH250 and EH500 pumps

Fomblin AR555

Oil capacity: All EH25 0 All EH500 All EH1200

Gear-cover - - 1.25

Hydrokinetic drive/gearbox 1.5 1.5 2.4

Shaft-seal reservoir 0 .125 0.125 0.125

All EH2600 All EH4200

Gear-cover 3.5 3.5

Hydrokinetic drive/gearbox 6.5 6.5

Shaft-seal reservoir 0. 15 0.15

Table 12 - Hydrokenetic drive/gearbox purge nitrogen supply data

Regulated pressure 0.3 to 0.5 bar gauge, 3 x 104 to 5 x 104 Pa

Table 13 - Cooling water supply data: EH pumps in non-ATEX systems

Recommended cooling-water flow (with inlet temperature of 20 ºC)

EH1200 pumps EH2600 pumps EH4200 pumps

3 l min

-1

6 l min

-1

6 l min

-1

Recommended cooling-water supply pressure 2 to 6 bar gauge, 3 to 7 bar absolute,

3 x 10

to 7 x 105 Pa

Permissible temperature range 5 to 35 ºC

+ 10 hidden pages

Edwards EH500, EH500IND, EH250, EH1200, EH1200IND Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual