Edwards EH500, EH500IND, EH250, EH1200, EH1200IND Instruction Manual

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Page 1

A301-51-880

Issue T Original

Instruction Manual

EH Mechanical Booster Pumps

Description Item Number

EH250 2.2kW Safe Area Pumps A301-51-945, A301-52-946

EH250 1.5kW Safe Area Pumps A301-51-935, A301-53-935, A301-52-936, A301-54-936

EH500 1.5kW Safe Area Pumps A302-73-935, A302-74-936

EH500IND 2.2kW Safe Area Pumps A302-71-945, A302-72-946

EH1200 3kW Safe Area Pumps A305-92-935, A305-93-936

EH1200IND 3kW Safe Area Pumps A305-90-935, A305-91-936

EH1200C 3 kW Flame Proof Pump A305-56-982

EH1200 T3/T160/T4 3kW Flame Proof Pump A305-57-900

EH2600 7.5kW Safe Area Pumps A307-51-935, A307-53-935, A307-52-936, A307-54-936

EH2600IND 11kW Safe Area Pumps A307-75-946, A307-76-982

EH2600C 11kW Flame Proof Pump A307-56-982

EH2600 T160/T4 11kW Flame Proof Pump A307-79-900

EH2600T3 11kW Flame Proof Pump A307-41-935

EH4200 7.5kW Safe Area Pumps A309-51-935, A309-53-935, A309-52-936

EH4200IND 11kW Safe Area Pumps A309-75-946, A309-76-982

EH4200C 11kW Flame Proof Pump A309-56-982

EH4200 T160/T4 11kW Flame Proof Pump A309-79-900

EH4200T3 11kW Flame Proof Pump A309-41-935

Contents

A301-51-880 Issue T

Contents

Section Page

1 Introduction ..................... .................................................. ................1

1.1 Scope and definitions ..................................... .............................................................. 1

1.2 Description ...................................... .................................................................... ...... 1

1.2.1 Overview ................................................................. ................................................. 1

1.2.2 General construction ........... ................................................................... ...................... 5

1.2.3 Principle of operation ....... ...................................................................... ...................... 5

1.2.4 Hydrokinetic drive . .................................................................... .................................. 5

1.3 Chemical and ATEX compliant EH pumps ............... ............................................................. 5

1.3.1 Flameproof motors ........................................ .............................................................. 5

1.3.2 ATEX directive (94/9/EC): Europe only ............. ................................................................. 6

1.3.3 Temperature classification ......... ...................................................................... .............. 6

1.3.4 Hydrokinetic drive/gearbox purge .......................................... .......................................... 7

1.3.5 After-cooler ...................................... ...................................................................... ...7

1.3.6 Normal operation .............................................................. .......................................... 7

1.3.7 Abnormal operation ................................................ ..................................................... 8

1.3.8 Electrostatic charges ............... ................................................................... .................. 8

2 Technical Data .............................. .................................................. ....9

2.1 Operating and storage conditions ...................................................... ............................... 9

2.2 Critical backing pressure .............................. ................................................................. 9

2.3 Performance .............. ...................................................................... .........................12

2.4 Mechanical data ............................. .................................................................. ..........12

2.5 Electrical data ........................................... ................................................................ 13

2.6 Lubrication data ........................................ ................................................................ 14

2.7 Hydrokinetic drive/gearbox nitrogen supply (EH1200C , EH1200 T3/T160/T4X, EH2600C, EH2600 T3X, EH2600 T160/T4X, EH4200C, EH4200 T3X, EH4200 T160/T 4X only) 14

2.8 Cooling-water data ........................................................ .............................................1 4

2.9 Noise and vibration data ........................... .................................................................... 15

2.10 Connections ............................... ..................................................................... ..........15

2.11 Materials of construction of components exposed to p umped gases ........................................... 16

2.12 Item Numbers .......................................... ................................................................. 16

3 Installation .................. .................................................. ................... 25

3.1 Safety ............................. ................................................................... .....................25

3.2 System requirements ................... ...................................................................... ..........25

3.3 Unpack and inspect ......................... ................................................................... .........26

3.4 Fill the pump with oil .................................................. ................................................2 7

3.4.1 Hydrokinetic drive/gearbox ... ................................................................... .....................27

3.4.2 Shaft-seal reservoir ...................... ...................................................................... .........27

3.4.3 Gear-cover (all EH1200, EH2600 and EH4200 model pum ps only) .............................................. .28

3.5 Cooling-water connections (all EH1200, EH2600 and EH4200 m odel pumps only) ......................... ...29

3.6 Electrical connections ................................. ................................................................. 29

3.6.1 Electrical supply configuration ...................................... ................................................. 29

3.6.2 Motor connections ..................................................... ................................................. 30

3.6.3 Connect the motor thermistors (chemical and ATEX compliant EH pumps only) .............................31

3.7 Check the direction of pump rotation .......................................................... .....................38

3.8 Connect the hydrokinetic drive/gearbox purge nitrogen supply (chemical and ATEX compliant EH pumps only) 39

3.9 Connect the pump-inlet and outlet ........................................................ ..........................40

3.10 External evacuation of hydrokinetic drive/gearbox (opt ional) ..................... .............................41

APT 11/07

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Contents

4 Operation ................................... ................................................. .... 43

4.1 Operational safety ........... ..................................................................... ......................43

4.2 Start-up procedure ......................................... ............................................................ 43

4.2.1 Pre-start checks .......................... ..................................................................... ..........43

4.2.2 Start-up ................................... ...................................................................... .........44

4.3 Shut-down ........................................ ................................................................... .....44

5 Maintenance .............................................. ....................................... 45

5.1 Safety information ....................... ..................................................................... ..........45

5.2 Maintenance plan ........ ...................................................................... .........................46

5.3 Check the oil-levels .................................... ................................................................ 46

5.4 Inspect the pump connections . ..................................................................... ..................46

5.5 Change the pump oil ............................................... .................................................... 47

5.6 Lubricate the rear-bearing (All EH250 and EH500 model p umps only) ....... ..................................4 8

5.7 Overhaul the pump ......................................................... ............................................49

6 Storage and Disposal ................. .................................................. ........ 51

6.1 Storage ............................................................... .................................................... 51

6.2 Disposal .................................................. ................................................................. 51

7 Service and Spares .............. .................................................. .............. 53

7.1 Introduction ................................... .................................................................... ......53

7.2 Service ........................................ ...................................................................... ......53

7.3 Spares ................................................. .................................................................... 53

Illustrations

Figure Page

1 All EH250 and EH500 pump variants ......... ............................................................... ..........3

2 All EH1200, EH2600 and EH4200 pump va riants ...................................................... ............... 4

3 EH250/EH250IND dimensions (mm) * .. ..................................................................... ..........17

4 EH500/EH500IND dimensions (mm) * .. ..................................................................... ..........18

5 EH1200/EH1200IND dimensions (mm) .................................................................. .............19

6 EH1200C/EH1200 T3/T160/T4 dimensions ( mm) ................................................ ..................20

7 EH2600/EH2600IND dimensions (mm) ................................................................. ..............21

8 EH2600C/EH2600 T3/EH2600 T160/T4 dimen sions (mm) ........................................... ..............22

9 EH4200/EH4200IND dimensions (mm) ................................................................. ..............23

10 EH4200C/EH4200 T3/EH4200 T160/T4 dimensions (mm) ..... .................................................... 24

11 Sight glasses ..................................................... ........................................................ 28

12 Example control circuit . .......................................................................... .....................32

13 Electrical supply configuration A ................................................................... ..................34

14 Electrical supply configuration B ............................................................... ......................34

15 Electrical supply configuration C . .................................................................. ..................35

16 Electrical supply configuration D .. ..................................................................... ..............35

17 Electrical supply configuration E ....................................................... ..............................36

18 Electrical supply configuration F ....................................................... ..............................36

19 Electrical supply configuration G ................. ................................................................... .37

20 Electrical supply configuration H ............. ................................................................... .....37

21 Electrical supply configuration I ............. ................................................................... ......38

22 Flange loading limits ................................................... ................................................ 42

23 Lubricate the rear bearing (EH250, EH500 and EH500IND pum ps only) ........................................ 49

Page 2

Contents

A301-51-880 Issue T

Tables

Table Page

1 Operating and storage conditions ........................ ............................................................. 9

2 Temperature classifications ................................................................. ........................... 9

3 Pressure ratio figures . ........................................................................ .........................10

4 DPS dry pump and EH mechanical bo oster pump combinations for T3 ......................................... 10

5 DPS dry pump and EH mechanical b ooster pump combinations for T160 ...................................... 10

6 CPH dry pump and EH mechanical bo oster pump combinations for T160 ............. .........................11

7 CPH dry pump and EH mechanical bo oster pump combinations for T3 .................. ......................11

8 Performance data ............ ..................................................................... ......................12

9 Mechanical data .. ...................................................................... .................................12

10 Electrical data ........................................... ................................................................ 13

11 Lubrication data ........................................ ................................................................ 14

12 Hydrokenetic drive/gearbox purge nitrogen supply data ......................................................... 14

13 Cooling water supply data: EH pumps in non-ATEX sy stems ............ ......................................... 14

14 Cooling-water supply data: EH pumps in ATEX systems .......................................................... 15

15 Noise and vibration data ........................... .................................................................... 15

16 Connections ............................... ..................................................................... ..........15

17 Materials of construction ................................................. .............................................1 6

18 Item numbers .................................... .................................................................. ......16

19 Motor cable-gland hole sizes . .................................................................... .....................31

20 Electrical supply connection configurations ................................................... .....................33

21 Maintenance plan ....... ................................................................... .............................45

22 Spare item numbers ...................................................................... ..............................53

23 EH250 and EH500 spare parts ............................................................... ..........................53

24 EH1200 spare parts ......................................................... ............................................5 4

25 EH2600 and EH4200 spare parts .............................................. ........................................54

Associated publications

Publication title Publication number

Vacuum pump and vacuum system safety - chemical and in dustrial vacuum systems P400-40-100 ATEX Instruction Manual P600-60-200

This page has been intentionally left blank.

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

A301-51-880 Issue T

1 Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the following Ed wards EH mechanical booster pumps:

z Safe area EH mechanical booster pumps:

EH250, EH250IND EH500, EH500IND, EH1200, EH1200IND, EH2600, EH2600IND, EH4200 and EH4200IND

z Chemical EH mechanical booster pumps:

EH1200C, EH2600C, EH4200C

ATEX compliant EH mechanical booster pumps: EH1200T3/T160/T4X, EH2600T160/T4X, EH42000T3X, EH4 200T160/T4X

Where appropriate, the titles EH mechanical booster pump, safe area EH mechanical booster pump, ATEX compliant EH mechanical booster pumps and chemical EH mechanical booster pump are abbreviated to EH pump, safe area EH pump, ATEX compliant EH pump and chemical EH pump r espectively in the remainder of this manual.

You must use your EH pump as specified in this manual.

Read this manual before you install and operate your EH pump. Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

The units used throughout this manual conform to the SI international system of units of measurement.

1.2 Description

1.2.1 Ove rview

The EH pumps are compact and have high pumping speeds. You must use the EH pump with a suitable backing pump. The EH pumps can operate with a maximum continuous inlet pressure of 1000 mBar. You can achieve lower system pressures by the use of two or more EH pumps in series.

On all EH pumps, the hydrokinetic drive/gearbox is conne cted to the pump outlet by a pressure equalisation passageway, and forms an integral part of the vacuum system. The connecting passageway has a filter which removes debris and so prevents contamination of the lubricating oi l and bearings. For an even cleaner system, you can evacuate the end-cover/gear cover by connection of the evacuation port (

Figure 1, item 5 or Figure2, item 6) to the

pump-inlet or to an external vacuum pump.

The hydrocarbon safe area, ATEX compliant and chemical EH pumps use hydrocarbon oils, such as Edwards Ultragrade

20. Versions of the safe area EH pumps for use with PFP E (perfluoropolyether) oils are also available for vacuum

systems in which oxygen or other reactive or corrosive gases are pumped. The EH pumps must not be used to pump peroxides.

WARNING

Warnings are given where failure to observe the inst ruction could result in injury or death to people.

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

All of the EH2600 and EH4200 model pumps have an after-cooler in the pump-outlet, to reduc e the exhaust gas and rotor temperature.

The safe area EH pumps are safe to handle non-flammable gases and vapours within the normal operating parameters of the pumps, as defined in this manual.

The chemical, and ATEX compliant EH pumps, when used with suitable backing pumps, are designed to pump flammable gases within the T (temperature) classificatio n defined in the pump description (see

Section 1.3.3).

Note: All 60 Hz booster pumps are given a T3 temperature rating.

In order to comply with temperature classification requirements, a chemical, and ATEX compliant EH pump must be connected to a backing pump that provides a backing pressure lower than the critical backing pressure and the pressure ratio of the combination is lower than the max imum stated in

Table 3 or be used in a pumping system

recommended by Edwards: refer to

Section 1.3.3 and 2.2.

All of the EH pumps have ISO inlet-flange and outlet-fla nge connections.

Page 3

Introduction

A301-51-880 Issue T

Figure 1 - All EH250 and EH500 pump variants

1. Terminal-box

2. Shaft-seal reservoir vented oil filler-plu g

3. Hydrokinetic drive/gearbox oil filler-pl ug

4. Inlet-flange

5. External evacuation point

6. End-cover

7. Rotors

8. Stator housing

9. Hydrokinetic drive/gearbox oil drain-plu g (under the pump)

10.Direction of rotatio n sight-glass

11.Oil-level sight-glas s (hydrokinetic drive/gearbox)

12.Oil-level sight-glas s (shaft-seal reservoir)

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

Figure 2 - All EH1200, EH2600 and EH4200 pump variants

1. Terminal-box

2. Shaft-seal reservoir vented oil filler-plu g

3. Cooling-water connection

4. Hydrokinetic drive/gearbox oil filler-p lug *

5. Inlet-flange

6. External evacuation point

7. Gear-cover oil filler-plug

8. Cooling-water connection

9. Oil-level sight-glass (gear-cover)

10.Gear-cover oil dr ain-plug (under the pump)

11.Rotors

12.Stator housing

13.Hydrokinetic drive/ge arbox oil drain-plug (under the pump)

14.Direction of rotation sight-glass

†

15.Oil-level sight-glass (hydrokinetic drive/ gearbox)

16.Oil-level sight-glass (shaft-seal reservoir)

17.Motor fan cover

† EH1200 pumps only.

* Safe area EH pumps only. On the chemical,

and ATEX compliant EH pumps, this is a combined hydrokinetic drive/gearbox oil filler-plug and purge connector.

A. All EH2600 and EH4200 pumps B. All EH1200 pumps

Introduction

A301-51-880 Issue T

1.2.2 Gen eral construction

The EH pumps are positive displacement Roots vacuum pumps. The pump mechanism is driven by a three-phase electric motor through a hydrokinetic drive (see

Section 1.2.4).

The safe area EH pumps are all fitted with safe area mo tors. The chemical, and ATEX compliant EH pumps are all fitted with flameproof motors (see

Section 1.3.1). All of the motors are air-cooled.

The pump shafts and rotors are made of cast SG iron. Th e internal and external shaft-seals are made of polytetrafluoroethylene (PTFE) or fluoro-elastomer.

The pump-bearings, gears and seals are lubricated by o il fed from reservoirs in the hydrokinetic drive/gearbo x. A series of seals stops the oil from reaching the vacuum sid e of the EH pump. The hydrokinetic drive/gearbox is evacuated. You can inspect the oil-levels through sight- glasses which are fitted to the hydrokinetic drive/gear box. Oil-filler, oil-drainage and external evacuation connecti ons are provided on the hydrokinetic drive/gearbox.

The timing gears on all of the EH1200, EH2600 and EH4200 model pumps are lubricated by oil inside the gear-cover. An oil-filler connection is provided and you can inspect t he oil-level through a sight-glass fitted to the gear-cove r.

1.2.3 Pr inciple of operation

The EH pump is shown in Figure1 and 2. The motor-shaft drives one of the rotors through the hydrokinetic drive. The 1:1 gears inside the hydrokinetic drive/gearbox drive th e second rotor in the opposite direction inside the stator housing. A small, accurately gauged, clearance is maintain ed between the rotors and between each rotor and the stator wall. This clearance allows the EH pump to ope rate at high speed without mechanical wear and without th e need for lubrication inside the swept volume.

1.2.4 Hy drokinetic drive

The hydrokinetic drive consists of a fluid-coupling which connects the electric-motor shaft to the rotor. This system is configured so that when the gas-load is high, the rota tional speed of the rotors is reduced. As the gas-load decreases, the rotors accelerate to full speed. This allow s continuous operation of the EH pump over the vacuu m range without the risk of overloading the motor and r emoves the need for bypass-valves and associated pipel ines.

The fluid-coupling is viscosity sensitive. The two versions of the EH pump (for hydrocarbon and PFPE oils) have fluidcoupling drives which are specifically designed for the t ype of oil used in the pump.

1.3 Chemical and ATEX compliant EH pumps

1.3.1 Fla meproof motors

All of the EH1200C, EH1200 T3/T160/T4X, EH2600C, EH 2600T3X, EH2600 T160/T4X, EH4200C, EH4200 T3X and EH4200 T160/T4X:

z Pumps suitable for 50 Hz operation are fitted with a flameproof motor approved to EEx d, Gas Group IIA, IIB,

Temperature Class T4.

z Pumps suitable for 60 Hz operation are fitted with a flameproof motor approved to CSA, Div ision 1 area, Gas

Class I Group C & D, and Dust Class II Group F & G, Temperature Class T3C.

z If you want to operate your pump in a IIC external environm ent you have to fit a IIC motor to your EH

mechanical booster.

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

1.3.2 ATEX directiv e (94/9/EC): Europe only

ATEX compliant EH pumps with an internal T3X or T160 /T4X temperature classification (see Section 1.3 .3) may be used in an ATEX-compliant vacuum system only if the pumps are configured and used in accordance with the requirements of this manual. For ATEX compliant syste ms using an EH booster pump in combination with a DPS dry pump also the requirements of the ATEX instruction manual (see 'Associated publications' at the end of the Contents list) must be met.

Note: An 'X' suffix to the EH booster ATEX classification indicates that there are special conditions for safe use of

the booster. For EH mechanical boosters that have not been sold as part of a Edwards approved ATEX system please give special attention to

Section 2.2 and Table 2 and 3.

ATEX compliant systems supplied by Edwards will be certified in accordance with the ATEX directive, and will be identified by an ATEX system rating label.

If you want to fit an ATEX compliant EH pump with a T3X or T160/T4X temperature classification into your own ATEX compliant vacuum system, you must install and operate the EH pump in accordance with the requirements of th is instruction manual. Please pay special attention to

Section 1.3.3 about the temperature classification of y our EH

pump,

Section 1.3.4 about the hydrokinetic gearbox purge , Section 1.3.6 about the requirements of construction al

safety,

Section 1.3.7 abnormal use, Section 2.2 about the crit ical backing pressure and the pressure ratio between

your EH mechanical booster pump and your backing pump and

Section 2.8 about the minimum cooling water flo w.

You must also carry out your own Safety Risk Assessment as part of your system certification in order to ensure that your system is safe. If necessary, contact Edwards for ce rtification advice.

ATEX compliant EH pumps with an internal T3X or T160/T4X temperature classification are suitable for operation in ATEX compliant systems rated as follows:

The notations used in these ratings are as follows:

Refer to

Section 2 of this manual for the necessary EH pump operating conditions, and, if your booster is part of a

Edwards vacuum system, to the ATEX Instruction manual a nd to your system instruction manual for specific details of the system.

Note: If the system rating has an "X" suffix, this indicates that there are special conditions for the safe use of your

system: refer to the ATEX Instruction Manual and to your system manual for details.

1.3.3 Temperature classi fication

The temperature classifications applied to the chemical and ATEX compliant EH pumps relate to the auto-ignition temperature of flammable materials that can be pumpe d:

z The EH1200, EH2600, EH4200, ATEX compliant and chemical EH pumps that have a T3 classification are

suitable for pumping flammable materials that have an auto-ignition temperature greater than 200

II 2 G c IIB T3

II 2 G c IIB T160/T4

specifies that the ATEX compliant EH pump can be used in a potentially e xplosive atmosphere.

Equipment group II

Equipment category 2 (gas)

constructional safety

IIB

Suitable to pump gas group IIB

T3/T160/T4

Gas auto-ignition temperature: see Section 1.3.3.

Page 4

Introduction

A301-51-880 Issue T

z The EH1200, EH2600 and EH4200 ATEX compliant EH pumps that have a T 160 temperature classification are

suitable for pumping flammable materials that have an auto-ignition temperature greater than 160

z The EH1200, EH2600 and EH4200 ATEX compliant pumps that have a T4 classi fication are suitable for

pumping flammable materials that have an auto-ignitio n temperature greater than 135

Refer to

Section 2 of this manual for the necessary EH pump oper ating conditions, to the ATEX Instruction Manual,

and to your system manual for specific details of the sys tem in which the EH pump is fitted.

1.3.4 Hy drokinetic drive/gearbox purge

A pipeline connector is provided on the oil filler of the hydrokinetic drive/gearbox of all of the chemical and ATEX compliant EH pumps. You can connect a suitable purge gas supply to this connector, to provide for purge of the hydrokinetic drive with nitrogen at positive pressure. T his will purge the shaft-seals, and prevent the entry of corrosive or toxic vapours into the hydrokinetic drive an d gear-cover.

A fixed restrictor in the connector ensures that the cor rect amount of nitrogen is allowed to flow into the hydrokinetic drive/gearbox.

1.3.5 After -cooler

On the EH2600C, EH2600T3X, EH2600T160/T4X, EH4200C, EH4200T3X, EH4200T160/T4X chemical and ATEX compliant EH pumps, the nickel-plated after-cooler is resistant to corrosive vapours which may condense on it during pump operation (depending on the application).

1.3.6 No rmal operation

The ATEX compliant EH pumps rely on the pump’s constructional safety for the safe pumping of flammable materials. In normal operation, as defined by this manual, the ATEX compliant EH pumps are safe for the pumping of flammable materials where there is no risk that the build-up of p rocess deposits could reduce the operating clearances of th e pump mechanism, and so cause a potential ignition haz ard.

Where there is no such risk, the ATEX compliant EH pumps can be used to pump flammable materials from gas group IIA, IIB and IIC within the normal parameter defined in th is manual.

WARNING

When using the EH ATEX compliant booster in either a Edwards ATEX compliant system or in your own certified ATEX vacuum pumping system you must ensure that the gearbox purge is connected to your booster and the Nitrogen supply is guarantee d. Please refer to

Section 2.7 for operating

conditions.

WARNING

The ATEX compliant EH pumps rely on the principle of constructional safety to pump flammable gases and vapours safely. Process deposits (which could form due to condensation of process vapours) do not normally occur in booster pumps. However, to conform with constructional safety requirements, it is your responsibility to ensure th at process deposits do not occur in the ATEX compliant EH pump (see below).

WARNING

The ATEX compliant EH pumps rely on the principle of constructional safety to pump flammable gases and vapours safely. You must protect the ATEX compliant EH pump from the ingress of particles that could cause an ignition of flammable gas or vapour in the pump. If particles could enter the ATEX compliant EH pump during system commissioning, you must fit a suitable inlet filter or screen, which you should then remove before p rocess operation (refer to

Section 3.9).

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Introduction

1.3.7 Ab normal operation

Pumping gases with temperatures greater than the system temperature classification (see Section 1.3.3) .

z Pumping hydrocarbon oxides.

z Pumping pyrophoric gases.

z Pumping gases that tend to self-decompose, or that ar e chemically unstable.

z Pumping peroxides or oxygen enriched atmospheres wi th ATEX certified pumps. For non-ATEX applications

PFPE versions of the pumps can be offered for oxyge n enriched atmospheres and peroxides.

z Use of the chemical and ATEX compliant EH pump with materials which have auto-ignition temperatures

below the defined temperature rating of the chemical EH pump.

z Pumping of, or use of the ATEX compliant EH pump in the presence of, explos ive dust atmospheres.

z Use of the ATEX compliant EH pump in ambient conditions other than th ose specified in Section 2.1.

1.3.8 El ectrostatic charges

Pure gas doesn't create electrostatic charges. There is a danger of electrostatic charges when the gas pumped contains droplets or particles.

Always ensure that the pump is earthed so there is no dang er of igniting flammable gases due to electrostatic discharges.

WARNING

Misuse of the chemical and ATEX compliant EH pu mp as described below is strictly prohibited:

Technical Data

A301-51-880 Issue T

2 Technical Data

2.1 Operating and storage conditions

Notes:

1. For operation between -20 ºC and 5 ºC, w e recommend that the EH pump is operated continuou sly except when shut-down is necessary for maintenance purposes. Note also the cooling-water requirements given in

Section 2.8.

2. Because of the flexibility of the hydrokineti c drives, there is a wide range of backing pumps which are suitable for use with the EH Mechanical Booster pumps. However, note the restrictions for chemical and ATEX compliant EH pump critical backing pressure g iven in

Section 2.2. If necessary, contact Edwards

for advice.

2.2 Critical backing pressure

If this critical backing pressure is exceeded, the pump rot ors have to do additional compressive work against the backing pressure, which can cause the rotor temperature to exceed the temperature classification limits, as there is no flow of cooling gas through the pump. The critical ba cking pressure at zero flow is equivalent to the ultimat e pressure of the backing pump, when an isolation valve upstream of the ATEX compliant EH pump is closed.

The critical backing pressure at zero flow for your EH booster pump depends on the temperature classification (please refer to

Section 1.3.3 Temperature Classification) of the m echanical booster pump. The following critical backing

pressures apply for different temperature classifications for standalone boosters whic h haven’t been sold as part of an approved Edwards ATEX system:

If you want to use the EH booster outside the critical back ing pressure specified above, please contact Edwards for advice.

Table 1 - Operating and storage conditions

Ambient operating temperature range Ambient storage temperature range Maximum ambient operating humidity

-20 to 40 ºC

-20 to 80 ºC 90% RH

Protection degree (as defined by IEC 529) IP44

Recommended backing pumps See Note above

WARNING

For ATEX compliant EH pumps, which have been sold to you on their own and not as part of an approved Edwards ATEX system (which are fitted with flameproof motors), the outlet pressure of the ATEX compliant EH pump must not exceed the critical backing pressure at zero flow, as specified below. If this critical pressure is exceeded, internal temperatures in the ATEX compliant EH pump may exceed the temperature classification (refer to

Section 1.3.3) and render it invalid.

This can result in an internal ignition of the pumped gases/vapours.

If you fit an isolation valve between the ATEX compliant EH pump and the backing pump, you must interlock the operation of the valve with the operat ion of the ATEX compliant EH pump, so that closure of the valve results in shut-down of the ATE X compliant EH pump.

Table 2 - Temperature classifications

Temperature Classification Critical backing pressure [mbar]

T3 40

T160 30

T4 20

A301-51-880 Issue T

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Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Technical Data

In addition, the pressure ratio between the EH mechanical booster pump and the backing pump has to be kept within certain limits to ensure that the temperature limits are not exceeded.

The following general pressure ratio figures apply in rela tion to the temperature class of your vacuum pumping system:

If you want to use your booster outside these limits, pl ease contact Edwards for advice.

The following tables show possible combinations of Edwards EH mechanical booster pump with Edwards DPS Chemical Dry pump.These systems are Edwards approved ATEX sy stems.

Please note that the following tables refer to 50 Hz ope ration only.

For Edwards EH mechanical booster/ DPS dry pump com binations depending on temperature class of the system:

✔ Do not require extra protectio n * Consult Edwar ds for advice

Table 3 - Pressure ratio figures

Pressure ratio at duty point Temperature class of vacuum system

3:1 T 3

2.5: 1 T1 60

2:1 T 4

Table 4 - DPS dry pump and EH mechanical booster pump combi nations for T3

Booster Pump

Dry Pump

DPS 80 DPS 160 DPS 250 DPS400

EH250 T3 ✔ ✔ ✔ ✔

EH500 T3 ✔ ✔ ✔ ✔

EH1200 T3 ✔ ✔ ✔ ✔

EH2600 T3 * * ✔ ✔

EH4200 T3 * * * ✔

Table 5 - DPS dry pump and EH mechanical booster pump combination s for T160

Booster Pump

Dry Pump

DPS 80 DPS 160 DPS 250 DPS400

EH250 T160 ✔ ✔ ✔ ✔

EH500 T160 ✔ ✔ ✔ ✔

EH1200 T160 ✔ ✔ ✔ ✔

EH 2600 T160 * * ✔ ✔

EH 4200 T160 * * * ✔

Page 5

Technical Data

A301-51-880 Issue T

For EH mechanical booster/CPH dry pump combination depending on the temperature class of the system:

✔ Do not require extra protectio n * Consult Edwar ds for advice

Table 6 - CPH dry pump and EH mechanical booster pump combination s for T160

Booster Pump

Dry Pump

CPH 250 CPH 400

50 Hz 60 Hz 50 Hz 60 Hz

EH1200 T160 ✔ * ✔ *

EH2600 T160 ✔ * ✔ *

EH4200 T160 * * ✔ *

Table 7 - CPH dry pump and EH mechanical booster pump combination s for T3

Booster Pump

Dry Pump

CPH 250 CPH 400

50 Hz 60 Hz 50 Hz 60 Hz

EH1200 T3 ✔ ✔ ✔ ✔

EH2600 T3 ✔ ✔ ✔ ✔

EH4200 T3 * * ✔ ✔

A301-51-880 Issue T

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Technical Data

2.3 Performance

2.4 Mechanical data

Table 8 - Performance data

Rotational speed:

50 Hz electrical supply 60 Hz electrical supply

0 to 2900 r min

-1

0 to 3500 r min

-1

Maximum outlet pressure (see Section 1.2.4) 1000 mbar absolute, 1 x 105 Pa

Pressure differential across EH pump (determined by the hydr okinetic drive):

Pump 5 0 Hz electrical supply 60 Hz electrical supply

EH250/EH250IND 0 to 180 mbar 0 to 1.8 x 10

Pa 0 to 150 mbar 0 to 1.5 x 104 Pa

EH500/EH500IND 0 to 110 mbar 0 to 1.1 x 10

Pa 0 to 90 mbar 0 to 9 x 103 Pa

EH1200/EH1200IND 0 to 90 mbar 0 to 0.9 x 10

Pa 0 to 75 mbar

0 to 7.5 x 103 P

EH1200C - - 0 to 75 mbar

0 to 7.5 x 103 P

EH1200 T3/T160/T4X 0 to 76 mbar 0 to 7.6 x 10

Pa - -

EH2600 0 to 80 mbar 0 to 8 x 10

Pa 0 to 67 mbar 0 to 6.7 x 103 Pa

EH2600IND 0 to 120 mbar 0 to 1.2 x 10

Pa 0 to 67 mbar 0 to 6.7 x 103 Pa

EH2600C - - 0 to 67 mbar 0 to 6.7 x 10

EH2600 T3X 0 to 114 mbar 0 to 1.14 x 10

Pa - -

EH2600 T160/T4X 0 to 75 mbar 0 to 7.5 x 10

Pa - -

EH4200 0 to 60 mbar 0 to 6 x 10

Pa 0 to 50 mbar 0 to 5 x 103 Pa

EH4200IND 0 to 70 mbar 0 to 7 x 10

Pa 0 to 50 mbar 0 to 5 x 103 Pa

EH4200C - - 0 to 50 mbar 0 to 5 x 10

EH4200 T3X 0 to 64 mbar 0 to 6.4 x 10

Pa - -

EH4200 T160/T4X 0 to 52 mbar 0 to 5.2 x 10

Pa - -

Table 9 - Mechanical data

Dimensions See Figure 3 to 10

Mass: EH250

EH250IND EH500 EH500IND

61 kg 66 kg 69 kg 74 kg

EH1200 EH1200IND EH1200C EH1200 T3/T160/T4X

149 kg 149 kg 170 kg 170 kg

EH2600 EH2600IND EH2600C EH2600 T3X EH2600 T160/T4X

308 kg 345 kg 415 kg 415 kg 415 kg

EH4200IND EH4200C EH4200 T3X EH4200 T160/T4X

380 kg 425 kg 495 kg 495 kg

Technical Data

A301-51-880 Issue T

2.5 Electrical data

Note:

The motors of EH250, EH500 and EH500IND pumps are supplied configured for ‘low voltage’ operation (230V

and lower), the motors of all other pumps are supplied configured for ‘hig h voltage’ operation (380 V and

higher): refer to

Section 3.6.

Table 10 - Electrical data

Electrical supply voltage Number of phases Voltage tolerance:

50 Hz electrical supply 60 Hz electrical supply

Full load current ratings

220/240/380/415 V, 50 Hz or 208/230/460 V, 60 Hz 3

± 10%

-2.5%, +5% See below and refer to motor rating plate

Pump(s)

220 V 50 Hz

240 V 50 Hz

380 V 50 Hz

415 V 50 Hz

208 V 60 Hz

230 V 60 Hz

460 V 60 Hz

EH250 EH500

Full load (A) Rating (kW)

6.3

1.5

5.8

1.5

3.7

1.5

3.4

1.5

6.1

1.5

5.5

1.5

2.8

1.5

EH250IND EH500IND

Full load (A) Rating (kW)

7.8

2.2

7.4

2.2

4.5

2.2

4.3

2.2

9.7

2.2

8.8

2.2

4.4

2.2

EH1200 EH1200IND

Full load (A) Rating (kW)

11.1

3.0

10.2

3.0

6.4

3.0

5.9

3.0

11.9

3.0

10.7

3.0

5.4

3.0

EH1200C Full load (A)

Rating (kW)------------

5.0

3.0

EH1200 T3/T160/ T4X

Full load (A) Rating (kW)

10.4

3.0

9.9

3.0

6.0

3.0

5.7

3.0------

EH2600 Full load (A)

Rating (kW)

19.8

7.5

18.2

7.5

11.5

7.5

10.5

7.5

20.9

7.5

18.9

7.5

9.5

7.5

EH2600IND Full load (A)

Rating (kW)

21.5

11.0

20.7

11.0

34.8

11.0

17.4

11.0

EH2600C Full load (A)

Rating (kW)----------

36.3

11.0

18.1

11.0

EH2600 T3X EH2600 T160/T4X

Full load (A) Rating (kW)

20.8

11.0

19.5

11.0

EH4200 Full load (A)

Rating (kW)

19.8

7.5

18.2

17.5

11.5

7.5

10.5

7.5

20.9

7.5

18.9

7.5

9.5

7.5

EH4200IND Full load (A)

Rating (kW)----

21.5

11.0

20.7

11.0--

34.8

11.0

17.4

11.0

EH4200C Full load (A)

Rating (kW)

36.3

11.0

18.1

11.0

EH4200 T3X EH4200 T160/T4X

Full load (A) Rating (kW)----

20.8

11.0

19.5

11.0------

A301-51-880 Issue T

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Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Technical Data

2.6 Lubrication data

Note:

Edwards Material Safety Data Sheets for the oils an d grease specified below are available on request.

2.7 Hydrokinetic drive/gearbox nitrogen supply (EH1200C, EH1200

T3/T160/T4X, EH2600C, EH2600 T3X, EH2600 T160/T4X, EH4200C, EH4200 T3X, EH4200 T160/T4X only)

2.8 Cooling-water data

Notes:

1. If any EH1200, EH2600 or EH4200 model pump is used in an ATEX system, the EH pump must be operated with cooling-water. This is safety critical, and your system must incorporate a flow-switch (connected to the cooling-water outlet) which monitors the flow rate of the cooling-water through the EH pump; the flow-switch must be connected to your control system, which must be configured to shut down the EH pump when the cooling-water flow through th e EH pump is too low (see

Table 14 for the minimum

cooling-water flow rates). Refer to the ATEX instru ction manual for further details.

2. If any EH1200 model pump is not part of an ATEX system, you can operate the EH pump cont inuously without cooling-water if the inlet pressure is kept below 5 mbar (5x 10

Pa) and the pumpdown time is

no longer than 10 minutes.

Table 11 - Lubrication data

Recommended oil type

Hydrocarbon pumps PFPE pumps

Ultragrade 20 Fomblin YVAC 16/6

Recommended grease type

For use with all EH250 and EH500 pumps

Fomblin AR555

Oil capacity: All EH25 0 All EH500 All EH1200

Gear-cover - - 1.25

Hydrokinetic drive/gearbox 1.5 1.5 2.4

Shaft-seal reservoir 0 .125 0.125 0.125

All EH2600 All EH4200

Gear-cover 3.5 3.5

Hydrokinetic drive/gearbox 6.5 6.5

Shaft-seal reservoir 0. 15 0.15

Table 12 - Hydrokenetic drive/gearbox purge nitrogen supply data

Regulated pressure 0.3 to 0.5 bar gauge, 3 x 104 to 5 x 104 Pa

Table 13 - Cooling water supply data: EH pumps in non-ATEX systems

Recommended cooling-water flow (with inlet temperature of 20 ºC)

EH1200 pumps EH2600 pumps EH4200 pumps

3 l min

-1

6 l min

-1

6 l min

-1

Recommended cooling-water supply pressure 2 to 6 bar gauge, 3 to 7 bar absolute,

3 x 10

to 7 x 105 Pa

Permissible temperature range 5 to 35 ºC

Page 6

Technical Data

A301-51-880 Issue T

2.9 Noise and vibration data

2.10 Connections

Table 14 - Cooling-water supply data: EH pumps in ATEX systems

Minimum cooling-water flow (with inlet temperature of 20 ºC)

EH1200 T3/T160/T4X EH2600 T3/EH2600 T160/T4X EH4200 T3/EH4200 T160/T4X

2 l min

-1

4 l min

-1

4 l min

-1

Recommended cooling-water supply pressure 2 to 6 bar gauge, 3 to 7 bar absolute,

3 x 10

to 7 x 105 Pa

Permissible temperature range 5 to 35 ºC

Table 15 - Noise and vibration data

Vibration level < 1.8 mm s-1 r.m.s. in the range 10 to 1000 Hz

Continuous A-weighted sound pressure level measured at 1 metre from the EH pump:

EH250 EH500 EH1200 EH2600 EH4200

72 dB(A) 72 dB(A) 77 dB(A) 83 dB(A) 83 dB(A)

Table 16 - Connections

Cooling-water connections:

Inlet Outlet

/8 inch BSP male

Hydrokinetic drive/gearbox purge connection

Vacuum connections:

Chemical and ATEX compliant pumps only.

/4 inch compression fitting

EH250 EH500 EH1200 EH2 600 EH4200

Inlet ISO63 ISO100 ISO160 ISO160 ISO250

Outlet ISO40 ISO63 ISO100 ISO100 ISO100

A301-51-880 Issue T

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Technical Data

2.11 Materials of construction of components exposed to pumped gases

2.12 Item Numbers

Table 17 - Materials of construction

Stator and headplates Rotors Hydrokinetic drive/gearbox cover Housing ‘O’ rings Hydrokinetic drive/gearbox shaft-seals Internal pump shaft-seals Hydrokinetic drive/gears cooling coils

After-cooler and swept volume

†

Headplate jointing compound

All EH1200, EH2600 and EH4200 models.

†

All EH2600 and EH4200 models.

Grey cast iron, grade 250 (BS1452) SG iron, grade 420/12 (BS2789) Aluminium LM25TF (BS1490) Viton Viton PTFE (polytetrafluoroethylene) Copper/brass Nickel plated copper/brass Loctite 518

Table 18 - Item numbers

Pump(s) Type

SA = Safe area, FP = Flameproof

220-240 V/380-415 V

3-phase, 50 Hz

208-230 V/460 V

3-phase, 60 Hz

Hydrocarbon PFPE Hydrocarbon PFPE

EH250 EH250IND

SASA-

A301-51-945

A301-53-935--

A301-52-946

A301-54-936

EH500 EH500IND

SA SA-A302-71-945

A302-73-935--

A302-72-946

A302-74-936

EH1200 EH1200IND EH1200C EH1200 T3/T160/T4X

SA SA FP FP

A305-90-935

A305-57-900

A305-92-935

A305-91-936

A305-56-982

†

460 V only

A305-93-936

EH2600 EH2600IND EH2600C EH2600 T3X EH2600 T160/T4X

SA SA FP FP FP

A307-75-946

‡

A307-41-935

‡

A307-79-900

‡

380-415 V only

A307-53-935

A307-76-982

A307-56-982

230/460 V only

A307-54-936

EH4200 EH4200IND EH4200C EH4200 T3X EH4200 T160/T4X

SA SA FP FP FP

A309-75-946

‡

A309-41-935

‡

A309-79-900

‡

A309-76-982

A309-56-982

Technical Data

A301-51-880 Issue T

Figure 3 - EH250/EH250IND dimensions (mm)*

* The dimensions given in Figure 3 assume that Leroy is used for both the 1.5 and 2.2 KW motors.

1. Lifting-bolt

2. External evacuation port

EH250 EH250IND A 682 709 B 270 270 C 183 190

A301-51-880 Issue T

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Technical Data

Figure 4 - EH500/EH500IND dimensions (mm)*

* The dimensions given in Figure 4 assume that Leroy is used for both the 1.5 and 2.2 KW motors.

1. Lifting-bolts

2. External evacuation port

EH500 EH500IND A 770 797 B 234 252 C 183 190

Page 7

Technical Data

A301-51-880 Issue T

Figure 5 - EH1200/EH1200IND dimensions (mm)

1. Lifting-bolts

A301-51-880 Issue T

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Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Technical Data

Figure 6 - EH1200C/EH1200 T3/T160/T4 dimensions (m m)

1. Lifting-bolts

EH1200C 250

EH1200 T3/T160/T4 208

Technical Data

A301-51-880 Issue T

Figure 7 - EH2600/EH2600IND dimensions (mm)

1. Lifting-bolts

EH2600 EH2600IND A 1200 1248 B 120 220 C 470 523 D 260 311 E 200 240

A301-51-880 Issue T

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Technical Data

Figure 8 - EH2600C/EH2600 T3/EH2600 T160/T4 dim ensions (mm)

1. Lifting-bolts

Page 8

Technical Data

A301-51-880 Issue T

Figure 9 - EH4200/EH4200IND dimensions (mm)

1. Lifting-bolts

EH4200 EH4200IND A 1380 1428 B 120 220 C 470 523 D 260 311 E 200 240

A301-51-880 Issue T

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Technical Data

Figure 10 - EH4200C/EH4200 T3/EH4200 T160/T4 di mensions (mm)

1. Lifting-bolts

Installation

A301-51-880 Issue T

3 Installation

3.1 Safety

z A suitably trained and supervised technician must install y our EH pump.

z Ensure that the installation technician is familiar with th e safety procedures which relate to the products

pumped. Wear the appropriate safety-clothing when you come into contact with conta minated components. Dismantle and clean contaminated components inside a fu me-cupboard.

Consult Edwards publication P400-40-100

(Vacuum pump and vacuum system safety - chemical and industria l

systems) before you install and use the EH pump to proces s hazardous or flammable materials.

z Vent and purge the pumping system before you start installation work .

z Check that all the required components are available an d of the correct type before you start work.

z Ensure that debris does not get into the EH pump wh en you install it.

z Disconnect the other components in the pumping system f rom the electrical supply so that they cannot be

operated accidentally.

z Do not reuse ‘O’ rings and Co-Seals.

z Ensure that the cooling-air flow through the pump-mot or cooling-fan cannot be obstructed.

z Ensure that all electrical cables, nitrogen pipelines and c ooling-water pipelines are safely positioned,

secured and routed, so that they do not present a trip hazard.

z Provide adequate access to all pump servicing points and oil-level sight-glasses.

z Leak-test the system after installation work is complete and seal any leaks found to prevent leakage of

hazardous substances out of the system and leakage of a ir into the system.

3.2 System requirements

Consider the following points when you design your pum ping system:

z You must use a suitable backing pump: refer to Section 2.1 and 2.2.

z The EH pump must be mounted on a firm, level surface .

z Vacuum pipelines must be adequately supported to stop the transmissio n of stress to pipeline joints.

z If necessary, incorporate flexible pipelines in your system pipelines to reduce the transmission of vibration

and to prevent loading of the coupling joints. If you use flexible pipelines, you must ensure that you use flexible pipelines which have a maximum pressure rating which is greater than the h ighest pressure that can be generated in your system.

z You must limit the temperature of the inlet gas to be no greater than the temp erature classification of the

system (if applicable).

z Ensure that your design incorporates all appropriate saf ety precautions if toxic, inflammable or explosive

gases or particulates will be pumped.

WARNING

Obey the safety instructions listed below and take note of appropriate precautions. If you do not, you can cause injury to people and damage to equi pment.

A301-51-880 Issue T

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Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Installation

z You must be able to purge with an inert gas when you shut down the pumping sy stem to dilute dangerous

gases to safe concentrations. Consult Edwards or your su pplier if you are in doubt.

If the EH pump is to be fitted in a new system, ensure t hat all preliminary pipelines have been installed and that a suitable base for the EH pump has been prepared befor e you start installation.

Check that the following services and facilities are avai lable for connection to the EH pump:

z Cooling-water supply and return

z Hydrokinetic drive/gearbox purge nitrogen supply (ch emical and ATEX compliant EH pumps only)

z Electrical supply

z Exhaust-extraction system

z Inlet-screen (if required, to prevent the ingress of debris during commissioning): refer to Section 1.3.6

3.3 Unpack and inspect

Use the following procedure to unpack and inspect the EH pump:

1. Place the pallet in a convenient position with a fork lift truck or a pallet truck.

2. Remove all packing materials.

3. Use suitable lifting-gear to remove the EH pump from its pallet:

z On all pumps, attach the lifting-gear to the centre pair of lifting-bolts (Figure 1 to 10, item 1) on the EH

pump.

z All of the EH2600 model pumps and EH4200C, EH4200 T3X and EH4200 T160/T4X pumps have centres of mass

which are offset towards the motor. On these pumps, you must fit an additional s upport strap to the motor (behind the lifting-bolt) to support the pump, and preve nt it from tilting when you lift it.

Do not try to lift the EH pump by hand (see

Section 2.4 for the mass of your EH pump).

4. Remove all protective covers and inspect the EH pump. If the EH pump is damaged, notify your supplier and the carrier in writing within three days; state the Item Number of the EH pump together with your order number and your supplier’s invoice number. Retain all packing materials for inspection. Do not use the EH pump if it is damaged.

5. If the EH pump is not to be used immedia tely, refit the protective covers. Store the EH pump in suitable conditions as described in

Section 6.1.

WARNING

Use suitable lifting equipment to move the EH pump , in accordance with the method described below. If you do not, you can injure yourself or damage the EH pump. Refer to

Section 2.4 for the

mass of the EH pump.

Page 9

Installation

A301-51-880 Issue T

3.4 Fill the pump with oil

3.4.1 Hy drokinetic drive/gearbox

We recommend that the hydrokinetic drive/gearbox oil- level is maintained at the recommended oil-level shown in

Figure 11, item 5; if the oil-level is above or below the recommended oil-level, the performance of the EH pump may

be affected.

Do not allow the oil-level to fall below the bottom of the reflector plate (

Figure 11, item 4) or the EH pump may be

damaged.

1. Remove the hydrokinetic drive/gearbox oil filler- plug (

Figure 1, item 3).

2. Refer to

Figure 11. Fill the hydrokinetic drive/gearbox with the rec ommended type of oil until the oil-level

reaches the recommended oil-level (5) at the top of the reflector plate (4) in the oil-level sight-glass (3).

3. Refit the hydrokinetic drive/gearbox oil filler-plu g.

3.4.2 S haft-seal reservoir

We recommend that you fill the shaft-seal reservoir s o that the oil-level is at the recommended oil-level, shown in

Figure 11, item 2.

You can operate the EH pump as long as the oil-level is a bove the bottom of the reflector plate. Do not allow th e shaft-seal oil-level to fall below the bottom of the refl ector plate or the EH pump may be damaged. You must u se the same oil you used to fill the hydrokinetic drive/ge arbox.

1. Remove the shaft-seal reservoir vented oil filler- plug (

Figure 1 and 2, item 2).

2. Refer to

Figure 11. Fill the shaft-seal reservoir with oil until the oil-level is at the recommended oil-level (2) at

the top of the reflector plate (6).

3. Refit the vented oil filler-plug.

WARNING

Changing the oil in an EH pump from hydrocarbon to PFPE (Fomblin) could potentially cause a safety hazard. Fomblin EH pumps are generally used in hazardous applications which may involve the pumping of gases with high concentrations of oxygen. If hydrocarbon oil comes into contact with gases with an oxygen concentration greater than 25%, an explosion can occur.

Therefore, if you want to convert an EH pump that has been used with hydrocarbon oil to use PFPE (Fomblin) oil, you cannot simply flush the EH pump with new PFPE oil. You must return the EH pump to a Edwards Service Centre for overhaul and cle aning by qualified Edwards service engineers. The change in oil type requires a com plete strip down of the EH pump, and thorough cleaning of all parts, so that all traces of hydrocarb on oil are removed.

WARNING

Ensure that the correct grade of oil is used and tha t the oil-levels in the EH pump are correct. If an incorrect oil is used or if an oil-level is incorrect, EH pump performance may be affected and the EH pump may be damaged, which will compro mise its constructional safety.

WARNING

Ensure that the correct vented filler-plug is refitted in the shaft-seal reservoir. If you use a nonvented plug, the reservoir will be pressurised an d the oil sight-glass may fracture.

A301-51-880 Issue T

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Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Installation

Figure 11 - Sight glasses

3.4.3 Gea r-cover (all EH1200, EH2600 and EH 4200 model pumps only)

Use the following procedure to fill the gear-cover on a ll EH1200, EH2600 and EH4200 pumps.

You must fill the gear-cover with the same oil you used to fill the hydrokinetic drive/gearbox and shaft-seal reservoir.

1. Remove the oil filler-plug on the top of the gear -cover (

Figure 2, item 7).

2. Fill the gear-cover with oil until the oil-le vel is at the middle of the reflector plate in the gear-co ver oil-level sight-glass (

Figure 2, item 9).

3. Refit the oil filler-plug.

1. Shaft-seal reservoir sight-glass

2. Shaft seal reservoir recommended oil- level

3. Hydrokenetic drive/gearbox sight-glas s

4. Hydrokenetic drive/gearbox reflector plate

5. Hydrokenetic drive/gearbox recommen ded oil-level

6. Shaft-seal reflector plate

7. Direction of rotation sight-glass* (the arrow shows the correct direction)

* Not fitted t o EH2600/2600IND/2600C/2600

T3/2600 T160 and EH4200/4200IND/4200C/ 4200 T3/4200 T160 pumps

Installation

A301-51-880 Issue T

3.5 Cooling-water connections (all EH1200, EH2600 and EH4200 model pumps only)

Note:

Refer to Section 2.8 for the cooling-water requirements. Note that there are minimum flow rate and flowswitch requirements specified for ATEX compliant EH pumps operated in ATEX certified systems.

Connect the cooling-water supply and return lines to the

/8 inch BSP connectors. One connector is on the rear of the hydrokinetic drive/gearbox, the other connector is on the underside of the gear-cover. You can connect th e supply and return lines to either of the connectors; the direction of cooling-water flow is not important.

Refer to

Section 2.8 for the minimum cooling-water flow rate required. If the danger of the condensation of gases in

the booster is not process critical, always connect the supply line to the gearbox cover first.

3.6 Electrical connections

3.6.1 El ectrical supply configuration

The motors of the EH250, EH500 and EH500IND pumps are supplied configured for ‘low-voltage’ operation (240 V and lower).

The motors of all other EH pumps are supplied config ured for ‘high-voltage’ operation (380 V and higher). The one exception to this is the Leroy 11 kW, 50 Hz motor, wh ich is configured for ‘low voltage’ as this is 380-415 V.

Refer to the wiring instructions provided with the pump motor. Configure your electrical connections accordin g to the manufacturers instructions. If in doubt refer to

Table 20.

Refer to

Table 20 before you connect the electrical supply to t he pump motor (as described in Section 3.6.2).

Table 20 defines which figure you must refer to for the electrical connections for your pump/electrical supply.

WARNING

Ensure that the electrical installation of the EH pump conforms with your local and national safety requirements. It must be connected to a suitably rated (refer to

Section 2.5) fused and protected

electrical supply and a suitable earth (ground) poi nt.

WARNING

If a chemical or ATEX compliant EH pump is used in a potentially explo sive atmosphere or is used to pump a potentially explosive atmosphere, the pump must be powered by an electrical supply at the rated frequency of the pump motor. If it is not, you may invalidate any ATEX certification of the pump, and the motor may overheat which co uld create an ignition hazard.

If you want to use a variable speed drive to operate the pump motor, contact Edwards for advice.

A301-51-880 Issue T

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Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Installation

3.6.2 Moto r connections

CAUTION

The motor must be correctly configured and you must make the correct electrical connections for your electrical supply. If you do not, you can damage the motor.

Connect the supply through a contactor which has overlo ad-protection or use a controller which incorporates a contactor.

You must use a contactor which has a manual reset control. If you do n ot, the EH pump could automatically restart after an electrical overload or an electrical supply fail ure.

You must use a suitable multi-wire cable and a suitable cable-gland (see Step 4 below) to connect your electrical supply to the pump motor.

Connect the motor to the electrical supply as describe d in the following procedure.

1. Remove the motor terminal-box cover (

Figure 1 and 2, item 1).

2. Check your electrical supply voltage and frequency. If necessary, configure the motor (that is, the terminal wires

and any links) to operate with your supply voltage: refe r to the wiring instructions supplied with the pump motor, or if in doubt the appropriate Figure specified in

Table20.

3. Remove the plug from the cable-entry hole that yo u will use for the electrical supply cable. Choose the mo st

suitable hole for your application.

4. Fit a suitable cable-gland to the cable-entry hole. The cable-gland (and adaptor, if fitted) must provide a

protective seal to IP44 (or higher), as defined by IEC 529. Refer t o

Table19 for the cable-g land hole sizes.

5. Pass the electrical supply cable through the cable- gland.

WARNING

On all chemical and ATEX compliant EH pumps, you must use a suitable flameproof cable-gland to connect the electrical supply cable to the pump-motor terminal-box. If you do not, the installation may invalidate the certification of the system if the p ump is used in an ATEX system.

WARNING

You must provide suitable strain relief on the electric al supply cable. If you do not, the cable (or wires in the cable) may become disconnected f rom the pump and there may a risk of injury or death by electric shock.

WARNING

Connect the electrical supply to the motor through a c ontactor which has a manual reset control.

WARNING

Connect the electrical supply to the motor so that it is automatically switched off if the backing pump stops. If you do not, the EH pump may overheat if it continues to operate when the backing pump is stopped.

WARNING

You must be able to isolate and lock out the electric al supply from the EH pump.

Page 10

Installation

A301-51-880 Issue T

6. Connect the wires of the cable to the ap propriate terminals, as shown in the wiring instructions supplied with

the pump motor, or if in doubt the appropriate Figure specified in

Table20.

7. Tighten the cable-gland.

8. If you have a chemical or ATEX compliant EH pump, continue at

Section 3.6.3 to connect the motor thermistors,

otherwise refit the terminal-box cover to the motor.

3.6.3 Con nect the motor thermistors (chemical and ATEX compliant EH pumps only)

The flameproof motors on all chemical and ATEX comp liant EH pumps incorporate thermistors.

You must connect the thermistor terminals in the moto r to a suitable control circuit, to shut down the EH pump system if the motor temperature is too high. An example control circuit is shown in

Figure 12.

You must use a suitable two-wire cable and a suitable cable-gland (see Step 2) to connect the thermistors cable (from your control circuit) to the thermistor terminals in the mot or.

Use the following procedure to connect the thermistor terminals to the control circuit.

1. Remove the plug from the cable-entry hole that you will use for the thermistors cable. (If there is more than one

cable-entry hole, choose the most suitable hole for you r application.)

2. Fit a suitable cable-gland to the cable-entry hole. The cable-gland (and adaptor, if fitted) must provide a

protective seal to IP44 (or higher), as defined by IEC 529. Refer t o

Table19 for the cable-g land hole sizes.

3. Pass the thermistors cable through the cable-gland .

4. Connect the two wires of the cable to the appropriate terminals, as shown in

Figure 13 to 21 (refer to Table20).

5. Tighten the cable-gland.

6. Refit the terminal-box cover to the motor.

7. Connect the thermistor wires to your cont rol circuit.

Table 19 - Motor cable-gland hole sizes

Pump type Motor frame size

As shown on the motor label.

Electrical supply cable-

gland hole size (ISO)

Thermistors cable-gland

hole size (ISO)

Safe area EH pumps 90 , 100 20 -

132 25 -

160 32 -

Chemical EH pumps and ATEX

compliant

100 20 20

160 32 20

A301-51-880 Issue T

Page 32 © Edwards Limited 2007. All rights reserve d.

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Installation

Figure 12 - Example control circuit

1. Electrical supply isolator

2. +ve control side

3. Thermistor relay

4. Stop switch

5. Start switch

6. Fault indicator lamp

7. Pump contactor

8. 0 V control side

9. Pump motor

10.Contactor

11.Circuit breaker

Installation

A301-51-880 Issue T

Table 20 - Electrical supply connection configurations

Motor

supplier

Motor Item

Number

Motor voltage (V)

(connection)

Motor power

Frequency

(Hz)

Configuration

Refer to

Figure

Leroy

A071-12-004

460

1.5 kW 60 A

A071-13-076 2.2 kW

A071-12-004

208-230

1.5 kW 60 B

A071-13-076 2.2 kW

Brook

A071-12-003

380-415

1.5 kW

50 C

A071-14-001 3 kW

A071-12-024 1.5 kW

A071-14-020 3 kW

Leroy

A071-13-075 2.2 kW

A071-14-006 3 kW

Brook

A071-12-003

220-240

1.5 kW

50 D

A071-14-001 3 kW

A071-12-024 1.5 kW

A071-14-020 3 kW

Leroy

A071-13-075 2.2 kW

A071-14-006 3 kW

WEG A071-18-017 380-415 (delta) 11 kW 50 D

Leroy A0 71-18-015 380-415 (delta) 11 kW 50 D 16

Brook

A071-18-021

380-415

(direct delta start)

11 kW

50 D

A071-18-015 11 kW

A071-12-004

460

(star)

1.5 kW 60 E

A071-12-025 1.5 kW

A071-12-004

208-230

(double star)

1.5 kW 60 F

A071-12-025 1.5 kW

A071-14-012 460 4 h.p. 60 G

WEG

A071-18-019 460 (delta) 11 kW 60 E

A071-18-019 230 (double delta) 1 1 kW 60 H 20

Brook

A071-14-002

460

(delta)

4 h.p.

60 E

A071-14-021 4 h.p.

A071-18-016 15 h.p.

A071-18-022 15 h.p.

A071-17-002 10 h.p.

A071-17-029 10 h.p.

A071-14-002

208-230

(double delta)

4 h.p.

60 I

A071-14-021 4 h.p.

A071-17-002 10 h.p.

A071-17-029 10 h.p.

A071-18-016

230

(double delta)

15 h.p.

60 I

A071-18-022 15 h.p.

As shown on the label on the motor.

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Installation

Figure 13 - Electrical supply configuration A

Figure 14 - Electrical supply configuration B

Note: The th ermistor terminals may

be annotated "T1" and "T2" instead of "P1" and "P2".

1. Thermistors cable

2. Cable-gland

3. Terminal/wire markings

4. Cable-gland

5. Electrical supply cable

6. To control circuit

Note: The thermisto r terminals may

be annotated "T1" and "T2" instead of "P1" and "P2".

1. Thermistors cable

2. Cable-gland

3. Links

4. Terminal/wire markings

5. Cable-gland

6. Electrical supply cable

7. To control circuit

Page 11

Installation

A301-51-880 Issue T

Figure 15 - Electrical supply configuration C

Figure 16 - Electrical supply configuration D

Note: The th ermistor terminals may

be annotated "T1" and "T2" instead of "P1" and "P2".

1. Thermistors cable

2. Cable-gland

3. Links

4. Terminal/wire markings

5. Cable-gland

6. Electrical supply cable

7. To control circuit

1. Thermistors cable

2. Cable-gland

3. Links

4. Terminal/wire markings

5. Cable-gland

Note: The thermisto r terminals may

be annotated "T1" and "T2" instead of "P1" and "P2".

6. Electrical supply cable

7. To control circuit

A301-51-880 Issue T

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Installation

Figure 17 - Electrical supply configuration E

Figure 18 - Electrical supply configuration F

1. Thermistors cable

2. Cable-gland

3. Terminal/wire markings

4. Cable-gland

5. Electrical supply cable

6. To control circuit

Note: The thermisto r terminals may

be annotated "T1" and "T2" instead of "P1" and "P2". Winding wires may be numbered without letters.

1. Thermistors cable

2. Cable-gland

3. Links

4. Terminal/wire markings

5. Cable-gland

6. Electrical supply cable

7. To control circuit

Note: The the rmistor terminals may

be annotated "T1" and "T2" instead of "P1" and "P2". Winding wires may be numbered without letters.

Installation

A301-51-880 Issue T

Figure 19 - Electrical supply configuration G

Figure 20 - Electrical supply configuration H

1. Thermistors cable

2. Cable-gland

3. Terminal/wire markings

4. Cable-gland

5. Electrical supply cable

6. To control circuit

1. Thermistors cable

2. Cable-gland

3. Links

4. Terminal/wire markings

5. Cable-gland

6. Electrical supply cable

7. To control circuit

Note: The th ermistor terminals may

be annotated "T1" and "T2" instead of "P1" and "P2".

A301-51-880 Issue T

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Installation

Figure 21 - Electrical supply configuration I

3.7 Check the direction of pump rotation

It is possible for the three-phase electrical supply to the motor to be phased incorrectly. If the supply is phased incorrectly, the rotors will rotate in the reverse direction or remain stationary. Check the direction of rotation as described below.

1. Check that the EH pump is connected to the vacuum system or that the inlet is blanked off.

2. Connect the backing pump and switch the backing pump on.

3. On all of the EH2600 and EH4200 model pumps, the correct direc tion of rotation is indicated by an arrow on the motor fan cover (

Figure 2, item 17). To determine the direction of rotation: watch the mo tor fan inside the fan

cover, switch on the EH pump for two or three seconds, then switch the EH pump off.

On all of the EH250, EH500 and EH1200 model pumps, you can use the method above to determine the direction of rotation. Alternatively, the direction of rotation is also indicated by an arrow next to the direction of rotation sight-glass (

Figure 1, item 10 and Figure 2, item 14): watch the mo tor-coupling in the sight-glass (Figure 11,

item 7), switch on the EH pump for two or three seconds , then switch the EH pump off.

4. Check that the direction of rotation of the coupling noted in Step 3 was the same as that indicated b y the rotation arrow on the motor or on the direction of r otation sight-glass. If the direction of rotation was correc t, continue at

Section 3.8.

WARNING

Blank the inlet or connect the EH pump to the vacu um system before you check the direction of pump rotation. If you do not, there is danger of obje cts being trapped in the rotating rotors.

1. Thermistors cable

2. Cable-gland

3. Links

4. Terminal/wire markings

5. Cable-gland

6. Electrical supply cable

7. To control circuit

Note: The thermisto r terminals may

be annotated "T1" and "T2" instead of "P1" and "P2".

Page 12

Installation

A301-51-880 Issue T

5. If the direction of rotation of the couplin g was incorrect:

z Switch off the backing pump and vent the system; iso late the EH pump from the electrical supply; reverse

any two of the phase-wires in the motor terminal-box.

z Repeat the check from Step 2 to ensure that the direction of r otation is now correct.

3.8 Connect the hydrokinetic drive/gearbox purge nitrogen supply

(chemical and ATEX compliant EH pumps only)

Use a rigid metal (such as stainless steel) pipeline with an outside diameter of 1/4 inch for your nitrogen supply.

We recommend that you install an automatically operated isolation-valve in your nitrogen supply pipeline, configured so that:

z The hydrokinetic drive/gearbox purge nitrogen supply is on whenever the chemical or ATEX compliant EH

pump is on.

z The hydrokinetic drive/gearbox purge nitrogen supply is off whenever the chemical or ATEX compliant EH

pump is off.

If your system incorporates an isolation valve between th e chemical or ATEX compliant EH pump and the backing pump, you must configure your system so that the purge nitrogen supply is switched off whenever the isolation valve is closed. If you do not, and the purge supply is left on when the isolation valve is closed, the system upstream of the isolation valve will become pressurised.

Refer to

Figure 2 and use the following procedure to connect y our purge nitrogen supply:

1. Remove the

/4 inch blanking plug from the hydrokinetic drive/gea rbox oil filler-plug and purge connector

(

Figure 2 item 4).

2. Fit a suitable

/4 inch compression fitting

connector to the purge connector.

3. Fit your nitrogen supply pipeline into the com pression fitting and tighten to secure the connection.

WARNING

Your nitrogen supply pressure must comply with the requirements of Section 2.7. If it does not, the purge pipelines may become over-pressurise d and may explode.

WARNING

If your system incorporates an isolation valve betw een the chemical EH pump and your backing pump, ensure that the purge nitrogen supply is swit ched off when the isolation valve is closed.

WARNING

If your booster pump is part of an ATEX system you have to connect the gearbox purge and guarantee the Nitrogen supply.

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Installation

3.9 Connect the pump-inlet and outlet

You must connect the inlet of the EH pump to your vacuum s ystem, and connect the outlet of the EH pump to your backing pump and exhaust-extraction/abatement syste ms, as required.

Pump-inlet and outlet connections are made with standard ISO flanges, Edwards trapped ‘O’ rings and (on the EH250 pumps only) a Edwards Co-Seal.

All of the EH2600 and EH4200 model pumps have two alternative outlet positions: on the underside of the EH pump, and at the side of the EH pump.

As supplied, these EH pumps are configured to use the outlet at the side of the EH pump and the flange on the underside of the EH pump is blanked off. If you do not wish to use the side outlet, remove the blanking-plate and ‘O’ ring from the outlet on the underside of the EH pump and refit the blanking-pla te with a new ‘O’ ring over the side outlet-flange.

Take note of the following when you connect your EH pump to the vacuum system.

z Move the EH pump to the required location and ensure that it is level and secure.

z For optimum pumping speeds, ensure that the pipelin e connected to the pump-inlet is as short as possible

and has a bore size not less than the inlet port diameter.

z Use a flexible connection in the pipeline from the vacu um system to the EH pump to reduce vibration and

stress in the system pipelines (see

Section 3.2).

z On very dusty applications, use a low-impedance inlet- filter to minimise abrasion in the EH pump.

WARNING

Do not exceed the load limits on the pump-inlet and outlet flanges as specified in Figure22. If you do, there will be a risk of leakage of process gases from the EH pump, or of damage to the EH pump.

WARNING

The ATEX compliant EH pumps rely on constructional safety for safe operation . If you will use the ATEX compliant EH pump in a process in which dust or particles could enter and damage the ATEX compliant EH pump, you must fit a suitable inlet fil ter.

WARNING

If particles, debris or loose components could enter the EH pump during commissioning, you must fit a suitable inlet filter which you can remove bef ore operating the EH pump on process duties.

WARNING

If you fit an isolation valve between a chemical or ATEX compliant EH pump and the backing pump, you must interlock the operation of the valve with the operation of the chemical or ATEX compliant EH pump, so that closure of the valve results in sh ut-down of the chemical or ATEX compliant EH pump.

WARNING

If you will pump flammable gases, ensure that you r backing pump and exhaust-extraction/ abatement systems comply with the critical back ing pressure requirements of

Section 2.2. If you

do not, there will be a risk of explosion during ope ration.

Installation

A301-51-880 Issue T

3.10 External evacuation of hydrokinetic drive/gearbox (optional)

The hydrokinetic drive/gearbox may be evacuated using an external pump. A description of the connections required is beyond the scope of this manual.

Contact your supplier or your nearest Edwards company for advice if you wish to use this facility.

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Installation

Figure 22 - Flange loading limits

1. Pump-inlet

2. Pump-outlet

F Force M Moment R Resultant X Load orientation Y Load orientation Z Load orientation

Maximum force Pump-inlet Pump-outlet

FX FY FZ FR

±1000 N ±1000 N ±2000 N ±2400 N

±224 lbf ±224 lbf ±449 lbf ±539 lbf

±750 N

±750 N ±1500 N ±1800 N

±168 lbf ±168 lbf ±337 lbf ±404 lbf

Maximum moment Pump -inlet Pump-outlet

MX MY MZ MR

±500 N m ±500 N m ±500 N m ±870 N m

±112 lbf ft ±112 lbf ft ±112 lbf ft ±195 lbf ft

300 N m 300 N m 300 N m 520 N m

± 67 lbf ft ± 67 lbf ft ± 67 lbf ft ±116 lbf ft

Note: EH250 pump shown. The flange

loading limits apply to all EH pumps.

Page 13

Operation

A301-51-880 Issue T

4 Operation

4.1 Operational safety

Ensure that the cooling-air flow around the EH pump and pump-motor is not restricted. (Refer to the ambient temperature specification in

Section 2.1). Take all necessary precautions to avo id accidental contact with the EH

pump.

4.2 Start-up procedure

4.2.1 Pr e-start checks

1. Check that the EH pump oil-levels are corr ect (see Section 3.4).

2. If the EH pump is part of an ATEX system, ensure that the gearbox purge is connected and the Nitrogen supply is on.

3. Check that the EH pump is correctly installe d, especially after initial installation and maintenance .

WARNING

Ensure that the cooling-air flow around the EH pump a nd pump motor is not restricted. If the air flow is restricted, the pump and/or motor will get hot ter than normal during pump operation:

z This may result in reduced reliability or the risk of a n explosion.

z If the EH pump is part of an ATEX system, the high operating temperature may cause the motor

thermistors to shut down the system as required by the ATEX safety interlock circuit (refer to Section 7 of the ATEX Instruction manual).

WARNING

During operation, parts of the EH pump can become very hot. Ensure that you do not touch the EH pump.

WARNING

Do not operate the EH pump with the inlet or outlet open to atmosphere. If you do, your fingers of other parts of your body may get trapped and you may be injured by the rotating pump mechanism.

A301-51-880 Issue T

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Operation

4.2.2 St art-up

Start-up the EH pump as described in the procedure below. This procedure assumes that the EH pump and the vacuum system are at atmospheric pressure.

1. On all of the EH1200, EH2600 and EH4200 m odel pumps only:

z Switch on the cooling-water supply and check that there is an adequate flow of coo ling-water at the correct

pressure (see

Section 2.8).

z If the EH pump is part of an ATEX system, ensure that the water flow ra te is adequate, and that the flow-

switch indicates this.

z Check the water connections for leaks.

Refer to

Section 2.8 for the cooling-water requirements.

2. Close all valves to atmospheric pressure and ensure that all other openings are closed.

3. Switch on the backing pump and open the b acking valve (if fitted).

4. Switch on the EH pump.

5. Allow the EH pump to run for approximate ly fifteen minutes to achieve normal operating temperat ure.

6. Slowly open the pump-inlet isolation-va lve (if fitted).

4.3 Shut-down

CAUTION

If the pump is to be shut down for a long period or is due to be shipped on, refer to Section 6. 1 for the storage instructions.

1. Close the pump-inlet isolation-valve (if f itted).

2. Leave the pump operating for sufficient t ime such that the pump is thoroughly purged of any hazardo us substances.

3. Switch off the EH pump.

4. Open the backing pump air-admittance valv e (if fitted) and switch off the backing pump.

5. On all of the EH1200, EH2600 and EH4200 mo del pumps only: turn off the cooling-water supply.

Maintenance

A301-51-880 Issue T

5 Maintenance

5.1 Safety information

z A suitably trained and supervised technician must mainta in the EH pump.

z Dismantle the EH pump in a clean workshop environme nt, with the correct tools and safety facilities

available.

z Ensure that the maintenance technician is familiar with the safety procedures which relate to the products

pumped. Wear the appropriate safety-clothing when you come into contact with conta minated components. Dismantle and clean contaminated components inside a fu me-cupboard.

z Allow the EH pump to cool for at least three hours bef ore you start maintenance work.

z Vent and purge the pumping system with nitrogen before you start m aintenance work.

z Check that all the required parts are available and of the correct type before starting work.

z Isolate the EH pump and other components from the ele ctrical supply so that they cannot be operated

accidentally.

z Re-check the EH pump rotation direction if the electrical supply has been disconnected.

z Do not reuse ‘O’ rings and Co-Seals.

z Dispose of components and waste oil safely (see Se ction 6.2).

z Take care to protect sealing-faces from damage.

z Do not touch or inhale the thermal breakdown products of fluorinated materials which may be present if the

EH pump has been overheated to 260 ºC and above . These breakdown products are very dangerous. Fluorinated materials in the EH pump may include oils, greases and seals. The EH pump may have overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Material Safety Data Sheets for fluorinated materials used in the EH pump are available on request: contact your supplier or Edwards.

z Leak-test your system after installation and maintenance to prevent leakage of dangerous substances out of

the system and leakage of air into the system.

The EH pump will be contaminated with the process che micals that have been pumped. Ensure that you take adequate precautions to protect people from the effects of dangerous substances if contamination has occurred .

WARNING

Obey the safety instructions given below and take note of appropriate precautions. If you do not, you can cause injury to people and damage to equi pment.

Table 21 - Maintenance plan

Operation Frequency Refer to Section

Check the oil-levels Daily

or Weekly

†

Flammable materials pumped.

†

Non-flammable materials pumped.

5.3

Inspect the pump connections Monthly 5.4

Change the pump oil 12 monthly 5.5

Lubricate the rear bearing 12 monthly 5.6

Overhaul the pump 6 yearly 5.7

A301-51-880 Issue T

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Maintenance

5.2 Maintenance plan

Table 21

details the maintenance operations necessary to mai ntain EH pumps in normal use. Instructions for each

operation are given in the section shown.

More frequent maintenance may be required if the EH pump is used to pump corrosive or abrasive gases and vapours. If necessary, adjust the maintenance plan according to your experience.

5.3 Check the oil-levels

Note: If there is a loss of oil from the shaft-sea l reservoir, the shaft-seal may have failed. Contact your supplier

or a Edwards Service Centre for advice.

Use the following procedure to check the oil-levels in t he sight-glasses. Refer to

Figure 1 and 2 for the location of

the filler-plugs and sight-glasses. During normal operat ion, the hydrokinetic drive/gearbox sight-glass (

Figure 11,

item 3) may appear empty or show a froth because the oil is in circulation around the coupling.

1. Shut down the EH pump, vent it to atmosph eric pressure and allow it to cool.

2. Refer to Figure 11. Check the shaft-seal oil-leve l. If the oil-level is below the bottom of the reflector plate (6), refer to

Section 3.4 and refill the shaft-seal reservoir.

3. Check the hydrokinetic drive/gearbox oil-le vel. If the oil-level is below the top of the reflector pla te, refer to

Section 3.4 and refill the hydrokinetic drive/gearbox oil r eservoir.

On all EH1200, EH2600 and EH4200 model

pumps only, check the gear-cover oil-level. If the oil-level is below the

middle of the reflector plate, refer to

Section 3.4 and refill the gear-cover.

5.4 Inspect the pump connections

1. Check that the cooling-water connections are secure.

2. Inspect the cooling-water pipelines and con nections for corrosion, leaks and damage.

3. Check that the electrical connections are s ecure.

4. Check the electrical supply cables for dam age.

5. Inspect all the vacuum pipelines for corros ion and damage. Check that all the vacuum connections a re secure.

6. On chemical and ATEX compliant EH pumps only:

z Inspect the hydrokinetic drive/gearbox purge nitrogen supply pipeline for corrosion and damage.

z Check that the pipeline connection to the hydrokinetic dr ive/gearbox is secure.

WARNING

Constructional safety ensures that ATEX complia nt EH pumps can safely pump flammable gases. To ensure that the constructional safety of the ATEX compliant EH pump is not compromised, you must maintain the ATEX compliant EH pump in accordance with the schedule given in

Table 21 and

using the procedures described in

Section 5.3 to 5.7 in this manual. If you do not, there may be a

risk of explosion and, if the pump is part of an ATEX certified system, the ATEX certification may be invalidated.

WARNING

Ensure that the correct grade of oil is used and that the oil-levels in the pump are correct. If an incorrect oil is used or if an oil-level is incorrect, EH pump performance may be affected and the EH pump may be damaged, which will compromise its constructional safety.

Page 14

Maintenance

A301-51-880 Issue T

5.5 Change the pump oil

Replace the pump oil as described below. Refer to Fig ure 1 and 2 for the location of the oil-filler and drai n-plugs.

1. Switch off the EH pump, vent it to atmos pheric pressure and allow it to cool.

2. Remove the hydrokinetic drive/gearbox oil filler- plug.

3. Remove the hydrokinetic drive/gearbox oil drain-plug from the underside of the hydrok inetic drive/gearbox and allow the oil to drain into a suitable container.

4. Remove the shaft-seal vented oil filler-plug. Use a suitable pump to suck the oil out of the shaft-seal reser voir.

5. Refit the hydrokinetic drive/gearbox oil drain-plug.

6. Refer to

Section 3.4 and fill the hydrokinetic drive/gearbox and shaft-seal reservoir with oil.

7. Refit the hydrokinetic drive/gearbox oil filler-plu g and the shaft-seal reservoir oil filler-plug.

On all EH1200, EH2600 and EH4200

model pumps only:

z Remove the oil filler-plug on the gear-cover.

z Remove the oil drain-plug from the underside of the gear-cove r and allow the oil to drain into a suitable

container.

z Refit the oil drain-plug and refer to Section 3.4 to refill the gear-cover with oil.

z Refit the oil filler-plug.

WARNING

Ensure that the correct grade of oil is used and that the oil-levels in the pump are correct. If an incorrect oil is used or if an oil-level is incorrect, EH pump performance may be affecte d and the EH pump may be damaged, which will compromise its constructional safety.

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Maintenance

5.6 Lubricate the rear-bearing (All EH250 and EH500 model pumps

only)

Use the following procedure to replace the grease in the rear-bearing. Refer to Section2 .6 for the correct type/grade of grease.

1. Switch off the EH pump and isolate it from the electrical supply. Vent the EH pump to atmospheric pressure.

2. Refer to

Figure 23. Remove the four plastic cover-caps (8) from the be aring end-cover (6).

3. Undo and remove the socket-head screws (7 ) located under the four plastic cover-caps.

4. Remove the end-cover (6) and ‘O’ ring (5). Dispos e of the ‘O’ ring safely.

5. Note the exact location of the shims (4) and spacers (3) inside the end-cover (6). Clean off all visible grease from the end-cover taking care not to misplace or damage the shims and spacers.

6. Use a soft, clean, lint free cloth or a plasti c or wooden spatula to remove all visible grease from both bearings (2).

7. Fill the visible side of each bearing (2) with clean grease, then lightly force the grease into the be aring.

8. Refill the visible side of each bearing (2) with cle an grease.

9. Apply a light wipe of high-vacuum grease to the new ‘O’ ring (5) and fit into the groove in the e nd cover (6).

10.Check that the shims (4 ) and spacers (3) are correctly located in the end-cover ( 6).

11.Refit the end-cover (6) and se cure it with the four socket-head screws (7). Tighten the screws e venly and refit the plastic cover-caps (8).

12.Leak test the system an d seal any leaks found.

WARNING

When you remove the end-cover, take note of the exact locations of the spacers and shims (

Figure 23, items 3 and 4) inside the end-cover. You must refit these items correctly in order to

ensure that the rotor clearance settings remain correct. Altering the rotor clearance settings may compromise the constructional safety of the pump and, if the pump is part of an ATEX system, may invalidate the system certification.

Maintenance

A301-51-880 Issue T

5.7 Overhaul the pump

The EH pump can only be overhauled by Edwards servic e engineers: contact your supplier or Edwards for advice .

Figure 23 - Lubricate the rear bearing (EH250, EH5 00 and EH500IND pumps only)

1. Pump-body

2. Bearing

3. Spacer

4. Shims

5. ‘O’ ring

6. End-cover

7. Socket-head screw

8. Cover-cap

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

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Page 15

Storage and Disposal

A301-51-880 Issue T

6 Storage and Disposal

6.1 Storage

CAUTION

Observe the storage temperature limits stated in Section2.1. Storage below -30ºC will permanently damage the EH pump seals and lubricants.

CAUTION

Ensure that the water lines are emptied if the pump w ill be stored below 0 °C. If you do not, the water in the lines will freeze and may cause the pipes to burs t. If the pump is to be shipped by air, the temperature in the hold can drop to -50 °C. In such cases it is import ant that the lines are completely emptied of water.

Use the procedure below to store the EH pump.

1. Shut-down the EH pump as described in

Section 4.3.

2. Isolate the EH pump from the electrical supp ly and disconnect it from the vacuum system.

3. Clean the EH pump and change the oil as des cribed in

Section 5.5.

4. Place protective covers over the inlet and ou tlet-flanges.

5. Store the EH pump in cool, dry conditions until required for use. When required, prepare and install the EH pump as described in Section 3.

6.2 Disposal

Dispose of the EH pump and any components safely in accordance with all local and national safety and environmental requirements.

Take particular care with components and waste oil w hich have been contaminated with dangerous process substances.

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

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Service and Spares

A301-51-880 Issue T

7 Service and Spares

7.1 Introduction

Edwards products and spares are available from Edwards companies in Belgium, Brazil, Canada, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, Switzerl and, United Kingdom, U.S.A, and a world-wide network of distributors. The majority of these centres employ Se rvice Engineers who have undergone comprehensive Edwa rds training courses.

Order spare parts from your nearest Edwards company or distributor. When you order, please state for each part required:

z Model and Item Number of your equipment

z Serial number (if any)

z Item Number and description of part.

7.2 Service

Edwards products are supported by a world-wide netwo rk of Edwards Service Centres. Each Service Centre offer s a wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory specifications. Equipment which has been serviced, repa ired or rebuilt is returned with a full warranty.

Your local Service Centre can also provide Edwards eng ineers to support on-site maintenance, service or repair of your equipment.

For more information about service options, contact y our nearest Service Centre or other Edwards company.

7.3 Spares

The spare parts listed in Table 22 are available for th e EH pump.

The spare parts listed in

Table 23 are available for the EH250 and EH500 pumps.

Table 22 - Spare item numbers

Spare Item Number

AR555 Fomblin grease (100 g tube) End-cover ‘O’ ring Ultragrade 20 oil (1 l) Ultragrade 20 oil (4 l) Krytox 1514 fluid (1 kg) Krytox 1514 fluid (5 kg)

H113-50-013 H021-22-091 H110-24-015 H110-24-013 H113-08-018 H113-08-020

Table 23 - EH250 and EH500 spare parts

Spare Item Number

Clean and overhaul kit Module kit Shim kit EH250 inlet mesh assembly 3.3 mm ISO63 EH250 inlet mesh assembly 3.5 mm ISO63 stainless steel EH500 inlet mesh assembly 3.3 mm ISO100 EH500 inlet mesh assembly 3.5 mm ISO100 stainless stee l

A301-51-815 A301-51-820 A301-51-825 C105-21-085 A600-41-029 C105-23-085 A600-41-569

A301-51-880 Issue T

Edwards and the Edwards logo are trademarks of Edwar ds Limited.

Service and Spares

The spare parts listed in Table 24 are available for the EH 1200 pumps.

The spare parts listed in

Table 25 are available for the EH1200 pumps.

Table 24 - EH1200 spare parts

Spare Item Number

Clean and overhaul kit Module kit Shim kit EH1200 inlet mesh assembly 3.3 mm ISO160 EH1200 inelt mesh assembly 3.5 mm ISO160 stainless st eel

A305-51-815 A305-51-820 A305-51-825 C105-24-085 A600-41-570

Table 25 - EH2600 and EH4200 spare parts

Spare Item Number

Clean and overhaul kit Module kit Shim kit EH2600 inlet mesh assembly 3.3 mm ISO160 EH2600 inelt mesh assembly 3.5 mm ISO160 stainless st eel EH4200 inlet mesh assembly 3.5 mm ISO250 stainless st eel

A307-51-815 A307-51-820 A307-51-825 C105-24-085 A600-41-570 A600-41-571