Ebara EGPC550, EGPC552 Instruction Manual
Pirani/Capacitance Gauge
EGPC550
EGPC552
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Instruction Manual
Product Identification
In all communications with EBARA, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
EBARA Technologies, Inc. USA
Model:
PN:
SN:
V W
Validity
This document applies to products with the following part numbers:
EGPC550 (W filament)
EGPC550-0000
EGPC550-0004
EGPC550-0104
EGPC550-0204
EGPC550-1000
EGPC550-1004
EGPC550-1104
EGPC550-1204
2
DN 16 ISO-KF, w/o display, mbar
DN 16 ISO-KF, with two switching functions
and display, mbar
DN 16 ISO-KF, with two switching functions
and display, Torr
DN 16 ISO-KF, with two switching functions
and display, Pa
DN 16 CF-F, w/o display, mbar
DN 16 CF-F, with two switching functions and
display, mbar
DN 16 CF-F, with two switching functions and
display, Torr
DN 16 CF-F, with two switching functions and
display, Pa
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EGPC552 (Ni filament)
EGPC552-0000
EGPC552-0004
EGPC552-0104
EGPC552-0204
EGPC552-1000
EGPC552-1004
EGPC552-1104
EGPC552-1204
DN 16 ISO-KF, w/o display, mbar
DN 16 ISO-KF, with two switching functions
and display, mbar
DN 16 ISO-KF, with two switching functions
and display, Torr
DN 16 ISO-KF, with two switching functions
and display, Pa
DN 16 CF-F, w/o display, mbar
DN 16 CF-F, with two switching functions and
display, mbar
DN 16 CF-F, with two switching functions and
display, Torr
DN 16 CF-F, with two switching functions and
display, Pa
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with part number
EGPC550-0004. They apply to gauges with other part numbers
by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The Pirani/Capacitance Gauge EGPC55x has been designed for
vacuum measurement of gases in the pressure range of
-5
5×10
… 1500 mbar.
It must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
The gauge is intended for operation in connection with an
EBARA Vacuum Gauge Controller (e.g. EGC) or with another
suitable controller.
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Functional Principle
The EGPC gauge is a combination gauge consisting of a Pirani
sensor and a diaphragm capacitive sensor. Both sensors are
constantly active.
At low pressures, only the signal of the Pirani sensor is used for
pressure measurement; at high pressures, only the signal of the
diaphragm capacitive sensor. To determine the output signal in
the intermediate range, both signals are used proportionally to
the pressure.
Patents
EP 0689669 B1, 0689670 B1, 0658755 B1
US Patents 5608168, 4031997, 5583297
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Instruction Manual
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Contents
Product Identification 2
Validity 2
Intended Use 3
Functional Principle 4
Patents 4
Scope of Delivery 4
1 Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2 Technical Data 8
2.1 Output Signal vs. Pressure 12
2.2 Gas Type Dependence 13
3 Installation 14
3.1 Vacuum Connection 14
3.2 Power Connection 17
4 Operation 19
4.1 Status Indication and Display 19
4.2 Gas Type Dependence 23
4.3 Switching Functions 24
5 Deinstallation 26
6 Maintenance, Repair 28
6.1 Adjusting the Gauge 28
6.2 Replacing the Sensor 30
6.3 Troubleshooting 31
7 Returning the Product 32
8 Disposal 33
9 Spare Parts 34
Further Information 35
For cross-references within this document, the symbol ( XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol ( [Z]).
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
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1.3 General Safety Instructions
Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
EBARA assumes no liability and the warranty becomes null and
void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.)
on the product
use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. seals, filament), are not covered by the
warranty.
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2 Technical Data
Measurement range 5×10-5 … 1500 mbar
Measurement principle
10 mbar … 1500 mbar
1 … 10 mbar crossover range
-5
… 1 mbar thermal conductance acc. to
5×10
Accuracy (N
5×10
1×10
)
2
-4
… 1×10-3 mbar
-3
… 100 mbar
100 … 950 mbar
950 … 1050 mbar
Repeatability (N
1×10
)
2
-3
… 1100 mbar
Output signal (measurement signal)
Voltage range 0 … +10.23 V
Measurement range +0.61 … +10.23 V
Error signal 0 V (default)
Voltage vs. pressure 1.286 V/decade, logarithmic
Output impedance
Load impedance
Response time
Gauge identification
HV adjustment
ATM adjustment at >100 mbar
diaphragm capacitive
sensor
Pirani
50% of reading
15% of reading
5% of reading
2.5% of reading
2% of reading
2 × 4.7 , short circuit-proof
>10 k
<30 ms
71.5 k
at 10
-5
mbar
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Switching functions SP1, SP2
Setting range (N
) 5.0×10-5 … 1500 mbar
2
Hysteresis 10% of threshold
Switching characteristics Low Trip Point
Type 1 floating contact (n.o.) per
switching function
Contact rating <30 VAC/DC, ≤1 A
resistive
closed LED lit solid
open LED off
Switching time <30 ms
Supply
DANGER
The gauge may only be connected to power supplies, instruments, or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV). The connection to the gauge
has to be fused.
1)
Supply voltage at the gauge +15 … +30 VDC
Ripple ≤1 V
Power consumption ≤2.5 W
Fuse to be connected
1)
1 AT
pp
Electrical connection FCC68
Sensor cable shielded
0.14 mm
2
/conductor
Cable length ≤100 m
1)
EBARA controllers fulfill this requirement.
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Grounding concept
Vacuum connection to
signal common
"Power Connection"
connected via 10 k, 10 nF
Materials exposed to vacuum
Vacuum connection
Filament
EGPC550
EGPC552
Feedthrough
Orifice
Diaphragm
Further materials
stainless steel 1.4435
W
Ni
glass
stainless steel
ceramic
Ni, NiFe, stainless steel
1.4301, SnAg
Internal volume 4.7 cm
3
Permissible pressure (absolute) ≤5 bar
Bursting pressure (absolute) 10 bar
Permissible temperatures
Operation
Vacuum connection
Filament
Storage
Relative humidity
Year's mean
During 60 days
2)
+10 °C … +50 °C
≤80 °C
<160 °C
–20 °C … +65 °C
≤65% (no condensation)
≤85% (no condensation)
Mounting orientation any
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
Weight 115 g …130 g
2)
For horizontal mounting orientation only. During bakeout,
measurement range, accuracy, and repeatability may deviate from
specifications.
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Dimensions [mm]
65
50
45
ST
SP1SP2
ADJ
14.5
DN 16 ISO-KF
79.5
14
DN 16 CF-R
28
DIA
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