Ebara EGPC550, EGPC552 Instruction Manual

Pirani/Capacitance Gauge

EGPC550
EGPC552

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Instruction Manual

Product Identification

In all communications with EBARA, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

EBARA Technologies, Inc. USA

Model:
PN:
SN:
V W

Validity

This document applies to products with the following part num­bers:

EGPC550 (W filament)

EGPC550-0000
EGPC550-0004

EGPC550-0104

EGPC550-0204

EGPC550-1000
EGPC550-1004

EGPC550-1104

EGPC550-1204

2

DN 16 ISO-KF, w/o display, mbar

DN 16 ISO-KF, with two switching functions
and display, mbar

DN 16 ISO-KF, with two switching functions
and display, Torr

DN 16 ISO-KF, with two switching functions
and display, Pa

DN 16 CF-F, w/o display, mbar

DN 16 CF-F, with two switching functions and
display, mbar

DN 16 CF-F, with two switching functions and
display, Torr

DN 16 CF-F, with two switching functions and
display, Pa

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EGPC552 (Ni filament)

EGPC552-0000
EGPC552-0004

EGPC552-0104

EGPC552-0204

EGPC552-1000
EGPC552-1004

EGPC552-1104

EGPC552-1204

DN 16 ISO-KF, w/o display, mbar

DN 16 ISO-KF, with two switching functions
and display, mbar

DN 16 ISO-KF, with two switching functions
and display, Torr

DN 16 ISO-KF, with two switching functions
and display, Pa

DN 16 CF-F, w/o display, mbar

DN 16 CF-F, with two switching functions and
display, mbar

DN 16 CF-F, with two switching functions and
display, Torr

DN 16 CF-F, with two switching functions and
display, Pa

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with part number
EGPC550-0004. They apply to gauges with other part numbers
by analogy.

We reserve the right to make technical changes without prior
notice.

All dimensions in mm.

Intended Use

The Pirani/Capacitance Gauge EGPC55x has been designed for
vacuum measurement of gases in the pressure range of

-5

5×10

… 1500 mbar.

It must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.

The gauge is intended for operation in connection with an
EBARA Vacuum Gauge Controller (e.g. EGC) or with another
suitable controller.

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Functional Principle

The EGPC gauge is a combination gauge consisting of a Pirani
sensor and a diaphragm capacitive sensor. Both sensors are
constantly active.

At low pressures, only the signal of the Pirani sensor is used for
pressure measurement; at high pressures, only the signal of the
diaphragm capacitive sensor. To determine the output signal in
the intermediate range, both signals are used proportionally to
the pressure.

Patents

EP 0689669 B1, 0689670 B1, 0658755 B1
US Patents 5608168, 4031997, 5583297

Scope of Delivery

1× gauge
1× pin for adjusting settings via buttons
1× Instruction Manual

4

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Contents

Product Identification 2
Validity 2
Intended Use 3
Functional Principle 4
Patents 4
Scope of Delivery 4

1 Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8

2.1 Output Signal vs. Pressure 12

2.2 Gas Type Dependence 13

3 Installation 14

3.1 Vacuum Connection 14

3.2 Power Connection 17

4 Operation 19

4.1 Status Indication and Display 19

4.2 Gas Type Dependence 23

4.3 Switching Functions 24

5 Deinstallation 26
6 Maintenance, Repair 28

6.1 Adjusting the Gauge 28

6.2 Replacing the Sensor 30

6.3 Troubleshooting 31

7 Returning the Product 32
8 Disposal 33
9 Spare Parts 34

Further Information 35

For cross-references within this document, the symbol (  XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

6

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1.3 General Safety Instructions

 Adhere to the applicable regulations and take the necessary

precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

 Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the
safety instructions in this document.

 Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

EBARA assumes no liability and the warranty becomes null and
void if the end-user or third parties

 disregard the information in this document

 use the product in a non-conforming manner

 make any kind of interventions (modifications, alterations etc.)

on the product

 use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. seals, filament), are not covered by the
warranty.

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2 Technical Data

Measurement range 5×10-5 … 1500 mbar
Measurement principle

10 mbar … 1500 mbar

1 … 10 mbar crossover range

-5

… 1 mbar thermal conductance acc. to

5×10

Accuracy (N

5×10

1×10

)

2

-4

… 1×10-3 mbar

-3

… 100 mbar

100 … 950 mbar

950 … 1050 mbar

Repeatability (N

1×10

)

2

-3

… 1100 mbar

Output signal (measurement signal)

Voltage range 0 … +10.23 V
Measurement range +0.61 … +10.23 V
Error signal 0 V (default)

Voltage vs. pressure 1.286 V/decade, logarithmic

Output impedance

Load impedance

Response time

Gauge identification

HV adjustment

ATM adjustment at >100 mbar

diaphragm capacitive
sensor

Pirani

50% of reading

15% of reading

5% of reading

2.5% of reading

2% of reading

2 × 4.7 , short circuit-proof

>10 k
<30 ms

71.5 k

at 10

-5

mbar

8

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Switching functions SP1, SP2

Setting range (N

) 5.0×10-5 … 1500 mbar

2

Hysteresis 10% of threshold
Switching characteristics Low Trip Point
Type 1 floating contact (n.o.) per

switching function

Contact rating <30 VAC/DC, ≤1 A

resistive
closed LED lit solid
open LED off

Switching time <30 ms

Supply

DANGER

The gauge may only be connected to power sup­plies, instruments, or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV). The connection to the gauge
has to be fused.

1)

Supply voltage at the gauge +15 … +30 VDC

Ripple ≤1 V

Power consumption ≤2.5 W
Fuse to be connected

1)

1 AT

pp

Electrical connection FCC68
Sensor cable shielded

0.14 mm

2

/conductor

Cable length ≤100 m

1)

EBARA controllers fulfill this requirement.

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Grounding concept

Vacuum connection to
signal common

 "Power Connection"

connected via 10 k, 10 nF

Materials exposed to vacuum

Vacuum connection
Filament
EGPC550
EGPC552
Feedthrough
Orifice
Diaphragm
Further materials

stainless steel 1.4435

W

Ni

glass

stainless steel

ceramic

Ni, NiFe, stainless steel

1.4301, SnAg

Internal volume 4.7 cm

3

Permissible pressure (absolute) ≤5 bar
Bursting pressure (absolute) 10 bar

Permissible temperatures

Operation
Vacuum connection
Filament
Storage

Relative humidity

Year's mean
During 60 days

2)

+10 °C … +50 °C

≤80 °C

<160 °C

–20 °C … +65 °C

≤65% (no condensation)

≤85% (no condensation)

Mounting orientation any
Use indoors only, altitude up to

2000 m NN

Degree of protection IP 40

Weight 115 g …130 g

2)

For horizontal mounting orientation only. During bakeout,

measurement range, accuracy, and repeatability may deviate from
specifications.

10

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Dimensions [mm]

65

50

45

ST

SP1SP2

ADJ

14.5
DN 16 ISO-KF

79.5

14

DN 16 CF-R

28

DIA

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2.1 Output Signal vs. Pressure

Pressure p

1E+06

1E+05

1E+04

1E+03

1E+02

1E+01

Error

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

0.5

0.0

p = 10

Underrange

3.02.52.01.51.0

0.61

0.778(U-c)

4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5

Output signal U [V]



U = c +1.286log10 p

valid in the range 5×10-5 mbar <p< 1500 mbar

U p c U p c

[V] [mbar] 6.143 [V] [micron] 2.448

[V] [µbar] 2.287 [V] [Pa] 3.572

[V] [Torr] 6.304 [V] [kPa] 7.429

[V] [mTorr] 2.448

where p pressure

U output signal
c constant (pressure unit dependent)

Pa

mbar

Torr

Overrange

O

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2.2 Gas Type Dependence

Indicated pressure (gauge calibrated for air)

p [mbar]

4

2

3

10

8
6

4

2

2

10

8
6

4

2

1

10

8
6

4

2

0

10

8
6

4

2

–1

10

8
6

4

2

–2

10

8
6

4

2

–3

10

8
6

4

2

–4

10

–4

–3

246

10

246

10

Calibration factors

valid for Pirani pressure range below 1 mbar

p

= C × indicated pressure

Gas type Calibration

He
Ne

Ar
Kr

Xe

eff

factor C

0.8

1.4

1.7

2.4

3.0

Pirani

sensor

–2

–1

246246

10

10

Gas type Calibration

H

Crossover

range

0

246

10

10

2

air, O2, CO, N

CO2

water vapor

Freon 12

Capacitive

diaphragm

sensor

Air, O2, CO, N

He

Ar

1

246

10

2

2

2

246

factor C

p

0.5

1.0

0.9

0.5

0.7

10

[mbar]

eff

3

2

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3 Installation

WARNING

WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and

3.1 Vacuum Connection

impacts.

DANGER

DANGER: overpressure in the vacuum system
>1 bar

Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.

14

DANGER: overpressure in the vacuum system
>2.5 bar

KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.

Use O-rings provided with an outer centering ring.

DANGER

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DANGER: protective ground
Products that are not correctly connected to ground

can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded

vacuum chamber. This connection must conform to
the requirements of a protective connection ac­cording to EN 61010:

 CF flanges fulfill this requirement.

 For gauges with a KF flange, use a conductive

metallic clamping ring.

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean

tools when working in this area.

DANGER

Caution

Caution

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Mount the gauge so that no vibrations occur. The gauge

may be mounted in any orientation. To keep conden­sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi­tion and consider using a seal with centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the but­tons can be accessed with a pin.

Remove the protective lid and connect the product to the
vacuum system.

Seal with centering ring

16

Clamp

Keep the protective lid.

or

Protective lid

Seal with centering
ring and filter

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3.2 Power Connection

Make sure the vacuum connection is properly made

(  14).

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (SELV). The connection to the gauge
has to be fused.

3)

Ground loops, differences of potential, or EMC problems

may affect the measurement signal. For optimum signal
quality, please do observe the following notes:

 Connect the cable shield to ground on one side via

the connector housing. Do not connect the other side
of the shield.

 Connect the supply common with protective ground

directly at the power supply.

 Use differential measurement input (signal common

and supply common conducted separately).

 Potential difference between supply common and

housing ≤18 V (overvoltage protection).

3)

EBARA controllers fulfill these requirements.

trna56e1 (2012-07) 17

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.

Ident

+
–

Measurement

signal

Supply

4.7

4.7

SP2

SP1

4
6
8
7
3
5

+24V

18V

10k

10nF

Electrical connection
Pin 1 Supply

Pin 2 Supply common, GND
Pin 3 Measurement signal
or threshold SP1, SP2
Pin 4 Gauge identification
Pin 5 Signal common
Pin 6, 8 Relay SP2
Common closing contact (com)
Pin 7, 8 Relay SP1
Common closing contact (com)

18

1
2

1

8

8-pin

FCC68

connector

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+
–

4 Operation

When the supply voltage is applied, the measurement signal is
available at the connector ( "Power Connection").

Allow a stabilization period of at least 10 minutes. It is advisable
to operate the gauge continuously, irrespective of the pressure.

The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary (adjusting the gauge   28).

4.1 Status Indication and Display

Light-emitting diodes (LEDs)

For factory setting only

ST

DIA

SP1SP2

LED State Meaning

<ST> off no supply voltage

lit green measurement mode

lit red error
<SP1> lit green Relay SP 1 closed
off Relay SP 1 open
<SP2> lit green Relay SP 2 closed

off Relay SP 2 open

Status

ADJ

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Liquid crystal display (LCD)

LCD Meaning

off no supply voltage
lit green measurement / parameter mode
lit red error

Put the gauge into operation

When the supply voltage is applied
the software version is briefly
displayed.

20

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Measurement mode

Relay 2

Status of Relay 2

Relay 1

Status of Relay 1

Measurement

principle

Output signal

Setpoint

open
closed

Setpoint

open
closed

Pirani

Capacitive

Crossover range

Unit

Millibar

Torr

Pascal

Micron

(no display)

Counts

Underrange

Overrange

(no display)

trna56e1 (2012-07) 21

Within range

Parameter mode

Switching functions <S>

When the <SP1> or <SP2> button is
pushed, the corresponding
threshold is displayed and the
corresponding relay flashes.

Threshold

Error display (trouble shooting   31)

Pirani sensor error

22

Diaphragm sensor error

EEPROM error

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Sensor error

4.2 Gas Type Dependence

Pressure range Measurement

Gas type dependence

principle

10 … 1500 mbar

diaphragm
capacitive sensor

independent of gas
type, no correction
required

1 … 10 mbar

5×10-5 … 1 mbar Pirani sensor proportional to

diaphragm
capacitive sensor
and Pirani sensor

crossover range

)

4

pressure

4)

The pressure reading applies to dry air, O2, CO and N2. For other

gases, it has to be converted (calibration factors (  13).

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4.3 Switching Functions

The two switching functions can be set to any pressure within
the measurement range of the gauge. A mechanical relay is
provided for each switching function.

The current threshold setting is output at the measurement
signal output instead of the pressure signal, can be measured
with a voltmeter, and is displayed on the LCD after the <SP1> or
<SP2> button is pressed

The setpoints SP1 and SP2 are factory set to the lower meas­urement range limit and therefore do not switch.

Measurement signal
(Pressure p)

n

e

m

e

r

u

s

a

e

M

Setpoint

Hysteresis
(10% of threshold)

Threshold value

e

u

l

a

v

t

Time t

Off

OffOn

If the pressure in the vacuum system is lower than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and the
corresponding relay is closed.

The upper threshold is 10% above the lower one

(hysteresis).

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4.3.1 Adjusting the Setpoints

DANGER

DANGER: malfunction
If processes are controlled via the signal output,

keep in mind that by pushing an <SP> button the
measurement signal is suppressed and the cor­responding threshold value is output instead. This
can cause malfunctions.

Push the <SP> button only if you are sure that no
damages can arise from a malfunction.

Adjusting setpoint SP1 with button on the gauge

 Push the <SP1> button with a pin (max. ø1.1 mm). The

gauge changes to the switching function mode and outputs
the current threshold value at the measurement value out­put or on the LCD for about 5 s and the corresponding <S>
on the display blinks.

The threshold setting is increased towards the upper limit
until the button is released or the limit is reached.

Keep the button
depressed

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 Push the <SP1> button again:

Fine adjustment
within 0...1 s:

Change of direction
within 2...3 s:

the threshold value changes by one
unit

the threshold adjustment changes
its direction

 The <SP1> button is released for more than 5 s: the

threshold value is saved and the gauge returns to the
measurement mode.

The adjustment procedure for <SP2> is the same as for setpoint
SP1.

5 Deinstallation

WARNING

WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and

impacts.

26

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

DANGER

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Caution

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean

tools when working in this area.

 Vent the vacuum system.
 Put the gauge out of operation.
 Disconnect the sensor cable.
 Remove gauge from the vacuum system and install the

protective lid.

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Protective lid

6 Maintenance, Repair

Gauge failures due to contamination or wear and tear,

as well as expendable parts (e.g. seals, filament), are
not covered by the warranty.

EBARA assumes no liability and the warranty becomes null and
void if any repair work is carried out by the end-user or third
parties.

6.1 Adjusting the Gauge

The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary.

For adjusting the zero, operate the gauge under the same con­stant ambient conditions and in the same mounting orientation
as normally.

The gauge is adjusted to default values. However, it can also be
adjusted to other pressure values, if the exact pressure value is
known (reference measurement).

28

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 If you are using a seal with centering ring and filter, check

that they are clean or replace them if necessary
( "Deinstallation").

 Put the gauge into operation and operate it at atmospheric

pressure for at least 10 minutes.

 Press the <ADJ> button with a pin (max. ø1.1 mm) and the

ATM adjustment is carried out: The gauge is adjusted to
1000 mbar by default. By pressing the button >5 s the
pressure value is increased towards 1200 mbar (or, by
pressing it again, decreased towards 500 mbar) until the
button is released or the limit is reached.

ATM

HV

 Evacuate the vacuum system to p << 10

least 2 minutes.

-5

mbar and wait at

 Press the <ADJ> button with a pin and the HV adjustment

is carried out: The gauge is adjusted to 5×10
(default).

If the pressure value 4.99×10-5 mbar is output at the meas-

urement value output or on the LCD, the adjustment has
been successful. Otherwise, repeat the adjustment pro­cedure.

trna56e1 (2012-07) 29

-5

mbar

6.2 Replacing the Sensor

In case of severe contamination or a malfunction, the sensor can
be replaced.

Precondition

Gauge deinstalled (  26).

 Unscrew the hexagon socket screws and remove the sen-

sor without twisting it.

2 mm

 Place the new sensor without twisting it and lock it with the

screws.

30

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6.3 Troubleshooting

In case of an error, it may be helpful to just turn off the

mains supply and turn it on again after 5 s.

Problem Possible cause Correction

Output signal per­manently 0V

No supply voltage Turn on the power supply

Error Remedy the error

Gauge in an undefined status Turn the gauge off and on

FAIL PIR1 Pirani sensor defective Replace the sensor

Electronics unit not correctly

FAIL CAP1 Diaphragm sensor defective Replace the sensor

Electronics unit not mounted

FAIL EEPROM EEPROM error Turn the gauge off and on

Replace the gauge

FAIL SENSOR Electronics unit not compatible

Replace the gauge

Sensor cable defective or not
correctly connected

mounted on sensor

correctly on sensor

with the sensor

Check the sensor cable

again after 5 s (reset)

(  30)

Check the connections
(electronics – sensor)

(  30)

Check the connections
(electronics – sensor)

again after 5 s (reset)

Replace the sensor
(  30)

trna56e1 (2012-07) 31

7 Returning the Product

WARNING

WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,

caustic or microbiological hazard) can be detrimen­tal to health and environment.

Products returned to EBARA should preferably be
free of harmful substances. Adhere to the forward­ing regulations of all involved countries and for­warding companies and enclose a duly completed
declaration of contamination (form under

Products that are not clearly declared as "free of harmful sub­stances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.

www.ebaratech.com).

32

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8 Disposal

DANGER

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions

Separating the components

After disassembling the product, separate its components ac­cording to the following criteria:

 Contaminated components

 Other components

when handling contaminated parts.

WARNING

WARNING: substances detrimental to the environ­ment

Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimen­tal to the environment.

Dispose of such substances in accordance with the
relevant local regulations.

Contaminated components (radioactive, toxic, caustic or bio­logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.

Such components must be separated according to their ma­terials and recycled.

trna56e1 (2012-07) 33

9 Spare Parts

When ordering spare parts, always indicate:

 all information on the product nameplate

 description and ordering number

Sensor for gauges with tungsten (W) filament Ordering No.

EGPC550-0000

EGPC550-0004

EGPC550-0104

EGPC550-0204

EGPC550-1000

EGPC550

EGPC550-1004

EGPC550-1104

EGPC550-1204

Sensor for gauges with nickel (Ni) filament Ordering No.

EGPC552-0000

EGPC552-0004

EGPC552-0104

EGPC552-0204

EGPC552-1000

EGPC552

EGPC552-1004

EGPC552-1104

EGPC552-1204

DN 16 ISO-KF

DN 16 CF-F

DN 16 ISO-KF

DN 16 CF-F

EGPC550-P001

EGPC550-P002

EGPC552-P001

EGPC552-P002

34

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Further Information

 [1] www.ebaratech.com

Instruction Manual
Single-Channel Controller
EGC-1000
EBARA Technologies, Sacramento, CA 95838, USA

 [2] www.ebaratech.com

Instruction Manual
Three-Channel Controller
EGC-3000
trnb07e1
EBARA Technologies, Sacramento, CA 95838, USA

trna56e1 (2012-07) 35

EBARA Technologies Incorporated

51 Main Avenue Sacramento, CA 95838, US A

Phone: [phone] − Fax: [phone]

www.ebaratech.com

Original: English trna56e1 (2012-07)

t r na56e1