Despatch C-229 Installation Manual

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UltraFlex™ Drying & Firing Furnace

OWNER’S MANUAL

C-229 VERSION 3

12/2010

PREFACE UltraFlex Drying and Firing Furnace Owner’s Manual

Revision

Date

Author

Description

1.0

11/2/2009

K. Livingston

Initial Release

1.1

5/24/2010

K. Livingston

Pre-Release Revisions

2.0

5/26/2010

K. Livingston

Revisions

3.0

12/6/2010

K. Livingston

Revisions

ii Version 3

Revision History

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries, unless for pu rchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREFACE Version 3 iii

Table of Contents

1. Abo ut This Manua l .............................................................................................. 9

1.1. Important User Information ........................................................................ 9

1.2. Manufacturer ............................................................................................ 10

1.3. Organization of this M anual ..................................................................... 10

1.4. Conventions Used in this Manual ............................................................. 10

1.5. Acronym Identifier ................................................................................... 11

2. Safety ................................................................................................................ 12

2.1. Safety I nforma tio n ................................................................................... 12

2.1.1. Lockout ................................................................................................ 12

2.1.1.1. Lockout Requirements ...................................................................... 12

2.1.1.2. Lockout Pro cedu r e ............................................................................ 12

2.1.2. Doors and Covers ................................................................................. 13

2.2. Maintenance ............................................................................................. 13

2.3. Electrical Power ....................................................................................... 13

2.4. Fire .......................................................................................................... 14

2.5. Equipment Lockout Requirements............................................................ 14

2.5.1. Emergency Sto p ................................................................................... 14

3. Theory of Operation........................................................................................... 16

3.1. UltraFlex Drying and Firing Furnace Machine States ............................... 17

3.1.1. Pow e r O ff ............................................................................................. 18

3.1.2. Initialization Mode ............................................................................... 18

3.1.3. Idle Mode ............................................................................................. 18

3.1.4. Loading Recipe Mode ........................................................................... 18

3.1.5. Stabilizat ion Mode ................................................................................ 19

3.1.6. Production Mode .................................................................................. 19

3.1.7. Cooldown Mode ................................................................................... 19

3.1.7.1. Quick Cooldown Mode ..................................................................... 19

3.1.8. Mainte nance Mod e ............................................................................... 20

3.2. Optimiz e d Recipes and Th erma l Profiling ................................................ 20

3.2.1. Thermal Profiling Pr ocess ..................................................................... 20

3.3. UltraFlex Dr yer ........................................................................................ 21

3.3.1. Overview .............................................................................................. 21

3.3.2. Transport System .................................................................................. 22

3.3.3. Heating System..................................................................................... 22

3.3.4. Process Ga s Syste m .............................................................................. 23

3.3.5. Oxidizer Airflow S ett ings ..................................................................... 24

3.4. Wafer Throughput .................................................................................... 24

3.5. VOC Ther mal Oxidize r ............................................................................ 25

3.6. Cha mber Lift Mecha n ism ......................................................................... 25

4. Software & Hardwar e S etu p .............................................................................. 27

4.1. Operation Overview ................................................................................. 27

4.2. Managing Use r s ....................................................................................... 29

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any

means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries, unless for pu rchaser's personal use.

PREFACE UltraFlex Drying and Firing Furnace Owner’s Manual iv Version 3

4.2.1. Security Levels ..................................................................................... 29

4.2.2. Adding a User or Changing User Privileges .......................................... 30

4.3. Recipe Setup and Optimization ................................................................ 31

4.3.1. UltraFlex Furnace Set po int Ranges ....................................................... 31

4.3.2. Optimize Recipe Pro cess w ith Example ................................................ 33

4.4. Dryer/Firing Fur nace Airf low Setup ......................................................... 37

4.4.1. Dryer Airflow Setup ............................................................................. 37

5. Operation ........................................................................................................... 39

5.1. Routine Operat ion .................................................................................... 39

5.1.1. Overview .............................................................................................. 40

5.1.1.1. Using the Ultr aFle x Fur nace T ouch Screen Interface ......................... 40

5.1.1.2. Using On-Screen Controls ................................................................. 41

5.1.1.3. Process Overview .............................................................................. 41

5.1.1.4. Furnace Status ................................................................................... 42

5.1.1.5. Navigation Bar .................................................................................. 44

5.1.1.6. UltraFlex Drying and Firing Furnace Modes ..................................... 44

5.1.2. Navigating the Home Scree n ................................................................ 45

5.1.3. Trending Screen ................................................................................... 46

5.1.4. Recipe Screen ....................................................................................... 48

5.1.5. Alarm Screen ........................................................................................ 49

5.1.6. Setup Screen ......................................................................................... 51

5.1.7. Maintenance Screen .............................................................................. 51

5.2. Startup and Run the UltraFlex Drying and Firing Furnace ........................ 53

5.2.1. Starting from Idle Mo de ........................................................................ 54

5.2.2. Stopping from Production Mode ........................................................... 55

5.2.3. Entering Maintenance Mode from Idle Mode ........................................ 56

5.2.4. Entering Maintenance Mode from Production or Cooldown Mode ........ 56

5.3. Wor king with Trending ............................................................................ 56

5.3.1. Wor king with H ourly Perfo rmance ....................................................... 57

5.3.2. Conveyor .............................................................................................. 57

5.3.3. Heat ...................................................................................................... 58

5.3.4. Airflow ................................................................................................. 59

5.3.5. Cooling ................................................................................................. 60

5.3.6. Data ...................................................................................................... 61

5.3.7. E10 St at istics ........................................................................................ 63

5.3.7.1. E10 States ......................................................................................... 63

5.3.7.2. Operator Initiat ed St at es .................................................................... 64

5.4. Wor king with R ecip es .............................................................................. 64

5.4.1. Enter a New Recipe .............................................................................. 65

5.4.2. Wor king with Existing Recip e s ............................................................. 65

5.4.2.1. Load Existing Recipe ........................................................................ 65

5.4.2.2. I mport a Recipe ................................................................................. 66

5.4.2.3. Change a Recipe Value ..................................................................... 66

5.4.2.4. Export a Recipe ................................................................................. 67

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means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREFACE Version 3 v

5.4.2.5. Edit a Recipe on a PC ........................................................................ 68

5.4.2.6. Save a Recipe .................................................................................... 69

5.4.2.7. Delete a Recipe ................................................................................. 69

5.4.3. Recipes and the PLC ............................................................................. 69

5.4.4. Help with Recip es ................................................................................. 69

5.5. Working with Alar ms ............................................................................... 70

5.5.1. Acknowledge Alarms ........................................................................... 70

5.5.2. Info ....................................................................................................... 71

5.5.3. Events................................................................................................... 71

5.5.4. Alarm History ....................................................................................... 71

5.5.5. Audit History ........................................................................................ 72

5.6. Wor king with Set up ................................................................................. 72

5.6.1. User Administ ration ............................................................................. 73

5.6.1.1. Export and Import ............................................................................. 73

5.6.1.2. Help .................................................................................................. 74

5.6.2. Tool Calibra tio n ................................................................................... 74

5.6.2.1. Import and Export ............................................................................. 75

5.6.3. Creating an UltraFlex Fur nace Screen Shot ........................................... 75

5.7. Wor king with M aint ena nce Mode ............................................................ 76

5.7.1.1. Cha mber Lift ..................................................................................... 76

5.7.1.2. Display ............................................................................................. 77

5.7.1.3. Status ................................................................................................ 77

5.7.1.4. Exit ................................................................................................... 78

6. Preventive M aintenance ..................................................................................... 79

6.1. Control Systems Maintenanc e .................................................................. 81

6.1.1. Touch Screen Maintena nce a nd Calibration .......................................... 81

6.1.2. Panels ................................................................................................... 81

6.1.3. Chamber Seals ...................................................................................... 81

6.2. Conveyor Systems Maintenance ............................................................... 81

6.2.1. Bearings ............................................................................................... 81

6.2.2. Dr ive R olle r .......................................................................................... 81

6.2.3. Encoder ................................................................................................ 82

6.2.3.1. Inspect & Clean ................................................................................ 82

6.2.4. Conveyor .............................................................................................. 82

6.2.4.1. Inspect .............................................................................................. 82

6.2.4.2. Clean ................................................................................................ 83

6.2.5. Motors .................................................................................................. 83

6.2.6. Conveyor Guides .................................................................................. 83

6.2.7. Quartz Rods .......................................................................................... 83

6.2.7.1. Inspect .............................................................................................. 83

6.2.7.2. Clean ................................................................................................ 83

6.2.8. Conveyor Take-up ................................................................................ 84

6.2.9. Process Plumbing Assembly ................................................................. 84

6.3. Chamber Systems ..................................................................................... 85

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means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

PREFACE UltraFlex Drying and Firing Furnace Owner’s Manual vi Version 3

6.3.1. Heater Lamps ....................................................................................... 85

6.3.1.1. Inspect .............................................................................................. 85

6.3.1.2. Replace ............................................................................................. 85

6.3.2. Thermocouples ..................................................................................... 86

6.3.3. Insulation .............................................................................................. 87

6.3.4. Dryer Casing ........................................................................................ 88

6.3.5. Protective Glass Layer .......................................................................... 88

6.4. Cooling/ V entilation Syst ems .................................................................... 88

6.4.1. Coils ..................................................................................................... 88

6.5. Exha ust Syst ems ...................................................................................... 88

6.5.1. Duct Hoses (3” & 4”) ........................................................................... 88

6.5.2. Exhaust Venturi Port............................................................................. 88

6.5.3. Exhaust Flow Restrictor Plate ............................................................... 89

6.5.4. Water Filter .......................................................................................... 91

6.5.5. VOC ..................................................................................................... 91

6.6. Lift Systems ............................................................................................. 91

6.6.1. Inspect .................................................................................................. 92

6.6.2. Clean & Maintain ................................................................................. 92

6.6.3. Chamber Lift Troubleshooting .............................................................. 93

6.6.3.1. Chamber Does Not Lift ..................................................................... 93

6.6.3.2. Chamber Lifts But Does Not Close or Does Not Close Completely ... 93

6.7. Insulation B urn-off ................................................................................... 94

6.7.1. Procedure for I nsulat ion Burnoff .......................................................... 95

6.7.2. Recommendations for Reducing Paste Cont aminatio n .......................... 96

7. Appendices ........................................................................................................ 97

7.1. Using UltraFlex Furn ace Data Files: Data & Diagnostic Logs .................. 97

7.2. UltraFlex Furnace Alarms ........................................................................ 97

7.3. Ultrasonic Belt Cleaner ............................................................................ 98

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREFACE Version 3 vii

Figures

Figure 1. UltraFlex Fur nace E mergenc y Stop Locations. ............................................... 15

Figure 2. UltraFlex Infrared Firing and Drying Furnace in Manufacturing Line. ............ 16

Figure 3. UltraFlex Fur nace Machine States. ................................................................. 17

Figure 4. The UltraFlex Dr yer Transpo r ts Wafers through Multiple Chambers. ............. 22

Figure 5. Set Four Dryer Pro cess Air MFCs Using the Recipe Screen. ........................... 23

Figure 6. Despat ch VOC Ther mal Oxidizer Oper at io n. .................................................. 25

Figure 7. Typical Home Screen (UltraFlex). .................................................................. 27

Figure 8. UltraFlex Drying and Firing Furnace Software Navigation. ............................ 28

Figure 9. Press Setu p and then Users to Add o r Change User Information. .................... 30

Figure 10. Enter or Change User In formation with the Setup/User Administ r ation Screen.

...................................................................................................................................... 30

Figure 11. Typical Firing Zone Setpoints vs. Actual Temperatures. ............................... 32

Figure 12. Adjusting Value on Detail Bo x. .................................................................... 36

Figure 13. UltraFlex Fur nace Home Screen. .................................................................. 39

Figure 14. Use On-Screen Keypad or Keyboard to Enter D ata. ...................................... 40

Figure 15. Using On-Screen Co ntrols. ........................................................................... 41

Figure 16. UltraFlex Fur nace Home Screen—Process Overv iew. .................................. 42

Figure 17. UltraFlex Fur nace Home Screen—Furnace Status. ....................................... 43

Figure 18. Typical Deta il Scree n for Furnace Temperature Zone 1. ............................... 43

Figure 19. UltraFlex Fur nace Home Screen—Navigation Bar. ....................................... 44

Figure 20. Trending Screen. .......................................................................................... 46

Figure 21. Histor y Trending/Furnace Zone 1 Screen. ..................................................... 47

Figure 22. Recipes Scree n and Pop-up Screen for Parameters Descr ipt ions. .................. 48

Figure 23. Alarms Screen and Close-up of Unacknowledged Alarms............................. 49

Figure 24. Alarm Histor y Scree n. .................................................................................. 50

Figure 25. System Event Alar m Screen. ........................................................................ 50

Figure 26. Setup Screen. ................................................................................................ 51

Figure 27. Maintenance Screen with Close-up. .............................................................. 52

Figure 28. Confirm LEL Settings Dialogue Window. .................................................... 53

Figure 29. Start Production Mode from Idle Mode. ........................................................ 54

Figure 30. LEL Dialogue Window. ................................................................................ 54

Figure 31. Stabilization Mode. ....................................................................................... 54

Figure 32. Tool in Production Mode. ............................................................................. 55

Figure 33. Trending Main Screen. ................................................................................. 56

Figure 34. Conveyor Trending Screen. .......................................................................... 57

Figure 35. Heat Trending Screen. .................................................................................. 58

Figure 36. Airflow Trending Screen. ............................................................................. 59

Figure 37. Cooling Trending Screen. ............................................................................. 60

Figure 38. Data Logging Screen. ................................................................................... 62

Figure 39. Front and Rear USB Ports. ............................................................................ 62

Figure 40. E10 Statistics Screen. ................................................................................... 63

Figure 41. Operato r Selects Equipment State. ................................................................ 64

Figure 42. Work with Exist ing or N ew Recipes Using the Recipe Screen. ..................... 65

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means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

PREFACE UltraFlex Drying and Firing Furnace Owner’s Manual viii Version 3

Figure 43. Recipe with Comment Dialogue Box Open. .................................................. 67

Figure 44. Recipe File Saved as CSV File. .................................................................... 68

Figure 45. Alarms Screen. ............................................................................................. 70

Figure 46. Alarms Events Screen. .................................................................................. 71

Figure 47. Alarm Histor y Scree n. .................................................................................. 71

Figure 48. Audit History Screen. ................................................................................... 72

Figure 49. User Administr ation Screen. ......................................................................... 73

Figure 50. User Administr ation Help Screen. ................................................................. 74

Figure 51. Tool Calibration Screen. ............................................................................... 74

Figure 52. Press the Despat ch Log o to Cr eate a Screen Shot on the USB stick. .............. 75

Figure 53. Conveyor Chamber Lift Verify Screen. ......................................................... 76

Figure 54. Display Screen.............................................................................................. 77

Figure 55. Status Screen for Troubleshooting. ............................................................... 78

Figure 56. Listen for So unds o f Bearing Failur e every Three Months. ........................... 81

Figure 57. Inspect and C lean Encoder Weekl y. .............................................................. 82

Figure 58. Inspect Conveyor Take-up for Ease of Movement......................................... 84

Figure 59. Inspect Plumbing for Leaks every Six Months. ............................................. 84

Figure 60. Lamp Box Covers Removed. ........................................................................ 85

Figure 61. Attach Wago block. ...................................................................................... 86

Figure 62. Replace Thermoco u ple. ................................................................................ 86

Figure 63. Replace Insu lat ion "T" Piece. ....................................................................... 87

Figure 64. Restr ictor Plate. ............................................................................................ 89

Figure 65. Remove exhaust ho using to access restrictor plate. ....................................... 90

Figure 66. Inspect Wat er Filter Mo nt hly and Repla ce Filter as Necess ary. ..................... 91

Figure 67. Contaminated Dryer Zone Before (left) and After (right) Insulation Burn-off

procedure. ..................................................................................................................... 94

Tables

Table 1. UltraFlex Security Levels. ............................................................................... 29

Table 2. UltraFlex Furnace T ypical Setpoint Ranges. .................................................... 31

Table 3. Guideline to Determine Number of Firing Zones. ............................................ 34

Table 4. Determine LEL Alert and Alar m Levels. .......................................................... 38

Table 5. UltraFlex Firing & Drying Furnace Modes. ..................................................... 44

Table 6. Burnoff Recipe Settings. .................................................................................. 95

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UltraFlex Drying and Firing Furnace Owner’s Manual ABOUT THIS MANUAL Version 3 9

1. About This Manual

1.1. Important User Information

All rights reserved. No p art of the cont ent s of this manual may be reproduced, copied, or transmitted in any form or by any means including graphic, electronic, or mechanical methods or photocopying, recording, or info rmation storage and re trieval syst ems w ithou t the written permission of the publisher, unless it is for t he purchaser 's perso na l use.

Printed and bound in the United St at es of Amer ica.

The i nformation in this manu al is s ubje ct to change without notice and d oes not represent a commitment on the part of Despatch Industries. Despatch Industries does not assume any responsibility for any errors that may appear in this manual.

In no event will Despatch Industries be liable for technic al or editorial omissions made herein, nor for direct, indirect, spe cial, inc identa l, or consequential damages resulting from the use or defect of this manual.

Values displayed on screens are examples only. Though

O O

The i nformation in this doc ument is not intended t o co ver all poss i ble c ond itions and situations that might occur. The end user must exerc ise caut ion and common sens e when installing or maintaining Despatch Industries products. If any questions or problems arise, call Despatch Industries at 1-888-DESPATCH or 1-952-469-5424.

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those values may be typical , cont act Despatch Industries for the final value.

Actual screens may vary from those published in this manual.

ABOUT THIS MANUAL UltraFlex Drying and Firing Furnace Owner’s Manual

This icon signifies information that describes an unsafe

Danger!

A condition that may result in death, serious injury or damage to equipment.

Warning!

A condition that may result in serious injury or damage to equipment.

Caution!

A condition that may res ult in da m a ge t o equipme nt or product.

LOG OUT

Bold, 10pt Arial typeface indicates a specific key or butto n on screen to click.

10 Version 3

1.2. Manufacturer

The UltraFlex Drying and Firing Furnace is manufact ur ed by:

Despatch Industries

8860 207th Street Lakeville, MN 55044 1-952-469-5424 • 1-888-DESPATCH www.despatch.com

Refer to the UltraFlex Drying and Firing Furnace name plate for a lis t o f machine specifications a nd t echnical support contact infor mat ion.

1.3. Organization of this Manual

The Owner’s manual c ont ains the most comprehensive set of information for the UltraFlex™ Firing and Drying Furnace.

1.4. Conventions Used in this Manual

O

This icon sig ni f ies imp o rtant information.

condition that may result in death, serious injury, or damage to the equipment.

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UltraFlex Drying and Firing Furnace Owner’s Manual ABOUT THIS MANUAL

Acronym:

Refers to:

CDA

Clean, Dry Air

GUI

Graphical User Interface

HMI

Human-Machine Interface

IR

Infrared

Lpm

Liters per minute

MFC

Mass Flow Controller

PLC

Programmable Logic Controller

SSR

Solid State Rel ay

SCR

Silicon-Controlled Rectifier or Semiconductor-Controlled Rect ifier

VFD

Variable Frequenc y Drive

VOC

Volatile Organi c Com pound

Version 3 11

1.5. Acronym Identifier

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SAFETY UltraFlex Drying and Firing Furnace Owner’s Manual

Danger!

12 Version 3

2. Safety

2.1. Safety Information

Do not wo rk on the UltraFlex D ryin g and Fir ing Furnac e without read ing and understanding this section which contains important information and warnings. Ignoring these warnings can result in death, serious injury or damage to the machine and product.

2.1.1. Lockout

Machine lockout places t he UltraFlex Drying and Firing Furnace into a zero energy state and prevents accidental machine start up. Always fo llow the Lock out Procedure described in this Section before cleaning, maintaining or repairing the U ltraFlex Drying and Firing Furnace. An accidental start-up, wh ile wo rking on the Ult raFlex Drying and Firing Furnace, can result in serious injury or death.

2.1.1.1. Lockout Requirements

1. Every power source that can energ ize an y element of the UltraFlex Drying and Firing

Furnace must be shut off at the closest po ss ible power source. This includes air, wa ter and electricity.

2. After energy sources are locked out, test to ensure circuits are de-energized.

2.1.1.2. Lockout Procedure

Personnel author ized to lockout equipment must have the necessar y locks to perform the lockout.

1. Physically disconnect all electrical power to the machine or lockout the appro pr iate

breaker or disconnects.

2. Close all valves for air or water sour ces and bleed off any pressure.

3. Test for power by attempt ing a start with the machine cont rols.

Electric a l pa ne ls conta in high voltage. Disconnec t a nd loc k o ut the power supply before working inside any electrical panels. Failure to lock out the power supply can result in death or injury.

4. Identify the Locko ut Co nd ition with a t ag o n the electr ical disco nnect and p neu matic

shut off valve .

5. When work is complete, r emove all tags and rest ore the machine to its working state.

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UltraFlex Drying and Firing Furnace Owner’s Manual SAFETY

Danger!

Failure to lock out the power supply can result in death or injury.

Version 3 13

2.1.2. Doors and Covers

Doo rs and c overs on the UltraFlex D ryin g and Fir ing Furnace pr otect against the hazards beh ind t hem. O pera tion withou t thes e sa fety devices in place creates hazards that the doors and covers are intended to render safe for pers onne l . Inspect the U ltra Flex Drying and Firing Furnace periodically to make sure the doo r s and covers are in place.

Electrical panels contain high v olt age. Disconnec t a nd loc k out the power supply before working inside any electrical panels.

All doors on this machine have fast eners that latch to the frame and require a tool to open. Panels and doo r s that req uire a too l to open are part of the safety system of the UltraFlex Drying and Firing Furnace. Do not open any doors while the machine is running.

2.2. Maintenance

Only qualified and trained personnel should perform maintenance or repair.

2.3. Electrical Power

Only qualified and trained personnel should perform electrical maintenance or electrical repair.

• Before perfo rm ing maintenance, disco nnect all electrical power fro m the machine.

Use a padlock and lockout all disco nnect s feeding power to the machine.

• Never clean, lubricate or repair the furnace whe n in operation.

Contact with energized electrical sources may result in serio us injury or death.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

SAFETY UltraFlex Drying and Firing Furnace Owner’s Manual

Danger!

14 Version 3

• Unauthorized alterations o r modifications to UltraFlex Drying and Firing Furnace are

strictly forbidde n. Never modify any electrical circuits. Unaut ho r ized mod ifications can impair the funct ion and saf e ty of the UltraFlex Drying and Firing Furnace.

Systems equipped with an uninterruptible power supply (UPS) may require that the UPS be powered OFF manually to disconnect all elect rical power.

2.4. Fire

Keep the UltraFlex Drying and Firing Furnace clean and free o f scrap mat er ials, oil or solvents to pre vent the poss i bility of f ire. In the eve nt o f fire, use a fire extinguisher as follows.

1. De-energize the machine immediately by pushing an Emergency Stop push button

2. Turn off the remote main disconnect (customer supplied disco nnect ) .

3. Extinguish the f ire.

2.5. Equipment Lockout Requirements

2.5.1. Emergency Stop

Always disconne c t a ll power before extinguishing a fire. Attempting to extinguish a fire in a machine connected to electrical power can result in serious injury or death!

To prevent injury or equipment damage during inspection or repair, the UltraFlex Drying and Firing Furnace must be locked out.

When a risk of personal injury or d amage to the Ult r aFlex Drying and Firing Furnace exists, push an Emergency Stop operator. This shuts off all electrical power to the machine. Figure 1 shows lo ca tion of Emergency Stop operators.

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UltraFlex Drying and Firing Furnace Owner’s Manual SAFETY

Unload

View

Load End

Product

Flow

Emergency Stop Loc ations

UltraFlex

Figure 1. UltraFlex Furnace Emergency Stop Locations.

Version 3 15

Furnace Emergency Stop

View

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THEORY OF OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Furnace

Figure 2. Ultra Flex Infrared Firi ng and Dryi ng Furnace in Manufact uri ng Line.

16 Version 3

3. Theory of Operation

The Despatch UltraFlex fur nace is a second generation in-line (co nveyor ized) furnace (following the Despatch C F/CDF series). It is designed for use in photovoltaic manufacturing lines for the express purpose of drying and firing metalized paste to silicon substr ates. The furnace process immediate ly follows the last scr een printing step (typical manufacturing process ste ps sho wn in Figure 2).

The UltraFlex furnace is avai la ble as a firing fur nace alone (Model FF) or wit h a n inte gral dryer (Model DFF). The func tion of the dryer portion of the machine is to liberate Volatile Orga nic Compounds (VOCs) from the scree n printed substrate to prevent firing ano malies. I nfrared r adiation and resistant heaters pro vide the heat source for the drying process. T he U ltraF lex dr yer inco r porates a self-co ntained oxidation system that incinerates VOCs at the point of evacuat ion or exhaust. VOCs are exhausted near the entrance and exit o f the dryer d irect ly into individua l Thermal Oxidizers. Each Ther ma l Ox id iz er is ind ep e nd e ntly mo nit o r e d and cont rolled to ensure t emperature and flow are maintained within proper limits to achieve VOC destruction.

The function of the furnace is to sinter t he screen-printed and dried paste to the silicon substr ate as the final manu fact u r ing step in producing a solar cell. T he furnace uses infrared r adiation as a heat source and a combination rad iant/convective chiller to remove heat from the product and belt prior to exiting the machine.

From beginning to end the drying/firing process entails drying, binder (polymer) burn-out, sinte ring and co ol-down. Production speeds are approximately 457.2- 698.5 cm per minute (180-275 inches per min ute ).

Both the dryer and furnace use an in d u s trial pro gr am mab le logic controller (PLC) and Microsoft Windows t ouc h s c reen PC (human-machine interface, or HMI) as the primary control platform and human/machine inter face respectively. All so ftwar e is proprietar y to Despatch Industries.

UltraFlex Drying

and Firing

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UltraFlex Drying and Firing Furnace Owner’s Manual THEORY OF OPERATION

Figure 3. UltraFlex Furnace Machine States.

Version 3 17

3.1. UltraFlex Drying and Firing Furnace Machine States

The UltraFlex Drying and Firing Furnace operates using a series of seven modes. The tool dries and diffuses wafers using the Production Mode (Figure 3).

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THEORY OF OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

18 Version 3

3.1.1. Power Off

Tool is OFF. Power the tool ON at the main breaker.

3.1.2. Initialization Mode

Initial entry state when st arting the pro gram. During Initialization, t he system performs startup sequences such as:

• Diagnostic routines check for hardware er rors

• System checks for local/remote I /O st atu s. If necessar y, erro r messages display and

program remains in Initialization Mode.

• The Human Machine Interface (HMI) and t he Pro gra mmable Logic Controller (PLC)

are both powered u p into the “Run” state. Recipe values are matched and the last running recipe is loaded. Note that a default recipe is de fined at t he first start up

• After successful diagnostic rout ines and checks, the system sets displays and o utputs

to defa ult co nd itions and ente rs t he Idle Mode

3.1.3. Idle Mode

The Idle Mode allows for recipe creation, editing and selection, withou t need to run the entire system. Idle Mode includes these conditions:

• The t o ol is idl e .

• If alarm conditions exist (for instance wait ing because of E-stop, high temperat ur e

limit or power low), those conditions must be acknowledged before starting the tool. In fa c t, exception condit io ns may cause t he syst em to switch to the Stabilization or Cooldown states. A separat e HMI “E-STOP Reset” sets a relay output that re sets the safety circuit.

• All alarms are enabled

3.1.4. Loading Recipe Mode

The Loading Recipe Mode simply begins the load ing process for the selected recipe. After loading a recipe, t he user can star t Production Mode.

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means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual THEORY OF OPERATION Version 3 19

3.1.5. Stabilization Mode

In Stabilizat ion Mode the system monitor s the process values until they a re within a defined window and then proceeds to the Product io n Read y stat e when the system is stable.

3.1.6. Production Mode

Production Mode is the machine state used for production and maintains process values status with respect to r ecipe-specified target set points and deviation limits.

• Deviatio n exceptions and physical input exception conditions may cause the system

to automatically switch t o t he St ab ilization or Cooldown states.

• If the user selects to stop the process using the HMI console, the system enters the

Cooldown state.

3.1.7. Cooldown Mode

In the Cooldown state, dr yer and furnace heating is disabled while other systems (including coo ling water, airflow, and oxidizer) hold the t hresho ld temperature.

• When heat zones have cooled below the Cooldown thres hold, the system shuts

everything off and enters t he Idle Mode.

• Using the Rapid Cool option, the system opens the chamber to approximately one

inch for rapid cooling.

3.1.7.1. Quick Cooldown Mode

In quick Cooldown mode, the chamber opens slightly for more rapid cooling. Quick Cooldown mode follows this process:

• Audible alarm sounds

• Casing lowers roughly 80 mm

• The conve yor is O N

• The tool goes to Idle Mode

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THEORY OF OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Warning!

20 Version 3

3.1.8. Maintenance Mode

Manually select Maintenance Mode to serv ice the too l:

• Maintenance state is open loop control mode only. 0-100% power control is

available.

• User inputs are blocked to ensure safe oper ation of the tool.

• General alarms (for instance, temperatu re hi gh and low) are

not active in Maintenance Mode.

• Safety interlocks remain active in Maintenance Mode.

Only qualified and trained personnel should perform

O O

maintenance or repai r

Access to Maintenance Mode is available only when the chamber temperature is below the Cooldown threshold.

.

3.2. Optimized Recipes and Thermal Profiling

The UltraFlex furnace optimizes hea t transfer for firing so s etpoints may be lower compared to other furnaces. During UltraFlex furnace fast firing and cooling profiles (those greater than 125°C/second), a wafer measured with a light gauge thermocouple spring typicall y under-reports true wafer temperature. Contact Despatch Global Headquarters for:

• A method to optimize the efficiency of a wafer through design o f experiments

• The Despatch measure me nt to ol that more reliably reports wafer temperature

3.2.1. Thermal Profiling Process

Thermal profiling co nsist s o f these general steps:

1. Determine the pro file windo w. What needs to be accomplished with each wafer as it

mo v es f r om drying to burnout to firing to cooling?

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UltraFlex Drying and Firing Furnace Owner’s Manual THEORY OF OPERATION Version 3 21

2. Determine process speeds: Conveyor maximum and minimum speeds based on the

entire line as well as the paste manufactu r er ’s process window.

3. Determine the number o f firing zones req uired for the profile.

4. Determine airflow rates (dryer and furnace), cooling r at es and burno ut t emperature.

Due to the use of Microzone™ technology, conventiona l high temperatures and fast bel t speeds are not required.

O

While eight zones using Microzone technology are available, typical profiles make use of three to four zones.

Additio n al s teps may include:

• Adjusting Micro zone™ technology to optimize the profile

• Adjusting the final wafer t emperat ur es

• Testing the process using thermoco u ple assemb lies and samp les

• Reviewing cell electrical results, adjusting settings and rerunning the process

Refer to Recipe Setup and Optimization (4.3) for specific setup instructions.

3.3. UltraFlex Dryer

3.3.1. Overview

To achieve the desired rheo log ica l and other compositional qualities, all photovoltaic (PV) metallization pastes contain volatile organ ic co mpounds ( VOC) . After printing with these pastes, the printed ce lls must be properly dried to avoid the release of hazardous fumes into the furnace, to avo id excessive equipment contamination and to achieve VOCs max imum cell pe rformanc e .

The UltraFlex Dryer tr anspo rts printed cells (wafers) through multiple integrated, independently-controlled heating chambers using a variable-speed conveyor (Figure 4). The wafers are heated to a temperat u r e that liberat es volatiles from the paste and evacuates the VOCs fro m the heat ing chamber us i ng a c losed-loop control process gas system. The VO Cs are then exhausted into the integr ated thermal oxidizer where they are destroyed leaving only CO and HO byproducts. The wafer is then transferred d irectly into the firing furnace for furt her pr ocessing.

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THEORY OF OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 4. The UltraFlex Dryer Transports Wafer s t hrough Multi ple Chambers.

22 Version 3

3.3.2. Transport System

The wafer transport syste m co ns ists of a me sh b e lt, drive motor, progra mma ble logic controller (PLC), variable fre que ncy drive s (VFDs), encoders, wafer senso r s, prec ision gu ides and an internal s upport syst em. The mesh be lt is desig ned to contact the wafers o n l y a t the outer extre m ities, minimizing surface damage and allowing uniform heating w ith out inf lue nce from belt contact. Belt speed is cont rolled with a clo sed loop syste m including the PLC, VFD, motor and encoder. The transport system is designed t o operate from 64-635 cm/min with an accuracy of ± 0.5%. The conveyor is supported within the chamber by a series o f quartz rods secured by glass plates within the refractory. Wafer sensor photo-eyes are secured on the entrance and exit of the chamber t o ensure sa fe operation of the machine below the lower explosive limit of the pro cessed VOCs.

3.3.3. Heating System

The heating s ys tem includes three separat e yet integ r ated systems. The lower portion of the chamber has resistance-coil heating for preheating t he process gas introduced in the chamber. The dryer upper chamber contains infrar ed ( IR) lamps to heat t he wafers to the point of solvent evacuation as they pass through the chamber. T he o xidizer resistance coil heaters destro y the VOCs remo ved from the wafer in the process. All three heat ing syste ms are close-loop controlled via PLC, thermocouples, SSR and SCRs. T he typical operation temperatu r e of the lower cha mber pr ehe ater is approximately 350 °C. IR lamp

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means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual THEORY OF OPERATION

Figure 5. Set Four Dryer Process Air MFCs Using the Rec ipe Scree n.

Version 3 23

heaters operat e in a typical range of 200-550 °C and the oxidizer operates at 760 °C. Set points and toleranc es for a ll heating systems are a function of setting the recipe.

3.3.4. Process Gas System

Process gas is delivered using a cont rol system made up of the PLC, mass f low controllers (MFC), proportioning valves and monito r ing pressure transducers. Air i s introduced into the upper and lower dryer heating chambers by the M FCs, whe re it is preheated and delivered t o t he chamber ca vity. MFCs provide exhaust air flow to each dryer zone to clear the VOCs. O xidizer s evacuate contaminated p ro cess a ir at t he ends of the chambers and destro y the VOCs, leaving only CO2 and H2O byproducts.

Note:

• Two proportioning valves are facto r y set to achieve and maintain the required flow

for oxidizer air. Tw o additional facto ry-set proportioning valves provide dryer

entrance and exit air sparges (air curtains).

• Set any of the four dryer process air MFCs by using the Recipe screen (Set Four

Dryer Pr ocess Air MFCs U sing the Recipe Screen.).

• The PLC uses pressure transducers (there are several) to convert pressure to flow

numbers for control, display and alarm purposes.

Only Despatch personnel are permitted to change proportionin g

O

valves.

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THEORY OF OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

24 Version 3

3.3.5. Oxidizer Airflow Settings

The exhaust set-point adjusts with the Oxidizer flow set-point

O

The dryer is shipped with factory airflow and pressure settings which produce balancedconditions, that is, the dryer is ba lanc e d from end to end—equal amounts of exhaust flow t hrough ea ch oxidizer, and the dr yer runs at a very slig ht negat ive pressure compared to the r oom. Keep the dryer in a balanced condition by always using the factory settings.

O

and does not require separate ad ju stment .

Consult Despatch for assistance befo re using non-standard oxidizer airflow settings.

3.4. Wafer Throu g hp ut

The UltraFlex Drying and Firing Furnace is designed for a specific solvent load. Dilution air volume dictat es the a mount o f flammable solvent that can be safely processed in the furnace. The dr yer is equipped wit h an airflow safety switch to ensure the introduction of the minimum volume of d ilu tion air. The MF C ensures the introduct ion of the proper volume of dilution air.

As the tool moves into P ro d uct ion Mode, scr eens pro mpt t he user to ent er infor mat ion necessary for det ermining the proper LEL (lower explosive limit) le vels. See S ection 5.2 for more information.

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UltraFlex Drying and Firing Furnace Owner’s Manual THEORY OF OPERATION

Figure 6. Despatch VOC Thermal Oxidizer Operat i on.

Version 3 25

3.5. VOC Thermal Oxidizer

Paste used in the metallizat ion pro cess can pro d uce harmful byproducts cont aining volatile organic co mpounds (VOCs) that vaporize into t he at mosphere. In the Unit ed Sta tes, the Environmental Protection Agency (E P A) requires effective abateme nt of VOCs.

The Despatch VOC Thermal Oxid izer was des ig ned to eliminat e o ver 99% of VOCs from gasses exhausted during solar cell manufacturing. Destroying the VOCs using the Oxidizer eliminates the need to collect and dispose of this waste in a separate process. The exhaust exiting from t he VOC Oxidizer c ontains only CO2 and water vapor.

The Despatch VOC (Figure 6) uses elevated temperatures to cause organic compounds to co mbust when exposed to oxygen. Thermal destruction of most organic compounds takes place at 350 °C to 450 °C. Thermal oxidizers typ ic all y maintain a temperature of 760 °C to ensure destruc tion of all VOCs. The process releases heat and so contributes to maintaining the t emperat ur e of the oxidizer.

3.6. Chamber Lift Mechanism

The chamber lift mechanism is o per ated by a pneumatic cylinder and a set of lift c hains which lift t he chamber into place and seal the upper and lower casings. The pneu matic cylinder applies a lower pressure to lift the casing. When the casing is within roughly 50 mm, the cylinder applies a higher pressure to seal the casing. Pr essure is c ontinuousl y applied to the casing while the tool is in Production Mode.

Use of the pneumatic cylinder t o close and op en the chamber

O

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means no clamps are required for op erat ion.

THEORY OF OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

26 Version 3

Operation of the chamber lift is accomplished through the scree ns provided (Section 5.7).

Operating the Chamber Lift mechanism requires that the tool

O

Warnings and alerts for the chamber li ft mec hanis m inc lu d e:

• Audible and on-screen warning before opening

• Alert if the chamber opening or closing does not complete the cycle

O

be in Maintenance Mode.

If the chamber is open, neither heaters nor conveyor will run (except in Cooldown mode when casing opens 80 mm).

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UltraFlex Drying and Firing Furnace Owner’s Manual SOFTWARE & HARDWARE SETUP Version 3 27

4. Software & Hardware Setup

Always read and underst and Section 2—Safety before

O

4.1. Operation Overview

The Ho me Scree n of the UltraFlex Drying and Firing Furnace is the system d ef ault screen, the screen that app ear s after boot-up ( Figure 7). Navigat e fro m the Home Scr een to all other screens and modes (including Ready, Stabilization, Cooldown and Idle) used to operate the UltraFlex Drying and Firing Furnace (Figure 8).

installing, performing maintenance or adjusting the UltraFlex Drying and Firing Furnace.

Figure 7. Typical Home Screen (UltraFlex).

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SOFTWARE & HARDWARE SETUP UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 8. UltraFlex Drying and Firing Furnace Software Navigation.

28 Version 3

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means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual SOFTWARE & HARDWARE SETUP

UltraFlex Furnace Function

Security Level

Operator

Maintenance

Process

Engineer

Despatch

Users

Load Recipes/Run S yste m

X X X

X

Acknowledge Alarms

X X X

X

Change Languages

X X X

X

Edit Recip es

X X X

Mainte nance Mod e

X X X

Open Chamber

X X X

Enable Remote Access

X X X

Edit Data logging

X X X

Expo rt/I mport Use rs

X

Export/Import Calibrations

X

Exit System

X

Export/I mport Machine Constants

X

Edit P ID Va lues

X

Version 3 29

4.2. Managing Users

After launching the UltraFlex Drying and Firing Furnace, login to g a in access to syst em functions.

4.2.1. Security Levels

Security to the various functions of the UltraFlex fur nace (Table 1):

Table 1. UltraFlex Security Levels.

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SOFTWARE & HARDWARE SETUP UltraFlex Drying and Firing Furnace Owner’s Manual

Setup

Users

Figure 9. Press Setup and User Information.

Figure 10. Enter or Change User Information with the Setup/User Admini stration Screen.

30 Version 3

4.2.2. Adding a User or Changing User Privileges

Adding a user or changing user privileges requires use of the user administration functions. Adding or changing functions includes user names, passwords, user group identification a nd s pecifying a lo goff time.

The UltraFlex Drying and Firing furnace keeps an audit trail

O

1. From the Home screen, press Setup (Figure 9).

2. Press Users in the User Administrat ion section of the Setup

screen.

a. Press Help at any time for more I n formation

3. Using arrow keys go to the last row on the screen.

4. Double-click (or press Enter) on that row until the blinking

cursor appears

which requires that every change be logged in by a user with a val id user name.

then Users to Add or Change

a. Ente r Use r name b. Use t he full first and last name for t he User name entry. c. Enter New password and Confirmat ion

5. Passwords must be at least four characters

a. Under Group, assign the group appro pr iate to t he tasks required for t he user.

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UltraFlex Drying and Firing Furnace Owner’s Manual SOFTWARE & HARDWARE SETUP

UltraFlex Furnace

UltraFlex Furnace Setpoints

Lower Setpoint

Upper Setpoint

Dryer Zones 1-4

25°C

500°C

Furnace Zone 1

25°C

600°C

Furnace Zones 2-4

25°C

750°C

Furnace Zones5-12

25°C

1050°C

Conveyor Speed

100 cm/min

635 cm/min

Oxidizer

25°C

780°C

Version 3 31

b. Enter Logoff t ime (maximu m time the sys te m can remain idle u ntil it

automatic ally log s out.

4.3. Recipe Setup and Optimization

Traditional recipes for solar cell production often adjust conveyor or belt speed to reach the desired profile. The UltraF lex furna ce uses Mi cr ozone technology to prec isely heat or cool wafers to the desired t emperat ur e. Microzone technology combines op timized radiant wavele ngths with custom lamps to provide accurate profiles—independent of conveyor or belt speed. Microzone technology allows for u nprecedent ed p r ecision in achieving profiles without changing conveyor or belt speed and thus affecting the rest of the line.

4.3.1. UltraFlex Furnace Setpoint Ranges

The s e tpoint ranges in Table 2 are based on typical pro d uct temperat u r es rat her than oven temperatures. Figure 11 shows example f iring zo n e setpoints versus actua l temperatur es for belt speeds of 508 cm/min and 635 cm/min. Actual zone temperatures (as measured at the wafer or wafer facsimile) will vary with belt speed and temperature dis p a rity f r om adjacent zones. The same recipe will produce different measured temperatures at varying belt speeds. Measure t he t emperat ur e profile following each recipe change.

Lamp zo ne s etpoints les s than 300 °C may adversely affect

O

lamp li fe .

Table 2. UltraFlex Furnace Typical Setpoint Ranges.

Process Area

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SOFTWARE & HARDWARE SETUP UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 11. Typical Firing Zone Setpoints vs. Actual Temperatures.

32 Version 3

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UltraFlex Drying and Firing Furnace Owner’s Manual SOFTWARE & HARDWARE SETUP Version 3 33

4.3.2. Optimize Recipe Process with Example

Precise profile cont ro l is achieved using UltraFlex furnace

O

While the UltraFlex furnace o ffers a variety of flexible optimization options, the typical UltraFlex furnace burno ut-fire-cool pro file includes these steps:

1. Determine process speed ( conveyor minimum and maximum speed), based on:

a. The minimum transport speed based o n the speed of the slowest element in

the production line.

Example Transport Speed:

• W hile y our li ne m ay be different, in this example the printer is the slowest element in the line with a speed of 1 wafer ever y 2.2 seconds.

.

%

• At 85% loading with a wafer length of 15.6 cm, the minimum transport speed i n the

furnace = 500.5 cm/min.

b. Minimu m a nd maximu m pro cess speed s based o n the recommended process

window supp lie d by the paste co mpany.

Example Minimum & Maximum Process Speed:

In this example, the recommended paste process time of 24-36 seconds includes heating, burno ut and f iring. The heated length o f the U ltraFlex furnace is 183 cm.

Maximum pr ocess speed:

Minimum process speed:

Microzone technolo gy rather tha n the traditional control of co nveyor or belt speed .

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)

= .

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SOFTWARE & HARDWARE SETUP UltraFlex Drying and Firing Furnace Owner’s Manual

Number of F iring Zones Required at:

342.9- 381.0 cm/min (135-150 inch/min)

482.6-558.8 cm/min (190-220 inch/min)

584.2-635 cm/min (230-250 inch/min)

Typical Profile

100-125°C/sec

4 5 6

Rapid Firing Profile

125-150°C/sec

3 4 5

Very Rapid Firing Profiles

>150°C/sec

2 3 4

34 Version 3

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

(



= ./

)

Example: Belt speeds fast er than 500.5 cm/minu te will not

O

increase production speed.

Example Final Process Speed:

Using the process speed (500.5 cm/minute) may limit production. Only conveyor speeds between 610 cm/minute and 500.5 cm/minute should be considered.

2. Determine the number o f firing zones (Table 3)

Microzone t echno logy allows for an infinite amount of profile change s, ind epe nde nt of belt speed.

Table 3. Guideline to Determine Number of Firing Zones.

Heating Slopes

Example Number of Firing Zones:

In t his exa mple, a typical profile (100 °C -125°C/second) would require five to six firing zones.

3. Set airflow in dryer and furnace. Whi le greater volumes of air h elp clean the furnace,

they also elevate electricity consumption and re quire greater exhaust flows.

Example Airflow:

In t his exa mple of a sin gle lane tool, the H M I (inflow ) is s e t to :

• Low end: 190 Lpm

• High end: 380 Lpm

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UltraFlex Drying and Firing Furnace Owner’s Manual SOFTWARE & HARDWARE SETUP Version 3 35

4. Determine single lane o r dual lane cooling rates. Rapid Cooling 1 and Rapid Cooling

2 blow air downward from above t he wa fer and provide top and bo ttom radiant cooling. The cooling rate depends on fan speeds, cooling water temperature, wafer mass and belt sp e ed . Faster belt speeds requ ire more cooling, because more mass needs more co oling. The rapid cooling fans 1 and 2 run between 4% and 100% when ON. Eve n at a 0% setting ther e will be a 4% minimum speed, which is r equired for stable fan operation. Typic al cooling rates are 50° to 65°C / second. Adjust fan speeds to obtain the desired cooling. I f wafers are blown out of position or if excess vibration is observed, reduce fan speed.

5. Determine burnout temperature a. In general, lower temperatur es and longer bur no ut times are more p ro du ctive.

But final results are also based on t he past e manuf acturer recommendat ions.

b. If burnout is insufficient, increase t he t emperat ures or reduce belt speed and

use.

Example Burnout Temperature:

In this example, typical burnou t temperatures range fro m more than 300°C to less than 800°C.

6. Adjust Microzo ne™ t echno logy for desired peak temperature and profile . Microzone

technology is typica lly set to higher setp oints in the center of the firing zones to optimize heat transfers—based o n shared view fact ors with adjacent zones.

7. Adjust final wafer temperat ure using the exit conveyor coo ling blower volume. On

the Recipe screen (Figure 12):

a. Press Recipe. b. Press Exit Conveyor Cooling Airflow and adjust blower speeds (to roughly

75%) until the wafers begin to move.

c. Reduce the setpoint by 1-2%. d. Press Save to use in the currently running recipe.

Expect achievable temperature variations o f 200° C from zone

O O

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to z one.

Microzone techno logy is thermally protected from t he cumulative te mperat ur e. An alarm is set if the limit temperature is exceeded.

SOFTWARE & HARDWARE SETUP UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 12. Adjusting Value on Detail Box.

36 Version 3

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UltraFlex Drying and Firing Furnace Owner’s Manual SOFTWARE & HARDWARE SETUP

Warning!

Version 3 37

4.4. Dryer/Firing Furnace Airflow Setup

Airflow set up o n th e UltraF lex furnace is essent ial for bot h safet y and process performance. S p ecific recipe process gas parameter inputs at the HM I depend on accurat e airflow se tup . A 45-point airflow syste m calibration is perfor med pr ior to shipping the Ult ra F l ex furnace. This ca libratio n helps ensure accurate airflow thr oug hout the ra nge of o peration, in all circuit s, and that the flow is accur ately portrayed at the HMI.

Entrance and exit sparges form air curtains that help cont ain VOCs with in the dr yer, for later pr oce s sing through the VOC T hermal Oxidiz e r (Section 3.5). Only Despatch per so nnel ma y adjust the Dryer Entrance Sparge Airflow Setpoint and Dryer Exit Sparge

Airflow Setpoint Dryer Entrance Heat S etpoi nt and Dryer E xit Heat Setpoint set by Despatch personnel both

control a lower set of lamps to provide heat that prevents V OC condensation at dryer entrance and exit.

4.4.1. Dryer Airflow Setup

to minimize VOCs escaping t he dryer.

Oxidizer airflow setpoints affect the ability of the dryer to draw out VOCs. Do not tam pe r with oxidizer airflow setpoints without consulting Despatch.

Process air in the dryer serves primarily as a safety feature to evacuate volatile compounds in the paste. Configuring airflow in the dryer requires inputting information about the process, including:

• Amount of paste ap plied

• Solvent concentration

• Throughput

Based on these inputs, the furnace identifies a safe o perating r a nge of flow t o maintain concentrations below the lower explosive limit (LEL). If loading the furnace creates an unsafe level of calculated LE L, the machine alerts the operator who mu st either increase air flow or reduce throughput.

Four recipe inputs determine dryer airflow: MFC1 (Mass Flow Controller for Dryer Zone 1), MFC 2, MFC 3 and MFC 4. Each inp ut va lu e is clos e -loop controlled with alert and alarm bands to protect the process and furnace.

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SOFTWARE & HARDWARE SETUP UltraFlex Drying and Firing Furnace Owner’s Manual

If

Then

Machine State

Factor > 4

> 25% LEL

Clear

2.25 < Factor < 4

25-45% LEL

Alert

Factor < 2.25

> 45% LEL

Alarm

38 Version 3

After entering the necessar y paste information in the recipe, apply the necessary airflow values. The formula for calculating LEL is:

(

 =





()/) (%)

) 3.328

Table 4 defines t he Factor va lue the Furnace u s es to determine aler t and alar m levels:

Table 4. Determine LEL Alert and Alarm Levels.

Example: If processing wafers at a rate of 1200 per hour with 1. 2 gr ams of paste and a solvent concentration of 15% you would need a minimum 259 Lpm of air as a starting point:





  0.15

= 259

(

)=

(

4) 1200





3.328

  1.2

After establishing the starting point, adjust air flow up or down to operate in the most efficient manner while maintaining a safe evac uation flow .

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Furnace Status

Process

Navigation

User Identity

Mode

Recipe/Mode

Recipe Name & Current

Screen

Figure 13. UltraFlex Furnace Home Screen.

current setpoint value as the bottom number.

Current process value

Current setpoint value

Version 3 39

5. Operation

5.1. Routine Operati on

Routine ope ration of the UltraFle x furnace involves using the Home Screen (Figure 13). All f un ctions of the U ltra Flex furnace are available from this screen (Figure 8).

Name

Overview

Bar

Recipe Profile

Indicator

O

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Graphic conventions used in the UltraFlex furnace show the current process value as the t op number in the box and the

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

40.3

Press boxed area on screen to change data

Press X to close the keypad.

Figure 14. Use On-Screen Keypad or Keyboard to Enter Data.

40 Version 3

5.1.1. Overview

5.1.1.1. Using the UltraFlex Furnace Touch Screen I nterface

The UltraFlex furnace t ouch screen is a highly sensitive screen that allows direct interaction with the dat a. P r ess firmly on any boxed ar ea to change dat a using the onscreen keypad or keyboard ( Figure 14). Note that the on-scree n ke ypad and keyboard can be grabbed, moved to different parts of the screen and res ized.

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Fine-tine upper and lower parameters

On-screen boxes indicate values.

Figure 15. Using On-Screen Controls.

Version 3 41

5.1.1.2. Using On-Screen Controls

Adjust upper and lower limit on screens to focus on specific readings or trending information (Figure 15). Any box on the screen ind icates a p lace where a user can input information.

to focus on desired curv e.

areas where users can input

5.1.1.3. Process Overview

The top third of the Home Screen provides at-a-glance statu s of the current r ecipe including the current p ro file, profiles of each of the eight zones using Micro zone technology and current elect r ica l use (Figure 16).

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Monitor current r eci pe pr ofile

Monitor zones 5-12 of the Ult r aFlex furnace. Use Microzone technol ogy to

Monitor incomi ng power available to the furnace using volt age, amper age, kilovolts,

Mode Indicat or:

Blue: Cooldown Mode

Figure 16. UltraFlex Furnace Home Screen—Process Overview.

42 Version 3

• Green: Production Mode

• Yellow: St abilization Mode (Percent pr ogr ess gauge displayed only during Stabilization Mode)

• Red: Idle Mode

•

setpoints for eac h zone.

fine-tune firing times in each zone independent of belt speed.

frequency and power fac tor.

Current tool mode

5.1.1.4. Furnace Status

The middle portion of the Home Screen pr e sents a schemat ic perspective of the UltraFlex furnace showing actual and current setpoint values for each of the zones, belt speed s, exhaust values and ot her cr it ical values (Figure 17). Touch any boxed area for a specific detail screen to rep lace the pro cess overview (Figure 18).

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Current setpoint value

Current process v alue

Figure 17. UltraFlex Furnace Home Screen—Furnace Status.

Figure 18. Typical Detail Screen for Furnace Temperature Zone 1.

Version 3 43

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Mode

Primary Purpose

User

Idle Mode

The furnace is powered but a waiting

Operator, Supervisor

Stabilizati on M ode

The furnace is prepari ng to run a

Operator, Supervisor

Production Mode

Primary mode for running a recipe and

Operator, Supervisor

Cooldown Mode

Production m ode has been shut down

Operator, Supervisor

Maintenance Mode

Allows maintenanc e per sonnel to

Supervisor, Maintenance

Figure 19. UltraFlex Furnace Home Screen—Navigation Bar.

44 Version 3

5.1.1.5. Navigation Bar

The navig a tion bar on the UltraFlex furnace p r ovides t he u ser login as wel l as but t ons for trending, rec ipes, alarms, setup, maintenance and the return to the home scree n (Figure

19). Press to Start on t he nav igation ba r d isplays a screen tha t allows the furnace to be

started.

5.1.1.6. UltraFlex Dry in g and Fi r ing Fur n ac e Modes

The UltraFlex Drying and Firing Furnace employs five modes to gove rn it s use (Table 5). Operating the UltraF le x furnace usually in volv es primarily the Production mode along wit h the Idle and Cooldown modes. The Maint ena nc e mode is not typic ally used by the operator.

Table 5. UltraFlex Firing & Drying Furnace Modes.

instruction.

recipe.

producing wafers.

in anticipation of a new recipe, a new production schedul e or m aintenance.

maintain or repair the furnace. NOTE: The furnace cannot run in

Production mode while in Maintenance mode.

Personnel

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION Version 3 45

5.1.2. Navigating the Home Screen

After logging on with a Use r name and Password (as established by the administrat or ) the Home screen serve s as t he best window for monito ring the entire process. From the Home Screen, the user can navigat e to these o per ations:

• Run: Start and stop the tool.

• Trending: Pr ov id es his tor ic al information and allows for the exporting of production

historical data. Trending screens have user -configurable upper and lower par ameters for precise windows into performance.

• Recipes: Allows for importing and exporting of recipes, along with setup screens fo r

each of the recipes.

• Alarms: Lists ala rm times, dat e s a nd more info rmation.

• Setup: Allows for us er ad ministration, importing and expo rting of recipes, ca libratio n

and other set tings and setup funct ions. Generally used only at the initial stages of furnace set up.

• Maintenance: Pro vide s a safe, non-production mode for furnace maintenance

functions. Includes cleaning and calibration functions.

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Current Trending

Press to E10

Figure 20. Trending Screen.

46 Version 3

5.1.3. Trending Screen

The Trending screen provides opt ions for access in g and downloading historical values for c ritica l sys tems in the Ultr aFle x fur nace (Figure 20), inclu ding the conveyors, heat and airf low. Eac h trending s creen d is plays value s , setpoints and o utputs in relation to conveyor speed. Exporting data logs, records or histories typically takes ro ughly 20 minutes, depending on the amount of data. Available data may range from one to several weeks.

wafer output counter

options

Statistics

export data log

Press Conveyor, Heat, Airflow or Cooling for detai led trending screens. For inst a nc e , press

Heat and the n Heat Zone 1 to access the Histor y Trending/Furnace Zone 1 screen (Figure

21). Further trending opt ions are listed on the right side of the screen. See Section 5.3 for

more info rmation abo ut wo rking with the tre nding s c reen.

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Further

Controls

Figure 21. History Trendi ng / Furnac e Zone 1 Screen.

Version 3 47

trending options

for

viewing

screens

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 22. Recipes Screen and Pop-up Screen for Parameters Descriptions.

48 Version 3

5.1.4. Recipe Screen

The Recipes screen allows importing new recipes from other storag e devices as wel l as allowing new recipes to be enter ed manuall y, para met er -by-parameter. Press Parameter

Descriptions

information about working with recipes.

for more information about par ameters (Figure 22). See Section 5.4for more

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Number of active alarms in upper left corner

O

Figure 23. Alarms Screen and Close-up of Unacknowledged Al arms.

Version 3 49

5.1.5. Alarm Screen

The Alarms screen displays active or unacknowledged alarms (Figure 23). Press

Acknowledge to recognize and disarm the highlighted alarm. Press Info fo r a text bo x to

po p with further information abou t t he alarm. Pres s Alarm History to disp lay recent alarms ( Figure 24). The Alarm History screen uses color coding to display four levels:

• Equipment Safety (Red)

• Irreco verable Error (Black)

• Parameter Control Error (Blue)

• Attention Flags (Yellow)

See Section 5.5 for more infor mation about working with the alarm screen. Whe n a system event oc c urs (Figure 25), the operator should contact maintenance personnel or the Process engineer.

There is a ten second delay betw een when a zone turns color and when the alarm is annunciated.

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 24. Alarm History Screen.

Figure 25. System Event Alarm Screen.

50 Version 3

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Warning!

Figure 26. Setup Screen.

Version 3 51

5.1.6. Setup Screen

The Setup screen provides options for readying the UltraFlex furnace for production (Figure 26). The Setup screen is typically used at installation and then not aga in except fo r ad justme nt s. Find information about manag ing u s ers with the Setup screen in the Software and Hardwar e S etu p sec tion (4.2). See Section 5.6 for more information about wo rking with the setup screen.

Oxidizer airflow setpoints affect the ability of the dryer to draw out VOCs. Do not tamper with oxidizer airflow setpoints without consulting Despatch.

5.1.7. Maintenance Screen

The Maintenance scree n provides access to switches to isolate and test individual elements of the UltraFlex furnace (Figure 27). A red button indicates the system is currently disabled. A green button indicates the system is currently enabled. A square red button may appear to “Clear fault.”

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Maintenance

Maintenance Sc r een Closeup

Figure 27. Maintenance Screen with Close-up.

52 Version 3

• Airflow Valve Bank: With the top switch set to Manual, enable any one system

and read the pressure o f that system at the bott om of the column. The pressure reflects the cumulat ive pressur e of all enabled systems.

• Furnace Airflow: Enable, disab le o r change setpo int.

• Zones 1-12: Cha nge setpoints

• Misc. Outputs: Safety Relay OK removes power from the UltraFlex furnace if not

enabled. Enable or disabl e heat, lights and horn.

Screen

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 28. Confirm LEL Settings Dial ogue Window.

Version 3 53

5.2. Startup and Run the UltraFlex Drying and Firing Furnace

Production Mode controls the way the tool functions in day-to-day operation. This section shows how to get to Production Mode.

Automati c LEL Calculation Prior to Production Mode

Before completing any star tup procedure, the UltraFlex furnace automatically calculates the wafers per hour it can safely produce without exceed ing preset Lo w er Explosive L imits (LEL).

Before any Start u p procedu r e, be prepar ed to enter these values (Figure 30):

• Weight of paste (per wafer) in grams

• Percentage of volatile s olvent (by weight) in the paste.

O

Consult the Mater ial Data S afet y Sheets ( MSDS) provided by the paste manufacturer .

Using these values, t he UltraFle x fur nace calcu lat es:

• Wafers per hour threshold that exceeds 25 perce nt LEL.

This value generat es a warn ing alar m (Figure 28).

• Wafers per hour threshold that exceeds 40 perce nt LEL.

This value stops the Dryer conveyor from running.

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 29. Start Prod uction Mode from Idle Mode.

Figure 31. Stabilization Mode.

Figure 30. LEL Dialogue Window.

54 Version 3

5.2.1. Starting from Idle Mode

1. From the Idle Mode Home screen press Press

to Start

2. Press Start to open the LEL Dialogue Window

(Figure 30):

3. Press Start to start the tool and enter Stabilization Mod e.

to load the Run window (Figure 29).

a. The currently loaded recipe is

highlighted in the Recipe/Mo de indicator box.

b. Select another recipe as needed fro m

the drop dow n menu.

c. To set a new recipe, press Recipes to

go to the Recipes screen. Or use the Recipe Selection pull-down me nu .

a. Enter the current paste weight b. Enter the total per centage volatility. c. Check Material Data Safety Sheets (MSDS ) as necessary.

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 32. Tool in Production Mode.

Version 3 55

4. Startup status is indicated for each compo nent in the R un w indow. The too l is ready

when ope rating within the p ro c ess w indow limits for the ready delay setting (Figure

32). The default ready delay sett ing is t hr ee minu t e s. When all the tool components have stabilized, the too l enter s Production Mode.

5.2.2. Stopping from Production Mode

1. From the Product ion Mode home scree n, press Press to Stop to o pen t he Run

window.

2. Press Cooldown (Figure 32).

3. For t ypical tool shut down, press Normal. Typical tool shut down process includes: a. Heat shuts off first. b. Exhaust airflow increases to 100 percent. c. When temperature drops below the Cooldown threshold, airflow and

conveyors stop and the tool enters Idle Mode.

4. For rapid tool shut down, press Rapid. Rapid tool shut down process includes: a. Heat shuts off first. b. The chamber opens roughly 80 mm.

Though the chamber opens roughly 80 mm, the opening

O

c. Exhaust airflow increases to 100 percent. d. When te mp e rature drops below the Co oldo wn threshold, airflow a nd

conveyors stop and the tool enters Idle Mode.

remains covered by the chamber casing.

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

O

Mode.

Figure 33. Trending Main Screen.

56 Version 3

5.2.3. Entering Maintenance Mode from Idle Mode

Maintenance Mode is not intended for production purposes.

1. From the Product ion Mode home scree n, press Press to Stop to open the Run

window.

2. Press Maintenance Mode to open the Maintenance window.

5.2.4. Entering Maintenance Mode fro m Production or Cooldown Mode

Maintenance Mode is not intended for production purposes.

O

Maintenance Mode can only be entered through the Idle

5.3. Working wit h Trendin g

Trending (Figure 33) allows collected data to be viewed using customizable scales. Each o f the major UltraFlex furnace syste m s is availa ble for data monitoring, with heat , air f low a nd co oling data shown in c ompa rison t o conveyor s peed .

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 34. Conveyor Trending Screen.

Version 3 57

5.3.1. Working with Hourly Performance

The Hourly Performance section of the Trending screen provides wafer t hroughput performance for a variety of t ime ranges (Figure 33). Press Reset to zero all counters.

5.3.2. Conveyor

Press Conveyor to display current data points for the conveyor (Figure 34). Adjust upper and lower parameters us ing on-screen controls (See Section 5.1.1.2 for more information ab out on-screen contro ls).

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 35. Heat Trending Screen.

58 Version 3

5.3.3. Heat

Press Heat to display current temperature data points compared with conveyor speed. Choose the desired heat zone from the choices on the right of the screen (Figure 35). Adjust upper and lower parameters using on-screen controls (See S ection 5.1.1.2 for mo r e i n forma tio n about on-screen contro ls).

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 36. Air flow Trending Screen.

Version 3 59

5.3.4. Airflow

Press Airflow to display current data points co mpared with conveyor speed. Choose the desired section fro m the choices o n t he right of the screen (Figure 36). Adjust upper and lower parameters us ing on-screen controls (See Section 5.1.1.2 for more information ab out on-screen contro ls).

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 37. Cooling Trending Screen.

60 Version 3

5.3.5. Cooling

Press Cooling to display current data points compared with conveyor speed (Figure 37). Adjust upper and lower parameters using on-screen controls (See S ection 5.1.1.2 for mo r e i n forma tion about on-screen controls).

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Caution!

Version 3 61

5.3.6. Data

Press Data to display the screen (Figure 38) for downloading Event History, Alarm

History

USB port for downloading recipes and exporting data. Reserve the rear USB port for data logging (Figure 39).

, Trending History or Diagnostic History data. Despat ch recommends the fro nt

Use only the rear USB port for dataloggin g purpo ses. T he rear USB port is more secure for longer-term use and provides less opportunity for the memory stick to be dislodged.

Exporting data from the UltraF le x fur nace requires a blank 4GB USB memory stick be inserted into the front USB port (Figure

O

39). 4GB i s the maximum size for the memory stick t hat ca n be inserted into either USB port.

Do not lea ve the ext erna l memory stick in the fro nt USB port

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during normal operation or log data may be stored to it (and thus not stored to the usual rear memory unit).

Data logging will cease during data exporting operat ion.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Close-up of

Figure 38. Data Logging Screen.

Figure 39. Front and Rear USB Ports.

Front

Close-up of

Rear

62 Version 3

Front USB Port

Rear USB Port

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USB Port

UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 40. E10 Statistics Screen.

Version 3 63

5.3.7. E10 Statistics

E10 Reporting defaults at Enable. Use t he drop down menu to switch to Disable if desire d (Figure 40).

5.3.7.1. E10 States

Press E10 Stats from the Trending scree n to display the E10 Stat istics screen ( Figure 40). E10 St atistics uses t hese six states to organize and communicate the UltraFlex furnace uptime details:

• Productive State (Productive Time): Time the tool is performing it s intended

function. An example o f Productive Time might be regular production.

• Standby State (Standby Time): Time the tool is ready for the Productive State, but

is not being o perate d. An examp le of Sta ndby Time might be w hen t he op erator is una vailable, perhaps on break or at lunch.

• Engineering State (Engineering Time): Time the tool is ready for the Prod uct ive

State but is instead op er ated to conduct engineering tests

• Scheduled Downtime State (Scheduled Downtime): Time the to ol is not availa b le

to perform its intended funct ion because o f planned downtime events

• Unscheduled Downtime Stat e (Unscheduled Downtime): Time the t ool is not in a

co ndit ion to perfor m its intend e d fu nc tion bec a use of unplan ned downtime eve nts

• Non-Scheduled State (Nonscheduled Time): Time the tool is not scheduled to be

used for production. An examp le o f N onscheduled Time might be an unworked shift.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 41. Operator Selects Equ ipment State.

64 Version 3

For more infor mation on E10 Statistics, refer to the official document at www.semi.org:

SEMI E10-0304E10 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM).

5.3.7.2. Operator Initiated States

Wit h every to ol mode change, a dialogue window displays so the o per ator can choo se the current E10 stat e (Figure 41).

5.4. Working with Recipes

The UltraFlex furnace interior is a combination of lamps, materials and geometry that result in a unique furnace environment. Furnace-zone temperature setpoints a pproximate the temperature desired at t he wafer. Fo r initial rec ipe ge neration, verify t he setpoint temperatures and ad just using the thermocouple-fixtured substrat e designed specif ica l ly for the UltraFlex furnace env ironment (available from Despatch). Use cell electr ical performance measurements and other metrology to arrive at an optimal thermal recipe. Contact Despat ch for assist ance w it h Process Engineering and optimiza tion nee ds.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Add a new recipe by pressing Press arrow to reveal available reci pes.

Status bar

Figure 42. Work with Existing or New Recipes Using the Recipe Scree n.

Version 3 65

5.4.1. Enter a New Recipe

Enter a new recipe by pressing New on the Recipe screen and updating the value for each parameter from the defau lt values ( Figure 43). Recipe s typically include a setpoint, a high and low a larm devi ation, and high and low process dev iation for each parameter.

New and then adding v alues parameter by parameter.

Note that recipes must be named and sa ved to be retained. Rec ipe s not saved wi l l be lost.

5.4.2. Working with Existing Recipes

5.4.2.1. Load Existing Recipe

Press the down arro w (Figure 42) to display recipe s c urr e ntly a vailable and p ic k the desired recipe. Recipe w ill load all parameters.

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

66 Version 3

5.4.2.2. Import a Recipe

Import existing rec ipes into the UltraFlex furnace using Import recipes from disk from the Recipes screen (Figure 43). T he curr ent r ecipe ru nning on the UltraFlex furnace can also be uploaded for editing (press Upload from PLC).

Recipes imported from disk should be in CSV format. See the “Saved Recipe” Microsoft E xcel file you received with your UltraFlex furnace.

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5.4.2.3. Change a Recipe Value

Changing a recipe value requ ires t hat t he user enter their password and comment about the c hange (Figure 43). T his log in/c omment p r ocess allows changes to be carefully tracked and provides useful information when examining the logs.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any

means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 43. Recipe with Comment Dialogue Box Open.

Version 3 67

5.4.2.4. Export a Recipe

Export recipes by pressing Export recipes to disk. Exported recipes are saved as CSV files which c an be opene d with M ic ro s oft E xcel (Figure 44). S ave a recipe by pressing

Save. Download a rec ipe for use by the UltraFle x fur nace b y pressing Download to PLC.

Save any changes to Recipe values pri or to downloading to

O

the PLC.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

on the CSV file must not be altered.

Figure 44. Recipe File Saved as CSV File.

68 Version 3

5.4.2.5. Edit a Recipe on a PC

Recipes from the UltraF lex furnace ca n be expor ted as CSV files and opened with Microsoft Excel. Recipe s files use tw o columns (Figure 44):

• Column A is the name of the recipe item

• Column B is the value of the named recipe item

Certain UltraFl ex furnace information must not be altered for

O

To change a value, type the new value in the appropriate cell. To add a recipe:

1. Copy all the data from a column that close ly matches the new recipe values.

2. Give the recipe a new name (Row 3, Column 1)

3. Give the recipe a new number (Row 4 , Column 1)

4. Edit the valu e s and s ave the fi le.

correct performance. Rows 1 and 2 on the CSV file must not be altered. Column 4

Use unique names for recipes. Unless recipes are given

O

unique names, they will overwrite previous recipes with that name.

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

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Version 3 69

5.4.2.6. Save a Recipe

Save a recipe by pressing Save and identifying the save location. Success ful save indicated by “Data r ecor d saved” in Status bar (Figure 42).

5.4.2.7. Delete a Recipe

Delete a recipe by highlighting in the Recipe Name area and pressing Delete. A pop up confirmation window will appear asking: “Do you really want to delete RECIPE NAME in Recipe Pro f ile? Ye s or No .”

Press Yes. Successful delet ion ind icat ed b y “Dat a r ecor d deleted” in Status bar (Figure 42).

5.4.3. Recipes and the PLC

The current recipe runn ing on the U ltraF le x furnac e can be up loaded for editing (press Upload From PLC). Recipes that have been edited can be loaded for use on the Ult raF lex furnace by pressing Download

to PLC

downloading to PLC.

. Watch for “Transfer Completed” in t he stat us bar after

Recipes downloaded to the PLC begin running immediately.

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Any recipes being viewed when uploading from the PLC will be lost unless they have been saved.

5.4.4. Help with Recipes

Press Parameter Descriptions for a pop up screen that provides more infor mation about recipe parameters (Figure

22).

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 45. Alarms Screen.

70 Version 3

5.5. Working with Alarms

The Alarms screen displays active (unacknowledged) simple and complex alarms. Simple a larms include those generated by the HMI. Items are examined once per second for whether they are simple alarms and s imp le a larms have a t en-seco nd de la y. Examples of simple alarms include t he co nveyor runn ing too slowly or a temperature excurs ion. Compl ex alarms are generated b y the PLC. Complex alarms have no delay and have no changea ble li mits. Examples of comple x alarms in clude s afety inter locks, hig h limits a nd drive faults.

5.5.1. Acknowledge Alarms

Acknowledge alarms by pressing Acknowledge from the Alarms scree n (Figure 45) or from t he pop-up window that appears when a new alarm is generated. Ackno wledging an alarm:

• Silences the alar m horn

• Ensures no future alarms will be generated, un less so me other parameters is

exceeded

• Acknowledging a VFD alarm sends the “Fault Reset” command to the VFD

• Acknowledging a High Limit a larm sends the “Reset Limit” command to the

RUI.

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 46. Alarms Events Screen.

Figure 47. Alarm History Screen.

Version 3 71

5.5.2. Info

Select the desired alarm and pr ess Info for more detailed information about the alarm.

5.5.3. Events

Press Events for a list of non-tool related messages (Figure 46).

5.5.4. Alarm History

Press Alarm Hist ory to display the Alarm Histo ry Screen (Figure 47). T he lege nd on the right of the screen explains the co r r espondence between color and kind of alar m.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Warning!

Figure 48. Audit History Screen.

72 Version 3

5.5.5. Audit History

Press Audit History to display the Audit History Screen (Figure 47). Move around the audit history screen using the na vigation buttons on the right sid e of the screen (Figure

48).

5.6. Working with Setup

The UltraFlex Drying and Firing furnace keeps an audit trail

O

which requires that every change be logged in by a user with a val id user name.

Oxidizer airflow setpoints affect the ability of the dryer to draw out VOCs. Do not tam pe r with oxidizer airflow setpoints without consulting Despatch.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 49. User Administration Screen.

Version 3 73

5.6.1. User Administration

Adding a user or changing user privileges requires use of the user administration functions (Figure 49). Adding or changing functions includes user names, passwords, user group identification and specifying a logoff time. See Section 4.2.2 for steps to adding a user or changing us er privileges.

5.6.1.1. Export and Import

The Export and Import featur es ar e intended for copying user information from one UltraFlex furnace for use on another. This list is not editable. Exporting and importing both make use of the USB memory stick placed in the USB port (Figure 39) in t he fro nt o f the UltraFlex Furnace.

Press Export to send a user information file to the USB memory stick this default location:

\Storage Card US B2\UserAdminExport\useradmin.txt

Press Import to retrieve a user information file from the USB memory stick. The Import command looks for the user information at this location:

\Storage Card US B2\UserAdminExport\useradmin.txt

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 50. User Administration Hel p Screen.

Figure 51. Tool Calibration Screen.

74 Version 3

5.6.1.2. Help

Press Help for a lis ting of available access levels and instructions for adding a user (Figure 50).

5.6.2. Tool Calibration

Press Calibration to display the Tool Calibration screen (Figure 51).

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 52. Press the Despatch Logo to Create a Screen Shot on the USB stick.

Version 3 75

5.6.2.1. Import and Export

The I mport and Export features ar e intended for r esto r ing original settings or copying in new settings sent from the factory. The settings are not editable. Import and Export both make use of the USB memory stick placed in the USB port (Figure 39) to t he side of the HMI/operato r interface.

Press Import to retrieve calibrat ion settings from the US B memory stick. The Import command looks for the user information at this location:

\Storage Card US B2\

Press Export to send calibration settings to the USB memory stick this default location:

\Storage Card US B2\

The maximum capacity for the USB memory s tick placed in the

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USB port is 4 gigabytes.

5.6.3. Creating an UltraFlex Furnace Screen Shot

Create a screenshot of the curr ent ly displayed w in d ow by inse r t ing a USB stick into the front U SB port (Figure 39). Press the screen (Figure 52). A bitmap (bmp) image of the screen is placed on the USB drive. Copy mult iple ima ges b y clic king t he logo again. Each image is labeled “CAPT001.bmp,” “CAPT002.bmp,” and so on.

Despatch Industries lo go at the top left of the

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

Warning!

Access to Chamber Lift is available only in Maintenance Mode.

Figure 53. Conveyor Chamber Lift Verify Screen.

76 Version 3

5.7. Working with Maintenance Mode

5.7.1.1. Chamber Lift

Press and ho ld Chamber Lift to lower the chamber for maintenance procedu r es (Figure

53).

Warn personnel before openi ng or closin g the furnace chamber. The chamber lift may be actuated only when outside doors are in place. Defeating the ou t sid e door switch sen sor s may result in damage to equipment and/or harm to p erson nel.

The chamber casing may only be opened w hen t he temperature

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is below 300° C. If above 300° C, follow user prompts for Quick Cooldown mode.

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UltraFlex Drying and Firing Furnace Owner’s Manual OPERATION

Figure 54. Display Screen.

Version 3 77

5.7.1.2. Display

Click Display from the Maintenance screen to calibr ate or clean the screen (Figure 54). Follow on-screen directions.

When calibrat ing the U ltraF lex furnace touch screen, carefully

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press the center of each calibration crosshair from perpend icu lar to the screen. Use a pencil eraser or stylus for best results.

5.7.1.3. Status

Click Status fo r a n all -inclusive display setpoints, values and output. The Status screen allows for at-a-glance troubleshooting (Figure 55).

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OPERATION UltraFlex Drying and Firing Furnace Owner’s Manual

78 Version 3

Figure 55. Status Screen for Troubleshooting.

5.7.1.4. Exit

Press Exit to close down the UltraFlex furnace software. Exit is available only to process engineers (or via remote access to Despatch employees).

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means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Item

Daily

Weekly

Monthly

Every 3-6 months

Annually

As Needed

General Preven tive M ain t enan ce

Inspect Alarm and Event logs

Visually inspect

pressure

Check key parameters

Check E-stop operator (2.5.1)

X Inspect elect ri c al cabinets

X

Test high limit heater controls

X

Clean broken and/or furnace

Clean dust from Conveyor shafts

Clean debris from Source

Control Systems

TouchScreen

Clean (6.1.1)

Panels

Clean (6.1.2)

Chamber Seals

Inspect (6.1.3)

Conveyor Systems

Conveyor

Clean (6.2.4.2)

Inspect (6.2.4.1)

Replace

Bearings

Inspect (6.2.1)

Drive Roller

Inspect & (6.2.2)

Encoder

Inspect & (6.2.3)

Motors

Inspect &

Version 3 79

6. Preventive Maintenance

X

gauges for water flow and air

process

wafers from dryer

Automation Li ght

X

X X X

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Maintain

Clean

Maintain (

6.2.5)

PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Item

Daily

Weekly

Monthly

Every 3-6 months

Annually

As Needed

Conveyor Guides

Inspect (6.2.6)

Quartz Rods

Clean (6.2.7.2)

Inspect (6.2.7.1)

Conveyor Take Up

Inspect (6.2.8)

Chamber Systems

Heater Lamps

Inspect (6.3.1.1)

Replace (6.3.1.2)

Thermocouples

Replace (6.3.2)

Insulation

Inspect (6.3.3)

Dryer Casing

Clean (6.3.4)

Protective Glass

Inspect

Cooling Systems

Coils

Inspect (6.4.1)

Water Filter

Inspect (0)

Replace

Process Plumbing Assy

Inspect (6.2.9)

Exhaust Systems

Duct Hoses

Inspect (6.5.1)

Exhaust Flow Balance Plate

Inspect (6.5.3)

VOC

(6.5.5)

Lift Systems

Lift chains

Inspect (6.6.1)

Maintain (6.6.2)

Pneumatic cylinders

Inspect (6.6.1)

Optical Sensors, slides and guides

Inspect (6.6.1)

80 Version 3

Layer

every 2 weeks

6.3.5)

(

(0)

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UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Figure 56. Listen for Sounds of Bearing Failure

every Th ree Months.

Version 3 81

6.1. Control Systems Maintenance

6.1.1. Touch Screen Maintenance and Calibration

• The UltraF lex furnace touchscreen is designed for maintenance-free operation.

• Clean the screen as needed with a soft cotton cloth and commercia l clea ner.

• If the touchscreen seems distort ed, exhibit s par allax or is difficult to read, consult the

Sie mens S imat ic HMI Device manu al includ e d wit h the t ool documenta tion.

6.1.2. Panels

Clean t he UltraFlex furnace panels every six months or as needed.

6.1.3. Chamber Seals

Inspect the chamber seal for cuts every three to six months. Replace as necessary.

6.2. Conveyor Systems Maintenance

6.2.1. Bearings

Inspect bearings on each s haft every three months. Listen for whistling or grinding sounds and r eplace bearings as neces sary (Figure 56).

6.2.2. Drive Roller

Inspect the drive roller cha in every three months and lubricate as necessary.

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PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 57. Inspect and Clean Encoder Weekly.

82 Version 3

6.2.3. Encoder

Each conveyor mot ion det ecto r (encoder ) d etect s each tooth of a 15 tooth sprocket as it passes the sensor . The UltraFlex contains two encoder s, o ne for the furnace con veyor and one for t he dryer conveyo r. If an objec t jams the co nveyor, the sens or signals a “B elt Motion Alarm” and provides “Conveyor Fail Interlock ” output, which de-energizes the co nveyor F ail Inte rlo c k Re la y and heat.

6.2.3.1. Inspect & Clean

Inspect the encoder week ly for dust (Figure 57). Clean using a soft cotto n cloth.

6.2.4. Conveyor

6.2.4.1. Inspect

• Inspect for slippage, tracking and wear monthly.

• Inspect flanged rollers for wear and positioning.

• Inspect toothed rollers daily for wear and to ensure be lt is in the correct po sit ion, t hat

is, centered.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Caution!

Version 3 83

6.2.4.2. Clean

Clean the conveyor weekl y using the U ltrasonic Belt Cleaner (if available).

6.2.5. Motors

Inspect the drive motor chains every three months and lubricate as necessary.

6.2.6. Conveyor Guides

Annu a l ly in spect the Teflon guides by the conveyor for grooves cut by the conveyor. Replace Teflon guides as necessary.

6.2.7. Quartz Rods

Never touch a quartz rod with a bare hand . Cont act between a quartz rod and a bare hand substantially reduces the life of the rod. Always use powder-free nitryl or latex gloves when handling the quartz rods.

6.2.7.1. Inspect

Inspect quartz rods every three months for signs of we a r and s quaring off of the rounded surfaces. Replace as necessary.

6.2.7.2. Clean

Clean the quartz ro ds weekly. Dust o r other materials on the quartz rods may affect temperatures.

1. Open eac h ove n cla mshell.

2. Wearing powder-free nitryl or latex gloves, remove each quartz rod and clean wit h

alcohol.

3. Vacuum the lower Dryer and Furnace oven trays.

4. Inspect insulat ion and repair as necessary.

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PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Conveyor

Figure 59. Inspect Plumbing for Leaks every Six

84 Version 3

6.2.8. Conveyor Take-up

Chec k monthly that t he swing arm moves fr ee ly. Annually inspect the conveyor t ak e-up for ease o f moveme nt (Figure

58).

• Review position of

co nveyor take-up to see if the belt has stretched

• Ensur e the c onveyor take-

up arm is as hig h as possible, otherwise proximity switch will alarm

• Take out links as necessary

• Check pressure on pneumatic cylinder is within range (2-4 psi)

Take-up

Arm

Figure 58. Inspect Conveyor Take-up for Ease of Movement.

6.2.9. Process Plumbing Assembly

Inspect process plumbing every six months for signs of leakage (Figure 59). Repair/replace as neces sary.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

Months.

UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Warning!

Caution!

Figure 60. La mp Box Covers Re moved.

Version 3 85

6.3. Chamber Systems

6.3.1. Heater Lamps

Wait until the furnace h as cooled b efore opening side doors to replace heater l amps.

Never touch a heater lamp with a bare hand. Contact between a heater lamp and a bare hand substantially redu ces the life of the heater lamp. Always use powder-free nitryl or latex gloves when handling heater lamps.

6.3.1.1. Inspect

Inspect IR lamps before starting the UltraFlex Furnace. Lamp inspection involves using the Maintenance Mode:

1. From

2. From

Maintenance Mode (3.1.8), press Chamber Lift to lower the chamber (5.7). Maintenance Mode, manually set heat zones to 15-25% using drop down menu s .

3. Visually verify that the lamps in each zone are illuminated.

4. Reset setpoints to zero after verifying lamps are functioning and noting those that are

non-functional.

5. Allow the UltraFlex Fur nace t o coo l and rep lace lamps as needed ( 6.3.1.2).

6. After inspecting, verifying and replacing non-functional lamps, close the chamber.

6.3.1.2. Replace

1. After furnace h as cooled to a safe

temperature, open side doors.

2. Remove lamp box covers from

both sides of the zone requiring lamp replacement (Figure 60).

3. Remove Wago blocks from both

sides and then remove the lamp.

4. Using gloves, slide the rep lacement

bulb into posit ion.

5. Verify t hat t he orange seal (on bot h ends of the bul b) was not damaged during

installation.

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PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Figure 61. Attach Wago block.

Figure 62. Replace Thermocouple.

86 Version 3

6. Connect the wires toget her and reattach Wago blocks (Figure 61).

7. Re-ins tall lamp box co vers and the side doors.

8. Verify that the la mp functions (6.3.1.1).

6.3.2. Thermocouples

No inspection is needed for t her mocouples, but replace as indicated by a failure alarm (“Thermocouple Open”).

1. After furnace has cooled to a safe temperature, open the side

doors.

2. Identify thermoco u ple to be replaced (Figure 62).

3. Remove thermocouple requiring replacement

3.1. Un s crew compressio n fitting top nu t.

3.2. Ge ntly remo ve Thermocouple from top.

3.3. Inspect hole for insulation damage and repair if needed

3.4. Slide new compress ion ring and nut on Thermocouple and slide

into place.

4. Tigh ten c ompre ssion fittin g.

5. Close side doors.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Caution!

Insulation “T” piece above conveyor belt

Screws that retain insul ation “T” pieces.

Figure 63. Replace Insulation "T" Piece.

Version 3 87

6.3.3. Insulation

V isual l y i nspect insulation in upper and lower cha mbers of the dryer and furnace for breaks and cracks.

Avoid touching the insulation unless necessary for the procedure.

Unlike the Despatch CDF Furnace, the U ltraFlex Furnace

O

Clean and replace as necessar y.

1. Remove the lamp box covers to g ain access to screw ho lding t he w hite insulation “T”

piece in place (Figure 63).

2. Remove screw and insulation “T” piece.

3. Replace insulation “T” piece as necessary.

insulation does not require patching. Individual pieces of insulation must be rep laced in their e nt irety.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Caution!

88 Version 3

6.3.4. Dryer Casing

Frequently wipe the dust and/or VO C contamin ant s off the dryer casing with a soft cotton cloth and iso p r o p yl alc o hol.

6.3.5. Protective Glass Layer

Inspect every other week. Clean as necessary.

6.4. Cooling/Ventilation Systems

Do not blow air through cooling coils. Flow meter failure will result.

6.4.1. Coils

Inspect coil for leaks every six months. Flus h the c oils onl y once: when the faci lity i s fir s t starting. Coils should not be flus hed ag ain.

6.5. Exhaust Systems

6.5.1. Duct Hoses (3” & 4”)

• Inspect monthly for breakage. No maintena nce required.

• Inspect every six months for leaks, holes and burnt b i nder build-up

6.5.2. Exhaust Venturi Port

No physical inspect ion requ ired. Watch for failure alarms on-screen.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Warning!

Restrictor

Figure 64. Restrictor Plate.

Version 3 89

Cool furnace before servicing exhaust venturi port.

6.5.3. Exhaust Flow Restrictor Plate

Inspect t he restrictor plates monthly (Figure 64). Remove exhaust housing to access the restrictor plate (Figure 65). Clean or replace as necessary.

Plate

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Remove exhaust housing to access restrictor plate.

Figure 65. Remove exhaust housing to access restrictor plate.

90 Version 3

––

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UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Figure 66. Inspect Water Filter Monthly and

Warning!

Version 3 91

6.5.4. Water Filter

Insp ec t mo nt h l y for crack s in “O” r ings and that to ensure the element is not clogged . Use the actuator valve on to p of the filter to b ypass the filter. Replace as necessary (Figure 66).

Replace Filter as Necessar y.

6.5.5. VOC

6.6. Lift Systems

Warning!

Do not perform preventive maintenance functions on the VOC Thermal Oxidizer while operationa l. Operating temperatures for the VOC Thermal Oxidizer make it dangerou s for personnel.

Lift systems are serviced only by Despatch personnel.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Warning! Caution!

Access to Chamber Lift is available only in Maintenance Mode.

92 Version 3

Warn personnel before openi ng or closin g the furnace chamber. The chambe r lif t should be actua t e d o nly when outside doors are closed (depending on access level).

Defeating the outside door switch sensors may result in d amage to equipment and/or harm to personnel.

The chamber casing may only be opened w hen t he temperature

O

is below 300° C. If above 300° C, follow user prompts for Rapid Cooling/Cooldown mo de.

6.6.1. Inspect

• Inspect lift chains for wear and abrasion eve ry s i x months.

• Inspect pneumatic cylinders monthly.

• Inspec t optical se ns ors, slides and guides annually.

6.6.2. Clean & Maintain

• Clea n a nd lubricat e lift c hains annually and as need ed.

• Wip e d ust from th e optic al sensors with a soft clot h.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Access to Chamber Lift is available only in Maintenance Mode.

Version 3 93

6.6.3. Chamber Lift Troubleshooting

The chamber casing may only be opened w hen t he temperature

O

6.6.3.1. Chamber Does Not Lift

1. Check for obstructions.

2. Check whether electrical controls are powered.

3. Check that air pressure is supplied and co r rect.

6.6.3.2. Chamber Lifts But Does Not Close or Does Not Close Completely

1. Check for obstructions.

2. Check that air pressure is correct .

is below 300° C. If above 300° C, follow user prompts for Quick Cooldown mode.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

Contaminated A r ea

Uncontaminat ed A r ea

Figure 67. Contaminated Dryer Zone Before (left) and After (right) Insulation Burn-off procedure.

94 Version 3

6.7. Insulation Burn-off

Over time, furnace insulation and exhaust boxes can become contaminated with excessive paste r esidue/solvent (Volatile Orga nic Co mpounds or VOCs) due to the drying process (Figure 67). Co ntamin ation often occurs in the dr yer and dryer exhaust s. Many variables ( like paste make-up and throughput) play a factor in the degree of bui ldup. Mo nthly ( and ot he r int erva l s a s need ed) preventive m aint ena nc e ca n help decrease conta minat e buildup.

Despatch has developed t wo insulation burn-off profile s :

• Burn-off Pr ofile 1 (Recip e Name: Burnoff(1)): This long-dur ation, slow-ramp process

that can be used for tools with heavier bu ildups of condensate.

• Burn-off Pr ofile 2 (Recip e Name: Burnoff(2)): This shorter-duration process is

intended for u se on a regular basis, where condensat e bu ildup is minimal.

Both profiles can be added to the operating so ftwar e in the mainten ance portion of the program and use the settings lis ted below .

Note: Burn-off procedures—especially those with long-duration cycle—can increase temperatures within facility ductw ork to a level where condensed solven t wi thin the du ctwork may react. Clean facilit y ductwork in advance of the burn-off cycle to prevent problems.

O

Despatch recommends removal of the stack section directly above the dryer and furnace exhaust to provide additional excess air in the remaind er of the f acil ity exhaust ductwork.

Despatch cannot be li abl e for damag e to facili t y ductw ork that may be due to excessive temperatures in t he ductwork during the burn-off cycle.

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UltraFlex Drying and Firing Furnace Owner’s Manual PREVENTIVE MAINTENANCE

Dryer

Furnace

Zone

1 2 3

4

(Opt)

1 2 3 4 5

6

Recipe

Temp

450

500

550

600

650

700

750

800

Burnoff (1)

Ramp Rate

10 degrees C per minute

20 degrees C per minute

Burnoff (2)

Ramp Rate

20 degrees C per minute

40 degrees C per minute

Belt Speed

75 in./min

Version 3 95

6.7.1. Procedure for Insulation Burnoff

The operator must remain near the tool during the burnoff

O

1. Remove a section of stack above t he dryer exhaust po ints to allow a gap of at least 6

inches (15 cm).

2. Inspect facility ductwork prior to running Burnoff procedure. If ductwork is

contaminated it should be cleaned and/or replaced prior to running procedure.

3. Inspect dryer and dryer exhaust ductwork for contamination. Any significant buildup

in the ductwork shou ld be removed prior to running the procedure. If the dryer is badly contaminated the “recovery procedure” should be used.

4. Note ramp rate sett ings so you can return to these values after this procedur e.

5. Load recipe (Table 6) from a cold start or when the tool is in a warmed-up state.

process.

Adjust each zone’s ramp rate in the PID Loop Tuning and

O

Table 6. Burnoff Recipe Settings.

6. Run the chosen recipe for 45 minutes after the machine has reac hed 550 degr ees C in

the final dryer zone.

7. After one hour at the highest t emperat ur e allow t he mac hine to cool and o pen t he

chamber for inspection and cleaning of any internal debris.

8. After completing the initial burn-off, remove and insp ect venturi tubes in the exhaust.

9. Return the ramp rate sett ings to the ir or iginal state and load production rec ipe.

Control Screen to ensure the proper slow temperature in crease.

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PREVENTIVE MAINTENANCE UltraFlex Drying and Firing Furnace Owner’s Manual

96 Version 3

6.7.2. Recommendations for Reducing Paste Contamination

1. Operate the dryer at as high of a temperatur e as t he process will allow. At today’s

high belt speeds, VOC’s are dr ive n o ff later in the dryer, leaving less time for them to be d ilute d with fresh a ir and s wept out of t he dryer through the exhaust system.

2. Operate the dryer with as much dilution air as possible. The dr yer must rece ive a

minimum of 600 SCFH (17,000 LPH). The more dilution air introduced into the dryer, the more VOCs will be swept out, keeping the dryer cavity cleaner longer.

3. Set the exhaust venturis (on the entrance and exit exhausts) to match the d ilution air

volume introd uced to the dryer). The dryer chamber sho uld be operated at a pressure slightly negat ive to t he room (to pr event past e o dors from escaping).

4. Please contact your Despatch Service Representative if you require assistance

conducting these pro cedu r es.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any

means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual Appendices Version 3 97

7. Appendices

7.1. Using UltraFlex Furnace Data Files: Data & Diagnostic Logs

The U ltraF lex furnace produces dat a files from a variety of inputs within the tool. These data files can serve as s napsho ts of the particular pro cess and pro files used. T he dat a files are organized into t wo separ at e files: Dat a Logs and Diagnostic Logs.

• Data Logs include data points such as temperatures, airflow quantities and

setpoints.

• Diagnostic Logs include data points such as line voltage and amperage.

Data and diagnost ic logs are produced on a first in first out format. Data and diagnostic logs are regularly overwr itten (every two weeks to every month) unless exported or saved to external USB stor ag e using the Trend ing Screen. (See Section 5.1.3).

Export data and diagnostic logs only during non-production

O

times. Exporting logs while the tool is running in Production Mode may introduce scr ipt errors into the transferred logs.

Contact Despat ch for more infor mation on viewing dat a and diagnost ic logs.

7.2. UltraFlex Furnace Alarms

The default actions for each t ype of ala rm:

• All Conveyors:

o High Alarm Deviation: No Action o High Process Alarm: No Action o Low Process Alarm: No Action o Low Alarm Deviation: Enter Cooldown Mode

• All Airflows:

o High Alarm Deviation: No Action o High Process Alarm: No Action o Low Process Alarm: No Action o Low Alarm Deviation: Enter Cooldown Mode

• All Heat:

o High Alarm Deviation: Enter Cooldown Mode o High Process Alarm: No Action o Low Process Alarm: No Action o Lo w A larm De viation: No Action

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Appendices UltraFlex Drying and Firing Furnace Owner’s Manual

Caution!

98 Version 3

7.3. Ultrasonic Belt Cleaner

When so equipped, the u ltrasonic belt cleaner can be used to remove unwanted compounds from the furnace co nve yor belt. T he cleaner submerges the belt in ultrasonic energized de-ionized water. All functions of belt c leaning are software-controlled, and can be run only during Maintenance mode. In gener al, fol low on-screen prompts for operating the ultr aso n ic belt cleaner.

Operation of the ultrasonic transducer without adequate water may damage unit.

All rig hts reserved. No part of th e contents of th is m anual may b e r ep roduced, copied or t r ans mi t t ed i n any for m or b y any means including graphic, electronic, or mechanical methods or photocopying, recording, or information storage and retrieval systems without the written permission of Despatch Industries , unless for purchaser's personal use.

UltraFlex Drying and Firing Furnace Owner’s Manual APPENDICES Version 3 99

3rdDraft—

Despatch

GLOBAL HEADQUARTERS

Despatch Industries 8860 207th Street West Minneapolis, MN 55044 USA

US toll free: 1-888-337-7282 international/main: 1-952-469-5424 fax: 1-952-469-4513

info@despatch.com www.despatch.com

INDUSTRIES

SERVICE AND TECHNICAL SUPPORT

service parts: 1-800-473-7373 international service/main: 1-952-469-8230 service fax: 1-952-469-8193

service@despatch.com

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Despatch C-229 Installation Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

1. About This Manual

1.1. Important User Information

1.2. Manufacturer

1.3. Organization of this Manual

1.4. Conventions Used in this Manual

1.5. Acronym Identifier

2. Safety

2.1. Safety Information

2.1.1. Lockout

2.1.1.1. Lockout Requirements

2.1.1.2. Lockout Procedure

2.1.2. Doors and Covers

2.2. Maintenance

2.3. Electrical Power

2.4. Fire

2.5. Equipment Lockout Requirements

2.5.1. Emergency Stop

3. Theory of Operation

3.1. UltraFlex Drying and Firing Furnace Machine States

3.1.1. Power Off

3.1.2. Initialization Mode

3.1.3. Idle Mode

3.1.4. Loading Recipe Mode

3.1.5. Stabilization Mode

3.1.6. Production Mode

3.1.7. Cooldown Mode

3.1.7.1. Quick Cooldown Mode

3.1.8. Maintenance Mode

3.2. Optimized Recipes and Thermal Profiling

3.2.1. Thermal Profiling Process

3.3. UltraFlex Dryer

3.3.1. Overview

3.3.2. Transport System

3.3.3. Heating System

3.3.4. Process Gas System

3.3.5. Oxidizer Airflow Settings

3.4. Wafer Throu g hp ut

3.5. VOC Thermal Oxidizer

3.6. Chamber Lift Mechanism

4. Software & Hardware Setup

4.1. Operation Overview

4.2. Managing Users

4.2.1. Security Levels

4.2.2. Adding a User or Changing User Privileges

4.3. Recipe Setup and Optimization

4.3.1. UltraFlex Furnace Setpoint Ranges

4.3.2. Optimize Recipe Process with Example

4.4. Dryer/Firing Furnace Airflow Setup

4.4.1. Dryer Airflow Setup

5. Operation

5.1. Routine Operati on

5.1.1. Overview

5.1.1.1. Using the UltraFlex Furnace Touch Screen I nterface

5.1.1.2. Using On-Screen Controls

5.1.1.3. Process Overview

5.1.1.4. Furnace Status

5.1.1.5. Navigation Bar

5.1.1.6. UltraFlex Dry in g and Fi r ing Fur n ac e Modes

5.1.2. Navigating the Home Screen

5.1.3. Trending Screen

5.1.4. Recipe Screen

5.1.5. Alarm Screen

5.1.6. Setup Screen

5.1.7. Maintenance Screen

5.2. Startup and Run the UltraFlex Drying and Firing Furnace

5.2.1. Starting from Idle Mode

5.2.2. Stopping from Production Mode

5.2.3. Entering Maintenance Mode from Idle Mode

5.2.4. Entering Maintenance Mode fro m Production or Cooldown Mode

5.3. Working wit h Trendin g

5.3.1. Working with Hourly Performance

5.3.2. Conveyor

5.3.3. Heat

5.3.4. Airflow

5.3.5. Cooling

5.3.6. Data