Bissell HS-20 User Manual

HS-20
Diffusion Pump

Instruction Manual

Varian Vacuum Technologies

121 Hartwell Avenue

Lexington, MA 02421

[phone]

Manual No. 6999-01-120
Revision G
October 2000

America

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421,
USA
Tel: [phone]
Fax: [phone]
Toll Free: 1 [phone]

Argentina

Varian Argentina Ltd.

Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: [phone]
Fax: [phone]

Australia

Varian Australia Pty., Ltd.

6/81 Frenchs Forest Road
Frenchs Forest, NSW 2086
Australia
Tel: [phone]
Fax: [phone]

Brazil

Varian Industria e Comercio Ltda.

Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: [phone]
Fax: [phone]

Canada

Varian Canada

6705 Millcreek Drive, Unit 5
Mississauga, Ontario L5N 5R9
Canada
Tel: [phone]
Fax: [phone]

China

Varian China Ltd.

Room 1201, Jinyu Mansion
No. 129A Xuanwumen Xidajie
Xicheng District
Beijing 100031
P.R. China
Tel: [phone]
Fax: [phone]

Varian Shanghai

Service Station

716 Yishan Road Shanghai

P.R. China 200233
Tel: [phone]
Fax: [phone]

England

Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: [phone]
Fax: [phone]

France

Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: [phone]
Fax: [phone]

Germany

Varian GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64229 Darmstadt
Germany
Tel: [phone]
Fax: [phone]

Hong Kong

Varian Technologies Asia, Ltd.

Rm 2611 Concordia Plaza
New Mandarin Plaza
1 Science Museum Rd.,
Tsimshatsui East, Kowloon
Hong Kong
Tel: [phone]
Fax: [phone]

India

Varian India PVT LTD

1010 Compotent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: [phone]
Fax: [phone]

Italy

Varian Vacuum Technologies

via Flli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

Japan

Varian Vacuum Technologies

Sumitomo Shibaura
Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: [phone]
Fax: [phone]

Korea

Varian Technologies Korea, Ltd

Shinsa 2nd Bldg. 2F
966-5 Daechi Dong
Kangnam Gu, Seoul
Korea 135-280
Tel: [phone]
Fax: [phone]

Netherlands

Varian Vacuum Technologies

Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: [phone]
Fax: [phone]

Mexico

Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: [phone]
Fax: [phone]

Singapore

Varian Asia, Ltd.

1123 Serangoon Road
#03-02
Singapore 328207
Tel: [phone]
Fax: [phone]

Spain

Varian Iberica

Avda Pedro Diez 25

28019 Madrid
Spain
Tel: [phone]
Fax: [phone]

Russia

Varian Moscow

19A Khlebny per
121019 Moscow
Russia
Tel: [phone]
Fax: [phone]

Taiwan

Varian Technologies Asia Ltd.,
Taiwan Branch

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan
Tel: [phone]
Fax: [phone]

Internet Users:

Visit us on the web at:
www.eVarian.com

Representatives in most countries

Sales and Service Offices

Telephone Numbers

For technical support and service within the continental United States, Alaska and Hawaii:

Continental U.S. only – 1-800-8-VARIAN (1-800-882-7426)

Order Entry (Sales) ..............................................................................Press 1

Technical Support and Field Service....................................................Press 2

Training (Information and Registration) .........................................Press 3 or 4

Hawaii and Alaska – [phone]

Sales, Service and Product Support ....................................................Press 1

For other departments..........................................................................Press 3

FAX Numbers

Order Entry (Sales) ..........................................................FAX [phone]

Technical Support.............................................................

FAX [phone]

Field Service ....................................................................

FAX [phone]

Training (Information and Registration) ............................

FAX [phone]

Copyright ©by Varian, Inc. All rights reserved.

This manual may not, in whole or in part, be copied, photocopied. reproduced, translated, or converted to any electronic or

machine-readable form without prior written consent of Varian Vacuum Technologies, Lexington, MA 02421-3133

3/5/97

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for
twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war­ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an equitable
portion of the purchase price of the Product. Items expendable in normal use are not covered by this
warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions
which, in the sole opinion of Seller, are due or traceable to defects in original materials or workman­ship. All obligations of Seller under this warranty shall cease in the event of abuse, accident, alter­ation, misuse, or neglect of the equipment. In-warranty repaired or replacement parts are warranted
only for the remaining unexpired portion of the original warranty period applicable to the repaired or
replaced parts. After expiration of the applicable warranty period, Customer shall be charged at the
then current prices for parts, labor, and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation
of law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise
thereto, and must be received within the applicable warranty period by Seller or its authorized repre­sentative. Such claims should include the Product serial number, the date of shipment, and a full
description of the circumstances giving rise to the claim. Before any Products are returned for repair
and/or adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means
of transportation. When any Product is returned for examination and inspection, or for any other rea­son, Customer shall be responsible for all damage resulting from improper packing or handling, and
for loss in transit, notwithstanding any defect or non-conformity in the Product, in all cases, Seller has
the sole responsibility for determining the cause and nature of failure, and Seller’s determination with
regard thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer
will be notified and the Product returned at its expense; in addition, a charge for testing and examina­tion may be made on Products so returned.

i

OPERATION AND MAINTENANCE OF THIS EQUIPMENT INVOLVES SERIOUS RISK. IT IS THE
RESPONSIBILITY OF THE USER TO MAINTAIN SAFE OPERATING CONDITIONS AT ALL TIMES.
VARIAN ASSUMES NO LIABILITY FOR PERSONAL INJURY OR DAMAGE RESULTING FROM
OPERATION OR SERVICE OF THE EQUIPMENT.

Carelessly or improperly operated equipment can cause serious injury or death and/or damage to the
equipment. The emergency and safety procedures in this manual are provided to help users and
qualified persons to operate and service the unit safely. Recommendations are believed to reflect
accepted industry practices in effect on the date of publication of this manual. Special applications
must be reviewed and approved by an industrial hygienist or chemical safety engineer.

Varian has no control over the use of this equipment and is not responsible for personal injury or
damage resulting from its use. The safe use and disposal of hazardous or potentially hazardous
materials of any kind is the sole responsibility of the user. Observe all WARNINGS and CAUTIONS to
minimize the serious hazards involved.

It is the sole responsibility of users of Varian equipment to comply with all local, state, and federal safe­ty requirements (laws and regulations) applicable to their system. Employ the services of an industrial
hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and use.

This instruction manual contains information which will assist qualified operators in the operation, and
qualified service engineers to carry out field-servicing the Varian equipment.

ii

SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE
RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH
REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY
FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND
MAINTENANCE INSTRUCTION MANUAL. SAFE OPERATION IS THE RESPONSIBILITY OF THE
USING ORGANIZATION AND ITS PERSONNEL. READ THE INSTRUCTION MANUAL AND
UNDERSTAND HOW TO AVOID HAZARDS PRIOR TO OPERATING THE DIFFUSION PUMP. ALL
PERSONS WHO WORK WITH OR ARE EXPOSED TO DIFFUSION PUMPS OR EQUIPMENT
WHICH UTILIZES SUCH PUMPS OR DIFFUSION PUMP FLUID MUST TAKE PRECAUTIONS TO
PROTECT THEMSELVES AGAINST POSSIBLE SERIOUS BODILY INJURY OR DEATH. DO NOT
BE CARELESS AROUND SUCH PRODUCTS.

THESE SHEETS AND THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTIONS
CAN HELP YOU TO OPERATE THIS PUMP SAFELY AND EFFICIENTLY. READ THEM. SPECIAL
OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION
INSTRUCTIONS. UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN
POOR PERFORMANCE, DAMAGE TO THE PUMP OR OTHER PROPERTY, SERIOUS BODILY
INJURY, AND POSSIBLE DEATH.

USERS OF THIS EQUIPMENT SHOULD BE ALERT TO TWO LEVELS OF HAZARDS IDENTIFIED
BY THE FOLLOWING SYMBOLS:

Designers of systems which utilize diffusion pumps must design out hazards wherever possible; pro­vide guards, safety features, and interlocks for hazards which cannot be designed out; warn with
respect to hazards which cannot be designed out and which remain after utilizing guards, safety fea­tures, and interlocks; and lastly, provide procedures and instructions on proper use, servicing, etc., so
as to minimize risk.

WARNING

_____________

Warnings are used when failure to observe instructions or precautions
could result in injury or death to humans.

CAUTION

________

Cautions are used when failure to observe instructions could result in
significant damage to equipment and/or facilities.

iii

THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE
OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFE
OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR
SERIOUS HARM TO PERSONNEL.

Hazard Suggested Corrective Action

Loss of utility: water and/or electricity Provide sufficient backup water and power supply as neces-

sary to effect a safe shutdown under worst case conditions.

Overpressure in foreline Provide an interlock to ensure that the power supply to the

pump heater cannot be activated if the foreline pump is not run­ning AND/OR pressure in foreline is above 0.5 Torr (66.5 Pa).

Overtemperature Fit temperature sensors and pump fluid level sensors with

feedback to an interlock on the heater power supply.

Insufficient water flow through the Use water flow sensor and feedback to interlock the heater
maincooling coils power supply.

Water trapped between inlet and Provide vent or pressure relief valves for both quick-cool coil
outlet of quick-cool coil,or liquid and liquid nitrogen trap.
nitrogen trapped between inlet and
outlet of liquid nitrogen trap

Loss of ground integrity Incorporate ground fault interrupt circuit into heater power

supply.

Positive pressure in pumping system Integrate pressure relief valve in vacuum system.

High voltage Prevent personnel contact with high voltages; design and

attach warnings.

Toxicity/Corrosivity Toxic and/or corrosive gases must be vented to a safe loca-

tion, ensuring adequate dilution or scrubbing to safe levels,
taking all action required to meet air quality standards.

Explosion Integrate pressure relief valves in all systems using pumps

10 inches or larger in diameter.
Do not use or recommend the use of hydrocarbon-based
pumping oils.

iv

a. Explosion – Operation of the diffusion pump without prior and continuous evacuation (below 0.5

Torr (66.5 Pa)) or coolant and introducing a strong oxidizer (such as air) or explosive vapors or
powders or materials which may react with pumping fluids into a hot (above 300°F or 150°C)
pump can cause an explosion. Such an explosion can violently expel valves and other hardware,
slam open doors that are not designed for appropriate pressure relief, or burst other components
of the vacuum system. Serious injury or death may result from expelled parts, doors, shrapnel,
and/or shock waves.

b. All diffusion pumps are typically cleaned with acetone and alcohol. When combined with air, oxy-

gen, and other oxiders, alcohol and most other solvents are very flammable and explosive. Never
permit any trace of these cleaners to remain in or on the pump. Always remove all traces of alco­hol and acetone and other cleaners with clean, dry, oil-free compressed air.

Three elements are required: fuel, oxidizer, and source of ignition. A combination of temperature and
pressure can be a source of ignition. Most diffusion pump fluids except mercury are fuels. Hydrocarbon
oils are more prone to oxidize and explode than synthetic silicone-based oil. Oxidizer can be air (a
strong oxidizer) from a leak or can be deliberately introduced in a process or can be inadvertently
admitted to the system by operator or process controller error. Oxygen and other strong oxidizers are
even more dangerous. Certain conditions of temperature and pressure can cause a combustible mix­ture to explode. The larger the diffusion pump, the greater the risk of explosion and the greater the risk
of damage and/or injury. Never operate diffusion pumps larger than 10 inches in diameter with hydro­carbon oils without a complete safety analysis for the complete system and application. Never operate
any diffusion pump in the following ways because they increase the probability of an explosion.

Prohibited Action Explosion-Causing Condition

Run pump with no cooling water Overtemperature

Run pump with low level of Overtemperature
pump fluid

Run pump without proper backing or Overpressure
holding pump

Run pump when not evacuated below Overpressure

0.5 Torr (66.5 Pa)

Admit air to, or rough through, Overpressure plus strong oxidizer
a pump with hot boiler

Open drain or fill plug while pump is Overpressure plus strong oxidizer
under vacuum especially when it is hot

Hazard Suggested Corrective Action

v

Contaminate pump with explosive vapors, Lower explosive threshold of gas mixtures
powders, or reactive materials

Remove, defeat, or override safety counter- Overtemperature, overpressure, more
measures such as pressure and thermal combustible mixtures
switches and valve sequencer interlocks

Machine or weld without removing all oil Source of ignition
or solvent residue in pump

Use unsuitable pumping fluid especially Lower explosive threshold of gas mixture
in large pumps

Systems larger than 10 inches must be designed with pressure relief devices to provide safe pres­sure relief from internal explosions. Always recognize that safety devices can fail or malfunction; pro­vide redundant protection by installing devices having different failure modes, failure mechanisms,
and failure causes. Be certain that exhaust duct materials are capable of withstanding the corrosivity,
temperature, and pressure of exhausted products.

c. Pressure – Pumps and their components are designed for vacuum service; they are not designed

to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities.
Serious accidents have been caused by intentional pressurization of vacuum systems and their
components. Never pressurize any part of a vacuum system for test or any other purpose..
Always provide pressure relief when designing diffusion pumps into systems and ensure that pres­sure relief motion is limited to safe envelopes. Never permit the following:

Prohibited Action Result

Block inlet and vent of liquid nitrogen LN2trap and/or lines burst
trap and lines

Close isolation valves at inlet and discharge Water turns to steam and bursts coils
of main watercooling coils and pump is
reheated

Pressurize pump body Body of pump bursts

Hole through vacuum wall Loss of structural integrity of wall

Prohibited Action Explosion-Causing Condition

vi

d. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corro-

sive gas, vapors, or chemicals, even proper operation and regeneration will not always ensure
that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, or
combustible mixtures are pumped, sufficient quantities may exist during operation or remain after
regeneration to cause severe injury or death. Overheating the pump oil, exposing it to air or reac­tive materials, or overpressurizing it above the normal operating range (approximately 1 mTorr
(.133 Pa)) will decompose the oil and possibly make it toxic. This is especially true of back­streamed mechanical pump oils which are more volatile (unstable). Overheating of accidentally
introduced or backstreamed mechanical pump oils cannot be protected against by thermal switch­es which are set for diffusion pump oil.

d. Refer to specific instruction manuals for detailed instructions and precautions. Always vent the

pump and relief valve to a safe location thus ensuring adequate dilution to safe levels, and take all
other action required to meet quality air standards. Always handle pump fluids and hardware with
an awareness of the possible deadly hazards involved and the necessity for great care and atten­tion to safety precautions.

d. Diffusion pumps are typically cleaned with acetone or alcohol. Acetone, alcohol, and most other

solvents are irritants, narcotics, and depressants, and/or carcinogenic. Their inhalation and inges­tion may produce serious effects. Even absorption through the skin can result in moderate toxicity.
Always ensure that cleaning operations are performed in large, well-ventilated rooms. Use of self­contained breathing apparatus may be necessary depending upon the solvent type and vapor
concentration in surrounding air.

e. High Voltage – Diffusion pumps operate at voltages high enough to kill through electrical shock.

Design equipment utilizing these pumps to prevent personnel contact with high voltages. Securely
attach prominent hazard warnings. Personnel should always break the primary circuit to the power
supply when direct access to the heater or wiring is required.

f. Hot Surfaces – Boiler temperatures reach 530°F (275°C) which can cause serious burns when

touched. Always ensure that surfaces have cooled near room temperature before touching them.

g. Hot Coolant and/or Steam – The water used to cool the pump can reach scalding temperatures.

Touching or rupture of the cooling surface can cause serious burns. Water left inside quick cool
coils from previous use will turn to steam when the pump is reheated. This steam must be allowed
to escape without contacting personnel. Whenever possible, design the water system with inter­lock valves so that power cannot be applied to the pump unless water is flowing in the main cool­ing coils (not quick-cooling coils).

h. Cold Surfaces – Liquid nitrogen traps cooled by liquid nitrogen are commonly used in diffusion

pumps. Metal surfaces at liquid nitrogen temperature can cause severe frostbite if contacted by
unprotected skin. These surfaces remain cold for some time (at least a half hour) after the liquid
nitrogen has evaporated.

vii

i. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tis-

sues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of lique­fied nitrogen can cause skin damage similar to high temperature burns. Contact with the cold gas
evolving from the liquid may produce the same effect. Delicate tissues, such as the eye tissues,
are most easily damaged by exposure to cold gas or liquid.To minimize the risk of hazardous con­tact of cold gaseous nitrogen with any part of the body, wear personal safety equipment recom­mended for use with cryogenic materials including face shield, full-sleeved lab coat, and clean, dry
gloves which fit loosely so they can be thrown off quickly if frozen by contact with the gas.

j. Asphyxiation – If a large amount of liquid nitrogen is spilled in a small, poorly ventilated room or

equipment, death from suffocation can result. All diffusion pumps are typically cleaned with ace­tone or alcohol. Acetone, alcohol, and most other solvents are very volatile (unstable). During
cleaning, the volatility of these cleaners may permit their gases to displace air and its life-support­ing oxygen which could cause death or serious injury by asphyxiation. Always ensure that clean­ing operations are performed in large, well-ventilated areas.

j. While still hot, the diffusion pump may also contain decomposed and/or overheated pump oils

which can also be an asphyxiant.

k. Large, Heavy Weights – Diffusion pumps larger than 10 inches in diameter require power-assist-

ed equipment and the use of trained moving/installation personnel in order to avoid dropping, slip­ping, and/or overturning the pump thus severely injuring personnel. Check weight of equipment
before lifting and do not stand under equipment being moved.

WARNING

_____________

High voltages (up to 480 V) can kill. Always break the primary circuit to
the power supply before starting to work on the heater and/or its wiring.

WARNING

_____________

Diffusion pumps are typically cleaned with acetone, alcohol, or other
solvents.

When heated, sprayed or exposed to high temperature equipment,
these solvents become flammable and explosive, causing serious injury
or death. Do Not Use Near A High-Temperature Source. Ventilate
working area with a blower and use in large, well-ventilated room. When
heated or sprayed, acetone also becomes 4 to 5 times heavier than air
and will flow down, settling in tanks, pits, and low areas, thus displacing
air which can kill by asphyxiation. Use in a large, well-ventilated room.
Use of a self-contained breathing apparatus may be necessary.

Acetone, alcohol, and other solvents are irritants, narcotics, depres­sants, and/or carcinogenics. Their inhalation and/or ingestion may pro­duce serious effects. Prolonged or continued contact with the skin will
result in absorption through the skin and moderate toxicity. Always
ensure that cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.

WARNING

_____________

Varian has no control over the types of gases passing through
this pump. These are entirely under the control of the process user
and/or the hardware systems integrator. Frequently, process gases are
toxic, flammable, corrosive, explosive, or otherwise reactive. Since
these gases can cause serious injury or death, it is very important to
plumb the exhaust of the pump to the facility’s hazardous gas exhaust
system which incorporates appropriate filters, scrubbers, etc., to insure
that the exhaust meets all air and water pollution control regulations

WARNING

_____________

Certain gases can become corrosive and toxic when trapped in oil.
Always wear protective gloves when handling dirty pump oil, drain it into
a closable container, and do not breathe the fumes of the oil. Always
use fully self-contained breathing apparatus.

CAUTION

________

Acetone, alcohol, and other solvents degrade O-ring materials reducing
their ability to hold a vacuum. Do not use acetone or other solvents on
O-rings. If necessary to clean O-rings, wipe with lint-free, clean cloth,
wash in detergent and water, or use a small amount of pump oil.

WARNING

_____________

If hazardous gas, vapors, chemicals, or combustible mixtures are
pumped, sufficient quantities may exist during operation. This pump
may contain decomposed and/or overheated pump oils or poisonous
and/or corrosive process materials which are highly toxic and also can
be an asphyxiant. Proper operation will not always ensure that all haz­ardous materials have been removed.

WARNING

_____________

Hot oils can cause serious burns. Wear protective gloves and
long sleeved, loose fitting, heat resistant garments when draining
pump oil.

WARNING

_____________

When lifting some Varian diffusion pumps, use power-assisted equipment
and trained moving/installation personnel to avoid dropping, slipping,
and/or overturning the pump and severely injuring personnel. Check
weight of equipment before lifting and do not stand under equipment
being moved.

NOTE

________

Always dispose of used or dirty oil properly and in compliance with all
local, state, and federal environmental laws and regulations.