Introduction
The Agilent E5260A 8 Slot high
speed measurement mainframe is
completely user-configurable. You
can install up to eight single-slot
modules (such as the MPSMU), up to
four dual-slot modules (such as the
HPSMU), or any physically allowable
combination thereof.
Agilent E5260A
8 Slot High speed Measurement Mainframe
Technical Overview
Basic features
• Performs high-speed, dc parametric
measurements
• Eight slots for plug-in modules
• User interface allows spot measurements to be made from the
front panel
• High-speed ADC present on each
installed SMU
• Ground unit up to 4 A
• BNC trigger-in and trigger-out
connectors
• 16 general-purpose digital I/Os
• Program memory
• GPIB port for instrument control
• Self-test, self-calibration, diagnostics
Measurement modes
The Agilent E5260A supports the
following measurement modes:
• Spot
• Pulsed spot
• Quasi-pulsed spot
• Staircase sweep
• Multi-channel sweep
• Pulsed sweep
• Staircase sweep with pulsed bias
• Linear search
• Binary search
Hardware
Specification conditions
The measurement and output
accuracy are specified at the module
connector terminals when referenced
to the Zero Check terminal under the
following conditions:
4. Measurement made within one
hour after auto calibration execution
5. Averaging (high-speed per-SMU
ADC): 128 samples in 1 PLC;
Integration time
6. Filter: ON (for SMUs)
7. Kelvin connection
8. Calibration period: 1 year
tested. When the E5260A or any of
its associated modules are shipped
from the factory, they meet the
specifications. The “supplemental”
information and “typical” entries
in the following specifications are
not warranted, but provide useful
information about the functions and
performance of the instrument.
1. Temperature: 23°C ± 5°C
(double for 5°C to 18°C, and 28°C
to 40°C if not noted otherwise)
2. After 40 minutes warm-up
3. Ambient temperature change less
than ± 1°C after auto calibration
Note: This document lists specifications and supplemental information
for the E5260A and its associated
modules. The specifications are the
standards against which the E5260A
and its associated modules are
execution
E5260A Mainframe Specification
Supported plug-In modules
The E5260A supports eight slots for plug-in modules.
Part number Description Slots occupied Range of operation Minimum resolution
E5290A High speed HPSMU 2 –200 V to 200 V, –1 A to 1 A 100 µV, 5 pA
E5291A High speed MPSMU 1 –100 V to 100 V, –200 mA to 200 mA 100 µV, 5 pA
Maximum output power
The total module power consumption
cannot exceed 80 W.
Note: Using the HPSMU and MPSMU
units, it is impossible to create a
combination that exceeds the 80-watt
limit.
Maximum voltage between common
and ground
Maximum common to ground voltage
must be ± 42 V
Pulse measurement
Pulse width: 500 µsec to 2 s
Pulse period: 5 ms to 5 s
Period ≥ width + 2 ms
(when width ≤ 100 ms)
Period ≥ width + 10 ms
(when width > 100 ms)
Pulse resolution: 100 µs
Ground unit (GNDU) specification
The GNDU is furnished with the
E5260A mainframe.
Output voltage: 0 V ± 100 µV
Maximum sink current: 4 A
Output terminal/connection:
Triaxial connector, Kelvin (remote
sensing)
2
GNDU supplemental information
Load capacitance: 1 µF
Cable resistance:
For IS ≤ 1.6 A:
Force line R < 1 Ω
For 1.6 A < IS ≤ 2.0 A:
Force line R < 0.7 Ω
For 2.0 A < IS ≤ 4.0 A:
Force line R < 0.35 Ω
For all cases:
Sense line R ≤ 10 Ω
Where IS is the current being sunk by
the GNDU.
MPSMU (Medium Power SMU) Module Specifications
Voltage range, resolution, and accuracy (MPSMU)
Voltage range Force
resolution
Measure
resolution
Force accuracy
1
Measure accuracy
±2 V 100 µV 100 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) 200 mA
±20 V 1 mV 1 mV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) 200 mA
±40 V 2 mV 2 mV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV)
±100 V 5 mV 5 mV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV)
1. ± (% of output/measured value + offset voltage)
2. 200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), Vo is the output voltage in volts.
3. 200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in volts.
Current range, resolution, and accuracy (MPSMU)
Current range Force
resolution
±100 nA 5 pA 5 pA ±(0.12 % + 50 pA + 5 pA x (Vo/25)) ±(0.1 % + 30 pA + 5 pA x (Vo/25)) 100 V
±1 µA 50 pA 50 pA ±(0.12 % + 400 pA + 50 pA x (Vo/25)) ±(0.1 % + 200 pA + 50 pA x (Vo/25)) 100 V
±10 µA 500 pA 500 pA ±(0.12 % + 5 nA + 500 pA x (Vo/25)) ±(0.1 % + 3 nA + 500 pA x (Vo/25)) 100 V
±100 µA 5 nA 5 nA ±(0.12 % + 40 nA + 5 nA x (Vo/25)) ±(0.1 % + 20 nA + 5 nA x (Vo/25)) 100 V
±1 mA 50 nA 50 nA ±(0.12 % + 500 nA + 50 nA x (Vo/25)) ±(0.1 % + 300 nA + 50 nA x (Vo/25)) 100 V
±10 mA 500 nA 500 nA ±(0.12 % + 4 µA + 500 nA x (Vo/25)) ±(0.1 % + 2 µA + 500 nA x (Vo/25)) 100 V
±100 mA 5 µA 5 µA ±(0.12 % + 50 µA + 5 µA x (Vo/25)) ±(0.1 % + 30 µA + 5 µA x (Vo/25))
±200 mA 10 µA 10 µA ±(0.12 % + 100 µA + 10 µA x (Vo/50)) ±(0.1 % + 60 µA + 10 µA x (Vo/50))
1. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
2. Round up below decimal point for the value of (Vo/25) and (Vo/50)
3. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in amps.
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 200 mA), Io is the output current in amps.
Measure
resolution
Force accuracy1 Measure accuracy
4
1
Maximum
current
2
3
1,2
Maximum
voltage
3
4
Power consumption (MPSMU)
Voltage source mode:
Voltage range Power
2 V 20 x Ic (W)
20 V 20 x Ic (W)
40 V 40 x Ic (W)
100 V 100 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance Power
Vc ≤ 20 20 x Io (W)
20 < Vc ≤ 40 40 x Io (W)
40 < Vc ≤ 100 100 x Io (W)
Where Vc is the voltage compliance setting
and Io is output current.
Current (mA)
200
50
20
-100 -40 -20 20 40 100
-20
-50
-200
Voltage (V)
MPSMU measurement and output range
3
Output terminal/connection:
Triaxial connector, Kelvin (remote
sensing)
Voltage source output resistance:
0.3 Ω typical (Force line, non-Kelvin
connection)
Voltage measurement input resistance:
Voltage/current compliance (limiting)
The SMU can limit output voltage
or current to prevent damaging the
device under test.
Voltage: 0 V to ± 100 V
Current: ± 100 pA to ± 200 mA
Compliance accuracy: Same as the
current (or voltage) set accuracy.
≥ 1013 Ω
Current source output resistance:
13
≥ 10
Ω (1 nA range)
Current compliance setting accuracy
(for opposite polarity):
For 100 nA to 200 mA ranges:
I setting accuracy ± 2.5 % of range
Maximum capacitive load:
For 100 nA to 10 mA ranges: 10 nF
MPSMU supplemental information
Maximum allowable cable resistance
(Kelvin connection):
Force Line: 10 Ω (I ≤ 100 mA)
Force Line: 1.5 Ω
(100 mA < I ≤ 200 mA)
Sense Line: 10 Ω (All cases)
For 100 mA to 200 mA ranges: 100 µF
Maximum guard capacitance: 900 pF
Maximum shield capacitance: 5000 pF
Maximum guard offset voltage: ± 1 mV
Noise characteristics (typical, filter ON):
Voltage source:
0.01 % of V range (rms)
Current source: 0.1 % of I range (rms)
HPSMU (High Power SMU) Module Specifications
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise
(typical, filter ON):
Voltage ranging: 250 mV
Current ranging: 10 mV
Slew rate: 0.2 V/µs
SMU pulse setting accuracy
(fixed measurement range):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
Trigger out delay (pulsed
measurements):
0 to 32.7 ms with 100 µs resolution
(< pulse width)
Voltage range, resolution, and accuracy (HPSMU)
Voltage
range
±2 V 100 µV 100 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) 1 A
±20 V 1 mV 1 mV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) 1 A
±40 V 2 mV 2 mV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV)
±100 V 5 mV 5 mV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV)
±200 V 10 mV 10 mV ±(0.045 % + 30 mV) ±(0.035 % + 40 mV)
1. ± (% of output/measured value + offset voltage V)
2. 1 A (Vo ≤ 20 V), 500 mA (20 V <Vo ≤ 40 V), Vo is the output voltage in volts.
3. 1 A (Vo ≤ 20 V), 500 mA (20 V <Vo ≤ 40 V), 125 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in volts.
4. 1 A (Vo ≤ 20 V), 500 mA (20 V <Vo ≤ 40 V), 125 mA (40 V < Vo ≤ 100 V), 50 mA (100 V < Vo ≤ 200 V), Vo is the output voltage in volts.
Force
resolution
Measure resolution Force accuracy1 Measure accuracy
1
Maximum
current
2
3
4
Current range, resolution, and accuracy (HPSMU)
Current
range
±100 nA 5 pA 5 pA ±(0.12 % + 50 pA + 5 pA x (Vo/25)) ±(0.1 % + 30 pA + 5 pA x (Vo/25)) 200 V
±1 µA 50 pA 50 pA ±(0.12 % + 400 pA + 50 pA x (Vo/25)) ±(0.1 % + 200 pA + 50 pA x (Vo/25)) 200 V
±10 µA 500 pA 500 pA ±(0.12 % + 5 nA + 500 pA x (Vo/25)) ±(0.1 % + 3 nA + 500 pA x (Vo/25)) 200 V
±100 µA 5 nA 5 nA ±(0.12 % + 40 nA + 5 nA x (Vo/25)) ±(0.1 % + 20 nA + 5 nA x (Vo/25)) 200 V
±1 mA 50 nA 50 nA ±(0.12 % + 500 nA + 50 nA x (Vo/25)) ±(0.1 % + 300 nA + 50 nA x (Vo/25)) 200 V
±10 mA 500 nA 500 nA ±(0.12 % + 4 µA + 500 nA x (Vo/25)) ±(0.1 % + 2 µA + 500 nA x (Vo/25)) 200 V
±100 mA 5 µA 5 µA ±(0.12 % + 50 µA + 5 µA x (Vo/25)) ±(0.1 % + 30 µA + 5 µA x (Vo/25))
±1 A 50 µA 50 µA ±(0.5 % + 500 µA + 50 µA x (Vo/25)) ±(0.5 % + 300 µA + 50 µA x (Vo/25))
1. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
2. Round up below decimal point for the value of (Vo/25).
3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 100 mA)
4. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in amps.
Force
resolution
Measure
resolution
Force accuracy
1,2
Measure accuracy
1,2
Maximum
voltage
3
4
4
Power consumption (HPSMU)
Voltage source mode:
Voltage range Power
2 V 20 x Ic (W)
20 V 20 x Ic (W)
40 V 40 x Ic (W)
100 V 100 x Ic (W)
200 V 200 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance Power
Vc ≤ 20 20 x Io (W)
20 < Vc ≤ 40 40 x Io (W)
40 < Vc ≤ 100 100 x Io (W)
100 < Vc ≤ 200 200 x Io (W)
Where Vc is the voltage compliance setting
and Io is output current.
Current (mA)
1000
500
125
50
-200 -100 -40 -20 20 40 100 200
-50
-125
-500
-1000
HPSMU measurement and output range
Voltage (V)
Output terminal/connection:
Triaxial connector, Kelvin (remote
sensing)
Voltage/current
compliance(limiting)
The SMU can limit output voltage
or current to prevent damaging the
device under test.
Voltage: 0 V to ± 200 V
Current: ± 100 pA to ± 1 A
Compliance accuracy: Same as the
current (or voltage) set accuracy.
HPSMU supplemental information
Maximum allowable cable resistance
(Kelvin connection):
Force line: 10 Ω (I ≤ 100 mA)
Force line: 1.5 Ω (100 mA < I ≤ 1 A)
Sense line: 10 Ω (All cases)
Voltage source output resistance:
0.2 Ω typical (Force line, non-Kelvin
connection)
Voltage measurement input resistance:
≥ 1013 Ω
Current source output resistance:
≥ 1013 Ω (1 nA range)
Current compliance setting accuracy
(for opposite polarity):
For 1 nA to 10 nA ranges:
I setting accuracy ± 12 % of range
For 100 nA to 1 A ranges:
I setting accuracy ± 2.5 % of range
Maximum capacitive load:
For 100 nA to 10 mA ranges: 10 nF
For 100 mA to 1 A ranges: 100 µF
Maximum guard capacitance: 900 pF
Maximum shield capacitance: 5000 pF
Maximum guard offset voltage: ± 1 mV
Noise characteristics (typical, filter ON):
Voltage source: 0.01 % of V range
(rms)
Current source: 0.1 % of I range (rms)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise
(typical, filter ON):
Voltage ranging: 250 mV
Current ranging: 10 mV
Slew rate: 0.2 V/µs
SMU pulse setting accuracy
(fixed measurement range):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
Trigger out delay (pulsed
measurements):
0 to 32.7 ms with 100 µs resolution
(< pulse width)
5
Functions
Front panel operations
Display
• Display error messages
• Display spot measurement set value
• Display spot measurement result
Keypad operations
• Set GPIB address
• Set local/remote mode
• Select measurement channel
• Set spot measurement set value
• Start calibration/diagnostics
MPSMU and HPSMU
Measurement Mode Details
Spot measurement mode
Outputs and measures voltage and
current.
Staircase sweep measurement mode
Outputs swept voltage or current,
and measures dc voltage or current.
One channel can sweep current or
voltage while up to eight channels
can measure current or voltage. A
second channel can be synchronized
with the primary sweep channel as an
additional voltage or current sweep
source. Linear or log sweeps can be
performed.
Number of steps: 1 – 1,001
Hold time: 0 – 655.35 s,
1 ms resolution
Delay time: 0 – 65.5350 s,
100 µs resolution
Multi-channel sweep measurement
mode
Outputs swept voltage or current, and
measures dc voltage or current. Up to
eight channels can sweep current or
voltage and up to eight channels can
measure current or voltage. Linear or
log sweeps can be performed.
Number of steps: 1– 1,001
Hold time: 0 – 655.35 s,
1 ms resolution
Delay time: 0 – 65.5350 s,
100 µs resolution
Pulsed spot measurement mode
Outputs a voltage or current pulse
and measures dc voltage or current.
Pulse width: 500 µs to 100 ms,
100 µs resolution
Pulse period: 5 ms to 1 s
(≥ pulse width + 4 ms),
100 µs resolution
Maximum pulse duty: 50 %
Pulsed sweep measurement mode
Outputs pulsed swept voltage or
current, and measures dc voltage or
current. A second channel can be programmed to output a staircase sweep
voltage or current synchronized with
the pulsed sweep output.
Staircase sweep with pulsed bias
measurement mode
Outputs swept voltage or current,
and measures dc voltage or current.
A second channel can be programmed
to output a pulsed bias voltage or
current. A third channel can be
synchronized with the primary sweep
channel as an additional voltage or
current sweep source.
Binary search measurement mode
Outputs and measure voltage or
current by using binary search method.
Time Stamp
The E5260A supports a time stamp
function utilizing an internal quartz
clock.
Resolution: 100 µs
Program Memory
The E5260A mainframe contains
(volatile) memory that can be used
to increase test measurement
throughput. Program memory allows
the storage of program code in the
E5260A, eliminating the need to
communicate over the GPIB interface.
In addition, input data can be passed
to code sequences stored in program
memory.
Maximum lines of storable code:
40,000
Maximum number of program
sequences: 2,000
Output Data Buffer
The number of data points that can
be stored in the data buffer varies
with the choice of the output data
format.
Minimum number of storable data
Points: 34,034
Quasi-pulsed spot measurement mode
Outputs quasi-pulsed voltage and
measures dc voltage or current.
Linear search measurement mode
Outputs and measure voltage or
current by using linear search method.
6
Trigger I/O
General Purpose Digital I/O
Attached Software
Trigger in/out synchronization pulses
before and after setting and measuring
dc voltage and current. Arbitrary
trigger events can be masked or
activated independently.
Input
An external trigger input signal can
be used to do any of the following:
1. Start a measurement
2. Start a measurement at each
sweep step for a staircase sweep
or multi channel sweep
measurement
3. Start the source output at each
sweep step for a staircase sweep,
pulsed sweep, staircase sweep
with pulsed bias, or multi-channel
sweep measurement.
4. Start the pulsed output for a
pulsed spot measurement.
5. Recover from a wait state.
Input level: TTL level, negative or
positive edge trigger, or TTL level,
negative or positive gate trigger.
Output
An output trigger signal can be sent
when one of the following events
occurs:
1. The end of a measurement is
reached.
2. The end of a measurement at each
sweep step for a staircase sweep
or multi channel sweep measurement is reached.
3. Completion of the source output
setup at each sweep step for a
staircase sweep, pulsed sweep,
staircase sweep with pulsed bias,
or multi-channel sweep
measurement.
4. Completion of the pulsed output
setup for a pulsed spot
measurement.
5. A trigger command is issued.
Output level: TTL level, negative or
positive edge trigger, or TTL level,
negative or positive gate trigger.
16 general-purpose digital I/O signals
are available via a 25-pin DIN connector. These pins can be used as an
alternative to the BNC trigger-in and
trigger-out lines to synchronize the
E5260A with other instruments. They
can also be used as output and input
ports for digital signals. The user
can selectively assign pins to trigger
mode or digital I/O mode.
A VXI plug&play driver is supplied.
Supported operating systems:
Microsoft® Windows® XP
Professional (SP3), Windows Vista
Business (SP2, 32 bit), Windows 7
Professional (SP1, 32 bit or 64 bit)
General Specifications
Temperature rang
Operating: +5°C to +40°C
Storage: –20°C to +60°C
Humidity range
Operating: 15 % to 80 % RH, non-condensing
Storage: 5 % to 90 % RH, non-condensing
Altitude
Operating: 0 m to 2,000 m (6,561 ft)
Storage: 0 m to 4,600 m (15,092 ft)
Power requirement
ac voltage: 90 V to 264 V
Line frequency: 47 Hz to 63 Hz
Maximum volt-amps (VA)
E5260A: 600 VA
Regulatory compliance
EMC: IEC 61326-1:+A1/EN61326-1:+A1
AS/NZS 2064.1
Safety: CSA C22.2 No.1010.1-1992
IEC61010-1:+A2/EN61010-1:+A2
UL3111-1:1994
Certification
CE, CSA, NRTL/C, C-Tick
Dimensions
E5260A: 426 mm W x 235 mm H x 575 mm D
Weight
E5260A (empty): 17 kg
E5290A: 2.5 kg
E5291A: 1.4 kg
Furnished accessories
Software CD-ROM (including VXIplug&play driver)
7
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