Atec Agilent-E5260A User Manual

Introduction

The Agilent E5260A 8 Slot high speed measurement mainframe is completely user-configurable. You can install up to eight single-slot modules (such as the MPSMU), up to four dual-slot modules (such as the HPSMU), or any physically allowable combination thereof.

Agilent E5260A

8 Slot High speed Measurement Mainframe

Technical Overview

Basic features

• Performs high-speed, dc parametric measurements

• Eight slots for plug-in modules

• User interface allows spot measurements to be made from the front panel

• High-speed ADC present on each installed SMU

• Ground unit up to 4 A

• BNC trigger-in and trigger-out connectors

• 16 general-purpose digital I/Os

• Program memory

• GPIB port for instrument control

• Self-test, self-calibration, diagnostics

Measurement modes

The Agilent E5260A supports the following measurement modes:

• Spot

• Pulsed spot

• Quasi-pulsed spot

• Staircase sweep

• Multi-channel sweep

• Pulsed sweep

• Staircase sweep with pulsed bias

• Linear search

• Binary search

Hardware

Specification conditions

The measurement and output accuracy are specified at the module connector terminals when referenced to the Zero Check terminal under the following conditions:

4. Measurement made within one hour after auto calibration execution

5. Averaging (high-speed per-SMU ADC): 128 samples in 1 PLC; Integration time

6. Filter: ON (for SMUs)

7. Kelvin connection

8. Calibration period: 1 year

tested. When the E5260A or any of its associated modules are shipped from the factory, they meet the specifications. The “supplemental” information and “typical” entries in the following specifications are not warranted, but provide useful information about the functions and performance of the instrument.

1. Temperature: 23°C ± 5°C (double for 5°C to 18°C, and 28°C to 40°C if not noted otherwise)

2. After 40 minutes warm-up

3. Ambient temperature change less than ± 1°C after auto calibration

Note: This document lists specifications and supplemental information for the E5260A and its associated modules. The specifications are the standards against which the E5260A and its associated modules are

execution

E5260A Mainframe Specification

Supported plug-In modules

The E5260A supports eight slots for plug-in modules.

Part number Description Slots occupied Range of operation Minimum resolution

E5290A High speed HPSMU 2 –200 V to 200 V, –1 A to 1 A 100 µV, 5 pA E5291A High speed MPSMU 1 –100 V to 100 V, –200 mA to 200 mA 100 µV, 5 pA

Maximum output power

The total module power consumption cannot exceed 80 W.

Note: Using the HPSMU and MPSMU units, it is impossible to create a combination that exceeds the 80-watt limit.

Maximum voltage between common and ground

Maximum common to ground voltage must be ± 42 V

Pulse measurement

Pulse width: 500 µsec to 2 s Pulse period: 5 ms to 5 s Period ≥ width + 2 ms

(when width ≤ 100 ms)

Period ≥ width + 10 ms

(when width > 100 ms)

Pulse resolution: 100 µs

Ground unit (GNDU) specification

The GNDU is furnished with the E5260A mainframe.

Output voltage: 0 V ± 100 µV Maximum sink current: 4 A Output terminal/connection: Triaxial connector, Kelvin (remote sensing)

GNDU supplemental information

Load capacitance: 1 µF

Cable resistance: For IS ≤ 1.6 A:

Force line R < 1 Ω

For 1.6 A < IS ≤ 2.0 A:

Force line R < 0.7 Ω

For 2.0 A < IS ≤ 4.0 A:

Force line R < 0.35 Ω

For all cases:

Sense line R ≤ 10 Ω

Where IS is the current being sunk by the GNDU.

MPSMU (Medium Power SMU) Module Specifications

Voltage range, resolution, and accuracy (MPSMU)

Voltage range Force

resolution

Measure resolution

Force accuracy

Measure accuracy

±2 V 100 µV 100 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) 200 mA ±20 V 1 mV 1 mV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) 200 mA ±40 V 2 mV 2 mV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV) ±100 V 5 mV 5 mV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV)

1. ± (% of output/measured value + offset voltage)

2. 200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), Vo is the output voltage in volts.

3. 200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in volts.

Current range, resolution, and accuracy (MPSMU)

Current range Force

resolution

±100 nA 5 pA 5 pA ±(0.12 % + 50 pA + 5 pA x (Vo/25)) ±(0.1 % + 30 pA + 5 pA x (Vo/25)) 100 V ±1 µA 50 pA 50 pA ±(0.12 % + 400 pA + 50 pA x (Vo/25)) ±(0.1 % + 200 pA + 50 pA x (Vo/25)) 100 V ±10 µA 500 pA 500 pA ±(0.12 % + 5 nA + 500 pA x (Vo/25)) ±(0.1 % + 3 nA + 500 pA x (Vo/25)) 100 V ±100 µA 5 nA 5 nA ±(0.12 % + 40 nA + 5 nA x (Vo/25)) ±(0.1 % + 20 nA + 5 nA x (Vo/25)) 100 V ±1 mA 50 nA 50 nA ±(0.12 % + 500 nA + 50 nA x (Vo/25)) ±(0.1 % + 300 nA + 50 nA x (Vo/25)) 100 V ±10 mA 500 nA 500 nA ±(0.12 % + 4 µA + 500 nA x (Vo/25)) ±(0.1 % + 2 µA + 500 nA x (Vo/25)) 100 V ±100 mA 5 µA 5 µA ±(0.12 % + 50 µA + 5 µA x (Vo/25)) ±(0.1 % + 30 µA + 5 µA x (Vo/25)) ±200 mA 10 µA 10 µA ±(0.12 % + 100 µA + 10 µA x (Vo/50)) ±(0.1 % + 60 µA + 10 µA x (Vo/50))

1. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)

2. Round up below decimal point for the value of (Vo/25) and (Vo/50)

3. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in amps.

4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 200 mA), Io is the output current in amps.

Measure resolution

Force accuracy1 Measure accuracy

Maximum

current

1,2

Maximum

voltage

Power consumption (MPSMU)

Voltage source mode:

Voltage range Power

2 V 20 x Ic (W) 20 V 20 x Ic (W) 40 V 40 x Ic (W) 100 V 100 x Ic (W)

Where Ic is the current compliance setting.

Current source mode:

Voltage compliance Power

Vc ≤ 20 20 x Io (W) 20 < Vc ≤ 40 40 x Io (W) 40 < Vc ≤ 100 100 x Io (W)

Where Vc is the voltage compliance setting and Io is output current.

Current (mA)

200

-100 -40 -20 20 40 100

-20

-50

-200

Voltage (V)

MPSMU measurement and output range

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