Agilent
4287A RF LCR Meter
1 MHz - 3 GHz
Data Sheet
2
Specifications
Specifications describe the instrument’s warranted performance over
the temperature range of 5 °C to 40 °C (except as noted). Supplemental
performance characteristics are intended to provide helpful information for
using certain non-warranted performance parameters with the instrument.
These are denoted as SPC (supplemental performance characteristics),
typical, or nominal. Warmup time must be greater than or equal to
30 minutes after power on for all specifications.
3
Basic Measurement Characteristics
Measurement parameters
Measurement range
Source characteristics
Frequency
Impedance parameters |Z|, |Y|, Ls, Lp, Cs, Cp, Rs, Rp, X, G, B, D, Q, θz[°],
Measurement range 200 mΩ to 3 kΩ
θz [rad], θy[°], θy [rad]
(A maximum of four parameters can be displayed at one
time.)
(Frequenc y = 1 MHz,
Averaging factor = 8,
Oscillator level ≥ –33 dBm,
Measurement uncertainty ≤± 10 %,
Calibration is performed within 23 °C ± 5 °C,
Measurement is performed within ± 5 °C from the
calibration temperature
Range 1 MHz to 3 GHz
Resolution 100 kHz
Uncertainty ± 10 ppm (23 °C ± 5 °C)
± 20 ppm (5 °C to 40 °C)
4
Basic Measurement Characteristics
Oscillator level
Output Impedance
*1. It is possible to set more than 0 dBm (447 mV, 8.94 mA) oscillator level at
frequency > 1 GHz. However, the characteristics at this setting are not guaranteed.
*2. When the unit is set at mV or mA, the entered value is rounded to 0.1 dBm resolution.
Range
Cable length: 1m
Power (when 50 Ω LOAD is
connected to the test port)
Current (when SHORT is
connected to the test port)
Voltage (when OPEN is
connected to the test port)
–40 dBm to 1 dBm (Frequency ≤ 1 GHz)≥
–40 dBm to 0 dBm (Frequency > 1 GHz )
0.0894 mA
0.0894 mA
4.47 mV
4.47 mV
rms
rms
to 502 mV
rms
to 447 mV
rms
to 10 mA
to 8.94 mA
rms
rms
(Frequency ≥ 1 GHz)
rms
(Frequency > 1 GHz )
rms
(Frequency ≥ 1 GHz)
(Frequency > 1 GHz )
*1
Cable length: 2m (when Option 4287A-020 is used)
Power Subtract the following attenuation from the power
(setting value) at 1 m cable length:
Attenuation [dB] = 0.37×
F
(F: Frequency [GHz])
Resolution
0.1 dB
*2
Uncertainty
Cable length: 1 m
Power (when 50 Ω LOAD is
connected to the test port)
Frequency ≤ 1 GHz ± 2 dB (23 ± 5 ºC)
± 4 dB (5 ºC to 40 ºC)
*1
*1
Frequency > 1 GHz ± 3 dB (23 ± 5 ºC)
± 5 dB (5 ºC to 40 ºC)
Cable length: 2 m (when Option 4287A-020 is used)
Power Add 1 dB to the uncertainty at 1 m cable length.
Output impedance 50 Ω (nominal)
5
Basic Measurement Characteristics
Measurement accuracy
Conditions of accuracy specifications
Measurement uncertainty
Temperature 23 ± 5 °C
Accuracy-specified plane 7-mm connector of 3.5-mm-7-mm adapter
When OPEN/SHORT/LOAD
calibration is performed:
connected to 3.5-mm terminal of test heads
|Z|,|Y|
q
L, C, X, B
R, G
D
EaEb+
-------------------------
D
tan 1< 1D
at
at
Q
at
()
x
100
D
0.1≤ EaEb+
x
EaEb+
------------------------
tan 1<
Q
()
x
100
EaEb+()±
E
---------------------------
±
E
EaEb+()1Q
-----------------------------------------------------
±
1D
------------------------
±
1Q
-----------------------------------------------------
±
1Q
[%]
+()
aEb
[rad]
100
+()1D
aEb
2
+()
tan
x
±
tan
()
x
100
2
tan
+()
x
tan
±
()
x
2
+()×±
2
+()×±
EaEb+
-------------------------
()
100
EaEb+
------------------------100
+
E
aEb
-------------------------
()
100
+
E
aEb
------------------------100
[%]
x
[%]
x
10
------------------------
at
E
aEb
When
OPEN/SHORT/LOAD/LOWLOSS C calibration is performed
(SPC):
|Z|,|Y|
Qx10≥≥
+
±
2
Q
x
E
EaEb+
-----------------------100
+()±
aEb
[%]
6
Basic Measurement Characteristics
Definition of each parameter
q
L, C, X, B
R, G
D
E
c
----------
tan 1<
D
()
x
100
D
0.1≤ E
x
Q
E
c
----------
tan 1<
Q
()
x
100
E
c
----------
±
[rad]
100
E
+()2EcDx()
aEb
EaEb+()2EcQx()
1D
+()
-------------------------------------------------------
±
1D
±
c
----------
±
100
1Q
+()
-------------------------------------------------------
±
±
1Q
+±
+±
E
2
x
x
2
x
x
c
----------
tan
()
100
E
c
----------
tan
()
100
E
c
----------
tan
()
100
E
c
----------
tan
()
100
2
2
[%]
[%]
10
------
Q
10≥≥
x
E
c
Dx =
Qx =
Ea =
Oscillator level ≥ –
Frequency ≥ 1 MHz,
≤ 100 MHz
Frequency > 100 MHz,
≤ 500 MHz
Frequency > 500 MHz,
≤ 1 GHz
Frequency > 1 GHz,
≤ 1.8 GHz
33
dBm
E
2
c
----------
±
Q
x
100
Measurement value of D
Measurement value of Q
(Within ± 5 °C from the calibration temperature.
Measurement accuracy applies when the calibration
is performed at 23 °C ± 5 °C. When the calibration is
performed beyond 23 °C ± 5 °C, the measurement
accuracy decreases to half that described.)
± 0.65 [%]
± 0.8 [%]
± 1.2 [%]
± 2.5 [%]
Frequency > 1.8 GHz,
≤ 3 GHz
± 5 [%]
Oscillator level < –33
dBm
Frequency ≥ 1 MHz,
≤ 100 MHz
± 1 [%]
Frequency > 100 MHz,
≤ 500 MHz
± 1.2 [%]
Frequency > 500 MHz,
≤ 1 GHz
± 1.2 [%]
Frequency > 1 GHz,
≤ 1.8 GHz
± 2.5 [%]
Frequency > 1.8 GHz,
≤ 3 GHz
± 5 [%]
E
b
=
[%]
(| Z
x
|: Measurement value of |Z|)
E
c
=
[%] ( F: Frequency [MHz])
Z
s
= (Within ± 5 °C from the calibration temperature.
Measurement accuracy applies when the calibration
is performed at 23 °C ± 5 °C. When the calibration is
performed beyond 23 °C ± 5 °C, the measurement
accuracy decreases to half that described.)
Oscillator level ≥ –33 dBm,
Averaging factor ≥ 8
± (20 + 0.5 × F ) [mΩ] ( F: Frequency [MHz])
Oscillator level ≥ –33 dBm,
Averaging factor < 7
± (50 + 0.5 × F ) [mΩ] ( F: Frequency [MHz])
± (100 + 0.5 × F ) [mΩ] ( F: Frequency [MHz])
Y
o
= (Within ± 5 °C from the calibration temperature.
Measurement accuracy applies when the calibration
is performed at 23 °C ± 5 °C. When the calibration is
performed beyond 23 °C ± 5 °C, the measurement
accuracy decreases to half that described.)
± (30 + 0.15 × F) [µS] ( F: Frequency [MHz])
± (50 + 0.15 × F) [µS] ( F: Frequency [MHz])
± (100 + 0.15 × F) [µS] (F: Frequency [MHz])
Z
s
Z
x
-------- YoZx•+
100×±
0.06
0.08 F×
1000
-------------------+
±
( )
( )
Oscillator level ≥ –33 dBm,
Oscillator level ≥ – 33 dBm,
Averaging factor ≥ 8
Oscillator level ≥ – 33 dBm,
Averaging factor < 7
Oscillator level ≥ – 33 dBm,
7
Basic Measurement Characteristics
8
Basic Measurement Characteristics
NOTE: At the following points, measurement error may exceed the specifica-
tions described here due to the 4287A’s spurious characteristics:
109.7 MHz, 153.6 MHz, 177.2 MHz, 256.0 MHz, 329.1 MHz, 460.8 MHz, 768.0 MHz
Examples of calculated impedance measurement accuracy
Figure 1. Oscillator level ≥ –33 dBm, averaging factor ≥ 8, temperature deviation ≤ 5 °C
100µ
10k
100pF
10pF
1mH
1pF
100ƒF
100µH
10µH
10ƒF
1µH
10%
5%
2%
1nF
1%
10nF
1µF
1M 10M 100M 1G 3G
10m
]
S
[
|
Y
|
100m
1m
10
1k
100
]
Ω
[
|
Z
|
10
1
1
100m
C
100nF
Frequency [Hz]
100nH
10nH
L
1nH
100pH
10pH
Figure 2. Oscillator level ≥ –33 dBm, averaging factor ≤ 7, temperature deviation ≤ 5 °C
Figure 3. Oscillator level < –33 dBm, temperature deviation ≤ 5 °C
9
Basic Measurement Characteristics
100µ
10k
100pF
10pF
1mH
1pF
100ƒF
100µH
10µH
10ƒF
1µH
10%
5%
2%
1nF
1%
10nF
1µF
1M 10M 100M 1G 3G
10m
]
S
[
|
Y
|
100m
1m
10
1k
100
]
Ω
[
|
Z
|
10
1
100m
C
100nF
1
Frequency [Hz]
100nH
10nH
L
1nH
100pH
10pH
100ƒF
100µH
100µ
10m
]
S
[
|
Y
|
100m
1m
10
10pF
10k
100pF
1k
1nF
100
]
Ω
[
|
Z
|
10
1
100m
C
10nF
100nF
1
1µF
1M 10M 100M 1G 3G
1mH
10%
5%
2%
1pF
Frequency [Hz]
10µH
10ƒF
1µH
100nH
10nH
L
1nH
100pH
10pH
Timing chart and measurement time (Typical)
Timing chart of handler interface signal (Typical)
Figure 4. Timing chart of handler interface
Table 1. Value T1 through T7 (Typical)
Test Condition Timing
Screen Display RdcComparator Min. Median Max.
setting meas.
T1 Trigger pulse - - - - 2µs - -
width
T2 Trigger response
time of - - - - - 0.3 ms 0.5 ms
Ready_for_Trig
T3 Trigger response
time of INDEX - - - - - 0.4 ms 0.6 ms
and EOM
T4 Measurement - - Off - - 5.7 ms 5.9 ms
time (*1) - - On - - 7.5 ms 7.7 ms
T5
Measurement data
- - - Off - 0.3 ms 0.4 ms
calculation time - - - On - 0.4 ms 0.4 ms
T6 Ready_for_Trig 1 point meas. Off - - - 0.1 ms 0.3 ms
setting time Ls-Q meas.
1 point meas. On On On - 9.8 ms 10.2 ms
Ls-Q meas.
List meas.
3 points meas. On On On - 9.8 ms 10.2 ms
Ls-Q meas.
T7 Trigger wait time - - - - 0 - -
*1: 1 point measurement, Trigger delay=0, Point delay=0
10
Basic Measurement Characteristics
Trigger Signal
/INDEX
/EOM
/READY_FOR_TRIG
T1
T3 T4 T5 T6 T7
T2
11
Basic Measurement Characteristics
Details of measurement time (T4)
Figure 5. Measurement time T4 at single point measurement
Figure 6. Measurement time T4 at list measurement
/INDEX
/EOM
T4 T5
Sorting result
output
(Previous sorting results)
Ts T t Tp Tr Tm
Internal
process
Meas.
condition
setup
Trigger delay
Rdc
Measurement
meas.
Meas. point
delay time
(user's setup)
time (user's setup)
T4 T5
/INDEX
/EOM
Sorting result
output
Internal
process
Trigger delay time
Meas.
condition
setup
(user's setup)
Meas. point 1
Ts T t Tp Tr TsTm Tp Tm
Rdc
meas.
(Previous sorting results) Sorting results
Meas. point 2
Meas. point
delay time
Measurement
Meas.
condition
setup
(user's setup)
Meas. data
Meas. point N
Ts Tt
Meas.
condition
setup
math.
Tm
Measurement
Meas. point
delay time
(user's setup)
Sorting results
Meas. data
math.
N:
Number of meas.
point in the table
12
Measurement Support Functions
Error correction function
Available calibration and compensation
Calibration/compensation data measurement point
OPEN/SHORT/LOAD
Calibration
Low-Loss Capacitor
Calibration
Port Extension
Compensation
(Fixture Selection)
OPEN/SHORT
Compensation
Connect OPEN, SHORT, and LOAD standards to the
desired reference plane and measure each kind of
calibration data. The reference plane is called calibration
reference plane.
Connect the dedicated standard (Low-Loss Capacitor) to the
calibration reference plane and measure the calibration data.
When a device is connected to the terminal that is extended
from the calibration reference plane, set theelectrical length
between the calibration plane and the device contact. Select
a model number of the registered testfixtures in the 4287A's
softkey menu or enter the electrical length for user's test
fixture.
When a device is connected to the terminal that is extended
from the calibration reference plane, make OPEN and
SHORT states at the device contact and measure each kind
of compensation date.
Data Measurement
Points
Same as measurement points which is set in the
measurement point setup display. (Changing the frequency
or oscillator level settings after the calibration or
compensation makes the calibration and compensation data
invalid.)
DC resistance (Rdc) measurement
Trigger function
Averaging function
13
Measurement range 0.1 Ω to 100 Ω
Measurement resolution 1 mΩ
Test signal lev el 1 mA (maximum)
Error correction OPEN/SHOR T/LO AD Calibration, OPEN/SHORT
Compensation. (Changing the frequency or oscillator
level settings after the calibration or compensation
makes the calibration and compensation data invalid.)
Measurement uncertainty
[%]
R
dut
: DC resistance measurement v alue [Ω]
(Within ± 5 °C from the calibration temperature.
Measurement accuracy applies when the calibration
is performed at 23 °C ± 5 °C. When the calibration is
performed beyond 23 °C ± 5 °C, the measurement
accuracy decreases to half that described.)
Trigger mode Internal, External (external trigger input connector or
handler interface), Bus (GPIB or LAN), Manual (front key)
Setting range 1 to 100 (integer)
1
0.05
R
dut
---------
R
dut
10000
--------------+
100×+±
( )
Measurement Support Functions
14
Measurement Support Functions
Display
List measurement function
Test signal level monitor function
Mass storage
Type/Size Color LCD, 8.4 inch
Resolution 640 dots × 480 lines
Number of measurement points 32 points for each table (maximum)
Number of tables 8 tables
Uncertainty of monitor value
[%](SPC)
A: Uncertainty of oscillator level [dB]
B: Uncertainty of impedance measurement [%]
30 10
A
20
------
1–
100× B++±
( )
Built-in flexible disk drive 3.5 inch, 720 KByte or 1.44 KByte, DOS format
Built-in hard disc drive
About 18 GByte
15
Measurement Support Functions
Interface
GPIB
Handler interface
LAN interface
Standard conformity IEEE 488.1-1987,IEEE 488.2-1987
Available functions
(function code)
Numerical data transfer format ASCII
Protocol IEEE 488.2-1987
SH1,AH1,T6,TE0,L4,LE0,SR1,RL0,PP0, DT1,DC1,C0,E2
Connector type 36 pin D-SUB connector
Signal type Negative logic, opto-isolated, open collector output
Output signal • BIN sort result (BIN 1 to BIN 13,
OUT_OF_GOOD_BINS)
• DC resistance pass/fail (DCR_OUT_OF_RANGE)
• Overload (OVLD)
• Alarm (ALARM)
• End of analog measurement (INDEX)
• End of measurement (EOM)
• Ready for trigger (READY_FOR_TRIG)
Input signal • External trigger (EXT_TRIG)
• K ey lock (KEY_LOCK)
Pin location See the follo wing figure. Refer to Programming
Manual for the definition of each pin.
Standard conformity 10 Base-T or 100 Base-TX (automatically switched),
Ethertwist, RJ45 connector
Protocol TCP/IP
Functions Telnet, FTP
16
Measurement Support Functions
Measurement terminal (at test head)
Rear panel connectors
External reference signal input connector
Internal reference signal output connector
External trigger input connector
Connector type 3.5-mm (female) connector
Frequency 10 MHz ± 10 ppm (SPC)
Level ≥ 0 dBm (SPC)
Input impedance 50 Ω (nominal)
Connector type BNC (female)
Frequency 10 MHz (nominal)
(can be converted to 7-mm connector using the
3.5 mm-7 mm adapter)
Uncertainty of frequency Same as frequency uncertainty described in“Source
Characteristics” on page 3
Level +2 dBm (nominal)
Output impedance 50 Ω (nominal)
Connector type BNC (female)
Level L OW threshold voltage: 0.5 V
HIGH threshold voltage: 2.1 V
Input le vel range: 0 to +5 V
Pulse width (Tp) ≥ 2 µsec (SPC)
See Figure 8 for definition of Tp
Polarity Positive or Negative (selective)
Connector type BNC (female)
17
Measurement Support Functions
Figure 7. Pin location of handler interface
Figure 8. Definition of pulse width (Tp)
/ B I N 1
/ B I N 2
/ B I N 3
/ B I N 4
/ B I N 5
/ B I N 6
/ B I N 7
/ B I N 8
/ B I N 9
/ O U T _ OF _ GOOD _ B I N S / B I N 10
E X T _ T R I G
E X T _ D C V
+ 5 V
Tp
Tp
5V
1 19
2 20
3 21
4 22
5 23
6 24
7 25
8 26
9 27
10 28
11 29
12 30
13 31
14 32
15 33
16 34
17 35
18 36
5V
/ BIN 11
/ BIN 12
/ BIN 13
/READY_FOR_TRIG
/ RDC_OUT_OF_RANGE
/ OVLD
/ KEY _ LOCK
(reserved)
E X T _ D C V
/ A L A R M
/ I N D E X
/ E O M
C O M
Tp
Tp
0V
Positive trigger signal Negative trigger signal
0V
18
General Characteristics
Environment conditions
Operating condition
Non-operating storage condition
Temperature 5 °C to 40 °C
Humidity (at wet bulb
temperature ≤ 29 °C, without
condensation)
Flexible disk drive
non-operating condition
Flexible disk drive
operating condition
Altitude 0 to 2,000 m (0 to 6,561 feet)
Vibration 0.5 G maximum, 5 Hz to 500 Hz
Warmup time 30 minutes
20% to 80% RH
15% to 90% RH
Temperature – 20 °C to + 60 °C
Humidity (at wet bulb
temperature ≤ 45 °C, without
condensation)
Altitude 0 to 4,572 m (0 to 15,000 feet)
Vibration 1 G maximum, 5 Hz to 500 Hz
15% to 90% RH
19
General Characteristics
Other specifications
EMC European Council Directive 89/336/EEC
IEC 61326-1:1997+A1
CISPR 11:1990 / EN 55011:1991 Group 1, Class A
IEC 61000-4-2:1995 / EN 61000-4-2:1995
4 kV CD / 8 kV AD
IEC 61000-4-3:1995 / EN 61000-4-3:1996
3 V/m, 27-1000 MHz, 80% AM
IEC 61000-4-4:1995 / EN 61000-4-4:1995
1 kV power / 0.5 kV Signal
IEC 61000-4-5:1995 / EN 61000-4-5:1995
0.5 kV Normal / 1 kV Common
IEC 61000-4-6:1996 / EN 61000-4-6:1996
3 V, 0.15-80 MHz, 80% AM
IEC 61000-4-11:1994 / EN 61000-4-11:1994
100% 1cycle
NO TE-1: When tested at 3 V/m according to EN
61000-4-3:1996, the measurement accuracy will be within
specifications over the full immunity
27 to 1000 MHz except when the analyzer frequency is
identical to the transmitted interference signal test
frequency range of
test
frequency.
NOTE-2: When tested at 3 V according to EN
61000-4-6:1996, the measurement accuracy will be within
specifications over the full immunity test frequency range of
0.15 to 80 MHz except when the analyzer frequency is
identical to the transmitted interference signal test frequency.
AS/NZS 2064.1/2 Group 1, Class A
Safety European Council Directive 73/23/EEC
IEC 61010-1:1990+A1+A2 / EN 61010-1:1993+A2
INSTALLATION CATEGORY II, POLLUTION
DEGREE 2
INDOOR USE
IEC60825-1:1994 CLASS 1 LED PRODUCT
CAN/CSA C22.2 No. 1010.1-92
Power requirement 90 V to 132 V, or 198 V to 264 V (automatically switched),
47 Hz to 63 Hz, 350 VA max.
Weight
Main unit 16 kg (SPC)
Test head 0.3 kg (SPC)
Dimensions
Main unit See Figure 9 through Figure 11
Test head See Figure 12
20
General Characteristics
Figure 9. Main unit dimensions (front view, in millimeters, typical)
Figure 10. Main unit dimensions (rear view, in millimeters, typical)
These connectors in the gray area
are reserved and cannot be used.
425.6
221.62
27.51
58.8
62.540.6
21
General Characteristics
Figure 11. Main unit dimensions (side view, in millimeters, typical)
Figure 12. Test head dimensions (in millimeters, typical)
389.7432
221.62
12.77
21.02
16.97
24.24
23.4
214.36
17.33
18
23.54
7.2
4-M4 Effective Depth 5.6
9.17
10
10
89.72
40
7.3
54.9
9.03
116
9.03
22
General Characteristics
Furnished accessories
Options
Order model/option number Description Qty
Agilent 4287A RF LCR meter (main unit) 1
Agilent 4287A
Test head (with 1 m cable) 1
N (m)-SMA (f) adapter 3
Wrench (for 3.5 mm/SMA connector) 1
CD-ROM (Operation manual, Programming 1
manual and Sample Program)
4287A-004 Add working standard set 1
4287A-020 Add test fixture extension cable set 1
4287A-700 16195B calibration kit 1
4287A-710 Test fixture stand 1
4287A-720 3.5 mm - 7 mm coaxial adapter 1
4287A-810 Add keyboard 1
4287A-820 Add mouse 1
4287A-1A7 ISO 17025 compliant calibration 1
4287A-ABJ Japan-Japanese localization 1
4287A-ABA U.S.-English localization 1
4287A-0BW Add service manual 1
4287A-1CM Rack flange kit 1
4287A-1CN Front handle kit 1
4287A-1CP Handle/rack mount kit 1
23
Option 4287A-004 Working Standard Set Characteristics
Furnished devices
DC resistance
Short device 1.0 × 0.5 mm (part number: 16191-29005)
1.6 × 0.8 mm (part number: 16191-29006)
2.0 × 1.25 mm (part number: 16196-29007)
3.2 × 1.6 mm (part number: 16196-29008)
Resistor 1.0 × 0.5 mm (part number: 5182-0433)
1.6 × 0.8 mm (part number: 5182-0434)
2.0 × 1.25 mm (part number: 5182-0435)
3.2 × 1.6 mm (part number: 5182-0436)
Resistor 51Ω± 0.5%
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(tel) 31 20 547 2111
Japan:
(tel) (81) 426 56 7832
(fax) (81) 426 56 7840
Korea:
(tel) (080) 769 0800
(fax) (080)769 0900
Latin America:
(tel) (305) 269 7500
Taiwan:
(tel) 0800 047 866
(fax) 0800 286 331
Other Asia Pacific Countries:
(tel) (65) 6375 8100
(fax) (65) 6755 0042
Email: tm_ap@agilent.com
Contacts revised: 9/17/04
Product specifications and descriptions
in this document subject to change
without notice.
© Agilent Technologies, Inc. 2003, 2004
Printed in USA, October 21, 2004
5968-5758E
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