Agilent Technologies 10737L, 10737R User Manual

7O

Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

Interferometers

Description

NOTE In this subchapter refers to either or both of the Agilent 10737L and

Agilent 10737R interferometers.

The Agilent 10737L/R Compact Three-Axis interferometers (see figures 7O-1 through 7O-3) allow up to three measurements (displacement, pitch, and yaw) to be made on a single axis. The Agilent 10737L and Agilent 10737R interferometers are identical except that the “L” bends the measurement beams to the left and the “R” bends the beams to the right, as viewed from the incoming beam (see figures 7O-2 and 7O-3).

These interferometers are designed to use a 3 mm diameter laser beam, available from an Agilent 5517C-003 Laser Head.

The measurement beam parallelism inherent in the design of the Agilent 10737L/R interferometers ensures that there is essentially no cosine error between their three measurements and also ensures angle accuracy for pitch and yaw measurements.

These interferometers are designed for direct attachment of Agilent 10780F-037 Remote Receiver’s fiber-optic sensor head (one per axis). The Agilent 10780F-037 receiver is the same as the standard receiver, except it does not include the lens assembly that attaches to some Agilent interferometers; in this case, the required lens assembly is part of the Agilent 10737L/R interferometer. This simplifies user assembly, since no optical alignment of the recei ve r is required. The fiber-optic cables from the receivers attach directly to the axis output apertures on the input face of t he inter feromete r. S ee fi gures 7O-2 and 7O-3.

The Agilent 10737L/R interferometers are based on the Agilent 10706B High-Stability Plane Mirror Interferometer’s design. Figure 7O-1 shows two views of an Agilent 10737L interferometer. In addition to the Agilent 10706B components, the interferometer includes the following assemblies:

• The receiver assembly. This can be removed during alignment using the 4-40 socket-head cap screws. The 4-40 button-head screws hold the 0.100-inch-thick cover plate and the receiver assembly parts in place; do not try to lo osen these screws or r emove the plate.

• The shear plate assembly. This assembly is factory-aligned and must not be loosened or removed.

7O-2 User’s Manual

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

Interferometers

Description

• The corner cube assembly. This assembly is factory-aligned to produce the required beam pattern. Do not remove the corner cube assembly or loosen the screws holding the assembly in place. Moving this assembly will change the output beam pattern.

1

Corner cube assembly

(Do not loosen or remove)

2

Reference mirror or high stability adapter

3

Plane mirror converter

4

Polarizing beam splitter

5

Shear plate assembly

(Do not loosen or remove)

6

Receiver assembly

7

4-40 socket-head cap screws

attaching receiver assembly

6

5

2

4

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03

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10737

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Figure 7O-1. Agilent 10737L Compact Three-axis Interferometer

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7

User’s Manual 7O-3

AGILENT 10737L COMPACT THREE-AXIS INTERFEROMETER

s

#2

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To

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easuremen

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

Interferometers

Description

R

10737L

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ondar

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easement beam

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npu

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ll

V

INPUT FACE

A

xes

iew

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Figure 7O-2. Agilent 10737L Compact Three-Axis Interferometer

7O-4 User’s Manual

AGILENT 10737R COMPACT THREE-AXIS INTERFEROMETER

V

t

S

ee

iew

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

Interferometers

Description

10737R

1

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Figure 7O-3. Agilent 10737R Compact Three-Axis Interferometer

User’s Manual 7O-5

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

Interferometers

Description

Applications

General

The Agilent 10737L or Agilent 10737R interferometer, by making three simultaneous distance measurements along or parallel to the X-axis, can make these measurements:

• displacement along the X-axis

• rotation (pitch) about the Y-axis

• rotation (yaw) about the Z-axis

The angular measurements made by either of these interferometers can be calculated by taking the arctangent of the difference between two linear measurements involved, divided by their separation:

–()

YY’

THETA arc

-------------------tan= D

This method for determining angle is described in more detail in the “Electronic yaw calculation method” and “Optical yaw calculation method” subsections under t he “Three-axis system using dis crete plane mirror interferometers (X, Y, YAW)” section in Chapter 3, “System Design Considerations,” of this manual.

X-Y Stage

These interferometers are well suited for X-Y stage or multiaxis applications, such as lithography equipment. Two of these interferometers, can measure all X, Y, pitch, roll, and yaw motions of a stage. Since only five axes are required to make all these measurements, the sixth axis can be used as a redundant yaw measurement (useful for mirror mapping). In these applications, the measurement mirrors are attached to the X-Y stage.

7O-6 User’s Manual

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

ase

ead

g

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ete

eam

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s

S

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eter

s

Interferometers

Description

MEASUREMENT USING AGILENT 10737R/L COMPACT THREE-AXI

Agilent 10737L

Compact Three-axi

Interferom

INTERFEROMETER

To Fiber Optics

Receivers

B

Directin

Optic

L

r H

To Fiber Optics Receivers

A

ilent 10737R Compact Three-axi Interferom

r

Multiaxi

Stage

Figure 7O-4. Measurement using two Agilent 10737R interferometers

Optical Schematics

Optical schematics for these interferometers are given in Figure 7O-5. Each interferometer functions s i milarly to three parallel Agilent 10706B High Stability Plane Mirror interferometers with a three-way beam splitter in front of them.

To reduce thermal drift errors, the measurement and reference beam paths have the same op t ica l pa th len gt h in gla ss. This mini mi zes measurement errors due to temper atur e ch anges in t he int erfer ometer .

User’s Manual 7O-7

Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis

Interferometers

Description

MEASUREMENT PATH (fB)

Agilent 10737L and Agilent 10737R

Compact Three-Axis Interferometers

f rom ase

B

r

Axis #2

Axis #3

F L

R

eference

M

irro

r

Axis #1 = fB±2 f Axis #2 = fB±2 f Axis #3 = fB±2 f

∆ ∆ ∆

1 2 3

NOTE: Because the Measurement mirror may have a combination of displacement, pitch, and yaw motions, the Measurement Axes may have different Df values, as shown

Axis #1

M

easuremen

M

irro

r

λ

/4

P

lat

e

t

REFERENCE PATH (fA)

Agilent 10737L and Agilent 10737R

Compact Three-Axis Interferometers

f

rom ase

r

Axis #1 = f Axis #2 = f Axis #3 = f

A

A A A

F L

Axis #2

Axis #3

Axis #1

M M

R

λ

/4

easuremen irro

r

eference

M

irro

r

P

lat

e

t

COMPOSITE (fA) and (fB)

Agilent 10737L and Agilent 10737R

Compact Three-Axis Interferometers

f

F

rom

L

ase

B

r

Axis #1 = fB±2 f Axis #2 = fB±2 f Axis #3 = fB±2 f

∆

Axis #2

Axis #3

f

A

1,

f

∆

A

2,

f

A

3,

Axis #1

R

eference

M

irro

λ

/4

P

lat

r

e

M

LEGE

=

f

A

=

Rounded corners are used to help you trace paths.

ND

easuremen

M

irro

=

f

B

=

f

a

A

r

nd f

t

B

Figure 7O-5. Agilent 10737L/R Compact Three-Axis interferometers — beam paths

7O-8 User’s Manual