Agilent 4291B Data Sheet

Agilent 4291B

RF Impedance/Material Analyzer

Data Sheet

Overview

Specifications describe the instrument’s warranted
performance over the temperature range of 0°C to
40°C (except as noted). Supplemental characteris­tics are intended to provide information that is
useful in applying the instrument by giving non­warranted performance parameters.

These are denoted as “typical,” “nominal,” or
“approximate.” Warm-up time must be greater than
or equal to 30 minutes after power on for all speci­fications. Specifications of the stimulus character­istics and measurement accuracy are defined at
the tip of APC-7 connector on the test head con­nected to the instrument.

Figure 1-1

Agilent 4291B RF Impedance/Material Analyzer

Measurement Parameters

Impedance parameters

|Z|, θ

, |Y|, θ

z

Stimulus Characteristics

Frequency Characteristics

Operating frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 MHz to 1.8 GHz

Frequency resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 mHz

Frequency reference

Accuracy

@ 23±5°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . < ±10 ppm

Precision frequency reference (Option 1D5)

Accuracy

@ 0°C to 40°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . < ±1 ppm

Source Characteristics

OSC level

Voltage range

@ 1 MHz ≤ Frequency ≤ 1 GHz (When terminal is open) . . . . . . . . . . . . . . . . . . . . . 0.2 mV

@ 1 GHz < Frequency ≤ 1.8 GHz (When terminal is open) . . . . . . . . . . . . . . . . . . . 0.2 mV

, R, X, G, B, Cp, Cs, Lp, Ls, Rp, R

y

, D, Q, |Γ|, θy, Γx, Γ

s

y

to 1 V

rms

rms

to 0.5 V

rms

rms

Current range

@ 1 MHz ≤ Frequency ≤ 1 GHz (When terminal is shorted). . . . . . . . . . . . . . . . . . . 4

@ 1 GHz < Frequency ≤ 1.8 GHz (When terminal is shorted). . . . . . . . . . . . . . . . . . 4

µ

A

rms

µ

A

rms

Power range

@ 1 MHz ≤ Frequency ≤ 1 GHz (When terminating with 50 Ω). . . . . . . . . . . . . . . . . –67 dBm to 7 dBm

@ 1 GHz < Frequency ≤ 1.8 GHz (When terminating with 50 Ω) . . . . . . . . . . . . . . . –67 dBm to 1 dBm

OSC level resolution

AC voltage resolution

0.22 V
70 mV
22 mV
7 mV

2.2 mV

0.7 mV

0.2 mV

rms

rms

rms

rms

rms

rms

rms

< V

< V
< V

< V

< V

< V

≤ V

OSC

OSC

OSC

OSC

OSC

OSC

OSC

≤ 1 V

rms

≤ 220 mV

≤ 70 mV

≤ 22 mV

≤ 7 mV
≤ 2.2 mV
≤ 0.7 mV

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 mV

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.5 mV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.2 mV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.05 mV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.02 mV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.005 mV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.002 mV

rms

to 20 mA
to 10 mA

rms

rms

2

Agilent 4291B RF Impedance/Material Analyzer

AC current resolution

4.4 mA

1.4 mA

0.44 mA
140
44

µ

14

µ

4

µ

A

AC power resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.1 dBm

OSC level accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A + B +

where,

A depends on temperature conditions as follows:

@ within referenced to 23±5°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 dB

@ other environmental temperature conditions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 dB

B depends on OSC level as follows:

@ V
(I
(P

rms

rms

rms

µ

A

rms

A

rms

A

rms

≤ I

rms

OSC

≥ 5 mA

OSC

≥ –5 dBm)

OSC

< I

OSC

< I

OSC

< I

OSC

< I

OSC

< I

≤ 140

OSC

< I

≤ 44

OSC

≤ 14

OSC

≥ 250 mV

rms

≤ 20 mA
≤ 4.4 mA

≤ 1.4 mA

≤ 440

µ

µ

A

µ

A

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 µA

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 µA

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 µA

rms

µ

yA

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 µA

rms

A

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.4 µA

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.1 µA

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.04 µA

6

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0 dB

rms

)

[dB]

 f

1800

[MHz]

dB

@ 250 mV
(5 mA

rms

(–5 dBm > P

rms

> I

OSC

OSC

> V

OSC

≥ 2.5 mV

≥ 50

≥ –45 dBm)

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 dB

rms

µ

A

)

rms

@ other OSC level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 dB

Definition of OSC level

• Voltage level: 2  voltage level across the 50 Ω which is connected to the output terminal (This level is

approximately equal to the level when a terminal is open.)

• Current level: 2  current level through the 50 Ω which is connected to the output terminal (This level is

approximately equal to the level when a terminal is shorted.)

• Power level: when terminating with 50 Ω

OSC level accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1

/2 of specification value (typical)

Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . APC-7

Output impedance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 Ω (Nominal value)

DC bias (Option 001)

DC voltage level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0 to ±40V

DC current level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

DC level resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 mV, 20

µ

A to 100 mA and –20 µA to –100 mA

µ

A

DC level accuracy

@ 23±5°C

Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.1 % + 4 mV + (I

Current. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.5 % + 30

µ

A + (V

dc [mA]

dc [V]

 5

/10

[Ω]

[kΩ]

) mV

) mA
@ 8 to 18°C and 28 to 38°C

Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.2 % + 8 mV + (I

Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 % + 60

µ

A + (V

dc [mA]

dc [v]

 10

/5

[Ω]

[kΩ]

) mV

) mA
@ 0 to 8°0C and 38 to 40°C

Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.3 % + 12 mV + (I

Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.5 % + 90

µ

A + (V

dc [V]

dc [mA]

 3/10

 15

[Ω]

[kΩ]

) mV

) mA

3

Agilent 4291B RF Impedance/Material Analyzer

Level monitor

Monitor parameters . . . . . . . . . . . . . . . . . . . . . . . . . OSC level (voltage, current), DC bias (voltage, current)

Monitor accuracy

OSC level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Same as OSC level accuracy (typical)

DC bias . . . . . . . . . . . . . . . . . . . . . . . . . . Twice as bad as specifications of dc level accuracy (typical)

Sweep Characteristics

Figure 1-2. DC Voltage and Current Level Range (Typical)

Sweep parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . Frequency, OSC level (voltage), DC bias voltage/current

Sweep setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Start Stop, or Center Span

Sweep type

Frequency sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Linear, Log, Zero-span, List

Other sweep parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Linear, Log, Zero-span

Sweep mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Continuous, Single, Manual, Number of groups

Sweep direction

AC level, DC bias (voltage and current) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Up sweep, Down sweep

Other sweep parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Up sweep

Number of measurement points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 to 801 points

Averaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Sweep average, Point average

Delay time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Point delay time, Sweep delay time

Measurement circuit mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Series circuit mode, parallel circuit mode

Calibration/Compensation

Calibration function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Open/Short/50 Ω calibration, Low loss calibration

Compensation function . . . . . . . . . . . . . . . . . .Open/Short/Load compensation, Port extension, Electric length

4

Agilent 4291B RF Impedance/Material Analyzer

Measurement Accuracy

Conditions of accuracy specifications

• Open/Short/50 Ω calibration must be done. Calibration ON.

• Averaging (on point) factor is larger than 32 at which calibration is done if Cal points is set to
USER DEF.

• Measurement points are same as the calibration points.

• Environmental temperature is within ±5°C of temperature at which calibration is done, and within l3°C
to 33°C. Beyond this environmental temperature condition, accuracy is twice as bad as specified.

|Z|, |Y| Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±(E

The illustrations of |Z| and |Y| accuracy are shown in Figures l-3 to 1-6.

θ Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±

L, C, X, B Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±(E

R, G Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±(E

a

a

D Accuracy (∆D)

Ea+ E

@ |D

tan ( )| < 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± .

x

Especially, @ D

Q Accuracy (∆Q)

@ |Q

tan ( )| < 1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± .

x

Especially, @ ≥ Q

(E

b

100

≤ 0.1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±

x

Ea + E

b

100

10

+ Eb)

a

≥ 10 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±Q

x

+ Eb) [%]

a

(E

+ Eb)

a

100

+ Eb)  (1 + D
+ Eb)  (1 + Q

(1 + D

2

)tan ( )

x

1  Dxtan ( )

E

(E

[rad]

2

x

2

x

E

a

100

+ E

a

100

+ Eb)

a

) [%]
) [%]

+ E

b

100

+ E

E

(1 + Q

2

)tan ( )

x

(1  Qx)tan ( )

a

100

+ E

E

a

100

(Ea + Eb)

2

x

100

b

b

b

±

Where,

D

: Measured vaulue of D

x

E

: depends on measurement frequency as follows:

a

@ 1 MHz ≤ Frequency ≤ 100 MHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.6

@ 100 MHz < Frequency ≤ 500 MHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.8

@ 500 MHz < Frequency ≤ 1000 MHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.2

@ 1000 MHz < Frequency ≤ 1800 MHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.0

E

= (Zs/|Zx| + Yo|Zx|  100

b

Q

: Measured value of Q

x

Z

: impedance measurement value [Ω]

x

Z

and Yodepend on number of point averaging (Nav), OSC level (V

s

value (Z

) and the test head used as follows:

x

), impedance measurement

OSC

5

Agilent 4291B RF Impedance/Material Analyzer

Table 1-1. Zsand YoWhen High Impedance Test Head Is Used

Measurement Conditions

Number
of Point Meas.
Averaging OSC Signal Level Impedance
(Nav)(V

1 ≤ N

≤ 7 0.02V ≤ V

av

)(Z

osc

V

< 0.02V – x (0.2 + 0.001 x f

osc

< 0.12V – 0.2 + 0.001 x f

osc

)Z

x

[Ω]Y

S

0.02

V

osc

[MHz]

[S]

o

0.02

) x (5 x 10–5+ 2 x 10–7x f

[MHz]

V

osc

5 x 10–5+ 2 x 10–7x f

[MHz]

[MHz]

)

N

≥ 8 0.02V ≤ V

av

0.12V ≤ V

0.12V ≤ V

osc

V

< 0.02V – x (0.1 + 5 x 10–4x f

osc

< 0.12V – 0.1 + 5 x 10–4x f

osc

osc

Z

≥ 500 Ω 0.2 + 0.001 x f

x

Z

< 500 Ω 0.2 + 0.001 x f

x

Z

≥ 500 Ω 0.1 + 5 x 10

x

Z

< 500 Ω 0.1 + 5 x 10

x

Table 1-2. Zsand YoWhen Low Impedance Test Head Is Used

Measurement Conditions

Number
of Point Meas.
Averaging OSC Signal Level Impedance
(Nav)(V

1 ≤ N

≤ 7 0.02V ≤ V

av

)(Z

osc

V

< 0.02V – x (0.1 + 0.001 x f

osc

< 0.12V – 0.1 + 0.001 x f

osc

0.12V ≤ V

osc

)Z

x

Z

≤ 5 Ω 0.01 + 0.001 x f

x

[MHz]

[MHz]

0.02

V

osc

[MHz]

–4

x f

[MHz]

–4

x f

[MHz]

[Ω] Y

S

0.02

V

osc

[MHz]

[MHz]

5 x 10–6+ 2 x 10–7x f

2 x 10–5+ 2 x 10–7x f

0.02

) x (2 x 10

[MHz]

V

osc

2 x 10

2 x 10

7 x 10

o

0.02

) x (1 x 10–4+ 2 x 10–7x f

[MHz]

V

osc

[S]

–5

+ 1 x 10

–6

+ 1 x 10

–6

+ 1 x 10

–5

+ 1 x 10

1 x 10–4+ 2 x 10-7x f

1 x 10–4+ 2 x 10–7x f

[MHz]

[MHz]

–7

x f

)

[MHz]

–7

x f

[MHz]

–7

x f

[MHz]

–7

x f

[MHz]

)

[MHz]

[MHz]

[MHz]

Z

N

≥ 8 0.02V ≤ V

av

0.12V ≤ V

> 5 Ω 0.05 + 0.001 x f

x

V

< 0.02V – x (0.05 + 5 x 10

osc

< 0.12V – 0.05 + 5 x 10–4x f

osc

Z

osc

≤ 5 Ω 0.01 + 5 x 10

x

Z

> 5 Ω 0.02 + 5 x 10

x

0.02

V

osc

[MHz]

–4

x f

[MHz]

[MHz]

–4

x f

[MHz]

–4

x f

[MHz]

1 x 10–4+ 2 x 10–7x f

0.02

) x (3 x 10–5+ 1 x 10–7x f

V

osc

3 x 10–5+ 1 x 10–7x f

3 x 10–5+ 1 x 10–7x f

3 x 10–5+ 1 x 10–7x f

[MHz]

[MHz]

[MHz]

[MHz]

[MHz]

At the following frequency points, instrument spurious characteristics could occasionally cause measure­ment errors to exceed specified value because of instrument spurious characteristics.

10.71 MHz 17.24 MHz 21.42 MHz 42.84 MHz

514.645 MHz 686.19333 MHz 1029.29 MHz 1327.38666 MHz

See “EMC” under “Others” in “General Characteristics.”

6

Agilent 4291B RF Impedance/Material Analyzer

Figure 1-3. Impedance Measurement Accuracy Using High Impedance Test Head (@ Low OSC Level)

Figure 1-4. Impedance Measurement Accuracy Using High Impedance Test Head (@ High OSC Level)

7

Agilent 4291B RF Impedance/Material Analyzer

Figure 1-5. Impedance Measurement Accuracy Using Low Impedance Test Head (@ Low OSC Level)

Figure 1-6. Impedance Measurement Accuracy Using Low Impedance Test Head (@ High OSC Level)

8

Agilent 4291B RF Impedance/Material Analyzer

Typical measurement accuracy when open/short/50 Ω/low-loss-capaciter calibration is done

Conditions

• Averaging on point factor is larger than 32 at which calibration is done.

• Cal Points is set to USER DEF.

• Environmental temperature is within ±5°C of temperature at which calibration is done, and within 13°C
to 33°C. Beyond this environmental temperature condition, accuracy is twice as bad as specified.

|Z|, |Y| Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±(E

θ Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± [rad]

L, C, X, B Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± (E

R, G Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± (E

+ Eb)2+ (EcDx)2[%]

a

+ Eb)2+ (EcQx)2[%]

a

+ Eb) [%]

a

E

c

100

D Accuracy

2

@ |D

Especially, D

tan(Ec/100)| < 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± ±

x

x

Q Accuracy

@ |Q

tan(Ec/100)| < 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± .

x

Especially, ≥ Q

10
E

≤ 0.1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± ±

≥ 10 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± Q

c

x

(1 + Dx) tan(Ec/100)
1D

tan(Ec/100)

x

E

c

100

2

(1 + Qx)tan(Ec/100)
1  Q

tan(Ec/100)

x

2

x .

E

100

Where,

D

: Actual D value of DUT

X

E

, Eb: are as same as Eaand E

a

is done.

E

= 0.06 + 0.14  (Typical)

c

F

1800

of the measurement accuracy when OPEN/SHORT/50 Ω calbration

b

F : measurement frequency [MHz]
Q

: Actual Q value of DUT

x

c

9

Agilent 4291B RF Impedance/Material Analyzer

Figure 1-7. Typical measurement accuracy when open/short/50 Ω/low-loss-capaciter calibration is done

10

Options 013 and 014 High Temperature Test Heads

Specification for Option 013 and 014 High Temperature Test Heads

Frequency Characteristics

Operating frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 MHz to 1.8 GHz

Source Characteristics

OSC level

Voltage Range

@ 1 MHz ≤ Frequency < 1 GHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.2 mV

@ 1 GHz ≤ Frequency ≤ 1.8 GHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.2 mV

OSC level resolution

AC voltage resolution

@ 110 mV
@ 11 mV
@ 1.1 mV
@ 0.2 mV

rms

rms

rms

rms

< V

< V

< V

≤ V

OSC

≤ 110 mV

OSC

OSC

OSC

≤ 500 mV

≤ 11 mV
≤ 1.1 mV

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 mV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.2 mV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 µV

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 µV

rms

AC current resolution

@ 2.75 mA
@ 0.275 mA
@ 27.5
@ 5

µ

A ≤ I

µ

< I

OSC

< I

OSC

OSC

≤ 27.5

≤12.5 mA

≤ 2.75 mA

≤ 275

µ

µ

A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.05 µA

rms

rms

A

< I

rms

OSC

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 µA

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 µA

rms

A

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.5 µA

rms

AC power resolution

@ –66.1 dBm ≤ P

≤ 1.9 dBm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.2 dBm max

OSC

OSC level accuracy

@ 1 MHz ≤ Frequency ≤ 1 GHz, V

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A + B + dB

OSC

≤ 0.25 V

rms(IOSC

≤ 6.3 mA, P

≤ –4.1 dBm)

OSC

8[dB]  frequency[

Where,

to 500 mV

rms

rms

1800

250 mV

MHz

rms

rms

]

A depends on temperature conditions as follows:

within referenced to 23±5°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 dB

@ 0°C to 18°C, 28°C to 40°C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 dB

B depends on OSC level as follows:

@ 0.5 V
(12.5 mA

(1.9 dBm ≥ P

@ 120 mV
(3 mA
(–10 dBm > P

@ 1.2 mV
(30
(–50 dBm > P

≥ V

rms

rms

rms

> I

rms

rms

µ

A

> I

rms

≥ 120 mV

OSC

≥ I

≥ 3mA

OSC

≥ –10 dBm)

OSC

> V

OSC

≥ 30

OSC

≥ –50 dBm)

OSC

> V

OSC

≥ 5

OSC

≥ –66.1 dBm)

OSC

rms

≥ 1.2 mV

µ

A

)

rms

≥ 0.2 mV

µ

A

)

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0 dB

rms

)

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 dB

rms

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 dB

rms

Output impedance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 Ω (Nominal value)

Level Monitor

Monitor accuracy

OSC level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Same as OSC level accuracy (typical)

DC bias . . . . . . . . . . . . . . . . . . . . . . . . . . . Twice as bad as specifications of dc level accuracy (typical)

11

Options 013 and 014 High Temperature Test Heads

Basic Measurement Accuracy

Conditions of accuracy specifications

• OPEN/SHORT/50 Ω calibration must be done. Calibration ON.

• Averaging (on point) factor must be larger than 32 at which calibration is done.

• Measurement points are same as the calibration points.

• Environmental temperature is within ±5°C of temperature at which calibration is done, and within 13°C
to 33°C. Beyond this environmental temperature condition, and within 0°C to 40°C, accuracy is twice as
bad as specified.

• Bending cable should be smooth and the bending angle is less than 30°.

• Cable position should be kept in the same position after calibration measurement.

• OSC level must be same as level at which calibration is done.

• OSC level is less than or equal to 0.25 V, or OSC level is greater than 0.25 V and frequency range is
within 1 MHz to 1 GHz.

|Z| Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±(E

θ Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ± [rad]

+ Eb) [%]

a

(Ea+ Eb)

100

Where,

E

: depends on measurement frequency as follows:

a

@ 1 MHz ≤ frequency ≤ 100 MHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.6 [%]

@ 100 MHz < frequency ≤ 500 MHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.8 [%]

@ 500 MHz < frequency ≤ 1 GHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.5 [%]

@ 1 GHz < frequency ≤ 1.8 GHz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3.0 [%]

E

= (Zs/Zx+ YoZx)  100 [%]

b

Z

and Yodepend on number of point averaging (Nav) and OSC level (V

s

Z

: Impedance measurement value [Ω]

x

) as follows:

osc

12

Options 013 and 014 High Temperature Test Heads

Table 1-3. Zsand YoWhen High Impedance Test Head Is Used

Measurement Conditions

Number
of Point
Averaging OSC Signal Level
(Nav)(V

1 ≤ N

≤ 7 0.02V ≤ V

av

8 < N

av

1

)

osc

0.12V ≤ V

0.02V ≤ V

Z

[Ω]Y

S

V

< 0.02 x (0.2 + 0.001 x f

osc

< 0.12 0.2 + 0.001 x f

osc

osc

V

< 0.02 x (0.1 + 0.001 x f

osc

< 0.12 0.1 + 0.001 x f

osc

0.02

V

osc

0.2 + 0.001 x f

0.02

V

osc

[MHz]

[MHz]

[MHz]

[MHz]

[MHz]

[S]

o

0.02

) x (5 x 10–5+ 2 x 10–7x f

V

osc

–5

5 x 10

+ 2 x 10–7x f

–6

3 x 10

+ 2 x 10–7x f

) x (2 x 10–5+ 2 x 10–7x f

0.02

V

osc

2 x 10–5+ 2 x 10–7x f

[MHz]

[MHz]

[MHz]

[MHz]

[MHz]

)

)

1. V

= 0.12V  l

osc

= 3 mA  P

osc

0.12V ≤ V

= –10 dBm, V

OSC

osc

= 0.02V  l

osc

= 0.5 mA  P

osc

= –26 dBm

osc

Table 1-4. Zsand YoWhen Low Impedance Test Head Is Used

Measurement Conditions

Number
of Point
Averaging OSC Signal Level
(Nav)(V

1 ≤ Nav≤ 7 0.02V ≤ V

8 < N

av

1. V

= 0.12V  l

osc

= 3 mA  P

osc

1

)

osc

0.12V ≤ V

0. 02V ≤ V

0.12V ≤ V

= –10 dBm, V

OSC

V

< 0.02 x (0.1 + 0.001 x f

osc

< 0.12 0.1 + 0.001 x f

osc

osc

V

< 0.02 x (0.05 + 0.001 x f

osc

< 0.12 0.05 + 0.001 x f

osc

osc

= 0.02V  l

osc

= 0.5 mA  P

osc

= –26 dBm

osc

0.1 + 0.001 x f

Z

[Ω] Y

S

0.02

V

osc

[MHz]

[MHz]

0.05 + 0.001 x f

0.02

V

osc

0.03 + 0.001 x f

2 x 10–5+ 2 x 10–7x f

[S]

o

0.02

) x (1 x 10–4+ 2 x 10–7x f

[MHz]

V

osc

1 x 10–4+ 2 x 10–7x f

[MHz]

[MHz]

[MHz]

[MHz]

1 x 10–4+ 2 x 10–7x f

0.02

) x (3 x 10–5+ 2 x 10–7x f

V

osc

3 x 10–5+ 2 x 10–7x f

3 x 10–5+ 2 x 10–7x f

[MHz]

[MHz]

[MHz]

[MHz]

[MHz]

[MHz]

[MHz]

)

)

At the following frequency points, instrument spurious characteristics could occasionally cause measure­ment errors to exceed specified value because of instrument spurious characteristics.

10.71 MHz 17.24 MHz 21.42 MHz 42.84 MHz

514.645 MHz 686.19333 MHz 1029.29 MHz 1327.38666 MHz

See “EMC” under “Others” in “General Characteristics.”
The excessive vibration and shock could occasionally cause measurement errors to exceed specified values.

13

Options 013 and 014 High Temperature Test Heads

Figure 1-8. Impedance Measurement Accuracy Using High Temperature High Impedance Test Head (@ Low OSC Level)

Figure 1-9. Impedance Measurement Accuracy Using High Temperature High Impedance Test Head (@ High OSC Level)

14

Options 013 and 014 High Temperature Test Heads

Figure 1-10. Impedance Measurement Accuracy Using High Temperature Low Impedance Test Head (@ Low OSC Level)

Figure 1-11. Impedance Measurement Accuracy Using High Temperature Low Impedance Test Head (@ High OSC Level)

15