Agilent 4280A Data Sheet

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H428OA Applications

l

capacitance and Conductance With or Without

Constant DC Bias

HP’s 4280A 1MHz C Meter/C-V Plotter can measure and
display capacitance and conductance. A 1 MHz test signal with
level of 1OmVrms or 30mVrms is used.

Internal DC bias ( f 1OOV) can be applied when needed.

4280 Front Panel Displays C,G and DC bias

n Test Floating and Grounded Devices

Both Floating and Grounded devices can be tested. This
is important because wafer probers will have either floating or
grounded chucks. Both configurations are in common use.

n

capacitance and Conductance Using Staircase

Bias Sweep

4280’s built-in + IOOV DC bias supply can be controlled
from the front panel to sweep in staircase fashion. Capacitance
and conductance can be measured at each step.

Deep Level Transcient Spectroscopy

(DL TS) - Example of Pulse Bias Application

DLTS is used to analyze semiconductor imperfections which
effect IC performance. Small imperfection concentrations which
are too small for analysis by C-V techniques can often be analyz­ed by DLTS.

m Hard Copy Output

C-V and G-V measurements require no external equipment
and are internally synchronized. Results can be output to analog
X-Y recorders or to computers via HP-IB (IEEE 488).

n Capacitance and Conductance vs. Time

(Pulse Bias)

Minority carrier lifetime and surface generation velocity in

MIS structures can be obtained using C-t results. 4280A uses
two different C-t methods depending on measurement resolu­tion required on the time axis.

Delay time is the time between measurements. When delay
time is set to 10 milliseconds or greater, the 4280A will apply
a single pulse to the device under test. Then a BURST of
measurements are made.

START

When delay time is less than 10 milliseconds, an external
pulse generator like HP’s 8112A must be used. The external
pulse generator applies repetitive pulses to the device under
test. The 4280A makes a single measurement after each pulse.

In the SAMPLING MODE, the 4280A provides synchronization

signals to the external pulse generator.

Time (5)

4

STOP

High speed Gt testing and variable supercooled temperature
are major requirements of DLTS test systems. Shown here is
system hardware including HP’s 4280A for Gt testing with

pulses of IOms to 32 set in duration. HP’s 8112A pulse gen­erator is added when pulse duration shorter than 10m set is

required.

DLTS is a high-frequency capacitance transient thermal

scanning method useful for observing a wide variety of traps

in semiconductors. This new technique, aimed at studying these

centers, uses the capacitance of a p-n junction or Schottky bar-

rier as a probe to monitor the changes in the charge state of

the centers. Complete Gt characteristics are obtained at multi­ple supercooled temperatures.

Real devices have multiple trap levels and different trap
concentrations. Resulting DLTS curve has multiple peaks as
shown below.

Temperature (deg C)

Important parameters which can be derived from DLTS in-

clude: 1) surface state density, 2) trap concentration, 3) energy

level of traps, and 4) trap capture cross section.

Advantages offered by HP’s 4280A are to expand the range

of analysis to shallower energy levels by offering resolution to

1 O,us when synchronized to an external pulse generator like HP’s

8112A.

HP’S 4280A Offers New Measurement C;

R6

MC,

Tc

M

VC

S

n

FC

(2‘

S.,

Wntroduction

Hewlett-Packard’s Model 4280A 1 MHz C Meter/C-V

Plotter offers new measurement capability and flexibility

for the design and production of IC’s. Benefits are im-

proved IC quality and improved engineering productivity.

HP’s 4280A has capability previously requiring the
following complicated test set up: 1) capacitancelconduc­tance meter, 2) function generator, and 3) computer for
test synchronization.

New measurement capability is featured in transient
C-t measurements with 10 microsecond resolution. Such
testing is used to analyze deep level impurity concentra­tions which effect IC performance. Transient C-t resolu­tion of 10 microseconds is up to 1000 times better than
ever before available. 4280A features 10ms C-t resolu­tion using internal pulse generator. Add HP 8112A pulse
generator or equivalent to achieve 10,~s resolution.

Convenience features include the ability to test both
floating and grounded devices. Also 428OA’s has capabili­ty to compensate a wide range of stray impedances. This
helps eliminate the effect of test fixture residuals.

OFFn nON

cl

:42V = MAXA UNKNOWN

&OATlNG

26

meni
Func

Th
millis
parer

MC

2

W

W428OA Front Panel

Features

1 HP-IB - Construct Your Own System

Standard on 4280A, HP-IB can help you construct an automatic

system. Such systems are used in applications ranging from
materials research, device R&D, process engineering, wafer pro­duction and quality assurance.

2 Residual Compensation and Capacitance Offset
Compensate test fixture residuals including up to 5 meters of stan­dard cable (HP P/N 81204195). Also use with Option 001 when off-

setting large values of capacitance to obtain extra digit of resolu­tion on 100pFllnF ranges.

3 Capacitance Digital Display
Standard capacitance display resolution will be 3% digits or 4%
digits depending on test conditions. Option 001 features 5% digit
capacitance resolution using capacitance offset function. This
display also can show deviation.

4 Wide Capacitance Measurement Range
Capacitance measurement range is from 0.001 pF to 1 .QOOOnF.

5 Conductance Digital Display
Standard conductance display resolution will be 3% digits or 4%
digits depending on test conditions. This display also shows
deviation.

6 Wide Conductance Measurement Range
Conductance measurement range is from 0.01~5 to 12.000mS.

7 DC Bias and Time Display

DC bias parameters in volts or time in seconds is displayed depen-

ding on operating mode.

8

Wide Range of DC Bias and Time

DC bias can be varied in + IOOV range. Bias can be 1) constant,

2) staircase sweep (C/G-V) or 3) pulsed (C/G-t).
V-t display shows values of voltage staircase sweep parameters

in C/G-V modes. These parameters include hold time, and step delay

time. V-t display also shows C/G-t parameters like delay time.

9

Enter Numedc Values of Voltage and Time
After selecting bias and time parameters and keying in numeric
values, this key enters value into 4280A memory.

10 Numeric Data Ready to Enter
This LED must be lit before numeric sweep parameter can be
entered.

11 Sweep StartLStop

Start/Stop key controls DC bias and time sweep output. V output

LED lights when bias voltage is applied.

12 Se/act Sweep Parameter or Constant DC Bias

Use up/down keys to select constant DC bias voltage or time sweep

parameter. Enter numeric values using numeric keys.

13

Select Bias Mod&Limit Output Voltage%ld Range

Multi function key selects DC bias mode. Also allows entry of DC
bias voltage limit from numeric keys and acts as Range Hold key.

14 Dispfay Deviation, Percent or Deviation Percent

Perform math operations and display results on C/G displays.

15 Change Number of Display D&its

Reduce number of display counts to less than 1000. Use before
X-Y recording

16 Setup X-Y Recorder
Analog output voltage represents C/G display counts and DC
bias/time sweep. Establish origin and size of X-Y plotting area.

MC

i

Note

ME.

A

tc

Prir

3

Dability for Design and Production of /C’S

EUtjCTlON

C-G c

G

- hJ/JTH -

18

‘2.G RANGE , , ,r~ e

&UT0 MANUAL inn hls,

ZERO

25

“is:,.

“...

gPEN

24

SELF

TEST

17TdggarandSwasptUodeContml

In sweep mode, this key selects single or repetative sweep trig-

gered from front panel, or select single sweep tnggerea externally.

, .*

Also can trigger single measurement internally or externally.

18 Be&t Displav Function
In C only function, G displays blanks and vice versa. Advantage
is test speed approximately doubles.

79 Measulement Range control
Manual ranging may be needed during X-Y recording. Also needed
using C offset capability to obtain one extra digit of C resolution.

20

Measumment speed Control

Fast mode requires approximately 70ms per measurement in C or

G only modes and 150ms per measurement in C and G mode.

Medium mode requires approximately 100ms per measurement in

C or G only modes and 1 QOms per measurement in C and G mode.
Slow mode requires approximately 330ms per measurement in C

or G only mode and 520ms in C and G mode. (Advantage is noise

rejection and in some cases 1 more digit display resolution).

2

1 Add One D&it to Capacitanca Resolution
Option 001 and C-offset enables one extra digit of resolution on
1OOpF and InF ranges.

22

select Fmm Two Test Levels

Choose 30mVrms or 1OmVrms AC test level.

STORE DIGIT SHIFT

A % A %

X-Y RECORDER

TRIGGER

Self test does not check calibration.

With fixture open, store residual capacitance and conductance.

ENTER

23

Vettfy Normal Operation

24 Compensate Fixture Residuals

Residuals are compensated when CORRECTION ENABLE is turn­ed on.

25 Pmtaction Fmm High Voltaga Bias.
When switch is in + 42V position, shorting cap has no effect. Max
output is &42V.

When switch is in + 1OOV position - center pin and shield of
Remote on/off connector must be shorted to turn bias on. This
should be accomplished by removing shorting cap and shorting
center pin to shield through remote switch.

26

Test Floating or Gtvundad Devices

Floating devices can be tested over 4280A’s entire measurement

range. Grounded devices can be tested in top two ranges only

(1 OOpF/l mS and 1 nF/l OmS ranges).

27 Two Ten&al Pair

Hi and Low terminals have guard on coaxial shields.

28

Mounting Guides for l&WA and 16081A Fixwas

1608OA, 16081 A and 16082A fixtures mounts directly on 4280A front

panel. These guide holes accept fixture guide pins.

29 Connect Circuit Ground to Chassis Ground

I

9

I

4

n

4280A Specifications

n

428OA Measurement Functions: II C-V Measurement:

Capacitance (C), conductance (G), capacitance and con­ductance (C&G), capacitance vs. DC bias (C-V), conduc­tance vs. DC bias (G-V), capacitance and conductance vs.

DC bias (C&G-V), capacitance vs. time (C-t), conductance
vs. time (G-t) and capacitance and conductance vs. time
(C&G-t).

AC Test Signal:

Frequency:

OSC

Display:

Maximum Display Counts: C =

Measurement Terminals:

Configuration:

Max Offset Voltage:
Max Resistance:
Max Allowable Current: +

Connection Mode:

between DUT and Measurement circuit.

Usage

Connection

1 MHz + 0.01 %

Level:

30mVrms If: 10% or 1 OmVrms + 10 %

Max 4% digits (5% digits for Opt 001)

19000,

G = 12000

Two-terminal pair

High and Guard, Low and Guard

+ 1mV (DC Bias OFF)
+ 20R

1 OOmA

Set connection configuration

Connection Mode

Floating Grounded

To measure

Floated Device Grounded Device

To meawre

To measure

strays for
compensation

Measures C-V, G-V or C&G-V characteristics using inter-

nal staircase bias.

n

C-t Measurement:

Measures C-t, G-t or C&G-t characteristics using internal
bias source, external pulse bias source, or combination of
internal and external bias sources.

Burst Mode:

repetative measurements are made with specified
time interval between measurements. Used when
delay time setting >lOmS.

Sampling Mode:

single samples taken between pulses. Delay be­tween application of measure voltage and sample

can be specified. Used when delay time setting is

less than 1Oms. This mode requires addition of an

external pulse generator like HP’s 8112A.

Measurement Speed vs. Oscillator Level and

Display Resolution:

Measurement Speed OSC Level Display Digit

pgiigq

W Measurement Accuracy:

Measurement accuracy in the following tables is valid
when these conditions are met: 1) r30-minute warm up, 2)
ZERO/OPEN calibration is performed, 3) CORRECTION

I

v1 = Internal DC bias source when an external bias source

(pulse generator) is used. V1 and Va can be set either from internal
or external DC bias source.

n

C/G Measurement Range

I I

(Error Compensation Of9

I

Measurement Range

C/G
Range

C= IOpF C=OOO1pF to 19000pF
G = 1 OOllS G = 0 OIBS to 120.00&

C=lOOpF C=O.OlpF to 19O.OOpF C = 0 01 pF to 50 OOpF’
G=lmS G = 0.0001 mS to 1 2000mS G = 0.0001 mS to 1 2000mS

C=lnF C = 0 0001 nF to 1.9000nF
G = 1 OmS G = 0 001 mS to 12 OOOmS G = 0.001 mS to 1200CmS

‘Typical values

Floating DUT Grounded DUT

This C/G range IS not
available in Grounded DUT

mode

C = 0 0001 nF to 1 7600nF’

I

ENABLE IS ON, and 4) Temperature 23”C+5”C. Note that
correction enable compensates for measurement residuals
and reduces measurement range by the amount of residual
compensation.

Accuracy is valid at 4280A front panel with cable length

switch in “0” position. Additional error must be added

when using the 16082A test cables and with cable length

switch in the “lm” position. Add 0.1 % of reading for C
and 0.2% of reading for G when 16082A is used.

C accuracies are specified when D I 0.05 when using

C&G, C&G-V and C&G-t display modes. C accuracies are
specified when D 5 0.01 when using C only, G only, C-V
G-V, C-t and G-t display modes. See page 10 Reference

Data for more.

One pulse is applied then

Repetative pulses are applied with

ACCUIX~

Tab/e

1 -C&G Display Modes:

Use this table in the following measurement modes: 1) C&G,

2) C&G-V and 3) C&G-t when not applying external fast pulses. See tables 3 and 4 for accuracy when
applying external fast pulses.

DUT

Connection

Mode

Available

Bias Modes

Range - ‘”

1 NC = C de&y counts m C & G mode with CORRECTION ENABLE OFF

10

l-

1mS ?[02% rag+@+& cntsl +[03% rdg+(3+% cnts] 1 f[04% rdg+(30+$ cnts] 1 ?[05% rdg+(30+% cnts]
lnF2 + 10 1 O/o rda + 3 cntsi k (0 2% rdq + 3 cnts) i-(0 3%

1 OmS ‘[1 2% rdg+(3+% cnts] k[l 2% rdg+(3+$ Cntsl +[I 4% rdg+(lO+$J cnts]

*INT Bias OFF,=== 2 /or A
‘EXT SLOW Bias = or JL *EXT SLOW Bias = 0rJ-L

*lNT+ EXT SLOW Bias

0% = 3OmVrms O!X = IOmVrms OSC = 3OmVrms ES = 1OmVrms

k (0 1 % rdg + 5 cnts)

?[02% rdg+(L+& cnts] c[O3% rdg+(i+& cnts]
k (0 1 % rdg + 3 cnts) f (0 2% rdg + 3 + cnts) c[O 3%

OPF

Floating DUT Mode Grounded DUT Mode

‘INT Bias OFF, = .q ./or A
‘INT+ EXT SLOW Bias

t(0 2% rdg + 5 cnts)

1

This C/G range IS not wallable in Grounded DUT mode

rdg + 3+ cnts)

rdg+

10 cnts)

+(O 4% rdg + 30 + cnts)

+(04% rdgc 10 cnts)
k[l 4% rdg+(20+$ cnts]

6

b

Accuracy Table 2 -

C only and G only Display Modes:

Use this table in the following measurement
modes: 1) C only, 2) G only, 3) C-V, 4) G-V, 5) C-t and 6) G-t. Do not use this table when applying external fast
pulse bias. See tables 3 and 4 for fast external pulse bias accuracy.

DUT

Connection

Mode

AvaIlable

Boas Modes

1 OpF

C/G
Measuring
Range

1 NG = G display counts I” C&G mode with CORRECTION ENABLE OFF 2 C accuracy is not specified for C display rPOOpF

1 oofis k [O 25% rdg + (5 +& cnis]

1 OOpF t[O 15% rdg+@+$ cnts] +[025% rdg+(3+$ cnts] -t [0 3 0 h

1mS

lnF2 i-[015X ,,:,+,3+$& cnts] ?[025O/a rdg+(3+ $ cnts] i- [O 3% rdg + (20 + $) cnls] 1 ?[04% rdg+(ZO+& cnts]
1 OmS3 k[l 25% rdg+(3+$ cnts] k[l 25% rdg+(3+ & cnts] ?[l 4% rdg+(ZO +$ cnts] t[l 4% rdg+(ZO+& cnts]

NC = C display counts I” C&G mode with CORRECTION ENABLE OFF

*INT Bias OFF. -Y, 2, / or A

*EXT SLOW Boas z or q

‘lNT+ EXT SLOW Boas

0% = BOmVrms

~[015% rdg+(5+& cnts]

+[025% rdg+(3++ cnts] +[035% rdg+(3+ s cnls]

Floating DUT Mode

NG’

NC’

NC’

&[025% rdg+(5+$) cnts]

k[O35% rdg+(5+ $$ cnts]

*INT Bias OFF z, 2, / 01 A

*EXT SLOW Boas = 01 q

OSC = IOmVrms OSC = 3OmVrms OSC = 1OmVrms

3 G accuracy IS not speded for G display r2mS

*INT + EXT SLOW Bias

This C/G range IS not awlable I” Grounded DUT mode

rdg + (40 ++ cnls] ?[04% rdg+(40+$ cnts]

2 [0 4% rdg + (40 + $ cnts] ?[05% rdg+(40+$ cnts]

Grounded DUT Mode

NG’

1

b

Accuracy Table 3 -

C&G-t Modes:

Use this table in the C&G-t display mode when applying fast pulses

through external fast connector.

DUT

Connection

Mode

AvaIlable
Bl%
Modes

1OpF

C/G

Measuring

Range

1 NC = C display tour

1 oops

1 OOpF

1mS

1nF

1 OmS

T IS calculated at Nth measwement paint of a C&G-f cuive T = N*delay tome fld)*106 T is in seconds

‘EXT FAST Bias nL
‘EM FAST + INT Bias q + =
‘EXl FAST + EXT SLOW Bias 2 + =

t[(O4++/0 idg+(40+~+2T1*10-6)cnts]

i;[(O5++ rdg+(40+% +T+2T1.10-6) cnts]

?[(04+$)% rdg+(33+3+2T1*10-6) cnts]

+[(05++ rdg+(33+$$+F+2T’*106) cnts]

5 0

k [(l 4 + $ /o rdg + (43 + “+ 2T’ .10~6) cnls]

+[(25+$)% rdg+(43+&+?+2T’&) cnts]

I” C&G-t mode with CORRECTION ENABLE OFF

Accuracy Table 4 -

Floating DUT Mode (Note: Grounded DUT Mode not available)

OSC = 30mVrms

C-t,

G-t Modes:

Use this table when in the C-t or G-t display mode and applying fast

pulses through external fast bias connector

DUT

Connection

Mode

Available ‘EXT FAST Bias q

Bl%
Modes

1 OpF

1 oars

‘EXT FAST + INT Bias q+-=
‘EXT FAST + EXT SLOW Bias 4 +=

?[(06 +$/~rdg(40 +!$+= +2T’*lO”)cnts] i[(O7+~)~/~rdg+(40+~+~+2T~~,o-~)cnts]

T’ T’ T’ T’

?[(07 ++ rdg(40 +F+F +2T1*106)cnts] ?[(08 ++rdg+(40+ !!$+~+2T1.10-s)~,,~~]

Floating DUT Mode (Note: Grounded DUT Mode not available)

OSC = 3OmVrms

OSC = 1OmVrms

?[(05+$)% rdg+(40+y+2T’*10-6) cnts]

5 [(O 6 + +/o rdg + (40 + ,$ + + + 2T’ ~10~~) cnts]

,[(05++ rdg+(33+?+2T’&) cnts]

5 0

+[(06+Y)/0 rdg+(33+&+900+2T1.106

k[(l 5+$)% rdg+(43+=$+2T’*@) cnts]

t[(25++ rdg+(43+% +~+2T’*10~6) cnts]

N 1

OSC = IOmVrms

T’ 1

cnts]

1OOpF + [(O 6 +$o rdg +(33 +s+3= + 2T’ *, O-6) cnts]

1mS

1 nF*

1OmS

1 NC = G display cwnts I” C&G mode with CORRECTION ENABLE OFF

NC = C display CO”“& in C&G mode wllh CORRECTION ENABLE OFF
T IS calculafed at Nfh meawrement point of a Gt or Gl c”we
T = N*delay time (ld)*106 T IS in seconds

T’ T’

*I(07 +~)n/,rdg+(33+4n+il+2T’.10~6)cnts]

T’

?[(l 6 +$ rdg +(43+$+3$+2T’~@)cnts]

T’

?[(2 7 +$o rdg + (43 +s+3+ + 2T’ *, 06) cnts]

T’

NC’ 300

t[(O8 +~)%rdg+(33+~+g~+2T1-,0”)cnts

T’ T’

+[(08 ++/a rdg+(33+~+903+2T1*10j~CnfS]

5 0 NG’

i[(l 7 +ii) /a rdg+(43 + 30+=+2T’+cnls

5 0

?[(27 +.)/o rdg+(43 + 11+,+2T’*106)cnfs

T’

T’

NC’ 900

7

n

Math Functions:

Display measured C/G values as differential values (A),

% ratio (%) or differential %

A = C-C&

% = k

or G-Gref

x 100% or Gx

Gref

(A%)

of the reference value.

100%

DC Bias Source (continued)

Number of Readings Which Can Be Obtained:

Burst Mode: 1 to 9999
Sampling Mode: 1 to 5/td (td = delay time)

Hold Time (th):

A% = p x

n

Self Test:

Verifies functional operation but does not calibrate.

100%

or $$@ x

100%

H DC Bias Source:

Output Mode:

/or A : Selected when using C-V, G-V,

q, = or OFF: SeSecztk?o;;;n using C-t, G-t or

: or OFF : Selected when using C only or G

Output Resistance: 10Q
Max Output Current:
Output Voltage Range/Resolution/Accuracy:

~1

O”G55”C

Ranging:

= mode when V Limit/Range hold is in use.

Staircase Sweep Parameter Settings
(CV Function Only):

Start/Stop Voltage:

voltage range.

Step Voltage:

matically set as lesser of Start or Stop voltage setting.
Example, if Start is 1 .OOOV and Stop is 3O.OV,
resolution of Step is O.OlV.

OV to 3.999V: 1mV step

4.OOV to 39.99V: 1OmV step
4O.OV to 2OO.OV: 1OOmV step

Hold Time, Step Delay Time (th, td ):

3ms - 65ms: 1 ms step

0.07s

100.0s - 650.0: 1 OOms step

Hold Time/Step Delay Time Setting
Accuracy:

Time 565ms: +[0.02% setting + (loons + bias
settling time)]

Time z65ms: +[0.02% setting + (0.5ms + bias

settling time)]

Pulse Bias Parameter Settings (C-t Function Only):

DC/Pulse/Measurement Voltage:

the output voltage range.

OFF, -= (DC), 9, /or /k

C&G-V modes

only modes.

+6mA

Resolution *(% of setting + volts)

‘Accuracy is specified at 23°C + 5°C. Error doubles at

Auto ranging. Fixed range is provided in

Any voltage within the output

Resolution of step voltage is auto-

- 99.99s: 1 Oms step

+ (% of setting + seconds)

Any voltage within

EXT BIAS SLOW 65mS 5th C 1 S = 500~s

*Maxlmum Hold Time Setting I” sampling mode is llmited as

follows.

Function

N = Nth measuiement point, id = delay time

Measuring
Speed

Maximum Hold Time

(whichever is shorter)

Delay Time (t(f):

Range: 1 Ops - 32s
Resolution: 10~s Z&-j 565ms: 10~s

65ms 5 td 5 1 S: 500/S

fsstdslos: lms

tOs&d~32s: l&tlS

Delay Time Range in Burst Mode:

~1

Delay Time Range in Sampling Mode:

EXT BIAS SLOW: 200~ to 5s
EXT BIAS FAST: lO/zs to 5s

Number of C/G-t Readings which can be
obtained:

be obtained.

Burst Mode:

Sample Mode:

This determines the resolution which can

1 to 9999 readings

1 to

delay tir?re in seconds (readings)

Hold Time/Delay Time Setting Accuracy: + (%

setting + seconds)

Time 165ms: +[0.02% + (1 OOms*t + Bias Settling

Time)]**

Time r65ms: + [0.2% + (0.5ms + Bias Settling

mime)]**

*I: 10ms when internal bias is used.

l

2:

1Oms to 100ms

when doing C&G-t measurements.

delay will be added to delay time

W DC Bias Sourn: Reference Data

Settling Time: 0.05

of final value. AV = voltage Swing

Ranging Time:
Bias Voltage Output Set/Reset Logic Processing

Time: I

20ms

Bias Voltage Setting Change Logic
Processing Time ( z mode):

* AV + 1.7 (ms) to within 99.9%

10ms

120ms

31

of

41

8

n Recorder Output:

Output DC voltage proportional to C/G display counts

and voltage/time sweep range.

Output VOltgage: + 1OV for C, G and V/t data.

C or G Data:

V Data:

f 1OV for + 1000 counts (lOmV/count)

- 1OV for Start/Stop voltage, whichever is
more negative. + IOV for Start/Stop voltage, whichever
is more positive. Max 1000 data points (20mV
resolution).

Time (t) Data:

- 1OV at the application of mea-

surement voltage. + 1OV at the final data point. Max

1000 data points (20mV resolution).

Output Voltage Accuracy:

+ (% of output voltage +

volts)

C or G = *(0.5% + 20mV)

V or t = +(0.5% +

Pen

Lift Output:

40mV)

Normally +5V. OV during C-V/t

measurement.

Smoothing Function:

Output filter time constant can
be set 0.02s or 0.2s. Initial and post delay time of 2s
and 1.5s can be inserted in C-V/t basic function.

Scaling Output:

L.L., Zero and U.R.

m Data Outpui/Remote Contmk

HP - IB:

documentation and support that delivers the shortest

path to a measurement system.

Block Mode Output:

measurement and store measured data in an internal
data buffer. Then, packed data can be output. In this
mode, front panel display, math function and recorder
output do not function. Data with/without error com­pensation can be output.

Maximum Number of Data Which Can be Stored:

C, G, C-V/t or

C-G, C&G-V/t Function: 400 data points

n

Option lull High Resolution Offset

Not just IEEE-488, but the hardware,

Perform C-V/t characteristics

G-V/t

Function: 680 data points

Capacitance Measurement:

Increase C measurement resolutions by one digit on

1 OOpfll nF ranges using capacitance offset reference. This

option cannot be field installed.

c

Offset

can be set by measured data or numeric keys.

C Offset Resolution:
C Offset Setting Accuracy:

value + 05pF). This error can be compensated using
CORRECTION ENABLE key.

Measurement Accuracy:

accuracy reading before offset plus 2) accuracy of

reading after offset.

High Resolution C Mode ON/OFF Time:

Range: 0 to 1023 picofarads. C offset value

1 picofarad

+(0.2% of reference

Accuracy is the sum of 1)

350m

Measurement Range/Resolution/Display Digit:

Measuring

Time

FAST lOmV/30mV

SLOW lOmV/30mV

n

Reference data are given for information purposes and

should not be considered specifications.

Osc Leve, Measurement Range From Reference Value

MED -~~

1OmV

30mV

Range of Offset Value

lOOpF/lmS

k 19.OOpF + 19O.OpF
* 120.0@ kl 200mS

+19.OOOpF k19OOOpF
+120.00@s -cl 2000mS

Reference Data:

lnF/lOmS

n Residual Impedance of the l&.WOA:

Radial Lead Contact Block:

Axial Lead Contact Block:

70nH, 50mh2

90nH, 50mQ

n Additional Emrs Due to Test Lead Length:

When using 16081A, 16082A or P/N 8120-4195 coaxial
cable up to 5m long, use below figures to estimate addi­tional error.

a

e
51

m

2

b

zi
z 0.1

.g
B
2
0

0.01
1OP

1

lOOr lm 10m

loop Ill

Test Lead

Length (m)

C(F)

8 Emr Compensation:

Cable Length Compensation:

Residuals of standard cable (HP P/N 8120-4195) up to 5
meters long can be internally compensated.

Zero

Open:

Internally compensate stray capacitance

and conductance of test fixture with fixture open.

Additional L-R Compensation:

not included above using external computer.

Measurement Conditions:
Connection Mode:
Test Signal Level:

Compensation Range:

L (in C display) and R (in G display).

L:

19.000/4H

R: 190.009

Compensation Accuracy = -+(% rdg + counts):

L: f [0.5% rdg + (20 +$$) counts]

Grounded for compensation

30mVrms

L-R data will be displayed as

Om, lm or 0-5m.

Compensate residuals

R: *[1.2% rdg + (lo+ &$-) counts]

1NR = resistance display counts

NL = inductance display counts

Reference Data: (Continued)

l C/G Measurement Time:

Total Measurement Time is the sum of 1) Net Measure-

ment Time, 2) Internal Error Compensation Time, 3) Math

Function Time, and 4) Display Time.

The table below shows Total Measurement Time in
milliseconds. Net Measurement Time is shown in
parentheses.

Ranging Time:
OSC Level Changing Time:
Connection Mode Changing Time:

Initial Setting Time:

10Oms

40ms

11 Oms

650ms

Time Constant of C/G Measurement Circuit:

50~s when measurement time interval is <lOms in

FAST q mode and < 1OOms in MED mode, in the

C-t, G-t, and C&G-t functions.

EXT FAST: 1~s
EXT SLOW: 6fl

WW Characteristic Measun?ment Time:

2 * A + (B+C) * INTEGER (F+ 1)
where A = Hold Time, B = Step Delay Time, C = C/G

Measurement Time, D = Step Voltage, E = Start

Voltage, and F = Step Voltage

n C-t Characteristic Measurement Time

Burst Mode Measurement Time:

(delay time l no. of readings).

Sampling Mode Measurement Time:

measurement time for n data points.

Measurement Time of nth Data:

C/G-t Measurement: See below figure
C&G-t Measurement: Measurement time in below
figure times two.

Hold time plus

Sum of

W2 Measurement Envm Caused by High D

Devices:

.05sDrl:

floating DUT rnoi: using EXT. BIAS FAST add Ton

1OpFIlOOpF ranges and D% on 1nF range.

Drl:

Add =

Multiply C error by (1 + D2).

rdg to C .error. Except for

n G Measurement Ems Caused by High Q

Devices:

0.55Grl:
Q>l:

n

Genera/ Specifications

Add Q/10% to G measurement error

Multiply G measurement error*(l + Q2)

W Operating Temperature:

0°C - 55°C and Relative Humidity 190% at 40°C

n Power Requirement:

1 OOV, 12OV, 220V rlr 10 O/o, 240V + 5% - 10% , 48 - 66H2,

max 140VA

n Dimensions:

426mm (W) x 177mm (H) x 499mm (D) or 16.7” (W)

x 7.0”

(H) x 19.7” (D)

n Weight;

Approximately 15.6kg or 34.3 Ibs.

n

Ordering lnforma tion

n Standard Instrument:

4280A IMHz C Meter/C-V Plotter. . . . . . . . .

moptions:

Opt.

WI:

High Resolution Offset Capacitance

Measurement increases C Resolution
by 1 digit on lOOpFl1 nF Ranges.
Cannot be field installed.

Opt.

907: Front Handle Kit

(HP P/N 5061-0090)

Opt.

908: Rack Flange Kit

Opt
Opt 910:

(HP P/N 5061-0078)

909: Rack Flange & Front Handle Kit

(HP P/N 5061-0084)

Extra Manual

(HP P/N 04280-90000)

n Accessories:

16D58A:

1609OA:
1609lA:
16092A1
16083A:

HP P/N 12!50-0929:

n External DC Bias:

Response Time of EXT SLOW Bias Circuit:

to within 99.9% of final value.

For more information, call your local HP Sales Office or nearest Regional Office: l Eastern [phone]; l Midwestern (312) 2559600; l Southern (404) 9551500; l Western
(213) 9707500; l Canadian [phone]. Ask the operator for instrument sales. Or write Hewlett-Packard, 1601 Page Mill Road, Palo Alto, CA 94304. In Europe: Hewlett-Packard
.%A., 7, rue du Bois-du-&in, P.O. Box, CH 1217 Meyrin 2, Geneva, Switzerland. In Japan: Yokogawa-Hewlett-Packard Ltd., 29-21, Takaido-Higashi Scheme. Suginami-ku, Tokyo 168.

Printed in USA

loops

Data Subject To Change

Test Fixture for Packaged Semicon-

ductor Testing
Test Fixture (furnished with 4280A)
Test Leads, 2 Meter, Double Shielded.
Test Leads, 1 Meter, Single Shielded.

Pulse Bias Noise Clipper (for use with

external Pulse Generator)

Remote ON/OFF Shorting Cap

(furnished with 4280A)

5953-6949