User’s Guide
Volume 2
Measurement and Analysis
Agilent 4155B Semiconductor Parameter Analyzer
Agilent 4156B Precision Semiconductor Parameter Analyzer
Agilent Part No. 04156-90200
Printed in Japan May 2000
Edition 5
Legal Notice
The information contained in this document is subject to change without notice.
Copyright © 1997, 2000 Agilent Technologies
This document contains information which is protected by copyright. All rights are
reserved. Reproduction, adaptation, or translation without prior written permission
is prohibited, except as allowed under the copyright laws.
• Product Warranty
Agilent Technologies warrants Agilent Technologies hardware, accessories and
supplies against defects in materials and workmanship for the period of one year
from the warranty start date specified below. If Agilent Technologies receives
notice of such defects during the warranty period, Agilent Technologies will, at
its option, either repair or replace products which prove to be defective.
Replacement products may be either new or like-new.
Warranty service of this product will be performed at Agilent Technologies.
Buyer shall prepay shipping charges to Agilent Technologies and Agilent
Technologies shall pay shipping charges to return the product to Buyer.
However, Buyer shall pay all shipping charges, duties, and taxes for products
returned to Agilent Technologies from another country.
Agilent Technologies does not warrant that the operation of Agilent
Technologies products will be uninterrupted or error free. If Agilent
Technologies is unable, within a reasonable time, to repair or replace any
product to a condition as warranted, customer will be entitled to a refund of the
purchase price upon prompt return of the product.
The Agilent Technologies products may contain remanufactured parts
equivalent to new in performance or may have been subject to incidental use.
The warranty period begins on the date of delivery or on the date of installation
if installed by Agilent Technologies. If customer schedules or delays Agilent
Technologies installation more than 30 days after delivery, warranty begins on
the 31st day from delivery.
Warranty does not apply to defects resulting from (a) improper or inadequate
maintenance or calibration, (b) software, interfacing, parts or supplies not
supplied by Agilent Technologies, (c) unauthorized modification or misuse, (d)
operation outside of the published environmental specifications for the product,
or (e) improper site preparation or maintenance.
2 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
To the extent allowed by local law, the above warranties are exclusive and no
other warranty or condition, whether written or oral, is expressed or implied and
Agilent Technologies specifically disclaims any implied warranties or
conditions of merchantability, satisfactory quality, and fitness for a particular
purpose.
Agilent Technologies will be liable for damage to tangible property per incident
up to the greater of $300,000 or the actual amount paid for the product that is the
subject of the claim, and for damages for bodily injury or death, to the extent
that all such damages are determined by a court of competent jurisdiction to
have been directly caused by a defective Agilent Technologies product.
To the extent allowed by local law, the remedies in this warranty statement are
customer’s sole and exclusive remedies. Expect as indicated above, in no event
will Agilent Technologies or its suppliers be liable for loss of date or for direct,
special, incidental, consequential (including lost profit or date), or other damage,
whether based in contract, tort, or otherwise.
For consumer transactions in Australia and New Zealand: the warranty terms
contained in this statement, except to the extent lawfully permitted, do not
exclude, restrict or modify and are in addition to the mandatory statutory rights
applicable to the sale of this product to you.
• Assistance
Product maintenance agreements and other customer assistance agreements are
available for Agilent Technologies products.
For any assistance, contact your nearest Agilent Technologies Sales Office.
• Certification
Agilent Technologies, Inc. certifies that this product met its published
specifications at the time of shipment from the factory. Agilent Technologies
further certifies that its calibration measurements are traceable to the National
Institute of Standards and Technology (NIST), to the extent allowed by the
Institute’s calibration facility, and to the calibration facilities of other
International Standards Organization members.
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3
• Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the equipment. In addition, it violates safety standards
of design, manufacture, and intended use of the instrument. Agilent
Technologies, Inc. assumes no liability for customer’s failure to comply with
these requirements.
NOTE Agilent 4155B/4156B/41501B comply with INSTALLATION CATEGORY II for
mains input and INSTALLATION CATEGORY I for measurement input terminals,
and POLLUTION DEGREE 2 defined in IEC 1010-1.
Agilent 4155B/4156B/41501B are INDOOR USE products.
NOTE LEDs in Agilent 4155B/4156B/41501B are Class 1 in accordance with IEC 825-1.
CLASS 1 LED PRODUCT.
• GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument
chassis and cabinet must be connected to an electrical ground. The power
terminal and the power cable must meet International Electrotechnical
Commission (IEC) safety standards.
• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
• KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component
replacement and internal adjustments must be made by qualified
maintenance personnel. Do not replace components with power cable
connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power
and discharge circuits before touching them.
• DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable
of rendering first aid and resuscitation, is present.
4 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to a Agilent Technologies Sales and Service Office for
services and repair to ensure that safety features are maintained.
• DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, precede potentially dangerous procedures
throughout this manual. Instructions contained in the warnings must be
followed.
WARNING Dangerous Voltage, capable of causing death, are present in this instrument.
Use extreme caution when handling, testing, and adjusting.
• Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are
listed below.
Instruction manual symbol: the product will be marked with this symbol when it
is necessary for the user to refer to the instruction manual in order to protect
against damage to the instrument.
Indicates dangerous voltage and potential for electrical shock. Do not touch
terminals that have this symbol when insrument is on.
Protective conductor terminal. For protection against electrical shock in case of
a fault. Used with field wiring terminals to indicate the terminal which must be
connected to ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment
which normally includes all exposed metal structures.
Indicates earth (ground) terminal.
Alternating current.
Direct current.
ON (Supply).
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5
OFF (Supply).
STANDBY (Supply).
CAT 1
Means INSTALLATION CATEGORY I. Measurement terminals on the rear
panel comply with INSTALLATION CATEGORY I.
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
injury or death to personal.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,
practice, condition or the like, which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the product.
• Herstellerbescheinigung
GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
• Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
6 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Printing History
Edition 1: August 1997
Edition 2: September 1997
Edition 3: October 1998
Edition 4: January 2000
Edition 5: May 2000
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7
In This Manual
This manual provides information for all parts and functions of Agilent
4155B/4156B, and consists of the following chapters:
• Measurement Units
This chapter provides information about the measurement units.
• Measurement Mode
This chapter provides information about sweep and sampling measurements.
• Measurement Functions
This chapter provides information about the measurement functions.
• Making a Measurement
This chapter describes how to perform measurements.
• Analyzing Measurement Results
This chapter describes how to analyze measurement results manually and
automatically.
• Screen Organization
This chapter provides information about each user interface that is displayed on
the instrument screen.
• Data Variable and Analysis Function
This chapter provides information about data variables and analysis functions.
• If You Have A Problem
This chapter provides problem-solving information that you may encounter.
Text Conventions
The following text conventions are used in this manual:
Screen Text Represents text that appears on screen of the 4155B/4156B.
Italic Refers to a related document, or is used for emphasis.
8 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Contents
1. Measurement Units
Ground Unit (GNDU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Source/Monitor Unit (SMU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Voltage Source Unit (VSU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
Voltage Monitor Unit (VMU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
Pulse Generator Unit (PGU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20
2. Measurement Mode
Sweep Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Basic Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Subordinate Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Synchronous Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Pulse Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Sampling Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Available Units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Sampling Interval and Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
Sampling Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Sampling Completion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
Source Output Sequence and Time Origin . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
Linear Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Thinned-out Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
Logarithmic Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
3. Measurement Functions
Stress Force Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Stress Output Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Stress Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Stress Force Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Stress Stop Function at Abnormal Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 Contents - 1
Contents
Knob Sweep Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Available units and functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Normal Sweep and Knob Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . 3-12
Features of Knob Sweep Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
KNOB SWEEP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
Y-AXIS ASSIGN Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
SETUP COPY Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
DISPLAY SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
VAR1 SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
VAR2 SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
CONST SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
Analysis of the Knob Sweep Measurement Results . . . . . . . . . . . . . . . . . . . . 3-26
Standby Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Standby Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Available Units and Output Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
Output Values of non-Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
Output Sequence of Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
When Getting Setup File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
Operation States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
Idle State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
Measurement State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
Stress Force State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
Changing among Operation States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
Output Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
Sequential Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
Simultaneous Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
Trigger Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-41
Contents - 2 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Contents
Trigger Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42
SMU/PG Selector Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-46
Setup and Switching Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-47
Restrictions using Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-47
R-BOX Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-48
Resistance Value . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-48
Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-48
Setups . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50
Circuit Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-51
Measurement Ranging Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-53
Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-54
Limited Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-55
Compliance Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56
Fixed Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56
Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-57
Voltage and Current Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-57
Power Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-61
Integration Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-63
Short . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-63
Medium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-64
Long . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-64
SMU Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-65
Zero Offset Cancel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-66
To Measure Offset Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-66
To Perform Offset Cancel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-68
4. Making a Measurement
Connecting DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Using Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 Contents - 3
Contents
Using Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
To Define Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
To Set up Primary Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
To Set up Secondary Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
To Set up Synchronous Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
To Set up Constant Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
To Set up SMU Pulsed Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
To Set up PGU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
To Use Standby Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
To Define a User Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
To Display Graphics Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
To Display List Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
To Execute Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
To Use Offset Cancel Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
To Execute or Stop Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32
To Use R-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33
Knob Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35
To Execute Knob Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-36
To Stop Knob Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39
Sampling Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-40
To Define Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42
To Set up Sampling Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-44
To Set up Constant Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46
To Define Stop Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-47
Stress Force . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-49
To Set up Stress Source Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-51
To Set up Stress Condition/Timing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-53
To Set up ac (Pulse) Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-55
To Set up dc Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-57
Contents - 4 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Contents
To Force Stress . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58
To Use Selector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60
5. Analyzing Measurement Results
Manual Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
To Specify a Measurement Point on Curve . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
To Specify between Measurement Points on Curve . . . . . . . . . . . . . . . . . . . . . 5-6
To Display or Move Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
To Adjust Display Range to Measurement Curve Automatically . . . . . . . . . . . 5-9
To Zoom the Display Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
To Center Display at Cursor Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
To Draw Line through Two Specified Points . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
To Draw Line through Specified Point with Specified Gradient . . . . . . . . . . 5-12
To Draw Tangent to Specified Point of Measurement Curve . . . . . . . . . . . . . 5-14
To Draw Regression Line for Specified Region . . . . . . . . . . . . . . . . . . . . . . . 5-16
To Display and Select a Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
To Display Grid on the Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
To Change Data Variable on Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
To Change Range of X or Y Axis Scale . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
To Change Variable Assigned to X, Y1, or Y2 Axis . . . . . . . . . . . . . . . . . . . . 5-21
To Overlay an Internal Memory Measurement Curve onto Plotting Area . . . 5-22
To Scroll the LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
To Display or Move Marker on LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
To Change Variables of LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26
Automatic Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27
To Draw Line by Specifying Two Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28
To Draw Line by Specifying Gradient and One Point . . . . . . . . . . . . . . . . . . 5-30
To Draw Tangent to Specified Measurement Point . . . . . . . . . . . . . . . . . . . . . 5-32
To Draw Regression Line by Specifying Two Points . . . . . . . . . . . . . . . . . . . 5-34
To Display Marker at Specified Point . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 Contents - 5
Contents
6. Screen Organization
Screen Structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
CHANNELS Screen Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
CHANNELS: CHANNEL DEFINITION screen . . . . . . . . . . . . . . . . . . . . . . . 6-6
CHANNELS: USER FUNCTION DEFINITION screen . . . . . . . . . . . . . . . . 6-12
CHANNELS: USER VARIABLE DEFINITION screen . . . . . . . . . . . . . . . . 6-14
MEASURE Screen Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
MEASURE: SWEEP SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
MEASURE: SAMPLING SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
MEASURE: PGU SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
MEASURE: MEASURE SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29
MEASURE: OUTPUT SEQUENCE screen . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32
DISPLAY Screen Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-35
DISPLAY: DISPLAY SETUP screen for graphic results . . . . . . . . . . . . . . . . 6-36
DISPLAY: DISPLAY SETUP screen for list results . . . . . . . . . . . . . . . . . . . 6-38
DISPLAY: ANALYSIS SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
GRAPH/LIST Screen Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46
On the GRAPHICS result screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46
On the LIST result screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46
GRAPH/LIST: GRAPHICS screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-47
GRAPH/LIST: LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-62
STRESS Screen Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-74
STRESS: CHANNEL DEFINITION screen . . . . . . . . . . . . . . . . . . . . . . . . . 6-75
STRESS: STRESS SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-79
STRESS: STRESS FORCE screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-83
Screen Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-85
Data Input or Edit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-85
Blue front-panel key usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-87
Green front-panel key usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-88
Contents - 6 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Contents
Edit front-panel keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-89
Status Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-90
7. Data Variable and Analysis Function
Data Variable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Data Variable for Output or Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . 7-3
User Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
User Variable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Syntax of Data Variable Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Expression . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
Built-in Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11
ABS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
AT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
AVG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
COND . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
DELTA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14
DIFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
EXP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
INTEG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
LGT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17
LOG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17
MAVG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18
MAX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19
MIN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19
SQRT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19
Read Out Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-20
@CX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
@CY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
@CY1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
@CY2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 Contents - 7
Contents
@IX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-22
@IY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-22
@IY1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23
@IY2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23
@L1CO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24
@L1G . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24
@L1G1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-25
@L1G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26
@L1X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
@L1Y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
@L1Y1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
@L1Y2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
@L2CO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
@L2G . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28
@L2G1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29
@L2G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-30
@L2X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
@L2Y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
@L2Y1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
@L2Y2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
@MI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
@MX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
@MY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
@MY1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
@MY2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
Analysis Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-33
Marker on the GRAPH/LIST: GRAPHICS screen . . . . . . . . . . . . . . . . . . . . . 7-34
Marker on the GRAPH/LIST: LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . . 7-36
Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
Line Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39
Scaling Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41
Contents - 8 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Contents
Overlay Display Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
Automatic Analysis Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
8. If You Have A Problem
When You Make A Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
If Measured Value Oscillates when Measuring High-Frequency Devices . . . . 8-5
If Measured Value Oscillates when Measuring Negative Resistance . . . . . . . . 8-6
If Noise Affects the Measured Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7
If Measured Voltage has some Error when Forcing a Large Current . . . . . . . . 8-8
If Large Current Causes High Temperature (Thermal Drift) . . . . . . . . . . . . . . 8-8
If Measurement Takes More Time than Specified . . . . . . . . . . . . . . . . . . . . . . 8-9
If Measurement Damages the Device under Test . . . . . . . . . . . . . . . . . . . . . . 8-10
If You Get Unexpected Data when Performing Sampling Measurement . . . . 8-12
If Errors Occur . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13
If Errors Occur when You Perform Self-calibration or Diagnostics . . . . . . . . 8-14
If Errors Occur when You Operate the 4155B/4156B . . . . . . . . . . . . . . . . . . 8-20
If a Measurement Data Status is Displayed . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-38
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 Contents - 9
Contents
Contents - 10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
1 Measurement Units
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Measurement Units
This chapter explains basic output and measurement functions of each measurement
unit. For the following units, a simplified circuit diagram is shown, and where
applicable, the output and measurement ranges are provided.
•“Ground Unit (GNDU)”
•“Source/Monitor Unit (SMU)”
•“Voltage Source Unit (VSU)”
•“Voltage Monitor Unit (VMU)”
•“Pulse Generator Unit (PGU)”
1-2 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Ground Unit (GNDU)
The ground unit (GNDU) is in Agilent 41501A/B (SMU and pulse generator
expander). The GNDU is a 0 V constant source that provides a measurement ground
reference, and can sink up to ±1.6 A. Figure 1-1 shows a simplified GNDU circuit
diagram.
Figure 1-1 Simplified GNDU Circuit Diagram
Measurement Units
Ground Unit (GNDU)
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-3
Measurement Units
Source/Monitor Unit (SMU)
Source/Monitor Unit (SMU)
The source/monitor unit (SMU) has the following three modes:
• voltage source and current monitor mode (V source and I monitor mode)
• current source and voltage monitor mode (I source and V monitor mode)
• source common mode
SMU can output constant or pulsed source. (Only one SMU can be set to pulsed
source.)
Figure 1-2 shows a simplified SMU circuit diagram.
Figure 1-2 Simplified SMU Circuit Diagram
1-4 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Measurement Units
Source/Monitor Unit (SMU)
Three types of SMUs are available:
• HRSMU (high resolution SMU)
• Force and measure: up to ±100 V or ±100 mA.
• Maximum output power: 2 W.
• Minimum current measurement range: 10 pA with 1 fA resolution.
• Only the 4156B has HRSMUs. The 4156B has four HRSMUs.
• MPSMU (medium power SMU)
• Force and measure: up to ±100 V or ±100 mA.
• Maximum output power: 2 W.
• The 4155B has four MPSMUs, and the 41501A/B can be equipped with
either two MPSMUs or one HPSMU.
• HPSMU (high power SMU)
• Force and measure: up to ±200 V or ±1 A.
• Maximum output power: 20 W.
• Only the 41501A/B has HPSMU. The 41501A/B can be equipped with
either two MPSMUs or one HPSMU.
HPSMUs and HRSMUs can be connected to test devices by Kelvin connection.
Each SMU has a compliance feature that limits output voltage or current to prevent
damage to your devices. When the SMU forces voltage, you can specify I
compliance. When the SMU forces current, you can specify V compliance.
For details about the compliance setting range and resolution, see “Compliance” in
Chapter 3.
The following figures and tables show the output and measurement ranges of each
SMU type.
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-5
Measurement Units
Source/Monitor Unit (SMU)
Figure 1-3 HRSMU Output and Measurement Ranges
Table 1-1 HRSMU Output Voltage Ranges and Resolutions
Range Output Value
2 V 0 £ ½V½ £ 2 V 100 mV ±100 mA
20 V 0 £ ½V½ £ 20 V 1 mV ±100 mA
40 V 0 £ ½V½ £ 40 V 2 mV ±50 mA
100 V 0 £ ½V½ £ 100 V 5 mV ±20 mA
1-6 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Output
Resolution
Current
Compliance
Range
Measurement Units
Source/Monitor Unit (SMU)
Table 1-2 HRSMU Measurement Voltage Values and Resolutions
b
Measurement Resolutions
Range
2 V 0 £ ½V½ £ 2.2 V 2 mV20 mV200 mV2 mV
20 V 0 £ ½V½ £ 22 V 20 mV200 mV 2 mV 20 mV
40 V 0 £ ½V½ £ 44 V 40 mV400 mV 4 mV 40 mV
100 V 0 £ ½V½ £ 100 V 100 mV 1 mV 10 mV 100 mV
a. This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum mea-
surement value is Range column value.
b. Measurement resolution depends on the integration time setting. For Knob sweep measurement, see the
column of Integration Time 80 ms to 560 ms.
c. This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter.
Measurement
Value
a
1PLC or
Longer
Integration Time
640 ms to 1.92
ms
80 ms to 560 ms
High Speed
Sampling
Measurement
Table 1-3 HRSMU Output Current Ranges and Resolutions
c
Voltage
Compliance
Range
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±40 V
±20 V
Range Output Value
10 pA
100 pA
1 nA
10 nA
100 nA
1 mA
10 mA
100 mA
1 mA
10 mA 0 £ ½I½ £ 10 mA 1 mA
100 mA 0 £ ½I½ £ 20 mA 10 mA
£ ½I½ £ 10 pA
0
£ ½I½ £ 100 pA
0
£ ½I½ £ 1 nA
0
0
£ ½I½ £ 10 nA
£ ½I½ £ 100 nA
0
£ ½I½ £ 1 mA
0
0
£ ½I½ £ 10 mA
£ ½I½ £ 100 mA
0
£ ½I½ £ 1 mA
0
20 mA < ½I½ £ 50 mA 10 mA
50 mA < ½I½ £ 100 mA 10 mA
Resolution
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
Output
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-7
Measurement Units
Source/Monitor Unit (SMU)
Table 1-4 HRSMU Measurement Current Values and Resolutions
Measurement Resolutions
Range
10 pA
100 pA
1 nA
10 nA
100 nA
1 mA
10 mA
100 mA
1 mA
10 mA
100 mA
Measurement
£ ½I½ £ 10.5 pA
0
£ ½I½ £ 115 pA
0
0
£ ½I½ £ 1.15 nA
0
£ ½I½ £ 11.5 nA
£ ½I½ £ 115 nA
0
0
£ ½I½ £ 1.15 mA
0
£ ½I½ £ 11.5 mA
£ ½I½ £ 115 mA
0
0
£ ½I½ £ 1.15 mA
0
£ ½I½ £ 11.5 mA
£ ½I½ £ 100 mA
0
Value
a
1PLC or
Longer
1 fA 1 fA 1 fA 10 fA
1 fA 1 fA 10 fA 100 fA
10 fA 10 fA 100 fA 1 pA
10 fA 100 fA 1 pA 10 pA
100 fA 1 pA 10 pA 100 pA
1 pA 10 pA 100 pA 1 nA
10 pA 100 pA 1 nA 10 nA
100 pA 1 nA 10 nA 100 nA
1 nA 10 nA 100 nA 1 mA
10 nA 100 nA 1 mA10 mA
100 nA 1 mA10 mA100 mA
Integration Time
640 ms to 1.92
ms
80 ms to 560 ms
b
High Speed
Sampling
Measurement
c
a. This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum mea-
surement value is Range column value.
b. Measurement resolution depends on the integration time setting. For Knob sweep measurement, see the
column of Integration Time 80 ms to 560 ms.
c. This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter.
1-8 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Figure 1-4 MPSMU Output and Measurement Ranges
Measurement Units
Source/Monitor Unit (SMU)
Table 1-5 MPSMU Output Voltage Ranges and Resolutions
Range Output Value
2 V 0 £ ½V½ £ 2 V 100 mV ±100 mA
20 V 0 £ ½V½ £ 20 V 1 mV ±100 mA
40 V 0 £ ½V½ £ 40 V 2 mV ±50 mA
100 V 0 £ ½V½ £ 100 V 5 mV ±20 mA
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-9
Output
Resolution
Current
Compliance
Range
Measurement Units
Source/Monitor Unit (SMU)
Table 1-6 MPSMU Measurement Voltage Values and Resolutions
b
Measurement Resolutions
Range
2 V 0 £ ½V½ £ 2.2 V 2 mV20 mV200 mV2 mV
20 V 0 £ ½V½ £ 22 V 20 mV200 mV 2 mV 20 mV
40 V 0 £ ½V½ £ 44 V 40 mV400 mV 4 mV 40 mV
100 V 0 £ ½V½ £ 100 V 100 mV 1 mV 10 mV 100 mV
a. This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum mea-
surement value is Range column value.
b. Measurement resolution depends on the integration time setting. For Knob sweep measurement, see the
column of Integration Time 80 ms to 560 ms.
c. This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter.
Measurement
Value
a
1PLC or
Longer
Integration Time
640 ms to 1.92
ms
80 ms to 560 ms
High Speed
Sampling
Measurement
Table 1-7 MPSMU Output Current Ranges and Resolutions
c
Voltage
Compliance
Range
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±100 V
±40 V
±20 V
Range Output Value
1 nA
10 nA
100 nA
1 mA
10 mA
100 mA
1 mA
10 mA 0 £ ½I½ £ 10 mA 1 mA
100 mA 0 £ ½I½ £ 20 mA 10 mA
£ ½I½ £ 1 nA
0
£ ½I½ £ 10 nA
0
£ ½I½ £ 100 nA
0
0
£ ½I½ £ 1 mA
£ ½I½ £ 10 mA
0
£ ½I½ £ 100 mA
0
0
£ ½I½ £ 1 mA
20 mA < ½I½ £ 50 mA 10 mA
50 mA < ½I½ £ 100 mA 10 mA
Resolution
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
Output
1-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Measurement Units
Source/Monitor Unit (SMU)
Table 1-8 MPSMU Measurement Current Values and Resolutions
b
Measurement Resolutions
Range
1 nA
10 nA
100 nA
1 mA
10 mA
100 mA
1 mA
10 mA
100 mA
a. This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum mea-
surement value is Range column value.
b. Measurement resolution depends on the integration time setting. For Knob sweep measurement, see the
column of Integration Time 80 ms to 560 ms.
c. This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter.
Measurement
0 £ ½I½ £ 1.15 nA
£ ½I½ £ 11.5 nA
0
0
£ ½I½ £ 115 nA
0
£ ½I½ £ 1.15 mA
£ ½I½ £ 11.5 mA
0
0
£ ½I½ £ 115 mA
0
£ ½I½ £ 1.15 mA
£ ½I½ £ 11.5 mA
0
0
£ ½I½ £ 100 mA
Value
a
1PLC or
Longer
10 fA 10 fA 100 fA 1 pA
10 fA 100 fA 1 pA 10 pA
100 fA 1 pA 10 pA 100 pA
1 pA 10 pA 100 pA 1 nA
10 pA 100 pA 1 nA 10 nA
100 pA 1 nA 10 nA 100 nA
1 nA 10 nA 100 nA 1 mA
10 nA 100 nA 1 mA10 mA
100 nA 1 mA10 mA100 mA
Integration Time
640 ms to 1.92
ms
80 ms to 560 ms
High Speed
Sampling
Measurement
c
Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-11
Measurement Units
Source/Monitor Unit (SMU)
Figure 1-5 HPSMU Output and Measurement Ranges
Table 1-9 HPSMU Output Voltage Ranges and Resolutions
Range Output Value
2 V 0 £ ½V½ £ 2 V 100 mV ±1000 mA
20 V 0 £ ½V½ £ 20 V 1 mV ±1000 mA
40 V 0 £ ½V½ £ 40 V 2 mV ±500 mA
100 V 0 £ ½V½ £ 100 V 5 mV ±125 mA
200 V 0 £ ½V½ £ 200 V 10 mV ±50 mA
1-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5
Output
Resolution
Current
Compliance
Range
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