HP 4155B
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Semiconductor Parameter Analyzer
HP 4156B
Precision Semiconductor Parameter Analyzer
Technical Data
Specifications - July 1997
Introduction
Basic Functions
The HP 4155B and HP 4156B functions:
ì Set measurement and/or stress
conditions
ì Perform measurement and analysis
with the built-in HP Instrument
BASIC
ì Self test, Auto calibration
ì Control measurement and/or stress
execution
ì Perform arithmetic calculations
ì Display measured and calculated
results on the LCD display
ì Perform graphical analysis
Configuration
HP 4155B
4xMPSMU
2xVMU
2xVSU
HP 4156B
4xHRSMU
2xVMU
2xVSU
ì Store and recall measurement setups,
and measurement and graphical display
data
ì Dump to printers or plotters for hard-
copy output
HP 41501B (Optional)
2xPGU(Option)
GNDU
HPSMU(Option) or
2xMPSMU (Option)
*1
SMU: Source Monitor Unit
HRSMU: High Resolution SMU
(1fA/2µV to 100mA/100V)
MPSMU: Medium Power SMU
(10fA/2µV to 100mA/100V)
HPSMU: High Power SMU
(10fA/2µV to 1A/200V)
VMU: Voltage Monitor Unit
VSU: Voltage Source Unit
PGU: Pulse Generator Unit (1 channel)
GNDU: Ground Unit
*1: Minimum number of installable MPSMU
or PGU is two.
*1
2
Hardware
Specification Condition
The “supplemental” information and
“typical” entries in the following specifications are not warranted, but provide
useful information about the functions
and performance of the instruments.
The measurement and output accuracy
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal under the following
conditions:
1. 23°C ± 5°C (double between 5°C to
18°C, and 28°C to 40°C if not noted
otherwise)
2. After 40 minutes warm-up
3. Ambient temperature change less
than ± 1°C after auto calibration
execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU,
HPSMU, and GNDU)
7. Calibration period: 1 year
HP 4156B Precision Semiconductor Parameter Analyzer
HRSMU (High Resolution SMU) Specifications
Voltage Range, Resolution, and Accuracy (HRSMU)
Voltage
Range
± 20V
± 40V
± 100V
*1: 100mA (Vout[20V), 50mA (20V<Vout≤40V)
*2: 100mA (Vout[20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)
Set.
Reso.
1mV
5mV
Set.
Accuracy
±(0.025%+6mV)2mV
Meas.
Reso.
Current Range, Resolution, and Accuracy (HRSMU)
Current
Range
±1µA
±10µA
±100µA
±1mA
*1: The accuracy is applicable when offset
cancellation has been performed.
*2: The offset current specification is
multiplied by one of the following factors
depending upon the ambient temperature
and humidity (RH = Relative Humidity):
*3: 100V (Iout[20mA)
40V (20mA<Iout≤50mA)
20V (50mA<Iout≤100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.04%)
plus offset value (200nA+1nA×Vout) for the
1mA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout or Vout/100.
Set.
Reso.
10fA±10pA
10fA±100pA
100fA±1nA
±(0.5%+0.7pA+1fA×Vout)
1pA±10nA
10pA±100nA
100pA
1nA
10nA
100nA
±(0.5%+4pA+10fA×Vout)
±(0.12%+40pA+100fA×Vout)
±(0.12%+400pA+1pA×Vout)
±(0.07%+4nA+10pA×Vout)
±(0.07%+40nA+100pA×Vout)
±(0.06%+400nA+1nA×Vout)
±(0.06%+4µA+10nA×Vout)1µA±10mA
±(0.12%+40µA+100nA×Vout)10µA±100mΑ
5 - 60Temperature
Set.
Accuracy
RHHumidity %
60 - 80
×2×25°C to 18°C
×2×118°C to 28°C
×5×228°C to 40°C
*1*2
*1*2
Meas.
Reso.
1fA±(4%+400fA)
±(4%+20fA+1fA×Vout/100)
1fA±(4%+400fA)
*2
±(4%+40fA+10fA×Vout/100)
10fA
10fA
100fA
1pA
10pA
100pA
1nA
10nA
100nA
±(0.5%+0.4pA+1fA×Vout)
±(0.1%+20pA+100fA×Vout)
±(0.1%+200pA+1pA×Vout)
±(0.05%+2nA+10pA×Vout)
±(0.05%+20nA+100pA×Vout)
±(0.04%+200nA+1nA×Vout)
±(0.04%+2µA+10nA×Vout)
±(0.1%+20µA+100nA×Vout)
Output terminal/connection:
Dual triaxial connectors, Kelvin
(remote sensing)
HRSMU Measurement and
Output Range
Meas.
Accuracy
±(0.01%+200µV)2µV±(0.02%+400µV)100µV± 2V
±(0.01%+1mV)20µV±(0.02%+3mV)
±(0.015%+2mV)40µV
±(0.02%+5mV)100µV±(0.03%+15mV)
Meas.
Accuracy
±(0.5%+2pA+10fA×Vout)
-100
Max.
Current
100mA
100mA
*1
*2
*1*2
*1*2
*2
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to ±100V
Current: ±100fA to ±100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HRSMU Supplemental Information:
Maximum allowable cable resistance
Max.
when using Kelvin connection (Force,
V
Sense): 10Ω
100V
Typical voltage source output
100V
resistance (Force line/non-Kelvin
100V
connection): 0.2Ω
100V
Voltage measurement input resistance/
100V
current source output resistance:
100V
100V
100V
100V
100V
*3
100
-20-40 20 40
-20
-50
-100
15
≥10
Ω (10pA range)
Current compliance setting accuracy for
opposite polarity:
10pA to 10nA range: V/I setting
accuracy ± 12% of range
100nA to 100mA range: V/I setting
accuracy ± 2.5% of range
Current (mA)
50
20
100
Voltage (V)
3
VSU (Voltage Source Unit)
Specifications
VSU Output Range:
Meas.
Voltage
Reso.
Range
1mV
±20V
*1: Specification is applicable under no load
current.
Max. Output Current: 100mA
±(0.05% of setting+10mV)*1
VSU Supplemental Information:
Output resistance: 0.2Ω
Maximum load capacitance: 10µF
Maximum slew rate: 0.2V/µs
Current limit: 120mA (typical)
Output Noise: 1mV rms (typical)
Meas.
Accuracy
VMU (Voltage Monitor
Unit) Specifications
VMU Measurement Range,
Resolution, and Accuracy:
Voltage
Range
Meas.
Reso.
VMU Differential Mode Range
Resolution, and Accuracy:
Meas.
Diff V
Reso.
Range
±(0.03%+100µV+1.3µV×Vi)1µV±0.2V
±(0.02%+1mV+13µV×Vi)2µV±2V
Max. Common Mode Voltage: ± 20V
Note: Vi is the input voltage of VMU2 in
volts.
Meas.
Accuracy
±(0.02%+200µV)2µV±2V
±(0.02%+1mV)20µV±20V
Meas.
Accuracy
For example, accuracy specifications are
given as ±% of set/measured value (0.02%)
plus offset value (1mV+13µV×Vi) for the 2V
range. The differential mode offset value
consists of a fixed part determined by the
measurement range and a proportional part
that is multiplied by Vi.
VMU Supplemental Information:
Input Impedance: ≥1GΩ
Input leakage current (@0V): ≤ 500pA
(Typical)
Measurement noise: 0.01% of range
(p-p) (Typical)
Differential mode measurement noise:
0.005% of range (p-p) (Typical)
HP 4155B Semiconductor Parameter Analyzer
MPSMU (Medium Power SMU) Specifications
Voltage Range, Resolution, and Accuracy (MPSMU)
Voltage
Range
± 20V
± 40V
± 100V
*1: 100mA (Vout[20V), 50mA (20V<Vout≤40V)
*2: 100mA (Vout[20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)
Set.
Reso.
1mV
2mV
5mV
Set.
Accuracy
Meas.
Reso.
±(0.02%+700µV+0.3×Iout) 2µV±(0.03%+900µV+0.3×Iout)100µV± 2V
±(0.02%+2mV+0.3×Iout)20µV±(0.03%+4mV+0.3×Iout)
±(0.02%+3mV+0.3×Iout)40µV±(0.03%+7mV)+0.3×Iout)
±(0.03%+5mV+0.3×Iout)100µV±(0.04%+15mV)+0.3×Iout)
Meas.
Accuracy
Current Range, Resolution, and Accuracy (MPSMU)
Current
Range
±1µA
±10µA
±100µA
±1mA
*1: 100V (Iout[20mA), 40V (20mA<Iout≤50mA), 20V (50mA<Iout≤100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.1%)
plus offset value (30pA+200fA×Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
Set.
Reso.
100fA±1nA
1pA±10nA
10pA±100nA
100pA
1nA
10nA
100nA
±(0.5%+3pA+2fA×Vout)
±(0.5%+7pA+20fA×Vout)
±(0.12%+50pA+200fA×Vout)
±(0.12%+400pA+2pA×Vout)
±(0.12%+5nA+20pA×Vout)
±(0.12%+40nA+200pA×Vout)
±(0.12%+500nA+2nA×Vout)
±(0.12%+4µA+20nA×Vout)1µA±10mA
±(0.12%+50µA+200nA×Vout)10µA±100mΑ
Set.
Accuracy
Meas.
Reso.
10fA
10fA
100fA
1pA
10pA
100pA
1nA
10nA
100nA
±(0.5%+5pA+20fA×Vout)
±(0.1%+30pA+200fA×Vout)
±(0.1%+200pA+2pA×Vout)
±(0.1%+3nA+20pA×Vout)
±(0.1%+20nA+200pA×Vout)
±(0.1%+300nA+2nA×Vout)
±(0.1%+2µA+20nA×Vout)
±(0.1%+30µA+200nA×Vout)
MPSMU Measurem ent and
Output Range
VSU Specifications
Same as HP 4156B VSU.
Meas.
Accuracy
±(0.5%+3pA+2fA×Vout)
-100
VMU Specifications
Same as HP 4156B VMU.
Max.
Current
100mA
100mA
*1
*2
Max.
V
100V
100V
100V
100V
100V
100V
100V
100V
*1
Output terminal/connection:
Single triaxial connector, non-Kelvin
(no remote sensing)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to ±100V
Current: ±1pA to ±100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
MPSMU Supplemental Information:
Typical voltage source output
resistance: 0.3Ω
Voltage measurement input resistance/
current source output resistance:
13
≥10
Ω (1nA range)
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy ± 12% of range
100nA to 100mA range: V/I setting
accuracy ± 2.5% of range
Current (mA)
100
50
20
-20-40 20 40
-20
-50
100
Voltage (V)
-100
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