Agilent 4155C Users Guide V2

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User’s Guide

Volume 2

Measurement and Analysis

Agilent 4155C Semiconductor Parameter Analyzer

Agilent 4156C Precision Semiconductor Parameter Analyzer

Agilent Part No. 04156-90020

Printed in Japan January 2001

Edition 1

Legal Notice

The information contained in this document is subject to change without notice.

This document contains information which is protected by copyright. All rights are reserved. Reproduction, adaptation, or translation without prior written permission is prohibited, except as allowed under the copyright laws.

• Product Warranty

Agilent Technologies warrants Agilent Technologies hardware, accessories and supplies against defects in materials and workmanship for the period of one year from the warranty start date specified below. If Agilent Technologies receives notice of such defects during the warranty period, Agilent Technologies will, at its option, either repair or replace products which prove to be defective. Replacement products may be either new or like-new.

Warranty service of this product will be performed at Agilent Technologies. Buyer shall prepay shipping charges to Agilent Technologies and Agilent Technologies shall pay shipping charges to return the product to Buyer. However, Buyer shall pay all shipping charges, duties, and taxes for products returned to Agilent Technologies from another country.

Agilent Technologies does not warrant that the operation of Agilent Technologies products will be uninterrupted or error free. If Agilent Technologies is unable, within a reasonable time, to repair or replace any product to a condition as warranted, customer will be entitled to a refund of the purchase price upon prompt return of the product.

The Agilent Technologies products may contain remanufactured parts equivalent to new in performance or may have been subject to incidental use.

The warranty period begins on the date of delivery or on the date of installation if installed by Agilent Technologies. If customer schedules or delays Agilent Technologies installation more than 30 days after delivery, warranty begins on the 31st day from delivery.

Warranty does not apply to defects resulting from (a) improper or inadequate maintenance or calibration, (b) software, interfacing, parts or supplies not supplied by Agilent Technologies, (c) unauthorized modification or misuse, (d) operation outside of the published environmental specifications for the product, or (e) improper site preparation or maintenance.

2 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

To the extent allowed by local law, the above warranties are exclusive and no other warranty or condition, whether written or oral, is expressed or implied and Agilent Technologies specifically disclaims any implied warranties or conditions of merchantability, satisfactory quality, and fitness for a particular purpose.

Agilent Technologies will be liable for damage to tangible property per incident up to the greater of $300,000 or the actual amount paid for the product that is the subject of the claim, and for damages for bodily injury or death, to the extent that all such damages are determined by a court of competent jurisdiction to have been directly caused by a defective Agilent Technologies product.

To the extent allowed by local law, the remedies in this warranty statement are customer’s sole and exclusive remedies. Expect as indicated above, in no event will Agilent Technologies or its suppliers be liable for loss of date or for direct, special, incidental, consequential (including lost profit or date), or other damage, whether based in contract, tort, or otherwise.

For consumer transactions in Australia and New Zealand: the warranty terms contained in this statement, except to the extent lawfully permitted, do not exclude, restrict or modify and are in addition to the mandatory statutory rights applicable to the sale of this product to you.

• Assistance

Product maintenance agreements and other customer assistance agreements are available for Agilent Technologies products.

For any assistance, contact your nearest Agilent Technologies Sales Office.

• Certification

Agilent Technologies, Inc. certifies that this product met its published specifications at the time of shipment from the factory. Agilent Technologies further certifies that its calibration measurements are traceable to the National Institute of Standards and Technology (NIST), to the extent allowed by the Institute’s calibration facility, and to the calibration facilities of other International Standards Organization members.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 3

• Safety Summary

The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent 4155C/4156C/41501B comply with INSTALLATION CATEGORY II for

mains input and INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 1010-1.

Agilent 4155C/4156C/41501B are INDOOR USE products.

NOTE LEDs in Agilent 4155C/4156C/41501B are Class 1 in accordance with IEC 825-1.

CLASS 1 LED PRODUCT.

• GROUND THE INSTRUMENT

This is Safety Class I instrument. To minimize shock hazard, the instrument chassis and cabinet must be connected to an electrical ground. The power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards.

• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

Do not operate the instrument in the presence of flammable gases or fumes. Operation of any electrical instrument in such an environment constitutes a definite safety hazard.

• KEEP AWAY FROM LIVE CIRCUITS

Operation personnel must not remove instrument covers. Component replacement and internal adjustments must be made by qualified maintenance personnel. Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.

• DO NOT SERVICE OR ADJUST ALONE

Do not attempt internal service or adjustment unless another person, capable of rendering first aid and resuscitation, is present.

4 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.

• DANGEROUS PROCEDURE WARNINGS

Warnings, such as example below, precede potentially dangerous procedures throughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument.

Use extreme caution when handling, testing, and adjusting.

• Safety Symbols

The general definitions of safety symbols used on equipment or in manuals are listed below.

Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have this symbol when instrument is on.

Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which normally includes all exposed metal structures.

Indicates earth (ground) terminal.

Alternating current.

Direct current.

ON (Supply).

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 5

OFF (Supply).

STANDBY (Supply).

CAT 1

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I.

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,

condition or the like, which, if not correctly performed or adhered to, could result in injury or death to personal.

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

practice, condition or the like, which, if not correctly performed or adhered to, could result in damage to or destruction of part or all of the product.

• Herstellerbescheinigung

GEÄUSCHEMISSION

Lpa < 70 dB

am Arbeitsplatz

normaler Betrieb

nach DIN 45635 T. 19

• Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION

Lpa < 70dB

operator position

normal operation

per ISO 7779

6 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Printing History

Edition 1: January 2001

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 7

In This Manual

This manual provides information for measurement and analysis functions of Agilent 4155C/4156C, and consists of the following chapters:

• Sweep Measurements

Describes how to perform sweep measurements.

• Knob Sweep Measurements

Describes how to perform knob sweep measurements.

• Sampling Measurements

Describes how to perform sampling measurements.

• Quasi-static C-V Measurements

Describes how to perform quasi-static C-V measurements.

• Stress Force

Describes how to perform stress force. Stress function is effective for the reliability testing of semiconductor devices.

• Analyzing Measurement Results

Describes how to analyze measurement results manually and automatically.

• Measurement Units and Functions

Provides information about measurement units and measurement functions.

• Measurement Support Functions

Provides information about several functions which support measurements.

• Built-in Functions

Provides information about the built-in mathematical functions and read out functions.

• Connecting Measurement Devices

Explains how to connect the measurement devices to the instrument.

8 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Contents

1. Sweep Measurements

Measurement Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Basic Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Subordinate Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

Synchronous Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

Pulse Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

Defining Measurement Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

To Define Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

To Set up Primary Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18

To Set up Secondary Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19

To Set up Synchronous Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

To Set up Constant Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21

To Set up SMU Pulsed Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

To Set up PGU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24

To Set up Stop Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26

To Display Graphics Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27

To Display List Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28

To Execute or Stop Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29

Making a Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30

Step 1. Prepare for the measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31

Step 2. Mount your DUT on the test fixture . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33

Step 3. Define the channel assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-35

Step 4. Define the user functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-37

Step 5. Set up the measurement parameters . . . . . . . . . . . . . . . . . . . . . . . . . . 1-39

Step 6. Set up the results display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-41

Step 7. Execute the measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-43

2. Knob Sweep Measurements

Measurement Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Available units and functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 Contents - 1

Contents

Normal Sweep and Knob Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Features of Knob Sweep Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

KNOB SWEEP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

Analysis of the Knob Sweep Measurement Results . . . . . . . . . . . . . . . . . . . . . 2-9

Executing Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

To Define Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

To Execute Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

To Stop Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

To Change Measurement Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14

3. Sampling Measurements

Measurement Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Available Units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Sampling Interval and Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Sampling Measurement Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Sampling Completion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

Source Output Sequence and Time Origin. . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Linear Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

Thinned-out Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

Logarithmic Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

Defining Measurement Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24

To Define Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26

To Set up Sampling Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27

To Set up Constant Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29

To Set up PGU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

To Define Stop Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

To Display Graphics Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33

To Display List Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34

To Execute or Stop Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35

Making a Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36

Contents - 2 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Contents

Step 1. Prepare for the measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36

Step 2. Mount your DUT on the test fixture . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36

Step 3. Define the channel assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37

Step 4. Set up the measurement parameters . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38

Step 5. Set up the results display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-40

Step 6. Execute the measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-41

4. Quasi-static C-V Measurements

Measurement Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Available Units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Capacitance Data Calculation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Defining Measurement Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

To Define Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

To Set up QSCV Sweep Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

To Set up Stop Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

To Set up Constant Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13

To Set up PGU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13

To Define Measurement Conditions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

To Display Graphics Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

To Display List Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

To Execute or Stop Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

Making a Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Step 1. Prepare for measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Step 2. Mount your DUT on the test fixture . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Step 3. Define the channel assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19

Step 4. Set up the source parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Step 5. Set up the measurement parameters . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Step 6. Set up the results display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24

Step 7. Execute the measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 Contents - 3

Contents

Maximum Measurement Value . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26

Considering Measurement Accuracy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28

5. Stress Force

Stress Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Stress Output Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Stress Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

Stress Force Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

Stress Stop Function at Abnormal Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

Defining Stress Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

To Set up Stress Source Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

To Set up Stress Condition/Timing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

To Set up ac (Pulse) Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

To Set up dc Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

To Force Stress . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20

6. Analyzing Measurement Results

Analysis Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Marker on the GRAPH/LIST: GRAPHICS screen . . . . . . . . . . . . . . . . . . . . . . 6-4

Marker on the GRAPH/LIST: LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

Line Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

Scaling Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

Overlay Display Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Automatic Analysis Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Manual Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

To Specify a Measurement Point on Curve . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

To Specify between Measurement Points on Curve . . . . . . . . . . . . . . . . . . . . 6-16

To Display or Move Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

To Adjust Display Range to Measurement Curve Automatically . . . . . . . . . . 6-19

Contents - 4 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Contents

To Zoom the Display Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

To Center Display at Cursor Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

To Draw Line through Two Specified Points . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

To Draw Line through Specified Point with Specified Gradient . . . . . . . . . . 6-22

To Draw Tangent to Specified Point of Measurement Curve . . . . . . . . . . . . . 6-24

To Draw Regression Line for Specified Region . . . . . . . . . . . . . . . . . . . . . . . 6-26

To Display and Select a Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

To Display Grid on the Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

To Change Data Variable on Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

To Change Range of X or Y Axis Scale . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

To Change Variable Assigned to X, Y1, or Y2 Axis . . . . . . . . . . . . . . . . . . . . 6-31

To Overlay an Internal Memory Measurement Curve onto Plotting Area . . . 6-32

To Scroll the LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-34

To Display or Move Marker on LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . 6-35

To Change Variables of LIST screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-36

Automatic Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37

To Draw Line by Specifying Two Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-38

To Draw Line by Specifying Gradient and One Point . . . . . . . . . . . . . . . . . . 6-40

To Draw Tangent to Specified Measurement Point . . . . . . . . . . . . . . . . . . . . . 6-42

To Draw Regression Line by Specifying Two Points . . . . . . . . . . . . . . . . . . . 6-44

To Display Marker at Specified Point . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-47

7. Measurement Units and Functions

Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

GNDU - Ground Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

SMU - Source Monitor Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

VSU - Voltage Source Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17

VMU - Voltage Monitor Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

PGU - Pulse Generator Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-20

Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23

Voltage and Current Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 Contents - 5

Contents

Power Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27

Measurement Ranging Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29

Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-30

Limited Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31

Compliance Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32

Fixed Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32

Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-33

Integration Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-33

Overhead Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-36

To Specify Source Output Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-36

SMU Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37

Self-calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38

Zero Offset Cancel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

To Measure Offset Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

To Perform Offset Cancel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

QSCV Zero Offset Cancel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

To Measure Offset Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

To Perform Offset Cancel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

Operation States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Idle State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Measurement State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Stress Force State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46

Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46

Changing among Operation States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46

Output Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48

Sequential Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-49

Simultaneous Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-51

Contents - 6 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Contents

8. Support Functions

User Function and User Variable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

Output or Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

User Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

User Variable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6

Syntax of Data Variable Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8

Expression . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

Standby Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13

Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13

Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13

Available Units and Output Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-14

Output Values of non-Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-14

Output Sequence of Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

When Getting Setup File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

To Use Standby Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

R-BOX Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

Resistance Value . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

Setups . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

Circuit Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21

To Use R-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-23

SMU/PG Selector Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-25

Setup and Switching Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26

Restrictions using Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26

To Use Selector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27

Switching Matrix Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28

To Control Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31

To Control Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-36

To Use Matrix Setup File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-40

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Contents

Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-41

Trigger Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-43

Trigger Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-44

9. Built-in Functions

Built-in Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

ABS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4

AT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4

AVG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4

COND . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5

DELTA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6

DIFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7

EXP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8

INTEG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8

LGT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9

LOG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9

MAVG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-10

MAX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11

MIN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11

SQRT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11

Read Out Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

@CX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

@CY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

@CY1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

@CY2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

@IX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-14

@IY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-14

@IY1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-15

@IY2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-15

@L1CO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-16

@L1G . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-16

Contents - 8 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Contents

@L1G1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

@L1G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-18

@L1X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

@L1Y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

@L1Y1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

@L1Y2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

@L2CO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

@L2G . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-20

@L2G1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-21

@L2G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-22

@L2X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23

@L2Y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23

@L2Y1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23

@L2Y2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23

@MI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23

@MX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24

@MY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24

@MY1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24

@MY2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24

10. Connecting Measurement Devices

Using Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3

Using Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

To Reduce Leakage Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

To Measure Low Resistance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 Contents - 9

Contents

Contents - 10 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

1 Sweep Measurements

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

This chapter consists of the following sections which describes how to execute a sweep measurement:

•“Measurement Functions”

•“Defining Measurement Conditions”

•“Making a Measurement”

For details about the measurement setup screens, see Setup Screen Reference manual.

1-2 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Measurement Functions

For sweep measurements, the sweep source channels perform staircase sweep output of voltage or current, while the monitor channels measure voltage or current for each sweep step.

The 4155C/4156C provides three types of sweep measurement:

•“Basic Sweep Measurement”

One sweep source (VAR1) is used.

•“Subordinate Sweep Measurement”

A primary (VAR1) and secondary sweep source (VAR2) are used.

•“Synchronous Sweep Measurement”

A primary (VAR1) and synchronous sweep source (VAR1') are used.

Also, you can set up a combined subordinate and synchronous sweep measurement.

Available Units SMUs and VSUs can be sweep sources (VAR1, VAR2, and VAR1'). A sweep or

constant source SMU can be set to the pulsed source to prevent thermal drift of the DUT.

Output Range Sweep source units use the following output range:

• minimum range covers all sweep output values in Linear sweep.

• minimum range covers all sweep output values in Log voltage sweep.

• optimum range for output value every sweep step in Log current sweep.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-3

Sweep Measurements Measurement Functions

Basic Sweep Measurement

Basic sweep measurement uses one sweep source (VAR1).

The following sweep types are available:

• LIN/LOG

• Linear staircase

• Logarithmic staircase

• SWEEP MODE

• Single Source channel sweeps the output from user specified start value to

stop value.

• Double Source channel sweeps the output from user specified start value to stop value, then from stop value to start value.

You can select any combination of LIN/LOG and SWEEP MODE as shown in the following table:

1-4 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Figure 1-1 Basic Sweep Measurement

Sweep Measurements

Measurement Functions

To set up basic sweep measurement, select VAR1 function for desired SMU or VSU on CHANNELS: CHANNEL DEFINITION screen.

Parameters

Also, specify the following parameters for VAR1 on MEASURE: SWEEP SETUP screen.

Parameter Description

sweep mode Single or double sweep.

linear/log Linear or logarithmic sweep. For logarithmic sweep, select the

number steps in one decade as follows:

LOG10 10 steps in one decade.

LOG25 25 steps in one decade.

LOG50 50 steps in one decade.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-5

Sweep Measurements Measurement Functions

start Start value of sweep. For logarithmic sweep, start must not be

zero. Allowable range of start depends on output range of sweep source. For output range of each measurement channel, refer to Chapter 7.

stop Stop value of single sweep or turning back value of double

sweep. For logarithmic sweep, stop must have same polarity as start, and must not be zero. Allowable range of stop depends on output range of sweep source. For output range of each measurement channel, refer to Chapter 7.

step • For linear sweep, step is step increment of sweep. Number

of sweep steps is calculated from start, stop, and step. Calculated number of steps must be in range: 2 to 1001.

• For logarithmic sweep, step is invalid. Number of sweep steps is calculated from start, stop, and number of steps in one decade, which is specified by log parameter. Calculated number of steps must be in range: 2 to 1001.

compliance Compliance value of sweep source. This parameter applies to

SMU only. Allowable range of compliance depends on the compliance range of sweep source. For the compliance range of each measurement channel, refer to Chapter 7.

power compliance (Optional) Power compliance value of sweep source. This

parameter applies to SMU only. Allowable range depends on power compliance range of sweep source. For details, refer to Chapter 7.

hold time Time required for DUT to settle after forcing start value.

Allowable range is 0 to 655.35s. Resolution: 10 ms.

delay time Time required for DUT to settle after stepping the output.

Allowable range: 0 to 65.535 s. Resolution: 100 ms

Refer to Setup Screen Reference for setting up these parameters.

1-6 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Subordinate Sweep Measurement

For subordinate sweep measurement, you set up a secondary sweep source (VAR2) in addition to a primary sweep source (VAR1). After primary sweep is completed, the output of secondary sweep source is incremented or decremented by the specified step value, then the primary sweep source is swept again.

Figure 1-2 Subordinate Sweep Measurement

Sweep Measurements

Measurement Functions

To set up the subordinate sweep measurement, select the following on CHANNELS: CHANNEL DEFINITION screen:

• VAR1 function for desired primary sweep source (SMU or VSU).

• VAR2 function for desired secondary sweep source (SMU or VSU).

Subordinate sweep measurement has the following restriction:

• For the secondary sweep source, only single sweep mode and linear staircase mode are available.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-7

Sweep Measurements Measurement Functions

Parameters

The parameters for primary sweep source (VAR1) are same as the parameters for sweep source of basic sweep measurement. For secondary sweep source (VAR2), specify the following parameters on MEASURE: SWEEP SETUP screen.

Parameter Description

start Start value of secondary sweep. Allowable range of start

step Step increment of secondary sweep.

number of steps Number of secondary sweep steps.Allowable range: 1 to 128.

NOTE Stop value

Stop value of secondary sweep is calculated from start, step, and number of steps. Allowable range of stop depends on the output range of secondary sweep source. For the output range of each measurement channel, refer to Chapter 7.

compliance Compliance value of secondary sweep source. This parameter

depends on the output range of secondary sweep source. For the output range of each measurement channel, refer to Chapter 7.

applies to SMU only. Allowable range of compliance depends on the compliance range of secondary sweep source. For the compliance range of each measurement channel, refer to Chapter 7.

power compliance (Optional) Power compliance value of secondary sweep source.

This parameter applies to SMU only. Allowable range of power compliance depends on the power compliance range of sweep source. For details, refer to Chapter 7.

1-8 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Synchronous Sweep Measurement

For synchronous sweep measurement, you set up a synchronous sweep source (VAR1') in addition to a primary sweep source (VAR1). The output of the synchronous sweep source is swept synchronously with the output of the primary sweep source at a constant offset value and ratio.

Figure 1-3 Synchronous Sweep Measurement

Sweep Measurements

Measurement Functions

To set up synchronous sweep measurement, select the following on CHANNELS: CHANNEL DEFINITION screen:

• VAR1 function for desired primary sweep source (SMU or VSU).

• VAR1' function for desired synchronous sweep source (SMU or VSU).

Synchronous sweep mode has the following restrictions:

• For the following, VAR1' is always set to the same mode as VAR1:

• linear/log staircase

• single/double sweep mode

• VAR1 and VAR1' must be same V/I output mode. For example, if VAR1 is set to

V mode, then VAR1' must be set to V or VPULSE mode.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-9

Sweep Measurements Measurement Functions

Parameters

The parameters for primary sweep source (VAR1) are same as the parameters for sweep source of basic sweep measurement. For synchronous sweep source (VAR1'), specify the following parameters on MEASURE: SWEEP SETUP screen.

Parameter Description

offset Offset between outputs of primary and synchronous sweep

sources.

ratio Ratio between outputs of primary and synchronous sweep

sources.

compliance Compliance value of synchronous sweep source. This

parameter applies to SMU only. Allowable range of compliance depends on the compliance range of synchronous sweep source. For the compliance range of each measurement channel, refer to Chapter 7.

power compliance (Optional) Power compliance value of synchronous sweep

source. This parameter applies to SMU only. Allowable range of power compliance depends on the power compliance range of synchronous sweep source. For details, refer to Chapter 7.

The relationship between the output of primary and synchronous sweep sources is determined by the following equation:

synchronous output = primary output ´ ratio + offset

The synchronous output determined by above equation must not exceed the output range of synchronous sweep source.

1-10 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Pulse Sweep Measurement

For a sweep measurement, a sweep or constant source SMU can be a pulse source. But only one SMU can be a pulse source. Figure 1-4 shows the relationship between pulse source and other sources.

Figure 1-4 Pulse Source and Other Sources

Sweep Measurements

Measurement Functions

For the pulse sweep measurement, the delay time of the primary sweep source is ignored, and each step of the primary sweep source is synchronized with output of the SMU pulse source. Measurements are made during the pulse output.

The pulse output of PGU is not synchronized with any other source.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-11

Sweep Measurements Measurement Functions

Figure 1-5 SMU Pulse

Parameters

Specify SMU pulse parameters (MEASURE: SWEEP SETUP):

Parameter Description

pulse period SMU forces the next pulse after specified pulse period.

Allowable range: 5 ms to 1 s. Resolution: 100 ms.

pulse width Time from when SMU output starts to change from base value

to time when SMU starts to return from peak value. Measurements are made while the peak value is output. Allowable range: 0.5 ms to 100 ms. Resolution: 100 ms.

base value The base output value of the SMU pulse.

Be aware that if any of following are true, pulsed SMU channel may not output the pulse period and pulse width you specified:

• Measurement range differs from compliance range (lowest range that includes compliance).

• Ranging mode is set to auto range or limited auto range.

• Multi-channel measurement is set.

1-12 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

NOTE Pulse width

If the measurement settings do not meet the following conditions, pulse width setting of SMU may be insufficient to make measurement. If so, the pulse width is automatically changed to be appropriate.

Number of Meas. Channels: 1

Integration Time: Short

Ranging Mode: Fixed

Sweep Measurements

Measurement Functions

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-13

Sweep Measurements Defining Measurement Conditions

Defining Measurement Conditions

This section describes the sweep measurement tasks.

The basic procedure to test your DUT is as follows:

1 Connecting your DUT to the 4155C/

4156C. See Chapter 10 for procedures.

2 Defining measurement mode and

CHANNELS: CHANNEL DEFINITION 01JAN29 10:57AM

*MEASUREMENT MODE

SWEEP

*CHANNELS

UNIT VNAME INAME MODE FCTN RESISTANCE

SMU1:HR VS IS COMMON CONST 0 ohm

SMU2:HR VG IG V VAR1'

SMU3:HR VD ID V VAR1

SMU4:HR

SMU5:HP 0 ohm

VSU1 -------

VSU2 -------

VMU1 ------- ----- ---- DISCHARGE

VMU2 ------- ----- ---- ON

PGU1 -------

PGU2 -------

GNDU ------- ----

SWEEP

Select Measurement Mode with softkey or rotary knob.

CHANNEL

DEF

MEASURE STBY SERIES

USER

FCTN

VAR

E5250A

PROP

SWEEP

SAM-

QSCV

DEFAULT MEASURE SETUP

MEM1 M B-Tr VCE-IC

MEM2 M FET VDS-ID

1/2

PAGE

measurement units that you use to make measurement.

PLING

See “To Define Measurement Units” on page 1-16. Also see Chapter 8 for the user function, standby function, and R-box

control.

3 Setting the source parameters of the units.

MEASURE: SWEEP SETUP 01JAN29 10:58AM

*VARIABLE VAR1 VAR2 VAR1'

UNIT SMU3:HR UNIT SMU2:HR

NAME VD NAME VG

SWEEP MODE SINGLE OFFSET 0.0000 V

LIN/LOG LINEAR RATIO 1.000

START 0.0000 V COMPLIANCE 100.00mA

STOP 2.0000 V POWER COMP OFF

STEP 20.0mV

NO OF STEP 101

COMPLIANCE 100.00mA

POWER COMP OFF

*TIMING

HOLD TIME 0.0000 s

DELAY TIME 0.0000 s *SWEEP STOP AT ANY ABNORM Status

*CONSTANT

UNIT

NAME

MODE

SOURCE --------- --------- --------- ---------

COMPLIANCE --------- --------- --------- ---------

SINGLE

Select Sweep Mode with softkey or rotary knob.

SWEEP

SETUP

MEASURE

SETUP

OUTPUT

SEQ

PAGE

SINGLE

DOUBLE

PAGE

See following in this section:

•“To Set up Primary Sweep”

•“To Set up Secondary Sweep”

•“To Set up Synchronous Sweep”

•“To Set up Constant Output”

•“To Set up SMU Pulsed Output”

•“To Set up PGU Output”

•“To Set up Stop Condition”

1-14 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Defining Measurement Conditions

4 Setting the display mode to show

DISPLAY: DISPLAY SETUP 01JAN29 10:58AM

*DISPLAY MODE

GRAPHICS

*GRAPHICS

Xaxis Y1axis Y2axis

NAME VD SQID DSQID

SCALE LINEAR LINEAR LINEAR

MIN 0.000000000 V 0.0000000000 0.0000000000

MAX 2.0000000 V 100.00000000m 100.00000000m

*GRID *LINE PARAMETER

ON ON

*DATA VARIABLES *DATA DISPLAY RESOLUTION

NORMAL

GRAPH-

LIST

measurement results.

ICS

See following in this section:

•“To Display Graphics Results”

•“To Display List Results”

GRAPHICS

Select Display Mode with softkey or rotary knob.

DISPLAY

SETUP

ANLYSIS

SETUP

PAGE

5 Executing the measurement.

See “To Execute or Stop Measurement” on page 1-29. Also see Chapter 7 for executing self-calibration and zero offset cancel.

6 Results.

GRAPH/LIST: GRAPHICS SHORT 01JAN29 10:59AM

() ()

100.m 100.m

SQID DSQID

10.0m 10.0m /div /div

0.00 0.00

0.00 VD (V) 200 .m /div 2.00

AXISY1MARKER/

LINE SCALING DISPLAY

CURSOR

SWEEP

SETUP

TIMING

SETUP

MARKER

MARKER MIN/MAX

INTER-

MARKER SKIP

AUTO ANALY-

CURSOR

For example, displayed graphically.

OFF

POLATE

OFF

SIS

OFF

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-15

Sweep Measurements Defining Measurement Conditions

To Define Measurement Units

Press Chan front-panel key to define the measurement units. CHANNELS: CHANNEL DEFINITION screen is displayed.

1. MEASUREMENT MODE:

Select SWEEP secondary softkey for sweep measurement.

2. VNAME:

Enter a unique name for voltage variable. For example, enter Vce for collector-emitter voltage. If channel does neither V force nor V measurement, you can omit VNAME.

3. INAME:

Enter a unique name for current variable. For example, enter Ic for collector current. If channel does neither I force nor I measurement, you can omit INAME.

4. MODE:

Select one of the following softkeys:

• V : Voltage output (for SMU, VSU, and PGU). V : Grounded mode voltage measurement (for VMU).

• I : Current output (for SMU).

• VPULSE : Pulsed voltage output (for SMU and PGU).

• IPULSE : Pulsed current output (for SMU).

• COMMON : Circuit common (for SMU and GNDU).

• DVOLT : Differential mode voltage measurement (for VMU).

5. FCTN:

Select one of the following softkeys to set the output function:

• CONST : Constant output function (for SMU, VSU, and PGU).

• VAR1 : Primary sweep output function (for SMU and VSU).

• VAR2 : Secondary sweep output function (for SMU and VSU).

• VAR1' : Synchronous sweep output function (for SMU and VSU).

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Sweep Measurements

Defining Measurement Conditions

6. DISCHARGE:

Select ON secondary softkey to connect the discharge resistor to VMU input, or OFF to disconnect the resistor. The discharge resistor is used to prevent the VMU inputs from charge up in the idle state.

When DISCHARGE is ON, the discharge resistor is automatically connected to the VMU input, and disconnected from the input in the measurement state.

VNAME and INAME

You can use VNAME and INAME names in user function definitions or for analysis on the GRAPHICS/LIST screens. These names must be 6 or less alphanumeric characters. First character must be alphabet character.

To disable a unit

Select DELETE ROW softkey. The settings for the unit are deleted.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-17

Sweep Measurements Defining Measurement Conditions

To Set up Primary Sweep

Primary sweep source is the measurement unit defined as VAR1 in the CHANNELS: CHANNEL DEFINITION screen. To set up the primary sweep source, press displayed.

1. VAR1 : SWEEP MODE

Select one of the following softkeys to set the sweep mode:

• SINGLE : single sweep mode.

• DOUBLE : double sweep mode.

2. VAR1 : LIN/LOG

Select one of the following softkeys to set the sweep step mode:

• LINEAR : linear step mode.

• LOG XX : logarithmic step mode. XX specifies the number of steps per

3. VAR1 : START

Meas front-panel key. The MEASURE: SWEEP SETUP screen is

decade. XX is 10, 25, or 50.

Enter the sweep start value.

4. VAR1 : STOP

Enter the sweep stop value.

If you select LOG sweep step mode, the polarity of stop value must be same as the polarity of start value.

5. VAR1 : STEP

If you select LINEAR sweep step mode, enter the sweep step value. This field is not available for the LOG mode.

6. VAR1 : COMPLIANCE, POWER COMPLIANCE

Only for SMU. Enter the compliance value, and power compliance (ON or OFF) for the primary sweep source.

NO OF STEP is automatically calculated from START, STOP, and STEP values.

You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen.

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Sweep Measurements

Defining Measurement Conditions

To Set up Secondary Sweep

Secondary sweep source is the measurement unit defined as VAR2 in the CHANNELS: CHANNEL DEFINITION screen. On the MEASURE: SWEEP SETUP screen, set up the primary sweep source (VAR1), then do following:

1. VAR2: START

Enter the secondary sweep start value.

2. VAR2: STEP

Enter the secondary sweep step value.

3. VAR2: NO OF STEP

Enter the number of steps for the secondary sweep.

4. VAR2 : COMPLIANCE, POWER COMPLIANCE

Only for SMU. Enter the compliance value, and power compliance (ON or OFF) for the secondary sweep source.

SWEEP MODE and LIN/LOG are automatically set to SINGLE and LINEAR, respectively. You cannot change the settings.

The STOP value is automatically calculated from START, STEP, and NO OF STEP values.

You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-19

Sweep Measurements Defining Measurement Conditions

To Set up Synchronous Sweep

Synchronous sweep source is the measurement unit defined as VAR1’ in the CHANNELS: CHANNEL DEFINITION screen. VAR1’ is available for the measurement units set to the output mode same as the VAR1 output mode. The output value of VAR1' is calculated by the following equation:

VA R1 ' = VAR 1 ´ RATIO + OFFSET

On the MEASURE: SWEEP SETUP screen, set up the primary sweep source (VAR1), then do following:

1. VAR1’ : OFFSET

Enter the offset value of the VAR1’ output against the VAR1 output.

2. VAR1’ : RATIO

Enter the ratio value of the VAR1’ output against the VAR1 output.

3. VAR1’ : COMPLIANCE, POWER COMPLIANCE

Only for SMU. Enter the compliance value, and power compliance (ON or OFF) for the synchronous sweep source.

You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen.

1-20 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Defining Measurement Conditions

To Set up Constant Output

Constant voltage/current source is the measurement unit defined as CONST in the CHANNELS: CHANNEL DEFINITION screen. To set up the constant output source, press displayed.

1. CONSTANT : SOURCE

Enter the desired output value of the constant source.

2. CONSTANT : COMPLIANCE

Only for SMU. Enter the compliance value for the constant source.

You cannot change UNIT, NAME, and MODE in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen.

Meas front-panel key. The MEASURE: SWEEP SETUP screen is

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-21

Sweep Measurements Defining Measurement Conditions

To Set up SMU Pulsed Output

SMU pulse output source is the measurement unit defined as VPULSE or IPULSE in the CHANNELS: CHANNEL DEFINITION screen. For pulsed sweep source, set the function (FCTN) to VAR1, VAR2, or VAR1’. For pulsed constant source, set the function to CONST. To set up the SMU pulse output source, press key. The MEASURE: SWEEP SETUP screen is displayed.

1. Set the source output parameters:

• For VAR1, refer to “To Set up Primary Sweep” on page 1-18.

• For VAR2, refer to “To Set up Secondary Sweep” on page 1-19.

• For VAR1’, refer to “To Set up Synchronous Sweep” on page 1-20.

• For CONST, refer to “To Set up Constant Output” on page 1-21.

2. SMU PULSE: PERIOD

Enter the pulse period value.

3. SMU PULSE: WIDTH

Enter the pulse width value.

Meas front-panel

4. SMU PULSE: BASE

Enter the pulse base value.

You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen.

1-22 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Defining Measurement Conditions

Pulse Parameters

The relation between the PERIOD, WIDTH, and BASE values are as shown in the following figures.

SMU outputs the pulses as shown in figure (a) or figure (b).

• Figure (a)

When the function (FCTN) is set to VAR1, VAR2, or VAR1’.

The pulse peak values are the sweep output values calculated from the sweep start, stop, step values, and so on.

• Figure (b)

When the function (FCTN) is set to CONST.

The pulse peak value is the output value of the constant output source.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-23

Sweep Measurements Defining Measurement Conditions

To Set up PGU Output

1. Define PGU to be VPULSE and CONST as described in “To Define Measurement Units” on page 1-16.

2. Press

3. Select PGU SETUP primary softkey.

4. In the PERIOD field of PGU1, enter the pulse period value.

5. In the WIDTH field of desired PGU column, enter the pulse width value.

6. In the DELAY TIME field of desired PGU column, enter delay time value.

7. In the PEAK VALUE field of desired PGU column, enter pulse peak value.

8. In the BASE VALUE field of desired PGU column, enter pulse base value.

9. In the LEADING TIME field of desired PGU column, enter the leading-edge

10. In the TRAILING TIME field of desired PGU column, enter the trailing-edge

11. In the IMPEDANCE field of desired PGU column, select:

12. In the PULSE COUNT field, do one of the following:

Meas key in the PAGE CONTROL key group.

transition time.

• LOW secondary softkey for approximately zero ohm output impedance.

• 50 ohm secondary softkey for 50 ohm output impedance.

• Select FREE RUN secondary softkey to force the pulse continuously.

• Or enter the number of pulses to output (for sampling measurement only).

For the pulse period and pulse count values, the values you set for PGU1 are also used for PGU2. The following figure shows the relation between pulse waveform and setup parameters.

1-24 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Defining Measurement Conditions

To modify the UNIT and NAME fields

Modify the UNIT and NAME fields on the CHANNELS: CHANNEL DEFINITION screen.

Using PGUs as constant voltage source

To use a PGU as a constant voltage source, set the desired PGU as follows:

• V in MODE column on the CHANNEL DEFINITION screen

• Desired output voltage value in SOURCE field on MEASURE: PGU SETUP

screen.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-25

Sweep Measurements Defining Measurement Conditions

To Set up Stop Condition

1. Press Meas key in the PAGE CONTROL key group.

2. Move field pointer to SWEEP Status field.

3. Select one of the following softkeys:

CONT AT ANY Sweep will continue even if an abnormal status occurs. If

power compliance is set for an SMU, this softkey is not displayed.

STOP AT ANY ABNORM Sweep will stop if any abnormal status occurs.

STOP AT COMPLIANCE Sweep will stop only if SMU reaches its compliance setting.

This is automatically set when power compliance is set for SMUs, or when 10k ohm, 100k ohm, or 1M ohm is selected in the SERIES RESISTANCE field.

Abnormal status means the following:

• SMU reaches its compliance setting.

• Current of VSU exceeds approximately ±100 mA.

• SMU or VSU oscillates.

• A/D converter overflow occurs.

• Average current of PGU exceeds ±100 mA.

1-26 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Defining Measurement Conditions

To Display Graphics Results

1. Press Display key in the PAGE CONTROL key group.

2. Select DISPLAY SETUP primary softkey.

3. In the DISPLAY MODE field, select GRAPHICS secondary softkey.

4. In the X axis column, enter variable name, select axis scale, and enter minimum and maximum values.

5. In the Y1 axis column, enter variable name, select axis scale, and enter minimum and maximum values.

6. If you use Y2 axis, enter variable name, select axis scale, and enter minimum and maximum values in Y2 axis column.

When the pointer is in the NAME row, the allowable variable names appear in the secondary softkey area. To set a variable name, select the desired secondary softkey. The allowable names are names that you already set up on the CHANNEL DEFINITION, USER FUNCTION, and USER VARIABLE screens.

To display a grid on the plotting area

In the GRID field, select ON to display or OFF to not display.

To display line parameters on the plotting area

In the LINE PARAMETER field, select ON to display or OFF to not display. Line parameters are the X and Y intercepts and gradient of the analysis lines.

To display variables on the data variable area

In the DATA VARIABLES fields, select secondary softkey for desired variable. Up to 2 variables can be displayed on the data variable area which is located between the graph area and the marker area.

To change resolution of the data to be displayed

In the DATA DISPLAY RESOLUTION field, select NORMAL for the resolution shown in the specifications, or EXTEND for the ADC full scale resolution. For example, the data display resolution is 1 fA in NORMAL mode, and 10 aA in EXTEND mode for 10 pA measurement range.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-27

Sweep Measurements Defining Measurement Conditions

To Display List Results

1. Press Display key in the PAGE CONTROL key group.

2. Select DISPLAY SETUP primary softkey.

3. In the DISPLAY MODE field, select LIST secondary softkey.

4. In the LIST area, select the secondary softkey of the variables for which you want to list the measurement results.

When the pointer is in the NAME row, the allowable variable names appear in the secondary softkey area. To set a variable name, select the desired secondary softkey. The allowable names are names that you already set up on CHANNEL DEFINITION, USER FUNCTION, and USER VARIABLE screens.

To display variables on the data variable area

In the DATA VARIABLES fields, select secondary softkey for desired variable. Up to 2 variables can be displayed on the data variable area which is located below the list area.

To change resolution of the data to be displayed

1-28 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Defining Measurement Conditions

To Execute or Stop Measurement

• To execute a measurement, press:

Single key in the MEASUREMENT key group for single measurement.

•

Repeat key in the MEASUREMENT key group for repeat measurement.

•

Append key in the MEASUREMENT key group for append measurement.

• To stop a measurement, press

Sto p key in the MEASUREMENT key group.

Single, Repeat, and Append Measurement

There are three measurement execution modes as follows:

Single measurement Clears GRAPHICS or LIST screen, then executes measurement

one time. Measurement results are displayed on GRAPHICS or LIST screen.

Repeat measurement Executes measurements continuously. Before each

measurement is executed, the GRAPHICS or LIST screen is cleared. Most recent measurement results are displayed on GRAPHICS or LIST screen.

Append measurement Executes measurement one time. Does not clear GRAPHICS or

LIST screen. That is, measurement results are added to the existing results.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-29

Sweep Measurements Making a Measurement

Making a Measurement

In this section, you learn how to execute the measurements with an 4155C/4156C and to display the measurement results graphically. Id-Vg measurement of a MOS FET is provided as an example. You learn step-by-step how to perform this measurement.

You measure the device under test (DUT) by using the measurement circuit as shown in the following diagram. SMU2 and SMU3 sweep the same voltage to the gate and drain. SMU3 measures the drain current (Id). The source and substrate are connected to circuit common.

You should get result similar to the following figure. Gate voltage Vg (swept from 0 V to 2 V) is assigned to X axis, ÖId assigned to Y2 axis.

is assigned to Y1 axis, and ¶ÖId / ¶Vg is

NOTE For accurate measurements, allow the 4155C/4156C to warm-up for a minimum of

40 minutes after you turn on the instrument, and then execute calibration. For the self-calibration, see Chapter 7.

1-30 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Making a Measurement

Step 1. Prepare for the measurement

Before executing measurement, configure the 4155C/4156C and accessories.

1. Make sure that the 4155C/4156C is off.

2. Connect the 16442A test fixture to the 4155C/4156C. See figure below.

3. If you use the keyboard, connect it to the 4155C/4156C.

Connection between 4156C and 16442A:

16442A

Kelvin Triaxial Cables

Coaxial Cables

Interlock/LED Cable

4156

4156C cable 16442A 4156C cable 16442A

Intlk

SMU 1

SMU 2

SMU 3

Interlock/LED

Kelvin triaxial

Intlk VSU 1

SMU 1 VSU 2

SMU 2 VMU 1

SMU 3 VMU 2

Coaxial

VSU 1

VSU 2

VMU 1

VMU 2

a. Interlock/LED cable: Agilent 16493J b. Coaxial cable: Agilent 16493B. You do not need to connect VSUs and

VMUs for this measurement.

c. Kelvin triaxial cable: Agilent 16493K

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-31

Sweep Measurements Making a Measurement

Connection between 4155C and 16442A:

Triaxial Cables

16442A

Coaxial Cables

Interlock/LED Cable

4155

4155C cable 16442A 4155C cable 16442A

Intlk

SMU 1

Interlock/LED

Triaxial

Intlk

SMU 1

VSU 1

Coaxial

VSU 1

(blue label)

SMU 2

Triaxial

SMU 2

VSU 2

Coaxial

VSU 2

(blue label)

SMU 3

Triaxial

SMU 3

VMU 1

Coaxial

VMU 1

(blue label)

SMU 4

Triaxial

SMU 4

VMU 2

Coaxial

VMU 2

(blue label)

a. Interlock/LED cable: Agilent 16493J b. Triaxial cable: Agilent 16493C. You do not need to connect SMU4 for

this measurement.

c. Coaxial cable: Agilent 16493B. You do not need to connect VSUs and

VMUs for this measurement.

1-32 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Making a Measurement

Step 2. Mount your DUT on the test fixture

1. Select a suitable socket module for your DUT.

2. Mount the socket module on the test fixture.

3. Mount your DUT on the socket module.

4. Make connections with four connection cables (miniature banana to pin plug).

You make the following connections:

• Source to SMU1

• Gate to SMU2

• Drain to SMU3

• Substrate to SMU1

Both the source and substrate terminals are connected to SMU1.

5. After finishing connections, shut the lid of the test fixture.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-33

Sweep Measurements Making a Measurement

Wiring for the 4156C

For this measurement, non-Kelvin connections are used. So, connect only the force terminals as shown in the following figure:

Wiring for the 4155C

1-34 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Making a Measurement

Step 3. Define the channel assignments

You set the connection information on the CHANNELS: CHANNEL DEFINITION screen.

1. Turn on the 4155C/4156C. Self-test starts.

2. After self-test is finished, make sure that CHANNELS: CHANNEL DEFINITION screen appears on the screen of the 4155C/4156C. If not, press

Chan front-panel key.

where, softkeys located bottom of screen are the primary softkeys, and softkeys located right side of screen are the secondary softkeys.

3. Make sure that SWEEP is displayed in the MEASUREMENT MODE field. If not, select SWEEP secondary softkey in the MEASUREMENT MODE field.

4. Set the connection information in the CHANNELS area as shown in the following table. For the actual screen, see Figure 1-6.

on Front Panel on Keyboard

To move the pointer, use arrow keys of

MARKER/CURSOR area.

To move the cursor to edit in display area,

To enter "VS" in VNAME field,

To enter "IS" in INAME field,

To set "V" in

use arrow keys of Edit area.

press

. (period) and + keys,

then

Enter.

* and + keys,

press then

Enter.

select V secondary softkey. press

MODE field,

To set "VAR1" in FCTN field,

select VAR1' secondary softkey.

select VAR1 secondary softkey.

To disable a unit, select DISABLE UNIT

secondary softkey.

use arrow keys

use

Backspace key.

type VS, then press

type IS, then press

Shift-F1 keys.

press

Shift-F4 keys.

Shift-F2 keys.

press

Shift-F7 keys.

press

Enter.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-35

Sweep Measurements Making a Measurement

Figure 1-6 Channel Definition Screen

CHANNELS: CHANNEL DEFINITION 01JAN29 10:57AM

*MEASUREMENT MODE

SWEEP

*CHANNELS

UNIT VNAME INAME MODE FCTN RESISTANCE

SMU1:HR VS IS COMMON CONST 0 ohm

SMU2:HR VG IG V VAR1'

SMU3:HR VD ID V VAR1

SMU4:HR

SMU5:HP 0 ohm

VSU1 -------

VSU2 -------

VMU1 ------- ----- ---- DISC HARGE

VMU2 ------- ----- ---- ON

PGU1 -------

PGU2 -------

GNDU ------- ----

SWEEP

Select Measurement Mode wi th softkey or rotary kno b.

CHANNEL

DEF

USER

FCTN

MEASURE STBY SERIES

USER

VAR

E5250A

PROP

SWEEP

SAM-

PLING

QSCV

DEFAULT MEASURE SETUP

MEM1 M B-Tr VCE-IC

MEM2 M FET VDS-ID

1/2

PAGE

1-36 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Making a Measurement

Step 4. Define the user functions

You define the user functions on the CHANNELS: USER FUNCTION DEFINITION screen.

1. Select USER FCTN primary softkey. The CHANNELS: USER FUNCTION DEFINITION screen appears.

2. Enter the user function information as shown in the following table. For the actual screen, see Figure 1-7.

on Front Panel on Keyboard

To move the pointer, use arrow keys of

use arrow keys.

MARKER/CURSOR area.

To move the cursor to edit in display area,

To enter "SQID" in NAME field,

To enter "SQRT(ID)" in DEFINITION field,

To enter "DSQID" in NAME field,

To enter "DIFF(SQID,VG)"

in DEFINITION field,

use arrow keys of Edit area.

press

+, 2, *, / keys, then

Enter.

+, 2, 3, p, blue key, (

press keys, and ID secondary softkey, then

/, +, 2, *, / keys, then

press

Enter.

press

/, *, 7, 7, blue key, (,

blue key, +, 2, *, /, blue key, , (comma) keys, and

use

type SQID, then press Enter.

type SQRT(ID), then press

) and Enter.

type DSQID, then press Enter.

type DIFF(SQID,VG),

then press VG secondary softkey, then

) and Enter.

To disable a user function,

select DISABLE FUNCTION

press

secondary softkey.

a. Square root operator (Ö

) is defined by "SQRT" built-in function.

b. Partial difference (¶/¶) is defined by "DIFF" built-in function.

Backspace key.

Enter.

Shift-F7 key.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-37

Sweep Measurements Making a Measurement

Figure 1-7 User Function Definition Screen

CHANNELS: USER F UNCTION DEFINIT ION 01JAN29 10:53AM

*USER FUNCTION

NAME UNIT DEFINITION

SQID SQRT(ID)

DSQID DIFF(SQI D,VG)

SQID

Enter U ser Function Name. (max 6 chars.)

CHANNEL

DEF

USER

FCTN

USER

VAR

E5250A

PROP

PAGE

DELETE ROW

PAGE

Figure 1-7 defines the following two user functions: SQID = ÖId DSQID = ¶SQID / ¶Vg = ¶ÖId / ¶Vg

Where, Id is drain current and Vg is gate voltage.

1-38 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Making a Measurement

Step 5. Set up the measurement parameters

You set the output parameters on the MEASURE: SWEEP SETUP screen.

1. Press Meas front-panel key. The MEASURE: SWEEP SETUP screen appears.

In the screen, the upper left area defines the VAR1 information, and the upper right area defines the VAR1’ information. See Figure 1-8.

2. Set the VAR1 information as shown below:

on Front Panel on Keyboard

To move the pointer, use arrow keys of

use arrow keys.

MARKER/CURSOR area.

To set "SINGLE" in SWEEP MODE field,

To set "LINEAR" in LIN/LOG field,

To enter "2.000 V" in STOP field,

To enter "20.00 mV" in STEP field,

select SINGLE secondary softkey.

select LINEAR secondary softkey.

2, then Enter.type 2,

press

2, 0, m, then Enter.type 20m,

press

Shift-F1 keys.

press

Shift-F1 keys.

then press

Enter.

Drain voltage sweeps from 0 V to 2 V with 20 mV step. The current compliance is set to 100 mA.

3. Set the VAR1’ information as shown below:

on Front Panel on Keyboard

To enter "0.000 V" in

press

0, then Enter.type 0, then press Enter.

OFFSET field,

To enter "1.000" in

1, then Enter.type 1, then press Enter.

press

RATIO field,

To force the same voltage to the drain and gate, set RATIO = 1 and OFFSET = 0. Because VAR1’ is defined as follows:

(VAR1’ output) = RATIO ´ (VAR1 output) + OFFSET

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-39

Sweep Measurements Making a Measurement

Figure 1-8 Sweep Setup Screen

MEASURE: SWEEP S ETUP 01JAN29 10:58AM

*VARIABLE VAR1 VAR2 VAR1'

UNIT SMU3:HR UNIT SMU2:HR

NAME VD NAME VG

SWEEP M ODE SINGLE OFFSET 0.0000 V

LIN/LOG LINEAR RATIO 1.000

START 0.0000 V COMPLIANCE 100.00mA

STOP 2.0000 V POWER C OMP OFF

STEP 20.0mV

NO OF STEP 101

COMPLIANCE 100.00mA

POWER C OMP O FF

*TIMING

HOLD TI ME 0.0000 s

DELAY T IME 0.000 0 s *SWEEP STO P AT AN Y ABNORM Status

*CONSTANT

UNIT

NAME

MODE

SOURCE --------- --------- --------- ---------

COMPLIANCE --------- --------- --------- ---------

SINGLE

Select Sweep Mod e with softkey or rotary knob.

SWEEP

SETUP

MEASURE

SETUP

OUTPUT

SEQ

SINGLE

DOUBLE

PAGE

1-40 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Making a Measurement

Step 6. Set up the results display

You set the results display information on the DISPLAY: DISPLAY SETUP screen.

1. Press Display front-panel key. The DISPLAY: DISPLAY SETUP screen appears.

2. Make sure GRAPHICS is displayed in the DISPLAY MODE field. If not, select GRAPHIC secondary softkey in the DISPLAY MODE field.

3. Set the X-, Y1-, and Y2-axes information as shown below. For the actual setup, see Figure 1-9.

on Front Panel on Keyboard

To enter "VG" in NAME field,

To set "LINEAR" in SCALE field,

To enter "0.00000 V" in MIN field,

To enter "2.00000 V" in MAX field,

To enter "SQID" in NAME field,

To enter "0.00000 A" in MIN field,

To enter "100.000mA" in MAX field,

To enter "DSQID" in NAME field,

select VG secondary

press

Shift-F3 keys.

softkey.

select LINEAR

press

Shift-F1 keys.

secondary softkey.

press

0, then Enter.type 0, then press Enter.

2, then Enter.type 2, then press Enter.

press

select MORE 1/2, then SQID secondary

Shift-F7 keys, then

press

Shift-F3 keys.

softkeys.

press

0, then Enter.type 0, then press Enter.

1, 0, 0, m, then Enter.type 100m, then press

press

Enter.

select MORE 1/2, then DSQID secondary

Shift-F7 keys, then

press

Shift-F4 keys.

softkeys.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-41

Sweep Measurements Making a Measurement

Figure 1-9 Display Setup Screen

DISPLAY: DISPLAY SETUP 01JAN29 10:58AM

*DISPLAY MODE

GRAPHICS

*GRAPHICS

Xaxis Y1axis Y2axis

NAME VD SQID DSQID

SCALE LINEAR LINEA R LINEAR

MIN 0.000000000 V 0.00 00000000 0.0000000000

MAX 2.0000000 V 100.00000000m 100.0000 0000m

*GRID *LINE PARAMETER

ON ON

GRAPH-

ICS

LIST

*DATA VARI ABLES *DA TA DISPLAY RESOLUTION

GRAPHICS

Select Display M ode with softkey or rota ry knob.

DISPLAY

SETUP

ANLYSIS

SETUP

NORMAL

PAGE

1-42 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sweep Measurements

Making a Measurement

Step 7. Execute the measurement

Press Single front-panel key to execute the measurement.

You will get measurement results as shown in the following example:

GRAPH/LIST: GRAPHICS S HORT 01JAN29 10:59AM

() ()

100.m 100.m

SQID DSQID

10.0m 10.0m /div /div

0.00 0.00

0.00 VD (V) 200.m /div 2.00

AXIS

MARKER/

CURSOR

LINE SCA LING DISPLAY

SETUP

SWEEP

SETUP

TIMING

SETUP

MARKER

OFF

MARKER MIN/MAX

INTER-

POLATE

OFF

MARKER SKIP

AUTO ANALY-

SIS

CURSOR

OFF

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 1-43

Sweep Measurements Making a Measurement

1-44 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

2 Knob Sweep Measurements

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

This chapter explains how to execute knob sweep measurements.

The knob sweep function is useful in the following cases:

• to determine a parameter value for normal sweep

• to quickly make a rough measurement of a DUT characteristics

2-2 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

Measurement Functions

The knob sweep function allows you to easily perform real-time sweep measurements by rotating the rotary knob on the front panel. This function is useful when you want to quickly make a rough measurement of a DUT characteristic, or when you want to easily define a measurement setup for normal sweep.

To start the knob sweep measurement, press the green key and then the

Single

front-panel key. The 4155C/4156C starts knob sweep measurement, and repeats measurements continuously until this function is stopped. You can change the measurement setups even while the measurements are being performed.

When knob sweep measurements are started, the VAR1 start value and VAR1 sweep range are 0 V or 0 A. You change the sweep range from 0 to the stop value by rotating the knob.

To stop the knob sweep measurements, press

Stop front-panel key, or a PAGE

CONTROL group key. To restart the measurement, press the following key(s):

If you pressed the

If you pressed a PAGE CONTROL key: green key and

Stop key: Single key

Single key

Available units and functions

Table 2-1 shows available units and functions for knob sweep measurement.

Table 2-1 Available Units and Functions for Knob Sweep Measurement

Unit

VAR1 VAR1' VAR2

Output Function Output Mode

CONST

STAND

COMM

Pulse

SMU · n.a. ······n.a. ·- · VSU · n.a. ····----- - VMU -------- -·· GNDU ---·---· --- - PGU ---···-- ·-- -

Meas. Mode

V DVOLT I

· means "This is available for knob sweep measurement".

n.a. means "This is not available for knob sweep measurement".

- means "This is not available for this unit".

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 2- 3

Knob Sweep Measurements Measurement Functions

Normal Sweep and Knob Sweep Measurements

Table 2-2 compares the normal sweep measurement performed by measurement front-panel keys and knob sweep measurement by the front-panel knob.

Table 2-2 Comparison of Sweep Measurement and Knob Sweep Measurement

Item Sweep Measurement Knob Sweep Measurement

Spacing of VAR1 linear or log linear

Sweep Mode of VAR1 single or double single or double

Number of Steps for VAR1 1 to 1001 1 to 1001

Hold Time 0 to 655.35 s 0 to 655.35 s

Power Compliance available not available

Measurement Ranging Mode auto, limited auto, or fixed

compliance range

Standby Function available available

Measurement Channel 1 to 8 ch 1 ch only

Output Sequence can set

can set

Trigger Function available not available

Integration Time short, medium, or long 80 ms

Measurement range is automatically set according to specified compliance value.

Settings on the MEASURE: OUTPUT SEQUENCE screen also apply to knob

sweep measurement.

2-4 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

Measurement Functions

Features of Knob Sweep Function

The following are parameters that are for knob sweep measurement only or that have a different meaning or range from normal sweep measurement.

LIN/LOG mode

Only linear mode is available. Even if you set LOG on the MEASURE: SWEEP SETUP screen, the knob sweep is a linear sweep measurement.

VAR1 Range

Sweep range of VAR1 source output. If you do not set the VAR1 RANGE, the default is the stop value specified for the VAR1 channel on the MEASURE: SWEEP SETUP screen.

Polarity

The following sweep polarities are available for the knob sweep function of the VAR1 source. To set the polarity, select VAR1 SETUP and POLARITY softkeys.

+ (positive) Used to set the sweep output in the positive X direction.

- (negative) Used to set the sweep output in the negative X direction. +/- (bipolar) Used to set the sweep output in both the positive and negative X

directions.

To increase the source absolute value, rotate the rotary knob in clockwise.

To decrease the source value toward 0, rotate the rotary knob in counterclockwise. When measurement curves reach 0, the curves remain at 0 even if you continue to rotate the rotary knob counterclockwise.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 2- 5

Knob Sweep Measurements Measurement Functions

Step Time

Step time is the time width of a sweep step as shown in the following figure. For knob sweep measurements, you cannot set the delay time. Instead, you set the step time, which you can only set on the KNOB SWEEP screen.

Setup range is 0.5 ms to 100 ms, with 100 ms resolution.

For normal sweep measurement, the step time depends on the measurement time. For knob sweep measurement, step time is always this specified value.

Measurement Channel

You select the measurement channel by selecting the Y-AXIS ASSIGN softkey on the KNOB SWEEP screen, then selecting the desired secondary softkey. You can select one measurement channel only, so the Y2 axis is not available on the KNOB SWEEP screen.

• default measurement channel

• When an SMU is set to VAR1

Measurement channel is the VAR1 channel.

• When a VSU is set to VAR1

Measurement channel is the first found channel that can measure. Searching order is:

SMU1 ® .....® SMU6 ® VMU1 ® VMU2.

• restrictions

If you use series resistance for VAR1 channel and VAR1 channel is V force mode, only VAR1 measurement channel can be assigned to Y axis.

NOTE Measurement Resolution

When performing knob sweep measurement, measurement resolution of each measurement unit is worse than the measurement resolution of normal sweep measurements.

2-6 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

Measurement Functions

Sweep Step Value

For the VAR1 channel, you do not set the step value. You can consider the step value to be the amount you rotate the knob. Then, the sweep is performed for the specified number of steps. The STEP field on the MEASURE: SWEEP SETUP screen has no meaning.

Initial value: 0, Step value automatically set: 0 to VAR1 range/number of steps.

Number of Steps

For the VAR1 channel, you set the number of steps on the KNOB SWEEP screen. So, for the knob sweep function, the number of steps for VAR1 has no relation to the NO OF STEP setting on the MEASURE: SWEEP SETUP screen.

Start Value

The start value is always 0, and does not depend on the polarity. You cannot set the start value. So, the START setting on the MEASURE: SWEEP SETUP screen has no meaning for the knob sweep function.

Stop Value

Stop value is always step value ´ number of steps. You cannot set the stop value. The measurement is continuously repeated from 0 to the stop value until the

Stop

front-panel key is pressed or the KNOB SWEEP screen is changed to another screen.

Measurement Range

If SMU is the measurement channel:

Compliance range is used. That is, the measurement range is set to the lowest range that includes the compliance value that is set on the MEASURE: SWEEP SETUP screen.

If VMU is the measurement channel:

20 V range is used for the grounded measurement mode, and the 2 V range is used for the differential measurement mode.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 2- 7

Knob Sweep Measurements Measurement Functions

KNOB SWEEP screen

To start the knob sweep measurement, press the green key and then the Single front-panel key. The 4155C/4156C displays KNOB SWEEP screen, and starts measurements. To stop the knob sweep measurement, press the or a PAGE CONTROL group key.

Sto p front-panel key

Cursor

On the KNOB SWEEP screen, the long cursor is always displayed, and you cannot turn it off. In the CURSOR field, coordinate values of the cursor are displayed in X, Y order.

X axis setting

X axis always plots the VAR1 source value. Maximum value of X axis is the setting value of the VAR1 RANGE secondary softkey of VAR1 SETUP softkey group.

Y axis setting

Y axis always plots the measurement data of the measurement channel. You can select the measurement channel by using the secondary softkeys of the Y-AXIS ASSIGN softkey group. Maximum value of Y axis scale is the compliance value of the measurement channel.

2-8 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

Measurement Functions

Analysis of the Knob Sweep Measurement Results

On the KNOB SWEEP screen, you cannot use analysis functions and user functions. But you can analyze the knob sweep measurement result by quitting knob sweep mode as shown below:

1. Select the SETUP COPY primary softkey on the KNOB SWEEP screen.

2. Press the

The knob sweep results are displayed on the GRAPH/LIST screen. Then you can use analysis functions.

Graph/List front-panel key.

To Use User Function

User function is not available for the knob sweep mode. If you want to use user functions in GRAPH/LIST screen group after the knob sweep measurements, do following before entering to the knob sweep mode:

1. Define user functions on CHANNELS: USER FUNCTION DEFINITION screen.

2. Enter user function names in DATA VARIABLES field of DISPLAY: DISPLAY SETUP screen.

3. On GRAPH/LIST: GRAPHICS screen, select DISPLAY SETUP primary softkey, then set DATA VAR softkey to ON.

After getting the measurement data on the knob sweep mode, and quitting the knob sweep mode as described above, the results of user function will be displayed on the GRAPH/LIST screen.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 2- 9

Knob Sweep Measurements Executing Measurements

Executing Measurements

You can easily execute the knob sweep measurements, as shown below:

1. Defines measurement units on the CHANNELS: CHANNEL DEFINITION screen.

2. Presses the green key, and then Single key.

NOTE In the knob sweep mode, user functions and user variables are not available. See “To

Use User Function” on page 2-9.

To use PGU in the pulse output mode (MODE=VPULSE), set up the MEASURE: PGU SETUP screen as same as the normal sweep mode. For setting up the PGU SETUP screen, refer to Chapter 1.

2-10 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

Executing Measurements

To Define Measurement Units

Press Chan front-panel key to define the measurement units. CHANNELS: CHANNEL DEFINITION screen is displayed.

1. MEASUREMENT MODE:

Select SWEEP secondary softkey.

2. VNAME and INAME:

Enter a unique name for voltage or current variable. These names must be 6 or less alphanumeric characters. First character must be alphabet character. For example, enter Vce for collector-emitter voltage. If channel does neither output nor measurement, you can omit VNAME and INAME.

3. MODE:

Select one of the following softkeys to set the output mode:

• V : Voltage output (for SMU, VSU, and PGU). V : Grounded mode voltage measurement (for VMU).

• I : Current output (for SMU).

• VPULSE : Pulsed voltage output (for PGU).

• IPULSE : Not available.

• COMMON : Circuit common (for SMU and GNDU).

• DVOLT : Differential mode voltage measurement (for VMU).

4. FCTN:

Select one of the following softkeys to set the output function:

• CONST : Constant output function (for SMU, VSU, and PGU).

• VAR1 : Primary sweep output function (for SMU and VSU).

• VAR2 : Secondary sweep output function (for SMU and VSU).

• VAR1' : Not available.

To disable a unit

Select DELETE ROW softkey. The settings for the unit are deleted.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 2-11

Knob Sweep Measurements Executing Measurements

To Execute Measurements

1. Press the green key, then Single front-panel key. The KNOB SWEEP screen is displayed, and knob sweep measurement starts.

During measurements, self-test, or forcing stress, this operation is ignored.

If you want to change the Y-axis parameter, press Y-AXIS ASSIGN primary softkey. Then select a secondary softkey for the Y-axis parameter you want.

To start knob sweep measurement again, press

2. Rotate the rotary knob to stretch or shrink the sweep range. Knob sweep measurement is executed, and measurement curve appears on the graph.

Stop front-panel key and

Single front-panel key only.

Warning messages

If the CHANNELS or MEASURE screen group have incorrect settings for knob sweep measurements when starting the knob sweep, a warning message is displayed, then the STOP and CONT primary softkeys are available.

Select STOP softkey to know the incorrect setting. The setting is highlighted on the screen.

Select CONT softkey to perform knob sweep measurement with the following settings:

• If VAR1’ function (FCTN) has been set:

The unit works as CONST channel. The output value is VAR1’ start value.

• If VPULSE or IPULSE mode (MODE) has been set for the VAR1 or VAR2 unit:

The unit works as V or I channel.

• If the power compliance function (POWER COMP) has been set:

The function does not work. Same as POWER COMP = OFF.

2-12 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

Executing Measurements

Example

The following figure shows an example to set both X axis and Y axis display regions to positive.

To Stop Measurement

To stop the knob sweep measurement, press Stop front-panel key.

This returns the 4155C/4156C operation state to the previous state. For example, if the knob sweep measurement starts from the idle state, the operation state returns to the idle state.

Starting knob sweep again

To start the knob sweep measurement again, press the following front-panel key:

Single The knob sweep measurement will start from the point where it

was stopped.

Green, Single The knob sweep measurement will start from 0 V or 0 A.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 2-13

Knob Sweep Measurements Executing Measurements

To Change Measurement Conditions

To change the measurement conditions, use the following primary softkeys:

Softkey Description

DISPLAY SETUP Used to change graph display. The following

secondary softkeys are available:

X-AXIS REGION Selects the X-axis display range

from +, -, or +/-.

Y-AXIS REGION Selects the Y-axis display range

from +, -, or +/-.

X-AXIS DISPLAY Selects the X-axis direction

from NORMAL or REVERSE.

Y-AXIS DISPLAY Selects the Y-axis direction

from NORMAL or REVERSE.

GRID Sets grid on or off.

VAR1 SETUP Used to change VAR1 sweep source setup. The

following secondary softkeys are available:

SWEEP MODE Sets sweep mode to SINGLE or

DOUBLE.

POLARITY Sets polarity of VAR1 output to

POS, NEG, or BIPOLAR.

VAR1 RANGE Sets VAR1 sweep range. This

sets X-axis scale.

NO OF STEPS Sets number of sweep steps.

COMPLIANCE Sets VAR1 compliance value.

This sets Y-axis scale.

HOLD TIME Sets hold time.

STEP TIME Sets step time.

2-14 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Knob Sweep Measurements

Executing Measurements

Softkey Description

VAR2 SETUP Used to change VAR2 sweep source setup. The

following secondary softkeys are available:

VAR2 START Sets VAR2 sweep start value.

VAR2 STEP Sets VAR2 sweep steps.

VAR2 POINTS Sets number of sweep steps.

COMPLIANCE Sets VAR2 compliance value.

CONST SETUP Used to change CONST source setup. Secondary

softkeys are available for selecting CONST source. Select a secondary softkey to change the CONST source output value.

To copy knob sweep setups

Select SETUP COPY primary softkey. This copies knob sweep setups to the MEASURE: SWEEP SETUP and DISPLAY: DISPLAY SETUP screens. Then you can see the setups on the screens, and use the setups for the normal sweep measurement.

Note that the power compliance function is not available for the knob sweep measurement. So the POWER COMP column is set to OFF.

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 2-15

Knob Sweep Measurements Executing Measurements

2-16 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

3 Sampling Measurements

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sampling Measurements

This chapter explains how to execute sampling measurements, and consists of the following sections:

•“Measurement Functions”

•“Defining Measurement Conditions”

•“Making a Measurement”

For details about how to enter or input setup data, refer to Setup Screen Reference manual.

3-2 Agilent 4155C/4156C User’s Guide Vol.2, Edition 1

Sampling Measurements

Measurement Functions

For a sampling measurement, you can monitor current or voltage changes at a DUT while forcing constant current, constant voltage, or pulsed constant bias.

The 4155C/4156C provides the following three types of sampling measurement according to the sampling interval:

•“Linear Sampling Measurement”

•“Thinned-out Sampling Measurement”

•“Linear Sampling Measurement”

Available Units

Available units and functions for sampling measurement are shown below:

Output Function Output Mode

Unit

VAR1 VAR1' VAR2 CONST STANDBY V I COM V I

SMUn.a.n.a.n.a.

VSU n.a. n.a. n.a.

VMU

GNDU

PGU

---- - --- -·-

---· - --· ---

---· · ·--·--

· · ···

·· ·-----

Pulse

n.a.

n.a. means "This is not available for sampling measurement".

· means "This is available for sampling measurement".

- means "This is not available for this unit".

For sampling measurements, only the PGU output can be pulsed.

The pulse output timing from PGU is not synchronized with the timing of sampling measurement.

Meas. Mode

··

Agilent 4155C/4156C User’s Guide Vol.2, Edition 1 3- 3

Sampling Measurements Measurement Functions

Sampling Interval and Measurement Time

When the sampling interval enough longer than the actual measurement time, measurement unit repeats measurement every specified sampling interval. However, if the sampling interval is less than the measurement time, measurement unit cannot repeat measurements every specified interval. For example, if the measurement time is one and a half the specified sampling interval, the interval of measurement is two times the sampling interval. See Figure 3-1 which explains the operation of the sampling measurement.

Measurement time depends on the measurement condition: integration time, measurement range, and so on. So if you want to execute sampling measurement with the specified sampling interval, you need to know the actual measurement time upon your measurement setup, and set the sampling interval value enough longer than the actual measurement time. You can see typical measurement time by repeating the sampling measurements with several sampling interval settings. See “Sampling Measurement Data” on page 3-7.

Measurement time is given by the following fomula:

Tmeas = Tinteg + Toh

where,

Tmeas : Measurement time.

Tinteg : Integration time.

Toh : Overhead time caused by the following elements:

• range changing time during measurement (when measurement ranging mode is set to auto or limited auto)

• range changing time at measurement start (when using measurement range less than the compliance value)

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Figure 3-1 Sampling Measurement Operation Summary

Case 1. Sampling Interval > Meas. Ti me

SMU Output

PGU Output

Meas. Time

Hold Time

Sampling Interval

Trigger TriggerTrigger Trigger Trigger

Sampling Interval

Sampling Measurements

Measurement Functions

Tim

Sampling Interval

Starts Sampling Stops Sampling

Case 2. Sampling Interval < Meas. Time

SMU Output

PGU Output

Meas. Time

Hold Time

Starts Sampling Stops Sampling

Sampling Interval

Trigger TriggerTrigger Trigger Trigger

Total Sampling Time (TOTAL SAMP. TIME)

(TOTAL SAMP. TIME is one of the stop co ndition.)

Sampling Interval

Total Sampling Time (TOTAL SAMP. TIME)

(TOTAL SAMP. TIME is one of the stop conditi on.)

Sampling Interval

Tim

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Sampling Measurements Measurement Functions

Sampling measurement is executed as explained below:

1. Forces constant current, constant voltage, or pulsed constant bias.

2. Waits hold time.

3. Triggers one point measurement.

4. Measurement unit executes measurement. Measurement result data is stored in memory.

5. Triggers one point measurement. Interval of trigger is same as Sampling Interval.

6. (Case 1) Measurement unit executes measurement if it is ready to measure. Measurement result data is stored in memory.

(Case 2) Measurement unit waits next trigger if it is busy or in measurement.

7. Repeats steps 5 and 6 until that a sampling completion condition is satisfied.

In Figure 3-1, sampling measurement stops when the completion condition total sampling time is satisfied.

Number of measurement data stored in memory depends on the sampling completion condition. Maximum number is specified by the NO. OF SAMPLES field of the MEASURE: SAMPLING SETUP screen. However the measurement will be immediately stopped if a sampling completion condition is satisfied before reaching the maximum number. For the sampling completion condition, see “Sampling Completion” on page 3-9.

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Measurement Functions

Sampling Measurement Data

Measurement parameters of sampling measurement are set to the NAME column of the DISPLAY: DISPLAY SETUP screen. Available parameters and example parameters for the NAME field are listed in the table below:

Parameter

Name

@TIME Measurement start time. This is the time the measurement unit

starts one point measurement. This is different from timing of the measurement trigger sent every sampling interval.

@INDEX Data index. Integer. This is the index numbered to measurement

data stored in memory.

V1 for example, SMU1 voltage output value or measured value.

I1 for example, SMU1 current output value or measured value.

Measurement start time can be expressed by the following fomula. This formula is available for the measurement points before starting the discarding operation for the linear sampling or thinned-out sampling. For logarithmic sampling, this is available for the measurement points in the first decade.

@TIME = Thold + Tinterval ´ [(@INDEX - 1) + N]

where,

@TIME : Measurement start time.

Thold : Hold time.

Tinterval : Sampling interval.

Meanings of Parameter

@INDEX : Data index.

N : Number of triggers between two nearest measurement points. This

value is 0 if the sampling interval is enough longer than the measurement time.

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Sampling Measurements Measurement Functions

For example, if Thold=10 ms, Tinterval=5 ms, and @TIME values are as shown below, estimated measurement time is 15 ms to 20 ms, and there are 3 triggers between @INDEX=1 and @INDEX=2.

• @TIME (for @INDEX=1) = 10 ms = 10 + 5 ´ [(1 - 1) + 0] ms

• @TIME (for @INDEX=2) = 30 ms = 10 + 5 ´ [(2 - 1) + 3] ms

Sampling Interval

Hold Time

TIME

Meas.time

@TIME(at @INDEX=1) @TIME(at @INDEX=2)

To Use Multiple Measurement Units

If you define multiple measurement parameters in the NAME column of the DISPLAY: DISPLAY SETUP screen, sampling measurement is executed by using multiple measurement units. Differences between this measurement and the measurement using only one unit are shown below:

• Measurement Sequence

Measurement units start measurement in the order below: Parameters for GRAPH: X ® Y1 ® Y2

Parameters for LIST: Order of No. assigned for the parameters

• Value of @TIME

@TIME stores the time the first measurement unit starts measurement. @TIME does not store the time another unit starts measurement.

• Measurement Time

Measurement time is sum of the measurement time by all units. To execute sampling measurement with the specified sampling interval, the sampling interval must be enough longer than the measurement time.

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Measurement Functions

Sampling Completion

The sampling measurement completes when one of the following conditions is satisfied:

• Stop condition

The stop condition is satisfied. See below.

• Total sampling time

The specified total sampling time has elapsed.

Available for linear and thinned-out sampling. Setting TOTAL SAMP.TIME to auto or no limit disables this sampling completion condition.

• Number of sampling points

The specified number of samples has elapsed.

Available for logarithmic sampling. For linear sampling, setting TOTAL SAMP.TIME to auto enables this sampling completion condition.

•

Stop front-panel key

The

Stop front-panel key is pressed.

• GPIB Command

The 4155C/4156C receives GPIB command to stop sampling.

• Emergency Condition

An emergency condition occurs on the 4155C/4156C.

• Interlock Open

Interlock terminal opens due to high voltage.

Stop Condition

The stop condition is defined by using the STOP CONDITION table of MEASURE: SAMPLING SETUP screen. This function stops the measurement as shown below.

1. Compares the value of the parameter set to NAME field and the value defined in THRESHOLD field.

2. Counts how many times the selected EVENT occurs.

3. When the count reaches the value defined in EVENT NO. field, sampling is stopped immediately.

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Sampling Measurements Measurement Functions

To use this function, the INITIAL INTERVAL value must be set to 2 ms or more. The INITIAL INTERVAL is the minimum resolution of the sampling interval. For details about the INITIAL INTERVAL, see “Linear Sampling Measurement” on page 3-13, “Thinned-out Sampling Measurement” on page 3-16, or “Logarithmic Sampling Measurement” on page 3-19.

To set up the stop condition, specify the following parameters on the MEASURE: SAMPLING SETUP screen.

Parameter Description

ENABLE/ DISABLE Enables or disables the stop condition.

ENABLE DELAY Delay time. in second. This is the time from starting sampling

measurement to enabling this function. Allowable range: 0 to INITIAL INTERVAL ´ 32767 s. Resolution: INITIAL INTERVAL.

NAME Name of measurement data or user function to monitor for stop

condition.

Val of EVENT.

THRESHOLD Threshold value at which to stop sampling measurement.

Th of EVENT.

EVENT Event for stop condition.

Val > Th True if NAME parameter value is greater than

THRESHOLD value.

Val < Th True if NAME parameter value is less than

THRESHOLD value.

|Val| > |Th| True if absolute NAME parameter value is

greater than absolute THRESHOLD value.

|Val| < |Th| True if absolute NAME parameter value is less

than absolute THRESHOLD value.

EVENT NO. Target value of the count the event occurs (true). When the

count of true is this value, sampling is immediately stopped. Allowable range: 1 to 200.

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Measurement Functions

Source Output Sequence and Time Origin

Source unit output sequence and the time origin depends on the setup value of the OUTPUT SEQUENCE MODE OF SAMPLING field in the MEASURE: OUTPUT SEQUENCE screen. The following two modes are available for the field.

• SIMULTANEOUS mode

All source unit starts output at same timing. This timing is defined as the Time Origin. See figure below.

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Sampling Measurements Measurement Functions

• SEQUENTIAL mode

Source units starts output in the order defined in the OUTPUT SEQUENCE table of the MEASURE: OUTPUT SEQUENCE screen. Time Origin is when the last source reaches the specified output value. See figure below.

If there is pulse bias sources (PGUs), they start to force pulse base value in the order shown above, and start to force pulse bias at the Time Origin.

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Measurement Functions

Linear Sampling Measurement

Linear sampling mode keeps a constant sampling interval that is the interval of measurement trigger. And if the measurement units are ready to measure, the units start measurement, and the result data is stored in memory. This is repeated until one of the sampling completion conditions is satisfied.

However, if both the following two conditions occur, linear sampling mode changes the sampling interval to two times the previous sampling interval, and continues sampling measurement.

• number of sampling points reaches specified NO.OF SAMPLES

• sampling completion condition is not satisfied

Example Operation

This example assumes the following sampling setup:

• INITIAL INTERVAL value is longer than the measurement time

• NO.OF SAMPLES value is set to 10

• TOTAL SAMP.TIME is long (for example, 50 ´ INITIAL INTERVAL). Do

not set to AUTO which enables the number of sampling points sampling completion condition.

1. Executes one point measurement, and stores data in memory. Repeats this 10 times every sampling interval (INITIAL INTERVAL setting value) because of the sampling interval enough longer than the measurement time.

2. If the sampling completion condition is not satisfied after 10 points measurement, linear sampling mode changes the sampling interval to two times the INITIAL INTERVAL, and continues sampling measurement.

To store new measurement data, linear sampling mode discards a data every couple of nearest data as shown above. Data is updated every measurement.

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Sampling Measurements Measurement Functions

3. If the sampling completion condition is not satisfied after additional 5 points measurement, linear sampling mode changes the sampling interval to two times the previous interval, and continues sampling measurement. Measurement data is updated as described in step 2.

4. This discarding and doubling of the sampling interval is repeated until the sampling completion condition is satisfied. By the end of the measurement, 10 measurement result data is stored in memory.

Parameters

To set up the linear sampling measurement, specify the following parameters on MEASURE: SAMPLING SETUP screen. See Table 3-1.

Parameter Description

MODE Sampling mode. LINEAR.

INITIAL INTERVAL The sampling interval for first NO.OF SAMPLES samples.

Allowable range: 60 ms to 65.535 s.

NO.OF SAMPLES Number of data to be stored by end of measurement.

Maximum: 10001. If there are multiple measurement units, this value must be 10001/(number of units) or less.

TOTAL SAMP.TIME Total sampling time. Does not include HOLD TIME. This is

the time from the 1st trigger to the sampling completion. One of the sampling completion conditions, so sampling stops after this time elapses.

• Allowable range when

INITIAL INTERVAL £ 480 ms:

AUTO

• Allowable range when

INITIAL INTERVAL ´ (NO.OF SAMPLES - 1) sec to

1 ´ 10

sec, AUTO, or NO LIMIT.

INITIAL INTERVAL > 480 ms:

AUTO Enables the number of sampling points sampling

completion condition.

NO LIMIT Disables the total sampling time sampling completion

condition

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Measurement Functions

HOLD TIME Hold time. This is the time from starting source output

to first trigger. If this value is 0, first @TIME value is 0.

• Allowable range when

INITIAL INTERVAL ³2 ms:

0 to 655.35 s with 100 ms resolution.

• Allowable range when

INITIAL INTERVAL <2 ms:

- 30 ms to 655.35 s with 100 ms resolution.

Table 3-1 Effective Parameter Values

INITIAL INTERVAL

NO.OF SAMPLES

TOTAL SAMP.TIME

HOLD TIME

60 ms to 480 ms560 ms to 1.92 ms 2 ms to 65.535 s

Max. 10001/(number of measurement units)

AUTO AUTO/NO LIMIT/

INITIAL INTERVAL ´ (NO.OF SAMPLES - 1) s

to 1 ´ 10

- 30 ms to 655.35 s, 100 ms resolution 0 to 655.35 s, 100 ms resolution

Stop Condition DISABLE DISABLE/ENABLE

Measurement Units

Measurement Range

Integration Time

FIX FIX/AUTO/LIMITED

Max. 8

Short Short/Medium/Long

Number of units (SMUs or VMUs) used for measurements.

If voltage source SMU is connected to R-BOX, only this SMU can be used for the

measurement.

Maximum 8 units if the 41501 is used (6 SMUs and 2 VMUs). If multiple

measurement units are used, total measurement time will be more than the sum of the measurement time by all units.

If compliance value is more than the measurement range, range change when

starting measurement makes long measurement time. Also if ranging mode is set to AUTO or LIMITED, range changing makes long measurement time.

Integration time is an element of the measurement time. If automatic measurement

data compensation is executed, the measurement time will be more than two times the integration time.

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Sampling Measurements Measurement Functions

Thinned-out Sampling Measurement

Thinned-out sampling mode operates like the linear sampling mode. Difference is that the sampling interval is not changed in the thinned-out sampling measurement. So even if both the following two conditions occur, thinned-out sampling mode does not change the sampling interval, and continues sampling measurement.

• number of sampling points reaches specified NO.OF SAMPLES

• sampling completion condition is not satisfied

Example Operation

This example assumes the following sampling setup:

• INITIAL INTERVAL value is longer than the measurement time

• NO.OF SAMPLES value is set to 10

2. If the sampling completion condition is not satisfied after 10 points measurement, thinned-out sampling mode keeps the sampling interval, and continues sampling measurement.

To store new measurement data, thinned-out sampling mode discards a data every couple of nearest data as shown above. Data is updated every measurement.

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Measurement Functions

3. If the sampling completion condition is not satisfied after additional 5 points measurement, thinned-out sampling mode keeps the sampling interval, and continues sampling measurement. Data is updated as described in step 2.

4. This discarding is repeated until the sampling completion condition is satisfied. By the end of the measurement, 10 measurement result data is stored in memory.

Parameters

To set up the thinned-out sampling measurement, specify the following parameters on MEASURE: SAMPLING SETUP screen. See Table 3-2.

Parameter Description

MODE Sampling mode. THINNED OUT.

INITIAL INTERVAL The sampling interval during thinned-out sampling.

Allowable range: 720 ms to 65.535 s.

NO.OF SAMPLES Number of data to be stored by end of measurement.

Maximum: 10001. If there are multiple measurement units, this value must be 10001/(number of units) or less.

TOTAL SAMP.TIME Total sampling time. Does not include HOLD TIME. This is

the time from the 1st trigger to the sampling completion. One of the sampling completion conditions, so sampling stops after this time elapses. Allowablerange:NOLIMIT,or

INITIAL INTERVAL ´ (NO.OF SAMPLES - 1) sec to

1 ´ 10

sec

NO LIMIT Disables the total sampling time sampling completion

condition

HOLD TIME Hold time. This is the time from starting source output to

first trigger. If this value is 0, first @TIME value is 0.

• Allowable range when

INITIAL INTERVAL ³2 ms:

0 to 655.35 s with 100 ms resolution.

• Allowable range when

INITIAL INTERVAL <2 ms:

- 30 ms to 655.35 s with 100 ms resolution.

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Sampling Measurements Measurement Functions

Table 3-2 Effective Parameter Values

INITIAL INTERVAL

NO.OF SAMPLES

TOTAL SAMP.TIME

HOLD TIME

720 ms to 1.92 ms 2 ms to 65.535 s

Max. 10001/(number of measurement units)

NO LIMIT/

INITIAL INTERVAL ´ (NO.OF SAMPLES - 1) s

to 1 ´ 10

- 30 ms to 655.35 s,

100 ms resolution

0to655.35 s, 100 ms resolution

Stop Condition DISABLE DISABLE/ENABLE

Measurement Units

Measurement Range

Integration Time

Number of units (SMUs or VMUs) used for measurements.

If voltage source SMU is connected to R-BOX, only this SMU can be used for the

FIX FIX/AUTO/LIMITED

Max. 8

Short Short/Medium/Long

measurement.

Maximum 8 units if the 41501 is used (6 SMUs and 2 VMUs). If multiple

measurement units are used, total measurement time will be more than the sum of the measurement time by all units.

If compliance value is more than the measurement range, range change when

starting measurement makes long measurement time. Also if ranging mode is set to AUTO or LIMITED, range changing makes long measurement time.

Integration time is an element of the measurement time. If automatic measurement

data compensation is executed, the measurement time will be more than two times the integration time.

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Measurement Functions

Logarithmic Sampling Measurement

Logarithmic sampling mode plots the measurement data on the X-axis (@TIME) set to the logarithmic scale by doing the following operation. See Figure 3-2.

1. Forces constant current, constant voltage, or pulsed constant bias.

2. Waits hold time.

3. Triggers one point measurement.

4. Measurement unit executes measurement. Measurement result data is stored in memory.

5. Triggers one point measurement. Interval of trigger is constant (setting value of INITIAL INTERVAL).

6. Measurement unit executes measurement if it is ready to measure. Measurement result data is stored in memory.

Measurement unit waits next trigger if it is busy or in measurement.

7. Repeats steps 5 and 6 until that a sampling completion condition is satisfied. Logarithmic sampling mode retains only the measurement data that can plot the data on the logarithmic X-axis in almost the same interval.

Figure 3-2 Example Operation of Logarithmic Sampling

Starts Sampling

Hold Time

easurement

Sampling Interval

Data of first decade

Discard

Second decadeFirst decade

Data of second decade

1/10 decade

TIME

This is the example to plot LOG10 data.

@TIME

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Sampling Measurements Measurement Functions

@TIME Value

@TIME value of measurement data is determined by MODE, INITIAL INTERVAL, NO. OF SAMPLES, and HOLD TIME parameters. Where MODE decides number of measurement points in 1 decades. For example, LOG10 mode obtains 10 data per 1 decade.

An example to get measurement data in logarithmic sampling measurement is explained below. This example assumes the following settings. See also Figure 3-2.

• MODE = LOG10 (10 data / 1 decade)

• INITIAL INTERVAL = 10 ms

• NO.OF SAMPLES = 20

• HOLD TIME = 10 ms

• STOP CONDITION = DISABLE

If sampling interval is enough longer than measurement time:

INITIAL INTERVAL value decides the range of a decade.

10 ms to 100 ms (1st decade) Sampling is executed at the following @TIME

value: 10 ms, 20 ms, 30 ms, 40 ms, 50 ms, 60 ms, 70 ms, 80 ms, 90 ms, 100 ms. LOG10 mode allows to have 10 data in 1 decade. Therefore all measurement data is stored in memory.

100 ms to 1 s There are 90 sampling points in this range. Number of data can

remain is only 10. They can plot the data on the X-axis in almost the same interval.

@TIME values are as follows: 140 ms, 170 ms, 210 ms, 270 ms, 330 ms, 410 ms, 520 ms, 650 ms, 810 ms, 1.02 s.

If sampling interval is less than measurement time:

Measurement time decides the range of a decade. If the measurement time is 18 ms, interval of measurement is 20 ms, and the following data are stored in memory:

20 ms to 200 ms (1st decade) Sampling is executed at the following @TIME

value: 20 ms, 40 ms, 60 ms, 80 ms, 100 ms, 120 ms, 140 ms, 160 ms, 180 ms, 200 ms. LOG10 mode allows to have 10 data in 1 decade. Therefore all data is stored in memory.

200 ms to 2 s There are 90 sampling points in this range. Number of data can

remain is only 10. They can plot the data on the X-axis in almost the same interval.

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Measurement Functions

Rule to determine @TIME:

@TIME value is determined by the following rule. Data measured at @TIME=Tlog are stored in memory.

Tlog ³ Ttarget | Tlog - Ttarget | < | Ttarget - Tprev |

where,

Tlog Data stored in @TIME. Actual measurement point.

Ttarget Target value of @TIME. The values can plot data on the logarithmic

X-axis in the same interval completely.

Tprev Tlog - sampling interval. Actual measurement point.

Discard

Tprev Tlog

Sampling Interval

Ttarget

Measurement

Stored in @TIME

Ttarget < Tlog

A > B

TIME

A= | Ttarget - Tprev | B=|Tlog - Ttarget |

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Sampling Measurements Measurement Functions

Parameters

To set up the logarithmic sampling measurement, specify the following parameters on MEASURE: SAMPLING SETUP screen. See Table 3-3.

Parameter Description

MODE Sampling mode. LOG10, LOG25, or LOG50.

MODE Number of data in 1 decade

LOG10 10 LOG25 25 LOG50 50

INITIAL INTERVAL The sampling interval during logarithmic sampling.

Allowable range: 560 ms to 65.535 s. If this value is 560 ms to 10 ms, number of measurement

data may be less than the specified number of data for top 2 decades. Then sampling continues to get all samples.

NO.OF SAMPLES Number of data to be stored by end of measurement. One

of the sampling completion conditions, so sampling stops after this point elapses. Maximum 11 decades.

MODE Maximum value

LOG10 111 LOG25 276 LOG50 551

HOLD TIME Hold time. This is the time from starting source output to

first trigger. If this value is 0, first @TIME value is 0.

• Allowable range when

INITIAL INTERVAL ³2 ms:

0 to 655.35 s with 100 ms resolution.

• Allowable range when

INITIAL INTERVAL <2 ms:

- 30 ms to 655.35 s with 100 ms resolution.

Example:

HOLD TIME=1.003 s, and measurement interval is 3 ms,

decade and its range are as shown below:

decade Range ( in sec )

1st decade 1.003 to 1.030 ( 3 m +1 to 30 m +1 ) 2nd decade 1.030 to 1.300 ( 30 m +1 to 300 m +1 ) 3rd decade 1.300 to 4.00 ( 300 m +1 to 3+1 ) 4th decade 4 to 31 ( 3+1 to 30+1 ) 5th decade 31 to 301 ( 30+1 to 300+1 )

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Agilent 4155C Users Guide V2

Specifications and Main Features

Frequently Asked Questions

User Manual

1 Sweep Measurements

Measurement Functions

Basic Sweep Measurement

Subordinate Sweep Measurement

Synchronous Sweep Measurement

Pulse Sweep Measurement

Defining Measurement Conditions

To Define Measurement Units

To Set up Primary Sweep

To Set up Secondary Sweep

To Set up Synchronous Sweep

To Set up Constant Output

To Set up SMU Pulsed Output

To Set up PGU Output

To Set up Stop Condition

To Display Graphics Results

To Display List Results

To Execute or Stop Measurement

Making a Measurement

Step 1. Prepare for the measurement

Step 2. Mount your DUT on the test fixture

Step 3. Define the channel assignments

Step 4. Define the user functions

Step 5. Set up the measurement parameters

Step 6. Set up the results display

Step 7. Execute the measurement

2 Knob Sweep Measurements

Measurement Functions

Available units and functions

Normal Sweep and Knob Sweep Measurements

Features of Knob Sweep Function

KNOB SWEEP screen

Analysis of the Knob Sweep Measurement Results

Executing Measurements

To Define Measurement Units

To Execute Measurements

To Stop Measurement

To Change Measurement Conditions

3 Sampling Measurements

Measurement Functions

Available Units

Sampling Interval and Measurement Time

Sampling Measurement Data

Sampling Completion

Source Output Sequence and Time Origin

Linear Sampling Measurement

Thinned-out Sampling Measurement

Logarithmic Sampling Measurement