New Dimensions in Parametric Analysis
Agilent 4155C Semiconductor
Parameter Analyzer
Agilent 4156C Precision Semiconductor
Parameter Analyzer
Agilent E5250A Low Leakage Switch Mainframe
Parametric Test Leader
Agilent Technologies has become
the world leader in parametric test
(judged by market share) by always
striving to lower your cost-of-test and
provide you with the right test at the
right cost. In the year 2000 Agilent
reached the milestone of installing its
2000th parametric test system. It has
also sold over 10,000 benchtop
parameter analyzers since creating
the first version of this product, the
4145A, back in 1982.
Continuous Innovation
The Agilent 4155C and 4156C
maintain this tradition of continuous
innovation in parametric measurement
and analysis. The new capabilities
of the 4155C and 4156C make them
more than just new “boxes”; they are
complete parametric measurement
solutions. The integrated matrix control
and quasi-static CV measurement
capabilities of the 4155C and 4156C
truly add new dimensions to your
parametric test capability. Most
importantly, the ability to start small
and then build your way up to a fast
and efficient automated parametric
measurement station provides you
with a solution without limits.
The Power of Information
Agilent’s Parametric Test Assistant CD
contains the answers to all of your
parametric measurement challenges.
This unique HTML-based tool contains
over 100 FAQs, as well as PDF versions
of all instrument manuals, data sheets,
and application notes (organized in a
searchable database). It also contains
a JavaScript-based Application
Navigator utility that can help you to
configure solutions based upon your
measurement needs. Moreover, the
entire CD works in both PC and
UNIX environments. Please specify
publication number 5980-0393E to
get your free copy.
Thinking Beyond the Box...
2
Start with the Agilent 4155C and 4156C
The superior low-current and low-voltage
resolution and built-in quasi-static CV
measurement capability of the 4155C
and 4156C provide a firm foundation
for future expansion.
Perform Benchtop Analysis
The Agilent 4155C and 4156C combine
with the Agilent E5250A and Agilent
4284A to form an efficient and costeffective benchtop analysis system.
Integrated matrix control ensures that
you can perform CV-IV analysis quickly
and effortlessly without the need for a PC.
Alternatively, if you want instrument control in an MS Windows 98 or NT environment, you can use Agilent Interactive
Characterization Software (ICS).
High-speed Automated Test
The Agilent FLEX command language
gives you a powerful tool for automating
your testing in conjunction with a semiautomatic wafer prober. Automate with
commercial packages such as Metrics
I/CV, or with your own custom software
written in BASIC, C/C++, National
Instruments LabView, or Agilent VEE.
to a Solution Without Limits
3
4
A Powerful and Expandable Solution
Preserve device power
between measurements
with the standby mode.
Execute separate stress
conditions with a single
keystroke.
Automate or create your
own measurements with
Instrument BASIC.
Output hardcopies
through GPIB or parallel
printer port. Also, send
print/plots via LAN port
to networked printers.
Sweep a family of curves with a
simple turn of the knob.
Organize test flow and minimize time
required to obtain semiconductor
parameters with the logical setup pages.
Save setups and measured
results to the MS-DOS
compatible floppy drive, or
to an NFS server via a
10 base-T LAN port.
Extend your capabilities to 1 A/200 V, and
add a low noise ground unit and dual pulse
generators with the Agilent 41501B SMU
and Pulse Generator Expander.
Ease measurement setups and
programming with the full size
detachable keyboard.
Easily analyze measured
results on the large LCD.
Automatically obtain derived
results like GMMAX with a
single button.
Quickly set up measurements
and extract parameters using
context-dependent menu and
sub-menu softkeys.
Ultra-Low Current Capability
The 1 fA resolution (0.01 fA readable
resolution) and 20 fA accuracy of the
Agilent 4156C enable you to meet the
low-current measurement challenges
posed by current and future devices.
Agilent continues to set the standard in
SMU technology and precision, without
sacrificing throughput, flexibility, or
resolution. Moreover, Agilent achieves
this measurement performance without
any cumbersome preamplification
schemes. This means you can use the
4156C to develop your most advanced
processes, including difficult measurements such as subthreshold leakage
and reverse-biased diode currents.
Measure Low Resistance Accurately
The advent of Cu metal processes has
made contact and sheet resistance
measurements increasingly difficult to
perform. With 0.2 µV resolution and
special voltage offset cancellation
capability, the 4155C and 4156C have
the measurement power to enable you
to characterize precisely your low
resistance Cu metal test structures.
Unsurpassed Resolution and Accuracy
5
Repeatable Ultra-Low Subthreshold Characteristic
Cu Metal Resistance Structure
Single Sweep Measurement
Capacitance versus voltage (CV)
measurements provide essential
information about many critical
process parameters, such as oxide
thickness (tox), surface state charge
(Qss), and flat band voltage (Vfb).
However, high frequency CV measurements only measure oxide capacitance
in the accumulation mode. Low
frequency or quasi-static CV (QSCV)
techniques often yield better results
because the entire range of operation
of the oxide capacitor can be monitored in one continuous sweep.
Easy Quasi-static CV Setup
The 4155C and 4156C quasi-static
CV measurement function is integrated
into the front-panel control. No programming or additional equipment is
required. Simply pick your voltage
sweep range and the step voltage
interval at which you want to measure
capacitance. The internal firmware
routines take care of the rest.
Reliable Measurement Results
The superior accuracy and resolution
of the 4155C and 4156C guarantee
that your quasi-static CV measurement
results will be consistent and reliable.
You can use the auto-analysis function
of the 4155C and 4156C to calculate
immediately important process
parameters.
Built-in Quasi-static CV Analysis
6
Quasi-static CV Measurement Procedure
Quasi-static CV Measurement Setup
Quasi-static CV Measurement Results
∆V
Measure ∆Q
Integration
Time
VAR1 Step
Delay Time
•
•
•
ICS Gives Convenient Analysis Capability
Interactive Characterization Software
(ICS) provides a graphical user interface
(GUI) in an MS Windows 98 or NT environment. ICS displays the device under
test (DUT) as a graphical schematic,
which makes parametric testing intuitive
and easy by eliminating the need to write
complex programs.
To connect the instrument sources to
device terminals, simply select the
appropriate instrument, such as an SMU
or meter, from the pop-up display and
click on the terminal lead on the schematic.
The Setup Editor configures the resource
for your application.
The Data/Plot View tool can immediately
and automatically display all of your
measured and derived data either as a
graph or in a spreadsheet format.
ICS offers all the functionality of the
instrument conveniently accessible
from your PC for true desktop testing.
Note: ICS will support MS Windows 2000 as soon
as business conditions warrant it.
MS Windows 98 and NT Environment
7
Ultra-accurate Low Current Measurement
The Agilent E5250A Low Leakage Switch Mainframe
and E5252A Crosspoint Matrix module combine to form
a complete low current matrix solution. Each E5252A
card has 10 inputs and 12 outputs. The E5250A can
hold up to four E5252A cards, for a maximum of 48
outputs. The inputs to rows 5 and 6 consist of a 3-to-1
multiplexer, which maintains cost-effectiveness without
sacrificing performance. With this solution you can
easily measure currents of 10fA and less through your
switching matrix.
Superior CV Measurement
The E5250A has special built-in compensation routines
to ensure that your CV measurements achieve accuracy
and repeatability. Whether you are using the quasi-static
CV measurement capability of the 4155C and 4156C, or
the high-frequency measurement features of the Agilent
4284A, you can be confident that your capacitance
versus voltage data is both consistent and reliable. The
plot to the right shows the results of superimposing
quasi-static and high frequency CV data.
Exceptional Switching Performance
8
Consistent and Reliable CV Data
C-V Path
Low Leakage Path
123456789101112
OUTPUTS
SMU 1
SMU 2
SMU 3
SMU 4
SMU 5
HF 1
CV 1
SMU 6
HF 2
CV 2
INPUTS
E5250A with E5252A Cards
E5252A 10 x 12 Matrix Module
Easy Front-Panel Control
You can control your E5252A matrix
cards directly from the front panel of
the 4155C and 4156C. All features of
the E5252A cards are supported and
no programming or external PC
control is necessary. In addition,
you can save your matrix setups as
.MAT files and use these files in both
manual and automated applications.
Dual Control Modes
The 4155C and 4156C allow you to
control the matrix in two different
modes. The Array control mode provides a useful overview of the matrix
status. The List control mode makes
it easy to view and change output pin
number assignments. You can choose
either of the two modes to control
the matrix and you can switch
between them.
Integrated Matrix Control
9
Array Control Mode
A Complete Wafer-probing Solution
List Control Mode
High Speed Automated Test
Agilent FLEX Speeds Execution Time
Agilent’s Fast Language for Execution
(FLEX) gives you direct control of
instrument hardware, yielding both
shorter programming code and faster
measurement times. Agilent FLEX can
also be used in conjunction with the program memory feature of the 4155C and
4156C to gain even further measurement
speed improvements. In addition, since
the 4155C and 4156C VXIplug&play
driver uses Agilent FLEX, it provides a
convenient means of enjoying this fast
execution speed in BASIC, C/C++,
National Instruments LabView, or Agilent
VEE with minimal programming work.
Metrics I/CV
Metrics Technology (www.metricstech.com)
is an Agilent partner company that provides standardized software packages for
parametric measurement and analysis.
Metrics I/CV software runs on both
Windows 98 and NT, and supports a wide
variety of semi-automatic wafer probers.
Since Metrics IC/V uses ICS as its core
measurement “engine,” you can easily
transport algorithms developed in ICS
into the automated Metrics IC/V environment. Moreover, Metrics I/CV has a
built-in test sequencer that enables you
to automate die and sub-die moves,
sequence ICS measurement algorithms,
and make conditional branching
decisions.
Metrics I/CV also now has an Agilent
FLEX driver for the 4155C and 4156C.
This allows you to run your automated
testing in a super-fast “lights out” mode,
and to achieve measurement times up to
10 times faster than the equivalent 4145
emulation or SCPI mode commands.
10
IBASIC Programming Example Using Agilent FLEX
Metrics I/CV Automation Software
Total CV-IV Solutions
11
Benchtop CV-IV
Automated CV-IV
Integration without Complication
When making CV-IV measurements,
you want to focus on the measurements
and not on the equipment. The 4155C
and 4156C allow you to do this by
creating a seamless benchtop CV-IV
measurement solution that has
integrated matrix control, quasi-static
CV measurement capability, and builtin capacitance compensation routines.
Moreover, you can easily network
your 4155C or 4156C to any NFS
server anywhere on your LAN. You
can save data files into Excel spreadsheets, and dump graphs to highresolution TIFF files.
Automation without Frustration
Agilent can also provide you with
answers to your automated CV-IV
measurement needs. With a single
PC you can automate and control both
your wafer prober and your measurement instruments. You can do this via
a commercial package such as Metrics
I/CV, or your own customized solution.
The Best and Only Instrument for
Wafer Level Reliability (WLR) Test
The Agilent 4155C and 4156C have a
complete set of functions to support
WLR test. For example, many WLR
tests require extremely precise clocks
in order to determine accurately the
area under a curve for such important
parameters as charge to breakdown
(Qbd). The 4155C and 4156C have a
super-accurate clock that can measure
time intervals with 20 µs resolution
(PC clocks are not adequate for this
task). Also, the 4155C and 4156C
feature a thinned-out sampling
capability that is useful for measuring
parameters over long time periods.
Determine Charge to Breakdown
The 4155C and 4156C can easily
perform both Vramp and Jramp tests
and automatically determine charge to
breakdown (Qbd). Vramp testing can
be performed directly from the front
panel, and Jramp testing can be performed using a very simple IBASIC
program supplied by Agilent.
Intelligent TDDB Testing
For time-sampled measurements, the
4155C and 4156C support a unique
“thinned-out” sampling function. This
feature is particularly useful when performing tests such as time dependent
dielectric breakdown (TDDB), where
the time to failure is unknown beforehand. The thinned-out sampling
function intelligently throws out
extraneous data points if the data
buffer (up to 10,001 points) fills up
without reaching your failure criteria.
This capability ensures that you never
overflow your data buffer no matter
how long your TDDB test is running.
Standard Wafer Level Reliability Functions...
12
Ibd
Time
Qbd= ∫I(t) dt
dt
Time
Qbd
Ig
Q
TDDB Test
Vramp Test
Effortless Push Button Stress Measure
Many tests such as hot carrier
injection (HCI) involve repeating
a voltage stress until the user
degrades a device parameter by
some predetermined amount. The
4155C and 4156C simplify this
tedious stress/measure procedure
to only two keys: stress and measure.
The user can also create programs
to automate this stress/measure
procedure (see next page).
Charge Pumping Station
Charge pumping is a direct measure
of the interface state density, which in
turn provides an indication of the
electron and hole trapping occurring
in a MOS transistor. The Agilent
41501B expander unit provides a
fully integrated solution for charge
pumping. The pulse generators provide
the range of pulse types, widths, and
amplitudes, as well as the rise and fall
time control needed for this crucial
measurement.
13
The Agilent 41501B expander unit enables a variety of charge pumping pulses.
Push Button HCI
Charge Pumping Using Agilent 41501B PGU
n+
n+
p+
PGU:
41501B
4155C 4156Cor
A
A
SQUARE
PULSE
TRIANGULAR
PULSE
TRAPEZOIDAL
PULSE
Expandable to Advanced Applications
Long-Term Stress Testing
The Agilent E5250A Low Leakage
Switch Mainframe also supports the
E5255A Multiplexer Module for longterm reliability testing. The multiplexer
module has 24 outputs, organized in
groups of 8. Each module has one
multilevel dc bias input for each set
of eight channels, permitting the use
of inexpensive power supplies for a
consistent stress. The E5250A accepts
four of these cards, for a total of 96
outputs. Each channel can also have a
customer-selected protection resistor
to safeguard against erroneous results.
The user can gang up to four E5250A
switch mainframes to create a system
with 384-channel capability.
Benchtop HCI
Agilent can supply you with the hardware and the free software to build a
low-cost benchtop HCI test solution.
You can stress and measure eight or
more devices automatically for days or
weeks. The only equipment required
is a 4156C, an E5250A, and a quadoutput power supply. You can perform
HCI testing without a PC. Please see
our Parametric Test Assistant CD for
more information.
Automated Reliability Test
14
Eight of 24 channels in the E5255A multiplexer module
E5250A with E5255A Cards
HCI Test Solution
BIAS
INPUT
OPTIONAL
RESISTOR
LOW
LEAKAGE
I-V INPUT
OUTPUT
1 2 3 4 5 6 7 8
Flash Memory Cell Evaluation
Standard solid-state Switch
The Agilent 16440A SMU/Pulse
Generator Selector is a special solid-state
switching module designed specifically
for Flash cell testing. It enables you to
perform thousands of Write/Erase cycles
on Flash memory cells, which would be
impossible using conventional
mechanical relays.
Versatile Flash Memory Cell Solution
The 4155C and 4156C, the 41501B
Expander Box (with PGU option), and
the 16440A combine to form a powerful
Flash memory cell evaluation solution.
The PGUs are fully integrated resources
within the 4155C and 4156C front panel,
and they can be used to control other
pulse generators such as the
Agilent 81110A.
Million Cycle Write/Erase
You can use the 4155C and 4156C to
both stress and measure Flash memory
cells over thousands of cycles. You can
also use them to perform automatic
analysis and display of important data
such as Vth shift.
15
Agilent 16440A SMU/Pulse Generator Selector (front)
Agilent 16440A SMU/Pulse Generator Selector (back)
Flash Test Results
Benchtop Flash Testing
Automated Parameter Extraction
The 4155C and 4156C have extensive
built-in analysis capabilities that
greatly facilitate parameter extraction
and post-measurement calculations.
The user can define new variables by
specifying mathematical equations
that utilize measurement parameters
and/or other user-defined variables.
The automatic analysis capabilities
then enable you to calculate and to
plot your desired variables each time
you do a measurement without the
need to resort to any other postmeasurement computations.
Parameter Extraction for Modeling
The Agilent Integrated Circuit
Characterization and Analysis
Program (IC-CAP) is an industrystandard device modeling package
that provides a complete environment
for parameter extraction and circuit
simulation.
The superb accuracy and resolution of
the 4155C and 4156C allow the user to
extract extremely accurate modeling
parameters without any programming
or instrument interaction.
Device Characterization
16
Automatic Extraction Facilitates Gm max and Vth Measurement
Compare Simulated
and Measurement Data
Using IC-CAP
17
Specialized Measurement Needs
Low-Noise 300 mm Wafer Probers
The Agilent 4155C and 4156C work
with a wide variety of analytical wafer
probers. Various low-noise cables
and probe cards are available to
help you achieve accurate on-wafer
measurements.
Multi-site Probe Cards
For multi-site testing such as HCI and
TDDB, Agilent works with Celadon
Systems (www.celadonsystems.com)
to provide you with cost-effective
solutions. Celadon can provide you
with multi-site probe cards and cables
that plug directly into the E5250A’s
Multiplexer Module (E5255A) card.
Packaged Part Testing
For packaged part testing Agilent can
supply you with the Agilent 16442A
Test Fixture. A variety of standard
modules are available for testing different packaged part types. Agilent
can also supply blank Teflon boards
and connection pins so that you can
create your own custom low-leakage
packaged part testing modules.
Cascade 300 mm Wafer Prober
Celadon Probe Card
Agilent 16442A Test Fixture
18
Agilent 4155C/4156C Selection Guide
Standard Resources:
Source Monitor Unit (SMU)
Voltage Monitor Unit (VMU)
Voltage Source Unit (VSU)
Optional Resources:
Medium Power SMU
High Power SMU
Pulse Generator Unit (PGU)
Ground Unit
Measurement Capabilities:
SMU Voltage Measurement Range
SMU Current Measurement Range
SMU Voltage Resolution
SMU Current Resolution
SMU Voltage Measurement Accuracy
SMU Current Measurement Accuracy
SMU Pulse Width
VMU Resolution (Differential)
VMU Accuracy (Differential)
Quasi-static CV Resolution
PGU Minimum Pulse Width/Period
Data Acquisition and Control:
Available User Interfaces
Switching Matrix Control
Programming Options
Interactive Characterization
Software (ICS)
Metrics I/CV
Other PC Control
Plotting and Reporting:
Export to Spreadsheet
Saving Plots to Files
Connectivity:
Network File Management
Printing
Other Interfaces
Agilent 4155C
4 Medium Power SMUs
2 VMUs
2 VSUs
2 Medium Power SMUs
1 High Power SMU
2 Integrated Pulse Generator Units (+/-40 V, 200 mA)
1 Ground Unit (1.6 A)
2 µV/200 V
†
10 fA/1 A
†
2 µV
10 fA (1 fA readable)
††
700 µV
3 pA
500 µs to 100 ms
0.2 µV
10 µV
10 fF
1 µs/2 µs
Push button, knob sweep, or keyboard.
E5250A matrix control integrated into front panel.
4142B and 4145 emulation, SCPI commands, Agilent FLEX.
PC control of the 4155C, 4156C, E5250A, and 4284A in a
Windows 98 or NT environment.
Agilent FLEX driver available for ultra-fast measurement.
Wafer prober control.
VXIplug&play Driver compatible with BASIC, C/C++,
National Instruments LabView, and Agilent VEE.
Spreadsheet key allows data to be exported with space,
comma, or tab delimiters.
Direct export to TIFF files.
NFS client capability.
Prints to networked printer via network print server.
GPIB, parallel port, and 10 base-T LAN port.
Agilent 4156C
4 High Resolution SMUs
2 VMUs
2 VSUs
2 µV/200 V
†
1 fA/1 A
†
2 µV
1 fA (0.01 fA readable)
††
200 µV
20 fA
500 µs to 100 ms
0.2 µV
10 µV
5 fF
1 µs/2 µs
The 200 V and 1 A ranges are available when using the Agilent 41501B and HPSMU.
†
The accuracy of the readable resolution is not guaranteed.
††
4155C Key Features:
• Cost effective measurement solution.
• Non-Kelvin; force and guard terminals for each MPSMU.
• 10 fA resolution, 3 pA accuracy.
4156C Key Features:
• High resolution and accuracy measurement solution.
• Full Kelvin; force, sense, and guard terminals for each HRSMU.
• 1 fA resolution, 20 fA accuracy.
Agilent 4155C Back Panel View
Agilent 4156C Controlling the Agilent E5250A
Agilent 4156C Back Panel View
19
For more information about Agilent Technologies
semiconductor test products, applications and services,
visit our Website: www.agilent.com/go/semiconductor
or you can call one of the centers listed below and ask to
speak with a semiconductor test sales representative.
For information about other Agilent test and measurement
products, go to www.agilent.com.
United States:
Agilent Technologies
1 800 452 4844
Canada:
Agilent Technologies Canada Inc.
1 877 894 4414
Europe:
Agilent Technologies
(31 20) 547 2000
Japan:
Agilent Technologies Japan Ltd.
(81) 426 56 7832
Fax: (81) 426 56 7840
Latin America:
Agilent Technologies
(305) 269 7500
Fax: (305) 269 7599
Australia/New Zealand:
Agilent Technologies Australia Pty Ltd
1-800 629 485 (Australia)
Fax: (61 3) 9272 0749
0 800 738 378 (New Zealand)
Fax: (64 4) 495 8950
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Agilent Technologies
(852) 2599 7889
Fax: (852) 2506 9233
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Fax:(822) 786-1083
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(65)1800-292 8100
Fax:(65) 275 0387
Product specifications and descriptions in this
document subject to change without notice.
Copyright © 2000 Agilent Technologies
Printed in U.S.A. 11/00
5988-0307EN
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