User’s Guide
Volume 1
General Information
Agilent 4155B Semiconductor Parameter Analyzer
Agilent 4156B Precision Semiconductor Parameter Analyzer
Agilent Part No. 04156-90100
Printed in Japan May 2000
Edition 4
Legal Notice
The information contained in this document is subject to change without notice.
Copyright © 1997, 2000 Agilent Technologies
This document contains information which is protected by copyright. All rights are
reserved. Reproduction, adaptation, or translation without prior written permission
is prohibited, except as allowed under the copyright laws.
• Product Warranty
Agilent Technologies warrants Agilent Technologies hardware, accessories and
supplies against defects in materials and workmanship for the period of one year
from the warranty start date specified below. If Agilent Technologies receives
notice of such defects during the warranty period, Agilent Technologies will, at
its option, either repair or replace products which prove to be defective.
Replacement products may be either new or like-new.
Warranty service of this product will be performed at Agilent Technologies.
Buyer shall prepay shipping charges to Agilent Technologies and Agilent
Technologies shall pay shipping charges to return the product to Buyer.
However, Buyer shall pay all shipping charges, duties, and taxes for products
returned to Agilent Technologies from another country.
Agilent Technologies does not warrant that the operation of Agilent
Technologies products will be uninterrupted or error free. If Agilent
Technologies is unable, within a reasonable time, to repair or replace any
product to a condition as warranted, customer will be entitled to a refund of the
purchase price upon prompt return of the product.
The Agilent Technologies products may contain remanufactured parts
equivalent to new in performance or may have been subject to incidental use.
The warranty period begins on the date of delivery or on the date of installation
if installed by Agilent Technologies. If customer schedules or delays Agilent
Technologies installation more than 30 days after delivery, warranty begins on
the 31st day from delivery.
Warranty does not apply to defects resulting from (a) improper or inadequate
maintenance or calibration, (b) software, interfacing, parts or supplies not
supplied by Agilent Technologies, (c) unauthorized modification or misuse, (d)
operation outside of the published environmental specifications for the product,
or (e) improper site preparation or maintenance.
2 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
To the extent allowed by local law, the above warranties are exclusive and no
other warranty or condition, whether written or oral, is expressed or implied and
Agilent Technologies specifically disclaims any implied warranties or
conditions of merchantability, satisfactory quality, and fitness for a particular
purpose.
Agilent Technologies will be liable for damage to tangible property per incident
up to the greater of $300,000 or the actual amount paid for the product that is the
subject of the claim, and for damages for bodily injury or death, to the extent
that all such damages are determined by a court of competent jurisdiction to
have been directly caused by a defective Agilent Technologies product.
To the extent allowed by local law, the remedies in this warranty statement are
customer’s sole and exclusive remedies. Expect as indicated above, in no event
will Agilent Technologies or its suppliers be liable for loss of date or for direct,
special, incidental, consequential (including lost profit or date), or other damage,
whether based in contract, tort, or otherwise.
For consumer transactions in Australia and New Zealand: the warranty terms
contained in this statement, except to the extent lawfully permitted, do not
exclude, restrict or modify and are in addition to the mandatory statutory rights
applicable to the sale of this product to you.
• Assistance
Product maintenance agreements and other customer assistance agreements are
available for Agilent Technologies products.
For any assistance, contact your nearest Agilent Technologies Sales Office.
• Certification
Agilent Technologies, Inc. certifies that this product met its published
specifications at the time of shipment from the factory. Agilent Technologies
further certifies that its calibration measurements are traceable to the National
Institute of Standards and Technology (NIST), to the extent allowed by the
Institute’s calibration facility, and to the calibration facilities of other
International Standards Organization members.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 3
• Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the equipment. In addition, it violates safety standards
of design, manufacture, and intended use of the instrument. Agilent
Technologies, Inc. assumes no liability for customer’s failure to comply with
these requirements.
NOTE Agilent 4155B/4156B/41501B comply with INSTALLATION CATEGORY II for
mains input and INSTALLATION CATEGORY I for measurement input terminals,
and POLLUTION DEGREE 2 defined in IEC 1010-1.
Agilent 4155B/4156B/41501B are INDOOR USE products.
NOTE LEDs in Agilent 4155B/4156B/41501B are Class 1 in accordance with IEC 825-1.
CLASS 1 LED PRODUCT.
• GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument
chassis and cabinet must be connected to an electrical ground. The power
terminal and the power cable must meet International Electrotechnical
Commission (IEC) safety standards.
• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
• KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component
replacement and internal adjustments must be made by qualified
maintenance personnel. Do not replace components with power cable
connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power
and discharge circuits before touching them.
• DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable
of rendering first aid and resuscitation, is present.
4 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to a Agilent Technologies Sales and Service Office for
services and repair to ensure that safety features are maintained.
• DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, precede potentially dangerous procedures
throughout this manual. Instructions contained in the warnings must be
followed.
WARNING Dangerous Voltage, capable of causing death, are present in this instrument.
Use extreme caution when handling, testing, and adjusting.
• Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are
listed below.
Instruction manual symbol: the product will be marked with this symbol when it
is necessary for the user to refer to the instruction manual in order to protect
against damage to the instrument.
Indicates dangerous voltage and potential for electrical shock. Do not touch
terminals that have this symbol when insrument is on.
Protective conductor terminal. For protection against electrical shock in case of
a fault. Used with field wiring terminals to indicate the terminal which must be
connected to ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment
which normally includes all exposed metal structures.
Indicates earth (ground) terminal.
Alternating current.
Direct current.
ON (Supply).
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 5
OFF (Supply).
STANDBY (Supply).
CAT 1
Means INSTALLATION CATEGORY I. Measurement terminals on the rear
panel comply with INSTALLATION CATEGORY I.
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
injury or death to personal.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,
practice, condition or the like, which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the product.
• Herstellerbescheinigung
GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
• Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
6 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
Printing History
Edition 1: August 1997
Edition 2: September 1997
Edition 3: January 2000
Edition 4: May 2000
Microsoft, Windows, MS-DOS and Excel are registered trademarks of Microsoft Corporation.
Lotus and 1-2-3 are registered trademarks of Lotus Development Corporation.
NFS is a trademark of Sun Microsystems, Inc.
UNIX is a registered trademark in the United States and other countries, licensed exclusively through
X/Open Company Limited.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 7
8 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
HIGH VOLTAGE SHOCK HAZARD
The Agilent 4155B/4156B/41501B can force dangerous voltages (200 V for HPSMU, and
100 V for HRSMU and MPSMU) at the force, guard, and sense terminals. To prevent
electric shock hazard, the following safety precautions must be observed during the use of
the Agilent 4155B/4156B/41501B.
Use a three-conductor ac power cable to connect cabinet (if used) and
Agilent 4155B/4156B/41501B to an electric ground (safety ground).
If you do not use Agilent 16442A Test Fixture, make sure to connect the INTLK terminal
to a switch that turns off when the shielding box access door is opened.
Confirm periodically that INTLK function works normally.
Before touching the connections of the force, guard, and sense terminals, turn the
Agilent 4155B/4156B/41501B off and discharge any capacitors whenever possible. If you
do not turn the Agilent 4155B/4156B/41501B off, complete "all" of the following items,
regardless of any Agilent 4155B/4156B/41501B settings.
Terminate measurement by pressing Stop key , confim that the MEASUREMENT
indicator is not lit.
Deactivate standby mode (if used) by pressing Standby key, confim that the Standby
indicator is not lit.
Confirm that the HIGH VOLTAGE indicator is not lit.
Open the shielding box access door (open the INTLK terminal).
Discharge any capacitors if the capacitance is connected to an SMU.
Warn workers in the vicinity of the Agilent 4155B/4156B/41501B about dangerous
conditions.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 9
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10 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
PRECAUTIONS POUR COMMOTION A HAUTE TENSION
Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour HPSMU ou HRSMU;
100 Vdc) émanant du dispositif Agilent 4155B/4156B/41501B peut être sortie aux bornes de
force, d'appareil de protection ou de détection. Les précautions suivantes doivent être obserées
contre commotion électrique accidentelle:
Mettre à la terre le dispositif Agilent 4155B/4156B/41501B au moyen du câble d'alim
entation tripolaire.
En cas de hors service du dispositif d'essai, FIXTURE Agilent 16442A, connecter les
bornes de verrouillage (INTLK) de façon à ce que soit ouverte lorsque le couvercle de la
boîte de blindage est ouvert.
Essayer périodiquement le fonctionnement normal de verrouillage.
Avant de toucher la partie connexion à partir des bornes de force, d'appareil de protection
et de détection, mettre hors tension le dispositif Agilent 4155B/4156B/41501B.
Et, en cas de condensateurs connectés au circuit de mesure, décharger ces condensateurs.
Lorsque l'alimentation n'est pas mise hors tension, les 4 instructions suivantes doivent être
exécutées:
Finir la mésure en appuyant sur la touche "STOP"; verifier que l'indicateur
"MEASUREMENT" n'est pas allumé.
Désactiver le mode "Standby" (si utilise) en appuyant sur la touche "Standby";
verifier que l'indicateur "Standby" n'est pas allumé.
S'assurer que soit allumé l'indicateur d'alarme de la haute tension.
Ouvrir le convercle de la boîte de blindage (Ouvrir les bornes de verrouillage).
En cas de condensateurs connectés à SMU, décharger les condensateurs.
Alerter d'autres personnes autour de vous contre le danger de haute tension.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 11
Achtung! Gefährliche Spannung
Von den Geräten Agilent 4155B/4156B/41501B können Spannungen an den Anschlüssen "Force,
Guard und Sense" von bis zu 200 V ausgehen. Um elektrischem Schlag vorzubeugen, ist bei der
Benützung der Geräte Agilent 4155B/4156B/41501B folgendes zu beachten:
Erden Sie das Kabinett (falls verwendet) sowie die Geräte Agilent 4155B/4156B/41501B
mittels dreiadriger Netzleitungen.
Wenn die Meßfassung, Agilent 16442A, zwar angeschlossen, jedoch nicht verwendet wird,
schließen Sie die Verriegelungsklemme (INTLK) so an, daß bei geöffnetem Deckel die
Stromzuführung zu Agilent 16442A auf jeden Fall unterbrochen wird.
Vergewissern Sie sich regelmäßig daß die Verriegelungsfunktion korrekt arbeitet.
Schalten Sie die Geräte Agilent 4155B/4156B/41501B aus, und entladen Sie alle Kapazitäten
bevor Sie die Anschlüsse "Force, Guard und Sense" berühren. Falls Sie die Geräte
Agilent 4155B/4156B/41501B nicht ausschalten, führen Sie unabhängig von den
Geräteeinstellungen folgende Schritte durch:
Beenden Sie die gegenwärtige Messung durch Drücken der Stop Taste (die
MEASUREMENT Leuchtdiode erlischt).
Deaktivieren Sie den Standby Modus (falls verwendet) durch Drücken der Standby Taste
(die Standby Leuchtdiode erlischt).
Vergewissern Sie sich daß die Hochspannungswarnlampe erloschen ist.
Öffnen Sie den Deckel der Meßfassung Agilent 16442A (die Verriegelungsklemme
(INTLK) öffnen).
Entladen Sie alle an SMUs angeschlossenen Kondensatoren (falls vorhanden).
Informieren Sie Personen in unmittelbarer Nähe der Geräte Agilent 4155B/4156B/41501B über
die Gefährlichkeit der bestehenden Hochspannung, und sichern Sie den Zugang zum Prüfplatz
zum Schutz Dritter.
12 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
In This Manual
This manual provides information and instructions for installation, file operation,
printer/plotter function, and what unrelated to the measurement and analysis, and
consists of the following chapters. For the information about the measurement and
analysis, refer to User's Guide Measurement and Analysis.
• Introducing the 4155B/4156B
This chapter describes overview of the 4155B/4156B.
• Installation
This chapter describes how to install the 4155B/4156B, accessories, and
peripherals.
• File Operations
This chapter describes how to store or load the 4155B/4156B setup and
measurement data.
• Print/Plot Function
This chapter provides information about the print/plot function.
• System Screen Organization
This chapter provides information about the user interface displayed on the
4155B/4156B screen by pressing the System key.
• External Keyboard
This chapter provides softkey maps and information about using an external
keyboard (furnished with the 4155B/4156B).
• Initial Settings
This chapter provides information about user defined initial settings and default
initial settings.
• Specifications
• Accessories and Options
• If You Have A Problem
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 13
Other Manuals
The following Agilent 4155B/4156B manuals are also available:
• User's Guide Measurement and Analysis
This manual provides information about measurement and analysis by using the
4155B/4156B, and consists of the following chapters:
• Measurement Units
• Measurement Mode
• Measurement Functions
• Making Measurement
• Analyzing Measurement Results
• Screen Organization
• Data Variables and Analysis Function
• If You Have A Problem
• Quick Start Guide
This manual is mainly for beginners and provides brief instructions about using
the 4155B/4156B.
• Programmer's Guide
This manual provides information about controlling the 4155B/4156B by
remote control command via GPIB interface and Instrument BASIC, and
consists of the following chapters:
• Using Instrument BASIC
• 4155B/4156B SCPI Programming
• 4155B/4156B FLEX Programming
• Running 4145A/B Program Directly on the 4155B/4156B
• ASP-Like IBASIC Programming
• SCPI Command Reference
This manual is a complete reference of the 4155B/4156B SCPI (Standard
Commands for Programmable Instruments) Command Set.
14 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
• GPIB Command Reference
This manual is a complete reference of the 4155B/4156B FLEX Command Set
and the 4145B Syntax Command Set.
• Sample Application Programs Guide Book
This manual introduces application measurement examples using the
4155B/4156B and the sample application program disk furnished with the
4155B/4156B.
• VXIplug&play Driver User's Guide
This manual provides information about VXIplug&play driver for the
4155B/4156B. This manual also introduces an application measurement
example using the 4155B/4156B and the VXIplug&play driver.
Text Conventions
The following text conventions are used in this manual:
Screen Text Represents text that appears on screen of the 4155B/4156B.
Italic Refers to a related document, or is used for emphasis.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 15
16 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
Contents
1. Introducing the 4155B/4156B
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Measurement Unit Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Front View of the 4155B/4156B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Rear View of the 4155B/4156B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Front and Rear View of the 41501A/B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
2. Installation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Line Fuse and Line Voltage Selector for the 41501A . . . . . . . . . . . . . . . . . . . . 2-5
Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Storaging/Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
To Inspect the 4155B/4156B and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
To Check the 4155B/4156B Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
To Execute Diagnostics and Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Connecting the 41501A/B SMU/Pulse Generator Expander . . . . . . . . . . . . . . . 2-11
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 Contents - 1
Contents
Installing Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
To Install the 16442A Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
To Install the 16441A R-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
To Install the 16440A SMU/Pulse Generator Selector . . . . . . . . . . . . . . . . . . 2-20
To Connect the 16440A Selector to the 4155B/4156B . . . . . . . . . . . . . . . . . . 2-26
To Connect the Measurement Cable to the Connector Plate . . . . . . . . . . . . . . 2-28
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
Mounting Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31
To Make an Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33
To Connect the GNDU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-37
To Connect the SMU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-38
To Connect the VSU/VMU/PGU Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-40
Connecting Instruments or Peripherals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-41
To Connect GPIB Instruments or Peripherals . . . . . . . . . . . . . . . . . . . . . . . . . 2-41
To Connect Parallel Peripherals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-42
To Connect to a LAN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-43
3. File Operations
Selecting a Mass Storage Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Listing a File Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Storing Setup or Results Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Storing Results Data in Spreadsheet Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Output Format for the ASCII SAVE Function . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Output Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Loading Setup or Results Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Changing a File Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
Removing a File/Directory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
Copying a File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
Contents - 2 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
Contents
Creating a Directory on a Network File System . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
Changing the Working Directory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
Initializing a Diskette . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
Backing Up a Diskette . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
4. Print/Plot Function
Output Formats . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Differences Between PCL, HR PCL and HP-GL . . . . . . . . . . . . . . . . . . . . . . . 4-4
Output Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Supported Peripherals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Connecting Peripherals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Printing/Plotting Screen Images . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Printing/Plotting Setup Data Lists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Printing/Plotting Measurement Data Lists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
Printing/Plotting Measurement Data Graphs . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
Saving Screen Images . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
Saving Setup Data Lists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
Saving Measurement Data Lists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
Saving Measurement Data Graphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32
Output Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-37
Screen Dump Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38
Setup Data List Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-40
Measurement Result List Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42
Measurement Result Graph Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-44
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 Contents - 3
Contents
5. System Screen Organization
Screen Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
SYSTEM Screen Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
SYSTEM: FILER screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
SYSTEM: MISCELLANEOUS screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
SYSTEM: CONFIGURATION screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28
SYSTEM: SELF-CALIBRATION/DIAGNOSTICS screen . . . . . . . . . . . . . . . 5-29
SYSTEM: PRINT/PLOT SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32
SYSTEM: COLOR SETUP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36
Screen Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39
Data Input or Edit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39
Blue front-panel key usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40
Green front-panel key usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-41
Edit front-panel keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-42
Status Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-43
6. External Keyboard
7. Initial Settings
8. Specifications
9. Accessories and Options
10. If You Have A Problem
Contents - 4 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
1 Introducing the 4155B/4156B
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
Introducing the 4155B/4156B
Agilent 4155B/4156B is an electronic instrument for measuring and analyzing the
characteristics of semiconductor devices. This one instrument allows you to perform
both measurement and analysis of measurement results.
Following is summary of Agilent 4155B/4156B features.
• Measurement Capabilities
The 4155B/4156B has four highly accurate source/monitor units (SMUs), two
voltage source units (VSUs), and two voltage measurement units (VMUs). The
4156B is designed for Kelvin connections and has high-resolution SMUs
(HRSMUs), so the 4156B is especially suited for low resistance and low current
measurements. You can measure voltage values with a resolution of 1 V by
using the differential measurement mode of VMUs.
The 4155B/4156B can perform two types of measurements, sweep measurement
and sampling measurement. The 4155B/4156B also provides knob sweep
measurement function for quick sweep measurements executed by rotating the
rotary knob on the front panel.
The 4155B/4156B can perform stress testing. That is, can force a specified dc
voltage or current for the specified duration. Also, you can force ac stress by
using pulse generator units (PGUs), which are installed in Agilent 41501A/B
SMU/Pulse Generator Expander.
• Analysis Function
The 4155B/4156B provides a marker and two lines for analyzing the
measurement results. The 4155B/4156B also provides the automatic analysis
function which moves marker and lines at desired location and displays desired
calculation results automatically after measurement is completed.
• Data storing
The 4155B/4156B allows you to store measurement setup information,
measurement data, and instrument setting information on a 3.5-inch diskette
using the built-in flexible disk drive, or on a NFS server via LAN.
The allowable disk formats are MS-DOS and HP LIF.
You can also use internal memory for temporary data storage. You can save up
to four files in internal memory. You can quickly move information between the
internal memory and the 4155B/4156B working memory.
1-2 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
Introducing the 4155B/4156B
• Printing and plotting
The 4155B/4156B allows you to print the setup data, measurement results and
screen images on a printer or plotter that is connected to the 4155B/4156B via
GPIB interface, or parallel I/O interface. The 4155B/4156B can also store a
TIFF, PCL, or HP-GL file.
You can also use a remote printer via LAN to make hardcopies.
• Remote control
The 4155B/4156B can be controlled by an external controller via GPIB by using
remote control commands. The 4155B/4156B provides the following command
sets, so you can select the command set suitable for your application.
• 4155B/4156B SCPI (Standard Commands for Programmable Instruments)
command set
• 4155B/4156B FLEX (Fast Language for Execution) command set
• 4145B syntax command set
Also the 4155B/4156B has internal Instrument BASIC, so you can develop and
execute measurement programs by using the 4155B/4156B only, without using
an external controller.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 1-3
Introducing the 4155B/4156B
Overview
Overview
The 4155B/4156B is a box type electronic measurement instrument with LCD
display, flexible disk drive, operation keys, and interface connectors.
• Keyboard
You can connect a keyboard to the 4155B/4156B. So, you can operate this
instrument by using a keyboard or the front-panel keys.
• Agilent 41501A/B SMU/Pulse Generator Expander
The 41501A/B SMU and Pulse Generator Expander contains pulse generator
units (PGUs) and additional SMUs. The 41501A/B is attached to and controlled
by the 4155B/4156B.
• Test Fixture
Agilent 16442A is the test fixture for the 4155B/4156B. You can mount your
device under test (DUT) on the 16442A, and measure the device characteristics.
• Resistor Box
Agilent 16441A R-Box contains accurate 10 kW, 100 kW, and 1 MW resistors,
and connection of these resistors is controlled by the 4155B/4156B. The 16441A
is used to measure negative resistance and to prevent DUT damage when
performing breakdown measurements.
1-4 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
Introducing the 4155B/4156B
Overview
• SMU/PGU Selector
Agilent 16440A SMU/Pulse Generator Selector contains two switching circuits
to connect the DUT to either an SMU or PGU. You can attach another 16440A
to add two more switching circuits.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 1-5
Introducing the 4155B/4156B
Measurement Unit Configurations
Measurement Unit Configurations
Agilent 4155B, 4156B, and 41501A/B are frames that contain the measurement
units. The measurement units are installed before the product is shipped from
factory. User cannot reconfigure the installed units.
• Agilent 4155B configuration:
• four medium power source monitor units (MPSMUs).
• two voltage source units (VSUs).
• two voltage monitor units (VMUs).
• Agilent 4156B configuration:
• four high resolution source monitor units (HRSMUs).
• two voltage source units (VSUs).
• two voltage monitor units (VMUs).
The 4156B has higher measurement resolution. For details about measurement
range and resolution, refer to "Measurement Units" in the 4155B/4156B User's
Guide: Measurement and Analysis.
• Agilent 41501A/B configuration:
The 41501A/B is attached to the 4155B/4156B at your site. See Chapter 2,
“Installation,” on how to install the 41501A/B.
The 41501A/B contains a ground unit (GNDU). In addition, you specify an
option number according to desired units as follows:
Table 1-1 Configuration of the 41501A/B
Unit
One GNDU yes yes yes yes yes
Two PGUs yes yes yes
Two MPSMUs yes yes
One HPSMU
a. HPSMU: high power source monitor unit
1-6 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
a
Agilent 41501A/B Option
402 410 412 420 422
yes yes
Front View of the 4155B/4156B
Figure 1-1 Front View of the 4155B/4156B
Introducing the 4155B/4156B
Front View of the 4155B/4156B
• LINE switch
Use the LINE switch to turn analyzer on and off.
• Flexible disk drive (FDD)
Use 3.5 inch diskette to load or store the analyzer settings and measurement
data.
• Keyboard connector
You can use an IBM PC/AT compatible keyboard to operate the 4155B/4156B.
See Chapter 6, “External Keyboard.”
• Help key
Pressing Help key displays the help screens.
• Plot/Print key
Pressing Print/Plot key prints the setup information and measurement results to
your plotter, printer, or file, TIFF, PCL, or HP-GL file.
If you press green key and Print/Plot key, the screen image is dumped to plotter,
printer, or file.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 1-7
Introducing the 4155B/4156B
Front View of the 4155B/4156B
• PAGE CONTROL key group
Page Control keys are used to change the display screens.
Chan key Moves to CHANNELS screen group. You define channels,
user functions, and user variables.
Meas key Moves to MEASURE screen group. You set the output
parameters, measurement parameters, and so on.
Display key Moves to DISPLAY screen group. You set the result display
format, auto analysis definitions, and so on.
Graph/List key Moves to GRAPH/LIST screen group. This softkey toggles
between GRAPH and LIST screens.
Stress key Moves to STRESS screen group. You define the stress
channels, set the stress parameters, and monitor the stress
forcing.
System key Moves to SYSTEM screen group. You operate on diskette
files, set up plotting and printing environment, define colors
of the display, and so on.
• MARKER/CURSOR key group
Rotary knob and arrow keys of the Marker/Cursor key group are used to move
the marker and cursor.
Rotary knob Moves the marker, or increases or decreases setup value.
Arrow keys Up, Down, Left, and Right. Moves field pointer or cursor.
Fast key Moves the marker or cursor faster. When you rotate the
rotary knob or press the arrow keys with holding Fast key
down, the marker or cursor moves faster.
1-8 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
Introducing the 4155B/4156B
Front View of the 4155B/4156B
• MEASUREMENT key group
Measurement keys control the measurement, stress, and integration time.
Single key Executes the measurement once, then returns to the idle
state (or standby state if standby is enabled for the channel)
after the measurement is finished. Measurement data is
updated, so data of previous measurement is lost. Pressing
the green key, then Single key starts knob sweep
measurement.
Repeat key Starts and repeats the measurement continuously.
Measurement data is updated, so data of previous
measurement is lost. To stop the measurement, press Stop
key.
Append key Executes the measurement once, then returns to idle state
(or standby state if standby is enabled for the channel) after
measurement is finished. Measurement data is appended to
data of previous measurement.
Stop key Stops the measurement or stress. Standby enabled channels
return to standby state, and other channels return to idle
state.
Standby key Toggles between the standby enabled (Standby indicator is
lit) and disabled states. If Standby indicator is lit, then
STBY ON channels change to standby state (instead of idle
state) when measurement or stress finishes. Stop key has no
affect on standby state.
Stress key Forces the specified stress. The guide around this key
prevents you from accidently pressing the Stress key.
Short,
Medium, and
Long keys Sets the integration time to SHORT, MEDIUM, or LONG,
respectively.
• MEASUREMENT indicator
This indicator lights when the 4155B/4156B is in the measurement state.
• HIGH VOLTAGE indicator
This indicator lights when a unit forces more than 40 V.
Agilent 4155B/4156B User’s Guide Vol.1, Edition 4 1-9
Introducing the 4155B/4156B
Front View of the 4155B/4156B
• Standby indicator
This indicator lights when the 4155B/4156B is standby enabled, which means
that the channels that are standby enabled (STBY ON) will return to the standby
state after the measurement is finished.
• IBASIC key group
IBASIC keys control the IBASIC program execution.
Run key Starts the IBASIC program that is in memory. The indicator
is on during program execution.
Pause key Pauses the IBASIC program execution.
Display key Toggles between the IBASIC screen and measurement
screen.
• Run indicator
When an IBASIC program is running, this indicator lights.
• ENTRY key group
You enter or modify data such as output values, comments, and variable names.
Character keys Are used to enter alphanumeric and special characters.
Enter key After you enter desired characters into the data entry field,
press this key. The characters are entered at the field pointer
location. Also, you can use the green key to calculate the
value of the data entry field. For example, if you press 4 * 6
green key and Enter key, the result (24) appears.
Blue key Changes entry mode to blue-key shift mode, and lights the
indicator. In this mode, you can enter the blue characters
that are printed above the keys. Pressing blue key again
changes to normal mode. Indicator turns off.
Green key Changes entry mode to green-key shift mode. This mode is
effective for the next pressed key, then changes back to
normal mode.
Edit keys Are used to edit the characters in the data entry field.
User File keys Are used to operate quickly on a file in diskette, internal
memory or a directory on a NFS server. Pressing Save key
moves into the filer's SAVE function, and pressing Get key
moves into the filer's GET function.
1-10 Agilent 4155B/4156B User’s Guide Vol.1, Edition 4
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