Page 1
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hp
41501b
HP
4155B
Semiconductor Parameter Analyzer
HP
4156B
Precision Semiconductor Parameter Analyzer
Technical Data
Specifications
-
July 1997
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Page 1
Page 2
Introduction
SMU: Source Monitor Unit
HRSMU: High Resolution SMU
(1fA/2
V to 100mA/100V)
MPSMU: Medium Power SMU
(10fA/2
V to 100mA/100V)
HPSMU: High Power SMU
(10fA/2
V to 1A/200V)
VMU: Voltage Monitor Unit
VSU: Voltage Source Unit
PGU: Pulse Generator Unit (1 channel)
GNDU: Ground Unit
*1: Minimum number of installable MPSMU
or PGU is two.
ì
Perform measurement and analysis
with the built
-
in HPInstrument
BASIC
ì
Self test, Auto calibration
Configuration
4xMPSMU
2xVMU
2xVSU
HP
4155B
4xHRSMU
2xVMU
2xVSU
HP
4156B
HP
41501B
(Optional)
GNDU
2xPGU(Option)
*1
HPSMU(Option) or
2xMPSMU (Option)
Basic Functions
The HP4155B and
HP
4156B functions:
ì
Set measurement and/or stress
conditions
ì
Control measurement and/or stress
execution
ì
Perform arithmetic calculations
ì
Display measured and calculated
results on the LCD display
ì
Perform graphical analysis
ì
Store and recall measurement setups,
and measurement and graphical display
data
ì
Dump to printers or plotters for hard
-
copy output
Hardware
3. Ambient temperature change less
than 1C after auto calibration
execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU,
HPSMU, and GNDU)
7. Calibration period: 1 year
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal under the following
conditions:
1. 23C 5
C (double between 5
C to 18C, and 28
C to 40
C if not noted
otherwise)
2. After 40 minutes warm
-
up
Specification Condition
The
supplemental
information and
typical
entries in the following specifi
-
cations are not warranted, but provide
useful information about the functions
and performance of the instruments.
The measurement and output accuracy
HP
4156B Precision Semiconductor Parameter Analyzer
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to
100V
HRSMU (High Resolution SMU) Specifications
Voltage Range, Resolution, and Accuracy (HRSMU)
100mA
1mV)VmV)
1mV
20V
100mA
V)VV)V2V
Max.
Current
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Voltage
Range
2
*1
Page 2
Page 3
Current:
100fA to
100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HRSMU Supplemental Informa
-
tion:
Maximum allowable cable resistance
when using Kelvin connection (Force,
Sense): 10
Typical voltage source output
resistance (Force line/non
-
Kelvin
connection): 0.2
Voltage measurement input resistance/
current source output resistance:
1015(
10pA range)
Current compliance setting accuracy for
opposite polarity:
10pA to 10nA range: V/I setting
accuracy
12% of range
*2
5mV)VmV)
5mV
100V
*1
2mV)V±(0.025%+6mV)
2mV
40V
*1: 100mA (Vout
[
20V), 50mA (20V
Vout
40V)
*2: 100mA (Vout
20V), 50mA (20V
Vout
40V), 20mA (40V
Vout
100V)
Current Range, Resolution, and Accuracy (HRSMU)
A+100nA
Vout)
100nA
A+100nA
Vout)Am
100V
A+10nA
Vout)
10nA
A+10nA
Vout)A±
0mA
100V
nA+1nA
Vout)
1nA±(
0.06%+400nA+1nA
Vout)
100nA
±mA100V
nA+100pA
Vout)
100pA
±(0.07%+40nA+100pA
Vout)
10nA±A
100V
nA+10pA
Vout)
10pA±(
0.07%+4nA+10pA
Vout)
1nA±A
100V
pA+1pA
Vout)
1pA±(
0.12%+400pA+1pA
Vout)
100pA
±A100V
pA+100fA
Vout)
100fA±(
0.12%+40pA+100fA
Vout)
10pA±100nA
100V
pA+10fA
Vout)
10fA±(
0.5%+4pA+10fA
Vout)
1pA±10nA
100V
pA+1fA
Vout)*210fA±(
0.5%+0.7pA+1fA
Vout)*2100fA±1nA
100V
fA+10fA
Vout/100)
*1*2
1fA±(
4%+400fA)
*1*2
10fA±100pA
100V
fA+1fA
Vout/100)
*1*2
1fA±(
4%+400fA)
*1*2
10fA±10pA
Max.VMeas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Current
Range
100nA to 100mA range: V/I setting
accuracy
2.5% of range
Output terminal/connection:
Dual triaxial connectors, Kelvin
(remote sensing)
*1: The accuracy is applicable when offset
cancellation has been performed.
*2: The offset current specification is
multiplied by one of the following factors
Current (mA)
Voltage (V)
HRSMU Measurement and
Output Range
depending upon the ambient temperature
and humidity (RH = Relative Humidity):
28
C to 40
C18C to 28
C5C to 18
C
60 -805 -60Temperature
RH
Humidity %
*3: 100V (Iout
20mA)
40V (20mA
Iout
50mA)
20V (50mA
Iout
100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as
of set/measured value (0.04%)
plus offset value (200nA+1nA
Vout) for the
1mA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout or Vout/100.
For example, accuracy specifications are
given as
of set/measured value (0.02%)
plus offset value (1mV+13
V
Vi) for the 2V
range. The differential mode offset value
consists of a fixed part determined by the
measurement range and a proportional part
that is multiplied by Vi
.
VMU Supplemental Information:
Input Impedance:
1G
VMU (Voltage Monitor
Unit) Specifications
VMU Measurement Range,
Resolution, and Accuracy:
(
0.02%+1mV)
20V20V(0.02%+200
V)2V
2V
Meas.
Accuracy
Meas.
Reso.
Voltage
Range
VMU Differential Mode Range
VSU (Voltage Source Unit)
Specifications
VSU Output Range:
(
0.05% of setting+10mV)
1mV
20V
Meas.
Accuracy
Meas.
Reso.
Voltage
Range
*1: Specification is applicable under no load
current.
Max. Output Current: 100mA
3
[
*3
100
[
-100
50
20
-20-40 20 40
-20
-50
-100
100
Page 3
*1
Page 4
Input leakage current (@0V):
500pA
(Typical)
Measurement noise: 0.01% of range
(p-p) (Typical)
Differential mode measurement noise:
0.005% of range (p
-
p) (Typical)
VMU Differential Mode Range
Resolution, and Accuracy:
(
0.02%+1mV+13
V
Vi)2V2V(
0.03%+100
V+1.3VVi)1V
0.2V
Meas.
Accuracy
Meas.
Reso.
Diff V
Range
Max. Common Mode Voltage:
20V
Note: Vi is the input voltage of VMU2 in
volts.
VSU Supplemental Information:
Output resistance: 0.2
Maximum load capacitance:
F
Maximum slew rate: 0.2V/
s
Current limit: 120mA (typical)
Output Noise: 1mV rms (typical)
HP
4155B Semiconductor Parameter Analyzer
Output terminal/connection:
Single triaxial connector, non
-
Kelvin
(no remote sensing)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to
100V
Current:
1pA to
100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
MPSMU Supplemental Informa
-
tion:
Typical voltage source output
resistance: 0.3
Voltage measurement input resistance/
current source output resistance:
1013(
1nA range)
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy
12% of range
MPSMU (Medium Power SMU) Specifications
Voltage Range, Resolution, and Accuracy (MPSMU)
*2
mV+0.3
Iout)VmV)+0.3
Iout)
5mV
100V*1mV+0.3
Iout)V±(0.03%+7mV)+0.3
Iout)
2mV
40V
100mA
mV+0.3
Iout)VmV+0.3
Iout)
1mV
20V
100mA
V+0.3
Iout)VV+0.3
Iout)V2V
Max.
Current
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Voltage
Range
*1: 100mA (Vout
[
20V), 50mA (20V
Vout
40V)
*2: 100mA (Vout
[
20V), 50mA (20V
Vout
40V), 20mA (40V
Vout
100V)
Current Range, Resolution, and Accuracy (MPSMU)
A+200nA
Vout)
100nA
A+200nA
Vout)Am
100V
A+20nA
Vout)
10nA
A+20nA
Vout)A±
0mA
100V
nA+2nA
Vout)
1nA±(
0.12%+500nA+2nA
Vout)
100nA
±mA100V
nA+200pA
Vout)
100pA
±(0.12%+40nA+200pA
Vout)
10nA±A
100V
nA+20pA
Vout)
10pA±(
0.12%+5nA+20pA
Vout)
1nA±A
100V
pA+2pA
Vout)
1pA±(
0.12%+400pA+2pA
Vout)
100pA
±A100V
pA+200fA
Vout)
100fA±(
0.12%+50pA+200fA
Vout)
10pA±100nA
100V
pA+20fA
Vout)
10fA±(
0.5%+7pA+20fA
Vout)
1pA±10nA
100V
pA+2fA
Vout)
10fA±(
0.5%+3pA+2fA
Vout)
100fA±1nA
Max.VMeas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Current
Range
*1: 100V (Iout
[
20mA), 40V (20mA
Iout
50mA), 20V (50mA
Iout
100mA)
100nA to 100mA range: V/I setting
accuracy
2.5% of range
Current (mA)
Voltage (V)
MPSMU Measurement and
Output Range
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as
of set/measured value (0.1%)
plus offset value (30pA+200fA
Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
VSU Specifications
Same as
HP
4156B VSU.
VMU Specifications
Same as
HP
4156B VMU.
4
*1
100
50
-100
20
-20-40 20 40
-20
-50
-100
100
Page 4
Page 5
HP
41501B
SMU and Pulse Generator Expander
Output terminal/connection:
Dual triaxial connectors, Kelvin (remote
sensing)
Voltage/Current Compliance
(Limiting):
Voltage: 0V to
200V
Current:
1pA to
1A
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HPSMU Supplemental Informa
-
tion:
Maximum allowable cable resistance
when using Kelvin connection:
Force: 0.7
(
100mA to 1A)
Force: 10
(
100mA)
Sense: 10
Typical voltage source output
resistance (Force line/non
-
Kelvin
connection): 0.2
Voltage measurement input resistance/
current source output resistance:
1013(
1nA range)
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy
12% of range
HPSMU (High Power SMU) Specifications
Voltage Range, Resolution, and Accuracy (HPSMU)
50mA
10mV)
V
mV)
10mV
200V
125mA
5mV)VmV)
5mV
100V
500mA
3mV)V±(0.03%+7mV)
2mV
40V1A2mV)VmV)
1mV
20V1AV)VV)V2V
Max.
Current
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Voltage
Range
*2
A+2AVout)1A
A+2AVout)
A*1A+200nA
Vout)
100nA
A+200nA
Vout)Am
200V
A+20nA
Vout)
10nA
A+20nA
Vout)A±
0mA
200V
nA+2nA
Vout)
1nA±(
0.12%+500nA+2nA
Vout)
100nA
±mA200V
nA+200pA
Vout)
100pA
±(0.12%+40nA+200pA
Vout)
10nA±A
200V
nA+20pA
Vout)
10pA±(
0.12%+5nA+20pA
Vout)
1nA±A
200V
pA+2pA
Vout)
1pA±(
0.12%+400pA+2pA
Vout)
100pA
±A200V
pA+200fA
Vout)
100fA±(
0.12%+50pA+200fA
Vout)
10pA±100nA
200V
pA+20fA
Vout)
10fA±(
0.5%+7pA+20fA
Vout)
1pA±10nA
200V
pA+2fA
Vout)
10fA±(
0.5%+3pA+2fA
Vout)
100fA±1nA
Max.VMeas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Current
Range
*1: 200V (Iout
50mA), 100V (50mA
Iout
100mA)
*2: 200V (Iout
50mA), 100V (50mA
Iout
125mA), 40V (125mA
Iout
500mA),
20V (500mA
Iout
1mA)
100nA to 1A range: V/I setting
accuracy
2.5% of range
Vout is the output voltage in volts.
Iout is the output current in amps.
Current (mA)
Voltage (V)
HPSMU Measurement
and Output Range
Pulse/DC Output Voltage and Accuracy (PGU)
(
3% of Base + 50mV)
8mV
40V(3% of Base + 50mV)
4mV
20V
Pulse
(
1% of Base + 50mV +1% of Pulse)
8mV
40V(1% of Base + 50mV +1% of Pulse)
4mV
20V
Base
Accuracy
*1
Resolution
Voltage
Range
Set
Parameter
Note: DC output is performed by the Base parameter.
For example, accuracy specifications are
given as
of set/measured value (0.1%)
plus offset value (30pA+200fA
Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
PGU (Pulse Generator Unit)
Specifications
Modes: Pulse or constant
Amplitude: 0Vpp to 40Vpp
Window:
-
40.0V to +40.0V
Maximum current:
200mA (pulse width:
1ms, average
current
100mA)
100mA
Pulse width: 1.0
s to 9.99s
Minimum resolution: 100ns
Pulse period: 2.0
s to 10.0s
Minimum resolution: 100ns
Delay: 0s to 10s
Minimum resolution: 100ns
Transition time: 100ns to 10ms
Minimum resolution: 1ns
Output impedance: 50
or low
impedance (
1
Burst count range: 1
-
65535
[
[
1000
500
125
50
-20-40 20 40
-50
-125
-500
100-100
200-200
-1000
Page 6
*1: Accuracy is specified at leading edge
-
trailing edge =
s
Page 5
Pulse Range and Pulse Parameter (PGU)
10ms0 -
10s
0.01s -9.99s
1s -10s
6
1ms0 -
1000ms
1ms -999ms
100ms
-
1000ms
5
100
0 -100ms
0.1ms -99.9ms
10ms -100ms4100 -
10ms
0.01ms
-
9.99ms
1ms -10ms31s0 -1000s1s -
999s100s -
1000s2
0.10 -
100s1s -
100s2s -
100s1
Set resolution
Delay
Width
Period
Range
Note: Pulse width is defined when leading time is equal to trailing time. PGU2 must be set in
the same range as PGU1.
Leading/Trailing Edge Times (PGU)
(
5% + 10ns)
10s0.5ms -10.0ms
(
5% + 10ns)
1s50s -
1000s(
5% + 10ns)
100ns
5.0s -
100.0s(
5% + 10ns)
10ns
0.5s -10s(5% + 10ns)
1ns
100ns -1000ns
Accuracy
Set Restrictions
Range
Restrictions:
Pulse width < Pulse Period
Delay time < Pulse period
Leading time < Pulse width
0.8
Trailing time < (Pulse period
-
Pulse width)
0.8
Period, width, and delay of PGU1 and PGU2 must be in the same range. Leading time and
trailing time for a PGU must be in the same range.
Pulse parameter accuracy
Period:
(
2% +2ns)
Width:
(
3% +2ns)
Delay:
(
2% +40ns)
Transition time:
(
5% +10ns)
Trigger output
Level: TTL
Timing: Same timing and width as
PGU1 pulse output
PGU Supplemental Information:
Overshoot:
% of amplitude
10mV
(50
output impedance to 50
load)
Pulse width jitter: 0.2% + 100ps
Pulse period jitter: 0.2% + 100ps
Maximum slew rate: 100V/
s
(50
output impedance to 50
load)
Noise: 0.2% of range (@ DC output)
MPSMU Specifications
Same as
HP
4155B MPSMU.
GNDU Supplemental
Information:
Load Capacitance:
1
F
Cable resistance:
Force1Sense
1
GNDU (Ground Unit)
Specifications:
Output Voltage: 0V
100
V
Maximum sink current: 1.6A
Output terminal/connection:
Single triaxial connector,
Kelvin (remote sensing)
Output overshoot (typical, Filter: ON):
Voltage source: 0.03% of V range
Current source: 1% of I range
Range switching transient noise
(typical, Filter: ON):
Voltage ranging: 250mV
Current ranging: 10mV
Maximum slew rate: 0.2V/
s
Noise characteristics (typical,
Filter: ON):
Voltage source noise: 0.01% of V
range (rms)
Current source noise: 0.1% of I range
(rms)
Voltage monitor noise: 0.02% of V
range (p
-
p)
Current monitor noise: 0.2% of I
range (p
-
p)
HRSMU, MPSMU, and HPSMU
Supplemental Information:
Maximum capacitive load: 1000pF
Maximum guard capacitance: 900pF
Maximum shield capacitance: 5000pF
Maximum guard offset voltage:
1mV
Functions
VAR1
Primary sweep controls the staircase (dc
or pulsed) voltage or current sweep.
Maximum number of steps: 1001 for one
Measurement
The HP4155B and
HP
4156B can
perform dc or pulsed force/measure,
and stress force. For dc,
Measurement Set
-
up
Setting
ì
Fill-in-the-blanks using front
-
panel or
full-size external keyboard
5
Page 7
VAR1 sweep.
Sweep type: linear or logarithmic
Sweep direction: Single or double sweep
Hold time:
Initial wait time or wait time after
VAR2 is set: 0 to 655.35s with 10ms
resolution
Delay time:
Wait time from VAR1 step to the start
of the measurement: 0 to 65.535s with
100
s resolution
voltage/current sweep and sampling
(time domain) measurements are
available.
Voltage/Current Sweep
Measurement Characteris
-
tics
Each SMU and VSU can sweep using
VAR1 (primary sweep), VAR2
(subordinate sweep), or VAR1
|
(synchronous sweep).
ì
Load settings from floppy disk or via
the LAN port
ì
Program using internal
HP
Instrument
BASIC or via
HP
-
IBìHELP Function
ì
Library: Default measure setup, Vce
-
Ic,
Vds-Id, Vgs
-
Id, and Vf
-
If are pre
-
defined softkeys
ì
User-defined measurement setup
library
ì
Auto file load function on power
-
up
Page 6
Arithmetic and Analysis
Functions
Arithmetic Functions
User Functions
Up to six USER FUNCTIONS can be
defined using arithmetic expressions.
Measured data and analyzed variables
from graphics analysis (marker, cursor,
and line data) can be used in the
computation. The results can be
displayed on the LCD.
Arithmetic Operators
+, -, *, /, ^,
LGT (logarithm, base 10),
LOG (logarithm, base e), EXP
(exponent), DELTA, DIFF (differential),
INTEG (integration), MAVG (moving
average), SQRT, ABS (absolute value),
MAX, MIN, AVG (averaging), COND
(conditional evaluation).
Physical Constants
Keyboard constants are stored in memory
as follows:
q: Electron Charge, 1.602177 E
-
19 C
k: Boltzman
s Constant, 1.380658 E
-23Dielectric Constant of Vacuum,
8.854188 E
-
12
Engineering Units
The following unit symbols are also
available on the keyboard: f (10
-
15
),
p (10
-
12
), n (10
-
9
), u or
(
10
-
6
), m (10
K (103), M (10
6
), G (10
9
)
Linear scale (no limit mode), log
scale, and thinned
-
out modes:
560
s (720
s at thinned
-
out mode)
to 1s range: 80
s resolution
1s to 65.535s range: 2ms resolution
Note: The following conditions must be set
when initial interval is less than 2ms.
ì
Number of measurement channels: 1
ì
Measurement ranging: fixed range
ì
Stop condition: disable
Hold time:
Initial wait rime: 0.03s to 655.35s,
100
s resolution
Sampling measurement stop condition:
A condition to stop the sampling can
be defined.
Sampling interval setting accuracy
(supplemental data):
0.5% + 10
s (sampling interval
480s)0.5% + 10
s (480
s
sampling
interval <2ms)
0.5% + 100
s (2ms
sampling
interval)
Stress Force Characteristics
SMU, VSU, and PGU output can be
forced for the user specified period.
Stress time set range:
5000
s to 31,536,000s (365 days)
Resolution:
100
s (500
s
stress time
10s)
10ms (10s<stress time
31,536,000s)
Burst pulse count:
1 -65,535 (PGU only)
Trigger:
VAR2
Subordinate linear staircase or linear
pulsed sweep. After primary sweep is
completed, the VAR2 unit output is
incremented.
Maximum number of steps: 128
VAR1
|
Staircase or pulse sweep synchronized
with the VAR1 sweep. Sweep is made
with a user specified ratio and offset
value. VAR1
|
output is calculated as
VAR1
|
= a
VAR1 + b, where
a
is the
user specified ratio and
b
is the user
specified offset value.
CONSTANT
A source unit can be set as a constant
voltage or current source depending on
the unit.
PULSE
One of the SMUs can be set as a pulse
source.
Pulse width: 0.5ms to 100ms, 100
s
resolution.
Pulse period:
(5ms to 1s (
pulse width + 4ms),
100
s resolution.
SMU pulse setting accuracy
(supplemental information, at fixed range
measurement except multi
-
channel
measurement):
Width: 0.5% + 50
s
Period: 0.5% + 100
s
Trigger output delay for pulsed
measurement: 0
-
32.7ms with 100
s
6
Page 8
Analysis Capabilities
Overlay Graph Comparison
A graphics plot can be stored and later
recalled as an overlay plane. Four
overlay planes can be stored. One plane
can be overlaid onto the current data.
Marker
Marker to min/max, interpolation, direct
marker, and marker slip
Cursor
Long and short, direct cursor.
Line
Two lines, normal mode, grad mode,
tangent mode, and regression mode.
Scaling
Auto scale and zoom.
HP
4155B/4156B outputs a gate
trigger while stress channels are
forcing stress.
Knob Sweep
In the knob sweep mode, sweep range
is controlled instantaneously with the
front-panel rotary knob.
Only the Channel Definition page needs
to be defined.
Standby Mode
SMUs in
Standby
remain
programmed to their specified output
value even as other units are reset for
the next measurement.
Other Characteristics
Limited auto
-
ranging, voltage/current
compliance, power compliance,
automatic sweep abort functions,
self-test, and self
-
calibration.
resolution (< pulse width).
Sampling (Time Domain)
Measurement Characteris
-
tics
Displays the time sampled voltage/
current data versus time.
Maximum sampling points: 10,001
(linear)
Sampling mode: linear, log, and
thinned
-
out
Note: The thinned
-
out mode is similar to
reverse
-
log sampling. Sampling
measurement continues by thinning out
older data until the sampling completion
condition is satisfied.
Sampling interval range and resolution:
Linear scale (auto mode):
60
s to 480
s range: 20
s resolution
480
s to 1s range: 80
s resolution
1s to 65.535s range: 2ms resolution
Page 7
Maximum number of files allowed per
directory on network mass storage
device: 199
Data storage (supplemental data):
2HD DOS format:
Available bytes: 1457K (byte)
File size:
Measurement setup: 3843 (byte)
Stress setup: 601 (byte)
Measurement setup/result
(Typical data): 15387 (byte)
(VAR1: 101, VAR2: 5)
Customized system setup: 1661 (byte)
Hardcopy data: 30317 (byte)
(Monochrome PCL 75DPI file)
Hardcopy data: 38702 (byte)
(monochrome TIFF file)
Note: For LIF format, the total number of files
is limited to 199.
Repeating and Auto
-
mating Test
Instrument Control
HP
4155B and 4156B function control:
Internal or external computer controls
Text Hard Copy
Print out setup information or measured
data list as ASCII text via
HP
-
IB,
parallel printer port, or network
interface to supported
HP
plotters or
printers. PCL, HR PCL, and
HP
GL
formats are supported (selectable).
Hard Copy File
Hard copy output can be stored to an
internal or external mass storage device
instead of sending it to a printer or
plotter. The data can be stored in PCL,
HR PCL, TIFF, HR TIFF (high
-
resolution TIFF), or
HP
GL formats.
Hard Copy via Network Interface
The network interface has lpr client
capability
.
High-Resolution (HR) Mode
This file mode is available for cases
where an extremely clean print
-
out or
plot is desired.
Note: High resolution mode takes signifi
-
cantly greater CPU time to generate, so its
use is recommended for final reports only.
Data Variable Display
Up to two user defined parameters can be
displayed on the graphics screen.
Read Out Function
The read out functions are built
-infunctions for reading various values
related to the marker, cursor, or line.
Automatic Analysis Function
On a graphics plot, the markers and lines
can be automatically located using the
auto analysis setup. Parameters can be
automatically determined using
automatic analysis, user function, and
read out functions.
User Variable
Display the data on the LCD via
HP
-
IB
or HPInstrument BASIC.
Output
Display
Display Modes
Graphics and list.
7
Page 9
the HP4155B and
HP
4156B functions
via HP-
IB interface.
Command sets:
SCPI command set
HP
FLEX command set
HP
4145B command set
Program Memory:
Using the
HP
4155B/4156B
HP
FLEX
command set, the user can store
program code in the
HP
4155B or the
HP
4156B. Maximum number of
subprograms is 256 (8 bit).
External instrument remote control:
Control external equipment via
HP
-
IB
interface.
Data Storage
Mass storage device:
Built-in 3.5 inch flexible disk drive
Media: 3.5 inch 2HD or 2DD diskette
Format type:
HP
LIF and DOS
User area:
1.44Mbyte (2HD) or 720Kbyte (2DD)
File types:
Auto start program file, initial setup
file, measurement setup file,
measurement setup/result file, stress
setup file, customize file, hard copy
data file, and
HP
Instrument BASIC
program and data file.
Format of data made by
HP
BASIC
program:
Data made by
HP
BASIC program and
data made by
HP
Instrument BASIC
program are compatible.
Network mass storage device:
An NFS mountable mass storage
device
File types:
Auto start program file, initial setup
file, measurement setup file,
measurement setup/result file, stress
setup file, customize file, and hard
copy data file.
Graphics Display
X-Y or X
-
Y1/Y2 plot of source
current/voltage, measured
current/voltage, time, or calculated
USER FUNCTION data.
List Display
Measurement data and calculated USER
FUNCTION data are listed in
conjunction with VAR1 step number or
time domain sampling step number. Up
to eight data sets can be displayed.
Display
8.4 inch diagonal color active matrix
LCD, 640 dot (H)
480 dot (V)
Hard Copy Functions
Graphics Hard Copy
Measured data and all data appearing on
the LCD can be output via
HP
-
IB,
parallel printer port, or network interface
to supported
HP
plotters or printers.
PCL, HR PCL (high
-
resolution PCL),
and HPGL formats are supported
(selectable).
General Specifications
Temperature range
Operating:
+10
C to +40
C (if using floppy disk
drive)+5C to +40
C (if not using floppy
disk drive)
Storage:
-22C to +60
C
Humidity range
Operating:
20% to 80% RH, non
-
condensing and
wet bulb temperature
29
C (if using
floppy disk drive)
15% to 80% RH, non
-
condensing and
HP-IB program
HP
-
IB programs for the
HP
4145B can
be used when the
HP
4145B command
set is selected.
Note: There is a possibility that
HP
-IBprograms for the
HP
4145B will need to be
modified.
Interfaces
HP
-
IB interface:
SH1, AH1, T6, L4, SR1, RL1, PP0,
DC1, DT1, C1, C2, C3, C4, C11, E2
Parallel interface: Centronics
RJ45:
Ethernet IEEE 802.3 10BASE
-
T for a
10Mbps CSMA/CD local area
HP
Instrument BASIC
HP
Instrument BASIC is a subset of
HP
BASIC.
Functions:
Arithmetic operation, binary operation,
string manipulation, logical operation,
array operation, program flow control,
event-initiated branching, program
editing and debugging support, mass
storage operation, instrument control,
real-time clock, softkey operation, and
graphics.
HP
4145B automatic sequence program
(ASP) typing aid:
HP
4145B ASP
-
like syntax softkeys are
available in
HP
Instrument BASIC. An
8
Page 8
Page 10
wet bulb temperature
29
C (if not
using floppy disk drive)
Storage: 5% to 90% RH , non
-
condensing and wet bulb temperature
39
C
Altitude
Operating: 0 to 2,000 m (6,561 ft)
Storage: 0 to 4,600 m (15,091 ft)
Power requirement
90V to 264V, 47 to 63 Hz
Maximum VA
HP
4155B or 4156B: 450VA
HP
41501B
: 350 VA
Regulatory Compliance
EMC:
EN55011 (1991) Group 1, Class A,
EN50082
-
1 (1992)
Safety:
CSA C22.2 NO. 1010.1 (1992)
IEC 1010
-
1 (1990) + A2/EN61010
-1(1993)
Dimensions:
HP
4155B and 4156B:
235mm H
426mm W
600mm D
HP
41501B
:
190mm H
426mm W
600mm D
Weight (approx.):
HP
4155B and 4156B: 21kg
HP
41501B
: 16kg
(option 412, HPSMU + 2
PGU)
HP
4155B and
HP
4156B
Furnished Accessories
Triaxial cable, 4 ea. (
HP
4155B)
Kelvin triaxial cable, 4 ea. (
HP
4156B)
Coaxial cable, 4 ea.
Interlock cable, 1 ea.
Keyboard, 1 ea.
User manual, 1 set
Sample application program disk, 1 ea.
Sample VEE program disk, 1 ea
VXI
plug&play
drivers disk for the
HP
4155B &
HP
4156B, 1 ea.
VXI
plug&play
drivers disk for the
HP
E5250A, 1 ea
network
External keyboard:
Compatible PC
-
style 101
-
key
keyboard (mini DIN connector)
Interlock and LED connector
R-BOX control connector
Trigger in/out
SMU/PGU selector control connector
(
HP
41501B
)
Sample Application
Programs
Flash EEPROM test
TDDB
Constant I (Electromigration test)
V-Ramp Test
J-Ramp Test
SWEAT
GO/NO
-
GO Test
HCI degradation test
Sample VEE Program
Vth measurement using the
HP
4155B
or HP4156B, the E5250A, and a wafer
prober.
VXI
plug&play
Drivers
VXI
plug&play
drivers for the
HP
4155B and
HP
4156B
Supported VXI
plug&play
operating
systems:
Windows NT
Windows 95
Format
Tree-structured function panel.
Panel mode for hardware configura
-
tion and manual parameter setting.
Parameter mode for variable definition
and I/O configuration
.
HP
4145B ASP file cannot be read by
the HP4155B and 4156B.
Remote control:
HP
Instrument BASIC is remote
controllable from an external computer
via the
HP
-
IB interface.
HP
Instrument BASIC memory area
(supplemental data):
Program (text) area: 16K (byte)
Variable/stack area: 500K (byte)
Common variable area: 600K (byte)
Note: The memory size for common variable
is decreased when hard copy or disk operation
is performed.
Trigger
Input:
External trigger input starts a sweep or
sampling measurement or can be used
as a trigger input for continuing an
HP
Instrument BASIC program.
Input Level:
TTL level, negative or positive edge
trigger
Output:
External trigger can be generated by the
following events: start of each sweep
measurement step, start of each pulse
(SMU) output, while the stress source
is forcing, and Instrument BASIC
trigger out command execution.
Output Level:
TTL level, negative or positive logic
HP
4145B Data Com
-
patibility and
HP
4145B
Syntax Commands
Setup and data file
Measurement setup and data from the
HP
4145B can be loaded.
Accessory Specifications
HP
16442A Test Fixture
PGU port signal transfer charac
-
teristics
Specification Condition
The
supplemental information
and
typical
9
Page 9
Page 11
Channel Information
SMU:
6 channels (1 triaxial connector/
channel)
3 channels (1 Kelvin triaxial connector/
channel)
VSU:
2 channels (1 BNC connector/channel)
VMU:
2 channels (1 BNC connector/channel)
PGU:
2 channels (1 BNC connector/channel)
GNDU:
1 channel (1 triaxial connector)
INTLK: 6 pin connector
Supplemental Information (at
23C 5
C, 50% RH)
SMU channel:
Leakage current: 10pA max @200V
(Force or Sense
Common)
Stray capacitance: 15pF max
(Force or Sense
Common)
Stray capacitance: 3pF typical
(Force or Sense
Other SMU)
Residual resistance: 60m
typical
(Force, Sense)
Guard capacitance: 70pF max
(Force or Sense
Guard)
VSU channel residual resistance:
60m
typical
VMU channel residual resistance:
60m
typical
PGU channel characteristic impedance:
50
typical
GNDU channel residual resistance:
40m
typical (Force, Sense)
General Specifications
Temperature range
Operating: +5
C to +40
C
Storage:
-40C to +70
C
Humidity range
Operating: 5% to 80% RH
(no condensation)
Storage: 5% to 90% RH at 65
C
(no condensation)
Dimensions:
140 mm H
260 mm W
260 mm D
Weight (approx.): 2.5kg
teristics
Overshoot: < 5% of pulse amplitude
(@20ns leading and trailing time, 50
pulse generator source impedance,
50pF and 1M
in parallel load).
General Specifications
Dimensions:
50 mm H
250 mm W
275 mm D
Weight (approx.): 1.1kg
HP
16441A R
-
BOX
HP
16441A R
-
BOX adds a selectable
series resistor to the SMU output. You
can select the resistor from the setup
page, and the voltage drop due to the
series resistor is automatically
compensated for in the measurement
result.
Measurement limitations with the
HP
4155B/56B and R
-
BOX:ìIf you measure device characteristics
including negative resistance over
1M
with the
HP
4155B/56B and
R-BOX, there is a possibility that
they cannot be measured.
ì
There is a possibility that the
HP
4155B/56B cannot perform
measurements because of DUT
oscillations even with the R
-
BOX.
Whether oscillation occurs or not
depends upon the DUT and
measurement conditions.
Number of SMU channels that can add
resistor: 2
Resistor values:
1M, 100k, 10k, 0(each
channel)
Resistance accuracy:
0.3% (at 23
C5C, between input
-
output terminal)
Maximum voltage: 200V
Maximum current: 1A (0
selected)
Kelvin connection: Kelvin connection
is effective only when 0
is selected.
Supplemental Information (at
23C 5
C, 50% RH)
Leakage current: <100fA @ 100V
General Specifications
Dimensions:
72 mm H
250 mm W
270 mm D
Weight (approx.): 1.6kg
entries in the following specifications are not
warranted, but provide useful information
about the functions and performance of the
instruments. 23
C 5C, 50% RH.
HP
16440A
SMU/Pulse Generator
Selector
The HP16440A switches either an SMU
or PGU to the associated output port.
You can expand to 4 channels by adding
an additional
HP
16440A. The channel 1
PGU port provides
PGU OPEN
function, which can disconnect the PGU
by opening a semiconductor relay. The
HP
16440A cannot work without two
pulse generator units of the
HP
41501A/B (SMU and Pulse
Generator Expander).
Channel configurations:
Two channels (CH1, CH2)
CH1: INPUT ports: 2
(SMU and PGU, PGU port has
additional series semiconductor relay)
OUTPUT port: 1
CH2: INPUT ports: 2 (SMU and PGU)
OUTPUT port: 1
Voltage & Current Range
0.2A (AC peak)
40V
PGU
1.0 A
200 V
SMU
Max I
Max. V
Input port
Supplemental Information (at
23C 5
C, 50% RH)
SMU port leakage current:
< 100fA @100V
SMU port residual resistance (typical):
0.2
SMU port stray capacitance (typical
@1MHz):
Force
Common: 0.3pF
Force
Guard: 15pF
Guard
Common: 130pF
PGU port residual resistance: 3.4
PGU port OFF capacitance (typical):
5pF
PGU port OPEN capacitance (typical):
700pF (@ 1MHz, Vin
-
Vout = 0V)
Page 12
Page 10
For more information on Hewlett
-
Packard
Test & Measurement products, applications,
services, and current sales office listings, visit
our web site at http://www.
hp
.com/go/tmdir.
You can also contact one of the following
centers and ask for a test and measurement
sales representative.
Semiconductor Test Web Site:
http://www.
hp
.com/go/semiconductor
United States:
Hewlett
-
Packard Company
Test and Measurement Call Center
P.O. Box 4026
Englewood, CO 80155
-
4026
1-800-452-4844
Canada:
Hewlett
-
Packard Canada Ltd.
5150 Spectrum Way
Mississauga, Ontario
L4W 5G1
905-206-4725
Europe:
Hewlett
-
Packard
European Marketing Centre
P.O. Box 999
1180 AZ Amstelveen
The Netherlands
(31-20) 547
-
9900
Japan:
Hewlett
-
Packard Japan Ltd.
Measurement Assistance Center
9-1, Takakura
-
Cho, Hachioji
-
Shi,
Tokyo 192, Japan
Tel: (81) 426
-56-
7832
Fax: (81) 426
-56-
7840
Latin America:
Hewlett
-
Packard
Latin American Region Headquarters
5200 Blue Lagoon Drive
9th Floor
Miami, Florida 33126 USA.
305-267-4245/4220
Australia/New Zealand:
Hewlett
-
Packard Australia Ltd.
31-41 Joseph Street
Blackburn, Victoria 3130
Australia
1-800-629-485
Asia Pacific:
Tel: (852) 2599
-
7777
Fax: (852) 2506
-
9285
Taiwan:
(886-2) 717-9524
Korea:
(822) 769
-
0800
10
Page 13
Singapore:
(65) 1800
-
292-8100
©
Hewlett
-
Packard Company 1997
Data subject to change
Printed in USA. 7/97
5965-9619E
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