Agilent 4140B Specifications Sheet

Hewlett-Packard offers Advanced Technology

Introduction

HP’s 4140B pA Meter/DC Voltage Source provides a stable picoampere meter with maximum resolution of 10-15A and two programmable dc voltage sources. This, along with the programmable hold and step delay function, enables you to make synchronized measurements on a device or material.

Reliable, efficient pA current measurements need-

ed in R&D labs, production, and QA can now be made with just one instrument, the 4140B. Measurements on electronic components, insula-

tion materials, and especially semiconductor

devices are fast, convenient and accomplished with ease.

Stable

Current

Measurements

The 41409 makes very stable, high resolution current measurements to + 1.000 x

10.‘*A (1 x 10-15A maximum resolution) that were previously very difficult to make. The Zero offset cancels up to leakage current of test leads or fixtures in the Current (I, I-V) modes, and up to pF stray capacitance in the C-V mode. The zero capability, along with low noise test leads (16053A) and electrostatic/light shielded test fixture (16055A), lets you measure low pA currents with confidence.

100 x 10-15A

100

Synchronized pA Measurements

Two internal programmable dc sources provide staircase, ramp,

level outputs. The start, stop, and step

voltages can be set from -

with

10 mV

resolution and the hold/step delay times can be set depending on the characteristics of the device or material being tested. These features, together with

100 V

the pA measurement section, provide an

automatically synchronized measurement.

voltage

and stable

to +

100

HP-IB’ Operation

Systems integration is easily accomplished with the HP-IB interface, allowing remote programming of all front panel controls. Measurement data can be taken into the controller, processed, and then displayed in a variety of formats. This is especially effective in the manufacturing process where rapid feedback is essential.

*HP-IB (Hewlett-Packard Interface Bus) is Hewlett-Packard’s implementation of IEEE 488-l 975, ANSI Standard #MC1 .l

Selectable Function / Integration Times /Line Filter

The synchronized measurement capability allows current-voltage (I-V) and

capacitance-voltage (C-V) measurements in addition to the normal pA current (I)

measurements. Ranging is automatic or manual (up/down).

significant feature is the selectable

integration time (short, medium, or long).

This allows a trade-off of speed vs. accuracy in current measurements.

The filter function enables accurate 1 pA

measurements even when noise is times greater than the DC current being measured.

1000

Self Test/Analog Output

The automatic self test functionally verifies proper operation of the digital and analog circuitry.

The Analog Output supplies X-Y recorder outputs necessary for plotting I-V and C-V data. This includes measurement data, pen control, and upper voltages.

and lower limit

in Picoampere Current

Source Current Limit

To protect the material or device under test, the 4140B has a programmable current limit capability on both internal dc sources. Current limits of 10-4, lo-“, 10’2A are selected either manually or under HPIB control.

Voltage Sweep Functions

Flexible voltage sweep control capability allows operator to optimize any current

voltage measurement. Controls are AUTO/START, MAN (PAUSE) for changing step voltage/sweep direction during a measurement, STEP (I. t), and ABORT.

Measurements

PARAMETER MEASURED

DISPLAY

Key Features

I, I-V & c-v

Can also be used as a programmable source/function generator (DC, ramp

1 & staircase).

O.lpF - 1999 pF

Quasi-Static C-V Measurements

A capacitance measurement utilizing a ramp voltage (quasi-static or dc C-V measurement) is employed as one method of evaluating semiconductors. In the

4140B. capacitance is calculated from the

measured current I that is synchronized

with a ramp voltage dV/dt (C = I/dV/dt). Capacitance change can also be displayed as a percent of Cox (the capacitance of the oxide layer).

Parameter Selection / Data Entry

Parameter selection and data entry is accomplished either manually from- the front panel or via the HP-IB. Select the parameter (START V, STOP V, HOLD TIME...), enter the appropriate data

(voltage, time, or ramp rate) and press the ENTER key. Each data entry is stored in memory. The measurement is then made

automatically by pushing. the START key,

SWEEP MODE

AUTO/Manual (Pause)

The Unique Features of the 4140B Offer

. . .In Evaluating Electronic Components

When automation is required, the 4140B Typical Applications:

Types of Devices: can play a vital role in the evaluation of - Go/No go inspection in leakage cur- - Capacitors (ceramic, film, paper, mist,...) many kinds of electronic components on the rent/insulation resistance measure- - Mechanical devices (switches, relays, production line. It offers picoampere current ments connectors,. .) measurements that can be synchronized with

- Temperature/humidity characteristics - Printed circuit boards internal source voltages ( + 10 mV to f 100 of leakage current - Cables V) for fast, accurate, and efficient compo- - Transformers nent inspection.

. . .In Semiconductor Process Evaluation

An automatic evaluation system for the By adding the 4275A Multi-Frequency LCR semiconductor process is now possible with Meter, a complete evaluation of the the 4140B. Static characteristics of diodes or semiconductor process can be made to 10 FET’s can be measured and plotted with

0.001 pA resolution. The threshold level can measurements, doping profiles and the be obtained through data manipulation using analysis of minority carrier lifetimes. the HP-IB interface. This is made possible by the high speed data output (at 4 ms max-

imum rate) to the HP-IB Bus.

MHz. This includes high frequency C-V

FET Characteristics

a E

E 00 25 50

Drain Voltage (‘4

“0

“G

VG VG VC

Improved Reliability and Efficiency.. .

. . .In Evaluating Semiconductor Devices

The 41406 pA Meter/DC Voltage Source

offers outstanding flexibility in the measure- faster, more accurate results in semiconment of semiconductor devices. The capability of making current (I), current-voltage yield by prompt, flexible process evalua-

(I-V) and capacitance-voltage (C-V) tion. measurements using the internal dc sources is standard in the 4140B. These measure-

ments are made possible by internal ramp voltages, current ranges from + 1.000 pA to

+ 10 mA full scale with 0.5% basic accuracy

and an auto/manual voltage sweep mode.

These features enable the user to obtain Types of Devices: ductor device testing and to increase his photo isolator.. .)

Typical Applications: - MIS construction, P/N junction

- Quasi-static C-V characteristics

- Threshold voltage and static characteristics of FET’s

- DC parameters of IC’s

- Light/dark current of optical devices

- Electron beam secondary electron measurement

- Optical devices (photo transistor,

- K’s (logic, memory, linear.. .)

- Diodes, FET’s

. ..In the Evaluation of Insulation Materials

Resistance values of approximately 0.5 These measurements can make a major ohms to 10” ohms can be calculated from contribution to the reliability evaluation of - Film (plastics, mylar, paper...) the applied voltage and measured current many kinds of insulation materials. values. The hold and step delay timer func- - Solids (glass, ceramic, rubber.. .) tions allow the user to easily determine the one minute resistance value of a material. The analysis of polarization/absorption phenomena of insulating materials can also be accomplished with the 4140B.

Typical Applications:

- Change of insulation resistance vs. temperature and humidity

- Analysis of Absorption/Polarization phenomena

Types of Materials:

- Liquid (insulation, varnish.. .)

- Conductive rubber

Specifications

4 140B Characteristics and Specifications Measurement Functions: I, I-V and C-V

I (Current) : Operates as independent picoammeter

and programmable voltage sources

I-V (Current-Voltage): I-V characteristic measurements

using the programmable staircase or linear ramp voltage

source

C-V (Capacitance-Voltage): Quasi-static C-V characteristic

measurement using the linear ramp source

Voltage Sources: Two separate sources

VA:

* 100 volt programmable source/function generator

VB:

& 100 volt programmable DC voltage source

Measurement Function/Source Selection:

Voltage Sweep: Auto or Manual (Pause)

Current Measurements

Displays: Current, 3l/z digits with 2 Digit Annunciator

Voltage, 3l/2 digits

Measurement Range: + 1.000 x 10-12A to 1.000 x lo-*A

full scale in 11 ranges Overrange Capability: 100% on all ranges Range Selection: Auto and Manual Measurement Accuracy/Integration Time:

+ (% of rdg + counts) Short Medium Long

‘Accuracy for long mtegratlon time wth llne filter on 23OC

+5’C. humidity < 70X For short and medium lntegratton times. see

Reference Data sectton.

* ‘Integration times specified at 50 Hz. For 60 Hz operation. multiply

time by 5/6.

Voltage Burden: < 1OpV at full scale Internal emf: < 100 PV Maximum Input (Peak Value) :

Between Hi and Lo, *2V on 10m2 - 10m3A ranges

*3OV on lo-* - 10m5A ranges + 120V on 10m6 - lo- “A ranges

Between Lo and Guard, f 200V

Zero Offset: Cancels leakage current of test leads or test

fixtures Offset Range: 0 - + 100 x 10-15A Trigger: INT, EXT and HOLD/MAN Input Terminal: Triaxial Capacitance-Voltage (C-V) Measurement

Note: Capacitance is a calculated value derived from

the following equation: C(F) = measured current value (A)/ramp rate (V/s)

Measurement Ranges: O.OpF - 199.9pF and 200.0pF -

1999pF F.S. in two ranges

Ranging: Auto

% C: Capacitance change of device under test is displayed

as a percent of the set value of the oxide capacitance

(Cox = 100%)

% C Range: 0.0% - 199.9%

(VA

and

VB)

Cox Setting Ranges (2 ranges): O.lpF - 199.9pF and 200pF

- 1999pF

Capacitance Calculation Accuracy: Accuracy is dependent

on accuracy of both the current measurement and ramp voltage. (See chart in reference data.)

Zero Offset: Cancels stray capacitances of test fixtures and

test leads.

Offset Range: 0 - 1OOpF

High Speed I Data Output: Available with HP-IB interface.

Outputs current measurement data at 4ms intervals (maximum rate). Refer to reference data for typical accuracies.

DC Voltage Sources

Output Modes,

VB: Z-Z=

Voltage Ranges

VA: f A -Y -Yk =

(VA

and

VB):

0 - f lO.OOV and

0 + lOO.OV in two ranges, auto range only. Maximum Current: 10 mA, both sources. Voltage Sweep: Auto and Man (Pause), up/down step in

manual (Pause) mode. Sweep abort is standard

Operating Parameter Setting Ranges:

Start Voltage and Stop Voltage, 0 - f lO.OOV, O.OlV

steps; 0 - f lOO.OV, O.lV steps

Step Voltage, 0 - + lO.OOV, O.OlV steps

0 - + lOO.OV, O.lV steps

Hold Time, 0 - 199.9 seconds in 0.1s increments

0 - 1999 seconds in 1.0s increments

Step Delay Time, 0 - 10.00 seconds in 0.01s increments

0 - 100.0 seconds in 0.1s increments

Ramp Rate (dV/dt), O.OOlV/s - l.OOOV/s in O.OOlV/s

increments

Accuracy (at 23’C +5’C):

Output Voltage, + lOV, * (0.07% + 1lmV)

rf: lOOV, *(0.09% + 1lOmV)

Ramp Rate l ,

+ (0.2% + 10 pV,s) _ 0.00001 x Start Voltage (V) ;

Hold Time + 2s

+ (0.2% + SO yV,s) _ 0.00001 x Start Voltage (V) if

Hold Time + 2s

absolute value of start or stop voltage is > 1OV.

*Specified only when:

1. Temperature change is < 3.6°C/hour

2. Time after start of ramp is 2 2 seconds

Ramp Linearity (%):

*(O.l+

*(0.2+

0.0003 v/s

Ramp Rate (V/$)-Ramp Rate (V/s) x (Hold Time+ 2s)’

0.003 v/s

Ramp Rate (V/s))-Ramp

0.001 x Start Voltage (V)

Rate

(V/s) x (Hold Time+ 2s)

absolute value of start or stop voltage is > 1OV

Typical Values:

6 0.5%, 0

- +lOV

< 5% if absolute value of start or stop voltage is > 1OV

Start/Stop Voltage (ramp only):

* 20mV, ( + 200mV if

absolute value of start or stop voltage is 2 1OV)

Display of Output Voltage (ramp only): + (0.05% of rdg.

+ 16mV), + (0.09% of rdg. + 160mV) if absolute value

of start or stop voltage is 2 1OV

Step Voltage/Hold Time: Accuracy is dependent on

accuracy of power line frequency (50 Hz or 60 Hz)

Current Limit: lOOpA, 1mA and lOmA, + 10%

(VA

and

VB)

Output Terminals: BNC; L-GND

Reference Data

Current Measurementl.

Current Measurement Accuracy*

DC Voltage Source

Output Resistance: < 1Q Output Impedance: d 1R at 10 Hz, d 1OOQ at 100 Hz Programming Speed: For (/A-=): Approx. 2.5 ms

(lV/ms slew rate)

Ranging: Approx. 30 ms

* + (W of rdg. + counts), 23°C + 5OC

Current Ranging Times:

20 ms to 3.76 set when ranging up. (3.76 set is full ranging

time from 10-l’ amp range to 10~’ amp range.)

340 ms to 7.76 set when ranging down. (7.76 set is full rang-

ing time from 10.’ amp range to lo-l2 amp range.) Warmup Time: > 1 hour Typical Response Times, O-9096 of Final Value:

~~1

‘C is the capacitance value of the test lead and/or fixture 60 ms (50 Hz)

OT 50 ms (60 Hz) must be added when in FILTER ON mode

Common Mode Rejection Ratio: 2 120 dB (G 2 counts) Measurement Accuracy of High Speed I Data Output:

Capacitance Calculation Accuracy (98 rdg. + counts):

CURRENT MEASUREMENT WITH STAIRCASE VOLTAGE

STOP VOLTAGE

START

CURRENT MEASUREMENT WITH RAMP VOLTAGE

STOP VOLTAGE--

START VOLTAGE--

Analog Output

(I and I-V FUNCTIONS)

STEP DELAY TIME

START TIME

(I, I-V AND C-V FUNCTIONS)

HOLD TIME

START

(1, C and

VA)

DISPLAY CURRENT VALUE

TIME

Output Voltages:

DISPLAY

HOLD TIME

(OUTPUT DATA)

HOLD

TIME

100.0

+ 100”

1000

Start and stop voltages - 1OV to i- 1OV

Absolute value of start or stop voltages >, 1OV

&(13.2+dE) ?(6.0+ds) ~(2.3+~&)

k (13.2+dE )

f (3.0+ds ) k (0.8+d& 1

Note: Leakage current through resistance of DUT and test leads

causes additional error.

I-V and/or C-V Trigger Cycle (minimum values):

25ms (V, Mode:/ ,A) 50ms (V, Mode:_/ .A)

Trigger (Minimum Triggering Interval)

Trigger I Function ““HighSpeed I Data Output

INT

EXT” MAN”’ + 3ms

Approx. 200 ms Approx. 10 ms*

2 Integration Time

> 4 Ins

’ 50 Hz line frequency. For 60 Hz operation, multiply by 5/6.

* * External trigger from “1” state to “0” state > 1 p duration.

’ * * Triggered by front panel E&Man key.

* ’ ’ * Available only with HP-IB Interface

l.All owoble mox source capacitance <ZOO0 pf for current measurements

Accuracy: + (0.5% + 20 mV) Low Pass Filter: 3 position: OFF, 0.22s +20% and

1s + 20% applied to both

and I/C data outputs

Pen Lift Output: TTL Low Level (Q 0.8V) during sweep

period in I-V and C-V functions

Recorder Output Scaling: Pushbutton scaling of lower left

and upper right limits of X-Y recorder

Pushbutton

L.L.

(Lower Left)

VA Output I/C Output’

Minimum voltage value of start or stop voltages

Full scale value of

minus (-) output voltage

Zero (0) “& for C.”

I”“”

(Upper Right) of start OT stop voltages output voltage (e g / + 5V

‘See output voltage for each function in preceding chart

Maximum voltage value Full scale value of plus (+)

HP-18 Interface

HP-IB Interface Functions: SHl: Source Handshake Capability

AHl: Acceptor Handshake Capability

T5: Talker Capabilities of Basic Talker, Serial Poll and

Unaddress if MLA

L4: Listener Capabilities of Basic Listener and Unaddress

SRl: Service Request Capability

RLl: Remote/Local Capability DCl: Device Clear Capability DTl: Device Trigger Capability

Remote Controlled Functions: Measurement function,

current range, integration time, 1 data output trigger,

Voltage Sweep Cot-&Ok, Current

limit,

and

voltages, zero (offset), self test and parameter settings (voltages, sweep/hold/delay times)

Data Output: Measured Data (I, C and

Voltage Settings

(VA

and

VB)

VA)

Parameter Settings Set Value of Cox Front Panel Key Status

‘IEEE 488.1975 ANSI STD WW1.l

General Information

Operating Temperature: O°C Relative Humidity: d 70% at 40°C Power: 100, 120. 220V 4 lo%, 240V +5% - 10%;

48-66 Hz, 135VA maximum with any option

Dimensions: 426 mmW x 177 mmH x 498 mmD

(16.5” x 7” x 19.6”) Weight: 14.4 kg (31.7 Ibs,) Accessory Furnished: 16053A Test Leads and 16055A Test

Fixture

to 40°C

Accessories Furnished

16053A Test Leads: Consists of one triaxial cable, two each BNC-BNC cables and one connection plate with mating female panel-mount connectors (P/N 16053-

61001). Cables are one meter in length. The

16053A is useful for connecting to prober or user designed test fixtures.

16055A Test Fixture: For general device measurements Provides electrostatic and light

shielding for stable pA current

measurements. Consists of test

fixture. two connection plates

(one for clip leads and one for

T-05 10 pin sockets) to allow easy connection to devices

under test. Also furnished is a kit containing one each 8, 10.

and 12 pin socket, 10 each clip leads, and 10 each connection leads for TO-5 sockets.

Accessories Available

16054A Connection Selector: Provides a simple method to select appropriate connection of low lead for the pA meter section. Use in conlunction with the

16053A. Cannot be used with 16055A

Test Fixture

16056A Current Divider (10: 1): For use only on the 10 mA range to extend the measurement capability to 100 mA.

Available Accessories/Recommended Parts

Description

HP-IB Cable 0 5m

1 Om 2 Om

3 Om

HP Part/ Model #

10631D 10631A 106318 10631C

Triaxial Connectors

Female Male

BNC Connectors

Female Male

16055A

Accessories

Connection plate for clip leads

1250-0687 1250-1413 16053-24001

16053.24002

1250-1279 1250-0408

16055-65001

Connection plate with TO-5 socket

(10 pin)

Clip leads (5 each)

Connection leads for TO-5 socket

(5 each) TO-5 socket (8 pins) TO-5 socket (10 pins) TO-5 socket (12 pins)

Triaxial cable (lm) BNC-BNC cable (lm) Connection plate for 160538

16055-65002

16055.65003

16055-65004 1200-0238 1200-0239 1200-0240 16053-61002 16053-61003 16053-61001

Ordering Information

4140B pA Meter/DC Voltage Source Options

Option 907 Front Handle Kit (P/N 5061-0090) Option 908 Rack Flange Kit (P/N 5061-0078)

Option 090 Rack and Handle Kit (P/N 5061-0084) Option 910 Extra Manual

Accessories 16054A 16056A Current Divider (10: 1)

Connection Selector

For more information, call your local HP sales office listed in the telephone directory white pages. Ask for the Electronic Instruments Department. Or write to Hewlett-Packard:

U.S.A.:

P.O. Box 10301, Palo Alto, CA 94303-0890.

Ontario.

Japan:

Deer Creek Road, Palo Alto, CA 94304.

Yokogawa-Hewlett-Packard Ltd., 3-29-21, Takaido-Higashi, Suginami-ku, Tokyo 168. Elsewhere in the world, write to Hewlett-Packard Intercontinental, 3495

Printed in U.S.A. DATA SUBJECT TO CHANGE

Europe:

P.O. Box 999, 1180 AZ Amstelveen, The Netherlands.

Canada:

6877 Goreway Drive, Mississauga. L4V lM8,

5952-8837