Advantest R6246, R6245 Datasheet

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DC Voltage/Current Generators/Calibrators

Synchronized 2-Channel Measurement Function

R6245/6246

■ Synchronized 2-Channel Generation, Measurement

■ Measurement Resolution of 1 µV, 10 fA (SMU220-2), 100 pA (SMU62-20)

■ Source Range ±220 V, ±2 A (SMU220-2, 2.4 W)/±62 V, ±20 A (SMU62-20, 140 W)

■ Minimum Pulse Width 100 µs, Minimum Step 700 µs

R6245/6246

DC Voltage/Current Sources/Monitors

The R6245/6246 Series are DC voltage/current sources and monitors having source measurement units (SMUs) with 2 isolated channels. The series covers wide source and measurement ranges. It is ideal for measurement of DC characteristics of items ranging from separate semiconductors such as bipolar transistors, MOSFETs and GaAsFETs, to ICs and power devices. Further, due to the increased measuring speed and synchronized 2-channel measurement function, device I/O characteristics can be measured with precise timing at high speed which previously difficult to accomplish. Due to features such as the trigger link function and the sequence programming function which automatically performs a series of evaluation tests automatically, the new R6245/ 6246 enable much more efficient evaluation tests.

(Photo is R6245)

■ High Measurement Accuracy of ±620000 Columns,

0.02% High Measurement Resolution of 1 mV, 10 fA

■ High source Accuracy of ±62000 Columns, 0.03% Wide source Range of ±220 V, ±20 A

■ High Throughput, 0.8 V/µs (At Current

Measurement Range of 6 mA or more)

■ Wide Variety of Measurement Functions

• 4 Phenomenon Output (Source/Sink)

• Up to 5 V Remote Sense

• Minimum Step 700 µs Sweep Measurement

(Generation, Measurement, Data Storage)

• Range Switching without Discontinuous Output

• Pulse Measurement with Minimum Pulse Width of

100 µs

• Synchronized 2-Channel Measurement Function

• Search measurement function

Unit Configuration

Model name Channel A Channel B

R6245 SMU220-2 SMU220-2

R6246 SMU62-20 SMU220-2

SMU220-2: 24.2 W max. ±220 V/±2A SMU62-20: 200 W max. ±62 V/±20A

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DC Voltage/Current Generators/Calibrators

Specifications

All accuracy values are for 23˚C ±5˚C, RH 75% max., guaranteed for 6 months. One-day stability is guaranteed for 23˚C ±5˚C, RH 75% max. Measurement accuracy, one-day stability and temperature coefficient are guaranteed with auto zero on, reset time from 1 to 20 PLC.

Maximum output current:

SMU220-2 SMU62-20

±2 A up to 12 V ±20 A up to 7 V

±0.62 A up to 40 V ±10 A up to 20 V

±0.11 A up to 220 V ±2.2 A up to 62 V

Maximum output voltage, maximum follow-up voltage:

SMU220-2 SMU62-20

±220 V up to 0.11 A ±62 V up to 2.2 A

±40 V up to 0.62 A ±20 V up to 10 A

±12 V up to 2 A ±7 V up to 20 A

Voltage source/measurement range: Current source/measurement range:

Unit name

SMU62-20

SMU220-2

SMU62-20

Range Source range

600 mV 0 to ±620.00 mV 10 µV 0 to ±620.000 mV 1 µV

6 V 0 to ±6.2000 V 100 µV 0 to ±6.20000 V 10 µV

60 V 0 to ±62.000 V 1 mV 0 to ±62.0000 V 100 µV

200 V 0 to ±220.00 V 10 mV 0 to ±220.000 V 1 mV

6 nA 0 to ±6.2000 nA 100 fA 0 to ±6.20000 nA 10 fA

60 nA 0 to ±62.000 nA 1 pA 0 to ±62.0000 nA 100 fA

600 nA 0 to ±620.00 nA 10 pA 0 to ±620.000 nA 1 pA

6 µA 0 to ±6.2000 µA 100 pA 0 to ±6.20000 µA 10 pA

60 µA 0 to ±62.000 µA 1 nA 0 to ±62.000 µA 100 pA

600 µA 0 to ±620.00 µA 10 nA 0 to ±620.000 µA1 nA

6 mA 0 to ±6.2000 mA 100 nA 0 to ±6.20000 mA 10 nA

60 mA 0 to ±62.000 mA 1 µA 0 to ±62.0000 mA 100 nA

600 mA 0 to ±620.00 mA 10 µA 0 to ±620.000 mA 1 µA

2 A 0 to ±2.0000 A 100 µA 0 to ±2.00000 A 10 µA 6 A 0 to ±6.2000 A 100 µA 0 to ±6.20000 A 10 µA

20 A 0 to ±20.000 A 1 mA 0 to ±20.0000 A 100 µA

Setting Measurement

resolution range resolution

However, the measurement resolution at a reset time of 100 µs to 500 µs is as follows:

Reset time Measurement resolution (digits)

100 ms 10

200 ms 5

500 ms 2

Voltage/current compliance range:

Unit name

SMU62-20

SMU220-2

SMU62-20

*1 100 nA for SMU62-20

Range Maximum setting Minimum setting Setting resolution

600 mV 620.00 mV 1 mV 10 µV

6 V 6.2000 V 0.6201 V 100 µV

60 V 62.000 V 6.201 V 1 mV

200 V 220.00 V 62.01 V 10 mV

6 nA 6.2000 nA 10 pA 100 fA

60 nA 62.000 nA 6.201 nA 1 pA

600 nA 620.00 nA 62.01 nA 10 pA

6 µA 6.2000 µA 0.6201 µA 100 pA

60 µA 62.000 µA 6.201 µA*1 1 nA

600 µA 620.00 µA 62.01 µA 10 nA

6 mA 6.2000 mA 0.6201 mA 100 nA

60 mA 62.000 mA 6.201 mA 1 µA

600 mA 620.00 mA 62.01 mA 10 µA

2 A 2.0000 A 0.6201 A 100 µA 6 A 6.2000 A 0.6201 A 100 µA

20 A 20.000 A 6.201 A 1 mA

Measurement

Synchronized 2-Channel Measurement Function

R6245/6246

Accuracy: Includes calibration accuracy, one-day stability,

temperature coefficient, linearity

One-day stability: At constant power, load Temperature coefficient: At 0˚C to 40 ˚C, RH 75% max.

Voltage source/

compliance range

600 mV 0.03 + 400 µV 0.01 +200 µV 12 + 22 µV

6 V 0.03 + 1.3 mV 0.01 + 500 µV 12 + 55 µV

60 V 0.03 +13 mV 0.01 + 4 mV 12 + 600 µV

200 V 0.03 + 60 mV 0.01 +20 mV 12 + 2.5 mV

Current source/

compliance range

6 nA 0.5 + 6.5 pA + 60 fA 0.1 + 4 pA + 23 fA 150 + 400 fA + 1.8 fA

60 nA 0.5 + 18 pA +600 fA 0.1 + 8 pA +230 fA 120 + 1 pA + 18 fA

600 nA 0.2 + 150 pA + 6 pA 0.035 + 50 pA + 2.3 pA 45 + 6 pA + 180 fA

6 µA 0.05 + 1.5 nA + 60 pA 0.015 + 500 pA + 23 pA 18 + 60 pA + 1.8 pA

60 µA 0.04 + 15 nA + 600 pA 0.015 + 5 nA + 230 pA 18 + 600 pA + 18 pA

600 µA 0.03 + 150 nA + 6 nA 0.01 + 50 nA + 2.3 nA 12 + 6 nA + 180 pA

6 mA 0.03 + 1.5 µA + 60 nA 0.01 + 500 nA + 23 nA 12 + 60 nA + 1.8 nA

60 mA 0.03 + 15 µA + 600 nA 0.01 + 5 µA + 230 nA 12 + 600 nA + 18 nA

600 mA 0.045 + 150 µA + 6 µA 0.015 + 50 µA + 2.3 µA 15 + 6 µA + 180 nA

2 A 0.065 + 1.5 mA + 60 µA 0.03 + 500 µA + 23 µA 22 + 60 µA + 1.8 µA 6 A 0.15 + 1.5 mA + 60 µA 0.12 + 500 µA + 23 µA 40 + 65 µA + 1.8 µA

20 A 0.18 + 15 mA + 600 µA 0.15 + 5 mA + 230 µA 40 + 650 µA + 18 µA

Voltage measurement

range

600 mV 0.02 + 150 µV 0.008 + 80 µ␣ V 7 + 6 µV

6 V 0.02 + 180 µV 0.008 + 100 µV 7 + 7 µV

60 V 0.025 + 1 mV 0.01 + 500 µV 13 + 40 µV

200 V 0.025 + 5 mV 0.01 + 3 mV 13 + 150 µV

Current measurement

range

6 nA 0.5 + 5.5 pA + 60 fA 0.1 + 3.5 pA + 23 fA 150 + 350 fA + 1.8 fA

60 nA 0.5 + 10 pA + 600 fA 0.1 + 5.5 pA + 230 fA 120 + 600 fA + 18 fA

600 nA 0.2 + 50 pA + 6 pA 0.035 + 25 pA + 2.3 pA 40 + 3 pA +180 fA

6 µA 0.045 + 500 pA + 60 pA 0.015 + 220 pA + 23 pA 18 + 25 pA + 1.8 pA

60 µA 0.035 + 5 nA + 600 pA 0.015 +2.2 nA + 230 pA 15 + 250 pA +18 pA

600 µA 0.025 + 50 nA + 6 nA 0.01 + 22 nA + 2.3 nA 10 + 2.5 nA + 180 pA

6 mA 0.025 + 500 nA + 60 nA 0.01 + 220 nA + 23 nA 10 + 25 nA + 1.8 nA

60 mA 0.025 + 5 µA + 600 nA 0.01 + 2.2 µA + 230 nA 10 + 250 nA + 18 nA

600 mA 0.04 + 60 µA + 6 µA 0.01 + 32 µA + 2.3 µA 12 + 3.8 µA + 180 nA

2 A 0.06 + 600 µA + 60 µA 0.03 + 320 µA + 23 µA 20 + 38 µA +1.8 µA 6 A 0.15 + 600 µA + 60 µA 0.12 + 320 µA + 23 µA 40 + 38 µA + 1.8 µA

20 A 0.18 + 6 mA + 600 µA 0.15 + 3.2 mA + 230 µA 40 + 380 µA + 1.8 µA

Vo: Follow-up voltage (0 V to ±220 V) However, for current ranges, ±0.65 pA/˚C is added to the above values for temperature coefficients of 28˚C to 40˚C. Integration time: Measurement accuracy of 10 ms to 100 µs, the

following full-scale error is added to one day stability,

Measurement range

600 mV ␣ 8 11 18 25 36 57 80

6 V to 200 V 5 7 11 16 22 35 50

6 nA 10 14 22 32 45 71 100

60 nA 7 9 15 21 29 47 66

600 nA 6 8 12 17 25 39 55

6 µA to 2 A 5 7 11 16 22 35 50

Generation linearity:

Overall accuracy One-day stability Temperature coefficient

±(% of setting + range error) ±(ppm of setting + range error)/˚C

Overall accuracy One-day stability Temperature coefficient

±(% of setting + A + A x Vo/1V)

Overall accuracy One-day stability Temperature coefficient

±(% of reading + range error) ±(ppm of reading + range error)/˚C

Overall accuracy One-day stability Temperature coefficient

±(% of reading + A + A x Vo/1 V)

Reset time

10 ms 5 ms 2 ms 1 ms 500 µs 200 µs 100 µs

±(ppm of setting + A + A

±(ppm of reading + A + A

x Vo/1V)˚C

x Vo/1 V)/˚C

Units (digits)

±0.01% of range at 23˚C ± 5˚C, RH 75% or less

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DC Voltage/Current Generators/Calibrators

Synchronized 2-Channel Measurement Function

R6245/6246 (Continued From Previous Page)

Output noise: At no load and maximum load for voltage generation

(Vp-p), at the load resistances given for current generation (Ap-p)

Voltage/current

source range

600 mV — 60 µV 300 µV 5 mV 4 mV

6 V — 150 µV 500 µV 5 mV 4 mV

60 V — 1 mV 2 mV 6 mV 5 mV

200 V — 3 mV 4 mV 10 mV 6 mV

6 nA 100 M 500 fA 10 pA 100 pA 100 pA

60 nA 10 M 5 pA 100 pA 1 nA 1 nA

600 nA 1 M 50 pA 1 nA 10 nA 10 nA

6 µA 100 k 500 pA 10 nA 100 nA 100 nA

60 µA 10 k 5 nA 100 nA 1 µA1 µA

600 µA 1 k 50 nA 100 nA 10 µA 10 µA

6 mA 1 k 100 nA 1 µA 10 µA 10 µA

60 mA 1 k 1 µA 10 µA 10 µA 10 µA 600 mA 1 k 10 µA 20 µA 100 µA 100 µA 2 A, 6 A 100 100 µA 200 µA 200 µA 200 µA

20 A 10 1 mA 2 mA 2 mA 2 mA

resistance

Ripple noiseLoad

DC to 100 Hz FAST SLOW

DC to 10 Hz

High frequency noise

DC to 20 MHz

Switching noise:

Range switching noise

Output on/off noise

Range switching noise

Polarity switching noise

Response switching noise

Power source off noise

Voltage source 250 mV + 20 nA x R1 50 mV Current source 250 mV/R1 + 20 nA 100 µA

Voltage source 150 mV 50 mV Current source 250 mV/R1 + 20 nA 50 µA

Voltage measurement 150 mV 50 mV Current measurement 250 mV/R1 50 µA

Voltage source 150 mV 50 mV Current source 50 mV/R1 + 1 nA 50 µA

Voltage source 200 mV 50 mV Current source 80 mV/R1 + 20 nA 50 µA

Maximum value (p-p) Typical value (p-p)

0.6 V 0.6 V

R1 indicates load resistance (Ω) Typical values obtained at voltage range 6 V or less, current range 6

mA to 20 A, R1 = 1 kΩ

Settling time: When the current range is 6 mA to 20 A, the time

required to reach ±0.03% of the final value when the output is changed from zero to full-scale. For simple resistance load, load capacity 2.5 pF max., compliance settings at full-scale

Item FAST SLOW

Voltage generation 300 µs 2.5 ms Current generation 500 µs 5.5 ms

Line regulation: ±0.0017% of range, at AC 100 V ± 10% Load regulation:

Voltage generation: ±0.0017% of range or less, with 4-wire

connection at maximum load

Current generation: ±5 ppm x Vo/1V or less, Vo: follow-up voltage

(0 V to ± 220 V)

Output resistance: With 2-wire connection, excluding output

cable

Maximum capacity load: Maximum non-oscillating capacity load

when voltage generation or voltage compliance is operating

Current range Maximum load capacity

6 nA 1 kΩ 3.22 E + 13 Ω 0.01 µF

60 nA 100 Ω 3.22 E + 12 Ω 0.01 µF

600 nA 10 Ω 3.22 E + 11 Ω 0.01 µF

6 µA1 Ω 3.22 E + 10 Ω 0.01 µF

60 µA 200 mΩ 3.22 E + 9 Ω 0.1 µF

600 µA 100 mΩ 3.22 E + 8 Ω 1 µF

6 mA 100 mΩ 3.22 E + 7 Ω 10 µF

60 mA 100 mΩ 3.22 E + 6 Ω 100 µF 600 mA 100 mΩ 3.22 E + 5 Ω 1000 µF 2 A, 6 A 100 mΩ 1 E + 5 Ω 1000 µF

20 A 100 mΩ 1 E + 4 Ω 1000 µF

Output resistance

Voltage source Current source

Standard accessory cable (A01010) resistance: 0.2 Ω max. Maximum inductive load: Maximum non-oscillating inductive load

when voltage generation or voltage compliance is operating

Current source/compliance range Maximum inductive load

6 nA to 60 µA 50 µH

600 µA 300 µH

6 mA 500 µH

60 mA to 20 A 1000 µH

CMRR: With 1 kΩ unbalanced impedance between LO and GUARD

terminals, DC and AC 50/60 Hz ± 0.09%

Item

Voltage measurement 60 dB 120 dB

Current measurement 0.01%/1 V 1 ppm/1 V

100 µs to 10 ms 1 PLC to 20 PLC

Reset time

NMRR: At AC 50/60 Hz ± 0.09%

Item

Voltage measurement 0 dB 60 dB

Current measurement 0 dB 60 dB

100 µs to 10 ms 1 PLC to 20 PLC

Reset time

External measurement input: When the current range is measuring

an applied voltage at the MEASURE INPUT terminal, the measured voltage is displayed in the set current range

Voltage measurement accuracy ±(0.02% of reading + 120 µV)*1 Current display accuracy ±(0.375% of reading + 7.6 µA)*2 Maximum allowable applied voltage ±250 V peak max.

External analog input: When an external analog signal is added

from the ANALOG INPUT terminal, the output added to the generation value of the set generation range can be obtained. 2 types of gain can be selected. Input and output ranges are decided by the source range.

Voltage source accuracy ±(0.16% of setting + 3.8 mV)*1 Current source accuracy ±(0.5% of setting + 10 µA)*2 Maximum input frequency FAST: 10 kHz, SLOW: 1 kHz, at ±6 V

output voltage, 6 mA to 6 A current range, full-scale

Maximum allowable applied voltage ±10 V peak max. Input resistance Approx. 10 M Ω

V monitor: Voltage between the HI SENSE and LO SENSE terminals

divided at ±6.2 V full-scale is output at V MONITOR terminal

Monitor accuracy ±(0.01% of reading + 1 mV)*1 Output resistance 500 Ω max.

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DC Voltage/Current Generators/Calibrators

Synchronized 2-Channel Measurement Function

R6245/6246

I monitor: Voltage which has been converted from current to voltage

at output current ±6.2 V full-scale is output at I MONITOR terminal

Monitor accuracy ±(35% of reading + 7 mV + 60 µV × Vo/1 V)*2 Vo; Follow-up voltage (0 V to ±220 V) Output resistance 500 Ω max.

*1: Typical value (at 6 V range) *2: Typical value (at 60 mA range)

Generation/Measurement Functions DC generation/measurement: Generation and measurement of DC

voltage and current

Pulse generation/measurement: Generation and measurement of

pulse voltage and current

Sweep generation/measurement: Fixed, linear, log, random, pulse,

linear pulse, log pulse, random pulse

Sweep modes: Single/reverse, repeat 2-channel simultaneous generation/measurement: Synchronized

channel A and B generation and measurement of DC, pulse and sweep

Search Measurement :Binary search measurement. Linear search

measurement. Programming functions : Sequence programming function. All the above functions can be programmed. Max. programs: 128 characters × 100 programs

High-speed sequence programming function. Up to 20 items of DC measurement, pulse measurement, binary/ linear search measurement, time parameter, 16-bit digital output data, and conditional jumps can be programmed.

Results (Lo, Go, Hi, etc.) are output from the handler interface. * Search measurement and programming set via GPIB only. Generation data memory capacity: 2,048 data items/channel (when

random or random pulse is used)

Measurement data memory capacity: 2,048 data items/channel Trigger methods: Measurement or generation can be done with

autotrigger (free-run) and external trigger

Output methods: Bipolar, floating & guarded Output terminals: Tri-axial/binding post *1 Output types: HI OUTPUT, HI SENSE, LO OUTPUT, LO SENSE,

DRIVING GUARD (DG), GUARD

Maximum applied voltage between terminals:

Between HI and LO; 225 Vp-p max. (SMU220-2)/65 Vp-p max. (SMU62-20) Between LO and GUARD; 50 Vp-p max. Between GUARD and outer casing; 500 Vp-p max.

Maximum remote sensing voltage: ±5 V max. *2 Voltage measurement input resistance: 3.22 × 1013 Ω min.

(SMU220-2)/3.22 × 109 Ω min. (SMU62-20)

Voltage input leakage current: ±5 pA/±1 nA max. *3 Guard offset voltage: ±3 mV max. Maximum allowable card capacity: 1000 PF max. *4 Maximum allowable shield capacity: 5000 PF max. *5

*1: SMU220-2/SMU62-20 *2:

Voltage between the HI OUTPUT and HI SENSE terminals, between the LO OUTPUT and LO SENSE terminals and between the HI SENSE and LO SENSE terminals are within the range of the maximum output voltage. Includes voltage drop due to cable resistance.

*3:

When doing ISVM measurement at current generation range of 6 nA/60 µA

*4: Between HI (OUTPUT or SENSE) and DG terminals *5: Between DG and LO (OUTPUT or SENSE) terminals

GPIB interface: IEEE standard, conforms with 488-1978

SH1, AH1, T6, L4, SR1, RL1, PP0, DC1, DT1, C0, E2

Digital output: Internal status or 16 bit setting output

5 V pull-up with 10 kΩ resistance at O/C

Trigger link: Used for synchronizing 2 units of the R6245/6246

Series for generation or measurement. TTL level I/O.

Scanner control: For use in scanner control with ADVANTEST

R7210 or other models. TTL level output.

Trigger input: Used at measurement start, sweep step up, pulse

output trigger. TTL negative pulse 10 ms min.

Trigger output: Used at measurement end, sweep end. Output TTL

negative pulse approx. 15 ms

Interlock input: Used when outputting by interlocking with a fixture Setting Times Hold time setting range:

Setting range Resolution Setting accuracy

100 ms to 65.5350 s 100 µs ± (2% + 40 µs)

Measure delay time setting range:

Setting range Resolution Setting accuracy

100 µs to 65.53500 s 10 µs ±(2% + 40 µs)

Pulse width, pulse period setting range:

Pulse period (Tp) Pulse width (Tw)* Resolution

700 µs to 655.35 ms 100 µs to 655.35 ms 10 µs

655.4 ms to 6.5535 s 100 µs to 6.5535 s 100 µs

6.554 s to 65.535 s 1 ms to 65.535 s 1 ms

* The pulse width resolution is always the same as the pulse period, so the possible setting

range for the pulse width is decided by the pulse period setting.

Setting accuracy:

Pulse period (Tp) ±(2% + 40 µs) Pulse width (Tw) ±(2% + 10 µs)

General Specifications Display:

R6245/6246 Fluorescent display CRT and LED display R6245A LED display only (POWER, ON, FAILED, CH COMMON

SHORT, OPERATE, 4 WIRE, LO-G SHORT)

Setting method:

R6245/6246 By keys, GPIB remote R6245A By GPIB remote only

Preheating time: 30 minutes or more until specified accuracy is

attained

Operating conditions: 0˚C to 40˚C, 85% RH Storage conditions: -25˚C to +70˚C Power requirements: Specify at time of ordering

Option no. Standard Option 32 Option 42 Option 44

Power voltage 90 V to 110 V 108 V to 132 V 198 V to 242 V 216 V to 250 V

Power frequency: 48 Hz to 66 Hz Power consumption: 350 VA (R6245/6245A)/850 VA max. (R6246) Dimensions: Approx. 424 (W) × 177 (H) × 500 (R6245/

6245A)/550 (R6246) (D) mm

Mass: 25 kg max. (R6245/6245A)/33 kg max. (R6246) Accessories:

Item Model Stock no. R6245/6245A R6246

Power Cable

Input/Output Cable A01010 DCB-FM1645 × 01 2 1

A01402 DCB-DD2428 × 01 1 0 A01437 DCB-DD5641 × 01 0 1

Accessories (Sold Separately) PR624501-FJ Semiconductor Parameter Auto Measurement

Software

R12701 Test Fixture A01009-050 Input/Output Cable (0.5 m) A01009-100 Input/Output Cable (1 m) A01009-150 Input/Output Cable (1.5 m) A01009-200 Input/Output Cable (2 m) A01010 Input Cable (1 m) A01038 Input/Output Cable (for R6246 channel A) A02710 Rack Mount Set A (EIA standard, with front handle) A02711 Rack Mount Set A (JIS standard, with front handle) A02720 Rack Mount Set B (EIA standard, without front

handle)

A02721 Rack Mount Set B (JIS standard, without front

handle)

A02703 Front Handle Set A02730 Rack Flange Set A (EIA standard) A02731 Rack Flange Set A (JIS standard) A02615 Slide Rail Set

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