Advanced Energy Paramount User Manual

Paramount® Plus Generators

User Manual

November 2018 57023942-00E

Advanced Energy®

Paramount® Plus Generators

 

COPYRIGHT

This manual and the information contained herein are the proprietary property of Advanced Energy Industries, Inc.

No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries, Inc. Any unauthorized use of this manual or its contents is strictly prohibited. Copyright © 2014-2018 Advanced Energy Industries, Inc. All Rights Reserved.

DISCLAIMER AND LIMITATION OF LIABILITY

The information contained in this manual is subject to change by Advanced Energy Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no warranty of any kind whatsoever, either expressed or implied, with respect to the information contained herein. Advanced Energy Industries, Inc. shall not be liable in damages, of whatever kind, as a result of the reliance on or use of the information contained herein.

PRODUCT USAGE STATEMENT

  WARNING:

Read this entire manual and all other publications pertaining to the work to be performed before you install, operate, or maintain this equipment. Practice all plant and product safety instructions and precautions. Failure to follow instructions can cause personal injury and/or property damage. If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment might be impaired. All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury.

Advanced Energy Industries, Inc., (AE) provides information on its products and associated hazards, but it assumes no responsibility for the after-sale operation of the equipment or the safety practices of the owner or user.

NEVER DEFEAT INTERLOCKS OR GROUNDS.

 

TRADEMARKS

All Advanced Energy trademarks are the property of Advanced Energy Industries, Inc. For the list of Advanced Energy trademarks, visit: http://www.advanced-energy.com/en/ Trademarks.html. Any unauthorized use of Advanced Energy trademarks is prohibited.

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Advanced Energy®

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All other trademarks are the property of their respective owners.

CUSTOMER FEEDBACK

Advanced Energy’s technical writing staff has carefully developed this manual using research-based document design principles. However, improvement is ongoing, and the writing staff welcomes and appreciates customer feedback. Please send any comments on the content, organization, or format of this user manual to:

• [e-mail]

To order a manual, please contact Technical Support:

• [e-mail]

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Table of Contents

Chapter  1. Safety and Product Compliance Guidelines

Important Safety Information .................................................................................	1-1
Using This Manual ................................................................................................	1-1
Danger, Warning, and Caution Boxes ...................................................................	1-2
Safety Guidelines ..................................................................................................	1-3
Rules for Safe Installation and Operation .......................................................	1-3
Interpreting Product Labels ...................................................................................	1-3
Product Compliance ..............................................................................................	1-5
Product Certification .......................................................................................	1-5
Safety and EMC Directives and Standards ....................................................	1-5
Conditions of Use ...........................................................................................	1-5
Environmental Compliance .............................................................................	1-6
Chapter 2. Product Overview
Platform Description ..............................................................................................	2-1
Theory of Operation ..............................................................................................	2-1
Operation Overview ........................................................................................	2-1
AC Input ..........................................................................................................	2-2
DC Switching Mode Power Supply .................................................................	2-2
RF Section ......................................................................................................	2-2
Logic/Control Section .....................................................................................	2-2
Chapter 3. Specifications
Specifications ........................................................................................................	3-1
Chapter 4. Communication Controls
Basic LED Status Display .....................................................................................	4-1
25-Pin User Port ....................................................................................................	4-2
25-Pin User Port Connector ...........................................................................	4-2
Satisfying Minimal Requirements for the 25-Pin User Port ..................... .......	4-2
25-Pin User Port Cabling Requirements ........................................................	4-3
Apex Compatible 25-Pin User Port .................................................................	4-3
Pin Descriptions for Apex Compatible User Port .....................................	4-3
Wiring Diagrams for Apex Compatible User Port .....................................	4-7
Custom 15-Pin User Port ....................................................................................	4-12
Custom 15-Pin User Port Connector ............................................................	4-12
Satisfying Minimal Requirements for the Custom 15-Pin User Port .............	4-13

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Custom 15-Pin User Port Cabling Requirements .........................................	4-13
Custom 15-Pin User Port Signal and Pin Descriptions	................................. 4-13
Pin Description Table .............................................................................	4-13
Wiring Diagrams for Custom 15-Pin User Port ......................................	4-16
AE Bus Interface (Host Port) ...............................................................................	4-19
Host Connector .............................................................................................	4-20
Host Port Pin Descriptions ............................................................................	4-20
AE Bus Transmission Parameters ................................................................	4-21
Host Port DIP Switches ................................................................................	4-22
DIP Switch and Switch Settings .............................................................	4-22
Switches .................................................................................................	4-22
Setting the Baud Rate ............................................................................	4-22
Setting the Communication Mode ..........................................................	4-23
Setting the Unit AE Bus Address ...........................................................	4-23
AE Bus Protocol ...........................................................................................	4-24
AE Bus Header Byte ..............................................................................	4-25
AE Bus Command Number Byte ......................................................	..... 4-25
AE Bus Optional Length Byte ...........................................................	..... 4-25
AE Bus Data Bytes ...........................................................................	..... 4-26
AE Bus Checksum Byte .........................................................................	4-26
Creating an Ideal Communications Transaction ...........................................	4-27
T0: Host Transmits Message Packet .....................................................	4-27
T1: Unit Verifies Host Transmission Packet ...........................................	4-27
T2: Unit Transmits Response to Host ....................................................	4-28
T3: Host Acknowledges Unit Response .................................................	4-28
AE Bus Communications Transaction Example ...............................	..... 4-28
Ethernet Interface ................................................................................................	4-29
Ethernet Connector and Indicators ...............................................................	4-29
Ethernet Port Pin and Signal Descriptions ...................................................	4-30
TCP Protocol (FC100) ..................................................................................	4-30
Establishing a Connection ................................................................	..... 4-30
Data Encoding ..................................................................................	..... 4-31
Using FC100 .................................................................................................	4-32
FC100 Send Packet Format .............................................................	..... 4-32
FC100 Response Packet .......................................................................	4-33
FC100 Error Packets ........................................................................	..... 4-33
FC100 Example .....................................................................................	4-34
AE Host Commands ............................................................................................	4-35
AE Host Command Status Response (CSR) Codes ....................................	4-36
AE Host Command Set ................................................................................	4-37
PROFIBUS Interface .........................................................................................	4-162
PROFIBUS Connector ................................................................................	4-162
PROFIBUS Port Pin and Signal Descriptions .............................................	4-162
PROFIBUS Cabling and Termination .........................................................	4-163
AE PROFIBUS Protocol .............................................................................	4-163
PROFIBUS GSD Files .........................................................................	4-164
Setting the Unit PROFIBUS Network Address .....................................	4-164
To Set the Unit PROFIBUS Address Through an External DIP
Switch .................................................................................................	4-164
PROFIBUS Master Reset Command ...................................................	4-165

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Baud Rate ............................................................................................		4-165
Watchdog Timer ...................................................................................		4-165
PROFIBUS-Specific Errors ..................................................................		4-165
PROFIBUS Data Consistency ..........................................................	...	4-165
Transmission Rates and The Handshake Feature	........................... ...	4-166
PROFIBUS Command Structure ................................................................		4-166
PROFIBUS Download Packet ..............................................................		4-167
PROFIBUS Upload Packet ..................................................................		4-167
PROFIBUS Upload Packet Data Bytes 0 and 1 ...................................		4-168
PROFIBUS Upload Packet Data Bytes 8 to 13 ....................................		4-168
Refresh Rates in the Upload Packet ....................................................		4-168
PROFIBUS Commands ..............................................................................		4-169
PROFIBUS Command Status Response (CSR) Codes ......................		4-169
PROFIBUS Command Set ...................................................................		4-170
DeviceNet Interface ...........................................................................................		4-219
DeviceNet Port ...........................................................................................		4-219
DeviceNet Port Pin Descriptions ................................................................		4-220
DeviceNet Control Panel ............................................................................		4-220
DeviceNet Control Panel LEDs ............................................................		4-220
Control Panel Rotary Switches ............................................................		4-222
EtherCAT Interface ...........................................................................................		4-222
EtherCAT Ports, Device ID, and Status LEDs ............................................		4-223
Port Connectors ...................................................................................		4-223
Device ID ..........................................................................................	...	4-224
Status LEDs .........................................................................................		4-224
LED States ...........................................................................................		4-225
Interlocks ...........................................................................................................		4-226
Hardware Process Interlocks and Interlock Circuit .....................................		4-226
Chapter 5. Installation, Setup, and Operation
Preparing to Install the Unit ...................................................................................		5-1
Spacing Requirements ...................................................................................		5-1
Installation Requirements ...............................................................................		5-1
Unpacking the Unit .........................................................................................		5-2
Lifting the Unit .................................................................................................		5-2
Installing the Unit ...................................................................................................		5-3
Grounding .......................................................................................................		5-3
Connecting Cooling Water ..............................................................................		5-3
Water Control Connector ................................................................................		5-4
Water Control Connector and Pin Descriptions .......................................		5-4
Connecting Output Power and Satisfying RF Connector Interlock .................		5-5
Connecting AC Input Power ...........................................................................		5-5
HARTING AC Power Connector ..............................................................		5-5
To Connect AC Input Power with the Harting Connector .......................		5-12
Connecting I/O and Auxiliary Connectors .....................................................		5-13
First Time Operation ...........................................................................................		5-13
Normal Operation ................................................................................................		5-14
Unit Features .......................................................................................................		5-14

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Frequency Tuning ...............................................................................................		5-15
Understanding Frequency Tuning ................................................................		5-15
Tuning the Frequency ...........................................................................		5-15
RF On Tuning ...................................................................................	.....	5-15
Retuning .................................................................................................		5-16
Frequency Tuning Parameters .....................................................................		5-16
Common Exciter ..................................................................................................		5-19
Understanding CEX Operation .....................................................................		5-19
Phase Locking Generators ...............................................................	.....	5-19
Phase Locking Modes ............................................................................		5-19
CEX Parameters ...........................................................................................		5-20
Setting Up CEX Mode Operation ..................................................................		5-21
Pulsing Output .....................................................................................................		5-22
Understanding Pulsing .................................................................................		5-22
Pulsing ..................................................................................................		5-22
Pulsing Parameters ......................................................................................		5-22
Setting Up Pulsing Master and Slave ...........................................................		5-24
Enabling Pulsing and Setting Pulsing Parameters .......................................		5-24
Setting Up Slave Mode Pulsing with Short RF On Times .............................		5-25
Turning RF On When Using Master/Slave Pulsing .................................	.....	5-25
Arc Management .................................................................................................		5-26
Understanding Arc Management ..................................................................		5-26
Arc Management Algorithm ..............................................................	.....	5-26
Arc Detection ................................................................................................		5-27
Detecting Changes in Gamma ...............................................................		5-27
Detecting Reflected Power Greater Than the Reflected Power Arc
Detection Threshold .............................................................................		5-27
Receiving an Arc Indication Signal ...................................................	.....	5-28
Arc Management ..........................................................................................		5-28
Arc Management Parameters .......................................................................		5-29
Setting Up Arc Management ........................................................................		5-31
To Set Up Arc Management for a Standalone Unit ................................		5-32
To Set Up Arc Management for a Master/Slave System .......................		5-32
To Set Up Arc Management for a Symmetrical System ................... .....		5-33
To Set Up Arc Management for a Daisy Chain System .........................		5-33
VA Limit Mode .....................................................................................................		5-35
Understanding VA Limit Mode ......................................................................		5-35
Recipe Mode .......................................................................................................		5-35
Understanding the Recipe Feature ...............................................................		5-35
Recipe Parameters .......................................................................................		5-36
Maintenance ........................................................................................................		5-39
Consumable Parts ........................................................................................		5-39
Chapter 6. Troubleshooting and Global Services
Internal Diagnostics ...............................................................................................		6-1
To Run Internal Diagnostics ...........................................................................		6-1
Troubleshooting Checklist .....................................................................................		6-3
Power Limit LED Troubleshooting ..................................................................		6-5

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Measured Unit Output Deviating from Setpoint ................................	....... 6-6
Locating the Problem ...............................................................................	6-7
External Load Checks - Open/Short RF Output Path .....................................	6-9
Troubleshooting Using Error Codes ....................................................................	6-10
Accessing Error Codes .................................................................................	6-10
Fault and Warning Types and Clearing Faults .............................................	6-10
Error Code Table ..........................................................................................	6-11
AE Global Services .............................................................................................	6-15
Primary Contact Information .........................................................................	6-16
Alternate Contact Information .......................................................................	6-16
Returning Units for Repair ...................................................................................	6-16
Purging Water for Transport or Storage .......................................................	6-16
Decommissioning the Unit ..................................................................................	6-17

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List of Tables

Table 1-1. Where to find information (user manual or product specification) ........	1-1
Table 4-1. Status LEDs .........................................................................................	4-1
Table 4-2. Jumpers on a dummy plug to satisfy minimal signal
requirements ........................................................................................................	4-3
Table 4-3. 25-pin Apex User port pin descriptions ...............................................	4-3
Table 4-4. Jumpers on a dummy plug to satisfy minimal signal requirements
for custom 15-pin port ........................................................................................	4-13
Table 4-5. Custom 15-pin User port pin descriptions .........................................	4-14
Table 4-6. Host port pin descriptions ..................................................................	4-20
Table 4-7. DIP switch settings for variable baud rate, switches 6 and 7 .............	4-22
Table 4-8. DIP switch settings for communication mode, switch 8 .....................	4-23
Table 4-9. AE Bus address settings ....................................................................	4-23
Table 4-10. AE Bus byte structure ......................................................................	4-26
Table 4-11. Ethernet port pin and signal descriptions .........................................	4-30
Table 4-12. Format for FC100 send packet ........................................................	4-32
Table 4-13. Format for FC100 response packet .................................................	4-33
Table 4-14. Format for FC100 Modbus/TCP exception error packet ..................	4-34
Table 4-15. Format for FC100 CSR packet ........................................................	4-34
Table 4-16. Packet format for command 14 send ..............................................	4-34
Table 4-17. Packet format for command 14 response .......................................	4-35
Table 4-18. AE command status response (CSR) codes ...................................	4-36
Table 4-19. AE Host Commands ........................................................................	4-37
Table 4-20. PROFIBUS port pin and signal descriptions ..................................	4-162
Table 4-21. Baud rate and cable lengths ..........................................................	4-163
Table 4-22. Configuration of PROFIBUS download packet bytes .....................	4-167
Table 4-23. PROFIBUS upload packet status bit flags ....................................	4-168
Table 4-24. PROFIBUS command status response (CSR) codes ....................	4-169
Table 4-25. PROFIBUS Commands .................................................................	4-170
Table 4-26. DeviceNet port pin descriptions .....................................................	4-220
Table 4-27. DeviceNet module status (MOD) LED ...........................................	4-220
Table 4-28. Network status (NET) LED .............................................................	4-221
Table 4-29. Run LED (green) ............................................................................	4-224
Table 4-30. Error LED (red) ..............................................................................	4-224
Table 4-31. LED indicator states and flash rates ..............................................	4-225
Table 4-32. Hardware process interlocks ..........................................................	4-226
Table 5-1. Water control connector pins ...............................................................	5-4
Table 5-2. HARTING connector pin descriptions on rear of an MF 5002 unit .......	5-6
Table 5-3. HARTING connector part numbers for an MF 5002 unit ......................	5-6
Table 5-4. HARTING connector pin descriptions on rear of an MF 15002
unit .......................................................................................................................	5-7
Table 5-5. HARTING connector part numbers for an MF 15002 unit ....................	5-7
Table 5-6. HARTING connector pin descriptions on rear of an HF 1527 or
HF 3027 unit ........................................................................................................	5-8
Table 5-7. HARTING connector part numbers for an HF 1527 or HF 3027
unit .......................................................................................................................	5-8

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Table 5-8.	HARTING connector pin descriptions on rear of an HF 3513 unit		....... 5-9
Table 5-9.	HARTING connector part numbers for an HF 3513 unit ......................		5-9
Table 5-10. HARTING connector pin descriptions on rear of an HF 5513 or
VHF 3060 unit ....................................................................................................			5-10
Table 5-11. HARTING connector part numbers for an HF 5513 or VHF
3060 unit ............................................................................................................			5-10
Table 5-12. HARTING connector pin descriptions on rear of a VHF 6060 or
VHF 7040 unit ....................................................................................................			5-11
Table 5-13. HARTING connector part numbers for a VHF 6060 or VHF
7040 unit ............................................................................................................			5-11
Table 5-14. I/O and auxiliary ports ......................................................................			5-13
Table 5-15. Frequency tuning parameters ..........................................................			5-16
Table 5-16. CEX parameters ..............................................................................			5-20
Table 5-17. Pulsing parameters ..........................................................................			5-23
Table 5-18. Arc management parameters ..........................................................			5-29
Table 5-19. Recipe feature parameters ..............................................................			5-37
Table 6-1.	Using LED states for troubleshooting ..................................................		6-3
Table 6-2.	Error codes ........................................................................................		6-11

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List of Figures

Figure 4-1. User port connector, 25 pin ................................................................	4-2
Figure 4-2. REFL PWR MONITOR (pins 2 and 15) ..............................................	4-7
Figure 4-3. FWD/LOAD PWR MONITOR (pins 3 and 16) ....................................	4-7
Figure 4-4. RF PWR ON (pins 4 and 17) ..............................................................	4-8
Figure 4-5. SETPOINT (pins 5 and 18) .................................................................	4-8
Figure 4-6. DC BIAS/POWER REGULATION (pins 6 and 19) .............................	4-8
Figure 4-7. DC BIAS INPUT (pins 7 and 20) .........................................................	4-9
Figure 4-8. FWD/LOAD PWR REGULATION (pins 8 and 21) ..............................	4-9
Figure 4-9. INTERLOCK LOOP (pins 23 and 10) ...............................................	4-10
Figure 4-10. CEX LOCK (pins 12 and 25) ...........................................................	4-10
Figure 4-11. +15 VDC (pins 13 and 21) ..............................................................	4-11
Figure 4-12. SETPOINT STATUS (pins 14 and 1) ..............................................	4-11
Figure 4-13. OVERTEMP (pins 22 and 9) ...........................................................	4-11
Figure 4-14. DC BUS OK (pins 24 and 11) .........................................................	4-12
Figure 4-15. 15-pin subminiature-D female connector ........................................	4-12
Figure 4-16. REFLECTED POWER MONITOR (pins 2 and 6) ...........................	4-16
Figure 4-17. FORWARD POWER MONITOR (pins 3 and 6) ..............................	4-17
Figure 4-18. RF POWER ON (pins 4 and 9) .......................................................	4-17
Figure 4-19. SET POINT (pins 5 and 6) ..............................................................	4-18
Figure 4-20. RF ON STATUS (pins 7 and 8) ......................................................	4-18
Figure 4-21. INTERLOCK LOOP (pins 11 and 12) .............................................	4-19
Figure 4-22. LED readback wiring diagram (pins 10, 13, 14, or 15 and 1) .........	4-19
Figure 4-23. Host port connector ........................................................................	4-20
Figure 4-24. Host DIP switch ..............................................................................	4-22
Figure 4-25. Graphic representation of a message packet .................................	4-25
Figure 4-26. AE Bus communications transaction ..............................................	4-27
Figure 4-27. Communications transaction example ............................................	4-29
Figure 4-28. Ethernet connector and indicators ..................................................	4-29
Figure 4-29. Data encoding for TCP using FC100 ..............................................	4-31
Figure 4-30. PROFIBUS port connector ...........................................................	4-162
Figure 4-31. Example of a segment ..................................................................	4-163
Figure 4-32. PROFIBUS port and DIP switch ...................................................	4-164
Figure 4-33. DeviceNet port ..............................................................................	4-219
Figure 4-34. DeviceNet control panel ................................................................	4-220
Figure 4-35. EtherCAT ports, device ID, and status LEDs ................................	4-223
Figure 4-36. Interlock loop for the Apex compatible 25-pin User port ...............	4-227
Figure 4-37. Interlock loop for the Custom 15-pin User port .............................	4-227
Figure 5-1. Water control connector ......................................................................	5-4
Figure 5-2. Example of RF output connector ........................................................	5-5
Figure 5-3. HARTING input power connector on rear of an MF 5002 unit ............	5-6
Figure 5-4. HARTING input power connector on rear of an MF 15002 unit ..........	5-7
Figure 5-5. HARTING input power connector on rear of an HF 1527 or HF
3027 unit ..............................................................................................................	5-8
Figure 5-6. HARTING input power connector on rear of an HF 3513 unit ............	5-9

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Advanced Energy®	Paramount® Plus Generators
Figure 5-7. HARTING input power connector on rear of an HF 5513 or VHF
3060 unit ............................................................................................................	5-10
Figure 5-8. HARTING input power connector on rear of a VHF 6060 or VHF
7040 unit ............................................................................................................	5-11
Figure 5-9. CEX mode connections ....................................................................	5-21
Figure 5-10. Block diagram of the Paramount generator arc management
system ...............................................................................................................	5-27
Figure 5-11. Arc management in a master slave system ....................................	5-32
Figure 5-12. Arc management in a symmetrical system .....................................	5-33
Figure 5-13. Arc management in a daisy chain system ......................................	5-34

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Paramount® Plus Generators
	Chapter
	1

Safety and Product Compliance

Guidelines

IMPORTANT SAFETY INFORMATION

To ensure safe installation and operation of the Advanced Energy Paramount unit, read and understand this manual before attempting to install and operate this unit. At a minimum, read and follow the safety guidelines, instructions, and practices.

USING THIS MANUAL

This user manual contains installation, operation, and troubleshooting information for the Paramount Plus family of products. For specifications of an individual unit as well as information about the features that are installed on that unit, see the specifications document that was included with the unit. Both this user manual and a specifications document are shipped on a CD with the unit.

 Important

If you do not have a copy of the relevant product specification, please contact AE Global Services.

Table 1 1 shows where to find unit information.

 

Table 1 1.Where to find information (user manual or product specification)
Information	Location
Safety, compliance	User manual, product specification, and
	Declaration of Conformity
Product Identification Number (PIN)	Product specification
description
Product description and theory of	User manual
operation
Specifications (mechanical, electrical,	Product specification
environmental)
Unit default settings	Product specification
Safe operating area	Product specification
Dimensional drawings	Product specification

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Advanced Energy®			Paramount® Plus Generators
	Table 1 1.Where to find information (user manual or product specification)
	(Continued)
	Information		Location
	Communication ports (including	The following communication ports are
	applicable pin descriptions, protocol,	described in the user manual (port labels
	commands).	on your unit can vary):
		•	Host
		•	PROFIBUS
		•	DeviceNet
		•	Ethernet
		•	EtherCAT
		•	User port (described in both the
			user manual and product
			specification)
		Your unit factory settings are described
		in the product specification (for
		example, the default IP address).
	Installation instructions	User manual
	Unit operation, including first time	User manual
	operation procedures and conceptual
	information on unit features
	Troubleshooting procedures and error	User manual
	codes
	Information on contacting AE Global	User manual
	Services
	Related Links
	• “AE Global Services” on page 6 15

DANGER, WARNING, AND CAUTION BOXES

This symbol represents important notes concerning potential harm to people, this unit, or associated equipment. Advanced Energy includes this symbol in danger, warning, and caution boxes to identify specific levels of hazard seriousness.

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  DANGER:

DANGER indicates an imminently hazardous situation that, if not avoided, will result in death or serious injury. DANGER is limited to the most extreme

situations.

 

  WARNING:

WARNING indicates a potentially hazardous situation that, if not avoided,

could result in death or serious injury, and/or property damage.

 

  CAUTION:

CAUTION indicates a potentially hazardous situation that, if not avoided, could result in minor or moderate injury, and/or property damage. CAUTION

is also used for property-damage-only accidents.

 

SAFETY GUIDELINES

Review the following information before attempting to install and operate the product.

Rules for Safe Installation and Operation

Please note the following rules:

•Do not attempt to install or operate this equipment without proper training.

•Ensure that this unit is properly grounded.

•Ensure that all cables are properly connected.

•Verify that input voltage and current capacity are within specifications before turning on the power supplies.

•Use proper electrostatic discharge (ESD) precautions.

INTERPRETING PRODUCT LABELS

The following labels might appear on your unit:

 

CE label

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or

Complies with applicable European directives.

Protective conductor terminal

This terminal must be connected first and be of proper type and size for the circuit with the highest voltage and current carrying capacity. Note that other connections might have higher requirements than that of the mains connection.

Heavy object—can cause muscle strain or back injury

Hazardous voltage

Voltage > 30 VRMS, 42.4 V peak, or 60 VDC

Nonionizing radiation

Radio frequency emissions can be harmful.

High leakage current

Four handle lift

Certified by CSA to North American

Safety Standards for both Canada and the

United States

Refer to manual for more information

SEMI® S2 compliant

SEMI F47 compliant

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Environmentally Friendly Use Period of 25 years per China RoHS—recycle responsibly at end of life

European Union RoHS compliant

PRODUCT COMPLIANCE

The following sections include information about unit compliance and certification, including the conditions of use required to be in compliance with the standards and directives.

Product Certification

Certain options of this product may be certified according to the list below.

For more information, refer to the Certificate or Letter of Conformity (US) or Declaration of Conformity (EU) accompanying the product.

•NRTL – Safety certified by CSA International, a Nationally Recognized Testing Laboratory

•CE Marking – Self-declaration, assessed by AE Corporate Compliance

•EMC measurements – Verified by AE Corporate Compliance

•SEMI guidelines – Verified by AE Corporate Compliance

Safety and EMC Directives and Standards

For information concerning compliance to applicable EU requirements, refer to the EU Declaration of Conformity for this unit. The Declaration of Conformity might also include a supplementary section covering compliance to non-EU regulatory requirements and/or industry standards or guidelines.

Conditions of Use

To comply with the stated directives and standards, you must meet the following conditions of use:

•For corner-grounded delta configuration installation, excessive leakage occurs. Secondary Protective Earth (ground) must be connected.

•Install and operate this unit in an overvoltage category according to environmental specifications.

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•Install and operate this unit in a pollution degree environment according to environmental specifications.

•Use only clean, well-conditioned water with low conductivity. See the cooling specifications.

•To prevent condensation, install and operate this device with an external water solenoid valve so that water flow is interrupted when the device is not operating.

•You must install and operate this device with a disconnect switch that conforms to the applicable requirements. The switch must be easily accessible and near the device.

•Use only a shielded cable for the input power connections.

•Use only an RF output power cable that meets all of the following requirements:

◦Double shielded

◦Inner and outer shield ≥ 90% coverage

◦Inner or outer shield ≥ 95% coverage

•Use only a shielded cable for communications and/or control connections.

Environmental Compliance

•EU RoHS – European Union Directive 2011/65/EU (RoHS 2)

Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment

This product is EU RoHS 2 compliant, designed to contain no more than the maximum concentration of hazardous substances listed in Annex II, with possible exemptions from Annex III or IV. Because this product is installed as a component in a large-scale fixed installation or stationary industrial tool: the product is outside the scope of this Directive, compliance is not required, and the EU RoHS Directive is not declared on the CE Declaration of Conformity.

•EU REACH – European Union Regulation (EC) No. 1907/2006

Registration, Evaluation, Authorization and Restriction of Chemicals

Advanced Energy manufactures articles subject to Article 33 of REACH and, upon request, will provide information regarding Substances of Very High Concern (SVHC) currently identified by the European Chemical Agency (ECHA) that are contained in this product, at concentrations greater than 0.1% by weight.

•China RoHS - People’s Republic of China (PRC) Ministry of Industry and Information Technology (MIIT) Order #32 (China RoHS 2)

Management Methods for the Restriction of the Use of Hazardous Substances Electrical and Electronic Products

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This product contains hazardous substances listed in PRC Standard GB/T 26572, above the maximum concentration limits stipulated. In compliance to PRC Standard SJ/T 11364, AE provides a disclosure of hazardous substance content and this product is marked with an Environmentally Friendly Use Period (EFUP) of 25 years.

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	Chapter
	2

Product Overview

PLATFORM DESCRIPTION

The Advanced Energy Paramount RF generator provides radio frequency power into a 50 Ω load by converting 3-phase, 47 Hz to 63 Hz AC mains line power into RF energy at the generator specified frequency. High accuracy load or forward power regulation, with internal protection limits, permit safe and reliable operation under all load conditions. Cooling is achieved using both air and water.

A standard RS-232 serial control interface is provided for generator control using AE Modbus commands. Additional interfaces such as analog, Ethernet, EtherCAT®, DeviceNet®, and AE Navigator® II match control are also available.

The Paramount generator supports the following additional configurations or features:

•Variable frequency

•Fixed frequency

•Frequency tuning

•Pulsing/pulse synchronization

•Multi-level pulsing

•Arc management

•Common exciter (CEX)

•Frequency band ranges from 2 MHz to 60 MHz

•Up to 15000 W maximum output power

•200 VAC – 208 VAC, 208 VAC – 240 VAC, or 400 VAC – 480 VAC, 50 Hz – 60 Hz

THEORY OF OPERATION

Operation Overview

The fundamental purpose of the generator is to take three-phase, 47 Hz to 63 Hz AC input at nominal voltages 200 VAC to 480 VAC (depending on the ordered configuration) and convert it to RF energy at the specified frequency for the

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generator. The generator consists of four main systems: AC input, DC switching mode power supply, RF, and logic/control.

AC Input

Line power is supplied to the generator through a unified assembly consisting of a bulkhead connector, disconnect switch, and line filter. The disconnect switch provides lockout/tagout capability.

 Important

The disconnect switch is not a circuit breaker.

Generator line protection is provided through an internal fuse assembly. These fuses are sized according to the specified input operating line voltage and are installed at the factory.

DC Switching Mode Power Supply

Line power is fed to the switching mode power supply (SMPS) where it is rectified and boosted to a high voltage level. This high potential energy in turn feeds the inverter and buck sections to supply controlled power to the RF section. The SMPS also supplies auxiliary DC power to the logic/control modules. The DC SMPS includes control logic for synchronization and regulation of the supply.

RF Section

The RF section takes a synthesized signal from the logic/control section into a series of drivers. The drivers boost the RF to the proper level to drive the final amplifier FETs. Power FET outputs are then combined to produce the final RF output for the generator. An output sensor module, located just prior to the RF output connector, provides feedback to the logic/control section.

Logic/Control Section

The logic/control module contains all microprocessor and logic circuits for the overall control and operation of the generator. Interfaces to this assembly provide the capability for RS-232 communication, user analog interface, and an Ethernet interface. Optional interfaces include DeviceNet, PROFIBUS, and EtherCAT. Additionally, expanded control options such as CEX and pulsing can be added. This section of the generator manages all communications I/O and control loops.

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Specifications

SPECIFICATIONS

The specifications vary by model. For model-specific information, see the product specification for your unit. Your unit product specifications are included on the CD that came with your unit. If you do not have access to the user manual CD, contact AE Global Services.

Safety-related specifications are included in the printed Safety Information Guide that shipped with your unit.

Related Links

• “AE Global Services” on page 6 15

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Communication Controls

BASIC LED STATUS DISPLAY

The basic LED status display is on the rear panel of the product. This display indicates the operating conditions described in the following table.

 

Table 4 1.Status LEDs
	Description
LED Label

AC On This green LED is lit when the unit is receiving AC power.

RF On This green LED is lit when the unit has received an RF on command. Depending on the selected setpoint value, RF power may or may not be present at the output connector when this LED is lit.

This LED turns off when the unit receives an RF off command.

Interlock This green LED is lit when all of the following conditions are met:

•AC power is available in the unit

•The rectified voltage to the inverter section is within the allowable voltage range

•All interlock criteria are satisfied

When this LED is lit, the unit is ready to supply output power.

Power Limit When not lit, this yellow LED indicates that the unit is able to satisfy the requested setpoint power.

When lit, this LED indicates that the unit cannot satisfy the requested setpoint due to a limit or alarm condition detected by the generator. Some of the conditions that can cause an out-of-setpoint condition are high VSWR, output voltage limits, and output current limits.

Overtemp When lit, this yellow LED indicates that the unit's internal temperature has exceeded the allowable level.

•If RF is on when this error occurs, the error is latching, which means that the temperature must fall below the limit and you must send the unit an RF Off command to reset the unit.

•If RF is off when this error occurs, the error is self-clearing, which means that, when the temperature falls back below the limit, the unit will be ready to turn on.

Alarm When lit, this yellow LED indicates that the unit has a fault condition.

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Table 4 1.Status LEDs (Continued)
	LED Label			Description

Fault conditions are either non-latching or latching:

•If the fault is non-latching and RF is off, the fault LED will turn off when the condition that caused the fault is corrected.

•If the fault is a latching fault or if the fault occurred when RF was on, the fault LED will only turn off if the fault is no longer active and the latched condition has been cleared by issuing an RF off command to the unit.

25-PIN USER PORT

The Paramount platform offers several User ports. This section applies to Paramount units that have 25-pin User ports.

25-Pin User Port Connector

The User port uses a 25-pin, shielded, female, subminiature-D connector.

Pin 13	Pin 1
Pin 25	Pin 14

Figure 4 1. User port connector, 25 pin

Unless otherwise specified, all analog signals are 0 V to 10 V while all digital signals are 4 V to 24 V, opto-coupled (open-collector signals with return lines nonreferenced to ground).

Ground/Return lines are floating and need to be connected as close to the system ground as possible.

Satisfying Minimal Requirements for the 25-Pin User Port

The interlock must be satisfied regardless of the control mode. When in host control mode, it is not required to assert the RF PWR ON CONTROL input on the user interface.

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 Important

If you are controlling your generator through a port other than the User port, make sure that the control mode is set appropriately (to host mode to control through the host port, for example). The control mode can be set through an AE host command.

If you are not using the User port to control or monitor the unit, you can use a “dummy” or “cheater” plug to satisfy these signals, thereby ignoring the User port. To make a dummy plug, solder jumpers on a mating connector.

 

Table 4 2.Jumpers on a dummy plug to satisfy minimal signal requirements
Jumper Between Pins	Description
10 and 23	Satisfies INTERLOCK LOOP signal

If desired, you can tie your system interlocks in series with the generator

INTERLOCK LOOP signal.

25-Pin User Port Cabling Requirements

The cable used to connect the generator’s User port to the system controller must be a shielded, 25-wire I/O cable. Twisted-pair wiring may be used but is not mandatory. Signal losses should be minimized by keeping the cable length as short as possible.

The maximum recommended cable length between the generator and the controller is 10 meters (33′). To minimize interference from adjacent electrical equipment, the EMI shield in the cable must be terminated to the metal shells of the cable’s connectors. Additionally, the chassis of the generator must be tied to a local earth ground through an adequately sized copper grounding strap.

Apex Compatible 25-Pin User Port

Your Paramount generator has an Apex compatible 25-pin User port.

PIN DESCRIPTIONS FOR APEX COMPATIBLE USER PORT

 

Table 4 3.25-pin Apex User port pin descriptions
Signal	Related	Name	Signal	Description
Pin	Pin		Type
1	14	SETPOINT	Digital	See pin 14.
		STATUS	output
		RETURN
2	15	RFL PWR	Analog	This signal provides a linearly scaled
		MONITOR	output	read back of reflected power.

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Table 4 3.25-pin Apex User port pin descriptions  (Continued)
Signal	Related	Name	Signal		Description
Pin	Pin		Type
				0 V to 10 V = 0 to maximum rated
				power output.
				Pin 15 must be grounded.
3	16	FWD/LOAD	Analog	This signal provides a linearly scaled
		PWR MONITOR	output	read back of forward power when the
				generator is operated in forward power
				regulation mode or the load power when
				operated in the load power regulation
				mode.
				0 V to 10 V = 0 to maximum rated
				power output.
				Pin 16 must be grounded.
4	17	RF PWR ON	Digital	•	In analog control mode, applying a
			input		positive voltage from 4 VDC to 24
					VDC enables RF output. When
					voltage is less than 1 VDC, RF
					output is disabled.
				•	In Host control mode, this input is
					ignored.
				Important
					The interlocks must be satisfied
					and the setpoint must be within
					the output power range before
					unit will deliver power.
5	18	SETPOINT	Analog	This pin linearly controls the RF output
			input	of the generator.
				0 V to 10 V = 0 to maximum rated
				power output.
				Important
					Setpoint must be greater than the
					low power limit before the unit
					will deliver power.
6	19	DC BIAS/	Digital	This pin is used in conjunction with pin
		POWER	input	7 to allow the generator to regulate its
		REGULATION		power based on an external feedback
				signal.
				Applying a positive voltage from 4 VDC
				to 24 VDC to this pin (reference to
				ground pin 19) causes the generator to
				regulate on the input voltage signal on

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Table 4 3.25-pin Apex User port pin descriptions  (Continued)
Signal	Related	Name	Signal	Description
Pin	Pin		Type
				pin 7 (DC BIAS INPUT). When voltage
				is less than 1 VDC, or if there is no
				connection to this pin, the generator
				regulates power.
7	20	DC BIAS INPUT	Analog	This pin is used in conjunction with the
			input	signal on pin 6 to allow the generator to
				regulate its power based on an external
				feedback signal.
				This user-defined 0 V to 10 V signal
				provides an input which you can use for
				closing the power control loop around
				external components in the RF path.
				The unit usually uses Pin 7 for bias
				regulation with this input signal being a
				scaled representation of the DC bias
				measured at a match network.
8	21	FWD/LOAD	Digital	Applying a positive voltage between
		PWR	input	4 VDC and 24 VDC to this pin causes
		REGULATION		the generator to regulate on load power.
				When voltage is less than 1 VDC, or if
				there is no connection to this pin, the
				generator defaults to forward power
				regulation.
9	22	OVERTEMP	Digital	See pin 22.
		RETURN	output
10	23	INTERLOCK		External voltage interlock loop, internal
		LOOP		voltage supplied. This pin, when
				connected externally to pin 23, closes the
				interlock and allows the RF output to be
				enabled.
				The external circuit should be capable of
				switching 100 mA at 24 VDC.
11	24	DC BUS OK	Digital	See pin 24.
		RETURN	output
12	25	CEX LOCK	Digital	When the generator is successfully
			output	phase-locked to an external oscillator, a
				low (opto-coupler output) impedance is
				created between this pin and return pin
				25 (6 mA maximum).
13	21	+15 VDC		This pin, referenced to ground, provides
				a +15 VDC ± 1 V auxiliary supply for
				external use. 100 mA maximum.

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Table 4 3.25-pin Apex User port pin descriptions  (Continued)
Signal	Related	Name	Signal	Description
Pin	Pin		Type
14	1	SETPOINT	Digital	When the generator is out of setpoint, a
		STATUS	output	low (opto-coupler output) impedance is
				created between this pin and pin 1 (6 mA
				maximum).
15	2	RFL POWER	Analog	See pin 2.
		MONITOR	output
		RETURN
16	3	FWD/LOAD	Analog	See pin 3.
		PWR MONITOR	output
		RETURN
17	4	RF PWR ON	Digital	See pin 4.
		RETURN	input
18	5	SETPOINT	Analog	See pin 5.
		RETURN	input
19		DC GROUND	Analog	This pin represents DC ground
			output	connection common to chassis ground.
20	7	DC BIAS INPUT	Analog	See pin 7.
		RETURN	input
21		CHASSIS	Chassis	Chassis ground connection common to
		GROUND	ground	DC ground.
22	9	OVERTEMP	Digital	When an internal overtemperature
			output	shutdown condition is detected, a low
				(opto-coupler output) impedance is
				created between this pin and pin 9 (6 mA
				maximum).
23	10	INTERLOCK		See pin 10.
		LOOP RETURN
24	11	DC BUS OK	Digital	When the interlocks are satisfied, AC
			output	input voltage is within specification, and
				no generator faults exist, a low (opto-
				coupler output) impedance is created
				between this pin and pin 11 (6 mA
				maximum).
25	12	CEX LOCK	Digital	See pin 12.
		RETURN	output

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WIRING DIAGRAMS FOR APEX COMPATIBLE USER PORT

User Unit

Voltage Measurement Device (see pin description

for scaling)

Pin 15 must be grounded

Figure 4 2. REFL PWR MONITOR (pins 2 and 15)

User Unit

Voltage Measurement Device (see pin description

for scaling)

Pin 16 must be grounded

Figure 4 3. FWD/LOAD PWR MONITOR (pins 3 and 16)

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User Unit

+4 V to +24 V

Figure 4 4. RF PWR ON (pins 4 and 17)

User Unit

See pin description for scaling

Figure 4 5. SETPOINT (pins 5 and 18)

User Unit

+4 V to +24 V

Figure 4 6. DC BIAS/POWER REGULATION (pins 6 and 19)

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