Advanced Energy Cesar Generator - Air Cooled User Manual

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Cesar® Generator

Air-Cooled

User Manual

January 2013 57023916-00B

Cesar

Generator

Air-Cooled

User Manual

January 2013 57023916-00B

Advanced Energy

This manual and the information contained herein are the proprietary property of Advanced Energy Industries, Inc.

No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries, Inc. Any unauthorized use of this manual or its contents is strictly prohibited. Copyright © 2011-2013 Advanced Energy Industries, Inc. All Rights Reserved.

DISCLAIMER AND LIMITATION OF LIABILITY

The information contained in this manual is subject to change by Advanced Energy Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no warranty of any kind whatsoever, either expressed or implied, with respect to the information contained herein. Advanced Energy Industries, Inc. shall not be liable in damages, of whatever kind, as a result of the reliance on or use of the information contained herein.

PRODUCT USAGE STATEMENT

WARNING :

Read this entire manual and all other publications pertaining to the work to be performed before you install, operate, or maintain this equipment. Practice all plant and product safety instructions and precautions. Failure to follow instructions can cause personal injury and/or property damage. If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment may be impaired. All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury.

Advanced Energy Industries, Inc., (AE) provides information on its products and associated hazards, but it assumes no responsibility for the after-sale operation of the equipment or the safety practices of the owner or user. NEVER DEFEAT INTERLOCKS OR GROUNDS.

TRADEMARKS

is a registered trademark of Advanced Energy Industries, Inc.

Cesar® is a registered trademark of Advanced Energy Industries, Inc.

iv 57023916-00B

Dressler® is a registered trademark of Advanced Energy Industries, Inc.

Epic® is a registered trademark of the Lapp Group.

HPG™ is a trademark of Advanced Energy Industries, Inc.

Modbus® is a registered trademark of Gould, Inc.

Navigator® is a registered trademark of Advanced Energy Industries, Inc.

Navio™ is a trademark of Advanced Energy Industries, Inc.

Neutrik® is a registered trademark of Neutrik Aktiengesellschaft.

Rectus® is a registered trademark of RECTUS, GmbH.

SERTO® is a registered trademark of SERTO Ltd.

Siemens® is a registered trademark of Siemens AG.

VarioMatch™ is a trademark of Advanced Energy Industries, Inc.

Windows® is a registered trademark of the Microsoft Corporation.

Cesar® Generator

Windows NT® is a registered trademark of the Microsoft Corporation.

CUSTOMER FEEDBACK

Advanced Energy’s technical writing staff has carefully developed this manual using research-based document design principles. However, improvement is ongoing, and the writing staff welcomes and appreciates customer feedback. Please send any comments on the content, organization, or format of this user manual to:

• tech.writing@aei.com

To order a manual, please contact Technical Support:

• technical.support@aei.com

57023916-00B v

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vi 57023916-00B

Cesar® Generator

Chapter 1. Safety and Product Compliance Guidelines

Products Documented in this Manual ................................................................... 1-1

Important Safety Information ................................................................................. 1-1

Danger, Warning, and Caution Boxes in the Manual ............................................ 1-1

Safety Guidelines .................................................................................................. 1-2

Rules for Safe Installation and Operation ....................................................... 1-2

Interpreting Product Labels ................................................................................... 1-2

Product Compliance .............................................................................................. 1-3

Product Certification ....................................................................................... 1-3

Safety and EMC Directives and Standards .................................................... 1-4

Electromagnetic Compatibility (EMC) Directives and Standards ............. 1-4

Safety Directives and Standards .............................................................. 1-4

Conditions of Use ........................................................................................... 1-5

Interlocks and Limiting Conditions ........................................................................ 1-6

Chapter 2. Product Overview

General Description .............................................................................................. 2-1

Theory of Operation .............................................................................................. 2-2

Chapter 3. Specifications

Physical Specifications .......................................................................................... 3-1

Electrical Specifications ........................................................................................ 3-2

Cooling Specifications ........................................................................................... 3-4

Environmental Specifications ................................................................................ 3-4

Chapter 4. Communication Controls

Diagnostic Interface .............................................................................................. 4-1

Matching Interface ................................................................................................. 4-1

Matching Interface Connector ........................................................................ 4-1

Matching Interface Pin Descriptions ............................................................... 4-1

User Port ............................................................................................................... 4-3

25-Pin User Port ............................................................................................. 4-4

User Port Connector ................................................................................ 4-4

Satisfying Minimal Requirements for the 25-pin User Port ...................... 4-4

25-pin User Port Cabling Requirements .................................................. 4-5

Activating the 25-Pin User Port ................................................................ 4-5

Resolving Error Displays When Using the 25-Pin User Port ................... 4-6

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25-pin User Port Pin Descriptions and Wiring Diagrams ......................... 4-6

15-Pin User Port ........................................................................................... 4-18

User Port Connector .............................................................................. 4-18

Satisfying Minimal Requirements for the 15-pin User Port .................... 4-18

15-pin User Port Cabling Requirements ................................................ 4-20

Activating the 15-Pin User Port .............................................................. 4-20

Resolving Error Displays When Using the 15-Pin User Port ................. 4-21

15-pin User Port Pin Descriptions and Wiring Diagrams ....................... 4-21

Cesar Generator Host Port ................................................................................. 4-31

RS-232 Interface .......................................................................................... 4-31

RS-232 Connector ................................................................................. 4-32

RS-232 Port Pin Descriptions ................................................................ 4-32

AE Bus Transmission Parameters ......................................................... 4-32

AE Bus Protocol ..................................................................................... 4-33

Creating an Ideal Communications Transaction .................................... 4-35

PROFIBUS Interface .................................................................................... 4-37

PROFIBUS Connector ........................................................................... 4-38

PROFIBUS Port Pin and Signal Descriptions ........................................ 4-38

PROFIBUS Cabling and Termination .................................................... 4-38

AE PROFIBUS Protocol ......................................................................... 4-39

PROFIBUS Command Structure ........................................................... 4-42

Ethernet Interface ......................................................................................... 4-44

Ethernet Connector and Indicators ........................................................ 4-44

Understanding AE TCP Commands and Register Types (FC23) .......... 4-45

Using Modbus/TCP FC23 ...................................................................... 4-46

AE Bus Commands ...................................................................................... 4-50

Activating Host Port Remote Control (AE Bus Command 14) ............... 4-51

AE Bus Command Status Response (CSR) Codes ............................... 4-53

AE Bus Port Command Set ................................................................... 4-54

Chapter 5. Installation, Setup, and Operation

Preparing to Install the Unit ................................................................................... 5-1

Spacing Requirements ................................................................................... 5-1

Dimensional Drawings .................................................................................... 5-1

Installation Requirements ............................................................................... 5-3

Tools Required for Installation ........................................................................ 5-3

Unpacking the Unit ......................................................................................... 5-4

Lifting the Unit .......................................................................................... 5-4

Installing the Unit ................................................................................................... 5-5

Mounting ......................................................................................................... 5-5

Grounding ....................................................................................................... 5-5

Connecting Output Power .............................................................................. 5-6

To Connect Output Power ....................................................................... 5-6

Connecting Communication Interfaces ........................................................... 5-8

To Connect the Communication Interfaces .............................................. 5-8

Connecting the Generator to a System Interlock Loop ................................... 5-9

Satisfying the Interlock With a 25-pin User Port ...................................... 5-9

Satisfying the Interlock With a 15-pin User Port ...................................... 5-9

viii 57023916-00BTable of Contents

Cesar® Generator

Connecting a VarioMatch or Navio Match Network (Optional) ....................... 5-9

Connecting Common Exciter (CEX) Circuitry (Optional) .............................. 5-10

To Make the CEX Connections .............................................................. 5-10

Connecting AC Input (Mains) Power ............................................................ 5-11

Connecting and Setting Ethernet (Modbus/TCP) Communication ............... 5-12

To Connect for Ethernet Communication ............................................... 5-12

Setting the IP Configuration for Ethernet Communication ..................... 5-12

First Time Operation ........................................................................................... 5-13

Operating the Cesar Generator for the First Time With the User Port ......... 5-14

To Operate the Cesar Generator for the First Time With the 25-pin

User Port .............................................................................................. 5-14

To Operate the Cesar Generator for the First Time With the 15-pin

User Port .............................................................................................. 5-15

Operating the Cesar Generator for the First Time With the Host Port .......... 5-16

Operating the Cesar Generator for the First Time With the Front Panel . ..... 5-17

Cesar Generator Front Panel .............................................................................. 5-18

Front Panel Control Elements ...................................................................... 5-19

Using the Front Panel Program Menu .......................................................... 5-20

Accessing the Program Menu ................................................................ 5-20

Entering Values in the Program Menu ................................................... 5-21

Front Panel Program Menu Tree ........................................................... 5-22

Viewing Measurements in the Display .......................................................... 5-23

Remote Control Operation .................................................................................. 5-24

Viewing and Using the Front Panel when in Remote Control Mode ............. 5-24

RF Control and Resetting Errors .................................................................. 5-25

Normal Operation ................................................................................................ 5-26

Setting Regulation Mode .............................................................................. 5-26

Determining the Regulation Mode Setting ............................................. 5-27

To Set Regulation Mode ........................................................................ 5-28

Setting the Pulse Function ............................................................................ 5-29

Selecting Internal or External Pulsing .................................................... 5-29

Changing the Pulse Input Configuration Settings .................................. 5-30

To Turn Off Pulsing ................................................................................ 5-31

Creating Recipes (RF on/off, Slew Rate, Power Ramping) .......................... 5-31

Creating an RF On/Off Ramp Recipe .................................................... 5-32

Creating a Slew Rate Recipe ................................................................. 5-32

Creating a Power Ramp Recipe ............................................................ 5-33

To Turn Off the Recipe Settings Feature ............................................... 5-34

Recipe Settings Operating Screen ......................................................... 5-34

Setting and Disabling Remote Control Override ........................................... 5-35

Selecting Remote Control Override ....................................................... 5-35

Disabling Remote Control Override ....................................................... 5-36

Setting and Turning Off the Target Lifetime Feature .................................... 5-37

Setting Target Lifetime Parameters ....................................................... 5-37

To Turn Off the Target Lifetime Feature ................................................ 5-37

Resetting a Target Lifetime .................................................................... 5-38

Changing Reflected Power Settings ............................................................. 5-38

Changing the Device Configuration Settings ................................................ 5-39

To Change the Default Device Configuration Settings .......................... 5-40

Setting and Using Preset Generator Settings for Different Applications . ..... 5-41

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Advanced Energy

To Store a Preset ................................................................................... 5-41

To Erase a Preset .................................................................................. 5-42

To Use a Preset ..................................................................................... 5-42

Controlling a VarioMatch or Navio Match Network Attached to the

Generator .......................................................................................................... 5-42

Determining the Current Match Network Tune Setting ................................. 5-43

Setting Tune Control ..................................................................................... 5-43

Determining Automatic Tuning Presets ........................................................ 5-45

Adjusting the Capacitors When in Manual Tune .......................................... 5-45

Using the Cable Attenuation Feature .................................................................. 5-47

Cable Attenuation Description ...................................................................... 5-47

Forward Power Calculation .................................................................... 5-48

Reflected Power Calculation .................................................................. 5-48

Cable Attenuation and Reflected Power Settings ......................................... 5-49

Connecting to an Ethernet-Enabled Unit With a Web Browser ........................... 5-49

Chapter 6. Troubleshooting and Global Services

Before Contacting AE Global Services ................................................................. 6-1

Checks With Power Off .................................................................................. 6-1

Checks With Power On .................................................................................. 6-2

Troubleshooting Checklists ............................................................................ 6-2

General Troubleshooting ......................................................................... 6-2

Matching Network Troubleshooting ......................................................... 6-3

Interlock Not Satisfied ..................................................................................... 6-3

Front Panel Display (LCD) Not Lit .................................................................. 6-4

Fuse is Blown ................................................................................................. 6-4

Communication Problems .............................................................................. 6-4

Capacitor Failure ............................................................................................ 6-5

Incorrect Input Voltage ................................................................................... 6-5

Improper Impedance Range ........................................................................... 6-5

Improper RF Connection or Cabling ............................................................... 6-6

Improper Grounding ....................................................................................... 6-6

Improper Matching Interface Connection ....................................................... 6-6

Improper Tuning Adjustment .......................................................................... 6-7

Troubleshooting Using Error Codes ...................................................................... 6-7

Fault and Warning Types and Clearing Faults ............................................... 6-7

Error Code Descriptions and Resolutions ...................................................... 6-8

Warning Message Descriptions and Resolutions ......................................... 6-10

Communication Warning Descriptions and Resolutions ............................... 6-12

AE Global Services ............................................................................................. 6-14

Returning Units for Repair ................................................................................... 6-15

Decommissioning the Unit .................................................................................. 6-15

x 57023916-00BTable of Contents

Cesar® Generator

List of Tables

Table 1-1. Cesar limiting conditions ...................................................................... 1-7

Table 3-1. Physical specifications ......................................................................... 3-1

Table 3-2. Electrical specifications ........................................................................ 3-2

Table 3-3. Air cooling specifications ...................................................................... 3-4

Table 3-4. Environmental standard specifications ............................................... 3-4

Table 3-5. Climatic specifications .......................................................................... 3-4

Table 4-1. Matching interface pin descriptions ...................................................... 4-1

Table 4-2. User Port Signal Specifications ............................................................ 4-7

Table 4-3. 25-Pin User Port Pin Descriptions ...................................................... 4-8

Table 4-4. 15-Pin User Port Pin Descriptions .................................................... 4-21

Table 4-5. Setting regulation mode with 15-pin User Port pins 1 and 2 .............. 4-24

Table 4-6. RS-232 port pin descriptions .............................................................. 4-32

Table 4-7. AE Bus byte structure ........................................................................ 4-35

Table 4-8. PROFIBUS port pin and signal descriptions ...................................... 4-38

Table 4-9. Baud rate and cable lengths .............................................................. 4-38

Table 4-10. PROFIBUS status LEDs .................................................................. 4-40

Table 4-11. Configuration of PROFIBUS download packet bytes ....................... 4-42

Table 4-12. PROFIBUS upload packet status bit flags ...................................... 4-43

Table 4-13. Packet format for FC23 send ........................................................... 4-46

Table 4-14. Packet format for FC23 response .................................................... 4-47

Table 4-15. Packet format for FC23 exception error ........................................... 4-48

Table 4-16. Packet format for command 168 send ............................................. 4-49

Table 4-17. Packet format for command 168 response ...................................... 4-50

Table 4-18. AE Bus command 14 remote control settings, resets, and

overrides ............................................................................................................ 4-52

Table 4-19. AE Bus command status response (CSR) codes ............................ 4-53

Table 4-20. AE Bus Commands .......................................................................... 4-54

Table 4-21. Remote control override settings (command 29) ............................. 4-81

Table 5-1. Input connector pin description ......................................................... 5-11

Table 5-2. Remote control mode displayed on the front panel ........................... 5-25

Table 5-3. RF on/off control ................................................................................ 5-26

Table 5-4. Adjusting VarioMatch match network capacitors .............................. 5-46

Table 6-1. Error codes .......................................................................................... 6-8

Table 6-2. Warning messages ............................................................................ 6-11

Table 6-3. Communication warning messages ................................................... 6-12

Table 6-4. AE Global Services 24 X 7 contact information ................................. 6-15

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Advanced Energy

xii 57023916-00BList of Tables

Cesar® Generator

List of Figures

Figure 2-1. Cesar block diagram ........................................................................... 2-2

Figure 4-1. Matching interface connector .............................................................. 4-1

Figure 4-2. User Port connector, 25 Pin ................................................................ 4-4

Figure 4-3. Reflected power monitor (pins 2 and 15) .......................................... 4-13

Figure 4-4. Forward/Load power monitor (pins 3 and 16) ................................... 4-13

Figure 4-5. RF POWER ON signal wiring (pins 4 and 17) .................................. 4-13

Figure 4-6. SET POINT signal wiring (pins 5 and 18) ......................................... 4-14

Figure 4-7. RF FORWARD POWER/DC BIAS REGULATION wiring (pins 6

and 19) .............................................................................................................. 4-14

Figure 4-8. DC BIAS MONITOR signal wiring (pins 7 and 20) (units with DC

Bias In) .............................................................................................................. 4-14

Figure 4-9. DC BIAS MONITOR signal wiring (pins 7 and 20) (units with DC

Bias Out) ............................................................................................................ 4-15

Figure 4-10. RF FORWARD/LOAD REGULATION signal wiring (pins 8 and

21) ..................................................................................................................... 4-15

Figure 4-11. INTERLOCK LOOP signal wiring (pins 10 and 23) ........................ 4-16

Figure 4-12. +15 VOLT DC signal wiring (pins 13 and 21) ................................. 4-16

Figure 4-13. SET POINT STATUS signal wiring (pins 14 and 1) ........................ 4-17

Figure 4-14. OVERTEMPERATURE signal wiring (pins 22 and 9) ..................... 4-17

Figure 4-15. INTERLOCK SATISFIED signal wiring (pins 24 and 11) ................ 4-17

Figure 4-16. BLANKING/PULSING signal wiring (pins 25 and 19) ..................... 4-18

Figure 4-17. User Port connector, 15 Pin ............................................................ 4-18

Figure 4-18. Interlock interface connector ........................................................... 4-19

Figure 4-19. OPERATING MODE A wiring diagram (pins 1 and 8) .................... 4-25

Figure 4-20. OPEATING MODE B wiring diagram (pins 2 and 8) ....................... 4-25

Figure 4-21. READY STATUS wiring diagram (pins 3 and 8) ............................. 4-26

Figure 4-22. ERROR wiring diagram (pins 4 and 8) ........................................... 4-26

Figure 4-23. MAXIMUM POWER LEVEL REACHED wiring diagram (pins 5

and 8) ................................................................................................................ 4-27

Figure 4-24. RF ON wiring diagram (pins 6 and 8) ............................................. 4-27

Figure 4-25. INTERFACE VOLTAGE wiring diagram (pins 7 and 8) .................. 4-28

Figure 4-26. BLANKING/PULSING MODE wiring diagram (pins 9 and 8) .......... 4-28

Figure 4-27. RF POWER ON wiring diagram (pins 10 and 8) ............................. 4-29

Figure 4-28. DC BIAS SET POINT wiring diagram (pins 11 and 8) .................... 4-29

Figure 4-29. RF POWER SET POINT wiring diagram (pins 12 and 8) ............... 4-29

Figure 4-30. TEST VOLTAGE FOWARD POWER wiring diagram (pins 13

and 8) ................................................................................................................ 4-30

Figure 4-31. TEST VOLTAGE REFLECTED POWER wiring diagram (pins

14 and 8) ........................................................................................................... 4-30

Figure 4-32. TEST VOLTAGE FOR DC BIAS wiring diagram (pins 15 and

8) ....................................................................................................................... 4-31

Figure 4-33. RS-232 port connector .................................................................... 4-32

Figure 4-34. Graphic representation of a message packet ................................. 4-34

Figure 4-35. AE Bus communications transaction .............................................. 4-36

Figure 4-36. Communications transaction example ............................................ 4-37

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Advanced Energy

Figure 4-37. PROFIBUS port connector ............................................................. 4-38

Figure 4-38. Example of a segment .................................................................... 4-39

Figure 4-39. Ethernet connector and indicators .................................................. 4-45

Figure 5-1. Cesar unit dimensions ........................................................................ 5-2

Figure 5-2. Cesar rear view ................................................................................... 5-3

Figure 5-3. RF Output connector .......................................................................... 5-6

Figure 5-4. RF cover ............................................................................................. 5-6

Figure 5-5. RF / User Port interlock adapter cable ................................................ 5-7

Figure 5-6. RF / User Port interlock adapter cable, attached to unit ..................... 5-8

Figure 5-7. CEX Connector ................................................................................. 5-10

Figure 5-8. AC Input (Mains) connector .............................................................. 5-11

Figure 5-9. Front panel ........................................................................................ 5-19

Figure 5-10. Front panel program menu tree ...................................................... 5-22

Figure 5-11. Front panel program menu tree (continued) ................................... 5-23

Figure 5-12. Generator with no cable attenuation ............................................... 5-48

Figure 5-13. Generator with cable attenuation .................................................... 5-48

Figure 6-1. Input (Mains) connector and fuse box ................................................ 6-4

xiv 57023916-00BList of Figures

Cesar® Generator

1027

Chapter

Safety and Product Compliance Guidelines

PRODUCTS DOCUMENTED IN THIS MANUAL

This user manual documents air-cooled Cesar generators.

The following part numbers include some non-standard features, which will be called out where they apply:

• 61300129: DC Bias Out on the User Port. All other part numbers: DC Bias In on the User Port.

• 61300121: 0 V to 5 V scaling on the User Port. All other part numbers: 0 V to 10 V scaling on the User Port.

IMPORTANT SAFETY INFORMATION

To ensure safe installation and operation of the Advanced Energy Cesar unit, read and understand this manual before attempting to install and operate this unit. At a minimum, read and follow the safety guidelines, instructions, and practices.

DANGER, WARNING, AND CAUTION BOXES IN THE MANUAL

This symbol represents important notes concerning potential harm to people, this unit, or associated equipment. Advanced Energy includes this symbol in Danger, Warning, and Caution boxes to identify specific levels of hazard seriousness.

DANGER:

DANGER indicates an imminently hazardous situation that, if not avoided, will result in death or serious injury. DANGER is limited to the most extreme situations.

57023916-00B Safety and Product Compliance Guidelines 1‑1

Advanced Energy

WARNING:

WARNING indicates a potentially hazardous situation that, if not avoided, could result in death or serious injury, and/or property damage.

CAUTION:

CAUTION indicates a potentially hazardous situation that, if not avoided, could result in minor or moderate injury, and/or property damage. CAUTION is also used for property-damage-only accidents.

SAFETY GUIDELINES

Review the following information before attempting to install and operate the product.

Rules for Safe Installation and Operation

Please note the following rules:

• Do not attempt to install or operate this equipment without proper training.

• There are no user-serviceable parts inside the unit. Refer servicing to trained service personnel.

• Ensure that this unit is properly grounded.

• Ensure that all cables are properly connected.

• Verify that input line voltage and current capacity are within specifications before turning on the power supplies.

• Use proper electrostatic discharge (ESD) precautions.

• Always be careful around this equipment.

INTERPRETING PRODUCT LABELS

The following labels may appear on your unit:

1‑2 Safety and Product Compliance Guidelines 57023916-00B

1020

CE label

1029

1028

1030

1027

Protective Earth ground

Hazardous voltage

Nonionizing radiation

Cesar® Generator

PRODUCT COMPLIANCE

The following sections include information about unit compliance and certification, including the conditions of use required to be in compliance with the standards and directives.

Product Certification

NRTL: Nationally Recognized Testing Laboratory

Refer to manual for more information

Electrical fuse

Certain options of this product may be certified according to the list below.

For more information, refer to the Certificate or Letter of Conformity (US) or Declaration of Conformity (EU) accompanying the product.

• NRTL – Safety certified by CSA International, a Nationally Recognized Testing Laboratory

• CE Marking – Self-declaration, assessed by AE Corporate Compliance

57023916-00B Safety and Product Compliance Guidelines 1‑3

Advanced Energy

• EMC measurements – Verified by the AE Corporate Compliance Lab and/or an accredited third party lab

Safety and EMC Directives and Standards

Certain options of this unit have been tested for and comply with the following electromagnetic compatibility (EMC) and safety directives and standards and industry guidelines.

☞ Important

This device must be installed and used only in compliance with the directives and standards listed in addition to EN 60204 (IEC 60204) and applicable requirements.

☞ Important

This equipment must be installed and used in accordance with the Conditions of Use described in this manual. If this equipment is expanded, modified, or installed into a larger system, the user is responsible to guarantee the compliance of the overall system. If this equipment is used with external components, the user must ensure that the Safety and EMC requirements are not violated.

ELECTROMAGNETIC COMPATIBILITY (EMC) DIRECTIVES AND STANDARDS

• 2004/108/EC

EC Council directive on the approximation of the laws of the Member States relating to electromagnetic compatibility (EMC Directive)

• 47 CFR Part 18

Code of Federal Regulations—Limits and methods of measurement of radio interference characteristics of industrial, scientific, and medical equipment

• EN 55011

Limits and methods of measurement of radio disturbance characteristics of industrial, scientific, medical (ISM) radio frequency equipment (Class A, Group

2) (CISPR 11)

• EN 61000-6-2

Electromagnetic Compatibility (generic immunity standard—industrial)

SAFETY DIRECTIVES AND STANDARDS

• 2006/95/EC

EC Council directive on the harmonization of the laws of the Member States relating to electrical equipment designed for use within certain voltage limits (LVD - Low Voltage Directive)

• EN 61010-1

1‑4 Safety and Product Compliance Guidelines 57023916-00B

Safety requirements for Electrical Equipment for Measurement, Control, and Laboratory Use - Part 1: General Requirements

Conditions of Use

To comply with the stated directives and standards, you must meet the following conditions of use:

DANGER:

RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to it.

• Before making any other connection to this device, connect the auxiliary Protective Earth ground terminal to a local earth ground with a copper wire that is sized according to the applicable requirements.

• Install and operate this device only in accordance with the listed safety guidelines and all other applicable directives and standards specific to your process and application.

Cesar® Generator

• Install and operate this device in an overvoltage category II or better installation.

• Install and operate this device only in a pollution degree 2 or better environment, which means an indoor location such as a computer room, office, or factory floor where only nonconductive pollution occurs during operation. Occasionally, condensation causes temporary conductivity when the device is not operating.

• Install this device so that it is fully enclosed by a rack or other enclosure. The rack or enclosure must be metal and either reinforced or of sufficient thickness to resist both of the following tests:

◦ A steady force of 445 N, applied through a steel hemisphere 12.7 mm in

diameter

◦ An impact of 7 J, applied by dropping or swinging a 0.53 kg, 50 mm diameter

steel sphere

◦ Following the tests, there must be still a minimum clearance of 12.7 mm

between the rack or enclosure and the power supply. There shall be no deformation of the power supply.

• The on/off power switch does not completely disconnect the AC input. If the AC power cord is not accessible after installation, a separate external switch is required to disconnect AC power.

• The AC line cord must be terminated according to the applicable requirements.

• Use only shielded cables on the serial and user communications interfaces.

57023916-00B Safety and Product Compliance Guidelines 1‑5

Advanced Energy

• Install and operate this device with a 16 A (maximum) circuit breaker switch on the AC input to provide the required over-current protection. The circuit breaker switch must be easily accessible and near the device.

• Install this device so that the input power connection is inaccessible to the user.

• Install this device so that the output power connection is inaccessible to the user.

INTERLOCKS AND LIMITING CONDITIONS

WARNING:

Advanced Energy products only include interlocks when required by product specification. Interlocks in Advanced Energy products are not intended to meet or satisfy safety requirements. Where interlocks exist, you must still meet and satisfy safety requirements. The presence of interlocks does not imply operator protection.

All Cesar generators have an Interlock interface. This interface allows you to integrate any Cesar generator into a system interlock loop that can interrupt the delivered RF power.

Even if you do not connect this Cesar generator into a larger system interlock loop, you must make the proper interlock loop connections for the unit to enable RF power.

The Cesar generator may be shipped with an interlock jumper plug that provides a connection between the User Port interlock pins. You can use this jumper plug to satisfy the interlock and enable operation in situations where you do not intend to connect the remaining pins on this port.

☞ Important

Using the interlock jumper plug disables the interlock function.

☞ Important

Interlock does not switch the generator on/off. If an interlock is not satisfied, the Cesar generator will issue an interlock error. Interlock errors must be resolved, so you must switch RF off (via the RS-232 or User Port) or resolve the error (via the front panel) before you can switch on RF power again.

Your unit may include an RF cover. For units with an RF cover:

• RF output is disabled when the cover is removed. Ensure that the RF cover is in place.

• In addition to the interlock jumper plug for the User Port and the RF cover, your unit uses an RF / User Port interlock adapter cable. For information on connecting this cable, see “Connecting Output Power” on page 5-6.

1‑6 Safety and Product Compliance Guidelines 57023916-00B

Cesar® Generator

In addition, the Cesar generator includes specific limits that are described in

Table 1-1. The errors generated by exceeding these limits are described in “Troubleshooting Using Error Codes” on page 6-7.

Table 1‑1. Cesar limiting conditions

Limit Unit Response and User Resolution

RF power limit When the unit reaches the forward or reflected power limit, the

unit reduces forward power to remain within the limits. Output is not at set point.

Overtemperature When the unit exceeds the specified maximum temperature, RF

power shuts off, and the unit displays an error code.

Current limit When the voltage or the current exceeds the limit of the

internal SMPS, the unit reduces output to remain within the limits. Output is not at set point.

External pulse frequency limit When the external pulse frequency exceeds the limit, the unit

turns RF power off.

Target lifetime limit The target lifetime warning occurs when the target lifetime

reaches the user-set limit. This warning does not affect the operation of the unit.

57023916-00B Safety and Product Compliance Guidelines 1‑7

Advanced Energy

1‑8 Safety and Product Compliance Guidelines 57023916-00B

Cesar® Generator

Chapter

Product Overview

GENERAL DESCRIPTION

AE Cesar RF power generators are Class E Switched Mode Amplifiers for Radio Frequency (CESAR), a new generation of versatile RF power supplies for semiconductor production, and general plasma processing. This generator employs parallel excited circuitry in a compact, 19″ rack-mountable designs. Typical applications include sputtering, reactive ion etching, RF bias, plasma polymerization, plasma surface treatment, and CO2 laser systems.

The Cesar generator incorporates advanced switch mode technology. This highly efficient, resonant switching concept results in reduced energy costs, reduced downtimes, and a longer lifetime for the unit.

Designed to regulate power into a broad range of output impedances, the Cesar generator can operate in forward power, real power, or DC bias regulation mode In addition, you can add a cable attenuation variable to the power regulation setting.

Both manual and automatic tuning control support operation into a fixed impedance matching network, which simplifies system complexity, increases reliability, and improves process-to-process repeatability.

You can control and configure the Cesar generator using any of the following methods:

• Remotely through an analog User Port.

• Remotely through a communication host port.

• Using the front panel, which features a liquid crystal display (LCD) with an easy-to-use menu.

The Cesar generator operates from an AC power source. The unit can tolerate arbitrary phase rotation of the input power connections. The generator is air-cooled and has all power and interface-port connections at the rear of the generator.

57023916-00B Product Overview 2‑1

2965

(2)

Driver/Exciter

(1)

Analog I/O

(5)

Digital

Controller

(3)

Amplifiers

(4)

RF Power

Measurement

(6)

Sensor

Electronics

User Port

Host Port

RF Output

Advanced Energy

THEORY OF OPERATION

Figure 2‑1. Cesar block diagram

Module Description

(1) Analog I/O This module provides the User interface.

(2) Driver/Exciter This module generates power at the designated output

frequency to drive the main RF sections and contains the CEX functions.

(3) RF Amplifiers This module generates RF power.

(4) RF Power Measurement

(5) Digital Controller

This module samples the output signal and sends it to the sensor electronics.

This module is the main processor and data acquisition section. It also provides host communications through a host port.

(6) Sensor Electronics

This module detects RF samples and sends them to the microprocessor.

2‑2 Product Overview 57023916-00B

Cesar® Generator

Chapter

Specifications

PHYSICAL SPECIFICATIONS

Table 3‑1. Physical specifications

Description Specification

General physical specifications

Size 88 mm (H) x 483 mm (W) x 500 mm (D)

3.5″ (H) x 19″ (W) x 19.7″ (D)

Dimensions include front panel mounting extensions. Dimensions do not include RF output, fan, connectors.

Weight 19.2 kg (42 lb)

Mounting

Clearance 6 cm (2.36″) required on each side for airflow; 10.16 cm (4″)

required at rear for cable connections

Mounting 19″ rack-mounting holes are provided on the generator front

panel.

Connectors

AC input power IEC 60320 C14 inlet; mates with IEC 60320 C13 connector on

power cord

RF output N-Type, female connector

User port connection (Analog I/O)

Host port connection (serial I/O)The Cesar generator has three host port communication

There are two analog interface options available for the Cesar generator:

• 25-pin subminiature-D male

• 15-pin subminiature-D male

interface options:

• An RS-232 9-pin, female, shielded, subminiature-D connector

• A PROFIBUS 9-pin, female, subminiature-D connector

• An Ethernet Modbus/TCP connection

CEX CEX BNC, female

Front panel display LCD graphic display

57023916-00B Specifications 3‑1

Advanced Energy

ELECTRICAL SPECIFICATIONS

Table 3‑2. Electrical specifications

Description Specification

Electrical requirements

AC input voltage 230 VAC (187 VAC to 253 VAC), 1 φ, neutral, with ground (PE)

AC line frequency 50 Hz to 60 Hz

AC input current See the product label on your unit for the AC Current

Input power Varies by your unit's AC input current. See the product label on

your unit for the AC Current. The input power specification is based on full rated power and nominal line into 50 Ω load.

AC input current Input power

2.8 A 650 VA

3 A 680 VA

4.6 A 1050 VA

4.8 A 1100 VA

6.5 A 1490 VA

6.8 A 1550 VA

8 A 1780 VA

10 A 2225 VA

Power factor 97% to 99% at full rated power, mid-frequency, and nominal line

into 50 Ω load

Overcurrent protection 10 A, 250 V, T, high breaking capacity H electrical fuse (for

example, Schurter 0001.2514)

Efficiency (line to load) Varies by unit. Effeciency listed below is typical at full-rated

power nominal line, into a 50 Ω load.

• 56% — Models 605, 6010

• 58% — Models 403, 405, 4010

• 63% — Models 273, 276, 2710 6

• 65% — Models 026, 046, 133, 136

• 66% — Models 0210, 0410, 1310, 1312

Power specifications

RF frequency See your unit’s product label for the RF Frequency. Accuracy is

± 0.005%

3‑2 Specifications 57023916-00B

Table 3‑2. Electrical specifications (Continued)

Description Specification

Minimum output power 1% of your unit’s maximum output power.

The Cesar generator can operate below this level, but accuracy is not guaranteed.

Maximum output power See your unit’s product label for the RF Power.

Cesar® Generator

Delivered power into mismatch

Varies by output power (see your unit's label for RF Power)

RF power Delivered power

300 W 33% of nominal power

500 W 30% of nominal power

600 W 33% of nominal power

1000 W 20% of nominal power

1200 W 16% of nominal power

Maximum reflected power

Varies by power (see your unit's label for RF Power)

RF power Maximum reflected power

300 W 100 W

500 W 175 W

600 W, 1000 W, 1200 W 200 W

Load impedance 50 Ω

Harmonics At full rated output, all harmonics are 45 dB below the RF output

signal when operated into a 50 Ω, nonreactive load impedance. All spurious (nonharmonic) outputs are 60 dB below the RF output signal.

RF power regulation 1.0% of set point or 0.1% of full rated power, whichever is greater

RF power stability 1.0% of set point or 0.2% of full rated power, whichever is greater

RF pulse frequency

• 1 Hz to 10 kHz for units with RF Frequency of 2 MHz through 4 MHz

• 1 Hz to 30 kHz for units with RF Frequency of 13.56 MHz through 60.0 MHz

RF pulse duty cycle 1% to 99%

CEX Specifications

CEX input signal

• TTL or Sine; 0 to + 19 dBm, 50 Ω for models 2710, 403, 405, 4010

• TTL for all other models

57023916-00B Specifications 3‑3

Advanced Energy

Table 3‑2. Electrical specifications (Continued)

Description Specification

CEX output signal

• Sine; 7 dBm ± 3dB, 50 Ω for models 2710, 403, 405, 4010

• TTL for all other models

COOLING SPECIFICATIONS

Table 3‑3. Air cooling specifications

Description Specification

Cooling medium Air

Minimum air flow

118 m3/h (69.45 cfm)

ENVIRONMENTAL SPECIFICATIONS

Table 3‑4. Environmental standard specifications

Description Specification

Overvoltage Category II

Pollution degree 2

Table 3‑5. Climatic specifications

Temperature Relative Humidity Air Pressure

Operating 5°C to +35°C

+41°F to +95°F

5% to 85%

+1 g/m3 to +25 g/m

note 1

78.8 kPa to 106 kPa

788 mbar to 1060 mbar

Equivalent altitude: 2000 m to -500 m (6562′ to -1640′)

Storage -25°C to +55°C

-13°F to +131°F

5% to 95%

+1 g/m3 to +29 g/m

78.8 kPa to 106 kPa

788 mbar to 1060 mbar

Equivalent altitude: 2000 m to -500 m (6562′ to -1640′)

3‑4 Specifications 57023916-00B

Table 3‑5. Climatic specifications (Continued)

Temperature Relative Humidity Air Pressure

Cesar® Generator

Transportation -25°C to +70°C

-13°F to +158°F

note 2

95%

+60 g/m3

note 3

65.6 kPa to 106 kPa

656 mbar to 1060 mbar

Equivalent altitude: 3500 m to -500 m (11480′ to -1640′)

note 1

Non-condensing, no formation of ice

note 2

Maximum relative humidity when the unit temperature slowly increases, or when the unit

temperature directly increases from -25°C to +30°C

note 3

Maximum absolute humidity when the unit temperature directly decreases from +70°C to +15°C

57023916-00B Specifications 3‑5

Advanced Energy

3‑6 Specifications 57023916-00B

Pin 8 Pin 1

Pin 9

Pin 15

Cesar® Generator

Chapter

Communication Controls

DIAGNOSTIC INTERFACE

Each Cesar generator has a Diagnostic interface for use only at authorized service centers. Technicians can check internal commands, calibrate the unit, or flash software using this interface.

MATCHING INTERFACE

Each Cesar generator provides a Matching interface that allows full communication between the Cesar generator and a VarioMatch or Navio matching network (or other electrically and functionally compatible matching network).

☞ Important

This interface will not work with other matching networks unless they are electrically and functionally compatible.

Matching Interface Connector

The Matching interface is a 15-pin, subminiature-D, female connector

Figure 4‑1. Matching interface connector

Matching Interface Pin Descriptions

Table 4‑1. Matching interface pin descriptions

Pin Name Signal

type

Level Description

1 GROUND Connect to the shield of

the cable (for example, RC cable).

57023916-00B Communication Controls 4‑1

Advanced Energy

Table 4‑1. Matching interface pin descriptions (Continued)

Pin Name Signal

Level Description

type

2 DECREASE

Load

Digital Output

Open collector 30 V capable

The output is connected to ground to turn the Load motor counter clockwise.

3 INCREASE

Load

Digital Output

Open collector 30 V capable

The output is connected to ground to turn the Load motor clockwise.

4 DECREASE

Tune

Digital Output

Open collector 30 V capable

The output is connected to ground to turn the Tune motor counter clockwise.

5 INCREASE

Tune

Digital Output

Open collector 30 V capable

The output is connected to ground to turn the Tune motor clockwise.

6 MEASURE

GROUND

Reference ground for the measurement of analog signals at pins 12 to 14.

7 NO

CONNECTION

8 MANUAL TUNE Digital

Output

Open collector 30 V capable

To set the VarioMatch or Navio matching network to manual tune control, connect this pin to ground. To set the VarioMatch or Navio matching network to automatic tune control, leave this pin unconnected.

9 CASE GROUND Connect to the shield of

the cable.

10 NO

CONNECTION

11 STATUS Digital

Input

+15 V This pin connects the

+15 V output voltage of the VarioMatch or Navio matching network to indicate if a match network is connected.

4‑2 Communication Controls 57023916-00B

Cesar® Generator

Table 4‑1. Matching interface pin descriptions (Continued)

Pin Name Signal

12 DC BIAS

MEASURE VOLTAGE

13 POSITION OF

TUNE CAPACITOR

Analog Input

type

Level Description

0 V to 10 V This pin reads a test

voltage of the DC self bias voltage. The scaling is adjustable. For example, in the default configuration of the VarioMatch or Navio matching network, 4000 V bias voltage is equal to 10 V test voltage and is displayed on the front panel as 4000.

0 V to 10 V The voltage at this input is

proportional to the position of the Tune capacitor. A 10 V reading at this pin is equal to 100% on the front panel display.

14 POSITION OF

LOAD CAPACITOR

15 MATCH IS

ACTIVE

USER PORT

The User Port on the Cesar generator provides analog and digital signals for controlling and monitoring the unit.

Analog Input

Digital Input

0 V to 10 V The voltage at this input is

proportional to the position of the Load capacitor. A 10 V reading at this pin is equal to 100% on the front panel display.

Pull up to 5 V This input is switched to

ground when the VarioMatch or Navio matching network is active (motors are running) and it floats when the matching procedure is complete.

There are two User Port options available for the Cesar generator:

• A 25-pin User Port

57023916-00B Communication Controls 4‑3

Pin 1 Pin 13

Pin 14

Pin 25

Advanced Energy

• A 15-pin User Port

This section describes both User Port connectors, the minimal connections required to operate the unit, cabling requirements, and detailed information about the User Port signals.

25-Pin User Port

USER PORT CONNECTOR

The User Port uses a 25-pin, shielded, female, subminiature-D connector.

Figure 4‑2. User Port connector, 25 Pin

SATISFYING MINIMAL REQUIREMENTS FOR THE 25-PIN USER PORT

If you do not use the User Port to control or monitor the Cesar generator, you still must satisfy the User Port INTERLOCK LOOP signal to operate the generator.

WARNING:

The Cesar generator may be shipped with an interlock jumper plug that provides a connection between the interlock pins. You can use this jumper plug to satisfy the interlock and enable operation in situations where you do not intend to connect the remaining pins on this port.

Units with an optional RF cover: In addition to the interlock jumper plug for the User Port, your unit uses an RF / User Port interlock adapter cable.

4‑4 Communication Controls 57023916-00B

Using the interlock jumper plug disables the interlock function.

Cesar® Generator

Interlock does not switch the generator on/off. If an interlock is not satisfied, the Cesar generator will issue an interlock error. Interlock errors must be resolved, so you must switch RF off (via the User Port or host port) or resolve the error (via the front panel) before you can switch on RF power again.

If you will be using the User Port, see pins 10 and 23 in the pin descriptions.

When the interlock is opened and then closed again, you must resolve the interlock error before using the generator again. To resolve the error with the User Port, you must switch RF power from on to off. For this reason, never physically connect the RF POWER ON pin with INTERLOCK. If you do so you many not be able to switch on the generator.

Your unit includes an RF/User port interlock adapter cable, which connects to the unit’s RS-232 and the RF cover. You will use the RS-232 connector on the cable in the same way as described in this section.

Your unit includes an RF cover. You must connect the unit’s RS-232 to the RF cover.

25-PIN USER PORT CABLING REQUIREMENTS

The cable used to connect the generator’s User Port to the system controller must be a shielded, 25-wire I/O cable.

Recommendations:

• Shielded twisted-pair wiring may be used but is not mandatory.

• Signal losses should be minimized by keeping the cable length as short as possible. The maximum recommended cable length between the generator and the controller is 10 meters (33´).

• Signals at the User Port can be sensitive to environmental noise. Take standard preventive measures against electro-magnetic interference (EMI), including using shielded cabling to prevent errors from being induced into the User Port.

• Grounding the User Port at the power supply reduces noise interference. To avoid ground loop problems, you should typically ground only one end of the cable.

ACTIVATING THE 25-PIN USER PORT

The Cesar generator can run in front panel control mode, User Port remote control mode, or host port remote control mode. You can activate the User Port remote control mode using either of the following methods:

• The front panel

57023916-00B Communication Controls 4‑5

Advanced Energy

• Host port command 14

If User Port remote control is activated, it remains active even if the generator is switched off and on. You can deactivate User Port remote control via either the front panel or host port command 14.

RESOLVING ERROR DISPLAYS WHEN USING THE 25-PIN USER PORT

If the Cesar generator encounters an error while being operated via the User Port, the generator displays the error message on the front panel display and turns off RF power. The Cesar generator continues to show the error message on the front panel until both of the following conditions are met:

WARNING:

RISK OF DEATH OR BODILY INJURY. The Cesar unit will deliver RF power immediately at system power up when all of the following conditions are met: User port is activated; pin 4 ( (

INTERLOCK LOOP

) is activated.

RF POWER ON

) is activated; and pin 10

• The error condition is gone

• The RF on signal is deactivated

Once the above two conditions are met, the error message is deleted and the Cesar generator shows the normal display.

25-PIN USER PORT PIN DESCRIPTIONS AND WIRING DIAGRAMS

User Port Signal Specifications

Unless otherwise specified, all analog signals are 0 V to 10 V while all digital signals are 5 V or V

Interface

4‑6 Communication Controls 57023916-00B

Cesar® Generator

Table 4‑2. User Port Signal Specifications

Signal Type Description

Analog Inputs By default, the User Port set point and DC bias input signals

(pins 5 and 7) are scaled 0 V to 10 V (physically limited to 10 V). These signals are scalable from 0 V to 2 V up to 0 V to 20 V (physically limited to 10 V) in increments of 0.5 V. You can set the scaling through the RS-232 port or the PROFIBUS port (host port command 30) or through the front panel menu commands.

☞ Important

Using lower input voltages decreases resolution.

☞ Important

Use a range of 0 V to 20 V only for special purposes such as cable attenuation.

Analog Outputs

By default, the User Port analog output signals (pins 2 and 3) are scaled 0 V to 10 V (physically limited to 10 V). These signals are scalable from 0 V to 2 V up to 0 V to 20 V (physically limited to 10 V) in increments of 0.5 V. You can set the scaling through the RS-232 port or the PROFIBUS port (host port command 30) or through the front panel menu commands.

☞ Important

Using lower input voltages decreases resolution.

☞ Important

Use a range of 0 V to 20 V only for special purposes such as cable attenuation.

These signals are driven by operational amplifiers capable of driving high-capacitance loads such as those expected in shielded interface applications. The user’s receiver must present a 10 kΩ (or higher) impedance to these signals. The readback signals represent the forward and reflected power as measured at the output of the generator.

Digital Inputs Pins 4, 6, 8, and 10 are opto-coupled. The user’s signal drives the

LED in the opto-coupler through a 4.7 kΩ resistor. A signal level of 4 V to 30 V applied to the input pin activates the signal.

Digital Outputs The status signals provided by the generator (pins 12, 14, 22, and

24) are opto-coupled with NPN transistor outputs. The collector and emitter of each transistor are provided to the user interface. Each transistor can provide a maximum of 8 mA of collector current and may be operated with a collector-to-emitter voltage of up to 30 V.

Pulse Input The pulse input (pin 25) is a high-speed opto-coupled input. The

user’s signal drives the LED in the opto-coupler through a 1.2 kΩ resistor. A signal level of 0 V to 1 V corresponds to low and 4 V to 20 V corresponds to high.

57023916-00B Communication Controls 4‑7

Advanced Energy

Table 4‑2. User Port Signal Specifications (Continued)

Signal Type Description

Interlock The interlock signal (pins 10 and 23) enables the RF power

generation. Pin 10 is tied to the generator’s +15 V supply. Connecting pin 10 to pin 23 closes the loop, enabling RF power.

User Port Pin Descriptions

This table provides the connector pin descriptions for the 25-pin User Port.

Table 4‑3. 25-Pin User Port Pin Descriptions

Signal

Return

Name Signal

Type

1 Return for pin 14 See pin 14

2 15 REFLECTED

POWER

Analog output

MONITOR

Description

This signal provides a linearly scaled read back of reflected power as measured at the generator output.

The default range is 0 V to 10 V, but you can change this range.

Default setting: 0 V to 10 V = 0 W to maximum rated power output

Units with 0 V to 5 V scaling only: The default range is 0 V to 5 V. Default setting: 0 V to 5 V = 0 W to 1000 W. To see if your unit has 0 V to 5 V scaling, see “Products Documented in this

Manual” on page 1-1.

Pin 15 must be grounded.

3 16 FORWARD/

LOAD POWER MONITOR

Analog output

This signal provides a linearly scaled read back of forward power or real power (sometimes called load power) as measured at the generator output. To change control settings, see pin 8.

The default range is 0 V to 10 V, but you can change this range.

Default setting: 0 V to 10 V = 0 W to maximum rated power output.

Units with 0 V to 5 V scaling only: The default range is 0 V to 5 V. Default setting: 0 V to 5 V = 0 W to 1000 W. To see if your unit has 0 V to 5 V scaling, see “Products Documented in this

Manual” on page 1-1.

Pin 16 must be grounded.

4‑8 Communication Controls 57023916-00B

Table 4‑3. 25-Pin User Port Pin Descriptions (Continued)

Signal

Return

Name Signal

Type

Cesar® Generator

Description

4 17 RF POWER ON Digital

input

5 18 SET POINT Analog

input

This signal enables or disables RF output. To enable RF output, apply a positive voltage of 4 V to 30 V to this pin. To disable RF output, apply a voltage of 1.5 V or less to this pin

☞ Important

The interlocks must be satisfied and the setpoint must be within the output power range before unit will deliver power.

Pin 17 must be grounded.

This signal sets the RF output set point. Depending on the regulation mode, the set point refers to forward power, real power, or DC Bias regulation. The default range is 0 V to 10 V, but you can change this range.

A 0 V to 10 V signal applied to this pin linearly controls the set point of the generator.

Default setting: 0 V to 10 V = 0 W to maximum rated power output

6 19 RF FORWARD

POWER/ DC BIAS REGULATION

Digital input

For DC bias regulation, the scaling of the set point must be the same as for the DC bias signal (see pin 7).

Use this signal to select DC bias or forward power regulation mode. To regulate on DC bias input, apply a positive voltage of 4 V to 30 V to this pin. To regulate on forward or real power, apply a voltage of 1.5 V or less or an open connection.

See pin 8 for switching between forward and real power regulation.

57023916-00B Communication Controls 4‑9

Advanced Energy

Table 4‑3. 25-Pin User Port Pin Descriptions (Continued)

Signal

Return

Name Signal

Type

Description

7 20 DC BIAS INPUT Analog

input

If your unit uses DC Bias Out, see the next row.This input signal is used for DC bias regulation, where the set point is given by pin 5 (scaling must be the same). The signal closes the control loop around external components in the RF path. The default range is 0 V to 10 V, but you can change this range.

Default setting: 0 V to 10 V = 0 V to 4000 V

Units with 0 V to 5 V scaling only: The default setting: 0 V to 10 V = 0 V to 3333 V. To see if your unit has 0 V to 5 V scaling, see “Products Documented

in this Manual” on page 1-1.

Typically, matching networks provide a DC bias voltage monitor signal. When this scaled representation of the DC bias voltage is used for DC bias regulation (see pin 6), the scaling must be the same as for the set point (see pin 5). VarioMatch and Navio matching networks provide a DC bias voltage monitor signal for regulation through the Matching interface.

7 20 DC BIAS

OUTPUT

Analog output

(If your unit uses DC Bias Out. All other part numbers see previous row. See

“Products Documented in this Manual”

on page 1-1 to see if your unit uses DC Bias Out.) This signal provides a linearly scaled readback of DC Bias voltage as measured at the matching network. The default range is 0 V to 10 V, but you can change this range.

Default setting: 0 V to 10 V = 0 V to 4000 V

Pin 20 must be grounded.

4‑10 Communication Controls 57023916-00B

Table 4‑3. 25-Pin User Port Pin Descriptions (Continued)

Signal

Return

Name Signal

Type

Cesar® Generator

Description

8 21 RF FORWARD/

LOAD POWER REGULATION

Digital input

Use this signal to select between RF forward power or real power (sometimes called load power) regulation. Apply a positive DC voltage between 4 V and 30 V to regulate on real power. An open connection to pin 8 or a DC input voltage of less than 1.5 V causes forward power regulation.

Real power is defined as forward power minus reflected power.

Pin 6 also changes the regulation mode.

9 Return for pin 22 See pin 22.

10 23 INTERLOCK

LOOP

Digital input

To satisfy the interlock and enable RF power in the generator, close an external loop from pin 23 to pin 10. A resistance of 15 Ω or less across this pin closes the loop. Pin 23 feeds this loop via a current limiting circuit (maximum 120 mA).

Alternatively, you can satisfy the interlock by applying a voltage of +4 V to +30 V (referenced to ground) to pin

10.

11 Return for pin 24 See pin 24.

12 RESERVED

13 21 +15 VDC

SUPPLY

Supply A nominal +15 VDC output referenced

to chassis ground, auxiliary supply for external use (50 mA maximum); no internal limit.

14 1 SET POINT

STATUS

Digital output

When the generator is out of set point, a low (opto-coupler output) impedance is created between this pin and pin 1 (8 mA maximum).

15 Return for pin 2 See pin 2.

Pin 15 must be grounded at the host.

16 Return for pin 3 See pin 3.

Pin 16 must be grounded at the host.

17 Return for pin 4 See pin 4.

18 Return for pin 5 See pin 5.

19 N/A DC GROUND Chassis

ground

DC ground connection common to chassis ground.

57023916-00B Communication Controls 4‑11

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Table 4‑3. 25-Pin User Port Pin Descriptions (Continued)

Signal

Return

Name Signal

Type

20 Return for pin 7 See pin 7.

Description

21 N/A CHASSIS

GROUND

22 9 OVERTEMP Digital

Chassis ground

output

DC ground connection common to chassis ground.

When an internal overtemperature shutdown condition is detected, a low (opto-coupler output) impedance is created between this pin and pin 9 (8 mA maximum).

The overtemperature condition can occur in the RF driver, SMPS, or final amplifier.

23 10 Return for pin 10 See pin 10.

24 11 INTERLOCK

SATISFIED

Digital output

When the interlock is satisfied, a low (opto-coupler output) impedance is created between this pin and return pin 11 (8 mA maximum).

25 19 BLANKING/

PULSING

Pulse input When the unit is set for external pulsing,

this pin allows you to pulse (blank) the RF power. Set the required logic for RF on and off through the front panel menu.

When the unit is set for internal pulsing, this pin allows you to switch between internal pulsing and continuous wave operation. Select the appropriate function and signal level in the Pulse Settings selection in the front panel menu.

Wiring Diagrams for the 25-Pin User Port

The diagrams in this section provide wiring information to connect to the 25-pin User Port.

4‑12 Communication Controls 57023916-00B

1 nF

+15 V

10 k

220 220

10 k

10 nF

10 k

Voltage Measurement Device

(see pin description

for scaling)

Pin 15 must be grounded

Figure 4‑3. REFLECTED POWER MONITOR (pins 2 and 15)

2407

1 nF

+15 V

10 k

220 220

10 k

10 nF

10 k

Voltage Measurement Device

(see pin description

for scaling)

Pin 16 must be grounded

2408

1 nF

+4 V to +30 V

4 k7

Cesar® Generator

Figure 4‑4. FORWARD/LOAD POWER MONITOR (pins 3 and 16)

Figure 4‑5. RF POWER ON signal wiring (pins 4 and 17)

57023916-00B Communication Controls 4‑13

2411

+15 V

100 k

10 k

1 nF

See pin description for scaling

2409

1 nF

+4 V to +30 V

4 k7

2412

+15 V

100 k

10 k

1 nF

User-defined feedback

Advanced Energy

Figure 4‑6. SET POINT signal wiring (pins 5 and 18)

Figure 4‑7. RF FORWARD POWER/DC BIAS REGULATION wiring (pins 6 and 19)

Figure 4‑8. DC BIAS MONITOR signal wiring (pins 7 and 20) (units with DC Bias In)

4‑14 Communication Controls 57023916-00B

3647

1 nF

+15 V

10 k

220 220

10 k

10 nF

10 k

Voltage Measurement Device

(see pin description

for scaling)

Pin 20 must be grounded

2410

1 nF

+4 V to +30 V

4 k7

Cesar® Generator

Figure 4‑9. DC BIAS MONITOR signal wiring (pins 7 and 20) (units with DC Bias Out)

Figure 4‑10. RF FORWARD/LOAD REGULATION signal wiring (pins 8 and 21)

57023916-00B Communication Controls 4‑15

2413

+15 V

120 mA

1 nF

4 k7

+4 V to +30 V

Interlock

Interlock Return

(alternatively)

1838

+15 V

+15 V provided to user

Advanced Energy

Figure 4‑11. INTERLOCK LOOP signal wiring (pins 10 and 23)

Figure 4‑12. +15 VOLT DC signal wiring (pins 13 and 21)

4‑16 Communication Controls 57023916-00B

2415

1 nF

+ 30 V Maximum

Figure 4‑13. SET POINT STATUS signal wiring (pins 14 and 1)

1 nF

+ 30 V Maximum

2417

1 nF

+ 30 V Maximum

Cesar® Generator

Figure 4‑14. OVERTEMPERATURE signal wiring (pins 22 and 9)

Figure 4‑15. INTERLOCK SATISFIED signal wiring (pins 24 and 11)

57023916-00B Communication Controls 4‑17

2418

1 nF

1 k2 1 k2

+5 V

Out

Gnd

0 to 1 V (low)

4 to 20 V (high)

Pin 8

Pin 1

Pin 9

Pin 15

Advanced Energy

Figure 4‑16. BLANKING/PULSING signal wiring (pins 25 and 19)

15-Pin User Port

USER PORT CONNECTOR

The User Port uses a 15-pin, shielded, male, subminiature-D connector that connects the generator with an external remote control unit.

Figure 4‑17. User Port connector, 15 Pin

SATISFYING MINIMAL REQUIREMENTS FOR THE 15-PIN USER PORT

Each Cesar generator with a 15-pin User Port also has an Interlock interface that allows you to integrate any Cesar generator into a system interlock loop that interrupts delivered RF power.

WARNING:

Even if you do not connect the Cesar generator into a larger system interlock loop, you must make the proper connections for the unit to enable RF power.

4‑18 Communication Controls 57023916-00B

Pin 1

Cesar® Generator

The Cesar generator may be shipped with an interlock jumper plug that provides a connection between the interlock pins (pins 1 and 2). You can use this jumper plug to satisfy the interlock and enable operation in situations where you do not intend to connect the remaining pins on this port.

☞ Important

Using the interlock jumper plug disables the interlock function

☞ Important

Interlock does not switch the generator on/off. If an interlock is not satisfied, the Cesar generator will issue an interlock error. Interlock errors must be resolved, so you must switch RF off (via the User Port or host port) or resolve the error (via the front panel) before you can switch on RF power again.

Interlock Interface Connector

The Interlock interface is a 9-pin connector.

Figure 4‑18. Interlock interface connector

Interlock Interface Pin Descriptions

Pins not described in the table are reserved.

Pin Name Reference

1 INTERLOCK

INPUT (+)

3 Input

Signal type Level Description

(floating)

5 V to 24 V

Contact closure to pin 2 via an external interlock loop. You may also provide a 5 VDC to 24 VDC signal referenced to pin 3 to satisfy the interlock

2 INTERLOCK

OUTPUT

57023916-00B Communication Controls 4‑19

3 Output

(floating)

15 V Contact closure to

pin 1 via the user’s external interlock loop. This voltage output is floating and has no reference to ground.

Advanced Energy

Pin Name Reference

Signal type Level Description

3 INTERLOCK

RETURN (-)

floating 0 V This is the return pin

for an external interlock signal. This pin must be used as return for the external interlock voltage, because the interlock input (pin

1) is floating and has no reference to ground.

4 Connect to the shield

of the external interlock cable.

15-PIN USER PORT CABLING REQUIREMENTS

The cable used to connect the generator’s User Port to the system controller must be a shielded, 15-wire I/O cable.

Recommendations:

• Shielded twisted-pair wiring may be used but is not mandatory.

• Signal losses should be minimized by keeping the cable length as short as possible. The maximum recommended cable length between the generator and the controller is 10 meters (33´).

• Grounding the User Port at the power supply reduces noise interference. To avoid ground loop problems, you should typically ground only one end of the cable.

ACTIVATING THE 15-PIN USER PORT

• The front panel

• Host port command 14

4‑20 Communication Controls 57023916-00B

Cesar® Generator

WARNING:

RISK OF DEATH OR BODILY INJURY. The Cesar unit will deliver RF power immediately at system power up when all of the following conditions are met: User port is activated; pin 10 ( and pin 1 (

INTERLOCK INPUT

RF POWER ON

) of the Interlock interface is activated.

) of the User port is activated;

RESOLVING ERROR DISPLAYS WHEN USING THE 15-PIN USER PORT

• The error condition is gone

• The RF on signal is deactivated

Once the above two conditions are met, the error message is deleted and the Cesar generator shows the normal display.

15-PIN USER PORT PIN DESCRIPTIONS AND WIRING DIAGRAMS

This table provides the connector pin descriptions for the 15-pin User Port. For a description of the signal types, see “User Port Signal Specifications” on page 4-6

Table 4‑4. 15-Pin User Port Pin Descriptions

Signal

1 8 OPERATING

Return

Name Signal

MODE A

Type

Digital input

Description

Connecting pin 1 and pin 2 to a high or low level allows you to set the regulation mode as indicated in Table 4-5 on page 4-24.

A high level switches to remote control.

2 8 OPERATING

MODE B

Digital input

Connecting pin 1 and pin 2 to a high or low level allows you to set the regulation mode as indicated in Table 4-5 on page 4-24.

A high level switches to remote control.

57023916-00B Communication Controls 4‑21

Advanced Energy

Table 4‑4. 15-Pin User Port Pin Descriptions (Continued)

Signal

Return

Name Signal

Type

Description

3 8 READY STATUS Digital

output

4 8 ERROR Digital

output

5 8 MAXIMUM RF

POWER LEVEL

Digital output

REACHED

This signal indicates that the generator is ready for operation.

This signal indicates an error such as overload due to temperature, mismatch, or an open interlock loop.

This error message indicates that more RF power is demanded than available by the RF generator. This error may occur in the following situations:

• In DC Bias regulation mode, the RF power necessary for the desired DC Bias voltage may be higher than the generator is able to deliver.

• In real power regulation mode, the forward power necessary may be higher than the generator is able to deliver.

• The external pulsing frequency exceeds the limit. (See the specifications.)

6 8 RF ON Digital

output

This signal indicates that more than 1% of the nominal power is present at the RF output.

7 8 INTERFACE

VOLTAGE

Digital input

If no voltage is applied to pin 7, 5 V is the standard level for digital inputs and outputs. If you want any other level, an external voltage must be applied to pin 7 and will be used as supply voltage for the digital outputs at pin 3, 4, 5, and 6.

The voltage range is 5 V to 24 V, with a maximum current of 300 mA, depending on the load at the outputs.

8 GROUND Reference pin.

4‑22 Communication Controls 57023916-00B

Table 4‑4. 15-Pin User Port Pin Descriptions (Continued)

Signal

Return

Name Signal

Type

Cesar® Generator

Description

9 8 BLANKING/

PULSE MODE

10 8 RF POWER ON Digital

11 8 DC BIAS SET

POINT

TTL Input Pulse signal input. A TTL square wave

input

Analog input

input that allows RF power blanking. Use this input if the internal pulsing capabilities do not meet your requirements.

When external pulsing is not used, this input may be set up to switch between continuous wave operation and internal pulsing. This alternate function is enabled by changing the unit setting (Device Configuration Settings from the front panel)

This signal allows you to enable or disable RF power.

☞ Important

Before the generator can deliver power, the interlock must be satisfied.

This signal provides a linearly scaled setting to the DC bias voltage. The default range is 0 V to 10 V, but you can change this range.

12 8 RF POWER SET

POINT

13 8 TEST VOLTAGE

FOR FORWARD POWER

Analog input

Analog output

0 V to 10 V = 0 V to maximum DC bias (4000 V default maximum value).

This signal provides a linearly scaled setting to the RF forward power. The default range is 0 V to 10 V, but you can change this range.

For example, 5 V = 50% of the nominal generator power; 10 V = 100%.

This signal provides a linearly scaled readback of RF forward power as measured at the generator output. The default range is 0 V to 10 V, but you can change this range.

0 V to 10 V = 0 W to maximum output power.

57023916-00B Communication Controls 4‑23

Advanced Energy

Table 4‑4. 15-Pin User Port Pin Descriptions (Continued)

Signal

Return

Name Signal

Type

Description

14 8 TEST VOLTAGE

FOR REFLECTED POWER

15 8 TEST VOLTAGE

FOR DC SELF BIAS

Table 4‑5. Setting regulation mode with 15-pin User Port pins 1 and 2

Operating

Mode A

(Pin 1)

Low Low Local No remote control function

Operating

Mode B

(Pin 2)

Analog output

Control Setting

This signal provides a linearly scaled setting to reflected power as measured at the generator output. The default range is 0 V to 10 V, but you can change this range.

For example, 5 V = 50% of the nominal generator power; 10 V = 100%.

This signal provides a linearly scaled setting to DC self bias voltage as measured at the matching network. The default range is 0 V to 10 V, but you can change this range.

For example, 5 V = 50% of the nominal DC bias (4 kV); 10 V = 100%.

Description

Low High Remote RF forward power

High Low Remote DC Bias regulation

High High Remote Real power

Wiring Diagrams for the 15-Pin User Port

The diagrams in this section provide wiring information to connect to the 15-pin User Port.

4‑24 Communication Controls 57023916-00B

2332

+6 V

100 nF

3.9 k

5.6 k

10 k

10 nF

10 k

+15 V

33 V

5-24 V

Supplied

Figure 4‑19. OPERATING MODE A wiring diagram (pins 1 and 8)

2333

+15 V

100 nF

5-24 V

3.9 k

5.6 k

10 k

10 nF

10 k

+6 V

33 V

Supplied

Cesar® Generator

Figure 4‑20. OPEATING MODE B wiring diagram (pins 2 and 8)

57023916-00B Communication Controls 4‑25

2335

3.9 k

1.5 k

10 k

10 nF

1.5 k

50 mA

+5 V (or V at pin 7)

2336

3.9 k

1.5 k

10 k

10 nF

1.5 k

50 mA

+5 V (or V at pin 7)

Advanced Energy

Figure 4‑21. READY STATUS wiring diagram (pins 3 and 8)

Figure 4‑22. ERROR wiring diagram (pins 4 and 8)

4‑26 Communication Controls 57023916-00B

2337

3.9 k

1.5 k

10 k

10 nF

1.5 k

50 mA

+5 V (or V at pin 7)

2338

3.9 k

1.5 k

10 k

10 nF

50 mA

1.5 k

+5 V (or V at pin 7)

Cesar® Generator

Figure 4‑23. MAXIMUM POWER LEVEL REACHED wiring diagram (pins 5 and 8)

Figure 4‑24. RF ON wiring diagram (pins 6 and 8)

57023916-00B Communication Controls 4‑27

2339

+15 V

5-24 V

100 nF

out

100 nF

330 W

1.5 k

supply

100 nF

+6 V

33 V

External Supply

Adj

2343

5 V TTL

2.2 k

10 k

4.7 V

Advanced Energy

Figure 4‑25. INTERFACE VOLTAGE wiring diagram (pins 7 and 8)

Figure 4‑26. BLANKING/PULSING MODE wiring diagram (pins 9 and 8)

4‑28 Communication Controls 57023916-00B

2334

+15 V

100 nF

5-24 V

3.9 k

5.6 k

10 k

10 nF

10 k

+6 V

33 V

Supplied

Figure 4‑27. RF POWER ON wiring diagram (pins 10 and 8)

2340

+14 V

0-10 V

22 k

1 nF

2392

+14 V

0-10 V

22 k

1 nF

Cesar® Generator

Figure 4‑28. DC BIAS SET POINT wiring diagram (pins 11 and 8)

Figure 4‑29. RF POWER SET POINT wiring diagram (pins 12 and 8)

57023916-00B Communication Controls 4‑29

2341

+14 V

0-10 V=

0-100%

470 R

22 k

1 nF

25 V

2342

+14 V

0-10 V=

0-100%

470 R

22 k

1 nF

25 V

Advanced Energy

Figure 4‑30. TEST VOLTAGE FOWARD POWER wiring diagram (pins 13 and 8)

Figure 4‑31. TEST VOLTAGE REFLECTED POWER wiring diagram (pins 14 and

4‑30 Communication Controls 57023916-00B

2393

+14 V

0-10 V=

0-100%

470 R

22 k

1 nF

25 V

Figure 4‑32. TEST VOLTAGE FOR DC BIAS wiring diagram (pins 15 and 8)

CESAR GENERATOR HOST PORT

Cesar® Generator

The Cesar generator has three communications (host port) interface options that allow the generator to interface with a host computer:

• RS-232 With AE Bus

• PROFIBUS

• Ethernet (Modbus/TCP)

To determine which host port option you have, refer to the labels on your unit.

The host port commands are very similar for all interfaces. All host port commands are listed and described in the host port commands table.

RS-232 Interface

The Cesar unit provides a serial communications interface through the RS-232 port. This interface allows the Cesar unit to interface with a host computer using the AE Bus protocol.

The RS-232 AE Bus host port interface uses an RS-232 signal format and AE Bus communication protocol.

57023916-00B Communication Controls 4‑31

Pin 1

Advanced Energy

Installations that require a long cable or are located in an environment with high electrical noise may experience intermittent communications errors. If you experience intermittent communications errors, AE recommends adding an optocoupler plug between the RS-232 AE Bus host port and cable connector. Contact AE Global Services to purchase an opto-coupler for your unit.

RS-232 CONNECTOR

The serial RS-232 port connector is a 9-pin, female, shielded, subminiature-D connector for interfacing with a host computer.

Figure 4‑33. RS-232 port connector

RS-232 PORT PIN DESCRIPTIONS

Table 4‑6. RS-232 port pin descriptions

Signal

Name Description

1 RESERVED Reserved for future use

2 tx RS232 RS-232 transmit data

3 rx RS232 RS-232 receive data

4 RESERVED Reserved for future use

5 COM Data common

6 RESERVED Reserved for future use

7 RESERVED Reserved for future use

8 RESERVED Reserved for future use

Do not connect pins marked RESERVED. Do not ground this factory

RESERVED (FACTORY) Reserved for future use

reserved pin. Grounding this pin disrupts the operation of the unit.

AE BUS TRANSMISSION PARAMETERS

The communications capability of the RS-232 port is limited to the following parameters:

• RS-232 protocol

• Baud rates, selected on the front panel:

◦ 9600

4‑32 Communication Controls 57023916-00B

Cesar® Generator

◦ 19,200

◦ 38,400

◦ 57,600

◦ 115,200

• Cesar unit address is always 1.

• Odd parity

• One start bit, eight data bits, one stop bit

• Low-order bytes transmitted before high-order bytes (little endian)

The host computer must finish one transaction with the Cesar unit before it initiates another one, either with the same unit or any other unit.

The Cesar unit sends data through pin 2 (TX RS232). This pin must be connected to the receive pin (RX RS232) on the host computer’s serial connector. The receive pin is normally pin 2 for a standard, 9-pin serial port.

AE BUS PROTOCOL

The AE Bus protocol uses pure binary data (nothing is coded in ASCII) and is designed to facilitate direct communications between a host computer and the Cesar unit. The AE Bus message packet combines a set quantity of bits and bytes in such a way that groups of information can be sent over communications lines at one time. Five types of information (fields) make up a communications message packet.

• Header (address and the length of Data field)

• Command Number

• Optional Length byte

• Data

• Checksum

57023916-00B Communication Controls 4‑33

7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 07 6 5 4 3 2 1 07 6 5 4 3 2 1 01 07 6 5 4 3

Data (0-255 bytes)

Command Number

0-255

Header

5-bit address

3-bit length

Optional Length Byte Checksum

1138

Advanced Energy

Figure 4-34 shows the organization of these fields in the AE Bus message packet.

The subsequent paragraphs describe each field in detail.

Figure 4‑34. Graphic representation of a message packet

AE Bus Header Byte

The first byte in each packet contains two pieces of information: five bits contain the packet address, and three bits contain the data byte count. If the message packet originates with the host computer, the address specifies the packet destination (to the Cesar unit, for example). If the packet is going to the host, the address specifies the packet origin (from the Cesar unit). The address section of the Header field is five bits long (bits 3-7), which allows a total of 32 distinct addresses. Address 0 (zero) is reserved for the network broadcast address, which the Cesar unit does not support.

The remaining three bits (bits 0, 1, and 2) are the length bits. These bits tell the receiving unit how long the Data field is so that the unit can determine when it has received the entire message. If the Data field contains more than six bytes, the value of these three bits will be set to 7 (07h), and the Optional length byte field will contain a value indicating the number of data bytes in the Data field.

Note: The value of these bits refers only to the number of actual data bytes in the

Data field. Do not include the checksum byte when calculating the value for these bits.

AE Bus Command Number Byte

This one-byte field contains an 8-bit value from 0 to 255 (00h to ffh) representing the command number. If the message packet originates with the host computer, this value specifies the purpose of the message packet. If the message originates with the Cesar unit, the value specifies the command to which it is responding.

AE Bus Optional Length Byte

This field supplements the Header field and exists only when the length bits (bits 0, 1, and 2) in the Header field contain a value of 7 (07h). If the number of data bytes in the Data field is six or less, then the three length bits in the Header field are sufficient to represent this amount 0 to 6 (00h to 06h). Since the Data field may contain up to 255 bytes of information, the Optional Length byte is required when the Data field is larger than six bytes.

4‑34 Communication Controls 57023916-00B

Cesar® Generator

When the Data field is larger than six bytes, the length bits in the header (bits 0, 1, and 2) equals 7 (07h), and the Optional Length byte contains a one-byte value, from 7 to 255 (07h to ffh), representing the number of data bytes in the Data field.

AE Bus Data Bytes

The Data field may contain from 0 to 255 bytes of binary data. This field contains command-related data or a command status response (CSR). Since some commands do not require data, sometimes the Data field is not present.

If the value specified in the length bits (bits 0, 1, and 2) of the Header field is 0 to 6, the Cesar unit expects zero to six data bytes. However, if the value in the Header field is 7 (07h), the Cesar unit looks for the Optional Length byte after the Command field and reads this value to calculate the data byte count.

Unless otherwise specified for individual commands, AE Bus protocol is little endian, which means that all values greater than 1 byte are sent in little endian order. For example, a command with 7 data bytes that included one 8-bit value, one 16-bit value, and one 32-bit value, would be sent as shown in Table 4-7.

Table 4‑7. AE Bus byte structure

Value to send Byte configuration

8-bit value = 15 Byte 1 = 0x0F

16-bit value = 23450 Bytes 2 and 3 = 0x9A 0x5B

32-bit value = 147679 Bytes 4 through 7 = 0xDF 0x40 0x02 0x00

AE Bus Checksum Byte

This one-byte field is the last byte in the packet. The value of this byte depends upon the number of bytes in each of the preceding fields. The transmitting unit determines this value by accumulating the exclusive-or (XOR) of all bytes of the packet up to, but not including, the checksum value. The receiving unit accumulates the XOR of all bytes of the packet, including the checksum. If the result is zero, the unit has received the packet intact.

The unit will act on the message only if the address is valid and the checksum is validated.

CREATING AN IDEAL COMMUNICATIONS TRANSACTION

Figure 4-35 illustrates the steps in an ideal communications transaction between a

host computer and the Cesar unit.

57023916-00B Communication Controls 4‑35

Transmits

message

packet

Waits

Receives packet

Sends ACK

Assembles

CSR byte

data byte(s)

Then transmits

Receives ACK

END OF TRANSACTION[t = time]

Receives packet

Sends ACK

[t ]

1139

Advanced Energy

Figure 4‑35. AE Bus communications transaction

T0: Host Transmits Message Packet

The host computer sends a message packet to the Cesar unit. The packet contains one of the following:

• A command that requests data or status information

• A command and data that change a parameter setting

• An executable command

T1: Unit Verifies Host Transmission Packet

Once the Cesar unit receives the host computer transmission message packet, the Cesar unit verifies that the message is intended for it and not for another unit on the network. At this time, the Cesar unit also analyzes the checksum to verify that the message was received correctly.

• If the address does not match, the Cesar unit does not respond to the host computer; the Cesar unit resets and resumes waiting for a message addressed to it. If the address matches but the exclusive-or (XOR) sum of the bytes in the packet (including the checksum) is not zero, the Cesar unit sends a negative acknowledgment (NAK), hexadecimal 15h, to the host computer.

• If the address matches and the message is intact, the Cesar unit sends an acknowledgment (ACK), hexadecimal 06h, to the host computer.

If the Cesar unit receives a request for data or status information, it gathers and sends the requested information. Otherwise, it evaluates the incoming command and sends

4‑36 Communication Controls 57023916-00B

1356

0Ah

06h 64h 00h 68h

06h

09h 06h 00h 0Fh

06h

Cmd Data

ACK

Cmd

CSR

Header Chksum

ChksumHeader

ACK

time

Cesar® Generator

a message packet that contains a one-byte data value (CSR code) to the host. The power supply sends CSR code 0 when it has accepted the command.

If the host computer receives a NAK from the Cesar unit, the host computer either retransmits the packet or does whatever else it has been programmed to do in this situation. If the host computer receives an ACK, it waits for the requested data or status information, or it waits for the CSR code telling it whether or not the new parameter was accepted. If the host computer receives no response within a reasonable period, it takes whatever action it has been programmed to take.

T2: Unit Transmits Response to Host

The Cesar unit prepares a response packet with the requested information or appropriate CSR code, which it then transmits to the host computer. The host computer then determines, by means of the checksum, if the response packet is complete. If the host computer detects an error in the transmission (the checksum is not validated), it can request the packet be sent again by transmitting a NAK.

T3: Host Acknowledges Unit Response

If the Cesar unit receives an ACK from the host computer, it returns to the normal waiting state. If the Cesar unit receives a NAK from the host computer, the unit retransmits the response packet. The Cesar unit continues to retransmit in response to NAK transmissions until the host computer stops the cycle. If the Cesar unit receives no response within 100 ms, it assumes an ACK and returns to the waiting state.

PROFIBUS Interface

57023916-00B Communication Controls 4‑37

AE Bus Communications Transaction Example

Figure 4-36 illustrates the steps in an example communications transaction between a

host computer and the Cesar unit.

Figure 4‑36. Communications transaction example

The Cesar unit provides a serial communications interface through the PROFIBUS (Process Field Bus) port. This interface allows the Cesar unit to interface with a PROFIBUS Master, which resides in a programmable logic controller (PLC).

Advanced Energy

PROFIBUS CONNECTOR

The serial PROFIBUS port connector is a 9-pin, female, shielded, subminiature-D connector, two status LEDs, and two rotary address switches located beside the connector. You can use the PROFIBUS host port to interface with a host computer.

Figure 4‑37. PROFIBUS port connector

PROFIBUS PORT PIN AND SIGNAL DESCRIPTIONS

Table 4‑8. PROFIBUS port pin and signal descriptions

Signal

Return

Pin Name Signal

Type

Description

1 n/a Unassigned n/a n/a

2 n/a Unassigned n/a n/a

3 n/a I/O port Digital I/O Differential I/O

4 n/a Unassigned n/a n/a

5 n/a Return n/a Isolated PROFIBUS return

6 5 +5 V +5 VDC Isolated PROFIBUS supply

voltage

7 n/a Unassigned n/a n/a

8 n/a I/O port Digital I/O Differential I/O

9 n/a Unassigned n/a n/a

PROFIBUS CABLING AND TERMINATION

The cable used for the PROFIBUS interface must be RS-485 shielded twisted pair compatible with PROFIBUS standard communication requirements. Maximum segment lengths depend on the baud rate.

Table 4‑9. Baud rate and cable lengths

Baud Rate Length

1.5 M 200 meters

4‑38 Communication Controls 57023916-00B

Master

Slave

Terminated Not terminated TerminatedNot terminated

Cesar® Generator

Table 4‑9. Baud rate and cable lengths (Continued)

Baud Rate Length

12 M 100 meters

Terminate each segment at both ends, and power the termination at all times. If a segment has more than 31 devices, then you must use a repeater. The termination resistors should be on the connector housing of the PROFIBUS cable (not included). Ensure that you follow proper termination procedures if your generator is the last slave on the PROFIBUS cable.

Figure 4‑38. Example of a segment

AE PROFIBUS PROTOCOL

The PROFIBUS port provides an interface that lets you communicate with the Cesar unit from a PROFIBUS Master. AE manufactures a PROFIBUS interface compliant with PROFIBUS Masters described in the DIN 19245 PROFIBUS Standard DP, part III. Any PROFIBUS Master that complies with this standard can communicate with AE's PROFIBUS interface.

☞ Important

AE’s PROFIBUS protocol does not support the following functions: address changing, freeze/unfreeze modes, or sync modes.

PROFIBUS GSD Files

GSD files are computer files that most programmable logic controllers (PLCs) use to configure PROFIBUS slaves. These files are device-specific and contain information on features found in that device.

The GSD file for your unit's PROFIBUS is available from Advanced Energy. For general PROFIBUS information and specific information about GSD files, visit the following Web site:

http://www.profibus.com

Setting the Unit PROFIBUS Network Address

The PROFIBUS address for your unit is set at the factory. To change the PROFIBUS address, use the rotary dials on the rear panel to set the new address

(using hexadecimal code). You can set an address between 1 and 125.

☞ Important

You cannot change the unit address from the PROFIBUS Master.

57023916-00B Communication Controls 4‑39

Advanced Energy

PROFIBUS Master Reset Command

Send the master reset command, PROFIBUS command 119, when the Cesar unit experiences an explicit clear fault (such as a PROFIBUS error fault). AE also recommends sending this command at the startup of PROFIBUS communications to clear any existing fault indications.

Baud Rate

The auto-baud feature of AE's PROFIBUS interface adjusts automatically to the rate of the PROFIBUS master system. Baud rates are available in discrete steps from 9600 bits (9.6 kbits) to 12 Mbits.

The auto-baud feature operates much like a modem or FAX machine in that, at startup, there is a small delay while the interface traverses the different baud rates and then locks in. Please ensure that your PROFIBUS master allows for this delay.

PROFIBUS Status LEDs

The PROFIBUS LEDs (light-emitting diodes) on the rear panel consist of two status LEDs to indicate whether the PROFIBUS system is operating properly

Table 4‑10. PROFIBUS status LEDs

Unit Status Red LED Green LED

PROFIBUS system is off or unavailable on on

PROFIBUS cable is connected, but master is not

active and/or master did not initialize slave

Incorrect GSD file blinking on

Incorrect PROFIBUS slave address blinking on

PROFIBUS module or generator are configured incorrectly (internal error)

PROFIBUS cable connected, master is active, ID of device is correct, GSD file is correct, there is communication

blinking on

off on

off blinking fast

Watch Dog Timer

As a safety feature, the PROFIBUS maintains a watch dog timer that shuts off the Cesar unit output and shows an error (PROFIBUS WATCHDOG EXPIRED) if the PROFIBUS master stops communicating. The watch dog timer maintains a value for time (between 10 ms and 10 minutes) that the Cesar unit waits between commands from the master. The timer counts down this time in 10 ms increments.

If your PROFIBUS system does not calculate the watch dog timer value for you or if you want to modify the existing watch dog timer value, then you may enter a timer value by using the PROFIBUS Set_Prm function call (see DIN 19245 PROFIBUS Standard Part III).

4‑40 Communication Controls 57023916-00B

Cesar® Generator

To get the actual wait time value, the unit's microprocessor uses the numbers you enter to octet 2 and 3 of Set_Prm, multiplies them together, and then multiplies the result by 10 ms. Therefore, when using the Set_Prm function call, calculate the numbers for octet 2 and 3 accordingly. The values for octet 2 and 3 must not equal or be zero.

You can disable the watch dog timer through the PROFIBUS master.

PROFIBUS-Specific Errors

In the event of a PROFIBUS error, the Cesar unit turns off output power and sets the PROFIBUS fault status bit. All PROFIBUS errors are treated as explicit clear faults, which means that you must send PROFIBUS command 119 (the master reset command) or the Off command in the next download packet to clear the faults and resume operation.

PROFIBUS Data Consistency

Some PLCs have a problem with data consistency, that is, the ability to complete the message packet construction before sending the packet to the Cesar unit. Data inconsistency most often results in inappropriate value changes at the Cesar unit.

This problem occurs because most PLCs share a memory block with the PROFIBUS interface. The PLC places data/packet information in the memory block, and the PROFIBUS interface reads the memory block for the next data/packet to transmit. Data inconsistency problems occur when the PLC updates the data from high to low memory locations without signaling the PROFIBUS interface that the update is complete. (If the PLC were to notify the PROFIBUS interface, then there would be data consistency.) As a result, the PROFIBUS interface sends the memory block regardless of where the PLC is in its update of that memory block.

You can create a work around to this problem with a command sequence that ensures the data for a command will not be changed before the next download packet is received. Here is an example procedure:

1. Send the null command (command 0). The Cesar unit ignores this command.

2. Update the download packet with data for the desired command.

3. Update the packet with the desired command.

4. Send the download packet.

5. Repeat step 1, and continue as needed.

See your PLC documentation for additional information.

Transmission Rates and The Handshake Feature

It is possible for PLCs to send commands faster than the Cesar unit can respond. This situation can cause the Cesar unit to have intermittent failures in responding to or executing commands.

In response to this issue, AE has developed a handshake feature, which echoes back the last sent command in byte 13 of the upload packet. This feature allows you to

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send a command and wait for verification that the command was accepted before sending the next command. Using the handshake feature has the following benefits:

• It simplifies the programming of PLCs that interact with AE products.

• It increases the bandwidth of the PROFIBUS channel by eliminating wasted

• It provides immediate feedback regarding command execution.

• It increases the reliability of PROFIBUS communications.

☞ Important

PROFIBUS COMMAND STRUCTURE

The number command-based AE PROFIBUS protocol is designed to take advantage of the high transmission rates provided by the PROFIBUS standard. The download packet (outbytes) and the upload packet (inbytes) as well as the AE PROFIBUS “handshake” feature are described in the sections that follow.

time.

You can choose not to use the handshake feature, but if you do so, do not send commands 0 through 127 to the Cesar generator at a rate faster than one command per 80 milliseconds.

PROFIBUS Download Packet

The download packet for PROFIBUS contains four bytes.

Table 4‑11. Configuration of PROFIBUS download packet bytes

Byte Description

0 Command

1 Data byte (LSB)

2 Data byte

3 Data byte (MSB)

In the download packet, bytes 1, 2, and 3 make up the data field and contain information defined by the command.

When the data exceeds one byte, the packet sends the least significant byte (LSB) before the most significant byte (MSB).

PROFIBUS Upload Packet

During every PROFIBUS data exchange, the Cesar unit supplies a 14-byte upload packet. This table defines the bytes contained in the upload packet.

4‑42 Communication Controls 57023916-00B

Byte Description

0 Status flags—first byte

1 Status flags—second byte

2 Delivered power low

3 Delivered power high

4 Forward power low

5 Forward power high

6 Reflected power low

7 Reflected power high

8 Data byte (LSB)

9 Data byte

10 Data byte

11 Data byte

12 Data byte (MSB)

Cesar® Generator

13 Command number (echo of command sent)

PROFIBUS Upload Packet Data Bytes 0 and 1

Bytes 0 and 1 of the upload packet contain information (in the form of status bit flags) about the status of the Cesar unit:

Table 4‑12. PROFIBUS upload packet status bit flags

Byte Description

Byte 0—first status byte

Bit 8 = Control mode (with bit 9)

Bit 9 = Control mode (00 = User, 10 = PROFIBUS)

Bit 10 = Set point status OK

Bit 11 = Reserved

Bit 12 = End of Target Life (EOTL)

Bit 13 = Active toggle bit

Bit 14 = Reserved

Bit 15 = Reserved

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Advanced Energy

Table 4‑12. PROFIBUS upload packet status bit flags (Continued)

Byte Description

Byte 1—second status byte

Bit 0 = Reserved

Bit 1 = Overtemperature condition

Bit 2 = Interlock mechanism open

Bit 3 = Reserved

Bit 4 = Reserved

Bit 5 = Reserved

Bit 6 = Reserved

Bit 7 = Output is on

In the first status byte, bit 13 (the active toggle bit) indicates the status of the PROFIBUS interface. After the Cesar generator has powered up, this bit’s continuous change indicates that the PROFIBUS interface is ready. During operation, a cessation of this change indicates that a communication problem exists.

PROFIBUS Upload Packet Data Bytes 8 through 13

In the upload packet, bytes 8, 9, 10, 11, and 12 make up the data field and contain information defined by byte 13, the command number.

When the reply data extends over more than one byte, the PROFIBUS sends the least significant byte (LSB) before the most significant byte (MSB). Byte 13 references the requesting command.

Ethernet Interface

The Cesar unit provides an Ethernet communications interface that allows the unit to communicate with a host computer. The interface consists of an RJ-45 port (labeled Ethernet on your unit) and the AE TCP protocol, which uses function code (FC) 23. FC23 is used to map AE Bus commands from the Cesar to the Modbus/TCP packet.

ETHERNET CONNECTOR AND INDICATORS

You can control the Cesar unit through a network using an Ethernet Modbus/TCP connection.

☞ Important

The Cesar unit supports a Modbus/TCP connection to port 502. For more information about the Modbus/TCP protocol, visit the Modbus Users Web Site at: www.modbus.org.

4‑44 Communication Controls 57023916-00B

Link status

Receive data

Transmit data

Cesar® Generator

Figure 4‑39. Ethernet connector and indicators

The three LEDs next to the Ethernet connector communicate when the unit is transmitting data and if the Ethernet link has been established:

• Link status

◦ Green = OK

◦ Dark = No connection

• Receive data

◦ Red = Active

◦ Dark = Not active

• Transmit data

◦ Red = Active

◦ Dark = Not active

UNDERSTANDING AE TCP COMMANDS AND REGISTER TYPES (FC23)

The AE TCP protocol wraps host port commands into TCP packets. The unit acts as a server while the host or tool program communicating with the unit acts as a client. The unit listens for requests for TCP connections on registered port 502. Port 502 is assigned to Modbus/TCP protocol. The unit can support up to six simultaneous TCP connections.

One of the Modbus/TCP frame formats, class 2 function code 23 (FC23), wraps host port commands into Modbus/TCP packets. FC23 functions according to the Modbus/ TCP standard (go to http://www.modbus.org for more information). You can use FC23 to run all common commands.

Establishing a Connection

To establish a TCP connection, the host or tool program (client) connects to TCP port

502. If the number of already established connections exceeds the predefined limit for the given equipment, the connection is rejected.

Once the connection is established, the client may perform multiple transactions consisting of the following two steps:

1. The client sends a request containing a host port command to be executed by the unit (server).

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Advanced Energy

2. The server executes the host port command and returns a packet containing the

☞ Important

Data Encoding

The Cesar unit uses little endian (least significant byte first) architecture.

In FC23, the portion of the packet containing the command bytes is little endian. These bytes are ordered exactly as described for AE host port commands.

Multiple clients may send configuration information simultaneously. All configuration commands in the Cesar are atomic, which prevents erasing problems, however, one client may overwrite another's configuration information.

USING MODBUS/TCP FC23

unit’s reply to the command (CSR or data).

For optimum performance, keep the TCP connection open (and remaining open) during continuous operation. Opening and closing a connection for each command transaction will result in poor communication performance.

FC23 allows you to send any Cesar AE Bus command through the Modbus/TCP interface, providing complete control of the system in a way that directly corresponds to the AE Bus.

To accommodate this use of AE Bus commands, the Cesar unit uses some special values in the FC23 packet.

☞ Important

Errors associated with the commands are reported as single byte CSRs contained in the returned data bytes.

FC23 Send Packet

Table 4‑13. Packet format for FC23 send

Numbers

0 and 1 Transaction ID Not used (value is copied into reply)

2 and 3 Protocol ID 0

4 and 5 Number of bytes

6 Unit ID Ignored

Byte

Send Value Purpose

Count of bytes in packet (starting with byte 6)

following

7 Function code 23 = 0x17

4‑46 Communication Controls 57023916-00B

Cesar® Generator

Table 4‑13. Packet format for FC23 send (Continued)

Byte

Numbers

8 and 9 Reference number

10 and 11 Word count Not used

12 and 13 Reference number

14 and 15 Word count for

16 Byte count for

17 AE Bus command

Send Value Purpose

0xFFFF

for read

for write

write

number

☞ Important

This value is necessary to denote the special use of FC23 (mapping to AE Bus commands).

0xFFFF

☞ Important

This value is necessary to denote the special use of FC23 (mapping to AE Bus commands).

Not used

AE Bus command number

18 Number of data

bytes in AE Bus write packet

19 and up AE Bus data

bytes

Total number of data bytes in the packet

☞ Important

In AE TCP, the AE Bus packet does not use the header and checksum bytes. For a description of the AE Bus packet, see the AE Bus protocol..

For information on the number of data bytes in a command, see the AE host command set.

Data bytes contained in the AE Bus packet

For information on the number of data bytes in a command, see the AE host command set.

Modbus word swapping does not affect the order of these bytes. These bytes should be ordered according to the AE Bus command format (least significant bytes first).

FC23 Response Packet

Table 4‑14. Packet format for FC23 response

Byte

Numbers

Send Value Purpose

0 and 1 Transaction ID Not used (value is copied from send packet)

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Table 4‑14. Packet format for FC23 response (Continued)

Byte

Numbers

2 and 3 Protocol ID 0

4 and 5 Number of bytes

6 Unit ID Copied from send packet.

7 Function code 23 = 0x17

8 Byte counter Not used

9 AE Bus command

10 Number of bytes

Send Value Purpose

Count of bytes in packet in Modbus big endian

following

number

in AE Bus response packet

order (starting with byte 6)

• Byte 4 = most significant byte

• Byte 5 = least significant byte

AE Bus command number

Total number of data bytes in the AE Bus packet

☞ Important

In AE TCP, the AE Bus packet does not use the header and checksum bytes. For a description of the AE Bus packet, see the AE Bus protocol.

For information on the number of data bytes in a command, see the AE host command set.

11 and up AE Bus data

bytes

Data bytes or CSR information contained in the AE Bus packet

For information on the number of data bytes in a command, see the AE host command set.

Modbus word swapping does not affect the order of these bytes. These bytes should be ordered according to the AE Bus command format (least significant bytes first).

FC23 Exception Error Packet

The Cesar unit may reply to Modbus/TCP commands with an exception error packet if something goes wrong in the communication.

Table 4‑15. Packet format for FC23 exception error

Byte

Numbers

0 and 1 Transaction ID Not used (value is copied from send packet)

2 and 3 Protocol ID 0

Purpose Response Value

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Cesar® Generator

Table 4‑15. Packet format for FC23 exception error (Continued)

Byte

Numbers

4 and 5 Number of bytes

6 Unit ID AE Bus address

7 Function code +

8 Exception code 01 = Illegal function

Purpose Response Value

Count of bytes in packet (starting with byte 6)

to follow

151 = 0x97

0x80

FC23 Example

This example uses AE Bus command 168 to read back power, voltage, and current from the unit using the AE TCP connection.

Table 4‑16. Packet format for command 168 send

Byte

Numbers

0 and 1 0x00, 0x00 Transaction ID (any value)

Send Value Purpose

2 and 3 0x00, 0x00 Protocol ID

4 and 5 0x00, 0x0D Number of bytes to follow (count of bytes in

packet starting with byte 6)

6 0x00 Unit ID

7 0x17 Function code [23=(0x17)]

8 and 9 0xFF, 0xFF Reference number for read = 0xFFFF

☞ Important

This value is necessary to denote the special use of FC23 (mapping to AE Bus commands).

10 and 11 0x00, 0x00 Word count (Not used = 0)

12 and 13 0xFF, 0xFF Reference number for write = 0xFFFF

Note: This value is necessary to denote the

special use of FC23 (mapping to AE Bus commands).

14 and 15 0x00, 0x00 Word count for write (Not used = 0)

16 0x00 Byte count for write (Not used = 0)

17 0xA8 AE Bus command number = 168

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Table 4‑16. Packet format for command 168 send (Continued)

Byte

Send Value Purpose

Numbers

18 0x00 Number of bytes in AE Bus command write

packet = 0

☞ Important

End of packet—no data bytes exist in this command.

This example illustrates the response packet for command 168.

Table 4‑17. Packet format for command 168 response

Numbers

0 and 1 0x00, 0x00 Transaction ID (any value)

2 and 3 0x00, 0x00 Protocol ID

4 and 5 0x00, 0x0E Number of bytes to follow (count of bytes in

Byte

Send Value Purpose

packet starting with byte 6)

6 0x00 Unit ID

7 0x17 Function code [23=(0x17)]

8 0x00 Byte counter (any value)

9 0xA8 AE Bus command = 168

10 0x06 Number of response data bytes for AE Bus

11 and 12 0xD1, 0x07 Power = 2000

13 and 14 0x84, 0x01 Voltage = 388

15 and 16 0x04, 0x02 Current = 516 (5.16 A)

AE Bus Commands

The following sections describe the command status response (CSR) codes returned by the Cesar unit in response to an AE Bus command, as well as the complete set of AE Bus commands. You can use these commands with one or more of the following interfaces (depending on your unit’s configuration):

• AE Bus (serial)

• PROFIBUS

command

• Ethernet

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Cesar® Generator

ACTIVATING HOST PORT REMOTE CONTROL (AE BUS COMMAND 14)

By default, when you switch on the Cesar generator it is in front panel control mode. To use the host port commands, the unit must be in host port remote control mode. Once activated, the unit will remain in host port remote control mode until deactivated by AE Bus command 14 or until the Cesar generator is switched off. To specify the correct remote control settings and filters, you may need to send command 14 multiple times. Table 4-18 describes the behavior for each command 14 value.

To Activate Host Port Remote Control

1. Ensure the Cesar generator is switched on, but RF is off. By default, all control is from the front panel.

2. If desired and if you will be specifying host port or User Port remote control, use the front panel to specify remote control overrides.

3. Send AE Bus command 14 with a value of 2, 4, or 6 to set the control domain.

4. If desired, you can also send command 14 to change the front panel behavior. To specify the correct remote control settings and filters, you may need to send command 14 multiple times.

◦ Send a value of 11, 12, or 13 to disable front panel functionality (soft keys,

knob, Matching keys, RF On/Off keys). You can later send a value of 10 to re-enable normal behavior.

◦ Send a value of 22 or 23 to disable portions of the display functionality. You

can later send a value of 20 to re-enable normal behavior.

◦ If you have switched to 1x mode (command 11, 12, or 13), first send a value

of 10 to reset before sending values 22 or 23.

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Table 4‑18. AE Bus command 14 remote control settings, resets, and overrides

Command 14

2 Host Port Normal behavior:

Description

value

4 User Port

6 Front panel

• Host port and User Port: If you did not specify remote control overrides, then you have no button or soft key functionality on the front panel, but you have full display functionality (for example, the display key works and values are displayed).

• All domains (host port, User Port, and front panel): If you specified remote control overrides, then those overrides determine the behavior of the knob, the RF On/Off keys, and Matching keys).

10 Resets front panel control to normal behavior. Use this to reset

remote control after sending values 11, 12, or 13. Normal behavior is the behavior defined by Command 14 (value of 2, 4, or 6) plus remote control overrides. Commands 11, 12, and 13 act as additional filters for restricting the front panel buttons and knobs. The unit continues to show values on the display.

11 Disable front panel Program and Presets soft keys.

Exceptions: None (Remote control overrides set from the front panel do not affect the Program and Presets soft keys)

12 Set front panel to remote operation, where all soft and regular keys

are disabled, except the Display soft key:

• Disable front panel Program and Presets soft keys.

• No change of remote mode by front panel.

• Disable RF On and RF Off keys, set point (knob), and Matching keys (unless there is a local override).

Exceptions: Remote control overrides set from the front panel.

13 All soft and regular keys (and all menus) are disabled, including

the Display soft key.

Exceptions: Remote control overrides set from the front panel.

20 Resets front panel display to the normal behavior. Use this to reset

remote control after sending values 22 or 23. Normal behavior is the behavior defined by command 14 (value of 2, 4, or 6) plus remote control overrides.

Values 20, 22, and 23 control the front panel display; values 22 and 23 also disable the front panel keys and knob.

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Cesar® Generator

Table 4‑18. AE Bus command 14 remote control settings, resets, and overrides (Continued)

Command 14

Description

value

22 All front panel display values are turned off except Ready,

Active, or Error.

All front panel overrides are disabled.

Exceptions: none.

23 All front panel display values are disabled.

All front panel overrides are disabled.

Exceptions: none.

AE BUS COMMAND STATUS RESPONSE (CSR) CODES

When the Cesar unit receives a command requesting a change in unit operation (command numbers 1 through 127), or when the Cesar unit receives any command that it rejects (command numbers 1 through 255), it responds with a command status response (CSR) code. The CSR is a single-byte number that indicates whether the unit accepted or rejected the command and, in the case of rejection, the reason the unit could not respond to the command.

Table 4‑19. AE Bus command status response (CSR) codes

Code Meaning

0 Command accepted

The following CSR codes are sent in response to a command that was not accepted and provide an indication of why the command was not accepted

1 Control code is incorrect

2 Output is on (change not allowed)

4 Data is out of range

7 Active fault(s) exist

9 Data byte count is incorrect

19 Recipe is active (change not allowed)

50 The frequency is out of range

51 The duty cycle is out of range

53 The device controlled by the command is not detected

99 Command not accepted (there is no such command)

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AE BUS PORT COMMAND SET

The Cesar unit communication interfaces use two types of AE Bus commands:

• Commands 1 through 127 request a change to the Cesar unit, such as changing

• Command numbers 128 through 255 request information from the unit, such as

Unless otherwise specified for individual commands, AE Bus protocol is little endian, which means that all values greater than 1 byte are sent least significant byte first.

Most AE Bus commands are the same for all of the available interfaces. Differences are noted where they exist.

a setting in the unit. The unit responds to these commands by sending a command status response (CSR). This single-byte response indicates whether the unit has accepted or rejected the command and, in the case of rejection, the reason the unit could not respond to the command.

unit settings. The unit responds to these commands by sending the data requested if the command was successful, and a CSR if the command was not successful.

Your unit may not have all features listed here. If you issue a command for a feature that your unit does not have, the unit returns CSR 99, Command not accepted.

Table 4‑20. AE Bus Commands

Command Description Data Bytes

Sent

This command is always accepted but is ignored. 0 1

null

This command

is for

PROFIBUS

only.

Data Bytes

Returned

(CSR only)

4‑54 Communication Controls 57023916-00B

Table 4‑20. AE Bus Commands (Continued)

Command Description Data Bytes

Sent

Cesar® Generator

Data Bytes

Returned

Turn output

off

turn output on

Turns off RF output.

This command shuts the RF output off immediately if ramping in not enabled. Otherwise it starts the RF output off ramp. If issued while on or off ramping is in progress, the RF output is shut off immediately. If issued while a power ramping recipe is in progress, the RF output is shut off immediately and the recipe is suspended. A subsequent command 2 turn output on will resume the recipe execution. See “Controlling RF

On With AE Bus Commands” on page 4-80 for

a discussion of the methods to control RF on and off.

All latched faults are cleared in the fault status register. It does not clear any faults that are currently active.

This command is accepted regardless of control mode.

Read back with command 162.

Turns on RF output.

Turns on the RF output if there are no active or latched faults.

0 1

(CSR only)

0 1

(CSR only)

This command is accepted only when host port control mode is active. It is not accepted when a power ramping recipe is being programmed (commands 19, 21, 22 and 23). If the recipe is already programmed, then this command executes the recipe.

See “Controlling RF On With AE Bus

Commands” on page 4-80 for a discussion of

the methods to control RF on and off.

Read back with command 162.

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Table 4‑20. AE Bus Commands (Continued)

Command Description Data Bytes

Sent

Data Bytes

Returned

set regulation

mode

set forward power limit

Sets the regulation mode. The regulation mode can be changed between forward, real, and DC Bias regulation modes while the RF output is on.

This command is accepted only when host port control mode is active. It is not accepted when a power ramping recipe is being or has been programmed (commands 19, 21, 22 and 23) or is running.

Send one data byte, indicating the desired regulation mode:

• 6 = Forward power regulation

• 7 = Real power regulation (sometimes called load power regulation or delivered power regulation)

• 8 = DC Bias regulation (sometimes called external power regulation)

Advanced Energy Cesar Generator - Air Cooled User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Table of Contents

List of Tables

List of Figures

Safety and Product Compliance Guidelines

PRODUCTS DOCUMENTED IN THIS MANUAL

IMPORTANT SAFETY INFORMATION

DANGER, WARNING, AND CAUTION BOXES IN THE MANUAL

SAFETY GUIDELINES

Rules for Safe Installation and Operation

INTERPRETING PRODUCT LABELS

PRODUCT COMPLIANCE

Product Certification

Safety and EMC Directives and Standards

ELECTROMAGNETIC COMPATIBILITY (EMC) DIRECTIVES AND STANDARDS

SAFETY DIRECTIVES AND STANDARDS

Conditions of Use

INTERLOCKS AND LIMITING CONDITIONS

Product Overview

GENERAL DESCRIPTION

THEORY OF OPERATION

Specifications

PHYSICAL SPECIFICATIONS

ELECTRICAL SPECIFICATIONS

COOLING SPECIFICATIONS

ENVIRONMENTAL SPECIFICATIONS

Communication Controls

DIAGNOSTIC INTERFACE

MATCHING INTERFACE

Matching Interface Connector

Matching Interface Pin Descriptions

USER PORT

25-Pin User Port

USER PORT CONNECTOR

SATISFYING MINIMAL REQUIREMENTS FOR THE 25-PIN USER PORT

25-PIN USER PORT CABLING REQUIREMENTS

ACTIVATING THE 25-PIN USER PORT

RESOLVING ERROR DISPLAYS WHEN USING THE 25-PIN USER PORT

25-PIN USER PORT PIN DESCRIPTIONS AND WIRING DIAGRAMS

15-Pin User Port

USER PORT CONNECTOR

SATISFYING MINIMAL REQUIREMENTS FOR THE 15-PIN USER PORT

15-PIN USER PORT CABLING REQUIREMENTS

ACTIVATING THE 15-PIN USER PORT

RESOLVING ERROR DISPLAYS WHEN USING THE 15-PIN USER PORT

15-PIN USER PORT PIN DESCRIPTIONS AND WIRING DIAGRAMS

CESAR GENERATOR HOST PORT

RS-232 Interface

RS-232 CONNECTOR

RS-232 PORT PIN DESCRIPTIONS

AE BUS TRANSMISSION PARAMETERS

AE BUS PROTOCOL

CREATING AN IDEAL COMMUNICATIONS TRANSACTION

PROFIBUS Interface

PROFIBUS CONNECTOR

PROFIBUS PORT PIN AND SIGNAL DESCRIPTIONS

PROFIBUS CABLING AND TERMINATION

AE PROFIBUS PROTOCOL

PROFIBUS COMMAND STRUCTURE

Ethernet Interface

ETHERNET CONNECTOR AND INDICATORS

UNDERSTANDING AE TCP COMMANDS AND REGISTER TYPES (FC23)

USING MODBUS/TCP FC23

AE Bus Commands

ACTIVATING HOST PORT REMOTE CONTROL (AE BUS COMMAND 14)

AE BUS COMMAND STATUS RESPONSE (CSR) CODES

AE BUS PORT COMMAND SET