Trek 646 User Manual

Trek Model 646

Electrostatic Chuck Supply

Trek’s Model 646 software-driven Electrostatic Chuck Supply
offers an array of features that provide significant benefits while
accommodating a variety of demanding applications. Model 646
incorporates Trek technology which has demonstrated increases
in efficiency and throughput equal to three times that of other
supplies. Virtual elimination of sticky wafer and wafer popping
issues ensures better control over particle contamination.

Given the versatility and performance of the Model 646, it can be
used in multiple unique tools/processes, thus eliminating the need
to specify a new supply for each unique tool/process in a facility.

Key Specifications

! Output Phasing:

Voltage A (Reference Phase)
Voltage B (Phase B = [-1] x Phase A) 0 to ±3 kV

Output Voltage Range: 0 to ±3 kV

!
! Output Current Range:

0 to ±3 kV

0 to ±6.5 mA DC with a peak capability of 10 mA

Typical Applications Include

! Electrostatic-driven handling of materials
! Semiconductor wafer processing
! Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical handling

Features and Benefits

! Supports both Coulombic and Johnsen-Rahbek ESC technologies
! User configurable for custom clamp and declamp sequences and wave shapes
! Electrostatic chuck profiles can be uploaded to the unit and stored internally via a user-friendly software interface
! Reduces backside gas errors, increases throughput, and eliminates sticky/popping wafer issues
! Lockable front panel control interface
! Ability to control parameters such as over-current, wafer-present and wafer-clamped thresholds, clamp voltage,

offset voltage and internal or external amplitude/offset control

! Wafer detection includes no wafer, wafer present or wafer clamped status
! Includes in-process-adjustable amplitude/offset and output-control versatility
! Output can be controlled by back panel I/O, serial computer command or front panel controls
! NIST-traceable Certificate of Calibration provided with each unit

TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK

(fax) • www.trekinc.com • [e-mail] 716-438-7555 • 716-201-1804

Features

Clamped Wafer
Detection Feature
(Thresholds are set
by the program)

To indicate wafer clamping events, the
capacitive currents generated by a low voltage
sine wave, super-imposed on the Phase A and
Phase B outputs, are monitored but can be
disabled through the program. The super­imposed waveform is used to indicate a no
wafer, wafer present or wafer clamped status

Capacitive Load
Select

Clamped capacitance status range can be
selected by the program for 0 to 10, 20 or 30nF
(phase to phase) depending on the system and
electrostatic clamp physical configurations

Mechanical

Dimensions

88.1 mm H x 431.8 mm W x 531.9 mm D
(3.47” H x 17” W x 20.9” D) 1U rack enclosure
Panel Width

482.6 mm (19”)

Weight

11 lbs (5.0 kg)

Connectors

15-pin “D” ITT Canon used by remote device to
control/monitor the unit, 9-pin “D” ITT Canon RS­232, 3-Pin FCT “D” High-Voltage, standard type-A
USB, Ethernet (optional) and Front Panel

Power ON/OFF

2-position rocker switch

Operating Conditions

Temperature

0°C to 35°C (32°F to 104°F)

Relative Humidity

To 85%, noncondensing

Altitude

To 2000 meters (6561.68 ft.)

Electrical

DC Input Receptacle

2.0 mm locking DC jack; center contact is
positive and shell is negative (receptacle mates
with Switchcraft S761K plug)

Ground Receptacle

Ground stud

Power Requirements

24 V DC, 2.0 A

Supplied Accessories

Operator Manual, SW

PN: 24013

USB Cable
HV Connector

PN: BA103
PN: B8076R

DC Plug (
S761K)

Switchcraft

PN: BA119R
Line Cord, Fuses

Selected per geographic destination

Optional Accessories

90-264 V AC to
24 V DC Power
Adapter

PN: IK045

Note

Trek Model 645, a
available. Please contact the factory for more information

±2 kV model version of the instrument, is also

Model 646 Specifications

Outputs

Simultaneous High­Voltage Outputs

Two simultaneous high-voltage outputs (Output
Phase A and Output Phase B) of equal
magnitude and opposite in polarity relative to
an offset voltage

Output Phasing

Output Voltage A

(Reference Phase)

0 to ±3 kV
Output Voltage B

0 to ±3 kV (Phase B =[-1] x Phase A)

Offset Voltage

(This feature can
be disabled through
the program)

Each DC output voltage (Phase A and Phase
B) is ramped up and down with symmetrical
rise and fall times, or they can be programmed
with the user's custom clamping and
declamping waveforms. The clamping process
is initiated in response to the Clamp On/Off
control. The polarity of each output reverses to
the opposite polarity after each Clamp On/Off
cycle.

Output Waveshape

Each DC output voltage (Phase A and Phase B)
is ramped up and down with symmetrical rise
and fall times, or can be programmed with the
user’s custom clamping and declamping
waveforms

Output Voltage
Range

0 to ±3 kV DC, maximum
Output Current

0 to ±6.5 mA DC with peak capability of 10 mA

Input

Setting the High­Voltage Amplitude

HV magnitude can be controlled either
externally or internally to the unit

Setting the Offset
Voltage

Offset voltage may be controlled externally or
internally to the unit

Output Voltage Monitor (Back Panel Connector)

Scale Factor

1 V/300 V

Phase B DC

Accuracy better than 0.5% of full scale

Offset Voltage

Less than 10 mV

Output Noise

Less than 50 mV rms*

Steady State Voltage Leakage Current Monitor

Scale Factor

1 V / 1 µA

DC Accuracy

±0.1 µA

Output Noise

Less than 50 mV rms*

Features

Interlock

Connections are provided to support an
interlock safety configuration. In the event that
the interlock is open, the high-voltage
generation circuits are shut down

Digital Display

40X2 LCD character display shows various
system functions such as Set Voltage, Output
Voltage and Capacitance Monitor

*Measured using the true rms feature of the HPModel 34401A digital multimeter

Measurement and Power Solutions

Copyright ã 2012 TREK, INC. All specifications are subject to change. 1305/JRB

TM