Trek 640 User Manual

Trek Model 640

Electrostatic Chuck Optimizer

Trek’s Model 640 Electrostatic Chuck Optimizer system is a diagnostic tool which enables evaluation and optimization of waveforms and voltages for electrostatic chucks/clamps in order to minimize de-clamp time, maximize clamp force, and achieve optimum wafer processing for ESC systems.

Model 640 combines two amplifiers (for two-phase voltage combinations) and a waveform generator, which can be independently programmed and configured to investigate, research, and discover the perfect power supply and waveform recipe to efficiently drive an ESC application. An electrostatic voltmeter (ESVM) is included to monitor residual voltage from the clamping/de-clamping process.

Key Specifications

! Output Phasing:

Voltage A (Reference Phase) Voltage B (Phase B = [-1] x Phase A) 0 to ±2 kV

Output Voltage Range: 0 to ±2 kV

! ! Output Current Range:

0 to ±2 kV

0 to ±6.5 mA DC with a peak capability of 10 mA

Typical Applications Include

! Electrostatic-driven handling of materials ! Semiconductor wafer processing ! Non-mechanical transfer of flat panels or other processing materials

sensitive to mechanical clipping

Features and Benefits

! Enables the creation of customized waveforms to be simple yet powerful, to generate the most complex

waveforms that can be envisioned by the user

! The product’s software accepts parameters via arbitrary data input, pre-programmed waveforms, or company-

specific CSV files

! Utility is enhanced via three individually programmed stages to build the waveform: (1) Clamp Signal Stage, (2)

Processing Signal Stage (with options to “loop” the process cycle), and (3) De-clamp Stage

! Test data is recorded and presented in numerical and graphical format with a color coded display ! The graphs can also be used to troubleshoot mechanical and electrical problems within an ESC operation

! NIST-traceable Certificate of Calibration provided with each unit ! Compliant

TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK

716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • sales@trekinc.com

Features

Clamped Wafer Detection Feature (Thresholds are set by the program)

To indicate wafer clamping events, the capacitive currents generated by a low voltage sine wave, super-imposed on the Phase A and Phase B outputs, are monitored but can be disabled through the program. The superimposed waveform is used to indicate a no wafer, wafer present or wafer clamped status

Capacitive Load Select

Clamped capacitance status range can be selected by the program for 0 to 10, 20 or 30nF (phase to phase) depending on the system and electrostatic clamp physical configurations

Mechanical

Dimensions

43.7 mm H x 421.6 mm W x 457.3 mm D (1.72” H x 16.6” W x 18” D) 1U rack enclosure Panel Width

482.6 mm (19”)

Weight

8.5 lbs (3.86 kg)

Connectors

15-pin “D” ITT Canon used by remote device to control/monitor the unit, 9-pin “D” ITT Canon RS232, 3-Pin FCT “D” High-Voltage, standard type-A USB, Ethernet (optional) and Front Panel

Power ON/OFF

2-position rocker switch

Operating Conditions

Temperature

0°C to 35°C (32°F to 104°F)

Relative Humidity

To 85%, noncondensing

Altitude

To 2000 meters (6561.68 ft.)

Electrical

DC Input Receptacle

2.0 mm locking DC jack; center contact is positive and shell is negative (receptacle mates with Switchcraft S761K plug)

Ground Receptacle

Ground stud Power Requirements

24 V DC, 1.7 A

Supplied Accessories

Operator Manual, SW

PN: 24010

USB Cable HV Connectors

PN: BA103 PN: B8084R, B8085R, B8088R, B8089R

DC Plug ( S761K)

Switchcraft

PN: BA119R Line Cord, Fuses

Selected per geographic destination

Optional Accessories

90-264 V AC to 24 V DC Power Adapter

PN: IK045

Note

Trek Model 646, a Please contact the factory for more information

±3 kV version of this instrument, is also available.

Model 640 Specifications

Outputs

Output Phasing

Phase A Output

Voltage Range

0 to ±2 kV DC or peak AC (4 kV p-p)

Phase A Output

Current Range

0 to ±5 mA DC or peak AC (10 mA p-p)

Voltage Range

Phase B Output

0 to ±2 kV DC or peak AC (4 kV p-p) Phase A Output

Current Range

0 to ±5 mA DC or peak AC (10 mA p-p)

Amplifier Performance [each phase]

Large Signal Bandwidth (1% distortion)

DC to greater than 1.2 kHz

Small Signal Bandwidth (-3 dB)

DC to greater than 5 kHz

Slew Rate

Greater than 15 V/µs

Settling Time

less than 300 µs for 0 to 2 kV step

DC Accuracy

Better than 0.1% of full scale

Offset Voltage

Less than 500 mV

Output Noise

Less than 100 mV rms*

Drift with time

Less than 100 ppm/hour, noncumulative

Drift with Temperature

Less than 350 ppm/°C

Output Voltage Monitor (Back Panel Connector)

Drift with Temperature

Less than 350 ppm/°C

Steady State Voltage Leakage Current Monitor

Features

*Measured using the true rms feature of the HPModel 34401A digital multimeter

Measurement and Power Solutions