Trek 640 User Manual
Trek Model 640
Electrostatic Chuck Optimizer
Trek’s Model 640 Electrostatic Chuck Optimizer system is a
diagnostic tool which enables evaluation and optimization of
waveforms and voltages for electrostatic chucks/clamps in order to
minimize de-clamp time, maximize clamp force, and achieve
optimum wafer processing for ESC systems.
Model 640 combines two amplifiers (for two-phase voltage
combinations) and a waveform generator, which can be
independently programmed and configured to investigate, research,
and discover the perfect power supply and waveform recipe to
efficiently drive an ESC application. An electrostatic voltmeter
(ESVM) is included to monitor residual voltage from the
clamping/de-clamping process.
Key Specifications
! Output Phasing:
Voltage A (Reference Phase)
Voltage B (Phase B = [-1] x Phase A) 0 to ±2 kV
Output Voltage Range: 0 to ±2 kV
!
! Output Current Range:
0 to ±2 kV
0 to ±6.5 mA DC with a peak capability of 10 mA
Typical Applications Include
! Electrostatic-driven handling of materials
! Semiconductor wafer processing
! Non-mechanical transfer of flat panels or other processing materials
sensitive to mechanical clipping
Features and Benefits
! Enables the creation of customized waveforms to be simple yet powerful, to generate the most complex
waveforms that can be envisioned by the user
! The product’s software accepts parameters via arbitrary data input, pre-programmed waveforms, or company-
specific CSV files
! Utility is enhanced via three individually programmed stages to build the waveform: (1) Clamp Signal Stage, (2)
Processing Signal Stage (with options to “loop” the process cycle), and (3) De-clamp Stage
! Test data is recorded and presented in numerical and graphical format with a color coded display
! The graphs can also be used to troubleshoot mechanical and electrical problems within an ESC operation
! NIST-traceable Certificate of Calibration provided with each unit
! Compliant
TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK
716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • sales@trekinc.com
Features
Clamped Wafer
Detection Feature
(Thresholds are set
by the program)
To indicate wafer clamping events, the
capacitive currents generated by a low voltage
sine wave, super-imposed on the Phase A and
Phase B outputs, are monitored but can be
disabled through the program. The superimposed waveform is used to indicate a no
wafer, wafer present or wafer clamped status
Capacitive Load
Select
Clamped capacitance status range can be
selected by the program for 0 to 10, 20 or 30nF
(phase to phase) depending on the system and
electrostatic clamp physical configurations
Mechanical
Dimensions
43.7 mm H x 421.6 mm W x 457.3 mm D
(1.72” H x 16.6” W x 18” D) 1U rack enclosure
Panel Width
482.6 mm (19”)
Weight
8.5 lbs (3.86 kg)
Connectors
15-pin “D” ITT Canon used by remote device to
control/monitor the unit, 9-pin “D” ITT Canon RS232, 3-Pin FCT “D” High-Voltage, standard type-A
USB, Ethernet (optional) and Front Panel
Power ON/OFF
2-position rocker switch
Operating Conditions
Temperature
0°C to 35°C (32°F to 104°F)
Relative Humidity
To 85%, noncondensing
Altitude
To 2000 meters (6561.68 ft.)
Electrical
DC Input Receptacle
2.0 mm locking DC jack; center contact is
positive and shell is negative (receptacle mates
with Switchcraft S761K plug)
Ground Receptacle
Ground stud
Power Requirements
24 V DC, 1.7 A
Supplied Accessories
Operator Manual, SW
PN: 24010
USB Cable
HV Connectors
PN: BA103
PN: B8084R, B8085R, B8088R, B8089R
DC Plug (
S761K)
Switchcraft
PN: BA119R
Line Cord, Fuses
Selected per geographic destination
Optional Accessories
90-264 V AC to
24 V DC Power
Adapter
PN: IK045
Note
Trek Model 646, a
Please contact the factory for more information
±3 kV version of this instrument, is also available.
Model 640 Specifications
Outputs
Output Phasing
Phase A Output
Voltage Range
0 to ±2 kV DC or peak AC (4 kV p-p)
Phase A Output
Current Range
0 to ±5 mA DC or peak AC (10 mA p-p)
Voltage Range
Phase B Output
0 to ±2 kV DC or peak AC (4 kV p-p)
Phase A Output
Current Range
0 to ±5 mA DC or peak AC (10 mA p-p)
Amplifier Performance [each phase]
Large Signal
Bandwidth
(1% distortion)
DC to greater than 1.2 kHz
Small Signal
Bandwidth
(-3 dB)
DC to greater than 5 kHz
Slew Rate
Greater than 15 V/µs
Settling Time
less than 300 µs for 0 to 2 kV step
DC Accuracy
Better than 0.1% of full scale
Offset Voltage
Less than 500 mV
Output Noise
Less than 100 mV rms*
Drift with time
Less than 100 ppm/hour, noncumulative
Drift with
Temperature
Less than 350 ppm/°C
Output Voltage Monitor (Back Panel Connector)
Drift with
Temperature
Less than 350 ppm/°C
Steady State Voltage Leakage Current Monitor
Features
*Measured using the true rms feature of the HPModel 34401A digital multimeter
Measurement and Power Solutions
Copyright ã 2012 TREK, INC. All specifications are subject to change. 1237/DEC
TM
Loading...