Section 4 Maintenance and Inspection.............................................................. 14
4.1 Maintenance and Inspection Items............................................... 14
4.2 Lubricating Tool Shaft and Tool Shaft Support Bearing ............... 14
4.3 Replacement Parts List for Maintenance of Robot Mechanism.... 15
– 4 –
STE 58792
Section 1 Cautions on Safety
This manual contains the important information to prevent the operators and persons
nearby from injuries, to prevent damage to assets and to ensure correct use.
Make sure that you well understand the following details (indications and symbols)
before reading this manual. Always observe the information that is noted.
[Explanation of indications]
Indication Meaning of indication
Danger
This means that "incorrect handling will lead to fatalities or serious
injuries."
Caution
¿1) Injuries refer to injuries, burns and electric shocks, etc., which do not require
This means that "incorrect handling may lead to personal injuries
¿1) or physical damage ¿2)."
hospitalization or long-term medical treatment.
¿2) Physical damage refers to damages due to destruction of assets or resources.
[Handling the clean robot]
Caution
• Take note that the type of grease used for the ball screw and spline differs from the
standard specifications. Failure to observe this could cause deterioration of robot
performance and malfunction.
• The customer should NEVER change or modify the parts other than those
stipulated in the instruction manual.
• For part replacement, be sure to use the spare parts designated by Toshiba
Machine.
• Carry out the maintenance and inspection regularly.
Unless they are executed, an abnormality or malfunction cannot be found, resulting
in accidents.
STE 58792
– 5 –
Section 2 Clean Robot Basic Specifications
2.1 Basic Robot Specifications
Table 2.1 shows the basic specifications of the clean robot.
Table 2.1 Basic robot specifications
Model SR–654HSP–CR SR–1054HSP–CR
Arm length Full length 650 mm 1,050 mm
Arm 1 350 mm 580 mm
Arm 2 300 mm 470 mm
Operating range Axis 1 ±115° ±115°
Axis 2 ±140° ±145° Axis 3 (vertical) 185 mm 185 mm
Axis 4 (wrist rotation) ±280° ±360°
Maximum speed Axis 1 255°/s 170°/s
Axis 2 360°/s 270°/s
Axis 3 (vertical) 800 mm/s 800 mm/s
Axis 4 (wrist rotation) 864°/s 576°/s
Composite 4.77 m/s 5.33 m/s
Load Mass of workpiece to
be carried
Permissible inertia
moment at the tip
Repeatability X, Y (plane) ±0.02 mm ±0.03 mm
Axis 3 (vertical) ±0.01 mm ±0.02 mm
Axis 4 (wrist rotation) ±0.03° ±0.03°
Tool wiring and air piping 12 cables and 2 pipelines
Degree of cleanliness Designed for cleanliness 10 (¿ Note 1)
Drive system AC servo motor
Mass of the basic body 65 kgf 95 kgf
Robot controller SR7000
Note 1: Cleanliness 10:
When this robot is operated in the clean bench (cleanliness 1 or less)
installed in the downflow clean room, the number of fine particles of 0.3
µm or over contained in 1 ft3 as measured in the plane of the lower end
position of axis 3 stroke is ten (10) or less.
Air speed of downflow is 0.3 ~ 0.5 m/s.
5 kgf (rated)
(Max. 10 kgf)
0.0663 kgf·m2 0.1 kgf·m2
10 kgf (rated)
(Max. 20 kgf)
– 6 –
STE 58792
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