Ozone Generator GR(C/F)-Series |
Common Installation Manual |
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COMMON INSTALLATION MANUAL
FOR
OZONE GENERATOR
GR(C/F)-Series
Ref #: ZM-2464 Rev #: NC
Sumitomo Precision Products Co., Ltd. |
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Tokyo Head Office |
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1-3-2, Otemachi, Chiyoda-ku, |
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100-0004 |
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1-3-2 |
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Tokyo 100-0004, Japan |
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Tel: +81-3-3217-2814 |
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Tel: 03-3217-2814 |
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Fax: +81-3-3217-2324 |
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Fax: 03-3217-2324 |
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Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 1 of 41 |
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Ozone Generator GR(C/F)-Series |
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Common Installation Manual |
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Record of Revisions |
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Descriptions |
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Date |
Approved by |
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Released. |
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NC |
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Oct. 29, ’13 |
S. Tokutake |
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S. Tokutake |
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Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 2 of 41 |
Ozone Generator GR(C/F)-Series |
Common Installation Manual |
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Contents |
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1. |
Precautions |
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1. |
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2. |
Introduction |
2. |
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2.1 |
Caution Labels |
2.1 |
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2.2 |
Parts Names and Locations |
2.2 |
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3. |
Installation |
3. |
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3.1 |
Transportation |
3.1 |
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3.2 |
Assembly |
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3.2 |
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3.3 |
Position |
3.3 |
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3.4 |
Piping |
3.4 |
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3.5 |
Wiring |
3.5 |
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4. |
Option |
4. |
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5. |
Final Inspection |
5. |
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6. |
Specification |
6. |
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6.1 |
Individual Specification |
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6.1 |
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6.2 |
Common Specification |
6.2 |
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7. |
Warranty |
7. |
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Page
4
9
9
12
13
13
14
14
19
25
36
38
39
39
40
41
Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 3 of 41 |
Ozone Generator GR(C/F)-Series |
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Common Installation Manual |
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1. PRECAUTIONS |
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INSTALLATION ENGINEER USE ONLY |
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This installation manual is original manual written by English-Japanese and is prepared |
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for the qualified installation engineer. |
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The installation written herein has some dangerous works, therefore, the installation |
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works should be carried out ONLY qualified installation engineer who received |
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training. |
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WARNING |
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SYMBOLS |
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In this manual, the following symbols are used to alert personnel about dangers of problems in |
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installation. Pay special attention to these warnings through manual. |
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WARNING |
Warning indicates a potentially hazardous situation, which, if not |
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avoided, could result in death or serious injury. |
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Warming |
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CAUTION |
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if not |
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Caution indicates a potentially hazardous situation, which, |
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avoided, may result in minor or moderate injury. |
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Caution |
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NOTE |
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Note is used to provide you with useful and necessary information or |
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instructions, which you must follow. |
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Note |
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Page: 4 of 41 |
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Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
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Ozone Generator GR(C/F)-Series Common Installation Manual
and dangers throughout this manual. Be sure to read and follow the instructions in this manual
In addition to the warning symbols mentioned above, you will be warned of potential problems
without fail, in order to create and maintain as safe an environment as possible. However, always
remember, no amount of planning will replace safe behavior practiced regularly. Staying alert to the current situation in your workshop is always one of the best ways to avoid trouble.
CONTENTS
GR-Series ozone generator is classified into some models according to the ozone generation
capacity. This manual is available at installing procedure and standard specification of all models. Be sure to read the differential manual regarding the generator’s own specification.
GR
INDOOR USE ONLY
This ozone generator is designed to indoor use only and the class of dust and drip proof of enclosure is IP XXB. Water splashing, from fire sprinkler or water line to the ozone generator directly, should be avoided.
And also, to avoid spreading ozone gas and/or oxygen gas leakage, ozone generator should be installed into cabinet exhausted to acid exhaust.
IP XXB
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Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 5 of 41 |
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Ozone Generator GR(C/F)-Series Common Installation Manual
This ozone generator is designed as a sub-system of the host system. Therefore the almost all system control except ozone generation is controlled by the host system.
WARNING
The host system must control the ozone generator for safety side at any time.
If any alarm situation like scaring safety occurs, disconnect the main power supply immediately.
御のほとんどは上位装置で行われます。 いかなる場合も必ず安全側になるように制御を行って下さい。 安全を脅かす異常が検知された場合はただちに主電源の供給を遮断して下さい。WARNING
Ozone is toxic even at a low concentration. Ozone, even in small amounts, is dangerous and can severely disable or kill after minimal contact. Ozone concentration levels created by ozone generator are deadly if inhaled.
Do NOT attempt to generate ozone unless all ozone piping has been verified to be tight and leak-free.
Exhaust a cabinet which an ozone generator is installed in, and the exhaust port of the cabinet must be connected to an operating exhaust duct to prevent to spread outside. And also, when exhaust pressure may decline and ozone may be leaked outside from a cabinet, suspend supply power of an ozone generator immediately.
りますので、直ちにオゾン発生機への電源供給を遮断して下さい。
Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 6 of 41 |
Ozone Generator GR(C/F)-Series Common Installation Manual
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WARNING |
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The chassis of the ozone generator is not leak-proof structure. |
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To prevent ozone gas exposure, install the ozone generator in the chassis that meets the |
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exhaust ventilation requirement of SEMI S2 and SEMI S6 and exhaust the chassis. |
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SEMI S6 |
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SEMI S2 |
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WARNING |
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For ozone leakage protection, establish an ozone leak sensor around the ozone |
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generator. |
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If ozone leakage of over 0.1ppm is detected, then must shut off to supply the electrical |
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power to the ozone generator immediately. |
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Ozone leakage monitoring must be operated before generating ozone. |
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The ozone generator does not have a water leakage detector.
0.1ppm WARNING
Install a water leakage detector in the cabinet, which the ozone generator is installed, and in the place which detection of water leakage is necessary.
To reduce the risk of electrical shock, suspend the supply of cooling water (Close the valves on the input/output cooling water piping) and supply of the power, when cooling water leakage occurs.
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Ref #: ZM-2464 |
Rev #: NC |
Page: 7 of 41 |
Sumitomo Precision Products Co., Ltd. |
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Ozone Generator GR(C/F)-Series Common Installation Manual
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WARNING |
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Ozone gas is toxic gas even at a low concentration. Ozone, even in small amounts, is |
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dangerous and can severely disable or kill after minimal contact. |
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Ozone concentration level created by ozone generator is deadly if inhaled. |
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And also, personnel must read and understand the Material Safety and Data Sheets |
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(MSDS) at the installation site, and follow the advice of a safety and health supervisor |
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and chemical safety expert when handling hazardous chemicals or potentially |
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contaminated equipment. |
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ス濃度は致命的な損傷になりますMSDSCAUTION
Obtain the Material Safety and Data Sheets (MSDS) of Oxygen and Nitrogen before installation from gas supplier.
And also, personnel must read and understand the Material Safety and Data Sheets (MSDS) at the installation site, and follow the advice of a safety and health supervisor and chemical safety expert when handling hazardous chemicals or potentially contaminated equipment.
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MSDS |
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MSDS |
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NOTE |
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All units of MPa, written in this manual, indicate gauge pressure. |
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MPa |
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Page: 8 of 41 |
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Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
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Rev #: NC |
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Ozone Generator GR(C/F)-Series |
Common Installation Manual |
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2. INTRODUCTION |
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2.1 CAUTION LABELS
Figure 1 Position of caution labels on top panel of ozone generator
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Figure 2 |
Warning label for hazardous voltage |
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This label indicates;
Before opening door and panel, to reduce the risk of electrical shock, turn off power, then, read and follow the instructions in this manual.
Hazardous voltage is inside this ozone generator.
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Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 9 of 41 |
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Ozone Generator GR(C/F)-Series |
Common Installation Manual |
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Figure 3 Caution label for heavy weight of ozone generator
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These labels indicate; |
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The weight of ozone generator is enough to physical damage when you lift or move it by yourself. Use a transfer mover or a lifter to move or lift the ozone generator.
Two or more persons are necessary to dismount and lift the unit.
Weight of ozone generator: approximately 30 to 45kgs. (refer to Item 6.1 Individual Specification.)
30 45kg |
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6.1 |
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Figure 4 Position of warning labels on rear panel of ozone generator
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Rev #: NC Page: 10 of 41 |
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Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
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Ozone Generator GR(C/F)-Series |
Common Installation Manual |
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Figure 5 Warning label for toxic gas |
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This label indicates; |
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Ozone is toxic even at a low concentration. Ozone, even in small amounts, is dangerous and can severely disable or kill after minimal contact. Ozone concentration levels created by ozone generator are deadly if inhaled.
Before opening panel, turn off power, then, read and follow the instructions in this manual.
下
Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 11 of 41 |
Ozone Generator GR(C/F)-Series |
Common Installation Manual |
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2.2 PARTS NAMES AND LOCATIONS |
Handle |
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Figure 6 |
Front view of ozone generator |
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6 |
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Display |
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LED |
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SCROLL key |
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UP key |
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DISCHARGING |
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SCROLL |
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UP |
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ENTER key |
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ALARM |
DISCHARGING LED |
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ENTER |
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LED |
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DOWN key |
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ALARM LED |
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DOWN |
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Figure 7 Detail of operating section |
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Power input |
connector |
Water outlet port |
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Water inlet port |
Feed gas inlet port |
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Power SW |
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SW |
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Ozone gas outlet port |
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Fan motor |
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FG terminal |
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FG |
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Terminal block for interlock |
Ozone monitor I/F |
Signal I/F |
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I/F |
I/F |
Figure 8 Rear view of ozone generator
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Sumitomo Precision Products Co., Ltd. |
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Rev #: NC Page: 12 of 41 |
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Ref #: ZM-2464 |
Ozone Generator GR(C/F)-Series Common Installation Manual
3. INSTALLATION
3.1 TRANSPORTATION
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When carrying ozone generator, hold it vertically and do not give excessive shocks to it. |
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Otherwise, it may cause machinery trouble or leakage. |
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Also, do not transport the ozone generator to turn sideways or to upside down. |
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WARNING
The ozone generator is a heavy object.
The weight of ozone generator is enough to physical damage when you lift or move it by yourself.
Use a transfer mover or a lifter to move or lift the ozone generator. Two or more persons are necessary to dismount and lift the unit.
CAUTION
The handles, located on the front panel of ozone generator, do not have load capacity. Do not lift up ozone generator by using the handles.
ルに荷重をかけないで下さい。
Sumitomo Precision Products Co., Ltd. |
Ref #: ZM-2464 |
Rev #: NC |
Page: 13 of 41 |
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