Sierra Monitor Corporation 3200 Series User Manual

The various chemical vapors, acids and bases used in
the semiconductor manufacturing wet benches pose a
high potential for costly fires. Fires may result in costly
damage to equipment, inventory and clean room facili­ties. Personnel injury and costly business interruptions
are also likely . Factory Mutual requires electro-optical
flame detectors in the semiconductor wet benches to
monitor for fire. These flame detectors must be suit­able for the hostile chemicals used in the etching pro­cess (such as hydrofluoric, sulfuric, and hydrochloric
acids). Furthermore, they must be tested and approved
for fire response to FR polypropylene now used in the
construction of wet benches as well as other fuels such
as isopropyl alcohol.

The Model 3200 easily adapts to most standard fire
extinguishing systems and wet bench systems. It uti­lizes relay output for alarm and trouble and does not
require special controllers or wiring / junction boxes.

Model 3200 Series

Wet Bench Flame Detector

rejecting common false alarms. Continuous self diag­nostics perform tests of the detector operation. Each
flame detector is tested to respond to a 4-inch diam­eter isopropyl alcohol (IPA) fire at 10 feet with a 120
field of view.

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The Model 3200 Flame Detector uses proven, stable
UV/IR technology to continuously monitor for flame in
wet bench applications. Using state-of-the-art micro­processor controlled fire algorithms, the Model 3200
can recognize different types of flame signatures while

Model 3200 Dimensions

The standard Model 3200 has a sealed polypropylene
housing designed to an IEC 529 IP67 rating for pro­tection from a wide variety of acids and solvents. Thus
occasional submersion by these chemicals will not dam­age the detector. The detector is rated over a wide
operating temperature range for those applications
where drying or heating elements are used. A version
utilizing Polyvinylidene Fluoride (PVDF) is also avail­able.

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Sierra Monitor Corp 1991 Tarob Court Milpitas, CA 95035 USA [phone] [phone] Fax: [phone]

Model 3200 Series

Flame Detectors

Specifications

Sensitivity: 3.0 seconds to a 4 inch diameter

isopropyl alcohol pan fire (on-axis)

@ 10 feet
Field of View: 120o full cone
False Alarm Does not alarm to sunlight,

Immunity: fluorescent lights, flashlights, or

infrared heaters.
Input Voltage: 12 to 30 volts DC typically 24 VDC
Current Draw: @24 VDC; 28 mA normal mode; 54 mA

alarm mode
Operating Range

Temperature: Operating: 32

Storage: -40o to 185o F ( -40o to 85o C)
Humidity: 10 to 90% RH

Typical Fire Type: FR & HB polypropylene and

isopropyl alcohol
Red LEDs: Two, indicating Normal

Operation and Trouble/Alarm
Alarm Relay: 1.0 amp @ 30 VDC resistive
Trouble Relay: 1.0 amp @ 30 VDC resistive
UV Sensor: Solar-blind Ultraviolet sensor - radiant

energy in the 185 to 260 nm band
IR Sensor: Solid state infrared sensor detecting -

IR energy in the .715 to 3.5 microns

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to 167oF (0o to 75o C)

Acid/Solvent Resistant to sulfuric acid,
Resistant Surfaces: phosphoric acid, hydrofluoric acid,

hydrochloric acid, ammonium
hydroxide, nitric acid, isopropyl
alcohol, deionized water, chromium
phosphate, n-methyl-pyrrolidane,
organic solvent base photoresist
strips, ozone, etc.

Housing: FR Polypropylene (IP67, UL94

flamability rating V0) or
(Polyvinylidene Fluoride - PVDF
available) (for models -2X and -3X)
with a 6 foot pigtail (8 wires
standard - 4 wires for the fire relay, 2
wires for the trouble relay and 2
wires fro the power)

Dimensions: 3.4 x 4.2 x 1.0 inches

(8.6 x 10.7 x 2.5 cm)
Weight: 1 lb (0.5 Kg)
Approval: FM Approved, CSFM 7210-1608:101

Additional Features

Self-T est Models: Incorporate internal self-test for UV

lamp
Enhanced Models: Incorporate internal self-test and a

RS-485 computer interface for

downloading real time spectral data

pre-fire spectral data (includes 2

additional wires in pigtail)

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Sierra Monitor Corp 1991 Tarob Court Milpitas, CA 95035 USA [phone] [phone] Fax: [phone]

Visit our Web site: www.sierramonitor.com E-Mail: [e-mail]

© 2009 by Sierra Monitor Corporation Rev. B2-02-23-09