Sierra 954 Instruction Manual
Model
954 4-Channel MFC Power Supply/Controller
INSTRUCTION MANUAL
954
October
Sierra Instruments, Inc., Headquarters
Sierra Europe, European Headquarters
Sierra Asia, Asia-Pacific Headquarters
TABLE OF CONTENTS
PRODUCT DESCRIPTION ------------------------------------------------------------------------------
SPECIFICATIONS -----------------------------------------------------------------------------------------
FRONT PANEL ---------------------------------------------------------------------------------------------
REAR PANEL -----------------------------------------------------------------------------------------------
CONNECTOR PIN DESIGNATIONS
Transducer Connector (J1, J2, J3, J4) ---------------------------------------------------
Analog Output (J5) ----------------------------------------------------------------------------
Alarms (J8) --------------------------------------------------------------------------------------
RS232 (J6) --------------------------------------------------------------------------------------
RS485 (J7, J9) ---------------------------------------------------------------------------------
Model 954 Configuration ------------------------------------------------------------------
STARTUP ----------------------------------------------------------------------------------------------------
MANUAL SETUP
Selecting Display (Flow or Total) ----------------------------------------------------------
Selecting Valve Override (Open, Close or Run) ---------------------------------------
Selecting Setpoint (Control Voltage) -----------------------------------------------------
Selecting Units of Measure and Gas Identifiers --------------------------------------
Selecting Filter (-3dB A/D Converter Filter Frequency ------------------------------
Selecting Input (0-5Vdc, 0-10Vdc or 4-20mA Signal Input -------------------------
Selecting Alarms (High and Low with Hysteresis) ------------------------------------
Selecting Ratio (Master/Slave Operation) ----------------------------------------------
MANUAL CAL/RANGE
Calibrate (Zero Only) -------------------------------------------------------------------------
Calibrate (Range Only) ----------------------------------------------------------------------
Calibrate (Zero & Range) -------------------------------------------------------------------
Range (Changing Range) ------------------------------------------------------------------
Calibrate (Multiplier) --------------------------------------------------------------------------
RS232/485 HOOKUP ------------------------------------------------------------------------------------
RS232/485 COMMANDS
Setting/Reading Setpoint & Flow Alarms -----------------------------------------------
Setting/Reading Alarm Hysteresis, Units of Measure & Gas ID ------------------
Setting/Reading Signal Input & Filter ----------------------------------------------------
Setting/Reading Multiplier ------------------------------------------------------------------
Setting/Blanking/Reading Display --------------------------------------------------------
Resetting Total ---------------------------------------------------------------------------------
Setting/Reading Range Value -------------------------------------------------------------
Enable Master/Slave Channels & Setting Local/Remote Operation -------------
UNITS OF MEASURE TABLE -------------------------------------------------------------------------
GAS IDENTIFICATION TABLE
Gas #1 thru 66 --------------------------------------------------------------------------------
Gas #67 thru 130 -----------------------------------------------------------------------------
Gas #131 thru 180 ---------------------------------------------------------------------------
APPENDIX A, PCA SCHEMATIC DRAWING
1
2
3
4
5
5
6
6
6
6B
7
9
9
10
10
11
11
12
13
14
14
15
15
16
17
18
19
20
21
21
22
22
22
23
24
25
26
PRODUCT DESCRIPTION
The Model 954 is a high performance, microprocessor-based 4-channel power
supply/controller designed for use with Mass Flow Controllers (MFC) or Mass Flow Meters
(MFM).
A linear regulator provides a low noise, foldback current limited, thermal overload protected
+15Vdc and -15Vdc power supply for each of the (4) Channels. The Model 954 accepts
user selectable 0-5Vdc, 0-10Vdc or 4-20mA input signals. It also supplies 0-5Vdc, 0-10Vdc
or 4-20mA setpoint signals, for each channel, for flow control in MFCʼs.
The firmware utilizes a Real Time Operating Sytem (RTOS) for real time multitasking
capabilities. This allows continuous monitoring of each channel's flow rates, total flow and
setpoints regardless of the task being performed. A 16-bit multi-channel, high speed,
sigma-delta analog-to-digital converter provides accurate flowrate data. A 32K x 8 battery
backed RAM stores more than 90 Units of Measure and 190 Gas Identifiers selectable by
the user. All pertinent data, required by the microprocessor at power-up to re-initialize the
system, is also stored in the same RAM.
The Model 954 utilizes a 4-line by 20 character back lighted LCD display. A built in
Totalizer, for each channel automatically recognizes the units of measure selected and
adjusts the time base for the integrator accordingly. The user can select either Flow or
Total to be displayed for each channel. When selected, the setpoint signal is displayed and
can be altered via the front panel switches. Override controls for opening or closing the
MFC valves are also available for each channel. Annunciator LED's display the selected
valve override conditions.
Ratio control is user selectable for master/slave operation. Channel 1 is always the master
and any of the other 3 channels may be selected as slaves. This master/slave
arrangement utilizes the actual flow of Channel 1 as the master signal.
Both RS232 and RS485 serial communications are available. All functions selectable from
the front panel switches are also accessible via the RS232/RS485 serial ports. Only one,
either RS232 or RS485, serial port is active at any one time. Selection, including a baud
rate of 9600 or 19.2K, is made via the front panel switches.
Each flow channel has a high and low user programmable alarm. The alarms activate an
opto-isolated open collector transistor output capable of switching 25Vdc @ 10ma.
The unit can be rack mounted using standard half-rack hardware or can be bench mounted
using the retractable stand provided. Input power is selectable, via the rear panel power
selector for 100, 115 or 230 Vac, 50-60 Hz.
PAGE 1
SPECIFICATIONS
Signal Input
Number of Channels ----------------------- Signal Type ----------------------------------- Input Resistance
Voltage -------------------------------- Current ---------------------------------
Setpoint Output (Control Signal)
Signal Type ------------------------------------ Accuracy (typ) ---------------------------------
Analog-to-Digital Converter
Inputs ------------------------------------------- Technique ------------------------------------- Resolution ------------------------------------- Speed (max) -----------------------------------
Totalizer (Each Channel)
Technique ------------------------------------- Time Base (Quartz Crystal) -------------- Accuracy (typ) --------------------------------
4
0-5Vdc, 0-10Vdc, 4-20mA , user selectable
>10 Megohm
120 ohms
0-5Vdc, 0-10Vdc, 4-20mA (user selectable)
+/-0.05% FS (Voltage), +/-0.1% FS (Current)
4
Sigma-Delta
16-bit (bi-polar)
100 Hz
Integrated (Riemann Sum) Value
20MHz
+/- 30ppm
Microprocessor
Type -------------------------------------------- Speed ------------------------------------------ Operating System --------------------------- Non-volatile memory ------------------------
Serial Communications
RS232 ------------------------------------------ RS485 ------------------------------------------ Baud Rate --------------------------------------
Transducer Power Supply (Each Channel)
Voltage ----------------------------------------- Current (min) --------------------------------- Current (max) ----------------------------------
Input Power
Voltage ----------------------------------------- Current (typ) ---------------------------------- Fuse ---------------------------------------------
80C31
20MHz
RTOS with multitasking capabilities
32K x 8 Battery backed Ram
Bi-directional (user-slectable)
Full-duplex (user-selectable)
9600 or 19.2K baud (user-selectable)
+/-15Vdc, +/-0.75Vdc
250mA
400MA
100/115/230 Vac, +/-10% (switch selectable)
500 mA
1 amp SLO BLO (Time Delay)
PAGE 2
FRONT PANEL
OPEN
CLOSE
CH1
CH2
CH3
CH4
MENU
ESC
8
1
4 5
7
ENTER
6
7
CH
SELECT
PURGE
CLOSE
RUN
2 3
8 9
0
9
6
.
1
2
3
5
4
ANNUNCIATORS: Displays OVERRIDE signal status of each channel. If annunciators are not
illuminated, the Setpoint (Control) voltage is active.
DISPLAY AREA
Column 1: Reserved for displaying (*) Active Channel, (M) Master Channel, (S) Slave Channel or (T) totalizer.
Column 2: Reserved for polarity indicator (minus sign for negative signal, none for positive).
Col's 3 - 8: Actual scaled value of input signal. Displays FLOW or TOTAL in normal display mode. Displays
the Setpoint (Control) value when CH SEL is depressed.
Column 9: Space
Col's 10-14: Units of Measure
Column 15: Space
Col's 16-20: Gas Identifier
ESC: Escape key used to exit MENU sequence without updating current settings.
ENTER: Key used to enter new settings.
KEYPAD: Used to quickly enter new settings.
OVERRIDE: Used with CH SEL to override Setpoint (Control) voltage inputs with valve OPEN or valve
CLOSE signals. RUN disables OPEN or CLOSE selection.
CH SEL: Used to scroll through Channels 1, 2, 3 and 4 to update the selected Channel's
Setpoint (Control) voltage or to send the selected OVERRIDE signal.
MENU: Key used to enter MENU or manual setup sequence.
1
2
3
4
5
6
7
8
SCROLL: Used to scroll MENU selections UP or DOWN
9
PAGE 3
REAR PANEL
5
5
10
15
ANALOG OUT
8
15
CHANNEL 1
8
15
CHANNEL 3
6
7
J5
1
6
11
J1
1
9
J3
1
9
J8
9
18
26
ALARMS
J2
8
15
CHANNEL 2
J4
8
15
CHANNEL 4
1
10
19
1
9
1
9
5
RS485
5
RS485
5
RS232
J9
1
69
J7
1
69
VAC
230
J6
1
69
115
100
8
O
T250 1A
4
3
2
1
POWER INLET WITH FUSE (1 amp TIME DELAY or SLO BLO)
1
2
POWER SELECTOR SWITCH
3
RS232 SERIAL PORT (J6)
TRANSDUCER CONNECTORS (J1, J2, J3, J4)
4
ANALOG OUTPUT (J5)
5
6
ALARMS (J8)
RS-485 SERIAL PORT (J7, J9)
7
POWER ON/OFF SWITCH
8
PAGE 4
CONNECTOR PIN DESIGNATIONS
TRANSDUCER CONNECTORS (J1, J2, J3, J4)
1 SIGNAL COMMON
2 SIGNAL INPUT
3 GROUND
4 VALVE OPEN
5 GROUND
6 -15Vdc
7 NC
8 SETPOINT SIGNAL
9 GROUND
10 GROUND
11 NC
12 VALVE OFF
13 +15Vdc
14 NC
15 CHASSIS GROUND
8
15
Transducer Connector (Female)
Rear Panel View
1
9
ANALOG OUTPUT (J5)
1 SIGNAL CH 1
2 SIGNAL COMMON CH 1
3 SIGNAL CH2
4 SIGNAL COMMON CH2
5 NC
6 NC
7 NC
8 NC
9 NC
10 NC
11 SIGNAL CH3
12 SIGNAL COMMON CH3
13 SIGNAL CH4
14 SIGNAL COMMON CH4
15 NC
5
10
15
Analog Output Connector (Female)
Rear Panel View
1
6
11
PAGE 5
CONNECTOR PIN DESIGNATIONS
ALARMS (J8)
1 CH1 HIGH ALARM
2 CH 1 LOW ALARM
3 CH1 ALARM COMMON
4 CH2 HIGH ALARM
5 CH2 LOW ALARM
6 CH2 ALARM COMMON
7 NC
8 NC
9 NC
10 NC
11 NC
12 NC
13 NC
14 NC
15 NC
16 NC
17 NC
18 NC
19 CH3 HIGH ALARM
20 CH3 LOW ALARM
21 CH3 ALARM COMMON
22 CH4 HIGH ALARM
23 CH4 LOW ALARM
24 CH4 ALARM COMMON
25 NC
26 NC
9
18
26
Alarm Connector (Female)
Rear Panel View
1
10
19
RS232 (J6)
1 NC 6 DSR
2 RXD 7 NC
3 TXD 8 NC
4 DTR 9 NC
5 DIGITAL GROUND
RS485 (J7, J9)
1 NC 6 NC
2 RXD(-) 7 RXD(+)
3 TXD(+) 8 TXD(-)
4 DIGITAL GROUND 9 NC
5 NC
5
RS232 Connector (Female)
Rear Panel View
5
RS485 Connector (Female)
Rear Panel View
1
69
1
69
PAGE 6
MODEL 954 CONFIGURATION
As Sierra Instrument supplies mass flow instruments with two different valve circuits (15 Vdc and 30 Vdc),
our Model 954 is designed to accommodate both types. This is accomplished by moving 4 jumpers
(one per channel) on the Model 954 PCA (inside the housing). Please refer to the PCA schematic in
Appendix A for the location of these jumpers. All Model 954 units come factory set for 15 Vdc valve circuit
operation (unless ordered new with a 30 Vdc instrument).
Determining which valve circuit you have inside your Sierra flow instrument.
The following Sierra instruments have 15 Vdc valve circuits:
All Model 830 mass flow meters
All Model 840 mass flow controllers with plastic electronics cover
All Model 840 mass flow controllers with full-scale flow below 1.0 slpm
Model 840L mass flow controllers with metal electronics cover having a plug in the rear of the cover (upper right)
The following Sierra instruments have 30 Vdc valve circuits:
All Model 840M mass flow controllers
Model 840L Mass flow controllers with metal electronics cover having a screw in the rear of the cover (upper right)
The following Sierra instruments should never be used with the Model 954:
Any 840H mass flow controller. Contact Sierra Instruments for information on operating the Model 840H.
Jumper verification and adjustment
Select which one of the Model 954ʼs four channels is to be used with each of your instruments.
With the power disconnected, remove the top 2 large screws on the rear of Model 954. With the screws
removed, carefully slide the top cover to the rear exposing the PCA inside (see Appendix A for PCA
schematic). Locate the jumpers numbered 3 to 10. They are selected as follows:
Jumper position 3 Channel 1 30 Vdc valve
Jumper position 4 Channel 1 15 Vdc valve
Jumper position 5 Channel 2 30 Vdc valve
Jumper position 6 Channel 2 15 Vdc valve
Jumper position 7 Channel 3 30 Vdc valve
Jumper position 8 Channel 3 15 Vdc valve
Jumper position 9 Channel 4 30 Vdc valve
Jumper position 10 Channel 4 15 Vdc valve
Move the jumpers if needed, close the cover, replace the 2 screws.
PAGE 6B
START-UP
The Model 954 has a 100 Vac, 115 Vac or 230 Vac, 50/60 Hz power selector switch located at the rear of the
instrument. Please refer to page 4 to locate this switch. Verify the power selector switch is in the proper position
prior to connecting the power cable to the unit. Verify power ON/OFF switch is in the OFF position. Then perform
the following steps.
1. Connect the power cable to the instrument and apply the proper input power. Do not make any other
connections to the instrument.
2. Turn power ON/OFF switch ON.
3. The display will momentarily display the current version of the firmware utilized, If you purchase the model
954 separately, it will show the following
126.72 SCCM #1
126.72 SCCM #2
126.71 SCCM C3H6O
126.72 SCCM C2H3N
If your model 954 was purchased with Sierra MFM or MFC instruments, each channel will be set to the
proper calibration for that unit.
Note: All 4 channels should have the CLOSE annunciators illuminated. The values 126.71 and 126.72
are approximate and is the display for an open signal input . It may not correspond exactly to the
display shown on this unit.
factory default display:
4. Change the Units of Measure and Gas Identifiers as desired. Please refer to page 10. To blank the Units
of Measure select "00" then "ENT". To blank the Gas Identifier select "000" then "ENT". To blank the
entire line, please refer to RS232/485 Commands, Selecting/Blanking/Reading Display on page 21.
5. The Model 954 is factory calibrated at 0.000 and 5.000Vdc to display 0.00 and 100.00 for each channel.
To change the display range, without recalibration, see MANUAL CAL/RANGE, Range(Changing
Range) on page 15. To enter a Gas Correction Factor or Multiplier, refer to MANUAL CAL/RANGE,
Calibrate (Multiplier) on page 16. The factory Multiplier setting is 1.0000.
6. The Model 954 can accept 0-5Vdc, 0-10Vdc or 4-20mA input signals. If either 0-10Vdc or 4-20mA is
required, the instrument needs to be recalibrated. Select the proper signal input for the Transducer to be
used for each channel. Please refer to MANUAL SETUP, Selecting Input on page 11. Do not attempt to
recalibrate the instrument at this time. The factory Input setting is 0-5Vdc.
7. Select Filter to optimize reading stability and conversion speed. The factory Filter setting is 15Hz.
8. Allow 30 minutes warm-up time.
9. Turn power ON/OFF switch OFF.
10 . Connect MFC/MFM #1 to J1 on the Model 954 using the Connector Pin Designation information on
page 5. Connect all ground connections available to the transducer. Example: If the
ground pins, connect all four ground pins shown on J1. All ground pins on J1, J2, J3 and J4 are
common but are routed on separate wires from the connector to a ground plane on the instrument
motherboard.
11
provide +/-15Vdc @ 250-400 mA to each transducer. Do not use a Transducer that requires more than
+/-15Vdc @ 500mA on any channel.
12. Verify the display illuminates and the transducer readings are essentially correct. If the selected signal
input for a channel is 0-5Vdc proceed to Step 13 for that channel. If the selected signal input for a
channel is 0-10Vdc or 4-20mA, that channel needs to be recalibrated. Refer to MANUAL CAL/RANGE,
Calibrate section pages 14 and 15 to recalibrate that channel.
. Connect MFC/MFM #2, 3 and 4 to the instrument. The Power Supply inside The 954 is designed to
MFC/MFM has 4
PAGE 7
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