Sierra 820 User Manual

Page 1
Series 820 Instruction Manual Table of Contents
Sierra 820 Series
Top-Trakª Mass Flow Meters
Instruction Manual
Part Number IM-82
5 Harris Court, Building L Monterey, CA 93940
(831) 373-0200 (800) 866-0200 Fax (831) 373-4402
http://www.sierrainstruments.com
Sierra Instruments b.v. Bolstoen 30A 1046 AV Amsterdam The Netherlands
+31(0)20-6145810 Fax +31(0)20-6145815
IM-82-C 0-1
Page 2
Table of Contents Series 820 Instruction Manual
Customer Notice
Sierra Instruments, Inc. is not liable for any damage or personal injury, whatsoever, resulting from the use of Sierra Instruments standard mass flow meters or control­lers for oxygen gas. You are responsible for determining if this mass flow meter or controller is appropriate for your oxygen application. You are responsible for cleaning the mass flow meter or controller to the degree required for your oxygen flow application.
© COPYRIGHT SIERRA INSTRUMENTS 1994 No part of this publication may be copied or distributed, transmitted, transcribed, stored in a retrieval system, or translated into any human or computer language, in any form or by any means, electronic, mechanical, manual, or otherwise, or disclosed to third parties without the express written permission of Sierra Instruments. The information contained in this manual is subject to change without notice.
TRADEMARKS Top-Trakª and Cal-Benchª are trademarks of Sierra Instruments, Inc. Other product and company names listed in this manual are trademarks or trade names of their respective manufacturers.
All Sierra products are Year 2000 compliant.
0-2 IM-82-C
Page 3
Series 820 Instruction Manual Table of Contents

Table of Contents

Chapter 1 Introduction
Introduction.............................................................1-1
Using this Manual .................................................1-1
Safety Information.................................................1-2
Receipt of System Components..................................1-2
Technical Assistance ..............................................1-2
Top Trak Features......................................................1-3
The 820 Series Flow Sensing Principle .............................1-4
Chapter 2 Installation
Installation Overview ..................................................2-1
Installing the Transducer ..............................................2-2
Compression Fittings .............................................2-2
VCO Fittings .......................................................2-2
VCR Fittings .......................................................2-3
All 1/2-inch Size Connections....................................2-3
Wiring the Transducer.................................................2-4
Standard 0-5 VDC Output Signal Wiring.......................2-5
Optional 4-20 mA Output Signal Wiring........................2-5
Remote Display Installation...........................................2-6
Chapter 3 Operation
Transducer Operation..................................................3-1
Transducer Accuracy..............................................3-1
Referencing the Transducer to Non-Standard Conditions ....3-2
Transducer Over-Ranging ........................................3-2
Zero and Span Adjustments ......................................3-3
Chapter 4 Maintenance and Repair
Transducer Cleaning...................................................4-1
Flow Path Cleaning Model 822/824 .................................4-2
Inlet and Outlet Screens...........................................4-2
Laminar Flow Element............................................4-3
Flow Path Cleaning Model 826/827 .................................4-4
Laminar Flow Element............................................4-4
Flow Path Cleaning Model 822-S/824-S............................4-5
Laminar Flow Element............................................4-5
Sensor Cleaning and Inspection .................................4-8
Transducer Calibration ................................................4-9
Transducer Troubleshooting............ . . . . . . ...................... 4-11
Returning Equipment to the Factory ............................... 4-12
IM-82-C 0-3
Page 4
Table of Contents Series 820 Instruction Manual
Appendix A Conversion Formulas and Gas Tables
Appendix B Production Specifications
List of Figures
1-1. Top-Trak Features (Typical)..................................1-3
1-2. Flow Paths through the Transducer..........................1-4
1-3. Flow Measuring Principle.....................................1-4
2-1. Piping Requirements for 1/2-inch Size Connections.......2-3
2-2. Transducer D-Connector Pin Assignments .. . . .............2-4
2-3. Standard 0-5 VDC Output Signal Wiring ...................2-5
2-4. Single Transducer Current Loop Connection...............2-5
2-5. Multiple Transducer Current Loop Connections ...........2-6
2-6. Mounting the Remote Display ................................2-6
4-1. Model 822/824 Flow Components.................. . . . . . . . . . 4-2
4-2. Correct LFE Position ..........................................4-3
4-3. Model 826/827 Flow Components.................. . . . . . . . . . 4-4
4-4. Low Flow Transducer LFE Cleaning........................4-5
4-5. Medium Flow Transducer LFE Cleaning ...................4-6
4-6. High Flow Transducer LFE Cleaning .......................4-7
4-7. Printed Circuit Board Component Locations ............. 4-10
0-4 IM-82-C
Page 5
Series 820 Instruction Manual Table of Contents
Cautions
Caution! Only qualified personnel should install the transducer.
Caution! Do not supply +DC power at the D-connector while using a power supply at
the power jack. Both supplies may be damaged.
Caution! Operating a 12 VDC transducer at 24 VDC will cause equipment damage.
Caution! Only qualified personnel should perform transducer service, calibration or
troubleshooting procedures.
Caution! When using toxic or corrosive gases, purge the unit thoroughly with inert dry gas before disconnecting from the gas line.
Caution! Printed circuit boards are sensitive to electrostatic discharge. To avoid dam­aging the board, follow these precautions to minimize the risk of damage:
· before handling the assembly, discharge your body by touching a grounded,
metal object
· handle all cards by their edges unless otherwise required
· when possible, use grounded electrostatic discharge wrist straps when handling
sensitive components
IM-82-C 0-5
Page 6
Table of Contents Series 820 Instruction Manual
0-6 IM-82-C
Page 7
Series 820 Instruction Manual Chapter 1 Introduction

Chapter 1 Introduction

This instruction manual covers the installation, operation and main­tenance of SierraÕs 820 Series product line including the following Top-Trakª Models:
· 822 Mass Flow Meter with display (nylon flow body)
· 824 Mass Flow Meter without display (nylon flow body)
· 826 Hi-Flow Meter with display (aluminum flow body)
· 827 Hi-Flow without display (aluminum flow body)
· 822-S Mass Flow Meter with display (stainless steel flow body)
· 824-S Mass Flow Meter without display (stainless steel flow body)
SierraÕs Top-Trak measurement of gas mass flow. The 820 Series offers a broad range of sizes and process connections for flexibility and versatility. The primary standard calibration ensures starting point accuracy and NIST traceability. The meterÕs 0-5 VDC or 4-20 mA output signal is provided for recording, data-logging or control. The optional dis­play reads the mass flow rate directly in engineering units or per­centage of full scale.
Using This Manual
This manual is organized into four chapters:
· Chapter 1 includes the introduction and theory of operation
· Chapter 2 provides installation and wiring instructions
· Chapter 3 describes transducer operation and features
· Chapter 4 covers maintenance, calibration and troubleshooting
Gas tables and conversion formulas are found in Appendix A. The product specifications and dimensional drawings are found in Appendix B.
Throughout this manual, we use the word transducer as a generic term to represent all models of SierraÕs 820 Series Top-Trak Mass Flow Meters.
ª
Mass Flow Meters are designed for precise
IM-82-C 1-1
Page 8
Chapter 1 Introduction Series 820 Instruction Manual
Safety Information
Caution and warning statements are used throughout this book to draw your attention to important information.
Warning! Caution!
This statement appears with information that is important to protect people and equipment from damage. Pay very close attention to all warnings that apply to your application.
This statement appears with information that is important for protecting your equipment and per­formance. Read and follow all cautions that ap­ply to your application.
Receipt of System Components
When receiving a Sierra transducer, carefully check the outside packing carton for damage incurred in shipment. If the carton is damaged, notify the local carrier and submit a report to the factory or distributor. Remove the packing slip and check that all ordered com­ponents are present and match your specifications (as ordered). Make sure any spare parts or accessories are not discarded with the packing material. Do not return any equipment to the factory without first contacting Sierra Customer Service.
Technical Assistance
If you encounter a problem with your transducer, review the configu­ration information for each step of the installation, operation and set up procedures. Verify that your settings and adjustments are consis­tent with factory recommendations. Refer to Chapter 4, Trouble­shooting, for specific information and recommendations.
If the problem persists after following the troubleshooting procedures outlined in Chapter 4, contact Sierra Instruments by fax or by E-mail (see inside front cover). For urgent phone support you may call (800) 866-0200 or (831) 373-0200 between 8:00 a.m. and 5:00 p.m. PST. In Europe contact Sierra Instruments bv at +31 20 6145810. When contacting Technical Support, make sure to include this information:
· the flow range, serial number, Sierra order number and
model number (all marked on the transducer nameplate)
· the problem you are encountering and any corrective action
taken
· application information (gas, pressure, temperature, pipe and
fitting configuration)
1-2 IM-82-C
Page 9
Series 820 Instruction Manual Chapter 1 Introduction
Top-Trak Features
Standard Top-Trak Mass Flow Meters require a 12 to 15 VDC exter­nal power source (24 VDC input power optional). The transducerÕs 0 to 5 VDC output signal allows for flow recording, data-logging or control. A 4 to 20 mA output signal is optionally available. Input power and output signal connections are made via the 9-pin sub-type D-connector located on the side of the transducer. An additional input power jack is located just below the D-connector. (It is important to connect input power at only one location.)
The transducer shown below is a typical example of a 822 Series Top-Trak Mass Flow Meter. Other models may vary slightly in their appearance but are operationally equivalent.
Figure 1-1. Top-Trak Features (Typical)
IM-82-C 1-3
Page 10
Chapter 1 Introduction Series 820 Instruction Manual
The 820 Series Flow Sensing Principle
The operating principle of Top-Trak transducers is based on heat transfer and the first law of thermodynamics. During operation process gas enters the instrumentÕs flow body and divides into two flow paths, one through the sensor tube, the other through the lami­nar flow element bypass. The laminar flow bypass generates a pres­sure drop, P1ÐP2, forcing a small fraction of the total flow to pass through the sensor tube (m1).
Figure 1-2. Flow Paths through the Transducer
Two resistance temperature detector (RTD) coils around the sensor tube direct a constant amount of heat (H) into the gas stream. In ac­tual operation, the gas mass flow carries heat from the upstream coil to the downstream coil. The resulting temperature difference (DT) is detected by the RTD coils and gives the output signal. Since the molecules of the gas carry away the heat, the output signal is linearly proportional to gas mass flow.
Figure 1-3. Flow Measuring Principle
1-4 IM-82-C
Page 11
Series 820 Instruction Manual Chapter 2 Installation

Chapter 2 Installation

Installation Overview
To ensure a successful installation, inlet and outlet tubing should be clean and free from burrs or rims caused by cutting prior to plumb­ing the transducer into the system. The protective caps covering the inlet/outlet fittings should not be removed until immediately prior to installation.
Before installing the transducer, verify the following:
1. Make sure the installation site meets the specific operating pa-
rameters recorded on the transducer’s nameplate. Each trans-
ducer is factory-configured for a specific gas and flow range. If
the operating pressure is more than 50 psi (3.4 bar) away from
the calibration pressure, it is advisable to return the unit to the
factory for re-calibration. (Adjusting zero may be sufficient to
remain within specification.)
2. Do not locate the transducer in areas subject to sudden tempera-
ture changes, moisture, drafts or near equipment radiating sig-
nificant amounts of heat. Make sure to allow adequate space for
cable connectors and wiring.
3. For 1/2-inch size inlet/outlet process connections on models 826
and 827 make sure the location meets the minimum number of
recommended pipe diameters upstream and downstream of the
transducer. A minimum of 5 inches (127 mm) upstream and 2-
1/2 inches (64 mm) downstream is always recommended. (not
necessary for other models)
4. Horizontal mounting is preferable. Vertical mounting is possible
with best results achieved when the factory calibration is specifi-
cally performed for vertical mounting. In vertical positions zero
shift will occur depending on the gas pressure at zero flow.
5. If the gas contains any particulate matter, install an in-line filter
prior to the transducer. Recommended filter size: 15 micron for
flows of 10 sccm to 30 slpm, 30 micron for above 30 slpm.
6. If a potential over-flow condition exists, insert a valve or critical
orifice in the line to limit flow to approximately 25 percent above
the full scale range of the meter.
7. Confirm that the transducer o-ring material is compatible with
the gas to be measured.
8. For remote displays, confirm the supplied cable is of sufficient
length to connect the components.
IM-82-C 2-1
Page 12
Chapter 2 Installation Series 820 Instruction Manual
Caution!
Only qualified
personnel should install
the transducer.
Installing the Transducer
Follow the installation instructions that apply to your transducer’s process connection. For all 1/2-inch size process connections, observe the piping recommendations given on page 2-3. Before operation, all plumbing should be checked carefully for leaks and the transducer purged with dry nitrogen.
Compression Fittings
1. Position the transducer with the flow direction arrow pointing
downstream in the direction of flow.
1. Verify the position of the front
and back ferrule. Insert the tubing into the fitting. Make sure that the tubing rests firmly on the shoulder of the fitting and that the nut is finger tight. (Do not mix or inter­change parts of tube fittings made by different manufacturers.)
2. Hold the body steady with a backup wrench. For 1/2-
inch size, tighten the nut 1-1/4 turns from finger tight. For 1/8­inch, 1/4-inch and 3⁄8-inch sizes, tighten only 3/4 turn from fin­ger tight. Do not over-tighten!
3. Check the system’s entire flow path thoroughly for leaks. (Do
not use liquid leak detectors, instead monitor pressure decay. Over-exposing the transducer to leak detector fluid may damage the unit.)
VCO and VCR Fittings
1. Position the transducer with the flow direction arrow pointing
downstream in the direction of flow.
2. Install new o-rings compatible with the gas to be used. (Do not
mix or interchange parts of tube fittings made by different manu­facturers.)
3. Hold the body steady with a backup wrench. Tighten
the nut finger tight and then 1/4 turn tighter with a wrench. Do
not over-tighten!
4. Check the system’s entire flow path thoroughly for leaks. (Do not
use liquid leak detectors, instead monitor pressure decay. Over­exposing the transducer to leak detector fluid may damage the unit.)
2-2 IM-82-C
Page 13
Series 820 Instruction Manual Chapter 2 Installation
1/4 Inch Female NPT (standard on nylon flow bodies)
1. Position the transducer with the flow direction arrow pointing
downstream in the direction of flow.
2. Use a good quality paste pipe thread sealant.
Apply to the pipe threads.
3. Tighten the pipe no more than 1 turn past hand-tight.
Caution! Do not over-tighten,
damage to the instrument may result.
4. Check the system’s entire flow path thoroughly for leaks. (Do not
use liquid leak detectors, instead monitor pressure decay. Over-
exposing the transducer to leak detector fluid may damage the unit.)
1/2-Inch Size NPT Connections (Models 826,827 only)
1. Install a section of straight pipe at least ten pipe diameters in length
upstream of the transducer. Also, allow at least five pipe diameters
downstream for accurate operation. DO NOT use reducers. If the
preceeding components in the flow path create disturbances extend
the upstream pipe length.
2. Position the transducer with the flow direction arrow pointing
downstream in the direction of flow.
3. Tighten fittings until leak tight (refer to published standards for
specific recommendations).
4. Check the system’s entire flow path thoroughly for leaks. (Do not
use liquid leak detectors, instead monitor pressure decay. Over-
exposing the transducer to leak detector fluid may damage the unit.)
Figure 2-1.
Piping Requirements for all 1/2-Inch Size Process Connections
IM-82-C 2-3
Page 14
Chapter 2 Installation Series 820 Instruction Manual
Caution!
Do not supply +DC power
at the D-connector while
using a power supply at the
power jack. Both supplies
may be damaged.
Wiring the Transducer
Standard Top-Trak™ transducers require a 12 to 18 VDC power supply (15 VDC nominal, 100 mA maximum). 24 VDC input power is optional. Transducers are connected to the power supply through either the dedicated DC power jack or through the 9-pin D-connector located on the side of the enclosure. Before powering the unit, check the transducer’s nameplate to confirm input power:
PV1 = 12 to 18 VDC
PV2 = 24 VDC
Note: operating a 24 VDC transducer at 12 to 18 VDC will result in unreliable operation.
Caution!
Operating a 12 VDC trans-
ducer at 24 VDC will cause
equipment damage.
The transducer’s standard 0 to 5 VDC (4-20 mA optional) output signal is available through the D-connector. The mating connector is included with the transducer. Connection details are given on the following pages.
When the transducer is configured for a remote display, signal con­nections are made via the 9-pin connector. Input power connections are not included in the standard interface cable. Remote display mounting dimensions are given at the end of this chapter.
Figure 2-2. Transducer D-Connector Pin Assignments
2-4 IM-82-C
Page 15
Series 820 Instruction Manual Chapter 2 Installation
Standard 0-5 VDC Output Signal Wiring
The standard 0-5 VDC output signal flows from Pin 3 (0-5 VDC Out) through the load (1K Ohm minimum) to Pin 7 (Power Com­mon). The figure below is a typical example of input power and output signal connections.
Figure 2-3. Standard 0-5 VDC Output Signal Wiring
Optional 4-20 mA Output Signal Wiring
The optional 4-20 mA output signal flows from Pin 9 (4-20 mA Out) through the load (50 to 500 Ohms maximum) to Pin 7 (Power Com­mon). The figure below is a typical example of input power and out­put signal connections. (Multiple transducer current loop output con­nections are given on the next page.)
Figure 2-4. Single Transducer Current Loop Connection
IM-82-C 2-5
Page 16
Chapter 2 Installation Series 820 Instruction Manual
Figure 2-5. Multiple Transducer Current Loop Connections
Remote Display Installation
Mount the remote display at a convenient location within reach of the supplied interface cable. The maximum cable length is 100 feet (30 m).
Figure 2-6. Mounting the Remote Display
2-6 IM-82-C
Page 17
Series 820 Instruction Manual Chapter 3 Operation

Chapter 3 Operation

The output signal of the transducer is either 0-5 VDC (standard) or 4-20 mA (optional). The output signal is linear and proportional to the gas mass flow rate. For example, for a 0-5 VDC output signal,
5.00 VDC is the output signal for the full scale listed on the trans­ducer’s nameplate, 2.50 VDC is for one-half of full scale, and 0.00 VDC is for zero flow. For a 4-20 mA output signal, 20.00 mA is the output signal for the full scale, 12.00 mA is for one-half of full scale, and 4.00 mA is for zero flow.
Transducer Operation
When the transducer is installed and the system has undergone a complete leak check:
1. Apply power. The output signal will be at a high level for the
first 10 to 20 seconds while the sensor warms up to its normal
operating temperature range. Assuming zero flow, the output
signal will then drop to zero (or 4 mA, depending on output con-
figuration). Allow at least thirty minutes of warm-up time.
2. For first-time start ups, perform an initial zero output check as
described on page 3-3. After checking the initial zero setting, the
transducer is ready to monitor the gas mass flow rate.
Transducer Accuracy
The standard accuracy of Top-Trak is ±1.5% of full scale. The ±1.5% of full scale accuracy means that the 0-5 VDC output signal is accurate to within ±0.1 VDC. The 4-20 mA output is accurate to within ±0.4 mA.
For example, the output signal for zero flow can be as much as +0.1 VDC or +0.4 mA. If the transducer has an output signal at zero flow, as long as it is within either of these two ranges, it does not mean it is malfunctioning.
For transducers with a digital display, the accuracy is simply 1.5 times the full scale flow rate stated on the nameplate. For example, if the full scale is 10 slpm, the digital display will be accurate to ±0.2 slpm. The reading at zero flow may be as much as +0.2 slpm and still be within the stated accuracy specification.
IM-82-C 3-1
Page 18
Chapter 3 Operation Series 820 Instruction Manual
Referencing the Transducer to Non-Standard Conditions
The gas flow rate output of your transducer is referenced to “standard” conditions of 21°C (70°F) and 760 mm of mercury (1 atmosphere) unless otherwise specified on the certificate of calibration. Check the stated reference conditions of your transducer. If you are comparing your transducer’s output with another type of flow meter, different reference conditions could cause a discrepancy between the flow readings.
For example, the output reading of a Top-Trak will be approximately 7% lower when referenced to 0°C rather than 21°C. To find the flow rate referenced to other standard conditions or the actual temperature and pressure conditions in the pipe where your transducer is located, see Appendix A.
Transducer Over-Ranging
If the flow rate exceeds the full scale value listed on the transducer nameplate, the output signal and digital display (if so equipped) will read a higher value. The transducer is not calibrated for over-ranged flows and will probably be both non-linear and inaccurate. Over­range conditions are indicated by the display and/or output signal going to a level above the full scale range. When the over-range condition is removed, it may take several seconds for the transducer to recover and resume normal operation.
If the supply voltage is only 12 VDC, the over-ranged reading may exceed the full scale value by 10% maximum. If the supply voltage is higher, as with the 24 VDC option, then the output can exceed the full scale by as much as 50%, or more. Digital displays cannot ex­ceed 3-1/2 digits (1999). If the flow rate exceeds 1999, the right­most digits will blank and only the left-hand “1” will appear on the display.
3-2 IM-82-C
Page 19
Series 820 Instruction Manual Chapter 3 Operation
Zero and Span Adjustments
The zero and span potentiometers are accessed through the ports marked on the side of the transducer. Normally, span adjustments are not made unless you are calibrating the transducer. The span adjustment should not be used unless you have a known, precise non­zero flow rate that you wish to match. Before making any zero adjustments, confirm that the system has reached its normal operating temperature and pres­sure and the transducer is mounted in its final position.
For transducers without the digital display:
1. Power the transducer and allow at least 30 minutes of warm up
time before attempting any adjustments. Set gas flow to zero.
Confirm that no flow exists.
2. Connect a digital multimeter to Pin 3 (0-5 Out) or, Pin 9 (4-20 Out)
and Pin 7 (Power Common). Check the reading. If it does not indi-
cate 0± .05 VDC, (or 4.0± .016mA) adjust the zero potentiometer.
Since the output does not indicate negative numbers, it is neces-
sary to adjust down from a slightly positive reading. Begin by
slowly rotating the zero pot clockwise until a positive reading is
indicated. To complete the zero adjustment, slowly turn the pot
counterclockwise until zero is achieved.
For transducers with the digital display:
1. Power the transducer and allow at least 30 minutes of warm up
time before attempting any adjustments. Set gas flow to zero.
Confirm that no flow exists.
2. Observe the reading on the digital display. If the reading is
greater than 1.5% of full scale, adjust the zero potentiometer.
IM-82-C 3-3
Page 20
Chapter 3 Operation Series 820 Instruction Manual
3-4 IM-82-C
Page 21
Series 820 Instruction Manual Chapter 4 Maintenance & Repair
Chapter 4 Maintenance and Repair
Top-Trak™ transducers essentially require no scheduled maintenance other than periodic flow path cleaning if the gas is dirty. If an in-line
Caution!
It is important that this
transducer be serviced
and/or calibrated by qualified personnel.
filter is used, the filtering element should be periodically replaced or ultrasonically cleaned.
Calibration of Sierra Instruments flow meters and controllers re­quires a calibrating standard of at least equal accuracy and preferably an order of magnitude better than the transducer, and a skilled fac­tory technician familiar with the Top-Trak. It is recommended that Top-Trak meters be returned to the factory for annual evaluation and calibration.
Included in this chapter are general instructions for:
• Transducer Cleaning Instructions..........................page 4-1
• Transducer Calibration......................................page 4-9
• Transducer Troubleshooting..............................page 4-11
• Returning Equipment to the Factory.....................page 4-12
Transducer Cleaning
Due to transducer design variations, separate cleaning instructions are given in this chapter for each of the following models:
Model 822/824 with nylon flow body
Model 826/827 with aluminum flow body
Model 822-S/824-S with stainless steel flow body
When toxic or corrosive gases are used, the transducer must be thoroughly purged with inert dry gas before disconnecting from the gas line. If a transducer used with toxic or corrosive gas is returned to the factory, the transducer must first be purged clean. A Material Safety Data Sheet must be enclosed with the unit upon its return.
IM-82-C 4-1
Page 22
Chapter 4 Maintenance & Repair Series 820 Instruction Manual
Flow Path Cleaning Model 822/824
Caution!
When using toxic or cor-
rosive gases, purge the
unit thoroughly with inert
dry gas before disconnect-
ing from the gas line.
Figure 4-1. Model 822/824 Flow Components
Inlet and Outlet Screens
1. Remove the transducer from the system.
1. Remove inlet and outlet fittings.
2. Pull out the laminar flow element (LFE) holddowns.
3. Replace or clean the inlet and outlet screens.
4. Re-assemble components. When the transducer is installed in the
system, leak test the connection.
5. To be within the original accuracy, calibrate the transducer (see
page 4-9).
4-2 IM-82-C
Page 23
Series 820 Instruction Manual Chapter 4 Maintenance & Repair
Laminar Flow Element
The laminar flow element (LFE) is a precision flow divider which diverts a preset amount of flow through the sensor tube. The LFE is made of precision machined 316 stainless steel. The particular LFE used depends on the gas and flow range of the instrument. To clean or inspect the LFE:
1. Remove the transducer from the system.
Caution!
When using toxic or cor-
rosive gases, purge the
unit thoroughly with inert
dry gas before disconnect-
ing from the gas line.
1. Remove the inlet and outlet fittings. Pull out the LFE holddowns
and inlet/outlet screens.
2. The LFE has a slightly tapered shape with the larger diameter on
the upstream (inlet) side. To remove, use a blunt object which
does not mar the flow channels to push the LFE from the outlet
side to the inlet side. A 3/8-inch (9 mm) nut driver works well.
3. Clean the LFE using a suitable solvent. Make sure to carefully
clean all active flow channels in the LFE.
4. Re-install the LFE making sure to press it in the correct distance
as shown below.
5. Re-assemble remaining components. When the transducer is in-
stalled in the system, leak test the connection. Re-zero the trans-
ducer (see Chapter 3).
Figure 4-2. Correct LFE Position
IM-82-C 4-3
Page 24
Chapter 4 Maintenance & Repair Series 820 Instruction Manual
Flow Path Cleaning Model 826/827
Laminar Flow Element
The laminar flow element (LFE) is a precision flow divider which diverts a preset amount of flow through the sensor tube. The par­ticular LFE used depends on the gas and flow range of the instru­ment. To clean or inspect the LFE:
Caution!
When using toxic or cor-
rosive gases, purge the
unit thoroughly with inert
dry gas before disconnect-
ing from the gas line.
1. Remove the transducer from the system.
2. Remove the 6-32 hex nuts and washers. Remove the end caps.
Note the position of the three (3) LFE elements.
3. To remove the LFE, use a blunt object which does not mar the
flow channels to push the LFE from the flow body.
4. Clean the LFE using a suitable solvent. Make sure to carefully
clean all active flow channels in the LFE.
5. Re-install the LFE making sure to position it with both ends
even with the transducer flow body.
6. Re-assemble remaining components. When the transducer is in-
stalled in the system, leak test the connection. Re-zero the trans­ducer (see Chapter 3).
Figure 4-3. Model 826/827 Flow Components
4-4 IM-82-C
Page 25
Series 820 Instruction Manual Chapter 4 Maintenance & Repair
Flow Path Cleaning Model 822-S/824-S
Laminar Flow Element
The laminar flow element (LFE) is a precision flow divider which diverts a preset amount of flow through the sensor tube. The LFE is made of precision machined 316 stainless steel. The particular LFE used depends on the gas and flow range of the instrument. Should the LFE require cleaning or inspection due to deposition, use the ap­propriate cleaning procedure which is specific to flow body size.
Caution!
When using toxic or cor-
rosive gases, purge the
unit thoroughly with inert
dry gas before disconnect-
ing from the gas line.
Figure 4-4. Low Flow Transducer LFE Cleaning
Low Flow Transducers:
The LFE is accessed by unscrewing the main inlet fitting and re­moving it from the flow body. The LFE is screwed into the inlet fit­ting, which has been specially machined for this purpose. To access the components:
1. Remove the transducer from the system.
1. The inlet filter screen is held in place in the inlet fitting by the
LFE. Disassemble by holding the fitting steady with a wrench
and unscrewing the LFE with a medium flat-tipped screwdriver.
2. Remove the LFE assembly taking care not to bend the inlet
screen. Inspect the sealing O-ring and replace if necessary. In-
spect the inlet screen and replace if corroded or damaged. Light
to medium particulate contamination can be cleaned by back
washing with a suitable solvent. Air dry thoroughly.
3. Inspect the LFE for damage and replace if necessary. Replacement
of the LFE or inlet screen requires transducer re-calibration.
4. Re-assemble components. When the transducer is installed in the
system, leak test the connection. Re-zero the transducer (see
Chapter 3).
IM-82-C 4-5
Page 26
Chapter 4 Maintenance & Repair Series 820 Instruction Manual
Figure 4-5. Medium Flow Transducer LFE Cleaning
Medium Flow Transducers:
In the medium flow body, the LFE assembly consists of the honey­comb laminar flow element, inlet screen, 0.63 inch long standoff, two ranging washers, 2-1⁄4 inch long 4-40 screw and 4-40 nut. Range changes in the honeycomb element are made with various di­ameter ranging washers. To access the components:
Caution!
When using toxic or cor-
rosive gases, purge the
unit thoroughly with inert
dry gas before disconnect-
ing from the gas line.
1. Remove the unit from the system.
2. Access the LFE by unscrewing the four 10-32 socket head cap
screws from the inlet side of the flow body and remove the inlet end cap. (Note the position of the screws, one has a shorter length.)
3. Remove the LFE assembly taking care not to bend the inlet
screen. Inspect the sealing O-ring and replace if necessary. In­spect the inlet screen and replace if corroded or damaged. Light to medium particulate contamination can be cleaned by back washing with a suitable solvent. Air dry thoroughly.
4. Inspect the honeycomb element for damage and replace if neces-
sary. Replacement of the LFE or inlet screen requires transducer re-calibration.
5. Re-assemble components. When the transducer is installed in the
system, leak test the connection.
6. To be within the original accuracy, calibrate the transducer (see
page 4-9).
4-6 IM-82-C
Page 27
Series 820 Instruction Manual Chapter 4 Maintenance & Repair
Figure 4-6. High Flow Transducer LFE Cleaning
High Flow Transducers:
The high flow LFE is similar to the honeycomb element used in the medium flow body but larger in diameter. The high flow body consists of four parts: inlet tube, inlet cap, main flow body and end cap. The inlet tube is only removed to inspect and replace the sealing O-ring between the inlet tube and inlet cap. To access the components:
Caution!
When using toxic or cor-
rosive gases, purge the
unit thoroughly with inert
dry gas before disconnect-
ing from the gas line.
1. Remove the unit from the system.
2. To remove the inlet screen, remove the four 1⁄4-28 socket head
cap screws on the inlet side of the flow body and separate the
inlet cap from the main flow body.
3. Inspect the inlet screen for damage and corrosion and replace if nec-
essary. Light to medium particulate contamination can be cleaned by
back washing with a suitable solvent. Air dry thoroughly.
4. Inspect the sealing O-ring for damage and replace if necessary.
The inlet screen is mounted with the fine mesh side facing the inlet.
5. To remove the LFE loosen and remove the four threaded rods
holding the end cap to the main flow body. Separate the end cap
from the main flow body and remove the LFE assembly. The LFE
assembly consists of: 6-32 x 31⁄8 inch long screw, a #6 washer,
two ranging washers, honeycomb laminar flow element, LFE,
spacer, inlet filter, and 6-32 nut.
6. Inspect the honeycomb element for damage and replace if neces-
sary. Replacement of the LFE or inlet screen requires transducer
re-calibration.
7. Re-assemble components. When the transducer is installed in the
system, leak test the connection.
8. To be within the original accuracy, calibrate the transducer (see
page 4-9).
IM-82-C 4-7
Page 28
Chapter 4 Maintenance & Repair Series 820 Instruction Manual
Sensor Cleaning and Inspection
Due to sensor design variations, the following sensor cleaning in­structions are for Model 822-S/824-S only. All other transducer models must be returned to the factory.
Sensor cleaning is accomplished by simply rodding out the sensor with the Sensor Cleaning Stylette, part number “CK” available from Sierra. A 0.028 inch diameter piano wire may also be used.
To access the sensor for inspection or cleaning:
Caution!
When using toxic or cor-
rosive gases, purge the
unit thoroughly with inert
dry gas before disconnect-
ing from the gas line.
1. Remove the transducer from the system. Remove the two socket
head access port plugs with a 1⁄4-inch Allen wrench. Visually inspect the sensing ports and sensor.
1. Use a hemostat or tweezers to
push the cleaning wire into the downstream opening of the sensor tube. Do not force the cleaning wire, move it back and forth–DO NOT TWIST OR ROTATE.
2. Flush the sensor tube with a
non-residuous solvent compati­ble with the O-ring material. In cases where solids are deposited in sensor, units should be returned to factory for complete cleaning and re-calibration.
3. Blow dry all parts with dry nitrogen and re-assemble. When the
transducer is installed in the system, leak test the connection. Re-zero the transducer (see Chapter 3).
4-8 IM-82-C
Page 29
Series 820 Instruction Manual Chapter 4 Maintenance & Repair
Caution!
It is important that this
transducer be calibrated
only by qualified personnel.
Transducer Calibration
Calibration of Sierra’s flow meters requires a calibration standard of at least four times the accuracy of the transducer. Sierra’s Cal-Bench Automated Primary Calibration System is the preferred method of calibration and is used at the factory for all calibrations from 10 sccm up to 50 slpm. Most calibrations can be performed with a digital voltmeter (DVM) or multimeter with 0.25% accuracy and four digits, dry nitrogen and the K-factor tables included in this manual. Flow meters require a metering valve for setting a constant flow rate.
The following procedures are offered as guidelines for calibration. It is always best to return the transducer to the factory for calibra­tion. Calibration checks and minor adjustments to the zero and full scale are made via the access ports in the enclosure. If the linearity needs adjustment (when installing a different bypass to change the range) skip Step 2 and Step 3. If linearity does not need adjustment, complete only Steps 1 through 3.
Step 1. Warm Up
Plug in the unit to be calibrated and allow at least 30 minutes warm up time before attempting any adjustments.
Step 2. Zero Adjust
Slide open the zero and span access doors. Connect a DVM or mul­timeter to the transducer output pins. Adjust the zero potentiometer for 0.0 volts (4 mA) at zero flow.
Step 3. Check Full Scale
Generate full scale flow using a metering valve in-line with the unit under test. Compare the indicated flow rate with the flow standard reading. If they agree to within ±10%, adjust the span potentiometer for exact agreement. If the readings do not agree within ±10%, at­tempt to determine the cause of disagreement. Possibilities are:
leaks in the system or in the transducer
wrong or improper use of K-factor
wrong or improper correction for temperature and pressure
partially clogged or dirty sensor tube
replacement of components in the flow path do not exactly match
the original parts This completes transducer calibration. To adjust linearity, continue
with Step 4.
IM-82-C 4-9
Page 30
Chapter 4 Maintenance & Repair Series 820 Instruction Manual
Step 4. Adjusting Linearity
First gain access to the printed circuit board inside the enclosure:
1. For units with the digital display, carefully rotate the display un-
til it hits the top plate. Slide the display’s two side panels up and remove. Move the display aside taking care not to damage the connecting cable.
2. Remove the two Phillips head screws from the top of the trans-
ducer enclosure. Remove the two Phillips head screws from the back of the transducer enclosure. Pull the enclosure panels off.
3. Orient the transducer with the component side of the circuit
board facing you. Plug in the transducer and allow to warm up for at least 30 minutes.
Step 5. Zero Adjust
Connect a DVM to the transducer output pins. Adjust the zero po­tentiometer for 0.0 volts (4 mA) at zero flow.
Step 6. Calibrate 25%
Use the calibration standard to set a flow rate of 25% of full scale. Adjust the span potentiometer for 1.25 volts (8 mA) at the output of the transducer.
Step 7. Calibrate 50%
Increase the flow rate to 50% of full scale. If the output is within +0.05 V (0.2 mA), no adjustment is necessary. If the output is be­yond these limits, install a jumper block at J1 in the appropriate posi­tion (see Figure 4-7). Adjust R25 for the proper reading.
Step 8. Calibrate 75% and 100%
Set the flow to 75% of full scale. If the output is outside the limits set in Step 7, install a jumper block in J2 in the appropriate position. Adjust R27 for the correct reading. Repeat this procedure for 100% flow using R29. Repeat Steps 6 through 8 at least one more time.
Figure 4-7. Printed Circuit Board Component Locations
4-10 IM-82-C
Page 31
Series 820 Instruction Manual Chapter 4 Maintenance & Repair
Transducer Troubleshooting
When you suspect that the transducer is not operating correctly, there are a few simple checks that can be made before taking the unit out of service:
1. Make certain that there are no leaks in the gas line.
2. Check that all cables are connected and are in good condition.
3. Verify that the power supply is in the correct range and
properly connected to the transducer.
4. Double check connector pin outs when replacing another manu-
facturer’s transducer. This information is provided to help locate the cause of a transducer
failure. It is not intended to be an all inclusive repair guide. For most repairs, the unit should be returned to the factory for service.
Problem Possible Cause Solution
No output No power
Inlet filter screen clogged Clogged sensor PCB defective
Unit will not zero Gas leak
Application requires high pres­sure and non-horizontal mount­ing PCB defective
Reads full scale with no flow
Output too high Incorrect calibration or K-factor
Out of calibra­tion
*Model 822-S/824-S see sensor cleaning instructions
Gas leak Liquid present in system Defective sensor
Liquid present in system Defective sensor
Dirty or clogged sensor Change in composition of gas Gas leak LFE dirty Inlet filter screen clogged Incorrect inlet conditions (1/2-inch size models) PCB defective
Plug in power supply Clean or replace screen Return to factory for cleaning* Return to factory for repair
Find and correct leaks Re-zero transducer (see Chapter 3) Return to factory for repair
Find and correct leaks Check for liquid in flow path Return to factory for repair
Correct calibration/k-factor Check for liquid in flow path Return to factory for repair
Return to factory for cleaning* See K-factory tables Find and correct leaks Clean LFE Clean or replace screen Re-plumb transducer correctly (See Chapter 2) Return to factory for repair
IM-82-C 4-11
Page 32
Chapter 4 Maintenance & Repair Series 820 Instruction Manual
Returning Equipment to the Factory
Factory Calibration—All Models
Sierra Instruments maintains a fully-equipped calibration laboratory. All measuring and test equipment used in the calibration of Sierra transducers are traceable to NIST Standards. Sierra is ISO-9001 registered and con­forms to the requirements of ANSI/NCSL-Z540 and ISO/IEC Guide 25.
Instructions for Returning Your Instrument for Service
The following information will help you return your instrument to Sierra Instruments' Factory Service Center and will ensure that your order is processed promptly. Prices may vary depending on the flow range, type of gas and operating pressure of your unit. To request detailed pricing con­tact your local Sierra Instruments distributor or contact one of our offices directly. Our expedite fees are: three-day turnaround 25%, two-day turn­around 40%.
Please follow these easy steps to return your instrument for factory service:
1. Obtain a Return Materials Authorization Form (RMA) with assigned
number from Sierra Instruments. You may obtain this from the factory by calling (800) 866 0200 between 8:00 a.m. and 5:00 p.m. PST Monday through Friday. You may also obtain this number via e-mail by contacting service@sierrainstruments.com.
2. Once you have obtained an RMA number, complete the form (one
form can be used for multiple units). If you require service beyond calibration, but do not know which service(s) will be required, de­scribe the symptoms as accurately as possible on the RMA form. Submit electronically or by fax to (831) 373-2414.
3. Pack your instrument carefully (bubble wrap or molded foam sug-
gested-NOT PEANUTS) and include a copy of the RMA form (complete with Sierra supplied RMA number) with the unit(s).
4. Ship the unit(s) to the following address:
4-12 IM-82-C
Page 33
Series 820 Instruction Manual Chapter 4 Maintenance & Repair
RETURN ADDRESS: Sierra Instruments, Inc.
Caution!
Always fully neutralize
any toxic gas trapped in-
side the instrument before
removing it from the gas
line.
CUSTOMER SERVICE AND SUPPORT INFORMATION:
Email Technical Support: service@sierrainstruments.com Email Sales: sales@sierrainstruments.com
FACTORY USA (recommended):
TOLL FREE: 800-866-0200
European Sales & Service Center:
Attention: Factory Service Center 5 Harris Court, Building L Monterey, CA 93940 USA
PHONE: 831-373-0200 FAX: 831-373-4402 EMAIL: service@sierrainstruments.com
PHONE: +31 72 5071400 FAX: +31 72 5071401 EMAIL: service@sierra-instruments.nl
Asia Sales & Service Center:
PHONE: + 86 203435 4870 FAX: +86 203435 4872
IMPORTANT SAFETY NOTE ABOUT PURGING
WARNING: When toxic or corrosive gases are used, purge unit thoroughly with inert dry gas before disconnecting from the gas line to prevent personnel from being injured when coming in contact with the instrument.
WARNING: If an instrument used with a toxic or corrosive gas is returned to the factory, a Material Safety Data Sheet (MSDS) must be enclosed & attached to the outside of the box to alert Sierra personnel of the potential hazard. Also, make sure the inlet & outlet are solidly plugged off.
IM-82-C 4-13
Page 34
Series 820 Instruction Manual Appendix A

Appendix A Conversion Formulas and Gas Tables

Conversion of Flow Rate to Other T and P Conditions
The flow rate of your transducer is referenced to certain ÒstandardÓ conditions of temperature and pressure. Unless otherwise specified in your order, these standard conditions are 21°C (70°F) and 760 mm of mercury (1 atmosphere). If you wish to convert to other ÒstandardÓ conditions or to find the ÒactualÓ conditions in the pipe where your in­strument is installed, use the following relationship:
P
Q2 = Q
P
T
1
2
2
T
1
1
(1)
( )1 = The standard conditions under which your instrument
was calibrated,
= The new standard conditions or the actual temperature
( )
2
and pressure conditions in the pipe,
= The gas mass flow rate referenced to the calibrated standard
Q
1
conditions (sccm or slm),
= The gas mass flow rate referenced to the new standard or
Q
2
actual conditions (sccm or slmÑÒSÓ means Òstandard,Ó accm or almÑÒAÓ means ÒactualÓ),
P = Absolute pressure (kg/cm
or psia), and
2
T = Absolute temperature (°K or °R) (°K = °C + 273, °R = °F + 460).
Example 1: Changing ÒStandardÓ Conditions
If your transducer has a flow rate reading of 10.00 slm and was calibrated at standard conditions of 70°F (21°C) and 1 atmosphere (14.7 psia), and if you wish to convert this reading to standard conditions of 32°F (0°C) and 1 atmosphere, then you would use Equation (1) as follows:
14.7 460 + 32
= (10.0) = 9.28 slm
Q
2
14.7 460 + 70
The flow rate referenced to 0°C will be approximately 7% lower than when referenced to standard conditions of 21°C.
Example 2: Finding the ÒActualÓ Flow Rate
If the flow rate and calibrated standard conditions are as given in Example 1 and you wish to find the actual flow rate at 100°F and 30 psig, then you would use Equation (1) as follows:
14.7 460 + 100
= (10.00) = 3.47 slm
Q
2
14.7 + 30 460 + 70
IM-82-C A-1
Page 35
Appendix A Series 820 Instruction Manual
Calculating For a Single Gas
The following tables provide K-factors and thermodynamic proper­ties of gases commonly used with mass flow meters and controllers. The purpose of these tables is two-fold:
1. Calibrating an ÒactualÓ gas with a reference gas. This is particu­larly useful if the actual gas is not a common gas or if it is toxic, flammable, corrosive, etc.
2. Interpreting the reading of a flow meter or flow controller which has been calibrated with a gas other than the actual gas.
In applying the tables, the following fundamental relationship is used:
Q1/Q2 = K1/K
2
(1)
Where:
Q = The volumetric flow rate of the gas referenced to standard
conditions of 0°C and 760 mm Hg (sccm or slm),
K = The K-factor defined in equation (6),
( ) 1 = Refers to the ÒactualÓ gas, and
( ) 2 = Refers to the ÒreferenceÓ gas.
The K-factor is derived from the first law of thermodynamics ap­plied to the sensor tube, as described in Chapter 1:
¥
mC DT
H =
p
N
(2)
A-2 IM-82-C
Page 36
Series 820 Instruction Manual Appendix A
Where:
H = The constant amount of heat applied to the sensor tube,
¥
m = The mass flow rate of the gas (gm/min)
Cr = The coefficient of specific heat of the gas (Cal/gm);
Cr is given in the Table (at 0°C),
DT = The temperature difference between the downstream and
upstream coils, and
N = A correction factor for the molecular structure of the gas
given by the following table:
Number of Atoms in the Gas Molecule N
Monatomic 1.040
Diatomic 1.000
Triatomic 0.941
Polyatomic 0.880
The mass flow rate, m, can also be written as:
¥
m = Q
¥
(3)
r
Where:
r = The gas mass density at standard conditions (g/l); r is given
in the tables (at 0°C, 760 mm Hg).
Furthermore, the temperature difference, DT, is proportional to the output voltage, E, of the mass flow meter, or
DT = aE (4)
where:
a = A constant.
If we combine equations (3) and (4), insert them into equation (2), and solve for Q, we get
Q = (bN/rC
) (5)
p
where:
b = H/aE = a constant if the output voltage is constant.
IM-82-C A-3
Page 37
Appendix A Series 820 Instruction Manual
For our purposes, we want the ratio of the flow rate, Q1, for an ac­tual gas to the flow rate of a reference gas, Q2, which will produce the same output voltage in a particular mass flow meter or controller. We get this by combining equations (1) and (5):
Q1/Q2 = K1/K2 = (N1/ r1Cp1)/(N2/r2CP2) (6)
Please note that the constant b cancels out. Equation (6) is the funda­mental relationship used in the accompanying tables. For convenience, the tables give ÒrelativeÓ K-factors, which are the ratios K
1/K2
, instead of the K-factors themselves. In the tables, the relative K-factor is K
/KN2 where the reference gas is the commonly used gas, nitrogen
actual
(N2). The remaining columns give Cp and r, enabling you to calculate K1/K2 directly using Equation (6). In some instances, K1/K2 from the tables may be different from that which you calculate directly. The value from the tables is preferred because in many cases it was obtained by experiment. Sierra calibrates every transducer with primary standards using the actual gas or a molecular equivalent reference gas. The cali­bration certificate accompanying the transducer cites the reference gas used.
Example 1:
A transducer is calibrated for nitrogen (N
), and the flow rate is
2
1000 sccm for a 5.000 VDC output signal. The flow rate for carbon dioxide at a 5.000 VDC output is:
Q
CO2/QN2
Q
CO2
= K
CO2/K N2
= (0.74/1.000)1000 = 740 sccm
, or
Example 2:
A transducer is calibrated for hydrogen (H
), and the flow rate is
2
100 sccm for a 5.000 VDC output signal. The flow rate for nitrous oxide (N2O) is found as follows:
Q
N2O/QH2
Q
N2O
= K
N2O/K H2
= (0.71/1.01) 100 = 70.3 sccm
Note that the K-factors relative to nitrogen must be used in each case.
, or
Example 3:
We want a transducer to be calibrated for use with dichlorosilane (SiH2Cl2) at a 100 sccm full scale flow. We wish to use the pre­ferred reference gas Freon-14 (CF4). What flow of CF4 must we generate to do the calibration?
Q
SiH2CL2 /QCF4
100/Q
CF4
= 100/0.869 = 115 sccm
Q
CF4
= K
= 0.869
SiH2CL2 /K CF4
A-4 IM-82-C
Page 38
Series 820 Instruction Manual Appendix A
Calculating Dual Gas Mixtures
Equation (6) is used for gas mixtures, but we must calculate N/rC for the mixture. The equivalent values of r, Cp, and N for a dual gas mixture are given as follows:
The equivalent gas density is:
¥
r
¥
= ( / ) + ( / )
m
1T
m
r
¥
¥
m
m
2
1
Tr2
Where:
¥
m = m
( )
¥
¥
m
T
= Refers to gas #1, and
1
+ = Total mass flow rate (gm/min),
1
2
( )2 = Refers to gas #2
The equivalent specific heat is:
= F1Cp1 + F2C
C
p
p2
Where:
p
¥
F = ( )/( ) and
F = ( )/( )
m
1
¥
m
2
2
¥
r
m
1r1
T
¥
m
r
T
r
2
The equivalent value of N is:
¥
N = ( / ) N + ( / ) Nm
¥
m
1T1
¥
m
m
2
¥
T2
The equivalency relationships for r, Cp, and N for mixtures of more than two gases have a form similar to the dual-gas relation-
ship given above.
IMPORTANT NOTE ABOUT K-FACTORS: Please note that if you have a transducer calibrated for a gas such as methane and wish to use the K-factors to measure a gas such as air, that the inaccuracy of the measurement can range from ±5 to 10%. The use of K-factors is, at best, only a rough
approximation and
should not be used in applications that require a better than ±5 to 10% accuracy.
It should also be noted that certain gases, in similar Òfamilies,Ó will work exceptionally well with K-factors; however, those instances are only true when similar thermal properties of the gas are present.
IM-82-C A-5
Page 39
Appendix A Series 820 Instruction Manual
Gas Tables and K-factors
Actual Gas
Symbol
Acetylene C2H
Chemical
2
K-factor
Relative N2Cp(Cal/g)
.58 .4036 1.162
Density
(g/l) @ 0°C
Air 1.00 .240 1.293 Allene (Propadiene) C
3H4
Ammonia NH
3
.43 .352 1.787
.73 .492 .760 NEO Argon Ar 1.45 .1244 1.782 Arsine AsH
Boron Trichloride BCl Boron Trifluoride BF Bromine Br
Boron Tribromide Br Bromine Pentafluoride BrF Bromine Trifluoride BrF
Bromotrifloromethane
CBrF
3
3
3
2
3
5
3
3
.67 .1167 3.478
.41 .1279 5.227 KR
.51 .1778 3.025
.81 .0539 7.130
.38 .0647 11.18
.26 .1369 7.803
.38 .1161 6.108
.37 .1113 6.644 (Freon-13 B1) 1,3-Butadiene C4H
Butane C
4H10
1-Butane C4H 2-Butane C
2-Butane
4H8
C4H8 TRANS .291 .374 2.503
Carbon Dioxide CO Carbon Disulfide CS
6
8
CIS .324 .336 2.503 NEO
2
2
.32 .3514 2.413
.26 .4007 2.593 NEO
.30 .3648 2.503 NEO
.74 .2016 1.964
.60 .1428 3.397 Carbon Monoxide CO 1.00 .2488 1.250
Carbon Tetrachloride CCl Carbon Tetrafluoride
CF
4
4
.31 .1655 6.860
.42 .1654 3.926 (Freon-14)
Carbonyl Fluoride COF
2
.54 .1710 2.945 Carbonyl Sulfide COS .66 .1651 2.680 Chlorine CL
Chlorine Trifluoride CIF Chlorodifluoromethane
CHClF
2
3
2
.86 .114 3.163
.40 .1650 4.125
.46 .1544 3.858 (Freon-22)
Chloroform CHCI Chloropentafluoroethane
C2CIF
3
5
.39 .1309 5.326
.24 .164 6.892 (Freon-115)
Chlorotrifluromethane
CCIF
3
.38 .153 4.660 (Freon-13) Cyanogen C2N
2
.61 .2613 2.322 Cyanogen Chloride CICN .61 .1739 2.742
Cychlopropane C3H Deuterium D
Diborane B
2
2H6
Dibromodifluoromethane CBr2F
5
2
.46 .3177 1.877
1.00 .1722 1.799 .44 .508 1.235
.19 .15 9.362
Dibromethane .47 .075 7.76 Dichlorodifluoromethane
CCI
2F2
.35 .1432 5.395
(Freon-12) Dichlorofluoromethane
CHCl2F .42 .140 4.952
(Freon-21)
Elastomer O-ring*
* If no O-ring material is specified then O-ring to be used is Viton
A-6 IM-82-C
Page 40
Series 820 Instruction Manual Appendix A
Actual Gas
Symbol
Dichloromethylsilane (CH Dichlorosilane SiH
Chemical
Dichlorotetrafluoroethane
C
SiCl
3) 2
2Cl2
2Cl2F4
2
K-factor
Relative N2Cp(Cal/g)
.25 .1882 5.758 .40 .150 4.506 .22 .1604 7.626
Density
(g/l) @ 0°C
Elastomer
O-ring*
(Freon-114) 1,1-Difluoroethylene
C
2H2F2
.43 .224 2.857
(Freon-1132A) Dimethylamine (CH3) 2NH .37 .366 2.011
Dimethyl Ether (CH 2,2-Dimethylpropane C3H Ethane C
Ethanol C EthylAcetylene C4H Ethyl Chloride C
Ethylene C
O .39 .3414 2.055
3) 2
12
2H6
O .39 .3395 2.055
2H6
6
CI .39 .244 2.879
2H5
2H4
.22 .3914 3.219 .50 .4097 1.342
.32 .3513 2.413
.60 .1365 1.251
Ethylene Oxide C2H4O .52 .268 1.965 Fluorine F
Fluoroform (Freon-23) CHF
2
3
.980 .1873 1.695
.50 .176 3.127
Freon-11 CCI3F .33 .1357 6.129 Freon-12 CCI
2F2
Freon-13 CCIF Freon-13 B1 CFrF Freon-14 CF
Freon-21 CHCI
4
2
Freon-22 CHCIF Freon-113
Freon-114 C
CCI2FCCIF
2Cl2F4
Freon-115 C2ClF Freon-C318 C
Germane GeH
4F6
4
Germanium Tetrachloride GeCL
3
3
F .42 .140 4.952
2
2
5
4
.35 .1432 5.395 .38 .153 4.660
.37 .1113 6.644 .42 .1654 3.926
.46 .1544 3.858 .20 .161 8.360
.22 .160 7.626 .24 .164 6.892 .17 .185 8.397
.57 .1404 3.418 .27 .1071 9.565
Helium He 1.454 1.241 .1786 Hexafluoroethane
C
2F6
.24 .1834 6.157
(Freon-116) Hexane C6H
Hydrogen H
14
2
.18 .3968 3.845
1.01 3.419 .0899
Hydrogen Bromide HBr 1.000 .0861 3.610 Hydrogen Chloride HCl 1.000 .1912 1.627 KR
Hydrogen Cyanide HC N 1.070 .3171 1.206 Hydrogen Fluoride HF 1.000 .3479 .893 KR Hydrogen Iodide HI 1.000 .0545 5.707
Hydrogen Selenide H
Se .79 .1025 3.613
2
Hydrogen Sulfide H2S .80 .2397 1.520 Iodine Pentafluoride IF
Isobutane CH(CH Isobutylene C4H
5
3)3
8
.25 .1108 9.90 .27 .3872 3.593
.29 .3701 2.503
Krypton Kr 1.453 .0593 3.739 Methane CH
4
.72 .5328 .715
Methanol CH3OH .58 .3274 1.429 Methyl Acetylene C
Methyl Bromide CH
3H4
Br .58 .1106 4.236
2
.43 .3547 1.787
Methyl Chloride CH3Cl .1926 2.253 Methyl Fluoride CH
F .68 .3221 1.518
3
* If no O-ring material is specified then O-ring to be used is Viton
IM-82-C A-7
Page 41
Appendix A Series 820 Instruction Manual
Actual Gas
Chemical
Symbol
K-factor
Relative N2Cp(Cal/g)
Density
(g/l) @ 0°C
Elastomer O-ring*
Methyl Mercaptan CH3SH .52 .2459 2.146 Methyl Trichlorosilane (CH Molybdenum Hexafluoride MoF
Monoethylamine C Monomethylamine CH3NH
) SiCl
3
6
2H5NH2
3
.25 .164 6.669 .21 .1373 9.366
.35 .387 2.011
2
.51 .4343 1.386
Neon NE 1.46 .245 .900 Nitric Oxide NO .990 .2328 1.339
Nitrogen N Nitrogen Dioxide NO
Nitrogen Trifluoride NF
2
2
3
1.000 .2485 1.25 .74 .1933 2.052
.48 .1797 3.168
Nitrosyl Chloride NOCl .61 .1632 2.920 Nitrous Oxide N
Octafluorocyclobutane
O .71 .2088 1.964
2
C
4F6
.17 .185 8.397
(Freon-C318) Oxygen Difluoride OF
Oxygen O Ozone O Pentaborane B
Pentane C
5H9
5HI2
2
2
3
.63 .1917 2.406
1.000 .2193 1.427
.446 .3 2.144
.26 .38 2.816 .21 .398 3.219
Perchloryl Fluoride CIO3F .39 .1514 4.571 Perfluoropropane C
3F8
Phosgene COCl
2
.174 .197 8.388
.44 .1394 4.418
PhosphinePH3 .76 .237 1.517
Phosphorous Oxychloride POCl Phosphorous Pentafluoride PH
Phosphorous Trichloride PCl Propane C
Propylene C
3H8
3H6
Silane SiH Silicon Tetrachloride SiCl
Silicon Tetrafluoride SiF Sulfur Dioxide So Sulfur Hexafluoride SF
Sulfuryl Fluoride SO
2F2
3
5
5
4
4
4
2
6
.36 .1324 6.843 .30 .1610 5.620
.30 .1250 6.127 .36 .3885 1.967
.41 .3541 1.877 .60 .3189 1.433 .28 .1270 7.580
.35 .1691 4.643 .69 .1488 2.858 .26 .1592 6.516
.39 .1543 4.562
Teos .090 KR Tetrafluorahydrazine N
Trichlorofluormethane
CCl
2F4
F .33 .1357 6.129
3
.32 .182 4.64
(Freon-11) Trichlorisilane SiHCl
1,1,2-Trichloro-1,2,2
CCl2FCClF
3
2
.33 .1380 6.043 .20 .161 8.360
Trifluorethane (Freon-113) Trisobutyl Aluminum (C
Titanium Tetrachloride TiCl Trichloro Ethylene C2HCl Trimethylamine (CH
Tungsten Hexasfuoride WF Uranium Hexafluoride UF Vinyl Bromide CH
Vinyl Chloride CH
)Al .061 .508 8.848
4H9
4
3
N .28 .3710 2.639
3)3
6
6
CHBr .46 .1241 4.772
2
CHCl .48 .12054 2.788
2
.27 .120 8.465 .32 .163 5.95
.25 .0810 13.28 KR .20 .0888 15.70
Xenon Xe 1.44 .0378 5.858
* If no O-ring material is specified then O-ring to be used is Viton
A-8 IM-82-C
Page 42
Series 820 Instruction Manual Appendix B Specifications

Appendix B Product Specifications

Operating Specifications
Gases Most gases; check compatibility with wetted materials; specify when ordering Mass Flow Rates Models 822/824: 0 to 10 sccm to 0 to 50 slpm;
Gas Pressure Models 822/824:150 psig ( 10 barg) maximum, 20 psig (1.4 barg) optimum
Gas & Ambient Temperature
Leak Integrity Models 822/824, 826/827: 1 X 10-4 atm cc/sec of helium maximum
Pressure Drop Models 822/824:
Models 826/827: 0 to 75 slpm to 0 to 175 slpm; Models 822-S/824-S: 0 to 10 sccm to 0 to 500 slpm; flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in other units are available (e.g. scfh or nm3/h)
Models 826/827: 150 psig ( 10 barg) maximum, 20 psig (1.4 barg) optimum Models 822-S/824-S: 1000 psig (68.9 barg) maximum for low flow bodies only; 500 psig (34 barg) maximum; 20 psig (1.4 barg) optimum
32° to 122°F (0 to 50°C); higher available on special order
Models 822-S/824-S: 5 X 10-9 atm cc/sec of helium maximum
Flow Rate cm of Water mbar in H2O
100 sccm 0.06 0.06 0.024
1 slpm 0.6 0.59 0.236 10 slpm 6.0 5.88 2.36 20 slpm 24.0 23.5 9.45 30 slpm 54.0 53 21.3 40 slpm 96.0 94.7 37.8 50 slpm 130.0 127.4 51.2
Models 826/827: Two inches of mercury maximum at 175 slpm
822/824-S (low).........0.08 psi (0.006 bar or 6 cm of water) differential max;
822/824-S (med).......0.08 psi (0.006 bar or 6 cm of water) differential max;
822/824-S (high)........0.08 psi (6 mbar or 6 cm of water) differential max;
Power Requirements 12 to 18 VDC nominal, 100 mA maximum; 24 VDC optional Output Signal Linear 0-5 VDC, 1000 Ohms minimum load resistance
Linear 4-20 mA, 30-500 Ohms maximum loop resistance
Display 3.5 digit LCD (0.6 in H); remote mounting option available
15 slpm: 1.5 psi (0.10 bar or 105 cm of water) differential max
100 slpm: 1.5 psi (0.10 bar or 105 cm of water) differential max
300, 400 and 500 slpm: 2 psi (0.14 bar or 140 cm of water) differential maximum
IM-82-C B-1
Page 43
Appendix B Specifications Series 820 Instruction Manual
Performance Specifications
Accuracy ±1.5% of full scale including linearity over 15 to 25°C and 5 to 60 psia (0.3 to 4 bara) Repeatability ±0.5% of full scale Temperature Coefficient 0.08% of full scale per °F (0.15% of full scale per °C), or better Pressure Coefficient 0.01% of full scale per psi (0.15% of full scale per bar), or better Response Time 800 ms time constant; six seconds (typical) to within ±2% of final value over 25 to
100% of full scale
Physical Specifications
Wetted Materials 822/824: 10% glass-filled Nylon® 6/6, 316 stainless steel, nickel plating, Viton
o-rings standard, Neoprene® and 4079 Kal-Rez® (or equivalent) o-rings optional 826/827: Anodized aluminum, 316 stainless steel, nickel plating, Viton® o-rings
standard, Neoprene® and 4079 Kal-Rez® (or equivalent) o-rings optional 822-S/824-S: 316 stainless steel, nickel plating, Viton® o-rings standard, Neoprene
and 4079 Kal-Rez® (or equivalent) o-rings optional
®
®
B-2 IM-82-C
Page 44
Series 820 Instruction Manual Appendix B Specificati
ons
IM-82-C B-3
Page 45
Appendix B Specifications Series 820 Instruction Manual
B-4 IM-82-C
Loading...