Siemens KPY68AK, KPY67AK, KPY66AK, KPY64AK, KPY63AK Datasheet

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Silicon Piezoresistive Absolute Pressure Sensor
Preliminary Data
Features
• Fast response
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
KPY 62-AK
KPY 69-AK
Similar to TO-39-2
Type and
Symbol Pressure Range Unit Ordering Code
Marking
KPY 62 AK
P
P
0
0 0.6 bar Q62705-K275
N
KPY 63 AK 0 1.6 Q62705-K276 KPY 64 AK 0 4 Q62705-K277 KPY 65 AK
0
10 Q62705-K278 KPY 66 AK 0 25 Q62705-K279 KPY 67 AK 0 60 Q62705-K280 KPY 68 AK 0 160 Q62705-K281 KPY 69 AK 0 400 Q62705-K282
Pin Configuration
1 Temperature sensor
(typ.
R
= 2 k)
25
2 Not connected 3+ 4
V
; Temperature sensor
IN
V
OUT
5 Capillary tube 6 Shielding, to be connected
to +
V
IN
7 V 8+V
Semiconductor Group 1 1998-05-08
IN
OUT
KPY 62-AK KPY 69-AK
Absolute Maximum Ratings Parameter Symbol Limit Values Unit
Pressure overload
Operating temperature range Storage temperature range Supply voltage
KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK
P
T T V
MAX
A
stg
IN
4 8 12 20 50 70 200 500
40 …+ 125 ˚C
50 …+ 125 ˚C
12 V
bar
Electrical Characteristics
at
T
= 25 ˚C and VIN = 5 V, unless otherwise specified.
A
Parameter Symbol Limit Values Unit
min. typ. max.
Bridge resistance Sensitivity
Output voltage
KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK
KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK
R s
V
B
fin
4 8k
mV/
23.3
11.3
6.5
3.6
1.1
0.63
0.38
0.16
43.0
20.0
11.0
5.2
2.1
1.0
0.53
0.22
73.3
30.0
15.5
8.0
3.0
1.4
0.66
0.27
Vbar
mV 70 90 130 180 150 190 310 330
130 160 220 260 260 300 420 440
220 240 310 400 370 410 530 550
Semiconductor Group 2 1998-05-08
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