Siemens KPY56R, KPY55R, KPY53R, KPY52R, KPY51R Datasheet

Silicon Piezoresistive
Relative Pressure Sensor

Features

• Low pressure and temperature hysteresis

• Fast response

• High sensitivity and linearity

• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability

• High long term stability

• Built in silicon temperature sensor

• Media compatible stainless housing

KPY 51-R

KPY 56-R

Stainless Steel Package

Type and

Symbol Pressure Range Unit Ordering Code

Marking

KPY 51 R

P

… P

0

0 … 0.25 bar Q62705-K174

N

KPY 52 R 0 … 0.6 Q62705-K171
KPY 53 R 0 … 1.6 Q62705-K176
KPY 54 R 0 … 4 Q62705-K178
KPY 55 R 0 … 10 Q62705-K180
KPY 56 R 0 … 25 Q62705-K182

Pin Configuration

1 Capillary tube
2+
3 − V

V

IN

OUT

4 Temperature sensor

(typ.

R

= 2 kΩ)

25

5 Temperature sensor
6 −
7+V

V

IN

OUT

8 Not connected

Semiconductor Group 1 02.97

Absolute Maximum Ratings
Parameter Symbol Limit Values

Frontside Rearside

KPY 51-R
KPY 56-R

1)

Unit

Pressure overload

KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R

Operating temperature range
Storage temperature range
Supply voltage

1) Frontside coupling applies pressure onto chip face.

Rearside coupling applies pressure through Kovar centre tube.

P

T
T
V

MAX

A

stg

IN

2
6
10
16
30
75

2
6
10
16
30
40

− 40 …+ 125 ˚C

− 50 …+ 130 ˚C

12 V

bar

Electrical Characteristics

T

= 25 ˚C and VIN = 5 V, unless otherwise specified.

at

A

Parameter Symbol Limit Values Unit

min. typ. max.

Bridge resistance

Sensitivity

Output voltage

Offset voltage

P = P

0

KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R

KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R

R
s

V

V

B

4 − 8kΩ

mV/

16.8

11.0

5.6

4.0

1.8

0.88

fin

21
33
45
80
90
110

0

24.0

15.0

8.8

6.0

2.6

1.2

30
45
70
120
130
150

32.0

24.0

12.5

9.0

4.0

2.0

40
72
100
180
200
250

Vbar

mV

mV

− 25 −+ 25

Semiconductor Group 2