Siemens KPY56AK, KPY55AK, KPY54AK, KPY52AK, KPY53AK Datasheet

Silicon Piezoresistive Absolute Pressure Sensor
Features
• Low pressure and temperature hysteresis
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
KPY 52-AK
KPY 56-AK
TO-8-5
Type and
Symbol Pressure Range Unit Ordering Code
Marking
KPY 52 AK
P
P
0
0 0.6 bar Q62705-K205
N
KPY 53 AK 0 1.6 Q62705-K192 KPY 54 AK 0 4 Q62705-K194 KPY 55 AK 0 10 Q62705-K196 KPY 56 AK 0 25 Q62705-K198
Pin Configuration
1 Capillary tube 2+ 3 V
V
IN
OUT
4 Temperature sensor
(typ.
R
= 2 k)
25
5 Temperature sensor 6 7+V
V
IN
OUT
8 Not connected
Semiconductor Group 1 02.97
KPY 52-AK KPY 56-AK
Absolute Maximum Ratings Parameter Symbol Limit Values Unit
Pressure overload
Operating temperature range Storage temperature range Supply voltage
KPY 52 AK KPY 53 AK KPY 54 AK KPY 55 AK KPY 56 AK
P
T T V
MAX
A
stg
IN
6 10 16 30 75
40 …+ 125 ˚C
50 …+ 150 ˚C
12 V
bar
Electrical Characteristics
at
T
= 25 ˚C and VIN = 5 V, unless otherwise specified.
A
Parameter Symbol Limit Values Unit
min. typ. max.
Bridge resistance
Sensitivity
KPY 52 AK KPY 53 AK KPY 54 AK KPY 55 AK KPY 56 AK
R s
B
4 8k
mV/
11.0
5.6
4.0
1.8
0.88
15.0
8.8
6.0
2.6
1.2
24.0
12.5
9.0
4.0
2.0
Vbar
Output voltage
KPY 52 AK KPY 53 AK KPY 54 AK KPY 55 AK KPY 56 AK
Offset voltage
P = P
0
Linearity error (Best fit straight line)
P
= P0… P
0
N
KPY 52 55 AK KPY 56 AK
Pressure hysteresis
P
= P0, P2 = PN, P3 = P0KPY 52 56 AK
1
Semiconductor Group 2
V
V
F
P
fin
0
L
H
33 45 80 90 110
45 70 120 130 150
72 100 180 200 250
25 −+ 25
± 0.15 ± 0.15
± 0.35
−± 0.1
mV
mV
% V
V
%
fin
fin
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