Silicon Piezoresistive
Absolute Pressure Sensor
Features
• Low pressure and temperature hysteresis
• Fast response
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
KPY 52-AK
KPY 56-AK
TO-8-5
Type and
Symbol Pressure Range Unit Ordering Code
Marking
KPY 52 AK
P
… P
0
0 … 0.6 bar Q62705-K205
N
KPY 53 AK 0 … 1.6 Q62705-K192
KPY 54 AK 0 … 4 Q62705-K194
KPY 55 AK 0 … 10 Q62705-K196
KPY 56 AK 0 … 25 Q62705-K198
Pin Configuration
1 Capillary tube
2+
3 − V
V
IN
OUT
4 Temperature sensor
(typ.
R
= 2 kΩ)
25
5 Temperature sensor
6 −
7+V
V
IN
OUT
8 Not connected
Semiconductor Group 1 02.97
KPY 52-AK
KPY 56-AK
Absolute Maximum Ratings
Parameter Symbol Limit Values Unit
Pressure overload
Operating temperature range
Storage temperature range
Supply voltage
KPY 52 AK
KPY 53 AK
KPY 54 AK
KPY 55 AK
KPY 56 AK
P
T
T
V
MAX
A
stg
IN
6
10
16
30
75
− 40 …+ 125 ˚C
− 50 …+ 150 ˚C
12 V
bar
Electrical Characteristics
at
T
= 25 ˚C and VIN = 5 V, unless otherwise specified.
A
Parameter Symbol Limit Values Unit
min. typ. max.
Bridge resistance
Sensitivity
KPY 52 AK
KPY 53 AK
KPY 54 AK
KPY 55 AK
KPY 56 AK
R
s
B
4 − 8kΩ
mV/
11.0
5.6
4.0
1.8
0.88
15.0
8.8
6.0
2.6
1.2
24.0
12.5
9.0
4.0
2.0
Vbar
Output voltage
KPY 52 AK
KPY 53 AK
KPY 54 AK
KPY 55 AK
KPY 56 AK
Offset voltage
P = P
0
Linearity error (Best fit straight line)
P
= P0… P
0
N
KPY 52 … 55 AK
KPY 56 AK
Pressure hysteresis
P
= P0, P2 = PN, P3 = P0KPY 52 … 56 AK
1
Semiconductor Group 2
V
V
F
P
fin
0
L
H
33
45
80
90
110
45
70
120
130
150
72
100
180
200
250
− 25 −+ 25
−
−
± 0.15
± 0.15
± 0.35
−
−± 0.1 −
mV
mV
% V
V
%
fin
fin