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MODEL 760
ISO
VACTRON SERIES
OPERATING INSTRUCTIONS
159 Swanson Road, Boxborough, MA 01719-1304
Tel: 800-257-3872/978-263-1400, Fax 978-264-0292
Email: sales@setra.com, Web: www.setra.com
SS2037 Rev.E 05/06/2013
9001
Certified
1-800-257-3872 TOLL FREE
1-978-264-0292 FAX
sales@setra.com EMAIL
www.setra.com WEB
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Setra oers a complete line of products
for the semiconductor industry.
Model 212FT True Flow-Through
Pressure Transducer
Model 216 and 225 Low Cavity Volume
Dead-Ended Pressure
Transducers
Models 223 and 224 Swept Volume Flow
Through Pressure
Transducers
Model CWS321 Gas Cylinder Weighing
Scale
Models 264 and 267 Low Dierential Pressure
Transducers for Fume
Hoods and Clean Rooms
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11.0 RETURN OF SETRA SYSTEMS PRODUCT-DECLARATION
(Form 760ERN)
EXPECTED RETURN NUMBER ______________________________________________________
You must:
• Know about all of the substances which have been used and produced in the product before you complete this
Declaration.
• Contact your supplier if you have any questions and for an ERN Number.
• Send this form to your supplier with the return of the product.
SECTION 1: Product
A. Model Number _________________________
B. Serial Number _________________________
C. Has the product been used, tested or operated?
Yes - Go to Section 2 No - Go to Section 4
SECTION 2: Substances in Contact with the Product
A. Radioactive* Yes No
B. Biologically Active Yes No
C. Dangerous to Human Health and Safety? Yes No
* Note: Your supplier will not accept delivery of any products that are contaminated with radioactive substances,
unless you:
• Decontaminate the products
• Provide proof of decontamination
YOU MUST CONTACT YOUR SUPPLIER FOR ADVICE BEFORE YOU RETURN SUCH PRODUCTS
If you have answered “no” to all of these questions, go to Section 4.
SECTION 3: List of Substances in Contact with the Product
Substance Name
1.
2.
3.
4.
5.
6.
SECTION 4: Return Information
Reason for return and symptoms of malfunction: _________________________________________
_______________________________________________________________________
If you have a warranty claim:
• Who did you buy the product from?: ________________________________________________
• Give the supplier’s invoice number or your purchase order number: _____________________________
SECTION 5: Declaration
Print your Name: __________________________ Print Your Job Title: ____________________
Print Your Company Name: ______________________________________________________
Print Your Address: ___________________________________________________________
Telephone Number:_________________________ Date of Product Return: __________________
I have made reasonable inquiry and I have supplied accurate information in this Declaration. I have not withheld any
information. I have followed the Return of Setra Systems Product Procedure.
Signed: ________________________________ Date: _____________________________
Chemical
Symbol
Precautions Required (e.g.,
use protective gloves, etc.)
Actions Required After
Spillage or Human Contact
Contents
1.0 Introduction ..............................................................................................1
2.0 Mechanical Installation .........................................................................2
3.0 Electrical Installation ...............................................................................5
4.0 Operation ....................................................................................................8
5.0 Calibration and Adjustment of Zero Output .................................9
5. 1 Checking & Adjustment of Zero Output .................................9
5. 2 Span (Full Scale) Adjustment and Calibration ...................9
6.0 Maintenance & Troubleshooting .................................................... 10
7.0 Specications .........................................................................................11
8.0 Reordering Data ....................................................................................12
9.0 Returning Products for Repair ....................................................... 12
10.0 Warranty & Limitation of Liability ................................................ 13
11.0 FORM 760 ERN RETURN OF SETRA SYSTEMS
PRODUCTDECLARATION ............................................................... 15
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at Setra for the repair and return of the unit. Non-warranty repairs will not be made without customer
approval and a purchase order to cover repair charges.
Calibration Services
Setra maintains a complete calibration facility that is traceable to the National Institute of Standards
& Technology (NIST). If you would like to recalibrate or recertify your Setra pressure transducers or
transmitters, please call our Repair Department at 800-257-3872 (978-263-1400) for scheduling.
10.0 Warranty & Limitation of Liability
SETRA warrants its products to be free from defects in materials and workmanship, subject to the following terms and conditions: Without charge, SETRA will repair or replace products found to be defective in
materials or workmanship within the warranty period; provided that:
a) the product has not been subjected to abuse, neglect, accident, incorrect wiring not our own,
improper installation or servicing, or use in violation of instructions furnished by SETRA;
b) the product has not been repaired or altered by anyone except SETRA or its authorized service
agencies;
c) the serial number or date code has not been removed, defaced, or otherwise changed; and
d) examination discloses, in the judgment of SETRA, the defect in materials or workmanship devel-
oped under normal installation, use and service;
e) SETRA is notied in advance of and the product is returned to SETRA transportation prepaid.
Unless otherwise specied in a manual or warranty card, or agreed to in writing and signed by a SETRA
ocer, SETRA pressure and acceleration products shall be warranted for one year from date of sale.
The foregoing warranty is in lieu of all warranties, express, implied or statutory, including but not limited
to, any implied warranty of merchantability for a particular purpose.
SETRA’s liability for breach of warranty is limited to repair or replacement, or if the goods cannot be
repaired or replaced, to a refund of the purchase price. SETRA’s liability for all other breaches is limited to a
refund of the purchase price. In no instance shall SETRA be liable for incidental or consequential damages
arising from a breach of warranty, or from the use or installation of its products.
No representative or person is authorized to give any warranty other than as set out above or to assume
for SETRA any other liability in connection with the sale of its products.
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8.0 Reordering Data
7
6 0 1
Model Range Pressure Type of Fitting Output
7601 = 760 001T 1 Torr A Absolute Standard 7B 0-5 VDC D2 15 Pin D-Sub
010T 10 Torr 4T 0.5” OD Tube 7C 0-10 VDCT26 Position Screw
020T 20 Torr N1 ISO NW16
100T 100 Torr N2 ISO NW25
10CT 1000 Torr N4 ISO NW40
001M 1 mbar/hPa D8 8 VCR®, Female Swivel
010M 10 mbar/hPa Optional
100M 100 mbar/hPa 17 Mini Conat®
10CM 1000 mbar/hPa 18 2.75” Conat®
R02P 0.02 psia 4S 0.50 Swagelok®
002P 2.0 psia T6 Tri-closer 1.50”
020P 20 psia
0R1K 0.1 kPa
001K 1.0 kPa
010K 10 kPa
100K 100 kPa
Electrical
Termination Accuracy
±0.25% of
A
Terminal
Reading
±0.15% of
B
Reading
Example: To order a 10 Torr FS unit with ISO NW16 tting, 0-10 VDC output,
D sub 15 electrical connector and an accuracy of ±0.25% Reading, the order
code would be: 7601010TAN17CD2A.
9.0 Returning the Model 760 for Repair
Setra Systems cannot accept a Model 760 for repair unless the Form 760ERN is completed.
Contact Setra Systems for an ERN Number or the Form 760ERN. Form 760ERN is included in
this guide on page 15.
Please contact a Setra application engineer (800-257-3872, 978-263-1400) before returning unit for
repair to review information relative to your application. Many times only minor eld adjustments
may be necessary. When returning a product to Setra, the material should be carefully packaged and
shipped prepaid to:
Setra Systems, Inc.
159 Swanson Road
Boxborough, MA 01719-1304
Attn: Repair Department
To assure prompt handling, please supply the following information and include it inside the package
of returned material:
1. Name and phone number of person to contact.
2. Shipping and billing instructions.
3. Full description of the malfunction.
4. Identify any hazardous material used with product.
Notes: Please remove any pressure ttings and plumbing that you have installed and enclose any
required mating electrical connectors and wiring diagrams. Allow approximately 3 weeks after receipt
1.0 Introduction
Setra’s Vactron Model 760 capacitance manometer is a temperature com-
pensated, absolute pressure transducer designed for accurate and repeatable vacuum measurements. Various full scale ranges are available from
10 Torr up to 1000 Torr. The units of measurement may be specied in Torr
(mmHg), mBar (hPa), kPa or psia.
The Model 760 operates from a ±15 VDC power supply and provides a 0-10
VDC or 0-5 VDC signal output that is linear with pressure and independent
of gas composition. Electrical connections can be either the industry standard 15 pin D-sub or 6 position terminal strip connector. The Model 760 is
pin for pin compatible with other competitive capacitance manometers.
Superior EMI/RFI performance is achieved by the use of a metal case in
conjunction with surge and ESD suppression components and RFI ltering
on the inputs and outputs. The Model 760 has an integrated sliding cover
providing easy access to multi-turn potentiometers for ne zero and span
adjustments. Inconel is used for all wetted materials for compatibility with
corrosive gases. A wide range of pressure/vacuum ttings are available.
The high accuracy pressure sensing element used in the Model 760 is the
Vactron™ sensor, which has been developed from Setra’s patented variable
capacitance sensor. A centrally located feedthrough assembly supports a
circular electrode in close proximity to the back surface of the diaphragm.
Together, the electrode and diaphragm form a variable capacitor within a
small reference vacuum chamber. As the pressure increases, the diaphragm
deects and the gap between the electrode and diaphragm reduces, causing an increase in the capacitance. This change in capacitance is detected
and converted to a highly accurate linear DC electronic signal by Setra’s
unique custom integrated circuit utilizing a patented charge balance principle.
Excellent zero stability and barometric insensitivity is achieved through
the patented sensor design. The Model 760 sensor contains no fragile or
complex parts as found in ceramic based capacitance manometers. The all
welded construction eliminates stability issues inherent in other designs
due to frictional contact between dissimilar materials.
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2.0 Mechanical Installation
7.0 Specications
Remove all packaging material and the protective ange cover and visu-
ally check the Model 760. If the Model 760 appears damaged, notify Setra
Systems or your supplier immediately. Retain packaging materials for
inspection. Do not use if damaged. If the Model 760 is not going to be used
immediately, then replace the protective ange cover and store in an area
where the temperature range is controlled between -50 to +125°C.
The Model 760 can be mounted in any orientation on the vacuum system.
To avoid the buildup of debris or condensable material in the measurement cavity of the Model 760 (which may cause measurement errors), we
recommend that you install the Model 760 vertically with the tube facing
down. Outline drawings showing the external dimensions are shown in
Figures 1 - 4.
To connect the Model 760 to your system use the appropriate hardware for
the type of tting:
• UseaCajon®UltraTorrtypeofcompressioncouplingtoconnecttothe
0.5” OD tube.
• UseanO-ring/centeringringandclamptoconnecttotheNW16,25and
40 ange options.
Note: a stepped O-ring carrier may be used to connect the NW16 ange to an NW10 ange
on the system.
• UseaMale8VCR™stylefacesealttingandsealingwashertoconnect
to the Female Swivel 8 VCR™ style face seal tting.
• UseaMale0.5”Swagelock™tting/uniontoconnecttothe0.5”
Swagelock™ nut tting.
• UseanO-ringandclamptoconnecttothe1.5”Triclover™stylesanitary
ange.
Performance Data:
Accuracy (RSS)1 : < ± 0.25% of Reading
Optional < ± 0.15% of Reading
Resolution: 0.01% FS
Thermal eects
Compensated Range: 0 to +50°C
Zero Shift: < ± 0.005% FS / °C
Span Shift: < ± 0.027% FS / °C
Proof Pressure: 45 psia
Operating Temperature: 0 to +50°C
Storage Temperature: -50 to +125°C
Electrical Data:
Connector: 15 pin D sub or 6 position terminal strip
Excitation: ±15 V DC, regulated ±5%
Output: 0 - 10 V DC or 0 - 5 V DC
Output Maximum Load: <10 K load
Power Consumption: < 0.5 Watts (<15 mA)
Time Constant: < 20 ms
EMC Performance: Complies with EMC Directive 89/336/EEC
Physical Description:
Case: Aluminum Alloy
Vacuum Fittings: 0.5” OD Tube; other ttings available; see reor-
der data page
Wetted Materials2: Inconel®
Measurement cavity volume3: <6 cm
3
Weight: 260 g
Note: Tighten threaded ttings in accordance with the manufacturer’s
specications.
2
Notes:
1. Root sum of the squares (RSS) of linearity, hysteresis and non-repeatability. Accuracy is
expressed as % of reading. However, near Zero, the accuracy is limited by the resolution of the
instrument. So, the accuracy is more correctly stated as the greater of ±0.25% reading or ±0.01%
FS. (For the optional accuracy, this becomes the greater of ±0.15% reading or ±0.01% FS).
2. Wetted material is for 0.5” tube option only. Other ange options will add stainless steel.
3. Maximum cavity volume including the 0.5” OD tube volume of 0.26 in3 (4.28 cm3).
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6.0 Maintenance & Troubleshooting
(SPAN & ZERO)
Figure 1: Outline drawing of 15 pin D connector, 0.5” OD tube.
There are no general maintenance requirements for the Model 760 other than
periodic zero adjustment. If the unit fails to operate when received or if the
unit appears damaged, notify Setra Systems or your supplier immediately. Retain packaging materials for inspection. Do not use if damaged. If the Model
760 is not going to be used immediately then replace the protective ange
cover and store in suitable conditions described in Section 2.
If no obvious damage has occurred a few simple checks can be made to verify
proper installation. Table 2 shows the solution to common problems with the
installation. If none of these problems / solutions are applicable, then please
contact a Setra Systems applications engineer for further assistance.
Table 2: Common Installation Problems & Solutions
Problem Cause Solution
No signal output Incorrect or no supply voltage Ensure power supply is used as
Readout display short circuit or
incorrect impedance
Signal output reads
over-range
Signal output reads
under-range
Unstable signal Chassis ground not connected Ensure common chassis ground be-
Incorrect wiring Ensure wiring conforms to diagrams in
Potential dierence between
chassis ground of unit, power
supply & readout/display
Incorrect zero adjustment Adjust zero per section 5.1
Readout display incorrect
impedance
Incorrect wiring polarity to
readout display
Unstable or unregulated Use a regulated power supply as
Electrical noise on chassis
ground
specied in Section 2
Ensure impedance of readout unit is
>10 k
Section 4.2
Ensure common chassis ground
between unit, power supply & display
Ensure impedance of readout unit is
>10 k
Ensure wiring conforms to diagrams in
Section 4.2
tween unit, power supply and display
specied in Section 2
Ensure common chassis ground between power supply & display
2.36
60
2.36
60
2.36
60
S Z
SLIDING INSERT EXTENDS
APPROX. .40" TO REVEAL
USER ADJ. ACCESS HOLES
0.2
5
15 PIN
SUB-D CONNECTOR
2.3
58
in.
mm.
1.25
32
Figure 2: Outline drawing of screw terminal connector
(6 position), 0.5” OD tube.
0.18
2.36
60
S Z
SLIDING INSERT EXTENDS
APPROX. 0.4" TO REVEAL
USER ADJ. ACCESS HOLES
(SPAN & ZERO)
PCB HEADER,
6-WAY
4.5
0.73
18.5
FREE PLUG, 6-WAY
SCREW TERMINAL
in.
mm.
2.3
58
1.25
32
0.5
12.7
0.5
12.7
10
3
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Figure 3: Outline drawing showing optional ISO NW vacuum tting.
NW16
1.18
NW25
1.58
NW40
1.45
Figure 4: Outline drawing showing optional VCR™ style face seal
vacuum tting.
1/2" FEMALE FACE GLAND
1 1/16"
ACROSS FLATS
2.16
5.0 Calibration & Adjustment
5. 1 Checking & Adjustment of Zero Output
After installation on a system, the Model 760 may require initial zero adjustment. Figure 9 shows the location of the zero adjustment potentiometer. Slide
open the black plastic insert to reveal two access holes. The access hole next
to the raised “Z” on the plastic cover identies the Zero potentiometer.
Use an accurate digital voltmeter to view the signal output of the Model 760.
Adjust the signal output of the model 760 to be 0.001 to –0.001 mV. Make this
adjustment at a pressure at least 1/2 decade below the Model 760’s resolution;
e.g., for a 10 Torr FS unit the zero pressure should be less than 5E-4 Torr . For a
1000 Torr unit, a pressure less than 0.050 Torr is sucient.
The Zero potentiometer is a multi–turn potentiometer providing very ne
adjustment of the zero over a +/- 500 mV range.
Figure 9 : Location of Calibration Adjustment Potentiometers
Slide out plastic insert to
end stop to reveal access
holes to the zero and
span potentiometers.
Use small at bladed screwdriver to
adjust the zero (Z).
Clockwise to increase;
Counter-clockwise to decrease signal
SPAN
S Z
ZERO
0.88
2.05
2.43
4
5. 2 Span (Full Scale) Adjustment and Calibration
The Zero adjustment is the only adjustment that should be made in the eld.
Span (Full Scale) adjustments require a calibrated and certied reference standard and should only be attempted by qualied personnel. Return the Model
760 to Setra Systems for periodic calibration, Span (Full Scale)
Adjustment and Calibration adjustments and servicing.
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4.0 OPERATION
For most accurate pressure measurement, allow the Model 760 to warm
up for at least 15 minutes. After installation, periodically check the zero
output reading to verify correct output. Adjust the zero potentiometer if
incorrect (See Section 5 for zero adjustment instructions).
The signal output of the Model 760 is linear with pressure; e.g., for a 10
VDC FS Model 760, 10 VDC equals 100% FS output, 1 VDC equals 10% FS
output.
Table 1 indicates the lowest pressures available for reading and pressure
control for each range of the Model 760. The lowest suggested pressure
available for reading is limited by the resolution and the accuracy of the
Model 760. This is directly related to the electrical noise on the signal
output and can be signicantly eected by incorrect electrical ground
connection, or connection to an electronically noisy power supply or
readout instrument. Improved results may be obtained if the transducer is
operated in an environment with stable temperature and air ow. The lowest recommended pressure used for control applications, such as a closed
loop downstream pressure control system, is based on a signal output of
50 mV.
Table 1: Recommended Lowest Pressures
Available for Reading & Pressure Control
3.0 Electrical Installation
The model 760 operates from a ±15 VDC regulated (±5%) power supply.
The model 760 has either a 0-5 VDC output or 0-10 VDC output.
The pin out for the D-sub, 15 pin connector is shown in Figure 5, page 6.
A schematic diagram of the recommended electrical connections to the
D-sub, 15 pin connector is shown in Figure 6, page 6.
The pin out for the 6-Position Screw Terminal Connector is shown in Figure
7, page 7. A schematic diagram of the recommended electrical connection
to the 6-position Screw Terminal Connection is shown in Figure 8, page 7.
Note 1: The ground of any external power supply and readout system
should be the same as the transducer ground (chassis ground) to minimize
any possible ground loops which may eect the performance and stability
of the transducer.
Note 2: The Model 760 meets CE mark requirements and complies with
EMC Directive 89/336/EEC. To ensure compliance when installed, an overall
metal braided shielded cable (and metal shielded connectors for the D sub
connector option) connected to chassis ground at both ends is required.
Full Scale Range Recommended Lowest
Pressure Reading
10 Torr 0.005 Torr 0.05 Torr
20 Torr 0.010 Torr 0.10 Torr
50 Torr 0.025 Torr 0.25 Torr
100 Torr 0.050 Torr 0.50 Torr
200 Torr 0.100 Torr 1.00 Torr
500 Torr 0.250 Torr 2.50 Torr
1000 Torr 0.500 Torr 5.0 Torr
10 mbar / hPa 0.005 mbar / hPa 0.05 mbar / hPa
100 mbar / hPa 0.05 mbar / hPa 0.5 mbar / hPa
1000 mbar / hPa 0.5 mbar / hPa 5 mbar / hPa
1 psia 0.0005 psia 0.005 psia
2 psia 0.0010 psia 0.010 psia
5 psia 0.0025 psia 0.025 psia
10 psia 0.0050 psia 0.050 psia
20 psia 0.0100 psia 0.100 psia
Recommended Lowest
Pressure for Control
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Figure 5: Pin out of D-sub Connector (Code D2)
PIN 15
PIN 9
Figure 7 : Pin out of Screw Terminal Connector (Code T2):
PIN 1
PIN 8
S Z
PIN 1
15 PIN
SUB-D CONNECTOR
Pin Location Function
2 Signal Output
5 Power Supply Common
6 Power Supply, -15 VDC
7 Power Supply, +15 VDC
12 Signal Output Common
15 Chassis Ground
1,3,4,8,9,10,11,13,14 Not Used
Figure 6: Electrical Connection Schematic – D-sub 15-pin Connector
1 .0 0 0 0
Digital volmeter/
readout
Power Supply
Chassis ground Shielded cable
+ve Signal Output
0V
0V
-15 VDC
-15 VDC
15 position D-Sub
Connector on
Model 760
2
5
6
7
12
15
S Z
PCB HEADER,
6-WAY
Pin Location Function
1 Power Supply Common
2 Signal Output Common
3 Signal Output
4 Power Supply, -15 VDC
5 Power Supply, +15 VDC
6 Chassis Ground
Figure 8 : Electrical Connection Schematic - Screw Terminal Connector
1 .0 0 0 0
Digital volmeter/
readout
Power Supply
Chassis ground Shielded cable
+ve Signal Output
0V
0V
-15 VDC
-15 VDC
6 Position Screw
Terminal Connector
Model 760
3
1
4
5
2
6
6
7
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