renishaw SP80 User Manual

Renishaw plc

New Mills, Wotton-under-Edge,
Gloucestershire, GL12 8JR
United Kingdom

T [phone]
F [phone]
E [e-mail]

www.renishaw.com

SP80 ultra-high accuracy scanning
probe

Class leading performance with
flexible use of styli

The SP80 is a quill-mounted scanning probe that uses

digital scale and readhead technology, plus Renishaw’s

innovative isolated optical metrology principles, to provide

exceptional scanning performance, even with long styli.

The digital scale and readheads with 0.02 µm resolution

enable exceptional scanning performance with up to

1000 mm long and 500 g mass styli, including star

configurations.

The SP80 has a kinematic mount that offers a repeatable

connection to the mating plate mounted on the quill (KM80),

allowing the probe to be removed easily. Unbalanced star

configurations do not require counterbalancing and the

kinematic stylus changing allows for repeatable relocation

of the stylus, optimising stylus arrangements for each

feature, and overcoming the need for requalification.

Using an isolated optical metrology system that measures

the deflection of the whole mechanism, the SP80 provides

accurate position sensing without stacked axis errors.

Additionally, kinematic stylus holders provide crash

protection in the XY plane, and a bump stop prevents

damage to the probe in the Z-axis.

Key benefits

Long stylus carrying capability - with high accuracy

The combination of long stylus reach with maintained high accuracy

performance makes SP80 the first choice scanning probe for many

applications.

Rapid stylus interchange

Interchange of the stylus holders (SH80) can be automated for

optimised productivity by using a rack system and stylus change ports

(SCP80) mounted to Renishaw’s modular rack system.

Low cost of ownership

SP80’s system modularity enables expansion as required. Robust

design promotes long working life but should anything go wrong,

Renishaw’s rapid service / exchange program minimises downtime.

Horizontal mounting option - SP80H

A horizontal mounting option is also available.

Innovations

Isolated optical metrology

SP80 directly measures the deflection of

the whole mechanism, which provides

outstandingly accurate position sensing.

The isolated optical metrology system

can detect sources of variable error

such as thermal and dynamic effects.

By contrast, probes with displacement

sensors mounted to stacked axes suffer

from increased dynamic latency.

Specifications

Probe attributes

Orientation

Size

Quill mounting

Measurement range

Overtravel range

Resolution of digital

scales

Measurement capability

test to ISO10360-2 **

Scanning capability test

to ISO10360-4 **

Return to zero

Spring rate

Stylus carrying

capability

Ultra-high accuracy scanning probe with 3-axis measurement (±PX, ±PY, ±PZ) *

Vertical with SP80, horizontal with SP80H

Body 80 mm (3.15 in) square

Length (including SH80 stylus

holder)

KM80 80 mm (3.15 in) square quill to kinematic SP80

KM6080 60 mm (2.36 in) square quill to 80 mm (3.15 in)

SM80 Shank mount and other custom made adaptor

3-axis measurement: ±25 mm (±0.12 in) (PX, PY, PZ) *

PX* and PY* protected by breakout of the kinematic joint to the SH80 PZ* has a

mechanical ‘bump-stop’

0.02 µm

Better than 1.0 µm with a 50 mm stylus

Better than 2.0 µm with a 1000 mm stylus

Better than 0.5 µm with a 50 mm stylus

Better than 6.0 µm with a 1000 mm stylus

Approximately 1% of working deflection

Approximately 1.8 N/mm (X, Y, Z)

Renishaw M5 stylus range

Maximum 500 g mass (unbalanced)

150 mm (5.91 in)

quill mount (standard)

square kinematic SP80 probe mount (option)

plates available - contact your Renishaw supplier

for details

Maximum 1000 mm projection ***

Mass

Pull off force of SH80

Probe power supply

System power supply

(including IU80)

SP80 probe outputs (PX,

PY, PZ) *

Interfacing

options

Change rack system

* Where P specifies that it is the probe’s axis rather than the machine’s

** Tested on a CMM with specification of 0.48 µm +L/1000

*** SH80 EXT stylus holder must be used with 1000 mm stylus extensions

SP80 probe body only 860 g

SH80 stylus holder 185 g

KM80 quill mount 110 g

<20 N when using SCP80 - otherwise approximately 80 N

+9 V to +18 V at 300 mA maximum dc

+5 V ±0.25 V at 1 A maximum dc

1.5 V ±0.25 V p-p. analogue quadrature signal (nominal 2.5 V zero crossing

reference)

• Using a UCC2-2 SP80 daughtercard for direct integration

• Using a Renishaw PCI counter card (CC6) and the Renishaw interpolator unit

(IU80)

• Other interface cards designed by the OEM and using in conjunction with an IU80

• Using a counter card and interpolator units designed by the OEM

SCP80 units mounted to MRS or MRS2

SCP80V units mounted to MRS or MRS2 for rear facing styli