PI Q-545 User Manual

MP135E

Q

User Manual

Version: 1.0.0

Date: 10.07.2015

This document describes the following
products:



545. The model version of

-545 Stage

Q-545

Q-Motion linear positioning stage,
piezoelectric inertia drive

This document applies to various model
versions of the Q­the Q-545 is coded in the order number by
means of three characters after a period.
Meaning of the places and valid values:

First character after the period:
Travel range
1 = 13 mm
2 = 26 mm

Second character after the perio d :
Sensor equipment
0 = without sensor
4 = with sensor

Third character after the period:
Vacuum suitability
0 = suitable to 10
U = suitable to 10

-6

hPa

-9

hPa

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone: [phone], Fax: [phone], E-mail: [email protected]

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®, PIMag®

© 2015 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.

Original instructions
First printing: 10.07.2015
Document number: MP135E, KSch, version 1.0.0

Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.

Contents

1 About this Document 1

1.1 Objective and Target Audience of this User Manual ............................................ 1

1.2 Symbols and Typographic Conventions ............................................................... 1

1.3 Definition ............................................................................................................... 2

1.4 Figures .................................................................................................................. 3

1.5 Other Applicable Documents ................................................................................ 3

1.6 Downloading Manuals .......................................................................................... 3

2 Safety 5

2.1 Intended Use ........................................................................................................ 5

2.2 General Safety Instructions .................................................................................. 5

2.3 Organizational Measures ...................................................................................... 6

2.4 Measures for Handling Vacuum-Compatible Products ........................................ 6

3 Product Description 7

3.1 Model Overview .................................................................................................... 7

3.2 Product View......................................................................................................... 9

3.3 Product Labeling .................................................................................................11

3.4 Scope of Delivery ...............................................................................................12

3.5 Accessories ........................................................................................................13

3.6 Suitable Electronics ............................................................................................15

3.7 Technical Features .............................................................................................16

3.7.1 Linear Encoder (Sensor) ..................................................................16

3.7.2 Reference Point Switch ....................................................................16

3.7.3 ID Chip ..............................................................................................17

4 Unpacking 19

5 Installation 21

5.1 General Notes on Installation .............................................................................21

5.2 Mounting the Q-545 on a Surface and Connecting It to a Protective Earth

Conductor ...........................................................................................................23

5.3 Setting Up a Multi-Axis System ..........................................................................26

5.3.1 General Information on Setting Up a Multi-Axis System ..................27

5.3.2 Setting Up an XY System .................................................................27

5.3.3 Setting Up a Z System with an Adapter Bracket ..............................30

5.4 Affixing the Load to the Q-545 ............................................................................35

5.5 Connecting the Q-545 to the Electronics ............................................................38

5.5.1 Connecting the Q-545 to the Drive Electronics ................................38

5.5.2 Connecting the Q-545 to the Controller ............................................42

6 Start-Up and Operation 47

6.1 General Notes on Start-Up and Operation .........................................................47

6.2 Starting Up the stage ..........................................................................................50

6.2.1 Starting Up the Q-54 5.x0x with the E-870 Drive Electronics ............51

6.2.2 Starting Up the Q-54 5.x4x with the E-871.1A1 Controller ................53

7 Maintenance 55

7.1 General Notes on Maintenance ..........................................................................55

7.2 Performing a Maintenance Run ..........................................................................55

7.3 Cleaning the Q-545 ............................................................................................55

8 Troubleshooting 57

9 Customer Service 59

10 Technical Data 61

10.1 Specifications......................................................................................................61

10.1.1 Data Table ........................................................................................61

10.1.2 Maximum Ratings .............................................................................63

10.1.3 Ambient Conditions and Classifications ...........................................63

10.2 Operating Time ...................................................................................................64

10.3 Dimensions .........................................................................................................65

10.3.1 Q-545.10x .........................................................................................65

10.3.2 Q-545.14x .........................................................................................66

10.3.3 Q-545.20x .........................................................................................67

10.3.4 Q-545.24x .........................................................................................68

10.3.5 Q-145.1001 and Q-145.10U1 Adapter Brackets ..............................69

10.3.6 Q-145.200 and Q-145.20U Adapter Brackets ..................................70

10.3.7 Vacuum Feedthroughs .....................................................................71

10.4 Pin Assignment ...................................................................................................76

10.4.1 Q-545.xx0 .........................................................................................76

10.4.2 Q-545.xxU .........................................................................................77

10.4.3 C-815.VF Vacuum Feedthrough .......................................................78

10.4.4 C-815.VFUx Vacuum Feedthrough ..................................................80

10.4.5 5604500041 Adapter ........................................................................81

11 Old Equipment Disposal 83

12 EC Declaration of Conformity 85

1 About this Document

Downloading Manuals ................................................................................................... 3

1

About this Document

In this Chapter

Objective and Target Audience of this User Manual ..................................................... 1

Symbols and Typographic Conventions ........................................................................ 1

Definition ........................................................................................................................ 2

Figures ........................................................................................................................... 3

Other Applicable Documents ......................................................................................... 3

1.1 Objective and Target Audience of this User Manual

This manual contains information on the intended use of the Q-545.
It assumes that the reader has a fundamental understanding of basic servo systems

as well as motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our

website.

1.2 Symbols and Typographic Conventions

The following symbols and typographic conventions are used in this user manual:

CAUTION

Dangerous situation

If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.

 Actions to take to avoid the situation.

NOTICE

Dangerous situation

If not avoided, the dangerous situation will result in damage to the equipment.
 Actions to take to avoid the situation.

Q-545 Stage MP135E Version: 1.0.0 1

1 About this Document

INFORMATION

Information for easier handling, tricks, tips, etc.

Symbol/
Label

1.

2.

 Action consisting of one or several steps



p. 5 Cross-reference to page 5

RS-232

1.3 Definition

Meaning

Action consisting of several steps whose
sequential order must be observed

whose sequential order is irrelevant
List item

Labeling of an operating element on the
product (example: socket of the RS-232
interface)

Warning sign affixed to the product that
refers to detailed information in this manual.

Term Explanation

Load capacity Maximum load capacity in the vertical direction when the

stage is mounted horizontally. The contact point of the load is
in the center of the platform.

Linear encoder The linear encoder is an incremental sensor for capturing

changes in position. Signals from the sensor are used for axis
position feedback. After switching on the controller a reference
point definition must be performed before absolute target
positions can be commanded and reached.

2 Version: 1.0.0 MP135E Q-545 Stage

1 About this Document

INFORMATION

1.4 Figures

For better understandability, the colors, proportions and degree of detail in illustrations
can deviate from the actual circumstances. Photographic illustrations may also differ
and must not be seen as guaranteed properties.

1.5 Other Applicable Documents

The devices and software tools which are mentioned in this documentation are
described in their own manuals.

Description Document

E-870.10, E-870.11, E-870 . 21, E-870 . 41 Pie zomotor
/ PiezoMike Drive Electronics, OEM Board,
1 to 4 Channels

E-870.1G, E-870.2G, E-870.4G Piezomotor /
PiezoMike Drive Electronics, Bench-Top,
1 to 4 Channels

E-871.1A1 Q-Motion Controller, 1 Channel,
USB Interface

PIMikroMove SM148E Software Manual

1.6 Downloading Manuals

INFORMATION

If a manual is missing or problems occur with downloading:
 Contact our customer service department (p. 59).

E870T0001 Technical Note

E870T0002 Technical Note

PZ241E User Manual

Q-545 Stage MP135E Version: 1.0.0 3

For some products (e.g. Hexapod systems and electronics that are delivered with a
CD), access to the manuals is password-protected. The password is stored on the
CD. Availability of the manuals:

 Password-protected manuals: FTP download directory
 Freely available manuals: PI website

 Follow the corresponding instructions for downloading.

1 About this Document

Downloading freely accessible manuals

1. Open the website http://www.pi-portal.ws.

2. Click Downloads.

3. Click the corresponding product category.

4. Go to the corresponding product code.
The available manuals are displayed.

5. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.

Downloading password-protected manuals

1. Insert the product CD in the PC drive.

2. Switch to the Manuals directory on the CD.

3. In the Manuals directory, open the Release News (file including releasenews
in the file name).

4. Find the user name and the password in the section "User login for software
download" in the Release News.

5. Open the FTP download directory (ftp://pi-ftp.ws).

− Windows operating systems: Open the FTP download directory in

Windows Explorer.

6. Log in with the user name and the password from the Release News.

7. In the directory of the corresponding product, go to the Manuals sub-directory.

8. Copy the desired manual to the hard disk of your PC or to a data storage
medium.

4 Version: 1.0.0 MP135E Q-545 Stage

2 Safety

Measures for Handling Vacuum-Compatible Products ................................................. 6

2

Safety

In this Chapter

Intended Use ................................................................................................................. 5

General Safety Instructions ........................................................................................... 5

Organizational Measures ............................................................................................... 6

2.1 Intended Use

The Q-545 is a laboratory device as defined by DIN EN 61010-1. It is intended to be
used in interior spaces and in an environment which is free of dirt, oil, and lubricants.

In accordance with its design and realization, the Q-545 is intended for single-axis
positioning, adjusting and shifting of loads at different velocities in interval operation.
The Q-545 uses a PIShift piezomotor as a drive. When at rest, the drive is self-locking,
requires no current, generates no heat, and maintains its position.

The Q-545 can be mounted in any orientation. The specifications of the Q-545 apply
to horizontal mounting (p. 61).

The Q-545 is not intended for applications in areas in which a failure would present
severe risks to human beings or the environment. For further information on the
operating conditions of the Q-545, see "Technical Data" (p. 61).

Some models of the Q-545 are equipped with a linear encoder for direct position
measurement.

The intended use of the Q-545 is only possible when com pletely mounted and
connected. The Q-545 must be operated with suitable electronics (p. 15). The
electronics are not included in the scope of delivery of the Q-545.

2.2 General Safety Instructions

The Q-545 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the Q-545.

 Only use the Q-545 for its intended purpose, and only use it if it is in a good

working order.

Q-545 Stage MP135E Version: 1.0.0 5

2 Safety

 Read the user manual.
 Immediately eliminate any faults and malfunctions that are likely to affect

safety.

The operator is responsible for the correct installation and operation of the Q-545.

2.3 Organizational Measures

User manual

 Always keep this user manual available with the Q-545.

The latest versions of the user manuals are available for download (p. 3) on
our website.

 Add all information given by the manufacturer to the user manual, for example

supplements or Technical Notes.

 If you pass the Q-545 on to other users, also include this user manual as well

as other relevant information provided by the manufacturer.

 Only use the device on the basis of the complete user manual. Missing

information due to an incomplete user manual can result in minor injury and
property damage.

 Only install and operate the Q-545 after you have read and understood this

user manual.

Personnel qualification

The Q-545 may only be installed, started up, operated, maintained and cleaned by
authorized and appropriate l y qualif ied pers on nel .

2.4 Measures for Handling Vacuum-Compatible Products

When handling the vacuum version of the stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and
measurement, powder-free gloves are worn. In addition, the Q-545.xxU models are
wipe cleaned afterwards and then shrink-wrapped twice in vacuum-compatible film.

 Only touch the stage with powder-free gloves.
 If necessary, wipe the stage clean after unpacking.

6 Version: 1.0.0 MP135E Q-545 Stage

3 Product Description

Technical Features ...................................................................................................... 16

3

Product Description

In this Chapter

Model Overview ............................................................................................................. 7

Product View ................................................................................................................. 9

Product Labeling .......................................................................................................... 11

Scope of Delivery ........................................................................................................ 12

Accessories ................................................................................................................. 13

Suitable Electronics ..................................................................................................... 15

3.1 Model Overview

Classification of the Q-545 models

The model version of the Q-545 is coded in the order number by means of three
characters after a period; see also "Detailed model names". Each character codes a
feature of the model version:

Feature Travel range Sensor (linear encoder) Vacuum suitability
Feature value 1 = 13 mm

If the value "x" is used in this manual for a character after the period, the
corresponding description or instruction applies to all feature values of the
corresponding feature.

First character Second character Third character

2 = 26 mm

0 = without sensor
4 = with sensor

0 = suitable to 10-6 hPa
U = suitable to 10-9 hPa

Q-545 Stage MP135E Version: 1.0.0 7

3 Product Description

Detailed model names

Order

Product name

number

Q-545.100 Q-Motion Linear Stage, 13 mm Travel Range, without Position

Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 48 × 15 mm (W × L × H), Piezoelectric Inertia Drive,

-6

Vacuum-Compatible to 10

hPa

Q-545.140 Q-Motion Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm

Resolution, 8 N Push / Pull Force, Dimensions 45 × 48 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,

-6

Vacuum-Compatible to 10

hPa

Q-545.200 Q-Motion Linear Stage, 26 mm Travel Range, without Position

Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 63 × 15 mm (W × L× H), Piezoelectric Inertia Drive,

-6

Vacuum-Compatible to 10

hPa

Q-545.240 Q-Motion Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm

Resolution, 8 N Push / Pull Force, Dimensions 45 × 63 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,

-6

Vacuum-Compatible to 10

hPa

Q-545.10U Q-Motion Linear Stage, 13 mm Travel Range, without Position

Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 48 × 15 mm (W × L × H), Piezoelectric Inertia Drive,

-9

Vacuum-Compatible to 10

hPa

Q-545.14U Q-Motion Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm

Resolution, 8 N Push / Pull Force, Dimensions 45 × 48 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,

-9

Vacuum-Compatible to 10

hPa

Q-545.20U Q-Motion Linear Stage, 26 mm Travel Range, without Position

Sensor for Open-Loop Operation, 8 N Push / Pull Force,
Dimensions 45 × 63 × 15 mm (W × L× H), Piezoelectric Inertia Drive,

-9

Vacuum-Compatible to 10

hPa

Q-545.24U Q-Motion Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm

Resolution, 8 N Push / Pull Force, Dimensions 45 × 63 × 15 mm
(W × L × H), Piezoelectric Inertia Drive,

-9

Vacuum-Compatible to 10

hPa

8 Version: 1.0.0 MP135E Q-545 Stage

3 Product Description

3.2 Product View

Figure 1: Example for models without sensor: Q-545.200 stage

1 Moving platform
2 Cable exit for drive connection
3 Connection for drive; with Q-545.x00 models: Sub-D 15 (m) connector, with

Q-545.x0U models: Sub-D 15 (f) connector
4 Type plate p. 11
5 Base body

Q-545 Stage MP135E Version: 1.0.0 9

3 Product Description

Figure 2: Example for models with sensor: Q-545.240 stage

1 Moving platform
2 Cable exit for drive connection
3 Warning sign "Electrostatic sensitive devices"
4 Connection for drive and sensor; with Q-545.x40 models: Sub-D 15 (m)

connector, with Q-545.x4U models: Su b-D 15 (f) connector
5 ESD protection: ESD protective cap with Q-545.x40; nonconductive foil with

Q-545.x4U
6 Type plate p. 11
7 Cable exit for sensor connection
8 Base body

10 Version: 1.0.0 MP135E Q-545 Stage

3 Product Description

Figure 3: Direction of motion of the platform of the Q-545, Q-545.240 used as example

The arrow in the figure above shows the direction of motion on positive commanding.

3.3 Product Labeling

Figure 4: Example for models with sensor: Product labeling and type plate of the Q-545.240 stage

Position Labeling Description

A, C
B, C

Q-545 Stage MP135E Version: 1.0.0 11

Manufacturer's logo
CE conformity mark

3 Product Description

Position Labeling Description

B, C

B

C

C 113064246

C Q-545.240

C
C WWW.PIMICOS.COM Manufacturer's address (website)

3.4 Scope of Delivery

Warning sign "Observe manual!"
Symbol for the protective earth conductor,

marks the protective earth c onnec ti on of the
Q-545 (p. 23)

Warning sign "Electrostatic sensitive devices"
Serial number (example), individual for each

Q-545
Meaning of the places (counting from left):

1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive numbers

Product name (example), the characters
following the period refer to the model

Old equipment disposal

The Q-545 is delivered with the following components:

Item ID Components

Q-545 Linear positioning stage as specified in the order (p. 7)

Screw set for mounting the Q-545, consisting of:

5861500010

 2 dowel pins A2 2.5 m6 x 5 ISO 8734
 4 socket head cap screws A2 M2.5x5 ISO 4762

MP139EK Short instructions for Q-5xx / Q-6xx PIShift stages

Only for models without sensor:

7202500042-0015

Air-side adapter cable for connection to the E-870 drive
electronics, Sub-D 15 (f) to Mini-DIN 4 (m), 0.3 m

12 Version: 1.0.0 MP135E Q-545 Stage

3 Product Description

Item ID Components

Only for models with sensor:

7202500043-0015

Only for models suitable for operation to 10-9 hPa:

5604500041

3.5 Accessories

Order
number

E-873.UHV1

E-873.UHV2

Air-side adapter cable for connection to the E-871 controller,
Sub-D 15 (f) to HD Sub-D 15 (m) and HD Sub-D 15 (f), 0.3 m

Adapter for operation outside of a vacuum chamber,
Sub-D 15 (m/m)

Description

Air-side extension cable from vacuum feedthrough or Q-545.xx0 to
the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m),
1 m

Air-side extension cable from vacuum feedthrough or Q-545.xx0 to
the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m),
2 m

Air-side extension cable from vacuum feedthrough or Q-545.xx0 to

E-873.UHV3

the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m),
3 m

For Q-545.xx0 models only (suitable for use in a vacuum to 10-6 hPa):

Order
number

C-815.VF

Description

Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/f),
including C815T0003 Technical Note

Q-545 Stage MP135E Version: 1.0.0 13

3 Product Description

Order
number

Q-145.1001

Description

Adapter bracket for vertical mounting of Q-545.1x0 stages. Material:
Aluminum (3.3206), anodized; mass: 42 g; includes:

 2 dowel pins A2 2.5 m6 x 4 ISO 2338
 4 socket head cap screws A2 M2.5x8 ISO 4762

Adapter bracket for vertical mounting of Q-545.2x0 stages. Material:
Aluminum (3.3206), anodized; mass: 49 g; includes:

Q-145.200

 2 dowel pins A2 2.5 m6 x 4 ISO 2338
 4 socket head cap screws A2 M2.5x8 ISO 4762

For Q-545.xxU models only (suitable for use in a vacuum to 10-9 hPa):

Order
number

C-815.VFU1

Description

Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/m),
DN40CF

C-815.VFU3

C-815.VFU6

C-815.VFU15

Q-145.10U1

Vacuum feedthrough (drive and sensor signals), 3 x Sub-D 15 (m/m),
DN63CF

Vacuum feedthrough (drive and sensor signals), 6 x Sub-D 15 (m/m),
DN100CF

Vacuum feedthrough (drive and sensor signals),
15 x Sub-D 15 (m/m), DN160CF

Adapter bracket for vertical mounting of Q-545.1xU stages. Material:
Aluminum (3.3206), uncoated; mass: 42 g; includes:

 2 dowel pins A2 2.5 m6 x 4 ISO 2338
 4 socket head cap screws A2 M2.5x8 ISO 4762

14 Version: 1.0.0 MP135E Q-545 Stage

3 Product Description

Order
number

Q-145.20U

Description

Adapter bracket for vertical mounting of Q-545.2xU stages. Material:
Aluminum (3.3206), uncoated; mass: 49 g; includes:

 2 dowel pins A2 2.5 m6 x 4 ISO 2338
 4 socket head cap screws A2 M2.5x8 ISO 4762

 To order, contact our customer service department (p. 59).

3.6 Suitable Electronics

Electronics Suitable for

Order Number Description

Stage without
sensor

Q-545.x00
Q-545.x0U

Stage with
sensor

Q-545.x40
Q-545.x4U

E-870.10

E-870.11

E-870.1G

E-870.21

E-870.2G

PIShift Piezomotor / PiezoMike
Drive Electronics, 1 Channel,
OEM Board

PIShift Piezomotor / PiezoMike
Drive Electronics, 1 Channel,
OEM Board with Connector
Strip

PIShift Piezomotor / PiezoMike
Drive Electronics, 1 Channel,
Bench-Top Device

PIShift Piezomotor / PiezoMike
Drive Electronics, 2 Channels,
OEM Board with Connector
Strip

PIShift Piezomotor / PiezoMike
Drive Electronics, 2 Channels,
Bench-Top Device











Q-545 Stage MP135E Version: 1.0.0 15

3 Product Description

Electronics Suitable for

Order Number Description

PIShift Piezomotor / PiezoMike

E-870.41

Drive Electronics , 4 Channels,
OEM Board with Connector
Strip

PIShift Piezomotor / PiezoMike

E-870.4G

Drive Electronics, 2 Channels,
Bench-Top Device

E-871.1A1

Q-Motion Controller, 1
Channel, USB Interface

 To order, contact our customer service department (p. 59).

3.7 Technical Features

Stage without
sensor

Q-545.x00
Q-545.x0U





Stage with
sensor

Q-545.x40
Q-545.x4U



3.7.1 Linear Encoder (Sensor)

Some of the Q-545 models are equipped with an optical linear encoder. For the
encoder resolution, refer to the table in the "Specifications" section (p. 61).

Optical linear encoders measure the actual position directly (direct metrology).
Therefore, errors occurring in the drivetrain, such as nonlinearity, backlash or elastic
deformation, cannot influence the measurement of the position.

3.7.2 Reference Point S witch

The Q-545 models equipped with a sensor have an optical reference point switch.
The commands that use the reference signal are described in the user manual of the

controller and/or in the corresponding software manuals.

16 Version: 1.0.0 MP135E Q-545 Stage

3 Product Description

3.7.3 ID Chip

Q-545 models with sensor contain an ID chip in the connector.
The following data is stored as parameters on the ID chip:

 Information on the stage: Type, serial number, date of manufacture, version of

the hardware

 Settings for the sensor: Interpolation rate, corrections of hysteresis as well as

of phase and offset, gain values
When switched on or rebooted, controllers from PI read the data from the ID chip.
For more information on the ID chip recognition, see the manual of the controller used.

Q-545 Stage MP135E Version: 1.0.0 17

4 Unpacking

4

Unpacking

NOTICE

Electrostatic hazard

Touching the pins in the Sub-D 15 connection of models equipped with sensor can
damage electrostatic (also: ESD-) sensitive components of the Q-545. For this
reason, these models are supplied with ESD protection:

− Q-545.x40: ESD protection cap on the connector (m)

− Q-545.x4U: Electrically nonconductive foil on the connector (f)

 Remove the ESD protection from the connection only when you connect the

Q-545 to the controller.

INFORMATION

When handling the vacuum version of the stage, attention must be paid to
appropriate cleanliness. At PI, all parts are cleaned before assembly. During
assembly and measurement, powder-free gloves are worn. In addition, the stage is
wipe cleaned afterwards and then shrink-wrapped twice in vacuum-compatible film.

 Only touch the stage with powder-free gloves.
 If necessary, wipe the stage clean after unpacking.

1. Unpack the Q-545 with care.

2. If present, do not remove the ESD protection from the connection of the
Q-545.

3. Compare the contents with the items listed in the contract and the packing list.

4. Inspect the contents for signs of damage. If there is any sign of damage or
missing parts, contact PI immediately.

5. Keep all packaging materials and the ESD protection in case the product
needs to be returned.

Q-545 Stage MP135E Version: 1.0.0 19

5 Installation

Connecting the Q-545 to the Electronics ..................................................................... 38

NOTICE

5

Installation

In this Chapter

General Notes on Installation ...................................................................................... 21

Mounting the Q-545 on a Surface and Connecting It to a Protective Earth Conductor

..................................................................................................................................... 23

Setting Up a Multi-Axis System ................................................................................... 26

Affixing the Load to the Q-545 ..................................................................................... 35

5.1 General Notes on Installation

Figure 5: Accessible when the moving platform is driven out: Ceramic rod of the PIShift drive,

example Q-545.140

Malfunction due to soiling!

Any type of soiling; e.g., dust, oil, lubricant or condensation, will render the Q-545
inoperable.

 Keep the Q-545 free from dirt and condensation.
 Avoid touching the ceramic rod of the drive.

Q-545 Stage MP135E Version: 1.0.0 21

5 Installation

NOTICE

Electrostatic hazard

Touching the pins in the Sub-D 15 connection of models equipped with sensor can
damage electrostatic (also: ESD-) sensitive components of the Q-545. For this
reason, these models are supplied with ESD protection:

− Q-545.x40: ESD protection cap on the connector (m)

− Q-545.x4U: Electrically nonconductive foil on the connector (f)

 Remove the ESD protection from the connection only when you connect the

Q-545 to the controller.

NOTICE

Heating up of the Q-545 during operation!

The heat produced during operation of the Q-545 can affect your application.

 Install the Q-545 so that the application is not impaired by the dissipated heat.
 Ensure sufficient ventilation at the place of installation.
 Make sure that the complete bottom side of the Q-545 is in contact with the

surface on which the Q-545 is mounted.

NOTICE

Unintentional changes in position with vertical mounting!

If the load exceeds the self-locking of the drive when the stage is mounted vertically,
unintentional changes in the position of the moving platform occur. Unintentional
changes in position of the moving platform can damage the drive, the load or the
environment.

 When the stage is mounted vertically, make sure that the installed load is lower

than the self-locking of the drive.

NOTICE

Damage from unsuitable cables!

Unsuitable cables can damage the electronics.
 Only use cables provided by PI for connecting the Q-545 to the electronics.

INFORMATION

For optimum repeatablity, all components must be firmly affixed to each other.

22 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

INFORMATION

When handling the vacuum version of the stage, appropriate cleanliness must be
ensured.

 Only touch the stage with powder-free gloves.
 If necessary, wipe the stage clean.

INFORMATION

The positive direction of motion of the axis is given in the product vie w (p. 9).

5.2 Mounting the Q-545 on a Surface and Connecting It to a Protective Earth Conductor

NOTICE

Protruding screw heads!

Protruding screw heads can damage the Q-545.
 Ensure that the screw heads do not protrude from countersunk holes so that

they do not interfere with the stage motion.

NOTICE

Warping of the Q-545 due to mounting on uneven surfaces!

Mounting the Q-545 on an uneven surface can warp the Q-545. Warping reduces the
accuracy.

 Mount the Q-545 on an even surface. The recommended evenness of the

surface is ≤2 µm.

 For applications with large temperature changes:

Only mount the Q-545 on surfaces that have the same or similar thermal
expansion properties as the Q-545.

Q-545 Stage MP135E Version: 1.0.0 23

5 Installation

INFORMATION

The electrical contact of the Q-545 to the protective earth conductor is established
via the surface, on which the Q-545 is mounted.

 The corresponding contact surfaces must be sufficiently conductive.
 The protective earth conductor is connected to the surface on which the Q-545 is

mounted.

 The screws are secured against unintentional loosening; e.g., with threadlocker.

INFORMATION

 Observe the applicable standards for mounting the protective earth conductor.

Figure 6: Example Q-545.140, left: View from below; right: View from top

1 Two locating holes on the bottom side of the stage are used for alignment on a surface.
2 The stage is mounted on a surface using four M2.5 screws.

Prerequisites

 You have read and understood the general not es on ins tallati on (p. 21).
 The Q-545 is disconnected from the electronics.
 You have provided a suitable surface (for the required position and depth of

the holes for accommodating the screws and locating pins, see "Dimensions"
(p. 65)):

− The surface must be connected to the protective earth conductor.

24 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

− Two locating holes with ∅2.5 mm H7 and four M2.5 mounting holes are
available in the surface.

− The contact surfaces to the bottom side of the stage have to be
sufficiently conductive to ensure the proper functioning of the protective
earth conductor.

− For applications with large temperature changes: The surface should have
the same thermal expansion properties as the Q-545 (e.g., surface made
of aluminum).

− The evenness of the surface is ≤2 µm.

 You have accounted for the space required to route cables without bending

and according to regulations.

Tools and accessories

 5861500010 screw set from the scope of delivery of the Q-545 (p. 12):

− 2 dowel pins 2.5 m6 x 5 ISO 8734, for use as locating pins

− 4 socket head cap screws M2.5x5 ISO 4762

 Suitable tools for fastening the screws
 Threadlocker

Mounting the Q-545 on a surface and connecting it to a protective earth conductor

1. Align the Q-545 on the surface using the locating pins:
a) Introduce the two locating pins into the locating holes on the bottom side

of the Q-545 (see figure above) or in the surface.

b) Place the Q-545 on the surface so that the locating pins are inserted into

the corresponding locating holes on the other side.

2. Mount the Q-545 on the surface using four M2.5 screws.
a) Manually displace the moving platform of the Q-545 until two of the four

countersunk holes in the base body are accessible.
b) Insert a screw into each of the two countersunk holes.
c) Tighten the screws with a maximum torque of 72 Ncm each.
d) Make sure that the screw heads do not protrude from the countersunk

holes.
e) Repeat the steps a) to d) for the other two countersunk holes in the base

body of the Q-545.

3. Secure the screws against unintentional loosening; e.g., with threadlocker.

Q-545 Stage MP135E Version: 1.0.0 25

5 Installation

4. Make sure that the contact resistance at all connection points relevant for
mounting the protective earth conductor is <0.1 Ω at 25 A.

5. Check that the Q-545 is affixed firmly to the surface.

5.3 Setting Up a Multi-Axis System

The Q-545 can be used in multi-axis systems.
Typical combinations:

 XY system (p. 27)
 Z system (p. 30) (XZ or XYZ combination)

Figure 7: Example for an XYZ system: Three Q-545.140 mounted using an adapter bracket

1 Lower stage
2 Middle stage

3 Q-145.1001 adapter bracket (use in a vacuum to 10
4 Upper stage

-6

hPa)

26 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

5.3.1 General Information on Setting Up a Multi-Axis System

NOTICE

Impermissibly high load on the stages!

In a multi-axis system, the stage used for the Y and/or Z axis must also be moved.
Impermissibly high loads impair the motion and can damage the stages.

 Include the masses of the moved stages and of the adapter bracket (p. 13) in the

calculation of the load to be moved.

 For all stages in a multi-axis system: Do not exceed the maximum permissible

load.

 If a stage is mounted vertically, make sure that the installed load is lower than

the self-locking of the drive.

5.3.2 Setting Up an X Y Sy stem

NOTICE

Screws and locating pins that are too long!

Screws and locating pins that are inserted too deeply damage the Q-545.

 Observe the depth of the mounting holes (p. 65) in the moving platform.
 Observe the maximum depth for the insertion of locating pins (p. 65) into the

moving platform.

 Only use screws and locating pins of the correct length for the respective holes.

INFORMATION

Any model of the Q-545 can be used as lower or upper stage.

Designations in these instructions:

 Lower stage: Forms the basis of the multi-axis system (X axis); is mounted

on a surface

 Upper stage: Forms the Y axis of the multi-axis system; is mounted on the

lower stage rotated by 90°

Q-545 Stage MP135E Version: 1.0.0 27

5 Installation

Figure 8: Example: Mounting a Q-545.140 on a Q-545.140

1 Lower stage
2 2 dowel pins 2.5 m6 x 5 ISO 8734; for use as locating pins
3 Upper stage
4 4 socket head cap screws M2.5x5 ISO 4762

Prerequisites

 You have read and understood the general not es on ins tallati on (p. 21).
 The stages are disconnected from the electronics.
 You have properly mounted the lower stage on a surface and connected it to

a protective earth conductor (p. 23).

 You have accounted for the space required to route cables without bending

and according to regulations.

28 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

Tools and accessories

 5861500010 screw set from the scope of delivery of the Q-545 (p. 12):

− 2 dowel pins 2.5 m6 x 5 ISO 8734; for use as locating pins

− 4 socket head cap screws M2.5x5 ISO 4762

 Suitable tools for fastening the screws

Setting up an XY system

1. Insert the two locating pins into the locating holes on the bottom side of the
upper Q-545 or in the moving platform of the lower Q-545 (see figure above).

2. Place the upper Q-545 on the lower Q-545 so that the locating pins are
inserted into the corresponding locating holes on the other side.

3. Mount the upper Q-545 to the lower Q-545 using four M2.5 screws:
a) Manually displace the moving platform of the upper Q-545 until two of the

four countersunk holes in the base body are accessible.
b) Insert a screw into each of the two countersunk holes.
c) Tighten the screws with a maximum torque of 72 Ncm each.
d) Make sure that the screw heads do not protrude from the countersunk

holes.
e) Repeat steps a) to d) for the other two countersunk holes in the base

body of the upper Q-545.

4. Check that the upper Q-545 is affixed firmly to the lower Q-545.

Q-545 Stage MP135E Version: 1.0.0 29

5 Installation

5.3.3 Setting Up a Z Sy stem with an Adapter Brack et

NOTICE

Inserting screws and locating pins too deeply!

Screws and locating pins that are inserted too deeply damage the Q-545.

 Observe the depth of the mounting holes (p. 65) in the moving platform.
 Observe the maximum depth for the insertion of locating pins (p. 65) into the

moving platform.
 Only use screws and locating pins of the correct length for the respective holes.
Observe the following order when you align the adapter bracket on the lowerstage:

1. Insert the locating pins into the short side of the adapter bracket from below.

2. Make sure that the locating pins are inserted up to the limit stop.

3. Place the adapter bracket on the moving platform of the lower stage.

Designations in these instructions:

 Lower stage: X axis in an XZ combination; Y axis in an XYZ combination. The

stage to which the upper stage is mounted with an adapter bracket.

 Upper stage: Forms the Z axis of the multi-axis system; is mounted on the

lower stage in a vertical alignment using an adapter br acket.

Recommended Z Systems

The following combinations of adapter brackets and stages are recommended:

30 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

Combination of
stages and adapter
bracket:

2 Q-545.1xx +

Q-145.1001 or
Q-145.10U1

2 Q-545.2xx +

Orientation of adapter bracket and upper stage to the lower stage:
0°

90°

180°

270°

Q-145.1001 or
Q-145.10U1

2 Q-545.2xx +

Q-145.200 or
Q-145.20U

Not possible. The
moving platforms of
the stages collide with
each other.

Not possible. The
moving platforms of
the stages collide with
each other.

Q-545 Stage MP135E Version: 1.0.0 31

5 Installation

Prerequisites

 You have read and understood the general not es on ins tallati on (p. 21).

 You have read and understood the general notes on setting up a multi-axis

system (p. 27).

 You have accounted for the space required to route cables without bending

and according to regulations.

 If you set up an XZ combination: You have properl y mount ed the lo wer stage

on a surface.

 If you set up an XYZ combination: You have properly mounted the stages for

the X and Y axis. (p. 27)

Tools and accessories

 Suitable adapter bracket; for combination options, see

"Recommended Z Systems" (p. 30). The following brackets are available as
optional accessory (p. 13):

-6

− For Z systems suitable for use in a vacuum to 10
Q-145.200 adapter bracket.

− For Z systems suitable for use in a vacuum to 10
Q-145.20U adapter bracket.

For the diameter and position of the holes in the adapter bracket, see
"Dimensions" (p. 65)

hPa: Q-145.1001 or

-9

hPa: Q-145.10U1 or

 Mounting accessories from the scope of delivery of the adapter bracket:

− 2 dowel pins 2.5 m6 x 4, for use as locating pins

− 4 socket head cap screws M2.5x8

 Mounting accessories from the scope of delivery of the stage (p. 12):

− 2 dowel pins 2.5 m6 x 5, for use as locating pins

− 4 socket head cap screws M2.5x5

 Allen wrench AF 2

32 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

Figure 9: Example: Setting up an XZ system consisting of two Q-545.140 and a Q-145.200 or

Q-145.20U adapter bracket

1 Lower stage
2 2 dowel pins 2.5 m6 x 4 for use as locating pins; from the scope of

delivery of the adapter bracket

3 Q-145.200 adapter bracket (for operation in a vacuum to 10

Q-145.20U (for operation in a vacuum to 10

4 4 socket head cap screws M2.5x8 for mounting the adapter bracket on

the lower stage, from the scope of delivery of the adapter bracket

5 2 dowel pins 2.5 m6 x 5 for use as locating pins, from the scope of

delivery of the stage
6 Upper stage
7 4 socket head cap screws M2.5x5 for mounting the upper stage on the

adapter bracket, from the scope of delivery of the stage

-9

hPa)

-6

hPa) or

Q-545 Stage MP135E Version: 1.0.0 33

5 Installation

Figure 10: Adapter bracket with screws and locating pins. The locating pins for alignment on the lower stage

must be inserted into the bracket from below and up to the limit stop.

Setting up a Z system

1. Mount the upper stage to the long side of the adapter bracket:
a) Align the upper stage so that the cable exit points away from the origin of

the sides of the adapter bracket; i.e., upwards in the Z system.

b) Insert the 2.5 m6 x 5 locating pins into the locating holes on the bottom of

the upper stage or in the long side of the adapter bracket.

c) Place the stage on the long side of the adapter bracket so that the

locating pins are inserted into the corresponding locating holes on the
other side.

d) Mount the stage using four M2.5x5 screws according to step 3 of the

instructions in "Setting up an XY System" (p. 27).

2. Mount the short side of the adapter bracket to the moving platform of the
lower stage:

a) Insert the 2.5 m6 x 4 locating pins into the locating holes in the short side

of the adapter bracket from below and up to the limit stop (see figure
above).

34 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

b) If you set up a Z system consisting of a Q-145.1xx adapter bracket and

two Q-545.2xx stages: Align the adapter bracket so that the moving
platforms of the stages cannot collide with each other; for permissible
orientations, refer to "Recommended Z Systems" (p. 30).

c) Place the short side of the adapter bracket on the moving platform of the

lower stage so that the locating pins are inserted into the corresponding

locating holes in the platform.
d) Insert four M2.5x8 screws into the mounting holes of the adapter bracket.
e) Tighten the screws with a maximum torque of 72 Ncm each.

3. Check that the adapter bracket and the upper stage are affixed firmly.

5.4 Affixing the Load to the Q-545

NOTICE

Impermissibly high forces and torques!

Impermissibly high forces and torques that are applied to the moving platform can
damage the Q-545.

 For affixing type and mass of the load, observe the maximum permissible forces

according to the specifications (p. 61).

 Avoid tilting torques at the moving platform.

NOTICE

Screws and locating pins that are too long!

Screws and locating pins that are inserted too deeply damage the Q-545.

 Observe the depth of the mounting holes (p. 65) in the moving platform.
 Observe the maximum depth for the insertion of locating pins (p. 65) into the

moving platform.

 Only use screws and locating pins of the correct length for the respective holes.

Q-545 Stage MP135E Version: 1.0.0 35

5 Installation

Figure 11: Q-545.14x
The arrows mark the following mounting holes in the moving platform of the Q-545.1xx:

For aligning the load:
White arrows: Locating holes Ø 2.5 mm H7, depth 2.5 mm
For affixing the load:
Dark-gray arrows: M2.5 threaded holes, depth 5 mm
Light-gray arrows: M2.5 threaded holes, depth 4 mm
Black arrows: M2 threaded holes, depth 4 mm

Figure 12: Q-545.24x
The arrows mark the following mounting holes in the moving platform of the Q-545.2xx:

For aligning the load:
White arrows: Locating holes Ø 2.5 mm H7, depth 1.4 mm
For affixing the load:
Dark-gray arrows: M2.5 threaded holes, depth 4 mm
Light-gray arrows: M2.5 threaded holes, depth 4 mm
Black arrows: M2 threaded holes, depth 4 mm

36 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

Prerequisites

 You have read and understood the general not es on ins tallati on (p. 21).
 You have properly mounted the stage on a surface (p. 23) or on a Q-545

(p. 26).

 The stage is disconnected from the electronics.
 You have prepared the load so that it can be affixed to the moving platform

(for the required position and depth of the holes for accommodating the
screws and locating pins, see "Dimensions" (p. 65)):

− The distance between the center of gravity of the load and the center of

the moving platform is as small as possible in all directions.

− Four points are provided for affixing the load to the moving platform.

− If you use locating pins for aligning the load: You have made two locating

holes of Ø 2.5 mm H7 in the load for accommodating locating pins.

Tools and accessories

 Screws of suitable length (p. 65). Options:

− M2 screws

− M2.5 screws

 Suitable tools for fastening the screws
 Optional: 2 locating pins of suitable length, for locating holes with

Ø 2.5 mm H7

Affixing the load to the Q-545

1. Align the load on the Q-545 so that the mounting holes in the load and the
holes in the moving platform overlap.

If you use locating pins to ali gn the load:
a) Insert the locating pins into the locating holes in the moving platform or in

the load.

b) Place the load on the moving platform so that the locating pins are

inserted into the corresponding locating holes on the other side.

2. Affix the load using the screws.

− Maximum torque for M2 screws: 35 Ncm

− Maximum torque for M2.5 screws: 72 Ncm

3. Check that the load is affixed firmly to the moving platform of the stage.

Q-545 Stage MP135E Version: 1.0.0 37

5 Installation

5.5 Connecting the Q-545 to the Electronics

The electronics to be used for operating the Q-545 depends on the presence of a
sensor (see also "Suitable Electronics" (p. 15)):

 Models without sensor (Q-545.x0x): E-870 drive electronics (p. 38)
 Models with sensor (Q-545.x4x): E-871 (p. 42) controller

INFORMATION

The Q-545 and the electronics can be delivered as a pre-configured system.
 If a connection assignment is given on the labels of the Q-545 and/or electronics,

observe this assignment when connecting the Q-545.

5.5.1 Connecting the Q-545 to the Drive Electronics

Prerequisites

 You have read and understood the general not es on ins tallati on.
 You have installed the E-870 drive electronics (p. 15).
 You have read and understood the user manual of the drive electronics.
 The drive electronics are switched off; i.e., not connected to the power

source.

Tools and accessories

 If the drive electronics have a Mini-DIN 4 socket (models: E-870.x1,

E-870.xG): 7202500042-0015 adapter cable, in the scope of delivery (p. 12)

 If the drive electronics have a connector strip (model E-870.10): Suitable

adapter from Sub-D 15 (f) to the connector strip:

− The pin assignment of the J10 connector strip (2x4 pin) can be found in

the E870T0001 Technical Note.

− If you need a suitable adapter, contact our customer service department

(p. 59).

 If a Q-545.x0U is to be operated at atmospheric pressure:

5604500041 adapter, in the scope of delivery (p. 12)

 If the Q-545 is to be operated in a vacuum:

38 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

− E-873.UHVx extension cable, available as optional accessory (p. 13)

− Suitable vacuum feedthrough, available as optional accessory (p. 13):

For Q-545.x00: C-815.VF
For Q-545.x0U: C-815.VFUx

− Suitable tools for installing the vacuum feedthrough

Connecting the Q-545.x0x to E-870 drive electronics with Mini-DIN 4 socket for operation at atmospheric pressure

Figure 13: Connection diagram for Q-545.x00 and drive electronics with Mini-DIN 4 socket, for operation at

atmospheric pressure
1 Drive electronics with Mini-DIN 4 socket (here E-870.xG)

2 7202500042-0015 adapter cable
3 Q-545.x00

Figure 14: Connection diagram for Q-545.x0U and drive electronics with Mini-DIN 4 socket, for operation at

atmospheric pressure
1 Drive electronics with Mini-DIN 4 socket (here E-870.xG)

2 7202500042-0015 adapter cable
3 5604500041 adapter
4 Q-545.x0U

Q-545 Stage MP135E Version: 1.0.0 39

5 Installation

1. Q-545.x0U only: Connect the Sub-D 15 (f) connector with the
5604500041 adapter.

2. Connect the Q-545 with the adapter cable:

− Q-545.x 00: Con nec t the Su b-D 15 (m) connector of the Q-545 with the

Sub-D 15 (f) connector of the adapter cable.

− Q-545.x0U: Connect the free Sub-D 15 (m) connector side of the

5604500041 adapter with the Sub-D 15 (f) connector of the adapter cable.

3. Connect the adapter cable with the drive electronics:

− Connect the Mini-DIN 4 connector of the adapter cable with the

Mini-DIN 4 socket of the drive electronics.

4. Take suitable measures to secure the connections against accidental
disconnection.

Connecting the Q-545.x0x to E-870 drive electronics with Mini-DIN 4 socket for operation in a vacuum

Figure 15: Connection diagram for Q-545.x00 and drive electronics with Mini-DIN 4 socket, for operation in

a vacuum to 10

1 Drive electronics with Mini-DIN socket (here E-870.xG)
2 7202500042-0015 adapter cable
3 E-873.UHVx extension cable
4 C-815.VF vacuum feedthrough
5 Q-545.x00

-6

hPa

40 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

Figure 16: Connection diagram for Q-545.x0U and drive electronics with Mini-DIN 4 socket, for operation in

a vacuum to 10

1 Drive electronics with Mini-DI N socket (here E-870.xG)
2 7202500042-0015 adapter cable
3 E-873.UHVx extension cable
4 C-815.VFUx vacuum feedthrough (here C-815.VFU1)
5 Q-545.x0U

-9

hPa

1. Before connecting for the first time: Install the vacuum feedthrough:
a) Obtain the dimensions from the corresponding dimensional drawing

(p. 71).

b) Make sure that the vacuum feedthrough is oriented correctly:

C-815.VF: Vacuum side = Sub-D 15 (f) socket

C-815.VFUx: See dimens io nal dra wing (p. 71)
c) Provide a suitable opening for the vacuum chamber.
d) Install the vacuum feedthrough.

2. Connect the stage, vacuum feedthrough, cables, and drive electronics to each
other as shown in the connection diagram above.

3. Take suitable measures to secure the connections against accidental
disconnection.

Connecting the Q-545.x0x to E-870 drive electronics with connector strip

If a Q-545.x0x is to be operated at atmospheric pressure:

 Connect the Q-545.x0x to the connector strip of the drive electronics using a

suitable adapter.

Q-545 Stage MP135E Version: 1.0.0 41

5 Installation

If a Q-545.x0x is to be oper ated in a vacuum:

1. Follow the instructions in "Connecting the Q-545.x0x to E-870 drive
electronics with Mini-DIN 4 socket for operation in a vacuum" to install the
vacuum feedthrough and to connect the stage, vacuum feedthrough, and
cables.

2. Connect the 7202500042-0015 adapter cable to the connector strip of the
drive electronics using a suitable adapter.

5.5.2 Connecting the Q-545 to the Controller

Prerequisites

 You have read and understood the general not es on ins tallati on.
 You have installed the E-871 controller (p. 15).
 You have read and understood the user manual of the controller.
 The controller is switched off; i.e., the power supply is not connected to the

power socket via the power cord.

Tools and accessories

 7202500043-0015 Y adapter cable, in the scope of delivery (p. 12)
 If a Q-545.x4U is to be operated at atmospheric pressure: 5604500041

adapter, in the scope of delivery (p. 12)

 If the Q-545 is to be operated in a vacuum:

− E-873.UHVx extension cable, available as optional accessory (p. 13)

− Suitable vacuum feedthrough, available as optional ac ces s or y (p. 13):

For Q-545.x40: C-815.VF
For Q-545.x4U: C-815.VFUx

− Suitable tools for installing the vacuum feedthrough

42 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

Connecting the Q-545.x4x to the E-871 controller for operation at atmospheric pressure

Figure 17: Connection diagram for Q-545.x40 and controller, for operation at atmospheric pressure

1 Controller (here E-871.1A1)
2 7202500043-0015 Y adapter cable
3 Q-545.x40

Figure 18: Connection diagram for Q-545.x4U and controller, for operation at atmospheric pressure

1 Controller (here E-871.1A1)
2 7202500043-0015 Y adapter cable
3 5604500041 adapter
4 Q-545.x4U

1. Remove the ESD protection from the Q-545:

− Q-545.x40: Remove the ESD protective cap from the Sub-D 15 (m)

connector.

− Q-545.x4U: Remove the protective foil from the Sub-D 15 (f) connector.

Q-545 Stage MP135E Version: 1.0.0 43

5 Installation

2. Q-545.x4U only: Connect the Sub-D 15 (f) connector with the 5604500041
adapter.

3. Connect the Q-545 with the Y adapter cable:

− Q-545.x 40: Con nec t the Su b-D 15 (m) connector of the Q-545 with the

Sub-D 15 (f) connector of the Y adapter cable.

− Q-545.x4U: Connect the free Sub-D 15 (m) connector side of the

5604500041 adapter to the Sub-D 15 (f) connector of the Y adapter cable.

4. Connect the Y adapter cable with the E-871 controller:
a) Connect the HD Sub-D 15 (m) connector for motor connection to the

corresponding socket of the controller (see user manual of the controller).

b) Connect the HD Sub-D 15 (f) connector for sensor connection with the

corresponding panel plug of the controller (see user manual of the
controller).

5. Secure the connections with the integrated screws against accidental
disconnection.

Connecting the Q-545.x4x to the E-871 controller for operation in a vacuum

6

Figure 19: Connection diagram for Q-545.x40 and controller, for operation in a vacuum to 10

1 Controller (here E-871.1A1)
2 7202500043-0015 Y adapter cable
3 E-873.UHVx extension cable
4 C-815.VF vacuum feedthrough
5 Q-545.x40

-

hPa

44 Version: 1.0.0 MP135E Q-545 Stage

5 Installation

Figure 20: Connection diagram for Q-545.x4U and controller, for operation in a vacuum to 10-9 hPa

1 Controller (here E-871.1A1)
2 7202500043-0015 Y adapter cable
3 E-873.UHVx extension cable
4 C-815.VFUx vacuum feedthrough (here C-815.VFU1)
5 Q-545.x4U

1. Before connecting for the first time: Install the vacuum feedthrough:
a) Obtain the dimensions from the corresponding dimensional drawing

(p. 71).

b) Make sure the vacuum feedthrough is oriented correctly:

C-815.VF: Vacuum side = Sub-D 15 (f) socket

C-815.VFUx: See dim ens io nal dra w ing (p. 71).
c) Provide a suitable opening for the vacuum chamber.
d) Install the vacuum feedthrough.

2. Remove the ESD protection from the Q-545:

− Q-545.x40: Remove the ESD protective cap from the Sub-D 15 (m)

connector.

− Q-545.x4U: Remove the protective foil from the Sub-D 15 (f) connector.

3. Connect the stage, vacuum feedthrough, cables, and controller as shown in
the connection diagram above.

4. Secure the connections with the integrated screws against accidental
disconnection.

Q-545 Stage MP135E Version: 1.0.0 45

6 Start-Up and Operation

Starting Up the Stage .................................................................................................. 50

6

Start-Up and Operation

In this Chapter

General Notes on Start-Up and Operation .................................................................. 47

6.1 General Notes on Start-Up and Operation

CAUTION

Risk of electric shock if the protective earth conductor is not connected!

If a protective earth conductor is not or not properly connected, dangerous touch
voltages can occur on the Q-545 in the case of malfunction or failure of the system. If
touch voltages exist, touching the Q-545 can result in minor injuries from electric
shock.

 Connect the Q-545 to a protective earth conductor (p. 23) before start-up.
 Do not remove the protective earth conductor during operation.
 If the protective earth conductor has to be removed temporarily (e. g. in the case

of modifications), reconnect the Q-545 to the protective earth conductor before
starting it up again.

CAUTION

Burning from hot surface!

The surface of the Q-545 and its vicinity can heat up during operation. Touching the
Q-545 and surrounding parts can result in minor injuries from burning.

 Cool the Q-545 so that the temperature of its surface and surrounding parts does

not exceed 65 °C.

 If sufficient cooling is not possible: Make sure that the hot Q-545 and its

surrounding parts cannot be touched.

 If sufficient cooling and protection against contact are not possible: Mark the

danger zone in accordance with the legal regulations.

Q-545 Stage MP135E Version: 1.0.0 47

6 Start-Up and Operation

NOTICE

Overheating during continuous operation!

The highest velocity is achieved at maximum operating frequency; however, the
Q-545 can overheat during continuous operation as a result.

 Observe the recommended operating time according to the operating frequency

in step mode (p. 64).

 Ensure sufficient ventilation at the place of installation.

NOTICE

Damage from collisions!

Collisions can damage the stage, the load to be moved and the environment.
 Make sure that no collisions are possible between the stage, the load to be

moved and the environment in the motion range of the stage.

 Do not place any objects in areas where they can get caught by moving parts.
 Stop the motion immediately if an electronics malfunction occurs.

NOTICE

Operating frequency too high!

An operating frequency that is too high can cause damage to the Q-545.

 Only operate the Q-545 with controllers/drivers and original accessories from PI.
 Do not exceed the operating frequency range (p. 63) for which the Q-545 is

specified.

48 Version: 1.0.0 MP135E Q-545 Stage

6 Start-Up and Operation

NOTICE

Considerable wear due to high operating frequency!

A high operating frequency in step mode can cause considerable wear on the
mechanical system.

 When the E-870 drive electronics are used:

− If necessary, reduce the values of the parameters PIShift Steps per
Second (ID 0x1F000600) and PIShift Frequency (ID 0x1F000400) on the

drive electronics, see documentation of the drive electronics.

 When the E-871 controller is used:

− When the PIShift Open-Loop Driving Mode (ID 0x1F000702) parameter
has a value of 0 (step mode) and motions in open-loop operation are initiated
with the SMO command: The step frequency depends directly from the
control value commanded with SMO and is limited by the value of the
Maximum Motor Output (ID 0x9) parameter. If necessary, reduce the
commanded control value and the value of the Maximum Motor Output
parameter.

 Reduce the operating time with a high operating frequency (p. 64).
 Stop the motion immediately if an electronics malfunction occurs.

NOTICE

Operating voltage too high or incorrectly connected!

Operating voltages that are too high or incorrectly connected can cause damage to
the Q-545.

 Only operate the Q-545 with controllers/drivers and original accessories from PI.
 Do not exceed the operating voltage range (p. 63) for which the Q-545 is

specified.

 Only operate the Q-545 when the operating voltage is properly connected; see

"Pin Assignment" (p. 76).

NOTICE

Reduced lifetime of the piezo actuato r due to permanently high voltage!

The permanent application of a high static voltage to piezo actuators leads to a
considerable reduction in the lifetime of the piezo ceramic of the stage.

 When the Q-545 is not used, switch off the electronics.

Q-545 Stage MP135E Version: 1.0.0 49

6 Start-Up and Operation

INFORMATION

NOTICE

Destruction of the piezo actuators by electric flashovers!

Using the Q-545 in environments that increase the electrical conductivity can lead to
the destruction of the piezo actuators of the drive by electric flashovers. Electric
flashovers can be caused by moisture, high humidity, liquids and conductive
materials (e.g. metal dust). In addition, electric flashovers can also occur in certain
air pressure ranges due to the increased conductivity of the air.

 Avoid operating the Q-545 in environments that can increase the electrical

conductivity.

 Only operate the Q-545 within the permissible ambient conditions and

classifications (p. 63).

 For operation in vacuum below 0.1 hPa:

Do not operate the Q-545 during evacuation.

NOTICE

Increased wear due to small working range!

Using a small working range permanently increases the wear in this area.
 If possible: Select another part of the travel range for the working range in

regular intervals.

6.2 Starting Up the Stage

The electronics to be used for operating the Q-545 depends on the presence of a
sensor (see also "Suitable Electronics" (p. 15)):

 Models without sensor (Q-545.x0x): E-870 drive electronics (p. 51)
 Models with sensor (Q-545.x4x): E-871 controller (p. 53)

If the parameters of the electronics are not adapted to the Q-545 and the application
(load, orientation of the Q-545), the Q-545 will either not move or not move
satisfactorily.

 Only operate the Q-545 when the parameters of the electronics have been

correctly set.

 Pay particular attention to the parameter settings for operating voltage and

operating frequency.

50 Version: 1.0.0 MP135E Q-545 Stage

6 Start-Up and Operation

INFORMATION

The PIShift drive develops noises in step mode. The noise development depends on
the current step frequency.

6.2.1 Starting Up the Q-545. x0x with the E-870 Drive Electronics

INFORMATION

The values for the parameters of the E-870 drive electronics are listed in a table in
this section.

For optimum drive performance, the values of the following parameters should be
identical:

 PIShift Steps per Second (ID 0x1F000600)
 PIShift Frequency (ID 0x1F000400)

Prerequisites

 You have read and understood the general notes on start-up and operation

(p. 47).

 You have read and understood the documentation of the E-870 dri ve

electronics (E870T0001 Technical Note or E870T0002 Technical Note).

 You have properly installed (p. 21) the stage.
 The E-870 drive electronics have been properly installed and all connections

on the E-870 have been set up (see E870T0001 Technical Note or
E870T0002 Technical Note).

Starting up the Q-545.x0x with the E-870 drive electronics

1. Make sure that the parameters of the E-870 drive electronics have been set
correctly; for values, see table below.

2. Provide the control signal required for operating the system. Details can be
found in the E870T0001 or E870T0002 Technical Note.

3. If necessary: Adapt the PIShift Steps per Second parameter
(ID 0x1F000600) and the PIShift Frequency parameter (ID 0x1F000400) to
your application (see also "Operating Time" (p. 64)).

Q-545 Stage MP135E Version: 1.0.0 51

6 Start-Up and Operation

The following table lists the settings for the parameters of the E-870 drive electronics.
Further information on the parameter settings is found in the "Operating Time" section
(p. 64).

Parameter Parameter in E-870 drive electronics Value Unit

Operating voltage,
upper limit

Operating voltage,
lower limit

Charging current for
forward motion

Charging for
backward motion

Operating frequency
in step mode

Duty cycle of the
current source during
the output of one
period of the
modified sawtooth
signal in step mode

Number of steps the
stage moves per
second at the set
operating frequency.

PIShift Upper Supply Voltage
ID 0x1F000000

PIShift Lower Supply Voltage
ID 0x1F000100

PIShift Forward Current
ID 0x1F000200

PIShift Backward Current
ID 0x1F000300

PIShift Frequency
ID 0x1F000400

PIShift Charge Cycle
ID 0x1F000500

PIShift Steps per Second
ID 0x1F000600

48 V

0 V

0.6 A

-0.6 A

20000 Hz

1 -

20000

52 Version: 1.0.0 MP135E Q-545 Stage

6 Start-Up and Operation

6.2.2 Starting Up the Q-545. x4x with the E-871.1A1 Controller

INFORMATION

INFORMATION

If you use the software included in the scope of delivery of the E-871 controller, the
operating parameters can be loaded from the PIMicosStages2.dat stage database.
The entries in the stage database are updated regularly.

 Download the PI Update Finder from the PI website (http://www.update.pi-

portal.ws) and use it to update the PIMicosStages2.dat stage databas e on your
PC.

For further information, see the user manual of the E-871 controller.

For optimum drive performance in step mode, the Maximum Motor Output (ID 0x9)
parameter in the PIMicosStages2.dat stage database takes a value of 15 kHz.

For further information, see "Operating Time" (p. 64) and user manual of the E-871
controller.

Prerequisites

 You have read and understood the general notes on start-up and operation

(p. 47).

 You have properly installed (p. 21) the stage.
 You have read and understood the user manual of the controller.
 You have read and understood the manual of the PC software.
 The controller and the required PC software have been installed. All

connections on the controller have been set up (see user manual of the
controller).

Starting up the Q-545.x4x with the E-8 71 controller

1. Start up the stage (see E-871 user manual).
The start-up comprises the following steps:

− Selecting the stage type

− Defining the reference point of the axis

− Commanding of first motions for testing

Q-545 Stage MP135E Version: 1.0.0 53

6 Start-Up and Operation

2. If necessary: Adapt the Maximum Motor Output (ID 0x9) parameter to your
application (also refer to "General Notes on Start-Up and Operation" (p. 47)
and "Operating Time" (p. 64)).

The E-871 user manual describes the start-up using the PIMikroMove
program.

54 Version: 1.0.0 MP135E Q-545 Stage

7 Maintenance

Cleaning the Q-545 ..................................................................................................... 55

NOTICE

7

Maintenance

In this Chapter

General Notes on Maintenance ................................................................................... 55

Performing a Maintenance Run ................................................................................... 55

7.1 General Notes on Maintenance

Damage due to improper maintenance!

Improper maintenance can lead to misalignment and failure of the Q-545.
 Only loosen screws according to the instructions in this manual.

7.2 Performing a Maintenance Run

The maintenance run must cover the entire travel range.

 Perform the maintenance run after every 10 million steps.

7.3 Cleaning the Q-545

Prerequisites

 You have disconnected the stage from the electronics.

Cleaning the stage

Only when the stage is not used in vacuum:

 When necessary, clean the surfaces of the stage with a cloth that is lightly

dampened with a mild cleanser or disinfectant.

Only when the stage is used in vacuum:

 Only touch the stage with powder-free gloves.
 If necessary, wipe the stage clean.

Q-545 Stage MP135E Version: 1.0.0 55

8 Troubleshooting

8

Troubleshooting

Problem Possible causes Solution

Functional
impairment after
system
modification

No or limited
motion

 Drive electronics

or controller has
been replaced

 The stage has

been replaced

Cable not connected
correctly or defective

Excessive load  Reduce the load. Observe the information in the

E-870 drive electronics from PI:
 Adapt the parameters of the drive electronics in the

E-870 Control PC program to the Q-545 (see
"Starting up the Q-545 .x 0x with the E-870 Drive
Electronics" (p. 51) and Technical Note E870T0001

and/or E870T0002).
E-871 controller from PI:
 Load the parameter set from the stage database that

corresponds to the Q-5 45 model.
 If necessary: In the PIMikroMove PC program, set

the parameters of the controller so that they

correspond to the application (load, orientation) of the

Q-545 model (see user manual of the controller).
 Check the connecting cable(s)

"Technical Data" section (p. 61).
 If the stage is mounted vertically, make sure that the

installed load is lower than the self-locking of the

drive.

Parameters of the
drive electronics
incorrectly set

Operating voltage too
low

Unfavorable operating
frequency for step
mode

Warped base body  Mount the Q-545 on an even surface. The

Q-545 Stage MP135E Version: 1.0.0 57

 See the "Functional impairment after system

modification" problem in this table.

 Provide an operating voltage of 48 V.

 Adapt the operating frequency for the step mode

(for details, see "Starting Up the Stage" (p. 50) and

manual of the electronics used).

recommended evenness of the surface is 2 µm.

8 Troubleshooting

Problem Possible causes Solution

Unfavorable load
mounting

Unsuitable ambient
conditions

Wear of the drive  Replace the Q-545 and make sure that the operating

Drive is blocked  Carefully release the blockage by manually moving

During affixing of a
load or an adapter
bracket on the moving
platform of the stage:
Dowel pin was pushed
too deeply into the
moving platform

 Observe the maximum torque when affixing the load

(p. 35).
 Keep the distance between the center of gravity of

the load and the center of the moving platform as

small as possible in all directions.
 Only operate the Q-545 in a clean environment and

within the permissible ambient conditions (p. 63).

parameters of the electronics are adapted to the

stage.

the moving platform back and forth.

 Contact our customer service department (p. 59).
 Contact our customer service department (p. 59).

If the problem that occurred with your system is not listed in the table above or cannot
be solved as described, contact our customer service department (p. 59).

58 Version: 1.0.0 MP135E Q-545 Stage

9 Customer Service

9

Customer Service

For inquiries and orders, contact your PI sales engineer or send us an e-mail
([email protected]).

 If you have questions concerning your system, have the following information

ready:

− Product codes and serial numbers of all products in the system

− Firmware version of the controller (if present)

− Version of the driver or the software (if present)

− Operating system on the PC (if present)

 If possible: Take photographs or make videos of your system that can be sent

to our customer service department if requested.

The latest versions of the user manuals are available for download (p. 3) on our
website.

Q-545 Stage MP135E Version: 1.0.0 59

10 Technical Data

Pin Assignment ............................................................................................................ 76

10

Technical Data

In this Chapter

Specifications .............................................................................................................. 61

Operating Time ............................................................................................................ 64

Dimensions .................................................................................................................. 65

10.1 Specifications

10.1.1 Data Table

Preliminary Data Q-545.100 /

Q-545.10U

Motion and
Positioning

Active axis X X X X
Travel 13 13 26 26 mm
Integrated sensor - Linear encoder - Linear encoder
Sensor resolution - 1 - 1 nm
Min. incremental

motion

13 mm travel
range, open-loop,
UHV version
Q-545.10U

500 (open-loop) 6 500 (open-loop) 6 nm typ.

Q-545.140 /
Q-545.14U

13 mm travel
range,
resolution 1 nm,
UHV version
Q-545.14U

Q-545.200 /
Q-545.20U

26 mm travel
range, open-loop,
UHV version
Q-545.20U

Q-545.240 /
Q-545.24U

26 mm travel
range,
resolution 1 nm,

UHV version
Q-545.24U

Unit Tolerance

Unidirectional
repeatability

Angular crosstalk ±50 ±50 ±80 ±80 µrad
Linear crosstalk ±1 ±1 ±2 ±2 µm

Q-545 Stage MP135E Version: 1.0.0 61

- 0.018 - 0.018 µm

10 Technical Data

Preliminary Data Q-545.100 /

Q-545.10U

Q-545.140 /
Q-545.14U

Q-545.200 /
Q-545.20U

Q-545.240 /
Q-545.24U

Unit Tolerance

Maximum velocity 10 10 10 10 mm/s min.
Reference point

- Optical - Optical

switch

Mechanical
Properties

Load capacity 10 10 10 10 N
Holding force,

8 8 8 8 N min.

de-energized
Push / pull force 8 8 8 8 N typ.

Drive Properties
Motor Type Piezoelectric

inertia drive

Miscellaneous
Operating

0 to 40 0 to 40 0 to 40 0 to 40 °C

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Piezoelectric
inertia drive

temperature range
Material Aluminum Aluminum Aluminum Aluminum

Cable length Q-545.100: 2

Q-545.10U: 1

Q-545.140: 2
Q-545.14U: 1

Q-545.200: 2
Q-545.20U: 1

Q-545.240: 2
Q-545.24U: 1

Connector Sub-D 15 Sub-D 15 Sub-D 15 Sub-D 15

Recommended

E-870 E-871, E-873 E-870 E-871, E-873

controller / driver

The Q-545 stage series replaces the LPS-45 series.

The specifications were determined on a surface with an evenness of 2 µm.

m

62 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

10.1.2 Maximum Ratings

The Q-545 stage is designed for the following operating data:

Maximum operating
voltage

Maximum operating
frequency

48 V 20 kHz 30 W

10.1.3 Ambient Conditions and Classifications

The following ambient conditions and classifications must be observed for the Q-545:
Area of application For indoor use only

Maximum altitude 2000 m
Air pressure Q-545.xx0:

1100 hPa to 10
Q-545.xxU:
1100 hPa to 10

Relative humidity Highest relative humidity 80 % for temperatures up

to 31 °C, non-condensing
Decreasing linearly to 50 % relative humidity at

40 °C, non-condensing

-6

-9

Maximum power
consumption

hPa

hPa

Operating temperature 0 °C to 40 °C

Storage temperature -20 °C to 70 °C

Transport temperature -20 °C to 70 °C
Maximum bakeout

temperature for Q-545.xxU:
Maximum bakeout

temperature for Q-545.xx0:
Overvoltage category (acc. to

120 °C, for 12 hours, only in switched-off state

80 °C, for 2 hours, only in switched-off state

II
EN 60664-1:2007 / VDE
0110-1)

Q-545 Stage MP135E Version: 1.0.0 63

10 Technical Data

Protection class
(acc. to EN 61140 /
VDE 0140-1)

Degree of pollution
(acc. to EN 60664-1:2007 /
VDE 0110-1)

Degree of protection
(acc. to IEC 60529)

10.2 Operating Time

The operating time and the operating frequency in step mode affect the lifetime of the
stage. In order to prevent overheating and high wear, the operating time with the given
operating frequency and 100 % duty cycle must not exceed the values given in the
following table.

Operating frequency in Hz1 Operating time2 / 48 V, ±0.6 A

20000 10 s (max.)
10000 20 s (max.)

I

1

IP20

5000 60 s (max.)
≤ 1000

1

For the relevant parameters, see "Starting Up the Stage" (p. 50) and the user manual

120 s (max.)

of the electronics used.

2

With 100 % duty cycle without heat dissipation

64 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

10.3 Dimensions

10.3.1 Q-545.10x

Dimensions in mm
Characters used to separate decimal places:

 Depth and diameter of holes: Period
 All other dimensions: Comma

Figure 21: Q-545.10x

Q-545 Stage MP135E Version: 1.0.0 65

10 Technical Data

10.3.2 Q-545.14x

Dimensions in mm
Characters used to separate decimal places:

 Depth and diameter of holes: Period
 All other dimensions: Comma

Figure 22: Q-545.14x

66 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

10.3.3 Q-545.20x

Dimensions in mm
Characters used to separate decimal places:

 Depth and diameter of holes: Period
 All other dimensions: Comma

Figure 23: Q-545.20x

Q-545 Stage MP135E Version: 1.0.0 67

10 Technical Data

10.3.4 Q-545.24x

Dimensions in mm
Characters used to separate decimal places:

 Depth and diameter of holes: Period
 All other dimensions: Comma

Figure 24: Q-545.24x

68 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

10.3.5 Q-145.1001 and Q-145.10U1 Adapter Brackets

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 25: Q-145.1001 adapter bracket, dimensions of the Q-145.10U1 adapter bracket are identical

Q-545 Stage MP135E Version: 1.0.0 69

10 Technical Data

10.3.6 Q-145.200 and Q-145.20U Adapter Brackets

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 26: Q-145.200 adapter bracket, dimensions of the Q-145.20U adapter bracket are identical

70 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

10.3.7 Vacuum Feedthroughs

Available vacuum feedthroughs:

 C-815.VF (p. 71)
 C-815.VFU1 (p. 72)
 C-815.VFU3 (p. 73)
 C-815.VFU6 (p. 74)
 C-815.VFU15 (p. 75)

C-815.VF vacuum feedthrough for 10-6 hPa

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 27: C-815.VF vacuum feedthrough Sub-D 15 (m/f)

Q-545 Stage MP135E Version: 1.0.0 71

10 Technical Data

C-815.VFU1 vacuum feedthrough for 10-9 hPa

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 28: C-815.VFU1 vacuum feedthrough, Sub-D 15 ( m/m)

1 Vacuum side
2 Air side

72 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

C-815.VFU3 vacuum feedthrough for 10-9 hPA

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 29: C-815.VFU3 vacuum feedthrough, Sub-D 15 ( m/m)

1 Vacuum side
2 Air side

Q-545 Stage MP135E Version: 1.0.0 73

10 Technical Data

C-815.VFU6 vacuum feedthrough for 10-9 hPa

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 30: C-815.VFU6 vacuum feedthrough, Sub-D 15 ( m/m)

1 Vacuum side
2 Air side

74 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

C-815.VFU15 vacuum feedthrough for 10-9 hPa

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 31: C-815.VFU15 vacuum feedthrough, Sub-D 15 ( m/m)

1 Vacuum side
2 Air side

Q-545 Stage MP135E Version: 1.0.0 75

10 Technical Data

2

10.4 Pin Assignment

10.4.1 Q-545.xx0

Connector: Sub-D 15 (m)

The Sub-D 15 (m) connector transmits the signals of the drive and, for the models with
sensor, in addition the signals of the sensor and of the ID chip.

Figure 32: Sub-D 15 (m) connector

Pin Signal1 Function Direction

1 REF - 2 Reference signal differential (-) Output
2 Motor (-) Motor signal differential (-) Input
3 Motor (+) Motor signal differential (+) Input
4 V
5 - - ­6 ID chip data 2 ID chip data Output
7 SIN - 2 Encoder A (-) Output
8 COS - 2 Encoder B (-) Output
9 Motor (-) Motor signal differential (-) Input
10 GND GND GND
11 Motor (+) Motor signal differential (+) Input
12 - - ­13 REF + 2 Reference signal differential (+) Output

Supply voltage (+5 V) Input

DD

14 SIN + 2 Encoder A (+) Output
15 COS + 2 Encoder B (+) Output

76 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

2

1

The "-" sign indicates that the corresponding pin has not been assigned.

2

Only for models with sensor. Not assigned for models without sensor.

The cable shield is connected to the connector shell.

10.4.2 Q-545.xxU

Connector: Sub-D 15 (f)

The Sub-D 15 (f) connector transmits the signals of the drive and, for the models with
sensor, in addition the signals of the sensor and of the ID chip.

Figure 33: Sub-D 15 (f) connector

Pin Signal1 Function Direction

1 COS - 2 Encoder B (-) Output
2 SIN - 2 Encoder A (-) Output
3 ID chip data 2 ID chip data 2 Output
4 - - ­5 V

Supply voltage (+5 V) Input

DD

6 Motor (+) Motor signal differential (+) Input
7 Motor (-) Motor signal differential (-) Input
8 REF - 2 Reference signal differential (-) Output
9 COS + 2 Encoder B (+) Output
10 SIN + 2 Encoder A (+) Output
11 REF + 2 Reference signal differential (+) Output

Q-545 Stage MP135E Version: 1.0.0 77

10 Technical Data

Pin Signal1 Function Direction

12 - - ­13 Motor (+) Motor signal differential (+) Input
14 GND GND GND
15 Motor (-) Motor signal differential (-) Input

1

The "-" sign indicates that the corresponding pin has not been assigned.

2

Only for models with sensor. Not assigned for models without sensor.

The cable shield is connected to the connector shell.

10.4.3 C-815.VF Vacuum Feedthrough

Sub-D 15 (m/f)

Figure 34: Vacuum side: Sub-D 15 (f) socket

Figure 35: Air side: Sub-D 15 (m) panel plug

78 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

2

Vacuum
side (f)

Air side (m)

Pin Signal Function Pin

1 REF - 2 Reference signal differential (-) 1
2 Motor (-) Motor signal differential (-) 2
3 Motor (+) Motor signal differential (+) 3
4 V

Supply voltage (+5 V) 4

DD

5 - - 5
6 ID chip data 2 ID chip data 6
7 SIN - 2 Encoder A (-) 7
8 COS - 2 Encoder B (-) 8
9 Motor (-) Motor signal differential (-) 9
10 GND GND 10
11 Motor (+) Motor signal differential (+) 11
12 - - 12
13 R EF + 2 Reference signal differential (+) 13
14 SI N + 2 Encoder A (+) 14
15 COS + 2 Encoder B (+) 15

Q-545 Stage MP135E Version: 1.0.0 79

10 Technical Data

10.4.4 C-815.VFUx Vacuum Feedthrough

Sub-D 15 (m/m)

Figure 36: C-815.VFUx vacuum feedthrough

1 Vacuum side
2 Air side

Figure 37: Sub-D 15 (m) panel plug

Vacuum side

Air side

Pin Signal Function Pin

1 COS - Encoder B (-) 8
2 SIN - Encoder A (-) 7
3 ID chip data ID chip data 6
4 - - 5
5 VDD Supply voltage (+5 V) 4
6 Motor (+) Motor signal differential (+) 3
7 Motor (-) Motor signal differential (-) 2

80 Version: 1.0.0 MP135E Q-545 Stage

10 Technical Data

Vacuum side
Pin Signal Function Pin

8 REF - Reference signal differential (-) 1
9 COS + Encoder B (+) 15
10 SIN + Encoder A (+) 14
11 REF + Reference signal differential (+) 13
12 - - 12
13 Motor (+) Motor signal differential (+) 11
14 GND GND 10
15 Motor (-) Motor signal differential (-) 9

10.4.5 5604500041 Adapter

Sub-D 15 (m/m)

The adapter is only required if a Q-545.xxU model is to be operated at atmospheric
pressure (i.e., without a vacuum feedthrough).

Air side

Figure 38: Sub-D 15 (m) connector

Q-545 Stage MP135E Version: 1.0.0 81

10 Technical Data

Figure 39: Pin assignment of the 5604500041 adapter

82 Version: 1.0.0 MP135E Q-545 Stage

11 Old Equipment Disposal

11

Old Equipment Disposal

In accordance with EU law, electrical and el ect ronic eq uipment may not be disposed
of in EU member states via the municipal residual waste.

Dispose of your old equipment accord ing to internat ion al, nat ion al, and local ru les and
regulations.

In order to fulfil the responsibility as the product manufacturer, PI miCos GmbH
undertakes environmentally correct disposal of all old PI miCos equipment made
available on the market after 13 August 2005 without charge.

Any old PI miCos equipment can be sent free of charge to the following address:

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach, Germany

Q-545 Stage MP135E Version: 1.0.0 83

12 EC Declaration of Conformity

12

EC Declaration of Conformity

For the Q-545, an EC Declaratio n of Co nf orm it y has been iss ued in acc or dance w ith
the following European directives:

2006/95/EC, Low Voltage Directive
2004/108/EC, EMC Directive
2011/65/EU, RoHS Directive
The applied standards certifying the conformity are listed below.
Safety (Low Voltage Directive): EN 61010-1:2010
EMC: EN 61326-1:2013
RoHS: EN 50581:2012

Q-545 Stage MP135E Version: 1.0.0 85